JP2018520304A - Pump system - Google Patents

Abstract

The invention relates to a pump system comprising a vacuum pump (12) and a cooling element (18) connected to the vacuum pump (12). A cooling medium supply pipe (20) and a cooling medium discharge pipe (22) are connected to the cooling element (18) for cooling the vacuum pump by receiving and releasing heat using the cooling medium. The cooling medium supply pipe (20) and the cooling medium discharge pipe (22) are connected to the heat exchanger (24), and heat is transferred from the cooling medium discharge pipe (22) to the cooling medium supply pipe (20).

Description

  The present invention relates to a pump system for delivering gas / steam, in particular near the condensation and / or deposition point.

  In some coating processes (for example in the semiconductor industry or during the production of flat screens) gas / near the condensation point (transition from the gas state to the liquid state) and / or the precipitation point (transition to the solid state). Carry steam. Particularly in the second case, the resulting solid matter collects in the form of dust or deposits in the vacuum pump and hinders the movement of the vacuum pump, which is problematic for the vacuum pump. This is especially true on the discharge side of the vacuum pump because the pressure is higher on the discharge side of the vacuum pump and the vapor is closer to the condensation / deposition point.

  One way to avoid this problem is to use additional gas (eg, gas ballast, purge gas) to dilute the steam and keep the steam partial pressure low enough. However, this solution is not useful because some applications require excessive auxiliary gas. In such cases, it is desirable to raise the temperature of the vacuum pump in order to carry the conveyed material in the form of gas or vapor through the vacuum pump. Since the pressure is higher, the temperature on the discharge side of the discharge pipe of the vacuum pump becomes a problem.

  In the prior art, an adjustment system for controlling the cooling water is used for the adjustment. Such a system sets and / or adjusts the flow of cooling water such that the temperature at the reference position of the vacuum pump (typically on the discharge side) is maintained at a predetermined temperature.

  This solution is disadvantageous because in some cases only a small amount of cooling water is supplied to the vacuum pump and / or temporarily no cooling water is supplied. Depending on the type of vacuum pump, this solution may result in inadequate cooling of temperature sensitive components such as motors, bearings or electronic components.

  Since it is also necessary to maintain the discharge pipe of the vacuum pump at a high temperature level, this discharge pipe is usually further separated and heated (for example, by an electrically driven heating sleeve). For this reason, the energy efficiency of a vacuum pump falls and cost becomes higher.

  Another problem encountered with such processes is the use of a purge gas that may be supplied to a vacuum pump and cause local cooling of the process gas at the supply location. This can lead to undesirable condensation and / or precipitation.

  The present invention effectively prevents condensation and / or precipitation while the pump system is operating reliably and efficiently, in particular for delivering gas / steam near the condensation and / or precipitation point. The purpose is to provide.

  This object is achieved by a pump system according to claims 1, 7 and 13 and a method according to claims 20, 22 and 23.

The pump system according to the present invention includes a vacuum pump. The pump system includes at least one vacuum pump so that a pump system including a plurality of vacuum pumps connected to each other is included. The vacuum pump is in particular a dry compression pump. However, the invention described below is essentially independent of the pump type since it includes substantially all pump types. The vacuum pump of the pump system according to the present invention is a conventional vacuum pump that normally comprises a suction chamber in which a movable pump element is arranged to carry the medium from the inlet to the outlet. The movable pump element is, for example, a rotating rotor or piston. In particular, the rotor is arranged with at least one pump element for carrying the medium. In the pump system according to the invention described here, screw pumps, claw pumps, roots pumps, piston pumps, etc. can be used. Furthermore, the pump system according to the present invention includes, in addition to a positive displacement pump, a kinetic pump system including a hybrid form of a side channel blower, and molecular pump stages such as a Holbeck stage, a Siegburn stage, a Gede pump and a turbo molecular pump. May be included. In particular, the pump system is particularly suitable for generating a vacuum of 10 ⁻² mbar, preferably 10 ⁻³ mbar, particularly preferably 10 ⁻⁶ mbar.

  Furthermore, the pump system according to the invention comprises a cooling element connected to the vacuum pump for cooling. The cooling element is in particular connected to the housing of the vacuum pump that defines the suction chamber of the vacuum pump. The cooling element has a cooling medium supply pipe and a cooling medium discharge pipe. Through the cooling medium supply pipe, the cooling medium is supplied to the cooling element to absorb the heat of the vacuum pump. The heated cooling medium flows out of the cooling element via the cooling medium discharge pipe. Thus, the cooling element cools the vacuum pump by absorbing and releasing heat by the cooling medium.

