TWI717086B - Pattern forming apparatus, pattern forming method and ejection data generation method - Google Patents

Pattern forming apparatus, pattern forming method and ejection data generation method Download PDF

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Publication number
TWI717086B
TWI717086B TW108139943A TW108139943A TWI717086B TW I717086 B TWI717086 B TW I717086B TW 108139943 A TW108139943 A TW 108139943A TW 108139943 A TW108139943 A TW 108139943A TW I717086 B TWI717086 B TW I717086B
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ink
area
pattern
data
ejection
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TW108139943A
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Chinese (zh)
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TW202033072A (en
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中川雅晴
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日商斯庫林集團股份有限公司
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1241Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing
    • H05K3/125Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing by ink-jet printing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501Control methods or devices therefor, e.g. driver circuits, control circuits
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • B41J29/38Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
    • B41J29/393Devices for controlling or analysing the entire machine ; Controlling or analysing mechanical parameters involving printing of test patterns

Abstract

A pattern forming apparatus ejects droplets of ink of solder resist by inkjet method toward a wiring board (9) to form a pattern of a resist film (92a) on the wiring board (9). An air flow is generated around a through hole by suction to hold the wiring board (9). While forming a pattern of ink of solder resist on the wiring board (9), an ink ejection amount per area to a peripheral applying region (94) around a suction hole (91a) which is a through hole where a suction flow is generated is made larger than that to a region outside the peripheral applying region (94). This makes it possible to form an appropriate resist film on the wiring board (9).

Description

圖案形成裝置、圖案形成方法以及噴出資料生成方法Pattern forming device, pattern forming method, and ejection data generating method

本發明係關於一種在配線基板上以噴墨(ink jet)方式形成圖案(pattern)的技術。 The present invention relates to a technique for forming a pattern on a wiring substrate by ink jet.

習知以來在配線基板上形成有阻劑膜(resist film)的目的係在於保護配線基板上的導體圖案。阻劑膜亦具有在進行後製程(post-process)之焊錫塗布時用以防止焊錫附著於導體配線等之區域的任務,亦被稱為「阻焊劑(solder resist)」。作為形成阻劑膜的一手法係已知有一種以噴墨方式將阻焊劑之墨料(ink)的液滴向配線基板噴出的方法。如此的技術例如已揭示於日本特開平9-283893號公報及特開2008-4820號公報。 Conventionally, the purpose of forming a resist film on a wiring board is to protect the conductor pattern on the wiring board. The resist film also has the task of preventing solder from adhering to areas such as conductor wiring during post-process solder coating, and is also called "solder resist." As a method of forming a resist film, there is known a method of ejecting droplets of solder resist ink to a wiring board by an inkjet method. Such a technique has been disclosed in Japanese Patent Application Publication No. 9-283893 and Japanese Patent Application Publication No. 2008-4820, for example.

可是,由於配線基板會有翹曲或畸變,故而若僅將配線基板單純置放於載置台(stage)上,配線基板之一部分會從載置台隔開。因此,配線基板較佳是以吸引吸附來保持於載置台上。另一方面,大多數的配線基板係具有穿通孔(through hole)。當將具有穿通孔的配線基板保持於載置台上時,會有在穿通孔產生氣流的情形。 However, since the wiring board may be warped or distorted, if the wiring board is simply placed on a stage, a part of the wiring board will be separated from the stage. Therefore, the wiring board is preferably held on the mounting table by suction. On the other hand, most wiring boards have through holes. When a wiring board having a through hole is held on the mounting table, there may be a case where an air flow is generated in the through hole.

當在穿通孔產生空氣被吸入的氣流時,以噴墨方式飛來的墨料之液滴會被穿通孔所吸引且有附著於穿通孔之內面或液滴進入載置台 之吸引部之虞。到達配線基板上的液滴亦會從設計上的位置偏離。當墨料之液滴的到達位置偏離時,會有墨料附著於不必要的區域或產生墨料之附著量不足的區域之虞。 When the air flow in which the air is sucked in is generated in the through hole, the ink droplets flying in the inkjet method will be attracted by the through hole and attached to the inner surface of the through hole or the droplets enter the mounting table The concern of the attraction department. The droplets arriving on the wiring board will also deviate from the design position. When the arrival position of the ink droplets deviates, the ink may adhere to unnecessary areas or produce areas with insufficient ink adhesion.

如以上,當空氣由穿通孔所吸引時,就無法在穿通孔之周圍適當地賦予墨料,且阻劑膜不會成為設計上的形狀或厚度。如此的問題係不限定於阻焊劑之墨料的塗布,即使是在配線基板上以噴墨方式描繪字元或圖形的情況或將其他用途之液體塗布於配線基板上的情況下也可能會發生。 As described above, when air is attracted by the through hole, ink cannot be properly applied around the through hole, and the resist film will not become the designed shape or thickness. Such a problem is not limited to the application of solder resist ink, and it may occur even when characters or graphics are drawn on the wiring board by inkjet or when liquids for other purposes are applied on the wiring board. .

本發明係關於一種圖案形成裝置,用以在配線基板上賦予墨料,藉此在前述配線基板上形成前述墨料之圖案。本發明之一較佳形態的圖案形成裝置係具備:保持部,係將具有穿通孔的前述配線基板藉由吸引而保持於平面上;頭部,係以噴墨方式將前述墨料之液滴向前述配線基板噴出;移動機構,係將前述頭部相對於前述保持部向與前述配線基板平行的方向相對地移動;以及控制部,係控制前述頭部及前述移動機構,藉此在作為周圍賦予區域且藉由前述保持部所為之吸引時產生吸流(suction flow)的前述穿通孔之周圍的墨料之賦予區域中,將每一單位面積之前述墨料的噴出量設為比前述周圍賦予區域的外側之區域中的每一單位面積之前述墨料的噴出量更多並且在前述配線基板上形成前述墨料之圖案。 The present invention relates to a pattern forming device for applying ink on a wiring substrate, thereby forming a pattern of the ink on the wiring substrate. A preferred aspect of the pattern forming apparatus of the present invention is provided with: a holding portion for holding the wiring substrate with through holes on a plane by suction; and a head portion for discharging droplets of the ink by inkjet Ejected to the wiring board; a moving mechanism that relatively moves the head relative to the holding portion in a direction parallel to the wiring board; and a control portion that controls the head and the moving mechanism to act as a surrounding In the ink application area around the through-hole that generates suction flow when sucked by the holding portion, the ejection amount of the ink per unit area is set to be higher than that of the surrounding area. The ejection amount of the ink per unit area in the area outside the application area is greater and the pattern of the ink is formed on the wiring board.

依據本發明,能夠在以噴墨方式在配線基板上形成圖案 時在穿通孔之周圍形成適當的圖案。 According to the present invention, it is possible to form a pattern on a wiring substrate by inkjet Then form an appropriate pattern around the through hole.

較佳為前述控制部係包含:記憶部,係記憶穿通孔資料(through hole data)及墨料圖案資料(ink pattern data),前述穿通孔資料係表示前述穿通孔之圖案,前述墨料圖案資料係表示前述墨料之設計上的圖案;以及噴出資料生成部,係基於前述穿通孔資料及前述墨料圖案資料而生成噴出資料,前述噴出資料係表示從前述頭部向前述配線基板上之各個位置噴出的前述墨料之量。 Preferably, the control portion includes: a memory portion, which stores through hole data and ink pattern data, the through hole data represents the pattern of the through hole, and the ink pattern data It represents the design pattern of the aforementioned ink; and the ejection data generating section generates ejection data based on the aforementioned through-hole data and the aforementioned ink pattern data, and the aforementioned ejection data represents the direction from the head to each of the wiring boards. The amount of the aforementioned ink ejected from the position.

更佳是前述噴出資料生成部係在前述穿通孔之周圍的設計上之塗布區域的內周部設定噴出禁止區域,且在前述噴出禁止區域之外側設定前述周圍賦予區域。 More preferably, the ejection data generating section sets an ejection prohibition area on the inner periphery of the design coating area around the through hole, and sets the peripheral provision area outside the ejection prohibition area.

較佳為在前述周圍賦予區域中,每一單位面積之前述墨料的噴出量係隨著靠近前述穿通孔而增大。 Preferably, in the aforementioned peripheral provision area, the ejection amount of the ink per unit area increases as it approaches the through hole.

較佳為在前述配線基板所具有的全部的前述穿通孔之前述周圍賦予區域中,每一單位面積之前述墨料的噴出量係比前述周圍賦予區域之外側的區域中的每一單位面積之前述墨料的噴出量更多。 Preferably, in the peripheral providing area of all the through-holes included in the wiring board, the ejection amount of the ink per unit area is greater than that of each unit area in the area outside the peripheral providing area. The ejection amount of the aforementioned ink is larger.

較佳為在藉由前述保持部所為之吸引時產生吸流的全部的前述穿通孔之前述周圍賦予區域中,每一單位面積之前述墨料的噴出量係比前述周圍賦予區域之外側的區域中的每一單位面積之前述墨料的噴出量更多。 Preferably, in the peripheral providing area of all the through holes that generate suction when sucked by the holding portion, the ejection amount of the ink per unit area is greater than the area outside the peripheral providing area The ejection amount of the aforementioned ink per unit area is more.

