TWI717535B - Article transport facility - Google Patents

Article transport facility Download PDF

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Publication number
TWI717535B
TWI717535B TW106123194A TW106123194A TWI717535B TW I717535 B TWI717535 B TW I717535B TW 106123194 A TW106123194 A TW 106123194A TW 106123194 A TW106123194 A TW 106123194A TW I717535 B TWI717535 B TW I717535B
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article
posture
transfer
path
transport vehicle
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TW106123194A
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Chinese (zh)
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TW201813901A (en
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北原素行
森本雄一
松尾研介
櫻井武司
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日商大福股份有限公司
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0235—Containers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)

Abstract

[課題]提供一種在物品搬送車上一體地具備有用於變更物品的姿勢之姿勢變更機構，並且可以抑制物品搬送車的大型化之物品搬送設備。 [解決手段]具備沿著移動路徑移動來搬送物品的物品搬送車、及控制物品搬送車的控制裝置，物品搬送車具有收容物品的收容部、覆蓋收容部的罩蓋部、進行搬送對象場所與物品搬送車之間的物品之移載的移載機構、及變更搬送中的物品之姿勢的姿勢變更機構，且姿勢變更機構可將物品的姿勢變更為第一姿勢及第二姿勢，罩蓋部是設置在會與中間姿勢的物品相干涉的位置上，控制裝置會執行姿勢變更控制，該姿勢變更控制是在搬送路徑的途中，在藉由移載機構使物品相對於收容部移動到外側的狀態下，藉由姿勢變更機構將物品從第一姿勢變更到第二姿勢後，藉由移載機構將物品收容到收容部之控制。[Problem] To provide an article conveying equipment that is integrally provided with a posture changing mechanism for changing the posture of articles on the article conveying vehicle, and can suppress the enlargement of the article conveying vehicle. [Solution] It is equipped with an article transport vehicle that moves along the movement path to transport articles, and a control device that controls the article transport vehicle. The article transport vehicle has a storage section for storing articles, a cover section covering the storage section, and a place to be transported. A transfer mechanism for transferring articles between article transport vehicles, and a posture change mechanism for changing the posture of articles being transported, and the posture change mechanism can change the posture of the articles to the first posture and the second posture. Cover part It is set at a position that will interfere with the article in the intermediate posture, and the control device will perform posture change control. The posture change control is on the way of the conveying path when the article is moved to the outside relative to the storage section by the transfer mechanism In the state, after the article is changed from the first posture to the second posture by the posture changing mechanism, the article is stored in the storage section by the transfer mechanism.

Description

物品搬送設備Item handling equipment

發明領域 本發明是有關於一種具備有在複數個搬送對象場所之間沿著移動路徑移動來搬送物品之物品搬送車的物品搬送設備。FIELD OF THE INVENTION The present invention relates to an article transport equipment provided with an article transport vehicle that moves along a moving path between a plurality of transport target locations to transport articles.

發明背景 例如，在下述專利文獻1所揭示之設備中，是以物品搬送車的移動路徑經由複數個搬送對象場所的狀態來設定。並且，在複數個搬送對象場所當中成為搬送目的地之搬送對象場所上，將物品的姿勢變更成用於移載該物品之適當的姿勢。像這樣，在搬送起點與搬送目的地變更物品的姿勢之理由是源自例如，在物品是僅在其一側面上具有用於讓內容物出入之開口的容器，且搬送對象場所是處理該內容物的處理部之情況下，必須使容器的開口相向於處理部等。並且，為了變更物品的姿勢，在專利文獻1的設備中，具備有以於移動路徑間連接的狀態設置，且與物品搬送車分開另行設置的姿勢變更機構。物品搬送車對此姿勢變更機構移交物品，且令姿勢變更機構使此物品旋繞，以藉此將物品的姿勢從第一姿勢變更成第二姿勢。 先前技術文獻 專利文獻Background of the Invention For example, in the equipment disclosed in Patent Document 1 described below, the movement path of the article transport vehicle is set in a state where it passes through a plurality of transport target locations. In addition, the posture of the article is changed to an appropriate posture for transferring the article at the transfer target site that is the transfer destination among the plurality of transfer target sites. In this way, the reason for changing the posture of the article at the transfer starting point and the transfer destination is that, for example, the article is a container that has an opening for the contents to enter and exit only on one side of the article, and the transportation target place handles the contents. In the case of the processing section of the object, the opening of the container must face the processing section or the like. In addition, in order to change the posture of the article, the device of Patent Document 1 is provided with a posture change mechanism that is installed in a state of being connected between the movement paths and separately installed from the article transport vehicle. The article transport vehicle transfers articles to the posture changing mechanism, and causes the posture changing mechanism to revolve the article to thereby change the posture of the article from the first posture to the second posture. Prior art documents Patent documents

專利文獻1：日本專利特開2012-253070號公報Patent Document 1: Japanese Patent Laid-Open No. 2012-253070

發明概要 發明欲解決之課題 如上所述，在與物品搬送車分開另行設置有姿勢變更機構的設備中，會變得需要有該姿勢變更機構的配置空間，並且變得設備成本增加相當於設置該姿勢變更機構的量。於是，本申請的發明人對使姿勢變更機構一體地設置於物品搬送車上之作法進行了檢討。但是，在由物品搬送車所進行的物品之搬送中，收容物品的收容部是被罩蓋部所覆蓋。並且，為了抑制物品搬送車的大型化，是將罩蓋部與已收容於收容部的物品之間隙設定為最低限度。為了進行收容於這種收容部的物品之姿勢變更，必須使物品與罩蓋部的間隙變寬，其結果，會有不得不使物品搬送車大型化的問題。SUMMARY OF THE INVENTION The problem to be solved by the invention is as described above. In an equipment that is separately provided with a posture changing mechanism separately from an article transport vehicle, it will become necessary to arrange space for the posture changing mechanism, and the increase in equipment cost is equivalent to installing the The amount of the posture change mechanism. Therefore, the inventor of the present application conducted a review of the method of integrally installing the posture changing mechanism on the article transport vehicle. However, in the conveyance of articles by the article transfer vehicle, the storage section for storing the articles is covered by the cover section. In addition, in order to suppress the increase in the size of the article transport vehicle, the gap between the cover portion and the articles stored in the storage portion is set to the minimum. In order to change the posture of the article contained in such a storage portion, the gap between the article and the cover portion must be widened. As a result, there is a problem that the article transport vehicle has to be enlarged.

於是，所期望的是在物品搬送車上一體地具備有用於變更物品的姿勢之姿勢變更機構，並且可以抑制物品搬送車的大型化之物品搬送設備的實現。 用以解決課題之手段Therefore, it is desired that the article transport vehicle is integrally provided with a posture changing mechanism for changing the posture of the article, and the article transport facility can suppress the increase in the size of the article transport vehicle. Means to solve the problem

一種物品搬送設備，具備有在複數個搬送對象場所之間沿著移動路徑移動來搬送物品的物品搬送車、及控制該物品搬送車的控制裝置， 前述物品搬送車具有收容前述物品的收容部、覆蓋該收容部的罩蓋部、在前述收容部與相對於該收容部而位於外側之前述複數個搬送對象場所的一個之間，使前述物品移動而進行該搬送對象場所與前述物品搬送車之間的前述物品之移載的移載機構、及變更搬送中的前述物品之姿勢的姿勢變更機構， 前述姿勢變更機構可以將前述物品的姿勢變更為第一姿勢及第二姿勢，該第一姿勢是在成為搬送起點之前述搬送對象場所的移載用之姿勢，該第二姿勢是在成為搬送目的地之前述搬送對象場所的移載用之姿勢， 前述罩蓋部是設置在下述位置：當收容在前述收容部的狀態之前述物品為前述第一姿勢的情況及第二姿勢的情況下，與前述物品不相干涉，當前述物品的姿勢為在前述第一姿勢與前述第二姿勢之間進行變更的過程之姿勢的中間姿勢的情況下，會與前述物品相干涉， 前述控制裝置會執行姿勢變更控制，該姿勢變更控制是下述之控制：在從前述搬送起點到前述搬送目的地之路徑的搬送路徑之途中，藉由前述移載機構使前述物品相對於前述收容部移動到外側的狀態下，藉由前述姿勢變更機構將前述物品從前述第一姿勢變更成前述第二姿勢之後，藉由前述移載機構將前述物品收容到前述收容部。An article transporting facility is provided with an article transport vehicle that moves along a movement path between a plurality of transport target locations to transport articles, and a control device that controls the article transport vehicle, wherein the article transport vehicle has a accommodating section for storing the articles, The cover part covering the accommodating part moves the article between the accommodating part and one of the plurality of transfer target locations located outside of the accommodating part to perform the transfer between the transfer target location and the article transfer vehicle A transfer mechanism for transferring the article between the two and a posture changing mechanism for changing the posture of the article being transported. The posture changing mechanism can change the posture of the article to a first posture and a second posture. The first posture It is the posture for transfer at the transfer target location which is the starting point of the transfer, the second posture is the transfer posture for the transfer target location at the transfer destination, and the cover part is set in the following position: When the article stored in the storage portion is in the first posture and the second posture, it does not interfere with the article, and the posture of the article is between the first posture and the second posture In the case of the intermediate posture of the posture in the process of changing, it interferes with the aforementioned article, and the aforementioned control device executes posture change control. The posture change control is the following control: between the aforementioned conveying start point and the aforementioned conveying destination During the conveyance path of the path, after the article is moved to the outside with respect to the storage portion by the transfer mechanism, after the article is changed from the first posture to the second posture by the posture changing mechanism, The article is stored in the storage portion by the transfer mechanism.

在本構成中，覆蓋收容部的罩蓋部是設置在下述位置：在收容部中收容有第一姿勢或第二姿勢的物品的狀態下，與該物品不相干涉的位置。另一方面，此罩蓋部所設置的位置是形成為在被收容部收容的狀態之物品成為中間姿勢的情況下，會與該物品相干涉的位置。也就是說，覆蓋收容部的罩蓋部與物品之間隙是設定得比較小。因此，根據本構成之物品搬送設備，即可以抑制物品搬送車的大型化。又，在本構成中，物品搬送車在從搬送起點到搬送目的地的路徑之搬送路徑的途中，是在藉由移載機構使物品相對於收容部移動到外側的狀態下，藉由姿勢變更機構來將物品的姿勢從第一姿勢變更成第二姿勢。從而，根據本構成，可以有效地利用用於物品搬送的時間及空間，來進行物品的姿勢變更。因此，相較於與物品搬送車分開另行設置姿勢變更機構的情況，會變得較容易謀求設備的小型化及低成本化。In this structure, the cover part which covers the storage part is provided in the position which does not interfere with the article of the 1st posture or the 2nd posture in the state which accommodated the article in the storage part. On the other hand, the position where the cover portion is provided is a position that interferes with the article when the article in the state accommodated in the storage portion is in an intermediate posture. In other words, the gap between the cover part covering the storage part and the article is set to be relatively small. Therefore, according to the article transport equipment of this structure, it is possible to suppress the enlargement of the article transport vehicle. In addition, in this configuration, the article transport vehicle is on the way from the transfer starting point to the transfer destination while the article is moved to the outside with respect to the storage section by the transfer mechanism, and the posture is changed. The mechanism changes the posture of the article from the first posture to the second posture. Therefore, according to the present structure, the time and space for the article transportation can be effectively used to change the article posture. Therefore, compared to the case where a posture changing mechanism is separately provided from the article transport vehicle, it becomes easier to achieve downsizing and cost reduction of the equipment.

本揭示之技術的更進一步之特徵與優點，透過參照圖式所記述之以下的例示性且非限定的實施形態之說明應可變得更加明確。The further features and advantages of the technology of the present disclosure should be made clearer by referring to the description of the following exemplary and non-limiting embodiments described in the drawings.

用以實施發明之形態 1.第一實施形態 參照圖式並針對物品搬送設備的第一實施形態進行說明。 如圖1所示，物品搬送設備1具備有：物品搬送車2，在複數個搬送對象場所6之間沿著移動路徑R移動來搬送物品W；及控制裝置H，控制該物品搬送車2(也參照圖5)。並且，此物品搬送設備1是構成為在將物品W從複數個搬送對象場所6當中成為搬送起點的搬送對象場所6，搬送到成為搬送目的地之其他搬送對象場所6的途中，可以變更該物品W的姿勢。Modes for Carrying Out the Invention 1. First Embodiment The first embodiment of the article conveying equipment will be described with reference to the drawings. As shown in FIG. 1, the article transport facility 1 includes: an article transport vehicle 2 that moves along a movement path R between a plurality of transport target locations 6 to transport articles W; and a control device H that controls the article transport vehicle 2 ( See also Figure 5). In addition, this article transfer facility 1 is configured to change the article W from a transfer target location 6 that is a transfer start point among a plurality of transfer target locations 6 to another transfer target location 6 that is a transfer destination. W posture.

1-1.物品搬送設備的機械性構成 物品W是藉由物品搬送車2而被搬送的對象。在此，物品W在平面視角下是形成為非圓形狀。物品W在例如平面視角下是形成為多角形狀，更具體而言，是形成為四角形狀(參照圖4)。再者，於四角形狀中也包含嚴格來說即使不是四角形，但整體看起來可視為四角形的形狀。又，多角形狀也包含一部分是以圓弧等曲線形成的形狀。例如，物品W的平面視角之形狀也可以是D形。以下，使用「狀」的表現來說明物等的形狀之情況下，其用意在於不嚴格地特定該形狀。又，有關於物品W之立體上的形狀，在此是設為柱狀體。物品W是例如收納內容物的容器。在本實施形態中，物品W是收納半導體基板的容器。在此，物品W是形成為長方體狀，且可將複數片半導體基板分為複數層來收容。在本實施形態中，物品W的上表面及底面是始終封堵的狀態。又，於物品W的上表面設置有物品W的搬送之時用於讓物品搬送車2把持的凸緣部Wa。又，於物品W的4個側面當中的一面上，設置有用來讓半導體基板出入的開口部Wb。1-1. Mechanical configuration of article transport equipment The article W is an object to be transported by the article transport vehicle 2. Here, the article W is formed in a non-circular shape in a plan view. The article W is formed in a polygonal shape when viewed from a plane, for example, and more specifically, is formed in a quadrangular shape (see FIG. 4). Furthermore, the quadrangular shape also includes a shape that is not strictly a quadrangular but can be regarded as a quadrangular as a whole. In addition, a polygonal shape also includes a shape partially formed by a curve such as an arc. For example, the shape of the article W in a planar view may also be D-shaped. Hereinafter, when the expression of "shape" is used to describe the shape of an object or the like, the intention is to not strictly specify the shape. In addition, regarding the three-dimensional shape of the article W, here is a columnar body. The article W is, for example, a container that stores contents. In this embodiment, the article W is a container that houses a semiconductor substrate. Here, the article W is formed in a rectangular parallelepiped shape, and a plurality of semiconductor substrates can be divided into a plurality of layers and stored. In this embodiment, the upper surface and the bottom surface of the article W are always blocked. In addition, the upper surface of the article W is provided with a flange portion Wa for holding the article W when the article W is transported. In addition, on one of the four side surfaces of the article W, an opening Wb for allowing the semiconductor substrate to enter and exit is provided.

搬送對象場所6是成為物品W的搬送起點之場所、或者是成為物品W的搬送目的地之場所。搬送對象場所6是設置在物品搬送設備1中的複數個位置。在搬送對象場所6上，可進行例如物品W的處理。在本實施形態中，是如圖1所示，於搬送對象場所6中包含有收授部6b，該收授部6b是用於在進行對半導體基板的處理之處理裝置6a、與物品搬送車2之間的物品W之接收授與。在本實施形態中，是將使開口部Wb對於處理裝置6a形成相向的狀態之物品W搬送至收授部6b。又，物品W所收納的半導體基板是藉由處理裝置6a所具備的支臂等，從開口部Wb取出。並且，半導體基板可藉由處理裝置6a來處理。為了像這樣藉由處理裝置6a來處理半導體基板，在本實施形態中，是在將物品W設為開口部Wb相對於處理裝置6a相向之適當的姿勢後，被物品搬送車2搬送至收授部6b。The transfer target location 6 is a location that becomes a transfer starting point of the article W or a location that becomes a transfer destination of the article W. The transportation target places 6 are plural positions installed in the article transportation equipment 1. At the transport target location 6, for example, the processing of the article W can be performed. In this embodiment, as shown in FIG. 1, the transfer target location 6 includes a receiving and receiving unit 6b, and the receiving and receiving unit 6b is used for processing the semiconductor substrate 6a, and the article transport vehicle Acceptance and grant of item W between 2. In this embodiment, the article W in which the opening portion Wb is in a state facing the processing device 6a is transported to the receiving and receiving portion 6b. In addition, the semiconductor substrate contained in the article W is taken out from the opening Wb by an arm or the like provided in the processing apparatus 6a. In addition, the semiconductor substrate can be processed by the processing device 6a. In order to process the semiconductor substrate by the processing device 6a in this way, in the present embodiment, the article W is placed in an appropriate posture where the opening Wb faces the processing device 6a, and then the article W is transported to the receiving vehicle 2部6b.

