CN115031530A - High-cleanliness baking equipment - Google Patents

Abstract

A high-cleanliness baking device comprises a furnace tube device, a layer frame unit and a heating furnace with at least one transverse gas injection tube. The furnace tube device is provided with a furnace base assembly. The furnace base assembly is provided with a furnace base outer frame and a furnace bottom base. The furnace base outer frame is provided with an outer frame body with an opening at the bottom and a lower runner. The furnace bottom base is provided with a bottom sealing ring which can be pressed on the bottom surface of the outer frame body. The lower runner extends along the length direction of the bottom sealing ring and is used for guiding out heat energy of the outer frame body. The layer frame unit is provided with a plurality of layered carrying platforms which are arranged longitudinally. The transverse gas injection pipe is provided with a plurality of gas outlet holes which are arranged longitudinally. The air outlet holes are respectively aligned between every two adjacent layered carrying platforms and transversely blow out high-temperature air so as to adjust and control the temperature between the layered carrying platforms, so that the heating degree of the to-be-heated objects placed on the layered carrying platforms is close, and the purpose of improving the process yield is achieved.

Description

High-cleanliness baking equipment

Technical Field

The present invention relates to a roasting apparatus, and more particularly to a high-cleanliness roasting apparatus suitable for heat-treating an object to be heated.

Background

In order to meet the demand for larger and faster computing capabilities of electronic products, the dimensions of circuit patterns on chips have been reduced in the semiconductor industry, and thus circuit pattern defects caused by dust adhesion during the semiconductor manufacturing process have been more significantly affected. In order to overcome the circuit pattern defect problem in the semiconductor manufacturing process, the requirement for cleanliness of the equipment in the semiconductor manufacturing process is also increased. However, in the heat treatment process, in the heating process of the conventional wafer, since the wafer is heat-treated in the heating furnace by thermal convection, the dust in the heating furnace falls to the surface of the wafer along with the circulation of the air flow, and the circuit pattern is damaged. In addition, during the heating process, the thermal convection gas flow cannot be locally controlled, so that the wafers in different areas of the heating chamber are heated to different degrees, which may affect the yield.

Disclosure of Invention

The invention aims to provide a high-cleanliness baking device capable of improving the process yield.

The high-cleanliness baking equipment comprises a heating furnace. The heating furnace comprises a furnace tube device, a layer frame unit and at least one transverse gas injection tube.

The furnace tube device is provided with a furnace tube body, a heating component group which is arranged at the inner side of the furnace tube body and can be controlled to generate heat, and a furnace base assembly which is positioned at the bottom of the furnace tube body. The furnace base assembly is provided with a furnace base outer frame communicated with the bottom of the furnace tube body and communicated to the outside, a furnace bottom base movably sealed on the furnace base outer frame, and at least one exhaust pipe communicated with the furnace tube body and used for exhausting gas to the outside. The furnace base outer frame is provided with an outer frame body and a lower-layer runner embedded in the outer frame body. The bottom surface of the outer frame body forms a bottom opening. The hearth base has a bottom sealing ring surrounding the periphery of the bottom opening. The bottom sealing ring can be pressed on the bottom surface of the outer frame body to seal the furnace tube device. The lower runner is adjacent to the bottom opening, extends along the length direction of the bottom sealing ring, and is used for circulating heat-conducting fluid so as to lead out the heat energy of the outer frame body.

The layer frame unit is movably arranged in the furnace tube device and is provided with a frame body and a plurality of layer carrying platforms which are arranged on the frame body in a longitudinal arrangement mode. The layered stages are each adapted to carry an object to be heated.

The transverse gas injection pipe is vertically arranged in the furnace tube device and is adjacent to the layer frame unit, and is provided with a plurality of gas outlet holes which are arranged longitudinally. The air outlet holes are respectively aligned between every two adjacent layering carrying platforms and can transversely blow out high-temperature air so as to adjust and control the temperature between the layering carrying platforms. When the air outlet blows air transversely and the exhaust pipe exhausts air below the furnace tube body, the air in the furnace tube body can flow from top to bottom.

The high-cleanliness baking equipment comprises a heating furnace, a hot air inlet pipe group and a horizontal air injection pipe, wherein the hot air inlet pipe group is arranged in the furnace pipe device and is provided with a plurality of horizontal air injection pipes which are respectively vertically arranged around the layer frame unit in a surrounding manner.

The high-cleanliness baking equipment comprises at least one cold air inlet module, a cold air exhaust module and an inner furnace unit, wherein the cold air inlet module penetrates through a furnace tube body and is used for guiding air to enter, the cold air exhaust module penetrates through the furnace tube body and is used for guiding air to flow to the outside, the inner furnace unit is arranged in the furnace tube body and covers the layer frame unit and the hot air inlet tube group, and is sealed with the outer frame of the furnace base, a cooling chamber is formed in a space between the inner furnace unit and the furnace tube body, the cooling chamber is communicated with the cold air inlet module and the cold air exhaust module, air can enter the furnace tube body under the guidance of the cold air inlet module, flows through the cooling chamber and is exhausted from the cold air exhaust module, and the temperature of the inner furnace unit is reduced.

