TWI756057B - Movable element and linear servo motor - Google Patents

Movable element and linear servo motor Download PDF

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TWI756057B
TWI756057B TW110105664A TW110105664A TWI756057B TW I756057 B TWI756057 B TW I756057B TW 110105664 A TW110105664 A TW 110105664A TW 110105664 A TW110105664 A TW 110105664A TW I756057 B TWI756057 B TW I756057B
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magnet
mover
magnetic flux
tooth
core
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TW110105664A
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TW202135436A (en
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鳥居久範
山代諭
平野慧大
田哲哉
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日商三菱電機股份有限公司
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/34—Reciprocating, oscillating or vibrating parts of the magnetic circuit
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H02K1/223—Rotor cores with windings and permanent magnets
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Linear Motors (AREA)
  • Vehicle Body Suspensions (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)

Abstract

A movable element (1) includes: cores (11) divided along a movable direction; a movable element core (40) formed by magnets (12) sandwiched between the cores (11) and having a shape of a plurality of teeth (14) protruding from a core back (15) extending in the movable direction; and a coil (13) wound around each tooth (14); wherein the magnetic flux entering the cores (11) from the magnets (12) includes: a direction component of the movable direction and a direction component belonging to a teeth tips direction from the core back (15) to the teeth (14); and the magnetic flux entering the magnets (12) from the cores (11) includes: a direction component of the movable direction and a direction component belonging to a teeth roots direction from the teeth (14) to the core back (15).

Description

可動子及線性伺服馬達Movers and Linear Servo Motors

本揭示係關於一種具備有埋入磁鐵之鐵芯(core)的可動子及線性伺服馬達。 The present disclosure relates to a mover and a linear servo motor having an iron core embedded with a magnet.

線性伺服馬達的可動子係由可動子鐵芯與線圈所構成，而定子係由磁鐵及基座所構成，其中，該可動子鐵芯係齒部自沿可動方向延伸的芯背(core back)突出的形狀者。可動子的線圈係配置在屬於齒部彼此之間之間隙的槽部(slot)並捲繞於齒部。 The movable sub-system of the linear servo motor is composed of a movable sub-core and a coil, and the stator is composed of a magnet and a base, wherein the movable sub-core is composed of teeth from a core back extending along the movable direction. Prominent Shapers. The coil of the mover is arranged in a slot that belongs to a gap between the teeth, and is wound around the teeth.

若線性伺服馬達為於定子設置磁鐵的構造，則為了加長馬達的可動距離而延長定子的長度時，磁鐵數量會增加而增加成本。為了防止成本的增加，若減少每單位長度的磁鐵數，會致使可動子的推力降低。 If the linear servo motor has a structure in which magnets are provided in the stator, if the length of the stator is increased in order to increase the movable distance of the motor, the number of magnets will increase and the cost will increase. In order to prevent the increase in cost, reducing the number of magnets per unit length reduces the thrust of the mover.

專利文獻1揭示一種於可動子鐵芯埋入了磁鐵的線性伺服馬達。專利文獻1所揭示的線性伺服馬達係在齒部之中定子側的部分設置寬度擴張部分，藉此使通過齒部的磁通增加。專利文獻1所揭示的線性伺服馬達，由於定子沒有配置磁鐵，而抑制了因可動距離的延長所致的成本的上昇。 Patent Document 1 discloses a linear servo motor in which a magnet is embedded in a mover iron core. In the linear servo motor disclosed in Patent Document 1, a width-expanding portion is provided in a portion of the tooth portion on the stator side, thereby increasing the magnetic flux passing through the tooth portion. In the linear servo motor disclosed in Patent Document 1, since no magnets are arranged in the stator, the increase in cost due to the extension of the movable distance is suppressed.

(先前技術文獻) (prior art literature) (專利文獻) (patent literature)

專利文獻1：日本特開2018-183043號公報。 Patent Document 1: Japanese Patent Laid-Open No. 2018-183043.

專利文獻1所揭示的線性伺服馬達，由於齒部的磁場係垂直於可動方向並朝向定子側，因此難以使可動子的推力提升。 In the linear servo motor disclosed in Patent Document 1, since the magnetic field of the teeth portion is perpendicular to the moving direction and faces the stator side, it is difficult to increase the thrust of the mover.

本發明係有鑑於上述課題所研創者，目的在於獲得一種可動子，比使齒部的磁場設為垂直於可動方向並朝定子側，還使推力提升。 The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to obtain a movable element which can increase the thrust force rather than setting the magnetic field of the tooth portion perpendicular to the movable direction and toward the stator side.

為解決上述課題並達成目的，本發明的可動子係具有：沿可動方向分割的鐵芯；藉由夾持在鐵芯之間的磁鐵所形成，且為自沿可動方向延伸的芯背突出複數個齒部之形狀的可動子鐵芯；以及捲繞於各個齒部的線圈。從磁鐵進入至鐵芯的磁通係包含：可動方向的方向成分及屬於從芯背朝齒部之方向的齒部前端方向的方向成分。從鐵芯進入至磁鐵的磁通係包含：可動方向的方向成分及從屬於齒部朝芯背之方向的齒部根部方向的方向成分。 In order to solve the above-mentioned problems and achieve the object, the movable sub-system of the present invention has: iron cores divided along the movable direction; formed by magnets sandwiched between the iron cores, and a plurality of cores protruding from the back of the core extending in the movable direction A mover iron core in the shape of each tooth; and a coil wound around each tooth. The magnetic flux entering from the magnet to the iron core includes a directional component in the moving direction and a directional component in the direction of the front end of the tooth portion belonging to the direction from the back of the core to the tooth portion. The magnetic flux that enters the magnet from the iron core includes a directional component in the movable direction and a directional component in the direction of the root of the tooth portion which is subordinate to the direction of the tooth portion toward the back of the core.

本揭示的可動子係達成下述功效：會比將齒部的磁場設為垂直於可動方向並朝定子側，更可使推力提升。 The movable sub-system of the present disclosure achieves the following effect: the thrust can be improved more than setting the magnetic field of the tooth portion perpendicular to the movable direction and facing the stator side.

