TWI706084B - Pump system - Google Patents

Abstract

A pump system comprising a vacuum pump (12) and a cooling element (18) connected with the vacuum pump (12). A coolant supply pipe (20) and a coolant discharge pipe (22) are connected with the cooling element (18) for cooling the vacuum pump by absorbing and discharging of heat by means of a coolant. The coolant supply pipe (20) and the coolant discharge pipe (22) are connected with a heat exchanger (24) such that heat is transferred from the coolant discharge pipe (22) to the coolant supply pipe (20).

Description

Pump system

The present invention relates to a pump system especially for pumping gas/vapor close to the condensation point and/or close to the deposition point.

In some coating processes (for example, in the semiconductor industry or during the manufacture of flat screens), gas/vapor is delivered close to the condensation point (transition from gas to liquid) and/or close to the deposition point (transition to solid). Specifically, the second situation is more critical for vacuum pumps, because the generated solids will accumulate in the vacuum pump in the form of dust or deposits and block the vacuum pump. This especially occurs on the discharge side of the vacuum pump, where a higher pressure exists and the steam is closer to the condensation point/deposition point.

One way to avoid this problem is to use other gases (eg, gas ballast, purging gas) to dilute the steam and keep its partial pressure sufficiently low. However, in some applications, this solution is not suitable because a large amount of auxiliary gas will be required. In these situations, it is recommended to increase the temperature of the vacuum pump to deliver the delivered substance in the form of gas or vapor via the vacuum pump. Due to the higher pressure, the temperature of the exhaust pipe of the vacuum pump on the discharge side is more critical.

In the prior art, a cooling water control and regulation system is used for tempering. These systems are used to set and/or adjust the cooling water flow to make one of the vacuum pumps The temperature at the reference position (usually on the discharge side) is maintained at a predetermined temperature.

The disadvantage of this solution is that the vacuum pump may be supplied with only a small amount of cooling water and/or may not be supplied with cooling water at all for a short time. Depending on the type of vacuum pump, this may result in insufficient cooling of temperature-sensitive components (such as motors, bearings or electronic components).

Since the exhaust pipe of the vacuum pump must also be maintained at a high temperature level, the pipe is usually further heated separately (for example, by an electrically operated heating sleeve). This will reduce the energy efficiency of the vacuum pump, leading to higher costs.

Another problem encountered in these processes is the use of flushing gas, which is supplied to the vacuum pump and may locally cool the process gas at the supply position in the vacuum pump. This may cause undesirable condensation and/or deposition.

One objective of the present invention is to provide a pump system for delivering gas/vapor close to the condensation point and/or close to the deposition point, in which the pump system can be operated reliably and efficiently while effectively preventing condensation and /Or deposition.

This goal is achieved by a pump system as described in claims 1, 7 and 13 and a method as described in claims 20, 22 and 23.

The pump system according to the present invention includes a vacuum pump. The pump system includes at least one vacuum pump, so that a pump system composed of a plurality of vacuum pumps connected to each other is also included. The vacuum pump is especially a dry-compressing pump. However, the invention described below is essentially irrelevant to the type of pump, so that the invention includes substantially all types of pumps. The vacuum pump system of the pump system according to the present invention is a conventional vacuum pump, which usually includes a suction chamber (sunction chamber) in which a movable pump element is arranged for self-containing a medium The entrance is delivered to an exit. For example, the movable pump element is a rotating rotor or a piston. Specifically, at least one pump element is arranged at the rotor to allow the medium to be delivered. In the pump system according to the present invention described herein, screw pumps, claw pumps, Roots pumps, piston pumps, etc. can be used. In addition, in addition to the positive displacement pump, the pump system according to the present invention may also include a power pump system, which includes a hybrid type of lateral channel blower (lateral channel blower), and molecular pump level (such as Holway Gram (Holweck) class, Siegbahn (Siegbahn) class, Gaede (Gaede) pump and turbomolecular pump). Specifically, the pump system is suitable for generating a vacuum of particularly 10 ^-2 mbar, preferably 10 ^-3 mbar, and particularly preferably 10 ^-6 mbar.

