CN107857064A - Article carrying equipment - Google Patents

Article carrying equipment Download PDF

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Publication number
CN107857064A
CN107857064A CN201710859693.3A CN201710859693A CN107857064A CN 107857064 A CN107857064 A CN 107857064A CN 201710859693 A CN201710859693 A CN 201710859693A CN 107857064 A CN107857064 A CN 107857064A
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CN
China
Prior art keywords
foregoing
article
posture
items
receiving portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201710859693.3A
Other languages
Chinese (zh)
Other versions
CN107857064B (en
Inventor
北原素行
森本雄
森本雄一
松尾研介
樱井武司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Publication of CN107857064A publication Critical patent/CN107857064A/en
Application granted granted Critical
Publication of CN107857064B publication Critical patent/CN107857064B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0235—Containers

Abstract

A kind of article carrying equipment is provided, it is integrally provided with the posture changing mechanism of the posture for changing article on article carrying car, and can suppress the maximization of article carrier.Article carrying equipment possesses the control device moved along mobile route to carry the article carrying car of article and control the article carrying car, article carrying car possesses the receiving portion for accommodating article, cover the cover portion of receiving portion, carry out the transfer mechanism of the article transfer in moving object place and article carrying workshop, change the posture changing mechanism of the posture of article in carrying, the posture of article can be changed over prime and second by posture changing mechanism, cover portion is located at the position with the interference of the article of middle posture, control device perform in the way of transport path by transfer mechanism make article relative to receiving portion laterally move in the state of, by posture changing mechanism by article after prime changes over second, by transfer mechanism by article container in the control of receiving portion be posture change control.

Description

Article carrying equipment
Technical field
The present invention relates to article carrying equipment, items haulage equipment possesses article carrying car, items carrier Moved between multiple moving object places along mobile route to carry article.
Background technology
For example, in the equipment disclosed in following patent documents 1, removed by the mobile route in article carrying car via multiple Fortune object is set in the state of place.Also, the moving object field as carrying destination in multiple moving object places In institute, change the posture of the article in a manner of in the appropriate posture for transfer article.So, the posture of article is being carried The reasons why being changed at source and carrying destination is, for example, because article is that have to be used for content discrepancy only on its one side Opening container, moving object place for handle the content processing unit in the case of, it is necessary to make the opening phase of container It is opposite etc. for processing unit.Also, in order to change the posture of article, in the equipment of patent document 1, possess with by mobile route Between the state that the connects posture changing mechanism that is set and is additionally set in addition to article carrying car.Article carrying car phase Article is transmitted for the posture changing mechanism, posture changing mechanism makes the article rotating, and thus the posture of article is by from the first appearance Gesture changes over second.
Patent document 1：Japanese Unexamined Patent Publication 2012-253070 publications.
As described above, it is being additionally provided with addition to article carrying car in the equipment of posture changing mechanism, it is necessary to should The configuration space of posture changing mechanism, with set the posture changing mechanism correspondingly equipment cost increase.Therefore, the application Inventor is studied making article carrying car be integrally provided with posture changing mechanism.However, in the thing based on article carrying car In the carrying of product, the receiving portion for accommodating article is covered by cover portion.Also, in order to suppress the maximization of article carrier, cover portion and The gap for being housed inside the article of receiving portion is set to Min..For the article of receiving portion as being housed inside Posture change, it is necessary to make the gap of article and cover portion broaden, as a result, asking of having to make article carrying car to maximize be present Topic.
The content of the invention
Therefore, it is intended that realizing a kind of article carrying equipment, items haulage equipment integratedly has on article carrying car The posture changing mechanism for the posture for changing article is ready for use on, and the maximization of article carrier can be suppressed.
Article carrying equipment possesses article carrying car and control device, and items carrier is in multiple moving object places Between moved along mobile route to carry article, foregoing control device controls the article carrying car, and items carrier has Receiving portion, cover portion, transfer mechanism, posture changing mechanism, foregoing receiving portion accommodate items, and foregoing cover portion covers the receiving Portion, foregoing transfer mechanism in foregoing receiving portion and the aforesaid plurality of moving object place for being located at relative to the receiving portion outside one Items are moved between individual, carry out the transfer of the items between the moving object place and items carrier, Foregoing posture changing mechanism changes the posture of the items in carrying, and foregoing posture changing mechanism can be by the appearance of items Gesture changes over prime and second, and foregoing prime is for use as at the foregoing moving object place in carrying source The posture of transfer, foregoing second are for use as the posture of the transfer at the foregoing moving object place of carrying destination, Foregoing cover portion is arranged at following location so that foregoing cover portion is being housed inside the shape of foregoing receiving portion when in aforementioned location The items of state in the case of foregoing prime and in the case of foregoing second, foregoing cover portion not with preceding Product are interfered, items posture be the posture of process that changes between foregoing prime and foregoing second i.e. in Between in the case of posture, foregoing cover portion is interfered with items, and foregoing control device performs posture and changes control, and foregoing posture changes It is to control as follows to become control：In from foregoing carrying source to the path of foregoing carrying destination being the way of transport path, by In the state of the items that foregoing transfer mechanism make move laterally relative to foregoing receiving portion, by foregoing posture changing mechanism By items after foregoing prime changes over foregoing second, items are contained in by foregoing transfer mechanism Foregoing receiving portion.
In this programme, the cover portion that receiving portion covers is arranged at following location so that in foregoing cover portion positioned at foregoing During position, in the state of the article of prime or second is housed inside receiving portion, do not interfere with the article.The opposing party Face, the position for setting the cover portion are, in the case where being housed inside the article of state of receiving portion in middle posture, with the article The position of interference.That is, cover the cover portion of receiving portion and the gap of article by smaller is set.Therefore, according to the thing of this programme Product haulage equipment, the maximization of article carrier can be suppressed.In addition, in this programme, article carrying car from the source of carrying to The path of carrying destination is in the way of transport path, article is moved to outside relative to receiving portion by transfer mechanism Under state, the posture of article is changed over into second from prime by posture changing mechanism.Therefore, according to this programme, The time for article carrying and space can be effectively utilized, the posture for carrying out article changes.Therefore, with except article carrying car Outside additionally possess posture changing mechanism situation compare, can easily realize miniaturization and the cost degradation of equipment.
According to the explanation of the following exemplary and non-limiting embodiment described referring to the drawings, definitely this hair Bright further feature and advantage.
Brief description of the drawings
Fig. 1 is the overall top view of article carrying equipment.
Fig. 2 is the figure of the situation for the transfer for representing article.
Fig. 3 is along the figure for carrying direction observation article carrying car.
Fig. 4 is the schematic top plan view for the situation for representing to change the posture of article.
Fig. 5 is to represent the block diagram that control is formed.
Fig. 6 is to represent to perform the flow chart that posture changes flow when controlling.
Fig. 7 is the flow chart of flow when representing to perform specific transportation processing.
Fig. 8 is the schematic top plan view for the situation for representing in this second embodiment to change the posture of article.
Fig. 9 is to represent to perform the flow chart that posture changes flow when controlling in this second embodiment.
Embodiment
1. first embodiment
Referring to the drawings, the first embodiment of article carrying equipment is illustrated.
As shown in figure 1, article carrying equipment 1 possesses article carrying car 2 and control device H, items carrier 2 is more Moved between individual moving object place 6 along mobile route R to carry article W, foregoing control device H controls the article carrying car 2 Control device H (also referring to Fig. 5).Also, the article carrying equipment 1 can be in the conduct from multiple moving object places 6 The moving object place 6 in carrying source to other moving object places 6 as carrying destination are carried in article W way, are changed Article W posture.
The machinery composition of 1-1. article carrying equipment
Article W is the object carried by article carrying car 2.Here, article W is formed as when overlooking to be non-circular.Article W is for example Be formed as, when overlooking on be polygon, more particularly quadrangle (reference picture 4).In addition, in quadrangle, in addition to i.e. Make not being strictly quadrangle, as the overall shape that can also regard quadrangle as.In addition, in polygon, in addition to one The shape that part is formed by curves such as circular arcs.For example, shape during article W vertical view can be D-shaped.Hereinafter, " shape " is being used This statement is come in the case of illustrating the shapes such as thing, it is intended to the shape is closely not specific.In addition, the solid on article W Shape, column is set to here.Article W is, for example, the container for storing content.In the present embodiment, article W is storage half The container of conductor substrate.Here, article W is formed as cuboid, multiple Semiconductor substrates can be divided into multilayer to accommodate.At this In embodiment, article W upper surface and bottom surface always blocked state.In addition, on article W upper surface, it is provided with and is used for The flange part Wa held in article W carrying by article carrying car 2.In addition, in one side in article W 4 sides, if It is equipped with the opening portion Wb for making Semiconductor substrate come in and go out.
