TWI693397B - Inspection management system, inspection management device and inspection management method - Google Patents

Inspection management system, inspection management device and inspection management method Download PDF

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TWI693397B
TWI693397B TW108111533A TW108111533A TWI693397B TW I693397 B TWI693397 B TW I693397B TW 108111533 A TW108111533 A TW 108111533A TW 108111533 A TW108111533 A TW 108111533A TW I693397 B TWI693397 B TW I693397B
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defect
image
inspection
inspection management
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TW201944059A (en
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植田清隆
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日商歐姆龍股份有限公司
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N21/3151Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths using two sources of radiation of different wavelengths
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/97Determining parameters from multiple pictures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765Method using an image detector and processing of image signal
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/20Special algorithmic details
    • G06T2207/20081Training; Learning
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/20Special algorithmic details
    • G06T2207/20084Artificial neural networks [ANN]
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30168Image quality inspection

Abstract

本發明提供一種檢查管理系統、檢查管理裝置以及檢查管理方法,在藉由多種不同方式而拍攝被檢查物,並按各拍攝方式分別檢測缺陷的片材狀物品的外觀檢查中,減少因各別地管理表示同一缺陷的多個缺陷圖像資料而導致的弊端。檢查管理系統用以檢查片材狀的被檢查物,所述檢查管理系統包括:外觀檢查部,包括藉由不同方式而拍攝所述被檢查物T的外觀的多個拍攝元件、以及基於藉由所述多個拍攝元件所拍攝的各個圖像來檢測所述被檢查物的缺陷的檢測元件;儲存部,針對所述多種不同方式的拍攝元件,分別記錄拍攝了藉由所述檢測元件所檢測出的缺陷的缺陷圖像資料;以及檢查管理部,包括同一缺陷圖像合併元件,所述同一缺陷圖像合併元件是將所述儲存部中所記錄的拍攝了所述被檢查物中的同一缺陷的多個缺陷圖像資料作為一個同一缺陷圖像組來處理。The present invention provides an inspection management system, an inspection management device, and an inspection management method. In the appearance inspection of a sheet-like article in which the object to be inspected is photographed in a variety of different ways and the defects are detected separately in accordance with each shooting method, the number of different To manage the defects caused by multiple defective image materials representing the same defect. The inspection management system is used to inspect the sheet-shaped object to be inspected. The inspection management system includes an appearance inspection unit including a plurality of imaging elements that image the appearance of the object to be inspected T in different ways, and based on A detection element that detects the defects of the object under inspection by each image captured by the plurality of imaging elements; the storage section records, for each of the imaging elements of the various modes, the images detected by the detection element Defect image data of the defect; and the inspection management unit, including the same defect image merging element, the same defect image merging element is the same as that recorded in the inspection object recorded in the storage unit Multiple defective image materials of a defect are treated as a same defective image group.

Description

檢查管理系統、檢查管理裝置以及檢查管理方法Inspection management system, inspection management device and inspection management method

本發明是有關於一種檢測片材狀的被檢查物的異常部位的技術,特別是有關於一種用以對檢測出的異常進行分析的技術。The present invention relates to a technique for detecting an abnormal part of a sheet-shaped object to be inspected, and particularly relates to a technique for analyzing a detected abnormality.

在用以製造或加工片材狀物品的生產線中,是使用利用圖像,來檢測片材中的異常(異物混入、污垢、褶皺等。以下亦稱為缺陷)的檢測裝置,所述圖像是藉由將可見光或紫外光照射至片材,利用相機拍攝其透過光或反射光而獲得(例如,專利文獻1、專利文獻2等)。In a production line for manufacturing or processing sheet-like articles, an image is used to detect an abnormality (mixing of foreign matter, dirt, wrinkles, etc. in the sheet) in the sheet, the image It is obtained by irradiating visible light or ultraviolet light onto a sheet, and photographing the transmitted light or reflected light with a camera (for example, Patent Literature 1, Patent Literature 2, etc.).

在此種裝置中,有的裝置是如表面反射像、背面反射像、透過圖像、可見光圖像、紅外光圖像等,利用不同的多種拍攝方法對被檢查物進行拍攝,利用各圖像來進行缺陷檢測(好壞判定),藉此,可使檢查的精度提高(減少缺陷的漏網)。In this type of device, some devices are such as a surface reflection image, a back reflection image, a transmission image, a visible light image, an infrared light image, etc., using a variety of different shooting methods to photograph the object to be inspected, using each image To conduct defect detection (good or bad judgment), which can improve the accuracy of the inspection (reducing the leakage of defects).

並且,不但利用如上所述的裝置,檢測產品的缺陷而去除次品,而且亦期待藉由按每個產生因素(以下亦稱為類別)對所述檢測出的缺陷進行分類,將各缺陷的產生頻率製作成資料,並進行分析,來用於掌握製造商品的質量狀況、提前發現製造製程的異常部位、預先維護等。Moreover, not only the above-mentioned device is used to detect defects of products to remove defective products, but it is also expected that by classifying the detected defects by each production factor (hereinafter also referred to as category), the defects of each defect The generated frequency is made into data and analyzed, which is used to grasp the quality status of the manufactured goods, find abnormal parts of the manufacturing process in advance, and maintain in advance.

如上所述,在有效利用按缺陷類別而分類的資料時,重要的是其產生數量、分類等準確,但當如上所述使用不同的多種拍攝方法(以下亦稱為檢查方式)時,亦有時會產生破壞所獲得的資料的準確性的弊端。As mentioned above, when effectively using the data classified by defect type, it is important that the number of production and classification are accurate, but when using a variety of different shooting methods (hereinafter also referred to as inspection methods) as described above, there are also It will cause the disadvantage of destroying the accuracy of the information obtained.

例如,即使欲求出每個缺陷類別的準確的缺陷數量,當使用多種檢查方式時,亦存在針對一個缺陷在多種檢查方式中分別檢測出缺陷的情況,因此當將各檢查方式中所獲得的缺陷數量加以簡單合計時,會產生其數量與產品上的本來的缺陷數量不一致之類的問題。For example, even if you want to find the exact number of defects for each defect type, when multiple inspection methods are used, there may be cases where a defect is detected in multiple inspection methods for a defect, so when the defects obtained in each inspection method are If the quantity is simply summed up, it will cause problems such as the quantity is inconsistent with the original defect quantity on the product.

與此相對,在專利文獻2中,已提出具備如下功能的檢查系統:對關於不同相機裝置所拍攝的同一缺陷的缺陷資訊進行比較,將基於按決定規則而決定的不同相機裝置之中的一個相機裝置所拍攝的圖像資料而提取的缺陷資訊決定為代表缺陷資訊,而加以顯示。但是,在此種方法中,好不容易由多個相機獲取到的代表缺陷資訊以外的缺陷圖像資料被丟棄,而無法有效利用。In contrast, Patent Document 2 has proposed an inspection system with a function of comparing defect information about the same defect captured by different camera devices, based on one of the different camera devices determined according to the decision rule The defect information extracted from the image data captured by the camera device is determined to represent the defect information and displayed. However, in this method, the defective image data other than the representative defect information acquired by multiple cameras is discarded and cannot be effectively used.

又,對缺陷的類別進行分類時,亦可利用將缺陷圖像作為教師資料而深入學習的人工智慧(artificial intelligence,AI),但當註冊教師資料時,亦有可能產生針對難以識別缺陷類別的缺陷圖像,與和實際的缺陷類別不同的缺陷的類別相關聯而進行註冊的人為錯誤。此外,此時,亦有可能產生針對本來應顯示同一缺陷的多個缺陷圖像資料,按每種檢查方式註冊不同的缺陷類別的情況。而且,藉由利用以如上所述的方式經註冊的錯誤的教師資料而學習的AI所分類的資料會在準確性上產生疑義。In addition, when classifying defect categories, artificial intelligence (AI) that uses defect images as teacher materials for in-depth learning can also be used. However, when registering teacher information, there may be a problem that is difficult to identify defect categories. The defect image is a human error that is registered in association with a defect type different from the actual defect type. In addition, at this time, it is also possible to register different defect types for each inspection method for multiple defect image data that should originally display the same defect. Moreover, the materials classified by the AI learned by using the wrong teacher data registered in the above-mentioned manner will cause doubts in accuracy.

又,按多種檢查方式分別獲取缺陷圖像,並將該些缺陷圖像各別地與缺陷類別相關聯而進行註冊的方法中,檢查方式的種類越多,教師資料註冊的工夫就越容易隨之增加,亦無效率。 [現有技術文獻] [專利文獻]In addition, in a method of acquiring defect images in various inspection methods and associating the defect images with defect types and registering them, the more types of inspection methods, the easier it is for teachers to register their teacher materials. The increase is also inefficient. [Prior Art Literature] [Patent Literature]

[專利文獻1]日本專利特開2015-172519號公報 [專利文獻2]日本專利第5305002號公報[Patent Document 1] Japanese Patent Laid-Open No. 2015-172519 [Patent Document 2] Japanese Patent No. 5305002

[發明所欲解決之課題] 本發明是鑒於如上所述的實際情況而完成的,其目的在於提供一種方法,在藉由多種不同方式而拍攝被檢查物,並按各拍攝方式分別檢測缺陷的片材狀物品的外觀檢查中,可減少因各別地管理表示同一缺陷的多個缺陷圖像資料而導致的弊端。 [解決課題之手段][Problems to be solved by the invention] The present invention has been completed in view of the actual situation as described above, and an object of the present invention is to provide a method for photographing an object to be inspected by a variety of different methods, and inspecting the appearance of a sheet-shaped article for defects by each imaging method , Can reduce the defects caused by separately managing multiple defective image data indicating the same defect. [Means to solve the problem]

為了解決所述問題,本發明的檢查管理系統是一種用以檢查片材狀的被檢查物的檢查管理系統,其包括:外觀檢查部,包括藉由不同方式而拍攝所述被檢查物的外觀的兩個以上的拍攝元件、以及基於藉由所述多個拍攝元件而拍攝的各個圖像來檢測所述被檢查物的缺陷的檢測元件;儲存部,針對所述多種不同方式的拍攝元件,分別記錄拍攝了藉由所述檢測元件所檢測出的缺陷的缺陷圖像資料;以及檢查管理部,包括同一缺陷圖像合併元件,所述同一缺陷圖像合併元件是將所述儲存部中所記錄的所述缺陷圖像資料的集合之中、拍攝了所述被檢查物中的同一缺陷的多個缺陷圖像資料作為一個同一缺陷圖像組(set)來進行處理。In order to solve the above problem, the inspection management system of the present invention is an inspection management system for inspecting a sheet-shaped object to be inspected, which includes: an appearance inspection unit, including photographing the appearance of the object to be inspected by different methods More than two imaging elements, and a detection element that detects the defect of the inspection object based on each image captured by the plurality of imaging elements; the storage section, for the imaging elements of the various modes, Separately record the defect image data of the defect detected by the detection element; and the inspection management part includes the same defect image merging element, the same defect image merging element Among the set of recorded defect image materials, a plurality of defect image materials that have captured the same defect in the inspection object are processed as a same defect image set.