In addition, the pump system according to the present invention includes a cooling element connected to the vacuum pump for cooling. Specifically, the cooling element is connected with the casing of the vacuum pump, and the casing defines the suction chamber of the vacuum pump. The cooling element includes a coolant supply pipe and a coolant discharge pipe. The coolant is supplied to the cooling element via the coolant supply pipe and used to absorb the heat of the vacuum pump. The heated coolant leaves the cooling element via the coolant discharge pipe. Therefore, the cooling element cools the vacuum pump by absorbing and discharging heat with the aid of the coolant.

According to the present invention, a heat exchanger is connected to the coolant supply pipe and the coolant discharge pipe so that the heat absorbed by the coolant is transferred from the coolant discharge pipe to the coolant supply pipe and/or is transferred to the coolant supply pipe The coolant of the agent supply pipe.

Therefore, the temperature adjustment of the vacuum pump is carried out by means of the preheated cooling water. A sufficient amount of preheated cooling water can be continuously flowed through the vacuum pump. Therefore, the cooling water supply is not interrupted, so that sufficient cooling of the sensitive components is always ensured, and therefore, the heat resistance is achieved within the pump One of the distribution is homogenized. Therefore, temperature adjustment by means of preheated cooling water will prevent certain parts of the pump from becoming overheated. At the same time, there is no need to provide sufficiently hot cooling water that will have to be heated in an energy-consuming manner. The cooling water is preheated by the heat of the vacuum pump discharged by the coolant through the heat exchanger.

Specifically, the heat exchanger is connected to a coolant inlet and a coolant outlet. The coolant is fed to the pump system via the coolant inlet, and the coolant leaves the pump system via the coolant outlet. The untreated and untempered coolant can be fed to the pump system through the coolant inlet. There is no need to pre-treat the coolant, especially preheating. Therefore, there is no need to carry out other construction-related measures at the operating point of the pump, which helps to save costs and form a compact pump system.

Specifically, the coolant is water, and it is preferable to add chemical additives to the water to adapt the individual properties of the coolant to the requirements of the pump system. Another option is that the coolant is oil or another synthetic liquid.

Specifically, the pump system includes a first cooling circuit for a first coolant and a second cooling circuit for a second coolant. The first cooling circuit starts with a heat exchanger and passes through cooling elements. Extending back to the heat exchanger, this second cooling circuit starts with the coolant inlet and extends through the heat exchanger to the coolant outlet. Therefore, the heat generated in the vacuum pump is discharged by the first coolant through the first cooling circuit, and is transferred to the second cooling circuit by the second coolant through the heat exchanger. Then, the second coolant leaves the pump system via the coolant outlet. In the heat exchanger, not all of the heat but only a part of the heat is transferred from the first coolant to the second coolant, so that the remaining heat remains in the first coolant, and therefore, it can be received by the vacuum pump. Preheat the coolant. Preferably, the first coolant and the second coolant may be different from each other, so that, for example, oil is used as the first coolant in the first cooling circuit, and in the second cooling circuit. Water is used as the second coolant in the circuit.

Another option is that, in a particularly preferred embodiment, the pump system particularly includes a single cooling circuit that starts with the coolant inlet and extends through the heat exchanger to the cooling element and back to the heat exchanger , And extend to the coolant outlet. The heat discharged from the vacuum pump by means of the coolant is transferred to the coolant flowing to the vacuum pump in the coolant inlet via the heat exchanger, thereby providing the preheated coolant for the vacuum pump. Thus, specifically, the coolant flowing through the pump system undergoes a permanent exchange.

Specifically, a regulating valve is arranged in the coolant supply pipe and/or between the coolant inlet and the heat exchanger, and the regulating valve is designed to regulate the flow rate of the coolant. Specifically, when two cooling circuits are provided, the portion of the heat discharged through the second cooling circuit can be adjusted by a regulating valve arranged between the coolant inlet and the heat exchanger. Preferably, the regulating valve is controlled by temperature measurement, wherein during the temperature measurement, it is better to measure the housing temperature of the vacuum pump and/or the coolant in the coolant supply pipe (when it is about to enter the vacuum pump) Before) the temperature.

