TWI741997B - 用於控制電晶體子鰭洩漏的技術 - Google Patents
用於控制電晶體子鰭洩漏的技術 Download PDFInfo
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- TWI741997B TWI741997B TW105126785A TW105126785A TWI741997B TW I741997 B TWI741997 B TW I741997B TW 105126785 A TW105126785 A TW 105126785A TW 105126785 A TW105126785 A TW 105126785A TW I741997 B TWI741997 B TW I741997B
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Abstract
揭露一種用於控制電晶體子鰭洩漏的技術。技術可用於高度縮放的finFET以及其它非平面電晶體。在一些情況下,技術包括暴露在基板上形成的鰭片結構之中間部分,並接著經由摻雜或氧化程序將暴露的部分轉成電性隔離材料。例如,單層摻雜(MLD)程序可能用以在自飽和單層架構中將摻雜劑傳送到鰭片的暴露部分。在另一實例情況中,可能使用熱氧化將暴露部分轉成絕緣體材料。在一些情況下,阻擋層(例如,包括碳摻雜)可能位於鰭片的暴露部分上方以幫助防止摻雜或氧化程序影響用於電晶體通道之鰭片的上方區。
Description
本發明係關於用於控制電晶體子鰭洩漏的技術。
finFET是圍繞薄帶狀半導體材料構建的電晶體(通常稱為鰭片)。電晶體包括標準場效電晶體(FET)節點,包括閘極、閘極介電質、源極區、和汲極區。裝置的導電通道駐留在鄰近閘極介電質之鰭片的外部上。具體地,電流沿著鰭片的兩個側壁(垂直於基板表面的側面)/在鰭片的兩個側壁(垂直於基板表面的側面)內以及沿著鰭片的頂部(平行於基板表面的側面)延伸。由於這種配置的導電通道基本上沿著鰭片的三個不同的外部平坦區域存在,因此這種finFET設計有時被稱為三閘極電晶體。也可獲得其它類型的finFET配置,例如所謂的雙閘極finFET,其中導電通道主要僅沿著鰭片的兩個側壁(而不是沿著鰭片的頂部)存在。與基於鰭片的電晶體類似地配置奈米線電晶體(有時稱為環繞式或奈米帶電晶
體),而不是其中閘極在三個部分上的鰭狀通道區(因此,有三個有效閘極),使用一或多個奈米線,且閘極材料通常圍繞每個奈米線。存在與基於鰭片的電晶體相關聯的許多非平凡問題。
100‧‧‧方法
200‧‧‧基板
210‧‧‧硬遮罩
230‧‧‧硬遮罩
220‧‧‧外延層
202‧‧‧子鰭區
240‧‧‧STI材料
204‧‧‧暴露的子鰭部分
250‧‧‧包覆
260‧‧‧封頂層
206‧‧‧隔離區
222/224‧‧‧S/D區
270‧‧‧閘極
282‧‧‧間隔物
284‧‧‧硬遮罩
322/324‧‧‧S/D區
326/328‧‧‧外延S/D材料
320‧‧‧奈米線
1000‧‧‧計算系統
1002‧‧‧主機板
1004‧‧‧處理器
1006‧‧‧通訊晶片
第1圖繪示根據本揭露之一些實施例之形成積體電路的方法。
第2A-K圖繪示根據本揭露之一些實施例之當執行第1圖的方法時形成的示範積體電路結構。
第2A'-K'圖繪示根據本揭露之一些實施例之當在包括阻擋層的多層基板上執行第1圖的方法時形成的示範積體電路結構。
第3和3'圖繪示根據本揭露之一些實施例之可對第2K和2K'圖之積體電路結構進行的變化。
第4圖繪示根據本揭露之實施例之以使用本文所揭露之技術形成的積體電路結構或裝置實作的計算系統。
揭露了用於控制電晶體子鰭洩漏的技術。技術可用於高度縮放的finFET以及其他非平面電晶體。在一些情況下,技術包括從基板形成至少一鰭片、STI處理和凹陷STI以允許鰭片之上方區從STI平面滲出、包覆鰭
片之上方區、以及凹陷STI以暴露鰭片的下方區之一部分。然後可經由摻雜和氧化程序將鰭片的暴露部分轉成電性隔離材料。例如,單層摻雜(MLD)程序可能用以在自飽和單層架構中將摻雜劑遞送到鰭片的暴露部分。在另一示範情況下,熱氧化(有或沒有催化材料的幫助)可能用以將暴露部分轉成絕緣體材料。在一些情況下,阻擋層(例如,包括碳摻雜)可能位於鰭片的暴露部分上方以幫助防止摻雜或氧化程序影響用於電晶體通道之鰭片的上方區。根據本揭露,許多變化和配置將是顯而易見的。
概述
隨著finFET縮放(例如,高度增加、間距減小、等等),電性隔離電晶體的子鰭區變得非常具有挑戰性。這樣的挑戰可導致從源極流過子鰭區到汲極(或反之亦然)的寄生電流之增加,或者包括對地的其它洩漏問題。洩漏增加功耗,且若夠大,洩漏可導致完全電路故障。使用固態源摻雜以提供內建二極體能障的當前程序在其摻雜和隔離精細和緻密finFET結構的能力方面受到限制。因此,需要用於處理子鰭洩漏的可擴充解決方案。
因此,且根據本揭露之一些實施例,揭露了用於控制電晶體子鰭洩漏的技術。如根據本揭露將顯而易見的,技術可用於高度縮放的finFET以及其它非平面電晶體。在一些實施例中,技術包括從基板形成至少一鰭片、STI處理和凹陷STI以允許鰭片之上方區從STI平面
滲出、包覆鰭片之上方區、以及凹陷STI以暴露鰭片的下方區之一部分。在一些這樣的實施例中,可藉由在主動通道部分下面摻雜或氧化鰭片的暴露部分來實現子鰭隔離。例如,在鰭片的暴露部分被摻雜的實施例中,單層摻雜程序可能用以遞送自飽和單層架構中的摻雜劑。摻雜(若採用的話)將是與阱摻雜類型類似且與源極/汲極摻雜類型相反的類型(但不一定是相同的物質)。然而,可能使用其他摻雜程序,例如擴散玻璃摻雜。在鰭片的暴露部分被氧化的實施例中,可能使用熱氧化程序來氧化鰭片的暴露部分。在一些這樣的實施例中,催化材料(例如,氧化鋁)可能沉積在鰭片的暴露部分上並在氧化程序期間使用。然而,在利用氧化的一些實施例中,暴露的子鰭部分可能僅在受控氧化環境中進行熱處理。