本發明之另一較佳形態的圖案形成裝置係具備:保持部,係將具有穿通孔的配線基板藉由吸引而保持於平面上;頭部,係以噴墨方式將前述墨料之液滴向前述配線基板噴出;移動機構,係將前述 頭部相對於前述保持部向與前述配線基板平行的方向相對地移動;以及控制部,係控制前述頭部及前述移動機構,藉此在前述配線基板上形成前述墨料之圖案;前述控制部係具備:記憶部,係記憶穿通孔資料及墨料圖案資料,前述穿通孔資料係表示前述穿通孔之圖案,前述墨料圖案資料係表示前述墨料之設計上的圖案;以及噴出資料生成部,係基於前述穿通孔資料及前述墨料圖案資料而生成噴出資料,前述噴出資料係表示從前述頭部向前述配線基板上之各個位置噴出的前述墨料之量;前述噴出資料生成部係在前述穿通孔之周圍的設計上的前述墨料之賦予區域的內周部設定噴出禁止區域。 Another preferred form of the pattern forming apparatus of the present invention is provided with: a holding portion for holding a wiring substrate with through holes on a plane by suction; a head portion for discharging droplets of the aforementioned ink by inkjet Spray to the aforementioned wiring board; the moving mechanism is the aforementioned The head portion relatively moves in a direction parallel to the wiring board with respect to the holding portion; and the control portion controls the head and the moving mechanism, thereby forming the ink pattern on the wiring board; the control portion It is provided with: a memory unit for storing through hole data and ink pattern data, the through hole data represents the pattern of the through hole, the ink pattern data represents the pattern on the design of the ink; and the ejection data generating unit , The ejection data is generated based on the through hole data and the ink pattern data. The ejection data represents the amount of the ink ejected from the head to each position on the wiring board; the ejection data generating unit is in The inner circumference of the ink application area in the design around the through hole is set to an ejection prohibition area.

依據本發明,能夠在以噴墨方式在配線基板上形成圖案時,在穿通孔之周圍形成適當的圖案。 According to the present invention, it is possible to form an appropriate pattern around the through hole when the pattern is formed on the wiring substrate by the inkjet method.

本發明亦關於一種圖案形成方法,用以在配線基板上賦予墨料,藉此在前述配線基板上形成前述墨料之圖案。本發明之一較佳形態的圖案形成方法係具備:a)工序,係將具有穿通孔的前述配線基板利用藉由保持部所為之吸引而保持於平面上;b)工序,係以噴墨方式將前述墨料之液滴從頭部向前述配線基板噴出;以及c)工序,係將前述頭部相對於前述配線基板向與前述配線基板平行的方向相對地移動;藉由前述b)工序及前述c)工序,在作為周圍賦予區域且藉由前述保持部所為之吸引時產生吸流的前述穿通孔之周圍的前述墨料之賦予區域中,將每一單位面積之前述墨料的噴出量設為比前述周圍賦予區域之外側的區域中的每一單位面積之前述墨料的噴出量更多並且在前述配線基板上形成有前述墨料之圖案。 The present invention also relates to a pattern forming method for applying ink on a wiring substrate, thereby forming a pattern of the ink on the wiring substrate. A pattern forming method of a preferred form of the present invention includes: a) step of holding the above-mentioned wiring substrate with through holes on a plane by suction by the holding portion; b) step of using an inkjet method The ink droplets are ejected from the head to the wiring board; and c) step is to move the head relative to the wiring board in a direction parallel to the wiring board; by the step b) and the foregoing c) A step of setting the ejection amount of the ink per unit area in the ink application area around the through-hole that is sucked when sucked by the holding portion as a surrounding area. The ejection amount of the ink per unit area is greater than the area outside the surrounding provision area, and the pattern of the ink is formed on the wiring board.

本發明亦關於一種噴出資料生成方法,用以生成噴出資料,該噴出資料係在以噴墨方式將墨料之液滴從頭部向配線基板噴出時所使用。本發明之一較佳形態的噴出資料生成方法係具備:準備穿通孔資料及墨料圖案資料的工序,前述穿通孔資料係表示前述配線基板上的穿通孔之圖案,前述墨料圖案資料係表示前述配線基板上之設計上的前述墨料之圖案;以及基於前述穿通孔資料及前述墨料圖案資料而生成前述噴出資料的工序,前述噴出資料係在作為周圍賦予區域且利用吸引將前述配線基板保持於平面上時產生吸流的前述穿通孔之周圍的前述墨料之賦予區域中將每一單位面積之墨料的噴出量設為比前述周圍賦予區域之外側的區域中的每一單位面積之墨料的噴出量更多。 The present invention also relates to a method for generating ejection data, which is used when ink droplets are ejected from the head to the wiring substrate by an inkjet method. A preferred aspect of the ejection data generation method of the present invention includes the steps of preparing through hole data and ink pattern data. The through hole data represents the pattern of through holes on the wiring substrate, and the ink pattern data represents The pattern of the ink on the design of the wiring board; and the process of generating the ejection data based on the through hole data and the ink pattern data. The ejection data is provided as a surrounding area and the wiring board is drawn by suction. When held on a flat surface, the ink application area around the through-hole that generates suction is set to have a discharge amount of ink per unit area per unit area in the area outside the peripheral application area. The ink ejection volume is more.

本發明之另一較佳形態的噴出資料生成方法係具備:準備穿通孔資料及墨料圖案資料的工序,前述穿通孔資料係表示配線基板上的穿通孔之圖案,前述墨料圖案資料係表示前述配線基板上之設計上的前述墨料之圖案;以及基於前述穿通孔資料及前述墨料圖案資料而生成前述噴出資料的工序,前述噴出資料係在利用吸引將前述配線基板保持於平面上時產生吸流的前述穿通孔之周圍的設計上的前述墨料之賦予區域的內周部設定噴出禁止區域。 Another preferred form of the ejection data generation method of the present invention includes the steps of preparing through hole data and ink pattern data. The through hole data represents the pattern of through holes on the wiring substrate, and the ink pattern data represents The design of the ink pattern on the wiring substrate; and the process of generating the ejection data based on the through hole data and the ink pattern data, the ejection data being used when the wiring substrate is held on a flat surface by suction The inner peripheral portion of the ink application area in the design around the through hole that generates the suction flow is set to an ejection prohibition area.

上述之目的及其他之目的、特徵、態樣及優點係參照所附圖式並藉由以下所進行的本發明之詳細說明而明白。 The above-mentioned objects and other objects, features, aspects and advantages are understood with reference to the accompanying drawings and the following detailed description of the present invention.

1:圖案形成裝置 1: Pattern forming device

2:移動機構 2: mobile agency

2a:Y方向移動機構 2a: Y direction moving mechanism

2b:X方向移動機構 2b: X direction moving mechanism

3:頭部 3: head

4:槽 4: slot

5:電腦 5: Computer

8:記錄媒體 8: Recording media

9:配線基板(印刷配線基板) 9: Wiring board (printed wiring board)

11:本體 11: body

12:控制部 12: Control Department

21:載置台(保持部) 21: Mounting table (holding part)

41:管件 41: pipe fittings

51:中央處理單元 51: Central Processing Unit

52:ROM 52: ROM

53:RAM 53: RAM

54:固定磁碟 54: fixed disk

55:顯示器 55: display

56:輸入部 56: Input section

56a:鍵盤 56a: keyboard

56b:滑鼠 56b: Mouse

57:讀取裝置 57: reading device

58:通信部 58: Ministry of Communications

61:噴出資料生成部 61: Ejection data generation department

62:記憶部 62: Memory Department

71:穿通孔資料 71: Through hole data

72:墨料圖案資料 72: Ink pattern data

73:載置台資訊 73: Platform Information

75:噴出資料 75: Squirting data

80:程式 80: program

91:穿通孔 91: Through hole

91a:吸氣孔 91a: suction hole

92,92a:阻劑膜 92, 92a: Resist film

93:噴出禁止區域 93: Ejection prohibited area

94:周圍賦予區域 94: surrounding area

211:吸孔 211: Suction Hole

212:溝槽 212: groove

611:修正部 611: Correction Department

612:吸氣孔特定部 612: suction hole specific part

613:轉換部 613: Conversion Department

901:空隙區域(區域) 901: void area (area)

911:內周面 911: inner circumference

920:塗布區域(區域) 920: coating area (area)

921:內周緣 921: inner periphery

X,Y,Z:方向 X, Y, Z: direction

[圖1]係顯示圖案形成裝置之外觀的立體圖。 [Figure 1] is a perspective view showing the appearance of the pattern forming device.

[圖2]係顯示電腦之構成的圖。 [Figure 2] is a diagram showing the structure of a computer.

[圖3]係顯示藉由電腦所實現之功能構成的圖。 [Figure 3] is a diagram showing the functional composition realized by a computer.

[圖4]係顯示圖案形成裝置的動作之流程的圖。 [Fig. 4] A diagram showing the flow of the operation of the pattern forming apparatus.

[圖5]係載置台的俯視圖。 [Figure 5] A plan view of the mounting table.

[圖6]係顯示配線基板已載置於載置台上之狀態的俯視圖。 [Fig. 6] is a plan view showing the state where the wiring board has been placed on the mounting table.

[圖7]係顯示吸氣孔(aspiration hole)的縱剖視圖。 [Fig. 7] A longitudinal sectional view showing an aspiration hole.

[圖8]係顯示不存在吸流之情況的液滴之飛翔的圖。 [Figure 8] is a diagram showing the flight of a droplet without suction.

[圖9]係顯示存在吸流之情況的液滴之飛翔的圖。 [Figure 9] A diagram showing the flight of a droplet with suction.

[圖10]係顯示存在吸流且不進行修正之情況的阻劑膜的圖。 [Fig. 10] A diagram showing a resist film in which there is suction and no correction is made.

[圖11]係顯示噴出禁止區域與周圍賦予區域的縱剖視圖。 [Fig. 11] A longitudinal cross-sectional view showing the ejection prohibited area and the surrounding area.

[圖12]係顯示噴出禁止區域與周圍賦予區域的俯視圖。 [Fig. 12] A plan view showing the ejection prohibited area and the surrounding area.

[圖13]係顯示設計上的墨料量之輪廓(profile)的圖。 [Figure 13] is a diagram showing the profile of the amount of ink on the design.

[圖14]係顯示修正後的墨料量之輪廓的圖。 [Figure 14] is a diagram showing the contour of the corrected ink volume.

[圖15]係顯示修正後的墨料量之輪廓之另一例的圖。 [Figure 15] is a diagram showing another example of the contour of the corrected ink volume.

