TWI749366B - Vacuum heating device and reflector device - Google Patents

Abstract

Provided is a vacuum heating device equipped with a reflector device that does not cause damage due to thermal extension. Install the multiple unit reflectors (31) arranged in rows and columns on the mounting surface (19) of the vacuum tank (17) by the fixing device (21) and the holding device (11a) ~ (11d) . If infrared rays are irradiated to each unit reflector (31), along with the deformation of the deformed portion (64) of the holding device (11a) to (11d), each unit reflector (31) is fixed by the fixing device (21). The installation site serves as the center for thermal extension. The force applied to each unit reflector (31) due to thermal extension is relieved, and damage to the place where each unit reflector (31) is installed at the installation surface (19) is prevented.

Description

Vacuum heating device, reflector device

The present invention relates to a technique for heating an object to be heated with infrared rays in a vacuum atmosphere, and particularly relates to a reflector device that reflects infrared rays and a vacuum heating device equipped with the reflector device.

Vacuum processing, which uses semiconductor substrates or glass substrates as processing objects and forms a thin film on the surface of the processing object in a vacuum atmosphere, or etching the formed thin film in a vacuum atmosphere, is widely performed. Immediately before the vacuum treatment, a heating pretreatment process is provided to raise the temperature of the treatment target to a specific temperature and improve the reactivity of the vacuum treatment.

In addition, if the treatment target is heated in a vacuum atmosphere, the organic matter or moisture adhering to the treatment target evaporates in the vacuum atmosphere, and the purification of the treatment target is performed.

For the reason of good temperature controllability, the heating of this kind of processing object is mostly performed by infrared radiation. The infrared radiation of the groove is blocked, and a reflector is arranged between the wall surface of the vacuum groove and the infrared irradiating device, and it is configured to not raise the temperature of the vacuum groove.

In addition, in order to reduce the manufacturing cost, the object to be processed has become larger and larger. Accompanying this, the vacuum chamber has also become larger. However, if the reflector is enlarged, the amount of linear expansion due to heat will increase. , The problem of deformation or poor installation in the reflector or reflector mounting part has become serious.

In recent years, an attempt has been made to develop a reflector device in which a plurality of unit reflectors are arranged in rows and constitute one reflector. However, if the unit reflectors are fixed only in a single place, they are constructed so that they can not produce When the ground is deformed and thermally expanded, the amount of sagging near the edge of the unit reflector will increase, and heat leakage will occur between the unit reflectors.

In addition, if the edges of the unit reflectors are overlapped to prevent heat leakage, when thermal expansion occurs, the edges will slide on each other and generate a lot of dust.

[Prior Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Application Laid-Open No. 10-19386

The present invention was created to solve the above-mentioned problems of the prior art, and the problem to be solved is to provide a reflection plate A reflector device that does not deform or sag, and a vacuum heating device equipped with the reflector device.

The present invention is a vacuum heating device, which is characterized in that it is provided with: a vacuum tank, which is used for vacuum exhaust; and a heating source, which is arranged inside the vacuum tank and radiates infrared rays to heat the object Object heating; and reflector devices are arranged inside the vacuum tank, and are equipped with a plurality of shielding infrared rays that are radiated from the heating source and directed toward the mounting surface in the inner wall surface of the vacuum tank The unit reflector, the unit reflector is arranged along the mounting surface, and the reflector device is provided with: a plurality of fixing devices, one end of which is fixed to the mounting surface of the vacuum tank , And the other end is fixed at the unit reflector; and a plurality of holding devices, one end is fixed at the installation surface of the vacuum tank, and the other end is fixed at the unit reflector, The relative position between the place where the fixing device is fixed at the mounting surface and the place at the unit reflector is fixed by the fixing device, and the holding device is provided with The deformed deformed part, the relative positional relationship between the place where the holding device is fixed to the mounting surface and the place fixed to the unit reflector is configured to be deformed by the deformed part Make changes.

In addition, the present invention is a vacuum heating device, which is configured such that when the unit reflector is heated and thermally stretched, the deformed portion is Deformed, the relative positional relationship between the place where the holding device is fixed at the installation surface and the place where it is fixed at the unit reflector is changed.

In addition, the present invention is a vacuum heating device, which is configured such that the deformed portion is a leaf spring, and the leaf spring is arranged to be applied with the leaf spring by the thermal extension of the unit reflector. The direction of the force in the direction perpendicular to the surface.

In addition, the present invention is a vacuum heating device, which is configured such that the unit reflector is provided with a clearance hole, and the holding device is provided by a first screw inserted into the clearance hole. The locking device is screwed and fixed to the mounting surface. The edge of the margin hole and the first screw locking device are configured to thermally extend along the mounting surface even if the unit reflector is The unit reflector becomes non-contact in the temperature range above room temperature and lower than the upper limit temperature.

