TWI749672B - Embedded circuit board and manufacturing method thereof - Google Patents

Embedded circuit board and manufacturing method thereof Download PDF

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Publication number
TWI749672B
TWI749672B TW109125896A TW109125896A TWI749672B TW I749672 B TWI749672 B TW I749672B TW 109125896 A TW109125896 A TW 109125896A TW 109125896 A TW109125896 A TW 109125896A TW I749672 B TWI749672 B TW I749672B
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substrate
circuit
embedded
conductive
circuit board
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TW109125896A
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Chinese (zh)
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TW202205929A (en
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門雨佳
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大陸商宏啟勝精密電子(秦皇島)有限公司
大陸商鵬鼎控股(深圳)股份有限公司
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/18Printed circuits structurally associated with non-printed electric components
    • H05K1/182Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
    • H05K1/183Components mounted in and supported by recessed areas of the printed circuit board
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0201Thermal arrangements, e.g. for cooling, heating or preventing overheating
    • H05K1/0203Cooling of mounted components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0017Etching of the substrate by chemical or physical means
    • H05K3/0026Etching of the substrate by chemical or physical means by laser ablation
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1515Shape
    • H01L2924/15153Shape the die mounting substrate comprising a recess for hosting the device
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0104Properties and characteristics in general
    • H05K2201/0112Absorbing light, e.g. dielectric layer with carbon filler for laser processing

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Structure Of Printed Boards (AREA)

Abstract

The invention provides an embedded circuit board. The embedded circuit board includes a first circuit layer, a second circuit layer and an embedded component. The first circuit layer includes a first substrate and a first conductive circuit. The first substrate includes a first surface. The first conductive circuit is disposed on the first surface. The second circuit layer includes a second substrate. The first substrate and the second substrate have different light absorption rates. An embedded groove penetrating the second substrate is formed on the second substrate. The embedded groove exposes the first surface. The embedded component is arranged in the embedded groove. The first conductive circuit includes a heat dissipation unit. At least part of the heat dissipation unit extends to the embedded groove and contacts the embedded component. The invention also provides a manufacturing method of the embedded circuit board.

Description

內埋式線路板及其製作方法 Embedded circuit board and manufacturing method thereof

本發明涉及內埋式線路板技術領域,尤其涉及內埋式線路板及其製作方法。 The invention relates to the technical field of embedded circuit boards, in particular to an embedded circuit board and a manufacturing method thereof.

近年來,電子產品被廣泛應用在日常工作和生活中,輕、薄、小的電子產品越來越受到歡迎。線路板作為電子產品的主要部件,其占據了電子產品的較大空間,因此線路板的體積在很大程度上影響了電子產品的體積,大體積的線路板勢必難以符合電子產品輕、薄、短、小之趨勢。其中,內埋式線路板主要是將電子元件嵌埋至線路板內部,從而使線路板模組實現小型化,縮短元件之間的連接路徑,降低傳輸損失,內埋式線路板是可以實現可攜式電子設備更小更輕便,多功能化和高性能化的一種技術途徑。 In recent years, electronic products have been widely used in daily work and life, and light, thin, and small electronic products have become more and more popular. As the main component of electronic products, circuit boards occupies a large space of electronic products. Therefore, the volume of circuit boards affects the volume of electronic products to a large extent. Large-volume circuit boards are bound to be difficult to meet the requirements of light, thin and light electronic products. The trend of short and small. Among them, the embedded circuit board mainly embeds the electronic components inside the circuit board, so that the circuit board module can be miniaturized, the connection path between the components can be shortened, and the transmission loss can be reduced. The embedded circuit board can be realized. A technical approach for portable electronic devices to be smaller, more portable, multi-functional and high-performance.

為了開設用於容納內埋元件的內埋槽,業內通常藉由使用可剝膠將基材層與銅層進行隔離,然後藉由蝕刻去除基材,再藉由開蓋的方式去除可剝膠;但是,該方法中可剝膠剝離後會有殘膠殘留在銅層表面,使得銅層與內埋元件之間的電性連接失效或者導熱效率降低,且開蓋過程容易刮傷線路板板面,再者,該方法流程複雜。業內還可藉由形成撈槽的方法開設內埋槽,該方法流程簡單,成本較低,但精度可控性較低,所形成的內埋槽深度不易控制,製作過程中極易損傷基板或導電線路。 In order to open the buried groove for accommodating the embedded components, the industry usually isolates the substrate layer from the copper layer by using peelable glue, then removes the substrate by etching, and then removes the peelable glue by opening the lid. ; However, in this method, there will be residual glue remaining on the surface of the copper layer after the peelable glue is peeled off, which makes the electrical connection between the copper layer and the embedded components ineffective or reduces the thermal conductivity, and the circuit board is easily scratched during the opening process Furthermore, the process of this method is complicated. The industry can also use the method of forming the fishing trough to open the buried tank. This method has a simple process and lower cost, but the accuracy is low. The depth of the formed buried tank is not easy to control, and it is easy to damage the substrate or Conductive lines.

如何解決上述問題,是本領域技術人員需要考慮的。 Those skilled in the art need to consider how to solve the above-mentioned problems.