[圖16]係顯示修正後的墨料量之輪廓之更另一例的圖。 [Figure 16] is a diagram showing another example of the contour of the corrected ink volume.

圖1係顯示圖案形成裝置1之外觀的立體圖。圖案形成裝置1係在印刷配線基板(以下簡稱為「配線基板」)9上賦予阻焊劑之墨料,藉此在配線基板9上形成阻劑膜之圖案。配線基板9雖然較佳是板狀之 構件,但是亦可為具有可撓性的片(sheet)狀之構件。阻劑膜係保護配線基板9上的導體圖案。在導體圖案中係包含有配線、焊盤(land)以及其他的圖案。阻劑膜係不被形成於:在後製程中供焊錫膏(solder paste)塗布的區域、或非供阻劑膜設置的其他區域。 FIG. 1 is a perspective view showing the appearance of the pattern forming device 1. The pattern forming apparatus 1 applies a solder resist ink on a printed wiring board (hereinafter referred to as “wiring board”) 9 to form a resist film pattern on the wiring board 9. Although the wiring board 9 is preferably plate-shaped The member may be a sheet-shaped member having flexibility. The resist film protects the conductor pattern on the wiring board 9. The conductor pattern includes wiring, land, and other patterns. The resist film is not formed in the area where the solder paste is applied in the subsequent process, or other areas where the resist film is not provided.

圖案形成裝置1係具備本體11及控制部12。本體11係具備:Y方向移動機構2a,係將配線基板9向與配線基板9平行的Y方向移動;頭部3,係向移動途中的配線基板9噴出阻焊劑之墨料(以下簡稱為「墨料」)的微小液滴;X方向移動機構2b,係將頭部3向與Y方向垂直且與配線基板9平行的X方向移動;以及槽(tank)4,係貯存供給至頭部3的墨料。以下,將Y方向移動機構2a及X方向移動機構2b統稱為「移動機構2」。作為Y方向移動機構2a及X方向移動機構2b係可利用複數種機構。例如可採用安裝有馬達的滾珠螺桿(ball screw)機構,亦可採用線性馬達(linear motor)。控制部12係控制移動機構2及頭部3。墨料係從槽4經由管件(tube)41供給至頭部3。 The pattern forming apparatus 1 includes a main body 11 and a control unit 12. The main body 11 is equipped with a Y-direction moving mechanism 2a, which moves the wiring board 9 in the Y direction parallel to the wiring board 9, and a head 3, which sprays solder resist ink (hereinafter referred to as " Ink"); X-direction moving mechanism 2b, which moves the head 3 in the X direction perpendicular to the Y direction and parallel to the wiring substrate 9; and a tank 4, which stores and supplies to the head 3 Of ink. Hereinafter, the Y-direction moving mechanism 2a and the X-direction moving mechanism 2b are collectively referred to as "moving mechanism 2". As the Y-direction moving mechanism 2a and the X-direction moving mechanism 2b, multiple mechanisms can be used. For example, a ball screw mechanism with a motor can be used, or a linear motor can be used. The control unit 12 controls the moving mechanism 2 and the head 3. The ink system is supplied from the tank 4 to the head 3 via a tube 41.

Y方向移動機構2a係具有保持部21,該保持部21係保持配線基板9。在本實施形態中,保持部21為載置台,以下將保持部21稱為「載置台21」。配線基板9係藉由吸引而保持於載置台21上。載置台21之上表面實質上是平面,載置台21係將配線基板9保持於平面上。在本實施形態中,如後述般地形成有從已設置於載置台21之表面的孔向水平方向延伸的溝槽,孔係連接於未圖示的吸引裝置。從孔進行空氣之吸引,藉此可在溝槽之區域吸附配線基板9(參照圖5)。配線基板9之保持亦可藉由其他的複數種手法來進行。例如亦可在載置台21之表面形成有複數個孔並從複數個孔進行吸引。載置台21亦可由多孔質材料所 形成且從多孔質材料進行吸引。 The Y-direction moving mechanism 2a has a holding portion 21 that holds the wiring board 9. In this embodiment, the holding part 21 is a mounting table, and the holding part 21 is called "the mounting table 21" below. The wiring board 9 is held on the mounting table 21 by suction. The upper surface of the mounting table 21 is substantially flat, and the mounting table 21 holds the wiring board 9 on the flat surface. In this embodiment, as described later, a groove extending in the horizontal direction from a hole provided on the surface of the mounting table 21 is formed, and the hole is connected to a suction device (not shown). The air is sucked from the hole, so that the wiring board 9 can be sucked in the groove area (refer to FIG. 5). The holding of the wiring board 9 can also be performed by other plural methods. For example, a plurality of holes may be formed on the surface of the mounting table 21 and suction may be performed from the plurality of holes. The mounting table 21 can also be made of porous material. It is formed and sucked from the porous material.

在頭部3係設置有噴出單元,該噴出單元係具有等間隔地排列於X方向的複數個噴出口。從各個噴出口以噴墨方式噴出墨料之液滴。墨料係朝向配線基板9並向圖1之(-Z)方向噴出。作為噴墨方式係可利用複數種的構造,可利用的構造係有利用壓電(piezo)的構造或利用加熱器(heater)的構造。 The head 3 is provided with a discharge unit, and the discharge unit has a plurality of discharge ports arranged at equal intervals in the X direction. The ink droplets are ejected from each ejection port in an ink-jet manner. The ink is ejected toward the wiring board 9 in the (-Z) direction of FIG. 1. As the inkjet system, a plurality of structures can be used, and the usable structure is a structure using a piezo or a structure using a heater.

一邊從複數個噴出口噴出墨料之液滴一邊使載置台21藉由Y方向移動機構2a向與配線基板9平行的Y方向移動,藉此可對於Y方向延伸的區域賦予墨料。以下,亦將配線基板9之Y方向的移動稱為「主掃描」。實際上在配線基板9之一次主掃描中會在配線基板9上形成有與複數個噴出口對應的複數個墨料之線。當一次主掃描完成時,頭部3會藉由X方向移動機構2b向與配線基板9平行的X方向些微地移動,配線基板9會藉由Y方向移動機構2a向(-Y)方向移動。藉此,可進行第二次的主掃描且與以前次的主掃描所形成的墨料之各條線鄰接而形成有墨料之線。 While ejecting ink droplets from a plurality of ejection ports, the mounting table 21 is moved in the Y direction parallel to the wiring substrate 9 by the Y direction moving mechanism 2a, whereby ink can be applied to the area extending in the Y direction. Hereinafter, the movement of the wiring board 9 in the Y direction is also referred to as "main scanning". In fact, in one main scan of the wiring board 9, a plurality of ink lines corresponding to a plurality of ejection ports are formed on the wiring board 9. When one main scan is completed, the head 3 is slightly moved in the X direction parallel to the wiring substrate 9 by the X direction moving mechanism 2b, and the wiring substrate 9 is moved in the (-Y) direction by the Y direction moving mechanism 2a. Thereby, the second main scan can be performed and the ink lines are formed adjacent to the lines of the ink formed by the previous main scan.

反覆進行主掃描預定次數,藉此在與複數個噴出口的X方向之排列寬度大致相等的寬度之區域形成有阻劑膜。由於阻劑膜係僅形成於必要的區域故而能正確地形成阻劑膜之圖案。以下,將與複數個噴出口的X方向之排列寬度大致相等的寬度稱為「單元寬度」,將以該寬度來形成阻劑膜的區域稱為「單元區域」。當在一個單元區域形成有阻劑膜時,頭部3會藉由X方向移動機構2b向X方向移動達至單元寬度,且藉由反覆進行上述之主掃描而在與前次之單元區域鄰接 的單元區域形成有阻劑膜。 The main scan is repeatedly performed a predetermined number of times, whereby a resist film is formed in an area having a width substantially equal to the arrangement width of the plurality of ejection ports in the X direction. Since the resist film is formed only in the necessary area, the pattern of the resist film can be formed accurately. Hereinafter, the width substantially equal to the arrangement width of the plurality of ejection ports in the X direction is referred to as "cell width", and the area where the resist film is formed with this width is referred to as "cell area". When a resist film is formed in a unit area, the head 3 is moved in the X direction by the X-direction moving mechanism 2b to reach the unit width, and is adjacent to the previous unit area by repeatedly performing the above-mentioned main scan A resist film is formed in the cell area.

反覆進行單元區域上的阻劑膜之形成以及頭部3往X方向之移動,藉此在配線基板9之必要的區域整體形成有阻劑膜之圖案。 The formation of the resist film on the cell area and the movement of the head 3 in the X direction are repeated, thereby forming a pattern of the resist film on the entire necessary area of the wiring substrate 9.

圖2係顯示控制部12所具有的電腦5之構成的圖。電腦5係成為包含CPU(Central Processing Unit;中央處理單元)51、ROM(Read Only Memory;唯讀記憶體)52及RAM(Random Access Memory;隨機存取記憶體)53的一般電腦系統之構成,該CPU51係進行各種運算處理,該ROM52係記憶基本程式(basic program),該RAM53係記憶各種資訊。電腦5係更包含:固定磁碟(fixed disk)54,係進行資訊記憶;顯示器(display)55,係進行影像等的各種資訊之顯示;作為輸入部56的鍵盤(keyboard)56a及滑鼠(mouse)56b,係受理來自操作員的輸入;讀取裝置57,係從光碟、磁碟、磁光碟、記憶卡(memory card)等之電腦可讀取的記錄媒體8進行資訊之讀取;以及通信部58,係在與本體11之間收發信號。 FIG. 2 is a diagram showing the configuration of the computer 5 included in the control unit 12. Computer 5 has become a general computer system including CPU (Central Processing Unit) 51, ROM (Read Only Memory) 52 and RAM (Random Access Memory) 53. The CPU 51 performs various calculations, the ROM 52 stores basic programs, and the RAM 53 stores various information. The computer series 5 further includes: a fixed disk 54 for information storage; a display 55 for displaying various information such as images; a keyboard 56a and a mouse as the input unit 56 ( mouse) 56b, which accepts input from the operator; reading device 57, which reads information from a computer-readable recording medium 8 such as optical discs, magnetic discs, magneto-optical discs, and memory cards; and The communication unit 58 transmits and receives signals to and from the main body 11.