1:可動子 1: Movers

2:定子 2: Stator

3:勵磁軛 3: Excitation yoke

4:勵磁磁場 4: Excitation magnetic field

10:線性伺服馬達 10: Linear Servo Motor

11:鐵芯 11: Iron core

11a:磁鐵接觸部 11a: Magnet contact part

11b:鐵芯連結部 11b: Iron core connection

12:磁鐵 12: Magnets

12a,12b,12c,12d:磁鐵片 12a, 12b, 12c, 12d: magnet pieces

13:線圈 13: Coil

14:齒部 14: Teeth

15:芯背 15: Core back

16:槽部 16: Groove

21:突起 21: Protrusions

31:軛鐵芯 31: Yoke core

32:勵磁線圈 32: Excitation coil

40:可動子鐵芯 40: mover iron core

111:基部 111: Base

112:突出部 112: Protrusion

A:可動方向 A: Movable direction

B:齒部前端方向 B: The direction of the front end of the tooth

C:齒部根部方向 C: Tooth root direction

L1:厚度 L1: Thickness

L2:厚度 L2: Thickness

圖1係實施型態1的線性伺服馬達的立體圖。 FIG. 1 is a perspective view of a linear servo motor according to Embodiment 1. FIG.

圖2係實施型態1的線性伺服馬達的剖面圖。 2 is a cross-sectional view of the linear servo motor according to the first embodiment.

圖3係顯示實施型態1的線性伺服馬達的可動子的變形例之圖。 FIG. 3 is a diagram showing a modification of the mover of the linear servo motor of Embodiment 1. FIG.

圖4係實施型態1的線性伺服馬達的可動子的剖面圖。 4 is a cross-sectional view of a mover of the linear servo motor according to the first embodiment.

圖5係顯示使實施型態1的線性伺服馬達的可動子的磁鐵磁化的方法之圖。 FIG. 5 is a diagram showing a method of magnetizing the magnet of the mover of the linear servo motor of Embodiment 1. FIG.

圖6係顯示使實施型態1的線性伺服馬達的可動子的磁鐵磁化的方法之圖。 6 is a diagram showing a method of magnetizing the magnet of the mover of the linear servo motor of Embodiment 1. FIG.

圖7係實施型態2的線性伺服馬達的可動子的剖面圖。 7 is a cross-sectional view of a mover of the linear servo motor according to the second embodiment.

圖8係顯示使實施型態2的線性伺服馬達的可動子的磁鐵磁化的方法之圖。 FIG. 8 is a diagram showing a method of magnetizing the magnet of the mover of the linear servo motor of Embodiment 2. FIG.

圖9係實施型態3的線性伺服馬達的可動子的剖面圖。 9 is a cross-sectional view of a mover of a linear servo motor according to Embodiment 3. FIG.

圖10係顯示實施型態3的線性伺服馬達的可動子的變形例之圖。 FIG. 10 is a diagram showing a modification of the mover of the linear servo motor of Embodiment 3. FIG.

圖11係實施型態4的線性伺服馬達的可動子的剖面圖。 11 is a cross-sectional view of a mover of the linear servo motor according to the fourth embodiment.

圖12係實施型態5的線性伺服馬達的可動子的剖面圖。 12 is a cross-sectional view of a mover of the linear servo motor according to the fifth embodiment.

圖13係實施型態5的變形例之線性伺服馬達的可動子的剖面圖。 13 is a cross-sectional view of a mover of a linear servo motor according to a modification of the fifth embodiment.

圖14係實施型態6的線性伺服馬達的可動子的剖面圖。 14 is a cross-sectional view of a mover of a linear servo motor according to Embodiment 6. FIG.

以下，根據圖式詳細說明實施型態的可動子及線性伺服馬達。 Hereinafter, the mover and the linear servo motor of the embodiment will be described in detail with reference to the drawings.

實施型態1 Implementation Type 1

圖1係實施型態1的線性伺服馬達的立體圖。圖2係實施型態1的線性伺服馬達的剖面圖。線性伺服馬達10係具有：可動子1及定子2。定子2為棒狀並等間隔配置有突起21。可動子1係沿著定子2之突起21的排列方向移動。也就是，定子2之突起21的排列方向亦為可動子1的可動方向。圖2中箭頭A顯示可動子1的可動方向。 FIG. 1 is a perspective view of a linear servo motor according to Embodiment 1. FIG. 2 is a cross-sectional view of the linear servo motor according to the first embodiment. The linear servo motor 10 includes a mover 1 and a stator 2 . The stator 2 is rod-shaped and has protrusions 21 arranged at equal intervals. The mover 1 moves along the arrangement direction of the protrusions 21 of the stator 2 . That is, the arrangement direction of the protrusions 21 of the stator 2 is also the moving direction of the mover 1 . The arrow A in FIG. 2 shows the moving direction of the mover 1 .

可動子1係具有可動子鐵芯40及線圈13，該可動子鐵芯40係從沿可動方向伸長的芯背15突出複數個齒部14之形狀者。可動子鐵芯40係由沿可動方向分割的鐵芯11及夾持於鐵芯11之間的磁鐵12所形成。以下的說明中，從芯背15朝向齒部14的方向係稱為齒部前端方向，而從齒部14朝向芯背15的方向係稱為齒部根部方向。圖2中箭頭B顯示齒部前端方向，而以箭頭C顯示齒部根部方向。齒部14係複數個排列於可動子1的可動方向，且在各齒部14捲繞線圈13。線圈13係配置於兩個鄰接齒部14間之稱為「槽部」的間隙。可動子1係沿齒部14的排列方向移動。也就是，可動子1及定子2係以齒部14的排列方向與突起21的排列方向為相同方向的方式配置。 The mover 1 has the mover iron core 40 and the coil 13, and the mover iron core 40 is in the shape of a plurality of teeth 14 protruding from the core back 15 extending in the moving direction. The mover iron core 40 is formed of the iron cores 11 divided in the moving direction and the magnets 12 sandwiched between the iron cores 11 . In the following description, the direction from the core back 15 toward the tooth portion 14 is referred to as the tooth portion front end direction, and the direction from the tooth portion 14 toward the core back 15 is referred to as the tooth portion root direction. In FIG. 2, arrow B shows the direction of the front end of the tooth portion, and arrow C shows the direction of the root of the tooth portion. A plurality of tooth portions 14 are arranged in the moving direction of the mover 1 , and the coil 13 is wound around each tooth portion 14 . The coil 13 is arranged in a gap called a "slot" between two adjacent tooth portions 14 . The mover 1 moves along the arrangement direction of the tooth portions 14 . That is, the movable element 1 and the stator 2 are arranged so that the arrangement direction of the teeth portions 14 and the arrangement direction of the protrusions 21 are the same direction.

