TWI716934B - Crucible and vapor deposition apparatus - Google Patents

Abstract

A crucible is provided. The crucible includes a crucible body and at least one protruding portions. A receiving groove is in the crucible body. The protruding portion is disposed on an outer wall surface of the crucible body. The protruding portion protrudes outward from the outer wall of the crucible body. In addition, a vapor deposition apparatus is also provided.

Description

Crucible and evaporation machine

The invention relates to a crucible and an evaporation machine.

As a kind of container, the crucible is mainly used for burning solid materials, and can be used for the evaporation, concentration or crystallization of materials, such as the evaporation process. During the evaporation process, the production line personnel will first place the crucible in the oxygen-free copper seat in the machine, and then add the evaporation material to the crucible. Then continue to do the subsequent process operations, place the wafer on the plating pot, and then close the chamber door to perform the evaporation process. After the process is over, the production line personnel first take out the product, then add the required evaporation materials to the crucible again, and then continue to repeat the aforementioned evaporation process operation mode production.

However, because the crucible is placed in the heating container by the production line personnel, human factors cannot be effectively controlled, and the crucible is easily placed incorrectly, causing the position of the crucible to shift, and one side of the crucible is attached to the wall of the oxygen-free copper seat. When the crucible is attached to the wall, it is easy to cause the crucible's adhering end to cool faster, that is, the heating degree of the crucible's unattached end and the crucible's adhering end is different, resulting in inability to uniformly heat.

Furthermore, because the crucible’s adhering end has a faster cooling rate, the power used at the adhering end of the crucible in the process will be greater than the power of the unattached end of the crucible, or the power supply is likely to be unstable, in other words, the adhering crucible As a result, stable control power cannot be achieved in the manufacturing process.

In addition, the crucible attached to the wall is also more prone to damage, which not only reduces the service life of the crucible, but the damaged crucible needs to be replaced immediately, which also increases production costs.

Therefore, how to improve and provide a "crucible and evaporation machine" to avoid the above-mentioned problems is a problem to be solved in the industry.

The invention provides a crucible and an evaporation machine, which can uniformly heat the materials in the crucible, can stably control the power supply, increase the service life of the crucible and reduce the production cost.

An embodiment of the present invention provides a crucible, which includes a crucible body and at least one protrusion. The crucible body has a containing groove. The protruding part is arranged on the outer wall surface of the crucible body, and the protruding part protrudes outward from the outer wall surface of the crucible body.

Another embodiment of the present invention provides an evaporation machine including a metal base and a crucible. The crucible is arranged in the metal base body. The crucible includes a crucible body and at least one protrusion. The crucible body is provided with a containing groove, and the containing groove is used for adding an evaporation material. The protruding parts are arranged on the outer wall surface of the crucible body. The protruding parts protrude outwardly from the outer wall surface of the crucible body, and each protruding part abuts against the inner wall surface of the metal base body.

In an embodiment of the present invention, the outer wall surface is a side wall of the crucible body, and the protruding part is a ring-shaped protruding structure extending outward from the side wall.

In an embodiment of the present invention, the outer wall surface is a bottom wall of the crucible body, and the protruding portion is a ring-shaped protruding structure extending outward from the bottom wall.

In an embodiment of the present invention, the outer wall surface is a side wall and a bottom wall of the crucible body, each protrusion includes a first protrusion and a second protrusion, and the first protrusion is a side wall A first ring-shaped protruding structure extends outward, and the second protruding part is a second ring-shaped protruding structure extending outward from the bottom wall.

In an embodiment of the present invention, the outer wall surface is a side wall of the crucible body, and the protruding parts are arranged along the circumferential direction of the side wall.

In an embodiment of the present invention, the outer wall surface is a bottom wall of the crucible body, and the protrusions are arranged along the circumferential direction of the bottom wall.

In an embodiment of the present invention, the outer wall surface is a side wall and a bottom wall of the crucible body, the protruding part includes a first protruding part and a second protruding part, the first protruding part is along the The side walls are arranged in the circumferential direction, and the second protrusions are arranged along the circumferential direction of the bottom wall.

