TWI760564B - Electrode for plating and manufacturing equipment for electrolytic metal foil - Google Patents

Abstract

The object of the present invention is to provide an electroforming technique that is capable of more suitably coping with a spaced distance between an anode and a cathode. There is thus provided an electrode for a plating, the electrode being used in a manufacturing of an electrolytic metal foil. The electrode of the present invention is composed at least of an electrode part, and a base to which the electrode part is attached. The electrode part is characterized in that it has a raised surface as a surface opposed to a paired drum electrode.

Description

Electrode for electroplating and manufacturing equipment for electrolytic metal foil

The present invention relates to an electrode for electroplating and an apparatus for manufacturing electrolytic metal foil. More specifically, the present invention relates to an electrode for producing an electrolytic metal foil by an electroplating method, and relates to an apparatus for producing an electrolytic metal foil provided with the electrode.

Metal foils have been widely used in industry in the past, used as printed circuit materials in electrical/electronic fields, and used as current collectors of batteries in electrochemical fields. As a kind of this metal foil, in addition to the rolled foil obtained by mechanical rolling, the electrolytic metal foil obtained by electrochemical plating, etc. exist. The technique of producing metal foils by electroplating may also be referred to as electrical casting (in particular, it may be referred to as "electroforming"). In electroforming, continuous metal foil can be obtained relatively easily, and the characteristics of metal foil such as surface smoothness can be easily controlled.

In the production of electrolytic metal foil, the principle of electroplating is used, and the electrode for electroplating is used. As shown in FIG. 11 , an electroplating apparatus comprising an electrode 520 for electroplating and a paired counter electrode 530 is used. The electrode 520 for electroplating is immersed in the electrolyte 510 of the electrolytic tank 500 , and the counter electrode 530 has a roll shape. The electrode 520 for electroplating is provided so as to face the roller-shaped counter electrode 530 , and has a shape curved along the “circular profile” of the roller-shaped counter electrode 530 . When electricity is applied between these electrodes for electroplating 520 and the roller-shaped counter electrode 530 , the metal component can be electrolytically desorbed on the surface of the counter electrode 530 . Therefore, the metal foil 550 can be continuously obtained by rotating and energizing the electrode 520 for electroplating by rotating the roller-shaped counter electrode 530, and sequentially peeling off the metal layer formed by the electrolytic precipitation from the counter electrode 530. [Previously known technical literature] [Patent Literature]

Patent Document 1: Japanese Patent Application Laid-Open No. 8-209396 Patent Document 2: Japanese Patent Publication No. 6-47758 Patent Document 3: International Publication (WO) No. 2010/067754 Patent Document 4: Japanese Patent No. 3468545

[Problems to be Solved by the Invention]

The inventor of the present application has noticed that there are still problems to be overcome in the production of electrolytic metal foils in the past, and found that countermeasures must be taken to deal with the problems. Specifically, the inventors of the present application found the following problems.

In the electroforming production of metal foil, there is a method of using an insoluble anode as an electrode for electroplating and dividing the anode into a single piece. It is used by mounting a plurality of monolithic anodes on a substrate. In this method, the anode is in a state of facing the cathode roll across the electrolyte, but the inventors of the present application found that the greater the distance between the anode and the cathode, the greater the voltage of the electrolytic cell cannot be ignored. High and rising electricity costs. In addition, it is also found that according to the current electrode structure, the current distribution on the anode becomes uneven, and the possibility of the occurrence of defects in the electrolytic metal foil cannot be ignored.

In particular, the substrate on which the monolithic anode is mounted may become part of the cell wall of an electrolytic cell, in which case the distance between the anode and the cathode may depend on the position of the cell wall. In electroforming of continuous metal foil production, not only cost and operability, but also flexibility are generally important, so "thin" anodes are used. Therefore, those skilled in the art of electroforming generally place emphasis on the use of "thin" electrodes suitable for this bending, without realizing that the distance between the anode and the cathode is large.

In view of the above problems, the inventors propose the present invention. That is, the main purpose of the present invention is to provide an electroforming technique that can more appropriately respond to the distance between the anode and the cathode. [Technical means to solve problems]

The inventor of the present application did not respond from the extension direction of the conventional technology, but tried to solve the above-mentioned problems by dealing with it from a new direction. As a result, the invention of the manufacturing apparatus of the electrode for electroplating and electrolytic metal foil which achieves the said main objective is proposed.

The present invention provides an electrode for electroplating, which is used in the manufacture of electrolytic metal foil, and is characterized in that: The electrode for electroplating is composed of at least an electrode member and a substrate on which the electrode member is mounted; The electrode member has a thickened surface on the surface facing the roller-shaped counter electrode.

Moreover, this invention also provides the manufacturing apparatus of the electrolytic metal foil which is provided with the said electrode for electroplating at least and is comprised. [Effect of the present invention]

The electrode for electroplating of the present invention has a thickened surface on the surface of the electrode member mounted on the substrate facing the roller-shaped counter electrode, and provides a more suitable electroforming technique from the viewpoint of the distance between the electrodes between the anode and the cathode.

Specifically, since the "thickened surface" of the electrode member can appropriately reduce the distance between electrodes in the production of metal foil, it is possible to operate the electrolytic cell at a low voltage, thereby reducing power costs. In addition, according to the present invention, the contact area between the electrode and the substrate is improved, so that the current distribution on the electrode for electroplating is more likely to become uniform, and the occurrence of defects in the manufactured metal foil can also be reduced.

Hereinafter, the manufacturing apparatus of the electrode for electroplating and electrolytic metal foil of this invention is demonstrated in detail. If necessary, descriptions are made with reference to the accompanying drawings, but the contents of the drawings are only shown for the purpose of understanding the present invention, and their appearance or size ratio may be different from the actual ones.

Expressions such as "in a cross-sectional view" used in describing the present invention correspond to a cross-sectional view taken along the thickness direction of the electrode for electroplating, and can be equivalent to a view in which the object is substantially viewed from the side. From another viewpoint, "in a cross-sectional view" can correspond to a view taken on a plane where the axis of rotation of the cathode roll paired with the anode for electroplating becomes a normal line. In addition, the "upper (or upper side)" used directly or indirectly for the electrode for electroplating of the present invention refers to the direction closer to the opposite electrode (that is, the roller-shaped electrode) during use, and the opposite direction is equivalent to " Below (or underside, or underside)".