在一些實施例中,鰭片可能由包括阻擋層的多層基板形成,其中鰭片中的阻擋層直接在鰭片的主動通道部分下方。在一些這樣的實施例中,當鰭片的暴露部分被轉成隔離部分時(例如,經由如本文各種描述的摻雜或氧化),阻擋層可能幫助完全或部分地阻擋主動通道部分被無意地摻雜或氧化。阻擋層可能是碳摻雜外延層或任何其它適當的層,這取決於最終用途或目標應用。
根據本揭露,技術的許多益處將是顯而易見的。例如,技術可幫助實現高度縮放之finFET的子鰭隔離。此外,本文中各種描述的隔離技術比其它程序更具可擴展性,因為以受控方式執行子鰭隔離(例如,技術包括
本文所述的摻雜劑擴散和氧化的巨大控制,特別是存在阻擋層)。例如,在透過摻雜實現子鰭隔離區的實施例中,技術呈現單層控制(例如,吸附的自限制化學),並可在緻密非平面結構中實現高保形摻雜。此外,在透過氧化實現子鰭隔離區的實施例中,技術提供比其它程序更強固的隔離,其中強固性包括最終洩漏電流和在存在較高溫度/時間熱處理的情況下保持低洩漏電流的能力。在一些實施例中,技術可用於具有包括矽(Si)、鍺(Ge)、矽鍺(SiGe)、或至少一III-V材料(例如,GaAs、InGaAs、等等)之主動通道部分的電晶體。可受益於本文所述之隔離技術的各種示範電晶體裝置幾何形狀包括但不限於場效電晶體(FET)、金屬氧化物半導體FET(MOSFET)、穿隧FET(TFET)、平面電晶體配置、雙閘極電晶體配置、鰭狀電晶體配置(例如,fin-FET,三閘極)、和奈米線(或奈米帶或環繞式)電晶體配置。此外,隔離技術可能用於p型電晶體裝置(例如p-MOS或p-TFET)及/或n型電晶體裝置(例如n-MOS或n-TFET)。此外,技術可能用於互補MOS(CMOS)裝置或互補TFET(CTFET)裝置。因此,本文中各種描述的隔離技術允許連續的電晶體縮放,包括具有高移動性通道(例如使用SiGe或III-V材料的通道)的潛在未來節點,從而提供與區域的連續功率/效能縮放。
一旦分析(例如,使用掃描/透射電子顯微鏡(SEM/TEM)、組成映射、二次離子質譜儀(SIMS)、
飛行時間SIMS(ToF-SIMS)、傾斜的ToF-SIMS、原子探針成像、局部電極原子探針(LEAP)技術、3D斷層攝影、高解析度物理或化學分析、等等),根據一些實施例配置的結構或裝置將有效地顯示子鰭隔離區,如本文中各種描述。例如,這樣的結構可能包括在電晶體裝置的主動通道和子鰭區之間的隔離區,其中隔離區是已經以與主動通道相同的方式但以更高的濃度摻雜的區域(例如,主動通道是n型摻雜,且隔離區也是n型摻雜但是具有更高的濃度,主動通道是p型摻雜的,且隔離區也是p型摻雜但是具有更高的濃度),或者隔離區是原本鰭片的氧化區域。此外,在一些實施例中,阻擋層可能直接存在於主動通道區下方。這種阻擋層可能包括例如碳摻雜(例如,在C含量為1-30%的範圍內)。此外,在一些實施例中,可能藉由測量裝置效能來偵測本文中各種描述的隔離技術和所得到的結構之使用,以判定是否實現本文所述的一或多個益處。根據本揭露,許多配置和變化將是顯而易見的。
架構和方法
第1圖繪示根據本揭露之一些實施例之形成積體電路的方法。第2A-K圖繪示根據本揭露之一些實施例之當執行第1圖的方法時形成的示範積體電路結構。第2A`-K`圖繪示根據一些實施例之當在包括阻擋層的多層基板上執行第1圖的方法時形成的示範積體電路結構。如根據所形成的結構將顯而易見的,方法100揭露用於將電晶
體主動通道與主動通道下方的區域(這裡稱為子鰭或子通道區)電性隔離的技術。因此,第2A-J和2A'-J'圖中的結構被顯示在通道區中的鰭片之橫截面處(例如,沿著將最終包括電晶體閘極的平面),這將在描述第2K-2K'圖時是顯而易見的。為了便於說明,主要使用包括鰭狀配置(例如,FinFET或三閘極)的電晶體裝置來描述結構。然而,取決於最終用途或目標應用,技術可用以整合任何適當幾何形狀的電晶體。可受益於本文所述之隔離技術的各種示範電晶體裝置幾何形狀包括但不限於場效電晶體(FET)、金屬氧化物半導體FET(MOSFET)、穿隧FET(TFET)、平面電晶體配置、雙閘極電晶體配置、鰭狀電晶體配置(例如,fin-FET,三閘極)、和奈米線(或奈米帶或環繞式)電晶體配置。此外,隔離技術可能用於p型電晶體裝置(例如,p-MOS或p-TFET)及/或n型電晶體裝置(例如,n-MOS或n-TFET)。此外,隔離技術可能用於互補MOS(CMOS)裝置或互補TFET(CTFET)裝置。
根據實施例,第1圖的方法100包括提供如第2A圖所示的基板200。基板200可能是例如:包括例如Si、SiGe、Ge、及/或至少一III-V材料的塊基板;絕緣體上X(XOI)結構,其中X是Si、SiGe、Ge、及/或至少一III-V材料,且絕緣體材料是氧化物材料或介電質材料或一些其它電絕緣材料;或一些其它適當的多層結構,其中頂層包括Si、SiGe、Ge、及/或至少一III-V材
料。在一些實施例中,頂層可能包括複數個多層材料,其可能用於例如奈米線應用。如在第2A圖中還可看出,在基板200上形成硬遮罩230。可使用任何適當的技術來沉積硬遮罩210,例如使用毯式沉積或使用化學氣相沉積(CVD)、原子層沉積(ALD)、物理氣相沉積(PVD)、旋塗處理、及/或任何其它適當的程序來生長硬遮罩材料210在基板200上以在基板200上形成硬遮罩210。在一些情況下,可能在沉積硬遮罩210之前處理待沉積之基板200的表面(例如,化學處理、熱處理等)。可使用任何適當的技術來圖案化硬遮罩210,例如一或多個光刻和蝕刻程序。硬遮罩210可能包括任何適當的材料,例如各種氧化物或氮化物材料。具體的氧化物和氮化物材料可能包括氧化矽、氧化鈦、氧化鉿、氧化鋁、氮化矽、或氮化鈦,僅舉幾個例子。在一些情況下,可能基於所使用的基板200材料來選擇硬遮罩材料210。
