CN101003349A - Bridge type crane system - Google Patents

Bridge type crane system Download PDF

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Publication number
CN101003349A
CN101003349A CNA2006101640602A CN200610164060A CN101003349A CN 101003349 A CN101003349 A CN 101003349A CN A2006101640602 A CNA2006101640602 A CN A2006101640602A CN 200610164060 A CN200610164060 A CN 200610164060A CN 101003349 A CN101003349 A CN 101003349A
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CN
China
Prior art keywords
walking
walking track
working area
article
track
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Granted
Application number
CNA2006101640602A
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Chinese (zh)
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CN101003349B (en
Inventor
盐饱保
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Murata Machinery Ltd
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Murata Machinery Ltd
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Publication of CN101003349A publication Critical patent/CN101003349A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means

Abstract

The invention providing the overhead traveling vehicle system. Buffers 6, 8 are provided on both sides of a travel rail 10 . An overhead traveling vehicle 4 has a SCARA arm movable back and forth to both of the left and right so that a rotation unit 22 and an elevation drive unit 24 can move to a position above either of the buffers 6, 8. Improving the article storage method of the overhead traveling vehicle system.

Description

Bridge type crane system
Technical field
The present invention relates to be provided with the bridge type crane system in working area in the left and right sides of walking track.
Background technology
The applicant once proposed to be provided with in a side of walking track the scheme (patent documentation 1) of the bridge type crane system in working area.Then, the applicant studies the ability of depositing in further increase working area, draws this invention.
[patent documentation 1] TOHKEMY 2005-206371 communique
Summary of the invention
The objective of the invention is to utilize the ceiling space to keep in more article, further improve the conveyance efficient of bridge type crane system.The 2nd purpose of the present invention is to utilize the temporary article in space of processing equipment top.The 3rd purpose of the present invention is will be arranged on the traverse crane of common walking channel side and surmount shared working area between the traverse crane of using the walking channel side.
The present invention is a bridge type crane system, be provided with the walking track of traverse crane along the processing equipment that possesses load port, and traverse crane be provided be used in support and the bay-lift of handing-over article to the horizontal mobile device of the sway of walking track, it is characterized in that, above-mentioned horizontal mobile device makes bay-lift freely move laterally to the left and right sides of walking track, and above-mentioned bridge type crane system is provided with and is used for the working area of the temporary transient keeping of article in each space of the walking track left and right sides.
The walking track is provided with by load port top ground, and all is provided with the working area on the top of processing equipment and the opposite side of looking to processing equipment from the walking track.
Preferably with above-mentioned walking track as the common walking track of walking usefulness, and be provided with the walking track that surmounts usefulness with this walking parallel track; And the walking track of common walking usefulness with surmount between the walking track of usefulness, thereby be provided with by making the bay-lift side travel can join the working area of article from the traverse crane of walking at any walking track.
Therefore the present invention can be provided with more working area because utilization is provided with the working area in the left and right sides of walking track, and the result has improved handling efficiency.
In the space of the 2nd scheme owing to the sky that the working area can be arranged on processing equipment top, therefore more working area can be set.
Setting can be from the shared working area of the traverse crane transfer article of walking any track between the walking track of common walking usefulness and the walking track that surmounts usefulness for the 3rd scheme.This be possible be because traverse crane makes bay-lift freely move laterally to the left and right sides of walking track.Therefore, though have no particular limits, but can article be taken out of in the shared working area from load port with the traverse crane in the walking track of common walking usefulness, with the traverse crane in the walking track that surmounts usefulness article are transported to the destination from shared working area, perhaps conversely, with the traverse crane in the walking track that surmounts usefulness article are moved into shared working area, then these article are moved into load port etc.And, no matter be for surmounting with the walking track or for the walking track of common walking usefulness, can both increasing the quantity in utilizable working area.
Description of drawings
Fig. 1 is the front view of main portion of the bridge type crane system of embodiment, and single-point line expression SCARA type arm is to the attitude of the opposition side advance and retreat of processing equipment, and long and two-short dash line is represented the attitude of SCARA type arm to processing equipment one side advance and retreat.
Fig. 2 is the front view of main portion of the bridge type crane system of variation, and 2 grades of doubly fast load-transfer devices of single-point line expression are to the attitude of the opposition side advance and retreat of processing equipment, and long and two-short dash line is represented the attitude of doubly fast load-transfer device to processing equipment one side advance and retreat.
Fig. 3 is the birds-eye view of layout of main portion of the bridge type crane system of expression embodiment.
Fig. 4 is along look up below Fig. 3 enlarged drawing of Fig. 3 of IV-IV.