"The Electrode for Electroplating of the Present Invention" The electrode for electroplating of the present invention is an electrode used for producing electrolytic metal foil. This electrode for electroplating can be said to be an electrode for electroforming, and can be called "electrode for electroforming" or the like. In addition, the term "electrolytic metal foil" mentioned in this specification means the metal foil manufactured by the principle of electroplating substantially. As an electrolytic metal foil, the metal foil formed by containing at least 1 type selected from the group which consists of copper, nickel, and iron is mentioned. If a typical example is given, the electrolytic metal foil is copper foil.

As shown in FIGS. 1(A) and 1(B) , the electrode for electroplating 100 of the present invention is an electrode used so as to face the roller-shaped counter electrode 200 . According to the suitable example of metal foil manufacture, the electrode 100 for electroplating of this invention corresponds to an "anode", and on the other hand, the opposite electrode 200 corresponds to a "cathode". When producing an electrolytic metal foil, by energizing the electrodes between the anode and the cathode, a metal foil (more precisely, a metal layer serving as a precursor of the metal foil) is formed on the cathode due to electrolysis. For example, the electrode for electroplating used as the anode is preferably a so-called insoluble anode. In the case of an insoluble anode, the plated metal component is not supplied by the dissolution of the anode, but the component originally contained in the electrolytic solution of the electrolytic cell becomes the supply source of the plated metal component.

The opposite electrode, which becomes the cathode, has a cylindrical shape as a whole and is rotatably installed. "Roll-shaped" as used herein means that the opposite electrode has a cylindrical shape or a substantially cylindrical shape that facilitates continuous production of the metal foil. On the other hand, it is preferable to arrange|position the electrode which becomes an anode so that it may isolate|separate from the cylindrical cathode and surround part of it. That is, the electrode for electroplating of the anode of the present invention may have a shape curved along at least a part of the outline of the drum in the cross-sectional view. As can be seen from the state shown in the figure, the electrode 100 for electrolytic metal foil production has an arc shape as a whole in a cross-sectional view.

The electrode for electroplating of the present invention comprises at least an electrode member and a substrate on which the electrode member is mounted. That is, as shown in FIGS. 1(A) and 1(B) , the electrode 100 for electroplating includes the electrode member 10 directly facing the opposite electrode 200 and the substrate 20 to which the electrode member is fixed. The electrode member 10 is a member that functions as an anode substantially during electroforming, and is preferably a member that functions as an insoluble anode.

The electrode for electroplating of the present invention is characterized in that the electrode member has a special surface height. Specifically, in the electrode for electroplating of the present invention, the surface of the electrode member facing the roller-shaped counter electrode is provided with a thickened surface. The thickened surface is the surface in which the surface height (that is, the electrode surface height) increases, and the electrode for electroplating of the present invention has the following characteristics: the surface height of the electrode member, especially the surface height ( That is, the top surface level) is high.

As can be understood from the above description, the "thickened surface" mentioned in this specification, in a broad sense, substantially refers to a form in which the surface height of the electrode for electroplating is increased so as to be closer to the opposite electrode. In a narrow sense, "thickened surface" essentially refers to the level of the main surface of the upper side of the electrode member in the electrode for electroplating (the level of the main surface of the bottom side directly opposite to the substrate and the main surface of the opposite side), so as to be more A form added to approach the opposite electrode. From this point of view, the "thickened surface" of the present invention may also be referred to as a "surface with an increased surface thickness", a "raised surface", or the like. As an example, the thickened surface is located at a level greater than, for example, 2 mm in separation distance from the surface of the substrate (the mounting substrate surface closer to the electrode member) when the electrode member is mounted on the substrate. The surface of a level larger than 3 mm (as an example, a level larger than 5 mm is shown as an example) is suitable. The upper limit of this separation distance is not particularly limited, but is, for example, 30 mm, 20 mm, 15 mm, 10 mm, 8 mm, or 5 mm.

As an exemplary aspect in which the electrode member has a "thickened surface", as shown in FIG. 1(A) , an aspect in which the electrode member 10 has a solid thick-walled electrode is exemplified. Alternatively, as shown in FIG. 1(B) , the electrode member 10 may be a thin-plate electrode, and the thin-plate electrode may have a form in which it is bent so as to swell. In the former, due to the large thickness of the solid thick-walled electrode, the upper surface of the thick-walled electrode is equivalent to the "thickened surface"; ".

As shown in FIGS. 1(A) and 1(B) , the electrode 100 for electroplating is preferably configured by further including screws 30 for attaching the electrode member 10 to the substrate 20 . That is, as a member for fixing the electrode member 10 to the board|substrate 20, the electrode 100 for electroplating of this invention should be provided with the screw 30, and should be comprised. In addition, as shown in FIGS. 2(A) and 2(B) , the screw 30 should preferably have a tapered side surface 35 . In this case, the side portion 12 ( FIG. 2(A) ) or the thickened surface 15 ( FIG. 2(B) ) of the electrode member 10 preferably has a shape complementary to the tapered side surface 35 of the screw 30 . Thereby, the integration of the electrode member and the screw is improved, and the integrity as the electrode for electroplating as a whole is increased. In addition, in some aspects, these complementary relationships provide more suitable electrode surfaces with no gaps, and provide suitable heat dissipation through the screws (the "heat dissipation" will be described in detail later).

As shown in FIG. 3 , the screw 30 is composed of at least a crown portion 32 and a threaded portion 37 , and the side surface 35 of the crown portion 32 is preferably tapered. Specifically, in the screw 30, it is preferable that the width of the crown portion 32 gradually decreases toward the lower side (that is, toward the screw portion 37). The side surface portion 12 of the electrode member 10 preferably has a complementary shape with respect to the screw crown portion 32 having the tapered side surface 35 (refer to FIG. 2(A) ). More preferably, in the state where the electrode member 10 is mounted on the substrate 20, the side surface portion 12 of the electrode member 10 is not in contact with the threaded portion 37 of the screw 30, but is opposite to the tapered side surface 35 of the crown portion 32 of the screw 30. Complementarily close. Similarly, as shown in FIG. 2(B) , a portion 15A of the thickened surface 15 of the electrode member 10 should preferably have a complementary shape with respect to the screw crown 32 having the tapered side surface 35 . More preferably, in the state where the electrode member 10 is mounted on the substrate 20, a part 15A of the thickened surface 15 of the electrode member 10 is not in contact with the threaded portion 37 of the screw 30, but is in contact with the crown portion 32 of the screw 30. The tapered flanks 35 abut complementarily.