有鑑於此,本發明提供一種內埋式線路板,包括:第一線路層,所述第一線路層包括第一基材及第一導電線路,所述第一基材包括第一表面,所述第一導電線路設置於所述第一表面;第二線路層,所述第二線路層包括第二基材,所述第一基材與所述第二基材對光線的吸收率不同,所述第二基材上形成有一貫穿所述第二基材的內埋槽,所述內埋槽使所述第一表面暴露;內埋元件,內埋元件設置於所述內埋槽內;以及所述第一導電線路包括散熱單元,所述散熱單元的至少部分延伸至所述內埋槽並與所述內埋元件接觸。 In view of this, the present invention provides an embedded circuit board, including: a first circuit layer, the first circuit layer includes a first substrate and a first conductive circuit, the first substrate includes a first surface, so The first conductive circuit is disposed on the first surface; a second circuit layer, the second circuit layer includes a second substrate, and the first substrate and the second substrate have different light absorption rates, An embedded groove penetrating the second substrate is formed on the second substrate, the embedded groove exposing the first surface; an embedded element, the embedded element is arranged in the embedded groove; And the first conductive circuit includes a heat dissipation unit, and at least a part of the heat dissipation unit extends to the buried groove and is in contact with the buried element.

於一實施例中,所述第二基材的材料包括玻璃纖維。 In one embodiment, the material of the second substrate includes glass fiber.

於一實施例中,所述第二基材包括第二表面,所述第二表面設置於所述第二基材遠離所述第一基材一側,所述內埋槽貫穿所述第二表面,所述第二線路層還包括第二導電線路,所述第二導電線路設置於所述第二表面。 In one embodiment, the second substrate includes a second surface, the second surface is disposed on a side of the second substrate away from the first substrate, and the embedded groove penetrates the second substrate. On the surface, the second circuit layer further includes a second conductive circuit, and the second conductive circuit is disposed on the second surface.

於一實施例中,所述內埋式線路板還包括第三線路層,所述第三線路層包括第三基材及第三導電線路,所述第三導電線路設置於所述第三基材表面,所述第一基材覆蓋所述第三導電線路的至少部分。 In one embodiment, the embedded circuit board further includes a third circuit layer, the third circuit layer includes a third substrate and a third conductive circuit, and the third conductive circuit is disposed on the third substrate. On the surface of the material, the first substrate covers at least part of the third conductive circuit.

本申請還提供一種內埋式線路板的製作方法,包括如下步驟:提供一第一雙面板,所述第一雙面板包括第三基材及形成於所述第三基材表面的第三導電線路; 藉由壓合在所述第一雙面板一表面形成一第一基材及第一導電材料層,所述第一基材包括第一表面,所述第一表面設置於所述第一基材遠離所述第三基材一側,所述第一導電材料層設置於所述第一表面;對所述第一導電材料層進行蝕刻得到一第一導電線路,所述第一導電線路包括一散熱單元;藉由壓合在所述第一導電線路遠離所述第一基材一側形成一第二基材,所述第一導電線路及所述第一表面未被所述第一導電線路覆蓋的部分,所述第一基材與所述第二基材對光線的吸收率不同;以及使用鐳射蝕刻的方式在所述第二基材上形成一內埋槽,所述內埋槽貫穿所述第二基材,所述內埋槽使所述第一表面及所述散熱單元的至少部分裸露。 The present application also provides a method for manufacturing an embedded circuit board, including the following steps: providing a first double-sided board, the first double-sided board including a third substrate and a third conductive layer formed on the surface of the third substrate line; A first substrate and a first conductive material layer are formed on one surface of the first double-sided board by pressing, the first substrate includes a first surface, and the first surface is disposed on the first substrate On the side away from the third substrate, the first conductive material layer is disposed on the first surface; the first conductive material layer is etched to obtain a first conductive circuit, and the first conductive circuit includes a Heat dissipation unit; forming a second substrate by pressing on the side of the first conductive circuit away from the first substrate, the first conductive circuit and the first surface are not the first conductive circuit In the covered part, the first substrate and the second substrate have different light absorption rates; and a laser etching method is used to form an embedded groove on the second substrate, and the embedded groove penetrates For the second substrate, the buried groove exposes at least part of the first surface and the heat dissipation unit.

於一實施例中,用於鐳射體蝕刻的光線由二氧化碳鐳射發射器激發。 In one embodiment, the light used for laser etching is excited by a carbon dioxide laser emitter.

於一實施例中,由二氧化碳鐳射發射器激發的光不蝕刻所述第一基材,由二氧化碳鐳射發射器激發的光蝕刻所述第二基材。 In one embodiment, the light excited by the carbon dioxide laser does not etch the first substrate, and the light excited by the carbon dioxide laser etches the second substrate.

於一實施例中,所述第二基材的材料包括玻璃纖維。 In one embodiment, the material of the second substrate includes glass fiber.