可動子鐵芯40係形成為利用可動方向之槽部16的中央部來分割鐵芯11的構造。利用槽部16的中央部來分割鐵芯11，藉此可捲繞線圈13後而排列齒部14，因此使線圈13捲繞至齒部14容易進行。另外，可動子鐵芯40亦可為未利用槽部16的部分來分割鐵芯11的構造。使鐵芯 11未由槽部16的部分來分割而連接的構造，藉此可減少可動子鐵芯40的零件數量。 The mover iron core 40 has a structure in which the iron core 11 is divided by the central portion of the groove portion 16 in the moving direction. The core 11 is divided by the center portion of the slot portion 16 , whereby the coil 13 can be wound and then the teeth 14 can be arranged, so that the coil 13 can be easily wound to the teeth 14 . In addition, the movable iron core 40 may have a structure in which the iron core 11 is divided by a portion not using the groove portion 16 . make iron core The structure 11 is connected without being divided by the portion of the groove portion 16, whereby the number of parts of the movable sub-core 40 can be reduced.

鐵芯11係具有：基部111以及自基部111突出的突出部112。基部111為芯背15的一部分，而突出部112為齒部14的一部分。 The iron core 11 has a base portion 111 and a protruding portion 112 protruding from the base portion 111 . The base 111 is part of the core back 15 and the protrusions 112 are part of the teeth 14 .

在鐵芯11當中突出部112與磁鐵12的界面中，自磁鐵12進入至鐵芯11的磁通除了可動子1的可動方向的方向成分之外，還包含有齒部前端方向的方向成分。此外，在鐵芯11當中突出部112與磁鐵12的界面中，自鐵芯11進入至磁鐵12的磁通除了可動子1的可動方向的方向成分外，還含有齒部根部方向的方向成分。 At the interface between the protruding portion 112 and the magnet 12 in the iron core 11 , the magnetic flux entering the iron core 11 from the magnet 12 includes a direction component in the direction of movement of the mover 1 as well as a direction component in the direction of the tooth tip. Further, in the interface between the protruding portion 112 and the magnet 12 in the iron core 11, the magnetic flux entering the magnet 12 from the iron core 11 includes a directional component in the direction of the tooth root in addition to the directional component in the moving direction of the mover 1.

圖3係顯示實施型態1的線性伺服馬達的可動子的變形例之圖。自磁鐵12進入至鐵芯11的磁通不僅是鐵芯11中的突出部112中、在基部111中也包含可動方向的方向成分與齒部前端方向的方向成分，且自鐵芯11進入至磁鐵12的磁通也包含了可動方向的方向成分與齒部根部方向的方向成分。 FIG. 3 is a diagram showing a modification of the mover of the linear servo motor of Embodiment 1. FIG. The magnetic flux entering from the magnet 12 to the iron core 11 includes not only the protruding part 112 in the iron core 11 but also the directional component of the movable direction and the directional component of the tooth front end direction in the base part 111 , and the magnetic flux entering from the iron core 11 to The magnetic flux of the magnet 12 also includes a directional component in the movable direction and a directional component in the direction of the tooth root.

圖4係實施型態1的線性伺服馬達的可動子的剖面圖。圖4中箭頭顯示實施型態1之可動子1的磁鐵12內部的磁通方向。在包含由齒部前端方向與可動子1的可動方向以及齒部根部方向與可動子1的可動方向所形成之平面的剖面中，磁鐵12的內部的磁通係朝齒部根部方向呈凸的曲線狀。 4 is a cross-sectional view of a mover of the linear servo motor according to the first embodiment. The arrow in FIG. 4 shows the direction of the magnetic flux inside the magnet 12 of the mover 1 of the first embodiment. In a cross section including a plane formed by the direction of the front end of the teeth and the moving direction of the mover 1 and the direction of the root of the tooth and the moving direction of the mover 1, the magnetic flux inside the magnet 12 is convex toward the root of the tooth. curvilinear.

圖5及圖6係顯示使實施型態1的線性伺服馬達的可動子的磁鐵磁化的方法之圖。首先，如圖5所示，使具備有軛鐵芯31及勵磁線圈32的勵磁軛3配置在齒部14的前端側，且使勵磁線圈32正對於磁鐵 12。並且，如圖6所示，產生環狀的勵磁磁場4，該環狀的勵磁磁場4所繞的軸係與齒部前端方向及齒部根部方向成垂直，且與可動子1之可動方向成垂直，藉由產生該環狀的勵磁磁場4，可使磁鐵12內部的磁通在包含由齒部前端方向及齒部根部方向與可動子1的可動方向所形成之平面的剖面中，成為朝齒部根部方向呈凸的曲線狀。 5 and 6 are diagrams showing a method of magnetizing the magnet of the mover of the linear servo motor of the first embodiment. First, as shown in FIG. 5 , the field yoke 3 including the yoke core 31 and the field coil 32 is arranged on the front end side of the tooth portion 14 , and the field coil 32 faces the magnet. 12. Then, as shown in FIG. 6 , a ring-shaped exciting magnetic field 4 is generated. The axis system around which the ring-shaped exciting magnetic field 4 is wound is perpendicular to the direction of the front end of the tooth portion and the direction of the root portion of the tooth portion, and is perpendicular to the movable element 1 . By generating the ring-shaped exciting magnetic field 4, the magnetic flux inside the magnet 12 can be made in the cross section including the plane formed by the direction of the front end of the tooth portion and the direction of the root portion of the tooth portion and the moving direction of the mover 1 , which becomes a convex curve toward the root of the tooth.