Moving object place 6 is the place in the carrying source as article W, or the field of the carrying destination as article W Institute.Moving object place 6 is arranged at many places in article carrying equipment 1.In moving object place 6, for example, carrying out article W processing.In the present embodiment, as shown in figure 1, in moving object place 6, including for carrying out to Semiconductor substrate Processing processing unit 6a and article carrying car 2 between article W transmitting-receiving receiving and transmitting part 6b.In the present embodiment, exist On receiving and transmitting part 6b, carrying makes article Ws of the opening portion Wb relative to state opposite processing unit 6a.In addition, it is incorporated in article W Semiconductor substrate by processing unit 6a arms possessed etc. from opening portion Wb take out.Also, Semiconductor substrate is by processing unit 6a Processing.In order to handle Semiconductor substrate by processing unit 6a in this wise, in the present embodiment, article W is in opening portion Wb phases Carried for the opposite appropriate postures of processing unit 6a, and by article carrying car 2 to receiving and transmitting part 6b.
Mobile route R is the path that article carrying car 2 moves in article carrying equipment 1.As shown in figure 1, mobile route R Via multiple moving object places 6.Mobile route R is for example arranged on ground, or is arranged at from ground and is separated upward The position of distance.In the present embodiment, mobile route R determines (reference picture 2 and figure by the track 98 from the hanger bearing of ceiling 99 3).As shown in figure 1, in the present embodiment, track 98 is set in the state of via multiple receiving and transmitting part 6b.In addition, track 98 form (reference picture 2 by a pair of strip members being set in the state of leaving along mobile route R extensions and in the lateral direction y And Fig. 3).In the present embodiment, mobile route R is configured to include in-process path Ri and inter process path Rc.It is also, multiple Receiving and transmitting part 6b links by in-process path Ri, and multiple in-process path Ri link by inter process path Rc.
Article carrying car 2 moves to carry article W between multiple moving object places 6 along mobile route R.In this implementation In mode, article carrying car 2 moves on the Rc of inter process path, thus, it is possible in the multiple works linked by inter process path Rc Moved in sequence in each of path Ri.Therefore, article carrying car 2 moves in each of multiple in-process path Ri, by This can be moved in each for being linked to in-process path Ri multiple receiving and transmitting part 6b.In addition, in the present embodiment, Article carrying car 2 is that can only be moved in one direction on mobile route R, it is impossible to is moved to opposite direction.In addition, article Carrier 2 possesses position-detection sensor Se6, and aforementioned location detection sensor Se6 detects the article carrying in mobile route R The current location (reference picture 5) of car 2.In the present embodiment, on mobile route R, (omitted with multiple positional information storage parts Diagram) scattered state configuration.Also, positional information storage part is distributed in the every of the mobile route R multiple regions divided One.In addition, each of multiple positional information storage parts is stored with the letter for the position being configured respectively in mobile route R Breath.In the present embodiment, it is configured to, position-detection sensor Se6 reading position information, aforementioned location information is stored in more Each of individual positional information storage part, aforesaid plurality of positional information storage part is configured in mobile route R, thus, it is possible to examine The current location for the article carrying car 2 surveyed in mobile route R.Can be display bar code for example, as positional information storage part Plate etc..The position-detection sensor Se6 of the situation can also be barcode reader.
As shown in Figures 2 and 3, article carrying car 2 has the travel section 21 freely of being advanced on track 98, by hanger bearing In the main part 22 of travel section 21.In addition, in the following description, " article carrying car 2 moves along mobile route R " and " article Carrier 2 is advanced along mobile route R " it is equivalent in meaning.In addition, in figure 3, for convenience of explanation, eliminate support described later Part 5.Article carrying car 2 has the receiving portion 22a for accommodating article W, the cover portion 22b for covering receiving portion 22a.In present embodiment In, receiving portion 22a and cover portion 22b are configured as a part for main part 22.
Article carrying car 2 has the shifting for the transfer that article W is carried out between the article carrying car 2 and moving object place 6 Mounted mechanism 3.Transfer mechanism 3 is in receiving portion 22a and the multiple moving object places 6 for being located at relative to the receiving portion 22a outside Move article W between one, carry out the transfer of the article W between the moving object place 6 and article carrying car 2.In addition, thing Product carrier 2 has the posture changing mechanism 4 for the posture for changing the article W in carrying.
As shown in figure 3, transfer mechanism 3 possesses handle part 3Ga, elevating mechanism 3H, transverse moving mechanism 3S, foregoing handle part 3Ga, which holds article W, foregoing elevating mechanism 3H, makes handle part 3Ga be lifted along vertical Z, and aforementioned lateral travel mechanism 3S makes handle Portion 3Ga is held along horizontal Y transverse shiftings, aforementioned lateral Y is with intersecting along transport path Rt carrying direction X and along level The direction in direction.In the present embodiment, as the transverse moving mechanism 3S for making handle part 3Ga transverse shiftings, exemplified with making handle The sliding equipment 3S for holding portion 3Ga slips illustrates.Here, in this manual, refer to along some specific direction, except with this Beyond the situation that specific direction is substantially parallel, in addition to relative to this in the range of the error that setting, installation etc. manufacture The concept for the state that specific direction is slightly tilted.More specifically, also include relative to the specific direction below ± 15 ° The inclined state of scope.Sliding equipment 3S can make handle part 3Ga, and transversely Y is slided.In the present embodiment, by the machine of holding Structure 3G, elevating mechanism 3H, sliding equipment 3S, the transfer article W between article carrying car 2 and receiving and transmitting part 6b.In addition, article W Transfer refers to move article between article carrying car 2 and receiving and transmitting part 6b.That is, to the state that will be housed inside receiving portion 22a Article W be placed in receiving and transmitting part 6b process or to the article W for the state for being placed in receiving and transmitting part 6b is contained in into receiving portion 22a Process be article W transfer.In addition, article W carrying refers to, article W is set to carry source from the conduct in multiple receiving and transmitting part 6b Receiving and transmitting part 6b to as carrying destination other receiving and transmitting parts 6b movement.That is, the carrying of article W is also to include article W shifting The concept of load.In addition, transport path Rt refers to, in mobile route R from the moving object place 6 as the source of carrying to as removing Transport the path in other moving object places 6 of destination.It is that is, corresponding with carrying source and carrying destination in mobile route R, Transport path Rt is set every time.
As shown in Fig. 2 the transfer as article W, receiving is being contained in by the article W for being placed in receiving and transmitting part 6b state In the case of portion 22a, article W is increased by elevating mechanism 3H in the state of article W is held by handle sturcture 3G handles, borrow Sliding equipment 3S is helped article W is slided to receiving portion 22a.As article W transfer, receiving portion 22a shape will be housed inside In the case that the article W of state is placed in receiving and transmitting part 6b, process contrary to the above is carried out.In addition, in the following description, by lead Upside in vertical direction Z is set to Z1 on the upside of vertical, and downside is set into vertical downside Z2 to illustrate.In addition, by horizontal Y In make protruding outside sides (Fig. 2 and Fig. 3 left side) of the article W from receiving portion 22a to receiving portion 22a as laterally first Side Y1, article W will be made to illustrate from the side that receiving portion 22a outer lateral receiving portion 22a is avoided as laterally the second side Y2. In the following description, the position that will be housed inside the article W of receiving portion 22a state is referred to as and avoids position P1, will be to laterally the The position of article W under the limit that side Y1 is protruded is referred to as extrusion position P2.In addition, in the present embodiment, horizontal Y is with removing Transport the orthogonal directions of path Rt.
As shown in figure 3, article carrying car 2 has travel section 21.Travel section 21 is driven by drive mechanisms such as motors, along moving Path R advances.In the present embodiment, travel section 21 is advanced on track 98.As shown in figure 3, in the present embodiment, advance There is travel wheel 21a and guide wheel 21b, foregoing travel wheel 21a to be driven by traveling with motor 21M in portion 21, be rotated around trunnion axis, and And along direction X rollings are carried on the upper surface of track 98, foregoing guide wheel 21b is connected to the vertical guide of track 98, around vertical Axle is rotated, and travel section 21 is guided along track 98.In addition, travel section 21 possesses the gait of march of detection article carrier 2 Speed detection sensor Se1 (reference picture 5).In the present embodiment, speed detection sensor Se1 is configured to, and can be based on The revolution of travel wheel 21a in given time, detect the speed of article carrier 2 with relative velocity of track 98 etc..