在第2A'圖所示的示範實施例中,基板是多層基板,包括基板200(其可能是如前所述的塊基板或XOI結構或多層結構)、阻擋層210、和頂部外延層220。可能藉由在基板200上沉積阻擋層210並在阻擋層210上沉積外延層220來形成多層基板。這種沉積可能使用例如化學氣相沉積(CVD)、原子層沉積(ALD)、分子束外延(MBE)、及/或任何其它適當的程序來進行,這取決於最終用途或目標應用。頂部外延層220可能是任何適當的半導體材料(例如,Si、SiGe、Ge、III-V)或複數個多層
材料(例如,用於奈米線應用),並包括任何期望的摻雜,因為將使用層220用於電晶體的主動通道,如下面將更詳細地描述。在一些實施例中,頂部外延層220可能與基板材料200相同或不同。例如,基板200可能是塊Si晶圓,且層220可能是Si外延層。阻擋層210可能包括有助於維持外延層220所需之高品質單晶結構的任何適當材料,且還對主動通道提供一些阻擋免於下面更詳細描述的轉換112進行的摻雜或氧化。例如,在轉換112包括摻雜鰭片之一部分的情況下,阻擋層210可能限制或防止摻雜部分中的摻雜劑擴散到主動通道中。在另一實例中,在轉換112包括氧化鰭片之一部分的情況下,阻擋層可能限制或防止鰭片的主動通道部分被氧化。在包括Si、Ge、或SiGe主動通道(例如,其中外延層220包括Si、Ge、或SiGe)的實施例中,阻擋層可能包括碳(C)摻雜,諸如Si:C,C合金含量為1至30%。根據本揭露,層200、210、和220的許多材料變化將是顯而易見的。
根據一些實施例,第1圖的方法100繼續從第2A和2A'圖中所示的基板形成104個鰭片,以分別形成第2B和2B圖'所示的所得示範結構。鰭片形成104可能包括硬遮罩230處理(例如,如上所述),隨後是蝕刻程序以從基板移除材料並形成第2B圖所示的鰭片220和第2B'圖所示的鰭片220/210/202。這種程序也稱為淺溝槽凹陷。在一些實施例中,鰭片可能形成為具有變化的寬度和高度。例如,在高寬比捕獲(ART)積體架構中,鰭片
可能形成為具有特定的高寬比,使得當它們隨後被移除或凹陷時,所形成的所得溝槽允許當材料垂直生長時沉積之替代材料中的缺陷終止於側表面上,例如非晶/介電質側壁,其中側壁相對於生長區的尺寸足夠高,以便捕獲大部分(若不是全部)缺陷。在這種示範情況下,鰭片的高寬比(h/w)可能大於1,例如大於1.5、2、或3、或任何其它適當的最小比率。注意,儘管為了說明的目的,在第2B和2B'圖的示範結構中僅顯示三個鰭片,但是可能形成任何數量的鰭片,例如一個、五個、十個、幾百個、幾千個、幾百萬個、等等,取決於最終用途或目標應用。除了純Si之外的材料的鰭片可同樣地藉由毯式沉積和將覆蓋層或多層圖案化成鰭片來製造。存在許多用以製造用於奈米線製造的替代鰭片和多層鰭片的路線和方法,如本領域技術人員已知的。
根據一些實施例,第1圖的方法100繼續進行106淺溝槽隔離(STI)處理以形成第2C-D和2C'-D'圖的示範所得結構。如在第2C和2C'圖可看出,沉積STI材料240,並將結構平面化到硬遮罩230的層級。任何適當的沉積程序可能用於STI 240沉積,且STI材料可能基於基板200的材料來選擇(例如,以提供適當的隔離及/或鈍化)。例如,在Si基板200的情況下,STI材料240可能選擇為二氧化矽或氮化矽。如在第2D和2D'圖中可看到的,STI材料240被凹陷(例如,使用氧化物蝕刻)以允許鰭片的一部分從STI平面滲出。在包括阻擋層210
的實施例中,可能進行用於STI凹陷的氧化物蝕刻,以嘗試和對準STI材料層240的頂部與阻擋層210的底部,如第2D'圖所示。注意,在第2D'圖中,為了便於說明,STI材料層240的頂部與阻擋層210的底部精確對準;然而,這種完美的對準在實作中可能難以實現。因此,在一些情況下,可能期望在阻擋層210下方的凹陷側上錯位,以有助於確保下文更詳細描述之程序108中沉積的包覆覆蓋鰭片220的整個主動通道區220。
根據一些實施例,第1圖的方法100繼續在第2D和2D'圖之結構的滲出鰭片部分上沉積108包覆以形成分別顯示於第2E和2E'圖中的所得示範結構。可能使用任何適當的技術(例如,CVD、ALD等)沉積包覆250,且在一些情況下,包覆材料250的沉積108可能是選擇性沉積,使得包覆材料250僅粘附/生長/形成在鰭片部分220的材料上或主要在鰭片部分220的材料上粘附/生長/形成(例如,其中包覆材料250的原子在別處(例如在STI區240中)粘附/生長/形成)。包覆250可能包括在下面更詳細描述的轉換程序112期間(例如,在摻雜或氧化程序期間)保護鰭片的主動通道區220之任何適當的材料。例如,包覆250可能由可用於硬遮罩230之相同類型的材料形成,諸如各種氧化物或氮化物材料。具體的氧化物和氮化物材料可能包括氧化矽、氧化鈦、氧化鉿、氧化鋁、氮化矽、或氮化鈦,僅舉幾個例子。在一些情況下,可能基於主動通道區220的材料來選擇包覆材料
250。注意,在程序流程中較早地移除硬遮罩230(例如,在STI 240沉積之後進行的平坦化程序期間)的情況下,第2E和2E'圖中所示的硬遮罩230可能替代為包覆材料。