According to the high-cleanliness baking equipment, the top surface of the outer frame body is also provided with a top opening opposite to the bottom opening, the inner furnace unit is provided with an inner furnace body and at least one top sealing ring arranged between the inner furnace body and the outer frame body, the top sealing ring surrounds the periphery of the top opening to seal the inner furnace body and the outer frame body, the outer frame of the furnace base is also provided with an upper flow channel which is embedded in the outer frame body and positioned above the lower flow channel, and the upper flow channel is adjacent to the top opening, extends along the length direction of the top sealing ring and is used for flowing of heat-conducting fluid so as to lead out heat energy of the outer frame body.

According to the high-cleanliness baking equipment, the cold air inlet module is arranged at the bottom of the furnace tube body, the cold air exhaust module is arranged at the top of the furnace tube body, and when the cold air inlet module and the cold air exhaust module act, gas in the cooling chamber can flow from bottom to top.

According to the high-cleanliness baking equipment, the furnace tube device is further provided with a plurality of thermocouple assemblies which are circumferentially arranged around the shelf unit, and the thermocouple assemblies are used for sensing the temperature around the shelf unit.

According to the high-cleanliness baking equipment, the heating component group is provided with a plurality of ceramic electric heating plates annularly arranged along the furnace tube body, and the ceramic electric heating plates can be controlled to regulate the temperature respectively.

The high-cleanliness baking equipment of the invention is characterized in that the furnace base assembly is also provided with two connecting pieces respectively connected with the left side and the right side of the furnace bottom base, the high-cleanliness baking equipment also comprises two lifting mechanisms, the lifting mechanisms are respectively arranged below the left side and the right side of the heating furnace, each lifting mechanism comprises a dustproof shell, a lifting cylinder, at least two guide wheels and a dustproof belt, each dustproof shell forms a longitudinally extending slideway, each lifting cylinder is provided with a cylinder body and a piston block which is arranged in the corresponding slideway and can move up and down relative to the cylinder body, one end of the piston block far away from the cylinder body is respectively connected with the connecting pieces, so that the furnace bottom base can move up and down along with the actuation of the piston block, the guide wheels of each lifting mechanism are respectively and transversely arranged at the top and the bottom of the slideway, each guide wheel can use the cross shaft as the axle center pivot, and each dustproof belt encircles corresponding elevating system's the guide wheel, and the double-phase opposite end of dustproof belt links up respectively in corresponding link up piece, the dustproof belt cladding is in corresponding piston block periphery, and can follow along with link up piece displacement and pivot, make the opening of slide can receive dustproof belt shields.

In the high-cleanliness baking equipment, each lifting mechanism further comprises at least one air extraction unit penetrating through the bottom of the corresponding dustproof shell, so that air in the dustproof shell is exhausted from top to bottom.

The high-cleanliness baking equipment further comprises a gas filtering device, wherein the gas filtering device comprises an outer barrel structure communicated with the exhaust pipe and a condensation structure with high heat transfer characteristic, the condensation structure is not communicated with the outer barrel structure and is used for guiding out heat energy in the outer barrel structure, and the gas in the outer barrel structure and the condensation structure generate heat exchange to reduce the temperature and condense part of components in the gas.

The invention has the beneficial effects that: the air outlet holes of the transverse air injection pipes are respectively aligned with the layered bearing platforms to transversely blow high-temperature gas, so that the temperature between the layered bearing platforms is controlled, the heating degree of the to-be-heated materials placed on the layered bearing platforms is close, and the purpose of improving the process yield is achieved. In addition, when the air outlet is used for blowing air transversely and the exhaust pipe exhausts air below the furnace tube body, the air in the furnace tube body can be exhausted from top to bottom, so that dust deposited below the furnace tube body is prevented from floating to the layered carrying platform along with the air flow circulating up and down and attaching to the surface of an object to be heated, and the aim of improving the process yield can be achieved. In addition, the openings of the slide ways of the lifting mechanisms are shielded by the dustproof belts, so that dust in the dustproof shells cannot float into the inner furnace body through the bottom openings, the phenomenon that the dust in the inner furnace body rises to pollute an object to be heated can be avoided, and the aim of improving the process yield is fulfilled.

Drawings

Other features and effects of the present invention will be apparent from the embodiments with reference to the accompanying drawings, in which:

FIG. 1 is a schematic view of an embodiment of the high cleanliness baking apparatus of the present invention;

FIG. 2 is a schematic sectional view illustrating the heating furnace of the embodiment;

FIG. 3 is a schematic cross-sectional view of the heating furnace from another perspective;

FIG. 4 is an enlarged view of a portion of FIG. 2, illustrating a connection relationship between a furnace base assembly of the heating furnace and an inner furnace unit;

FIG. 5 is a schematic sectional view from the perspective of FIG. 1, illustrating the connection of the two lifting mechanisms of the embodiment to the hearth base of the heating furnace;

FIG. 6 is a schematic cross-sectional view illustrating the gas filtering device; and

fig. 7 is a schematic view of another state of the high-cleanliness baking apparatus.

Detailed Description

Referring to fig. 1 and 2, a high-cleanliness baking apparatus according to an embodiment of the present invention is shown. The high-cleanliness baking apparatus is suitable for heat treatment of a plurality of objects 9 to be heated, such as wafers, and comprises a heating furnace 1, two lifting mechanisms 2 and a gas filtering device 3.

