TWI749740B - Lidar system - Google Patents

Abstract

A Lidar system includes a driver, a light emitting element, a first detector, a collimating lens, a beam splitter, a reflecting element, a lens, and a second detector. The light emitting element is configured to emit first light and second light. The first detector is disposed between the driver and the light emitting element and is configured to detect power of the first light. The collimating lens is configured to collimate the second light to generate first collimation light. The beam splitter is configured to make the first collimation light to penetrate through the beam splitter to generate penetrated light. The reflecting element is configured to reflect the penetrated light to generate first reflected light, and let the first reflected light shine upon an under-test-object to generate scattered light. The lens is configured to collimate scattered light of the under-test-object to generate second collimation light. The reflecting is further configured to reflect the second collimation light to generate second reflected light. The beam splitter is further configured to reflect the second reflected light to generate third reflected light. The second detector is configured to detect the third reflected light.

Description

Lidar System

The contents of the embodiments described in the present disclosure are related to a LiDAR system, and particularly to a LiDAR system that can measure the power of a light-emitting element in real time.

With the development of science and technology, the LIDAR system has been applied in many fields. In some related technologies, the power measurement of the light-emitting elements in the LiDAR system is performed during the assembly test stage or before leaving the factory. However, this cannot ensure that the light-emitting element will not be abnormal during subsequent use.

Some embodiments of the present disclosure are related to a LiDAR system. The LiDAR system includes a driver, a light-emitting element, a first detector, a collimator lens, a beam splitter, a reflecting element, a lens, and a second detector. The light emitting element is used for emitting a first light beam and a second light beam. The first detector is arranged between the driver and the light-emitting element and used for detecting a power of the first light beam. The collimator lens is used for collimating the second light beam to generate a first collimated light. The beam splitter penetrates the first collimated light to generate a transmitted light. The reflective element is used for reflecting the penetrating light to generate a first reflected light, and making the first reflected light hit the measuring object and generate scattered light. The lens is used for collimating the scattered light of the measurement object to generate a second collimated light. The reflective element is further used to reflect the second collimated light to generate a second reflected light. The beam splitter is further used to reflect the second reflected light to generate a third reflected light. The second detector is used for detecting the third reflected light.

Some embodiments of the present disclosure are related to a LiDAR system. The LiDAR system includes a first driver, a first light-emitting element, a first detector, a first collimator, a first beam splitter, a reflective element, a first lens, and a second detector . The first light emitting element is used for emitting a first light beam and a second light beam. A first area is formed between the first driver and the first light-emitting element. The first light beam irradiates the first driver, so that the first driver reflects the first light beam to generate a first light to be measured. The first detector is arranged outside the first area and used for detecting the first light to be measured. The first collimating lens is used for collimating the second light to generate a first collimated light. The first beam splitter is used for penetrating the first collimated light to generate a first penetrating light. The reflective element is used for reflecting the first penetrating light to generate a first reflected light, and causing the first reflected light to hit the measuring object and generate the first scattered light. The first lens is used for collimating the first scattered light of the measurement object to generate a second collimated light. The reflective element is further used to reflect the second collimated light to generate a second reflected light. The first beam splitter is further used to reflect the second reflected light to generate a third reflected light. The second detector is used for detecting the third reflected light.

In summary, the LiDAR system of the present disclosure can measure the power of the light-emitting element in real time, so as to improve the reliability of the LiDAR system. In addition, in the present disclosure, the detector is arranged between the driver and the light-emitting element, which can effectively use the space to avoid increasing the volume of the optical system and avoid the light path from being too complicated. Furthermore, the LiDAR system of the present disclosure has the advantages of easy installation and low cost.

The following is a detailed description of the embodiments in conjunction with the accompanying drawings, but the provided embodiments are not used to limit the scope of the present disclosure, and the description of the structural operations is not used to limit the order of its execution, any recombination of components The structure and the devices with equal effects are all within the scope of this disclosure. In addition, the drawings are for illustrative purposes only, and are not drawn in accordance with the original dimensions. To facilitate understanding, the same elements or similar elements in the following description will be described with the same symbols.