  According to the present invention, the heat exchanger supplies the cooling medium such that the heat absorbed by the cooling medium is transferred from the cooling medium discharge pipe to the cooling medium supply pipe and / or the cooling medium supplied to the cooling medium supply pipe. It is connected to the pipe and the cooling medium discharge pipe.

  Therefore, the vacuum pump is adjusted with preheated cooling water. A sufficient amount of preheated cooling water can flow continuously through the vacuum pump. Therefore, the supply of cooling water is not interrupted so that sufficient cooling of sensitive parts is always ensured, and thus a uniform heat distribution in the pump is achieved. Thus, adjustment with preheated cooling water prevents the pump locations from becoming too hot. In addition, there is no need to utilize sufficiently hot cooling water that must be consumed and heated. The cooling water is preheated through the heat exchanger by the heat of the vacuum pump released by the cooling medium.

  In particular, the heat exchanger is connected to a cooling medium inlet and a cooling medium outlet. The cooling medium is supplied to the pump system via the cooling medium inlet, and the cooling medium flows out of the pump system via the cooling medium outlet. An untreated and unconditioned cooling medium can be supplied to the pump system through the cooling medium inlet. No pretreatment of the cooling medium, in particular preheating, is necessary. Therefore, no further construction-related means are required at the pump operating location, which makes it easier to reduce costs and configure a compact pump system.

  In particular, the cooling medium is water and preferably chemical additives can be added to the water to adapt the individual characteristics of the cooling medium to the requirements of the pump system. Alternatively, the cooling medium is oil or another synthetic liquid.

  In particular, the pump system comprises a first cooling circuit for a first cooling medium flowing from the heat exchanger and returning to the heat exchanger via the cooling element, and a cooling medium outlet from the cooling medium inlet via the heat exchanger. And a second cooling circuit for the second cooling medium flowing in the. Therefore, the heat generated by the vacuum pump is released by the first cooling medium via the first cooling circuit and is transmitted to the second cooling circuit by the second cooling medium via the heat exchanger. Thereafter, the second cooling medium flows out of the pump system via the cooling medium outlet. In a heat exchanger, not all heat is transferred from the first cooling medium to the second cooling medium, but only a portion of the heat is transferred so that the remaining heat remains in the first cooling medium. A preheated cooling medium is available for the vacuum pump. Preferably, the first cooling medium and the second cooling medium are used such that, for example, oil is used as the first cooling medium in the first cooling circuit and water is used as the second cooling medium in the second cooling circuit. The cooling media may be different from each other.

  Alternatively, in a particularly preferred embodiment, the pump system comprises in particular one cooling circuit that flows from the cooling medium inlet through the heat exchanger to the cooling element and back to the heat exchanger and the cooling medium outlet. The heat released by the cooling medium from the vacuum pump is transferred via the heat exchanger to the cooling medium in the cooling medium inlet that flows to the vacuum pump, so that the preheated cooling medium becomes available in the vacuum pump. Therefore, in particular, the cooling medium flowing through the pump system is constantly exchanged.

  In particular, a regulating valve is arranged in the cooling medium supply pipe and / or between the cooling medium inlet and the heat exchanger and is configured to adjust the flow rate of the cooling medium. In particular, if two cooling circuits are provided, part of the heat released through the second cooling circuit can be regulated by a regulating valve arranged between the cooling medium inlet and the heat exchanger. . Preferably, the regulating valve is controlled by temperature measurement, and during the temperature measurement, preferably the temperature of the housing of the vacuum pump and / or the temperature of the cooling medium in the cooling medium supply pipe just before the cooling medium flows into the vacuum pump. Measured.

  In particular, the vacuum pump includes a purge gas supply pipe for supplying a purge gas for the delivery process. The purge gas supply pipe is connected to the heat exchanger and / or the cooling medium discharge pipe to preheat the purge gas so that heat released from the vacuum pump by the cooling medium is transferred to the purge gas. Therefore, the purge gas is preheated before it is introduced into the vacuum pump so that the process gas is not locally cooled and can cause condensation or precipitation of the process gas. The heat generated by the vacuum pump can be transferred to the purge gas so that no additional equipment for preheating the purge gas is needed, and the existing heat generated by the vacuum pump can be used efficiently to preheat the purge gas.