此處,所謂「藉由不同方式而拍攝」,例如,既可為所拍攝的被檢查物的面不同的方式,亦可為所檢測的光的波長不同的方式,亦可為拍攝反射光的方式與拍攝透過光的方式不同。又,關於「拍攝了所述被檢查物中的同一缺陷」,如後所述,只要是在被檢查物中的缺陷的位置相同的情況下如此認定即可。再者,構成系統的各元件不必為分體,既可全部收納於一體化的框體中,亦可一部分形成為一體。Here, "shooting by different methods" may be, for example, a method in which the surface of the object to be photographed is different, a method in which the wavelength of the detected light is different, or a method for shooting reflected light The way is different from the way of shooting through light. In addition, as for "the same defect in the inspection object was photographed", as described later, it may be determined as long as the position of the defect in the inspection object is the same. Furthermore, each element constituting the system does not need to be a separate body, and all of them may be housed in an integrated frame, or a part of them may be integrated.

根據如上所述的結構,即使在藉由多種方式而拍攝被檢查物,針對被檢查物中的一個缺陷,記錄有拍攝方式不同的多個缺陷圖像資料的情況下,亦可將表示同一缺陷的多個資料作為一組而進行管理。藉此,可減少因各別地管理表示同一缺陷的多個缺陷圖像資料而導致的弊端。According to the configuration as described above, even if the object to be inspected is photographed by multiple methods, if a plurality of defective image materials with different photographing methods are recorded for one defect in the object to be inspected, the same defect can be expressed Manage multiple data as a group. With this, it is possible to reduce the disadvantages caused by separately managing a plurality of defective image data indicating the same defect.

又,所述檢查管理部亦可進而包括對所述同一缺陷圖像組的數量進行計數,並按每個規定的檢查單位,計算缺陷數量的缺陷計數元件。此處,「規定的檢查單位」亦可由使用者以任意的時機而設定及變更。若為如上所述的結構,則並非對針對同一缺陷而拍攝的多個缺陷圖像各別地進行計數,而是按被檢查物中的每個缺陷對缺陷數量進行計數,因此可算出準確的缺陷數量。Furthermore, the inspection management unit may further include a defect count element that counts the number of the same defective image group and calculates the number of defects for each predetermined inspection unit. Here, the "prescribed inspection unit" may be set and changed by the user at any timing. With the above-mentioned structure, instead of separately counting the plurality of defect images taken for the same defect, the number of defects is counted for each defect in the inspection object, so it is possible to calculate an accurate Number of defects.

此外,亦可為所述檢查管理系統進而包括輸出部,所述檢查管理部進而包括在所述算出的缺陷數量超過規定值時,經由所述輸出部通知所述情況的缺陷數量警告元件。藉由採用如上所述的結構,在缺陷數量超過規定值時,使用者可容易地獲知所述情況,因此可有效率地進行檢查管理。In addition, the inspection management system may further include an output unit, and the inspection management unit may further include a defect number warning element that notifies the situation via the output unit when the calculated number of defects exceeds a predetermined value. By adopting the structure as described above, when the number of defects exceeds a predetermined value, the user can easily know the situation, so inspection management can be performed efficiently.

再者,輸出部只要是以使用者可覺察的方法進行通知的構件即可,例如,既可為液晶顯示器等顯示裝置,亦可為揚聲器(speaker)等語音輸出裝置,亦可為印刷裝置。又,亦可為併用該些裝置而進行通知的構件。In addition, the output unit may be a member that notifies the user in a perceptible manner, for example, it may be a display device such as a liquid crystal display, a voice output device such as a speaker, or a printing device. In addition, these devices may be used in combination for notification.

又,所述檢查管理部亦可進而包括針對每個所述同一缺陷圖像組,對所述缺陷的類別進行分類的缺陷類別分類元件。若為此種結構,則可防止針對本來應該表示同一缺陷的多個缺陷圖像資料,按多個不同的拍攝元件分類成不同的缺陷類別的情況。Furthermore, the inspection management unit may further include a defect type classification element that classifies the type of the defect for each of the same defect image groups. With such a structure, it is possible to prevent a plurality of different image elements that should originally represent the same defect from being classified into different defect categories according to a plurality of different imaging elements.

又,所述檢查管理部亦可進而包括針對藉由所述缺陷類別分類元件而分類的每個缺陷類別對所述同一缺陷圖像組的數量進行計數,並按每個規定的檢查單位,計算每個缺陷類別的缺陷數量的缺陷類別計數元件。若為此種結構,可針對每個缺陷類別,求出準確的缺陷數量。Furthermore, the inspection management unit may further include counting the number of the same defect image group for each defect category classified by the defect category classification element, and calculating for each predetermined inspection unit The defect category counts the number of defects per defect category. If this structure is used, the exact number of defects can be determined for each defect type.

又,亦可為所述檢查管理系統包括輸出部,所述檢查管理部進而包括當所述算出的每個缺陷類別的缺陷數量超過針對每個所述缺陷類別而確定的規定值時,經由所述輸出部通知所述情況的缺陷類別缺陷數量警告元件。再者,缺陷類別缺陷數量警告元件亦可為亦一併通知已超過規定值的缺陷的類別的元件。若為此種結構,則使用者可針對每個缺陷類別,在缺陷數量超過規定值時獲知所述情況,從而可進行更詳細的檢查管理。Furthermore, the inspection management system may include an output unit, and the inspection management unit may further include, when the calculated number of defects for each defect category exceeds a predetermined value determined for each of the defect categories, via The output unit notifies the defect type of the number of defects in the situation, and a warning element. In addition, the defect type defect quantity warning component may also be a component that also notifies the defect category that has exceeded the specified value. With this structure, the user can know the situation when the number of defects exceeds the specified value for each defect type, so that more detailed inspection management can be performed.

再者,當檢查系統是亦包括所述缺陷數量警告元件的結構時,輸出部亦可為與所述缺陷數量警告元件共同的結構。Furthermore, when the inspection system is also configured to include the number-of-defects warning element, the output unit may also have a structure common to the number-of-defects warning element.

又,所述缺陷類別分類元件亦可包括藉由深層學習的方法而學習完畢的推論元件。近年來,藉由使用深層學習的方法的人工智慧而進行的圖像辨識技術已取得顯著成果,藉由使用此種技術,可高效率地自動進行缺陷類別的分類。In addition, the defect category classification element may also include an inference element that has been learned through a deep learning method. In recent years, image recognition technology by artificial intelligence using a deep learning method has achieved remarkable results, and by using this technology, it is possible to automatically classify defect categories efficiently.

又,亦可為所述檢查管理系統進而包括顯示部,所述檢查管理部進而包括使所述顯示部針對每個所述同一缺陷圖像組同時顯示構成所述組的缺陷圖像資料,對使用者請求註冊與所述經顯示的缺陷圖像資料的組相對應的缺陷類別的深層學習用教師資料註冊元件。In addition, the inspection management system may further include a display unit, and the inspection management unit may further include the display unit simultaneously displaying the defect image data constituting the group for each of the same defect image groups. The user requests to register a teacher data registration component for deep learning of a defect category corresponding to the set of displayed defect image data.

此處,所謂顯示部,通常是指液晶顯示器等顯示器裝置,但亦可為利用投影機(projector)進行顯示等使用其他顯示元件的裝置。若為此種結構,則可針對表示同一缺陷的缺陷圖像資料統一進行註冊,從而可有效率地進行教師資料的註冊。又,使用者可對同一缺陷圖像組中所含的藉由多種檢查方式而獲得的缺陷圖像進行觀察對比而決定並註冊缺陷類別,故與只將個別的缺陷圖像資料作為對象而進行缺陷類別的註冊的情況相比,可減少錯誤選擇缺陷類別、或需要時間進行判斷的情況。Here, the display unit generally refers to a display device such as a liquid crystal display, but it may also be a device that uses other display elements such as display using a projector. With such a structure, it is possible to uniformly register the defective image data indicating the same defect, so that the registration of teacher materials can be efficiently performed. In addition, the user can observe and compare the defect images obtained by multiple inspection methods contained in the same defect image group to determine and register the defect type, so it is done with only the individual defect image data as the object Compared with the case of registering a defect category, it is possible to reduce the number of cases where the defect category is incorrectly selected or it takes time to judge.

又,所述缺陷類別分類元件亦可在無法以規定的精度以上的準確度進行所述同一缺陷圖像組的缺陷類別的分類的情況下,將關於所述同一缺陷圖像組的缺陷類別分類為不詳。若為此種結構,可防止藉由勉強進行精度不高的缺陷類別的分類,而使得最終獲得的資料的可靠性下降的情況。In addition, the defect type classification element may classify the defect type of the same defect image group when the defect type of the same defect image group cannot be classified with an accuracy higher than a predetermined accuracy. Is unknown. With such a structure, it is possible to prevent the situation that the reliability of the finally obtained data is reduced by reluctantly classifying the defect type with low accuracy.

又,所述缺陷類別分類元件亦可為針對將缺陷類別分類為不詳的所述同一缺陷圖像組,對使用者請求進行缺陷類別的分類的元件。若為此種結構,可防止將缺陷類別分類為不詳的同一缺陷圖像組直接作為分類不詳的資料而留下的情況。In addition, the defect type classification element may be an element that requests the user to classify the defect type for the same defect image group that classifies the defect type as unknown. With such a structure, it is possible to prevent the same defect image group whose defect category is classified as unknown from being left directly as the information of unknown classification.

又,藉由不同方式而拍攝所述被檢查物的外觀的多個拍攝元件亦可為包含拍攝由經所述被檢查物的第一面反射的反射光所形成的圖像的表面拍攝元件、拍攝由經所述被檢查物的與第一面為相反側的第二面反射的反射光所形成的圖像的背面拍攝元件、以及拍攝由透過所述被檢查物的透過光所形成的圖像的透過光拍攝元件之中任兩者以上的元件。若為此種結構,則可對應於多種缺陷的種類,進行缺陷的檢測及/或分類。In addition, the plurality of imaging elements that image the appearance of the object to be inspected by different methods may be surface imaging elements that include images formed by reflected light reflected by the first surface of the object to be inspected, A backside imaging element that captures an image formed by reflected light reflected by a second surface of the object to be inspected opposite to the first surface, and a image formed by transmitted light that has passed through the object to be inspected Any two or more of the image-transmitted light imaging device. With such a structure, it is possible to detect and/or classify defects corresponding to various types of defects.