Specifically, the vacuum pump includes a flushing gas feed pipe to provide flushing gas for the pumping process. The flushing gas feed pipe is connected with the heat exchanger and/or the coolant discharge pipe to preheat the flushing gas, so that the heat discharged from the vacuum pump by the coolant is transferred to the flushing gas. Therefore, the flushing gas is preheated before it is introduced into the vacuum pump, so that the process gas will not be locally cooled, which may cause the process gas to condense or deposit. The heat generated by the vacuum pump is transferred to the flushing gas, so that no other device is needed to preheat the flushing gas, and the existing heat generated by the vacuum pump can be efficiently used to preheat the flushing gas.

A second independent invention relates to a pump system with a vacuum pump, wherein the vacuum pump includes an inlet and an outlet. The pump system includes at least one vacuum pump, so that a plurality of vacuum pumps connected to each other constitute a pump system. The vacuum pump, especially a dry compression pump, is also included. However, the invention described below is essentially irrelevant to the type of pump, so that the invention includes substantially all types of pumps. The vacuum pump of the pump system according to the present invention is a conventional vacuum pump, which usually includes a suction chamber in which a movable pump element is configured to deliver a medium from an inlet to an outlet . For example, the movable pump element is a rotating rotor or a piston. Specifically, at least one pump element is arranged at the rotor to allow the medium to be delivered. In the pump system according to the present invention described herein, screw pumps, claw pumps, lug pumps, piston pumps, etc. can be used. In addition, in addition to the positive displacement pump, the pump system according to the present invention can also include a power pump system, which includes a hybrid type of transverse channel blower, and molecular pump stages (such as Holwijk, Sig Barn class, Gade pump and turbomolecular pump). Specifically, the pump system is suitable for generating a vacuum of particularly 10 ^-2 mbar, preferably 10 ^-3 mbar, and particularly preferably 10 ^-6 mbar.

According to the present invention, the pump system includes a flushing gas feed pipe connected to the vacuum pump for providing flushing gas for the suction process.

According to the invention, the outlet is connected to an outlet heating element for heating the outlet. The flushing gas feed pipe is connected with the outlet heating element, so that the heat generated by the outlet heating element is transferred to the flushing gas. Therefore, by using the outlet heating element to provide a preheated flushing gas for the pump system, no other heating element is needed. Therefore, the heat generated by the outlet heating element is efficiently used to preheat the flushing gas. Another option is that the outlet is connected to an exhaust pipe that includes an exhaust pipe heating element for heating the exhaust pipe. Here, the flushing gas feed pipe is connected with the exhaust pipe heating element, so that the heat generated by the exhaust pipe heating element is transferred to the flushing gas. Here, the generated heat is also used to preheat the flushing gas, so that the pump system has an efficient design. Specifically, as a simple measure in construction, the help The Pu system contains only one heating element for heating the flushing gas at least indirectly.

Specifically, both an outlet heating element and an exhaust pipe heating element are provided, which are particularly preferably configured as a common outlet/exhaust pipe heating element. Therefore, only a single heating element is provided, and the single heating element is used to simultaneously heat the outlet and the exhaust pipe. The outlet/exhaust pipe heating element preheats the flushing gas for the suction process via the flushing gas feed pipe connected to it.

Specifically, the flushing gas feed pipe surrounds the outlet and/or the exhaust pipe in a spiral manner. Therefore, an effective heat transfer from the outlet heating element, and/or the exhaust pipe heating element, and/or the outlet/exhaust pipe heating element is ensured.

Specifically, the flushing gas feed pipe is partially surrounded by outlet heating elements, and/or exhaust pipe heating elements, and preferably outlet/exhaust pipe heating elements. This configuration ensures an efficient heat transfer. At the same time, the and/or the heating elements can be surrounded by an insulation material, so that as little heat as possible is dissipated to the environment.

Specifically, a cooling element is connected to the vacuum pump, wherein the cooling element includes a coolant supply pipe and a coolant discharge pipe for cooling the vacuum pump by absorbing and discharging heat with a coolant. The coolant supply pipe and the coolant discharge pipe are connected with a heat exchanger.