移動路徑R是物品搬送車2在物品搬送設備1上移動的路徑。如圖1所示，移動路徑R會經由複數個搬送對象場所6。移動路徑R可設置在例如地面上、或者是設置在從地面朝上方間隔有距離的位置。在本實施形態中，移動路徑R是由天花板99懸吊支撐的軌道98所決定的(參照圖2及圖3)。如圖1所示，在本實施形態中，軌道98是以可經由複數個收授部6b的狀態被設置。又，軌道98是由沿著移動路徑R延伸並且在橫向方向Y上間隔開的狀態下設置的一對長條構件所構成(參照圖2及圖3)。在本實施形態中，移動路徑R是包含步驟內路徑Ri與步驟間路徑Rc而構成。並且，複數個收授部6b是藉由步驟內路徑Ri來連結，且複數個步驟內路徑Ri是藉由步驟間路徑Rc來連結。The movement path R is a path along which the article transport vehicle 2 moves on the article transport facility 1. As shown in FIG. 1, the movement path R passes through a plurality of transportation target locations 6. The movement path R may be provided on the ground, for example, or at a position spaced upward from the ground. In this embodiment, the moving path R is determined by the rail 98 suspended and supported by the ceiling 99 (refer to FIGS. 2 and 3). As shown in FIG. 1, in the present embodiment, the rail 98 is installed in a state that can pass through a plurality of receiving and transmitting units 6b. In addition, the rail 98 is composed of a pair of elongated members which are provided in a state of being spaced apart in the lateral direction Y extending along the moving path R (refer to FIGS. 2 and 3). In this embodiment, the movement path R is configured to include the intra-step path Ri and the inter-step path Rc. In addition, the plurality of receiving and transmitting parts 6b are connected by the intra-step path Ri, and the plurality of intra-step paths Ri are connected by the inter-step path Rc.

物品搬送車2是在複數個搬送對象場所6之間沿著移動路徑R移動來搬送物品W。在本實施形態中，物品搬送車2可以藉由在步驟間路徑Rc移動，而移動到以步驟間路徑Rc連結的複數個步驟內路徑Ri的每一個。因此，物品搬送車2可以藉由在複數個步驟內路徑Ri的每一個中移動，而移動到被步驟內路徑Ri連結的複數個收授部6b的每一個。再者，在本實施形態中，是形成為物品搬送車2在移動路徑R上只能朝單一方向移動，而無法朝相反方向移動。又，物品搬送車2具備有位置檢測感測器Se6(參照圖5)，該位置檢測感測器Se6會檢測移動路徑R內的該物品搬送車2之現在位置。在本實施形態中，是在移動路徑R上以分散的狀態配置有複數個位置資訊儲存部(省略圖示)。並且，位置資訊儲存部是對區劃了移動路徑R的複數個區域的每一個進行分配。又，複數個位置資訊儲存部的每一個儲存有已在移動路徑R內各自配置的位置之資訊。在本實施形態中，位置檢測感測器Se6是以藉由讀取配置在移動路徑R內的複數個位置資訊儲存部的每一個所儲存的位置資訊之作法，而可檢測移動路徑R內的物品搬送車2的現在位置之方式被構成。例如，作為位置資訊儲存部也可以是顯示有條碼的板牌等。此時的位置檢測感測器Se6較佳是條碼掃描器。The article transport vehicle 2 moves along the movement path R between a plurality of transport target locations 6 to transport the article W. In this embodiment, the article transport vehicle 2 can move to each of a plurality of intra-step routes Ri connected by the inter-step route Rc by moving on the inter-step route Rc. Therefore, the article transport vehicle 2 can move to each of the plurality of receiving and receiving parts 6b connected by the in-step route Ri by moving in each of the in-step routes Ri. In addition, in the present embodiment, the article transport vehicle 2 can only move in a single direction on the movement path R, and cannot move in the opposite direction. In addition, the article transport vehicle 2 is provided with a position detection sensor Se6 (see FIG. 5), and the position detection sensor Se6 detects the current position of the article transport vehicle 2 in the movement path R. In this embodiment, a plurality of position information storage units (not shown) are arranged in a dispersed state on the movement path R. In addition, the location information storage unit allocates each of a plurality of areas that divide the movement path R. In addition, each of the plurality of position information storage units stores the information of the positions respectively arranged in the movement path R. In the present embodiment, the position detection sensor Se6 can detect the position information stored in each of the plurality of position information storage parts arranged in the movement path R by reading The current position of the article transport vehicle 2 is constructed. For example, the location information storage unit may be a board with a barcode displayed. The position detection sensor Se6 at this time is preferably a barcode scanner.

如圖2及圖3所示，物品搬送車2具有可在軌道98上行走自如的行走部21、以及由行走部21懸吊支撐的本體部22。再者，在以下的說明中，「物品搬送車2沿著移動路徑R移動」與「物品搬送車2沿著移動路徑R行走」是同義。又，在圖3中，為了說明的方便，省略了後述的支撐構件5。物品搬送車2具有收容物品W的收容部22a、以及覆蓋該收容部22a的罩蓋部22b。在本實施形態中，收容部22a及罩蓋部22b是作為本體部22的一部分而構成。As shown in FIGS. 2 and 3, the article transport vehicle 2 has a running part 21 that can walk freely on a rail 98 and a body part 22 that is suspended and supported by the running part 21. In addition, in the following description, "the article transport vehicle 2 moves along the movement path R" and "the article transport vehicle 2 travels along the movement path R" are synonymous. In addition, in FIG. 3, for the convenience of description, the support member 5 described later is omitted. The article transport vehicle 2 has a storage portion 22a that stores the article W, and a cover portion 22b that covers the storage portion 22a. In this embodiment, the accommodating portion 22a and the cover portion 22b are configured as a part of the main body portion 22.

物品搬送車2具有移載機構3，該移載機構3是在該物品搬送車2與搬送對象場所6之間進行物品W的移載。移載機構3是在收容部22a與相對於該收容部22a而位於外側的複數個搬送對象場所6的一個之間使物品W移動，來進行該搬送對象場所6與物品搬送車2之間的物品W之移載。又，物品搬送車2具有姿勢變更機構4，該姿勢變更機構4會變更搬送中的物品W之姿勢。The article transfer vehicle 2 has a transfer mechanism 3 that transfers articles W between the article transfer vehicle 2 and the transfer target place 6. The transfer mechanism 3 moves the article W between the storage portion 22a and one of the plurality of transport target locations 6 located outside of the storage portion 22a to perform the transfer between the transport target location 6 and the article transport vehicle 2 Transfer of item W. In addition, the article transport vehicle 2 has a posture changing mechanism 4 that changes the posture of the article W being transported.

如圖3所示，移載機構3具備有把持物品W的把持部3Ga、使把持部3Ga沿著鉛直方向Z升降的升降機構3H、及沿著橫向方向Y使把持部3Ga橫向移動的橫向移動機構3S，其中該橫向方向Y是交叉於沿著搬送路徑Rt的搬送方向X並且為沿著水平方向的方向。在本實施形態中，作為使把持部3Ga橫向移動的橫向移動機構3S，是以使把持部3Ga滑動的滑動機構3S來例示說明。在此，在本說明書中，所謂的沿著某個特定的方向，是指下述之概念：除了完全平行於該特定的方向之情況外，也包含了在設置或組裝等的製造上的誤差之範圍內相對於該特定的方向稍微傾斜的狀態。更具體而言，也包含相對於該特定的方向以±15°以下的範圍傾斜之狀態。滑動機構3S可以使把持部3Ga沿著橫向方向Y滑動。在本實施形態中，是藉由把持機構3G、升降機構3H及滑動機構3S，在物品搬送車2與收授部6b之間移載物品W。再者，物品W的移載是指在物品搬送車2與收授部6b之間使物品移動之情形。也就是說，將收容在收容部22a的狀態之物品W載置到收授部6b為止的過程、或者將載置在收授部6b的狀態之物品W收容到收容部22a為止的過程，即是物品W的移載。又，物品W的搬送是指使物品W從複數個收授部6b當中成為搬送起點的收授部6b，移動到成為搬送目的地的其他收授部6b。也就是說，物品W的搬送也包含物品W的移載之概念。又，搬送路徑Rt是在移動路徑R中的從成為搬送起點的搬送對象場所6到成為搬送目的地的其他搬送對象場所6之路徑。也就是說，在移動路徑R之中，因應於搬送起點與搬送目的地而每次設定搬送路徑Rt。As shown in FIG. 3, the transfer mechanism 3 includes a gripping portion 3Ga that grips the article W, a lifting mechanism 3H that lifts the gripping portion 3Ga in the vertical direction Z, and a lateral movement that moves the gripping portion 3Ga laterally along the lateral direction Y In the mechanism 3S, the lateral direction Y is a direction that crosses the conveying direction X along the conveying path Rt and is along the horizontal direction. In this embodiment, as the lateral movement mechanism 3S that laterally moves the grip portion 3Ga, a sliding mechanism 3S that slides the grip portion 3Ga is exemplified and explained. Here, in this specification, the so-called along a specific direction refers to the following concept: In addition to being completely parallel to the specific direction, it also includes manufacturing errors in installation or assembly. The state is slightly inclined relative to the specific direction within the range. More specifically, it also includes a state where it is inclined within a range of ±15° or less with respect to the specific direction. The sliding mechanism 3S can slide the grip 3Ga in the lateral direction Y. In the present embodiment, the article W is transferred between the article transport vehicle 2 and the receiving unit 6b by the gripping mechanism 3G, the lifting mechanism 3H, and the sliding mechanism 3S. In addition, the transfer of the article W refers to a situation in which the article is moved between the article transport vehicle 2 and the receiving unit 6b. That is, the process of placing the article W in the state of being housed in the receiving section 22a until the receiving section 6b, or the process of placing the article W in the state of being placed in the receiving section 6b in the receiving section 22a, namely It is the transfer of article W. In addition, the conveyance of the article W refers to moving the article W from the receiving and receiving unit 6b that is the starting point of the transfer among the plurality of receiving and receiving portions 6b to another receiving and receiving portion 6b that is the transfer destination. In other words, the transfer of the article W also includes the concept of the transfer of the article W. In addition, the conveyance path Rt is a path in the movement path R from the conveyance target location 6 serving as the conveyance starting point to another conveyance target location 6 serving as the conveyance destination. That is, in the movement path R, the transportation path Rt is set every time according to the transportation start point and the transportation destination.

如圖2所示，作為物品W的移載，將載置在收授部6b的狀態之物品W收容至收容部22a的情況下，是在藉由把持機構3G把持有物品W的狀態下，藉由升降機構3H使物品W上升，並藉由滑動機構3S使物品W滑動至收容部22a。作為物品W的移載，而將已收容在收容部22a的狀態之物品W載置至收授部6b的情況下，是進行與上述相反的步驟。再者，在以下，在鉛直方向Z當中，是將上側設為鉛直方向上側Z1，且將下側設為鉛直方向下側Z2來說明。又，在橫向方向Y當中，是將使物品W從收容部22a往收容部22a的外側突出之側(圖2及圖3中的左側)設為橫向方向第一側Y1，且將使物品W從收容部22a的外側退回至收容部22a之側設為橫向方向第二側Y2來說明。在以下，將收容在收容部22a的狀態之物品W的位置稱為退回位置P1，且將突出至橫向方向第一側Y1的極限下之物品W的位置稱為突出位置P2。再者，在本實施形態中，橫向方向Y是正交於搬送路徑Rt的方向。As shown in FIG. 2, as the transfer of the article W, when the article W placed in the receiving portion 6b is stored in the storage portion 22a, the article W is held by the gripping mechanism 3G , The article W is raised by the elevating mechanism 3H, and the article W is slid to the receiving portion 22a by the sliding mechanism 3S. As the transfer of the article W, when the article W in the state stored in the accommodating section 22a is placed in the receiving section 6b, the procedure reverse to the above is performed. In addition, in the following description, in the vertical direction Z, the upper side is the vertical direction upper side Z1 and the lower side is the vertical direction lower side Z2. In addition, in the lateral direction Y, the side (the left side in FIGS. 2 and 3) protruding from the housing portion 22a to the outside of the housing portion 22a is the first side Y1 in the lateral direction, and the article W The side retracted from the outside of the accommodating portion 22a to the accommodating portion 22a will be described as the second side Y2 in the lateral direction. Hereinafter, the position of the article W accommodated in the accommodating portion 22a is referred to as the retracted position P1, and the position of the article W protruding to the limit of the first side Y1 in the lateral direction is referred to as the protruding position P2. Furthermore, in this embodiment, the lateral direction Y is a direction orthogonal to the conveyance path Rt.

如圖3所示，物品搬送車2具有行走部21。行走部21是被馬達等驅動設備驅動而沿著移動路徑R行走。在本實施形態中，行走部21是行走在軌道98上。如圖3所示，在本實施形態中，行走部21具有：行走輪21a，由行走用馬達21M所驅動而繞著水平軸旋轉，並且沿著搬送方向X在軌道98的上表面滾動；及引導輪21b，抵接於軌道98的鉛直面且繞著鉛直軸旋轉，並且沿著軌道98引導行走部21。又，行走部21具備有檢測物品搬送車2的行走速度之速度檢測感測器Se1(參照圖5)。在本實施形態中，速度檢測感測器Se1是以可根據預定時間內之行走輪21a的旋轉數及與軌道98的相對速度等來檢測物品搬送車2的速度之方式所構成。As shown in FIG. 3, the article transport vehicle 2 has a traveling part 21. The traveling part 21 is driven by a driving device such as a motor to travel along the movement path R. In this embodiment, the walking part 21 is walking on the rail 98. As shown in FIG. 3, in this embodiment, the running part 21 has: a running wheel 21a, which is driven by a running motor 21M to rotate around a horizontal axis, and rolls on the upper surface of the rail 98 along the conveying direction X; and The guide wheel 21 b abuts on the vertical surface of the rail 98 and rotates around the vertical axis, and guides the traveling part 21 along the rail 98. Moreover, the traveling part 21 is equipped with the speed detection sensor Se1 which detects the traveling speed of the article conveyance vehicle 2 (refer FIG. 5). In the present embodiment, the speed detection sensor Se1 is configured to detect the speed of the article transport vehicle 2 based on the number of rotations of the traveling wheels 21a within a predetermined time and the relative speed with the rail 98.

物品搬送車2具有本體部22。本體部22是連結於行走部21，且藉由行走部21的行走而與該行走部21一體地在移動路徑R上移動。在本實施形態中，本體部22是透過由構成軌道98的一對長條構件所形成的間隙，而被行走部21懸吊支撐。在本實施形態中，本體部22具有收容物品W的收容部22a、以及覆蓋該收容部22a的罩蓋部22b。收容部22a是配置在罩蓋部22b的內側。在本實施形態中，罩蓋部22b是形成為橫向方向Y的兩側及下方為開放的形狀。更具體而言，罩蓋部22b從橫向方向Y來看是形成為有角的倒U字形。因此，收容部22a是在橫向方向Y的兩側及下方與收容部22a的外側相連通。藉此，可以藉由以滑動機構3S使收容在收容部22a的狀態之物品W在橫向方向Y上滑動，而使該物品W位於收容部22a的外側。The article transport vehicle 2 has a main body 22. The main body portion 22 is connected to the walking portion 21 and moves on the movement path R integrally with the walking portion 21 by the walking of the walking portion 21. In the present embodiment, the main body portion 22 is suspended and supported by the running portion 21 through a gap formed by a pair of elongated members constituting the rail 98. In this embodiment, the main body portion 22 has a storage portion 22a that stores the article W, and a cover portion 22b that covers the storage portion 22a. The receiving portion 22a is arranged inside the cover portion 22b. In the present embodiment, the cover portion 22b is formed in a shape in which both sides and the lower side of the lateral direction Y are open. More specifically, the cover portion 22b is formed in an angled inverted U shape when viewed in the lateral direction Y. Therefore, the accommodating portion 22a communicates with the outside of the accommodating portion 22a on both sides and below the lateral direction Y. Thereby, the article W stored in the storage portion 22a can be slid in the lateral direction Y by the sliding mechanism 3S, so that the article W can be positioned outside the storage portion 22a.