In addition, the present invention is a vacuum heating device, which is configured such that the fixing device and the holding device are welded and fixed to the unit reflector.

In addition, the present invention is a vacuum heating device, which is configured such that the fixing device is welded and fixed to the unit reflector, and the holding device is screwed and fixed to the unit reflector by a second screw locking device. At the aforementioned unit reflector.

In addition, the present invention is a vacuum heating device, which is configured such that the fixing device fixed to one unit reflector is arranged on the holder fixed to the same unit reflector. Device Between and the aforementioned holding device.

In addition, the present invention is a vacuum heating device, which is configured to be fixed to the same unit reflector with the fixing device fixed at the unit reflector as the center. The plural of the aforementioned holding devices.

Furthermore, the present invention is a reflector device characterized in that it is provided with: a plurality of unit reflectors, which are arranged inside the vacuum tank along the mounting surface in the inner wall surface of the vacuum tank , And shield the infrared rays radiated from the heating source toward the aforementioned mounting surface; and a plurality of fixing devices, one end of which is fixed to the aforementioned mounting surface of the aforementioned vacuum tank, and the other end is fixed to the aforementioned The unit reflector; and a plurality of holding devices, one end of which is fixed to the mounting surface of the vacuum tank, and the other end is fixed to the unit reflector, and the fixing device is fixed to the installation The relative position between the place on the surface and the place fixed on the unit reflector is fixed by the fixing device. The holding device is provided with a deformable deforming part. The relative positional relationship between the place fixed to the mounting surface and the place fixed to the unit reflector is configured to be changed by the deformation of the deforming portion.

In addition, the present invention is a reflector device, which is configured such that when the unit reflector is heated and thermally stretched, the deformed portion is deformed, and the holding device is fixed to the mounting surface at the location and The relative positional relationship between the places fixed to the unit reflector is changed.

In addition, the present invention is a reflector device, which is configured such that the deformed portion is a leaf spring, and the leaf spring is arranged to be applied with the leaf spring by the thermal extension of the unit reflector. The direction of the force in the direction perpendicular to the surface.

In addition, the present invention is a reflector device, which is configured such that the unit reflector is provided with a clearance hole, and the holding device is provided with a first screw inserted into the clearance hole. The locking device is screwed and fixed to the mounting surface. The edge of the margin hole and the first screw locking device are configured to thermally extend along the mounting surface even if the unit reflector is The unit reflector becomes non-contact in the temperature range above room temperature and lower than the upper limit temperature.

In addition, the present invention is a reflector device, which is configured such that the fixing device and the holding device are welded and fixed to the unit reflector.

In addition, the present invention is a reflector device, which is configured such that the fixing device is welded and fixed to the unit reflector, and the holding device is screwed and fixed to the unit reflector by a second screw locking device. At the aforementioned unit reflector.

In addition, the present invention is a reflector device, which is configured such that the fixing device fixed to one piece of the unit reflector is arranged on the holder fixed to the same unit reflector Between the device and the aforementioned holding device.

In addition, the present invention is a reflector device, which is configured to use the fixing device fixed to one piece of the unit reflector as the center The core is configured with a plurality of the holding devices fixed to the same unit reflector.

Since the unit reflector is fixed at the vacuum tank by the fixing device and the holding device, the large sagging caused by heat does not occur.

Since the mounting member and the unit reflector or the unit reflector will not slide between each other, no dust will be generated.

2: Vacuum heating device

11a~11d,12,13a,13b,14a~14c,15a~15d,16a~16d: holding device

17: Vacuum tank

19: Mounting surface

21~24,54,55: fixed device

26a~26d: The first screw locking device

28a~28d: 2nd screw locking device

31~36: unit reflector

46a~46d: surplus hole

64: Deformation

87: Heating object

88: heating source

110,210,310,410: reflector device

[Figure 1] is an example of the vacuum heating device of the present invention.

[Fig. 2] is a plan view for explaining the reflector device of the first example.

[Figure 3] (a): is the unit reflector of the reflector device of the first example before assembly, (b): is the unit reflector of the reflector device of the first example after assembly.

[Figure 4] is the holding device (a): plan view, (b): left side view, (c): front view, (d): back view, (e): cross-sectional view.

[Fig. 5] is a plan view for explaining the reflector device of the second example.

[Fig. 6] is a plan view for explaining the reflector device of the third example.

[Fig. 7] is a plan view for explaining the reflector device of the fourth example.

[Figure 8] (a), (b): are examples of unit reflection devices in which the mounting methods of the holding device and the fixing device are different.

[Figure 9] (a), (b): are other examples of unit reflection devices in which the mounting methods of the holding device and the fixing device are different.

