TWI723447B - Inspection method, inspection system and non-temporary computer-readable recording medium - Google Patents
Inspection method, inspection system and non-temporary computer-readable recording medium Download PDFInfo
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
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- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
- H05K13/0815—Controlling of component placement on the substrate during or after manufacturing
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Abstract
本發明提供一種能夠針對每個零件來管理檢查項目及/或檢查基準的質量,藉此能夠針對每個零件而使基板檢查等中的檢查項目或檢查基準最佳化的技術。一種檢查方法,其藉由檢查程式來進行搭載有零件的物品的檢查,包括:設定步驟(S101),針對每個零件來設定檢查中的包含零件的檢查項目及/或檢查基準的檢查資訊;以及判定步驟(S106),藉由檢查程式來判定物品的品質,且檢查資訊進而包含作為該檢查資訊的可靠性的指標的檢查品質水準資訊,於設定步驟中,基於針對零件的每個產品編號而設置且每當檢查資訊變更時便加以更新的產品編號資料群,來設定檢查資訊,於判定步驟中,基於參照產品編號資料群而獲得的檢查資訊,針對每個所述零件來判定品質。The present invention provides a technology capable of managing the quality of inspection items and/or inspection criteria for each part, thereby enabling optimization of the inspection items or inspection criteria in a board inspection or the like for each part. An inspection method, which uses an inspection program to inspect an article loaded with parts, including: a setting step (S101), setting inspection information including inspection items and/or inspection standards for each part in the inspection; And a determination step (S106), the quality of the article is determined by the inspection program, and the inspection information further includes inspection quality level information as an indicator of the reliability of the inspection information. In the setting step, based on each product number for the part The product number data group is set and updated whenever the inspection information is changed to set the inspection information. In the determination step, the quality is determined for each of the parts based on the inspection information obtained by referring to the product number data group.
Description
本發明屬於與搭載零件的物品的檢查相關的技術領域。The present invention belongs to the technical field related to the inspection of articles carrying parts.
作為檢查零件對基板的安裝狀態等的裝置,廣泛使用自動外觀檢查裝置。此種裝置中,藉由感測器而獲得安裝有零件的基板(亦包括焊接前的狀態者)的外觀資訊,並對各零件進行與此零件相應的項目的測量。而且,藉由將所得的結果與規定的檢查基準相對照,而進行良品・不良品的判別。As a device for inspecting the mounting state of components on the board, etc., automatic appearance inspection devices are widely used. In this device, the sensor obtains the appearance information of the substrate (including the state before welding) on which the part is mounted, and measures the corresponding item of each part. In addition, by comparing the obtained results with the prescribed inspection standards, a good product or a defective product can be judged.
此處,若所設定的檢查項目或檢查基準並不恰當,則會發生:將實際上為良品者判斷為不良品的「錯檢」、或將實際上為不良品者判斷為良品的「漏檢」。「錯檢」會導致檢查效率的惡化,「漏檢」會降低製造步驟的可靠性且使後續步驟的作業效率惡化。而且,任一者均成為使製造步驟的費用增加的原因,因而理想的是使「錯檢」及「漏檢」最小化。Here, if the set inspection items or inspection criteria are not appropriate, there will be a "error inspection" that judges those who are actually good products as defective products, or "missing inspections" that judges those who are actually defective products as good products. Check". "Mistaken inspection" will lead to deterioration of inspection efficiency, and "missing inspection" will reduce the reliability of manufacturing steps and deteriorate the work efficiency of subsequent steps. In addition, any one of them is a cause of an increase in the cost of the manufacturing step, and therefore, it is desirable to minimize "error detection" and "missing detection".
然而,若為了減少「漏檢」而使檢查基準變嚴格,則「錯檢」增加,若為了減少「錯檢」而放寬檢查基準,則「漏檢」增加,因此需要設定恰當的檢查項目及檢查基準。However, if the inspection criteria are made strict in order to reduce "missing inspections", the "error inspections" will increase. If the inspection standards are relaxed to reduce "false inspections", the "missing inspections" will increase. Therefore, it is necessary to set appropriate inspection items and Check benchmarks.
因此,於實施量產品的檢查之前,利用基板或零件的驗證圖像來進行檢查項目或檢查基準的調整,於完成該調整後將所述檢查項目或檢查基準應用於實際的生產線中。然而,先前是在對一個基板上所配置的全部零件產品編號進行檢查項目或檢查基準的調整後,以可在量產檢查中實施的方式擴展至量產程式中,因而,根據零件產品編號的不同,亦會存在品質不固定者,存在產生「錯檢」或「漏檢」的情況。Therefore, before the inspection of the mass product, the verification image of the substrate or the part is used to adjust the inspection items or inspection standards, and after the adjustment is completed, the inspection items or inspection standards are applied to the actual production line. However, in the past, after adjusting the inspection items or inspection standards for all the part product numbers arranged on a substrate, it was extended to the mass production program in a way that can be implemented in the mass production inspection. Different, there will also be people whose quality is not fixed, and there will be "false inspections" or "missing inspections".
此處,關於能夠識別各零件的資料的可靠性的技術,提出有以下技術:當製作電子零件裝配裝置的圖案程式中使用的電子零件的零件程式館(library)的資料時,根據製作狀態來進行可靠度的分級,將已分級的製作狀態附加至該資料中,藉此,於建立(setup)作業時等,於使用零件程式館的情況下,哪一電子零件為可靠者便一目了然(參照專利文獻1)。然而,所述現有技術並不能夠針對每個零件而使基板檢查等中的檢查項目或檢查基準最佳化。 [現有技術文獻] [專利文獻]Here, with regard to the technology that can identify the reliability of the data of each part, the following technology is proposed: When creating the data of the electronic part library (library) used in the pattern program of the electronic part assembling device, according to the production status Carry out reliability grading and attach the graded production status to the data, so that during setup operations, etc., in the case of using the parts library, it is clear at a glance which electronic parts are reliable (refer to Patent Document 1). However, the above-mentioned prior art cannot optimize inspection items or inspection criteria in substrate inspections and the like for each component. [Prior Art Literature] [Patent Literature]
[專利文獻1]日本專利特開2014-183216號公報(日本專利第6219579號公報) [專利文獻2]日本專利特開2008-45952號公報 [專利文獻3]日本專利特開2006-250610號公報 [專利文獻4]日本專利特開2001-24321號公報[Patent Document 1] Japanese Patent Laid-Open No. 2014-183216 (Japanese Patent No. 6219579) [Patent Document 2] Japanese Patent Laid-Open No. 2008-45952 [Patent Document 3] Japanese Patent Laid-Open No. 2006-250610 [Patent Document 4] Japanese Patent Laid-Open No. 2001-24321
[發明所欲解決之課題][The problem to be solved by the invention]
本發明是鑒於如上所述的實際情況而成者,其目的在於提供一種能夠針對每個零件來管理檢查項目及/或檢查基準的質量,藉此能夠針對每個零件而使基板檢查等中的檢查項目或檢查基準最佳化的技術。 [解決課題之手段]The present invention is made in view of the actual situation as described above, and its object is to provide a method that can manage the quality of inspection items and/or inspection criteria for each part, thereby enabling the inspection of substrates and the like for each part. Techniques for optimizing inspection items or inspection benchmarks. [Means to solve the problem]
為了達成所述目的,本發明採用以下構成。In order to achieve the above-mentioned object, the present invention adopts the following configuration.
本發明的檢查方法為藉由對搭載有零件的物品的品質加以判定的檢查程式,來進行所述物品的檢查的檢查方法,所述檢查方法包括: 設定步驟,針對每個零件來設定所述檢查中的包含所述零件的檢查項目及/或檢查基準的檢查資訊;以及 判定步驟,藉由所述檢查程式來判定所述物品的品質,且 所述檢查資訊進而包含作為該檢查資訊的可靠性的指標的檢查品質水準資訊, 於所述設定步驟中,基於針對所述零件的每個產品編號而設置且每當所述檢查資訊變更時便加以更新的產品編號資料群,來設定所述檢查資訊, 於所述判定步驟中,基於參照所述產品編號資料群而獲得的所述檢查資訊,針對每個所述零件來判定品質。The inspection method of the present invention is an inspection method for inspecting the article through an inspection program that judges the quality of the article on which the parts are mounted, and the inspection method includes: A setting step of setting inspection information including inspection items and/or inspection criteria of the part in the inspection for each part; and The judging step is to judge the quality of the article by the inspection program, and The inspection information further includes inspection quality level information as an indicator of the reliability of the inspection information, In the setting step, the inspection information is set based on the product number data group set for each product number of the part and updated whenever the inspection information is changed, In the determining step, the quality is determined for each of the parts based on the inspection information obtained by referring to the product number data group.