在電腦5中係事前經由讀取裝置57從記錄媒體8讀取程式80並記憶於固定磁碟54。程式80亦可經由網路(network)記憶於固定磁碟54。CPU51係按照程式80一邊利用RAM53或固定磁碟54一邊執行運算處理。CPU51係在電腦5中具有作為運算部的功能。亦可採用CPU51以外具有作為運算部的功能之其他的構成。 The computer 5 reads the program 80 from the recording medium 8 via the reading device 57 in advance and stores it on the fixed disk 54. The program 80 can also be stored on the fixed disk 54 via a network. The CPU 51 executes arithmetic processing while using the RAM 53 or the fixed disk 54 in accordance with the program 80. The CPU 51 has a function as an arithmetic unit in the computer 5. It is also possible to adopt other configurations that have a function as an arithmetic unit other than the CPU 51.

圖3係顯示藉由電腦5按照程式80執行運算處理所實現之功能構成的圖。在此等的功能構成中係包含有噴出資料生成部61及記憶部62。記憶部62係對應於RAM53以及固定磁碟54等。噴出資料生成部61係包含修正部611及轉換部613。修正部611係依需要而包含吸氣孔特定部612。 此等的功能之全部或一部分亦可藉由專用的電子電路所實現。另外,亦可藉由複數個電腦來實現此等的功能。 FIG. 3 is a diagram showing the functional structure realized by the computer 5 executing arithmetic processing according to the program 80. These functional configurations include a discharge data generation unit 61 and a storage unit 62. The memory 62 corresponds to the RAM 53 and the fixed disk 54 and so on. The ejection data generation unit 61 includes a correction unit 611 and a conversion unit 613. The correcting part 611 includes a suction hole specifying part 612 as needed. All or part of these functions can also be realized by dedicated electronic circuits. In addition, multiple computers can also be used to implement these functions.

圖4係顯示圖案形成裝置1的動作之流程的圖。圖4之步驟S12至S14是藉由控制部12所為的運算處理,步驟S15是藉由控制部12之控制所為的本體11之動作。在記憶部62係事先記憶並準備有經由通信部58以及讀取裝置57等所輸入的穿通孔資料71及墨料圖案資料72(步驟S11)。穿通孔資料71係表示配線基板9所具有的穿通孔之位置及大小,亦即穿通孔之圖案。墨料圖案資料72係表示應形成於配線基板9之設計上的阻劑圖案。穿通孔資料71及墨料圖案資料72可為向量資料(vector data)或亦可為光柵資料(raster data)。在記憶部62係依需要而記憶並準備有載置台資訊73。載置台資訊73係表示在載置台21上進行吸引的區域亦即吸附配線基板9的區域。 FIG. 4 is a diagram showing the flow of the operation of the pattern forming apparatus 1. Steps S12 to S14 in FIG. 4 are arithmetic processing performed by the control unit 12, and step S15 is an operation of the main body 11 performed by the control of the control unit 12. The through hole data 71 and the ink pattern data 72 input via the communication unit 58 and the reading device 57 and the like are stored and prepared in the storage unit 62 in advance (step S11). The through hole data 71 indicates the position and size of the through hole of the wiring substrate 9, that is, the pattern of the through hole. The ink pattern data 72 indicates the resist pattern to be formed on the design of the wiring substrate 9. The through hole data 71 and the ink pattern data 72 may be vector data or raster data. The storage unit 62 memorizes and prepares mounting table information 73 as needed. The mounting table information 73 indicates the area where suction is performed on the mounting table 21, that is, the area where the wiring substrate 9 is suctioned.

圖5是載置台21的俯視圖。載置台21係在X方向及Y方向等間隔地設置有吸孔(suction hole)211。吸孔211係開口於載置台21之表面。吸孔211係經由載置台21內而連接於吸引裝置,例如連接於真空泵。吸孔211亦可連接於在設置有圖案形成裝置1之房間內所設置的真空配管(vacuum pipe)。 FIG. 5 is a plan view of the mounting table 21. The mounting table 21 is provided with suction holes 211 at equal intervals in the X direction and the Y direction. The suction hole 211 is opened on the surface of the mounting table 21. The suction hole 211 is connected to a suction device, such as a vacuum pump, via the inside of the mounting table 21. The suction hole 211 may also be connected to a vacuum pipe installed in the room where the pattern forming device 1 is installed.

在載置台21之表面係設置有從吸孔211沿載置台21之表面延伸的溝槽212。在圖5之例中,溝槽212係從吸孔211向X方向及Y方向延伸。載置台21上載置有配線基板9並從吸孔211進行吸引,藉此溝槽212內部會被減壓,配線基板9可由載置台21所吸附。 A groove 212 extending from the suction hole 211 along the surface of the mounting table 21 is provided on the surface of the mounting table 21. In the example of FIG. 5, the groove 212 extends from the suction hole 211 in the X direction and the Y direction. The wiring substrate 9 is placed on the mounting table 21 and sucked from the suction hole 211, whereby the inside of the groove 212 is reduced in pressure, and the wiring substrate 9 can be sucked by the mounting table 21.

圖6係顯示配線基板9已載置於載置台21上之狀態的俯視圖。在圖6中係以虛線來表示溝槽212。配線基板9係具有複數個穿通孔91。 在俯視觀察下,空氣會從與溝槽212重疊的穿通孔91流入。以下將在穿通孔91產生的空氣之流動稱為「吸流」。將藉由載置台21所為之吸引時產生吸流的穿通孔91稱為「吸氣孔」。在圖6中,係於某幾個吸氣孔附記元件符號91a。 FIG. 6 is a plan view showing a state where the wiring board 9 has been placed on the mounting table 21. In FIG. 6, the groove 212 is represented by a broken line. The wiring board 9 has a plurality of through holes 91. In a plan view, air flows in from the through hole 91 overlapping the groove 212. Hereinafter, the flow of air generated in the through hole 91 is referred to as "suction flow". The through hole 91 that generates suction when sucked by the mounting table 21 is referred to as an "suction hole". In FIG. 6, component symbols 91a are attached to certain suction holes.

圖7係顯示吸氣孔91a的縱剖視圖。在吸氣孔91a與溝槽212重疊的情況下,從吸氣孔91a流入的空氣係經由溝槽212而導引至圖6所示的吸孔211。在圖7中亦以虛線來表示形成於配線基板9的預定之設計上的阻劑膜92。設計上的阻劑膜92為固定的厚度。設計上的阻劑膜92係以不存在吸流為前提。在此情況下,如圖8之虛線箭頭所示,來自頭部3的墨料之液滴係朝向配線基板9於(-Z)方向直線前進。 Fig. 7 is a longitudinal sectional view showing the suction hole 91a. When the suction hole 91a overlaps the groove 212, the air flowing in from the suction hole 91a is guided to the suction hole 211 shown in FIG. 6 via the groove 212. In FIG. 7, the resist film 92 formed on the predetermined design of the wiring substrate 9 is also indicated by a broken line. The designed resist film 92 has a fixed thickness. The design of the resist film 92 is based on the premise that there is no suction. In this case, as shown by the dashed arrow in FIG. 8, the ink droplets from the head 3 move straight toward the wiring substrate 9 in the (-Z) direction.

可是,在存在吸流的情況下,如圖9之虛線箭頭所示,來自頭部3的墨料之液滴係被向吸氣孔91a吸引。結果,如圖10所示,實際的阻劑膜92a係附著於吸氣孔91a之內周面且在吸氣孔91a之周圍的阻劑膜92a會變薄。 However, in the presence of suction, as shown by the dotted arrow in FIG. 9, the ink droplets from the head 3 are attracted to the suction hole 91a. As a result, as shown in FIG. 10, the actual resist film 92a is attached to the inner peripheral surface of the suction hole 91a and the resist film 92a around the suction hole 91a becomes thinner.

為了消除如此的問題,在圖案形成裝置1中係從複數個穿通孔91之中特定吸氣孔91a(步驟S12),且在吸氣孔91a之周圍中進行墨料圖案資料72之修正(步驟S13)。 In order to eliminate such a problem, in the pattern forming apparatus 1, the suction hole 91a is specified from the plurality of through holes 91 (step S12), and the ink pattern data 72 is corrected around the suction hole 91a (step S12). S13).

吸氣孔91a之特定亦可不一定要進行。例如在載置台21由多孔質材料所形成,且在配線基板9所具有的全部穿通孔91中產生吸流的情況下,可在全部穿通孔91之周圍中進行墨料圖案資料72之修正。又,即使是在一部分之穿通孔91不產生吸流的情況下,只要作為阻劑膜不發生問題,則亦可在全部穿通孔91之周圍中進行墨料圖案資料72之修正。在此等的情況下,可省略步驟S12。藉由省略步驟S12就可簡化修正部611中的處理。反之,在吸 氣孔91a被特定的情況下係可削減後述的修正處理之運算量。即使是在吸氣孔91a被特定的情況下,仍可針對不產生吸流的一部分之穿通孔91進行藉由修正部611所為的修正。至少,針對周圍形成有阻劑膜92的全部吸氣孔91a進行藉由修正部611所為的修正。 It is not necessary to specify the suction hole 91a. For example, when the mounting table 21 is formed of a porous material and suction is generated in all the through holes 91 of the wiring substrate 9, the ink pattern data 72 can be corrected around all the through holes 91. In addition, even when a part of the through holes 91 does not cause suction, as long as there is no problem as a resist film, the ink pattern data 72 can be corrected around all the through holes 91. In this case, step S12 can be omitted. By omitting step S12, the processing in the correction unit 611 can be simplified. On the contrary, sucking When the air hole 91a is specified, the calculation amount of the correction process described later can be reduced. Even when the suction hole 91a is specified, the correction by the correction part 611 can be performed on the part of the through hole 91 that does not generate suction. At least, the correction by the correction part 611 is performed on all the suction holes 91a around which the resist film 92 is formed.