Article carrying car 2 has main part 22.Main part 22 is linked to travel section 21, by the traveling of travel section 21 with The travel section 21 integratedly moves on mobile route R.In the present embodiment, main part 22 is via by forming the one of track 98 The gap formed to strip member, by the hanger bearing of travel section 21.In the present embodiment, main part 22, which has, accommodates article W Receiving portion 22a, cover receiving portion 22a cover portion 22b.Receiving portion 22a is configured in cover portion 22b inner side.In this implementation In mode, cover portion 22b is in horizontal Y both sides and the shape of opened downward.More specifically, cover portion 22b is formed as from horizontal Y When for the reverse U shape with angle.Therefore, receiving portion 22a connects in horizontal Y both sides and lower section with receiving portion 22a outside.By This, makes the article W for being housed inside receiving portion 22a state be slided in the lateral direction y by sliding equipment 3S, thus enables that the thing Product W is located at receiving portion 22a outside.
Transversely Y is capable of expansion and contraction by sliding equipment 3S.For example, sliding equipment 3S is configured to, overall quilt in a contracted state Cover portion 22b inner side is contained in, a part is to the protruding outside of cover portion 22b in the state of stretching, extension.In the present embodiment, it is sliding Motivation structure 3S is arranged at receiving portion 22a.In addition, in the present embodiment, sliding equipment 3S has to be driven by slip with motor 3SM Dynamic or driven pair of sliding pulley 3Sc, the slip of each band 3Sb, the quilt for being wound in pair of sliding pulley 3Sc Slip is linked to the sliding part 3Sa slid freely in the lateral direction y with 3Sb.Also, sliding part 3Sa can be by transverse direction First side Y1 slides the outside come to receiving portion 22a and moved, can be by being slided to laterally the second side Y2 to be moved to receiving portion 22a It is dynamic.In addition, sliding equipment 3S possesses the slip quantity detection sensor Se2 of detection sliding part 3Sa slippage (also referring to Fig. 5). In the present embodiment, slide quantity detection sensor Se2 to be configured to, slip cunning during slip that can be based on sliding part 3Sa Take turns the detection sliding part such as 3Sc revolution 3Sa slippage.
Posture changing mechanism 4 changes the posture of the article W in carrying.For example, posture changing mechanism 4 makes article W around spy Fixed axle rotation, thus change article W posture.More specifically, posture changing mechanism 4 rotates article W around vertical axis, by This changes article W posture.In the present embodiment, posture changing mechanism 4 and sliding equipment 3S sliding part 3Sa links. Therefore, integratedly transversely Y is moved posture changing mechanism 4 and sliding equipment 3S sliding part 3Sa.In the present embodiment, appearance Gesture changing mechanism 4 possesses the rotating part 4a for making handle part 3Ga around the rotary shaft 4b rotations along vertical Z.Here, in rotating part 4a inside, rotary shaft 4b top and rotating motor 4M link.Also, rotary shaft 4b is driven by rotating motor 4M.This Outside, posture changing mechanism 4 possesses the rotation quantity detection sensor Se5 of detection handle part 3Ga rotation amount (also referring to Fig. 5). In present embodiment, rotation quantity detection sensor Se5 is configured to, and the anglec of rotation based on rotary shaft 4b, rotary shaft 4b rotate Time etc., handle part 3Ga rotation amount can be detected.
Elevating mechanism 3H lifts article W.In the present embodiment, elevating mechanism 3H make article W from configuration cover portion 22b Height to the height for as little as configuring receiving and transmitting part 6b between lift.In the present embodiment, elevating mechanism 3H has is used by lifting The lifting pulley 3Hc of motor 3HM drivings, lifting roller 3Hd, it is wound in lifting pulley 3Hc and lifting roller 3Hd Lifting with 3Hb, by lifting motor 3HM, lifting pulley 3Hc, lifting roller 3Hd, lifting with 3Hb holding liter Drop portion 3Ha.Also, elevating mechanism 3H drives lifting pulley 3Hc by lifting motor 3HM, thus by lifting band 3Hb Winding is released, and lifts handle part 3Ga.In addition, in the present embodiment, what lifting unit 3Ha had with posture changing mechanism 4 Rotary shaft 4b links.Therefore, elevating mechanism 3H is rotated by rotary shaft 4b rotation around vertical axis.Elevating mechanism 3H is via posture Changing mechanism 4 and sliding equipment 3S links, so integratedly transversely Y is moved with sliding equipment 3S.In addition, elevating mechanism 3H has The lifting quantity detection sensor Se3 of standby detection handle part 3Ga lifting amount (also referring to Fig. 5).In the present embodiment, lifting amount Detection sensor Se3 is configured to, revolution, the lifting pulley 3Hc of lifting pulley 3Hc during lifting based on handle part 3Ga Time of rotation etc., handle part 3Ga lifting amount can be detected.
Handle sturcture 3G can hold article W.For example, handle sturcture 3G holds article W from top.More specifically, handle Hold mechanism 3G overlook when with article W it is completely overlapped in the state of, by article W from top hold.In the present embodiment, Hold mechanism 3G and use horse with the handle part 3Ga with 3Hb, the holding being kept in handle part 3Ga inside with lifting is linked to Up to 3GM (reference picture 5), driven by holding motor 3GM and switch a pair freely between holding posture and releasing posture Hold pawl 3Gb.Also, a pair of grasping claw 3Gb are in hold posture by being moved up in side close to each other, what is mutually left Side moves up and is in releasing posture.In the present embodiment, a pair of grasping claw 3Gb are by holding posture by article W flange Portion Wa is held.Also, a pair of grasping claw 3Gb are changed into releasing posture from the state for holding flange part Wa, thus by flange part Wa Holding release.In addition, handle sturcture 3G possesses a pair of grasping claw 3Gb of detection holding posture and releases the holding detection of posture Sensor Se4 (reference picture 5).In the present embodiment, detection sensor Se4 is held to be configured to, can be based on whether blocking one Optical axis to grasping claw 3Gb etc. come detect a pair of grasping claw 3Gb be hold posture or release posture.Handle part 3Ga is via liter Drop is linked with band 3Hb and elevating mechanism 3H, thus handle sturcture 3G with by rotary shaft 4b rotation and the elevating mechanism that rotates 3H integratedly rotates.In addition, handle sturcture 3G links via elevating mechanism 3H and posture changing mechanism 4 and sliding equipment 3S, institute So that transversely Y is integratedly moved with elevating mechanism 3H, posture changing mechanism 4 and sliding equipment 3S.Therefore, it is held in holding machine Each action of the article W of structure 3G state lifting, rotation and slip is by elevating mechanism 3H, posture changing mechanism 4 and slides Mechanism 3S is carried out.
Posture changing mechanism 4 can change over article W posture prime A1 and second A2, foregoing first appearance Gesture A1 is the posture for the transfer at the moving object place 6 as the source of carrying, and foregoing second A2 is to be used to make For the posture of the transfer at the moving object place 6 of carrying destination.As it was previously stated, in article carrying equipment 1, by by with Multiple processing unit 6a in mutually different place are placed in, processing is incorporated in article W Semiconductor substrate.Therefore, in article W When being carried to processing unit 6a receiving and transmitting part 6b, it is necessary to be in a manner of processing unit 6a takes out Semiconductor substrate from article W Article W opening portion Wb and state opposite processing unit 6a.That is, second A2 is article W opening portion Wb relative to work For the posture of state opposite the processing unit 6a in the moving object place 6 of carrying destination.Therefore, second A2 by with Processing unit 6a direction corresponding to carrying destination and change.In addition, prime A1 refers to the article W in carrying source appearance Gesture.For example, it is being to terminate by a processing unit 6a in multiple processing unit 6a at some as the article W of moving object In the case of the article W of science and engineering sequence, prime A1 is processing of the opening portion Wb relative to the treatment process for having carried out article W The posture of state opposite device 6a.It is however not limited to the situation, for example, prime A1, which can be article W, is moved to article Posture under at the time of haulage equipment 1.In any case, the posture of the article W under at the time of starting article W carrying is in the first appearance Gesture A1.
In the present embodiment, the posture of the article W between prime A1 and second A2 changes by around rotation Axle 4b article W rotation is carried out.That is, as shown in figure 4, (being in this example vertical by bearing of trends of the article W along rotary shaft 4b Direction Z) observation when, rotate article W in a manner of the circular arc that article W angle Wc describes centered on rotary shaft 4b, thus make Article W changes posture.In the present embodiment, make the article W of prime A1 state by posture changing mechanism 4 around rotation Axle 4b rotates so that in opening portion Wb relative to state opposite processing unit 6a corresponding with carrying destination.Thus, article W changes over second A2 from prime A1 postures.