又,藉由不同方式而拍攝所述被檢查物的外觀的多個拍攝元件亦可為包括藉由第一波長的光而拍攝所述被檢查物的第一波長拍攝元件、以及藉由與所述第一波長不同的波長的光而拍攝所述被檢查物的第二波長拍攝元件的元件。若為此種結構,則可對應於多種缺陷的種類,進行缺陷的檢測及/或分類。In addition, the plurality of imaging elements that image the appearance of the object to be inspected in different ways may include a first wavelength imaging element that images the object to be inspected with light of the first wavelength, and The second wavelength imaging element of the object to be imaged by using light of a wavelength different from the first wavelength. With such a structure, it is possible to detect and/or classify defects corresponding to various types of defects.

又,所述同一缺陷圖像合併元件亦可將所述被檢查物中的所述缺陷的位置為相同的範圍內的多個不同的缺陷圖像資料合併為一個同一缺陷圖像組。In addition, the same defect image merging element may also merge a plurality of different defect image data in the same range where the position of the defect in the inspection object is the same defect image group.

此處,所謂「位置相同的範圍內」的涵義,並不限於位置完全一致的範圍,亦包含位於規定的容許範圍內的情況。作為在多個缺陷圖像資料中,識別經拍攝的缺陷是否為同一缺陷的方法,可採用將產品中的缺陷的位置相同的資料認定為拍攝了同一缺陷的圖像資料的方法。確定被檢查物中的缺陷的位置時,例如,只要基於預先規定的各拍攝元件的配置地點、拍攝範圍、被檢查物的運送速度等,算出缺陷的位置即可。Here, the meaning of "within the range of the same position" is not limited to the range in which the positions are exactly the same, but also includes the case of being within a predetermined allowable range. As a method of identifying whether the photographed defect is the same defect among a plurality of defective image materials, a method of identifying the material with the same position of the defect in the product as the image material that captured the same defect. When determining the position of the defect in the test object, for example, the position of the defect may be calculated based on the predetermined placement location of each imaging element, imaging range, conveyance speed of the test object, and the like.

又,為了解決所述問題,本發明的檢查管理裝置是藉由不同的多種拍攝方式對片材狀的被檢查物的外觀進行拍攝並對所獲取的缺陷圖像資料進行處理的檢查管理裝置,其包括自所述缺陷圖像資料的集合中,將拍攝了所述被檢查物中的同一缺陷的多個缺陷圖像資料作為一個同一缺陷圖像組而處理的同一缺陷圖像合併元件。In addition, in order to solve the above-mentioned problems, the inspection management device of the present invention is an inspection management device that photographs the appearance of a sheet-like object to be inspected and processes the acquired defective image data by using various shooting methods. It includes the same defect image merging element that processes multiple defect image materials that have captured the same defect in the inspection object as one same defect image group from the collection of the defect image materials.

又,為了解決所述問題,本發明的檢查管理方法是管理片材狀的被檢查物的外觀檢查的方法,其包括:第一步驟,藉由兩種以上的不同方式而拍攝所述被檢查物;第二步驟,基於利用所述第一步驟中所拍攝的多種不同的拍攝方式而形成的被檢查物的圖像,檢測所述被檢查物的缺陷;第三步驟,記錄拍攝了在所述第二步驟中所檢測出的缺陷的缺陷圖像資料;第四步驟,將所述第三步驟中所記錄的缺陷圖像資料的集合之中、拍攝了所述被檢查物中的同一缺陷的多個缺陷圖像資料合併為一個同一缺陷圖像組;以及第五步驟,按每個規定的檢查單位,對在所述第四步驟中經合併的同一缺陷圖像組的數量進行計數,而算出缺陷數量。In addition, in order to solve the above problem, the inspection management method of the present invention is a method for managing the appearance inspection of a sheet-shaped object to be inspected, which includes a first step of photographing the object to be inspected by two or more different methods The second step, based on the image of the inspection object formed by using a variety of different shooting methods taken in the first step, to detect the defects of the inspection object; the third step, recording the Defect image data of the defect detected in the second step; in the fourth step, the same defect in the object to be inspected is captured from the set of defect image data recorded in the third step Multiple defective image data are merged into a same defective image group; and in the fifth step, the number of the same defective image group merged in the fourth step is counted for each prescribed inspection unit, And calculate the number of defects.

又,所述檢查管理方法亦可包括第六步驟,即,當所述第五步驟中所算出的缺陷數量超過規定值時,通知所述情況。In addition, the inspection management method may also include a sixth step, that is, when the number of defects calculated in the fifth step exceeds a prescribed value, notify the situation.

再者,所述處理或元件只要不產生技術上的矛盾,即可自由組合而實施。 [發明的效果]Furthermore, as long as there is no technical contradiction, the processes or components can be freely combined and implemented. [Effect of invention]

根據本發明,在藉由多種不同方式而拍攝被檢查物,並按各拍攝方式分別檢測缺陷的片材狀物品的外觀檢查中,可減少因各別地管理表示同一缺陷的多個缺陷圖像資料而導致的弊端。According to the present invention, in the visual inspection of a sheet-like article in which the object to be inspected is photographed in a variety of different ways and the defects are separately detected according to each shooting method, it is possible to reduce the number of defective images representing the same defect by separately managing Defects caused by information.

以下,參照圖式,對本發明的實施形態的一例進行說明。Hereinafter, an example of an embodiment of the present invention will be described with reference to the drawings.

<應用例> 本發明例如可作為如圖1所示的檢查管理系統9而應用。圖1是示意性地表示本應用例的檢查管理系統9的結構例的圖。檢查管理系統9是進行片材狀的物品的缺陷的檢測以及檢查的資訊的管理的系統,作為主要的結構元件,包括照明系統的表面反射光源911、背面反射光源912、透過光源913、作為測定系統的表面拍攝相機921、背面拍攝相機922、控制終端93及運送機構(未圖示)。<Application example> The present invention can be applied as the inspection management system 9 shown in FIG. 1, for example. FIG. 1 is a diagram schematically showing a configuration example of an inspection management system 9 of this application example. The inspection management system 9 is a system for detecting defects of sheet-shaped articles and managing information on inspections. The main structural elements include a surface reflection light source 911, a back reflection light source 912, a transmission light source 913 of a lighting system, and measurement The system has a front camera 921, a rear camera 922, a control terminal 93, and a transport mechanism (not shown).

如圖1所示,被檢查物T藉由未圖示的運送機構,而沿水平方向(箭頭方向)運送,在所述運送過程中藉由測定系統而連續地獲取被檢查物T的外觀圖像,並基於此而實施檢查。被檢查物T形成為片材狀,例如,可例示紙、布、薄膜、樹脂、纖維素(cellulose)等。又,並不限於單一原材料,亦可為如使薄膜與不織布黏合而成的包裝紙等,具有多層的片材體。此外,亦可為乾燥海苔等食品。As shown in FIG. 1, the test object T is transported in a horizontal direction (arrow direction) by a transport mechanism (not shown), and the appearance of the test object T is continuously acquired by the measurement system during the transport process Like, and implement inspection based on this. The test object T is formed into a sheet shape, and for example, paper, cloth, film, resin, cellulose, etc. can be exemplified. In addition, it is not limited to a single raw material, but may be a packaging paper such as a film formed by bonding a film and a nonwoven fabric, and has a multi-layer sheet body. In addition, it can also be dried seaweed and other foods.

照明系統的表面反射光源911是以將可見光(例如白色光)照射至被檢查物T的表面(第一面)的方式而配置,背面反射光源912是以同樣地將可見光照射至被檢查物T的背面(第二面)的方式而配置。又,透過光源913是以將紅外線照射至被檢查物T的背面(第二面)的方式而配置。The surface reflection light source 911 of the illumination system is arranged to irradiate visible light (for example, white light) onto the surface (first surface) of the object T, and the rear surface reflection light source 912 similarly irradiates visible light to the object T The back side (second side). In addition, the transmission light source 913 is arranged to irradiate infrared rays to the back surface (second surface) of the test object T.

測定系統的表面拍攝相機921中,雖未圖示,但包括訊號輸出部、可見光受光感測器、紅外線受光感測器、分光稜鏡及透鏡,以拍攝被檢查物T的表面的方式而配置。具體而言,藉由自表面反射光源911照射且經被檢查物T的表面反射的光(以下稱為表面反射光)、自透過光源913照射且透過被檢查物T的紅外線(以下稱為透過光)而拍攝被檢查物T。分光稜鏡將入射至相機的光至少分成可見光區域的波長的光及紅外線,並相對應的各感測器接收光。在感測器中,可使用例如電荷耦合器件(Charge Coupled Device,CCD)或互補金屬氧化物半導體(complementary metal oxide semiconductor,CMOS)感測器。The surface imaging camera 921 of the measurement system, although not shown, includes a signal output unit, a visible light receiving sensor, an infrared receiving sensor, a beam splitter, and a lens, and is arranged to photograph the surface of the object T . Specifically, the light irradiated from the surface reflection light source 911 and reflected by the surface of the object T (hereinafter referred to as surface reflected light), and the infrared light irradiated from the transmission light source 913 and transmitted through the object T (hereinafter referred to as transmission) Light) while shooting the object T. The beam splitter divides the light incident on the camera into at least wavelength light and infrared light in the visible light region, and the corresponding sensors receive the light. In the sensor, for example, a charge coupled device (Charge Coupled Device, CCD) or a complementary metal oxide semiconductor (CMOS) sensor may be used.

又,背面拍攝相機922中,雖未圖示,但包括訊號輸出部、可探測可見光區域的光的受光感測器、透鏡,以拍攝被檢查物T的背面的方式而配置。具體而言,藉由自背面反射光源912照射且經被檢查物T的背面反射的光(以下稱為背面反射光)而拍攝被檢查物T。在受光感測器中,例如可使用CCD感測器或CMOS感測器。In addition, although not shown, the backside camera 922 includes a signal output unit, a light-receiving sensor capable of detecting light in the visible light region, and a lens, and is arranged so as to image the backside of the object T to be inspected. Specifically, the object T is photographed by the light irradiated from the back surface reflection light source 912 and reflected by the back surface of the object T (hereinafter referred to as back surface reflected light). As the light receiving sensor, for example, a CCD sensor or a CMOS sensor can be used.

控制終端93進行照明系統、測定系統、運送機構的控制,並且進行檢查的各種資訊的處理。作為硬體結構,包括各種輸入輸出裝置、處理器、儲存裝置等,作為功能模組,包括缺陷檢測部931、缺陷位置確定部932、缺陷圖像儲存部933、同一缺陷圖像合併部934、缺陷計數部935、缺陷數量警告部936及缺陷類別分類部937。The control terminal 93 performs control of the lighting system, the measurement system, and the transport mechanism, and also processes various information for inspection. As a hardware structure, it includes various input/output devices, processors, storage devices, etc. As a functional module, it includes a defect detection unit 931, a defect position determination unit 932, a defect image storage unit 933, a same defect image merge unit 934, Defect counting section 935, defect number warning section 936, and defect category classification section 937.