據此,於搭載有零件的物品的檢查中,能夠針對每個零件而使檢查項目或檢查基準最佳化,可針對每個零件來管理檢查品質。另外,能夠基於作為檢查品質水準資訊而設定的品質水準來管理針對每個零件而設定的檢查資訊。According to this, in the inspection of the article on which the parts are mounted, the inspection items or inspection criteria can be optimized for each part, and the inspection quality can be managed for each part. In addition, it is possible to manage inspection information set for each part based on the quality level set as inspection quality level information.
本發明中可為:所述檢查品質水準資訊包含表示高品質水準的第一水準、及表示低品質水準的第二水準, 於所述設定步驟中,當所述檢查資訊發生變更且產品編號資料群已更新時,所述檢查品質水準資訊設定為所述第二水準。In the present invention, the inspection quality level information may include a first level indicating a high quality level and a second level indicating a low quality level, In the setting step, when the inspection information is changed and the product number data group has been updated, the inspection quality level information is set to the second level.
據此,於檢查項目或檢查基準發生變更,基於該些的檢查的品質水準不明的情況下,將檢查品質水準資訊設定為第二水準,故用戶可容易地確認該檢查項目或檢查基準的品質水準。再者,作為檢查品質水準資訊,例如能夠設定為第一水準的情況下為「良好(OK)」,第二水準的情況下為「不良(NG)」等。若如此,用戶能夠直觀地識別該檢查項目或檢查基準的品質水準。Accordingly, when the inspection items or inspection standards are changed and the quality level based on these inspections is unknown, the inspection quality level information is set to the second level, so that the user can easily confirm the quality of the inspection items or inspection standards level. In addition, as the inspection quality level information, for example, if it can be set to the first level, it is "good (OK)", and if it is the second level, it is "bad (NG)". If so, the user can intuitively recognize the quality level of the inspection item or inspection standard.
另外,本發明中可為:所述品質資料群中的檢查資訊能夠由多個用戶來設定, 當於所述設定步驟中,由規定的用戶將所述檢查品質水準資訊設定為第二水準時,限制由該規定的用戶以外的用戶將所述檢查品質水準資訊變更為第一水準。In addition, in the present invention, the inspection information in the quality data group can be set by multiple users, In the setting step, when a predetermined user sets the inspection quality level information to the second level, users other than the predetermined user are restricted from changing the inspection quality level information to the first level.
若如此,當於檢查資訊能夠由多個用戶設定的情況下,由規定的用戶將檢查品質設定為第二水準(例如「不良」)時,可抑制由不知情的其他用戶變更檢查品質。若如此,可抑制將品質水準低的檢查項目或檢查基準無意地用於檢查中。If so, when the inspection information can be set by multiple users, when the inspection quality is set to the second level (for example, "bad") by a predetermined user, it is possible to suppress the inspection quality from being changed by other users without knowing it. If so, it is possible to prevent inspection items or inspection standards of low quality from being used in the inspection unintentionally.
另外,本發明中可為:所述檢查資訊進而包含參照與否資訊,所述參照與否資訊表示所述檢查程式有無進行對所述產品編號資料群的參照。若如此,檢查程式可基於該參照與否資訊,決定是否參照該產品編號資料群中的檢查項目或檢查基準來進行檢查。另外,用戶可藉由變更該參照與否資訊,而容易地管理是否將該產品編號資料群中的檢查項目或檢查基準應用於實際的檢查中。In addition, in the present invention, the inspection information may further include reference or non-reference information, and the reference or non-reference information indicates whether or not the inspection program makes a reference to the product number data group. If so, the inspection program can determine whether to perform inspections with reference to the inspection items or inspection standards in the product number data group based on the reference information. In addition, the user can easily manage whether to apply the inspection items or inspection criteria in the product number data group to actual inspections by changing the reference information.
另外,本發明中可為:所述參照與否資訊包含:接通(ON)資訊,視為所述檢查程式有進行對所述產品編號資料群的參照;以及斷開(OFF)資訊,視為所述檢查程式未進行對所述產品編號資料群的參照, 於所述設定步驟中,當所述檢查資訊發生變更且所述產品編號資料群已更新時,參照與否資訊設定為斷開資訊。In addition, in the present invention, the reference information may include: ON information, which is regarded as the inspection program for reference to the product number data group; and OFF information, depending on Because the inspection program did not refer to the product number data group, In the setting step, when the inspection information is changed and the product number data group has been updated, the reference information is set as disconnect information.
據此,當檢查項目或檢查基準發生變更且產品編號資料群已更新時,將參照與否資訊自動地設定為斷開資訊,從而可抑制不小心將未確認的檢查項目或檢查基準應用於檢查中。According to this, when the inspection items or inspection standards are changed and the product number data group is updated, the reference information is automatically set as disconnect information, which prevents accidental application of unconfirmed inspection items or inspection standards to the inspection .
另外,本發明中可為:所述品質資料群中的檢查資訊能夠由多個用戶來設定, 當於所述設定步驟中,由規定的用戶將所述參照與否資訊設定為斷開資訊時,限制由該規定的用戶以外的用戶將所述參照與否資訊變更為接通資訊。In addition, in the present invention, the inspection information in the quality data group can be set by multiple users, In the setting step, when a prescribed user sets the reference/non-reference information as disconnect information, users other than the prescribed user are restricted from changing the reference/non-reference information to connected information.
據此,當於檢查資訊能夠由多個用戶設定的情況下,由規定的用戶將參照與否資訊設定為「斷開」時,可抑制由不知情的其他用戶將參照與否資訊變更為例如「接通」。若如此,則抑制品質水準低的檢查項目或檢查基準無意地被檢查程式參照,且可抑制將品質水準低的檢查項目或檢查基準用於實際的檢查中。Accordingly, when the check information can be set by multiple users, when the specified user sets the reference information to "disconnect", it can be suppressed that other users without knowing change the reference information to, for example, "Connect." If so, it is possible to prevent the inspection items or inspection standards with low quality levels from being unintentionally referenced by the inspection program, and it is possible to prevent the inspection items or inspection standards with low quality levels from being used in actual inspections.
另外,本發明中可為:除所述第一水準及所述第二水準以外,所述檢查品質水準資訊進而包含第三水準,所述第三水準表示正在藉由使特定的檢查程式參照所述產品編號資料群而確認該產品編號資料群中的檢查資訊的檢查品質水準, 於所述設定步驟中,當所述產品編號資料群中的檢查品質水準資訊自第三水準變更為第一水準時,將所述參照與否資訊變更為接通資訊。In addition, in the present invention, in addition to the first level and the second level, the inspection quality level information further includes a third level, and the third level indicates that it is being referenced by a specific inspection program. State the product number data group and confirm the inspection quality level of the inspection information in the product number data group, In the setting step, when the inspection quality level information in the product number data group is changed from the third level to the first level, the reference information is changed to the connection information.
據此,能夠容易地判別該產品編號資料群中的檢查項目或檢查基準正在由特定的檢查程式進行確認。再者,亦可將此時的檢查品質水準資訊設定為作為第三水準的「嘗試(TRY)」等。另外,據此,當檢查項目或檢查基準自正在確認的狀態(例如設定為「嘗試」的狀態)變更為表示高品質的狀態(例如設定為「良好」的狀態)時,參照與否資訊自動地變更為「接通」,從而可將高品質的檢查項目或檢查基準自動地應用於檢查程式中。Accordingly, it can be easily determined that the inspection item or inspection criterion in the product number data group is being confirmed by a specific inspection program. Furthermore, the inspection quality level information at this time may be set as the third level "try (TRY)" or the like. In addition, based on this, when the status of the inspection item or inspection standard self-confirmed (for example, the status set to "trying") is changed to a high quality status (for example, the status is set to "good"), the reference information is automatically Change the location to "ON", so that high-quality inspection items or inspection standards can be automatically applied to the inspection program.