As shown in figure 4, cover portion 22b is arranged at following location：It is in the article W for being housed inside receiving portion 22a state In the case of prime A1 situation or second A2, foregoing cover portion 22b and article W does not interfere, and is in article W posture In the case of the i.e. middle posture Am of the posture of the process changed between prime A1 and second A2, interfere with article W. In the present embodiment, cover portion 22b has a pair of inside face 22f opposite mutually on direction X is carried.In addition, receiving portion 22a Carrying direction X region by a pair of inside face 22f divide.In the present embodiment, cover portion 22b is arranged at following location： Be housed inside the article W of receiving portion 22a state posture be middle posture Am in the case of, article W and a pair of inside face 22f In at least one medial surface 22f interference.More specifically, as shown in figure 4, cover portion 22b size is configured to, away from article W's Describe the part (being article W angle Wc in this example) that the pivot (being rotary shaft 4b in this example) of article W during rotation is farthest Rotational trajectory TR it is bigger than receiving portion 22a.As it was previously stated, article W is quadrangle when overlooking, so rotational trajectory TR diameter Determined when overlooking by the diagonal diagonal for linking article W.More specifically, between a pair of inside face 22f carrying direction X Every being configured to, cornerwise length of article W during than overlooking is short.
The structure of 1-2. control devices
Then, reference picture 5 illustrates the control structure of article carrying equipment 1.
Control device H is configured to include host control device Hu, the progress thing for carrying out the overall control of article carrying equipment 1 The slave control device Hd of the control of product carrier 2.Host control device Hu is to be fixed in some area of article carrying equipment 1 The state configuration in domain.Slave control device Hd is configured in article carrying car 2, with the article carrying car 2 together in mobile route R Upper movement.In the present embodiment, slave control device Hd is configured in each of multiple article carrying cars 2, with each thing Product carrier 2 together moves on mobile route R.Control device H possesses the perimeter lines such as the processors such as microcomputer, memory Road etc..Also, the collaborative work of the program by being performed on the processors such as these hardware, computer, realizes control device H's Each function.
Control device H using for the article W of each in multiple moving object places 6 appropriate posture as appropriate appearance Gesture information Ja is stored.Appropriate pose information Ja can be stored in host control device Hu, can also be stored in severally more Each of individual slave control device Hd.In the present embodiment, host control device Hu possesses storage part, will be removed for multiple The article W of each in fortune object place 6 appropriate posture is stored in the storage part as appropriate pose information Ja.That is, on The second A2 of each corresponding article W with multiple moving object places 6 is stored in storage part by level control device Hu. Host control device Hu will be such that article W is removed from the moving object place 6 as the source of carrying in the case where being not accompanied by posture and changing The i.e. simple carrying instruction of instruction for being transported to other moving object places 6 as carrying destination refers to slave control device Hd Show, or change with posture, article W will be made to be carried to from the moving object place 6 as the source of carrying as carrying destination The instruction in other moving object places 6 is that specific carry is instructed to slave control device Hd instructions.
Slave control device Hd is instructed to perform simple transportation processing, by receiving specific carrying by receiving simple carry Instruct to perform specific transportation processing.Slave control device Hd controls the work of various motors to perform these each processing. In the present embodiment, slave control device Hd is obtained by the traveling speed of the speed detection sensor Se1 article carrying cars 2 detected The information of degree, by slip quantity detection sensor Se2 detection sliding part 3Sa slippage information, by lifting amount detect sense The information of the handle part 3Ga of device Se3 detections lifting amount, the appearance by a pair of grasping claw 3Gb of holding detection sensor Se4 detections The information of gesture, by rotation quantity detection sensor Se5 detection handle part 3Ga rotation amount information and by position detect sense The information of the current location of the article carrying car 2 of device Se6 detections.Also, slave control device Hd is based on being detected by each sensor Information, horse is used in control traveling motor 21M, slip motor 3SM, lifting motor 3HM, holding motor 3GM and rotation Up to 4M work.
Control device H, into the transport path Rt in the path of carrying destination way, is performing posture as from the source of carrying Change control, it is to control as follows that foregoing posture, which changes control,：Make article W outside relative to receiving portion 22a by transfer mechanism 3 In the state of the movement of side, article W is changed to second A2 from prime A1 by posture changing mechanism 4, by shifting Article W is contained in receiving portion 22a by mounted mechanism 3.In the present embodiment, specific carrying is received from host control device Hu to refer to The slave control device Hd of order, article W is being carried to as carrying destination from the moving object place 6 as the source of carrying During other moving object places 6, perform posture and change control.In this example, posture changes control by skate machine Structure 3S make in a manner of article W is located at outside relative to receiving portion 22a handle part 3Ga slide in the state of, by make article W around Rotary shaft 4b is rotated to carry out.Specifically, make sliding part 3Sa prominent to laterally the first side Y1 by sliding equipment 3S, thus make It is configured in receiving portion 22a posture changing mechanism 4, elevating mechanism 3H, handle sturcture 3G and the article held by handle part 3Ga W is configured at extrusion position P2.Also, make the article W and handle sturcture 3G and elevating mechanism 3H mono- for being configured in extrusion position P2 Together, rotated by posture changing mechanism 4, article W posture is thus changed over into second A2 from prime A1.Afterwards, By sliding equipment 3S, sliding part 3Sa is set to be avoided to laterally the second side Y2, thus by second A2 article W and holding Mechanism 3G, elevating mechanism 3H and posture changing mechanism 4, which are together configured at, avoids position P1 (receiving portion 22a).So, posture is performed Change control.In addition, in the present embodiment, article W is located at the state in outside relative to receiving portion 22a, except article W is relative It is fully located in receiving portion 22a beyond the state in outside, in addition to an article W part is located at outside relative to receiving portion 22a State.And then it can be said that article W is not in addition to the state overlapping with receiving portion 22a when overlooking, when being additionally included in vertical view An only article W part not state overlapping with receiving portion 22a.
In the present embodiment, in the stopping of article carrying cars 2 of the slave control device Hd in transport path Rt way Perform posture and change control.It is the state that there are multiple article carrying cars 2 in transport path Rt, each article carrying car 2 In order that processing unit 6a carries out the processing of Semiconductor substrate, article W is carried towards the receiving and transmitting part 6b in moving object place 6.Cause This, if article carrying car 2 stops, other follow-up things for transfers of the article W to receiving and transmitting part 6b in transport path Rt Product carrier 2 also stops.That is, when article carrying car 2 is advanced in transport path Rt, there is situation about stopping because of congestion.Cause This, changes for example, the congestion of article carrying cars 2 of the slave control device Hd in transport path Rt way performs posture in stopping Control.Thus, using the time of 2 unintentional stopping of article carrying car, it is able to carry out posture and changes control.That is, without in order to hold Row posture changes control and stops article carrying car 2, so all stopping article carrying car 2 with performing posture change control every time Situation only is compared, and can shorten handling time.
In the present embodiment, states of the article W relative to the outside Slideslips of receiving portion 22a is made by transfer mechanism 3 Under, the region for the transport path Rt that transfer mechanism 3 and article W do not interfere with the miscellaneous part being present in around transport path Rt It is set to posture and changes permission region Tp (reference picture 1).More specifically, with for sliding article W by sliding equipment 3S Move to the transport path Rt in extrusion position P2 sufficient space region and be set to posture change permission region Tp.Also, Slave control device Hd performs posture and changes control in the case where article carrying car 2 is located in posture change permission region Tp. In the present embodiment, posture, which changes, allows region Tp to have the sufficient space for being used for making article W slide into extrusion position P2, So allowing region Tp to perform posture change control by changing in posture, transfer mechanism 3 can be suppressed and article W changes in posture Become in the execution of control and interfere with being present in transport path Rt miscellaneous part.It additionally, there are around transport path Rt Other parts refer to, such as (processing unit 6a, the accepting rack of article W temporary safe-keepings and safe-deposit vault etc. to be saved into sketch map Show).