A second independent invention relates to a pump system comprising a vacuum pump having an inlet and an outlet. The pump system includes at least one vacuum pump so that a pump system including a plurality of vacuum pumps connected to each other is included. The vacuum pump is in particular a dry compression pump. However, the invention described below is essentially independent of the pump type since it includes substantially all pump types. The vacuum pump of the pump system according to the present invention is a conventional vacuum pump that normally comprises a suction chamber in which a movable pump element is arranged to carry the medium from the inlet to the outlet. The movable pump element is, for example, a rotating rotor or piston. In particular, the rotor is arranged with at least one pump element for carrying the medium. In the pump system according to the invention described here, screw pumps, claw pumps, roots pumps, piston pumps, etc. can be used. Furthermore, the pump system according to the present invention includes, in addition to a positive displacement pump, a kinetic pump system including a hybrid form of a side channel blower, and molecular pump stages such as a Holbeck stage, a Siegburn stage, a Gede pump and a turbo molecular pump. May be included. In particular, the pump system is particularly suitable for generating a vacuum of 10 ⁻² mbar, preferably 10 ⁻³ mbar, particularly preferably 10 ⁻⁶ mbar.

  In accordance with the present invention, the pump system includes a purge gas supply pipe connected to a vacuum pump to supply purge gas for delivery processing.

  According to the present invention, the outlet is connected to an outlet heating unit for heating the outlet. The purge gas supply pipe is connected to the outlet heating unit so that the heat generated by the outlet heating unit is transferred to the purge gas. Thus, preheated purge gas is supplied to the pump system by using the outlet heater so that no additional heating elements are required. Therefore, the heat generated by the outlet heating section is efficiently used to preheat the purge gas. Alternatively, the outlet is connected to a discharge pipe having a discharge pipe heating unit for heating the exhaust pipe. Here, the purge gas supply pipe is connected to the discharge pipe heating section so that the heat generated by the discharge pipe heating section is transmitted to the purge gas. Again, the heat already generated is utilized to preheat the purge gas so that the pump system is efficiently configured. In particular, only one heating part is provided as a structurally simple means, and the purge gas is at least indirectly heated by this heating part.

  In particular, both an outlet heating part and a discharge pipe heating part are provided, particularly preferably configured as a common outlet / discharge pipe heating element. Therefore, only one heating element is provided, heating the outlet and the discharge pipe simultaneously. The outlet / exhaust pipe heating element preheats purge gas for delivery processing via a purge gas supply pipe connected to the outlet / exhaust pipe heating element.

  In particular, the purge gas supply pipe spirally surrounds the outlet and / or the discharge pipe. Thus, efficient heat transfer from the outlet heating section and / or the discharge pipe heating section and / or the outlet / discharge pipe heating element is ensured.

  In particular, the purge gas supply pipe is partially surrounded by an outlet heating part and / or a discharge pipe heating part and preferably an outlet / exhaust pipe heating element. This arrangement ensures efficient heat transfer. In addition, the heating part and / or the heating element may be surrounded by an insulator so that as little heat as possible is dissipated to the environment.

  In particular, the cooling element is connected to a vacuum pump, the cooling element having a cooling medium supply pipe and a cooling medium discharge pipe for cooling the vacuum pump by absorption and release of heat by the cooling medium. The cooling medium supply pipe and the cooling medium discharge pipe are connected to the heat exchanger.

  In particular, the pump system is constituted by the features of the first invention.

A third independent invention relates to a pump system including a vacuum pump. The pump system includes at least one vacuum pump so that a pump system including a plurality of vacuum pumps connected to each other is included. The vacuum pump is in particular a dry compression pump. However, the invention described below is essentially independent of the pump type since it includes substantially all pump types. The vacuum pump of the pump system according to the present invention is a conventional vacuum pump that normally comprises a suction chamber in which a movable pump element is arranged to carry the medium from the inlet to the outlet. The movable pump element is, for example, a rotating rotor or piston. In particular, the rotor is arranged with at least one pump element that carries the medium. In the pump system according to the invention described here, screw pumps, claw pumps, roots pumps, piston pumps, etc. can be used. Furthermore, the pump system according to the present invention includes, in addition to a positive displacement pump, a kinetic pump system including a hybrid form of a side channel blower, and molecular pump stages such as a Holbeck stage, a Siegburn stage, a Gede pump and a turbo molecular pump. May be included. In particular, the pump system is particularly suitable for generating a vacuum of 10 ⁻² mbar, preferably 10 ⁻³ mbar, particularly preferably 10 ⁻⁶ mbar.

  According to the invention, the vacuum pump is connected to a cooling element, the cooling element comprising a cooling medium supply pipe and a cooling medium discharge pipe for cooling the vacuum pump by absorption and release of heat by the cooling medium. Yes.

  According to the invention, the cooling medium supply pipe has a heating element for preheating the cooling medium. Therefore, the vacuum pump is preheated so that sufficient cooling of the temperature sensing component is always ensured even when the pump temperature is higher, so that damage to the temperature sensing component can be prevented. The heat distribution inside is made uniform.