相較於自磁鐵12進入至鐵芯11之磁通及自鐵芯11進入至磁鐵12之磁通的方向為可動方向的情形，實施型態1的線性伺服馬達10會使自磁鐵12經由鐵芯11進入至定子2的突起21的磁通增加，以及使自定子2的突起21經由鐵芯11進入至磁鐵12的磁通增加。因此，實施型態1的線性伺服馬達10會使磁阻轉矩(reluctance torque)增加，可使可動子1的推力提升。 Compared with the case where the directions of the magnetic flux from the magnet 12 to the iron core 11 and the magnetic flux from the iron core 11 to the magnet 12 are the moving directions, the linear servo motor 10 of the embodiment 1 makes the magnetic flux from the magnet 12 pass through the iron The magnetic flux entering the protrusion 21 of the stator 2 from the core 11 increases, and the magnetic flux entering the magnet 12 from the protrusion 21 of the stator 2 via the iron core 11 increases. Therefore, the linear servo motor 10 of the embodiment 1 can increase the reluctance torque, and can increase the thrust of the mover 1 .

此外，若使磁鐵12朝與可動方向垂直並且為定子2側之方向的齒部前端方向產生磁場的情形，為了提升推力，必須在齒部14配置可動方向尺寸較大的磁鐵12，而使齒部14的可動方向的尺寸變大。然而，當齒部14的可動方向的尺寸變大時，使得屬於線圈13之設置空間的槽部16變窄，會阻礙推力提升。也就是，當使磁鐵12朝齒部前端方向產生磁場的情形，若使自磁鐵12進入至定子2的突起的磁通資加，會致使線圈13所產生的磁力減弱，因而難以使可動子1的推力提升。實施型態1的線性伺服馬達10不須使配置於齒部14之磁鐵12的可動方向的尺寸變大，因此不用使槽部16變窄。因此，實施型態1的線性伺服馬達10，能夠不用減少線圈13的匝數，而使磁阻轉矩增加並使可動子的推力提升。 In addition, if the magnet 12 generates a magnetic field in the direction of the front end of the tooth portion, which is perpendicular to the moving direction and is in the direction of the stator 2 side, in order to increase the thrust, it is necessary to arrange the magnet 12 with a large size in the moving direction on the tooth portion 14, so that the teeth The size in the movable direction of the portion 14 is increased. However, when the size of the tooth portion 14 in the movable direction is increased, the groove portion 16 belonging to the installation space of the coil 13 is narrowed, which hinders the increase of the thrust. That is, when the magnet 12 generates a magnetic field in the direction of the front end of the teeth, if the magnetic flux entering the protrusion from the magnet 12 to the stator 2 is increased, the magnetic force generated by the coil 13 is weakened, so that it is difficult to make the mover 1 thrust boost. In the linear servo motor 10 of the first embodiment, it is not necessary to increase the size of the magnet 12 arranged in the tooth portion 14 in the moving direction, and therefore the groove portion 16 does not need to be narrowed. Therefore, the linear servo motor 10 of Embodiment 1 can increase the reluctance torque and increase the thrust of the mover without reducing the number of turns of the coil 13 .

此外，當實施型態1的可動子1係從齒部14的前端側使磁鐵12勵磁時，易使勵磁磁場4的方向與磁鐵12的磁化方向為相同方向，因此可使勵磁磁場4當中磁化方向成分放大，使磁鐵12容易勵磁。 In addition, when the mover 1 of the first embodiment excites the magnet 12 from the front end side of the tooth portion 14 , the direction of the exciting magnetic field 4 and the magnetization direction of the magnet 12 are easily made to be the same direction, so that the exciting magnetic field can be The magnetization direction component in 4 is enlarged, so that the magnet 12 can be easily excited.

另外，只要自磁鐵12進入至鐵芯11的突出部112的磁通包含可動子1的可動方向的方向成分及齒部前端方向的方向成分，且自鐵芯11的突出部112進入至磁鐵12的磁通包含可動子1的可動方向的方向成分及齒部根部方向的方向成分，則磁鐵12內部的磁通亦可不是曲線狀。 In addition, as long as the magnetic flux entering from the magnet 12 to the protruding portion 112 of the iron core 11 includes the directional component in the moving direction of the mover 1 and the directional component in the direction of the front end of the tooth portion, and entering from the protruding portion 112 of the iron core 11 to the magnet 12 The magnetic flux includes the directional component of the moving direction of the mover 1 and the directional component of the tooth root direction, and the magnetic flux inside the magnet 12 may not be curved.

實施型態2 Implementation Type 2

圖7係實施型態2的線性伺服馬達的可動子的剖面圖。圖7中箭頭顯示實施型態2之可動子1的磁鐵12內部的磁通方向。實施型態2的可動子1中，磁鐵12內部的磁通的彎曲方向在芯背15與齒部14相異。在包含由齒部前端方向及齒部根部方向與可動子1的可動方向所形成之平面的剖面中，於齒部14之部分，磁鐵12內部的磁通係形成朝齒部前端方向呈凸的曲線狀。另一面，在芯背15之部分，磁鐵12內部的磁通係在包含由齒部前端方向及齒部根部方向與可動子1的可動方向所形成之平面的剖面中，形成朝齒部根部方向呈凸的曲線狀。 7 is a cross-sectional view of a mover of the linear servo motor according to the second embodiment. The arrow in FIG. 7 shows the direction of the magnetic flux inside the magnet 12 of the mover 1 of the second embodiment. In the mover 1 of the second embodiment, the bending direction of the magnetic flux inside the magnet 12 is different in the core back 15 and the tooth portion 14 . In a section including a plane formed by the direction of the front end of the tooth portion, the direction of the root portion of the tooth portion, and the moving direction of the mover 1, in the portion of the tooth portion 14, the magnetic flux inside the magnet 12 forms a convex toward the direction of the front end of the tooth portion. curvilinear. On the other hand, in the portion of the core back 15, the magnetic flux inside the magnet 12 is formed in the direction of the root of the tooth in the cross-section including the plane formed by the direction of the front end of the tooth portion, the direction of the root of the tooth portion, and the moving direction of the mover 1. Convex curve shape.