根據一些實施例,第1圖的方法100繼續凹陷110第2E和2E'圖之示範結構中的STI材料240以暴露結構中的每個包覆鰭片的一部分子鰭區,從而產生分別顯示在第2F和2F'圖中的示範結構。如可理解,凹陷110可能被認為是STI材料240的第二凹陷(例如,其中對於第2C和2C'圖的結構進行STI材料240的第一凹陷,分別產生第2D和2D'圖的結構)。可能使用任何適當的程序,例如適當的蝕刻程序(例如,氧化物蝕刻)來進行凹陷110。如可在第2F和2F'圖中看到,凹陷110暴露子鰭區202的部分204,其是將被摻雜或氧化以將每個鰭片的主動通道區220與子鰭區202電性隔離的部分204,如下文將更詳細地描述。
根據一些實施例,第1圖的方法100繼續經由摻雜或氧化將暴露的子鰭部分204轉換112為隔離材料,從而形成第2I和2I'圖所示的所得示範結構。在一些實施例中,轉換程序112的結果是鰭片的主動通道區220變得與子鰭區202(和基板200)電隔離,其中這種電隔離包括最小電流(例如,在截止狀態下比電晶體本身的洩漏低一個數量級)從主動通道區220通過鰭片206的轉換部分洩漏到子鰭區202。如將理解的,轉換程序112可能
不完全地或完美地將主動通道區220與子鰭區202電性隔離,但是其將顯著減少可在區域之間流動的電流,從而有助於至少減少在此介面處的寄生洩漏(例如,與不包括這種隔離的鰭片相比)。如根據本揭露將是顯而易見的,在轉換程序112上有許多變化。可用於轉換程序112的摻雜和氧化程序將在下面更詳細地描述。
如前所述,在一些實施例中,可能經由單層摻雜(MLD)程序將暴露的子鰭部分204轉換112為電性隔離材料。用於轉換112的MLD程序可能是有益的,因為其是非常受控的摻雜程序,其以能夠精確地摻雜暴露的子鰭部分204的自飽和單層架構遞送摻雜劑。此外,在暴露的子鰭部分204可能難以接近下,單一單層沉積將具有較高機會接近此部分(例如,與其它沉積技術相比),因為其是保形沉積程序。在使用MLD程序的實施例中,在藉由凹陷110暴露子鰭部分204之後,根據一些實施例,方法100可藉由在第2F和2F'圖的結構上沉積封頂層260來繼續,以形成在第2G和2G'圖中所示的所得示範結構。根據一些實施例,經由摻雜之轉換112繼續退火第2G和2G'圖的結構以將來自封頂層260的摻雜劑擴散到子鰭部分204中,以形成在第2H和2H'圖中之所得示範結構中所示的摻雜子鰭部分206。如可理解的,封頂層260可能包括允許摻雜劑擴散到子鰭部分204中的任何適當材料。在一些情況下,可能基於電晶體的最終用途或目標應用來選擇封頂層材料260。例如,若電晶體的主動通道區
220旨在是n型摻雜通道(例如,用於p-MOS應用),則MLD程序可能用以增強子鰭部分204 n型摻雜206。此外,若電晶體的主動通道區220旨在是p型摻雜通道(例如,用於n-MOS應用),則MLD程序可能用以增強子鰭部分204以增加p型摻雜206。例如,在為用於n-MOS應用之p型摻雜(例如,硼摻雜)的Si主動通道區之情況下,MLD程序可能引起額外的p型摻雜劑(例如,附加的硼摻雜)以擴散到Si子鰭部分204中以產生p型摻雜子鰭部分206。此外,在為用於p-MOS應用之n型摻雜(例如,用磷或砷摻雜)的Si主動通道區之情況下,MLD程序可能引起額外的n型摻雜劑(例如,附加的磷/砷摻雜)以擴散到Si子鰭部分204中以產生n型摻雜子鰭部分206。這種在通道下(在子鰭中)的增強摻雜增加源極/汲極區與通道之間之電載流的能量能障以阻止電流流動。若整個通道已經以此較高級摻雜,則電載流遷移率將受到影響,因此在給定源極到汲極電流值的電流將會更低。以此方式,可增強p-n或n-p接面以在電晶體導通狀態期間產生有效的電性隔離邊界(例如,二極體能障)。如還可理解,源極(和汲極)區和子鰭部分206也將是p-n或n-p接面(例如,二極體能障)以產生電性隔離邊界。在一些實施例中,可能使用其他摻雜程序以將暴露的子鰭部分204轉換112為電性隔離材料,例如擴散玻璃摻雜程序。根據本揭露,使用摻雜程序以將暴露的子鰭部分204轉換112為隔離材料的許多變化將是顯而易見的。
如前所述,在一些實施例中,暴露的子鰭部分204可經由氧化程序被轉換112為電性隔離材料。在一些這樣的實施例中,氧化程序可能類似於上述的MLD程序,其中封頂層260沉積在第2F和2F'圖的結構上,以形成第2G和2G'圖所示的所得示範結構。然而,因為在這樣的實施例中經由氧化程序進行轉換112,所以封頂層260可替代地使用催化材料,例如氧化鋁。氧化程序將繼續熱處理以氧化鰭片部分204,導致第2H和2H'圖的示範結構,其中鰭片部分206被氧化以將主動通道區220與子鰭區202電性隔離。如還可理解,源極區將藉由子鰭部分206與子通道區中的汲極區電性隔離。在一些實施例中,附加層可能沉積在第2F圖和圖2F'的結構上,用於鈍化或提高介面品質的目的。例如,在待轉換的Si鰭片部分204的情況下,氧化的Si將具有低的介面陷阱密度,因此可能不需要額外的處理來防止在氧化物/半導體介面處的電流洩漏。然而,對於其它情況,例如其中鰭片部分204包括Ge和III-V材料,例如,可能使用附加的鈍化退火或介面層來鈍化懸掛鍵及/或處理介面陷阱。更具體地,例如,在沉積氧化鋁封頂層之前,可能沉積氧化鋁層以改善介面品質(就介面陷阱密度而言)。在一些實施例中,在氧化程序期間可能不使用封頂層260,並可能僅僅對第2F和2F'圖中所示之暴露鰭片部分204進行熱處理以氧化這些部分。這樣的實施例中的所得示範結構將跳過第2G-H和2G'-H'圖中所示的結構,並且例如結束於第2I和2I'圖
中所示的結構。注意,在一些這樣的實施例中,在不使用催化封頂層260的情況下,根據最終用途或目標應用,可能需要更高的溫度、更高的壓力、及/或更長的時間用於熱處理以充分氧化子鰭部分204。