Specifically, the pump system is constructed according to the features of the first invention.

A third independent invention relates to a pump system with a vacuum pump. The pump system includes at least one vacuum pump, so that a pump system composed of a plurality of vacuum pumps connected to each other is also included. The vacuum pump is especially a dry compression pump. However, the invention described below is essentially irrelevant to the type of pump, so that the invention includes substantially all types of pumps. The vacuum pump of the pump system according to the present invention is a conventional vacuum pump, which usually includes a suction chamber in which a movable pump element is configured to deliver a medium from an inlet to an outlet . For example, the movable pump element is a rotating rotor or a piston. Specifically, at least one pump element is arranged at the rotor to allow the medium to be delivered. In the pump system according to the present invention described herein, screw pumps, claw pumps, lug pumps, piston pumps, etc. can be used. In addition, in addition to the positive displacement pump, the pump system according to the present invention can also include a power pump system, which includes a hybrid type of transverse channel blower, and molecular pump stages (such as Holwijk, Sig Barn class, Gade pump and turbomolecular pump). Specifically, the pump system is suitable for generating a vacuum of particularly 10 ^-2 mbar, preferably 10 ^-3 mbar, and particularly preferably 10 ^-6 mbar.

According to the present invention, the vacuum pump is connected to a cooling element, wherein the cooling element includes a coolant supply pipe and a coolant discharge pipe for cooling the vacuum pump by absorbing and discharging heat by the coolant.

According to the present invention, the coolant supply pipe includes a heating element for preheating the coolant. Therefore, the coolant supplied to the vacuum pump is preheated, so that even when the temperature of the pump is high, the temperature-sensitive components can always be fully cooled, and the heat distribution inside the vacuum pump can be homogenized. In turn, damage to temperature-sensitive components can be prevented.

Specifically, the coolant supply pipe and the coolant discharge pipe are connected to a heat exchanger. Therefore, the heat of the coolant discharge pipe is transferred to the coolant supply pipe. However, this only happens when the vacuum pump has reached a certain operating temperature. Therefore, in particular, the heating element according to the present invention ensures that the vacuum pump is fed with sufficiently preheated cooling water during the start-up phase of the vacuum pump. Once sufficient heat is transferred from the coolant discharge pipe to the coolant supply pipe via the heat exchanger, the heating element can be switched off.

Specifically, the pump system is constructed according to the features of the first invention.

Specifically, the vacuum pump includes an inlet and an outlet. In addition, the vacuum pump is connected to a flushing gas feed pipe, which is used to provide flushing gas for the suction process. The outlet is connected to an outlet heating element for heating the outlet, wherein the flushing gas feed pipe is connected to the outlet heating element, so that the heat generated by the outlet heating element is transferred to the flushing gas, and therefore, the flushing gas is being introduced to The vacuum pump can be preheated before. Another option is that the outlet is connected to an exhaust pipe, which in turn is connected to an exhaust pipe heating element for heating the exhaust pipe. Here, the flushing gas feed pipe is connected to the exhaust pipe heating element, so that the heat generated by the exhaust pipe is transferred to the flushing gas. Here, by preheating the flushing gas, the heat generated can also be efficiently utilized. A pre-heated flushing gas will ensure that the process gas will not be locally cooled. Such partial cooling will cause condensation or sublimation inside the vacuum pump.

Specifically, the pump system is constructed according to the features of the second invention.

Specifically, the heating element is arranged downstream of the heat exchanger.

Specifically, the heating element is an electrical heating element. This ensures a simple design. Alternatively or additionally, the heating element is an outlet heating element, an exhaust pipe heating element, and/or an outlet/exhaust pipe heating element. Therefore, the heat generated by the outlet heating element, and/or the exhaust pipe heating element, and/or the outlet/exhaust pipe heating element is used to preheat the coolant, so that the generated heat can be efficiently used.