另外,本發明中可為:所述檢查品質水準資訊能夠設定為表示高品質水準的第一水準、及表示低品質水準的第二水準, 所述檢查資訊進而包含參照與否資訊,所述參照與否資訊表示所述檢查程式有無進行對所述產品編號資料群的參照, 所述參照與否資訊能夠設定為:接通資訊,視為所述檢查程式有進行對所述產品編號資料群的參照;以及斷開資訊,視為所述檢查程式未進行對所述產品編號資料群的參照, 當於所述設定步驟中,將所述產品編號資料群中的所述檢查品質水準資訊設定為第二水準,並且將所述參照與否資訊設定為接通資訊時, 於所述判定步驟中,不依靠所述檢查程式地進行該產品編號資料群所涉及的零件的檢查。In addition, in the present invention, the inspection quality level information can be set to a first level indicating a high quality level and a second level indicating a low quality level, The inspection information further includes reference or non-reference information, and the reference or non-reference information indicates whether the inspection program makes reference to the product number data group, The reference or not information can be set as: turn-on information, which is regarded as the inspection program has made a reference to the product number data group; and disconnect information, which is regarded as the inspection program has not performed the product numbering Reference to the data group, When, in the setting step, the inspection quality level information in the product number data group is set as the second level, and the reference or not information is set as the connection information, In the determination step, the inspection of the parts involved in the product number data group is performed without relying on the inspection program.
據此,當將檢查項目或檢查基準設定為表示低品質的第二水準(例如「不良」)、且將參照與否資訊設定為「接通」時,應用該檢查項目或檢查基準的零件的檢查可不藉由檢查程式且不藉由自動檢查來實施,而是藉由手動檢查來實施。結果,可抑制藉由品質低的檢查項目或檢查基準來進行自動檢查而發生「漏檢」或「錯檢」,並且,藉由手動檢查,能夠在製造步驟中確認該檢查項目或檢查基準的品質。According to this, when the inspection item or inspection criterion is set to the second level indicating low quality (such as "bad"), and the reference information is set to "on", the part of the inspection item or inspection criterion is applied The inspection can be implemented not by the inspection program and not by the automatic inspection, but by the manual inspection. As a result, it is possible to suppress the occurrence of "missing inspections" or "false inspections" due to automatic inspections of low-quality inspection items or inspection standards, and manual inspections can confirm the inspection items or inspection standards in the manufacturing process. quality.
另外,本發明可為一種檢查系統,其為藉由對搭載有零件的物品的品質加以判定的檢查程式,來進行所述物品的檢查的檢查系統,所述檢查系統包括: 儲存部,儲存產品編號資料群,所述產品編號資料群中併入有所述檢查中的包含所述零件的檢查項目及/或檢查基準的檢查資訊;以及 處理部,使所述檢查程式判定所述物品的品質,且 所述檢查資訊進而包含作為該檢查資訊的可靠性的指標的檢查品質水準資訊, 所述產品編號資料群針對所述零件的每個產品編號而設置,並且每當所述檢查資訊變更時便加以更新, 所述檢查程式基於參照所述產品編號資料群而獲得的所述檢查資訊,針對每個所述零件來判定品質。In addition, the present invention may be an inspection system, which is an inspection system for inspecting the article by judging the quality of the article on which the part is mounted, the inspection system including: A storage unit storing a product number data group, in which the product number data group incorporates inspection information including inspection items and/or inspection criteria of the parts in the inspection; and The processing unit causes the inspection program to determine the quality of the article, and The inspection information further includes inspection quality level information as an indicator of the reliability of the inspection information, The product number data group is set for each product number of the part, and is updated every time the inspection information changes, The inspection program determines the quality for each of the parts based on the inspection information obtained by referring to the product number data group.
另外,所述檢查系統可進而包含參照與否資訊,所述參照與否資訊表示所述檢查程式有無進行對所述產品編號資料群的參照。In addition, the inspection system may further include reference or non-reference information, which indicates whether the inspection program makes reference to the product number data group.
另外,所述檢查系統中可為:所述檢查品質水準資訊包含表示高品質水準的第一水準、及表示低品質水準的第二水準, 且所述檢查系統進而包括資料管理部,當所述檢查資訊發生變更且產品編號資料群已更新時,所述資料管理部將所述檢查品質水準資訊設定為所述第二水準。In addition, in the inspection system, the inspection quality level information may include a first level indicating a high quality level and a second level indicating a low quality level. And the inspection system further includes a data management part, when the inspection information is changed and the product number data group has been updated, the data management part sets the inspection quality level information to the second level.
另外,所述檢查系統中可為:所述參照與否資訊包含:接通資訊,視為所述檢查程式有進行對所述產品編號資料群的參照;以及斷開資訊,視為所述檢查程式未進行對所述產品編號資料群的參照, 當所述檢查資訊發生變更且所述產品編號資料群已更新時,所述資料管理部將參照與否資訊設定為斷開資訊。In addition, the inspection system may include: the reference or not information includes: connection information, which is regarded as the inspection program having referenced the product number data group; and disconnection information, which is regarded as the inspection The program did not make a reference to the product number data group, When the inspection information is changed and the product number data group has been updated, the data management section sets the reference information as disconnect information.
另外,所述檢查系統中可進而包括資訊設定部,所述資訊設定部接受由多個用戶對所述品質資料群中的檢查資訊的設定, 當由規定的用戶將所述檢查品質水準資訊設定為第二水準時,所述資訊設定部限制由該規定的用戶以外的用戶將所述檢查品質水準資訊變更為第一水準。In addition, the inspection system may further include an information setting unit that accepts settings of inspection information in the quality data group by a plurality of users, When a predetermined user sets the inspection quality level information to the second level, the information setting unit restricts users other than the predetermined user from changing the inspection quality level information to the first level.
另外,所述檢查系統中可進而包括資訊設定部,所述資訊設定部接受由多個用戶對所述品質資料群中的檢查資訊的設定, 當由規定的用戶將所述參照與否資訊設定為斷開資訊時,所述資訊設定部限制由該規定的用戶以外的用戶將所述參照與否資訊變更為接通資訊。In addition, the inspection system may further include an information setting unit that accepts settings of inspection information in the quality data group by a plurality of users, When a predetermined user sets the reference availability information as off information, the information setting section restricts users other than the predetermined user from changing the reference availability information to on information.
另外,所述檢查系統中可為:除所述第一水準及所述第二水準以外,所述檢查品質水準資訊進而包含第三水準,所述第三水準表示正在藉由使特定的檢查程式參照所述產品編號資料群而確認該產品編號資料群中的檢查資訊的檢查品質水準, 當所述產品編號資料群中的檢查品質水準資訊自第三水準變更為第一水準時,所述資料管理部將所述參照與否資訊變更為接通資訊。In addition, in the inspection system, in addition to the first level and the second level, the inspection quality level information further includes a third level, and the third level indicates that a specific inspection program is being used Refer to the product number data group to confirm the inspection quality level of the inspection information in the product number data group, When the inspection quality level information in the product number data group is changed from the third level to the first level, the data management section changes the reference information to the connection information.
另外,所述檢查系統中可為: 所述檢查資訊進而包含參照與否資訊,所述參照與否資訊表示所述檢查程式有無進行對所述產品編號資料群的參照, 所述檢查品質水準資訊包含表示高品質水準的第一水準、及表示低品質水準的第二水準, 所述參照與否資訊包含:接通資訊,視為所述檢查程式有進行對所述產品編號資料群的參照;以及斷開資訊,視為所述檢查程式未進行對所述產品編號資料群的參照, 且所述檢查系統進而包括資訊設定部,所述資訊設定部接受所述品質資料群中的檢查資訊的設定, 所述資訊設定部能夠將所述產品編號資料群中的所述檢查品質水準資訊設定為第二水準,且將所述參照與否資訊設定為接通資訊。In addition, the inspection system may be: The inspection information further includes reference or non-reference information, and the reference or non-reference information indicates whether the inspection program makes reference to the product number data group, The inspection quality level information includes a first level indicating a high quality level and a second level indicating a low quality level, The reference or non-reference information includes: connection information, which is regarded as the inspection program has made a reference to the product number data group; and disconnection information, which is regarded as the inspection program has not performed the product number data group Reference, And the inspection system further includes an information setting part, the information setting part accepts the setting of the inspection information in the quality data group, The information setting part can set the inspection quality level information in the product number data group to the second level, and set the reference or not information as the connection information.