在存在阻擋層210的實施例中,例如第2F'-H'圖中所示,阻擋層210可幫助在轉換程序112期間保護主動通道區220。例如,在轉換程序112是摻雜程序(例如,如本文所述的MLD程序)中,阻擋層210可有助於在退火程序期間限制摻雜劑擴散到主動通道區220中。此外,在轉換程序112是氧化程序的實施例中,阻擋層210可保護主動通道區220的底部不被氧化。在一些實施例中,阻擋層210的至少一部分可能是主動通道區的一部分,其中電荷載流(例如,電子或電洞)可流過主動通道220和阻擋層210,從源極到汲極。在一些實施例中,阻擋層210可能提供與子鰭區202的隔離。如可理解,儘管第2H圖中之鰭片的所得摻雜/氧化部分206的頂部被顯示與包覆250的底部完全一致,這表明沒有摻雜劑擴散高於此點並進入主動通道區220,或氧化程序僅氧化特定部分206,這在實踐中可能不是這樣。因此,無意地擴散到鰭片之通道區220中的任何摻雜劑或在鰭片之通道區220中發生的氧化將由於通道中的降低電載流遷移率而消耗有效的主動鰭片高度,其中高摻雜程度存在,這可能是不期望的。雖然可能藉由在替代閘極程序期間移除和替代主動通道材料來解決這些問題(例如,當在移除偽閘極之後暴露
主動通道區),但是這樣的問題也可藉由包括阻擋層210來解決。無論如何,在使用封頂層260的實施例中,根據一些實施例,方法100可能包括在進行轉換112之後移除封頂層260,得到第2I和圖2I'圖的示範結構。回想在經由沒有催化封頂層260的氧化程序進行轉換112的實施例中,所得到的結構將已經是第2I和2I'圖的示範結構。
根據一些實施例,第1圖的方法100繼續從第2I和2I'圖之結構中的鰭片移除保護包覆250和硬遮罩230,形成第2J和圖2J'圖所示的所得示範結構。移除114可能使用任何適當的程序來進行,例如選擇性地蝕刻保護包覆250和硬遮罩230材料的蝕刻程序。因此,在一些這樣的情況下,選擇由相同的材料形成之包覆250和硬遮罩230可能是有益的,使得可能僅需要一個蝕刻程序來移除它們。
根據本揭露的一些實施例,第1圖的方法100繼續完成116電晶體形成。第2K和2K'圖繪示根據一些實施例之在閘極270處理之後之第2J和2J'圖的積體電路結構。例如,在一些實施例中,閘極270的形成可能包括閘極第一流(也稱為前向高k閘極)。此外,在其他實施例中,閘極270可能形成在閘極最後流(也稱為替代金屬閘極(RMG))中。在這種閘極最後處理中,程序包括偽閘氧化物沉積、偽閘極電極(例如,多晶矽)沉積、和圖案化硬遮罩沉積。附加處理可能包括圖案化偽閘極和沈積/蝕刻間隔物282材料。在這些程序之後,方法可能繼續
絕緣體沉積、平坦化、然後偽閘極電極和閘極氧化物移除以暴露電晶體的通道區。在打開通道區之後,偽閘極氧化物和電極可能分別用例如高k介電質和替代金屬閘極替代。
在此示範實施例中,閘極包括閘極電極270和直接形成在閘極電極270下方的閘極介電質(為了便於說明而未示出)。閘極介電質可能是例如任何適當的氧化物,例如二氧化矽或高k閘極介電質材料。高k閘極介電質材料的實例包括例如氧化鉿、氧化鉿矽、氧化鑭、氧化鑭鋁、氧化鋯、氧化鋯矽、氧化鉭、氧化鈦、鋇鍶鈦氧化物、鋇鈦氧化物、鍶鈦氧化物、氧化釔、氧化鋁、鉛鈧鉭氧化物、和鉛鋅鈮酸鹽。在一些實施例中,可能在閘極介電層上執行退火程序以當使用高k材料時改善其品質。閘極電極270可能包含寬範圍的材料,例如多晶矽、氮化矽、碳化矽、或各種適當的金屬或金屬合金,例如鋁(A1)、鎢(W)、鈦(Ti)、鉭(Ta)、銅(Cu)、氮化鈦(TiN)、或氮化鉭(TaN)。間隔物282可能形成為與閘極相鄰,及/或硬遮罩284可能形成在閘極上,以例如在後續處理期間輔助替代閘極處理及/或保護閘極。如前所述,在通道區的橫截面處(例如,沿著閘極平面截取的橫截面)顯示第2A-J和2A'-J'圖中的結構。因此,主動通道220由閘極270定義,且源極/汲極(S/D)區222/224與通道220相鄰。注意,222和224中的任一個可能例如是電晶體源極,另一個是汲極,取決於末端配置。根
據本揭露,閘極形成的許多變化將是顯而易見的。
提供第3和3'圖以繪示根據一些實施例之可對第2K和2K'圖之積體電路結構進行的多種變化。例如,在一些實施例中,完成電晶體的形成116可能包括各種附加處理。這樣的附加處理可能包括例如尖端處理、源極/汲極處理、隔離氧化物處理、接觸處理、各種其它前端處理、及/或各種其他後端處理。為了便於說明,第3和3'圖中之三個鰭片之各者用以繪示不同的變化。在一些實施例中,第3和3'圖中的示範結構的最右邊鰭片繪示本文中各種描述的隔離技術可能僅在通道區中執行(例如,在替代閘極程序期間,其中通道區在偽閘極被移除之後被暴露)。在這樣的變化中,鰭片的S/D區322/324將不包括隔離區206(或存在的阻擋區210),且它們可能保持源於基板(例如,如第3和3'圖所示)。如可理解,結構中的鰭狀通道區220仍然存在,其可用以形成鰭狀電晶體(例如,finFET或三閘極電晶體)。
第3和3'圖中之示範結構的中間鰭片繪示在一些實施例中,隔離技術可與任何適當的電晶體配置一起使用,例如所示的奈米線電晶體配置。與基於鰭片的電晶體類似地配置奈米線電晶體(有時稱為環繞式或奈米帶電晶體),而不是閘極在三個側面上的鰭狀通道區(因此,存在三個有效閘極),使用一或多個奈米線,且閘極材料通常在所有側上圍繞每個奈米線。根據具體設計,一些奈米線電晶體具有例如四個有效閘極。從第3和3'圖的示範