The electrode member of the electrode for electroplating of the present invention has a high electrode surface height due to the "thickened surface". For example, in the electrode member, the vertical distance dimension from the thickened surface to the "contact level between the electrode member and the substrate" is the height dimension of the taper portion corresponding to the installation portion of the tapered side surface in the screw, or larger. 4 and 5, it can be said that with the thickened surface 15 as the reference, the vertical distance dimension H1 from there to the "contact level between the electrode member 10 and the substrate 20" is the same as The taper height dimension H2 of the screw 30 is substantially the same or larger. As can be understood from this description, "vertical" in terms of "vertical distance dimension" used in this specification refers to the direction in which the thickened surface (especially the thick walled surface in the non-curved portion) becomes a normal or perpendicular line. meaning.

4(a) and (b), the shortest distance dimension H1 from the height of the upper surface of the solid thick-walled electrode 10A to the contact surface of the thick-walled electrode 10A with the substrate 20 can be The taper portion height dimension H2 of the screw 30 is equal to or greater than that. 5( a ) and ( b ), the shortest distance from the height of the upper surface of the thin plate electrode 10B having the bulging curved shape to the level of the point 18 where the thin plate electrode 10B contacts the substrate 20 is the shortest distance The dimension H1 may be substantially the same as the height dimension H2 of the taper portion of the screw 30 .

A "thickened face" with these dimensional features further contributes to the electrode distance between the anode and the cathode in the manufacture of metal foils. That is, due to the "thickened surface" of the electrode member, the distance between electrodes can be further reduced, and the electrolytic cell can be operated with a low voltage. Therefore, the electric power cost at the time of metal foil manufacture can be reduced. In addition, the distance between electrodes can be further reduced, so that the current distribution of the electrodes for electroplating is more likely to be uniform, and the occurrence of defects in the manufactured metal foil can also be reduced.

The electrode for electroplating of the present invention can have a characteristic shape in the cross-sectional profile of the side surface portion of the electrode member or the cross-sectional profile of the thickened surface due to the "thickened surface". In some suitable aspects, in the cross-sectional view of the electrode member, the profile having the side portion or the thickened surface of the electrode member is in a curved configuration.

More specifically, as in the state of FIG. 4( a ), the cross-sectional profile of the side portion 12 (especially the side portion 12 directly opposite to the screw) of the thick-walled electrode 10A that can have a solid shape is curved. In addition, as in the state of FIG. 5( a ), a portion 15 ′ (especially the portion 15 ′ adjacent to the top surface of the screw) of the cross-sectional profile of the thickened surface 15 of the thin plate electrode 10B having a bulging three-dimensional shape is bent Shape. Such a curved form is more suitable for reducing the distance between the anode and the cathode in the production of the metal foil because of the high level "thickened surface".

The electrode for electroplating of the present invention is preferably used together with a screw, and has a suitable attachment form to the electrode member. For example, in a state where the electrode member is attached to the substrate by a screw, the top surface of the screw and the thickened surface of the electrode member are the same surface. 4, the height of the upper surface of the solid thick-walled electrode 10A and the top surface of the screw 30 (level of the upper surface of the crown) can be substantially the same surface. In addition, in the aspect shown in FIG. 5, the height of the upper surface of the thin plate electrode 10B having the bulging curved shape and the top surface of the screw 30 (level of the upper surface of the crown) may be substantially the same surface. With this "same face", a smoother electrode face can be provided. As can be seen from FIGS. 4 and 5 , in the present invention, due to the “thickened surface”, the vertical distance dimension H1 from the thickened surface to the contact level with the substrate in the electrode member becomes the taper portion of the screw 30 The height dimension H2 may be larger than that, but the top surface of the screw 30 and the thickened surface of the electrode member 10 are still the same surface. These features are also due to the high level "thickened surface", so it can be said that this feature is more suitable for reducing the distance between electrodes during electroforming.

The "electrode member", "substrate" and "screw" of the electrode for electroplating of the present invention will be described in detail.

The electrode member, as described above, is the part that essentially functions as an anode during electroforming, and is preferably an insoluble anode. The material of the electrode member is not particularly limited, but may be valve metal. More specifically, the electrode member may be formed by including at least one metal selected from the group consisting of tantalum, niobium, titanium, hafnium, zirconium, tungsten, bismuth, and antimony. Although it is only an example, from the viewpoints of corrosion resistance and/or versatility, etc., according to some suitable aspects, the electrode member is composed of titanium or a titanium alloy.

The electrode member has a "thickened surface", and the vertical distance dimension from the thickened surface to the contact surface with the substrate or the contact surface (that is, "H1" in Fig. 4 and Fig. 5) is preferably larger than 2mm , preferably larger than 3mm. The upper limit value of this vertical distance dimension is not particularly limited, but may be 30 mm, 20 mm, 15 mm, 10 mm, 8 mm, or 5 mm, for example, from the viewpoint of preventing short circuits.

In addition, the surface of the electrode member may contain an electrode catalyst. For example, a platinum group metal or an oxide thereof may be coated on the surface of the electrode member. That is, an electrode catalyst may be provided on the thickened surface of the electrode member, the electrode catalyst containing at least one platinum group metal selected from the group consisting of palladium, rhodium, ruthenium, platinum, iridium and osmium, and and/or oxides of these platinum group metals. When these electrode catalyst layers are provided, the catalyst layer can be substantially the surface of the thickened surface. Although it is only an example, according to some suitable aspects of the electrode member, a catalyst composed of iridium element and tantalum element is used.

The base plate, which is the electroformed member for fixing the electrode member, should be made of metal material. For example, these electrode substrates may include valve metal. That is, the substrate to which the electrode member is fixed may contain at least one metal selected from the group consisting of tantalum, niobium, titanium, hafnium, zirconium, tungsten, bismuth, and antimony. Although it is only an example, according to some suitable aspects, the substrate is composed of titanium or titanium alloy. This is because titanium or a titanium alloy is suitable from the viewpoint of corrosion resistance and the like. The thickness of the substrate is not particularly limited as long as it contributes to the fixation of the electrode member used in electroforming, and may be, for example, about 10 mm to 40 mm. In addition, as can be seen from the aspect shown in FIG. 9 , the substrate 20 may constitute at least a portion of the cell wall of the electrolytic cell 50 . For example, the inner wall of the tank which directly contributes to the storage of the electrolyte may have a curved shape (in particular, a circular arc shape in a cross-sectional view), and at least a part of the inner wall of the tank in the curved shape becomes the substrate.

The screw is used for mutual fixation between the electrode member and the substrate, and can be made of a metal material. For example, the screw may be constructed to contain valve metal. That is, the screw may be formed by including at least one metal selected from the group consisting of tantalum, niobium, titanium, hafnium, zirconium, tungsten, bismuth, and antimony. Although it is only an example, according to some suitable types of screws, from the viewpoint of corrosion resistance and/or versatility, etc., it is constituted by including titanium or a titanium alloy.