另外,本發明可為一種程式,其使電腦執行以上所述的設定步驟及/或判定步驟。再者,所述解決課題的手段能夠盡可能地組合使用。 [發明的效果]In addition, the present invention may be a program that causes a computer to execute the above-mentioned setting steps and/or determination steps. Furthermore, the means for solving the problem can be used in combination as much as possible. [Effects of the invention]
根據本發明,能夠針對每個零件來管理檢查項目及/或檢查基準的質量,藉此可針對每個零件而使基板檢查等中的檢查項目或檢查基準最佳化,可提升搭載有該零件的物品的檢查的可靠性。According to the present invention, it is possible to manage the quality of inspection items and/or inspection criteria for each part, thereby optimizing the inspection items or inspection criteria in substrate inspection, etc., for each part, and it is possible to improve the mounting of the part. The reliability of the inspection of the items.
<應用例> 以下,參照圖式對本發明的應用例進行說明。再者,以下對將本發明應用於搭載電子零件的基板的檢查系統中的情況進行說明,但本發明的對象並不限於基板的檢查,亦可將其他的物品設為檢查的對象。另外,只要無特別記載,則該應用例中所記載的具體的構成並不意圖將本發明的範圍僅限定於該些。<Application example> Hereinafter, an application example of the present invention will be described with reference to the drawings. In addition, the following describes a case where the present invention is applied to an inspection system of a board on which electronic components are mounted, but the object of the present invention is not limited to the inspection of the board, and other articles may be the object of the inspection. In addition, as long as there is no special description, the specific configuration described in this application example is not intended to limit the scope of the present invention to only these.
圖1表示本應用例的檢查系統9的硬體構成例。該實施例的檢查系統9是藉由控制終端機1、資料管理用伺服器2、基板檢查裝置3經由通訊線路相互連接而構成。控制終端機1為固定式的終端機,包括:顯示監視器(display monitor)、印表機等輸出部101;鍵盤或滑鼠等輸入部102;硬碟驅動機(Hard Disk Drive,HDD)、隨機存取記憶體(random access memory,RAM)等記憶體103;中央處理單元(Central Processing Unit,CPU)等處理部104,也可為可移動式、輸入板式的終端機,亦可與基板檢查裝置3一體地構成。FIG. 1 shows an example of the hardware configuration of the
控制終端機1是用來實施基板檢查裝置3中所執行的檢查程式的製作(包括修正,以下相同)、或各檢查程式中所參照的產品編號資料群的設定・登記等作業的終端機。產品編號資料群中包含:對於零件應檢查的檢查項目、各檢查項目的檢查基準、該零件的尺寸或零件種類等零件資訊、該零件所附帶的產品編號的資訊等。另外,亦包含後述的各零件的檢查項目或檢查基準等檢查資訊。The
資料管理用伺服器2中儲存有多種資料,除保存所述檢查程式或產品編號資料群以外,亦對控制終端機1的處理中所需的各種資訊進行管理。The
基板檢查裝置3(以下亦簡稱為「檢查裝置3」)藉由拍攝經過零件安裝步驟或回流(reflow)步驟的零件安裝基板,並使用預先登記的檢查程式對所生成的圖像進行處理,而判定基板上的零件的安裝狀態的良・不良。為此,作為硬體構成而包括攝像感測器、照明裝置、基板保持部、RAM、CPU等。另外,檢查裝置3中亦可包括監視器等輸出部或滑鼠、鍵盤等輸入部。The board inspection device 3 (hereinafter also referred to as "
圖2是表示與所述檢查內容資料的製作相關的控制終端機1、資料管理用伺服器2及檢查裝置3的功能的功能方塊圖。於資料管理用伺服器2中設置:基板資訊儲存部21、零件資訊儲存部22、檢查程式儲存部23、檢查資訊儲存部24、檢查歷程儲存部25等。2 is a functional block diagram showing the functions of the
於基板資訊儲存部21中保存有:包含基板顏色・搭載零件・零件位置等資訊的基板資訊;或包含基板的良品模型圖像・不良品實際圖像的基板圖像等。於零件資訊儲存部22中保存有:包含零件產品編號・零件種類・顏色・形狀・電極資訊・使用基板等資訊的零件資訊;包含零件每個產品編號的良品模型圖像、不良品實際圖像的零件圖像資訊等。於檢查程式儲存部23中保存有:每個基板的檢查程式、每當修訂(revision)時便積存檢查程式的變更歷程的檢查程式歷程資訊等。The substrate
於檢查資訊儲存部24中保存有:針對零件的每個產品編號而設定的特徵量(亦稱為檢查項目)及檢查基準、檢查項目及檢查基準的品質水準資訊(後述)、檢查項目及檢查基準等檢查資訊可否向檢查程式擴展的可否擴展資訊(後述)、每當修訂時便積存該些資訊的每個產品編號的設定歷程及與其對應的注解(comment)等的檢查資訊歷程資訊等。於檢查歷程儲存部25中保存有藉由檢查裝置3進行實施而得出的檢查結果、檢查圖像等。而且,該些各種資訊作為能夠相互參照・聯動的所謂的關聯資料庫(database)而發揮功能。Stored in the inspection
藉由檢查裝置3,自檢查程式儲存部23讀出與作為檢查對象的基板相對應的檢查程式、自檢查資訊儲存部24讀出與作為檢查對象的基板相對應的檢查資訊來執行檢查。將一系列的檢查的結果或檢查時所生成的圖像等,自檢查裝置3發送至資料管理用伺服器2,並存放於檢查歷程儲存部25中。With the
對於控制終端機1的處理部104,設定用戶介面(user interface)(以下為UI)控制部11、讀出處理部12、產品編號資料處理部13、登記處理部14、檢查程式處理部15等的功能。For the
UI控制部11顯示作業畫面並接受用戶的操作,且與其他的處理部12~處理部14協作來執行對應於操作的處理。讀出處理部12自基板資訊儲存部21、零件資訊儲存部22讀出UI控制部11及檢查程式處理部15的處理中所需的資訊,並提供至UI控制部11及檢查程式處理部15。產品編號資料處理部13自檢查資訊儲存部24讀出:檢查項目及檢查基準、檢查項目及檢查基準的品質水準資訊(後述)、檢查項目及檢查基準等檢查資訊可否向檢查程式擴展的可否擴展資訊(後述)、檢查資訊歷程資訊等。另外,自零件資訊儲存部22讀出零件資訊等。而且,根據該些資訊而製作產品編號資料群(後述)並提供至UI控制部11。另外,自登記處理部14接收資訊並變更為與產品編號資料群相關的資訊。The
登記處理部14自UI控制部11接收設定資訊,並傳送至產品編號資料處理部13及檢查程式處理部15,同時變更檢查資訊儲存部所要儲存的各資訊。檢查程式處理部15自讀出處理部12接收所需的資訊、自登記處理部14接收設定資訊,並基於該些來製作基板的檢查程式,並且將該資訊登記於檢查程式儲存部23。再者,本實施例中的檢查程式是基於將產品編號資料群建立起關聯的檢查邏輯來進行基板的良・不良的判定者。The
本應用例的發明是應用於所述檢查系統9中者。而且,如上所述,將針對搭載於基板的零件的每個產品編號而設定的零件資訊、檢查項目、檢查基準、以及檢查項目及檢查基準的檢查品質水準資訊、包含檢查項目及檢查基準的檢查資訊可否向檢查程式擴展的可否擴展資訊作為產品編號資料群,每當發生變更時便進行修訂管理。The invention of this application example is applied to the
關於該品質水準資訊,例如於檢查項目及檢查基準等檢查資訊正在製作且未確認可靠性的情況下視為「不良」,於僅應用於特定的檢查程式且正在確認的情況下視為「嘗試」,於結束可靠性的確認且能夠應用於量產的情況下視為「良好」。另外,關於可否擴展資訊,於不將包含檢查項目及檢查基準的檢查資訊應用於參照該產品編號資料群的檢查程式中的情況下視為「斷開」,於應用的情況下視為「接通」。而且,當對零件進行檢查時,於可否擴展資訊為「接通」的過程中,各檢查程式參照最新修訂的產品編號資料群,使用其資訊來執行檢查。Regarding the quality level information, for example, when inspection information such as inspection items and inspection standards is being produced and its reliability is not confirmed, it is regarded as "bad", and when it is only applied to a specific inspection program and is being confirmed, it is regarded as "try". , It is regarded as "good" when the reliability confirmation is completed and it can be applied to mass production. In addition, as to whether the information can be extended, the inspection information including inspection items and inspection criteria is regarded as "disconnected" if the inspection information including inspection items and inspection criteria is not applied to the inspection program that refers to the product number data group, and as "connected" if it is applied. through". Moreover, when inspecting parts, each inspection program refers to the latest revision of the product number data group and uses the information to perform inspections during the process that the expandability information is "connected".