於一實施例中,藉由壓合在所述第一導電線路遠離所述第一基材一側形成一第二基材時,在所述第二基材遠離所述第一基材一側設置一第二導電材料層,對所述第二導電材料層進行蝕刻得到一第二導電線路。 In one embodiment, when a second substrate is formed on the side of the first conductive circuit away from the first substrate by pressing, on the side of the second substrate away from the first substrate A second conductive material layer is provided, and the second conductive material layer is etched to obtain a second conductive circuit.

於一實施例中,還包括如下步驟:提供一內埋元件,將所述內埋元件設置於所述內埋槽內,使所述內埋元件與所述第一導電線路連接。 In one embodiment, the method further includes the following steps: providing an embedded element, arranging the embedded element in the embedded groove, and connecting the embedded element with the first conductive circuit.

相比於現有技術,本發明的內埋式線路板及其製作方法,藉由設置對光具有不同吸收度的第一基材及第二基材,然後藉由鐳射蝕刻的方式形成 內埋槽,可實現內埋槽的精準蝕刻,且不會使設置於第一基材表面的第一導電線路被損傷,亦或是在第一導電線路表面留下殘膠。 Compared with the prior art, the embedded circuit board of the present invention and the manufacturing method thereof are formed by arranging a first substrate and a second substrate with different absorption of light, and then forming it by laser etching. The buried groove can achieve precise etching of the buried groove without damaging the first conductive circuit provided on the surface of the first substrate, or leaving glue residue on the surface of the first conductive circuit.

1:內埋式線路板 1: Embedded circuit board

11:第一線路層 11: The first circuit layer

111:第一基材 111: The first substrate

112:第一導電線路 112: The first conductive line

115:散熱單元 115: cooling unit

119:第一表面 119: First Surface

12:第二線路層 12: The second circuit layer

121:第二基材 121: second substrate

122:第二導電線路 122: second conductive line

129:第二表面 129: Second Surface

13:第三線路層 13: The third circuit layer

131:第三基材 131: The third substrate

132:第三導電線路 132: The third conductive circuit

14:第四線路層 14: The fourth circuit layer

141:第四基材 141: Fourth substrate

142:第四導電線路 142: The fourth conductive circuit

15:內埋元件 15: Embedded components

16:內埋槽 16: Buried groove

19:導電柱 19: Conductive column

20:第一雙面板 20: The first double panel

21:第一導電材料層 21: The first conductive material layer

22:第二導電材料層 22: second conductive material layer

23:第三導電材料層 23: The third conductive material layer

24:第四導電材料層 24: Fourth conductive material layer

圖1為本發明一實施例的內埋式線路板的局部截面示意圖。 Fig. 1 is a schematic partial cross-sectional view of an embedded circuit board according to an embodiment of the present invention.

圖2為本發明一實施例的內埋式線路板的製作流程示意圖。 Fig. 2 is a schematic diagram of a manufacturing process of an embedded circuit board according to an embodiment of the present invention.

圖3為本發明一實施例的內埋式線路板的製作流程示意圖。 FIG. 3 is a schematic diagram of a manufacturing process of an embedded circuit board according to an embodiment of the present invention.

圖4為本發明一實施例的內埋式線路板的製作流程示意圖。 4 is a schematic diagram of a manufacturing process of an embedded circuit board according to an embodiment of the present invention.

圖5為本發明一實施例的內埋式線路板的製作流程示意圖。 Fig. 5 is a schematic diagram of a manufacturing process of an embedded circuit board according to an embodiment of the present invention.

圖6為本發明一實施例的內埋式線路板的製作流程示意圖。 Fig. 6 is a schematic diagram of a manufacturing process of an embedded circuit board according to an embodiment of the present invention.

圖7為本發明一實施例的內埋式線路板的製作流程示意圖。 FIG. 7 is a schematic diagram of a manufacturing process of an embedded circuit board according to an embodiment of the present invention.

圖8為本發明一實施例的內埋式線路板的製作流程示意圖。 FIG. 8 is a schematic diagram of a manufacturing process of an embedded circuit board according to an embodiment of the present invention.

圖9為本發明一實施例的內埋式線路板的製作流程示意圖。 FIG. 9 is a schematic diagram of a manufacturing process of an embedded circuit board according to an embodiment of the present invention.

以下描述將參考附圖以更全面地描述本申請內容。附圖中所示為本申請的示例性實施例。然而,本申請可以以許多不同的形式來實施,並且不應該被解釋為限於在此闡述的示例性實施例。提供這些示例性實施例是為了使本申請透徹和完整,並且將本申請的範圍充分地傳達給本領域技術人員。類似的附圖標記表示相同或類似的組件。 The following description will refer to the accompanying drawings to more fully describe the content of this application. The drawings show exemplary embodiments of the application. However, this application can be implemented in many different forms and should not be construed as being limited to the exemplary embodiments set forth herein. These exemplary embodiments are provided to make this application thorough and complete, and to fully convey the scope of this application to those skilled in the art. Similar reference numerals indicate the same or similar components.