圖8係顯示使實施型態2的線性伺服馬達的可動子的磁鐵磁化的方法之圖。利用具備有軛鐵芯31及勵磁線圈32的勵磁軛3，從齒部14伸長之方向的兩方向夾持可動子1，使勵磁線圈32正對於磁鐵12。並且，使所產生之勵磁磁場4形成為繞著與齒部前端方向及齒部根部方向與可動子1之可動方向成垂直的軸之環狀，藉此可使磁鐵12內部的磁通在包含由齒部前端方向及齒部根部方向與可動子1的可動方向所形成之平面 的剖面中，在齒部14的磁曲線的彎曲方向與在芯背15的磁曲線的彎曲方向設為相反方向。 FIG. 8 is a diagram showing a method of magnetizing the magnet of the mover of the linear servo motor of Embodiment 2. FIG. The mover 1 is sandwiched by the field yoke 3 including the yoke core 31 and the field coil 32 from both directions in which the teeth 14 extend, so that the field coil 32 faces the magnet 12 . In addition, the generated exciting magnetic field 4 is formed in a ring shape around an axis perpendicular to the direction of the front end of the tooth portion and the direction of the root portion of the tooth portion and the moving direction of the mover 1, so that the magnetic flux inside the magnet 12 can be Including the plane formed by the direction of the front end of the tooth portion, the direction of the root portion of the tooth portion, and the moving direction of the mover 1 In the cross section of , the bending direction of the magnetic curve at the teeth portion 14 and the bending direction of the magnetic curve at the core back 15 are set in opposite directions.

實施型態2的可動子1係相較於從齒部14的前端側使磁鐵12整體勵磁的情形，易使芯背15的磁鐵12勵磁。因此，可使磁鐵12的磁力提高而使可動子1的推力提升。 The mover 1 of the second embodiment is easier to excite the magnet 12 of the core back 15 than the case where the entire magnet 12 is excited from the front end side of the tooth portion 14 . Therefore, the magnetic force of the magnet 12 can be increased, and the thrust of the movable element 1 can be increased.

實施型態3 Implementation Type 3

圖9係實施型態3的線性伺服馬達的可動子的剖面圖。圖9中以箭頭顯示實施型態3之可動子1的磁鐵12內部的磁通方向。圖9係顯示實施型態3之線性伺服馬達的可動子之磁鐵內部的磁通方向的剖面圖。實施型態3的可動子1的磁鐵12係由沿可動方向排列的兩片磁鐵片12a、12b所構成。兩片磁鐵片12a、12b其各自內部的磁通係在包含由齒部前端方向以及齒部根部方向與可動子1的可動方向所形成之平面的剖面中為直線狀。在由沿可動方向排列的兩片磁鐵片12a、12b所構成的磁鐵12整體中，內部的磁通係在包含由齒部前端方向及齒部根部方向與可動子1的可動方向所形成之平面的剖面中，為朝齒部根部方向呈凸的曲線狀。 9 is a cross-sectional view of a mover of a linear servo motor according to Embodiment 3. FIG. In FIG. 9 , the direction of the magnetic flux inside the magnet 12 of the mover 1 of Embodiment 3 is indicated by arrows. 9 is a cross-sectional view showing the direction of the magnetic flux inside the magnet of the mover of the linear servo motor of Embodiment 3. FIG. The magnet 12 of the mover 1 of the third embodiment is composed of two magnet pieces 12a and 12b arranged in the moving direction. The magnetic fluxes inside the two magnet pieces 12 a and 12 b are linear in a cross section including a plane formed by the direction of the front end of the tooth portion, the direction of the root portion of the tooth portion, and the moving direction of the mover 1 . In the entire magnet 12 composed of the two magnet pieces 12a, 12b arranged in the movable direction, the internal magnetic flux is contained in the plane formed by the direction of the front end of the tooth portion, the direction of the root portion of the tooth portion, and the moving direction of the mover 1 In the cross section of , it is a curved shape that is convex toward the root of the tooth.

磁鐵12之材料所採用的強磁性體係具有磁異向性(magnetic anisotropy)，會存在有易磁化的方向與難磁化的方向。實施型態3的磁鐵12由於磁通在磁鐵片12a、12b的內部沒有彎曲，故使兩片的磁鐵片12a、12b各自以易磁化的方向來勵磁，藉此於磁鐵12整體可使內部的磁通設為屈曲線狀。 The ferromagnetic system used for the material of the magnet 12 has magnetic anisotropy, and there are directions that are easy to magnetize and directions that are hard to magnetize. In the magnet 12 of the third embodiment, since the magnetic flux is not bent inside the magnet pieces 12 a and 12 b , the magnet pieces 12 a and 12 b of the two pieces are respectively excited in the directions of easy magnetization, whereby the entire magnet 12 can make the inside of the magnet 12 . The magnetic flux is set as a curve shape.

圖10係顯示實施型態3之線性伺服馬達的可動子的變形例之圖。圖10中以箭頭顯示實施型態3的變形例之可動子1的磁鐵12內部 的磁通方向。實施型態3之變形例的可動子1的磁鐵12係沿著齒部前端方向及齒部根部方向與可動子1的可動方向的各個方向各排列兩片之總計四片磁鐵片12a、12b、12c、12d所構成。芯背15之磁鐵12內部的磁通，係在包含由齒部前端方向及齒部根部方向與可動子1的可動方向所形成之平面的剖面中，為朝齒部前端方向呈凸的屈曲線狀。齒部14之磁鐵12內部的磁通，係在包含由齒部前端方向及齒部根部方向與可動子1的可動方向所形成之平面的剖面中，為朝齒部根部方向呈凸的屈曲線狀。 FIG. 10 is a diagram showing a modification of the mover of the linear servo motor of Embodiment 3. FIG. In FIG. 10 , the inside of the magnet 12 of the movable element 1 according to the modification of the third embodiment is shown by arrows the direction of the magnetic flux. The magnet 12 of the mover 1 according to the modification of the third embodiment is a total of four magnet pieces 12a, 12b, two pieces arranged in each direction of the front end of the tooth portion, the direction of the base portion of the tooth portion, and the moving direction of the mover 1. 12c, 12d constitute. The magnetic flux inside the magnet 12 of the core back 15 is a flex line that is convex toward the front end of the tooth in the cross section including the plane formed by the direction of the front end of the tooth portion, the direction of the root portion of the tooth portion, and the moving direction of the mover 1 shape. The magnetic flux inside the magnet 12 of the teeth 14 is a flex line that is convex toward the root of the teeth in the cross section including the plane formed by the direction of the tip of the teeth, the direction of the root of the teeth, and the moving direction of the mover 1 shape.