Referring to fig. 2, the heating furnace 1 includes a furnace tube device 4, a rack unit 5 removably installed in the furnace tube device 4 and adapted to carry the object 9 to be heated, and a hot air inlet tube set 6 installed in the furnace tube device 4. The furnace tube device 4 has a furnace tube body 41, a heating component group 42 which is arranged at the inner side of the furnace tube body 41 and can be controlled to generate heat, a furnace base assembly 43 which is arranged at the bottom of the furnace tube body 41, four groups of cold air inlet modules 44 which are arranged at the bottom of the furnace tube body 41 and can be controlled to act, a cold air outlet module 45 which is arranged at the top of the furnace tube body 41 and can be controlled to act, an inner furnace unit 46 which is arranged in the furnace tube body 41 and covers the layer frame unit 5 and the hot air inlet tube group 6, a cooling chamber 47 which is defined by the outer wall of the inner furnace unit 46 and the inner side of the furnace tube body 41, and a plurality of thermocouple components 48 which are arranged around the layer frame unit 5 in a surrounding manner.

Referring to fig. 2, in the present embodiment, the furnace tube body 41 is in a cylindrical shape with an opening facing downward, but the invention is not limited to this shape. The heating assembly group 42 has a plurality of ceramic electric heating plates (not shown) annularly disposed along the furnace tube body 41. The ceramic electric heating plates can be respectively controlled to adjust the temperature, so that the temperature of each area in the furnace tube body 41 can be adjusted to be approximately consistent, and the heating degree of the objects 9 to be heated in different areas in the furnace tube body 41 is similar. The ceramic electric heating plate can increase the temperature in the furnace tube body 41 in a thermal radiation manner, and compared with a heating manner by introducing hot air, the ceramic electric heating plate can prevent the gas in the furnace tube body 41 from being disturbed up and down due to the influence of thermal convection, so that the flying of dust in the furnace tube body 41 can be reduced. However, the embodiment of the heating module group 42 is not limited to the heat radiation type, and may be a common heat convection type heater, and the inner furnace unit 46 is configured to cover the shelving unit 5 to isolate the air flow between the heating module group 42 and the shelving unit 5, so as to prevent the dust generated by the heating module group 42 from drifting to the shelving unit 5 and affecting the cleanliness of the object 9 to be heated.

Referring to fig. 1 and 2, the furnace base assembly 43 has a furnace base outer frame 431, a furnace base 432, four exhaust pipes 433, and two connecting members 434 connected to the left and right sides of the furnace base 432, respectively. The outer frame 431 is connected to the bottom of the furnace tube body 41, and has an outer frame body 435 penetrating the interior of the furnace tube body 41 and the outside, and a lower flow channel 436 and an upper flow channel 437 embedded in the outer frame body 435, respectively. The bottom surface and the top surface of the outer frame body 435 respectively form a top opening 4351 and a bottom opening 4352 opposite to each other. The lower flow channel 436 and the upper flow channel 437 are channels that are adjacent to the bottom opening 4352 and the top opening 4351, respectively, and extend longitudinally through the outer frame body 435, and the lower flow channel 436 and the upper flow channel 437 are both capable of flowing a heat transfer fluid for conducting heat away from the outer frame body 435. In the embodiment, the lower flow channel 436 and the upper flow channel 437 are used for guiding nitrogen gas at room temperature, but the components of the conductive fluid that can be guided are not limited thereto.

Referring to fig. 2, the hearth base 432 is removably sealed to the outer hearth frame 431 and has a bottom sealing ring 438 surrounding the bottom opening 4352. The bottom seal ring 438 may be press-fitted to the bottom surface of the outer frame body 435 to ensure airtightness between the furnace base outer frame 431 and the furnace bottom base 432. In this embodiment, the bottom seal ring 438 is disposed in a position vertically aligned with the lower flow channel 436, that is, the lower flow channel 436 extends along the length direction of the bottom seal ring 438, so that the lower flow channel 436 can conduct out heat energy of the outer frame body 435 attached to the bottom seal ring 438, and the bottom seal ring 438 is prevented from being thermally deformed due to the thermal conduction of the outer frame body 435. The exhaust pipes 433 are respectively installed on the left and right sides of the outer frame 431 of the furnace base, communicate the interior of the furnace tube body 41 with the outside, and can be used to exhaust the gas inside the furnace tube body 41 to the outside, however, the exhaust pipes 433 may also be respectively installed on the base 432 of the furnace bottom, and similarly can exhaust the gas inside the furnace tube body 41 to the outside. The number of the exhaust pipes 433 is four, but is not limited to a specific number, and may be one, two, three, or five or more.

Referring to fig. 2, the cold air inlet modules 44 respectively penetrate the bottom of the furnace tube body 41 and are used for guiding air to flow into the cooling chamber 47 from the outside. The cool air exhaust module 45 penetrates the top of the furnace tube body 41 and is used for guiding air to flow from the cooling chamber 47 to the outside. When the cold air intake module 44 and the cold air exhaust module 45 are actuated, the air in the cooling chamber 47 can flow from bottom to top, so as to guide out the heat energy of the inner furnace unit 46. In the present embodiment, the cool air intake module 44 and the cool air exhaust module 45 each include a pipeline connected to the cooling chamber 47 and an exhaust fan installed at the pipeline for circulating and guiding the air flow. In addition, in the present embodiment, the cold air intake modules 44 are installed at the bottom of the furnace tube body 41 at equal intervals, so as to uniformly cool the four sides of the inner furnace unit 46. However, the number of the cool air intake modules 44 is not limited to a specific number. On the other hand, the cold air intake module 44 and the cold air exhaust module 45 may be disposed upside down, that is, the cold air intake module 44 is disposed above the cold air exhaust module 45 to discharge the air in the cooling chamber 47 from below, and the embodiments of the cold air intake module 44 and the cold air exhaust module 45 are determined according to actual requirements.