Specifically, the features of individual inventions can be freely combined with each other to achieve an efficient pumping system to ensure that no condensation and deposition occur during the delivery of gases and vapors close to the condensation point and/or deposition point. Therefore, the reliable operation of one of the pump systems is always ensured, and therefore, it is ensured that there will be no condensation or deposited process gas to block or even stop the vacuum pump.

A fourth independent invention relates to a method for preheating a coolant for a vacuum pump. In the method according to the present invention, at least part of the heat absorbed by the coolant when it passes through the vacuum pump is transferred to the coolant supplied to the vacuum pump. Therefore, the coolant does not discharge all the absorbed heat, but only uses a part of the absorbed heat to preheat the supplied coolant.

Specifically, the method is implemented using a pump system according to the first invention.

Specifically, the coolant is preheated by a heating element before it passes through the vacuum pump to cool the vacuum pump.

Specifically, when the vacuum pump does not generate enough heat, for example, during the start of the pump or during the stop period, the heating element is turned on. In this case, it is impossible to transfer a sufficient amount of heat absorbed by the coolant as it passes through the vacuum pump to the supplied coolant to sufficiently preheat the coolant before it passes through the vacuum pump . Once the heat discharged from the vacuum pump is sufficient to preheat the supplied coolant, it is better to cut off the heating element.

Specifically, the method is implemented using a pump system according to the third invention.

A fifth independent invention relates to a method for preheating a coolant for a vacuum pump, wherein the coolant is preheated by a heating element before it passes through the vacuum pump.

Specifically, the method is implemented using a pump system according to the third invention.

A sixth independent invention relates to a method for preheating a flushing gas for a vacuum pump, wherein the flushing gas system is generated by the heat generated by the vacuum pump and/or by a The heat generated by the heating element is preheated.

Specifically, the method is implemented using a pump system according to the second invention.

Specifically, the heat generated by the vacuum pump is transferred to the flushing gas by means of a coolant.

Specifically, the heating element is used to heat an outlet and/or an exhaust pipe connected to the outlet. This is implemented by means of the same heating element that is also used to preheat the flushing gas, so that the heat generated by the heating element can be efficiently used.

Specifically, the features of the methods of the fourth invention to the sixth invention can be freely combined to achieve an efficient method to ensure reliable operation and effectively prevent condensation and deposition of process gases.

10‧‧‧Pump system

12‧‧‧Vacuum pump

14‧‧‧Entrance

16‧‧‧Exit

18‧‧‧Cooling element

20‧‧‧Coolant supply pipe

22‧‧‧Coolant discharge pipe

24‧‧‧Heat exchanger

26‧‧‧The first cooling circuit / the first coolant circuit

27‧‧‧Second cooling circuit/second coolant circuit

28‧‧‧Coolant inlet

30‧‧‧Coolant outlet

32‧‧‧Regulating valve

34‧‧‧Temperature measurement sensor

36‧‧‧Pump system

38‧‧‧Regulating valve

42‧‧‧Heating element

44‧‧‧Pump system

48‧‧‧Pump system

50‧‧‧Exit heating element

52‧‧‧Tube

54‧‧‧Valve

56‧‧‧Valve

58‧‧‧Pump system

60‧‧‧Flushing gas feed pipe

62‧‧‧Flushing gas inlet

64‧‧‧Pump system

66‧‧‧tube

68‧‧‧Pump system

70‧‧‧Pump system

Hereinafter, the preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the accompanying drawings: Figure 1 shows a first embodiment of a pump system with a heat exchanger; Figure 2 shows a heat exchange The second embodiment of the pump system of the device; Figure 3 shows the third embodiment of the pump system with a heating element; Figure 4 shows the one of the pump system with a heat exchanger and a heating element Fourth embodiment; Figure 5 shows a fifth embodiment of a pump system with a heat exchanger and a heating element; Figure 6 shows a sixth embodiment of a pump system with a flushing gas preheating element ； Figure 7 shows a detailed view of the flushing gas preheating element; Figure 8 shows a seventh embodiment of a pump system with two heating elements; Figure 9 shows a flushing gas preheating element and a heat exchanger An eighth embodiment of a pump system; and Figure 10 shows a ninth embodiment of a pump system with a flushing gas preheating element and a heat exchanger.