本文使用的術語僅用於描述特定示例性實施例的目的,而不意圖限制本申請。如本文所使用的,除非上下文另外清楚地指出,否則單數形式“一”,“一個”和“該”旨在也包括複數形式。此外,當在本文中使用時,“包括”和/或“包含”或“包括”和/或“包括”或“具有”和/或“具有”,整 數,步驟,操作,元件和/或元件,但不排除存在或添加一個或多個其它特徵,區域,整數,步驟,操作,元件,元件和/或其群組。 The terminology used herein is only used for the purpose of describing specific exemplary embodiments, and is not intended to limit the application. As used herein, unless the context clearly dictates otherwise, the singular forms "a", "an" and "the" are intended to also include the plural forms. In addition, when used herein, "include" and/or "include" or "include" and/or "include" or "have" and/or "have", Numbers, steps, operations, elements and/or elements, but does not exclude the presence or addition of one or more other features, regions, integers, steps, operations, elements, elements and/or groups thereof.

除非另外定義,否則本文使用的所有術語(包括技術和科學術語)具有與本申請所述領域的普通技術人員通常理解的相同的含義。此外,除非文中明確定義,諸如在通用字典中定義的那些術語應該被解釋為具有與其在相關技術和本申請內容中的含義一致的含義,並且將不被解釋為理想化或過於正式的含義。 Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by those of ordinary skill in the field described in this application. In addition, unless clearly defined in the text, terms such as those defined in a general dictionary should be interpreted as having meanings consistent with their meanings in the related technology and the content of this application, and will not be interpreted as idealized or overly formal meanings.

以下內容將結合附圖對示例性實施例進行描述。須注意的是,參考附圖中所描繪的元件不一定按比例顯示;而相同或類似的組件將被賦予相同或相似的附圖標記表示或類似的技術用語。 The following content will describe exemplary embodiments with reference to the accompanying drawings. It should be noted that the elements depicted in the reference drawings are not necessarily shown to scale; and the same or similar components will be given the same or similar reference signs or similar technical terms.

下面參照附圖,對本申請的具體實施方式作進一步的詳細描述。 The specific implementation of the present application will be described in further detail below with reference to the accompanying drawings.

如圖1所示,本申請提供一種內埋式線路板1,包括第一線路層11、第二線路層12、第三線路層13以及內埋元件15。第一線路層11設置於第三線路層13一側,第二線路層12設置於第一線路層11遠離第三線路層13一側,第二線路層12上開設有一內埋槽16,內埋槽16貫穿第二線路層12使第一線路層11的至少部分表面暴露,內埋元件15設置於內埋槽16中。 As shown in FIG. 1, the present application provides an embedded circuit board 1, which includes a first circuit layer 11, a second circuit layer 12, a third circuit layer 13 and an embedded component 15. The first circuit layer 11 is arranged on the side of the third circuit layer 13, the second circuit layer 12 is arranged on the side of the first circuit layer 11 away from the third circuit layer 13, and the second circuit layer 12 is provided with a buried groove 16 inside. The buried groove 16 penetrates the second circuit layer 12 to expose at least a part of the surface of the first circuit layer 11, and the buried element 15 is disposed in the buried groove 16.

第三線路層13包括第三基材131及第三導電線路132,第三導電線路132設置於第三基材131表面。於一實施例中,第三線路層13可以為一雙面板,第三導電線路132包括兩層導電線路,該兩層導電線路分別設置於第三基材131相背的兩表面。 The third circuit layer 13 includes a third substrate 131 and a third conductive circuit 132, and the third conductive circuit 132 is disposed on the surface of the third substrate 131. In one embodiment, the third circuit layer 13 may be a double-sided board, and the third conductive circuit 132 includes two layers of conductive circuits, and the two layers of conductive circuits are respectively disposed on two opposite surfaces of the third substrate 131.

於一實施例中,內埋式線路板1還可包括一第四線路層14,第四線路層14設置於第三線路層13遠離第一線路層11一側。在本實施例中,第四線路層14為一單層線路疊構,即,第四線路層14包括第四基材141及設置於第四基材141遠離第一線路層11的表面的第四導電線路142。在其他實施例中,第四線路 層14可以為多層線路疊構,即,第四線路層14包括多層堆疊設置的基材及導電線路。 In an embodiment, the embedded circuit board 1 may further include a fourth circuit layer 14, and the fourth circuit layer 14 is disposed on the side of the third circuit layer 13 away from the first circuit layer 11. In this embodiment, the fourth circuit layer 14 is a single-layer circuit stack structure, that is, the fourth circuit layer 14 includes a fourth substrate 141 and a fourth substrate 141 disposed on the surface of the fourth substrate 141 away from the first circuit layer 11. Four conductive lines 142. In other embodiments, the fourth line The layer 14 may be a multilayer circuit stack structure, that is, the fourth circuit layer 14 includes a substrate and a conductive circuit arranged in a multilayer stack.

第一線路層11包括第一基材111及第一導電線路112,第一基材111包括第一表面119,第一導電線路112設置於第一表面119。第一線路層11設置於第三線路層13一側並覆蓋第三線路層13的至少一個表面,第一基材111覆蓋第三導電線路132的至少部分,具體可以為設置於第三基材131一個表面的第三導電線路132。 The first circuit layer 11 includes a first substrate 111 and a first conductive circuit 112, the first substrate 111 includes a first surface 119, and the first conductive circuit 112 is disposed on the first surface 119. The first circuit layer 11 is disposed on the side of the third circuit layer 13 and covers at least one surface of the third circuit layer 13, and the first substrate 111 covers at least part of the third conductive circuit 132, which can be specifically disposed on the third substrate 131 A third conductive circuit 132 on one surface.