[Fig. 10] is another example of the holding device (a): plan view, (b): left side view, (c): front view, (d): back view, (e): cross-sectional view.

[Fig. 11] is another example of the holding device (a): plan view, (b): left side view, (c): front view, (d): back view, (e): cross-sectional view.

<Vacuum heating device>

The symbol 2 in FIG. 1 is an example of the vacuum heating device of the present invention, and is provided with a vacuum tank 17.

Inside the vacuum chamber 17, a heating source 88 is arranged, and the vacuum chamber 17 is provided with a plurality of inner wall surfaces. A reflector device 110 is provided between the mounting surface 19 of one of the inner wall surfaces among the plurality of inner wall surfaces and the heating source 88. Between the other inner wall surface 18 facing the mounting surface 19 and the heating source 88, a substrate arrangement device 85 is provided. Here, the mounting surface 19 of the inner wall surface of the vacuum chamber 17 is the surface of the top plate, and the inner wall surface 18 facing parallel to the mounting surface 19 is the bottom surface.

A vacuum exhaust device 78 is connected to the vacuum tank 17, and if the vacuum exhaust device 78 is activated, the inside of the vacuum tank 17 is evacuated and a vacuum atmosphere is formed.

The substrate placement device 85 is provided with a pin 86. In the state where the pin 86 rises above the surface of the substrate placement device 85, the substrate 87, which is the object to be heated, is carried into the vacuum chamber 17 , And is carried on the pin 86. Figure 1 shows this state.

Next, the pins 86 are lowered, and the substrate 87 is horizontally arranged on the substrate arranging device 85. Next, the heating source 88 is energized, and the heating source 88 is heated and radiates infrared rays.

Among the infrared rays radiated from the heating source 88, the infrared rays radiated toward the substrate arrangement device 85 are irradiated to the substrate 87, and the substrate 87 is heated.

Among the infrared rays radiated from the heating source 88, the infrared rays radiated from the mounting surface 19 on the opposite side of the substrate 87 are irradiated to the reflector device 110 located between the heating source 88 and the mounting surface 19 .

Therefore, at the side of the mounting surface 19, the infrared rays are shielded by the reflector device 110 and will not be irradiated to the mounting surface 19, and the vacuum chamber 17 is configured to not rise in temperature.

The infrared rays irradiated to the reflector device 110 are reflected to the direction of the position of the heating source 88 and irradiated to the substrate 87.

The substrate 87 is heated in a state of being placed in a vacuum atmosphere formed by evacuating the inside of the vacuum chamber 17 and rising When the temperature reaches a certain temperature, the energization of the heating source 88 is stopped, and the substrate 87 is transported from the inside of the vacuum heating device 2 to the vacuum processing device connected to the vacuum heating device 2.

<Reflector device>

The structure of the reflector device 110 will be described. The reflector device 110 is generally as shown in FIG. 2, and is provided with plural unit reflection devices 111 to 113, 121 to 123, and 131 to 133. Each unit reflection device 111~113, 121~123, 131~133 is equipped with a quadrangular unit reflection plate 31, and each unit reflection device 111~113, 121~123, 131~133 unit reflection plate 31, here It is arranged in a row and column of 3 in the horizontal direction and 3 in the vertical direction. The unit reflection plate 31 is arranged horizontally.

At each unit reflector 31, one fixing device 21 and one or even a plurality of (here, four) holding devices 11a-11d are respectively installed on the same surface.

The structure of each unit reflection device 111~113, 121~123, 131~133 is the same. In Figure 3(a), (b), the unit reflection device 111~113, 121~123, The structure of the unit reflector 122 in one of 131~133.

The unit reflection devices 111 to 113, 121 to 123, and 131 to 133 are installed on the mounting surface of the plurality of inner wall surfaces of the vacuum tank 17 by the fixing device 21 and the holding device 11a-11d, as described later. 19 locations.

Fig. 3(a), the unit reflector 31 is removed from the mounting surface 19 The separated state is shown. (b) of the same figure shows the state in which the unit reflector 31 is installed on the mounting surface 19.

The fixing device 21 is provided with a cylindrical main body 52 provided with an insertion hole 53 in the center.

In the center of the unit reflector 31, a first plate-side fixing hole 47 is formed as a through hole, and the fixing device 21 is such that the insertion hole 53 and the first plate-side fixing hole 47 communicate with each other. It is fixed at the unit reflector 31. Here, the fixing device 21 is welded and fixed to the unit reflector 31 in a state where the insertion hole 53 and the first plate-side fixing hole 47 are in communication with each other.

Each holding device 11a-11d is located between the unit reflector 31 and the mounting surface 19, and is provided with a plate-side connection portion 62 contacting the unit reflector 31 and a groove-side connection portion contacting the mounting surface 19 63. And the deformed portion 64 in which one end is fixed to the plate-side connecting portion 62 and the other end is fixed to the groove-side connecting portion 63.