In the present embodiment, posture changes the in-process path Ri and work for allowing region Tp to be set in mobile route R Path Rc join domain Tc between sequence.In the present embodiment, join domain Tc refers to, in in-process path Ri and inter process road Areas adjacent connected footpath Rc, equivalent to the area of the circulating path circulated for article carrying car 2 on the Ri of in-process path Domain (reference picture 1).In article carrying equipment 1, in each of in-process path Ri and inter process path Rc, in order to carry The Semiconductor substrate handled on device 6a is throughout managed, relatively more article carrying car 2 is being advanced.On the other hand, in work The negligible amounts for the article carrying car 2 advanced in sequence on path Ri and inter process path Rc join domain Tc.Therefore, will connect Region Tc changes as posture allows region Tp, and article carrying car 2 performs posture in join domain Tc and changes control, thus The influence of traveling of the stopping for the article carrying car 2 that can suppress to control for posture change to other article carrying cars 2.That is, The generation of the congestion in transport path Rt can be suppressed, the reduction of the overall handling efficiency of article haulage equipment 1 can be suppressed.
As shown in Fig. 2 in the present embodiment, transfer mechanism 3 is also equipped with being supported in track 98 or ceiling 99 and position Supporting member 5 in the position adjacent with mobile route R.In the example in the figures, supporting member 5 is supported in track 98 and top Both canopies 99.In addition, supporting member 5 slides handle part 3Ga in a manner of outside is located at relative to receiving portion 22a by article W In the state of, it is arranged to support sliding equipment 3S on vertical Z.There is supporting member 5 ceiling linking part 5a, track to connect Knot 5b, support 5d, frame portion 5c, foregoing ceiling linking part 5a than track 98 lean on laterally the first side Y1 place with ceiling link, Abovementioned rails linking part 5b and ceiling linking part 5a bottom links, and links from laterally the first side Y1 with track 98, preceding Stating support 5d, the Z2 on the downside of the vertical is supported by sliding equipment 3S, and foregoing frame portion 5c is by track linking part 5b and support 5d It is connected.Handle part 3Ga is set to slide into extrusion position P2 state in a manner of outside is located at relative to receiving portion 22a by article W Under, support 5d supports the posture changing mechanism 4 for being linked to sliding equipment 3S from Z2 on the downside of vertical.That is, support 5d is supported with sliding equipment 3S indirectly via posture changing mechanism 4.Thus, support 5d can be by handle part 3Ga and by handle It is held in article W supportings thereon.As a result, it is possible to mitigate, due to using sliding equipment 3S will be supported with article W etc. part as Torque centered on the article carrying car 2 in force, put on the burden of article carrying car 2, track 98 etc..In addition, supporting member 5 Be supported in both track 98 and ceiling 99, thus can by the load dispersings such as article W that supporting member 5 is born to track 98 and Both ceilings 99, it can also mitigate and put on supporting member 5 burden of itself.
In the present embodiment, support 5d is configured to, and transversely the plate-shaped member of Y extensions leaves on direction X is carried And it is configured a pair of state.Also, support 5d supports posture changing mechanism 4 by a pair of plate-shaped part from below.More Specifically, on the rotating part 4a of posture changing mechanism 4, the slip guide wheel 4c of supported portion 5d guiding, supporting are provided with Portion 5d supports the slip with guide wheel 4c from Z2 on the downside of vertical.In addition, the end of laterally the second side Y2 in support 5d Portion, formed with towards laterally the second side Y2 to the inclined rake 5e of Z2 on the downside of vertical so that sliding part 3Sa is towards supporting To when laterally the first side Y1 is slided, sliding part 3Sa is easily supported by part 5 and guided part 5.In sliding part 3Sa to laterally the Side Y1 is slided and during slip is supported in support 5d with guide wheel 4c, the slip is with guide wheel 4c in rake 5e Upper rolling.In the present embodiment, such supporting member 5, which is arranged at posture change, allows region Tp.That is, in this embodiment party In formula, during performing posture and changing control, supporting member 5 is set to support sliding equipment 3S.Thus, change in posture and control Execution in, can mitigate due to torque and to the burden of the applications such as article carrying car 2, track 98.
Then, reference picture 6, illustrate to perform the flow that posture changes control.
Slave control device Hd performs posture by following flow and changes control.That is, slip motor 3SM is controlled, is made Article W starts to slide (step #10) to laterally the first side Y1.Afterwards, based on the letter detected by slip quantity detection sensor Se2 Breath, judges whether article W reaches extrusion position P2 (step #11).Protrusion is not reached judging into article W at the appointed time (step #11 in the case of the P2 of position：It is no, step #19：It is), stop the control (step #20) of various motors, carry out mistake Notify (step #21), recovery changes control.(the step #11 in the case where being judged as that article W reaches extrusion position P2： It is), slip motor 3SM is controlled, article W slip is stopped (step #12).Afterwards, rotating motor 4M is controlled, makes thing Product W rotation starts (step #13).Afterwards, based on the information detected by rotation quantity detection sensor Se5, judge that article W is No is in second A2 (step #14).(walked judging into the case that article W is not in second A2 at the appointed time Rapid #14：It is no, step #22：It is), stop the control (step #20) of various motors, carry out error notification (step #21), knot Beam posture changes control.(the step #14 in the case where judging into article W in second A2：It is), control rotating motor 4M, article W rotation is set to stop (step #15).Afterwards, slip motor 3SM is controlled, makes article W to laterally the second side Y2's Slip starts (step #16).Afterwards, based on the information detected by slip quantity detection sensor Se2, judge whether article W reaches Avoid position P1 (step #17).(the step # in the case where judging into article W at the appointed time and not reaching avoidance position P1 17：It is no, step #23：It is), stop the control (step #20) of various motors, carry out error notification (step #21), terminate appearance Gesture changes control.(the step #17 in the case where judging into article W and reaching avoidance position P1：It is), control slip motor 3SM, article W slip is set to stop (step #18).By carrying out the flow of the above, slave control device Hd performs posture and changed Control.
Slave control device Hd is receiving specific (reference picture 5) in the case of carrying instruction from host control device Hu, Perform the specific transportation processing of the transportation processing as the article W for changing control along with posture.Posture changes control and carried It is performed during article W.Hereinafter, the flow on the specific transportation processing of execution, reference picture 7 illustrate.
Slave control device Hd performs specific transportation processing by following flow.That is, after receiving specific carrying instruction, Traveling motor 21M is controlled, article carrying car 2 is advanced (step #30) to the moving object place 6 as the source of carrying.It Afterwards, slip motor 3SM, lifting motor 3HM and holding motor 3GM are controlled, the receipts in moving object place 6 will be placed in Hair portion 6b article W transfers.That is, the article W that this is loaded is contained in receiving portion 22a (step #31).Afterwards, control is advanced With motor 21M, article carrying car 2 is set to be advanced (step #32) to the moving object place 6 as carrying destination.Afterwards, base In the information detected by speed detection sensor Se1, judge whether article carrying car 2 because of congestion etc. stops (step # 33).(the step #33 in the case where judging into article carrying car 2 and stopping：It is), based on being detected by position-detection sensor Se6 Information, judging whether the current location of article carrying car 2 changes in posture allows region Tp (step #34).Judging into thing The current location of product carrier 2 is not that posture changes (step #34 in the case of permission region Tp：It is no), congestion releases, to again The secondary article carrying car 2 for starting to advance carries out step #33 processing.It is posture in the current location for judging into article carrying car 2 Change allows (step #34 in the case of the Tp of region：It is), perform posture and change control (step #35).Change performing posture After control, control traveling motor 21M makes article carrying car 2 be advanced again to the moving object place 6 as carrying destination (step #36).
In step #33 processing, (the step #33 in the case where judging into article carrying car 2 and not stopping：It is no), sentence Break in the traveling of article carrying car 2, whether position-detection sensor Se6 reads the current location of article carrying car 2 in appearance Gesture changes the positional information (step #37) for the meaning for allowing region Tp.As it was previously stated, transport path Rt is by multiple positional informations Storage part is divided into multiple regions.The posture that is configured in multiple positional information storage parts changes the position letter for allowing region Tp Breath storage part is stored with the positional information that the allocation position of the positional information storage part changes the meaning for allowing region Tp in posture. Therefore, when article carrying car 2 is located at posture change permission region Tp, by position-detection sensor Se6, reading is configured in appearance Gesture changes the positional information for the positional information storage part for allowing region Tp, and thus slave control device Hd can interpolate that into article and remove The current location of fortune car 2 is located at posture and changes permission region Tp.Slave control device Hd in the traveling of article carrying car 2, Judge into meaning of the current location in posture change permission region Tp that position-detection sensor Se6 does not read article carrying car 2 (step #37 in the case of the positional information of think of：It is no), carry out step #33 processing.Judging into position-detection sensor (step # in the case of the information for the meaning that the current location that Se6 reads article carrying car 2 changes permission region Tp in posture 37：It is), judging that the posture as the current location of article carrying car 2 changes allows whether region Tp is to as carrying purpose Multiple postures present in the moving object place 6 on ground, which change, allows the last posture in the Tp of region to change permission region Tp (step #38).It is not last appearance judging into the posture as the current location of article carrying car 2 to change permission region Tp Gesture changes (step #38 in the case of permission region Tp：It is no), carry out step #33 processing.Judging into as article carrying The posture of the current location of car 2, which changes, allows region Tp to be that last posture changes (step #38 in the case of permission region Tp： It is), traveling motor 21M is controlled, article carrying car 2 is stopped (step #39).Afterwards, perform posture and change control (step Rapid #35).After having performed posture change control, traveling motor 21M is controlled, makes article carrying car 2 again to as carrying purpose Advance (step #36) in the moving object place 6 on ground.