於本應用例中,如上所述,當藉由檢查系統9的檢查裝置3來進行基板檢查時,可針對每個零件而使檢查項目或檢查基準最佳化,可針對每個零件來管理檢查品質。由此,於搭載有多個零件的基板檢查中,可對全部的零件基於最佳的檢查資訊來進行檢查。另外,能夠基於品質水準資訊而容易地管理針對每個零件所設定的檢查資訊。In this application example, as described above, when the board inspection is performed by the
再者,本應用例中,構成產品編號資料群的資訊儲存於零件資訊儲存部22及檢查資訊儲存部24中。由此,零件資訊儲存部22及檢查資訊儲存部24相當於儲存部。另外,於如將輸出部101中顯示出的產品編號資料群存檔於記憶體103般的情況下,亦能夠將記憶體103設為儲存部。另外,本應用例的處理部104、或檢查裝置3中的CPU相當於處理部。另外,本應用例的控制終端機1構成資料管理部及資訊設定部。Furthermore, in this application example, the information constituting the product number data group is stored in the part
<實施例1>
其次,對本發明的實施例1進行詳細說明。圖3中示出本實施例的產品編號資料表30的例子。如上文所述,該產品編號資料表30是基於資料管理用伺服器2的零件資訊儲存部22及檢查資訊儲存部24中所儲存的資訊,於產品編號資料處理部13進行製作,並藉由輸出部101而顯示。產品編號資料表30是記錄與搭載於應檢查的基板的各個零件相對應的產品編號ID、及與各產品編號ID相對應的產品編號資料群的表。圖3中顯示有與附帶產品編號ID001的作為晶片電阻的零件1608RS、及附帶產品編號ID002的作為四面扁平封裝體(QuadFlat Package,QFP)的零件QFP4848相關的產品編號資料群。如上所述,將涉及多個產品編號ID的零件的產品編號資料群組合在一起者即為本實施例的產品編號資料表。<Example 1>
Next, Example 1 of the present invention will be described in detail. An example of the product number data table 30 of this embodiment is shown in FIG. 3. As described above, the product number data table 30 is based on the information stored in the part
此處,對涉及產品編號ID001的零件的產品編號資料群進行詳細說明。本實施例中,關於涉及產品編號ID001的零件,記錄有形狀、零件種類、檢查項目、檢查基準等。檢查基準是檢查中對搭載零件的良・不良進行判斷的臨限值或判斷指標。而且,關於涉及產品編號ID001的零件,每當檢查項目或檢查基準發生變更時,便更新產品編號資料群的修訂並記載於與各產品編號ID對應一欄的最上段。關於圖3中的涉及產品編號ID001的零件,可知對檢查項目或檢查基準施加11次的變更,最新的修訂為修訂12。Here, the product number data group related to the part of the product number ID001 will be described in detail. In this embodiment, with regard to the part related to the product number ID001, the shape, the type of the part, the inspection item, the inspection standard, etc. are recorded. The inspection standard is the threshold value or judgment index for judging the good or bad of the mounted parts during the inspection. In addition, for parts related to product number ID001, whenever the inspection items or inspection criteria are changed, the revision of the product number data group is updated and described in the top row of the column corresponding to each product number ID. Regarding the parts related to the product number ID001 in Fig. 3, it can be seen that 11 changes have been made to the inspection items or inspection standards, and the latest revision is
另外,本實施例的產品編號資料表中,在與各零件對應的產品編號資料群中,包含各修訂每次的品質水準及可否擴展的資料。該品質水準是表示各修訂中產品編號資料群的檢查項目或檢查基準的品質或者可靠性是否為可用於檢查裝置3的檢查中的水準的指標。例如,所謂品質水準為不良的情況表示:為製作中途的產品編號資料群且為不可用於實際的檢查中的水準。另外,品質水準為嘗試的情況表示:為於特定的檢查程式中擴展檢查項目或檢查基準的檢查資訊並正在進行可靠性的確認的產品編號資料群,且處於馬上能夠量產應用的水準。進而,品質水準為良好的情況表示:為將檢查項目或檢查基準的檢查資訊擴展至特定的檢查程式並結束了可靠性的確認的產品編號資料群,且為能夠量產應用的水準。In addition, in the product number data table of this embodiment, the product number data group corresponding to each part includes data on the quality level of each revision and whether it can be expanded. This quality level is an index indicating whether the quality or reliability of the inspection items or inspection standards of the product number data group in each revision is a level that can be used in the inspection of the
另外,可否擴展資料是表示是否將各修訂的產品編號資料群應用於全部的檢查程式中的指標。於可否擴展資料為斷開的情況下,不將該修訂的產品編號資料群應用於全部的檢查程式中。於可否擴展資料為接通的情況下,將該修訂的產品編號資料群擴展至全部的檢查程式中。該可否擴展資料可獨立於品質水準資料而由用戶設定。再者,圖3中品質水準資料相當於檢查品質水準資訊。可否擴展資料相當於參照與否資訊。In addition, the expandable data is an index indicating whether to apply each revised product number data group to all inspection programs. If the expandable data is disconnected, the revised product number data group will not be applied to all inspection programs. In the case that the extension data is connected, the revised product number data group is extended to all inspection programs. The expandability data can be set by the user independently of the quality level data. Furthermore, the quality level data in Figure 3 is equivalent to inspection quality level information. Whether the data can be expanded is equivalent to referencing information.