The term "coupled" used in this article can also refer to "electrical coupling", and the term "connected" can also refer to "electrical connection". "Coupling" and "connection" can also refer to two or more components cooperating or interacting with each other.

Refer to Figure 1A and Figure 1B. FIG. 1A is a schematic diagram of the lidar system 100 according to some embodiments of the present disclosure. Taking the example of Figure 1A and Figure 1B, the LiDAR system 100 includes a driver 110, a detector 120A, a light-emitting element 130, a collimator 140, a beam splitter 150, a detector 160, a reflective element 170, and a processor. 180 and lens 190. FIG. 1B is a top view of the driver 110, the detector 120A, and the light-emitting element 130 in FIG. 1A according to some embodiments of the present disclosure. The driver 110 can use the pulse signal to drive the light-emitting element 130 to emit light. In some embodiments, the driver 110 may be implemented by an application specific integrated circuit (ASIC) or a field effect transistor made of gallium nitride (GaN). The driver 110 needs to have characteristics that can withstand high instantaneous current. To drive the light-emitting element 130 normally, a current of tens of amperes is generally required. Therefore, the distance between the driver 110 and the light-emitting element 130 is usually on the order of millimeters. For example, the distance between the driver 110 and the light emitting element 130 may be less than 10 millimeters. The detector 120A is disposed between the driver 110 and the light-emitting element 130. In some embodiments, the light-emitting element 130 is a laser diode (LD), but the present disclosure is not limited thereto. In some embodiments, the reflective element 170 is a mirror.

Refer to Figure 1C and Figure 1D. FIG. 1C is a side view of the light-emitting element 130 according to some embodiments of the present disclosure. FIG. 1D is a top view of the light-emitting element 130 in FIG. 1C according to some embodiments of the present disclosure. Taking the example of FIG. 1C and FIG. 1D as an example, the light-emitting element 130 includes a light-emitting surface LA1 and a light-emitting surface LA2. In some embodiments, a wiring area BA may be provided in the center of the light-emitting element 130. Other traces can be set in the trace area BA.

As mentioned above, the detector 120A is disposed between the driver 110 and the light-emitting element 130. Taking the example of FIG. 1B as an example, the driver 110 and the detector 120A are disposed on one side of the light-emitting surface LA1 (for example, the left side of the figure), and the light-emitting surface LA1 faces the photosensitive surface LB of the detector 120A. The light emitting element 130 includes an axis AL. The center of the driver 110 and the center of the detector 120A form a line P1, and the line P1 is aligned with the axis AL.

Taking the example of FIG. 1A as an example, the light-emitting surface LA1 is set toward the detector 120A and emits a light beam L1 toward the detector 120A. The light-emitting surface LA2 is disposed toward the collimator lens 140 and emits a light beam L2 toward the collimator lens 140. In the embodiment of the present invention, the light intensity of the light beam L1 emitted from the light-emitting surface LA1 is less than the light intensity of the light beam L2 emitted from the light-emitting surface LA2.

The detector 120A is used to detect the power of the light beam L1 emitted from the light-emitting surface LA1 to measure the power of the light-emitting element 130 in real time. The processor 180 is coupled to the detector 120A. In some embodiments, the processor 180 may compare the power detected by the detector 120A with a threshold value to determine whether the LiDAR system 100 is abnormal. For example, when the power detected by the detector 120A is less than the threshold value, the processor 180 determines that the LiDAR system 100 is abnormal and provides a warning signal.