After article carrying car 2 is advanced again, based on the information detected by position-detection sensor Se6, article is judged Whether carrier 2 reaches the moving object place 6 (step #40) as carrying destination.Judging into article carrying car 2 not Reach as carrying destination moving object place 6 in the case of (step #40：It is no), repeat step #40 processing. Judge into article carrying car 2 and reach (step #40 in the case of the moving object place 6 as carrying destination：It is), control Traveling processed motor 21M, the traveling of article carrying car 2 is set to stop (step #41).Afterwards, slip motor 3SM, lifting are controlled With motor 3HM and holding motor 3GM, receiving portion 22a article W transfers will be housed inside.That is, this is received into article W to carry It is placed in the receiving and transmitting part 6b (step #42) in moving object place 6.By carrying out the flow of the above, slave control device Hd performs spy Determine transportation processing.
In the above description, specific carry is received from host control device Hu to slave control device Hd to instruct to perform The situation of specific transportation processing is illustrated.But slave control device Hd is received simply from host control device Hu Carry in the case of instructing (reference picture 5), in the case where being not accompanied by posture and changing control, perform as the simple of transportation processing Transportation processing.Slave control device Hd when performing simple transportation processing, perform Fig. 7 flow chart from step #30 to step After rapid #32 processing, the processing from step #40 to step #42 is performed.Thus, slave control device Hd performs simple carry Processing.
2. second embodiment
Then, the article carrying equipment 1 of second embodiment is illustrated.In this second embodiment, only posture changes control The flow of system is different from first embodiment.In the following description, carried out centered on the point different from first embodiment Explanation.It is identical with first embodiment for not specified point.
As shown in figure 8, posture is changed control by slave control device Hd is located at receiving portion 22a outside not in article W Performed in the range of interfering with cover portion 22b and in the movement of the article W based on transfer mechanism 3.In this second embodiment, Slave control device Hd be located in article W receiving portion 22a outside not with the cover portion 22b medial surface 22f scope interfered and In the article W based on sliding equipment 3S transversely Y movement, perform posture and change control.More specifically, as shown in figure 8, from Article W is housed inside receiving portion 22a state, article W is slided to laterally the first side Y1 by sliding equipment 3S, in article W Before being configured in extrusion position P2, do not opened in article W angle Wc with the medial surface 22f scopes interfered by posture changing mechanism 4 Beginning article W rotation.Also, in the case where making the rotation continuation of the article W based on posture changing mechanism 4, make to be configured in Extrusion position P2 article W slides by sliding equipment 3S to laterally the second side Y2, is configured at article W and avoids position P1 (appearances Receive portion 22a).At least, article W is made to complete article W to second into the way that laterally the second side Y2 is slided by sliding equipment 3S Posture A2 posture changes.Thereby, it is possible to shorten posture to change the control desired time.Here, posture changes the time of control It is more short more preferred.In this second embodiment, slave control device Hd control posture changing mechanism 4 (rotating motor 4M) and Sliding equipment 3S (motor 3SM is used in slip) so that for changing over article W from prime A1 by posture changing mechanism 4 Second A2 and make time that article W rotates, by sliding equipment 3S article W is held again from receiving portion 22a is outstanding The difference of time untill being contained in receiving portion 22a shortens.In detail, during article W is made to laterally the first side Y1 slips, Until article W is before the non-interfering position do not interfered with cover portion 22b, it is impossible to starts article W rotation.Therefore, the next control Device Hd control posture changing mechanism 4 (rotating motor 4M) processed and sliding equipment 3S (motor 3SM is used in slip) so that make thing Product W from receiving portion 22a is outstanding be contained in again untill receiving portion 22a during article W positioned at not interfering with cover portion 22b Scope time, with make article W rotate time be same degree.Thereby, it is possible to further shorten posture to change control institute The time wanted.
Then, reference picture 9, the flow of the posture change control to second embodiment illustrate.In addition, following In explanation, article W will be made from receiving portion 22a state is contained in after laterally the first side Y1 is slided, making article W to laterally the Two side Y2 slide a series of action untill article W is contained in into receiving portion 22a, referred to as reciprocatingly slide.It is real second The posture for applying mode changes in control, since s reciprocatingly sliding between end, in article W positioned at not interfering with cover portion 22b In the range of between, by article W posture from prime A1 change over second A2 change.
The posture that slave control device Hd performs second embodiment according to following flow changes control.Namely based on cunning Momentum detection sensor Se2 information holds article W horizontal Y position, while controls slip motor 3SM, thus makes thing The product W beginning (step #50) that reciprocatingly slides.Afterwards, based on the information detected by slip quantity detection sensor Se2, judge middle Whether posture Am article W is located at non-interfering position (step #51).Here, size, shape of the non-interfering position according to article W The slippage combination of shape, article W rotation amount and article W and in various.In this second embodiment, the next control dress Put the information that Hd stores multiple non-interfering positions of various patterns in advance.In this second embodiment, the next control The information that device Hd is previously stored based on this, judges whether article W is located at non-interfering position.Judging at the appointed time Article W is not in the case of non-interfering position, i.e. is located at the position with cover portion 22b interference in the article W for judging into middle posture Am (step #51 in the case of putting：It is no, step #56：It is), stop the control (step #57) of various motors, carry out error notification (step #58), recovery change control.(the step #51 in the case where judging into article W and being located at non-interfering position：It is), Rotating motor 4M is controlled to start article W rotation (step #52).Afterwards, based on by rotation quantity detection sensor Se5 inspections The information of survey, judge whether article W is in second A2 (step #53).Judge at the appointed time article W in the (step #53 in the case of two posture A2：It is no, step #59：It is) stop the control (step #57) of various motors, carry out wrong Notice (step #58) by mistake, recovery change control.(the step #53 in the case where judging into article W in second A2： It is), control rotating motor 4M makes article W rotation stop (step #54).Afterwards, the article W end that reciprocatingly slides (step is made Rapid #55).Flow more than, the posture that slave control device Hd performs second embodiment change control.
3. other embodiment
Then, the other embodiment of article carrying equipment is illustrated.
(1) in the above-described embodiment, being changed with posture allows region Tp to be configured to the in-process in mobile route R It is illustrated exemplified by path Ri and inter process path Rc join domain Tc.But article carrying equipment 1 is not limited to the knot Structure.That is, as shown in figure 1, the avoidance path Re that article carrier 2 avoids can also be set in addition in mobile route R, posture changes Becoming allows region Tp to be configured to avoidance path Re.Thus, can when article carrying car 2 performs posture change control The traveling for significantly suppressing other article carrying cars 2 to being advanced on the path beyond the avoidance path Re in mobile route R is made Into influence.
(2) in the above-described embodiment, example below is illustrated, previous example is that supporting member 5 is set Changing in posture allows region Tp, and slave control device Hd supports supporting member 5 during performing posture and changing control Sliding equipment 3S.But article carrying equipment 1 is not limited to the structure.That is, can also change in posture allows not set on the Tp of region Supporting member 5 is put, slave control device Hd can also perform posture in the region of no supporting member 5 and change control.
(3) in the above-described embodiment, the article carrying car 2 to slave control device Hd in transport path Rt way Congestion stop in perform posture change control example be illustrated.But article carrying equipment 1 is not limited to the structure. I.e. or, host control device Hu or slave control device Hd are configured to identify transport path Rt congestion, are sentencing Be broken into transport path Rt in the case of in congestion, make article carrying car 2 be moved near posture change and allow region Tp, it Posture is performed afterwards changes control.