In an embodiment of the present invention, the crucible body includes a filling end surface, a bottom wall and a side wall, the containing groove communicates with the filling end surface, and the side wall is connected between the filling end surface and the bottom wall.

In an embodiment of the present invention, the metal base body is a copper base.

Based on the above, in the crucible and vapor deposition machine of the present invention, a protrusion is provided on the outer wall of the crucible, and the outer wall can be the side wall or bottom wall of the crucible body. In this way, no matter how the crucible is placed in the metal base , By abutting the protruding part on the inner wall of the metal base, the crucible can be kept in the middle of the metal base without shifting, and it will not make one side of the crucible stick to the wall of the oxygen-free copper base Therefore, the crucible can be used, the materials in the crucible can be heated uniformly, and the power can be controlled stably.

In order to make the present invention more obvious and understandable, the following specific examples are given in conjunction with the accompanying drawings to describe in detail as follows.

The specific implementation of the present invention will be further described below with reference to the drawings and embodiments. The following embodiments are only used to explain the technical solutions of the present invention more clearly, and cannot be used to limit the protection scope of the present invention.

It should be noted that in the description of each embodiment, the so-called "first" and "second" are used to describe elements at different positions, and these elements are not limited by such terms. In addition, for convenience and clarity of description, the thickness or size of each element in the drawings is expressed in an exaggerated or omitted or schematic manner, and the size of each element is not entirely its actual size.

Fig. 1 is a schematic diagram of an embodiment of the crucible of the present invention. Please refer to FIG. 1, the crucible of this embodiment is used for the vapor deposition process. The crucible includes a crucible body 1 and at least one protrusion 20. The crucible body 1 includes a filling end surface 11, a bottom wall 12 and a side wall 13. The crucible body 11 itself is a cylindrical container. The crucible body 11 has a containing groove 14 therein. The containing groove 14 communicates with the filling end surface 11, and the side wall 13 is connected between the filling end surface 11 and the bottom wall 12.

In this embodiment, the protruding portion 20 is provided on the outer wall surface of the crucible body 1, and the protruding portion 20 protrudes outward from the outer wall surface of the crucible body 1. Here, the outer wall surface is, for example, the side wall 13 of the crucible body 1, that is, the protrusion 20 is a ring-shaped protrusion structure extending outward from the side wall 13. For the ring-shaped protrusion structure, please refer to FIG. 2A. The protrusion 20 forms a ring-shaped protrusion structure around the circumferential direction of the side wall 13. In addition, as shown in FIG. 1, along the axial direction of the crucible body 1, the protrusion 20 is adjacent to one end of the filling end surface 11, that is, the height distance from the protrusion 20 to the bottom wall 12 is greater than that from the protrusion 20 to the filling end. The distance of the entrance surface 11 makes the protruding portion 20 farther away from one end of the bottom wall 12, however, the present invention is not limited to this. In an unillustrated embodiment, the protrusion is adjacent to one end of the bottom wall, that is, the height distance from the protrusion to the bottom wall is less than the distance from the protrusion to the filling end surface; or, the distance from the protrusion to the bottom wall The height distance is equal to the distance from the protrusion to the filling end surface.

In addition, as shown in FIG. 2B, the number of protrusions 22 may be multiple, and the plurality of protrusions 22 are arranged along the circumferential direction of the side wall 13. In other words, the protrusions of this embodiment may be as shown in FIG. 1 or 2A is a ring-shaped protrusion structure extending outward from the side wall 13, or, as shown in FIG. 2B, a plurality of protrusions 22 extending outward from the side wall 13, and the plurality of protrusions 22 are not connected together. Of course, in an unillustrated embodiment, part of the protrusions 22 may be connected together, while some of the protrusions 22 are not connected together. In addition, these protrusions 22 can be arranged at the same height position or different height positions adjacent to the bottom wall 12 or far from the bottom wall 12, and can be adjusted depending on the actual product.