The collimator lens 140 is used to collimate the light beam L2 emitted from the light-emitting surface LA2 to generate the collimated light CL1. The beam splitter 150 is used for penetrating the collimated light CL1 to generate the penetrating light TL. The reflective element 170 is used to reflect the penetrating light TL to generate the reflected light RL1. When the reflected light RL1 hits the measurement object OB, the scattered light SL of the measurement object OB will be generated. The lens 190 is used to collimate the scattered light SL of the measurement object OB to generate collimated light CL2. The lens 190 can also collect more light. The reflective element 170 is used to reflect the collimated light CL2 to generate the reflected light RL2. Spectroscope 150 is used to reflect the reflected light RL2 to generate the reflected light RL3. The detector 160 is used to detect the reflected light RL3. The processor 180 is coupled to the detector 160. The processor 180 is used for executing a time of flight measurement (ToF) procedure according to the reflected light RL3 detected by the detector 160 and the light-emitting time of the light-emitting element 130. In some embodiments, the detector 160 is disposed at the focal point of the lens 190.

In some embodiments, the detector 120A does not have a magnifying function, and the detector 160 has a magnifying function. For example, the detector 120A can be a photo diode (PD), and the detector 160 can be an avalanche photodiode (APD).

As described above, in the present disclosure, the detector 120A can detect the power of the light beam L1 emitted from the light-emitting surface LA1 to measure the power of the light-emitting element 130 in real time. In this way, it can be instantly known whether the light-emitting element 130 or the LiDAR system 100 is abnormal, so as to improve the reliability of the LiDAR system 100.

In addition, arranging the detector 120A between the driver 110 and the light-emitting element 130 can effectively utilize space. With this configuration, it is possible to avoid increasing the system volume of the LiDAR system 100 and avoid the optical path from being too complicated.

Furthermore, in some embodiments, the detector 120A can be implemented by a relatively inexpensive light detector. In this way, too much cost can be avoided.

Refer to Figure 2A. FIG. 2A is a top view of the driver 110, the detector 120B, and the light-emitting element 130 according to some other embodiments of the present disclosure. Taking the example of FIG. 2A as an example, the driver 110 and the detector 120B are disposed on one side of the light-emitting surface LA1 (for example: the left side of the figure), and the photosensitive surface LB of the detector 120B faces the other side (for example: On the right side of the picture). The light emitting element 130 includes an axis AL. The center of the driver 110 and the center of the detector 120A form a line P2, and the line P2 is not aligned with the axis AL.

Refer to Figure 2B. FIG. 2B is a top view of the driver 110A, the detector 120C, and the light-emitting element 130 according to some other embodiments of the present disclosure. Taking the example of FIG. 2B as an example, the driver 110A and the detector 120C are disposed on one side of the light-emitting surface LA1 (for example: the left side of the figure), and the photosensitive surface LB of the detector 120C faces the other side (for example: On the right side of the picture). The driver 110A rotates by an angle relative to the detector 120C. The light emitting element 130 includes an axis AL. The center of the driver 110A and the center of the detector 120C form a line P3, and the line P3 is not aligned with the axis AL.

Refer to Figure 3A and Figure 3B. FIG. 3A is a schematic diagram of the LiDAR system 300 according to some embodiments of the present disclosure. FIG. 3B is a top view of the driver 110, the detector 120D, and the light-emitting element 130 in FIG. 3A according to some embodiments of the present disclosure. Taking the example of FIG. 3A as an example, an area A1 is formed between the driver 110 and the light-emitting element 130, and the area A1 is an area extending from the upper and lower sides of the light-emitting element 130 toward the driver 110. The detector 120D is arranged outside the area A1. Taking the example of FIG. 3B as an example, the driver 110 and the detector 120D are disposed on one side of the light-emitting surface LA1 (for example, the left side of the figure), and the photosensitive surface LB of the detector 120D faces the driver 110. The light emitting element 130 includes an axis AL. The center of the driver 110 and the center of the detector 120D form a line P4, and the line P4 is not aligned with the axis AL. For example, the line P4 forms an acute angle D with the axis AL.