(4) in the above-described embodiment, the article carrying car 2 to slave control device Hd in transport path Rt way Stopping in perform posture change control example be illustrated.But article carrying equipment 1 is not limited to the structure.That is, Can be that slave control device Hd changes in article carrying car 2 in posture to be allowed to perform posture change control in the Tp of region in traveling System.In this case, changing control to safely perform posture, the low speed of article carrying car 2 can also be made to advance.
(5) in the above-described embodiment, to the rotation by the rotary shaft 4b along vertical Z by article W's The example that posture changes over second A2 from prime A1 is illustrated.I.e., in the above-described embodiment, article is made W posture two-dimensionally changes in the horizontal plane.But article carrying equipment 1 is not limited to the structure.That is, can also be according to carrying The mode of destination dimensionally changes article W posture.For example, in carrying source, relative to article W opening portion Wb courts To the state of horizontal direction, in carrying destination, incline article W opening portion Wb must be made towards vertical Z or vertical , can also be by making article W change article W posture around vertical axis and trunnion axis rotation in the case of the state of tilted direction.
(6) in the above-described embodiment, as the transverse moving mechanism for making handle part 3Ga transverse shiftings, exemplified with making The sliding equipment 3S that handle part 3Ga is slided illustrates.But article carrying equipment 1 is not limited to the structure.That is, as horizontal shifting Motivation structure 3S or linkage etc. with arm, make handle part 3Ga transverse shiftings by the arm.
(7) in the above-described embodiment, to hold article W flange part Wa handle sturcture 3G as transfer mechanism 3 A part form example be illustrated.But article carrying equipment 1 is not limited to the structure.I.e. or by article The fork mechanism that W is supported from below forms a part for transfer mechanism.In this case, support article W from below in fork mechanism Under state, the fork mechanism can also be made to be rotated by posture changing mechanism.
(8) in the above-described embodiment, example below is illustrated, previous example is, in order to by article W appearance Gesture changes over second A2 from prime A1, during performing posture and changing control, makes thing by sliding equipment 3S Product W moves to receiving portion 22a outside.But article carrying equipment 1 is not limited to the structure.That is, can also be by elevating mechanism 3H declines article W, article W is moved to receiving portion 22a outside.Make under the state by posture changing mechanism 4 Article W rotates, and the posture for thus carrying out article W changes.In this case, sliding equipment 3S can be not provided with, can not also set Put supporting sliding equipment 3S supporting member 5.That is, transfer mechanism 3, which possesses, holds article W handle part 3Ga, makes handle part 3Ga The elevating mechanism 3H lifted along vertical Z, posture changing mechanism 4 possess and make handle part 3Ga around the rotary shaft along vertical Z The rotating part 4a of rotation, posture between prime A1 and second A2 change by article W around rotary shaft rotation come Carry out, it can also be located at the side in outside relative to receiving portion 22a with article W by elevating mechanism 3H that posture, which changes control, In the state of formula makes handle part 3Ga declines, by making article W be rotated around rotary shaft to carry out.
(9) as long as in addition, the structure disclosed in foregoing each embodiment also can be with other implementations without producing contradiction Structure disclosed in mode is combined to apply.On other structures, disclosed embodiment is in all sides in this manual Face also all only simply illustrates.Therefore, without departing from the scope of spirit of the present invention, various changes can suitably be carried out.
4. the summary of above-mentioned embodiment
Hereinafter, in the above description it is stated that the summary of article carrying equipment illustrate.
Article carrying equipment possesses article carrying car and control device, and items carrier is in multiple moving object places Between moved along mobile route to carry article, foregoing control device controls the article carrying car, and items carrier has Receiving portion, cover portion, transfer mechanism, posture changing mechanism, foregoing receiving portion accommodate items, and foregoing cover portion covers the receiving Portion, foregoing transfer mechanism in foregoing receiving portion and the aforesaid plurality of moving object place for being located at relative to the receiving portion outside one Items are moved between individual, carry out the transfer of the items between the moving object place and items carrier, Foregoing posture changing mechanism changes the posture of the items in carrying, and foregoing posture changing mechanism can be by the appearance of items Gesture changes over prime and second, and foregoing prime is for use as at the foregoing moving object place in carrying source The posture of transfer, foregoing second are for use as the posture of the transfer at the foregoing moving object place of carrying destination, Foregoing cover portion is arranged at following location so that foregoing cover portion is being housed inside the shape of foregoing receiving portion when in aforementioned location The items of state in the case of foregoing prime and in the case of foregoing second, foregoing cover portion not with preceding Product are interfered, items posture be the posture of process that changes between foregoing prime and foregoing second i.e. in Between in the case of posture, foregoing cover portion is interfered with items, and foregoing control device performs posture and changes control, and foregoing posture changes It is to control as follows to become control：In from foregoing carrying source to the path of foregoing carrying destination being the way of transport path, by In the state of the items that foregoing transfer mechanism make move laterally relative to foregoing receiving portion, by foregoing posture changing mechanism By items after foregoing prime changes over foregoing second, items are contained in by foregoing transfer mechanism Foregoing receiving portion.
In this programme, the cover portion that receiving portion covers is arranged at following location so that in foregoing cover portion positioned at foregoing During position, in the state of the article of prime or second is housed inside receiving portion, do not interfere with the article.The opposing party Face, the position for setting the cover portion are, in the case where being housed inside the article of state of receiving portion in middle posture, with the article The position of interference.That is, cover the cover portion of receiving portion and the gap of article by smaller is set.Therefore, according to the thing of this programme Product haulage equipment, the maximization of article carrier can be suppressed.In addition, in this programme, article carrying car from the source of carrying to The path of carrying destination is in the way of transport path, article is moved to outside relative to receiving portion by transfer mechanism Under state, the posture of article is changed over into second from prime by posture changing mechanism.Therefore, according to this programme, The time for article carrying and space can be effectively utilized, the posture for carrying out article changes.Therefore, with except article carrying car Outside additionally possess posture changing mechanism situation compare, can easily realize miniaturization and the cost degradation of equipment.
Moreover it is preferred that foregoing transfer mechanism possesses handle part, elevating mechanism, transverse moving mechanism, foregoing handle part Items are held, foregoing elevating mechanism makes foregoing handle part be lifted along vertical, and aforementioned lateral travel mechanism is along transverse direction Make foregoing handle part transverse shifting, aforementioned lateral is intersected with foregoing transport path and along the direction of horizontal direction, foregoing Posture changing mechanism possesses the rotating part for making foregoing handle part rotation around the rotary shaft along foregoing vertical, foregoing first Posture between posture and foregoing second changes to be carried out by items around the rotation of foregoing rotary shaft, foregoing posture Change control before making in a manner of items is located at outside relative to foregoing receiving portion by aforementioned lateral travel mechanism In the state of stating handle part transverse shifting, by making items be rotated around foregoing rotary shaft to carry out.
According to this programme, the vertical of article and the position of transverse direction can be adjusted and come around the angle of rotary shaft to carrying Destination transfer.In addition, utilize the mechanism for such adjustment, in the way of transport path, with not with cover portion interference Mode makes article laterally under mobile status relative to receiving portion, the posture of article can be changed over into the second appearance from prime Gesture.
In addition, on the basis of such scheme, it is preferred that foregoing mobile route is true by the track from ceiling hanger bearing Fixed, foregoing transfer mechanism is also equipped with supporting member, and foregoing supporting member is supported in abovementioned rails or foregoing ceiling, and by with Be placed in the position adjacent with foregoing mobile route, foregoing supporting member is configured to, with items relative to foregoing receiving Portion be located at outside mode make foregoing handle part transverse shifting in the state of, by aforementioned lateral travel mechanism in foregoing vertical Upper supporting.
If in a manner of the handle part for the state for holding article is located at outside relative to receiving portion, make by transfer mechanism The handle part transverse shifting, then have following situation:With the distance of handle part transverse shifting proportionally make using article carrying car as The torque at center becomes big, and the applications such as article carrying car, track are born.In this programme, with article relative to accommodate position In the state of the mode in outside makes handle part transverse shifting, supporting member supports transverse moving mechanism in vertical. That is, supporting member can support by handle part and by the article of its holding indirectly via transverse moving mechanism, as a result, can subtract The light burden for putting on article carrying car, track etc..
Moreover it is preferred that the stopping of items carrier of the foregoing control device in the way of foregoing transport path It is middle to perform foregoing posture change control.
According to this programme, in the state of stabilization of the article carrying car in stopping, it is able to carry out posture and changes control.This Outside, article is not made to be moved laterally relative to receiving portion in the movement of article carrying car, so can suppress relative to receiving The miscellaneous part interference that portion is located at the article in outside and is present in around mobile route.
