TWI756068B - 二氧化硫混合物及其製造方法以及填充容器 - Google Patents
二氧化硫混合物及其製造方法以及填充容器 Download PDFInfo
- Publication number
- TWI756068B TWI756068B TW110107457A TW110107457A TWI756068B TW I756068 B TWI756068 B TW I756068B TW 110107457 A TW110107457 A TW 110107457A TW 110107457 A TW110107457 A TW 110107457A TW I756068 B TWI756068 B TW I756068B
- Authority
- TW
- Taiwan
- Prior art keywords
- sulfur dioxide
- dioxide mixture
- filling container
- filling
- mol ppm
- Prior art date
Links
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 title claims abstract description 350
- 238000011049 filling Methods 0.000 title claims abstract description 159
- 239000000203 mixture Substances 0.000 title claims abstract description 128
- 238000000034 method Methods 0.000 title description 10
- 239000007791 liquid phase Substances 0.000 claims abstract description 55
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 52
- 239000012071 phase Substances 0.000 claims abstract description 44
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 230000018044 dehydration Effects 0.000 claims description 10
- 238000006297 dehydration reaction Methods 0.000 claims description 10
- 239000010935 stainless steel Substances 0.000 claims description 10
- 229910001220 stainless steel Inorganic materials 0.000 claims description 10
- 239000003463 adsorbent Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 abstract description 19
- 239000002184 metal Substances 0.000 abstract description 19
- 150000002739 metals Chemical class 0.000 abstract description 13
- 235000010269 sulphur dioxide Nutrition 0.000 description 147
- 239000007789 gas Substances 0.000 description 84
- 238000005260 corrosion Methods 0.000 description 18
- 230000007797 corrosion Effects 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 229910021536 Zeolite Inorganic materials 0.000 description 4
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- DLYUQMMRRRQYAE-UHFFFAOYSA-N tetraphosphorus decaoxide Chemical compound O1P(O2)(=O)OP3(=O)OP1(=O)OP2(=O)O3 DLYUQMMRRRQYAE-UHFFFAOYSA-N 0.000 description 4
- 239000010457 zeolite Substances 0.000 description 4
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000007792 gaseous phase Substances 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 238000004611 spectroscopical analysis Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 238000000180 cavity ring-down spectroscopy Methods 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 229910001385 heavy metal Inorganic materials 0.000 description 2
- 239000002808 molecular sieve Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 2
- FECNOIODIVNEKI-UHFFFAOYSA-N 2-[(2-aminobenzoyl)amino]benzoic acid Chemical class NC1=CC=CC=C1C(=O)NC1=CC=CC=C1C(O)=O FECNOIODIVNEKI-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-N Sulfurous acid Chemical compound OS(O)=O LSNNMFCWUKXFEE-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 235000013373 food additive Nutrition 0.000 description 1
- 239000002778 food additive Substances 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000825 pharmaceutical preparation Substances 0.000 description 1
- 229940127557 pharmaceutical product Drugs 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000004291 sulphur dioxide Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D90/00—Component parts, details or accessories for large containers
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B17/00—Sulfur; Compounds thereof
- C01B17/48—Sulfur dioxide; Sulfurous acid
- C01B17/50—Preparation of sulfur dioxide
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B17/00—Sulfur; Compounds thereof
- C01B17/48—Sulfur dioxide; Sulfurous acid
- C01B17/50—Preparation of sulfur dioxide
- C01B17/56—Separation; Purification
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/26—Drying gases or vapours
- B01D53/261—Drying gases or vapours by adsorption
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C1/00—Pressure vessels, e.g. gas cylinder, gas tank, replaceable cartridge
- F17C1/14—Pressure vessels, e.g. gas cylinder, gas tank, replaceable cartridge constructed of aluminium; constructed of non-magnetic steel
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/70—Containers, packaging elements or packages, specially adapted for particular articles or materials for materials not otherwise provided for
- B65D85/84—Containers, packaging elements or packages, specially adapted for particular articles or materials for materials not otherwise provided for for corrosive chemicals
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/80—Compositional purity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/03—Mixtures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/05—Ultrapure fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