  In particular, the cooling medium supply pipe and the cooling medium discharge pipe are connected to a heat exchanger. Therefore, the heat of the cooling medium discharge pipe is transmitted to the cooling medium supply pipe. Note that the transfer of heat from the cooling medium discharge pipe to the cooling medium supply pipe is performed only when the vacuum pump reaches a certain operating temperature. Thus, in particular, the heating element according to the invention ensures that sufficiently preheated cooling water is supplied to the vacuum pump during the start-up phase of the vacuum pump. When sufficient heat is transferred from the cooling medium discharge pipe via the heat exchanger to the cooling medium supply pipe, the heating element can be switched off.

  In particular, the pump system is constituted by the features of the first invention.

  In particular, the vacuum pump has an inlet and an outlet. Further, the vacuum pump is connected to a purge gas supply pipe for supplying a purge gas for the delivery process. The outlet is connected to an outlet heating section for heating the outlet, and the purge gas supply pipe is connected to the outlet heating section so that heat generated by the outlet heating section is transferred to the purge gas, so that the purge gas is evacuated. Preheated before being introduced into the pump. Alternatively, the outlet is connected to a discharge pipe, and the discharge pipe is connected to a discharge pipe heating unit for heating the discharge pipe. Here, the purge gas supply pipe is connected to the discharge pipe heating section so that the heat generated by the discharge pipe is transferred to the purge gas. Again, the generated heat is efficiently utilized by preheating the purge gas. The preheated purge gas ensures that there is no local cooling of the process gas that causes condensation or sublimation in the vacuum pump.

  In particular, the pump system is constituted by the features of the second invention.

  In particular, the heating element is arranged downstream of the heat exchanger.

  In particular, the heating element is an electrical heating element. For this reason, a simple configuration is guaranteed. Alternatively or additionally, the heating element is an outlet heating section, a discharge pipe heating section and / or an outlet / discharge pipe heating element. Thus, the heat generated by the outlet heating section and / or the exhaust pipe heating section and / or the outlet / exhaust pipe heating element is used to preheat the cooling medium so that the generated heat can be utilized efficiently.

  In particular, the features of the individual inventions are free from each other so that an efficient pumping system is realized which ensures that no condensation or precipitation occurs during the delivery of gas and vapor near the condensation point and / or the precipitation point. Can be combined. Thus, reliable operation of the pump system is always ensured and, in turn, it is ensured that the condensation or deposition of the process gas does not disturb or prevent the movement of the vacuum pump.

  A fourth independent invention relates to a method for preheating a cooling medium for a vacuum pump. In the method according to the invention, at least part of the heat absorbed by the cooling medium as it passes through the vacuum pump is transferred to the cooling medium supplied to the vacuum pump. Thus, the cooling medium does not release the entire absorbed heat, but uses a portion of the absorbed heat to preheat the supplied cooling medium.

  In particular, the method is carried out using the pump system according to the first invention.

  In particular, the cooling medium is preheated by a heating element before it passes through the vacuum pump to cool the vacuum pump.

  In particular, the heating element is switched on when the vacuum pump does not generate enough heat, such as during startup or shutdown of the vacuum pump. In such a situation, a sufficient amount of heat that is absorbed by the cooling medium as it passes through the vacuum pump is supplied to sufficiently preheat the cooling medium before it passes through the vacuum pump. Cannot be transmitted to the cooling medium. When the heat released from the vacuum pump is sufficient to preheat the supplied cooling medium, it is preferable to switch off the heating element.

  In particular, the method is carried out using a pump system according to the third invention.

  A fifth independent invention relates to a method of preheating a cooling medium for a vacuum pump, wherein the cooling medium is preheated by a heating element before the cooling medium passes through the vacuum pump.

  In particular, the method is carried out using a pump system according to the third invention.

  A sixth independent invention relates to a method of preheating a purge gas for a vacuum pump, wherein the purge gas is preheated by heat generated by the vacuum pump and / or heat generated by a heating element.

  In particular, the method is carried out using a pump system according to the second invention.

  In particular, heat generated by the vacuum pump is transferred to the purge gas by the cooling medium.

  In particular, the heating element heats the outlet and / or the discharge pipe connected to the outlet. Such heating is performed by the same heating element that further preheats the purge gas so that the heat generated by the heating element is efficiently utilized.

  In particular, the features of the methods of the fourth to sixth inventions can be freely combined so as to realize an effective method of guaranteeing reliable operation and effectively preventing the condensation and precipitation of the processing gas. it can.

  Preferred embodiments of the present invention will be described in detail below with reference to the drawings.