滑動機構3S是沿著橫向方向Y伸縮自如。例如，滑動機構3S是構成為在收縮狀態下可將整體收容到罩蓋部22b的內側，並在伸出狀態下使一部分突出至罩蓋部22b的外側。在本實施形態中，滑動機構3S是設置在收容部22a。又，在本實施形態中，滑動機構3S具有藉由滑動用馬達3SM驅動或從動的一對滑動用皮帶輪3Sc、捲繞在一對滑動用皮帶輪3Sc的每一個上之滑動用皮帶3Sb、連結於滑動用皮帶3Sb而在橫向方向Y上滑動自如的滑動部3Sa。並且，滑動部3Sa可以藉由朝橫向方向第一側Y1滑動而移動到收容部22a的外側，且可以藉由朝橫向方向第二側Y2滑動而移動到收容部22a。又，滑動機構3S具備有檢測滑動部3Sa的滑動量之滑動量檢測感測器Se2(也參照圖5)。在本實施形態中，滑動量檢測感測器Se2是以可根據滑動部3Sa的滑動時的滑動用皮帶輪3Sc的旋轉數等來檢測滑動部3Sa的滑動量之方式所構成。The sliding mechanism 3S is stretchable and contractible along the lateral direction Y. For example, the sliding mechanism 3S is configured to be able to house the entire inside of the cover portion 22b in the contracted state, and to protrude a part to the outside of the cover portion 22b in the extended state. In this embodiment, the sliding mechanism 3S is provided in the housing part 22a. In addition, in this embodiment, the sliding mechanism 3S has a pair of sliding pulleys 3Sc driven or driven by a sliding motor 3SM, a sliding belt 3Sb wound around each of the pair of sliding pulleys 3Sc, and a connection The sliding portion 3Sa that is slidable in the lateral direction Y on the sliding belt 3Sb. In addition, the sliding portion 3Sa can move to the outside of the receiving portion 22a by sliding to the first side Y1 in the lateral direction, and can move to the receiving portion 22a by sliding to the second side Y2 in the lateral direction. Moreover, the sliding mechanism 3S is equipped with the sliding amount detection sensor Se2 which detects the sliding amount of the sliding part 3Sa (refer also to FIG. 5). In the present embodiment, the sliding amount detection sensor Se2 is configured to detect the sliding amount of the sliding portion 3Sa based on the number of rotations of the sliding pulley 3Sc during sliding of the sliding portion 3Sa.

姿勢變更機構4是變更搬送中的物品W之姿勢。例如，姿勢變更機構4是使物品W繞著特定的軸旋繞，藉此變更該物品W的姿勢。更具體而言，姿勢變更機構4是使物品W繞著鉛直軸旋繞，藉此變更該物品W的姿勢。在本實施形態中，姿勢變更機構4是與滑動機構3S的滑動部3Sa相連結。因此，姿勢變更機構4是與滑動機構3S的滑動部3Sa一體地沿著橫向方向Y移動。在本實施形態中，姿勢變更機構4具備有以繞著沿鉛直方向Z的旋繞軸4b的方式來使把持部3Ga旋繞的旋繞部4a。在此，在旋繞部4a的內部中，旋繞軸4b的上部是與旋繞用馬達4M相連結。並且，藉由旋繞用馬達4M來驅動旋繞軸4b。又，姿勢變更機構4具備有檢測把持部3Ga的旋繞量之旋繞量檢測感測器Se5(也參照圖5)。在本實施形態中，旋繞量檢測感測器Se5是以可根據旋繞軸4b的旋轉角度及旋繞軸4b旋轉的時間等來檢測把持部3Ga的旋繞量之方式所構成。The posture changing mechanism 4 changes the posture of the article W being conveyed. For example, the posture changing mechanism 4 causes the article W to revolve around a specific axis, thereby changing the posture of the article W. More specifically, the posture changing mechanism 4 changes the posture of the article W by winding the article W around a vertical axis. In the present embodiment, the posture changing mechanism 4 is connected to the sliding portion 3Sa of the sliding mechanism 3S. Therefore, the posture changing mechanism 4 moves in the lateral direction Y integrally with the sliding portion 3Sa of the sliding mechanism 3S. In this embodiment, the posture changing mechanism 4 is provided with the winding part 4a which winds the holding part 3Ga so that the winding shaft 4b along the vertical direction Z may be wound. Here, in the inside of the winding part 4a, the upper part of the winding shaft 4b is connected with the motor 4M for winding. In addition, the winding shaft 4b is driven by the winding motor 4M. In addition, the posture changing mechanism 4 is provided with a winding amount detection sensor Se5 that detects the winding amount of the grip portion 3Ga (see also FIG. 5). In this embodiment, the winding amount detection sensor Se5 is configured to detect the winding amount of the grip 3Ga based on the rotation angle of the winding shaft 4b, the time of the rotation shaft 4b, and the like.

升降機構3H是使物品W升降。在本實施形態中，升降機構3H是使物品W從配置有罩蓋部22b的高度到至少配置有收授部6b的高度之間進行升降。在本實施形態中，升降機構3H具有：由升降用馬達3HM驅動的升降用皮帶輪3Hc；升降用鼓輪3Hd；捲繞於升降用皮帶輪3Hc及升降用鼓輪3Hd的升降用皮帶3Hb；及保持升降用馬達3HM、升降用皮帶輪3Hc、升降用鼓輪3Hd及升降用皮帶3Hb的升降部3Ha。並且，升降機構3H是藉由以升降用馬達3HM驅動升降用皮帶輪3Hc，以將升降用皮帶3Hb捲取或送出，而使把持部3Ga升降。又，在本實施形態中，升降部3Ha是與姿勢變更機構4所具有的旋繞軸4b相連結。因此，升降機構3H是藉由旋繞軸4b的旋轉而繞著鉛直軸旋繞。由於升降機構3H是透過姿勢變更機構4與滑動機構3S連結，因此會與滑動機構3S一體地沿著橫向方向Y移動。又，升降機構3H具備有檢測把持部3Ga的升降量之升降量檢測感測器Se3(也參照圖5)。在本實施形態中，升降量檢測感測器Se3是以可根據把持部3Ga的升降時之升降用皮帶輪3Hc的旋轉數及升降用皮帶輪3Hc旋轉的時間等來檢測把持部3Ga的升降量之方式所構成。The lifting mechanism 3H lifts and lowers the article W. In this embodiment, the elevating mechanism 3H raises and lowers the article W from the height where the cover part 22b is arranged to the height where at least the receiving and receiving part 6b is arranged. In this embodiment, the elevating mechanism 3H has: an elevating pulley 3Hc driven by an elevating motor 3HM; an elevating drum 3Hd; an elevating belt 3Hb wound around the elevating pulley 3Hc and the elevating drum 3Hd; and holding The elevating portion 3Ha of the elevating motor 3HM, the elevating pulley 3Hc, the elevating drum 3Hd, and the elevating belt 3Hb. In addition, the lifting mechanism 3H drives the lifting pulley 3Hc with the lifting motor 3HM to wind up or send out the lifting belt 3Hb to lift the grip portion 3Ga. In addition, in this embodiment, the elevating portion 3Ha is connected to the winding shaft 4b included in the posture changing mechanism 4. Therefore, the elevating mechanism 3H revolves around the vertical axis by the rotation of the revolving shaft 4b. Since the elevating mechanism 3H is connected to the sliding mechanism 3S through the posture changing mechanism 4, it moves in the lateral direction Y integrally with the sliding mechanism 3S. In addition, the elevating mechanism 3H is provided with an elevating amount detection sensor Se3 that detects the elevating amount of the grip portion 3Ga (see also FIG. 5). In this embodiment, the lift amount detection sensor Se3 is a method that can detect the lift amount of the grip 3Ga based on the number of rotations of the lift pulley 3Hc during the lift of the grip 3Ga and the time when the lift pulley 3Hc rotates. Constituted.

把持機構3G可把持物品W。例如，把持機構3G是從上方把持物品W。更具體而言，把持機構3G是以在平面視角下與物品W完全重疊的狀態從上方把持該物品W。在本實施形態中，把持機構3G具有連結於升降用皮帶3Hb的把持部3Ga、保持在把持部3Ga的內部之把持用馬達3GM(參照圖5)、及可藉由把持用馬達3GM而被驅動並在把持姿勢與解除姿勢之間切換自如的一對把持爪3Gb。並且，一對把持爪3Gb是藉由朝彼此相接近的方向移動而成為把持姿勢，且藉由朝彼此相遠離的方向移動而成為解除姿勢。在本實施形態中，一對把持爪3Gb是以把持姿勢來把持物品W的凸緣部Wa。並且，一對把持爪3Gb是藉由從把持有凸緣部Wa的狀態成為解除姿勢，以解除凸緣部Wa的把持。又，把持機構3G具備有檢測一對把持爪3Gb的把持姿勢與解除姿勢之把持檢測感測器Se4(參照圖5)。在本實施形態中，把持檢測感測器Se4是以可根據由一對把持爪3Gb進行之光軸的遮斷的有無等來檢測一對把持爪3Gb為把持姿勢或解除姿勢之方式所構成。由於把持部3Ga是透過升降用皮帶3Hb與升降機構3H相連結，因此把持機構3G會與藉由旋繞軸4b的旋轉而旋繞的升降機構3H一體地旋繞。又，由於把持機構3G是透過升降機構3H及姿勢變更機構4與滑動機構3S相連結，因此會與升降機構3H、姿勢變更機構4及滑動機構3S一體地沿著橫向方向Y移動。因此，被把持機構3G把持的狀態之物品W的升降、旋繞及滑動之各動作，可藉由升降機構3H、姿勢變更機構4及滑動機構3S來進行。The holding mechanism 3G can hold the article W. For example, the gripping mechanism 3G grips the article W from above. More specifically, the gripping mechanism 3G grips the article W from above in a state where it completely overlaps the article W in a plan view. In this embodiment, the gripping mechanism 3G has a gripping portion 3Ga connected to the lifting belt 3Hb, a gripping motor 3GM (see FIG. 5) held inside the gripping portion 3Ga, and can be driven by the gripping motor 3GM And a pair of gripping claws 3Gb that can freely switch between the gripping posture and the release posture. In addition, the pair of gripping claws 3Gb become a gripping posture by moving in a direction approaching each other, and they become a release posture by moving in a direction away from each other. In this embodiment, the pair of gripping claws 3Gb are flange portions Wa that grip the article W in a gripping posture. In addition, the pair of grasping claws 3Gb releases the grasping of the flange portion Wa by changing the state of holding the flange portion Wa to the release posture. In addition, the gripping mechanism 3G is provided with a grip detection sensor Se4 (refer to FIG. 5) that detects the gripping posture and the release posture of the pair of gripping claws 3Gb. In the present embodiment, the grip detection sensor Se4 is configured to detect whether the pair of grip claws 3Gb is the grip posture or the release posture based on the presence or absence of blocking of the optical axis by the pair of grip claws 3Gb. Since the grip portion 3Ga is connected to the lifting mechanism 3H through the lifting belt 3Hb, the gripping mechanism 3G is wound integrally with the lifting mechanism 3H that is wound by the rotation of the winding shaft 4b. Moreover, since the gripping mechanism 3G is connected to the sliding mechanism 3S through the lifting mechanism 3H and the posture changing mechanism 4, it moves in the lateral direction Y integrally with the lifting mechanism 3H, the posture changing mechanism 4, and the sliding mechanism 3S. Therefore, the lifting, winding, and sliding operations of the article W in the state held by the gripping mechanism 3G can be performed by the lifting mechanism 3H, the posture changing mechanism 4, and the sliding mechanism 3S.

姿勢變更機構4可將物品W的姿勢變更為在搬送起點之搬送對象場所6上的移載用之姿勢的第一姿勢A1、以及在搬送目的地之搬送對象場所6上的移載用之姿勢的第二姿勢A2。如前述，在物品搬送設備1中，是藉由配置在各自不同的場所的複數個處理裝置6a，來處理收納在物品W中的半導體基板。因此，當將物品W搬送到處理裝置6a的收授部6b時，必須使物品W的開口部Wb成為相向於處理裝置6a的狀態，以使處理裝置6a從物品W中取出半導體基板。也就是說，第二姿勢A2是指物品W的開口部Wb相對於成為搬送目的地之搬送對象場所6的處理裝置6a為相向之狀態的姿勢。因此，第二姿勢A2會藉由對應於搬送目的地之處理裝置6a的方向而變化。又，第一姿勢A1是指搬送起點中的物品W之姿勢。例如，成為搬送對象的物品W，為已藉由複數個處理裝置6a當中的一個處理裝置6a完成了某個處理步驟的物品W之情況下，第一姿勢A1是成為開口部Wb相對於已進行該物品W的處理步驟之處理裝置6a相向之狀態的姿勢。但是，並不限於像這樣的情況，例如，第一姿勢A1也可以是已將物品W搬入至物品搬送設備1的時間點下之姿勢。無論如何，是使開始物品W的搬送之時間點下的物品W之姿勢成為第一姿勢A1。The posture changing mechanism 4 can change the posture of the article W to the first posture A1 for transfer on the transfer target location 6 at the starting point of the transfer, and the transfer posture on the transfer target location 6 at the transfer destination. The second posture A2. As described above, in the article transport facility 1, the semiconductor substrates contained in the article W are processed by the plural processing devices 6 a arranged in different places. Therefore, when the article W is transported to the receiving portion 6b of the processing device 6a, the opening Wb of the article W must be in a state facing the processing device 6a so that the processing device 6a can take out the semiconductor substrate from the article W. That is, the second posture A2 refers to a posture in which the opening Wb of the article W is in a state facing the processing device 6a of the transport target place 6 serving as the transport destination. Therefore, the second posture A2 changes according to the direction of the processing device 6a corresponding to the transfer destination. In addition, the first posture A1 refers to the posture of the article W at the starting point of conveyance. For example, when the article W to be conveyed is an article W for which a certain processing step has been completed by one processing device 6a among the plurality of processing devices 6a, the first posture A1 is the opening Wb relative to the The posture of the state where the processing device 6a of the processing step of the article W faces each other. However, it is not limited to such a case. For example, the first posture A1 may be a posture at the time when the article W has been carried into the article conveying facility 1. In any case, the posture of the article W at the time when the conveyance of the article W is started becomes the first posture A1.

在本實施形態中，在第一姿勢A1與第二姿勢A2之間的物品W之姿勢變更，是藉由繞著旋繞軸4b的物品W之旋繞來進行。也就是說，如圖4所示，沿著旋繞軸4b的延伸方向(在本例為鉛直方向Z)來看物品W時，是使物品W旋繞成使物品W的角Wc描繪出以旋繞軸4b為中心的圓弧，藉此使物品W進行姿勢變更。在本實施形態中，是藉由姿勢變更機構4使第一姿勢A1的狀態之物品W繞著旋繞軸4b旋繞，以成為開口部Wb相對於對應於搬送目的地之處理裝置6a為相向之狀態。藉此，可將物品W從第一姿勢A1進行姿勢變更成第二姿勢A2。In the present embodiment, the posture of the article W between the first posture A1 and the second posture A2 is changed by winding the article W around the winding axis 4b. That is, as shown in FIG. 4, when viewing the article W along the extending direction of the winding axis 4b (in this example, the vertical direction Z), the article W is wound so that the angle Wc of the article W is drawn to revolve the axis The circular arc with 4b as the center allows the posture of the article W to be changed. In this embodiment, the article W in the state of the first posture A1 is revolved around the reel axis 4b by the posture changing mechanism 4 so that the opening portion Wb is in a state facing the processing device 6a corresponding to the conveying destination. . Thereby, the posture of the article W can be changed from the first posture A1 to the second posture A2.

如圖4所示，罩蓋部22b是設置在下述的位置上：在收容於收容部22a的狀態之物品W為第一姿勢A1時或第二姿勢A2時不會與物品W相干涉，當物品W的姿勢為在第一姿勢A1與第二姿勢A2之間進行變更的過程之姿勢的中間姿勢Am時會與物品W相干涉。在本實施形態中，罩蓋部22b具有在搬送方向X上彼此相向的一對內側面22f。又，收容部22a的搬送方向X上之區域是藉由一對內側面22f而被區劃。在本實施形態中，是在收容於收容部22a的狀態之物品W的姿勢為中間姿勢Am時，會使物品W干涉到一對內側面22f當中的至少一個內側面22f的位置上設置有罩蓋部22b。更具體而言，如圖4所示，是將罩蓋部22b的大小設定成：使離物品W的旋繞時之物品W的旋轉中心(在本例中為旋繞軸4b)最遠的部分(在本例中為物品W的角Wc)所描繪的旋繞軌跡TR變得比收容部22a更大。如上所述，由於物品W在平面視角下為四角形狀，因此旋繞軌跡TR的直徑是由在平面視角下連結物品W的對角之對角線來決定。更具體而言，是將一對內側面22f的搬送方向X上之間隔設定成變得比平面視角下的物品W之對角線的長度更短。As shown in FIG. 4, the cover portion 22b is provided at a position where the article W stored in the storage portion 22a will not interfere with the article W when it is in the first posture A1 or the second posture A2. When the posture of the article W is the intermediate posture Am in the process of changing between the first posture A1 and the second posture A2, it interferes with the article W. In the present embodiment, the cover portion 22b has a pair of inner side surfaces 22f facing each other in the conveying direction X. In addition, the area in the transport direction X of the accommodating portion 22a is divided by a pair of inner side surfaces 22f. In this embodiment, when the posture of the article W in the state accommodated in the accommodating portion 22a is the intermediate posture Am, a cover is provided at a position where the article W interferes with at least one of the pair of inner surfaces 22f.盖部22b. More specifically, as shown in FIG. 4, the size of the cover portion 22b is set to be the farthest part from the center of rotation of the article W (in this example, the winding shaft 4b) when the article W is being wound. In this example, the winding trajectory TR drawn by the angle Wc) of the article W becomes larger than the storage portion 22a. As described above, since the article W has a quadrangular shape in a planar view, the diameter of the spiral track TR is determined by the diagonal line connecting the diagonals of the article W in a planar view. More specifically, the interval in the conveying direction X of the pair of inner side surfaces 22f is set to be shorter than the length of the diagonal line of the article W in a planar view.