Figure 3 is a schematic diagram of another embodiment of the crucible of the present invention. Please refer to Figure 3, it should be noted that the crucible of Figure 3 is similar to the crucible of Figure 1, wherein the same components are denoted by the same reference numerals and have the same functions without repeating the description. Only the differences are described below. The difference between the crucible and the crucible in FIG. 1 is that the outer wall surface is the bottom wall 12 of the crucible body 1, that is, the protrusion 30 is a ring-shaped protrusion structure extending outward from the bottom wall 12. Refer to FIG. 4A for the ring-shaped protrusion structure. The protrusion 30 forms a ring-shaped protrusion structure around the circumferential direction of the bottom wall 12, and the ring-shaped protrusion structure is located on the edge side of the bottom wall 12. Of course, the present invention is not limited to this. In an unillustrated embodiment, a ring-shaped protruding structure can be arranged inside the bottom wall 12.

In addition, as shown in FIG. 4B, the number of protrusions 32 may be multiple, and the plurality of protrusions 32 are arranged along the circumferential direction of the bottom wall 12. In other words, the protrusions of this embodiment may be as Fig. 3 or Fig. 4A is a ring-shaped protruding structure extending outward on the bottom wall 12, or, as shown in Fig. 4B, a plurality of protruding portions 32 extending outward on the bottom wall 12, and the plurality of protruding portions 32 are not connected to together. Of course, in an unillustrated embodiment, part of the protrusions 32 may be connected together, while some of the protrusions 32 are not connected together. In addition, these protrusions 32 can be arranged at the same or different positions adjacent to the edge side or inside of the bottom wall 12, and can be adjusted depending on the actual product.

Figure 5 is a schematic diagram of another embodiment of the crucible of the present invention. Please refer to Fig. 5. It should be noted that the crucible of Fig. 5 is similar to the crucible of Figs. The outer wall surface of the crucible in FIG. 5 is the bottom wall 12 and the side wall 13 of the crucible body 1, and the protruding portion 50 includes a first protruding portion 52 and a second protruding portion 54. The first protrusion 52 is a first annular protrusion structure extending outward from the side wall 13, and the first annular protrusion structure is formed by the first protrusion 52 around the circumferential direction of the side wall 13. The second protrusion 54 is a second annular protrusion structure extending outward from the bottom wall 12. However, the present invention is not limited to this. In addition, as shown in FIG. 5, in the axial direction of the crucible body 1, the first protrusion 52 is adjacent to one end of the filling end surface 11, that is, the first protrusion 52 to The height distance of the bottom wall 12 is greater than the distance from the first protruding portion 52 to the filling end surface 11, so that the first protruding portion 52 is farther away from one end of the bottom wall 12, however, the present invention is not limited thereto. In an embodiment not shown, the first protrusion is adjacent to one end of the bottom wall, that is, the height distance from the first protrusion to the bottom wall is smaller than the distance from the first protrusion to the filling end surface; or The height distance from a protrusion to the bottom wall is equal to the distance from the first protrusion to the filling end surface.

In addition, in an embodiment that is not shown, the first protrusion 52 may also be as shown in the protrusion 22 of FIG. 2B, that is, the number of the first protrusion 52 may be multiple, and there may be multiple first protrusions. The portions 52 are arranged along the circumferential direction of the side wall 13; of course, part of the first protrusions can be connected together, and some of the first protrusions are not connected together. In addition, these first protrusions can be arranged at the same height position or different height positions adjacent to or far from the bottom wall 12, and can be adjusted depending on the actual product.

In this embodiment, the second protrusions 54 are arranged along the circumferential direction of the bottom wall 12, and the second protrusions 54 form a ring-shaped protrusion structure around the circumferential direction of the bottom wall 12, and the ring The protruding structure is located on the edge side of the bottom wall 12. Of course, the present invention is not limited to this. In an unillustrated embodiment, a ring-shaped protruding structure can be arranged inside the bottom wall 12. In an embodiment not shown, the second protrusion 54 may also be as shown in the protrusion 32 of FIG. 4B, that is, the number of the second protrusion 54 may be multiple, and there may be multiple second protrusions 54 They are arranged along the circumferential direction of the bottom wall 12; of course, part of the second protrusions can be connected together, while some of the second protrusions are not connected together. In addition, these second protrusions can be arranged at the same position or different positions adjacent to the edge side or inside of the bottom wall 12, and can be adjusted depending on the actual product.

