TWI419989B - Combined type crucible - Google Patents

Description

Combined crucible

The present invention relates to a combined crucible, in particular to a crucible for thermal Evaporation.

The evaporation method is a coating application technique belonging to physical vapor deposition (Physical Vapor Deposition), in which a material for depositing a film is placed in a crucible to apply thermal energy to decompose the material into a gaseous state. The atom, the aggregate of atoms or the molecule is formed by agglomerating on the surface of the substrate to be coated to form a film, and a heat heater, a halogen lamp heater or an induction heater can be used for applying heat energy. The vapor deposition method can be widely applied to the fields of manufacturing solar cells, semiconductor wafers, flat displays, optical lenses, decorative coatings, and the like. One of the important components in the bismuth vapor deposition equipment.

Referring to FIG. 1 and FIG. 2 simultaneously, a combined crucible 100 is composed of a bottomless conical 坩埚 110 and a cymbal base 120. The tail portion 112 of the bottomless conical raft 110 is placed in the accommodating portion 122 of the cymbal base 120. The crucible 110 may also be a U-shaped tail portion and a side wall extending outwardly having an extension portion. The ruthenium for vapor deposition is usually prepared by using a material resistant to high temperature and evaporation, such as molybdenum or tungsten. When the bottomless tapered cymbal 110 is placed in the accommodating portion 122 of the cymbal base, the bottomless tapered cymbal 110 has a small contact area with the accommodating portion 122 of the cymbal base and the bottomless tapered cymbal 110 and the accommodating portion 122 of the cymbal base There is a certain gap 130 between them, which results in poor thermal conductivity.

In view of this, it is necessary to provide a combined compaction with better thermal conductivity.

A combined crucible will be described below by way of example.

A cymbal cymbal includes a cymbal and a cymbal base, the cymbal base has a receiving portion, and the cymbal is disposed in the accommodating portion, and the outer wall of the cymbal and the inner wall of the accommodating portion are engaged by the concave-convex structure for increasing the cymbal The contact area of the base.

The combined crucible can be used in a plurality of different evaporation apparatuses. When the combined crucible is heated by different heating methods, since the outer wall of the crucible meshes with the inner wall of the receiving portion, the crucible is thermally expanded and thus The 坩埚 base is tightly fitted, so there is a good thermal conductivity between the two. Due to the need of the process, when the cooling device is used to cool the combined crucible, since the outer wall of the crucible is engaged with the inner wall of the receiving portion, the crucible and the crucible base can be well fitted and have a large The combined area has a good cooling effect.

The invention will be further described in detail below with reference to the accompanying drawings.

Referring to FIG. 3 and FIG. 4 simultaneously, the combination cassette 200 of the first embodiment of the present invention includes a crucible 210 and a crucible base 220. The crucible 210 is cylindrical, and the protrusion on the outer wall of the crucible 210 is thread-shaped. The threaded base 212 has a receiving portion 222. The inner wall of the receiving portion 222 has a threaded groove 224 that cooperates with the thread 212, and the jaw 210 can be screwed into the receiving portion 222 of the socket base 220. The material of the crucible 210 may be molybdenum, copper, tungsten, quartz glass or the like.

Referring to FIG. 5 and FIG. 6 simultaneously, the combined cassette 300 of the second embodiment of the present invention is substantially the same as the combined cassette 200 of the first embodiment, except that the base of the housing portion 222 of the base 220 has an inner wall. The threaded arrangement of the thread 224' may also have a groove 212' that cooperates with the thread 224' on the inner wall of the receiving portion 222.

When the combined crucible 200 is heated by different heating methods, the crucible 210 is slightly expanded by heat, and since the outer wall of the crucible 210 has the threaded arrangement of the screw 212, the inner wall of the receiving portion 222 has the crucible 210 The screw-shaped groove 224 on the outer wall cooperates with the threaded groove 224, and the 坩埚210 has a large contact area with the cymbal base 220, so that the heat conduction effect between the two is good. Similarly, when the combined crucible 200 is cooled by a cooling device (not shown), the crucible 210 has a large contact area with the crucible base 220, so the combined crucible 200 has a good cooling effect.

Referring to FIG. 7 and FIG. 8 simultaneously, the modular crucible 400 of the third embodiment of the present invention includes a crucible 310 and a crucible base 320. The crucible 310 is a tapered shape of the tip end, and the protrusion on the outer wall of the crucible 310 is along the crucible. The axially extending V-shaped projection 312 has a triangular cross section, and the crucible base 320 has a receiving portion 322. The receiving portion 322 has a V-shaped recess 324 that cooperates with the V-shaped projection 312. The cymbal 310 can be directly inserted into the receiving portion 322 of the cymbal base 320. The V-shaped projection 312 and the matching V thereof The groove 324 is engaged and the two are closely attached.

Referring to FIG. 9 and FIG. 10 simultaneously, the combined cassette 500 of the fourth embodiment of the present invention is substantially the same as the combined cassette 400 of the third embodiment, except that the base of the receiving portion 322 of the base 320 has an inner wall. The V-shaped protrusion 324' may also be provided thereon, and the outer wall of the crucible 310 has a V-shaped groove 312' that cooperates with the V-shaped protrusion 324' on the inner wall of the receiving portion 322.