As shown in FIG. 3 , the screw 30 is composed of at least a crown portion 32 and a threaded portion 37 , and the side surface 35 of the crown portion 32 should preferably be tapered. The taper angle α shown in FIG. 3 is preferably 10° to 80°, more preferably 20° to 70°, and further preferably 30° to 60°. This tapered side surface can be provided, for example, by machining. Alternatively, a commercially available screw provided with a tapered portion may be used as it is. Setting the height dimension H2 of the crown portion 32 of the tapered side surface 35 (refer to FIG. 3 ) should help to realize the realization of the thickened surface of the present invention, and may be larger than the conventional dimension. That is, according to some suitable screws, it can be said that it has "a crown with a large height dimension in the general knowledge of those with ordinary knowledge in the art (especially the manufacturers of electrolytic metal foils)." For example, the height dimension H2 of the crown portion 32 is larger than 2 mm, preferably larger than 3 mm. The upper limit of the height dimension of the crown of the screw is not particularly limited, but may be, for example, 30mm, 20mm, 15mm, 10mm, 8mm, or 5mm.

The electrode for electroplating of the present invention can be embodied in various aspects. Representatively, it can be embodied as the above-mentioned "the aspect of the thick-walled electrode" and the "the aspect of the curved thin-plate electrode that provides bulging".

(Condition of thick-walled electrode) In this aspect, as shown in FIG. 4 , the electrode member 10 becomes a solid thick-walled electrode 10A. That is, it is not the electrode thickness that is considered to be a thin layer by those with ordinary knowledge in the technical field of electroforming (especially the manufacture of electrolytic metal foil), but is generally considered to be a thick layer in their knowledge. The thickness of the electrode constitutes the electrode member. For example, the thickness of the solid thick-walled electrode 10A may be equal to the height dimension of the taper portion of the set portion of the tapered side surface in the screw, or larger. In other words, the thickness of the solid thick-walled electrode can be more than the height dimension of the crown of the screw. Furthermore, the thickness of the thick-walled electrode can be such that it has the strength to be fixed to the substrate by the provided portion of the tapered side surface of the screw. This means that the thickness of the solid thick-walled electrode is preferably, for example, 50% or more of the height dimension H2 of the screw crown 32 in order to have the strength to be fixed to the substrate by the set portion of the tapered side surface of the screw. That is, the solid thick-walled electrode can have a thickness that has the strength to be able to fix or mount the thick-walled electrode to the substrate by the support provided by the tapered side surface of the screw (in this case, the thickness of the solid thick-walled electrode , for example, may be more than 50% of the height dimension H2 of the screw crown 32).

The thickness of these thick-walled electrodes is helpful to the realization of the "thickened surface" of the electrode member, and also to the electrode distance between the anode and the cathode in the manufacture of metal foils. That is, due to the thickness of the thick-walled electrodes, the distance between the electrodes can be further reduced, and the electrolytic cell can be operated at a low voltage. Thereby, the electric power cost at the time of metal foil manufacture can be reduced. In addition, not only the distance between electrodes is further reduced, but also by increasing the thickness of the electrodes, the current distribution on the electrode for electroplating during energization can be more easily made uniform, and the occurrence of defects in the manufactured metal foil can also be reduced.

Although it is only an example, the specific thickness of the solid thick-walled electrode is, for example, larger than 2 mm, preferably larger than 3 mm. The upper limit of the solid thick-walled electrode is not particularly limited, but may be, for example, 30 mm, 20 mm, 15 mm, 10 mm, 8 mm, or 5 mm. In view of the general knowledge of those skilled in the art (especially the manufacturers of electrolytic metal foils), these thicknesses, as anodes used in the manufacture of electrolytic metal foils, are large. The thickness of the conventional electrode is about 1 mm, and the solid thick-walled electrode of the present invention can be said to be at least 2 times larger than the conventional electroplating electrode, preferably larger than 3 times, in short, it becomes the conventional electrode. The known electrode thickness is 2 to 30 times, preferably 3 to 20 times (for example, 3 to 10 times, 3 to 8 times, or 3 to 5 times) and the like. These thicker electrodes than conventional ones are generally considered difficult to process (especially for screw holes) by those with ordinary knowledge in the art, and have not been actually used as anode electrodes for electrolytic metal foils in the past. . In this regard, the present invention is not limited to such conventional knowledge, and it can be said that the electrode having a large thickness is deliberately and actively used.

In some suitable aspects, when the thick-walled electrode 10A is mounted on the substrate 20 by the screws 30 , the thick-walled electrode 10A and the substrate 20 are in full surface contact, and in particular, they are in close contact with each other (refer to FIG. 4 ). As can be seen from FIG. 4 , the thick-walled electrode 10A has a non-curved shape, and the lower main surface of the thick-walled electrode 10A is in close contact with the upper main surface of the substrate 20 . In a preferred aspect, the lower main surface of the thick-walled electrode and the upper main surface of the substrate are in close contact with each other in a liquid-tight state with substantially no gap. This point is a characteristic that can be exhibited compared to the case where the electrode member is a thin electrode. This feature will be described in detail. Assuming that the electrode member is not a thick-walled but thin-shaped electrode, when the electrode member is fixed to the substrate with screws, the thin-shaped electrode member may be flexed to a different degree due to the point-like locking of the screw fixing (refer to Fig. 6 ). "The case of thin electrodes"). Therefore, in the thin electrode member mounted on the substrate, a slight gap may be formed between it and the substrate (in general, even if it is depicted as being in close contact with the substrate, in fact, a slight gap is formed, or a gap is likely to be formed. ). In this regard, in the present invention, due to the large thickness of the thick-walled electrode, higher rigidity is also provided to the electrode member, and the electrode member is less likely to be flexed by the point-like locking of the screw (refer to “The present invention” in FIG. 6 ). ”). Thereby, the lower main surface of the thick-walled electrode 10 and the upper main surface of the substrate 20 can be properly adhered to each other. This means that when the electrode for electroplating of the present invention is used, the current distribution is more likely to become uniform, and the occurrence of flaws in the manufactured metal foil is easily reduced. In addition, in the case of the thick-walled electrode 10A, firstly, due to the large electrode thickness (thicker electrode than the conventional thin-type electrode), the current distribution during energization becomes better, so that more uniform plating can be achieved. Furthermore, in the case of the thick electrode 10A, in the state where the electrode member is mounted on the substrate, the thickness side of the thick electrode and the crown side of the screw can be in close contact with each other (refer to “the present invention” in FIG. 6 ). In this regard, it becomes easy to improve the current distribution at the time of energization, and to achieve uniform electroplating.

