TWI758537B - 與矽基感測器集成之射出成型微流體/流體卡匣 - Google Patents

與矽基感測器集成之射出成型微流體/流體卡匣 Download PDF

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TWI758537B
TWI758537B TW107130619A TW107130619A TWI758537B TW I758537 B TWI758537 B TW I758537B TW 107130619 A TW107130619 A TW 107130619A TW 107130619 A TW107130619 A TW 107130619A TW I758537 B TWI758537 B TW I758537B
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channel
input
output
sensor
plastic substrate
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TW107130619A
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Chinese (zh)
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TW201928331A (zh
Inventor
琛 李
鍾誠
劉宇
歐陽伊雯
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大陸商深圳華大智造科技有限公司
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502715—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502738—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/02—Adapting objects or devices to another
    • B01L2200/026—Fluid interfacing between devices or objects, e.g. connectors, inlet details
    • B01L2200/027—Fluid interfacing between devices or objects, e.g. connectors, inlet details for microfluidic devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0689—Sealing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B01L2300/0663—Whole sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0877—Flow chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0887—Laminated structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/12—Specific details about materials
    • B01L2300/123—Flexible; Elastomeric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/02—Drop detachment mechanisms of single droplets from nozzles or pins
    • B01L2400/027—Drop detachment mechanisms of single droplets from nozzles or pins electrostatic forces between substrate and tip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
    • B01L2400/0487—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure fluid pressure, pneumatics
    • B01L2400/049—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure fluid pressure, pneumatics vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/06—Valves, specific forms thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/06—Valves, specific forms thereof
    • B01L2400/0633—Valves, specific forms thereof with moving parts
    • B01L2400/0655—Valves, specific forms thereof with moving parts pinch valves

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
TW107130619A 2017-09-01 2018-08-31 與矽基感測器集成之射出成型微流體/流體卡匣 TWI758537B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201762553614P 2017-09-01 2017-09-01
US62/553,614 2017-09-01

Publications (2)

Publication Number Publication Date
TW201928331A TW201928331A (zh) 2019-07-16
TWI758537B true TWI758537B (zh) 2022-03-21

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Country Link
US (1) US11007523B2 (https=)
EP (2) EP3676010B1 (https=)
JP (2) JP7169345B2 (https=)
KR (1) KR102387367B1 (https=)
CN (1) CN111050913B (https=)
AU (1) AU2018325527B2 (https=)
CA (1) CA3072484C (https=)
TW (1) TWI758537B (https=)
WO (1) WO2019046690A1 (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11666908B2 (en) * 2017-09-14 2023-06-06 Hewlett-Packard Development Company, L.P. Microfluidic package
CN111855083B (zh) * 2019-04-19 2021-10-22 厦门大学 具有液流控制阀的微流控芯片的模拟检测装置及方法
DE102019112254A1 (de) * 2019-05-10 2020-11-12 Leonhard Kurz Stiftung & Co. Kg Mikrofluidische Anordnung, Verfahren zu deren Herstellung und Messsystem umfassend die mikrofluidische Anordnung sowie Verwendung
US12458966B2 (en) 2019-05-10 2025-11-04 Leonhard Kurz Stiftung & Co. Kg Microfluidic array, method of manufacture, measuring system comprising the microfluidic array, and use
AU2020279254B2 (en) * 2019-05-21 2025-08-14 Illumina, Inc. Sensors having an active surface
CN111013676A (zh) * 2019-12-17 2020-04-17 江苏圣极基因科技有限公司 一种液滴制备方法及微流控芯片
TWI902731B (zh) 2019-12-30 2025-11-01 美商伊路米納有限公司 與流動池一同使用之致動系統及設備
US11808569B2 (en) * 2020-03-22 2023-11-07 Strike Photonics, Inc. Waveguide enhanced analyte detection apparatus
FR3114092B1 (fr) * 2020-09-17 2022-08-26 Commissariat Energie Atomique Procédé de fabrication d'un dispositif micro-fluidique et dispositif fabriqué par ledit procédé
WO2022155222A1 (en) 2021-01-15 2022-07-21 Illumina, Inc. Enabling sensor top side wirebonding
AU2022381074A1 (en) * 2021-11-05 2024-01-18 Illumina, Inc. Sensor having an active surface
EP4665500A1 (en) * 2023-02-17 2025-12-24 Twist Bioscience Corporation Vertical flow cell for biomolecule extraction
KR102938643B1 (ko) 2023-06-19 2026-03-13 (주)페블아이 현장검사를 위한 휴대용 바이오칩
DE102023126573A1 (de) * 2023-09-28 2025-04-03 Bürkert Werke GmbH & Co. KG Einweg-Fluidführungsbaugruppe, Verfahren zur Herstellung der Einweg-Fluidführungsbaugruppe, mikrofluidische Vorrichtung mit Einweg-Fluidführungsbaugruppe sowie Proteindefektdiagnosevorrichtung
WO2025242595A1 (en) * 2024-05-21 2025-11-27 Lex diagnostics Ltd. Fluidic cartridges with component-free valves