第二線路層12包括第二基材121及第二導電線路122,第二基材121包括第二表面129,第二表面129設置於第二基材121遠離第一基材111一側,第二導電線路122設置於第二表面129。 The second circuit layer 12 includes a second substrate 121 and a second conductive circuit 122. The second substrate 121 includes a second surface 129. The second surface 129 is disposed on the side of the second substrate 121 away from the first substrate 111. The two conductive lines 122 are disposed on the second surface 129.

於一實施例中,內埋式線路板1還包括多個導電柱19,多個導電柱19分別設置於第一基材111、第二基材121、第三基材131及第四基材141中,第一導電線路112、第二導電線路122、第三導電線路132以及第四導電線路142之間可藉由導電柱19實現電性連接。於一實施例中,導電柱19可以為電鍍導電孔,也可以為填充有導電膏的貫穿孔。 In one embodiment, the embedded circuit board 1 further includes a plurality of conductive pillars 19, and the plurality of conductive pillars 19 are respectively disposed on the first substrate 111, the second substrate 121, the third substrate 131, and the fourth substrate. In 141, the first conductive circuit 112, the second conductive circuit 122, the third conductive circuit 132, and the fourth conductive circuit 142 can be electrically connected by the conductive pillar 19. In an embodiment, the conductive pillar 19 may be a plated conductive hole or a through hole filled with conductive paste.

第二基材121上形成有一貫穿第二基材121的內埋槽16,內埋槽16貫穿第二表面129,內埋槽16使第一表面119的至少部分暴露。 The second substrate 121 is formed with an embedded groove 16 passing through the second substrate 121, the embedded groove 16 penetrates the second surface 129, and the embedded groove 16 exposes at least part of the first surface 119.

第一基材111與第二基材121對光線的吸收率不同,具體的,第一基材111與第二基材121對二氧化碳鐳射發生器激發的光的吸收率不同,第二基材121可被二氧化碳鐳射發生器激發的光所蝕刻,第一基材111不可被二氧化碳鐳射發生器激發的光所蝕刻。於一實施例中,第二基材121的材料可包括玻璃纖維。 The first substrate 111 and the second substrate 121 have different absorption rates of light. Specifically, the first substrate 111 and the second substrate 121 have different absorption rates of light excited by the carbon dioxide laser generator, and the second substrate 121 It can be etched by the light excited by the carbon dioxide laser generator, and the first substrate 111 cannot be etched by the light excited by the carbon dioxide laser generator. In an embodiment, the material of the second substrate 121 may include glass fiber.

於一實施例中,第一導電線路112包括散熱單元115,散熱單元115的至少部分延伸至內埋槽16,散熱單元115的部分被第二基材121覆蓋,另一部 分被內埋槽16暴露。在其他實施例中,散熱單元115可替換為用於傳輸電信號的端子。 In one embodiment, the first conductive circuit 112 includes a heat dissipation unit 115, at least a part of the heat dissipation unit 115 extends to the embedded groove 16, a part of the heat dissipation unit 115 is covered by the second substrate 121, and the other part The points are exposed by the buried groove 16. In other embodiments, the heat dissipation unit 115 may be replaced with a terminal for transmitting electrical signals.

內埋元件15設置於內埋槽16內,內埋元件15與散熱單元115接,且內埋元件15與第一導電線路112連接;於一實施例中,內埋元件15與散熱單元115物理接觸實現散熱,當散熱單元115替換為用於傳輸電信號的端子時,內埋元件15可與該結構實現電性連接。於一實施例中,內埋元件15可以為電阻、電容、電感等主動元件或被動元件。 The embedded element 15 is disposed in the embedded groove 16, the embedded element 15 is connected to the heat dissipation unit 115, and the embedded element 15 is connected to the first conductive circuit 112; in one embodiment, the embedded element 15 is physically connected to the heat dissipation unit 115 The contact realizes heat dissipation. When the heat dissipation unit 115 is replaced with a terminal for transmitting electrical signals, the embedded element 15 can be electrically connected to the structure. In an embodiment, the embedded element 15 may be an active element or a passive element such as a resistor, a capacitor, or an inductor.

於一實施例中,內埋式線路板1還可包括設置於最外側的阻焊層或保護層,用於保護內埋式線路板1。 In an embodiment, the embedded circuit board 1 may further include a solder resist layer or a protective layer disposed on the outermost side to protect the embedded circuit board 1.

如圖2至圖9所示,為本申請提供的一種內埋式線路板1的製作方法,包括如下步驟: As shown in Figs. 2-9, a method for manufacturing an embedded circuit board 1 provided in this application includes the following steps:

步驟S1:提供一第一雙面板20,第一雙面板20包括第三基材131及形成於第三基材131表面的第三導電線路132。 Step S1: Provide a first double-sided board 20. The first double-sided board 20 includes a third substrate 131 and a third conductive circuit 132 formed on the surface of the third substrate 131.