In addition, when the electrode member is a solid thick-walled electrode, the side surface of the electrode and the screw can have a special shape relationship due to the thick wall. Specifically, as shown in FIG. 4 , the thick-walled side surface 12 of the thick-walled electrode 10A may include a shape complementary to the tapered side surface 35 of the screw 30 . That is, the side surfaces contributing to the thickening of the thick-walled electrode 10A having the non-bending form and the side surfaces of the crowns of the screws 30 have complementary shapes to each other. The thickness side surface of the wall electrode and the crown side surface of the screw are in a state of being in close contact with each other. In these forms, advantageous effects can be obtained in terms of suitable heat dissipation through the side surfaces of the thick-walled electrodes. Specifically, it is possible to suppress the increase in temperature of the electrolyte solution due to the increase in the temperature of the electrolyte due to energization during electroforming, and in the present invention, the thick-walled electrodes and the screws attached to the side surfaces of the thick-walled electrodes can appropriately dissipate heat to the outside of the tank. .

For the thick-walled electrode used in the electrode for electroplating of the present invention, after degreasing and cleaning the conductive base material with alkali or organic solvent, mechanical surface treatment such as sandblasting, or chemical treatment with acid or alkali is performed. Surface treatment, or surface treatment combining both mechanical treatment and chemical treatment, is applied to the substrate by coating and calcining the electrode catalyst. The electrode catalyst is preferably composed of platinum group metals or oxides thereof, and one or more metal oxides selected from the group consisting of valve metals (titanium, tantalum, niobium, tungsten, zirconium) and tin of mixed oxides. Representative examples include iridium-tantalum mixed oxide, iridium-tantalum-titanium mixed oxide, and the like. The coating of the electrode active material can be prepared by applying the solution containing the electrode active material as described above in the order of coating, drying, and calcining, and can be prepared by repeating the steps from coating to calcining until a predetermined contact is made. The amount of the medium is reached to obtain an insoluble anode. The thick-walled electrode thus obtained is provided with holes for screws by machining or chemical etching, and the thick-walled electrodes are attached to the substrate with screws through the holes, whereby an electrode for electroplating for producing electrolytic metal foil can be obtained. . In addition, before applying the solution containing the electrode active material as described above, holes for screw holes may be provided in the conductive base material of the thick-walled electrode by machining, chemical etching, or the like.

Referring to FIG. 7 , a preferred specific example of the case where the electrode member is a solid thick-walled electrode will be described. In this specific example, the base plate 20 is provided with a countersunk hole 26 . The countersunk hole 26 may have the form of a conical concave portion. Therefore, as shown in the figure, a concave portion having the same form as that of a screw can be provided on the base plate 20 as a whole (the “counterbore hole” in this specification may be referred to as a “substrate concave portion” or “substrate concave portion”. conical recess", etc.). As such, even if the counterbore 26 is provided, the screw 30 does not completely fill the counterbore 26 due to the "solid thick-walled electrode". That is, in some suitable examples, in the form that the screw crown 32 is hooked on the tapered side surface of the electrode member 10, the screw 30 is removed from the countersunk hole surface 26' of the base plate 20 (forming the bottom surface 26 of the countersunk hole 26). ') separated and configured. This means that, in the state where the electrode member 10 is mounted on the substrate 20, the space 28 (especially the conical sink) is provided in the area surrounded by the screw 30 (especially the screw crown 32), the electrode member 10, and the substrate 20. The tapered space of the head hole 28). As can be seen from the state of the figure, the combination of the screw crown 32 and the electrode member 10 in close contact with each other leaves or supplies the space 28 in the area where the countersunk hole is formed (in addition, the space 28 is left in the area where the threaded hole of the substrate is formed). or supply space 29), and is integrated with the substrate 20. In these aspects, the top surface of the screw 30 and the thickened surface 15 of the electrode member 10 are preferably made to be the same surface. Furthermore, the thick-walled side 12 of the thick-walled electrode 10A may comprise a shape complementary to the tapered side 35 of the screw 30 . The thickness of the solid thick-walled electrode 10A can be equal to the height of the taper portion of the set portion of the tapered side surface in the screw, or larger (however, the solid thick-walled electrode 10A can be the screw crown as described above. As shown in the lower brackets in Fig. 7, the thick-walled electrode 10A can also be less than the height of the tapered portion if the hook is caught on the tapered side surface of the electrode. The countersunk head hole is tapered, which can appropriately avoid interference with the screw crown, so the screw can be arranged at a lower position according to the thickness of the electrode member). Although it is only an example, the thickness of the electrode member 10 according to the aspect of FIG. 7 may be, for example, about 3 to 8 mm.

The advantages of the present invention in the aspect in which the countersunk hole 26 is provided in the substrate 20 will now be described in comparison with the case of the thin electrode member. As shown in FIG. 8 , a relatively thin electrode member 11 (for example, an electrode member with a thickness of about 1 mm made of titanium) is actually difficult to bend into an acute angle at the screw engaging portion, and there is a concern that the contact is limited. . That is, these thin electrode members 11 with bends have a limited contact point with a screw engaging portion (for example, when limited to the portion surrounded by the dotted line shown in FIG. 8 ), from the viewpoint of contact with the substrate. Among them, there are situations that cannot be said to be ideal. In view of this situation, it can be said that there is still room for further improvement in the thin electrode member from the viewpoint of current distribution during energization. In this regard, in the case of the solid thick-walled electrode of the present invention, as can be seen from the state shown in FIG. 7, the contact point of the screw engagement portion becomes substantially the same, so from the viewpoint of the current distribution at the time of energization can be in a suitable state.

In addition, in other words, the aspect of the present invention shown in FIG. 7 is a suitable aspect at the point where the electrode member 10 and the substrate 20 are attached to each other. Specifically, the space 28 is arranged below the screw 30 (especially the screw crown 32 ), so that the screw can be more strongly locked in order to displace the screw further downward, and the lower main surface of the thick-walled electrode 10 can be aligned with the The upper principal surfaces of the substrates 20 are in close contact with each other more strongly. In a preferred form, they can be tightly connected in a liquid-tight manner without gaps (as explained with reference to FIG. 6 , the thick-walled electrode, due to its large thickness, provides higher rigidity to the electrode member, so even if it is more strongly locked, the electrode member itself is still not easily flexed). Therefore, in this point, the current distribution tends to be more uniform, and as a result, the occurrence of defects in the manufactured metal foil is easily reduced.