其次,圖4的(a)及圖4的(b)中示出針對本實施例檢查程式的產品編號參照資料表的例子。於本實施例的檢查系統9中,如上文所述使用多個檢查程式來進行對基板上的多個零件的檢查。於圖4的(a)及圖4的(b)中,示出大量的檢查程式中針對檢查程式1及檢查程式2的產品編號參照資料表35a及產品編號參照資料表35b。產品編號參照資料表35a、產品編號參照資料表35b中顯示有:基板的多個電路所附帶的電路ID、附帶有各電路ID的電路所搭載的零件的產品編號ID、附帶有各產品編號ID的零件的搭載位置、涉及各產品編號ID的產品編號資料群中進行參照的修訂即參照修訂、參照修訂於產品編號資料群中的品質水準、可否擴展、涉及各產品編號ID的產品編號資料群的最新修訂、最新修訂於產品編號資料群中的品質水準及可否擴展資料、產品編號資料群的狀態即產品編號擴展的狀況(status)。Next, FIG. 4(a) and FIG. 4(b) show examples of the product number reference table for the inspection program of this embodiment. In the
根據圖4的(a)中示出的針對檢查程式1的產品編號參照資料表35a,於涉及電路ID1~電路ID4的電路中使用涉及產品編號ID001的零件,且可知以下方面:該零件在基板上的搭載位置為左邊、上部(Left, Top);對於該零件,產品編號資料群的最新修訂為修訂12。另外,修訂12的產品編號資料群目前就品質水準而言為不良,關於可否擴展則為接通,可知需要更新。進而可知以下方面:檢查程式1並非最新修訂的產品編號資料群,且正在參照修訂9的產品編號資料群;修訂9的產品編號資料群目前就品質水準而言為良好,可否擴展則為接通。According to the product number reference table 35a for the
即,於本實施例的檢查系統9中,對基板上的各零件的檢查項目及檢查基準是藉由產品編號資料群來加以管理。而且,每當修訂時,產品編號資料群便在管理所述檢查項目、檢查基準的同時,一併對產品編號資料群自身的品質水準、可否擴展加以管理。而且,各檢查程式中所參照的產品編號資料群是藉由產品編號參照資料表來加以管理。That is, in the
其次,使用圖5來對本實施例的檢查系統9中的產品編號資料群的品質水準、可否擴展的內容的管理流程進行說明。本流程可儲存於控制終端機1的記憶體103中,亦可於自輸入部102輸入有製作新穎產品編號資料群這一內容的情況下自動地執行全部的步驟。圖5是檢查資訊管理常式的流程圖。執行本流程時,首先於步驟S101中對新穎的檢查對象零件製作產品編號。製作產品編號時,生成對應於該產品編號的產品編號資料群。於該狀態的產品編號資料群中,產品編號水準設定為不良,可否擴展設定為斷開。Next, using FIG. 5, the management flow of the quality level of the product number data group in the
於步驟S102中,自動地製作與所製作出的產品編號資料群對應的視窗畫面並顯示於控制終端機1的輸出部101。進而於步驟S103中,將與所製作出的產品編號資料群對應的零件的良品模型圖像、不良品實際圖像、以及零件的形狀、零件種類、當前暫時設定的檢查項目及檢查基準等登記在零件資訊儲存部22中。藉此,顯示圖3的產品編號資料表30中的產品編號名稱、形狀、零件種類、檢查項目、檢查基準等。In step S102, a window screen corresponding to the created product number data group is automatically created and displayed on the
其次於步驟S104中,登記驗證圖像。更具體而言,登記用來藉由步驟S103的處理中所登記的檢查項目及檢查基準而對是否產生「錯檢」或者「漏檢」進行事前驗證的樣品的圖像。若步驟S104的處理結束則前進至步驟S105。於步驟S105中,進行產品編號調整。即,對藉由步驟S104而登記的驗證圖像,進行認為恰當的檢查項目及檢查基準的調整。若步驟S105的處理結束則前進至步驟S106。Next, in step S104, the verification image is registered. More specifically, it registers an image of a sample for pre-verification of whether "false inspection" or "missing inspection" has occurred based on the inspection items and inspection criteria registered in the process of step S103. When the process of step S104 is completed, it will progress to step S105. In step S105, the product number is adjusted. That is, for the verification image registered in step S104, adjustments of inspection items and inspection criteria deemed appropriate are performed. When the process of step S105 is completed, it will progress to step S106.
於步驟S106中,對步驟S104中登記的驗證畫面,判定是否無「錯檢」或者「漏檢」。此處,於產生了「錯檢」或者「漏檢」的情況下,判定為產品編號資料群中的檢查項目或者檢查基準並不恰當,故返回至步驟S105的處理之前,進一步進行該些調整。而且,反覆進行步驟S105及步驟S106的處理,直至於步驟S106中,驗證畫面中既未產生「錯檢」亦未產生「漏檢」。In step S106, it is determined whether there is no "error inspection" or "missing inspection" on the verification screen registered in step S104. Here, in the case of "error inspection" or "missing inspection", it is determined that the inspection items or inspection criteria in the product number data group are not appropriate, so these adjustments are further performed before returning to the processing of step S105 . Moreover, the processing of step S105 and step S106 is repeated until in step S106, neither "error detection" nor "missing detection" is generated in the verification screen.
於步驟S106中,當驗證畫面中既未產生「錯檢」亦未產生「漏檢」時,前進至步驟S107。於步驟S107中,由用戶將品質水準變更為嘗試。若步驟S107的處理結束則前進至步驟S108。於步驟S108中,將產品編號資料群應用至特定的檢查程式中。更詳細而言,亦可於輸出部101中顯示出的另一視窗中,指定應用該產品編號資料群的特定的檢查程式。藉此,於特定的檢查程式的產品編號參照資料表中,與該產品編號資料群對應的可否擴展設定為接通。再者,特定的檢查程式可為一個亦可為兩個以上。In step S106, when neither "error detection" nor "missing detection" is generated in the verification screen, proceed to step S107. In step S107, the user changes the quality level to trial. When the process of step S107 ends, the process proceeds to step S108. In step S108, the product number data group is applied to a specific inspection program. In more detail, it is also possible to designate a specific inspection program to which the product number data group is applied in another window displayed in the
若步驟S108的處理結束則前進至步驟S109。於步驟S109中,使用已進行步驟S108中應用的處理的檢查程式,由檢查裝置3實施基板檢查。而且,於步驟S110中,藉由步驟S109中進行的檢查來判定是否產生了「錯檢」或者「漏檢」。此處於判定為產生了「錯檢」或者「漏檢」的情況下,返回至步驟S109的處理,再次進行檢查項目或檢查基準的調整。另一方面,於判定為未產生「錯檢」或者「漏檢」的情況下,前進至步驟S111。When the process of step S108 is completed, it will progress to step S109. In step S109, the substrate inspection is performed by the
步驟S111中,將該產品編號資料應用於更多的多個檢查程式中,於檢查裝置3中實施多個檢查。若步驟S111的處理結束則前進至步驟S112。而且,於步驟S112中,判定於步驟S111的多個檢查中是否產生了「錯檢」或者「漏檢」。於步驟S112中產生了「錯檢」或者「漏檢」的情況下,返回至步驟S111的處理,再次進行檢查項目或檢查基準的調整。另一方面,於判定為未產生「錯檢」或者「漏檢」的情況下,前進至步驟S113。In step S111, the product number data is applied to more multiple inspection programs, and multiple inspections are performed in the
於步驟S113中,將該產品編號資料群中的品質水準設定為良好,且將可否擴展設定為接通。至此,將該產品編號資料群應用於應參照該產品編號資料群的全部的檢查程式中。若步驟S113的處理結束,則暫時結束本常式。再者,本實施例中的檢查資訊管理常式的步驟S101、步驟S107、步驟S113相當於設定步驟。另外,步驟S106、步驟S110、步驟S112相當於判定步驟。In step S113, the quality level in the product number data group is set as good, and the expandability is set as ON. So far, the product number data group is applied to all inspection programs that should refer to the product number data group. When the processing of step S113 ends, this routine is temporarily ended. Furthermore, step S101, step S107, and step S113 of the inspection information management routine in this embodiment correspond to setting steps. In addition, step S106, step S110, and step S112 correspond to a determination step.
於圖5中所記載的流程圖的右側,對執行各步驟的階段中的產品編號資料群的品質水準及可否擴展的設定進行表示。據此,當於步驟S101中製作出新穎產品編號時,品質水準設定為不良,可否擴展設定為斷開。其後,於步驟S105中的使用驗證圖像的產品編號資料群的調整中未發生「錯檢」或「漏檢」的情況下,於步驟S107中,品質水準設定為嘗試,可否擴展設定為斷開。而且,於多個檢查程式中未發生「錯檢」或「漏檢」的情況下,於步驟S113中,品質水準設定為良好,可否擴展設定為接通。On the right side of the flowchart described in FIG. 5, the quality level of the product number data group and the expandable setting in the stage of executing each step are shown. Accordingly, when a novel product number is created in step S101, the quality level is set to be bad, and the expandability setting is set to off. After that, in the case that no "error detection" or "missing detection" occurs in the adjustment of the product number data group using the verification image in step S105, in step S107, the quality level is set to trial, and whether it can be expanded is set to disconnect. In addition, in the case where "error detection" or "missing detection" does not occur in a plurality of inspection programs, in step S113, the quality level is set to good, and the expandability setting is set to on.