缺陷檢測部931基於自測定系統的各相機輸入的圖像訊號,進行被檢查物T中所含的缺陷的檢測。缺陷的檢測是藉由例如判定自拍攝到的圖像獲得的特徵量是否已超出規定的臨限值而進行。在特徵量中,例如可使用亮度等,亦可使用明度、彩度、色相等。The defect detection unit 931 detects defects included in the object T based on the image signals input from the cameras of the measurement system. Defect detection is performed by, for example, determining whether the feature quantity obtained from the captured image has exceeded a predetermined threshold value. In the feature quantity, for example, brightness and the like, brightness, saturation, and color can be used.

在本應用例中,針對表面拍攝相機921所拍攝的由表面反射光形成的圖像(以下稱為表面反射圖像)及由透過光形成的圖像(以下稱為透過圖像)、以及背面拍攝相機922所拍攝的由背面反射光形成的圖像(以下稱為背面反射圖像),分別進行特徵量的判定。In this application example, the image formed by the surface reflected light (hereinafter referred to as the surface reflected image) and the image formed by the transmitted light (hereinafter referred to as the transmitted image) captured by the surface shooting camera 921, and the back surface The image formed by the back reflected light (hereinafter referred to as the back reflected image) captured by the shooting camera 922 performs the determination of the feature amount.

缺陷位置確定部932在檢測出缺陷時,確定所述缺陷位於被檢查物T的哪個部位。位置的確定可基於例如預先規定的被檢查物T的運送速度、相機的設置位置、被檢查物T的大小以及自檢查開始的經過時間而進行。When a defect is determined, the defect position determination unit 932 determines where the defect T is located in the object T. The position can be determined based on, for example, a predetermined transport speed of the object T to be inspected, the installation position of the camera, the size of the object T to be inspected, and the elapsed time from the start of the inspection.

缺陷圖像儲存部933在檢測出缺陷時,將藉由各相機而拍攝的所述缺陷的圖像(以下稱為缺陷圖像),與缺陷位置確定部932所確定的所述缺陷的位置的資訊相關聯而記錄於儲存裝置中。又,不僅將檢測出缺陷的拍攝方式的圖像,而且將其他拍攝方式的相對應的部位的圖像亦記錄於儲存裝置。When the defect image storage unit 933 detects a defect, the defect image (hereinafter referred to as a defect image) captured by each camera is compared with the position of the defect determined by the defect position determination unit 932 The information is related and recorded in the storage device. In addition, not only the image of the imaging mode in which the defect is detected, but also the image of the corresponding part of the other imaging mode is recorded in the storage device.

同一缺陷圖像合併部934在缺陷位置確定部932所確定的缺陷的位置相同的多個不同的缺陷圖像已記錄於儲存裝置中時,將所述缺陷的位置相同的多個圖像作為一組同一缺陷圖像組而加以關聯。以如上所述的方式形成為組的多個缺陷圖像在以後,進行向顯示裝置的顯示、各種資料分析等時,被一體地處理。又,亦可將所述同一缺陷圖像組作為組而重新記錄於儲存裝置。The same defect image merging unit 934, when a plurality of different defect images having the same defect position determined by the defect position determining unit 932 have been recorded in the storage device, use the plurality of images having the same defect position as a Associate the same defective image group. The plurality of defective images formed as a group as described above will be processed integrally when the display to the display device, various data analysis, and the like are performed later. In addition, the same defective image group may be re-recorded in the storage device as a group.

缺陷計數部935按每個規定的檢查單位,對同一缺陷圖像組的數量進行計數,而算出每個所述檢查單位的缺陷數量。此處,所謂規定的檢查單位,既可為規定數(例如,一卷、一批次、數批次),亦可為規定時間(例如,一天、一週、一個月)。由於以如上所述的方式計算缺陷數量,故可獲得每個規定的檢查單位的準確的缺陷數量,而不會對表示被檢查物T中的同一缺陷的多個缺陷圖像資料進行重複計數。The defect counting unit 935 counts the number of the same defective image group for each predetermined inspection unit, and calculates the number of defects for each inspection unit. Here, the predetermined inspection unit may be either a predetermined number (for example, one roll, one batch, several batches) or a predetermined time (for example, one day, one week, one month). Since the number of defects is calculated in the manner described above, the exact number of defects per predetermined inspection unit can be obtained without repeatedly counting a plurality of defective image materials representing the same defect in the object T under inspection.

缺陷數量警告部936判定缺陷計數部935所算出的缺陷數量是否超過規定值,當判定為缺陷數量超過所述規定值時,將此情況自未圖示的輸出裝置(例如,液晶顯示器、揚聲器等)輸出而通知給使用者。The defect number warning unit 936 determines whether the number of defects calculated by the defect counting unit 935 exceeds a predetermined value, and when it is determined that the number of defects exceeds the predetermined value, the situation is output from an unillustrated output device (for example, a liquid crystal display, a speaker, etc.) ) Output and notify the user.

缺陷類別分類部937按缺陷的種類對合併為同一缺陷圖像組的缺陷圖像資料進行分類,將所述分類後的類別與缺陷圖像資料加以關聯而記錄。所分類的缺陷的類別可在使用者中任意設定,例如,既可設置異物混入、污垢、褶皺、孔之類的類別,亦可分類成更細的類別(例如,蟲、木片、金屬異物、油垢、水垢、大孔、小孔等)。The defect category classification unit 937 classifies the defect image data merged into the same defect image group according to the type of defect, and associates the classified category with the defect image data to record. The classification of the classified defects can be arbitrarily set by the user, for example, it can be set up with foreign matter mixing, dirt, wrinkles, holes and the like, or it can be classified into finer categories (for example, insects, wood chips, metal foreign objects, Grease, scale, large holes, small holes, etc.).

作為對缺陷類別進行分類的方法,既可基於針對表面反射圖像、背面反射圖像、透過圖像中的任一圖像的特徵量來進行,亦可藉由各圖像的缺陷部位的特徵量的對比來進行,又,亦可藉由在各個檢查方式中是否檢測出缺陷、及其組合等來進行。又,亦可綜合使用該些方法而進行分類。藉由以如上所述的方式,將表示同一缺陷的多個缺陷圖像資料設為組而進行缺陷類別的分類,可與基於檢測出缺陷的單個圖像而進行缺陷類別的分類的情況相比,更準確地進行缺陷類別的分類。As a method of classifying the defect type, it can be based on the feature amount of any one of the surface reflection image, the back reflection image, and the transmission image, or by the feature of the defect portion of each image The comparison of the quantities can also be carried out by whether or not defects are detected in each inspection method, and combinations thereof. Also, these methods can be used in combination for classification. By classifying a plurality of defect image data indicating the same defect as a group and classifying the defect type as described above, it is comparable to the case of classifying the defect type based on a single image where the defect is detected To classify the defect category more accurately.

圖2是表示在本應用例的檢查管理系統9中進行的處理的流程的流程圖。檢查管理系統9首先,藉由測定系統而獲取表面反射圖像、背面反射圖像、透過圖像(步驟S101),且基於所述圖像,藉由缺陷檢測部931而進行缺陷的檢測(步驟S102)。其次,缺陷圖像儲存部933將缺陷圖像記錄於儲存裝置(步驟S103)。繼而,同一缺陷圖像合併部934自經記錄的缺陷圖像,將被檢查物中的缺陷的位置相同的多個圖像合併為一組同一缺陷圖像組(步驟S104)。其次,缺陷計數部935按每個規定的檢查單位,對同一缺陷圖像組的組數進行計數,算出每個所述檢查單位的缺陷數量(步驟S105)。此處,缺陷數量警告部936判定在步驟S105中算出的缺陷數量是否超過規定值(臨限值)(步驟S106),當判定為超過時,通知此情況(步驟S107),而進入至步驟S108。另一方面,當判定為缺陷數量不超過規定值時,直接進入至步驟S108。然後,在步驟S108中,缺陷類別分類部937對合併為同一缺陷圖像組的缺陷圖像資料的缺陷類別進行分類,並且記錄而結束一系列的處理。再者,自缺陷數量的測量至缺陷數量超過規定值時的通知(步驟S105至步驟S107)為止的處理與步驟S108的處理亦可調換順序。2 is a flowchart showing the flow of processing performed in the inspection management system 9 of this application example. The inspection management system 9 first acquires the surface reflection image, the back reflection image, and the transmission image by the measurement system (step S101), and based on the image, the defect detection unit 931 performs defect detection (step S102). Next, the defective image storage unit 933 records the defective image in the storage device (step S103). Then, the same defect image merging unit 934 merges a plurality of images having the same position of the defect in the inspection object from the recorded defect image into a group of the same defect image group (step S104). Next, the defect counting unit 935 counts the number of groups of the same defective image group for each predetermined inspection unit, and calculates the number of defects for each inspection unit (step S105). Here, the defect number warning unit 936 determines whether the number of defects calculated in step S105 exceeds a predetermined value (threshold value) (step S106), and when it is determined to be exceeded, notifies this (step S107) and proceeds to step S108 . On the other hand, when it is determined that the number of defects does not exceed the predetermined value, the process directly proceeds to step S108. Then, in step S108, the defect category classification unit 937 classifies the defect categories of the defect image materials merged into the same defect image group, and records the series of processes to end. Furthermore, the processing from the measurement of the number of defects to the notification when the number of defects exceeds a predetermined value (steps S105 to S107) and the processing of step S108 may be reversed.

藉由如上所述的本應用例的檢查管理系統9的結構,可將表示同一缺陷的多個缺陷圖像資料設為組,而進行計數、缺陷類別分類,故可減少因各別地管理表示同一缺陷的多個缺陷圖像資料而導致的弊端(例如,進行對同一缺陷進行重複計數的精度低的缺陷類別的分類等)。With the configuration of the inspection management system 9 of this application example as described above, a plurality of defect image data indicating the same defect can be grouped to count and classify the defect type, so it is possible to reduce the number of individual management indicators. Defects caused by multiple defective image materials of the same defect (for example, the classification of defect types with low accuracy that repeatedly counts the same defect, etc.).

<實施例> 以下,對用以實施本發明的形態的一例作進一步詳細說明。但是,所述實施例中所述的構成零件的尺寸、材質、形狀、其相對配置等只要未作特別揭示,其主旨並非將本發明的範圍僅限定於該些。<Example> Hereinafter, an example of a form for implementing the present invention will be described in further detail. However, the size, material, shape, relative arrangement, etc. of the component parts described in the above-mentioned embodiments are not intended to limit the scope of the present invention to these unless otherwise disclosed.