(Provide the form of a bulging and curved sheet electrode) As shown in FIG. 5, the electrode member 10 of this aspect becomes the thin-plate electrode 10B, and especially has the form of the thin-plate electrode 10B curved so that it may become bulging. That is, by bending the thin-plate electrode 10B having a substantially constant thickness, the entire electrode member is swelled (that is, it can be said that the electrode member with a certain thickness is bent and the electrode for electroplating is swelled). In this aspect, the electrode thickness is considered to be thin by those skilled in the art of electroforming (especially the production of electrolytic metal foil), but the thin electrode becomes three-dimensionally bulging. Partially curved form. The thickness of the thin-plate electrode 10B itself, since it is a "thin plate", is 3 mm or less, preferably 2 mm or less, for example, 1.5 mm or less or 1.0 mm or less (the lower limit is not particularly limited, but may be, for example, 0.2 mm or 0.5 mm). , 0.7mm degree). In this way, although the thickness is thin, the thin-plate electrode that is partially bent so as to become three-dimensionally bulged, the dimension between the uppermost level and the lowermost level should preferably be the height dimension of the taper of the screw, or larger. In short, the maximum three-dimensional thickness of the thin-plate electrode that is bent so that the whole is swelled can be equal to or greater than the height dimension of the crown of the screw.

Since the part is bent so as to bulge three-dimensionally, a partition space is formed between the thin-plate electrode and the substrate in a state where the electrode member is attached to the substrate with a screw. As can be understood from the form shown in FIG. 5 , the non-bent portion of the thin-plate electrode 10B and the substrate 20 are separated from each other, thereby providing a “thickened surface” of the electrode member 10 . In other words, the space between the thin plate electrode and the substrate contributes to the realization of the "thickened surface" in the thin plate electrode that is bent so that the whole is swelled three-dimensionally. The distance between the cathodes produces significant efficacy. Therefore, in the state shown in FIG. 5, the distance between electrodes can be further reduced, and the operation can be performed in a state where the voltage of the electrolytic cell is relatively low. That is, the electric power cost at the time of metal foil manufacture can be reduced.

Due to the "thickened surface", that is, due to the three-dimensionally bulging curved shape of the thin-plate electrode, the difference between the thickness of the thin-plate electrode (thickness of the thin-plate electrode itself) and the separation space in the state where the electrode member is attached to the substrate with screws The sum of the thicknesses should preferably be the height dimension of the taper portion corresponding to the set portion of the tapered side surface in the screw, or larger. In this case, it can be said that the sum of the thickness of the sheet electrode having the three-dimensionally bulging curved shape (thickness of the sheet electrode itself) and the thickness of the partition space is equal to or greater than the height dimension of the crown of the screw.

Although it is only an example, in the form of the three-dimensionally bulging and curved thin-plate electrode, the distance between the surface of the substrate and the thickened surface of the thin-plate electrode (that is, the upper main surface of the electrode) is, for example, greater than 2 mm. Should be larger than 3mm. The upper limit of the distance is not particularly limited, for example, it can be 30mm, 20mm, 15mm, 10mm, 8mm, or 5mm. Although it is only an example, when the thickness of the sheet electrode itself is, for example, 1 mm or less, the size of the gap in the space between the sheet electrode and the substrate (the size in the direction of the thickness of the non-bending portion of the electrode) may be 1 mm. Below, it is preferable that it is 2 mm or less (the upper limit value may be, for example, 29 mm, 19 mm, 14 mm, 9 mm, 7 mm, or 4 mm).

The three-dimensionally bulging thin-plate electrode used in the electrode for electroplating of the present invention can be obtained, for example, by using an electrode with a small thickness, which is often used as an anode electrode of an electrolytic metal foil, to form a local curvature or a local concave portion by an external force. The thus obtained bulging sheet electrode is provided with holes for screws by machining or chemical etching (particularly, holes for screws are provided in local bent parts and recesses), and the sheet electrode is attached to the electrode with screws through the holes. substrate, the electrode for electroplating of the present invention for use in the production of electrolytic metal foil can be obtained. In addition, in the case where the formation of the screw hole is accompanied by a local external force, a local curvature or a concave portion may be formed when the screw hole is formed.

In the form of the thin-plate electrode that is three-dimensionally swollen and curved, the spacer 60 may be provided in the partition space 40 (refer to FIG. 5( b )). That is, in a state where the electrode member 10 is mounted on the substrate 20 by the screws 30 , the spacer 60 may be provided which partially occupies the space 40 between the non-bent portion of the thin plate electrode 10B and the substrate 20 . By providing such a spacer, it is easier to appropriately maintain the swollen shape of the thin-plate electrode over time during electroforming.

The material of the spacer is not particularly limited as long as it can maintain the "separated space". Therefore, the spacer may be composed of a metal material, a resin material, and/or a ceramic material. From the viewpoint of easily maintaining the "partitioned space" appropriately, it is desirable to have a certain degree of rigidity. If an example is shown, the spacer may be a solid metal block. In addition, the spacer may have the form of a so-called "metal brush", and the spacer may have appropriate elasticity. When the material of the spacer is a metal material, the heat dissipation path through the thin plate member, the spacer, and the substrate can be appropriately formed, and the heat generated by the electrolyte during electroforming can be dissipated out of the tank through the spacer. The fixing method of the spacer is not particularly limited. It can be fixed by other means, but the spacer can be fixed by the clamping force provided by the screw between the non-bent part of the thin plate electrode and the substrate.

In a state where the electrode member is attached to the substrate with screws, the thin-plate electrode that is three-dimensionally bulged and bent is separated from the substrate by the non-bent portion, but the bent portion is preferably in contact with the substrate. In addition, as is known from the state shown in FIG. 5( b ), for example, the curved portion 10B of the three-dimensionally bulging and curved thin-plate electrode 10B is _curved , and is preferably in close contact with the tapered side surface 35 of the screw. In particular, the _curved portion 10B of the thin-plate electrode 10B that contributes to the three-dimensionally bulging is preferably in a liquid-tight state in close contact with the side surface 35 of the crown portion 32 of the screw 30 . This is because an advantageous effect is obtained in that suitable heat dissipation can be carried out through the curved portion of the thin plate electrode. Specifically, it is sought to suppress the temperature increase of the electrolyte solution due to the increase in the temperature of the electrolytic solution due to energization during electroforming, and through the curved portion of the thin-plate electrode and the screw in close contact with the curved portion, the heat can be appropriately dissipated out of the tank. . In addition, the bent portion 10B of the thin plate electrode is _bent , and as shown in FIG. Therefore, the bent portion of the thin-plate electrode can appropriately dissipate the heat generated by the electrolytic solution during electroforming to the outside through not only the screw but also the substrate. In view of this point, the curved part of the thin plate electrode can also be called a plating heat dissipation part.