Fig. 5 is that expression has been used from the diagram of circuit of common passage algorithm of taking out of continuously from load port of transfer article to bypass channel.
Fig. 6 is the front view of main portion of layout that makes the quantity maximum in working area in the bridge type crane system of expression embodiment.
Fig. 7 is the front view of main portion that is applicable to the layout of low-speed processing device in the bridge type crane system of expression embodiment.
Fig. 8 is the birds-eye view of main portion of the layout of Fig. 7.
The specific embodiment
The following describes and be used to implement the preferred embodiments of the present invention.
[embodiment]
Fig. 1～Fig. 8 represents embodiment and variation thereof.In each figure, 2 is bridge type crane system, utilizes the head room configuration in the clean room for example, and carrying contains the article such as FOUP 28 of semiconductor wafer between the load port of processing equipment or testing fixture etc., in this manual, testing fixture is regarded a kind of of processing equipment as.The kind of carrying article can be arbitrarily, and the path constitutes for 2 kinds between the frame that the walking track is connected to each other by path in the U font frame in the frame that is arranged side by side processing equipment with path in the frame, and traverse crane 4 is all only along a direction walking in every kind of track.In each figure with frame in the path be that the center describes, the left and right sides at the walking track 10 of traverse crane 4 is provided with side working area 6,8, here, side working area 8 is the working area of processing equipment side, and side working area 6 is the working area of the opposite side with processing equipment of looking from walking track 10.
Walking track 10 is supported on by pillar 11 grades on the ceiling etc. of clean room, comprises walking track main body 12 and power supply rail 13.Traverse crane 4 is provided with walking drive division 14, and walking in walking track main body 12 is subjected to electricity by power receiving section 16 from power supply rail 13, and and figure in communicate between the system control device that do not have to represent.Below walking track 10 is the main body pedestal 18 of traverse crane 4, be provided with SCARA type arm as the example of horizontal mobile device (selective compliance assembly robotarm: have the human arm that puts together machines of selecting compliance) 20, make rotating part 22, lifting drive division 24, bay-lift 26 and the article 28 direct of travel side travel vertically almost of direction and walking track 10 to the left and right.In the front and back of traverse crane 4, clip article 28 ground from front and back a pair of anti-fall lower cover 29 is set, in Fig. 1, Fig. 2, remove anti-lost lower cover 29 ground of front side and represent.
SCARA type arm 20 possesses up and down a pair of arm 20a, 20b, and arm 20a, 20b are overlapped up and down along the direction parallel with walking track 10, thus rotating part 22 be positioned at main body pedestal 18 under.When side travel article 28, stretch if make shown in the single-point line of arm 20a, 20b image pattern 1, then article 28 move laterally to the top in side working area 6.And if stretch SCARA type arm 20 shown in the long and two-short dash line of image pattern 1 like that, then article 28 move to the top in side working area 8.Though the anglec of rotation that makes rotating part 22 is just passable in waiting among a small circle in for example ± 5 °, preferably with rotating part 22 make article 28 towards for example 90 ° of rotations, change over the direction that is suitable for processing equipment.Lifting drive division 24 supported by rotating part 22, hangs with band, steel rope or rope etc. and holds member and make bay-lift 26 liftings, the flange on locking freely such as bay-lift 26 usefulness manipulators or release article 28 tops.The position that traverse crane 4 utilizes the position that SCARA type arm 20～bay-lift 26 can be under it and walking track 10 left and right sides and load port or working area 6,8 join article 28.And, can also according to necessity change article 28 towards.In addition, 30 of Fig. 1 is the pillar in side working area 6,8.
Horizontal mobile device is so long as can to make article 28 move laterally to the device of the left and right sides of walking track 10 just passable.The traverse crane 34 of Fig. 2 possesses up and down 2 grades of doubly fast load- transfer device mechanisms 36,38, makes article 28 side travels.Connecting portion 40 is fixed on the load-transfer device of the doubly fast load-transfer device of upside mechanism 36 on the main body pedestal 18.And the doubly fast load-transfer device mechanism 36 of upside under the effect of driver trains such as ball-screw 46 with predetermined stroke with respect to main body pedestal 18 sway.Connecting portion 42 connects the load-transfer device of doubly fast load- transfer device mechanism 36,38 up and down, the doubly fast load-transfer device mechanism 38 of downside under the effect of ball-screw 48 driver trains such as grade with respect to doubly fast load-transfer device mechanism 36 sway of upside.Here, for example with ball- screw 46,48 make up and down doubly fast load- transfer device mechanism 36,38 to the left side of Fig. 2 mobile phase with stroke.Because doubly the used for conveyer belt connecting portion 40 of fast load-transfer device mechanism 36 is fixed on the main body pedestal 18, so connecting portion 42 moves its stroke of 2 times to the left.Then, connecting portion 44 is moved to the left 2 times distance of the stroke of ball-screw 48 with respect to connecting portion 42.So, as the single-point line of Fig. 2, article 28 move to the left side (side opposite with processing equipment) of walking track.When driving ball- screw 46,48 in the opposite direction, the long and two-short dash line of image pattern 2 is such, and article 28 move to the right side (processing equipment one side) of walking track 10.