Figure 4(a) is a plan view of the holding devices 11a-11d, (b) of the same figure is a left side view, (c) of the same figure is a front view, and (d) of the same figure is a back view. (E) of the same figure is a cutaway cross-sectional view of the holding devices 11a-11d in a plane passing through the plate-side connecting portion 62, the deforming portion 64, and the groove-side connecting portion 63.

If the connection between the mounting surface 19 and the groove-side connecting portion 63 and the fixing device 21 is described, the groove-side connecting portion 63 is provided with a first holding-side fixing hole 60, which is in the unit reflector 31 The part opposite to the first holding side fixing hole 60 is provided with a margin hole 46a~ 46d (In Figure 3 (a) and (b), the margin holes specified by the reference symbols 46c and 46d and the holding device specified by the reference symbols 11c and 11d and the following reference symbols 26c, The first screw locking device specified in 26d and the second slot side fixing hole specified by the symbol 58c and 58d below are shown).

The mounting surface 19 is provided with a first groove-side fixing hole 57 at a position opposite to the insertion hole 53, and a position opposite to the first holding-side fixing hole 60 is respectively provided with The second groove side fixing holes 58a to 58d are provided.

The plate-side connecting portion 62 is welded and fixed to the unit reflector 31, and connects the first groove-side fixing hole 57 and the insertion hole 53 to each other, and connects the second groove-side fixing holes 58a to 58d to each holding device 11a. When the first holding-side fixing holes 60 of ~11d are in communication with each other, make one end of the fixing device 21 facing the mounting surface 19 side and the groove-side connecting portion 63 of each holding device 11a-11d and the mounting surface 19 Contact, and insert the body portion 66 of the fixing screw locking device 27 into the first plate side fixing hole 47 and the insertion hole 53, and then rotating the fixing screw locking device 27 to fix it on the first groove side The threaded portion on the inner peripheral surface of the hole 57 is screwed with the threaded portion provided on the outer peripheral surface of the front end of the carcass portion 66, and by this rotation, the front end of the carcass portion 66 is fixed toward the first groove side The bottom surface of the hole 57 advances.

The head 67 protruding from the carcass portion 66 of each fixing screw locking device 27 is formed to be larger than the first plate side fixing hole 47. By fixing the screw locking device 27 forward, the head 67 The seat surface is in contact with the unit reflector 31 respectively. By the rotation of the fixing screw locking device 27, the head The 67 system pushes the unit reflector 31 and the fixing device 21 toward the mounting surface 19.

On the other hand, the carcass portion 37 of the first screw locking device 26a to 26d is inserted from the front end 38 provided at the front end of the carcass portion 37 into the free holes 46a to 46d, and the front end 38 is It is inserted into the first holding side fixing hole 60 and the second groove side fixing hole 58a to 58d of each holding device 11a to 11d, respectively. The component symbol 39 is the head, and it is in non-contact with the unit reflector 31.

The margin holes 46a~46d are formed to be larger than the carcass portion 37 of the first screw locking device 26a~26d. The margins of the margin holes 46a~46d and the carcass portion 37 inserted in the margin holes 46a~46d The outer peripheral side surfaces of the are configured to be separated from each other by a certain distance at room temperature (here, the temperature range of 20℃±15℃ is set to room temperature) or room temperature (here, 300K), and are configured as When the reflector device 110 is lower than the specific upper temperature and lower temperature, it will also be separated from each other. The upper limit temperature is, for example, 600°C.

The inner peripheral surface of the second groove side fixing holes 58a to 58d and the outer peripheral surface of the front end portion 38 are respectively formed with threads, and the front end portion 38 is inserted into the first holding side fixing hole 60 and the second groove side In the fixing holes 58a to 58d, if the first screw locking device 26a to 26d is rotated, the front end 38 and the second groove side fixing holes 58a to 58d are screwed together, and the front end 38 is fixed toward the second groove side. The bottom surface of the holes 58a~58d advances.

Here, the diameter of the body portion 37 is formed to be larger than the diameter of the first holding side fixing hole 60 and the diameter of the tip portion 38, and the tip portion 38 It advances toward the bottom surface of the second groove-side fixing holes 58a to 58d. The end of the carcass 37 on the front end 38 side is in contact with the groove-side connecting portion 63. If the front end 38 advances further, the groove-side connection The portion 63 is pressed against the mounting surface 19 of the vacuum groove 17 by the end of the carcass portion 37.