Refer again to Figure 3A. The driver 110 is used to reflect the light beam L1 from the light emitting surface LA1 of the light emitting element 130 to generate the light to be measured UL1. The detector 120D is used to receive and detect the light UL1 to be measured reflected by the driver 110 to measure the power of the light-emitting element 130 in real time.

In the lidar system 300 in FIG. 3A, since the detector 120D is not disposed in the area A1 between the driver 110 and the light emitting element 130, the distance between the detector 120D and the driver 110 can be shortened. With this configuration, the space saving effect can be achieved. For example, the distance between the driver 110 and the light emitting element 130 may be less than 5 millimeters.

The collimator lens 140 is used to collimate the light beam L2 emitted from the light-emitting surface LA2 to generate the collimated light CL1. The beam splitter 150 is used for penetrating the collimated light CL1 to generate the penetrating light TL. The reflective element 170 is used to reflect the penetrating light TL to generate the reflected light RL1. When the reflected light RL1 hits the measurement object OB, the scattered light SL of the measurement object OB will be generated. The lens 190 is used to collimate the scattered light SL of the measurement object OB to generate collimated light CL2. The reflective element 170 is used to reflect the collimated light CL2 to generate the reflected light RL2. The beam splitter 150 is used to reflect the reflected light RL2 to generate the reflected light RL3. The detector 160 is used to detect the reflected light RL3. The processor 180 is coupled to the detector 160. The processor 180 is used for executing a flight distance measurement procedure according to the reflected light RL3 detected by the detector 160 and the light-emitting time of the light-emitting element 130.

Refer to Figure 4. FIG. 4 is a schematic diagram of the LiDAR system 400 according to some embodiments of the present disclosure. Taking the example of Figure 4 as an example, the LiDAR system 400 includes drivers 110-1 and 110-2, detectors 120-1 and 120-2, light-emitting elements 130-1 and 130-2, and collimator 140-1 And 140-2, beam splitters 150-1 and 150-2, detectors 160-1 and 160-2, reflective element 170, processor 180, and lenses 190-1 and 190-2.

The configuration of the driver 110-1, the detector 120-1, the light-emitting element 130-1, the collimator 140-1, the beam splitter 150-1, the reflecting element 170, and the lens 190-1 is similar to that of the light-emitting element in Figure 3A. The system 300 can also form a first optical signal channel. The configuration of the driver 110-2, the detector 120-2, the light-emitting element 130-2, the collimator 140-2, the beam splitter 150-2, the reflective element 170, and the lens 190-2 is also similar to the light-emitting element in Figure 3A. It reaches the system 300 and can form a second optical signal channel. In other words, the LiDAR system 400 in FIG. 4 has a multi-channel architecture and includes two optical signal channels. In some other implementations, the LiDAR system 400 may include more than two optical signal channels.

The configuration of the driver 110-1 (110-2), the detector 120-1 (120-2), and the light-emitting element 130-1 (130-2) in Figure 4 can be the same as the configuration of the driver 110, The configuration of the detector 120D and the light-emitting element 130. Taking the example of FIG. 4 as an example, an area A1 is formed between the driver 110-1 and the light-emitting element 130-1. The detector 120-1 is arranged outside the area A1. In detail, the driver 110-1 and the detector 120-1 are disposed on one side of the light-emitting surface LA1 of the light-emitting element 130-1 (for example, the left side of the figure), and the photosensitive surface LB of the detector 120-1 Towards the driver 110-1. The light emitting element 130-1 includes an axis (for example, the axis AL in Fig. 3B). The center of the driver 110-1 and the center of the detector 120-1 form a line (for example, the line P4 in Figure 3B), and the line is not aligned with the axis of the light-emitting element 130-1. For example, this line (for example: line P4 in Figure 3B) and the axis of the light-emitting element 130-1 (for example: axis AL in Figure 3B) form an acute angle (for example: acute angle D in Figure 3B) ). Similarly, an area A2 is formed between the driver 110-2 and the light emitting element 130-2. The detector 120-2 is arranged outside the area A2. In detail, the driver 110-2 and the detector 120-2 are disposed on one side of the light-emitting surface LA1 of the light-emitting element 130-2 (for example, the left side of the figure), and the photosensitive surface LB of the detector 120-2 Towards the driver 110-2. The light emitting element 130-2 includes an axis (for example, the axis AL in Fig. 3B). The center of the driver 110-2 and the center of the detector 120-2 form a line (for example, the line P4 in Figure 3B), and the line is not aligned with the axis of the light-emitting element 130-2. For example, this connection (for example: connection P4 in Fig. 3B) and the axis of the light-emitting element 130-2 (for example: axis AL in Fig. 3B) form an acute angle (for example: acute angle D in Fig. 3B) ).