When the combined crucible 300 is heated by different heating methods, since the outer wall of the crucible 310 has a V-shaped projection 312, the inner wall of the receiving portion 322 has a V matching with the V-shaped projection 312 on the outer wall of the crucible 310. The groove 324 has a large contact area between the crucible 310 and the crucible base 320, so that the heat conduction between the two is good. Similarly, when the combined crucible 300 is cooled by a cooling device (not shown), the crucible 310 has a large contact area with the crucible base 320, so the combined crucible 300 has a good cooling effect.

Referring to FIG. 11, the combined cassette of the embodiment of the present invention may further include another type of crucible 410, and FIG. 11 is a schematic cross-sectional view of the crucible 410. The crucible 410 has a regularly arranged convex cross section as a truncated half. Round raised.

It can be understood that, in the embodiment of the present invention, the outer wall of the cymbal is engaged with the inner wall of the accommodating portion, and further includes the following cases: the outer wall of the cymbal has a regularly arranged protrusion and a groove, and the inner wall of the accommodating portion also has a rule. a projection and a groove, wherein the protrusion on the outer wall of the crucible cooperates with the groove on the inner wall of the receiving portion, and the groove on the outer wall of the crucible cooperates with the protrusion on the inner wall of the receiving portion, thereby The bases fit nicely together.

Here, the crucible may also adopt a multi-layer structure, such as a ceramic-metal-ceramic composite sandwich crucible, the inner wall and the outer wall of the crucible are ceramic, and the outer wall structure is a regular arrangement of protrusions. The ceramic may be an inorganic non-metallic material such as borax, zirconia, boron nitride, titanium oxide or titanium boride, and a metal layer is provided between the inner wall and the outer wall of the crucible. The metal layer may be molybdenum, copper, titanium, tantalum, chromium or the like.

In summary, the present invention complies with the requirements of the invention patent and submits a patent application according to law. The above description is only the preferred embodiment of the present invention, and equivalent modifications or variations made by those skilled in the art of the present invention should be included in the following claims.

Combined 坩埚. . . 100,200,300,400,500

坩埚 base. . . 120,220,320

crucible. . . 110,210,310,410

Tail. . . 112

Containment department. . . 122,222,322

gap. . . 130

Screw teeth. . . 212,224’, 324’

Raised. . . 312

Groove. . . 224,212’,324,312’

FIG. 1 is a schematic structural view of a conventional modular crucible.

Figure 2 is a schematic cross-sectional view of the combined crucible II-II of Figure 1.

Figure 3 is a schematic view showing the structure of the first embodiment of the modular crucible of the present invention.

Figure 4 is a schematic cross-sectional view of the combined crucible of Figure 3 taken along line IV-IV.

Figure 5 is a schematic view showing the structure of a second embodiment of the modular cartridge of the present invention.

Figure 6 is a schematic cross-sectional view of the combined crucible of Figure 5 taken along line VI-VI.

Figure 7 is a schematic view showing the structure of a third embodiment of the modular assembly of the present invention.

Figure 8 is a schematic cross-sectional view of the combined crucible of Figure 7 taken along line VIII-VIII.

Figure 9 is a schematic view showing the structure of a fourth embodiment of the modular cartridge of the present invention.

Figure 10 is a schematic cross-sectional view of the combined crucible of Figure 9 along IX-IX.

Figure 11 is a schematic cross-sectional view of a crucible of the modular crucible of the present invention.

Combined 坩埚. . . 400

crucible. . . 310

坩埚 base. . . 320

Raised. . . 312

Containment department. . . 322

Groove. . . 324

Claims (10)

The utility model relates to a combined cymbal, comprising a cymbal and a cymbal base, wherein the cymbal base has a receiving portion, and the cymbal is disposed in the accommodating portion, wherein the cymbal outer wall and the inner wall of the accommodating portion are engaged by the concave-convex structure for Increase the contact area between the 坩埚 and the 坩埚 base. The modular cymbal of claim 1, wherein the outer wall of the cymbal has a regularly arranged projection, and the inner wall of the accommodating portion has a groove matching the protrusion of the outer wall of the cymbal. The combination cassette of claim 2, wherein the protrusion is a thread. The combined crucible of claim 2, wherein the projection is a V-shaped projection extending in the axial direction of the crucible, a cylindrical projection or a truncated semi-circular projection in cross section. The combined crucible according to claim 2, wherein the crucible material is molybdenum, copper or quartz glass. The modular cymbal of claim 1, wherein the inner wall of the accommodating portion has a regularly arranged protrusion, and the outer wall of the cymbal has a groove matching the protrusion of the inner wall of the accommodating portion. . The combination cassette of claim 6, wherein the protrusion is a thread. The combined cymbal according to claim 6, wherein the protrusion is a V-shaped protrusion extending in the axial direction of the accommodating portion, a column-shaped protrusion or a truncated semi-circular protrusion in cross section. The combined crucible of claim 6, wherein the crucible material is molybdenum, copper or quartz glass. The modular cymbal of claim 1, wherein the outer wall of the cymbal has a regularly arranged protrusion and a groove, and the inner wall of the accommodating portion has a protrusion and a groove corresponding to the outer wall of the cymbal. Grooves and projections.