Therefore, the part of the unit reflector 31 provided with the fixing device 21 is fixed at the mounting surface 19 by the fixing screw locking device 27, and the part provided with the holding device 11a~11d is It is fixed to the mounting surface 19 by the first screw locking devices 26a to 26d. As a result, the position where the fixing device 21 is fixed to the mounting surface 19 and the place where the fixing device 21 is fixed to the unit reflector 31, the relative position between the two is determined by the fixing device 21 Is made fixed.

〈Heating Engineering〉

The inside of the vacuum chamber 17 is evacuated by a vacuum exhaust device 78, and set to a vacuum atmosphere. After the substrate 87 is placed on the substrate placement device 85 while being evacuated on one side, if it is heated The source 88 is energized to generate heat and radiate infrared rays. The radiated infrared rays are irradiated to the substrate 87 and the unit reflection plate 31 of the reflector device 110, and the substrate 87 and the unit reflection plate 31 are heated.

The fixing device 21 is located at the center of each unit reflector 31, and the holding devices 11a-11d are fixed to one unit reflector 31, and are arranged to be fixed to the same unit reflector 31. The fixing device 21 is centered on the circumference.

The deformed part 64 of each holding device 11a~11d is flat It has a plate shape, and the area of each deformed portion 64 is a large surface, which is directed toward the fixing device 21.

The unit reflector 31 is irradiated with infrared rays. At the installation surface 19 of the vacuum tank 17, the infrared ray is shielded. Therefore, even if infrared rays are radiated, the temperature rise of the inner wall of the vacuum tank 17 is small. However, the temperature of the unit reflector 31 is increased more than the temperature of the mounting surface 19 of the vacuum chamber 17.

Therefore, the mounting surface 19 of the vacuum chamber 17 does not undergo thermal extension (also referred to as expansion). In contrast, the unit reflection plate 31 does not undergo thermal extension. In this case, the part where the fixing device 21 is installed is fixed to the mounting surface 19. Therefore, the unit reflector 31 is intended to be directed toward the radiation direction centered on the portion where the fixing device 21 is fixed. Thermal extension.

The groove-side connecting portion 63 of each holding device 11a-11d is fixed to the mounting surface 19 by the first screw locking device 26a-26d, so it will not move. However, the plate-side connecting portion 62 side , Is moved together with the thermal extension of the unit reflector 31. Therefore, at the deforming portion 64, a force toward the radiation direction is applied from the plate-side connecting portion 62.

The holding devices 11a~11d (and the holding devices 12, 13a, 13b, 14a~14c, 15a~15d, 16a~16d described later) are used to make the force applied to the deforming part 64 relative to the rectangular deforming part The area of 64 is a large surface and becomes a vertical manner, and is arranged, and along with the deformation of the deforming portion 64, in one holding device 11a-11d (and the holding device 12, 13a, 13b, 14a-14c described later) , 15a~15d, 16a~16d) of Among them, the plate-side connecting portion 62 intends to move relative to the groove-side connecting portion 63.

At this time, a gap is formed between the edges of the margin holes 46a to 46d and the outer peripheral side surface of the body portion 37 of the first screw locking device 26a to 26d, and is set in a non-contact state, therefore, When the unit reflector 31 is heated and thermally stretched along with the deformation of the deformed portion 64, if the temperature of the unit reflector 31 is below a certain temperature, the edges of the remaining holes 46a to 46d and the outer peripheral surface of the carcass 37 are in parallel They will not touch each other and will be maintained in a non-contact state.

Therefore, the plate-side connecting portion 62 of each holding device 11a-11d is caused by the thermal extension of the unit reflector 31, and the holding device 11a-11d is fixed to the mounting surface 19 and fixed to the unit reflector 31. The relative positional relationship between the places is changed by the deformation of the deforming part 64. As a result, the part of the fixing device 21 fixed to the unit reflector 31 is taken as the center, and it moves toward the radiation direction. .

In this way, along with the deformation of the deforming portion 64, among the one holding device 11a-11d, the reason is that the plate-side connecting portion 62 fixed to the unit reflector 31 is fixed to the mounting surface 19 with respect to When the groove-side connecting portion 63 moves relatively, since the force applied to the plate-side connecting portion 62 and the groove-side connecting portion 63 is relieved, the holding devices 11a-11d are not broken.

When the temperature of the heated unit reflector 31 decreases, the thermally stretched unit reflector 31 shrinks, and the deformation of the deformed portion 64 returns to its original shape. In the unit reflector 31, the plate-side connecting portion 62 is opposite to the groove-side connecting portion 63 When moving toward the center of the unit reflector 31, the relative positional relationship between the plate-side connecting portion 62 and the groove-side connecting portion 63 is restored to the state before heating.

In addition, the side surface of the adjacent unit reflection plate 31 and the side surface of the unit reflection plate 31 may also be configured to be separated in advance at room temperature and approach each other by thermal extension.