步驟S11:如圖2所示,提供一第一雙面板20,第一雙面板20第三基材131以及設置於第三基材131相背兩表面的第三導電材料層23。 Step S11: As shown in FIG. 2, a first double-sided board 20, a third substrate 131 of the first double-sided board 20, and a third conductive material layer 23 disposed on opposite surfaces of the third substrate 131 are provided.

於一實施例中,第一雙面板20來料可以為雙面覆銅基板。 In one embodiment, the first double-sided board 20 may be a double-sided copper clad substrate.

步驟S12:如圖3所示,對所述第三導電材料層23進行蝕刻形成第三導電線路132,得到第三線路層13。 Step S12: As shown in FIG. 3, the third conductive material layer 23 is etched to form a third conductive circuit 132, and a third circuit layer 13 is obtained.

於一實施例中,可藉由黃光顯影蝕刻等方式對第三導電材料層23進行蝕刻,設置於第三基材131兩側的第三導電材料層23可在同一道蝕刻中被蝕刻,或可在不同的蝕刻製程中被蝕刻。 In one embodiment, the third conductive material layer 23 can be etched by yellow light development and etching, and the third conductive material layer 23 disposed on both sides of the third substrate 131 can be etched in the same etching. Or it can be etched in different etching processes.

步驟S2:如圖4所示,如圖藉由壓合在第一雙面板20一表面形成一第一基材111及第一導電材料層21,第一基材111包括第一表面119,第一表面119 設置於第一基材111遠離第三基材131一側,第一導電材料層21設置於第一表面119。 Step S2: As shown in FIG. 4, a first substrate 111 and a first conductive material layer 21 are formed on one surface of the first double-sided board 20 by pressing. The first substrate 111 includes a first surface 119. One surface 119 The first substrate 111 is disposed on a side away from the third substrate 131, and the first conductive material layer 21 is disposed on the first surface 119.

步驟S3:如圖5所示,對第一導電材料層21進行蝕刻得到一第一導電線路112,第一導電線路112包括一散熱單元115。 Step S3: As shown in FIG. 5, the first conductive material layer 21 is etched to obtain a first conductive circuit 112, and the first conductive circuit 112 includes a heat dissipation unit 115.

於一實施例中,形成多個導電柱19,第一導電線路112藉由導電柱19與第三導電線路132電性連接,分佈於不同表面的第三導電線路132亦可藉由導電柱19電性連接。 In one embodiment, a plurality of conductive pillars 19 are formed, and the first conductive line 112 is electrically connected to the third conductive line 132 through the conductive pillars 19, and the third conductive lines 132 distributed on different surfaces can also be electrically connected by the conductive pillars 19 Electrical connection.

於一實施例中,多個導電柱19可藉由打孔電鍍的方式形成,或者,可以藉由打孔塞導電膏的方式形成。 In one embodiment, the plurality of conductive pillars 19 may be formed by punching and electroplating, or may be formed by punching and plugging conductive paste.

步驟S4:如圖6所示,藉由壓合在第一導電線路112遠離第一基材111一側形成一第二基材121,第二基材121覆蓋第一導電線路112及第一表面119未被第一導電線路112覆蓋的部分,第一基材111與第二基材121對光線的吸收率不同。 Step S4: As shown in FIG. 6, a second substrate 121 is formed on the side of the first conductive circuit 112 away from the first substrate 111 by pressing, and the second substrate 121 covers the first conductive circuit 112 and the first surface In the portion 119 that is not covered by the first conductive circuit 112, the first substrate 111 and the second substrate 121 have different light absorption rates.

於一實施例中,藉由壓合在第一導電線路112遠離第一基材111一側形成一第二基材121時,在第二基材121遠離第一基材111一側設置一第二導電材料層22,對第二導電材料層22進行蝕刻得到一第二導電線路122。 In one embodiment, when a second substrate 121 is formed on the side of the first conductive circuit 112 away from the first substrate 111 by pressing, a second substrate 121 is provided on the side of the second substrate 121 away from the first substrate 111. The second conductive material layer 22 is etched to obtain a second conductive circuit 122.

於一實施例中,還可在第三基材131遠離第一基材111一側壓合一第四基材141及第四導電材料層24。 In an embodiment, a fourth substrate 141 and a fourth conductive material layer 24 may be pressed on the side of the third substrate 131 away from the first substrate 111.

步驟S5:如圖7所示,使用鐳射蝕刻的方式在第二基材121上形成一內埋槽16,內埋槽16貫穿第二基材121,內埋槽16使第一表面119及散熱單元115的至少部分裸露。 Step S5: As shown in FIG. 7, an embedded groove 16 is formed on the second substrate 121 by laser etching, the embedded groove 16 penetrates the second substrate 121, and the embedded groove 16 allows the first surface 119 and heat to be dissipated At least part of the unit 115 is exposed.

於一實施例中,用於鐳射體蝕刻的光線由二氧化碳鐳射發射器激發。 In one embodiment, the light used for laser etching is excited by a carbon dioxide laser emitter.