Fig. 3, Fig. 4 represent the layout of bridge type crane system 2.50,52 is the processing equipment of quartz conductor etc., also can be testing fixture, and the height of processing equipment 50 is low, and its top can be provided with side working area 8, the height height of processing equipment 52, and side working area 8 can be arranged in the space 54 of sky of passage etc.56 be branching portion, 58 for merging portion, 60 for common passage, for be used for and the load port 64 of processing equipment 50,52 between the walking track of transfer article, 62 is bypass passageways, for surmounting the walking track of usefulness.And passage 60 is parallel with bypass passageways 62 usually, connects with branching portion 56 or merging portion 58.
For highly low processing equipment 50, in the space 54 of ceiling space at an upper portion thereof or sky etc. side working area 8 is set, and, in the space 54 of sky, side working area 8 is set for highly high processing equipment 52.In the space of the sky between load port 64, the working area of being supported by the walking track of traverse crane etc., bottom 70 for example is set, but also working area, bottom 70 can be set.Between common passage 60 and bypass passageways 62, shared side working area 6 is being set, both can freely joining article, also can freely join article with the traverse crane of in bypass passageways 62, walking with the traverse crane of walking in passage 60 usually.And, about bypass passageways 62,62 between be provided with and make article side travel side working area 68 of coming freely from the traverse crane of arbitrary bypass passageways, walking.In addition, also side working area 68 can be set.
These arrangement results have improved the temporary ability of bridge type crane system 2 by leaps and bounds.Especially by making article side travel between the left and right sides of traverse crane 4 grades freely, can utilize the space on processing equipment 50 tops, side working area 6,8 can be set in the left and right sides.And the traverse crane for walking in bypass passageways 62 also can be provided with side working area 6,68 in its left and right sides.Further increase under the situation of temporary ability at needs, working area, bottom 70 is set.About bypass passageways 62 in any one side working area 68 can both be used as the working area, and can be used to reverse the carrying direction of article, shorten the carrying path.For example, the temporary transient keeping of the article that will up carry below Fig. 3 in the bypass passageways on right side is side working area 68.Take out of this article if be used in the traverse crane of walking in the bypass passageways 62 in left side of Fig. 3, then the superinverse of carrying direction from Fig. 3 can be forwarded to downwards.If like this article towards being not suitable for processing equipment, with rotating part with article rotation 2 times, each 90 °.If utilize the side working area 6 between common passage 60 and the bypass passageways 62, then traverse crane 4 grades of walking can be exclusively used in join article between load port 64 and side working area 6 in common passage 60, and can be by the burdens such as traverse crane 4 of the walking bypass passageways 62 to carrying destination or the carrying from the departure place to side working area 6 from side working area 6.
That has utilized the side working area takes out of the algorithmic notation of many article among Fig. 5 continuously from load port.Near the common passage of load port of taking out of article is stopped, confirming to have only the walking in stopping the interval of 1 traverse crane, advance, retreat freedom.During this time, other traverse crane is walked in bypass passageways 62.Then, make the traverse crane in the common passage in stopping the interval, advance, retreat, the article transfer of load port is arrived in the side working area 6 of handling the device opposition side.If be provided with this moment such as savings conveyer (accumulationconveyer) etc. in side working area 6, need not make the traverse crane in the common passage advance, retreat, as long as make bay-lift lifting and side travel just passable.6 loaded with articles 28 are transported to the destination to the traverse crane of walking from the side working area in bypass passageways 62.Continue to carry out this operation, till the article of not taking out of, remove stopping of common passage then from load port.In addition, the algorithm of Fig. 5 also can be used for moving into continuously many article in load port 64.At this moment, can article be unloaded into load port 64 from side working area 6, article be moved into side working area 6 with the traverse crane in the bypass passageways 62 with the traverse crane in the common passage.
Load port 64 be arranged on walking track 10 or usually passage 60 under, make the article side travel, help eliminating the reduction of positional precision like this.But, also can image pattern 6 in sides of passage 60 left and right directions usually load port 64 be set like that, side travel by bay-lift and lifting join article.At this moment, be preferably in the space of the sky between the load port 64 side working area 8 is set, between the common passage 60 of the opposite pair of right and left of direction of travel, shared side working area 68 is set.
Fig. 7, Fig. 8 are between the linearity sector that the walking track is set in frame 78 but not traverse crane is made the example that the U font moves in frame.71 is processing equipment, and 72 is merging portion of branch, and 74 is the side working area, and the traverse crane of walking carries out the article handing-over in 78 freely and between the linearity sector, and 76,77 is the main channel, and its direction of travel is represented with the arrow of Fig. 8.
In this embodiment, a number that can enter between 1 linearity sector the traverse crane in 78 simultaneously for example is limited in 1 with inferior, with side working area 74 or working area, bottom 70 temporary transient custody articles.For the frame that has used the slow processing equipment of processing speed 71, the radical of walking track is reduced to 1 from 2, can save the space.And by merging portion of branch 72 is set, make traverse crane between the linearity sector, advance, retreat freedom in 78, can freely select the walking track of traverse crane.In addition, the layout of Fig. 6 or Fig. 7, Fig. 8 is used as the part of the layout of bridge type crane system 2.