Referring to fig. 3 to 4, the inner furnace unit 46 has an inner furnace body 461, and two top sealing rings 462 disposed between the inner furnace body 461 and the outer frame body 435. The inner furnace body 461 covers the rack unit 5 and the hot air intake pipe group 6 to separate the rack unit 5 and the heating element group 42 from each other, so that dust generated from the heating element group 42 cannot be scattered to the rack unit 5 and affect the cleanliness of the object 9 to be heated. In this embodiment, the inner furnace body 461 is made of quartz, which has the characteristics of high temperature resistance, and can absorb the heat energy in the furnace tube body 41 and radiate the heat energy to the rack unit 5. However, the material of the inner furnace 461 may also be a high temperature resistant material such as aluminum or stainless steel, depending on the actual requirement. In this embodiment, the cross section of the inner furnace body 461 is circular as shown in fig. 3, but the shape is not limited to circular, the cross section of the inner furnace body 461 may also be polygonal, the ceramic electric heating plates of the heating assembly group 42 are spaced by the inner furnace body 461, and the ceramic electric heating plates are uniformly distributed on the peripheral side of the inner furnace body 461, so that each part of the inner furnace body 461 can absorb the heat energy of the ceramic electric heating plates respectively, and further the heat energy is transferred to the layer frame unit 5 in a heat radiation manner from different directions, so as to ensure the uniformity of temperature distribution. The top sealing ring 462 surrounds the top opening 4351 of the outer frame body 435 to ensure the air tightness between the inner furnace body 461 and the outer frame body 435. In this embodiment, the top sealing ring 462 is disposed in alignment with the upper flow channel 437, that is, the upper flow channel 437 extends along the length direction of the top sealing ring 462, so that the upper flow channel 437 can conduct out the heat of the outer frame body 435 contacting the top sealing ring 462, and the top sealing ring 462 is prevented from being deformed by the heat conduction of the outer frame body 435. In this embodiment, the number of the top sealing rings 462 may be one or more than three, depending on the sealing effect between the inner furnace body 461 and the outer frame body 435.

Referring to fig. 2 and 3, the cooling chamber 47 communicates the cold air intake module 44 and the cold air exhaust module 45. The external air can be guided by the cold air intake module 44 to enter the furnace tube body 41, and flow through the cooling chamber 47 and be exhausted from the cold air exhaust module 45, so that the temperature of the inner furnace unit 46 is reduced. In other words, when the heat treatment process of the object 9 to be heated is completed, the object 9 to be heated can be taken out from the inner furnace unit 46 after the temperature of the object 9 to be heated in the inner furnace unit 46 is lowered, so that the time for waiting for the temperature of the object 9 to be heated can be saved by the design of cooling the inner furnace unit 46 using the cooling chamber 47, thereby improving the process efficiency. The thermocouple assembly 48 extends longitudinally upward from the furnace base assembly 43 and is used to sense the temperature around the shelving unit 5. In the present embodiment, the extension lengths of the thermocouple elements 48 are different to sense the ambient temperature of the respective layers of the shelf unit 5.

Referring to fig. 2 and 3, the shelf unit 5 has a shelf body 51, and a plurality of layered carrying platforms 52 which are arranged in a longitudinal direction on the shelf body 51 and are respectively adapted to carry the object 9 to be heated. The frame body 51 is installed above the hearth base 432, and can be moved out of the furnace tube body 41 as the hearth base 432 is moved away from the furnace base outer frame 431, so as to facilitate the loading of the object 9 to be heated on the layered stage 52 or the transfer from the layered stage 52 to another place. In this embodiment, the frame body 51 is implemented by four upright rods symmetrically disposed above the hearth base 432, and each of the layered stages 52 is implemented by four flat plates connected to the upright rods, respectively, and the flat plates are not connected to each other, so that only four corners of each object 9 to be heated are abutted by the flat plates, and the middle part of each object 9 to be heated can be mounted on the shelf unit 5 in a suspended manner.