(系統結構) 圖3是示意性地表示本實施例的檢查管理系統1的結構例的圖。如圖3所示,本實施例的檢查管理系統1包括外觀檢查裝置2及檢查管理裝置3,作為主要結構。(system structure) FIG. 3 is a diagram schematically showing a configuration example of the inspection management system 1 of this embodiment. As shown in FIG. 3, the inspection management system 1 of this embodiment includes an appearance inspection device 2 and an inspection management device 3 as main structures.

(外觀檢查裝置) 外觀檢查裝置2是獲取片材狀的物品的外觀圖像,並基於所述圖像,進行缺陷的檢測的裝置,包括照明系統、測定系統、運送機構(未圖示)及控制終端23,作為主要結構。(Appearance inspection device) The appearance inspection apparatus 2 is an apparatus that acquires an appearance image of a sheet-like article and detects defects based on the image, and includes an illumination system, a measurement system, a transport mechanism (not shown), and a control terminal 23 as The main structure.

被檢查物T是藉由未圖示的運送機構,而沿水平方向(箭頭方向)運送,在其運送過程中藉由測定系統而連續地獲取被檢查物T的外觀圖像,並基於此而實施檢查。被檢查物T形成為片材狀,例如可例示紙、布、薄膜等。又,並不限於單一原材料,亦可為如使薄膜與不織布黏合而成的包裝紙等,具有多層的片材體。又,亦可為乾燥海苔等食品。The test object T is transported in a horizontal direction (arrow direction) by a transport mechanism not shown. During the transport process, the appearance image of the test object T is continuously acquired by the measurement system, and based on this Carry out inspections. The object to be inspected T is formed into a sheet shape, and for example, paper, cloth, film, etc. can be exemplified. In addition, it is not limited to a single raw material, but may be a packaging paper such as a film formed by bonding a film and a nonwoven fabric, and has a multi-layer sheet body. It can also be dried seaweed and other foods.

照明系統包括對被檢查物T的表面照射可見光(例如白色光)的表面反射光源211、對被檢查物T的表面照射可見光的背面反射光源212、以及對被檢查物T的背面照射可見光的透過光源213。在該些各光源中,例如亦可使用發光二極體(light-emitting diode,LED)照明等。The illumination system includes a surface reflection light source 211 that irradiates the surface of the object T with visible light (for example, white light), a back surface reflection light source 212 that irradiates the surface of the object T with visible light, and a transmission that irradiates the back surface of the object T with visible light Light source 213. Among these light sources, for example, light-emitting diode (LED) lighting can also be used.

測定系統包括:表面反射光相機221,拍攝自表面反射光源211照射並經被檢查物T的表面反射的光(以下稱為表面反射光);背面反射光相機222,拍攝自背面反射光源212照射並經被檢查物T的背面反射的光(以下稱為背面反射光);以及透過光相機223,拍攝自透過光源213照射並透過被檢查物T的光。再者,構成測定系統的各相機相當於本發明中的拍攝元件。The measurement system includes: a surface reflection light camera 221 that captures light irradiated from the surface reflection light source 211 and reflected by the surface of the object T (hereinafter referred to as surface reflection light); a rear reflection light camera 222 that captures the light reflected from the rear reflection light source 212 The light reflected by the back surface of the test object T (hereinafter referred to as back-reflected light); and the light transmitted through the light camera 223 and transmitted through the light source 213 and transmitted through the test object T. In addition, each camera constituting the measurement system corresponds to the imaging element in the present invention.

各相機可使用可探測各自所拍攝的光的受光感測器、透鏡、以及作為訊號輸出部感測器的例如CCD感測器或CMOS感測器。Each camera may use a light-receiving sensor, a lens that can detect the light captured by it, and a signal output portion sensor such as a CCD sensor or a CMOS sensor, for example.

控制終端23對照明系統、測定系統、運送機構進行控制,並且進行各種資訊的處理。作為硬體結構,包括輸入輸出裝置、處理器、儲存裝置等,作為功能模組,包括缺陷檢測部231、缺陷位置確定部232、缺陷圖像儲存部233。The control terminal 23 controls the lighting system, the measurement system, and the transport mechanism, and performs various information processing. As a hardware structure, it includes an input/output device, a processor, a storage device, etc., and as a functional module, it includes a defect detection unit 231, a defect position determination unit 232, and a defect image storage unit 233.

缺陷檢測部231基於自測定系統的各相機輸入的圖像訊號,進行被檢查物T中所含的缺陷的檢測。缺陷的檢測是藉由判定例如自拍攝到的圖像獲得的特徵量是否超出規定的臨限值而進行。在特徵量中,例如可使用亮度等,亦可使用明度、彩度、色相等。The defect detection unit 231 detects defects contained in the object T based on the image signals input from the cameras of the measurement system. The detection of the defect is performed by determining whether, for example, the feature quantity obtained from the captured image exceeds a predetermined threshold value. In the feature quantity, for example, brightness and the like, brightness, saturation, and color can be used.

在本實施例中,針對表面反射光相機221所拍攝的圖像(以下稱為表面反射圖像)、背面反射光相機222所拍攝的圖像(以下稱為背面反射圖像)及透過光相機223所拍攝的圖像(以下稱為透過圖像),分別進行特徵量的判定。In this embodiment, for the image captured by the surface reflection light camera 221 (hereinafter referred to as the surface reflection image), the image captured by the back reflection light camera 222 (hereinafter referred to as the back reflection image) and the transmission light camera The image captured by 223 (hereinafter referred to as a transmission image) is subjected to feature value determination.

缺陷位置確定部232在自被檢查物T檢測出缺陷時,確定所述缺陷位於被檢查物T的哪個部位。位置的確定例如可基於預先規定的被檢查物T的運送速度、相機的設置位置、被檢查物T的大小以及自檢查開始的經過時間而進行。The defect position determination unit 232 determines where the defect T is located when the defect is detected from the object T. The position can be determined based on, for example, a predetermined transport speed of the object T to be inspected, a camera installation position, a size of the object T to be inspected, and an elapsed time from the start of the inspection.

缺陷圖像儲存部233在檢測出缺陷時,將藉由各相機而拍攝到的所述缺陷的圖像(以下稱為缺陷圖像)與缺陷位置確定部232所確定的所述缺陷的位置的資訊相關聯而記錄於儲存裝置(以下將經記錄的資料稱為缺陷圖像資料)。又,亦可設為不僅將檢測出缺陷的拍攝方式的圖像,而且將其他拍攝方式的相對應的部位的圖像亦記錄於儲存裝置。When the defect image storage unit 233 detects a defect, the defect image (hereinafter referred to as a defect image) captured by each camera and the position of the defect determined by the defect position determination unit 232 The information is correlated and recorded in the storage device (hereinafter the recorded data is referred to as defective image data). In addition, it may be configured that not only the image of the imaging method in which the defect is detected, but also the image of the part corresponding to the other imaging method is recorded in the storage device.

(檢查管理裝置) 所述外觀檢查裝置2經由網路(區域網路(local area network,LAN))與檢查管理裝置3連接。檢查管理裝置3是自外觀檢查裝置2獲取檢查的資訊,並進行所述資訊的處理的裝置,包括包含中央處理單元(central processing unit,CPU)(處理器)、主儲存裝置(記憶體)、輔助儲存裝置(硬碟等)、輸入裝置(鍵盤、滑鼠、控制器、觸控面板(touch panel)等)、輸出裝置(液晶顯示器、揚聲器、印表機(printer)等)等的通用的電腦系統。(Check management device) The appearance inspection device 2 is connected to the inspection management device 3 via a network (local area network (LAN)). The inspection management device 3 is a device that acquires inspection information from the appearance inspection device 2 and processes the information, including a central processing unit (CPU) (processor), a main storage device (memory), General-purpose storage devices (hard drives, etc.), input devices (keyboards, mice, controllers, touch panels, etc.), output devices (liquid crystal displays, speakers, printers, etc.), etc. computer system.

再者,檢查管理裝置3既可包括一台電腦,亦可包括多台電腦。或者,亦可在外觀檢查裝置2的控制終端23上,安裝檢查管理裝置3的全部或一部分功能。或者,亦可藉由網路上的伺服器(雲伺服器(cloud server)等)來實現檢查管理裝置3的一部分功能。Furthermore, the inspection management device 3 may include either one computer or multiple computers. Alternatively, all or part of the functions of the inspection management device 3 may be installed on the control terminal 23 of the visual inspection device 2. Alternatively, a part of the functions of the inspection management device 3 may be realized by a server on the network (cloud server, etc.).

本實施例的檢查管理裝置3的CPU包括同一缺陷圖像合併部31、缺陷類別分類部32、教師資料註冊部33、缺陷類別計數部34及缺陷類別缺陷數量警告部35,作為功能模組。The CPU of the inspection management device 3 of this embodiment includes the same defect image merging unit 31, defect category classification unit 32, teacher profile registration unit 33, defect category counting unit 34, and defect category defect number warning unit 35 as functional modules.

同一缺陷圖像合併部31自外觀檢查裝置2獲取缺陷圖像資料,將被檢查物T中的缺陷的位置相同的多個缺陷圖像合併為一組同一缺陷圖像組。以如上所述的方式形成為組的多個缺陷圖像是作為一組而記錄於儲存裝置,在向顯示裝置的顯示、各種資料分析等時,被一體地處理。The same defect image merging unit 31 acquires defect image data from the appearance inspection device 2 and merges a plurality of defect images having the same position of the defect in the inspection object T into a group of the same defect image group. The plurality of defective images formed as a group as described above are recorded in the storage device as a group, and are processed integrally during display to the display device, various data analysis, and the like.

缺陷類別分類部32按缺陷類別對合併為同一缺陷圖像組的缺陷圖像資料進行分類。所分類的缺陷的類別可由使用者任意設定,例如,既可設置異物混入、污垢、褶皺、孔之類的類別,亦可分類成更細的類別(例如,蟲、木片、金屬異物、油垢、水垢、大孔、小孔等)。The defect type classification unit 32 classifies the defect image data merged into the same defect image group according to the defect type. The classification of the classified defects can be arbitrarily set by the user. For example, it is possible to set the classification of foreign matter mixing, dirt, wrinkles, holes, etc., or it can be classified into finer categories (for example, insects, wood chips, metal foreign bodies, grease, Scale, large holes, small holes, etc.).

作為對缺陷類別進行分類的方法,既可基於針對表面反射圖像、背面反射圖像、透過圖像中的任一圖像的特徵量進行,亦可藉由各圖像的缺陷部位的特徵量的對比而進行,又,亦可藉由在各個檢查方式中是否檢測出缺陷、檢測的方式的組合等而進行。又,亦可使該些方法組合起來而進行分類。As a method of classifying the defect type, it can be based on the feature amount of any one of the surface reflection image, the back reflection image, and the transmission image, or by the feature amount of the defect portion of each image The comparison is carried out, and it can also be performed by whether a defect is detected in each inspection method, a combination of inspection methods, and the like. In addition, these methods may be combined for classification.