Claims (3)

1. bridge type crane system, be provided with the walking track of traverse crane along the processing equipment that possesses load port, and traverse crane be provided be used in support and the bay-lift of handing-over article to the horizontal mobile device of the sway of walking track, it is characterized in that, above-mentioned horizontal mobile device makes bay-lift freely move laterally to the left and right sides of walking track, and above-mentioned bridge type crane system is provided with and is used for the working area of the temporary transient keeping of article in each space of the walking track left and right sides.
2. bridge type crane system as claimed in claim 1 is characterized in that, the walking track is provided with by load port top ground, and all is provided with the working area on the top of processing equipment and the opposite side of looking to processing equipment from the walking track.
3. bridge type crane system as claimed in claim 1 is characterized in that, above-mentioned walking track as the common walking track of walking usefulness, and is provided with the walking track that surmounts usefulness with this walking parallel track; And the walking track of common walking usefulness with surmount between the walking track of usefulness, thereby be provided with by making the bay-lift side travel can join the working area of article from the traverse crane of walking at any walking track.
CN2006101640602A 2006-01-17 2006-12-06 Bridge type crane system Active CN101003349B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP008482/2006 2006-01-17
JP2006008482A JP2007191235A (en) 2006-01-17 2006-01-17 Overhead traveling vehicle system