於一實施例中,由二氧化碳鐳射發射器激發的光不蝕刻第一基材111,由二氧化碳鐳射發射器激發的光蝕刻第二基材121。 In one embodiment, the light excited by the carbon dioxide laser emitter does not etch the first substrate 111, and the light excited by the carbon dioxide laser emitter etches the second substrate 121.

於一實施例中,第二基材121的材料包括玻璃纖維。 In an embodiment, the material of the second substrate 121 includes glass fiber.

藉由設置對光線吸收率不同的第一基材111及第二基材121,使第一基材111不被鐳射發射器發射的光線蝕刻或第一基材111對蝕刻光線的吸收率保持在一個極低的水準使蝕刻光線對第一基材111造成的蝕刻保持在一個極低的水準,同時,第二基材121對蝕刻光線的吸收率較高,第二基材121較易被蝕刻。即,當使用鐳射發射器(例如二氧化碳鐳射發射器)進行蝕刻時,可藉由精準控制在第二基材121上形成內埋槽16,但該蝕刻過程不會對第一導電線路112及第一基材111造成損傷。 By arranging the first substrate 111 and the second substrate 121 with different absorption rates of light, the first substrate 111 is not etched by the light emitted by the laser emitter or the absorption rate of the first substrate 111 to the etching light is maintained at An extremely low level keeps the etching of the first substrate 111 caused by the etching light at an extremely low level. At the same time, the second substrate 121 has a higher absorption rate of the etching light, and the second substrate 121 is easier to be etched. . That is, when a laser emitter (such as a carbon dioxide laser emitter) is used for etching, the buried groove 16 can be formed on the second substrate 121 by precise control, but the etching process will not affect the first conductive circuit 112 and the first conductive circuit 112 and the second substrate 121. A substrate 111 causes damage.

步驟S6:如圖8所示,形成多個導電柱19,使第一導電線路112與第二導電線路122藉由導電柱19電性連接,使第三導電線路132與第四導電線路142藉由導電柱19電性連接。 Step S6: As shown in FIG. 8, a plurality of conductive pillars 19 are formed, so that the first conductive circuit 112 and the second conductive circuit 122 are electrically connected through the conductive pillars 19, so that the third conductive circuit 132 and the fourth conductive circuit 142 are connected to each other. It is electrically connected by the conductive pillar 19.

步驟S7:如圖9所示,提供一內埋元件15,將內埋元件15設置於內埋槽16內,使內埋元件15與第一導電線路112連接。 Step S7: As shown in FIG. 9, an embedded element 15 is provided, and the embedded element 15 is arranged in the embedded groove 16 so that the embedded element 15 is connected to the first conductive circuit 112.

上文中,參照附圖描述了本申請的具體實施方式。但是,本領域中的普通技術人員能夠理解,在不偏離本申請的精神和範圍的情況下,還可以對本申請的具體實施方式作各種變更和替換。這些變更和替換都落在本申請所限定的範圍內。 In the foregoing, specific implementations of the present application have been described with reference to the drawings. However, those of ordinary skill in the art can understand that various changes and substitutions can be made to the specific embodiments of the present application without departing from the spirit and scope of the present application. These changes and replacements fall within the scope defined by this application.

1:內埋式線路板 1: Embedded circuit board

11:第一線路層 11: The first circuit layer

111:第一基材 111: The first substrate

112:第一導電線路 112: The first conductive line

115:散熱單元 115: cooling unit

119:第一表面 119: First Surface

12:第二線路層 12: The second circuit layer

121:第二基材 121: second substrate

122:第二導電線路 122: second conductive line

129:第二表面 129: Second Surface

13:第三線路層 13: The third circuit layer

131:第三基材 131: The third substrate

132:第三導電線路 132: The third conductive circuit

14:第四線路層 14: The fourth circuit layer

141:第四基材 141: Fourth substrate

142:第四導電線路 142: The fourth conductive circuit

15:內埋元件 15: Embedded components

16:內埋槽 16: Buried groove

19:導電柱 19: Conductive column

Claims (10)