當沒有使磁鐵12分成為複數個磁鐵片的情形，若要使磁通在磁鐵12內部中彎曲，會由於存在有往難磁化之方向進行勵磁的部分，因此使得磁鐵12的磁力的提高變得困難。實施型態3的可動子1係藉由排列以沿易磁化的方向所磁化的複數個磁鐵片12a、12b、12c、12d，使磁通方向在磁鐵12內部彎曲，故此可使磁鐵12的磁力增加。因此，實施型態3的可動子1係相較於未使磁鐵12分成為複數個磁鐵片的構造，可使推力提升。 If the magnet 12 is not divided into a plurality of magnet pieces, if the magnetic flux is bent in the inside of the magnet 12, there is a portion that is excited in a direction that is difficult to magnetize, so that the increase in the magnetic force of the magnet 12 is reduced. difficult. In the mover 1 of the third embodiment, a plurality of magnet pieces 12 a , 12 b , 12 c and 12 d are arranged to be magnetized in the easy magnetization direction, so that the magnetic flux direction is bent inside the magnet 12 , so that the magnetic force of the magnet 12 can be adjusted. Increase. Therefore, the mover 1 of the third embodiment can increase the thrust force compared with the structure in which the magnet 12 is not divided into a plurality of magnet pieces.

實施型態4 Implementation Type 4

圖11係實施型態4的線性伺服馬達的可動子的剖面圖。實施型態4的可動子1中，僅在齒部14中之自可動子1的端部算起的第二個齒部14使磁鐵12的厚度不同。具體而言，自可動子1的端部算起的第二個齒部14的磁鐵12的厚度L2係比其他齒部14的磁鐵12的厚度L1還薄。除此之外，係與實施型態1的可動子1相同。 11 is a cross-sectional view of a mover of the linear servo motor according to the fourth embodiment. In the mover 1 of the fourth embodiment, the thickness of the magnet 12 is different only in the second tooth portion 14 from the end of the mover 1 among the tooth portions 14 . Specifically, the thickness L2 of the magnet 12 of the second tooth portion 14 from the end of the mover 1 is thinner than the thickness L1 of the magnet 12 of the other tooth portion 14 . Other than that, it is the same as the mover 1 of the first embodiment.

藉由可動子1的移動，定子2的突起21與磁鐵12的位置關係會週期性地變化。隨著定子2的突起21與磁鐵12的位置關係的週期 性的變化，磁鐵12吸引定子2的突起21的吸引力也會週期性地變化，在磁鐵12通過吸引力為最大的部位時，會形成阻礙可動子1之移動的抵抗力。該現象一般稱為齒槽效應(cogging)。可動子1的可動方向之端部的齒部14係僅在可動方向的單側與另一個齒部14鄰接，所以容易受到齒槽效應的影響。實施型態4的可動子1係使自可動子1的可動方向的端部算起的第二個齒部14的磁鐵12比其他齒部14的磁鐵12還薄，因此自端部算起的第二個的齒部14的磁鐵所產生的磁通會比由其他齒部14的磁鐵12所產生的磁通還弱。因此，實施型態4之可動子1的可動方向的端部的齒部14就會變得難以受到齒槽效應的影響。因此，實施型態4的可動子1係可使齒槽效應降低，而謀求節能功效。 The positional relationship between the protrusions 21 of the stator 2 and the magnets 12 changes periodically due to the movement of the mover 1 . According to the period of the positional relationship between the protrusion 21 of the stator 2 and the magnet 12 The attraction force of the magnet 12 to attract the protrusion 21 of the stator 2 also changes periodically, and when the magnet 12 passes through the position where the attraction force is the largest, a resistance force is formed that hinders the movement of the mover 1 . This phenomenon is generally referred to as cogging. The teeth 14 at the ends in the moving direction of the mover 1 abut against the other teeth 14 only on one side in the moving direction, and are therefore susceptible to cogging. In the mover 1 of the fourth embodiment, the magnet 12 of the second tooth 14 from the end in the moving direction of the mover 1 is thinner than the magnets 12 of the other teeth 14, so the magnet 12 from the end is thinner than the magnet 12 of the other tooth 14. The magnetic flux generated by the magnet of the second tooth 14 is weaker than the magnetic flux generated by the magnet 12 of the other tooth 14 . Therefore, the teeth 14 at the ends in the moving direction of the mover 1 of the fourth embodiment are less susceptible to the cogging effect. Therefore, the mover 1 of the embodiment 4 can reduce the cogging effect and achieve an energy saving effect.

實施型態5 Implementation Type 5

圖12係實施型態5的線性伺服馬達的可動子的剖面圖。圖12中以箭頭顯示實施型態5的可動子1的磁鐵12內部的磁通方向。此外，圖12中以反白箭頭顯示方向性電磁鋼板之易磁化方向。實施型態5的可動子1的鐵芯11係由方向性電磁鋼板所構成。鐵芯11係具備：與磁鐵12接觸的磁鐵接觸部11a；以及連接鐵芯11彼此的鐵芯連結部11b。鐵芯11當中磁鐵接觸部11a的方向性電磁鋼板的易磁化方向為齒部前端方向及齒部根部方向。 12 is a cross-sectional view of a mover of the linear servo motor according to the fifth embodiment. In FIG. 12 , the direction of the magnetic flux inside the magnet 12 of the mover 1 of Embodiment 5 is indicated by arrows. In addition, in FIG. 12, the easy magnetization direction of the grain-oriented electrical steel sheet is shown by the white arrow. The iron core 11 of the mover 1 of the fifth embodiment is made of grain-oriented electrical steel sheet. The iron core 11 is provided with the magnet contact part 11a which contacts the magnet 12, and the iron core connection part 11b which connects the iron cores 11 comrades. The directions of easy magnetization of the grain-oriented electrical steel sheet of the magnet contact portion 11 a in the iron core 11 are the direction of the front end of the tooth portion and the direction of the root portion of the tooth portion.