The light-emitting element 130-1 or 130-2 has two light-emitting surfaces LA1 and LA2 with different light intensities. The light-emitting surfaces LA1 and LA2 of the light-emitting element 130-1 are used to emit light beams L1 and L2 with different light intensities, respectively. The driver 110-1 is used to reflect the light beam L1 to generate the light to be measured UL1. The detector 120-1 is used to detect the light UL1 to be measured to measure the power of the light-emitting element 130-1 in real time. The collimator lens 140-1 is used to collimate the light beam L2 to generate collimated light CL1. The beam splitter 150-1 is used for penetrating the collimated light CL1 to generate the penetrating light TL1. The reflective element 170 is used to reflect the penetrating light TL1 to generate the reflected light RL1. When the reflected light RL1 hits the measuring object OB, the scattered light SL1 of the measuring object OB will be generated. The lens 190-1 is used to collimate the scattered light SL1 of the measurement object OB to generate the collimated light CL2. The reflective element 170 is used to reflect the collimated light CL2 to generate the reflected light RL2. The beam splitter 150-1 is used to reflect the reflected light RL2 to generate the reflected light RL3. The detector 160-1 is used for detecting the reflected light RL3 for the processor 180 to execute the flight ranging procedure. Similarly, the light-emitting surfaces LA1 and LA2 of the light-emitting element 130-2 are respectively used to emit light beams L3 and L4 of different light intensities. The driver 110-2 is used to reflect the light beam L3 to generate the light to be measured UL2. The detector 120-2 is used to detect the light UL2 to be measured to measure the power of the light-emitting element 130-2 in real time. The collimator lens 140-2 is used to collimate the light beam L4 to generate collimated light CL3. The beam splitter 150-2 is used for penetrating the collimated light CL3 to generate the penetrating light TL2. The reflective element 170 is used to reflect the penetrating light TL2 to generate the reflected light RL4. When the reflected light RL4 hits the measurement object OB, the scattered light SL2 of the measurement object OB will be generated. The lens 190-2 is used to collimate the scattered light SL2 of the measurement object OB to generate the collimated light CL4. The reflective element 170 is used to reflect the collimated light CL4 to generate the reflected light RL5. The beam splitter 150-2 is used to reflect the reflected light RL5 to generate the reflected light RL6. The detector 160-2 is used to detect the reflected light RL6 for the processor 180 to execute the flight ranging procedure.

Taking the example of Figure 4 as an example, since the detector 120-2 is disposed between the area A1 and the area A2 (on the optical path of the light to be measured UL1 and on the optical path of the light to be measured UL2), the detector 120-2 The light to be measured UL1 can be blocked to prevent the light to be measured UL1 from affecting the second optical signal channel, and the light to be measured UL2 can also be blocked to prevent the light to be measured UL2 from affecting the first optical signal channel. In other words, the LiDAR system 400 in Figure 4 can reduce crosstalk interference between different optical signal channels.