一種內埋式線路板,其改良在於,包括:第一線路層,所述第一線路層包括第一基材及第一導電線路,所述第一基材包括第一表面,所述第一導電線路設置於所述第一表面;第二線路層,所述第二線路層包括第二基材,所述第一基材與所述第二基材對光線的吸收率不同,所述第二基材上形成有一貫穿所述第二基材的內埋槽,所述內埋槽使所述第一表面暴露;內埋元件,內埋元件設置於所述內埋槽內;以及所述第一導電線路包括散熱單元,所述散熱單元的至少部分延伸至所述內埋槽並與所述內埋元件接觸。 An embedded circuit board is improved in that it includes: a first circuit layer, the first circuit layer includes a first substrate and a first conductive circuit, the first substrate includes a first surface, the first The conductive circuit is disposed on the first surface; the second circuit layer, the second circuit layer includes a second substrate, the first substrate and the second substrate have different light absorption rates, the first An embedded groove penetrating the second substrate is formed on the two substrates, and the embedded groove exposes the first surface; an embedded element, and the embedded element is disposed in the embedded groove; and The first conductive circuit includes a heat dissipation unit, and at least a part of the heat dissipation unit extends to the buried groove and is in contact with the buried element. 如請求項1所述之內埋式線路板,其中,所述第二基材的材料包括玻璃纖維。 The embedded circuit board according to claim 1, wherein the material of the second base material includes glass fiber. 如請求項1所述之內埋式線路板,其中,所述第二基材包括第二表面,所述第二表面設置於所述第二基材遠離所述第一基材一側,所述內埋槽貫穿所述第二表面,所述第二線路層還包括第二導電線路,所述第二導電線路設置於所述第二表面。 The embedded circuit board according to claim 1, wherein the second substrate includes a second surface, and the second surface is disposed on a side of the second substrate away from the first substrate, so The buried groove penetrates the second surface, the second circuit layer further includes a second conductive circuit, and the second conductive circuit is disposed on the second surface. 如請求項1所述之內埋式線路板,其中,所述內埋式線路板還包括第三線路層,所述第三線路層包括第三基材及第三導電線路,所述第三導電線路設置於所述第三基材表面,所述第一基材覆蓋所述第三導電線路的至少部分。 The buried circuit board according to claim 1, wherein the buried circuit board further includes a third circuit layer, the third circuit layer includes a third substrate and a third conductive circuit, the third The conductive circuit is arranged on the surface of the third substrate, and the first substrate covers at least part of the third conductive circuit. 一種內埋式線路板的製作方法,其改良在於,包括如下步驟:提供一第一雙面板,所述第一雙面板包括第三基材及形成於所述第三基材表面的第三導電線路; 藉由壓合在所述第一雙面板一表面形成一第一基材及第一導電材料層,所述第一基材包括第一表面,所述第一表面設置於所述第一基材遠離所述第三基材一側,所述第一導電材料層設置於所述第一表面;對所述第一導電材料層進行蝕刻得到一第一導電線路,所述第一導電線路包括一散熱單元;藉由壓合在所述第一導電線路遠離所述第一基材一側形成一第二基材,所述第二基材覆蓋所述第一導電線路及所述第一表面未被所述第一導電線路覆蓋的部分,所述第一基材與所述第二基材對光線的吸收率不同;以及使用鐳射蝕刻的方式在所述第二基材上形成一內埋槽,所述內埋槽貫穿所述第二基材,所述內埋槽使所述第一表面及所述散熱單元的至少部分裸露。 A method for manufacturing an embedded circuit board is improved in that it includes the following steps: providing a first double-sided board, the first double-sided board comprising a third substrate and a third conductive layer formed on the surface of the third substrate line; A first substrate and a first conductive material layer are formed on one surface of the first double-sided board by pressing, the first substrate includes a first surface, and the first surface is disposed on the first substrate On the side away from the third substrate, the first conductive material layer is disposed on the first surface; the first conductive material layer is etched to obtain a first conductive circuit, and the first conductive circuit includes a Heat dissipation unit; a second substrate is formed by pressing on the side of the first conductive circuit away from the first substrate, and the second substrate covers the first conductive circuit and the first surface In the part covered by the first conductive circuit, the first substrate and the second substrate have different light absorption rates; and a laser etching method is used to form an embedded groove on the second substrate The embedded groove penetrates the second substrate, and the embedded groove exposes at least part of the first surface and the heat dissipation unit. 如請求項5所述之內埋式線路板的製作方法,其中,用於鐳射體蝕刻的光線由二氧化碳鐳射發射器激發。 The method for manufacturing an embedded circuit board according to claim 5, wherein the light used for the laser body etching is excited by a carbon dioxide laser emitter. 如請求項6所述之內埋式線路板的製作方法,其中,由二氧化碳鐳射發射器激發的光不蝕刻所述第一基材,由二氧化碳鐳射發射器激發的光蝕刻所述第二基材。 The method for manufacturing an embedded circuit board according to claim 6, wherein the light excited by the carbon dioxide laser emitter does not etch the first substrate, and the light excited by the carbon dioxide laser emitter etches the second substrate . 如請求項7所述之內埋式線路板的製作方法,其中,所述第二基材的材料包括玻璃纖維。 The method for manufacturing an embedded circuit board according to claim 7, wherein the material of the second base material includes glass fiber. 如請求項5所述之內埋式線路板的製作方法,其中,藉由壓合在所述第一導電線路遠離所述第一基材一側形成一第二基材時,在所述第二基材遠離所述第一基材一側設置一第二導電材料層,對所述第二導電材料層進行蝕刻得到一第二導電線路。 The method for manufacturing an embedded circuit board according to claim 5, wherein when a second substrate is formed on the side of the first conductive circuit away from the first substrate by pressing, the A second conductive material layer is provided on the side of the two substrates away from the first substrate, and the second conductive material layer is etched to obtain a second conductive circuit. 如請求項5所述之內埋式線路板的製作方法,其中,還包括如下步驟: 提供一內埋元件,將所述內埋元件設置於所述內埋槽內,使所述內埋元件與所述第一導電線路連接。 The method for manufacturing an embedded circuit board as described in claim 5, which further includes the following steps: An embedded element is provided, the embedded element is arranged in the embedded groove, and the embedded element is connected with the first conductive circuit.
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