If the substrate 87 is heated to a specific temperature, the substrate 87 is moved from the vacuum chamber 17 to the processing chamber of another vacuum processing apparatus.

In the reflector device 110 described above, although the fixing device 21 is welded and fixed to the center of one unit reflector 31, and the fixing device 21 is positioned at the center of the unit reflector 31 Four holding devices 11a~11d are arranged around the position, but, as shown in Fig. 7, the fixing device 24 is positioned at the plural unit reflecting devices 411~413, 421~423 arranged in rows and columns. The reflector device 410 with three holding devices 14a-14c arranged at the center of the unit reflector 34 of 431 to 433 and around the fixing device 24 is also included in the present invention.

In addition, as shown in FIG. 6, the fixing device 23 is positioned at one of the long side directions of the unit reflection plate 33 of the plural unit reflection devices 311 to 313, 321 to 323, and 331 to 333 arranged in rows and columns. The reflector device 310 with two holding devices 13a and 13b arranged at the other end is also included in the present invention.

In addition, as shown in FIG. 5, the fixing device 22 is positioned at the plural unit reflection devices 211 to 213 arranged in rows and columns, The reflector device 210 in which one holding device 12 is arranged at one end of the unit reflector plate 32 in the longitudinal direction of 221 to 223 and 231 to 233 at the other end is also included in the present invention.

The structures of the fixing devices 22, 23, and 24 of the reflector devices 210, 310, 410 in Figs. 5-7 are the same as the fixing device 21 described in Fig. 3, but one end is welded and fixed. At the unit reflectors 32, 33, and 34.

In addition, the structure of the holding devices 12, 13a, 13b, 14a-14c of the reflector devices 210, 310, 410 of FIGS. 5-7 is the same as that of the holding devices 11a-11d of FIG. 62 are respectively welded and fixed to the unit reflectors 32, 33, and 34, and the rectangular deformed portion 64 is arranged so that the area of the deformed portion 64 is wide and the surface faces the fixing devices 22, 23, and 24. The same applies to the fact that there is a specific distance between the edges of the margin holes 46a to 46d and the outer peripheral side surface of the carcass portion 37 of the first screw locking device 26a to 26d arranged at the margin holes 46a to 46d, and When the unit reflection plates 32 to 34 are heated and thermally stretched, the plate-side connection portion 62 is configured to be able to move due to the thermal stretch by an amount corresponding to the separated distance.

In addition, it has been confirmed that when the unit reflector is fixed to the inner wall surface of the vacuum tank by only one fixing device without a holding device, when the unit reflector is heated, the unit The vicinity of the edge of the reflector will sag, and the edge of the unit reflector and the heating source 88 will contact each other, which is not ideal.

In the above reflector device 110, 210, 310, 410 Among them, the fixing devices 21 to 24 and the holding devices 11a to 11d, 12, 13a, 13b, and 14a to 14c are configured so that the unit reflector 31 to 34 side is welded and fixed and the vacuum tank 17 is mounted on the 19 side It is screwed and fixed, but the present invention is not limited to this.

In Figs. 8(a), (b) and Figs. 9(a), (b), there are shown unit reflection devices 151, 152 that are different from the unit reflection device 122 of Figs. 3(a) and (b), The unit reflection devices 151 and 152 are arranged in rows and columns, and are installed in the vacuum tank 17 to form a reflector device.

Figures 8(a) and 9(a) are in a state where the unit reflectors 151 and 152 are separated from the mounting surface 19 of the vacuum chamber 17, respectively. Figures 8(b) and 9(b) are The unit reflection devices 151 and 152 are installed on the mounting surface 19 respectively.

In the unit reflection device 151 of Fig. 8 (a) and (b), both ends of the fixing device 54 and the holding devices 15a-15d (holding devices 15c, 15d and the following second plate side fixing holes 48c, 48d, second The two ends of the groove-side fixing holes 58c and 58d (not shown) are not welded and fixed to the mounting surface 19 and the unit reflector 35.

The holding devices 15a to 15d used in Figs. 8(a) and (b) are shown in Figs. 10(a) to (e).

The holding device 15a on the left side of Fig. 7(a) and (b) is shown in cross section, and the holding device 15b on the right side is shown on the oblique side. The same applies to Figs. 9(a) and (b) described later.

The holding devices 15a-15d are located between the unit reflector 35 and the mounting surface 19, and are provided with a plate-side connection on the side of the unit reflector 35 The portion 62, the groove-side connecting portion 63 on the mounting surface 19 side, and the deformable portion 64 having one end fixed to the plate-side connecting portion 62 and the other end fixed to the groove-side connecting portion 63.

The board-side connecting portion 62 and the unit reflector 35 are not welded and fixed. At the board-side connecting portion 62, a second holding-side fixing hole 61 is formed, and at the unit reflector 35, a second retaining hole 61 is formed. The second plate side fixing holes 48a~48d.