Publications (2)

Publication Number Publication Date
CN101003349A true CN101003349A (en) 2007-07-25
CN101003349B CN101003349B (en) 2011-11-16

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US (1) US7578240B2 (en)
JP (1) JP2007191235A (en)
KR (1) KR20070076368A (en)
CN (1) CN101003349B (en)
DE (1) DE102007002158B4 (en)
TW (1) TW200738531A (en)

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WO2008024225A2 (en) * 2006-08-18 2008-02-28 Brooks Automation, Inc. Reduced capacity carrier, transport, load port, buffer system
US20080050208A1 (en) * 2006-08-25 2008-02-28 Barry Kitazumi High speed transporter including horizontal belt
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WO2009009069A1 (en) * 2007-07-09 2009-01-15 Middlesex General Industries, Inc. System and method of improving throughput and vehicle utilization of monorail factory transport systems
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WO2011125097A1 (en) * 2010-04-02 2011-10-13 ムラテックオートメーション株式会社 Side buffer for a transport vehicle that travels along the ceiling, and transport vehicle system
US8375865B2 (en) * 2010-09-03 2013-02-19 Jose Alberto Zayas Overhead suspended personal transportation and freight delivery surface transportation system
JP5633738B2 (en) * 2010-09-27 2014-12-03 株式会社ダイフク Goods transport equipment
JP5636849B2 (en) * 2010-09-30 2014-12-10 村田機械株式会社 Transfer system
JP5273118B2 (en) * 2010-10-04 2013-08-28 村田機械株式会社 Transport vehicle and transport system
JP5765549B2 (en) * 2010-10-04 2015-08-19 株式会社ダイフク Article conveying device
JP5750926B2 (en) * 2011-02-15 2015-07-22 村田機械株式会社 Ceiling transport vehicle
JP5310784B2 (en) * 2011-05-16 2013-10-09 村田機械株式会社 Tracked cart system
JP5472209B2 (en) * 2011-05-31 2014-04-16 株式会社ダイフク Goods transport equipment
TWI432369B (en) * 2011-06-22 2014-04-01 Inotera Memories Inc Wafer transfer system
CN103764913B (en) * 2011-08-31 2016-06-15 三菱重工业株式会社 Vehicle track exchanging device and there is the track system traffic system of this vehicle track exchanging device
DE102013100019A1 (en) * 2013-01-02 2014-07-03 Conductix-Wampfler Gmbh Delivery unit for positioning a pantograph unit
WO2015104887A1 (en) * 2014-01-07 2015-07-16 村田機械株式会社 Transfer device and control method of transfer device
KR101922231B1 (en) 2014-09-10 2018-11-26 무라다기카이가부시끼가이샤 Temporary storage system, conveyance system using same, and temporary storage method
JP6505851B2 (en) * 2015-08-28 2019-04-24 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ Substrate processing apparatus and method of manufacturing semiconductor device
JP2018177376A (en) * 2015-09-09 2018-11-15 村田機械株式会社 Conveying system and conveying method
JP6809612B2 (en) * 2017-07-24 2021-01-06 村田機械株式会社 Automated warehouse system and controlled method of automated warehouse system
KR102386052B1 (en) * 2017-08-16 2022-04-14 무라다기카이가부시끼가이샤 The overhead carrier, the conveying system, and the control method of the overhead carrier
JP7114456B2 (en) 2018-12-28 2022-08-08 株式会社Ｓｃｒｅｅｎホールディングス SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
JP7175191B2 (en) * 2018-12-28 2022-11-18 株式会社Ｓｃｒｅｅｎホールディングス SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
SG11202108085UA (en) * 2019-01-25 2021-08-30 Murata Machinery Ltd Transport system
SG11202110216XA (en) * 2019-03-22 2021-10-28 Murata Machinery Ltd Transport vehicle system
US11658053B2 (en) 2019-10-21 2023-05-23 Globalfoundries U.S. Inc. Conversion plate for reticle pod storage and a reticle pod storage system
US11569108B2 (en) 2020-06-15 2023-01-31 Globalfoundries U.S. Inc. Reticle pod conversion plate for interfacing with a tool