It is a figure showing a 1st embodiment of a pump system provided with a heat exchanger. It is a figure which shows 2nd Embodiment of the pump system provided with the heat exchanger. It is a figure which shows 3rd Embodiment of the pump system provided with the heat exchanger. FIG. 6 shows a fourth embodiment of a pump system comprising a heat exchanger and a heating element. FIG. 7 shows a fifth embodiment of a pump system comprising a heat exchanger and a heating element. It is a figure which shows 6th Embodiment of the pump system provided with the purge gas preheating part. It is detail drawing which shows a purge gas preheating part. FIG. 9 shows a seventh embodiment of a pump system with two heating elements. It is a figure which shows 8th Embodiment of the pump system provided with the purge gas preheating part and the heat exchanger. It is a figure which shows 9th Embodiment of the pump system provided with the purge gas preheating part and the heat exchanger.

  In accordance with the present invention, the pump system 10 includes at least one vacuum pump 12 having an inlet 14 and an outlet 16. Additional vacuum pumps may be connected to the inlet 14 and / or the outlet 16.

  The vacuum pump 12 is connected to a cooling element 18, and the cooling element 18 is fluidly connected to a cooling medium supply pipe 20 and a cooling medium discharge pipe 22. A cooling medium is supplied to the cooling element 18 via the cooling medium supply pipe 20, where the cooling medium absorbs heat generated by the vacuum pump 12 and then from the vacuum pump 12 via the cooling medium discharge pipe 22. Released.

  The cooling medium supply pipe 20 and the cooling medium discharge pipe 22 are connected to the heat exchanger 24. The cooling medium supply pipe 20 and the cooling medium discharge pipe 22 constitute a first cooling circuit 26. A cooling medium inlet 28 and a cooling medium outlet 30 are connected to the heat exchanger 24. The cooling medium inlet 28 and the cooling medium outlet 30 constitute a second cooling circuit 27, and the second cooling circuit 27 is merely connected to the first cooling circuit 26 via the heat exchanger 24. Yes, and not fluidly connected to the first cooling circuit 26. The heat of the vacuum pump 12 absorbed by the first cooling circuit 26 is transferred to the second cooling circuit 27 via the heat exchanger 24. The heat exchanger 24 absorbs this heat through the cooling medium flowing in through the cooling medium inlet 28 and the cooling medium is pumped through the cooling medium outlet 30 so that the absorbed heat is effectively released. Escape from the system.

  A regulating valve 32 is provided at the cooling medium inlet 28, and the regulating valve 32 adjusts the flow rate of the cooling medium passing through the second cooling circuit 27, thereby releasing heat released through the second cooling circuit 27. Adjust further. Accordingly, the heat remaining in the first cooling circuit 26 can be adjusted by the regulating valve 32 so that the preheated cooling medium is supplied to the cooling element 18 via the cooling medium supply pipe 20. Preferably, the regulating valve 32 is controllable as a function of the temperature of the cooling element 18, for this purpose a temperature measuring sensor 34 is arranged in the region of the cooling element 18. Other locations for the temperature measuring sensor include, for example, the coolant supply pipe 20 and the housing of the vacuum pump 12.

  Needless to say, a further regulating valve may be provided to accurately control the cooling of the vacuum pump. For the sake of simplicity and better understanding, such regulating valves have been omitted. Therefore, a regulating valve may be further provided in the first cooling circuit 26, for example.

  Hereinafter, similar or identical elements are denoted by the same reference numerals.

  In the second embodiment shown in FIG. 2, the pump system 36 comprises only one cooling circuit. The cooling medium is supplied from the cooling medium inlet 28 to the heat exchanger 24, and is supplied from the heat exchanger 24 to the cooling element 18 connected to the vacuum pump 12 via the cooling medium supply pipe. The cooling medium absorbs heat generated by the vacuum pump 12 via the cooling element 18 and returns to the heat exchanger 24 via the cooling medium discharge pipe 22. In the heat exchanger 24, the heat of the vacuum pump 12 absorbed by the cooling medium in the cooling element 18 is at least partially transferred to the cooling medium in the cooling medium supply pipe 20 that flows to the vacuum pump 12. The cooling medium flows out of the pump system from the heat exchanger 24 via the cooling medium outlet 30. When the temperature of the cooling medium at the cooling medium inlet is, for example, 20 °, the cooling medium is heated to, for example, 45 ° by the heat exchanger 24 and then supplied to the cooling element 18 via the cooling medium supply pipe 20. In the cooling element 18, the cooling medium absorbs heat generated by the vacuum pump 12, so that the cooling medium is heated to, for example, 60 °. After transferring this absorbed heat to the inflowing cooling medium in the heat exchanger, the heat contained in the cooling medium is lowered so that the temperature of the cooling medium is only 45 °, for example 45 ° cooling. The medium exits the pump system 36 via the cooling medium outlet 30.