1-2.控制裝置的構成 接著，參照圖5來說明物品搬送設備1的控制構成。 控制裝置H是包含進行物品搬送設備1整體的控制之上位控制裝置Hu、以及進行物品搬送車2的控制之下位控制裝置Hd而構成。上位控制裝置Hu是以固定在物品搬送設備1的任意的區域之狀態而配置。下位控制裝置Hd是配置在物品搬送車2上且和該物品搬送車2一起在移動路徑R上移動。在本實施形態中，是將下位控制裝置Hd配置在複數個物品搬送車2的每一個上，且和各個物品搬送車2一起在移動路徑R上移動。控制裝置H具備有微電腦等之處理器、記憶體等的周邊電路等。並且，可藉由可在這些硬體、與電腦等的處理器上執行的程式之協同合作，來實現控制裝置H的各個功能。1-2. Configuration of control device Next, the control configuration of the article conveying equipment 1 will be described with reference to FIG. 5. The control device H is configured to include an upper control device Hu that controls the entire article transport facility 1 and a lower control device Hd that controls the article transport vehicle 2. The upper control device Hu is arranged in a state of being fixed to an arbitrary area of the article conveying equipment 1. The lower control device Hd is arranged on the article transport vehicle 2 and moves on the movement path R together with the article transport vehicle 2. In this embodiment, the lower control device Hd is arranged on each of the plurality of article transport vehicles 2 and moves on the movement path R together with each article transport vehicle 2. The control device H includes peripheral circuits such as a processor such as a microcomputer and a memory. In addition, various functions of the control device H can be realized by the cooperation of programs that can be executed on these hardwares and a processor such as a computer.

控制裝置H是將針對複數個搬送對象場所6的每一個之物品W的適當姿勢，儲存作為適當姿勢資訊Ja。適當姿勢資訊Ja可以儲存在上位控制裝置Hu中，也可以各別地藉由複數個下位控制裝置Hd的每一個來儲存。在本實施形態中，上位控制裝置Hu具備有儲存部，且將針對複數個搬送對象場所6的每一個之物品W的適當姿勢，作為適當姿勢資訊Ja而儲存在該儲存部中。也就是說，上位控制裝置Hu會將對應於複數個搬送對象場所6的每一個之物品W的第二姿勢A2儲存在儲存部中。上位控制裝置Hu會對下位控制裝置Hd下達單純搬送指令或特定搬送指令，該單純搬送指令是在不伴隨著姿勢變更的情形下，使物品W從成為搬送起點之搬送對象場所6搬送到成為搬送目的地之其他的搬送對象場所6之指令，該特定搬送指令是伴隨姿勢變更，使物品W從成為搬送起點之搬送對象場所6搬送到成為搬送目的地之其他的搬送對象場所6之指令。The control device H stores the appropriate posture of the article W for each of the plurality of transport target places 6 as appropriate posture information Ja. The proper posture information Ja may be stored in the upper control device Hu, or may be separately stored by each of the plurality of lower control devices Hd. In the present embodiment, the upper control device Hu is provided with a storage unit, and the appropriate posture of the article W for each of the plurality of transport target locations 6 is stored in the storage unit as the appropriate posture information Ja. That is, the upper control device Hu stores the second posture A2 of the article W corresponding to each of the plurality of transport target locations 6 in the storage unit. The upper control device Hu issues a simple conveyance instruction or a specific conveyance instruction to the lower control device Hd. The simple conveyance instruction is to transport the article W from the conveyance target location 6 that is the starting point of the conveyance to the conveyance without the posture change. The instruction of the other transfer target location 6 of the destination. The specific transfer instruction is an instruction to transfer the article W from the transfer target location 6 that is the transfer starting point to the other transfer target location 6 that is the transfer destination with the posture change.

下位控制裝置Hd是藉由接收單純搬送指令來執行單純搬送處理，並藉由接收特定搬送指令來執行特定搬送處理。下位控制裝置Hd會為了執行這些的各個處理，而控制各種馬達的作動。在本實施形態中，下位控制裝置Hd會取得藉由速度檢測感測器Se1檢測的物品搬送車2之行走速度的資訊、藉由滑動量檢測感測器Se2檢測的滑動部3Sa之滑動量的資訊、藉由升降量檢測感測器Se3檢測的把持部3Ga之升降量的資訊、藉由把持檢測感測器Se4檢測的一對把持爪3Gb之姿勢的資訊、藉由旋繞量檢測感測器Se5檢測的把持部3Ga之旋繞量的資訊、及藉由位置檢測感測器Se6檢測的物品搬送車2之現在位置的資訊。並且，下位控制裝置Hd是根據藉由各感測器而檢測出的資訊，來控制行走用馬達21M、滑動用馬達3SM、升降用馬達3HM、把持用馬達3GM及旋繞用馬達4M的作動。The lower control device Hd executes the simple transfer process by receiving the simple transfer command, and executes the specific transfer process by receiving the specific transfer command. The lower control device Hd controls the operation of various motors in order to execute these various processes. In this embodiment, the lower control device Hd obtains information on the traveling speed of the article transport vehicle 2 detected by the speed detection sensor Se1, and the amount of sliding of the sliding portion 3Sa detected by the slip detection sensor Se2. Information, information about the lift amount of the grip 3Ga detected by the lift detection sensor Se3, information about the posture of a pair of grip claws 3Gb detected by the grip detection sensor Se4, and a rotation detection sensor Information on the winding amount of the grip 3Ga detected by Se5 and information on the current position of the article transport vehicle 2 detected by the position detection sensor Se6. In addition, the lower control device Hd controls the operation of the traveling motor 21M, the sliding motor 3SM, the lifting motor 3HM, the gripping motor 3GM, and the winding motor 4M based on the information detected by each sensor.

控制裝置H會執行姿勢變更控制，該姿勢變更控制是在從搬送起點到搬送目的地的路徑之搬送路徑Rt的途中，已藉由移載機構3使物品W相對於收容部22a移動到外側的狀態下，藉由姿勢變更機構4將物品W從第一姿勢A1變更成第二姿勢A2後，藉由移載機構3將物品W收容到收容部22a之控制。在本實施形態中，從上位控制裝置Hu接收到特定搬送指令的下位控制裝置Hd，是在將物品W從成為搬送起點之搬送對象場所6搬送到成為搬送目的地之其他的搬送對象場所6的過程中，執行姿勢變更控制。在本例中，姿勢變更控制是在藉由滑動機構3S使把持部3Ga滑動成使物品W相對於收容部22a位於外側之狀態下，使物品W繞著旋繞軸4b旋繞來進行。具體而言，是藉由滑動機構3S使滑動部3Sa突出至橫向方向第一側Y1，藉此使配置在收容部22a之受到姿勢變更機構4、升降機構3H、把持機構3G及把持部3Ga所把持的物品W配置到突出位置P2。並且，藉由姿勢變更機構4使已配置到突出位置P2的物品W連同把持機構3G及升降機構3H一起旋繞，藉此將物品W的姿勢從第一姿勢A1變更成第二姿勢A2。之後，藉由滑動機構3S使滑動部3Sa退回至橫向方向第二側Y2，藉此使已成為第二姿勢A2的物品W連同把持機構3G、升降機構3H及姿勢變更機構4一起配置至退回位置P1(收容部22a)。如此進行，即可執行姿勢變更控制。再者，在本實施形態中，在物品W相對於收容部22a位於外側的狀態中，除了物品W相對於收容部22a完全位於外側的狀態以外，也包含物品W的一部分相對於收容部22a位於外側的狀態。更進一步來說，除了在平面視角下物品W不重疊於收容部22a的狀態以外，也包含在平面視角下僅物品W的一部分為與收容部22a不重疊的狀態。The control device H executes posture change control. The posture change control is to move the article W to the outside with respect to the accommodating portion 22a by the transfer mechanism 3 during the transfer path Rt of the path from the transfer starting point to the transfer destination In the state, after the article W is changed from the first posture A1 to the second posture A2 by the posture changing mechanism 4, the article W is stored in the storage portion 22a by the transfer mechanism 3. In the present embodiment, the lower control device Hd, which has received the specific transfer instruction from the upper control device Hu, is transporting the article W from the transfer target location 6 that is the starting point of the transfer to another transfer target location 6 that is the transfer destination. During the process, the posture change control is executed. In this example, the posture change control is performed by rotating the article W around the winding shaft 4b while the gripping portion 3Ga is slid by the sliding mechanism 3S so that the article W is located outside the storage portion 22a. Specifically, the sliding part 3Sa is protruded to the first side Y1 in the lateral direction by the sliding mechanism 3S, whereby the receiving posture changing mechanism 4, the elevating mechanism 3H, the holding mechanism 3G, and the holding part 3Ga arranged in the receiving part 22a The grasped article W is arranged at the protruding position P2. In addition, the posture changing mechanism 4 causes the article W arranged at the protruding position P2 to rotate together with the gripping mechanism 3G and the elevating mechanism 3H, thereby changing the posture of the article W from the first posture A1 to the second posture A2. After that, the sliding part 3Sa is retracted to the second side Y2 in the lateral direction by the sliding mechanism 3S, whereby the article W in the second posture A2 is arranged to the retracted position together with the holding mechanism 3G, the lifting mechanism 3H, and the posture changing mechanism 4 P1 (receiving part 22a). In this way, the posture change control can be executed. Furthermore, in the present embodiment, in the state where the article W is located outside with respect to the storage portion 22a, in addition to the state where the article W is completely located outside with respect to the storage portion 22a, a part of the article W is also located with respect to the storage portion 22a. The state of the outside. Furthermore, in addition to a state where the article W does not overlap the storage portion 22a in a plan view, it also includes a state where only a part of the article W does not overlap the storage portion 22a in a plan view.

在本實施形態中，下位控制裝置Hd是在搬送路徑Rt的途中之物品搬送車2的停止中執行姿勢變更控制。於搬送路徑Rt內為存在有複數個物品搬送車2的狀態，為了使其於處理裝置6a進行半導體基板的處理，是使各個物品搬送車2朝向搬送對象場所6的收授部6b來搬送物品W。因此，若物品搬送車2為了往收授部6b的物品W之移載而在搬送路徑Rt內停止，會成為後續的其他物品搬送車2也停止之情形。也就是說，物品搬送車2會有在搬送路徑Rt內行走中，因塞車而停止之情形。於是，例如下位控制裝置Hd會在搬送路徑Rt的途中之物品搬送車2的塞車停止中執行姿勢變更控制。藉此，可以利用物品搬送車2非所欲地停止之時間，來執行姿勢變更控制。也就是說，由於並不需要為了執行姿勢變更控制而使物品搬送車2停止，因此相較於在每次執行姿勢變更控制時使物品搬送車2停止的情況，可以縮短搬送時間。In the present embodiment, the lower control device Hd executes posture change control while the article transport vehicle 2 is stopped on the way of the transport path Rt. There are a plurality of article transport vehicles 2 in the transport path Rt. In order to process the semiconductor substrates in the processing device 6a, each article transport vehicle 2 is directed toward the receiving section 6b of the transport target location 6 to transport the articles. W. Therefore, if the article transport vehicle 2 stops in the transport path Rt in order to transfer the article W to the receiving unit 6b, the subsequent article transport vehicle 2 also stops. In other words, the article transport vehicle 2 may stop due to a traffic jam while traveling in the transport path Rt. Therefore, for example, the lower-level control device Hd executes the posture change control while the article transport vehicle 2 is stopped in a traffic jam on the way of the transport route Rt. Thereby, it is possible to perform posture change control using the time when the article transport vehicle 2 stops unintentionally. That is, since it is not necessary to stop the article transport vehicle 2 in order to execute the posture change control, the transport time can be shortened compared with the case where the article transport vehicle 2 is stopped every time the posture change control is executed.

在本實施形態中，是在藉由移載機構3使物品W相對於收容部22a滑動到外側的狀態下，將移載機構3及物品W不會與存在於搬送路徑Rt的周圍之其他構件相干涉的搬送路徑Rt之區域，設定作為姿勢變更許可區域Tp(參照圖1)。更具體而言，是將於藉由滑動機構3S使物品W滑動到突出位置P2時具有充分的空間之搬送路徑Rt中的區域，設定作為姿勢變更許可區域Tp。並且，下位控制裝置Hd是在物品搬送車2位於姿勢變更許可區域Tp內的情況下，執行姿勢變更控制。在本實施形態中，由於姿勢變更許可區域Tp於使物品W滑動到突出位置P2時具有充分的空間，因此藉由在姿勢變更許可區域Tp中執行姿勢變更控制，可以抑制在姿勢變更控制的執行中移載機構3及物品W會與存在於搬送路徑Rt的其他構件相干涉之情形。再者，存在於搬送路徑Rt的周圍之其他構件，為例如用於暫時保管處理裝置6a及物品W的收納架及保管庫等(圖示省略)。In the present embodiment, in a state where the article W is slid to the outside with respect to the accommodating portion 22a by the transfer mechanism 3, the transfer mechanism 3 and the article W are not separated from other members existing around the transfer path Rt. The area of the interfering transport path Rt is set as the posture change permission area Tp (refer to FIG. 1). More specifically, the area in the conveyance path Rt that has sufficient space when the article W is slid to the protruding position P2 by the sliding mechanism 3S is set as the posture change permission area Tp. In addition, the lower control device Hd executes the posture change control when the article transport vehicle 2 is located in the posture change permission area Tp. In the present embodiment, since the posture change permission area Tp has sufficient space when the article W is slid to the protruding position P2, by performing posture change control in the posture change permission area Tp, the execution of the posture change control can be suppressed. The intermediate transfer mechanism 3 and the article W may interfere with other members existing in the conveyance path Rt. In addition, other members existing around the conveyance path Rt are, for example, a storage rack and a storage room for temporarily storing the processing device 6a and the article W (illustration omitted).

在本實施形態中，是將姿勢變更許可區域Tp設定在移動路徑R中的步驟內路徑Ri與步驟間路徑Rc的連接區域Tc。在本實施形態中，連接區域Tc是在連接步驟內路徑Ri與步驟間路徑Rc的區域附近，相當於用於讓物品搬送車2在步驟內路徑Ri循環的循環路徑之區域(參照圖1)。在物品搬送設備1中，為了在步驟內路徑Ri與步驟間路徑Rc的每一個上，搬送以各處理裝置6a進行處理的半導體基板，會有比較多的物品搬送車2在行走。相對於此，行走在步驟內路徑Ri與步驟間路徑Rc的連接區域Tc之物品搬送車2的數量是比較少的。因此，將連接區域Tc設為姿勢變更許可區域Tp，而在物品搬送車2存在於該連接區域Tc時執行姿勢變更控制，藉此即可以抑制為了姿勢變更控制之物品搬送車2的停止影響到其他物品搬送車2的行走之情形。也就是說，可以抑制搬送路徑Rt中的塞車發生，且可以抑制物品搬送設備1的整體之搬送效率的降低。In this embodiment, the posture change permission area Tp is set in the connection area Tc between the intra-step path Ri and the inter-step path Rc in the movement path R. In the present embodiment, the connection area Tc is in the vicinity of the area connecting the intra-step route Ri and the inter-step route Rc, and corresponds to the area of the circulation route for the article transport vehicle 2 to circulate the intra-step route Ri (refer to Figure 1) . In the article transport facility 1, in order to transport the semiconductor substrates processed by each processing device 6 a on each of the intra-step route Ri and the inter-step route Rc, a relatively large number of article transport vehicles 2 travel. In contrast, the number of article transport vehicles 2 traveling in the connection area Tc of the intra-step route Ri and the inter-step route Rc is relatively small. Therefore, the connection area Tc is set as the posture change permission area Tp, and the posture change control is executed when the article transport vehicle 2 exists in the connection area Tc, thereby suppressing the stop of the article transport vehicle 2 for posture change control from affecting Other goods transport vehicle 2 walking. In other words, it is possible to suppress the occurrence of traffic jams in the conveying path Rt, and it is possible to suppress the decrease in the conveying efficiency of the entire article conveying facility 1.