Moreover it is preferred that foregoing control device be located in items the outside of foregoing receiving portion not with foregoing cover In the range of portion's interference and in the movement of the items based on foregoing transfer mechanism, perform foregoing posture and change control.
According to this programme, can be held in the movement of the article between the inner side and outer side of the receiving portion based on transfer mechanism Row posture changes control, so compared with the situation moved dynamic posture and changed for carrying out the article based on transfer mechanism respectively, energy Enough shorten posture and change the control required time.And then such posture changes control in the article not outside with receiving portion Cover portion interference in the range of carry out, so can also suppress article and cover portion interference.
Moreover it is preferred that items are made laterally to be moved laterally relative to foregoing receiving portion by foregoing transfer mechanism In the state of dynamic, foregoing transfer mechanism and items not with the miscellaneous part interference that is present in around foregoing transport path The region of foregoing transport path is configured to posture and changes permission region, and foregoing control device is before items carrier is located at In the case of stating in posture change permission region, perform foregoing posture and change control.
According to this programme, article carrying parking stall in transfer mechanism and article not be present in around transport path its When the region of his component interference is that posture changes permission region, performs posture and change control, controlled so posture can be suppressed and changed Transfer mechanism and article and the miscellaneous part being present in around transport path are interfered in the execution of system.
Moreover it is preferred that items are to store the container of Semiconductor substrate, in foregoing moving object place, including Receiving and transmitting part, foregoing receiving and transmitting part are used for the processing unit and items carrier for carrying out the processing relative to aforesaid semiconductor substrate Between items transmitting-receiving, multiple foregoing receiving and transmitting parts are linked by in-process path, and multiple in-process paths are by process Between path link, foregoing posture, which changes, allows region to be configured to path and foregoing sequence in the foregoing sequence of foregoing mobile route Between path join domain.
In the equipment for possessing such in-process path and inter process path, on in-process path and inter process path The Semiconductor substrate handled by each processing unit is carried respectively, so there is the article carrying garage more than comparison to enter.With this Relatively, on the join domain in in-process path and inter process path, the quantity of article carrying car is fewer.In this programme, The join domain is configured to posture and changes permission region, can suppress so the posture of specific article carrying car changes control Traveling to other article carrying cars impacts.Reduced therefore, it is possible to suppress the overall handling efficiency of article haulage equipment.
Industrial applicability
Technology of the present invention can be used in following article carrying equipment, and items haulage equipment possesses article carrying Car, items carrier are moved to carry article between multiple moving object places along mobile route.
Description of reference numerals
1　　 ：Article carrying equipment
2　 　：Article carrying car
3　 　：Transfer mechanism
3G　 ：Handle sturcture
3Ga　 ：Handle part
3H　 ：Elevating mechanism
3S　 ：Transverse moving mechanism (sliding equipment)
4　　 ：Posture changing mechanism
4a　　：Rotating part
4b　　：Rotary shaft
5　　 ：Supporting member
6　　 ：Moving object place
6a　　：Processing unit
6b　　：Receiving and transmitting part
22a　 ：Receiving portion
22b　 ：Cover portion
98　　：Track
99　　：Ceiling
A1　　：Prime
A2　　：Second
Am　　：Middle posture
H　　 ：Control device
Hd　　：Slave control device
Hu　　：Host control device
R　　 ：Mobile route
Rc　　：Inter process path
Re　　：Avoidance path
Ri　　：In-process path
Rt　　：Transport path
Tc　　：Join domain
Tp　　：Posture, which changes, allows region
W　　 ：Article
Y　　 ：Laterally
Z　　 ：Vertical.

Claims (7)

1. a kind of article carrying equipment, items haulage equipment possess article carrying car and control device,
Items carrier moves to carry article between multiple moving object places along mobile route,
Foregoing control device controls the article carrying car,
Items haulage equipment is characterised by,
Items carrier has receiving portion, cover portion, transfer mechanism, posture changing mechanism,
Foregoing receiving portion accommodates items,
Foregoing cover portion covers the receiving portion,
Foregoing transfer mechanism is in foregoing receiving portion and the aforesaid plurality of moving object place for being located at relative to the receiving portion outside Items are moved between one, carry out the shifting of the items between the moving object place and items carrier Carry,
Foregoing posture changing mechanism changes the posture of the items in carrying,
Foregoing posture changing mechanism can change over the posture of items prime and second, foregoing prime The posture for the transfer being for use as at the foregoing moving object place in carrying source, foregoing second are for use as carrying mesh Ground foregoing moving object place at transfer posture,
Foregoing cover portion is arranged at following location so that foregoing cover portion is being housed inside foregoing receiving portion in aforementioned location The items of state are not done in the case of foregoing prime and in the case of foregoing second with items Relate to, in the i.e. middle appearance of posture that the posture of items is the process changed between foregoing prime and foregoing second In the case of gesture, interfere with items,
Foregoing control device performs posture and changes control, and it is to control as follows that foregoing posture, which changes control,：From foregoing carrying source to The path of foregoing carrying destination is in the way of transport path, makes items relative to foregoing appearance by foregoing transfer mechanism Receive in the state of portion moves laterally, change over items from foregoing prime by foregoing posture changing mechanism foregoing After second, items are contained in foregoing receiving portion by foregoing transfer mechanism.
2. article carrying equipment as claimed in claim 1, it is characterised in that
Foregoing transfer mechanism possesses handle part, elevating mechanism, transverse moving mechanism,
Foregoing handle part holds items, and foregoing elevating mechanism makes foregoing handle part be lifted along vertical, and aforementioned lateral is moved Motivation structure makes foregoing handle part along transverse shifting, aforementioned lateral is laterally come be intersected with foregoing transport path and along level The direction in direction,
Foregoing posture changing mechanism possesses the rotating part for making foregoing handle part rotation around the rotary shaft along foregoing vertical, Posture between foregoing prime and foregoing second changes to be carried out by items around the rotation of foregoing rotary shaft,
Foregoing posture changes control to make items relative to foregoing receiving portion positioned at outer by aforementioned lateral travel mechanism In the state of the mode of side makes foregoing handle part transverse shifting, by making items be rotated around foregoing rotary shaft to carry out.
3. article carrying equipment as claimed in claim 2, it is characterised in that
Foregoing mobile route by from the determination of the track of ceiling hanger bearing,
Foregoing transfer mechanism is also equipped with supporting member, and foregoing supporting member is supported in abovementioned rails or foregoing ceiling, and by The position adjacent with foregoing mobile route is configured at,
Foregoing supporting member is configured to, and makes foregoing holding in a manner of outside is located at relative to foregoing receiving portion by items In the state of portion's transverse shifting, aforementioned lateral travel mechanism is supported in foregoing vertical.
4. the article carrying equipment as any one of claim 1 ~ 3, it is characterised in that
Foregoing posture is performed in the stopping of items carrier of the foregoing control device in the way of foregoing transport path to change Control.
5. the article carrying equipment as any one of claim 1 ~ 4, it is characterised in that
Foregoing control device be located in items the outside of foregoing receiving portion not with foregoing cover portion interfere in the range of and Items based on foregoing transfer mechanism it is on the move in the case of, perform foregoing posture and change control.
6. article carrying equipment as claimed in claim 2 or claim 3, it is characterised in that
In the state of making items relative to foregoing receiving portion laterally transverse shifting by foregoing transfer mechanism, foregoing transfer The region for the foregoing transport path that mechanism and items are not interfered with the miscellaneous part being present in around foregoing transport path It is configured to posture and changes permission region,
Foregoing control device performs foregoing appearance in the case where items carrier is located in foregoing posture change permission region Gesture changes control.
7. article carrying equipment as claimed in claim 6, it is characterised in that
Items are to store the container of Semiconductor substrate,
In foregoing moving object place, including receiving and transmitting part, foregoing receiving and transmitting part is used to carry out the place relative to aforesaid semiconductor substrate The transmitting-receiving of items between the processing unit and items carrier of reason,
Multiple foregoing receiving and transmitting parts are linked by in-process path, and multiple in-process paths are linked by inter process path,
Foregoing posture, which changes, allows region to be configured in the foregoing sequence in foregoing mobile route road between path and foregoing sequence The join domain in footpath.
CN201710859693.3A 2016-09-21 2017-09-21 Article carrying apparatus Active CN107857064B (en)

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CN107857064B (en) 2021-04-06
JP2018049943A (en) 2018-03-29
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TWI717535B (en) 2021-02-01
KR20180032172A (en) 2018-03-29

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