在吸氣孔91a之特定中,首先記憶部62中所準備的穿通孔資料71會被輸入至修正部611之吸氣孔特定部612。記憶部62係記憶有表示載置台21上之吸引區域的載置台資訊73,載置台資訊73亦被輸入至吸氣孔特定部612。在本實施形態中,吸引區域是圖5之吸孔211及溝槽212的區域。在載置台21僅設置有吸孔的情況下,吸引區域僅是吸引口的區域。吸氣孔特定部612係基於穿通孔資料71及載置台資訊73將與吸引區域重疊的穿通孔91特定而作為吸氣孔91a。再者,即使是吸氣孔91a但若不在周圍塗布有阻焊劑之墨料的情況則可從運算處理之對象中排除在外。 In the specification of the suction hole 91a, first, the through hole data 71 prepared in the memory portion 62 is input to the suction hole specifying portion 612 of the correction portion 611. The storage unit 62 stores table information 73 indicating the suction area on the table 21, and the table information 73 is also input to the suction hole specifying unit 612. In this embodiment, the suction area is the area of the suction hole 211 and the groove 212 in FIG. 5. When the mounting table 21 is provided with only suction holes, the suction area is only the area of the suction port. The suction hole specifying section 612 specifies the through hole 91 overlapping the suction area as the suction hole 91 a based on the through hole data 71 and the mounting table information 73. Furthermore, even if the suction hole 91a is not coated with solder resist ink around it, it can be excluded from the calculation process.

在修正部611亦從記憶部62輸入有墨料圖案資料72。修正部611係將墨料圖案資料72之各個像素的賦予值轉換成與阻劑膜之設計上的厚度對應的每一單位面積之墨料的賦予量。墨料之賦予量是來自頭部3的墨料之噴出量。亦即,在修正部611係對「有賦予」之像素設定事先所決定的每一單位面積之墨料的噴出量。以下將每一單位面積之墨料的噴出量簡稱為「墨料量」。對於「沒有賦予」之像素係將墨料量設定成「0」。墨料量可為與單位建立關聯關係之表示具體的墨料量的值或亦可為與墨料量建立關聯關係的單純的值。 The correction unit 611 also inputs ink pattern data 72 from the storage unit 62. The correction part 611 converts the applied value of each pixel of the ink pattern data 72 into the applied amount of ink per unit area corresponding to the designed thickness of the resist film. The amount of ink provided is the amount of ink ejected from the head 3. In other words, the correction unit 611 sets the ejection amount of ink per unit area determined in advance for the pixels with "provided". Hereinafter, the amount of ink ejected per unit area is simply referred to as "ink amount". For the pixels that are "not assigned", set the ink amount to "0". The amount of ink may be a value indicating a specific ink amount that establishes an association relationship with the unit, or a simple value that establishes an association relationship with the ink amount.

然後,修正部611係在供設計上之阻劑膜形成的區域當中離吸氣孔91a非常近的區域中設定不賦予阻焊劑之墨料的噴出禁止 區域(步驟S13之一部分)。更且,修正部611係在吸氣孔91a附近且噴出禁止區域之外側修正各個像素之墨料量,俾使設計上的阻劑膜之厚度變厚(步驟S13之另一部分)。 Then, the correction part 611 sets the prohibition of ejection of ink not provided with solder resist in the area very close to the suction hole 91a among the area where the resist film is formed in the design. Area (part of step S13). Furthermore, the correcting part 611 corrects the ink amount of each pixel near the suction hole 91a and outside the ejection prohibition area, so as to increase the thickness of the designed resist film (the other part of step S13).

參照圖11至圖14進一步說明步驟S13之具體例。圖11係縱剖視圖,顯示在供阻劑膜92形成的設計上之區域由修正部611所設定的噴出禁止區域93與周圍賦予區域94。圖12係顯示噴出禁止區域93與周圍賦予區域94的俯視圖。在圖11中係以虛線來表示設計上的阻劑膜92。在圖12中係以二點鏈線來表示設計上的阻劑膜92之內周緣921。在圖11及圖12之例中,吸氣孔91a之平面形狀為圓形。 A specific example of step S13 will be further described with reference to FIGS. 11 to 14. 11 is a longitudinal cross-sectional view showing the ejection prohibition area 93 and the peripheral provision area 94 set by the correction section 611 in the area on the design where the resist film 92 is formed. FIG. 12 is a plan view showing the ejection prohibition area 93 and the surrounding provision area 94. In FIG. 11, the designed resist film 92 is shown by a broken line. In FIG. 12, a two-dot chain line is used to indicate the inner periphery 921 of the designed resist film 92. In the example of FIGS. 11 and 12, the planar shape of the suction hole 91a is circular.

如圖11及圖12所示,在俯視觀察的情況下,設計上的阻劑膜92之內周緣921係從吸氣孔91a之內周面911遠離達至固定的距離。以下將設計上的阻劑膜92之內周緣921與吸氣孔91a之內周面911之間的區域901稱為「空隙區域(gap region)」。如圖11所示,比空隙區域901更靠外側的區域是設計上的供阻劑膜92形成的區域920,亦即墨料之賦予區域,以下稱為「塗布區域」。 As shown in FIG. 11 and FIG. 12, in a plan view, the inner periphery 921 of the resist film 92 is designed to be away from the inner periphery 911 of the suction hole 91 a by a fixed distance. Hereinafter, the area 901 between the inner peripheral edge 921 of the designed resist film 92 and the inner peripheral surface 911 of the suction hole 91a is referred to as a "gap region". As shown in FIG. 11, the area outside the void area 901 is the area 920 formed by the resist film 92 in the design, that is, the ink application area, and is hereinafter referred to as "coating area".

如已述般,在步驟S13中,首先噴出資料生成部61之修正部611係在吸氣孔91a之周圍的設計上的塗布區域920之內周部設定噴出禁止區域93。然後,修正部611係在噴出禁止區域93之外側設定周圍賦予區域94。周圍賦予區域94係不大幅地遠離吸氣孔91,而是吸氣孔91a之周圍的塗布區域。如圖12所示,在吸氣孔91a為圓形的情況下,噴出禁止區域93及周圍賦予區域94在俯視觀察下為同心的圓環狀。 As described above, in step S13, first, the correction section 611 of the ejection data generating section 61 sets the ejection prohibition area 93 on the inner periphery of the design coating area 920 around the suction hole 91a. Then, the correction unit 611 sets the peripheral provision area 94 on the outside of the ejection prohibition area 93. The peripheral provision area 94 is not greatly separated from the suction hole 91, but is a coating area around the suction hole 91a. As shown in FIG. 12, when the air intake hole 91a is circular, the ejection prohibition area 93 and the surrounding provision area 94 are concentric circular rings in a plan view.

圖13之下層係表示圖11之左側的部位,上層係表示設計上的 墨料量,亦即每一單位面積之墨料的噴出量。在圖13中亦以虛線來表示對應於噴出禁止區域93與周圍賦予區域94之邊界的線。如圖13所示,從墨料圖案資料72所導引的墨料量係遍及於設計上的塗布區域920之整體為固定。亦即,在設計上,在塗布區域920之全範圍中賦予值為「1」。修正部611,首先將墨料量遍及於塗布區域920之全範圍地設定成既定值來作為修正前的墨料量。在本實施形態中係將既定值之墨料量表現為「100%」。該值係比頭部3所能夠噴出的墨料量之上限值更低。 The lower layer of Figure 13 shows the part on the left of Figure 11, and the upper layer shows the design The amount of ink is the amount of ink ejected per unit area. Also in FIG. 13, a line corresponding to the boundary between the ejection prohibition area 93 and the peripheral provision area 94 is indicated by a broken line. As shown in FIG. 13, the amount of ink guided from the ink pattern data 72 is constant throughout the design coating area 920. That is, in terms of design, the value "1" is given to the entire range of the coating area 920. The correction unit 611 first sets the ink amount to a predetermined value over the entire range of the coating area 920 as the ink amount before correction. In this embodiment, the ink amount of a predetermined value is expressed as "100%". This value is lower than the upper limit of the amount of ink that the head 3 can eject.

圖14係顯示修正後的墨料量與形成於配線基板9上的實際阻劑膜92a之剖面的圖。藉由修正部611之修正,墨料之液滴不向噴出禁止區域93噴出。亦即,噴出禁止區域93中的墨料量為「0%」。再者,墨料量係表示從頭部3向(-Z)方向噴出的墨料量,而非為到達配線基板9上之噴出禁止區域93的墨料之量。 14 is a diagram showing the corrected ink amount and the cross-section of the actual resist film 92a formed on the wiring substrate 9. Due to the correction by the correction unit 611, the ink droplets are not ejected to the ejection prohibition area 93. That is, the amount of ink in the ejection prohibited area 93 is "0%". Furthermore, the amount of ink indicates the amount of ink ejected from the head 3 in the (-Z) direction, not the amount of ink reaching the ejection prohibition area 93 on the wiring board 9.

另一方面,墨料量係從噴出禁止區域93向外側亦即向圖14之左側急劇地上升且大幅地超過「100%」。之後,逐漸減少。在典型上,如圖14所示,墨料量之減少量亦會隨著遠離吸氣孔91a而逐漸減少。在比周圍賦予區域94更外側,墨料量為「100%」。亦即,在比周圍賦予區域94更外側,墨料量係與圖13之設計上的墨料量相等。以下將以吸氣孔91a作為中心的徑向上的墨料量之分佈稱為墨料量之「輪廓」。以吸氣孔91a作為中心的噴出禁止區域93及周圍賦予區域94之徑方向的寬度係考慮吸氣孔91a之大小、載置台21之吸孔211中的壓力、從頭部3所噴出的墨料之液滴的大小、液滴之速度等而事先設定。 On the other hand, the ink amount rises sharply from the ejection prohibition area 93 to the outside, that is, to the left in FIG. 14 and greatly exceeds "100%". After that, gradually decrease. Typically, as shown in FIG. 14, the decrease in the amount of ink will gradually decrease as it moves away from the suction hole 91a. On the outer side than the surrounding area 94, the ink amount is "100%". That is, on the outer side than the surrounding area 94, the ink amount is equal to the ink amount designed in FIG. 13. Hereinafter, the distribution of the ink amount in the radial direction with the suction hole 91a as the center is referred to as the "contour" of the ink amount. The radial width of the ejection prohibition area 93 with the suction hole 91a as the center and the surrounding provision area 94 is based on the size of the suction hole 91a, the pressure in the suction hole 211 of the mounting table 21, and the ink ejected from the head 3. The size of the droplet and the speed of the droplet are set in advance.