Regardless of whether the electrode for electroplating of the present invention is in any of the above-mentioned "the form of the thick-walled electrode" and the "the form of the thin-plate electrode that provides the bulge and the curvature", the electrode member may have a form of singulation. That is, the electrode member 10 may be constituted by a combination of a plurality of singulated sub-electrodes 10', and the sub-electrodes 10' may be mounted on the substrate 20 (see Fig. 9 ). In this case, the sub-electrodes 10' are fixed to the substrate 20 by screws 30, respectively.

In the form of these sub-electrodes, in the event of a defect such as deactivation or peeling of the catalyst of the electrode, or corrosion or damage of the electrode member, only the sub-electrode that is the target can be replaced. That is, in the aspect of the sub-electrode that is singulated, the convenience is increased from the viewpoint of maintenance and repair of the electrode for electroplating.

In a preferred form, the sub-electrodes 10' respectively have a shape along the curved shape of the substrate. In other words, each of the sub-electrodes 10' preferably has a shape that bends along the substrate when it is fixed to the substrate (or when it is mounted on the substrate). The electrode member obtained by combining a plurality of sub-electrodes with each other should preferably have a form in which the separation distance between the roller profile of the opposite electrode and the anode is kept equal. Since the sub-electrode 10 ′ obtained by dividing the thick-walled electrode 10A into pieces has a curved shape along the substrate (refer to FIG. 9 ), if the sub-electrode 10 ′ is fixed to the substrate 20 by the screw 30 , the sub-electrode can be fixed to the substrate 20 . 10 ′ is in close contact with the substrate 20 without a gap. However, in the thin-plate electrode 10B with a small thickness of the sub-electrode 10 ′, when the sub-electrode 10 ′ is fixed to the substrate 20 by the screws 30 so that the sub-electrode 10 ′ can be deformed according to the shape of the substrate, the sub-electrode 10 ′ can be deformed according to the shape of the substrate. The shape of the shape (for example, the sub-electrodes can also have a non-curved shape or a flat shape, respectively).

"Production Apparatus of Electrolytic Metal Foil of the Present Invention" The apparatus of the present invention is an apparatus for producing an electrolytic metal foil, and includes at least the electrode for electroplating described above. That is, the apparatus for electrolyzing metal foil according to the present invention includes the above-described electrode for electroplating 100 as an anode and a roller-shaped counter electrode 200 as a cathode (refer to FIG. 9 ).

In the device of the present invention, the electrode for electroplating used as the anode is composed of at least an electrode member and a substrate on which the electrode member is mounted; the surface of the electrode member of the anode facing the roller-shaped opposite electrode of the cathode has a "thickened surface". ".

The manufacturing apparatus of the present invention has a closer positional relationship or a closer positional relationship between the electrode for electroplating of the anode and the opposite electrode of the cathode due to the "thickened surface". Therefore, when the manufacturing apparatus of this invention is used, it becomes possible to operate in the low voltage state of an electrolytic cell, and it becomes possible to reduce electric power cost. In addition, by increasing the thickness of the conductive base material used as the anode, the current distribution on the electrode for electroplating during energization is more likely to become uniform, and the occurrence of defects in the manufactured metal foil can also be reduced. Although it is only an example, in the device for electrolytic metal foil of the present invention, the separation distance between the anode and the cathode (the distance between the surfaces of the two electrodes) is preferably 5 to 25 mm, more preferably 5 to 20 mm, and further preferably 5 to 20 mm. 6 to 15 mm (for example, about 6 mm to 10 mm).

Electroplating is performed in the manufacture of metal foils. Therefore, the apparatus of the present invention is further provided with an electrolytic cell. In this electrolytic cell, the "electrode for electroplating as the anode" and the "roller-shaped counter electrode as the cathode" are arranged at a certain distance from each other. At least a part of the cell wall of the electrolytic cell 50 can be the substrate 20 of the electrode for electroplating. That is, a part of the tank wall of the electrolytic tank is curved in an arc shape, and the tank wall thus curved can also serve as a substrate of the electrode for electroplating.

In the electrolytic cell, a roller-shaped counter electrode serving as a cathode was installed so as to be rotatable arbitrarily. That is, the cathode is installed in the electrolytic cell as a rotating drum. Specifically, it is preferable to set it as the electrolytic solution (that is, the electroplating solution) immersed in the electrolytic bath above the slightly lower half of the rotating drum of the cathode. The cylindrical cathode itself is commonly used in the manufacture of electrolytic metal foils. In the manufacture of metal foils, the drum of the cathode rotates, causing electrodeposition as it contacts the electrolyte. Due to the rotation of the drum, a part of the cathode drum that came into contact with the electrolyte was exposed to the air, and at this time, the electrodeposited layer was mechanically peeled off from the drum surface. Thereby, a desired metal foil can be obtained. Since the metal foil can be obtained continuously, suitable roll means for winding it can be provided.

The manufacturing apparatus of this invention is further provided with the busbar for supplying electric power to an electrode, and is comprised. For example, the bus bar can be mounted on the electrode member and/or the substrate of the electrode for electroplating. With these bus bars, a direct current can be made to flow between the anode and the cathode, and desired electroforming can be performed. In addition, the substrate or the like may be provided with a supply port (eg, a gap portion) for supplying the electrolyte. Through this supply port, the consumed electroplating components can be appropriately replenished.

Other matters such as more detailed matters and more specific aspects of the manufacturing apparatus of the present invention are described in the above-mentioned "electrode for electroplating of the present invention", and the description thereof is omitted in order to avoid repetition.

Although various aspects of the present invention have been described above, the present invention is not limited to these aspects, and it should be understood that various aspects can be specifically realized by those with ordinary knowledge in the technical field without departing from the scope of the invention defined in the scope of the patent application for the invention. manner.

For example, in the present invention, as shown in FIGS. 10( a ) to ( c ), grooves 25 for fixing or stabilizing the electrode member 10 may be provided on the substrate 20 . That is, in the state where the electrode member 10 is mounted on the substrate 20 , the groove 25 which is fitted into the “adjacent portion 19 of the screw hole” in the electrode member 10 can be provided on the substrate 20 . In this case, the adjacent portion 19 of the electrode member 10 (especially the thin plate electrode 10B) is clamped between the screw 30 and the base plate 20 , thereby contributing to the fixation or stability of the electrode member mounted on the base plate. In addition, as can be seen from the illustrated aspect, the groove 25 corresponds to a countersunk hole for the substrate 20 in some aspects, so the aspect shown in FIGS. 10( a ) to ( c ) can also be said to be a The counterbore is suitably used in a fixed or stable aspect of the electrode member 10 (especially the thin-plate electrode 10B).