Referring to fig. 2 and 3, the hot air intake pipe assembly 6 is installed above the hearth base 432 and exposed outside the furnace body 41 as the hearth base 432 moves away from the outer frame 431, and has a plurality of transverse air injection pipes 61, a front longitudinal air injection pipe 62 and a rear longitudinal air injection pipe 63, which are respectively erected and circumferentially installed around the shelving unit 5, and have upward openings. Each transverse gas lance 61 has a plurality of longitudinally arranged gas exit holes 611. The air outlets 611 are respectively aligned between every two adjacent layering carrier 52, and can transversely blow out high-temperature air to adjust and control the temperature between the layering carriers 52. In this embodiment, the hot air inlet pipe groups 6 are for guiding the flow of high temperature nitrogen gas, the number of the transverse air injection pipes 61 is four examples, and the transverse air injection pipes 61 are respectively disposed in two groups on the left and right sides of the rack unit 5, so that the object 9 to be heated is heated more uniformly from four directions. However, the number of transverse gas lances 61 is not limited to a particular number, as required. The openings of the front longitudinal gas injection pipe 62 and the rear longitudinal gas injection pipe 63 are respectively arranged at the front and rear sides of the shelving unit 5, and can blow out high-temperature gas upwards, so that the gas in the furnace tube device 4 flows downwards from the top. In this embodiment, the bottom end of the front longitudinal gas nozzle 62 is connected to the hearth base 432 behind the shelving unit 5, extends longitudinally to the top of the shelving unit 5, then extends toward the front side of the shelving unit 5 along the upper side of the uppermost layered platform 52 as shown in fig. 3, and finally the top end opening of the front longitudinal gas nozzle 62 is provided in front of the shelving unit 5, so that the front longitudinal gas nozzle 62 can blow air toward the front side of the top of the shelving unit 5 without blocking the entrance and exit of the object 9 to be heated from the front side of the shelving unit 5. Further, the bottom ends of the rear longitudinal gas nozzles 63 are also connected to the hearth base 432 behind the shelving unit 5 as are the front longitudinal gas nozzles 62, but differ from the front longitudinal gas nozzles 62 in that the rear longitudinal gas nozzles 63 extend longitudinally from the hearth base 432 to the top rear side of the shelving unit 5. Thus, when the air outlets 611 blow air transversely and the exhaust pipes 433 exhaust air below the inner furnace unit 46, and the front longitudinal gas injection pipes 62 and the rear longitudinal gas injection pipes 63 blow air upwardly, the air in the rack unit 5 can flow from inside to outside, and the air in the inner furnace unit 46 flows from top to bottom, so that dust can be prevented from floating from the outside of the rack unit 5 to the surface of the object 9 to be heated, thereby ensuring the surface cleanliness of the object 9 to be heated.

Referring to fig. 1, 2 and 5, the lifting mechanism 2 is respectively disposed below the left and right sides of the heating furnace 1. Each lifting mechanism 2 includes a dust-proof housing 21, a lifting cylinder 22, four guide wheels 23, a dust-proof belt 24, an air-extracting unit 25, and a lifting assembly and a chain belt, etc., which are not shown in detail, disposed in the dust-proof housing 21 and can also assist in supporting the furnace bottom base 432. Each dust-proof housing 21 forms a longitudinally extending slide 211 and an opening 212 communicating the slide 211 with the outside, and is used for covering the lifting cylinder 22 and the guide wheel 23 to generate friction, so that dust generated by friction is not easy to scatter to the external environment. Each of the openings 212 is used for the corresponding connector 434 to extend into the corresponding slide 211. Each of the lifting cylinders 22 has a cylinder body 221, and a piston block 222 disposed in the corresponding slide 211 and capable of moving up and down relative to the cylinder body 221. The piston blocks 222 are respectively engaged with the engaging members 434 and connected to the corresponding cylinder bodies 221, so that the hearth bases 432 connected to the engaging members 434 can be displaced up and down in accordance with the actuation of the piston blocks 222. The guide wheels 23 of each lifting mechanism 2 are transversely arranged at the top and the bottom of the slide way 211 respectively. Each guide wheel 23 can pivot about a transverse axis. Each dust-proof belt 24 surrounds the guide wheel 23 of the corresponding lifting mechanism 2, and two opposite ends of the dust-proof belt 24 are respectively connected to the top and the bottom of the corresponding connecting member 434, and it should be noted that the width of each dust-proof belt 24 is slightly larger than the width of the corresponding opening 212. As shown in fig. 5, in this embodiment, two of the guide wheels 23 are horizontally disposed at intervals at the bottom of the slideway 211, the bottom of the dustproof belt 24 is made to traverse the two guide wheels 23, the other two guide wheels 23 are also horizontally disposed at intervals at the top of the slideway 211, and the top of the dustproof belt 24 is made to traverse the other two guide wheels 23 in an extending manner, so that the dustproof belt 24 is made to separate the cylinder body 221 from the piston block 222, thereby avoiding friction between the cylinder body 221 and the piston block 222 and reducing generation of dust. Moreover, the upper and lower guide wheels 23 close to the corresponding openings 212 make a part of the dust-proof belt 24 close to the openings 212 and the extending direction of the openings 212 tend to be parallel and almost close to but not contact with the inner surface of the dust-proof housing 21, so that the openings 212 can be shielded and dust generated by friction between the dust-proof belt 24 and the inner surface of the dust-proof housing 21 can be avoided. Of course, the number of the guide wheels 23 may be two, three, or more than five, and the guide wheels are respectively disposed at the top and the bottom of the slide way 211, which is not limited to a specific embodiment.

More specifically, the dust straps 24 wrap around the respective piston block 222. When each of the engaging members 434 is displaced up and down with the actuation of the corresponding piston block 222, the corresponding dust belt 24 is driven to pivot along a circular path in both directions. Thus, when the lifting mechanism 2 is actuated, since each dust-proof strap 24 can pivot along with the displacement of the corresponding joint 434, the corresponding opening 212 can be continuously shielded by the corresponding dust-proof strap 24. That is, only the opening 212 of each dust-proof housing 21 is closed by the corresponding dust-proof belt 24, so that the dust in each dust-proof housing 21 cannot be scattered to the external environment through the opening 212.

Referring to fig. 1 and 5, each of the air-extracting units 25 is installed at the bottom of the corresponding dustproof housing 21, and communicates the inside of the corresponding dustproof housing 21 with the outside, so that the air in the corresponding dustproof housing 21 is exhausted from the corresponding air-extracting unit 25 to the outside from the top to the bottom, thereby reducing the amount of dust in the dustproof housing 21.