  The pump system 36 is provided with a regulating valve 38 in the cooling medium supply pipe 20, and the regulating valve 38 is controlled as a function of the temperature of the cooling medium, for example at the position of the regulating valve 38, so Adjust the flow rate of the cooling medium.

  The pump system 40 shown in FIG. 3 includes a heating element 42 in the coolant supply pipe 20 in addition to the regulator valve 38 described above, which is further connected to the coolant inlet 28. ing. The cooling medium flowing in via the cooling medium inlet 28 is preheated by the heating element 42 and supplied to the cooling element 18 through the cooling medium supply pipe 20. In the pump system 40, the cooling medium discharge pipe 22 is directly connected to the cooling medium outlet 30 so that the cooling medium is supplied directly from the cooling element 18 to the cooling medium outlet 30.

  In the pump system 44 shown in FIG. 4, the heating element 42 is arranged in the first cooling circuit 26, which is connected to the second cooling circuit 27 via the heat exchanger 24. Has been. Thus, when the temperature of the cooling medium in the first cooling circuit 26 decreases, the temperature is raised by the heating element 42 so that a sufficiently preheated cooling medium is always supplied to the cooling element 18. With the second cooling circuit 27, the cooling medium in the first cooling circuit 26 can be cooled by the heat exchanger 24.

  The pump system 48 of FIG. 5 includes only one pump circuit, and in addition to the cooling medium supply pipe 20 and the cooling medium discharge pipe 22, a heat exchanger 24 is provided. Further, an outlet heating unit 50 is provided at the outlet 16 of the vacuum pump 12, and the outlet heating unit 50 brings the outlet 16 of the vacuum pump 12 to an appropriate temperature so that condensation and sublimation are prevented in the region of the outlet 16. maintain.

  The cooling medium can be supplied from the cooling medium inlet 28 to the cooling medium supply pipe 20 via the outlet heating part 50 via an additional pipe 52 in which the valve 54 is arranged. Another valve 56 is arranged in the cooling medium supply pipe 20. If the temperature of the cooling medium is too low and the heat generated by the vacuum pump 12 is not sufficient to sufficiently preheat the cooling medium by the heat exchanger 24, the cooling medium can be preheated by the outlet heating section 50; For this purpose, valve 54 is at least partially open while valve 56 is at least partially closed. Accordingly, the outlet heating unit 50 is used for both heating the outlet 16 of the vacuum pump 12 and preheating the cooling medium.

  The pump system 58 shown in FIG. 6 includes a purge gas supply pipe 60, and the purge gas is supplied from the purge gas inlet 62 of the vacuum pump 12 through the purge gas supply pipe 60.

  In addition, the pump system 58 includes an outlet heating unit 50. The purge gas supply pipe 60 is connected to the outlet heating unit 50 so that the heat of the outlet heating unit 50 is transmitted to the purge gas to sufficiently preheat the purge gas.

  The purge gas supply pipe 60 is helically arranged around the outlet 16 as shown in FIG. 7 to achieve the most efficient heat transfer from the outlet heating section to the purge gas supply pipe.

  Alternatively or additionally, the outlet heating section 50 may be a heating element for heating the discharge pipe connected to the outlet 16 of the vacuum pump 12. Furthermore, the outlet 16 and the discharge pipe may have a common heating element that heats the outlet 16 and the discharge pipe simultaneously.

  The pump system 64 of FIG. 8 comprises a cooling element 18 that is connected to a cooling medium inlet 28 via a cooling medium supply pipe 20 and further connected to a cooling medium outlet 30. Connected to the tube 22. The cooling medium supply pipe 20 is provided with a heating element 42 for preheating the cooling medium, so that the cooling medium cools the vacuum pump 12 via the cooling element 18. The pump further includes a purge gas supply pipe 60 connected to the outlet heating unit 50. The purge gas supply pipe 60 is connected to the heating element 42 via another pipe 66. Accordingly, the purge gas entering the pump system via the purge gas inlet 62 is first preheated by a heating element 42 that further functions to preheat the cooling medium. Subsequently, the purge gas is finally preheated by the outlet heating unit 50, and then the purge gas is supplied to the vacuum pump 12. Therefore, the heat of both the heating element for the cooling medium and the outlet heating unit 50 is used to preheat the purge gas. Since the temperature of the outlet heating part 50 is usually higher than the temperature of the heating element 42 for preheating the cooling medium, the purge gas is preferably supplied first via the heating element 42 and then supplied via the outlet heating part 50 To do.