As shown in Figure 10(c), the crown of the screw 30 may include a non-tapered portion. In this case, it is easier to increase the portion of the electrode member 10 (especially the thin plate electrode 10B) sandwiched between the screw 30 and the substrate 20 (that is, as can be seen from the figure in the figure, it is easier to increase the portion of the electrode member 10 (especially the thin plate electrode 10B) sandwiched between the screws 30 and the substrate 20 . The adjacent portion 19 ) of the electrode member 10 ( 10B ) sandwiched between the screw 30 and the substrate 20 . Therefore, this point also contributes to the fixation or stabilization of the electrode member mounted on the substrate. [industrial applicability]

The electrode for electroplating of the present invention can be used in various fields in which electroplating is performed. In particular, it can be suitably used for electroforming for producing metal foil by electroplating. Although it is only an illustration, the electrode for electroplating of this invention can be utilized suitably as an anode of the electrolysis apparatus of the metal foil used for manufacturing the electrode collector of a printed circuit material or a secondary battery.

10‧‧‧Electrode member 10'‧‧‧Sub-electrode 10A‧‧‧Thick-walled electrode _10B‧‧‧ Thin plate electrode 10B ‧‧‧Thickening surface 15', 15A‧‧‧Part 18‧‧‧Point 19‧‧‧Adjacent part 20‧‧‧Substrate 25‧‧‧Groove 26‧‧‧Counterbore hole 26'‧‧‧Counterbore hole Surface (forms the bottom surface of the countersunk hole) 28, 29‧‧‧Space 30‧‧‧Screw 32‧‧‧Crown 35‧‧‧Tapered side 37‧‧‧Threaded part 40‧‧‧Space (Separation space) 50‧ ‧‧Electrolytic tank 60‧‧‧Spacer 100‧‧‧Electrode for electroplating 200‧‧‧Reverse electrode 500‧‧‧Electrolytic tank 510‧‧‧Electrolyte 520‧‧‧Electrode for electroplating 530‧‧‧Reverse electrode 550‧ ‧‧Metal foil H1‧‧‧Vertical distance dimension from the thickened surface to the contact level with the substrate H2‧‧‧The height dimension of the taper of the screw

Fig. 1 is a schematic cross-sectional view of the electrode for electroplating of the present invention (Fig. 1(A): using a thick-walled electrode; Fig. 1(B): using a thin-plate electrode). Fig. 2 is a schematic cross-sectional view of the electrode for electroplating of the present invention (Fig. 2(A): using a thick-walled electrode; Fig. 2(B): using a thin-plate electrode). FIG. 3 is a schematic cross-sectional view of the screw. Fig. 4 is a schematic cross-sectional view for explaining the thickened surface in "Condition of thick-walled electrode" (Fig. 4(a): the thickness of the electrode is above the crown size of the countersunk head screw; Fig. 4(b): the thickness of the electrode The same size as the crown of the countersunk head screw). Fig. 5 is a schematic cross-sectional view for explaining the thickened surface in "Condition of the curved sheet electrode provided with bulge" (Fig. 5(a): the bulge of the electrode is the same as that of the crown of the countersunk head screw; Fig. 5(a)) 5(b): The expansion of the electrode is the same as the coronal dimension of the countersunk screw, with spacers attached). FIG. 6 is a schematic cross-sectional view for explaining a suitable close contact state derived from thickening of the present invention in comparison with a “thin electrode”. FIG. 7 is a schematic cross-sectional view of a preferred specific example of "a form of a thick-walled electrode". FIG. 8 is a schematic cross-sectional view for explaining the meaning of the specific example of FIG. 7 . 9 is a schematic perspective view of an exemplary aspect of the manufacturing apparatus of the present invention. 10 is a schematic cross-sectional view of a state in which the electrode for electroplating of the present invention is provided with grooves that contribute to fixing or stabilizing the electrode member to the substrate ( FIG. 10( a ): no spacer is provided; FIG. 10( b ): With spacers; Fig. 10(c): Use special shaped countersunk head screws). FIG. 11 is a schematic cross-sectional view for explaining a state of manufacturing a continuous metal foil by electroplating.

10‧‧‧Electrode components

15‧‧‧Thickening surface

20‧‧‧Substrate

30‧‧‧Screw

100‧‧‧electrode for electroplating

200‧‧‧Reverse electrode

Claims (11)

An electrode for electroplating, used for producing electrolytic metal foil, characterized in that: the electrode for electroplating is composed of at least an electrode member and a substrate on which the electrode member is mounted; A thickened surface; the electrode for electroplating is further provided with a screw for mounting the electrode member on the substrate; the screw is provided with a tapered side surface, and the side portion of the electrode member has a shape complementary to the tapered side surface; A countersunk hole is arranged on the base plate, and the combination of the screw crown and the electrode member closely connected to each other leaves a space in the area of the countersunk head hole and is integrated with the base plate; the electrode member is a solid thick-walled electrode. The electrode for electroplating according to claim 1, wherein the dimension of the vertical distance from the thickened surface to the contacting horizontal surface with the substrate in the electrode member is the portion provided with the tapered side surface of the screw Comparable taper height dimension, or larger. The electrode for electroplating according to claim 1 or 2, wherein, in the cross-sectional view of the electrode member, the side profile of the electrode member has a curved shape. As for the electrode for electroplating according to item 1 of the patent scope, wherein, When the electrode member is attached to the substrate by the screw, the top surface of the screw and the thickened surface of the electrode member are the same surface. The electrode for electroplating according to claim 1, wherein the thickness of the thick-walled electrode has the strength to be fixed to the substrate by the provided portion of the tapered side surface of the screw. The electrode for electroplating according to claim 1, wherein the thickness of the thick-walled electrode is the height dimension of the taper portion corresponding to the setting portion of the tapered side surface of the screw, or larger. The electrode for electroplating according to claim 1, wherein the thickness of the electrode member is greater than 2 mm. The electrode for electroplating according to claim 1, wherein the electrode member is composed of a combination of a plurality of singulated sub-electrodes, and the sub-electrodes are respectively mounted on the substrate. The electrode for electroplating according to claim 8, wherein each of the sub-electrodes has a shape that is bent along the substrate when fixed to the substrate. As for the electrode for electroplating according to item 1 of the patent scope, wherein, The electrode for electroplating is the anode, and the opposite electrode is the cathode. An apparatus for producing electrolytic metal foil, comprising at least the electrode for electroplating according to any one of claims 1 to 10 of the scope of application.

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