- F17C2223/0146—Two-phase
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2270/00—Applications
- F17C2270/05—Applications for industrial use
- F17C2270/0518—Semiconductors
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- General Engineering & Computer Science (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020040137 | 2020-03-09 | ||
| JP2020-040137 | 2020-03-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW202138290A TW202138290A (zh) | 2021-10-16 |
| TWI756068B true TWI756068B (zh) | 2022-02-21 |
Family
ID=77672271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW110107457A TWI756068B (zh) | 2020-03-09 | 2021-03-03 | 二氧化硫混合物及其製造方法以及填充容器 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20220250908A1 (enExample) |
| JP (1) | JPWO2021182045A1 (enExample) |
| KR (1) | KR102768242B1 (enExample) |
| CN (1) | CN113874300B (enExample) |
| TW (1) | TWI756068B (enExample) |
| WO (1) | WO2021182045A1 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20250155080A1 (en) * | 2022-03-31 | 2025-05-15 | Sumitomo Seika Chemicals Co., Ltd. | Corrosive-gas-mixture-filled container and corrosive gas composition |
| KR20250065550A (ko) | 2022-09-06 | 2025-05-13 | 스미토모 세이카 가부시키가이샤 | 이산화 황 혼합물 충전 용기 및 이산화 황 조성물 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11157811A (ja) * | 1997-11-19 | 1999-06-15 | Sumitomo Seika Chem Co Ltd | 二酸化硫黄の製造方法および製造装置 |
| JPH11228114A (ja) * | 1998-02-05 | 1999-08-24 | Sumitomo Seika Chem Co Ltd | 二酸化硫黄の精製方法、および精製装置 |
| JP5612979B2 (ja) * | 2010-09-22 | 2014-10-22 | 住友精化株式会社 | 二酸化硫黄ガスの精製方法及び精製装置 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3632312A (en) * | 1968-06-12 | 1972-01-04 | Dorr Oliver Inc | Production of high-strength sulfur dioxide |
| SE337363B (enExample) * | 1968-12-09 | 1971-08-09 | Svenska Cellulosa Ab | |
| DE2364377C3 (de) * | 1973-12-22 | 1982-11-18 | Messer Griesheim Gmbh, 6000 Frankfurt | Stahlflasche zur Aufbewahrung von Gasgemischen |
| DE3723572A1 (de) * | 1987-07-16 | 1989-01-26 | Linde Ag | Verfahren zur trocknung von schwefeldioxid |
| JP2004536227A (ja) * | 2001-07-17 | 2004-12-02 | レール・リキード−ソシエテ・アノニム・ア・ディレクトワール・エ・コンセイユ・ドゥ・スールベイランス・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | 安定性増低濃度ガス、これを含む製品及びその製造方法 |
| WO2003100410A1 (en) * | 2002-05-29 | 2003-12-04 | L'air Liquide - Societe Anonyme A Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude | Reduced moisture compositions comprising an acid gas and a matrix gas, articles of manufacture comprising said compositions and processes for manufacturing same |
| JP2007197262A (ja) * | 2006-01-27 | 2007-08-09 | Rikogaku Shinkokai | 亜硫酸ガス回収方法および亜硫酸ガス回収プラント |
| CA2691070A1 (en) * | 2007-06-25 | 2008-12-31 | L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procede S Georges Claude | Gas mixture for dosing liquids with sulphur dioxide and method for using the same |
| CN102774814A (zh) * | 2012-08-23 | 2012-11-14 | 楚源高新科技集团股份有限公司 | 一种纯氧法生产液体二氧化硫的净化新工艺 |
| EP3395759B1 (en) * | 2015-12-22 | 2022-02-09 | Showa Denko K.K. | Hydrogen chloride mixture, method for producing the same, and filling container |
| SG11201811088PA (en) * | 2016-06-22 | 2019-01-30 | Showa Denko Kk | Hydrogen sulfide mixture, method for producing same, and filling container |
| KR20190113792A (ko) * | 2017-02-02 | 2019-10-08 | 스미토모 세이카 가부시키가이샤 | 액화 가스의 정제 방법 및 장치 |
| CN110040691B (zh) * | 2019-03-20 | 2024-03-15 | 河南心连心深冷能源股份有限公司 | 一种利用酸性气制备生产高纯二氧化硫的装置及生产方法 |
-
2021
- 2021-02-17 KR KR1020227013618A patent/KR102768242B1/ko active Active
- 2021-02-17 CN CN202180003498.5A patent/CN113874300B/zh active Active
- 2021-02-17 US US17/595,708 patent/US20220250908A1/en active Pending
- 2021-02-17 WO PCT/JP2021/005912 patent/WO2021182045A1/ja not_active Ceased
- 2021-02-17 JP JP2022505872A patent/JPWO2021182045A1/ja active Pending
- 2021-03-03 TW TW110107457A patent/TWI756068B/zh active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11157811A (ja) * | 1997-11-19 | 1999-06-15 | Sumitomo Seika Chem Co Ltd | 二酸化硫黄の製造方法および製造装置 |
| JPH11228114A (ja) * | 1998-02-05 | 1999-08-24 | Sumitomo Seika Chem Co Ltd | 二酸化硫黄の精製方法、および精製装置 |
| JP5612979B2 (ja) * | 2010-09-22 | 2014-10-22 | 住友精化株式会社 | 二酸化硫黄ガスの精製方法及び精製装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113874300B (zh) | 2023-02-28 |
| CN113874300A (zh) | 2021-12-31 |
| TW202138290A (zh) | 2021-10-16 |
| US20220250908A1 (en) | 2022-08-11 |
| KR102768242B1 (ko) | 2025-02-18 |
| JPWO2021182045A1 (enExample) | 2021-09-16 |
| KR20220070475A (ko) | 2022-05-31 |
| WO2021182045A1 (ja) | 2021-09-16 |
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