在本實施例中,缺陷類別分類部32是結合利用學習完畢模型的推論處理而進行缺陷類別的分類,所述學習完畢模型是藉由深層學習的方法而生成。再者,關於缺陷類別分類處理的流程,將在後文描述。In the present embodiment, the defect category classification unit 32 performs defect category classification in conjunction with inference processing using a learned model, which is generated by a deep learning method. In addition, the flow of defect classification processing will be described later.

教師資料註冊部33具有受理用以使缺陷類別分類部32的人工智慧進行深層學習的教師資料的註冊的功能,在顯示裝置中顯示構成同一缺陷圖像組的多個缺陷圖像之後,對使用者請求輸入與所述同一缺陷圖像組相對應的缺陷類別。The teacher profile registration unit 33 has a function of accepting the registration of teacher profiles for deep learning of the artificial intelligence of the defect category classification unit 32, and after displaying multiple defect images constituting the same defect image group on the display device, the The requester inputs the defect category corresponding to the same defect image group.

缺陷類別計數部34按每個類別對缺陷類別分類後的同一缺陷圖像組的數量進行計數,算出每個規定的檢查單位的各個缺陷類別的缺陷數量。此處,所謂規定的檢查單位,既可為規定數(例如,一卷、一批次、數批次),亦可為規定時間(例如,一天、一週、一個月)。The defect type counting unit 34 counts the number of the same defect image group classified by the defect type for each type, and calculates the number of defects of each defect type for each predetermined inspection unit. Here, the predetermined inspection unit may be either a predetermined number (for example, one roll, one batch, several batches) or a predetermined time (for example, one day, one week, one month).

缺陷類別缺陷數量警告部35判定缺陷類別計數部所算出的每個缺陷類別的缺陷數量是否超過針對每個所述缺陷類別而規定的規定值,當判定為存在超過所述規定值而算出缺陷數量的缺陷類別時,將此情況自輸出裝置輸出而通知給使用者。此處,所謂藉由輸出裝置而進行的輸出,例如,既可為藉由顯示裝置而顯示,亦可為自揚聲器發出警報聲,亦可為藉由印表機而印刷。又,亦可併用該些裝置而進行通知。此外,缺陷類別缺陷數量警告部35亦可設為亦一併通知超過規定值的缺陷的類別。The defect category defect number warning unit 35 determines whether the number of defects for each defect category calculated by the defect category counting unit exceeds a predetermined value prescribed for each of the defect categories, and when it is determined that there is a defect exceeding the prescribed value, the number of defects is calculated In the case of a defect type, the situation is output from the output device and notified to the user. Here, the output by the output device may be displayed by a display device, or may sound an alarm from a speaker, or may be printed by a printer. Furthermore, these devices may be used in combination for notification. In addition, the defect type defect number warning unit 35 may also be set to notify the type of defects exceeding a predetermined value at the same time.

(缺陷類別分類的處理的流程) 其次,基於圖4,說明缺陷類別分類部32對缺陷類別進行分類時的處理的流程。圖4是表示本實施例中的缺陷類別分類的處理的流程的流程圖。(Processing flow for defect category classification) Next, based on FIG. 4, the flow of processing when the defect type classification unit 32 classifies the defect type will be described. FIG. 4 is a flowchart showing a flow of processing for classifying defects in the present embodiment.

缺陷類別分類部32首先,藉由成為對象的同一缺陷圖像組中的表面反射圖像、背面反射圖像、透過圖像的缺陷檢測有無的組合而對缺陷類別進行分類(步驟S201)。根據缺陷類別,存在必須藉由特定的檢查方式而檢測、或者藉由特定的檢測方式無法檢測的情況,因此可在組中所含的各檢查方式的圖像的有無(即在檢查時是否檢測出缺陷)的組合條件下,進行缺陷類別的判別。再者,當記錄缺陷圖像資料時,在不僅將檢測出缺陷的拍攝方式的圖像,而且將其他拍攝方式的相對應的部位的圖像亦記錄於儲存裝置的情況下,只要對各圖像賦予缺陷檢測有無的識別資訊,即可利用所述識別資訊的組合進行同樣的處理。當在步驟S201中已完成缺陷類別的分類時結束處理,當未完成分類時,進入至步驟S203(步驟S202)。The defect type classification unit 32 first classifies the defect type by a combination of the presence or absence of defect detection in the same defect image group as the target defect image group (step S201 ). Depending on the type of defect, there may be cases where it is necessary to detect by a specific inspection method, or it cannot be detected by a specific inspection method, so the presence or absence of images of each inspection method included in the group (ie, whether to detect during inspection Defects) under the combination of conditions, to determine the type of defect. Furthermore, when recording defective image data, when not only the image of the imaging mode in which the defect is detected, but also the image of the corresponding part of the other imaging mode is recorded in the storage device, as long as If identification information for defect detection is given, the same processing can be performed using the combination of the identification information. When the classification of the defect type has been completed in step S201, the process ends, and when the classification has not been completed, the process proceeds to step S203 (step S202).

在步驟S203中,缺陷類別分類部32進行利用規定的特徵量的缺陷類別分類。具體而言,當同一缺陷圖像組中所含的缺陷圖像之中,即便存在一個符合所述特徵量判定的條件的圖像時,同一缺陷圖像組即分類為屬於所述缺陷類別。例如,當關於透過圖像,亮度的峰值位準(peak level)為100以上(最高值為255),且表示所述缺陷的面積為1 mm2 以上時,同一缺陷圖像組的缺陷類別分類為孔。當步驟S203中已完成缺陷類別的分類時結束處理,當未完成分類時,進入至步驟S205(步驟S204)。In step S203, the defect type classification unit 32 performs defect type classification using a predetermined feature amount. Specifically, when there is an image that meets the condition for determining the feature amount among the defect images included in the same defect image group, the same defect image group is classified as belonging to the defect category. For example, when the peak level of the brightness of the transmitted image is 100 or more (the highest value is 255), and the area of the defect is 1 mm 2 or more, the defect category of the same defect image group is classified For holes. When the classification of the defect category has been completed in step S203, the process ends, and when the classification has not been completed, the process proceeds to step S205 (step S204).

在步驟S205中,缺陷類別分類部32針對同一缺陷圖像組,預先按每個檢查方式利用藉由深層學習的方法而生成的學習完畢推論模型進行缺陷類別分類。具體而言,利用與表面反射圖像、背面反射圖像、透過圖像的各圖像相對應的檢查方式的學習完畢模型而進行推論,算出各缺陷類別的判定準確率(即,作為規定的缺陷類別的準確率)。然後,將組中所含的所有圖像的各缺陷類別的判定準確率之中、值最大的缺陷類別,分類為所述同一缺陷圖像組的缺陷類別。再者,當組中所含的圖像中,無超過規定的判定準確率(例如50%)的缺陷類別時,將缺陷類別分類為「不詳」。當在步驟S205中將缺陷類別分類為「不詳」時,進入至步驟S207,當分類為除此以外的缺陷類別時,結束處理(步驟S206)。In step S205, the defect type classification unit 32 classifies the defect type using the learned inference model generated by the deep learning method for each inspection method in advance for the same defect image group. Specifically, using the learned model of the inspection method corresponding to each of the surface reflection image, the back reflection image, and the transmission image to make an inference, the judgment accuracy rate of each defect type is calculated (that is, as a predetermined The accuracy rate of the defect category). Then, the defect type having the largest value among the determination accuracy rates of the defect types of all images included in the group is classified as the defect type of the same defect image group. Furthermore, when there is no defect category that exceeds the specified judgment accuracy rate (for example, 50%) in the images contained in the group, the defect category is classified as "unknown". When the defect category is classified as "unknown" in step S205, the process proceeds to step S207, and when the defect category is classified as other than this, the process is terminated (step S206).

在步驟S207中,將缺陷類別被分類為不詳的同一缺陷圖像組的圖像顯示於顯示裝置之後,對使用者進行促使確認的警告,並結束分類處理。藉由如上所述的結構,使用者可自大量存在的圖像之中判斷應優先確認的圖像。In step S207, after displaying the images of the same defect image group whose defect category is classified as unknown to the display device, the user is warned to prompt confirmation, and the classification process ends. With the structure as described above, the user can judge the image to be confirmed preferentially from the large number of existing images.

又,所述分類的結果亦可進而用作推論模型的教師資料。即使是最終類別被分類為「不詳」的同一缺陷圖像組,亦可用作教師資料。具體而言,當所述步驟S207的警告之後,使用者對所述組進行確認,若判定準確率最高的缺陷類別與實際的缺陷相一致,便追加同一缺陷圖像組中所含的圖像作為所述缺陷的教師資料。另一方面,當與判定準確率最高的缺陷類別不同的缺陷類別是實際的缺陷時,將同一缺陷圖像組中所含的圖像註冊為所述其他缺陷的教師資料。藉由如上所述的方式,可保存更正確的教師資料。In addition, the results of the classification can be further used as teacher data of the inference model. Even the same defective image group whose final category is classified as "unknown" can be used as teacher information. Specifically, after the warning in step S207, the user confirms the group, and if it is determined that the defect type with the highest accuracy rate matches the actual defect, the images included in the same defect image group are added Teacher information as the defect. On the other hand, when the defect category different from the defect category with the highest determination accuracy rate is an actual defect, the images included in the same defect image group are registered as the teacher's profile of the other defects. By the way described above, more accurate teacher information can be saved.

又,藉由教師資料註冊部33的功能,當註冊教師資料時,一次並列地顯示表示同一缺陷的藉由多種檢查方式而獲得的圖像,統一受理缺陷類別的輸入,因此可準確而高效率地將缺陷圖像資料註冊為教師資料。藉由基於以如上所述的方式而註冊的正確的教師資料而學習,可製作判定精度更高的學習完畢模型。Also, with the function of the teacher data registration unit 33, when registering teacher data, images obtained by multiple inspection methods representing the same defect are displayed side by side at once, and input of defect types is accepted uniformly, so it can be accurate and efficient Register defective image materials as teacher materials. By learning based on the correct teacher data registered as described above, it is possible to create a completed learning model with higher determination accuracy.

<變形例> 再者,在所述實施例的缺陷類別分類的處理中,是進行藉由特徵量的缺陷類別分類之後(步驟S203),進行藉由學習完畢推論模型的缺陷類別分類(步驟S205),但亦可調換該些處理的順序。<Variation> Furthermore, in the processing of the defect category classification of the above embodiment, after the defect category classification by the feature amount (step S203), the defect category classification by the inference model after learning is completed (step S205), but also The order of these processes can be changed.