如圖2所示，在本實施形態中，移載機構3更具備有支撐構件5，該支撐構件5是被軌道98或天花板99支撐並且配置在鄰接於移動路徑R的位置。在圖式的例子中，支撐構件5是被軌道98及天花板99雙方所支撐著。又，支撐構件5是設置成在使把持部3Ga滑動以使物品W相對於收容部22a位於外側的狀態下，在鉛直方向Z上支撐滑動機構3S。支撐構件5具有在比軌道98更靠向橫向方向第一側Y1上連結於天花板的天花板連結部5a、連結於天花板連結部5a的下端部並且從橫向方向第一側Y1連結到軌道98的軌道連結部5b、從鉛直方向下側Z2支撐滑動機構3S的支撐部5d、及連接軌道連結部5b與支撐部5d的框架部5c。在使把持部3Ga滑動到突出位置P2以使物品W相對於收容部22a位於外側的狀態下，支撐部5d是從鉛直方向下側Z2支撐連結於滑動機構3S的姿勢變更機構4。也就是說，支撐部5d透過姿勢變更機構4間接地支撐滑動機構3S。藉此，支撐部5d可以支撐把持部3Ga及其把持的物品W。其結果是，可以藉由以滑動機構3S中的支撐了物品W等的部分為施力點之將物品搬送車2設為中心的力矩，而將施加在物品搬送車2及軌道98等的負擔減輕。又，由於支撐構件5是被軌道98及天花板99雙方所支撐，因此可以將支撐構件5受到的物品W等之荷重，分散到軌道98及天花板99雙方，並也可以減輕施加在支撐構件5本身的負擔。As shown in FIG. 2, in this embodiment, the transfer mechanism 3 is further provided with a support member 5 which is supported by the rail 98 or the ceiling 99 and is arranged at a position adjacent to the movement path R. As shown in FIG. In the illustrated example, the support member 5 is supported by both the rail 98 and the ceiling 99. In addition, the support member 5 is provided so as to support the sliding mechanism 3S in the vertical direction Z in a state where the grip portion 3Ga is slid so that the article W is positioned outside with respect to the storage portion 22a. The support member 5 has a ceiling connecting portion 5a connected to the ceiling on the first side Y1 in the transverse direction than the rail 98, a rail connected to the lower end of the ceiling connecting portion 5a and connected to the rail 98 from the first side Y1 in the transverse direction The connection portion 5b, the support portion 5d that supports the sliding mechanism 3S from the lower side Z2 in the vertical direction, and the frame portion 5c that connects the rail connection portion 5b and the support portion 5d. In a state where the grip portion 3Ga is slid to the protruding position P2 so that the article W is positioned outside with respect to the accommodating portion 22a, the supporting portion 5d supports the posture changing mechanism 4 connected to the sliding mechanism 3S from the lower side Z2 in the vertical direction. That is, the support portion 5d indirectly supports the sliding mechanism 3S through the posture changing mechanism 4. Thereby, the support part 5d can support the holding part 3Ga and the article W it holds. As a result, the load on the article transport vehicle 2 and the rail 98 can be reduced by the moment centered on the article transport vehicle 2 with the part supporting the article W in the sliding mechanism 3S as the point of application. Ease. In addition, since the support member 5 is supported by both the rail 98 and the ceiling 99, the load of the article W received by the support member 5 can be distributed to both the rail 98 and the ceiling 99, and the load on the support member 5 itself can be reduced. Burden.

在本實施形態中，支撐部5d是以沿著橫向方向Y延伸的板狀構件在搬送方向X上間隔開而配置一對的狀態來構成。並且，支撐部5d是藉由一對板狀構件從下方支撐姿勢變更機構4。更具體而言，姿勢變更機構4的旋繞部4a上設置有可被支撐部5d所引導的滑動用引導輪4c，且支撐部5d是從鉛直方向下側Z2支撐此滑動用引導輪4c。又，滑動部3Sa朝向支撐構件5滑動至橫向方向第一側Y1時，為了使該滑動部3Sa容易地被支撐構件5引導，於支撐部5d的橫向方向第二側Y2之端部上，形成有朝向橫向方向第二側Y2且朝鉛直方向下側Z2傾斜的傾斜部5e。在滑動部3Sa滑動至橫向方向第一側Y1且滑動用引導輪4c被支撐部5d支撐的過程中，該滑動用引導輪4c會在傾斜部5e滾動。在本實施形態中，這樣的支撐構件5是設置在姿勢變更許可區域Tp中。也就是說，在本實施形態中，在執行姿勢變更控制的過程中，是使支撐構件5支撐滑動機構3S。藉此，可以在姿勢變更控制的執行中，減輕因力矩而施加在物品搬送車2及軌道98等的負擔。In the present embodiment, the supporting portion 5d is configured in a state where a pair of plate-shaped members extending in the lateral direction Y are spaced apart in the conveying direction X and arranged in a pair. In addition, the supporting portion 5d supports the posture changing mechanism 4 from below by a pair of plate-shaped members. More specifically, the winding part 4a of the posture changing mechanism 4 is provided with a sliding guide wheel 4c that can be guided by the supporting part 5d, and the supporting part 5d supports the sliding guide wheel 4c from the lower side Z2 in the vertical direction. In addition, when the sliding portion 3Sa slides toward the support member 5 to the first side Y1 in the lateral direction, in order to make the sliding portion 3Sa easily guided by the support member 5, it is formed on the end of the support portion 5d on the second side Y2 in the lateral direction There is an inclined portion 5e that is inclined toward the second side Y2 in the lateral direction and toward the lower side Z2 in the vertical direction. When the sliding part 3Sa slides to the first side Y1 in the lateral direction and the sliding guide wheel 4c is supported by the support part 5d, the sliding guide wheel 4c rolls on the inclined part 5e. In this embodiment, such a support member 5 is provided in the posture change permission area Tp. That is, in the present embodiment, during the execution of the posture change control, the support member 5 is made to support the sliding mechanism 3S. This can reduce the load imposed on the article transport vehicle 2 and the rail 98 due to the moment during the execution of the posture change control.

接著，參照圖6來說明執行姿勢變更控制的順序。 下位控制裝置Hd是藉由以下的順序來執行姿勢變更控制。也就是說，控制滑動用馬達3SM，使往橫向方向第一側Y1的物品W之滑動開始(步驟#10)。之後，根據由滑動量檢測感測器Se2所檢測出的資訊，來判斷物品W是否已到達突出位置P2(步驟#11)。經判斷為物品W並未在規定時間內到達突出位置P2的情況下(步驟#11：否，步驟#19：是)，即中止各種馬達的控制(步驟#20)，並進行錯誤通知(步驟#21)，而結束姿勢變更控制。經判斷為物品W已到達突出位置P2的情況下(步驟#11：是)，控制滑動用馬達3SM以使物品W的滑動停止(步驟#12)。之後，控制旋繞用馬達4M來開始進行物品W的旋繞(步驟#13)。之後，根據由旋繞量檢測感測器Se5所檢測出的資訊，判斷物品W是否成為第二姿勢A2(步驟#14)。經判斷為物品W並未在規定時間內成為第二姿勢A2的情況下(步驟#14：否，步驟#22：是)，即中止各種馬達的控制(步驟#20)，並進行錯誤通知(步驟#21)，而結束姿勢變更控制。經判斷為物品W已成為第二姿勢A2的情況下(步驟#14：是)，控制旋繞用馬達4M以停止物品W的旋繞(步驟#15)。之後，控制滑動用馬達3SM，開始進行往橫向方向第二側Y2的物品W之滑動(步驟#16)。之後，根據由滑動量檢測感測器Se2所檢測出的資訊，來判斷物品W是否已到達退回位置P1(步驟#17)。經判斷為物品W並未在規定時間內到達退回位置P1的情況下(步驟#17：否，步驟#23：是)，即中止各種馬達的控制(步驟#20)，並進行錯誤通知(步驟#21)，而結束姿勢變更控制。經判斷為物品W已到達退回位置P1的情況下(步驟#17：是)，控制滑動用馬達3SM以使物品W的滑動停止(步驟#18)。下位控制裝置Hd是藉由進行以上的順序執行姿勢變更控制。Next, the procedure for executing the posture change control will be described with reference to FIG. 6. The lower control device Hd executes the posture change control by the following procedure. That is, the sliding motor 3SM is controlled to start the sliding of the article W toward the first side Y1 in the lateral direction (step #10). After that, it is determined whether the article W has reached the protruding position P2 based on the information detected by the sliding amount detection sensor Se2 (step #11). When it is determined that the article W has not reached the protruding position P2 within the prescribed time (step #11: No, step #19: Yes), the control of various motors is stopped (step #20), and an error notification is performed (step #20) #21), and the posture change control is ended. When it is determined that the article W has reached the protruding position P2 (step #11: Yes), the sliding motor 3SM is controlled to stop the sliding of the article W (step #12). After that, the winding motor 4M is controlled to start the winding of the article W (step #13). After that, based on the information detected by the winding amount detection sensor Se5, it is determined whether the article W has reached the second posture A2 (step #14). When it is determined that the article W has not reached the second posture A2 within the predetermined time (step #14: No, step #22: Yes), the control of various motors is suspended (step #20), and an error notification is performed ( Step #21), and the posture change control is ended. When it is determined that the article W has reached the second posture A2 (step #14: Yes), the winding motor 4M is controlled to stop the winding of the article W (step #15). After that, the sliding motor 3SM is controlled to start sliding the article W toward the second side Y2 in the lateral direction (step #16). Then, based on the information detected by the sliding amount detection sensor Se2, it is judged whether the article W has reached the retreat position P1 (step #17). When it is determined that the article W has not reached the retreat position P1 within the prescribed time (step #17: No, step #23: Yes), the control of various motors is stopped (step #20), and an error notification is performed (step #20) #21), and the posture change control is ended. When it is determined that the article W has reached the retreat position P1 (step #17: YES), the sliding motor 3SM is controlled to stop the sliding of the article W (step #18). The lower control device Hd executes the posture change control by performing the above sequence.

下位控制裝置Hd從上位控制裝置Hu接收到特定搬送指令的情況下(參照圖5)，即執行作為伴隨姿勢變更控制的物品W之搬送處理的特定搬送處理。姿勢變更控制是在搬送物品W的過程中執行。以下，參照圖7來說明特定搬送處理執行的順序。When the lower control device Hd receives a specific conveyance instruction from the upper control device Hu (refer to FIG. 5), it executes the specific conveyance process as the conveyance process of the article W accompanying the posture change control. The posture change control is executed while the article W is being transported. Hereinafter, the execution sequence of the specific conveyance process will be described with reference to FIG. 7.

下位控制裝置Hd是藉由以下的順序來執行特定搬送處理。也就是說，接收到特定搬送指令後，控制行走用馬達21M來使物品搬送車2往成為搬送起點的搬送對象場所6行走(步驟#30)。之後，控制滑動用馬達3SM、升降用馬達3HM及把持用馬達3GM，來移載已載置於搬送對象場所6的收授部6b的物品W。也就是說，將該被載置的物品W收容至收容部22a(步驟#31)。之後，控制行走用馬達21M來使物品搬送車2朝向成為搬送目的地的搬送對象場所6行走(步驟#32)。之後，根據由速度檢測感測器Se1所檢測出的資訊，來判斷物品搬送車2是否因塞車等原因而停止(步驟#33)。判斷物品搬送車2已停止的情況下(步驟#33：是)，根據由位置檢測感測器Se6所檢測出的資訊，來判斷物品搬送車2的現在位置是否為姿勢變更許可區域Tp(步驟#34)。經判斷為物品搬送車2的現在位置不是姿勢變更許可區域Tp的情況下(步驟#34：否)，針對塞車解除而再次開始行走的物品搬送車2進行步驟#33的處理。經判斷為物品搬送車2的現在位置是姿勢變更許可區域Tp的情況下(步驟#34：是)，執行姿勢變更控制(步驟#35)。執行姿勢變更控制後，控制行走用馬達21M來使物品搬送車2再次朝向成為搬送目的地的搬送對象場所6行走(步驟#36)。The lower control device Hd executes the specific conveyance process in the following procedure. That is, after receiving the specific transport instruction, the traveling motor 21M is controlled to cause the article transport vehicle 2 to travel to the transport target location 6 that is the transport starting point (step #30). After that, the sliding motor 3SM, the raising/lowering motor 3HM, and the gripping motor 3GM are controlled to transfer the article W placed in the receiving section 6b of the transfer target place 6. That is, the placed article W is stored in the storage section 22a (step #31). After that, the traveling motor 21M is controlled to cause the article transport vehicle 2 to travel toward the transport target place 6 that is the transport destination (step #32). After that, based on the information detected by the speed detection sensor Se1, it is determined whether the article transport vehicle 2 has stopped due to a traffic jam or the like (step #33). When it is determined that the article transport vehicle 2 has stopped (step #33: Yes), it is determined whether the current position of the article transport vehicle 2 is the posture change permission area Tp based on the information detected by the position detection sensor Se6 (step #34). When it is determined that the current position of the article transport vehicle 2 is not the posture change permission area Tp (step #34: No), the article transport vehicle 2 whose traffic jam is released and restarts to travel performs the process of step #33. When it is determined that the current position of the article transport vehicle 2 is the posture change permission area Tp (step #34: YES), posture change control is executed (step #35). After the posture change control is executed, the traveling motor 21M is controlled to cause the article transport vehicle 2 to travel toward the transport target place 6 that is the transport destination again (step #36).

在步驟#33的處理中，經判斷為物品搬送車2未停止的情況下(步驟#33：否)，在物品搬送車2的行走中，判斷位置檢測感測器Se6是否讀取到物品搬送車2的現在位置為姿勢變更許可區域Tp的意旨之位置資訊(步驟#37)。如前述，搬送路徑Rt是由複數個位置資訊儲存部區劃為複數個區域。在複數個位置資訊儲存部當中，配置在姿勢變更許可區域Tp的位置資訊儲存部，會儲存有該位置資訊儲存部的配置位置為姿勢變更許可區域Tp之意旨的位置資訊。因此，當物品搬送車2位於姿勢變更許可區域Tp時，是藉由位置檢測感測器Se6讀取配置在姿勢變更許可區域Tp的位置資訊儲存部之位置資訊，藉此下位控制裝置Hd可以判斷物品搬送車2的現在位置位於姿勢變更許可區域Tp。下位控制裝置Hd在經判斷為於物品搬送車2的行走中，位置檢測感測器Se6未讀取到物品搬送車2的現在位置為姿勢變更許可區域Tp之意旨的位置資訊之情況下(步驟#37：否)，進行步驟#33的處理。經判斷為位置檢測感測器Se6已讀取到物品搬送車2的現在位置為姿勢變更許可區域Tp之意旨的資訊之情況下(步驟#37：是)，會判斷物品搬送車2的現在位置之姿勢變更許可區域Tp，是否為存在於成為搬送目的地的搬送對象場所6之前的複數個姿勢變更許可區域Tp當中之最後的姿勢變更許可區域Tp(步驟#38)。經判斷為物品搬送車2的現在位置之姿勢變更許可區域Tp不是最後的姿勢變更許可區域Tp之情況下(步驟#38：否)，進行步驟#33的處理。經判斷為物品搬送車2的現在位置之姿勢變更許可區域Tp是最後的姿勢變更許可區域Tp之情況下(步驟#38：是)，會控制行走用馬達21M來使物品搬送車2停止(步驟#39)。之後，執行姿勢變更控制(步驟#35)。執行姿勢變更控制後，控制行走用馬達21M來使物品搬送車2再次朝向成為搬送目的地的搬送對象場所6行走(步驟#36)。In the process of step #33, if it is determined that the article transport vehicle 2 has not stopped (step #33: No), it is determined whether the article transport is read by the position detection sensor Se6 while the article transport vehicle 2 is traveling The current position of the car 2 is position information for the posture change permission area Tp (step #37). As mentioned above, the transport path Rt is divided into a plurality of areas by a plurality of position information storage units. Among the plurality of position information storage units, the position information storage unit arranged in the posture change permission area Tp stores position information indicating that the arrangement position of the position information storage unit is the posture change permission area Tp. Therefore, when the article transport vehicle 2 is located in the posture change permission area Tp, the position detection sensor Se6 reads the position information of the position information storage section arranged in the posture change permission area Tp, whereby the lower control device Hd can determine The current position of the article transport vehicle 2 is in the posture change permission area Tp. When the lower control device Hd judges that the article transport vehicle 2 is traveling, the position detection sensor Se6 has not read the position information indicating that the current position of the article transport vehicle 2 is the posture change permission area Tp (step #37: No), proceed to the processing of step #33. When it is judged that the position detection sensor Se6 has read the information indicating that the current position of the article transport vehicle 2 is the posture change permission area Tp (step #37: Yes), the present position of the article transport vehicle 2 will be judged Whether the posture change permission area Tp is the last posture change permission area Tp among the plural posture change permission areas Tp existing before the transport target place 6 as the transport destination (step #38). When it is determined that the posture change permission area Tp of the current position of the article transport vehicle 2 is not the last posture change permission area Tp (step #38: No), the process of step #33 is performed. When it is determined that the posture change permission area Tp of the current position of the article transport vehicle 2 is the last posture change permission area Tp (step #38: Yes), the traveling motor 21M is controlled to stop the article transport vehicle 2 (step #39). After that, posture change control is executed (step #35). After the posture change control is executed, the traveling motor 21M is controlled to cause the article transport vehicle 2 to travel toward the transport target place 6 that is the transport destination again (step #36).