  The pump system 68 shown in FIG. 9 includes a first cooling circuit 26 and a second cooling circuit 27, and the first cooling circuit 26 and the second cooling circuit 27 are connected via the heat exchanger 24. Are connected to each other. Further, the vacuum pump 12 of the pump system includes a purge gas supply pipe 60. The purge gas supply pipe 60 is connected to the cooling medium discharge pipe 22 of the first cooling circuit 26, and particularly surrounds the cooling medium discharge pipe 22 in a spiral shape. Therefore, the purge gas flowing in via the purge gas inlet 62 absorbs the heat transferred by the vacuum pump 12 into the cooling medium flowing through the cooling medium discharge pipe 22 via the cooling element 18. Therefore, the purge gas is sufficiently preheated and supplied to the vacuum pump 12 via the purge gas supply pipe 60. In particular, the purge gas supply pipe 60 surrounds the cooling medium discharge pipe 22 in a spiral shape.

  The pump system 70 of FIG. 10 includes a cooling circuit, in which the cooling medium supply pipe 20 and the cooling medium discharge pipe 22 are connected to the cooling medium inlet 28 and the cooling medium outlet 30 via the heat exchanger 24. ing. Further, the vacuum pump 12 of the pump system 70 includes a purge gas supply pipe 60. The purge gas supply pipe 60 is connected to the heat exchanger so that the heat from the cooling medium discharge pipe 22 is transmitted not only to the cooling medium supply pipe 20 but also to the purge gas supply pipe 60, so that the purge gas is sufficiently preheated. The

  It goes without saying that the features of the individual embodiments can be combined with each other if reasonable. Individual exemplary embodiments are not to be construed as a complete description of the respective pump system, but may be supplemented by features of other embodiments.

  Although the invention has been described and illustrated with reference to specific exemplary embodiments of the invention, it is not intended that the invention be limited to these exemplary embodiments. Those skilled in the art will recognize that changes and modifications can be made without departing from the true scope of the invention as defined by the following claims. Accordingly, all such modifications and adjustments are intended to be included within the scope of this invention as included in the appended claims and their equivalents.

Claims (31)