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2808989B2 (en) * 1992-06-30 1998-10-08 日産自動車株式会社 Positioning method of body parts by carrier cart
JPH11180505A (en) * 1997-12-22 1999-07-06 Murata Mach Ltd Rail truck system
JP3508130B2 (en) * 2000-09-21 2004-03-22 村田機械株式会社 Transport system
JP2003233422A (en) * 2002-02-06 2003-08-22 Mitsubishi Electric Corp Conveyance system and its control method
EP1535143A4 (en) * 2002-06-19 2010-05-05 Brooks Automation Inc Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
US10957569B2 (en) * 2002-10-11 2021-03-23 Murata Machinery Ltd. Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position
JP3991852B2 (en) * 2002-12-09 2007-10-17 村田機械株式会社 Ceiling carrier system
JP4045451B2 (en) 2003-12-26 2008-02-13 村田機械株式会社 Overhead traveling vehicle system
JP4074999B2 (en) * 2004-01-13 2008-04-16 村田機械株式会社 Conveyor cart system
JP3991229B2 (en) * 2004-01-13 2007-10-17 村田機械株式会社 Conveyor cart system
JP4148194B2 (en) * 2004-07-22 2008-09-10 村田機械株式会社 Conveyor cart system
JP2006051886A (en) * 2004-08-12 2006-02-23 Murata Mach Ltd Ceiling traveling vehicle system
JP4337683B2 (en) * 2004-08-16 2009-09-30 村田機械株式会社 Transport system
JP4296601B2 (en) * 2005-01-20 2009-07-15 村田機械株式会社 Conveyor cart system
JP4221603B2 (en) * 2005-03-31 2009-02-12 村田機械株式会社 Overhead traveling vehicle system
JP4720267B2 (en) * 2005-04-14 2011-07-13 村田機械株式会社 Overhead traveling vehicle system
JP4438095B2 (en) * 2005-05-26 2010-03-24 村田機械株式会社 Transport system
JP2007041687A (en) * 2005-08-01 2007-02-15 Murata Mach Ltd Carryier truck system
JP2007191235A (en) * 2006-01-17 2007-08-02 Murata Mach Ltd Overhead traveling vehicle system

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102556559A (en) * 2010-11-04 2012-07-11 村田自动化机械有限公司 Transport system and transport method
CN103201198A (en) * 2010-11-04 2013-07-10 村田机械株式会社 Conveying system and conveying method
CN103201198B (en) * 2010-11-04 2015-03-11 村田机械株式会社 Conveying system and conveying method
CN102556559B (en) * 2010-11-04 2015-11-18 村田机械株式会社 Conveyer and transport method
CN104302562A (en) * 2012-06-08 2015-01-21 村田机械株式会社 Conveyance system and temporary storage method of articles in conveyance system
CN104302562B (en) * 2012-06-08 2016-09-07 村田机械株式会社 The interim keeping method of the article in handling system and handling system
CN106458443A (en) * 2014-05-14 2017-02-22 村田机械株式会社 Overhead storage system and method for storing loads in overhead space
CN106458444A (en) * 2014-05-14 2017-02-22 村田机械株式会社 Carrying system and carrying method
CN106458443B (en) * 2014-05-14 2019-07-30 村田机械株式会社 The keeping method of cargo in ceiling safeguard system and ceiling space
TWI717535B (en) * 2016-09-21 2021-02-01 日商大福股份有限公司 Article transport facility
CN109911530A (en) * 2017-12-12 2019-06-21 村田机械株式会社 The dispositions method of waggon in delivery wagon and delivery wagon
CN112777194A (en) * 2019-11-07 2021-05-11 株式会社大福 Article carrying apparatus
CN112777194B (en) * 2019-11-07 2024-04-26 株式会社大福 Article handling apparatus

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US7578240B2 (en) 2009-08-25
JP2007191235A (en) 2007-08-02
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