磁鐵接觸部11a中，由於容易往齒部前端方向及齒部根部方向進行方向性電磁鋼板的磁化，故從磁鐵12進入至鐵芯11的磁通會容易傳播至齒部14的前端側。因此，相較於鐵芯11沒有易磁化方向的情形，會使進入至定子2之突起21的磁通增加，所以會使可動子1的推力提升。 同樣地，線圈13所產生的磁通也變得容易進入至定子2的突起21，也會使可動子1的推力提升。 In the magnet contact portion 11a, since the magnetization of the grain-oriented electrical steel sheet is easily performed in the direction of the front end of the tooth portion and the direction of the root portion of the tooth portion, the magnetic flux entering the iron core 11 from the magnet 12 is easily propagated to the front end side of the tooth portion 14. Therefore, compared with the case where the iron core 11 has no easy magnetization direction, the magnetic flux entering the protrusions 21 of the stator 2 is increased, so that the thrust of the mover 1 is increased. Similarly, the magnetic flux generated by the coil 13 also easily enters the protrusion 21 of the stator 2 , and the thrust of the movable element 1 is also increased.

此外，使磁鐵12勵磁時，也會使勵磁線圈32所產生的磁通易通過磁鐵12，因此可容易地使磁鐵12勵磁。 In addition, when the magnet 12 is excited, the magnetic flux generated by the excitation coil 32 can easily pass through the magnet 12, so that the magnet 12 can be easily excited.

實施型態5的可動子1係使磁鐵12所產生的磁通及線圈13所產生的磁通兩者容易進入至定子2的突起21，故可使推力提升。 In the movable element 1 of the fifth embodiment, both the magnetic flux generated by the magnet 12 and the magnetic flux generated by the coil 13 can easily enter the protrusion 21 of the stator 2, so that the thrust can be increased.

圖13係實施型態5之變形例的線性伺服馬達的可動子的剖面圖。圖13中，箭頭係顯示實施型態5之變形例的可動子1的磁鐵12內部的磁通方向。此外，圖13中反白箭頭係顯示方向性電磁鋼板的易磁化方向方。實施型態5之變形例的可動子1的鐵芯11中，鐵芯連結部11b的易磁化方向為可動子1的可動方向。鐵芯連結部11b的易磁化方向為可動子1的可動方向，因此使得對於線圈13之通電時產生的磁通會容易通過鐵芯連結部11b。對於線圈13之通電時產生的磁通容易通過鐵芯連結部11b，藉此會使線圈13所產生的磁通變得容易進入至定子2的突起21，故此可使可動子1的推力提升。 13 is a cross-sectional view of a mover of a linear servo motor according to a modification of the fifth embodiment. In FIG. 13 , the arrows indicate the direction of the magnetic flux inside the magnet 12 of the movable element 1 according to the modification of the fifth embodiment. In addition, the white arrows in FIG. 13 show the direction of easy magnetization of the grain-oriented electrical steel sheet. In the iron core 11 of the mover 1 according to the modification of the fifth embodiment, the easy magnetization direction of the iron core connection portion 11 b is the moving direction of the mover 1 . The easy magnetization direction of the iron core connecting portion 11b is the moving direction of the mover 1, so that the magnetic flux generated when the coil 13 is energized can easily pass through the iron core connecting portion 11b. The magnetic flux generated when the coil 13 is energized easily passes through the iron core connecting portion 11b, thereby the magnetic flux generated by the coil 13 can easily enter the protrusion 21 of the stator 2, so that the thrust of the movable element 1 can be increased.

實施型態6 Implementation Type 6

圖14係實施型態6的線性伺服馬達的可動子的剖面圖。圖14中箭頭係顯示實施型態6的可動子1的磁鐵12內部的磁通方向。實施型態6的可動子1中，在齒部14的前端側使可動向方向的磁鐵12的尺寸縮短。鐵芯11與磁鐵12的界面係相對於可動方向傾斜。因此，鐵芯11與磁鐵12的界面的面積會比鐵芯11與磁鐵12的界面相對於可動方向為垂直的情形還 更擴大。因此，從磁鐵12進入至鐵芯11的磁通會比鐵芯11與磁鐵12的界面相對於可動方向為垂直的情形增加，會使可動子1的堆力提升。 14 is a cross-sectional view of a mover of a linear servo motor according to Embodiment 6. FIG. The arrows in FIG. 14 indicate the direction of the magnetic flux inside the magnet 12 of the mover 1 according to the sixth embodiment. In the mover 1 of the sixth embodiment, the size of the magnet 12 in the movable direction is shortened on the front end side of the tooth portion 14 . The interface between the iron core 11 and the magnet 12 is inclined with respect to the moving direction. Therefore, the area of the interface between the iron core 11 and the magnet 12 is smaller than that in the case where the interface between the iron core 11 and the magnet 12 is perpendicular to the moving direction more expanded. Therefore, the magnetic flux entering from the magnet 12 to the iron core 11 is increased compared to the case where the interface between the iron core 11 and the magnet 12 is perpendicular to the moving direction, which increases the stacking force of the mover 1 .

此外，由於齒部14之前端部中可動方向的磁鐵12的尺寸縮小，故鐵芯11的尺寸會相應地變長，而使齒部14的鐵芯11的體積會比鐵芯11與磁鐵12之介面為垂直的情形變大。因此，會使鐵芯11不易磁性飽和，可增加從磁鐵12或線圈13通過鐵芯11而進入至定子2的突起21的磁通，且可使可動子1的推力提升。 In addition, since the size of the magnet 12 in the movable direction at the front end of the tooth portion 14 is reduced, the size of the iron core 11 is correspondingly increased, and the volume of the iron core 11 of the tooth portion 14 is larger than that of the iron core 11 and the magnet 12 The interface becomes larger when the interface is vertical. Therefore, the iron core 11 is less likely to be magnetically saturated, the magnetic flux from the magnet 12 or the coil 13 to the protrusion 21 of the stator 2 through the iron core 11 can be increased, and the thrust of the movable stator 1 can be increased.