又,在所述實施例中,是使用藉由深層學習的方法而生成的推論模型,但亦可使用藉由其他機械學習的方法而生成的模型。此外,亦可結合藉由多個機械學習的方法而生成的模型來進行分類處理。In addition, in the above-mentioned embodiment, the inference model generated by the deep learning method is used, but a model generated by other mechanical learning methods may also be used. In addition, classification processing can also be performed in combination with models generated by multiple machine learning methods.

又,在所述實施例中,檢查管理裝置3是包含對缺陷類別分類後的同一缺陷圖像組的數量進行計數的缺陷類別計數部34的結構,但亦可取代此結構,而包括對缺陷類別分類前的同一缺陷圖像組進行計數的缺陷數量測量部。又,此時,亦可進而包括缺陷數量警告部,所述缺陷數量警告部判定所述缺陷數量測量部所算出的缺陷數量是否超過規定值,當超過時,經由輸出裝置將此情況通知給使用者。In addition, in the above-mentioned embodiment, the inspection management device 3 is a structure including a defect type counting unit 34 that counts the number of the same defect image group after the defect type is classified, but this structure may be replaced and include a defect A defect number measuring section that counts the same defect image group before category classification. In addition, at this time, a defect number warning unit may be further included, and the defect number warning unit determines whether the number of defects calculated by the defect number measurement unit exceeds a predetermined value, and when it exceeds, informs the use of the situation via an output device By.

又,在所述實施例中,照明系統的光源是全部照射可見光的構件,測定系統包含與光源的數量相同的數量的相機,但照明系統、測定系統的結構不一定限於此。例如,既可將光源的一部分或全部設為紅外線,亦可設為在測定系統的相機中設置分光稜鏡,可利用一台相機檢測多個不同波長的光的結構。又,亦可設為不獲取表面反射圖像、背面反射圖像、透過圖像中的任一者的結構。In the above-mentioned embodiment, the light source of the illumination system is a member that irradiates all visible light, and the measurement system includes the same number of cameras as the number of light sources. However, the configurations of the illumination system and the measurement system are not necessarily limited to this. For example, a part or all of the light source may be infrared light, or a spectroscopic lens may be provided in the camera of the measurement system, and a single camera may be used to detect a plurality of lights of different wavelengths. In addition, it may be configured not to acquire any of the front reflection image, the back reflection image, and the transmission image.

<其他> 所述實施例的說明僅為例示性地說明本發明,本發明並不限定於所述具體的形態。本發明在其技術思想的範圍內可進行各種變形。例如在所述各例中,是對照明系統及測定系統進行固定,而使被檢查物T移動,但亦可取代此結構,而使被檢查物T固定,使照明系統及測定系統移動。<Others> The descriptions of the above embodiments are merely illustrative for explaining the present invention, and the present invention is not limited to the specific forms. The present invention can be variously modified within the scope of its technical idea. For example, in the above examples, the illumination system and the measurement system are fixed to move the test object T, but instead of this structure, the test object T may be fixed and the illumination system and measurement system may be moved.

本發明的一個形態是一種用以檢查片材狀的被檢查物的檢查管理系統(1),其包括:外觀檢查部(2),包括藉由不同方式而拍攝所述被檢查物(T)的外觀的多個拍攝元件(221、222、223)、以及基於藉由所述多個拍攝元件所拍攝的各個圖像而檢測所述被檢查物的缺陷的檢測元件(231);儲存部,針對所述多種不同方式的拍攝元件,分別記錄拍攝了藉由所述檢測元件所檢測出的缺陷的缺陷圖像資料;以及檢查管理部(3),包括同一缺陷圖像合併元件(31),所述同一缺陷圖像合併元件(31)是將所述儲存部中所記錄的所述缺陷圖像資料的集合之中、拍攝了所述被檢查物中的同一缺陷的多個缺陷圖像資料,作為一個同一缺陷圖像組而處理。An aspect of the present invention is an inspection management system (1) for inspecting a sheet-shaped object to be inspected, which includes an appearance inspection unit (2) including photographing the object to be inspected (T) by different methods A plurality of imaging elements (221, 222, 223) of the external appearance, and a detection element (231) that detects defects of the object to be inspected based on the images captured by the plurality of imaging elements; the storage section, For the imaging elements of the various different modes, respectively record the defect image data of the defects detected by the detection element; and the inspection management part (3), including the same defect image merging element (31), The same defect image merging element (31) is a plurality of defect image materials that have captured the same defect in the inspection object from the collection of the defect image data recorded in the storage unit , As a group of the same defective image.

又,本發明的另一形態是一種管理片材狀的被檢查物的外觀檢查的方法,其包括:第一步驟(S101),藉由兩種以上的不同方式而拍攝所述被檢查物;第二步驟(S102),基於所述第一步驟中所拍攝的藉由多種不同的拍攝方式而獲得的被檢查物的圖像,檢測所述被檢查物的缺陷;第三步驟(S103),記錄拍攝了所述第二步驟中所檢測出的缺陷的缺陷圖像資料;第四步驟(S104),將所述第三步驟中所記錄的缺陷圖像資料的集合之中、拍攝了所述被檢查物中的同一缺陷的多個缺陷圖像資料,合併為一個同一缺陷圖像組;以及第五步驟(S105),按每個規定的檢查單位,對所述第四步驟中所合併的同一缺陷圖像組的數量進行計數,而算出缺陷數量。In addition, another aspect of the present invention is a method for managing the appearance inspection of a sheet-shaped object to be inspected, which includes: a first step (S101) of photographing the object to be inspected by two or more different methods; The second step (S102), based on the images of the object to be inspected obtained by the multiple different shooting methods captured in the first step, detects defects of the object to be inspected; the third step (S103), Record the defect image data of the defect detected in the second step; the fourth step (S104), among the collection of the defect image data recorded in the third step, the Multiple defect image materials of the same defect in the inspection object are merged into one same defect image group; and the fifth step (S105), according to each specified inspection unit, the merged in the fourth step The number of the same defective image group is counted, and the number of defects is calculated.

1、9‧‧‧檢查管理系統 2‧‧‧外觀檢查裝置(外觀檢查部) 3‧‧‧檢查管理裝置(檢查管理部) 23、93‧‧‧控制終端 31‧‧‧同一缺陷圖像合併部(同一缺陷圖像合併元件) 934‧‧‧同一缺陷圖像合併部 32、937‧‧‧缺陷類別分類部 33‧‧‧教師資料註冊部 34‧‧‧缺陷類別計數部 35‧‧‧缺陷類別缺陷數量警告部 211、911‧‧‧表面反射光源 212、912‧‧‧背面反射光源 213、913‧‧‧透過光源 221‧‧‧表面反射光相機(拍攝元件) 222‧‧‧背面反射光相機(拍攝元件) 223‧‧‧透過光相機(拍攝元件) 231‧‧‧缺陷檢測部(檢測元件) 931‧‧‧缺陷檢測部 232、932‧‧‧缺陷位置確定部 233、933‧‧‧缺陷圖像儲存部 922‧‧‧背面拍攝相機 935‧‧‧缺陷計數部 936‧‧‧缺陷數量警告部 921‧‧‧表面拍攝相機 S101~S108、S201~S207‧‧‧步驟 T‧‧‧被檢查物1, 9‧‧‧ inspection management system 2‧‧‧Appearance inspection device (Appearance Inspection Department) 3‧‧‧ Inspection management device (Inspection Management Department) 23.93‧‧‧Control terminal 31‧‧‧ The same defect image merging unit (the same defect image merging component) 934‧‧‧Defective Image Merging Department 32、937‧‧‧Defect classification department 33‧‧‧ Teacher Information Registration Department 34‧‧‧Defect category counting department 35‧‧‧ Defect Type Defect Quantity Warning Department 211、911‧‧‧Surface reflection light source 212, 912‧‧‧ Rear reflective light source 213、913‧‧‧Through the light source 221‧‧‧Surface reflection light camera (photographic element) 222‧‧‧Backside reflected light camera (photographic element) 223‧‧‧Through the light camera (photographic element) 231‧‧‧Defect Detection Department (Detection Element) 931‧‧‧Defect Inspection Department 232、932‧‧‧Defect position determination department 233, 933‧‧‧ Defective Image Storage Department 922‧‧‧rear camera 935‧‧‧Defect counting department 936‧‧‧ Defect Quantity Warning Department 921‧‧‧Surface shooting camera S101~S108, S201~S207 ‧‧‧ steps T‧‧‧ subject to be inspected

圖1是示意性地表示應用例的檢查管理系統的結構例的圖。 圖2是表示應用例的檢查管理系統中所進行的處理的流程的流程圖。 圖3是示意性地表示實施例的檢查管理系統的結構例的圖。 圖4是表示實施例中的缺陷類別的分類的處理的流程的流程圖。FIG. 1 is a diagram schematically showing a configuration example of an inspection management system of an application example. 2 is a flowchart showing the flow of processing performed in the inspection management system of the application example. FIG. 3 is a diagram schematically showing a configuration example of the inspection management system of the embodiment. FIG. 4 is a flowchart showing a flow of processing for classification of defect types in the embodiment.