A pump system,
A vacuum pump (12),
A cooling element connected to the vacuum pump (12) and having a cooling medium supply pipe (20) and a cooling medium discharge pipe (22) for cooling the vacuum pump (12) by absorbing and releasing heat by the cooling medium. (18) and
The cooling medium supply pipe (20) and the cooling medium discharge pipe (22) are connected to a heat exchanger (24), and heat is supplied from the cooling medium discharge pipe (22) to the cooling medium supply pipe (20). Pump system characterized by being transmitted.   The pump system according to claim 1, wherein the heat exchanger (24) is connected to a cooling medium inlet (28) and a cooling medium outlet (30).   A first cooling circuit (26) for a first cooling medium flowing from the heat exchanger (24) and returning to the heat exchanger (24) via the cooling element (18); and the cooling medium inlet A second cooling circuit (27) for a second cooling medium flowing from (28) and flowing to the cooling medium outlet (30) through the heat exchanger (24), and the vacuum pump Heat released from the first cooling medium via the first cooling circuit (26) from (12) to the second cooling medium by the second cooling medium via the heat exchanger (24). 3. The pump system according to claim 2, wherein the pump system is transmitted to a circuit (27).   A cooling circuit that flows from the cooling medium inlet (28) through the heat exchanger (24) to the cooling element (18) and returns to the heat exchanger (24) and the cooling medium outlet (30); The heat released from the vacuum pump (12) by the cooling medium is transmitted to the cooling medium in the cooling medium supply pipe (20) via the heat exchanger (24). The pump system according to claim 2.   A regulating valve (32, 38) for adjusting the flow rate of the cooling medium is disposed in the cooling medium supply pipe (20) and / or between the cooling medium inlet (28) and the heat exchanger (24). The pump system according to any one of claims 1 to 4, wherein the pump system is provided.   A purge gas supply pipe (60) connected to the vacuum pump (12) for supplying a purge gas for a delivery process is provided, and the purge gas supply pipe (60) for preheating the purge gas is provided with the heat exchanger ( 24) and / or is connected to the cooling medium discharge pipe (22), and heat released from the vacuum pump (12) by the cooling medium is transferred to the purge gas. The pump system according to any one of the above. A pump system,
A vacuum pump (12) having an inlet (14) and an outlet (16);
A purge gas supply pipe (60) connected to the vacuum pump (12) to supply purge gas for delivery processing;
An outlet heating part (50) connected to the outlet to heat the outlet (16), or the discharge pipe connected to the outlet and a discharge pipe heating part for heating the discharge pipe; With
The purge gas supply pipe (60) is connected to the outlet heating section (50) or the discharge pipe heating section, and heat generated by the outlet heating section (50) or the discharge pipe heating section is transmitted to the purge gas. The pump system characterized by   8. Pump system according to claim 7, characterized in that both the outlet heating part (50) and the discharge pipe heating part are provided, in particular configured as a common outlet / discharge pipe heating element.   The pump system according to claim 7 or 8, wherein the purge gas supply pipe (60) spirally surrounds the outlet (16) and / or the discharge pipe.   10. The outlet heating part (50) and / or the exhaust pipe heating part, in particular the outlet / exhaust pipe heating element, at least partly surrounds the purge gas supply pipe (60). The pump system according to any one of the above. A cooling element connected to the vacuum pump (12) and having a cooling medium supply pipe (20) and a cooling medium discharge pipe (22) for cooling the vacuum pump (12) by absorbing and releasing heat by the cooling medium. (18)
The cooling medium supply pipe (20) and the cooling medium discharge pipe (22) are connected to a heat exchanger (24), and heat is supplied from the cooling medium discharge pipe (22) to the cooling medium supply pipe (20). The pump system according to claim 7, wherein the pump system is transmitted.   12. A pump system according to claim 11 having the features of claims 2-6. A pump system,
A vacuum pump (12),
A cooling element connected to the vacuum pump (12) and having a cooling medium supply pipe (20) and a cooling medium discharge pipe (22) for cooling the vacuum pump (12) by absorbing and releasing heat by the cooling medium. (18) and
A pump system comprising: a heating element (42, 50) disposed in the cooling medium supply pipe (20) for preheating the cooling medium.   The pump system according to claim 13, wherein the cooling medium supply pipe (20) and the cooling medium discharge pipe (22) are connected to a heat exchanger (24).   15. A pump system according to claim 14 having the features of claims 2-6. Inlet (14) and outlet (16) of the vacuum pump (12), a purge gas supply pipe (60) connected to the vacuum pump (12) to supply a purge gas for delivery processing, the outlet (16) The outlet pipe connected to the outlet (16) for heating the outlet pipe or the outlet pipe connected to the outlet (16) for heating the outlet pipe. With
The purge gas supply pipe (60) is connected to the outlet heating section (50) or the discharge pipe heating section, and heat generated by the outlet heating section (50) or the discharge pipe heating section is transmitted to the purge gas. The pump system according to any one of claims 13 to 15.   17. A pump system according to claim 16 having the features of claims 8-12.   18. A pump system according to any one of claims 14 to 17, characterized in that the heating element (42) is arranged downstream of the heat exchanger.   19. The heating element according to claim 13, wherein the heating element is an electrical heating element (42), the outlet heating part (50), the discharge pipe heating part and / or the outlet / discharge pipe heating part. The pump system according to claim 1. A method of preheating a cooling medium for a vacuum pump (12), comprising:
A method of transferring a part of heat absorbed by the cooling medium when the cooling medium passes through the vacuum pump (12) to the cooling medium supplied to the vacuum pump (12).   21. The method according to claim 20, wherein the pump system according to any one of claims 1 to 6 is used.   A method according to claim 20 or 21, characterized in that the cooling medium is preheated by a heating element (42, 50) before it passes through the vacuum pump (12).   The method according to any one of claims 20 to 22, characterized in that the pump system according to any one of claims 13 to 19 is used.   While the vacuum pump (12) does not generate enough heat to preheat the cooling medium, the heating element (42, 50) is switched on and the heat released from the vacuum pump (12) is supplied. 24. A method as claimed in any one of claims 20 to 23, characterized in that the heating element (42, 50) is switched off when sufficient to preheat the cooling medium. A method of preheating a cooling medium for a vacuum pump (12), comprising:
A method, characterized in that the cooling medium is preheated by a heating element (42, 50) before the cooling medium passes through the vacuum pump (12).   26. A method according to claim 25, characterized in that the pump system according to any one of claims 13-19 is used.   When the vacuum pump (12) does not generate enough heat to preheat the cooling medium, the heating element (42, 50) is switched on and the heat released from the vacuum pump (12) is supplied. 27. Method according to claim 25 or 26, characterized in that the heating element (42, 50) is switched off when it is sufficient to preheat the cooling medium. A method of preheating purge gas for a vacuum pump (12), comprising:
Preheating the purge gas with heat generated by the vacuum pump (12) and / or heat generated by the heating element (42, 50).   29. The method according to claim 28, wherein the pump system according to any one of claims 7 to 12 is used.   30. A method according to claim 28 or 29, wherein the heat generated by the vacuum pump (12) is transferred to the purge gas by means of a cooling medium.   31. A heating element (42, 50) according to any one of claims 28 to 30, characterized in that the outlet (16) and / or the discharge pipe connected to the outlet (16) is heated. Method.

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