此外，磁鐵12係形成齒部14的前端側較細的錐角形狀，因此即使被定子2的突起21吸引，也難以從鐵芯11脫落。因此，可提高可動子1的強度及耐久性。 In addition, since the magnet 12 is formed in a tapered shape with a thin tip end side of the tooth portion 14 , even if it is attracted by the protrusion 21 of the stator 2 , it is difficult to fall off from the iron core 11 . Therefore, the strength and durability of the mover 1 can be improved.

以上實施型態所示的構成係內容的一例，亦可與其他公知的技術結合，並且在不脫離要旨的範圍內亦可省略、變更構成的一部分。 The configuration shown in the above embodiment is an example of the contents, and other known techniques may be combined, and a part of the configuration may be omitted or changed within the scope of the gist.

1:可動子 1: Movers

2:定子 2: Stator

10:線性伺服馬達 10: Linear Servo Motor

11:鐵芯 11: Iron core

12:磁鐵 12: Magnets

13:線圈 13: Coil

14:齒部 14: Teeth

15:芯背 15: Core back

16:槽部 16: Groove

21:突起 21: Protrusions

40:可動子鐵芯 40: mover iron core

111:基部 111: Base

112:突出部 112: Protrusion

A:可動方向 A: Movable direction

B:齒部前端方向 B: The direction of the front end of the tooth

C:齒部根部方向 C: Tooth root direction

Claims (7)

一種可動子，係具有：沿可動方向分割的鐵芯；藉由夾持在前述鐵芯之間的磁鐵所形成，且為自沿前述可動方向延伸的芯背突出複數個齒部之形狀的可動子鐵芯；以及捲繞於各個前述齒部的線圈；從前述磁鐵進入至前述鐵芯的磁通係包含：前述可動方向的方向成分及屬於從前述芯背朝前述齒部之方向的齒部前端方向的方向成分；並且，從前述鐵芯進入至前述磁鐵的前述磁通係包含：前述可動方向的方向成分及屬於從前述齒部朝前述芯背之方向的齒部根部方向的方向成分；前述磁鐵之中，於至少前述齒部的部分中，前述磁鐵之中前述磁通朝前述鐵芯流出的部分係以包含前述可動方向的方向成分及前述齒部前端方向的方向成分的方向而被磁化，前述磁通從前述鐵芯進入的部分係以包含前述可動方向的方向成分及前述齒部根部方向的方向成分的方向而被磁化；前述磁鐵之中於前述芯背的部分中，前述磁鐵之中前述磁通朝前述鐵芯流出的部分係以包含前述可動方向的方向成分及前述齒部根部方向的方向成分的方向而被磁化，前述磁鐵之中前述磁通從前述鐵芯流入的部分係以包含前述可動方向的方向成分及前述齒部前端方向的方向成分的方向而被磁化。 A mover is provided with: iron cores divided along the moving direction; formed by magnets sandwiched between the iron cores, and a mover in the shape of a plurality of teeth protruding from the back of the core extending along the moving direction A sub-core; and a coil wound around each of the teeth; the magnetic flux entering the core from the magnet includes: a directional component in the movable direction and a tooth belonging to a direction from the core away from the teeth A directional component in the front end direction; and the magnetic flux entering the magnet from the iron core includes: a directional component in the movable direction and a directional component belonging to the direction of the root of the tooth portion in the direction from the tooth portion toward the core back; Among the above-mentioned magnets, at least in the portion of the tooth portion, the portion of the magnet in which the magnetic flux flows out to the iron core is subjected to a direction including a direction component of the movable direction and a direction component of the direction component of the front end direction of the tooth portion. For magnetization, the portion of the magnetic flux entering from the iron core is magnetized in a direction including the directional component of the movable direction and the directional component of the root direction of the tooth portion; among the magnets, in the portion on the back of the core, the magnet A portion of the magnetic flux flowing out of the iron core is magnetized in a direction including a direction component of the movable direction and a direction component of the tooth root direction, and a portion of the magnet where the magnetic flux flows from the iron core It is magnetized in a direction including the directional component of the movable direction and the directional component of the front end direction of the tooth portion. 如請求項1所述之可動子，其中，前述磁鐵係分成為具有易磁化方向的複數個磁鐵片。 The mover according to claim 1, wherein the magnet system is divided into a plurality of magnet pieces having an easy magnetization direction. 如請求項1所述之可動子，其中，複數個前述齒部當中，配置於自端部算起的第二個前述齒部的前述磁鐵的前述可動方向的尺寸，係比配置於自前述端部算起的第二個以外之前述齒部的前述磁鐵還小。 The mover according to claim 1, wherein, among the plurality of tooth portions, the size in the moving direction of the magnet arranged at the second tooth portion from the end portion is greater than the size in the moving direction of the magnet arranged from the end portion. The magnets of the teeth other than the second one from the second are smaller. 如請求項1所述之可動子，其中，前述鐵芯係由具有易磁化方向的方向性電磁鋼板所構成；前述齒部之部分的前述方向性電磁鋼板的前述易磁化方向係前述齒部前端方向及前述齒部根部方向。 The mover according to claim 1, wherein the iron core is made of grain-oriented electrical steel sheet having an easy magnetization direction; direction and the direction of the root of the aforementioned tooth portion. 如請求項4所述之可動子，其中，前述鐵芯之前述芯背的部分中，前述方向性電磁鋼板的前述易磁化方向為前述可動方向。 The mover according to claim 4, wherein in the portion of the core back of the iron core, the easy magnetization direction of the grain-oriented electrical steel sheet is the movable direction. 如請求項1至5中任一項所述之可動子，其中，前述磁鐵為在前述齒部的前端部之前述可動方向的尺寸為較小的錐角形狀。 The mover according to any one of Claims 1 to 5, wherein the magnet has a tapered shape having a smaller dimension in the moving direction at the front end portion of the tooth portion. 一種線性伺服馬達，係具有：等間隔配置有複數個突起之棒狀的定子；以及如請求項1至6中任一項所述之可動子，係以使前述可動方向與前述突起的排列方向成為相同方向的方式與前述定子相對向而配置。 A linear servo motor comprising: a rod-shaped stator in which a plurality of protrusions are arranged at equal intervals; and a mover according to any one of claims 1 to 6, wherein the moving direction and the arrangement direction of the protrusions are aligned It is arrange|positioned so that it may become the same direction as the said stator.
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