According to the present invention, the pump system 10 includes at least one vacuum pump 12, and the vacuum pump 12 has an inlet 14 and an outlet 16. Another vacuum pump may be connected to the inlet 14 and/or the outlet 16.

The vacuum pump 12 is connected to a cooling element 18, and the cooling element 18 is fluidly connected to a coolant supply pipe 20 and a coolant discharge pipe 22. A coolant is fed to the cooling element 18 via the coolant supply pipe 20, in the cooling element 18, the coolant absorbs the heat generated by the vacuum pump 12 and is then discharged from the vacuum pump 12 via the coolant discharge pipe 22.

The coolant supply pipe 20 and the coolant discharge pipe 22 are connected to a heat exchanger 24. The coolant supply pipe 20 and the coolant discharge pipe 22 constitute a first coolant circuit 26. A coolant inlet 28 and a coolant outlet 30 are connected to the heat exchanger 24. The coolant inlet 28 and the coolant outlet 30 constitute a second cooling circuit 27, and the second cooling circuit 27 is only connected to the first cooling circuit 26 via the heat exchanger 24, but is not fluidly connected to the first cooling circuit 26. The heat of the vacuum pump 12 absorbed by the first cooling circuit 26 is transferred to the second cooling circuit 27 via the heat exchanger 24. The heat exchanger 24 absorbs this heat through a coolant (which enters through the coolant inlet 28), and the coolant leaves the pumping system through the coolant outlet 30, so that the absorbed heat can be effectively discharged.

In the coolant inlet 28, a regulating valve 32 is provided. The regulating valve 32 is used to regulate the The flow rate of the coolant passing through the second cooling circuit 27 thereby also regulates the heat discharged through the second cooling circuit 27. Therefore, the remaining heat in the first cooling circuit 26 can be adjusted via the regulating valve 32 so that one of the coolant preheated via the coolant supply pipe 20 is fed to the cooling element 18. Preferably, the regulating valve 32 can be controlled according to the temperature at the cooling element 18. For this purpose, a temperature measuring sensor 34 is arranged in the area of the cooling element 18. For example, other locations for the temperature sensor will be the coolant supply pipe 20 and the housing of the vacuum pump 12.

Of course, other regulating valves can be provided to accurately control the cooling of the vacuum pump. For simplicity and for better understanding, these regulating valves have been omitted. Therefore, for example, a regulating valve can also be provided in the first cooling circuit 26.

In the following, similar or identical components are designated by the same reference numbers.

In a second embodiment shown in Figure 2, the pump system 36 only includes one cooling circuit. The coolant is fed from the coolant inlet 28 to the heat exchanger 24 and from there to the cooling element 18 connected to the vacuum pump 12 via a coolant supply pipe. The coolant absorbs the heat generated by the vacuum pump 12 via the cooling element 18 and is supplied back to the heat exchanger 24 via a coolant discharge pipe 22. In the heat exchanger 24, the heat of the vacuum pump 12 absorbed by the coolant in the cooling element 18 is at least partially transferred to the coolant flowing to the vacuum pump 12 in the coolant supply pipe 20. The coolant leaves the pump system from the heat exchanger 24 via the coolant outlet 30. When the temperature of the coolant at the coolant inlet is, for example, 20°, the coolant is heated to, for example, 45° in the heat exchanger 24, and then is supplied to the cooling element 18 via the coolant supply pipe 20. In the cooling element 18, the coolant absorbs the heat generated by the vacuum pump 12 and is thereby heated to, for example, 60°. After the absorbed heat is transferred to the inflowing coolant in the heat exchanger, the heat contained in the coolant is reduced, so that the coolant has a temperature of, for example, 45°, so that the coolant is at a temperature of, for example, 45°. Exit the pump system 30 via the coolant outlet 30.

In the pump system 30, a regulating valve 38 is provided in the coolant supply pipe 20, and the regulating valve is controlled according to, for example, the temperature of the coolant at the position of the regulating valve 38, thereby regulating the cooling passing through the cooling element 18 The flow rate of the agent.