使物品搬送車2再次行走後，根據由位置檢測感測器Se6所檢測出的資訊，判斷物品搬送車2是否到達成為搬送目的地之搬送對象場所6(步驟#40)。經判斷為物品搬送車2未到達成為搬送目的地之搬送對象場所6的情況下(步驟#40：否)，重複步驟#40的處理。經判斷為物品搬送車2已到達成為搬送目的地之搬送對象場所6的情況下(步驟#40：是)，控制行走用馬達21M來使物品搬送車2的行走停止(步驟#41)。之後，控制滑動用馬達3SM、升降用馬達3HM及把持用馬達3GM，來移載被收容部22a所收容的物品W。也就是說，將該收容的物品W載置至搬送對象場所6的收授部6b(步驟#42)。下位控制裝置Hd是藉由進行以上的順序，而執行特定搬送處理。After the article transport vehicle 2 travels again, it is determined based on the information detected by the position detection sensor Se6 whether the article transport vehicle 2 has reached the transport target place 6 that is the transport destination (step #40). When it is determined that the article transport vehicle 2 has not reached the transport target location 6 that is the transport destination (step #40: No), the process of step #40 is repeated. When it is determined that the article transport vehicle 2 has reached the transport target place 6 as the transport destination (step #40: YES), the traveling motor 21M is controlled to stop the traveling of the article transport vehicle 2 (step #41). After that, the sliding motor 3SM, the raising/lowering motor 3HM, and the gripping motor 3GM are controlled to transfer the article W contained in the storage portion 22a. That is, the stored article W is placed on the receiving section 6b of the transfer target place 6 (step #42). The lower control device Hd executes the specific transport process by performing the above sequence.

以上，說明了下位控制裝置Hd從上位控制裝置Hu接收特定搬送指令，並執行特定搬送處理的情況。但是，下位控制裝置Hd從上位控制裝置Hu接收到單純搬送指令的情況下(參照圖5)，是執行作為不伴隨姿勢變更控制的搬送處理之單純搬送處理。下位控制裝置Hd執行單純搬送處理時，在執行從圖7的流程圖之步驟#30到步驟#32的處理後，是執行步驟#40到步驟#42的處理。下位控制裝置Hd是藉此執行單純搬送處理。In the above, the case where the lower control device Hd receives the specific transport instruction from the upper control device Hu and executes the specific transport process has been described. However, when the lower control device Hd receives a simple conveyance command from the upper control device Hu (see FIG. 5), the simple conveyance process is executed as a conveyance process not accompanied by posture change control. When the lower control device Hd executes the simple transport process, after executing the process from step #30 to step #32 in the flowchart of FIG. 7, the process from step #40 to step #42 is executed. The lower control device Hd executes the simple conveying process by this.

2.第二實施形態 接著，說明第二實施形態之物品搬送設備1。在第二實施形態中，僅有姿勢變更控制的順序與第一實施形態不同。以下，是以和第一實施形態不同之點為中心來說明。關於未特別說明的點，與第一實施形態是同樣的。2. Second embodiment Next, the article conveying equipment 1 of the second embodiment will be described. In the second embodiment, only the sequence of posture change control is different from the first embodiment. The following description focuses on the differences from the first embodiment. Regarding points that are not particularly explained, they are the same as in the first embodiment.

如圖8所示，下位控制裝置Hd是在物品W位於收容部22a的外側中的不與罩蓋部22b相干涉的範圍內，且藉移載機構3進行之物品W的移動中，執行姿勢變更控制。在第二實施形態中，下位控制裝置Hd是在物品W在收容部22a的外側中的不與罩蓋部22b的內側面22f相干涉的範圍內，且藉滑動機構3S進行之物品W的沿著橫向方向Y的移動中，執行姿勢變更控制。更具體而言，如圖8所示，從物品W被收容於收容部22a的狀態，藉由滑動機構3S使物品W往橫向方向第一側Y1滑動，在將物品W配置到突出位置P2之前，在物品W的角Wc與內側面22f不相干涉的範圍內藉由姿勢變更機構4來開始物品W的旋繞。並且，使藉由姿勢變更機構4進行之物品W的旋繞持續進行的狀態下原樣藉由滑動機構3S使已配置到突出位置P2的物品W往橫向方向第二側Y2滑動，以使物品W配置到退回位置P1(收容部22a)。至少在藉由滑動機構3S使物品W往橫向方向第二側Y2滑動的途中，使物品W往第二姿勢A2的姿勢變更完成。藉此，可以縮短姿勢變更控制所需要的時間。在此，姿勢變更控制的時間越短越好。在第二實施形態中，下位控制裝置Hd是將姿勢變更機構4(旋繞用馬達4M)及滑動機構3S(滑動用馬達3SM)控制成為了使藉由姿勢變更機構4將物品W從第一姿勢A1變更成第二姿勢A2而使該物品W旋繞的時間、及藉由滑動機構3S使物品W從收容部22a突出並再次收容至收容部22a的時間之差變短。詳細而言，在使物品W朝橫向方向第一側Y1滑動的過程中，不能在物品W位於與罩蓋部22b不相干涉的非干涉位置以前，開始物品W的旋繞。因此，下位控制裝置Hd是將姿勢變更機構4(旋繞用馬達4M)及滑動機構3S(滑動用馬達3SM)控制成於使物品W從收容部22a突出並再次收容至收容部22a的過程中的物品W位於與罩蓋部22b不相干涉的範圍內之時間，變得與使物品W旋繞的時間大約相同。藉此，可以更加縮短姿勢變更控制所需要的時間。As shown in FIG. 8, the lower control device Hd executes the posture when the article W is located outside the accommodating portion 22a in a range that does not interfere with the cover portion 22b, and the article W is moved by the transfer mechanism 3 Change control. In the second embodiment, the lower control device Hd is performed by the sliding mechanism 3S within the range where the article W does not interfere with the inner surface 22f of the cover portion 22b in the outer side of the storage portion 22a. While moving in the lateral direction Y, posture change control is executed. More specifically, as shown in FIG. 8, from the state in which the article W is housed in the accommodating portion 22a, the article W is slid to the first side Y1 in the lateral direction by the sliding mechanism 3S, before the article W is arranged at the protruding position P2 , Within a range where the corner Wc of the article W does not interfere with the inner surface 22f, the posture changing mechanism 4 starts the winding of the article W. In addition, the sliding mechanism 3S slides the article W arranged at the protruding position P2 to the second side Y2 in the lateral direction by the sliding mechanism 3S in a state in which the winding of the article W by the posture changing mechanism 4 continues, so that the article W is arranged To the retreat position P1 (accommodating part 22a). At least while sliding the article W to the second side Y2 in the lateral direction by the sliding mechanism 3S, the posture change of the article W to the second posture A2 is completed. This can shorten the time required for posture change control. Here, the shorter the time for posture change control, the better. In the second embodiment, the lower control device Hd controls the posture changing mechanism 4 (rotating motor 4M) and the sliding mechanism 3S (sliding motor 3SM) so that the article W is moved from the first posture by the posture changing mechanism 4 The difference between the time when A1 is changed to the second posture A2 to rotate the article W and the time when the article W is protruded from the storage portion 22a by the sliding mechanism 3S and is again stored in the storage portion 22a is shortened. In detail, in the process of sliding the article W toward the first side Y1 in the lateral direction, it is not possible to start the winding of the article W before the article W is located at a non-interference position that does not interfere with the cover portion 22b. Therefore, the lower control device Hd controls the posture changing mechanism 4 (rotating motor 4M) and the sliding mechanism 3S (sliding motor 3SM) so that the article W is protruded from the accommodating portion 22a and is stored in the accommodating portion 22a again. The time when the article W is within a range that does not interfere with the cover portion 22b becomes approximately the same as the time when the article W is circulated. This can further shorten the time required for posture change control.

接著，參照圖9來說明第二實施形態之姿勢變更控制的順序。再者，在以下的說明中，是將下列動作稱為來回滑動：使物品W從收容在收容部22a的狀態往橫向方向第一側Y1滑動後，使該物品W往橫向方向第二側Y2滑動，並使該物品W收容至收容部22a為止之一連串的的動作。在第二實施形態之姿勢變更控制中，在來回滑動的開始到結束為止之期間，是在物品W位於與罩蓋部22b不相干涉的範圍內之期間內，將該物品W的姿勢從第一姿勢A1變更為第二姿勢A2。Next, the procedure of posture change control in the second embodiment will be described with reference to FIG. 9. Furthermore, in the following description, the following actions are referred to as sliding back and forth: the article W is slid to the first side Y1 in the lateral direction from the state housed in the receiving portion 22a, and then the article W is moved to the second side Y2 in the lateral direction. A series of operations of sliding and storing the article W to the storage portion 22a. In the posture change control of the second embodiment, during the period from the start to the end of the back-and-forth sliding, the posture of the article W is changed from the first to the first while the article W is within a range that does not interfere with the cover portion 22b. The one posture A1 is changed to the second posture A2.

下位控制裝置Hd是藉由以下的順序來執行第二實施形態的姿勢變更控制。 也就是說，是藉由一邊根據滑動量檢測感測器Se2的資訊來掌握物品W的橫向方向Y上的位置，一邊控制滑動用馬達3SM，來開始進行物品W的來回滑動(步驟#50)。之後，根據由滑動量檢測感測器Se2檢測的資訊，來判斷中間姿勢Am的物品W是否位於非干涉位置(步驟#51)。在此，非干涉位置會因物品W的大小及形狀、物品W的旋繞量及物品W的滑動量之組合，而有各種位置。在第二實施形態中，下位控制裝置Hd是事先儲存有各種模式(pattern)中的複數個非干涉位置的資訊。在第二實施形態中，下位控制裝置Hd是根據此事先儲存的資訊，來判斷物品W是否位於非干涉位置。經判斷為物品W並未在規定時間內到非干涉位置的情況下，也就是說，經判斷為中間姿勢Am的物品W是在與罩蓋部22b相干涉的位置之情況下(步驟#51：否，步驟#56：是)，即中止各種馬達的控制(步驟#57)，並進行錯誤通知(步驟#58)，而結束姿勢變更控制。經判斷為物品W位於非干涉位置的情況下(步驟#51：是)，控制旋繞用馬達4M來開始進行物品W的旋繞(步驟#52)。之後，根據由旋繞量檢測感測器Se5檢測的資訊，來判斷物品W是否成為第二姿勢A2(步驟#53)。經判斷為物品W並未在規定時間內成為第二姿勢A2的情況下(步驟#53：否，步驟#59：是)，即中止各種馬達的控制(步驟#57)，並進行錯誤通知(步驟#58)，而結束姿勢變更控制。經判斷為物品W已成為第二姿勢A2的情況下(步驟#53：是)，控制旋繞用馬達4M以停止物品W的旋繞(步驟#54)。之後，使物品W的來回滑動結束(步驟#55)。位控制裝置Hd是藉由以上的順序，下執行第二實施形態的姿勢變更控制。The lower control device Hd executes the posture change control of the second embodiment by the following procedure. That is to say, by grasping the position of the article W in the lateral direction Y based on the information of the sliding amount detection sensor Se2, while controlling the sliding motor 3SM, the article W starts to slide back and forth (step #50) . After that, based on the information detected by the sliding amount detection sensor Se2, it is determined whether the article W in the intermediate posture Am is located at the non-interference position (step #51). Here, the non-interference position may have various positions depending on the combination of the size and shape of the article W, the amount of winding of the article W, and the amount of sliding of the article W. In the second embodiment, the lower control device Hd stores in advance information on a plurality of non-interference positions in various patterns. In the second embodiment, the lower-level control device Hd determines whether the article W is located in a non-interference position based on the information stored in advance. When it is determined that the article W has not reached the non-interference position within the predetermined time, that is, when the article W in the intermediate posture Am is determined to be in a position that interferes with the cover portion 22b (step #51 : No, Step #56: Yes), that is, the control of various motors is suspended (Step #57), an error notification is made (Step #58), and the posture change control is ended. When it is determined that the article W is at the non-interference position (step #51: Yes), the winding motor 4M is controlled to start the winding of the article W (step #52). After that, it is determined whether or not the article W is in the second posture A2 based on the information detected by the winding amount detection sensor Se5 (step #53). When it is determined that the article W has not reached the second posture A2 within the predetermined time (step #53: No, step #59: Yes), the control of various motors is suspended (step #57), and an error notification is made ( Step #58), and the posture change control is ended. When it is determined that the article W has reached the second posture A2 (step #53: Yes), the winding motor 4M is controlled to stop the winding of the article W (step #54). After that, the back and forth sliding of the article W is ended (step #55). The position control device Hd executes the posture change control of the second embodiment according to the above procedure.

3.其他的實施形態 接著，針對物品搬送設備的其他實施形態進行說明。3. Other embodiments Next, other embodiments of the article conveying equipment will be described.

(1)在上述之實施形態中，是針對以下的例子進行了說明：姿勢變更許可區域Tp是設定在移動路徑R中的步驟內路徑Ri與步驟間路徑Rc的連接區域Tc。但是，物品搬送設備1並不限定於這樣的構成。也就是說，如圖1所示，亦可在移動路徑R內，另外設置物品搬送車2退避的退避路徑Re，且將姿勢變更許可區域Tp設定在退避路徑Re。藉此，可以在物品搬送車2執行姿勢變更控制時，大幅地抑制對行走在移動路徑R內的退避路徑Re以外的路徑之其他物品搬送車2的行走所造成的影響。(1) In the above-mentioned embodiment, the following example was explained: the posture change permission area Tp is the connection area Tc between the intra-step route Ri and the inter-step route Rc set in the movement route R. However, the article transport facility 1 is not limited to such a configuration. That is, as shown in FIG. 1, in the movement path R, an evacuation path Re for the article transport vehicle 2 to retract may be separately provided, and the posture change permission area Tp may be set in the evacuation path Re. Thereby, when the article transport vehicle 2 executes the posture change control, it is possible to greatly suppress the influence on the traveling of other article transport vehicles 2 that travel on the path other than the retreat path Re in the movement path R.

(2)在上述之實施形態中，是針對以下的例子進行了說明：將支撐構件5設置在姿勢變更許可區域Tp，且在下位控制裝置Hd執行姿勢變更控制的過程中，使支撐構件5支撐滑動機構3S。但是，物品搬送設備1並不限定於這樣的構成。也就是說，亦可不在姿勢變更許可區域Tp設置支撐構件5，且下位控制裝置Hd亦可在沒有支撐構件5的區域中執行姿勢變更控制。(2) In the above-mentioned embodiment, the following example is described: the support member 5 is set in the posture change permission area Tp, and the support member 5 is supported while the lower control device Hd performs posture change control Sliding mechanism 3S. However, the article transport facility 1 is not limited to such a configuration. That is, the support member 5 may not be provided in the posture change permission area Tp, and the lower control device Hd may perform posture change control in an area where the support member 5 is not provided.

(3)在上述之實施形態中，是針對以下的例子進行了說明：下位控制裝置Hd是在搬送路徑Rt的途中之物品搬送車2的塞車停止中執行姿勢變更控制。但是，物品搬送設備1並不限定於這樣的構成。也就是說，將上位控制裝置Hu或下位控制裝置Hd構成為可辨識搬送路徑Rt的塞車，並在經判斷為搬送路徑Rt為塞車中的情況下，於使物品搬送車2移動到最近的姿勢變更許可區域Tp之後執行姿勢變更控制亦可。(3) In the above-mentioned embodiment, the following example was explained: the lower control device Hd executes the posture change control during the stop of the article transport vehicle 2 on the way of the transport path Rt. However, the article transport facility 1 is not limited to such a configuration. That is, the upper control device Hu or the lower control device Hd is configured to recognize the traffic jam of the conveyance path Rt, and when it is determined that the conveyance path Rt is in the traffic jam, the article conveying vehicle 2 is moved to the nearest posture. The posture change control may be executed after changing the permission area Tp.

(4)在上述之實施形態中，是針對以下的例子進行了說明：下位控制裝置Hd是在搬送路徑Rt的途中之物品搬送車2的停止中執行姿勢變更控制。但是，物品搬送設備1並不限定於這樣的構成。也就是說，下位控制裝置Hd也可以是在物品搬送車2於姿勢變更許可區域Tp內行走的過程中執行姿勢變更控制。在此情況下，為了安全地執行姿勢變更控制，宜設成使物品搬送車2以低速行走。(4) In the above-mentioned embodiment, the following example was described: the lower control device Hd executes the posture change control while the article transport vehicle 2 is stopped on the way of the transport path Rt. However, the article transport facility 1 is not limited to such a configuration. In other words, the lower control device Hd may execute the posture change control while the article transport vehicle 2 is traveling in the posture change permission area Tp. In this case, in order to safely perform the posture change control, it is desirable to set the article transport vehicle 2 to travel at a low speed.

(5)在上述之實施形態中，是針對以下的例子進行了說明：藉由沿著鉛直方向Z的旋繞軸4b之旋轉，將物品W的姿勢從第一姿勢A1變更為第二姿勢A2。也就是說，在上述之實施形態中，是在水平面內以2維的形式使物品W的姿勢變更。但是，物品搬送設備1並不限定於這樣的構成。也就是說，依據搬送目的地的態樣，以3維的形式來使物品W的姿勢變更亦可。例如，相對於在搬送起點上物品W的開口部Wb為朝向水平方向的狀態，必須在搬送目的地上將物品W的開口部Wb設為朝向鉛直方向Z、或鉛直斜方向的狀態之情況下，也可以使物品W繞著鉛直軸及水平軸旋繞，藉此來使物品W的姿勢變更。(5) In the above-mentioned embodiment, the following example is described: the posture of the article W is changed from the first posture A1 to the second posture A2 by the rotation of the winding axis 4b in the vertical direction Z. That is, in the above-mentioned embodiment, the posture of the article W is changed in a two-dimensional form in the horizontal plane. However, the article transport facility 1 is not limited to such a configuration. That is, depending on the aspect of the conveyance destination, the posture of the article W may be changed in a three-dimensional form. For example, when the opening Wb of the article W at the starting point of the conveyance is oriented in the horizontal direction, the opening Wb of the article W must be oriented in the vertical direction Z or the vertical oblique direction at the conveying destination. The article W may be revolved around a vertical axis and a horizontal axis, thereby changing the posture of the article W.