Fig. 6 is a schematic diagram of an embodiment of the evaporation machine of the present invention. Please refer to FIG. 6, the crucible shown in FIGS. 1 to 5 of this embodiment is used for the evaporation process. The present invention does not limit the type of the vapor deposition machine. The vapor deposition machine includes a metal base 60 and a crucible as shown in FIGS. 1 to 5. A tank 62 is provided in the metal base 60, and the metal base 60 is an oxygen-free copper base. The crucible can be accommodated in the tank body 62. The accommodating tank 14 of the crucible body 1 is used to add an evaporation material M. The evaporation machine uses a heating source 70 to heat the evaporation material M in the crucible body 1 In an embodiment, the heating source 70 may be an electron beam, that is, an electron beam is used to heat the vapor deposition material M in the crucible body 1. Since the first protrusion 52 and the second protrusion 54 abut against the inner wall of the groove 62 in the metal base 60, no matter how the crucible is placed, the crucible can be kept in the middle of the metal base 60, and It will not shift, and will not cause one side of the crucible to be attached to the wall of the oxygen-free copper seat, so the crucible can be used, the material in the crucible can be uniformly heated, and the power can be stably controlled, and the service life of the crucible can be increased. reduce manufacturing cost. The above is the crucible shown in FIG. 5 as an example, and the crucible shown in FIGS. 1 to 4 can also be used in the above-mentioned evaporation machine.

In summary, in the crucible and vapor deposition machine of the present invention, a protrusion is provided on the outer wall of the crucible. The outer wall can be the side wall or bottom wall of the crucible body. In this way, no matter how the crucible is placed on the metal In the base body, by abutting the protruding part on the inner wall surface of the metal base body, the crucible can be kept in the middle position of the metal base body without shifting or making one side of the crucible stick to the wall surface of the oxygen-free copper base Circumstances, so the crucible can be used, the materials in the crucible can be heated uniformly, and the power can be controlled stably.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the relevant technical field can make slight changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the present invention shall be subject to those defined by the attached patent scope.

1 Crucible body 11 Fill in the end face 12 Bottom wall 13 Sidewall 14 Containment slot 20, 22 Bulge 30, 32 Bulge 50 Bulge 52 First protrusion 54 Second protrusion 60 Metal seat 62 Tank 70 Heating source M Evaporation material

Fig. 1 is a schematic diagram of an embodiment of the crucible of the present invention. Fig. 2A is a top view of Fig. 1. Figure 2B is a top view of another embodiment of the protrusion of the present invention. Figure 3 is a schematic diagram of another embodiment of the crucible of the present invention. Fig. 4A is a top view of Fig. 3. Figure 4B is a top view of another embodiment of the protrusion of the present invention. Fig. 5 is a top view of another embodiment of the crucible of the present invention. Fig. 6 is a schematic diagram of an embodiment of the evaporation machine of the present invention.

1 Crucible body 11 Fill in the end face 12 Bottom wall 13 Sidewall 14 Containment slot 50 Bulge 52 First protrusion 54 Second protrusion

Claims (7)

A crucible, comprising: a crucible body with an accommodating groove therein; and at least one protruding part arranged on a side wall and a bottom wall of the crucible body, wherein each protruding part is formed by the side wall of the crucible body A ring-shaped protruding structure extending outwards from the bottom wall. According to the crucible described in item 1 of the scope of the patent application, the protrusions are arranged along the circumferential direction of the side wall. According to the crucible described in item 1 of the scope of patent application, the protrusions are arranged along the circumferential direction of the bottom wall. The crucible described in the first item of the patent application, wherein each of the protrusions includes a first protrusion and a second protrusion, and each of the first protrusions is along the circumferential direction of the side wall Arranged, each of the second protrusions is arranged along the circumferential direction of the bottom wall. According to the crucible described in claim 1, wherein the crucible body includes a filling end surface, the accommodating groove communicates with the filling end surface, and the side wall is connected between the filling end surface and the bottom wall. A vapor deposition machine includes: a metal base body; and a crucible as described in any one of items 1 to 5 of the scope of the patent application, which is set in the metal base body, and each of the protrusions abuts Connected to the inner wall surface of the metal base body, the accommodating groove is used for adding an evaporation material. As described in item 6 of the scope of patent application, the metal base body is a copper base.

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