In addition to the aforementioned regulating valve 38, the pump system 40 shown in FIG. 3 also includes a heating element 42 in the coolant supply pipe 20, and the heating element is also connected to the coolant inlet 28. One of the coolants entering via the coolant inlet 28 is preheated by the heating element 42 and is fed to the cooling element 18 via the coolant supply pipe 20. In the pump system 40, the coolant discharge pipe 22 is directly connected to the coolant outlet 30, so that the coolant is directly fed from the cooling element 18 to the coolant outlet 30.

In the pump system 44 shown in FIG. 4, the heating element 42 is arranged in a first cooling circuit 26, and the first cooling circuit 26 is coupled to a second cooling circuit 27 via a heat exchanger 24. Therefore, when the temperature of the coolant in the first cooling circuit 26 drops, the temperature is increased through the heating element 42 so that a sufficiently preheated coolant is always fed to the cooling element 18. The coolant in the first cooling circuit 26 can be cooled via the second cooling circuit 27 by means of the heat exchanger 24.

The pump system 48 shown in FIG. 5 only includes one pump circuit, in which a heat exchanger 24 is provided along with the coolant supply pipe 20 and the coolant discharge pipe 22. In addition, at the outlet 16 of the vacuum pump 12, an outlet heating element 50 is provided. The outlet heating element 50 is used to maintain the outlet 16 of the vacuum pump 12 at an appropriate temperature so as to avoid condensation in the area of the outlet 16 And sublimation.

The coolant can be fed to the coolant supply pipe 20 from the coolant inlet 28 via a further pipe 52 and via the outlet heating element 50 in which a valve 54 is arranged. In the coolant supply pipe 20, another valve 56 is arranged. When the temperature of the coolant is too low and the heat generated by the vacuum pump 12 is not sufficient to preheat the coolant through the heat exchanger 24, the coolant can be preheated by means of the outlet heating element 50, wherein For this purpose, valve 54 is at least partially opened and valve 56 is at least partially closed. Therefore, the outlet heating element 50 is used to heat the outlet 16 of the vacuum pump 12 It is also used to preheat the coolant.

The pump system 58 shown in FIG. 6 includes a flushing gas feed pipe 60 through which a flushing gas is supplied from a flushing gas inlet 62 of the pump 12.

In addition, the pump system 58 includes an outlet heating element 50. The flushing gas feed pipe 60 is connected with the outlet heating element 50 so that the heat of the outlet heating element 50 is transferred to the flushing gas and fully preheating the flushing gas.

As shown in Figure 7, the flushing gas feed pipe 60 is arranged in a spiral manner around the outlet 16 to achieve as effective heat transfer as possible from the outlet heating element to the flushing gas feed pipe.

Alternatively or additionally, the outlet heating element 50 may be a heating element for heating the exhaust pipe connected to the outlet 16 of the vacuum pump 12. In addition, the outlet 16 and the exhaust pipe may include a common heating element for heating the outlet 16 and the exhaust pipe at the same time.

The pump system 64 shown in Fig. 8 includes a cooling element 18, which is connected to a coolant inlet 28 via a coolant supply pipe 20, and the cooling element 18 is connected to a coolant discharge pipe 22, and the coolant discharges The tube 22 is connected to a coolant outlet 30. In the coolant supply pipe 20, a heating element 42 is arranged for preheating the coolant, and the coolant then cools the vacuum pump 12 via the cooling element 18. In addition, the pump includes a flushing gas feed pipe 60 connected to an outlet heating element 50. The flushing gas feed pipe 60 is connected to the heating element 42 via another pipe 66. Therefore, the flushing gas entering the pump system through the flushing gas inlet 62 is first preheated in the heating element 42 which is also used to preheat the coolant. Subsequently, the flushing gas is finally preheated in the outlet heating element 50, after which the flushing gas is supplied to the vacuum pump 12. Thus, the heat of both the coolant heating element and the outlet heating element 50 is used to preheat the flushing gas. Since the outlet heating element is connected It often has a higher temperature than the heating element 42 used to preheat the coolant, so it is preferable to supply the flushing gas through the heating element 42 first and then the outlet heating element 50.