結構中可看出,通道區各具有兩個奈米線320,但是其他實施例可具有任何數量的奈米線。例如,在移除偽閘極之後,在替代閘極程序(例如,RMG程序)期間,暴露通道區的同時,可能形成奈米線320。注意,在奈米線320下面(因為它們被顯示存在於S/D區222/224下面)也將存在下面的隔離區206(在第3'圖的情況下,和阻擋區210);然而,為了便於說明,它們未顯示在通道區中。因此,甚至這樣的奈米線結構可受益於本文中各種描述的隔離技術。注意,電晶體配置的任何組合可能用於單一積體電路,包括平面、雙閘極、鰭狀(或三閘極或FinFET)、奈米線(或奈米帶或環繞式)、及/或任何其它適當的電晶體配置,這取決於最終用途或目標應用,並且所有這樣的配置可受益於本文中各種描述的隔離技術。
在一些實施例中,第3和3'圖中之示範結構的左鰭片繪示S/D區222/224可能被移除並被外延S/D材料326/328替代。如可看出,例如,使用任何適當的程序(如蝕刻程序),在S/D處理期間移除了S/D 222/224的上方部分和隔離區206(以及第3'圖的示範實施例中的阻擋層210)(例如,在沉積偽閘極以建立通道和S/D區)。在移除之後,用外延材料326/328替代鰭片,而通道可能保持相同(並且看起來類似於第3和3'圖中之右鰭片的通道區)。上述用外延材料移除和替代S/D區域可能由於各種原因來進行,諸如實現期望的電晶體配置(例如,p-MOS或n-MOS),或者幫助降低在變化位置(例如,在
金屬接觸介面處)的電阻。另一個替代實施例由具有或不具有碳之摻雜外延材料的掩埋層組成,與碳層共摻雜或由在一側或兩側之碳層接合。這可能涉及p型區的遮罩和生長,隨後是重新遮罩和n型區的生長。它還可涉及單一摻雜物質並在不希望的情況下驅除摻雜劑。這種摻雜劑損耗方法可能以下列方式進行:例如,在需要摻雜劑的位置,用包層絕緣體層和區密封,其中在形成氣體或氫退火期間,不期望摻雜劑的區域將保持暴露。這種替代實施例對於例如在升高的溫度下具有高蒸氣壓的n型摻雜劑可能特別有效。
第2A-K、2A'-K'、和3-3'圖中所示的積體電路結構被提供作為實例,並且不旨在限制本揭露。注意,根據最終用途或目標應用,在本文中各種描述之結構中所示的每個單獨鰭片可能用於單獨的電晶體裝置或與一或多個其它鰭片組合使用以形成電晶體裝置。例如,鰭片的一部分可能在方法100中的任何適當點被遮罩,使得轉換112僅在非遮罩的鰭片上進行,隨後遮罩經轉換的鰭片並對剩餘的鰭片進行轉換112。在這種示範情況下,可對不同的鰭片進行不同的轉換程序,這可能允許用於p-MOS的鰭片以一種摻雜架構隔離,並且允許用於n-MOS的鰭片以另一種摻雜架構隔離。遮罩/轉換可根據需要重複多次,以實現本文所述之在隔離區206中具有不同材料的鰭片。還應注意,電晶體通道材料的摻雜當被進行時可能發生在電晶體形成程序的任何適當階段。還應注意,本文中
各種描述的隔離技術可能與變化大小的裝置一起使用,例如微米範圍內的電晶體裝置或奈米範圍內的電晶體裝置(例如,在22、14、10、7、或5nm程序節點形成的電晶體)。根據預設的揭露,許多變化和配置將是顯而易見的。
第4圖繪示根據示範實施例之以使用本文所揭露之技術形成的積體電路結構或裝置實作的計算系統1000。如可看出,計算系統1000容納主機板1002。主機板1002可能包括一些元件,包括但不限於處理器1004和至少一個通訊晶片1006,其每個可以實體地和電性地耦接至主機板1002,或以其他方式整合在其中。如將理解,主機板1002可能是例如任何印刷電路板,無論是主板、安裝在主板上的子板、還是系統1000的唯一板等等。
依據其應用,計算系統1000可能包括可能或可能不是實體且電性耦接至主機板1002的一或多個其他元件。這些其他元件包括,但不限於揮發性記憶體(例如,DRAM)、非揮發性記憶體(例如,ROM)、圖形處理器、數位信號處理器、密碼處理器、晶片組、天線、顯示器、觸控螢幕顯示器、觸控螢幕控制器、電池、音頻編解碼器、視頻編解碼器、功率放大器、全球定位系統(GPS)裝置、羅盤、加速計、陀螺儀、揚聲器、照相機、及大容
量儲存裝置(如硬碟機、光碟(CD)、數位化多功能光碟(DVD)、等等)。包括在計算系統1000中的任何元件可能包括根據示範實施例使用所揭露之技術形成的一或多個積體電路結構或裝置。在一些實施例中,可將多個功能整合到一或多個晶片中(例如,注意通訊晶片1006可以是處理器1004的一部分或者整合到處理器1004中)。
通訊晶片1006啟動無線通訊來傳輸資料至計算系統1000且從計算系統1000傳輸資料。「無線」之詞及其衍生詞可能用以說明可能藉由使用透過非固態媒體之調變的電磁輻射來傳遞資料之電路、裝置、系統、方法、技術、通訊通道、等等。詞並不意味著相關裝置不包含任何線路,雖然在一些實施例中它們可能並非如此。通訊晶片1006可能實作一些無線標準或協定,包括但不限於WiFi(IEEE 802.11家族)、WiMAX(IEEE 802.16家族)、IEEE 802.20、長期演進(LTE)、Ev-DO、HSPA+、HSDPA+、HSUPA+、EDGE、GSM、GPRS、CDMA、TDMA、DECT、藍芽、其衍生物之任一者、以及指定為3G、4G、5G及以上的任何其他無線協定。計算系統1000可能包括複數個通訊晶片1006。例如,第一通訊晶片1006可能專用於如WiFi和藍芽之較短範圍的無線通訊,且第二通訊晶片1006可能專用於如GPS、EDGE、GPRS、CDMA、WiMAX、LTE、Ev-DO及其他之較長範圍的無線通訊。
計算系統1000的處理器1004包括封裝在處
理器1004內的積體電路晶粒。在一些實施例中,處理器的積體電路晶粒包括使用如本文中各種描述之使用所揭露之技術形成的一或多個積體電路結構或裝置來實現的板載電路。「處理器」之詞可能指任何裝置或部分之處理例如來自暫存器及/或記憶體的電子資料以將此電子資料轉換成可能儲存在暫存器及/或記憶體中之其他電子資料的裝置。