(6)在上述之實施形態中，作為使把持部3Ga橫向移動的橫向移動機構，是以使把持部3Ga滑動的滑動機構3S來例示說明。但是，物品搬送設備1並不限定於這樣的構成。也就是說，作為橫向移動機構3S，也可以是具有支臂的連桿機構等，且也可以藉由該支臂來使把持部3Ga橫向移動。(6) In the above-mentioned embodiment, the sliding mechanism 3S that slides the grip 3Ga is exemplified as the lateral movement mechanism for laterally moving the grip 3Ga. However, the article transport facility 1 is not limited to such a configuration. That is, as the lateral movement mechanism 3S, a link mechanism or the like having an arm may be used, and the grip portion 3Ga may be moved laterally by the arm.

(7)在上述之實施形態中，是針對以下的例子進行了說明：將把持物品W的凸緣部Wa之把持機構3G作為移載機構3的一部分來構成。但是，物品搬送設備1並不限定於這樣的構成。也就是說，亦可將從下方支撐物品W的叉機構作為移載機構的一部分來構成。在此情況下，較佳是在叉機構從下方支撐物品W的狀態下，藉由姿勢變更機構來使該叉機構旋繞。(7) In the above-mentioned embodiment, the following example is described in which the gripping mechanism 3G that grips the flange portion Wa of the article W is configured as a part of the transfer mechanism 3. However, the article transport facility 1 is not limited to such a configuration. In other words, a fork mechanism that supports the article W from below may be configured as a part of the transfer mechanism. In this case, it is preferable to rotate the fork mechanism by the posture changing mechanism in a state where the fork mechanism supports the article W from below.

(8)在上述之實施形態中，是針對以下的例子進行了說明：為了將物品W的姿勢從第一姿勢A1變更到第二姿勢A2而執行姿勢變更控制的過程中，是藉由滑動機構3S來使物品W移動到收容部22a的外側。但是，物品搬送設備1並不限定於像這樣的構成。也就是說，也可以藉由升降機構3H使物品W下降，藉此使該物品W移動到收容部22a的外側。在此狀態下藉由姿勢變更機構4使物品W旋繞，藉此進行該物品W的姿勢變更。在此情況下，也可以不設置滑動機構3S，且也可以不設置支撐滑動機構3S的支撐構件5。也就是說，較理想的是，移載機構3具備把持物品W的把持部3Ga、以及使把持部3Ga沿著鉛直方向Z升降的升降機構3H，而姿勢變更機構4具備繞著沿著鉛直方向Z的旋繞軸使把持部3Ga旋繞的旋繞部4a，在第一姿勢A1與第二姿勢A2之間的姿勢變更是藉由繞著旋繞軸的物品W之旋繞來進行，姿勢變更控制是在藉由升降機構3H使把持部3Ga下降成使物品W相對於收容部22a位於外側的狀態下，使物品W繞著旋繞軸旋繞來進行。(8) In the above-mentioned embodiment, the following example is explained: in order to change the posture of the article W from the first posture A1 to the second posture A2, the process of performing posture change control is performed by the sliding mechanism 3S to move the article W to the outside of the storage portion 22a. However, the article transport facility 1 is not limited to such a configuration. That is, the article W may be lowered by the lifting mechanism 3H, thereby moving the article W to the outside of the storage portion 22a. In this state, the article W is rotated by the posture changing mechanism 4, whereby the posture of the article W is changed. In this case, the sliding mechanism 3S may not be provided, and the supporting member 5 that supports the sliding mechanism 3S may not be provided. In other words, it is preferable that the transfer mechanism 3 includes a gripping portion 3Ga for grasping the article W, and an elevating mechanism 3H that lifts the gripping portion 3Ga in the vertical direction Z, and the posture changing mechanism 4 includes The winding axis of Z turns the gripping part 3Ga around the winding part 4a. The posture change between the first posture A1 and the second posture A2 is performed by the revolving article W around the reel axis, and the posture change control is performed by The gripping portion 3Ga is lowered by the lifting mechanism 3H so that the article W is positioned outside with respect to the accommodating portion 22a, and the article W is wound around the winding shaft.

(9)再者，在前述之各實施形態所揭示的構成，只要沒有發生矛盾，也可與其他的實施形態所揭示的構成組合而應用。關於其他的構成，在本說明書中所揭示的實施形態在全部之點上均只不過是例示。因此，在不脫離本發明的主旨之範圍內，可進行適當的、各種的改變。(9) Furthermore, the configurations disclosed in the foregoing embodiments can be combined with the configurations disclosed in other embodiments as long as there is no contradiction. Regarding other configurations, the embodiments disclosed in this specification are merely illustrative in all points. Therefore, appropriate and various changes can be made without departing from the spirit of the present invention.

4.上述實施形態之概要 以下，針對在上述所說明之物品搬送設備的概要進行說明。4. Outline of the above-mentioned embodiment The outline of the article conveying equipment described above will be described below.

一種物品搬送設備，具備有在複數個搬送對象場所之間沿著移動路徑移動來搬送物品的物品搬送車、及控制該物品搬送車的控制裝置；前述物品搬送車具有收容前述物品的收容部、覆蓋該收容部的罩蓋部、在前述收容部與相對於該收容部而位於外側之前述複數個搬送對象場所的一個之間，使前述物品移動而進行該搬送對象場所與前述物品搬送車之間的前述物品之移載的移載機構、及變更搬送中的前述物品之姿勢的姿勢變更機構， 前述姿勢變更機構可以將前述物品的姿勢變更為第一姿勢及第二姿勢，該第一姿勢是在成為搬送起點之前述搬送對象場所的移載用之姿勢，該第二姿勢是在成為搬送目的地之前述搬送對象場所的移載用之姿勢， 前述罩蓋部是設置在下述位置：當收容在前述收容部的狀態之前述物品為前述第一姿勢的情況及為前述第二姿勢的情況下，與前述物品不相干涉，當前述物品的姿勢為在前述第一姿勢與前述第二姿勢之間進行變更的過程之姿勢的中間姿勢的情況下，會與前述物品相干涉， 前述控制裝置會執行姿勢變更控制，該姿勢變更控制是下述之控制：在從前述搬送起點到前述搬送目的地之路徑的搬送路徑之途中，藉由前述移載機構使前述物品相對於前述收容部移動到外側的狀態下，藉由前述姿勢變更機構將前述物品從前述第一姿勢變更到前述第二姿勢之後，藉由前述移載機構將前述物品收容到前述收容部。An article conveying facility is provided with an article conveying vehicle that moves along a moving path between a plurality of conveying target locations to convey articles, and a control device that controls the article conveying vehicle; the article conveying vehicle has a storage unit for storing the articles, The cover part covering the accommodating part moves the article between the accommodating part and one of the plurality of transfer target locations located outside of the accommodating part to perform the transfer between the transfer target location and the article transfer vehicle A transfer mechanism for transferring the article between the two and a posture changing mechanism for changing the posture of the article being transported. The posture changing mechanism can change the posture of the article to a first posture and a second posture. The first posture It is the posture for transfer at the transfer target location which is the starting point of the transfer, the second posture is the transfer posture for the transfer target location at the transfer destination, and the cover part is set in the following position: When the article stored in the storage portion is in the first posture and in the second posture, it does not interfere with the article, and when the posture of the article is in the first posture and the second posture In the case of the intermediate posture during the process of changing the posture, it will interfere with the aforementioned article, and the aforementioned control device will execute posture change control. The posture change control is the following control: from the aforementioned starting point to the aforementioned conveying destination During the conveyance path of the path of the ground, the article is moved to the outside with respect to the storage section by the transfer mechanism, and the article is changed from the first posture to the second posture by the posture changing mechanism After that, the article is stored in the storage portion by the transfer mechanism.

在本構成中，覆蓋收容部的罩蓋部是設置在下述位置：在收容部中收容有第一姿勢或第二姿勢的物品的狀態下，與該物品不相干涉的位置。另一方面，此罩蓋部所設置的位置，在已被收容部收容的狀態之物品成為中間姿勢的情況下，是成為與該物品相干涉的位置。也就是說，覆蓋收容部的罩蓋部與物品之間隙是設定得比較小。因此，根據本構成之物品搬送設備，可以抑制物品搬送車的大型化。又，在本構成中，物品搬送車在從搬送起點到搬送目的地的路徑之搬送路徑的途中，是在藉由移載機構使物品相對於收容部移動到外側的狀態下，藉由姿勢變更機構來將物品的姿勢從第一姿勢變更到第二姿勢。從而，根據本構成，可以有效地利用用於物品搬送的時間及空間來進行物品的姿勢變更。因此，相較於與物品搬送車分開另行設置姿勢變更機構的情況，會變得較容易謀求設備的小型化及低成本化。In this structure, the cover part which covers the storage part is provided in the position which does not interfere with the article of the 1st posture or the 2nd posture in the state which accommodated the article in the storage part. On the other hand, the position where the cover part is provided is a position that interferes with the article when the article in the state contained in the storage part is in the intermediate posture. In other words, the gap between the cover part covering the storage part and the article is set to be relatively small. Therefore, according to the article transport equipment of this structure, it is possible to suppress the enlargement of the article transport vehicle. In addition, in this configuration, the article transport vehicle is on the way from the transfer starting point to the transfer destination while the article is moved to the outside with respect to the storage section by the transfer mechanism, and the posture is changed. Mechanism to change the posture of the article from the first posture to the second posture. Therefore, according to the present structure, the time and space for the article transportation can be effectively used to change the posture of the article. Therefore, compared to the case where a posture changing mechanism is separately provided from the article transport vehicle, it becomes easier to achieve downsizing and cost reduction of the equipment.

又，較理想的是，前述移載機構具備把持前述物品的把持部、使前述把持部沿著鉛直方向升降的升降機構、及沿著交叉於前述搬送路徑並且為沿著水平方向之方向的橫向方向使前述把持部橫向移動的橫向移動機構，前述姿勢變更機構具備使前述把持部繞著沿前述鉛直方向的旋繞軸而旋繞的旋繞部，且在前述第一姿勢與第二姿勢之間的姿勢變更是藉由繞著前述旋繞軸之前述物品的旋繞來進行，前述姿勢變更控制是藉由下述方式來進行：在藉由前述橫向移動機構使前述把持部橫向移動成使前述物品相對於前述收容部位於外側的狀態下，使前述物品繞著前述旋繞軸旋繞。Furthermore, it is preferable that the transfer mechanism includes a grip portion for gripping the article, an elevating mechanism that raises and lowers the grip portion in a vertical direction, and a lateral direction that crosses the conveyance path and is along the horizontal direction. A lateral movement mechanism that moves the grip portion laterally in a direction, the posture changing mechanism includes a winding portion that revolves the grip portion around a winding axis along the vertical direction, and a posture between the first posture and the second posture The change is carried out by winding the article around the winding shaft, and the posture change control is carried out by the following method: the gripping portion is moved laterally by the lateral movement mechanism to make the article relative to the In a state where the accommodating part is located outside, the article is wound around the winding shaft.

根據本構成，可以調整物品的鉛直方向及橫向方向的位置與繞著旋繞軸的角度來朝搬送目的地進行移載。又，利用該種調整用的機構，可以在搬送路徑的途中，於相對於收容部使物品移動到外側，以和罩蓋部不相干涉的狀態下，將物品的姿勢從第一姿勢變更成第二姿勢。According to this configuration, it is possible to adjust the position of the article in the vertical direction and the lateral direction and the angle around the revolving shaft to transfer to the transfer destination. In addition, with this kind of adjustment mechanism, it is possible to change the posture of the article from the first posture to the first posture without interfering with the cover portion while moving the article to the outside relative to the accommodating part in the middle of the conveying path. The second posture.

又，較理想的是，除了上述的構成以外，前述移動路徑是由天花板懸吊支撐的軌道所決定，且前述移載機構更具備被前述軌道或前述天花板支撐並且配置在鄰接於前述移動路徑的位置之支撐構件，前述支撐構件是設置成在使前述把持部橫向移動成使前述物品相對於前述收容部位於外側的狀態下，在前述鉛直方向上支撐前述橫向移動機構。Furthermore, it is preferable that, in addition to the above-mentioned configuration, the moving path is determined by a track supported by a ceiling suspension, and the transfer mechanism is further provided with a support supported by the track or the ceiling and arranged adjacent to the moving path. The support member for the position, the support member is provided to support the lateral movement mechanism in the vertical direction in a state where the grip portion is moved laterally so that the article is located outside of the storage portion.

若藉由移載機構使把持部橫向移動成使把持有物品的狀態之該把持部相對於收容部位於外側時，會有以物品搬送車為中心的力矩與把持部所橫向移動的距離成比例變大，而對物品搬送車及軌道等造成負擔的情況。在本構成中，在使把持部橫向移動成使物品相對於收容部位於外側的狀態下，是使支撐構件在鉛直方向上支撐橫向移動機構。也就是說，支撐構件可以透過橫向移動機構間接地支撐把持部及其所把持的物品，其結果，可以減輕施加在物品搬送車及軌道等的負擔。If the holding part is moved laterally by the transfer mechanism so that the holding part in the state of holding the article is located outside with respect to the accommodating part, there will be a moment centered on the article transport vehicle and the distance the holding part moves laterally. When the ratio becomes larger, it will impose a burden on transport vehicles and rails. In this structure, the support member is made to support the lateral movement mechanism in the vertical direction in a state in which the grip portion is moved laterally so that the article is located outside of the storage portion. In other words, the support member can indirectly support the gripping portion and the article held by the lateral movement mechanism, and as a result, the burden imposed on the article transport vehicle, rail, etc. can be reduced.

又，較理想的是，前述控制裝置是在前述搬送路徑的途中之前述物品搬送車的停止中，執行前述姿勢變更控制。Furthermore, it is preferable that the control device executes the posture change control while the article transport vehicle is stopped in the middle of the transport path.

根據本構成，可以在物品搬送車停止中的已安定之狀態下，執行姿勢變更控制。 又，由於在物品搬送車的移動中不會有使物品相對於收容部移動到外側之情形，因此可以抑制相對於收容部位於外側之該物品與存在於移動路徑的周圍之其他構件相干涉的情況。According to this structure, the posture change control can be executed in a stable state while the article transport vehicle is stopped. In addition, since the article does not move to the outside with respect to the accommodating part during the movement of the article transport vehicle, it is possible to prevent the article located outside the accommodating part from interfering with other members existing around the moving path Happening.

又，較理想的是，前述控制裝置是在前述物品位於前述收容部的外側中的與前述罩蓋部不相干涉的範圍內、且藉由前述移載機構進行之前述物品的移動中，執行前述姿勢變更控制。Furthermore, it is more desirable that the control device executes the movement of the article by the transfer mechanism within a range where the article is located outside of the storage portion and does not interfere with the cover portion. The aforementioned posture change control.

根據本構成，由於是在藉由移載機構進行之在收容部的內側與外側之間的物品的移動中，執行姿勢變更控制，因此相較於將由移載機構進行之物品的移動與姿勢變更各別進行的情況，可以縮短姿勢變更控制所需要的時間。此外，由於像這樣的姿勢變更控制，是在物品位於收容部的外側中的與罩蓋部不相干涉的範圍內進行，因此也可以抑制物品與罩蓋部相干涉的情形。According to this structure, since the posture change control is performed during the movement of the article between the inner and outer sides of the accommodating portion by the transfer mechanism, it is compared with the movement and posture change of the article by the transfer mechanism Individually, the time required for posture change control can be shortened. In addition, since such posture change control is performed within a range where the article is located outside the storage portion and does not interfere with the cover portion, it is also possible to suppress interference between the article and the cover portion.

又，較理想的是，將藉由前述移載機構使前述物品相對於前述收容部橫向移動到外側的狀態下，前述移載機構及前述物品不會與存在於前述搬送路徑的周圍之其他構件相干涉的前述搬送路徑的區域，設定為姿勢變更許可區域，前述控制裝置是在前述物品搬送車位於前述姿勢變更許可區域內的情況下，執行前述姿勢變更控制。In addition, it is preferable that the transfer mechanism and the article do not interact with other members existing around the conveying path in a state where the article is moved laterally to the outside relative to the receiving portion by the transfer mechanism. The area of the transport path that interferes is set as a posture change permission area, and the control device executes the posture change control when the article transport vehicle is in the posture change permission area.

根據本構成，由於是在移載機構及物品不會與存在於搬送路徑的周圍之其他構件相干涉的區域之姿勢變更許可區域中有物品搬送車時執行姿勢變更控制，因此可以抑制在姿勢變更控制的執行中移載機構及物品會與存在於搬送路徑的周圍之其他構件相干涉的情形。According to this structure, the posture change control is executed when there is an article transport vehicle in the posture change permission area of the area where the transfer mechanism and the articles do not interfere with other members existing around the conveying path, so posture change can be suppressed During the execution of the control, the transfer mechanism and the articles may interfere with other members existing around the transfer path.

