TWI723168B - 用於自輸入影像產生經模擬影像之系統、電腦實施方法及非暫時性電腦可讀媒體 - Google Patents

用於自輸入影像產生經模擬影像之系統、電腦實施方法及非暫時性電腦可讀媒體 Download PDF

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TWI723168B
TWI723168B TW106117367A TW106117367A TWI723168B TW I723168 B TWI723168 B TW I723168B TW 106117367 A TW106117367 A TW 106117367A TW 106117367 A TW106117367 A TW 106117367A TW I723168 B TWI723168 B TW I723168B
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張晶
克里斯 畢海斯卡
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美商克萊譚克公司
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    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
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    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
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    • G06V10/449—Biologically inspired filters, e.g. difference of Gaussians [DoG] or Gabor filters
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    • G06V10/454—Integrating the filters into a hierarchical structure, e.g. convolutional neural networks [CNN]
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    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8883—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges involving the calculation of gauges, generating models
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    • G06T2207/00—Indexing scheme for image analysis or image enhancement
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    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

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TW106117367A 2016-05-25 2017-05-25 用於自輸入影像產生經模擬影像之系統、電腦實施方法及非暫時性電腦可讀媒體 TWI723168B (zh)

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US201662341548P 2016-05-25 2016-05-25
US62/341,548 2016-05-25
US15/603,249 US10395356B2 (en) 2016-05-25 2017-05-23 Generating simulated images from input images for semiconductor applications
US15/603,249 2017-05-23

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