The pump system 68 shown in FIG. 9 includes a first coolant circuit 26 and a second coolant circuit 27 connected to each other via a heat exchanger 24. In addition, the pump 12 of the pump system includes a flushing gas feed pipe 60. This pipe is connected to the coolant discharge pipe 22 of the first coolant circuit 26 and specifically surrounds the coolant discharge pipe in a spiral manner. Then, a flushing gas entering through the flushing gas inlet 62 absorbs the heat transferred from the pump 12 to the coolant flowing through the coolant discharge pipe 22 via the cooling element 18. Thereby, the flushing gas is sufficiently preheated and supplied to the vacuum pump 12 via the flushing gas feed pipe 60. Specifically, the flushing gas feed pipe 60 surrounds the coolant discharge pipe 22 in a spiral manner.

The pump system 70 shown in FIG. 10 includes a coolant circuit. In the coolant circuit, a coolant supply pipe 20 and a coolant discharge pipe 22 pass through a heat exchanger 24 and a coolant inlet 28 and a cooling system. The agent outlet 30 is connected. In addition, the pump 12 of the pump system 70 includes a flushing gas feed pipe 60. The flushing gas feed pipe 60 is connected to the heat exchanger so that the heat from the coolant discharge pipe 22 is not only transferred to the coolant supply pipe 20 but also to the flushing gas feed pipe 60, so that the flushing gas can be sufficiently preheated.

Of course, when reasonable, the features of individual embodiments can be combined with each other. The individual exemplary embodiments should not be understood as an exhaustive description of one of the respective pump systems, but can be supplemented by features of other embodiments.

Although the present invention has been explained and exemplified with reference to the specific exemplary embodiments of the present invention, the present invention is not intended to be limited to these exemplary embodiments. Those who are familiar with the technology will realize that changes and modifications can be made without departing from the true scope of the present invention defined by the scope of the following patent applications. Therefore, the present invention is intended to be included within the scope of the attached application and its equivalents All changes and modifications within the scope of content.

12‧‧‧Vacuum pump

14‧‧‧Entrance

16‧‧‧Exit

18‧‧‧Cooling element

20‧‧‧Coolant supply pipe

22‧‧‧Coolant discharge pipe

24‧‧‧Heat exchanger

28‧‧‧Coolant inlet

30‧‧‧Coolant outlet

36‧‧‧Pump system

38‧‧‧Regulating valve

Claims (3)

A pump system comprising: a vacuum pump (12); a cooling element (18) connected to the vacuum pump (12) and having a coolant supply pipe (20) and a coolant discharge pipe (22) , Used to cool the vacuum pump (12) by absorbing and discharging heat with the aid of a coolant, wherein the coolant supply pipe (20) and the coolant discharge pipe (22) and a heat exchanger ( 24) Connected so that heat is transferred from the coolant discharge pipe (22) to the coolant supply pipe (20), the heat exchanger (24) is connected to a coolant inlet (28) and a coolant outlet (30) ) Connection; and a single cooling circuit, starting with the coolant inlet (28) and extending through the heat exchanger (24) to the cooling element (18) and back to the heat exchanger (24), and extending To the coolant outlet (30), so that the heat discharged from the vacuum pump (12) by means of the coolant is transferred to the coolant supply pipe (20) via the heat exchanger (24) The coolant. The pump system according to claim 1, wherein a regulating valve (32) is arranged in the coolant supply pipe (20) and/or between the coolant inlet (28) and the heat exchanger (24) , 38) to adjust the flow rate of the coolant. The pump system according to claim 1, wherein a flushing gas feed pipe (60) connected to the vacuum pump (12) is provided for providing a flushing gas for the suction process, wherein the flushing gas is used for the flushing The flushing gas feed pipe (60) for gas preheating is connected to the heat exchanger (24) and/or the coolant discharge pipe (22) so that the coolant is discharged from the vacuum pump (12) by means of the coolant The heat is transferred to the flushing gas.

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