圖6的(a)及圖6的(b)中,對如所述流程中亦說明般,推進產品編號資料群的檢查項目或檢查基準的調整研究,產品編號的品質水準達到良好時的產品編號參照資料表的變化進行表示。圖6的(a)及圖6的(b)表示針對檢查程式1及檢查程式2的產品編號參照資料表。In Fig. 6(a) and Fig. 6(b), as also explained in the above-mentioned flow, the inspection items of the product number data group or the adjustment study of the inspection standards are promoted, and the quality level of the product number is good. The serial number is expressed with reference to the changes in the data table. Fig. 6(a) and Fig. 6(b) show the product number reference table for
圖6的(a)中,關於涉及產品編號ID001的零件,於檢查程式1中參照修訂5,於檢查程式2中參照修訂6。而且,於修訂5中,產品編號資料群的品質水準設定為嘗試,於修訂6中,產品編號資料群的品質水準設定為良好。另外,可知於修訂5中及修訂6中均為可否擴展設定為接通。另外,關於產品編號ID001的零件的產品編號資料群,最新修訂為修訂7,修訂7的品質水準已設定為良好,可否擴展已設定為接通。即,可知修訂7為已完成的產品編號資料群。In Fig. 6(a), for the parts related to the product number ID001, refer to
於該狀態下,對於產品編號ID001的產品編號資料群,進行最新修訂在所有檢查程式中的應用。更具體而言,亦可使輸出部101顯示另一視窗,於該另一視窗中,對檢查程式1執行最新的參照修訂應用的指令。如此一來,如圖6的(b)所示,於檢查程式1中及檢查程式2中均參照作為最新修訂的修訂7的產品編號資料群,品質水準變更為良好。如上所述,於本實施例中,對於已完成的產品編號資料群,能夠一起應用於所有檢查程式中,且能夠有效率地應用最佳的檢查項目及檢查基準。In this state, apply the latest revision to all inspection programs for the product number data group of product number ID001. More specifically, the
再者,於本實施例中,於檢查系統9能夠由多個用戶使用的情況下,當由特定的用戶將產品編號資料群的品質水準設定為不良或者嘗試的情況下,亦可限制由其他用戶將品質水準變更為良好。更具體而言,亦可完全禁止由特定的用戶以外的用戶將品質水準變更為良好,亦可允許僅由特定的其他用戶、例如所述特定的用戶的上司等來進行變更。Furthermore, in this embodiment, in the case that the
另外,同樣地,於檢查系統9能夠由多個用戶使用的情況下,當由特定的用戶將產品編號資料群的可否擴展設定為斷開的情況下,亦可限制由其他用戶將可否擴展變更為接通。更具體而言,亦可完全禁止由特定的用戶以外的用戶將可否擴展變更為接通,亦可允許僅由特定的其他用戶、例如所述特定的用戶的上司等來進行變更。In addition, similarly, in the case where the
藉此,可抑制由不知情的其他用戶變更產品編號資料群的品質水準或可否擴展的設定內容。若如此,則可抑制將品質水準低的檢查項目或檢查基準無意地用於檢查中。In this way, it is possible to prevent other users who are unaware from changing the quality level of the product number data group or whether the setting content can be expanded. If so, it is possible to suppress inspection items or inspection standards with low quality levels from being used unintentionally in inspections.
<實施例2>
其次,對本發明的實施例2進行說明。於實施例2中,對已將確認完可靠性的產品編號資料群應用於全部的檢查程式中的狀態下,於製造步驟中發生了「漏檢」的情況下的處理進行說明。圖7是表示於產品編號資料群中的產品編號水準設定為良好、可否擴展設定為接通的狀態下,檢查時發生了「漏檢」的情況下所執行的檢查資訊管理常式2的處理的流程圖。本流程可儲存於控制終端機1的記憶體103中,亦可於自檢查裝置3發送「漏檢」檢測的資料時自動地執行。再者,關於進行手動檢查的步驟,檢查程式可呈等待來自作業者的結果輸入的狀態。<Example 2>
Next,
執行本常式時,首先,於步驟S201中,對檢查時發生了「漏檢」的情況進行檢測。於該情況下,存在未於步驟中發現不良品而通過的危險性,故需緊急應對。由此,於步驟S202中,產品編號資料群的品質水準設定為不良。若步驟S202的處理結束,則前進至步驟S203。When this routine is executed, first, in step S201, it is detected that a "missing inspection" has occurred during inspection. In this case, there is a danger of passing without finding defective products in the step, so urgent response is required. Therefore, in step S202, the quality level of the product number data group is set as bad. When the processing of step S202 ends, the process proceeds to step S203.
於步驟S203中,將產品編號資料群應用於所有檢查程式中。於該情況下,於所有檢查程式中,應用品質水準為不良的產品編號資料群。本實施例的檢查系統9中,於此種情況下,關於參照產生了「漏檢」的產品編號資料群的檢查,停止藉由檢查程式進行的自動檢查而進行手動檢查。作為此時的顯示,可僅於涉及檢查系統9的輸出部101中所顯示出的產品編號資料群的視窗中將產品編號的品質顯示為不良,亦可另外給出某些告警(alert)顯示。若步驟S203的處理結束則前進至步驟S104。In step S203, the product number data group is applied to all inspection programs. In this case, in all inspection programs, the product number data group whose quality level is poor is applied. In the
於步驟S104~步驟S113的處理中,與圖5所示的檢查資訊管理常式的不同點在於以下方面:於S206的處理中,對於步驟S104中登記的驗證畫面,藉由手動檢查來判定是否無「錯檢」或者「漏檢」;另外,於步驟S210中,藉由手動檢查來判定於步驟S109中所進行的檢查中是否發生了「錯檢」或者「漏檢」;另外,於步驟S212中,藉由手動檢查來判定於步驟S111的多個檢查中是否發生了「錯檢」或者「漏檢」。In the processing of step S104 to step S113, the difference from the inspection information management routine shown in FIG. 5 is the following: In the processing of S206, the verification screen registered in step S104 is manually inspected to determine whether There is no "error inspection" or "missing inspection"; in addition, in step S210, manual inspection is used to determine whether "error inspection" or "missing inspection" has occurred in the inspection performed in step S109; in addition, in step S210 In S212, a manual inspection is used to determine whether "error inspection" or "missing inspection" has occurred in the multiple inspections in step S111.
圖8中,對如上所述,於製造步驟中產生了「錯檢」的情況下進行手動檢查的檢查系統控制常式進行說明。本流程可儲存於檢查程式儲存部23中,亦可於藉由檢查裝置3來實施檢查時執行。執行本常式時,首先,於步驟S301中,讀入檢查程式。若步驟S301結束則前進至步驟S302。於步驟S302中,讀入藉由步驟S301而讀入的檢查程式中參照的產品編號資料群。若步驟S302的處理結束則前進至步驟S303。於步驟S303中獲取檢查圖像。而且,於步驟S304中實施檢查。In FIG. 8, the inspection system control routine for performing manual inspection when "error inspection" occurs in the manufacturing step as described above will be described. This process can be stored in the inspection
其次,於步驟S305中,判定產品編號資料群中的品質水準是否設定為良好。此處,若產品編號資料群中的品質水準設定為良好,則前進至步驟S309並實施自動檢查。另一方面,於步驟S305中判定為產品編號資料群中的品質水準未設定為良好的情況下,前進至步驟S306。於步驟S306中,判定產品編號資料群的品質水準是否設定為嘗試。此處,於判定為品質水準設定為嘗試的情況下,前進至步驟S309並實施自動檢查。另一方面,於判定為品質水準未設定為嘗試的情況下,前進至步驟S307。Next, in step S305, it is determined whether the quality level in the product number data group is set as good. Here, if the quality level in the product number data group is set as good, the process proceeds to step S309 and an automatic inspection is performed. On the other hand, if it is determined in step S305 that the quality level in the product number data group is not set as good, the process proceeds to step S306. In step S306, it is determined whether the quality level of the product number data group is set as a trial. Here, when it is determined that the quality level is set as a trial, the process proceeds to step S309 and the automatic inspection is performed. On the other hand, when it is determined that the quality level is not set as a trial, the process proceeds to step S307.
於步驟S307中,判定產品編號資料群的品質水準是否設定為不良。此處,於判定為產品編號資料群的品質水準設定為不良的情況下,前進至步驟S308,並實施手動檢查。另一方面,於判定為品質水準未設定為不良的情況下,前進至步驟S309,並實施自動檢查。若步驟S309的自動檢查、或者步驟S308的手動檢查結束,則前進至步驟S310。In step S307, it is determined whether the quality level of the product number data group is set as bad. Here, when it is determined that the quality level of the product number data group is set as bad, the process proceeds to step S308, and manual inspection is performed. On the other hand, when it is determined that the quality level is not set as defective, the process proceeds to step S309, and an automatic inspection is performed. If the automatic inspection of step S309 or the manual inspection of step S308 ends, the process proceeds to step S310.