The first groove side fixing hole 57, the insertion hole 53, and the first plate side fixing hole 47 are connected to each other, and the second groove side fixing holes 58a to 58d, the first holding side fixing hole 60 and the remaining holes 46a to 46d are mutually connected. The connection, the second holding-side fixing hole 61 and the second plate-side fixing hole 48a~48d are connected to each other. For the vacuum tank 17, the fixing device 54 and the holding device 15a~15d and the unit reflector 35 are arranged, and The fixing screw locking device 27 is inserted from the first plate side fixing hole 47 side into the first plate side fixing hole 47 and the insertion hole 53 and the first groove side fixing hole 57, and the first screw is locked The front end 38 of the closing device 26a~26d (devices with reference numerals c and d are not shown) is inserted from the side of the margin holes 46a~46d into the margin holes 46a~46d and the first holding side fixing hole 60 and the second groove side fixing holes 58a to 58d, and the carcass 77 of the second screw locking device 28a to 28d (devices with reference signs c and d are not shown), from the first The 2 plate side fixing holes 48a to 48d are inserted into the second plate side fixing holes 48a to 48d and the second holding side fixing hole 61. The fixing device 54 fixes the center of the unit reflector 35 through The device 54 is screwed and fixed to the mounting surface 19, and the groove side connecting portion 63 is screwed and fixed to the mounting surface 19 by the first screw locking devices 26a~26d. The board-side connecting portion 62 is screw-locked and fixed to the unit reflector 35 by the second screw-lock fixing devices 28a-28d. The fixing device 54 and the unit reflector 35 are sandwiched by the mounting surface 19 and the head 67, and the unit reflector 35 is sandwiched by the board-side connecting portion 62 and the head 76.

In the unit reflector 122 of Fig. 3(a) and (b), the plate-side connecting portion 62 of the holding device 11a-11d is welded and fixed to the unit reflector 31, and the groove-side connecting portion 63 is screw-locked Fixed, but, in the unit reflector 152 of Fig. 9 (a), (b), the plate-side connecting portion 62 of the holding device 16a-16d (devices with reference numerals c and d are not shown) The second screw-locking devices 28a-28d (devices with component symbols 28c and 28d are not shown) are screwed and fixed to the unit reflector 36, and the groove-side connecting portion 63 is welded and fixed At 19 locations on the mounting surface. The fixing device 55 is in a state where the fixing screw locking device 27 is inserted into the first plate-side fixing hole 47, the insertion hole 53 and the first groove-side fixing hole 57, and the mounting surface 19 side is fixed to 19 locations on the mounting surface. The carcass part 66 is screwed and fixed by the first groove side fixing hole 57. The carcass portion 77 of the second screw locking device 28a-28d is inserted into the second plate side fixing hole 48a-48d (devices with reference numerals 48c and 48d are not shown). In the plate-side fixing holes 48a to 48d and the second holding-side fixing hole 61, the plate-side connecting portion 62 is screwed and fixed to the unit reflector 36 by the second screw locking devices 28a to 28d.

The holding devices 16a-16d are shown in Fig. 11(a)-(e).

In this unit reflection device 152, it can also be the same as the fixing device 21 in FIG. 3(a) and (b), and the fixing device 55 and the unit reflection plate 36 For welding and fixing, the fixing device 55 and the mounting surface 19 are screwed and fixed. The mounting surface 19 and the unit reflector 36 can also be screwed and fixed via the fixing device 55.

In addition, although the aforementioned deforming portion 64 is a leaf spring, it can replace the leaf spring regardless of whether it is for the holding device 11a-11d, 12, 13a, 13b, 14a-14c, 15a-15d, 16a-16d Other types of springs such as coil springs are used.

11a, 11b: holding device

17: Vacuum tank

19: Mounting surface

21: Fixing device

26a, 26b: The first screw locking device

27: Fixed screw locking device

31: Unit reflector

37: Carcass

38: Front end

39: head

46a, 46b: excess hole

47: 1st plate side fixing hole

52: body

53: Through hole

57: 1st slot side fixing hole

58a, 58b: 2nd groove side fixing hole

62: Board side connection part

63: Groove side connection part

64: Deformation

66: Carcass

67: head

122: unit reflection device

Claims (16)