In summary, the LiDAR system of the present disclosure can measure the power of the light-emitting element in real time, so as to improve the reliability of the LiDAR system. In addition, in the present disclosure, the detector is arranged between the driver and the light-emitting element, which can effectively use the space to avoid increasing the volume of the optical system and avoid the light path from being too complicated. Furthermore, the LiDAR system of the present disclosure has the advantages of easy installation and low cost.

Although the present disclosure has been disclosed in the above embodiments, it is not intended to limit the present disclosure. Anyone with ordinary knowledge in the field can make various changes and modifications without departing from the spirit and scope of the present disclosure. Therefore, the present disclosure The scope of protection shall be subject to the scope of the attached patent application.

100: Lidar System 110: drive 110A: Drive 110-1: Drive 110-2: Drive 120A: Detector 120B: Detector 120C: Detector 120D: Detector 120-1: Detector 120-2: Detector 130: light-emitting element 130-1: Light-emitting element 130-2: Light-emitting element 140: collimator lens 140-1: Collimating lens 140-2: collimator lens 150: Spectroscope 150-1: Spectroscope 150-2: Spectroscope 160: Detector 170: reflective element 180: processor 190: lens 190-1: lens 190-2: lens 300: Lidar System 400: Lidar System L1: beam L2: beam L3: beam L4: beam AL: axis P1: Connect P2: Connect P3: Connect P4: Connect D: acute angle LA1: Light-emitting surface LA2: Light-emitting surface LB: photosensitive surface BA: Wiring area OB: Measured object SL: scattered light SL1: scattered light SL2: scattered light CL1: collimated light CL2: collimated light CL3: collimated light CL4: Collimated light RL0: reflected light RL1: reflected light RL2: reflected light RL3: reflected light RL4: Reflected light RL5: reflected light RL6: Reflected light UL1: Light to be measured UL2: Light to be measured TL: penetrating light TL1: penetrating light TL2: penetrating light A1: area A2: area

In order to make the above and other objectives, features, advantages and embodiments of the present disclosure more obvious and understandable, the description of the accompanying drawings is as follows: FIG. 1A is a schematic diagram of a LiDAR system according to some embodiments of the present disclosure; FIG. 1B is a top view of the driver, detector, and light-emitting element in FIG. 1A according to some embodiments of the present disclosure; FIG. 1C is a side view of a light emitting device according to some embodiments of the present disclosure; FIG. 1D is a top view of the light-emitting element in FIG. 1C according to some embodiments of the present disclosure; FIG. 2A is a top view of a driver, a detector, and a light-emitting element according to some other embodiments of the present disclosure; FIG. 2B is a top view of the driver, the detector, and the light-emitting element according to some other embodiments of the present disclosure; FIG. 3A is a schematic diagram of a lidar system according to some embodiments of the present disclosure; FIG. 3B is a top view of the driver, detector, and light-emitting element in FIG. 3A according to some embodiments of the present disclosure; and FIG. 4 is a schematic diagram of a lidar system according to some embodiments of the present disclosure.

100: Lidar System

110: drive

120A: Detector

130: light-emitting element

140: collimator lens

150: Spectroscope

160: Detector

170: reflective element

180: processor

190: lens

L1: beam

L2: beam

LA1: Light-emitting surface

LA2: Light-emitting surface

LB: photosensitive surface

OB: Measured object

SL: scattered light

CL1: collimated light

CL2: collimated light

RL1: reflected light

RL2: reflected light

RL3: reflected light

TL: penetrating light

Claims (13)