Referring to fig. 1 and 6, the gas filtering device 3 includes an outer cylinder structure 31 communicating with the exhaust pipe 433, a condensing structure 32 having high heat transfer (heat transfer) characteristics and not communicating with the outer cylinder structure 31, and a pressure detector (not shown). The outer cylinder structure 31 includes an outer cylinder 311 and a cylinder cover 312 detachably locked to the outer cylinder 311. An exhaust outlet 313 is formed at an end of the outer cylinder 311 away from the cylinder cover 312. In this embodiment, the outer cylinder 311 is a cylindrical cylinder with openings at the top and bottom. The cover 312 covers the top of the outer cylinder 311 to close the opening at the top of the outer cylinder 311. The exhaust outlet 313 is formed at the bottom of the outer cylinder 311 to be away from the top opening of the outer cylinder 311. However, the configuration of the outer cylinder 311 and the embodiment of the opening position of the outer cylinder 311 can be adjusted as required. The cylinder cover 312 forms an air inlet 314 penetrating to the outer cylinder 311 and a detection port 315 penetrating to the outer cylinder 311. The inlet 314 is communicated with the exhaust pipe 433, so that the gas in the inner furnace unit 46 can flow into the outer cylinder 311. The detecting port 315 allows the pressure detector to be inserted into the outer cylinder 311 from the outside, so as to monitor the pressure of the gas flowing in the outer cylinder 311.

The condensing structure 32 includes an inner cylinder 321 extending from the inner side of the cylinder cover 312 toward the exhaust outlet 313, an inflow pipe 322 and an outflow pipe 323 respectively connected to the inner cylinder 321, and a plurality of condensing plates 324 connected to the outer side of the inner cylinder 321 and arranged at intervals along the extending direction of the inner cylinder 321. More specifically, the inner cylinder 321 and the condensing plate 324 are both accommodated in the outer cylinder 311, so that the gas from the inner furnace unit 46 (see fig. 2) and the outer wall of the inner cylinder 321 and the condensing plate 324 perform condensation of dirty components in the gas by heat conduction. In the present embodiment, the inner cylinder 321 and the condensation plate 324 are made of materials with high heat transfer characteristics. The inflow pipe 322 and the outflow pipe 323 penetrate the cover 312, and respectively guide the heat-conducting fluid to flow into the inner cylinder 321, and guide the heat-conducting fluid to flow out from the inner cylinder 321 to guide the heat energy of the inner cylinder 321 and the condensing plate 324 out through the heat-conducting fluid. In this embodiment, the inflow pipe 322 extends from the cylinder cover 312 toward the bottom of the inner cylinder 321. More specifically, the distance from the inflow pipe 322 to the bottom of the inner drum 321 is smaller than the distance from the outflow pipe 323 to the bottom of the inner drum 321. In this way, the heat transfer fluid can directly flow into the bottom of the inner barrel 321 and flow towards the top of the inner barrel 321, so as to ensure that the heat transfer fluid sufficiently flows through the inside of the inner barrel 321, and increase the heat exchange efficiency of the condensation structure 32. In addition, the outer diameter of the inner cylinder 321 is larger than the outer diameters of the inflow pipe 322 and the outflow pipe 323, so as to increase the overall surface area of the condensation structure 32, thereby improving the heat exchange efficiency of the condensation structure 32.

Each of the condensing plates 324 has a communication hole 325 penetrating two opposite plate surfaces of the condensing plate 324, and the communication holes 325 of two adjacent condensing plates 324 are staggered. In this embodiment, on the projection of the condensation plate 324 in the radial direction, the inlet 314 and the communication holes 325 of the adjacent condensation plates 324 are symmetrically formed on the cover 312 and the corresponding condensation plates 324 around the axis of the inner cylinder 321, respectively, and on the projection of the condensation plate 324 in the radial direction, the communication holes 325 of two adjacent condensation plates 324 are symmetrically formed on the condensation plates 324 around the axis of the inner cylinder 321, respectively, and there is only one communication hole 325 for each condensation plate 324, and the gap between the side edge of the condensation plate 324 and the inner surface of the outer cylinder 311 is very small, so that the gas in the outer cylinder 311 can only pass through the communication holes 325 in sequence and finally flows out from the exhaust outlet 313. In other words, the gas in the outer cylinder 311 can pass through the outer cylinder 311 along the longest path to increase the time for the gas in the outer cylinder 311 to exchange heat with the condensing structure 32. However, the number of the communication holes 325 of each of the condensation plates 324 is not limited to a specific number, depending on the actual needs. In the present embodiment, the aperture of each communication hole 325 is larger than the thickness of each condensation plate 324. That is, the gas in the outer cylinder 311 does not undergo compression and temperature reduction by the hole walls of the communication holes 325, i.e., passes through the communication holes 325 in sequence, but reaches the effect of temperature reduction and condensation of a part of components (mainly dirty components caused by volatilization of the coating applied on the object 9 to be heated as shown in fig. 2) in the gas in the outer cylinder 311 by heat exchange with the condensation structure 32, thereby realizing the purification treatment of the gas.