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120315191A1 (en) * 2010-03-23 2012-12-13 Hitachi-High-Technologies Corporation Microchannel chip and microarray chip
TW201319563A (zh) * 2011-11-08 2013-05-16 黃榮堂 整合ｉｃ晶片與塑膠微流體基板的檢測系統
WO2015138648A1 (en) * 2014-03-11 2015-09-17 Illumina, Inc. Disposable, integrated microfluidic cartridge and methods of making and using same
TW201723478A (zh) * 2015-12-30 2017-07-01 國立臺北科技大學 檢測裝置

Family Cites Families (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11502617A (ja) * 1995-03-10 1999-03-02 メソ スケール テクノロジーズ，エルエルシー 多重アレイの多重特異的な電気化学発光試験
WO2000066266A1 (en) * 1999-05-03 2000-11-09 Cantion A/S Sensor for microfluid handling system
US7601270B1 (en) * 1999-06-28 2009-10-13 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US6790599B1 (en) * 1999-07-15 2004-09-14 Microbionics, Inc. Microfluidic devices and manufacture thereof
EP1343973B2 (en) 2000-11-16 2020-09-16 California Institute Of Technology Apparatus and methods for conducting assays and high throughput screening
NL1016779C2 (nl) * 2000-12-02 2002-06-04 Cornelis Johannes Maria V Rijn Matrijs, werkwijze voor het vervaardigen van precisieproducten met behulp van een matrijs, alsmede precisieproducten, in het bijzonder microzeven en membraanfilters, vervaardigd met een dergelijke matrijs.
JP3990909B2 (ja) * 2001-12-26 2007-10-17 旭化成株式会社 化学反応用カートリッジ
US6878271B2 (en) 2002-09-09 2005-04-12 Cytonome, Inc. Implementation of microfluidic components in a microfluidic system
US7455770B2 (en) * 2002-09-09 2008-11-25 Cytonome, Inc. Implementation of microfluidic components in a microfluidic system
US7842234B2 (en) * 2002-12-02 2010-11-30 Epocal Inc. Diagnostic devices incorporating fluidics and methods of manufacture
US7445926B2 (en) * 2002-12-30 2008-11-04 The Regents Of The University Of California Fluid control structures in microfluidic devices
SG145784A1 (en) * 2003-08-11 2008-09-29 California Inst Of Techn Microfluidic large scale integration
NL1024578C2 (nl) * 2003-10-21 2005-04-22 Univ Delft Tech Inrichting voor het uitvoeren van een reactie.
US20060002817A1 (en) * 2004-06-30 2006-01-05 Sebastian Bohm Flow modulation devices
US7832429B2 (en) * 2004-10-13 2010-11-16 Rheonix, Inc. Microfluidic pump and valve structures and fabrication methods
CN101263077B (zh) * 2005-09-09 2011-11-09 皇家飞利浦电子股份有限公司 一种制造具有间隔的微系统的方法
BRPI0619273A2 (pt) 2005-10-26 2011-09-20 Gen Electric Métodos e sistemas para o fornecimento de amostras fluidas para grupos sensores
KR20090056980A (ko) 2006-08-15 2009-06-03 더 거번먼트 오브 더 유나이티드 스테이츠 오브 아메리카, 레프리젠티드 바이 더 세크러테리 오브 더 네이비 평면 기판에 유체 셀을 부착하기 위한 방법 및 장치
NZ576760A (en) 2006-11-09 2011-10-28 Univ Illinois Photonic crystal based biosensor based on a microfluidic device
CN101910399B (zh) * 2007-10-30 2015-11-25 考利达基因组股份有限公司 用于核酸高通量测序的装置
CN101580222B (zh) * 2008-05-15 2011-11-16 原相科技股份有限公司 微机电元件与制作方法
JP2011030522A (ja) * 2009-08-04 2011-02-17 Aida Engineering Ltd マイクロ流体デバイス
US9651568B2 (en) * 2009-11-23 2017-05-16 Cyvek, Inc. Methods and systems for epi-fluorescent monitoring and scanning for microfluidic assays