A vacuum heating device, characterized in that it is provided with: a vacuum tank, which is used for vacuum exhaust; and a heating source, which is arranged inside the vacuum tank and radiates infrared rays to heat the object to be heated; and reflection The device is arranged inside the vacuum tank and is provided with a plurality of unit reflectors that shield infrared rays radiated from the heating source and directed toward the mounting surface in the inner wall surface of the vacuum tank. The unit reflector is arranged along the mounting surface, and the reflector device is equipped with a plurality of fixing devices, one end of which is fixed to the mounting surface of the vacuum tank, and the other end Are fixed at the unit reflector; and a plurality of holding devices, one end of which is fixed at the mounting surface of the vacuum tank, and the other end is fixed at the unit reflector, the fixing device is The relative position between the place fixed to the mounting surface and the place fixed to the unit reflector is fixed by the fixing device, and the holding device is provided with a deformable deforming part, The relative positional relationship between the location of the holding device fixed to the mounting surface and the location of the unit reflector is configured to be changed by the deformation of the deforming portion. The vacuum heating device described in the first item of the scope of patent application, wherein when the unit reflector is heated and thermally stretched, the deformed portion is deformed, and the holding device is fixed to the place where the mounting surface is and is The relative positional relationship between the places fixed to the unit reflector is changed. In the vacuum heating device described in claim 2, wherein the deformed portion is a leaf spring, and the leaf spring is arranged so that the heat extension of the unit reflector is applied to the plate spring. The direction of the force in the direction perpendicular to the surface. The vacuum heating device described in item 1 of the scope of patent application, wherein the unit reflector is provided with a spare hole, and the holding device is locked by a first screw that is inserted into the spare hole. The device is screwed and fixed to the mounting surface by screwing. The edge of the margin hole and the first screw-locking device are constructed such that even the unit reflector is thermally extended along the mounting surface. The reflector becomes non-contact in the temperature range above room temperature and lower than the upper limit temperature. The vacuum heating device described in item 4 of the scope of patent application, wherein the fixing device and the holding device are welded and fixed to the unit reflector. For the vacuum heating device described in item 4 of the scope of patent application, wherein the fixing device is welded and fixed to the unit reflector, and the holding device is screwed and fixed to the aforementioned unit by a second screw locking device. Unit reflector. The vacuum heating device described in the first item of the scope of patent application, wherein the fixing device fixed to one unit reflector is arranged on the holding device fixed to the same unit reflector Between and the aforementioned holding device. The vacuum heating device described in item 1 of the scope of patent application, wherein the fixing device fixed to one unit reflector is the center, and the unit is fixed to the same unit reflector as the center. Plural of the aforementioned holding devices. A reflector device, characterized in that it is provided with: A plurality of unit reflectors are arranged inside the vacuum tank along the mounting surface in the inner wall surface of the vacuum tank, and shield the infrared rays radiated from the heating source toward the mounting surface; and A plurality of fixing devices are such that one end is fixed to the mounting surface of the vacuum tank, and the other end is fixed to the unit reflector; and a plurality of holding devices are fixed to the aforementioned mounting surface. At the aforementioned mounting surface of the vacuum tank, the other end is fixed at the aforementioned unit reflector. The relativity between the place where the fixing device is fixed at the aforementioned mounting surface and the place fixed at the aforementioned unit reflector The position is fixed by the fixing device, the holding device is equipped with a deformable deformable part, the location of the holding device is fixed to the mounting surface and the location to be fixed to the unit reflector The relative positional relationship between them is constituted to be changed by the deformation of the aforementioned deforming part. As for the reflector device described in item 9 of the scope of patent application, when the unit reflector is heated and thermally extended, the deformed portion is deformed, and the holding device is fixed to the place where the mounting surface is located and is The relative positional relationship between the places fixed to the unit reflector is changed. Such as the reflector device described in item 10 of the scope of patent application, in which, The deformed portion is a leaf spring, and the leaf spring is arranged in a direction in which a force perpendicular to the surface of the leaf spring is applied by the thermal extension of the unit reflector. The reflector device described in item 9 of the scope of patent application, wherein the unit reflector is provided with a spare hole, and the holding device is locked by a first screw that is inserted into the spare hole. The device is screwed and fixed to the mounting surface. The edge of the margin hole and the first screw-locking device are configured to thermally extend along the mounting surface even if the unit reflector is thermally extended along the mounting surface. The reflector becomes non-contact in the temperature range above room temperature and lower than the upper limit temperature. The reflector device described in item 12 of the scope of patent application, wherein the fixing device and the holding device are welded and fixed to the unit reflector. As for the reflector device described in item 12 of the scope of patent application, wherein the fixing device is welded and fixed to the unit reflector, and the holding device is screwed and fixed to the aforementioned unit by a second screw locking device. Unit reflector. The reflector device described in item 9 of the scope of patent application, wherein the fixing device is fixed to one piece of the unit reflector, It is arranged between the holding device and the holding device that are fixed to the same unit reflector. The reflector device described in item 9 of the scope of patent application, in which the fixing device fixed to one unit reflector is the center, and the reflector device is fixed to the same unit reflector. Plural of the aforementioned holding devices.

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