Referring to fig. 1, 2 and 7, in the heat treatment process, the hearth base 432 is separated from the outer frame 431 of the furnace base as shown in fig. 1 and 7 with the operation of the elevating mechanism 2, and is lowered to the bottom of the elevating mechanism 2 together with the layer frame unit 5. At this time, the rack unit 5 is exposed to the outside of the furnace tube body 41, so that the objects 9 to be heated are placed on the layered stages 52, respectively. Subsequently, the hearth base 432 is displaced upward by the operation of the elevating mechanism 2, and is sealed with the furnace base outer frame 431 by the bottom seal ring 438, so that the shelf unit 5 is accommodated in the closed space of the inner furnace unit 46. Subsequently, the ceramic electric heating plates of the heating component group 42 are respectively operated to maintain the temperature in the inner furnace unit 46 within the process temperature range, and the horizontal gas injection pipes 61 of the hot air intake pipe group 6 are respectively driven to inject high-temperature nitrogen gas with different air volumes to the object 9 to be heated in accordance with the temperatures of different areas around the shelving unit 5 sensed by the thermocouple component 48, so as to finely adjust the degree of heating of the object 9 to be heated, and to make the degree of heating of the object 9 to be heated in different areas similar. Meanwhile, the lower flow channel 436 and the upper flow channel 437 guide heat transfer fluid to pass through, so that heat energy conducted to the outer frame body 435 in the inner furnace unit 46 can be conducted out, the outer frame body 435 is locally cooled, and the bottom sealing ring 438 and the top sealing ring 462 are prevented from being deformed due to heating. Finally, after the heating process of the heating furnace 1 is completed, the cold air intake module 44 and the cold air exhaust module 45 are operated to cool the inner furnace unit 46 by heat exchange between the temperature and the temperature in the cooling chamber 47, and the above-described operation is repeated to lower the hearth base 432 to take out the object 9 to be heated.

Referring to fig. 1, 2 and 6, when the heating furnace 1 performs the heat treatment on the object 9 to be heated, the coating layer coated on the object 9 to be heated is heated and volatilized to generate volatile gas, and then the volatile gas in the heating furnace 1 is guided by the exhaust pipe 433, passes through the gas inlet 314, the communication hole 325 and the exhaust outlet 313 in sequence, and is subjected to heat exchange with the inner cylinder 321 and the condensation plate 324 to be cooled and condensed, so that liquid or gel organic substances are formed and remain in the outer cylinder 311. Meanwhile, the inflow pipe 322, the inner cylinder 321, and the outflow pipe 323 can sequentially guide a heat transfer fluid to pass through, so as to guide the heat energy of the inner cylinder 321 and the condensation plate 324 out through the heat transfer fluid, so that the condensation structure 32 is maintained at a temperature lower than that of the volatile gas. It is noted that the organic substances remaining in the outer cylinder 311 may adhere to the plate surface of the condensation plate 324 and the hole wall of the communication hole 325, thereby blocking the communication hole 325. At this time, the pressure detector may display that the pressure value in the outer cylinder 311 is too high, so as to prompt the user to separate the cover 312 from the outer cylinder 311, so that the condensing structure 32 connected to the cover 312 may be taken out from the outer cylinder 311 along with the movement of the cover 312, thereby facilitating the subsequent cleaning of the condensing structure 32.

In summary, the gas outlets 611 of the transverse gas injection pipes 61 are respectively aligned with the layered stages 52 to blow out high-temperature gas transversely, so as to control the temperature between the layered stages 52, so that the objects 9 to be heated placed on the layered stages 52 can be heated to a similar degree, thereby ensuring that the objects 9 to be heated can be subjected to heat treatment under the same conditions, and achieving the purpose of improving the process yield. In addition, when the air outlet 611 blows air in the horizontal direction and the exhaust pipe 433 exhausts air below the furnace body 41, the air in the furnace body 41 can be exhausted from the top to the bottom, so as to prevent the dust deposited below the furnace body 41 from attaching to the surface of the object 9 to be heated along with the air flow circulating up and down and drifting towards the layered carrying platform 52, and the purpose of improving the process yield can be achieved. In addition, since the openings of the slide rails 211 of the lifting mechanisms 2 are shielded by the dust belts 24, the dust in the dust-proof housings 21 cannot be scattered into the inner furnace body 461 through the bottom openings 4352, and the amount of dust in the inner furnace body 461 is prevented from being increased to ensure the cleanliness of the object 9 to be heated, thereby achieving the purpose of improving the process yield and thus achieving the purpose of the present invention.

The above description is only an example of the present invention, and the scope of the present invention should not be limited thereby, and the invention is still within the scope of the present invention by simple equivalent changes and modifications made according to the claims and the contents of the specification.

Claims (10)

1. A high cleanliness baking apparatus characterized in that: which comprises the following steps:

a heating furnace comprising

The furnace tube device is provided with a furnace tube body, a heating component group which is arranged at the inner side of the furnace tube body and can generate heat in a controlled manner, and a furnace base assembly which is positioned at the bottom of the furnace tube body, wherein the furnace base assembly is provided with a furnace base outer frame which is communicated with the bottom of the furnace tube body and is communicated with the outside, a furnace bottom base which is movably sealed on the furnace base outer frame, and at least one exhaust pipe which is communicated with the furnace tube body and can be used for exhausting gas to the outside, the furnace base outer frame is provided with an outer frame body and a lower layer flow passage which is embedded in the outer frame body, the bottom surface of the outer frame body forms a bottom opening, the furnace bottom base is provided with a bottom sealing ring which surrounds the periphery of the bottom opening, the bottom sealing ring can be pressed on the bottom surface of the outer frame body to seal the furnace tube device, and the lower layer flow passage is adjacent to the bottom opening and extends along the length direction of the bottom sealing ring, and is used for the circulation of heat-conducting fluid for leading out the heat energy of the outer frame body,

a layer frame unit which is movably arranged in the furnace tube device and is provided with a frame body and a plurality of layered carrying platforms which are arranged on the frame body in a longitudinal arrangement way, wherein the layered carrying platforms are respectively suitable for carrying the object to be heated, an