又，較理想的是，前述物品是用來收納半導體基板的容器，且在前述搬送對象場所中包含收授部，該收授部是用於在處理裝置與前述物品搬送車之間的前述物品之接收授與，前述處理裝置是用來進行對前述半導體基板的處理，複數個前述收授部是以步驟內路徑來連結，並且複數個步驟內路徑是以步驟間路徑來連結，前述姿勢變更許可區域是設定在前述移動路徑中的前述步驟內路徑與前述步驟間路徑之間的連接區域。Furthermore, it is preferable that the article is a container for storing semiconductor substrates, and the transfer target place includes an accepting unit for the article between the processing device and the article transport vehicle For receiving and granting, the processing device is used to process the semiconductor substrate, a plurality of the receiving and transferring parts are connected by intra-step paths, and a plurality of intra-step paths are connected by inter-step paths, and the aforementioned posture is changed The permitted area is a connection area between the path within the steps and the path between the steps set in the movement path.

在具備這樣的步驟內路徑及步驟間路徑的設備中，為了在步驟內路徑與步驟間路徑的每一個上，搬送以各處理裝置進行的處理的半導體基板，會有比較多的物品搬送車在行走。相對於此，在步驟內路徑與步驟間路徑之間的連接區域中，物品搬送車的數量會比較少。在本構成中，由於是將此連接區域設定為姿勢變更許可區域，因此可以抑制特定的物品搬送車之姿勢變更控制對其他的物品搬送車的行走造成影響之情形。從而，可以抑制物品搬送設備之整體的搬送效率的降低。 産業上之可利用性In equipment with such intra-step paths and inter-step paths, in order to transport the semiconductor substrates processed by each processing device on each of the intra-step path and the inter-step path, there will be a relatively large number of article transport vehicles. walk. In contrast, in the connection area between the intra-step path and the inter-step path, the number of article transport vehicles is relatively small. In this configuration, since this connection area is set as a posture change permission area, it is possible to suppress the influence of the posture change control of a specific article transport vehicle on the traveling of other article transport vehicles. Therefore, it is possible to suppress a decrease in the conveying efficiency of the entire article conveying facility. Industrial availability

本揭示的技術可以利用在具備有在複數個搬送對象場所之間沿著移動路徑移動來搬送物品之物品搬送車的物品搬送設備上。The technology of the present disclosure can be used in article transport equipment provided with article transport vehicles that move along a movement path between a plurality of transport target locations to transport articles.

1‧‧‧物品搬送設備2‧‧‧物品搬送車3‧‧‧移載機構3G‧‧‧把持機構3Ga‧‧‧把持部3Gb‧‧‧把持爪3GM‧‧‧把持用馬達3H‧‧‧升降機構3Ha‧‧‧升降部3Hb‧‧‧升降用皮帶3Hc‧‧‧升降用皮帶輪3Hd‧‧‧升降用鼓輪3HM‧‧‧升降用馬達3S‧‧‧橫向移動機構(滑動機構)3Sa‧‧‧滑動部3Sb‧‧‧滑動用皮帶3Sc‧‧‧滑動用皮帶輪3SM‧‧‧滑動用馬達4‧‧‧姿勢變更機構4a‧‧‧旋繞部4b‧‧‧旋繞軸4c‧‧‧滑動用引導輪4M‧‧‧旋繞用馬達5‧‧‧支撐構件5a‧‧‧天花板連結部5b‧‧‧軌道連結部5c‧‧‧框架部5d‧‧‧支撐部5e‧‧‧傾斜部6‧‧‧搬送對象場所6a‧‧‧處理裝置6b‧‧‧收授部21‧‧‧行走部21a‧‧‧行走輪21b‧‧‧引導輪21M‧‧‧行走用馬達22‧‧‧本體部22a‧‧‧收容部22b‧‧‧罩蓋部22f‧‧‧內側面98‧‧‧軌道99‧‧‧天花板A1‧‧‧第一姿勢A2‧‧‧第二姿勢Am‧‧‧中間姿勢H‧‧‧控制裝置Hd‧‧‧下位控制裝置Hu‧‧‧上位控制裝置Ja‧‧‧適當姿勢資訊P1‧‧‧退回位置P2‧‧‧突出位置R‧‧‧移動路徑Rc‧‧‧步驟間路徑Re‧‧‧退避路徑Ri‧‧‧步驟內路徑Rt‧‧‧搬送路徑Se1‧‧‧速度檢測感測器Se2‧‧‧滑動量檢測感測器Se3‧‧‧升降量檢測感測器Se4‧‧‧把持檢測感測器Se5‧‧‧旋繞量檢測感測器Se6‧‧‧位置檢測感測器Tc‧‧‧連接區域Tp‧‧‧姿勢變更許可區域TR‧‧‧旋繞軌跡W‧‧‧物品Wa‧‧‧凸緣部Wb‧‧‧開口部Wc‧‧‧角X‧‧‧搬送方向Y‧‧‧橫向方向Y1‧‧‧橫向方向第一側Y2‧‧‧橫向方向第二側Z‧‧‧鉛直方向Z1‧‧‧鉛直方向上側Z2‧‧‧鉛直方向下側#10~#23、#30~#42、#50~#59‧‧‧步驟1‧‧‧Article transport equipment 2‧‧‧Article transport vehicle 3‧‧‧Transfer mechanism 3G‧‧‧Grip mechanism 3Ga‧‧‧Grip part 3Gb‧‧‧Grip claw 3GM‧‧‧Grip motor 3H‧‧‧ Lifting mechanism 3Ha‧‧‧ Lifting part 3Hb‧‧‧ Lifting belt 3Hc‧‧ Lifting pulley 3Hd‧‧‧ Lifting drum 3HM‧‧‧ Lifting motor 3S‧‧Horizontal movement mechanism (sliding mechanism) 3Sa‧ ‧‧Sliding part 3Sb‧‧‧Sliding belt 3Sc‧‧‧Sliding pulley 3SM‧‧‧Sliding motor 4‧‧‧Posture change mechanism 4a‧‧‧Swivel part 4b‧‧‧Swivel shaft 4c‧‧‧For sliding Guide wheel 4M‧‧‧Spinning motor 5‧‧‧Supporting member 5a‧‧‧Ceiling connection part 5b‧‧‧Track connection part 5c‧‧Frame part 5d‧‧‧Support part 5e‧‧‧Sloping part 6‧‧ ‧Transport target location 6a‧‧‧Processing device 6b‧‧‧Receiving part 21‧‧Travel part 21a‧‧‧Travel wheel 21b‧‧Guide wheel 21M‧‧‧Travel motor 22‧‧‧Main unit 22a‧ ‧‧Containment part 22b‧‧‧Cover part 22f‧‧‧Inner side 98‧‧‧Track 99‧‧‧Ceiling A1‧‧‧First posture A2‧‧‧Second posture Am‧‧‧Middle posture H‧‧ ‧Control device Hd‧‧‧Lower control device Hu‧‧‧Upper control device Ja‧‧‧Proper posture information P1‧‧‧Retraction position P2‧‧‧Protrusion position R‧‧‧Moving path Rc‧‧‧Path between steps Re ‧‧‧Evacuation path Ri‧‧‧In-step path Rt‧‧‧Conveying path Se1‧‧‧Speed detection sensor Se2‧‧‧Slippage detection sensor Se3‧‧‧Lift detection sensor Se4‧‧ ‧Handhold detection sensor Se5‧‧‧Swivel amount detection sensor Se6‧‧‧Position detection sensor Tc‧‧‧Connection area Tp‧‧‧Posture change permission area TR‧‧‧Swivel trajectory W‧‧‧Item Wa‧‧‧Flange Wb‧‧‧Opening Wc‧‧‧Corner X‧‧‧Conveying direction Y‧‧‧Horizontal direction Y1‧‧‧Horizontal direction first side Y2‧‧‧Horizontal direction second side Z‧ ‧‧Vertical direction Z1‧‧‧Vertical direction upside Z2‧‧‧Vertical direction downside #10~#23、#30~#42、#50~#59‧‧‧Steps

圖1是物品搬送設備的整體平面圖。 圖2是顯示物品的移載情形之圖。 圖3是沿著搬送方向來看物品搬送車的圖。 圖4是顯示使物品的姿勢變更之情形的平面示意圖。 圖5是顯示控制構成的方塊圖。 圖6是顯示執行姿勢變更控制之時的順序的流程圖。 圖7是顯示執行特定搬送處理之時的順序的流程圖。 圖8是顯示在第二實施形態中使物品的姿勢變更之情形的平面示意圖。 圖9是顯示在第二實施形態中執行姿勢變更控制之時的順序的流程圖。Fig. 1 is an overall plan view of the article transport equipment. Fig. 2 is a diagram showing the transfer of articles. Fig. 3 is a view of the article transport vehicle viewed along the transport direction. Fig. 4 is a schematic plan view showing how the posture of the article is changed. Fig. 5 is a block diagram showing the control structure. Fig. 6 is a flowchart showing a procedure when performing posture change control. Fig. 7 is a flowchart showing the procedure when the specific transport process is executed. Fig. 8 is a schematic plan view showing how the posture of the article is changed in the second embodiment. Fig. 9 is a flowchart showing a procedure when performing posture change control in the second embodiment.

#30~#42‧‧‧步驟 #30~#42‧‧‧Step

Claims (7)

一種物品搬送設備，具備以下： 物品搬送車，在複數個搬送對象場所之間沿著移動路徑移動來搬送物品；及 控制裝置，控制該物品搬送車， 該物品搬送設備具有以下的特徵： 前述物品搬送車具有：收容部，收容前述物品；罩蓋部，覆蓋該收容部；移載機構，在前述收容部、與相對於該收容部而位於外側之前述複數個搬送對象場所的一個之間，使前述物品移動而進行該搬送對象場所與前述物品搬送車之間的前述物品之移載；及姿勢變更機構，變更搬送中的前述物品之姿勢， 前述姿勢變更機構可以將前述物品的姿勢變更為第一姿勢及第二姿勢，該第一姿勢是在成為搬送起點之前述搬送對象場所的移載用之姿勢，該第二姿勢是在成為搬送目的地之前述搬送對象場所的移載用之姿勢， 前述罩蓋部是設置在下述位置：當收容在前述收容部的狀態之前述物品為前述第一姿勢的情況及為前述第二姿勢的情況下，與前述物品不相干涉，當前述物品的姿勢為在前述第一姿勢與前述第二姿勢之間進行變更的過程之姿勢的中間姿勢的情況下，會與前述物品相干涉， 前述控制裝置會執行姿勢變更控制，該姿勢變更控制是下述之控制：在從前述搬送起點到前述搬送目的地之路徑的搬送路徑之途中，藉由前述移載機構使前述物品相對於前述收容部移動到外側的狀態下，藉由前述姿勢變更機構將前述物品從前述第一姿勢變更成前述第二姿勢之後，藉由前述移載機構將前述物品收容到前述收容部。An article conveying equipment comprising the following: an article conveying vehicle that moves along a moving path between a plurality of conveying target locations to convey articles; and a control device that controls the article conveying vehicle, and the article conveying device has the following characteristics: The transport vehicle has: a storage section that stores the aforementioned items; a cover section that covers the storage section; and a transfer mechanism between the storage section and one of the plurality of transport target locations located outside of the storage section. The article is moved to carry out the transfer of the article between the transport target place and the article transport vehicle; and a posture change mechanism that changes the posture of the article during transport, and the posture change mechanism can change the posture of the article to A first posture and a second posture. The first posture is a posture for transfer at the aforementioned transfer target location that is the starting point of the transfer, and the second posture is a posture for transfer at the aforementioned transfer target location that is the transfer destination The cover part is set in the following position: when the article stored in the storage part is in the first posture and in the second posture, it does not interfere with the article, and when the article is If the posture is an intermediate posture in the process of changing between the first posture and the second posture, it interferes with the article, and the control device executes posture change control. The posture change control is as follows Control: During the transfer path from the transfer starting point to the transfer destination path, the transfer mechanism moves the article to the outside with respect to the storage section, and the posture changing mechanism moves the After the article is changed from the first posture to the second posture, the article is stored in the storage portion by the transfer mechanism. 如請求項1之物品搬送設備，其中， 前述移載機構具備：把持前述物品的把持部、使前述把持部沿著鉛直方向升降的升降機構、及沿著交叉於前述搬送路徑並且為沿著水平方向之方向的橫向方向使前述把持部橫向移動的橫向移動機構， 前述姿勢變更機構具備使前述把持部繞著沿前述鉛直方向的旋繞軸而旋繞的旋繞部，且在前述第一姿勢與第二姿勢之間的姿勢變更是藉由繞著前述旋繞軸之前述物品的旋繞來進行， 前述姿勢變更控制是藉由下述方式來進行：在藉由前述橫向移動機構使前述把持部橫向移動成使前述物品相對於前述收容部位於外側的狀態下，使前述物品繞著前述旋繞軸旋繞。The article conveying equipment of claim 1, wherein the transfer mechanism includes: a gripping portion for gripping the article, an elevating mechanism that raises and lowers the gripping portion in a vertical direction, and is along a horizontal line that crosses the conveying path A lateral movement mechanism for laterally moving the grasping portion in the direction of the direction of the lateral direction, the posture changing mechanism includes a winding portion that causes the grasping portion to revolve around a revolving shaft along the vertical direction, and in the first posture and the second posture The posture change between the postures is performed by the winding of the article around the revolving axis, and the posture change control is performed by the following method: in the lateral movement of the grip part by the lateral movement mechanism, The article is wound around the winding shaft in a state where the article is located outside with respect to the storage portion. 如請求項2之物品搬送設備，其中， 前述移動路徑是由天花板懸吊支撐的軌道所決定， 且前述移載機構更具備被前述軌道或前述天花板支撐並且配置在鄰接於前述移動路徑的位置之支撐構件， 前述支撐構件是設置成在使前述把持部橫向移動成使前述物品相對於前述收容部位於外側的狀態下，在前述鉛直方向上支撐前述橫向移動機構。The article conveying equipment of claim 2, wherein the moving path is determined by a track supported by a ceiling suspension, and the transfer mechanism is further provided with a position that is supported by the track or the ceiling and arranged adjacent to the moving path The support member is provided to support the lateral movement mechanism in the vertical direction in a state where the grip portion is moved laterally so that the article is located outside of the storage portion. 如請求項1之物品搬送設備，其中， 前述控制裝置是在前述搬送路徑的途中之前述物品搬送車的停止中，執行前述姿勢變更控制。The article transport facility of claim 1, wherein the control device executes the posture change control while the article transport vehicle is stopped on the way of the transport path. 如請求項1至4中任一項之物品搬送設備，其中， 前述控制裝置是在前述物品位於前述收容部的外側中的與前述罩蓋部不相干涉的範圍內、且藉由前述移載機構進行之前述物品的移動中，執行前述姿勢變更控制。The article conveying equipment of any one of claims 1 to 4, wherein the control device is located within a range that does not interfere with the cover portion in the outer side of the accommodating portion, and is carried by During the movement of the aforementioned article by the mechanism, the aforementioned posture change control is executed. 如請求項2或3之物品搬送設備，其中， 將藉由前述移載機構使前述物品相對於前述收容部橫向移動到外側的狀態下，前述移載機構及前述物品不會與存在於前述搬送路徑的周圍之其他構件相干涉的前述搬送路徑之區域，設定作為姿勢變更許可區域， 前述控制裝置是在前述物品搬送車位於前述姿勢變更許可區域內的情況下，執行前述姿勢變更控制。For example, the article conveying equipment of claim 2 or 3, wherein the transfer mechanism and the article will not be in a state where the article is moved laterally to the outside with respect to the storage section by the transfer mechanism. The area of the conveyance path where other members around the path interfere is set as a posture change permission area, and the control device executes the posture change control when the article transport vehicle is in the posture change permission area. 如請求項6之物品搬送設備，其中， 前述物品是用來收納半導體基板的容器， 且在前述搬送對象場所中包含有收授部，該收授部是用於在處理裝置及前述物品搬送車之間的前述物品之接收授與，前述處理裝置是用來進行對前述半導體基板的處理， 複數個前述收授部是以步驟內路徑來連結，並且複數個步驟內路徑是以步驟間路徑來連結， 前述姿勢變更許可區域是設定在前述移動路徑中的前述步驟內路徑與前述步驟間路徑之間的連接區域。For example, the article transport equipment of claim 6, wherein the article is a container for storing semiconductor substrates, and the transfer target location includes an accepting and receiving unit for the processing device and the article transport vehicle The processing device is used to process the semiconductor substrate between the receiving and granting of the aforementioned items. The plurality of receiving and granting parts are connected by intra-step paths, and the multiple intra-step paths are inter-step paths. Linked, the aforementioned posture change permission area is a connection area between the aforementioned intra-step path and the aforementioned inter-step path set in the aforementioned movement path.
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