A LiDAR system, including: A drive A light emitting element for emitting a first light beam and a second light beam; A first detector arranged between the driver and the light-emitting element and used for detecting a power of the first light beam; A collimating lens for collimating the second light beam to generate a first collimated light; A beam splitter for penetrating the first collimated light to generate a penetrating light; A reflective element for reflecting the penetrating light to generate a first reflected light, and causing the first reflected light to hit the measuring object and generate scattered light; A lens for collimating the scattered light of the measurement object to generate a second collimated light, wherein the reflective element is further used for reflecting the second collimated light to generate a second reflected light, and the beam splitter is further used To reflect the second reflected light to generate a third reflected light; and A second detector is used to detect the third reflected light. The lidar system according to claim 1, wherein the light-emitting element includes a first light-emitting surface and a second light-emitting surface, wherein the first light-emitting surface and the second light-emitting surface are used to respectively emit the first light beam and the The second beam. The LiDAR system according to claim 2, wherein the light-emitting element includes an axis, the driver and the first detector are disposed on one side of the first light-emitting surface, and the center of the driver and the first detector A line is formed at the center of, and the line is aligned with the axis. The LiDAR system according to claim 2, wherein the light-emitting element includes an axis, the driver and the first detector are disposed on one side of the first light-emitting surface, and the center of the driver and the first detector A line is formed at the center of, and the line is not aligned with the axis. The Lidar system as described in claim 1, further including: A processor is used for judging whether the LiDAR system is abnormal according to the detected power and a threshold value. A LiDAR system, including: A first drive; A first light-emitting element for emitting a first light beam and a second light beam, wherein a first area is formed between the first driver and the first light-emitting element, and the first light beam irradiates the first driver so that The first driver reflects the first light beam to generate a first light to be measured; A first detector arranged outside the first area and used for detecting the first light to be measured; A first collimator lens for collimating the second light beam to generate a first collimated light; A first beam splitter for penetrating the first collimated light to generate a first penetrating light; A reflective element for reflecting the first penetrating light to generate a first reflected light, and causing the first reflected light to hit the measuring object and generate the first scattered light; A first lens is used to collimate the first scattered light of the measurement object to generate a second collimated light, wherein the reflective element is further used to reflect the second collimated light to generate a second reflected light, and the The first beam splitter is further used to reflect the second reflected light to generate a third reflected light; and A second detector is used to detect the third reflected light. The LiDAR system according to claim 6, wherein the distance from the first driver to the first light-emitting element is less than 5 millimeters. The LiDAR system according to claim 6, wherein the first light-emitting element includes a first light-emitting surface and a second light-emitting surface, wherein the first light-emitting surface and the second light-emitting surface are used to respectively emit the first light beam And the second light beam. The LiDAR system according to claim 8, wherein the first light-emitting element includes an axis, the first driver and the first detector are disposed on one side of the first light-emitting surface, and the center of the first driver and The center of the first detector forms a line, and the line is not aligned with the axis. The Lidar system as described in claim 6, further including: A second drive; A second light-emitting element is used to emit a third light beam and a fourth light beam, wherein a second area is formed between the second driver and the second light-emitting element, and the third light beam irradiates the second driver to make The second driver reflects the third light beam to generate a second light to be measured; A third detector arranged outside the second area and used for detecting a power of the second light to be measured; A second collimator lens for collimating the fourth light beam to generate a third collimated light; A second beam splitter for penetrating the third collimated light to generate a second penetrating light, wherein the reflective element is further for reflecting the second penetrating light to generate a fourth reflected light, and making the The fourth reflected light hits the measurement object and generates second scattered light; A second lens is used to collimate the second scattered light to generate a fourth collimated light, wherein the reflective element is further used to reflect the fourth collimated light to generate a fifth reflected light, and the second beam splitter It is further used to reflect the fifth reflected light to generate a sixth reflected light; and A fourth detector is used to detect the sixth reflected light. The lidar system according to claim 10, wherein the second light-emitting element includes a third light-emitting surface and a fourth light-emitting surface, wherein the third light-emitting surface and the fourth light-emitting surface are used to respectively emit the third light beam And the fourth beam. The LiDAR system according to claim 11, wherein the second light-emitting element includes an axis, the second driver and the third detector are disposed on one side of the third light-emitting surface, and the center of the second driver and The center of the third detector forms a line, and the line is not aligned with the axis. The LiDAR system according to claim 10, wherein the third detector is disposed between the first area and the second area.

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