DE102010002915B4 (de) * 2010-03-16 2012-10-18 Senslab-Gesellschaft Zur Entwicklung Und Herstellung Bioelektrochemischer Sensoren Mbh Mikrofluidischer Sensor
EP2606154B1 (en) 2010-08-20 2019-09-25 Integenx Inc. Integrated analysis system
US8828332B2 (en) * 2010-09-10 2014-09-09 Gradientech Ab Microfluidic capsule
US9387476B2 (en) * 2010-10-27 2016-07-12 Illumina, Inc. Flow cells for biological or chemical analysis
EP2718465B1 (en) 2011-06-09 2022-04-13 Illumina, Inc. Method of making an analyte array
US8637242B2 (en) * 2011-11-07 2014-01-28 Illumina, Inc. Integrated sequencing apparatuses and methods of use
CN103157523A (zh) * 2011-12-15 2013-06-19 三星电子株式会社 微流器件及其制造方法
US8895249B2 (en) 2012-06-15 2014-11-25 Illumina, Inc. Kinetic exclusion amplification of nucleic acid libraries
US9592507B2 (en) 2012-06-22 2017-03-14 Abbott Point Of Care Inc. Integrated cartridge housings for sample analysis
GB2516669B (en) * 2013-07-29 2015-09-09 Atlas Genetics Ltd A method for processing a liquid sample in a fluidic cartridge
PT3669985T (pt) * 2014-06-05 2022-05-06 Illumina Inc Sistemas incluindo uma válvula rotativa para pelo menos uma de preparação de amostra ou análise de amostras
CN105624020B (zh) * 2014-11-07 2017-11-03 深圳华大基因研究院 用于检测dna片段的碱基序列的微流控芯片
CN105013550B (zh) * 2015-07-09 2016-08-24 清华大学深圳研究生院 微流控芯片夹具和微流控芯片
US20170014824A1 (en) * 2015-07-17 2017-01-19 Lawrence M. Boyd Apparatus and method for sorting of cells
DK3334839T3 (da) * 2015-08-14 2021-04-26 Illumina Inc Systemer og fremgangsmåder under anvendelse af magnetisk reagerende sensorer til bestemmelse af en genetisk egenskab
CN105293428B (zh) * 2015-10-19 2017-04-19 北京航天控制仪器研究所 一种mems器件的全硅化圆片级真空封装方法及封装器件
US20170182493A1 (en) 2015-12-28 2017-06-29 QIAGEN Waltham Thin-film flowcells
CN105891285B (zh) * 2016-04-28 2018-08-10 中国科学院电子学研究所 高选择性富集和检测四溴双酚a的集成芯片及其应用
CN206184464U (zh) * 2016-11-25 2017-05-24 黑龙江东方学院 自动化的微流控接收装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120315191A1 (en) * 2010-03-23 2012-12-13 Hitachi-High-Technologies Corporation Microchannel chip and microarray chip
TW201319563A (zh) * 2011-11-08 2013-05-16 黃榮堂 整合ｉｃ晶片與塑膠微流體基板的檢測系統
WO2015138648A1 (en) * 2014-03-11 2015-09-17 Illumina, Inc. Disposable, integrated microfluidic cartridge and methods of making and using same
TW201723478A (zh) * 2015-12-30 2017-07-01 國立臺北科技大學 檢測裝置

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Publication number Publication date
CN111050913B (zh) 2022-04-12
JP2023002784A (ja) 2023-01-10
CA3072484A1 (en) 2019-03-07
CA3072484C (en) 2022-05-24
EP4382474A2 (en) 2024-06-12
AU2018325527B2 (en) 2021-09-16
EP3676010A4 (en) 2021-09-08
AU2018325527A1 (en) 2020-02-27
TW201928331A (zh) 2019-07-16
KR102387367B1 (ko) 2022-04-14
WO2019046690A1 (en) 2019-03-07
US11007523B2 (en) 2021-05-18
EP3676010A1 (en) 2020-07-08
JP7169345B2 (ja) 2022-11-10
EP3676010B1 (en) 2024-07-03
EP4382474A3 (en) 2024-09-25
CN111050913A (zh) 2020-04-21
KR20200042534A (ko) 2020-04-23
US20190070606A1 (en) 2019-03-07
JP2020532722A (ja) 2020-11-12

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