通訊晶片1006也可能包括封裝在通訊晶片1006內的積體電路晶粒。依照一些這樣的示範實施例,通訊晶片的積體電路晶粒包括使用如本文中各種描述的所揭露之技術形成的一或多個積體電路結構或裝置。如根據本揭露將理解的,注意多標準無線能力可能直接整合到處理器1004中(例如,其中任何晶片1006的功能被整合到處理器1004中,而不是具有單獨的通訊晶片)。還要注意,處理器1004可能是具有這種無線能力的晶片組。簡而言之,可使用任何數量的處理器1004及/或通訊晶片1006。同樣,任何一個晶片或晶片組可具有整合在其中的多個功能。
在各種實施例中,計算裝置1000可能是膝上型電腦、小筆電、筆記型電腦、智慧型手機、平板電腦、個人數位助理(PDA)、纖薄型行動PC、行動電話、桌上型電腦、伺服器、印表機、掃描機、監視器、機上盒、娛樂控制單元、數位相機、可攜式音樂播放器、數位攝影機、或處理資料或採用如本文中各種所述之使用所揭露之技術
形成的一或多個積體電路結構或裝置的任何其他電子裝置。
進一步示範實施例
以下實施例涉及進一步實施例,從其中將看出許多排列和配置。
實例1係一種電晶體,包括:基板,具有從其延伸的鰭片,其中鰭片包括通道和在通道下方的子鰭區;閘極,位於鰭片上並鄰近通道;及源極和汲極區,鄰近通道;其中子鰭區的至少一部分係摻雜與通道相同類型和絕緣體材料之其一者。如基於本揭露可理解的,在一些情況下,子鰭區(例如,摻雜或氧化)的部分將源極區與子鰭區中的汲極區電性隔離。基於本揭露還可理解,在一些情況下,在電晶體導通狀態期間,子鰭區的部分將通道與子鰭區電性隔離。
實例2包括實例1的主題,其中子鰭區的部分在源極和汲極區下方延伸。
實例3包括實例1-2之任一者的主題,其中子鰭區的部分以比通道更高的濃度被摻雜。
實例4包括實例1-3之任一者的主題,其中通道材料係源於基板。
實例5包括實例1-4之任一者的主題,其中通道基於被摻雜的子鰭區的部分而在電晶體導通狀態期間與子鰭區電性隔離。
實例6包括實例1-5之任一者的主題,其中在電晶體導通狀態期間,p-n和n-p接面之其一者係位於通道和子鰭區的介面。
實例7包括實例1-4之任一者的主題,其中通道基於包括氧化的子鰭區的部分而在電晶體導通狀態期間與子鰭區電性隔離。
實例8包括實例1-7之任一者的主題,其中碳摻雜層係位於通道和子鰭區的部分之間。
實例9包括實例1-8之任一者的主題,其中通道包括矽、鍺、矽鍺、和III-V材料之至少一者。
實例10包括實例1-9之任一者的主題,其中通道具有鰭狀配置。
實例11包括實例1-10之任一者的主題,其中通道具有包括至少一奈米線的奈米線配置。
實例12包括實例1-11之任一者的主題,其中電晶體係p型和n型電晶體之其一者。
實例13係一種包括實例1-12之任一者之主題的互補金屬氧化物半導體(CMOS)裝置。
實例14係一種包括實例1-13之任一者之主題的計算系統。
實例15係一種積體電路,包括:基板;鰭片,在基板上或源於基板之至少一者,鰭片包括下方區和上方區,鰭片更包括在下方區和上方區之間的隔離區;及電晶體,包括:通道,在鰭片之上方區之至少一部分中;
及源極和汲極區,鄰近通道;其中隔離區電性隔離源極和汲極區。
實例16包括實例15的主題,其中隔離區在源極和汲極區下方延伸,且其中隔離區係在源極和汲極區與基板之間。
實例17包括實例15-16之任一者的主題,其中至少鰭片之下方區係源於基板。
實例18包括實例15-17之任一者的主題,其中鰭片之上方區係源於基板。
實例19包括實例15-18之任一者的主題,其中隔離區以與鰭片之上方區相同的類型且比鰭片之上方區更高的濃度被摻雜。
實例20包括實例15-19之任一者的主題,其中在電晶體導通狀態期間,隔離區和鰭片之上方區係p-n和n-p接面之其一者。
實例21包括實例15-20之任一者的主題,其中隔離區包括氧化。
實例22包括實例15-21之任一者的主題,其中碳摻雜層係位於鰭片之上方區與隔離區之間。
實例23包括實例15-22之任一者的主題,其中鰭片之上方區包括矽、鍺、矽鍺、和III-V材料之至少一者。
實例24包括實例15-23之任一者的主題,其中電晶體通道具有鰭狀配置。
實例25包括實例15-24之任一者的主題,其中電晶體通道具有包括至少一奈米線的奈米線配置。
實例26包括實例15-25之任一者的主題,其中電晶體係p型和n型電晶體之其一者。
實例27係一種包括實例15-26之任一者之主題的互補金屬氧化物半導體(CMOS)裝置。
實例28係一種包括實例15-27之任一者之主題的計算系統。
實例29係一種形成電晶體的方法,方法包括:提供基板;從基板形成鰭片;沉積淺溝槽隔離(STI)材料;凹陷STI材料以允許鰭片之上方區從STI材料的頂部滲出,其中鰭片之下方區係在STI材料的頂部下方;在鰭片的上方區上沉積包覆材料;凹陷STI材料以暴露鰭片的下方區之一部分;及經由摻雜和氧化程序之其一者將鰭片的下方區之暴露部分轉成隔離材料,其中隔離材料電性隔離鰭片的上方區與鰭片的下方區。
實例30包括實例29的主題,其中鰭片的下方區之暴露部分經由單層摻雜程序被轉成隔離材料。
實例31包括實例29的主題,其中鰭片的下方區之暴露部分經由擴散玻璃摻雜程序被轉成隔離材料。
實例32包括實例29-31之任一者的主題,其中鰭片的下方區之暴露部分以與鰭片之上方區相同的類型且比鰭片之上方區更高的濃度被摻雜。
實例33包括實例29的主題,其中鰭片的下
方區之暴露部分經由氧化程序被轉成隔離材料。
實例34包括實例33的主題,其中氧化程序包括在鰭片的下方區之暴露部分上沉積催化材料。