修正後的墨料圖案資料72係輸入至圖3之轉換部613且轉換成噴出資料75,該噴出資料75係表示頭部3之各個噴出口在各個位置噴出的墨料量(步驟S14)。換言之,噴出資料75係表示從頭部3向配線基板9上之各個位置噴出的墨料之量。 The corrected ink pattern data 72 is input to the conversion unit 613 of FIG. 3 and converted into ejection data 75, which represents the amount of ink ejected by each ejection port of the head 3 at each position (step S14). In other words, the ejection data 75 indicates the amount of ink ejected from the head 3 to various positions on the wiring board 9.

如以上,噴出資料生成部61係基於穿通孔資料71及墨料圖案資料72而生成噴出資料75。噴出資料75係保存於記憶部62。噴出資料75例如被當作表示墨料之液滴的尺寸的資料來生成,該墨料之液滴係被賦予至以10μm間距(pitch)呈格子狀地設定於配線基板9上的各個位置。修正後的墨料圖案資料72與噴出資料75係僅有資訊之形式不同,實質上都是表示每一單位面積之墨料的噴出量。 As described above, the ejection data generation unit 61 generates the ejection data 75 based on the through hole data 71 and the ink pattern data 72. The ejection data 75 is stored in the memory 62. The ejection data 75 is generated, for example, as data indicating the size of ink droplets, and the ink droplets are set to each position on the wiring substrate 9 in a grid pattern with a pitch of 10 μm. The corrected ink pattern data 72 and the ejection data 75 differ only in the form of information, and essentially represent the ejection amount of ink per unit area.

當噴出資料75生成時,進行將配線基板9藉由吸引而保持於載置台21之平面上的工序。本體11係從控制部12接收噴出資料75且按照噴出資料75來控制頭部3及移動機構2。具體而言,並行地進行:將墨料之液滴從頭部3向配線基板9噴出的工序;以及將頭部3相對於配線基板9向與配線基板9平行的方向相對地移動的工序。藉此,在配線基板9上賦予墨料而形成阻劑膜92之圖案(步驟S15)。換言之,藉由控制部12控制頭部3及移動機構2來執行步驟S15。 When the ejection data 75 is generated, a step of holding the wiring board 9 on the plane of the mounting table 21 by suction is performed. The main body 11 receives the ejection data 75 from the control unit 12 and controls the head 3 and the moving mechanism 2 according to the ejection data 75. Specifically, the process of ejecting ink droplets from the head 3 to the wiring substrate 9 and the process of relatively moving the head 3 relative to the wiring substrate 9 in a direction parallel to the wiring substrate 9 are performed in parallel. Thereby, ink is applied to the wiring board 9 to form a pattern of the resist film 92 (step S15). In other words, the control unit 12 controls the head 3 and the movement mechanism 2 to execute step S15.

以圖14之上層所示的墨料量之輪廓從頭部3向配線基板9噴出墨料之液滴,藉此如圖14之下層所示,實際所形成的阻劑膜92a會靠近圖13所示之設計上的阻劑膜92。亦即,從頭部3向周圍賦予區域94噴出的墨料之液滴係藉由吸流而被吸氣孔91a所吸引並到達配線 基板9。雖然液滴之一部分會到達噴出禁止區域93但是可抑制液滴附著於吸氣孔91a內。 The ink droplets are ejected from the head 3 to the wiring substrate 9 with the outline of the ink volume shown in the upper layer of FIG. 14, whereby as shown in the lower layer of FIG. 14, the actually formed resist film 92a will be close to that shown in FIG. Shows the resist film 92 on the design. That is, the ink droplets ejected from the head 3 to the surrounding application area 94 are attracted by the suction holes 91a by suction and reach the wiring. Substrate 9. Although a part of the droplet reaches the ejection prohibition area 93, it is possible to prevent the droplet from adhering to the suction hole 91a.

液滴被吸氣孔91a所吸引的距離係越接近吸氣孔91a就越大。相對於此,如上述,在周圍賦予區域94之內周部的墨料量最多,且墨料量隨著遠離吸氣孔91a而逐漸減少。藉此,厚度會遍及於阻劑膜92a之整體成為大致固定。藉由設定噴出禁止區域93及調整周圍賦予區域94中的墨料量,在設計上的塗布區域920整體中形成具有大致均勻的厚度且在俯視觀察的情況下接近設計形狀之適當的阻劑膜92a之圖案。 The distance that the droplet is attracted by the suction hole 91a is greater the closer to the suction hole 91a. In contrast, as described above, the amount of ink in the inner peripheral portion of the peripheral application area 94 is the largest, and the amount of ink gradually decreases as it moves away from the suction hole 91a. Thereby, the thickness becomes substantially constant throughout the entire resist film 92a. By setting the ejection prohibition area 93 and adjusting the amount of ink in the surrounding area 94, an appropriate resist film having a substantially uniform thickness and close to the design shape in a plan view is formed in the entire design coating area 920 The pattern of 92a.

圖15係顯示修正後的墨料量之輪廓之另一例的圖。在圖15中,二點鏈線係表示設計上的阻劑膜92之內周緣921的位置且附記元件符號921(在圖16中同樣)。墨料量係從設計上的阻劑膜92之內周緣921向吸氣孔91a之外側上升,之後逐漸減少。亦即,在圖15之例中,圖14之噴出禁止區域93係未被設置,而僅設置有作為吸氣孔91a之周圍的墨料之賦予區域的周圍賦予區域94。周圍賦予區域94中的墨料量係比周圍賦予區域94之外側的區域更多。即使是在未設置有噴出禁止區域93的情況下,但在空隙區域901足夠大的情況,墨料之液滴仍不被吸氣孔91a所吸入。因此,只要修正周圍賦予區域94中的墨料量就可實現形成大致固定的厚度之適當的阻劑膜92a之圖案。 Fig. 15 is a diagram showing another example of the contour of the ink amount after correction. In FIG. 15, the two-dot chain line indicates the position of the inner peripheral edge 921 of the resist film 92 in the design, and the symbol 921 is added (the same in FIG. 16 ). The amount of ink rises from the inner periphery 921 of the designed resist film 92 to the outside of the suction hole 91a, and then gradually decreases. That is, in the example of FIG. 15, the ejection prohibition area 93 of FIG. 14 is not provided, and only the peripheral application area 94 is provided as the ink application area around the suction hole 91a. The amount of ink in the peripheral application area 94 is larger than the area outside the peripheral application area 94. Even in the case where the ejection prohibition area 93 is not provided, if the gap area 901 is sufficiently large, the ink droplets are still not sucked by the suction hole 91a. Therefore, as long as the amount of ink in the surrounding area 94 is corrected, it is possible to form an appropriate resist film 92a pattern having a substantially constant thickness.

圖16係顯示修正後的墨料量之輪廓之更另一例的圖。在圖16之例中,雖然在空隙區域901之外側設置有噴出禁止區域93,但是在比噴出禁止區域93更外側的墨料量為固定,且可維持修正前的墨料量。亦即,在圖16之例中,雖然在作為吸氣孔91a之周圍的設計上的墨料之賦予區 域的塗布區域920之內周部設置有噴出禁止區域93,但是未設置有周圍賦予區域94。在吸氣孔91a之周圍即便阻劑膜92a之厚度變薄仍沒有問題的情況下,可藉由僅設置有噴出禁止區域93來抑制墨料之液滴被吸氣孔91a所吸引或抑制墨料附著於吸氣孔91a之內表面。結果,在吸氣孔91a之周圍形成有適當的阻劑膜92之圖案。 Figure 16 is a diagram showing another example of the contour of the corrected ink amount. In the example of FIG. 16, although the ejection prohibition area 93 is provided outside the gap area 901, the amount of ink outside the ejection prohibition area 93 is constant, and the ink amount before correction can be maintained. That is, in the example of FIG. 16, although the ink application area is designed around the suction hole 91a The spray prohibition area 93 is provided on the inner periphery of the coating area 920 of the domain, but the peripheral provision area 94 is not provided. In the case where there is no problem even if the thickness of the resist film 92a becomes thinner around the suction hole 91a, only the ejection prohibition area 93 can be provided to prevent the ink droplets from being attracted by the suction hole 91a or suppress the ink. The material is attached to the inner surface of the suction hole 91a. As a result, an appropriate pattern of resist film 92 is formed around the suction hole 91a.

在圖案形成裝置1中係可有複數種的變化。 There may be a plurality of variations in the pattern forming device 1.

圖14至圖16所示的輪廓只不過是例子,輪廓之形狀可做適當變更。輪廓係可考慮吸氣孔91a之大小、載置台21之吸孔211中的壓力、從頭部3噴出的墨料之液滴的大小、液滴之速度等而做適當設定。輪廓之製作可根據吸流之強度在理論上進行或亦可藉由反覆進行試驗來決定。可在一個配線基板9僅應用一個輪廓或亦可在一個配線基板9應用複數種類的輪廓。亦可應用依每一吸氣孔91a而異的輪廓。 The contours shown in FIGS. 14 to 16 are just examples, and the shape of the contour can be changed appropriately. The profile can be appropriately set in consideration of the size of the suction hole 91a, the pressure in the suction hole 211 of the mounting table 21, the size of ink droplets ejected from the head 3, and the speed of the droplets. The contour can be made theoretically according to the strength of the suction flow or can be determined by repeated experiments. Only one outline may be applied to one wiring board 9 or plural kinds of outlines may be applied to one wiring board 9. It is also possible to apply a different contour for each suction hole 91a.