於步驟S310中判定檢查是否結束。於步驟S310中判定為檢查結束的情況下,暫時結束本常式。於判定為檢查未結束的情況下,返回至步驟S304的處理,繼續進行檢查。再者,本常式中,於產品編號資料群的品質水準的資料僅為「良好」、「嘗試」、「不良」三種的情況下,當於步驟S306中判定為產品編號資料群的品質水準並非「嘗試」時,亦可直接前進至步驟S308的處理。In step S310, it is determined whether the inspection is over. When it is determined in step S310 that the inspection is completed, this routine is temporarily terminated. If it is determined that the inspection has not been completed, the process returns to step S304 to continue the inspection. Furthermore, in this routine, if the quality level data of the product number data group is only "good", "try", and "bad", when it is determined in step S306 as the quality level of the product number data group If it is not "trying", it is also possible to proceed directly to the processing of step S308.
圖9的(a)及圖9的(b)對如圖7及圖8中所說明般,檢查系統9中發生了「漏檢」的情況下的產品編號參照資料表的變更的例子進行例示。圖9的(a)中,關於產品編號ID003的零件,於檢查程式3中參照修訂9的產品編號資料群,於檢查程式4中,參照修訂10的產品編號資料群。而且,可知修訂9、修訂10均將品質水準設定為良好,將可否擴展設定為接通。另外,關於產品編號ID003的零件的產品編號資料群,最新修訂為修訂12,關於修訂12,品質水準設定為不良。而且,可知產品編號擴展的狀況為「要更新」。Figures 9(a) and 9(b) illustrate examples of changes to the product number reference table when "missing inspection" occurs in the
於該狀態下,任一檢查程式的檢查中產生了「漏檢」的情況下,需要緊急的應對,為此,如圖9的(b)所示,對於產品編號ID003的零件,強制地參照最新修訂12的產品編號資料。而且,其品質水準設定為不良。如此,如圖8的步驟S307及步驟S308中所示,對於產品編號ID001的零件,進行手動檢查而非自動檢查。而且,作為產品編號擴展的狀況,顯示為漏檢應對中。In this state, if a "missing inspection" occurs during the inspection of any inspection program, an emergency response is required. For this reason, as shown in Figure 9(b), the part with the product number ID003 is compulsorily referred to The latest revision of the product number information of 12. Moreover, its quality level is set to be poor. In this way, as shown in step S307 and step S308 of FIG. 8, for the part with the product number ID001, manual inspection is performed instead of automatic inspection. In addition, as the status of product number expansion, it is displayed as responding to missed inspection.
藉此,於檢查系統9中發生了「漏檢」的情況下,可緊急避難地中止自動檢查而進行手動檢查。而且,不會對製造步驟中的檢查品質造成影響,同時能夠維持產品編號資料群中的檢查項目或檢查基準的最佳化。再者,於本實施例中,於任一檢查程式的檢查中發生了「漏檢」的情況下,可自動地參照品質水準為不良的最新修訂的產品編號資料群,亦可使輸出部101給出能夠將品質水準為不良的最新修訂的產品編號資料群應用於全部的檢查程式中的顯示,使用戶手動地參照品質水準為不良的最新修訂的產品編號資料群。再者,於所述應用例及各實施例中,對當修訂管理產品編號資料群、檢查資訊已變更時,製作新的修訂的例子進行說明。然而,當檢查資訊已變更時,對於僅改寫產品編號資料群而未製作新的修訂的產品編號資料群的情況、即未對產品編號資料群進行修訂管理的情況而言,當然亦能夠應用本發明。Thereby, when a "missing inspection" occurs in the
再者,以下為了能夠將本發明的構成要件與實施例的構成加以對比,對於本發明的構成要件,附帶圖式的符號進行記載。
<發明1>
一種檢查方法,其為藉由對搭載有零件的物品的品質加以判定的檢查程式,來進行所述物品的檢查的檢查方法,所述檢查方法包括:
設定步驟(S101、S107、S113),針對每個零件來設定所述檢查中的包含所述零件的檢查項目及/或檢查基準的檢查資訊;以及
判定步驟(S106、S110、S112),藉由所述檢查程式來判定所述物品的品質,且
所述檢查資訊進而包含作為該檢查資訊的可靠性的指標的檢查品質水準資訊,
於所述設定步驟中,基於針對所述零件的每個產品編號而設置且每當所述檢查資訊變更時便加以更新的產品編號資料群,來設定所述檢查資訊,
於所述判定步驟中,基於參照所述產品編號資料群而獲得的所述檢查資訊,針對每個所述零件來判定品質。
<發明9>
一種檢查系統,其為藉由對搭載有零件的物品的品質加以判定的檢查程式,來進行所述物品的檢查的檢查系統(9),所述檢查系統包括:
儲存部(22、24、104),儲存產品編號資料群,所述產品編號資料群中併入有所述檢查中的包含所述零件的檢查項目及/或檢查基準的檢查資訊;以及
處理部(1、104),使所述檢查程式判定所述物品的品質,且
所述檢查資訊進而包含作為該檢查資訊的可靠性的指標的檢查品質水準資訊,
所述產品編號資料群針對所述零件的每個產品編號而設置,並且每當所述檢查資訊變更時便加以更新,
所述檢查程式基於參照所述產品編號資料群而獲得的所述檢查資訊,針對每個所述零件來判定品質。In addition, in the following, in order to be able to compare the configuration requirements of the present invention with the configuration of the embodiments, the configuration requirements of the present invention are described with reference to the drawings.
<
1‧‧‧控制終端機
2‧‧‧資料管理用伺服器
3‧‧‧基板檢查裝置(檢查裝置)
9‧‧‧檢查系統
11‧‧‧用戶介面控制部
12‧‧‧讀出處理部
13‧‧‧產品編號資料處理部
14‧‧‧登記處理部
15‧‧‧檢查程式處理部
21‧‧‧基板資訊儲存部
22‧‧‧零件資訊儲存部
23‧‧‧檢查程式儲存部
24‧‧‧檢查資訊儲存部
25‧‧‧檢查歷程儲存部
30‧‧‧產品編號資料表
35a、35b‧‧‧產品編號參照資料表
101‧‧‧輸出部
102‧‧‧輸入部
103‧‧‧記憶體
104‧‧‧處理部
S101~S113、S201~S212、S301~S310‧‧‧步驟1‧‧‧
圖1是表示本發明實施例的基板檢查系統的硬體構成的圖。
圖2是表示本發明實施例的基板檢查系統的功能的方塊圖。
圖3是表示本發明實施例的品質資料表的例子的圖。
圖4的(a)及圖4的(b)是表示本發明實施例的檢查程式的品質參照資料表的例子的圖。
圖5是表示本發明實施例1的檢查資訊管理常式(routine)的處理的流程圖。
圖6的(a)及圖6的(b)是表示本發明實施例1的檢查程式的品質參照資料表的更新態樣例的圖。
圖7是表示本發明實施例2的檢查資訊管理常式2的處理的流程圖。
圖8是表示本發明實施例2的檢查系統控制常式的處理的流程圖。
圖9的(a)及圖9的(b)是表示本發明實施例2的檢查程式的品質參照資料表的更新態樣例的圖。FIG. 1 is a diagram showing the hardware configuration of a board inspection system according to an embodiment of the present invention.
Fig. 2 is a block diagram showing the function of the substrate inspection system according to the embodiment of the present invention.
Fig. 3 is a diagram showing an example of a quality data table in an embodiment of the present invention.
4(a) and 4(b) are diagrams showing examples of the quality reference data table of the inspection program in the embodiment of the present invention.
FIG. 5 is a flowchart showing the processing of an inspection information management routine in
S101~S113‧‧‧步驟 S101~S113‧‧‧Step
Claims (17)
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JP2018-127024 | 2018-07-03 |
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CN (1) | CN112272968B (en) |
DE (1) | DE112019003395T5 (en) |
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TW201233994A (en) * | 2010-12-06 | 2012-08-16 | Asml Netherlands Bv | Methods and apparatus for inspection of articles, EUV lithography reticles, lithography apparatus and method of manufacturing devices |
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CN112272968A (en) | 2021-01-26 |
JP7035857B2 (en) | 2022-03-15 |
CN112272968B (en) | 2022-03-04 |
WO2020009108A1 (en) | 2020-01-09 |
TW202006351A (en) | 2020-02-01 |
JP2020009815A (en) | 2020-01-16 |
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