1‧‧‧檢查管理系統 1‧‧‧ Inspection management system

2‧‧‧外觀檢查裝置(外觀檢查部) 2‧‧‧Appearance inspection device (appearance inspection department)

3‧‧‧檢查管理裝置(檢查管理部) 3‧‧‧ Inspection management device (Inspection Management Department)

23‧‧‧控制終端 23‧‧‧Control terminal

31‧‧‧同一缺陷圖像合併部(同一缺陷圖像合併元件) 31‧‧‧ The same defect image merging unit (the same defect image merging element)

32‧‧‧缺陷類別分類部 32‧‧‧Defect Category Classification Department

33‧‧‧教師資料註冊部 33‧‧‧ Teacher Information Registration Department

34‧‧‧缺陷類別計數部 34‧‧‧Defect category counting department

35‧‧‧缺陷類別缺陷數量警告部 35‧‧‧ Defect Type Defect Quantity Warning Department

211‧‧‧表面反射光源 211‧‧‧surface reflection light source

212‧‧‧背面反射光源 212‧‧‧Back reflection light source

213‧‧‧透過光源 213‧‧‧Through the light source

221‧‧‧表面反射光相機(拍攝元件) 221‧‧‧Surface reflection light camera (photographic element)

222‧‧‧背面反射光相機(拍攝元件) 222‧‧‧Back light camera (imaging element)

223‧‧‧透過光相機(拍攝元件) 223‧‧‧Through the light camera (imaging element)

231‧‧‧缺陷檢測部(檢測元件) 231‧‧‧Defect Inspection Department (Inspection Element)

232‧‧‧缺陷位置確定部 232‧‧‧Defect location determination department

233‧‧‧缺陷圖像儲存部 233‧‧‧Defective image storage

T‧‧‧被檢查物 T‧‧‧ subject to be inspected

Claims (16)

一種檢查管理系統,用以管理片材狀的被檢查物的檢查,所述檢查管理系統包括:外觀檢查部,包括藉由不同方式而拍攝所述被檢查物的外觀的多個拍攝元件、以及基於藉由所述多個拍攝元件所拍攝的各個圖像來檢測所述被檢查物的缺陷的檢測元件;儲存部,針對所述不同方式的所述多個拍攝元件,分別記錄拍攝了藉由所述檢測元件所檢測出的所述缺陷的缺陷圖像資料;以及檢查管理部,包括同一缺陷圖像合併元件,所述同一缺陷圖像合併元件是將所述儲存部中所記錄的所述缺陷圖像資料的集合之中、拍攝了所述被檢查物中的同一缺陷的多個所述缺陷圖像資料作為一個同一缺陷圖像組來處理。 An inspection management system for managing inspection of a sheet-shaped object to be inspected, the inspection management system includes: an appearance inspection unit including a plurality of imaging elements that photograph the appearance of the object to be inspected in different ways, and A detection element that detects the defect of the object to be inspected based on each image captured by the plurality of imaging elements; a storage unit, for the plurality of imaging elements of the different modes, records the Defect image data of the defect detected by the detection element; and an inspection management section including the same defect image merging element, the same defect image merging element is to record the Among the set of defective image materials, a plurality of the defective image materials in which the same defect in the object is photographed are treated as a same defective image group. 如申請專利範圍第1項所述的檢查管理系統,其中所述檢查管理部進而包括:缺陷計數元件,對所述同一缺陷圖像組的數量進行計數,並按每個規定的檢查單位,計算缺陷數量。 The inspection management system according to item 1 of the patent application scope, wherein the inspection management section further includes: a defect counting element that counts the number of the same defective image group and calculates for each prescribed inspection unit Number of defects. 如申請專利範圍第2項所述的檢查管理系統,其中進而包括:輸出部;且所述檢查管理部進而包括:缺陷數量警告元件,當算出的所述缺陷數量超過規定值時, 經由所述輸出部通知此情況。 The inspection management system as described in item 2 of the patent application scope, which further includes: an output unit; and the inspection management unit further includes: a defect number warning element, when the calculated number of defects exceeds a prescribed value, This situation is notified via the output section. 如申請專利範圍第1項所述的檢查管理系統,其中所述檢查管理部進而包括:缺陷類別分類元件,針對每個所述同一缺陷圖像組,對所述缺陷的類別進行分類。 The inspection management system according to item 1 of the patent application scope, wherein the inspection management section further includes: a defect category classification element that classifies the defect category for each of the same defect image groups. 如申請專利範圍第4項所述的檢查管理系統,其中所述檢查管理部進而包括:缺陷類別計數元件,針對藉由所述缺陷類別分類元件而分類的每個缺陷類別對所述同一缺陷圖像組的數量進行計數,並按每個規定的檢查單位,計算每個缺陷類別的缺陷數量。 The inspection management system as described in item 4 of the patent application scope, wherein the inspection management section further includes: a defect category counting element for each defect category classified by the defect category classification element to the same defect map Count the number of image groups, and calculate the number of defects for each defect type according to each specified inspection unit. 如申請專利範圍第5項所述的檢查管理系統,其中包括:輸出部;且所述檢查管理部進而包括缺陷類別缺陷數量警告元件,所述缺陷類別缺陷數量警告元件是在算出的每個缺陷類別的缺陷數量超過針對每個缺陷類別而規定的規定值時,經由所述輸出部通知此情況。 The inspection management system as described in item 5 of the patent application scope, which includes: an output section; and the inspection management section further includes a defect category defect quantity warning element, the defect category defect quantity warning element is calculated for each defect When the number of defects in a category exceeds a predetermined value defined for each defect category, this is notified via the output unit. 如申請專利範圍第4項至第6項中任一項所述的檢查管理系統,其中所述缺陷類別分類元件包括藉由深層學習的方法而學習完畢的推論元件。 The inspection management system according to any one of the items 4 to 6 of the patent application scope, wherein the defect classification component includes an inference component that has been learned through deep learning methods. 如申請專利範圍第7項所述的檢查管理系統,其中進而包括: 顯示部;且所述檢查管理部進而包括:深層學習用教師資料註冊元件,使所述顯示部,針對每個所述同一缺陷圖像組同時顯示構成所述同一缺陷圖像組的所述缺陷圖像資料、對使用者請求註冊與經顯示的所述缺陷圖像資料的組相對應的缺陷類別。 The inspection management system as described in item 7 of the patent application scope, which further includes: A display unit; and the inspection management unit further includes: a deep learning teacher data registration element that causes the display unit to simultaneously display the defects constituting the same defect image group for each of the same defect image group Image data, and a request to the user to register a defect category corresponding to the group of displayed defect image data. 如申請專利範圍第4項所述的檢查管理系統,其中當無法以規定的精度以上的準確度進行所述同一缺陷圖像組的缺陷類別的分類時,所述缺陷類別分類元件將關於所述同一缺陷圖像組的缺陷類別分類為不詳。 The inspection management system according to item 4 of the patent application scope, wherein when the classification of the defect category of the same defect image group cannot be performed with an accuracy higher than a prescribed accuracy, the defect category classification element The defect category of the same defect image group is classified as unknown. 如申請專利範圍第9項所述的檢查管理系統,其中所述缺陷類別分類元件針對將缺陷類別分類為不詳的所述同一缺陷圖像組,對使用者請求進行缺陷類別的分類。 The inspection management system according to item 9 of the patent application scope, wherein the defect category classification element requests the user to classify the defect category for the same defect image group that classifies the defect category as unknown. 如申請專利範圍第1項所述的檢查管理系統,其中藉由所述不同方式而拍攝所述被檢查物的外觀的所述多個拍攝元件包括:拍攝由經所述被檢查物的第一面反射的反射光所形成的圖像的表面拍攝元件、拍攝由經所述被檢查物的與所述第一面為相反側的第二面反射的反射光所形成的圖像的背面拍攝元件、以及拍攝由透過所述被檢查物的透過光所形成的圖像的透過光拍攝元件之中的任兩個以上。 The inspection management system according to item 1 of the patent application scope, wherein the plurality of imaging elements that photograph the appearance of the object to be inspected by the different methods include: Surface imaging element for an image formed by reflected light reflected from a surface, and a rear imaging element for imaging an image formed by reflected light reflected by a second surface of the object to be inspected opposite to the first surface And any two or more of the transmitted light imaging elements that image the image formed by the transmitted light passing through the object to be inspected. 如申請專利範圍第1項所述的檢查管理系統,其中 藉由所述不同方式而拍攝所述被檢查物的外觀的所述多個拍攝元件包括:第一波長拍攝元件,藉由第一波長的光而拍攝所述被檢查物;以及第二波長拍攝元件,藉由與所述第一波長不同的波長的光而拍攝所述被檢查物。 The inspection management system as described in item 1 of the patent application scope, in which The plurality of imaging elements that photograph the appearance of the object to be inspected by the different methods include: a first wavelength imaging element that photographs the object to be inspected with light of the first wavelength; and a second wavelength to photograph The element photographs the object to be inspected by light having a wavelength different from the first wavelength. 如申請專利範圍第1項所述的檢查管理系統,其中所述外觀檢查部還包括:缺陷位置確定元件,確定藉由所述檢測元件所檢測出的所述缺陷位於所述被檢查物的哪個部位,所述同一缺陷圖像合併元件是將所述儲存部中所記錄的所述缺陷圖像資料的集合之中,藉由所述缺陷位置確定元件確定的所述缺陷的位置相同的多個不同的所述缺陷圖像資料作為拍攝了同一缺陷的多個缺陷圖像資料。 The inspection management system according to item 1 of the patent application scope, wherein the visual inspection section further includes: a defect position determining element that determines which of the inspection objects the defect detected by the detecting element is located in Part, the same defect image merging element is a plurality of the same position of the defect identified by the defect position determining element in the set of the defect image data recorded in the storage section The different defect image materials are taken as multiple defect image materials that have captured the same defect. 一種檢查管理裝置,藉由不同的多種拍攝方式對片材狀的被檢查物的外觀進行拍攝並對所獲取的缺陷圖像資料進行處理,所述檢查管理裝置包括:同一缺陷圖像合併元件,自所述缺陷圖像資料的集合,將拍攝了所述被檢查物中的同一缺陷的多個所述缺陷圖像資料作為一個同一缺陷圖像組來處理。 An inspection management device that photographs the appearance of a sheet-like object to be inspected and processes the acquired defect image data by using various shooting methods. The inspection management device includes: the same defect image merging element, From the collection of defective image materials, a plurality of the defective image materials that have photographed the same defect in the inspection object are treated as a same defective image group. 一種檢查管理方法,管理片材狀的被檢查物的外觀檢查,所述檢查管理方法包括:第一步驟,藉由兩種以上的不同方式而拍攝所述被檢查物; 第二步驟,基於在所述第一步驟中所拍攝的藉由多種不同的拍攝方式而獲得的被檢查物的圖像,檢測所述被檢查物的缺陷;第三步驟,記錄拍攝了在所述第二步驟中所檢測出的所述缺陷的缺陷圖像資料;第四步驟,將在所述第三步驟中所記錄的所述缺陷圖像資料的集合之中、拍攝了所述被檢查物中的同一缺陷的多個所述缺陷圖像資料,合併為一個同一缺陷圖像組;以及第五步驟,按每個規定的檢查單位,對在所述第四步驟中所合併的所述同一缺陷圖像組的數量進行計數,算出缺陷數量。 An inspection management method for managing the appearance inspection of a sheet-shaped object to be inspected. The inspection management method includes: a first step of photographing the object to be inspected by two or more different methods; In the second step, based on the images of the object to be inspected obtained by a variety of different shooting methods taken in the first step, the defects of the object to be inspected are detected; Defect image data of the defect detected in the second step; in the fourth step, the inspected image is captured from the set of the defective image data recorded in the third step A plurality of the defect image materials of the same defect in the same defect are merged into a same defect image group; and the fifth step, according to each specified inspection unit, the merged said in the fourth step The number of the same defective image group is counted to calculate the number of defects. 如申請專利範圍第15項所述的檢查管理方法,其中進而包括:第六步驟,當在所述第五步驟中算出的所述缺陷數量超過規定值時,通知此情況。The inspection management method as described in item 15 of the patent application scope, which further includes: a sixth step, which is notified when the number of defects calculated in the fifth step exceeds a prescribed value.
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