在圖案形成裝置1中係至少在周圍賦予區域94中,將每一單位面積之墨料的噴出量設為比周圍賦予區域94的外側之區域中的每一單位面積之墨料的噴出量更多並且在配線基板9上形成墨料之圖案,藉此形成有大致均勻之厚度的膜。 In the pattern forming apparatus 1, at least in the peripheral application area 94, the ejection amount of ink per unit area is set to be greater than the ejection volume of ink per unit area in the area outside the peripheral application area 94 In addition, a pattern of ink is formed on the wiring substrate 9, thereby forming a film having a substantially uniform thickness.

較佳為,如圖14所示,在周圍賦予區域94中,墨料量亦即每一單位面積之墨料的噴出量係隨著靠近吸氣孔91a而增大。正確而言,在周圍賦予區域94之內周緣附近,墨料量係向吸氣孔91a從最大值減少至0%為止。墨料量可隨著靠近吸氣孔91a而逐漸增大或亦可呈階梯狀地增大。在輪廓中,墨料量亦可呈直線狀或折線狀地增加。 Preferably, as shown in FIG. 14, in the surrounding area 94, the amount of ink, that is, the ejection amount of ink per unit area, increases as it approaches the suction hole 91a. To be precise, in the vicinity of the inner periphery of the peripheral providing area 94, the amount of ink decreases from the maximum value to 0% toward the suction hole 91a. The amount of ink may gradually increase as it approaches the suction hole 91a or may also increase stepwise. In the contour, the amount of ink can also increase linearly or in a broken line.

穿通孔91之平面形狀係不限定於圓形。穿通孔91只要是貫通 孔即可且可為任何形狀的穿通孔,而不限定於所謂配線用的穿通孔。在穿通孔91非為圓形的情況下,噴出禁止區域93或周圍賦予區域94也沒有必要被設定成圓形。 The planar shape of the through hole 91 is not limited to a circle. As long as the through hole 91 is through The hole may be a through hole of any shape, and is not limited to a so-called through hole for wiring. When the through hole 91 is not circular, the ejection prohibition area 93 or the surrounding providing area 94 does not need to be set to a circular shape.

從頭部3所噴出的墨料係未限定於阻焊劑之墨料。在具有穿通孔的配線基板以噴墨方式形成圖案的各種之技術中皆可應用設置噴出禁止區域93或周圍賦予區域94的手法。例如,在配線基板9以墨料描繪字元、記號、圖形等時亦可採用上述手法。 The ink ejected from the head 3 is not limited to solder resist ink. The method of providing the ejection prohibition area 93 or the surrounding provision area 94 can be applied to various technologies in which a wiring board having through holes is patterned by an inkjet method. For example, the above-mentioned technique can also be used when the wiring board 9 uses ink to draw characters, symbols, graphics, and the like.

在上述圖案形成裝置1中,雖然修正部611係自動地修正墨料圖案資料72但是墨料圖案資料72之修正亦可由人所進行。 In the above-mentioned pattern forming apparatus 1, although the correction part 611 automatically corrects the ink pattern data 72, the correction of the ink pattern data 72 may be performed by a person.

在周圍賦予區域94中並非必須呈環狀地增加墨料量。例如亦可在吸氣孔91a之周圍中呈環狀地排列墨料量較多的複數個島狀之區域。 It is not necessary to increase the amount of ink in the peripheral application area 94 in a ring shape. For example, a plurality of island-shaped regions with a large amount of ink may be arranged annularly around the suction hole 91a.

在圖案形成裝置1中,只要頭部3係相對於載置台21相對地移動,就可採用複數種的構造來作為移動機構2。例如亦可載置台21被固定,頭部3向X方向及Y方向移動。亦可頭部3向Y方向移動,載置台21向X方向移動。 In the pattern forming apparatus 1, as long as the head 3 moves relative to the mounting table 21, a plurality of structures can be adopted as the moving mechanism 2. For example, the mounting table 21 may be fixed and the head 3 may move in the X direction and the Y direction. The head 3 may move in the Y direction and the mounting table 21 may move in the X direction.

頭部3中的噴出口之排列係可進行各種變更,液滴之大小與噴出口之X方向的間距之關係亦可進行各種變更。亦可為頭部3以相對於配線基板9的一次之相對移動在頭部3之下方的區域形成有阻劑膜之圖案。 The arrangement of the ejection ports in the head 3 can be variously changed, and the relationship between the size of the liquid droplet and the distance between the ejection ports in the X direction can also be variously changed. It is also possible that the head 3 has a pattern in which a resist film is formed in the area below the head 3 by one relative movement with respect to the wiring substrate 9.

上述實施形態及各個變化例中的構成係只要不相互矛盾就可做適當組合。 The configurations in the above-mentioned embodiment and each modification example can be appropriately combined as long as they do not contradict each other.

雖然已詳細描述並說明發明但是已述的說明為例示而非為限定。從而,可謂只要不脫離本發明之範圍就可有複數種的變化或態樣。 Although the invention has been described and illustrated in detail, the description that has been described is illustrative rather than limiting. Therefore, it can be said that various changes or aspects are possible as long as they do not depart from the scope of the present invention.

9:配線基板(印刷配線基板) 9: Wiring board (printed wiring board)

91a:吸氣孔 91a: suction hole

92a:阻劑膜 92a: Resist film

93:噴出禁止區域 93: Ejection prohibited area

94:周圍賦予區域 94: surrounding area

901:空隙區域(區域) 901: void area (area)

920:塗布區域(區域) 920: coating area (area)

Claims (10)