At least one transverse gas injection pipe which is vertically arranged in the furnace tube device and is adjacent to the layer frame unit and is provided with a plurality of gas outlet holes which are longitudinally arranged, the gas outlet holes are respectively aligned between every two adjacent layering carrying platforms and can transversely blow out high-temperature gas so as to adjust and control the temperature between the layering carrying platforms,

when the air outlet blows air transversely and the exhaust pipe exhausts air below the furnace tube body, the air in the furnace tube body can flow from top to bottom.

2. The high cleanliness toasting apparatus of claim 1, wherein: the heating furnace comprises a hot air inlet pipe group arranged in the furnace tube device, and the hot air inlet pipe group is provided with a plurality of transverse air injection pipes which are respectively vertically arranged and circumferentially arranged around the layer frame unit.

3. The high cleanliness toasting apparatus of claim 2, wherein: the furnace tube device is provided with at least one cold air inlet module which is communicated with the furnace tube body and is used for guiding gas to enter, a cold air exhaust module which is communicated with the furnace tube body and is used for guiding gas to flow to the outside, and an inner furnace unit which is arranged in the furnace tube body, covers the layer frame unit and the hot air inlet tube group and is sealed with the outer frame of the furnace base, wherein a cooling chamber is formed in the space between the inner furnace unit and the furnace tube body, and is communicated with the cold air inlet module and the cold air exhaust module, and gas can be guided by the cold air inlet module to enter the furnace tube body, flow through the cooling chamber and is exhausted from the cold air exhaust module, so that the temperature of the inner furnace unit is reduced.

4. The high-cleanliness baking apparatus according to claim 3, wherein: the top surface of frame body still form reverse in bottom open-ended open-top, interior stove unit has interior furnace body, and at least one set up in interior furnace body with the top sealing ring between the frame body, the top sealing ring surround in the open-top is peripheral, in order to the involution interior furnace body with the frame body, the stove base frame still have inlay in this internal and lieing in of frame the upper runner of lower floor's runner top, the upper runner is close to the open-top just follows the length direction extension of top sealing ring to supply the heat conduction fluid circulation, in order to be used for with the heat energy derivation of frame body.

5. The high-cleanliness baking apparatus according to claim 3, wherein: the cold air inlet module is arranged at the bottom of the furnace tube body, the cold air exhaust module is arranged at the top of the furnace tube body, and when the cold air inlet module and the cold air exhaust module act, gas in the cooling chamber can flow from bottom to top.

6. The high cleanliness toasting apparatus of claim 1, wherein: the furnace tube device is also provided with a plurality of thermocouple assemblies which are arranged around the shelf unit in a surrounding way, and the thermocouple assemblies are used for sensing the temperature around the shelf unit.

7. The high cleanliness toasting apparatus of claim 1, wherein: the heating component group is provided with a plurality of ceramic electric heating plates annularly arranged along the furnace tube body, and the ceramic electric heating plates can be respectively controlled to regulate the temperature.

8. The high cleanliness toasting apparatus of claim 1, wherein: the furnace base assembly is also provided with two connecting pieces which are respectively connected with the left side and the right side of the furnace bottom base, the high-cleanliness baking equipment also comprises two lifting mechanisms, the lifting mechanisms are respectively arranged below the left side and the right side of the heating furnace, each lifting mechanism comprises a dustproof shell, a lifting cylinder, at least two guide wheels and a dustproof belt, each dustproof shell forms a longitudinally extending slideway, each lifting cylinder is provided with a cylinder body and a piston block which is arranged in the corresponding slideway and can move up and down relative to the cylinder body, one end of the piston block, far away from the cylinder body, is respectively connected with the connecting pieces so that the furnace bottom base can move up and down along with the actuation of the piston block, the guide wheels of each lifting mechanism are respectively and transversely arranged at the top and the bottom of the slideway, and each guide wheel can pivot by taking a transverse shaft as an axis, each dustproof belt surrounds the corresponding guide wheel of the lifting mechanism, two opposite ends of each dustproof belt are respectively connected to the corresponding connecting piece in a connecting mode, the dustproof belts are wrapped on the peripheries of the corresponding piston blocks and can pivot along with the displacement of the connecting pieces, and the openings of the slideways can be shielded by the dustproof belts.

9. The high cleanliness toasting apparatus of claim 8, wherein: each lifting mechanism also comprises at least one air extraction unit which penetrates through the bottom of the corresponding dustproof shell so as to discharge the air in the dustproof shell from top to bottom.

10. The high cleanliness toasting apparatus of claim 1, wherein: the high-cleanliness baking equipment further comprises a gas filtering device, wherein the gas filtering device comprises an outer barrel structure communicated with the exhaust pipe and a condensation structure with high heat transfer characteristic, the condensation structure is not communicated with the outer barrel structure and is used for guiding out heat energy in the outer barrel structure, so that the gas in the outer barrel structure and the condensation structure generate heat exchange to reduce the temperature and condense part of components in the gas.

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