實例35包括實例29-34之任一者的主題,其中基板係多層基板,包括夾在底部層與頂部層之間的阻擋層。
實例36包括實例35的主題,其中阻擋層包括碳摻雜材料。
實例37包括實例35-36之任一者的主題,其中鰭片的下方區之暴露部分在阻擋層下方。
實例38包括實例29-37之任一者的主題,其中鰭片包括矽、鍺、矽鍺、和III-V材料之至少一者。
實例39包括實例29-38之任一者的主題,其中電晶體係p型和n型電晶體之其一者。
實例40包括實例29-39之任一者的主題,其中電晶體幾何形狀包括場效電晶體(FET)、金屬氧化物半導體FET(MOSFET)、穿隧FET(TFET)、鰭狀配置、finFET配置、三閘極配置、奈米線配置、奈米帶配置、及環繞式配置之至少一者。
已經出於說明和描述的目的呈現了示範實施例的上述描述。這並不旨在窮盡或將本揭露限制為所揭露的精確形式。根據本揭露,許多修改和變化是可能的。意圖是本揭露的範圍不受此詳細說明限制,而是由所附的申請專利範圍限制。主張本申請優先權之未來提交的申請可
能以不同的方式主張所揭露的主題,並且通常可能包括如本文中各種揭露或以其他方式示範之一或多個限制的任何集合。
100‧‧‧方法
Claims (18)
- 一種包括至少一電晶體的積體電路,該積體電路包含:基板;在該基板上方延伸的鰭片,該鰭片包括上方部分、中間部分和下方部分,該上方部分和該下方部分包括源於該基板的半導體材料,並且該中間部分是(1)該半導體材料的氧化物或(2)雜質摻雜劑濃度高於該上方部分的任何雜質摻雜劑濃度的該半導體材料;至少在該上方部分的頂部和側面的閘極結構,該閘極結構包括閘極和閘極介電質,該閘極介電質在該上方部分和該閘極之間;源極區和汲極區,該鰭片的該上方部分在該源極區和該汲極區之間;和分別在該基板上並且在橫向上鄰近該鰭片的該下方部分的相應側的第一絕緣體結構和第二絕緣體結構,該第一絕緣體結構和該第二絕緣體結構包括絕緣體材料,該絕緣體材料與該下方部分的該半導體材料接觸。
- 如申請專利範圍第1項所述之積體電路,其中該半導體材料包括鍺。
- 如申請專利範圍第1項所述之積體電路,其中該半導體材料包括III-V半導體材料。
- 如申請專利範圍第1項所述之積體電路,其中該上方部分包括無雜質摻雜劑或最小雜質摻雜劑。
- 如申請專利範圍第1項所述之積體電路,其中該鰭片的該中間部分和該下方部分除了位於該閘極結構下方之外,還位於該源極區和該汲極區下方。
- 如申請專利範圍第1項所述之積體電路,其中該中間部分的至少一部分在該閘極結構的若干部分之間。
- 如申請專利範圍第1項所述之積體電路,其中該鰭片更包括在該上方部分和該中間部分之間的層,該層包括半導體材料和碳。
- 一種包含如申請專利範圍第1項所述之積體電路的互補金屬氧化物半導體(CMOS)電路。
- 一種包含如申請專利範圍第1項所述之積體電路的計算系統。
- 一種包括至少一電晶體的積體電路,該積體電路包含:從基板延伸的鰭片,該鰭片包括下方區和上方區,該鰭片更包括在該下方區和該上方區之間的隔離區,其中該下方區和該上方區包括半導體材料,並且其中該隔離區包括該半導體材料的氧化物;在該鰭片的該上方區和該隔離區之間的層,該層包括碳;至少在該鰭片的該上方區上方的閘極結構,該閘極結構包括閘極和閘極介電質,該閘極介電質在該鰭片的該上方區與該閘極之間;和源極區和汲極區,該鰭片的該上方區在該源極區和該 汲極區之間,其中該源極區和該汲極區包括半導體材料。
- 如申請專利範圍第10項所述之積體電路,其中該隔離區在該源極區和該汲極區下方延伸,使得該隔離區在該源極區和該鰭片的該下方區之間,並且該隔離區也在該汲極區和該鰭片的該下方區之間。
- 如申請專利範圍第11項所述之積體電路,其中該隔離區在該源極區和該汲極區下方延伸,從而該隔離區位於該層和該鰭片的該下方區之間。
- 如申請專利範圍第10項所述之積體電路,其中該下方區、該上方區和該隔離區中的每一者包括矽、鍺、矽和鍺兩者或III-V族半導體材料。
- 一種包括至少一電晶體的積體電路,該積體電路包含:從基板延伸的鰭片,該鰭片包括下方部分和上方部分,包括碳的第一部分在該下方部分和該上方部分之間,第二部分在該下方部分和該第一部分之間,該第二部分包括氧;至少在該鰭片的該上方部分上方的閘極結構,該閘極結構包括閘極和閘極介電質,該閘極介電質在該鰭片的該上方部分與該閘極之間;和第一區和第二區,該鰭片的該上方部分在該第一區和該第二區之間,其中該第一區和該第二區包括半導體材料。
- 如申請專利範圍第14項所述之積體電路,其中該 第二部分包括氧化物材料。
- 如申請專利範圍第15項所述之積體電路,其中該鰭片的該上方部分或該下方部分包括半導體材料,且該第二部分包括該鰭片的該上方部分或該下方部分的該半導體材料的氧化物。
- 如申請專利範圍第14項所述之積體電路,其中該第一部分和該第二部分中的每一者在該第一區和該第二區下方延伸,使得該第一部分和該第二部分中的每一者在該第一區和該下方部分之間,並且該第一部分和該第二部分中的每一者是也在該第二區和該下方部分之間。
- 如申請專利範圍第14項所述之積體電路,其中該第一區和該第二區的該半導體材料包括第一半導體元件,並且該下方部分、該上方部分、該第一部分和該第二部分中的每一者包括與該第一半導體元件不同的第二半導體元件
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TWI830060B (zh) | 2024-01-21 |
TW202201562A (zh) | 2022-01-01 |
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