一種圖案形成裝置,係在配線基板上賦予墨料,藉此在前述配線基板上形成前述墨料之圖案,前述圖案形成裝置具備: 保持部,係將具有穿通孔的前述配線基板藉由吸引而保持於平面上; 頭部,係以噴墨方式將前述墨料之液滴向前述配線基板噴出; 移動機構,係將前述頭部相對於前述保持部向與前述配線基板平行的方向相對地移動;以及 控制部,係控制前述頭部及前述移動機構,藉此在作為周圍賦予區域且藉由前述保持部所為之吸引時產生吸流的前述穿通孔之周圍的前述墨料之賦予區域中,將每一單位面積之前述墨料的噴出量設為比前述周圍賦予區域的外側之區域中的每一單位面積之前述墨料的噴出量更多並且在前述配線基板上形成前述墨料之圖案。A pattern forming device is provided with ink on a wiring substrate, whereby a pattern of the ink is formed on the wiring substrate, and the pattern forming device includes: The holding part is for holding the aforementioned wiring substrate with through holes on a plane by suction; The head part ejects droplets of the aforementioned ink to the aforementioned wiring substrate by means of inkjet; A moving mechanism that relatively moves the head relative to the holding portion in a direction parallel to the wiring board; and The control section controls the head and the moving mechanism, whereby the ink application area around the through-hole that is sucked when sucked by the holding section is used as a peripheral providing area, and each The ejection amount of the ink per unit area is set to be greater than the ejection amount of the ink per unit area in the area outside the peripheral providing area, and the ink pattern is formed on the wiring board. 如請求項1所記載之圖案形成裝置,其中前述控制部係包含: 記憶部,係記憶穿通孔資料及墨料圖案資料,前述穿通孔資料係表示前述穿通孔之圖案,前述墨料圖案資料係表示前述墨料之設計上的圖案;以及 噴出資料生成部,係基於前述穿通孔資料及前述墨料圖案資料而生成噴出資料,前述噴出資料係表示從前述頭部向前述配線基板上之各個位置噴出的前述墨料之量。The pattern forming apparatus described in claim 1, wherein the aforementioned control unit includes: The memory part stores through hole data and ink pattern data, the through hole data represents the pattern of the through hole, and the ink pattern data represents the design pattern of the ink; and The ejection data generating unit generates ejection data based on the through hole data and the ink pattern data, and the ejection data represents the amount of the ink ejected from the head to each position on the wiring board. 如請求項2所記載之圖案形成裝置,其中前述噴出資料生成部係在前述穿通孔之周圍的設計上之塗布區域的内周部設定噴出禁止區域,且在前述噴出禁止區域之外側設定前述周圍賦予區域。The pattern forming apparatus according to claim 2, wherein the ejection data generating section sets an ejection prohibition area on the inner circumference of the design coating area around the through hole, and sets the circumference outside the ejection prohibition area Give the area. 如請求項1至3中任一項所記載之圖案形成裝置,其中在前述周圍賦予區域中,每一單位面積之前述墨料的噴出量係隨著靠近前述穿通孔而增大。The pattern forming device according to any one of claims 1 to 3, wherein in the peripheral provision area, the ejection amount of the ink per unit area increases as it approaches the through hole. 如請求項1所記載之圖案形成裝置,其中在前述配線基板所具有的全部的前述穿通孔之前述周圍賦予區域中,每一單位面積之前述墨料的噴出量係比前述周圍賦予區域之外側的區域中的每一單位面積之前述墨料的噴出量更多。The pattern forming device according to claim 1, wherein in the peripheral providing area of all the through holes of the wiring board, the ejection amount of the ink per unit area is outside the peripheral providing area The ejection amount of the aforementioned ink per unit area in the area is more. 如請求項1所記載之圖案形成裝置,其中在藉由前述保持部所為之吸引時產生吸流的全部的前述穿通孔之前述周圍賦予區域中,每一單位面積之前述墨料的噴出量係比前述周圍賦予區域之外側的區域中的每一單位面積之前述墨料的噴出量更多。The pattern forming device according to claim 1, wherein in the peripheral providing area of all the through holes that generate suction when sucked by the holding portion, the ejection amount of the ink per unit area is The ejection amount of the ink per unit area in the area outside the surrounding provision area is larger. 一種圖案形成裝置,係在配線基板上賦予墨料,藉此在前述配線基板上形成前述墨料之圖案,前述圖案形成裝置具備: 保持部,係將具有穿通孔的前述配線基板藉由吸引而保持於平面上; 頭部,係以噴墨方式將前述墨料之液滴向前述配線基板噴出; 移動機構,係將前述頭部相對於前述保持部向與前述配線基板平行的方向相對地移動;以及 控制部,係控制前述頭部及前述移動機構,藉此在前述配線基板上形成前述墨料之圖案; 前述控制部係具備: 記憶部,係記憶穿通孔資料及墨料圖案資料,前述穿通孔資料係表示前述穿通孔之圖案,前述墨料圖案資料係表示前述墨料之設計上的圖案;以及 噴出資料生成部,係基於前述穿通孔資料及前述墨料圖案資料而生成噴出資料,前述噴出資料係表示從前述頭部向前述配線基板上之各個位置噴出的前述墨料之量; 前述噴出資料生成部係在前述穿通孔之周圍的設計上的前述墨料之賦予區域的内周部設定噴出禁止區域。A pattern forming device is provided with ink on a wiring substrate, whereby a pattern of the ink is formed on the wiring substrate, and the pattern forming device includes: The holding part is for holding the aforementioned wiring substrate with through holes on a plane by suction; The head part ejects droplets of the aforementioned ink to the aforementioned wiring substrate by means of inkjet; A moving mechanism that relatively moves the head relative to the holding portion in a direction parallel to the wiring board; and The control unit controls the head and the moving mechanism, thereby forming the ink pattern on the wiring board; The aforementioned control unit has: The memory part stores through hole data and ink pattern data, the through hole data represents the pattern of the through hole, and the ink pattern data represents the design pattern of the ink; and The ejection data generating unit generates ejection data based on the through hole data and the ink pattern data, and the ejection data represents the amount of the ink ejected from the head to each position on the wiring board; The ejection data generating section sets an ejection prohibition area on the inner periphery of the ink application area in the design around the through hole. 一種圖案形成方法,係在配線基板上賦予墨料,藉此在前述配線基板上形成前述墨料之圖案,前述圖案形成方法具備: a)工序,係將具有穿通孔的前述配線基板利用藉由保持部所為之吸引而保持於平面上; b)工序,係以噴墨方式將前述墨料之液滴從頭部向前述配線基板噴出;以及 c)工序,係將前述頭部相對於前述配線基板向與前述配線基板平行的方向相對地移動; 藉由前述b)工序及前述c)工序,在作為周圍賦予區域且藉由前述保持部所為之吸引時產生吸流的前述穿通孔之周圍的前述墨料之賦予區域中,將每一單位面積之前述墨料的噴出量設為比前述周圍賦予區域之外側的區域中的每一單位面積之前述墨料的噴出量更多並且在前述配線基板上形成有前述墨料之圖案。A pattern forming method is to apply ink on a wiring substrate, thereby forming a pattern of the ink on the wiring substrate, the pattern forming method includes: a) The process of holding the above-mentioned wiring board with through holes on a plane by suction by the holding portion; b) The process of ejecting droplets of the aforementioned ink from the head to the aforementioned wiring substrate by means of inkjet; and c) A step of relatively moving the head portion relative to the wiring board in a direction parallel to the wiring board; According to the step b) and the step c), each unit area of the ink supply area around the through-hole that is sucked by the holding portion is a peripheral providing area. The ejection amount of the ink is set to be greater than the ejection amount of the ink per unit area in the area outside the peripheral providing area, and the pattern of the ink is formed on the wiring board. 一種噴出資料生成方法,係生成噴出資料,前述噴出資料係在以噴墨方式將墨料之液滴從頭部向配線基板噴出時所使用,前述噴出資料生成方法具備: 準備穿通孔資料及墨料圖案資料的工序,前述穿通孔資料係表示前述配線基板上的穿通孔之圖案,前述墨料圖案資料係表示前述配線基板上之設計上的前述墨料之圖案;以及 基於前述穿通孔資料及前述墨料圖案資料而生成前述噴出資料的工序,前述噴出資料係在作為周圍賦予區域且利用吸引將前述配線基板保持於平面上時產生吸流的前述穿通孔之周圍的前述墨料之賦予區域中將每一單位面積之前述墨料的噴出量設為比前述周圍賦予區域之外側的區域中的每一單位面積之墨料的噴出量更多。A method for generating ejection data is to generate ejection data. The ejection data is used when ink droplets are ejected from the head to the wiring substrate by inkjet. The ejection data generation method includes: The process of preparing through hole data and ink pattern data, wherein the through hole data represents the pattern of the through hole on the wiring substrate, and the ink pattern data represents the ink pattern on the design on the wiring substrate; and The process of generating the ejection data based on the through hole data and the ink pattern data. The ejection data is formed around the through hole which is used as a peripheral providing area and sucks when the wiring substrate is held on a plane by suction. In the ink application area, the ejection amount of the ink per unit area is set to be greater than the ejection amount of the ink per unit area in the area outside the peripheral application area. 一種噴出資料生成方法,係生成噴出資料,前述噴出資料係在以噴墨方式將墨料之液滴從頭部向配線基板噴出時所使用,前述噴出資料生成方法具備: 準備穿通孔資料及墨料圖案資料的工序,前述穿通孔資料係表示前述配線基板上的穿通孔之圖案,前述墨料圖案資料係表示前述配線基板上之設計上的前述墨料之圖案;以及 基於前述穿通孔資料及前述墨料圖案資料而生成前述噴出資料的工序,前述噴出資料係在利用吸引將前述配線基板保持於平面上時產生吸流的前述穿通孔之周圍的設計上的前述墨料之賦予區域的内周部設定噴出禁止區域。A method for generating ejection data is to generate ejection data. The ejection data is used when ink droplets are ejected from the head to the wiring substrate by inkjet. The ejection data generation method includes: The process of preparing through hole data and ink pattern data, wherein the through hole data represents the pattern of the through hole on the wiring substrate, and the ink pattern data represents the ink pattern on the design on the wiring substrate; and The process of generating the ejection data based on the through-hole data and the ink pattern data. The ejection data is the ink designed around the through-hole that sucks when the wiring board is held on a plane by suction. Set the ejection prohibition area on the inner periphery of the material application area.
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Families Citing this family (2)

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Publication number Priority date Publication date Assignee Title
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200913826A (en) * 2006-11-29 2009-03-16 Seiko Epson Corp Patterning method, droplet discharging device and circuit board
CN101399171A (en) * 2007-09-25 2009-04-01 大日本网屏制造株式会社 Method of forming alignment mark
WO2010029934A1 (en) * 2008-09-12 2010-03-18 コニカミノルタホールディングス株式会社 Substrate and process for forming electroconductive pattern
WO2012066921A1 (en) * 2010-11-18 2012-05-24 Ntn株式会社 Pattern modification device and humidifying unit used by same

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4300741B2 (en) * 2002-03-20 2009-07-22 セイコーエプソン株式会社 Device manufacturing method and manufacturing apparatus, device and electronic apparatus
JP2005012179A (en) * 2003-05-16 2005-01-13 Seiko Epson Corp Method of forming thin film pattern, device, its manufacturing method, electrooptic device, electronic equipment, and method of manufacturing active matrix substrate
JP2006081985A (en) * 2004-09-15 2006-03-30 Seiko Epson Corp Pattern-forming method, electronic instrument making method and substrate making method
JP2006255905A (en) * 2005-03-15 2006-09-28 Seiko Epson Corp Apparatus for generating printing control data, printing system, printer, printing method and recording medium
JP4289391B2 (en) * 2006-12-20 2009-07-01 セイコーエプソン株式会社 Liquid drawing method, color filter manufacturing method, organic EL device manufacturing method
JP5067135B2 (en) * 2007-11-13 2012-11-07 セイコーエプソン株式会社 Liquid ejection device
JP2011105884A (en) * 2009-11-19 2011-06-02 Seiko Epson Corp Cleaning liquid and liquid droplet discharge apparatus
CN102431289B (en) * 2010-08-09 2015-05-06 Ntn株式会社 Pattern modification device and method
JP5878821B2 (en) * 2012-05-10 2016-03-08 株式会社Screenホールディングス Pattern forming device
JP5779145B2 (en) * 2012-06-28 2015-09-16 株式会社Screenホールディングス Wiring data generation device, generation method, program thereof, and drawing device
JP5920832B2 (en) * 2012-11-01 2016-05-18 住友重機械工業株式会社 Board manufacturing equipment
JP6207997B2 (en) * 2013-01-30 2017-10-04 株式会社Screenホールディングス Pattern forming apparatus and pattern forming method
US10779451B2 (en) * 2013-11-29 2020-09-15 BotFactory, Inc. Apparatus and method for the manufacturing of printed wiring boards on a substrate
JP2015133453A (en) * 2014-01-15 2015-07-23 株式会社ミマキエンジニアリング Circuit board manufacturing method and ink jet printer
EP3138691B1 (en) * 2015-09-02 2020-08-12 Agfa Nv Inkjet printing device with dimpled vacuum belt
CN108928118B (en) * 2017-05-26 2020-01-14 精工爱普生株式会社 Nozzle plate, liquid ejecting head, liquid ejecting apparatus, and method of manufacturing nozzle plate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200913826A (en) * 2006-11-29 2009-03-16 Seiko Epson Corp Patterning method, droplet discharging device and circuit board
CN101399171A (en) * 2007-09-25 2009-04-01 大日本网屏制造株式会社 Method of forming alignment mark
WO2010029934A1 (en) * 2008-09-12 2010-03-18 コニカミノルタホールディングス株式会社 Substrate and process for forming electroconductive pattern
WO2012066921A1 (en) * 2010-11-18 2012-05-24 Ntn株式会社 Pattern modification device and humidifying unit used by same

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