TWI692831B - Treatment liquid supply device and degassing method - Google Patents

Treatment liquid supply device and degassing method Download PDF

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TWI692831B
TWI692831B TW107141204A TW107141204A TWI692831B TW I692831 B TWI692831 B TW I692831B TW 107141204 A TW107141204 A TW 107141204A TW 107141204 A TW107141204 A TW 107141204A TW I692831 B TWI692831 B TW I692831B
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chamber
processing liquid
valve
discharge
pipe
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TW201931497A (en
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楠原充也
柏山真人
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日商斯庫林集團股份有限公司
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02052—Wet cleaning only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking

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Abstract

本發明之課題在於可藉由控制排出管之壓力而提高脫氣效率。 朝腔室15取入稀釋劑後，在使開閉閥V1～V3關閉之狀態下，若藉由三通閥V4使腔室15之容積以變大之方式變化，則腔室15內減壓。因此，可使溶解於稀釋劑中之氣體朝腔室15內放出。進而，使壓力調整機構37作動並使開閉閥V3開通而進行脫氣，由於藉由壓力調整機構37使排出管9內較腔室15內降低壓力，因此將腔室15內之氣體通過排出管9順滑地排出。因此，可防止朝腔室15內放出之氣體再次溶於稀釋劑，而可提高脫氣效率。The object of the present invention is to improve the degassing efficiency by controlling the pressure of the discharge pipe. After the diluent is taken into the chamber 15 and the on-off valves V1 to V3 are closed, if the volume of the chamber 15 is changed to increase by the three-way valve V4, the pressure in the chamber 15 is reduced. Therefore, the gas dissolved in the diluent can be released into the chamber 15. Furthermore, the pressure adjustment mechanism 37 is operated to open the on-off valve V3 to perform degassing. Since the pressure adjustment mechanism 37 causes the pressure in the discharge pipe 9 to be lower than that in the chamber 15, the gas in the chamber 15 passes through the discharge pipe 9 Discharge smoothly. Therefore, the gas released into the chamber 15 can be prevented from being dissolved in the diluent again, and the degassing efficiency can be improved.

Description

處理液供給裝置及其脫氣方法Treatment liquid supply device and degassing method

本發明係關於一種對於半導體晶圓、液晶顯示器用基板、有機EL(Electroluminescence，電致發光)顯示裝置等FPD(Flat Panel Display，平板顯示器)用基板、光顯示器用基板、磁碟用基板、光磁碟用基板、光罩用基板、太陽能電池用基板(以下簡稱為基板)供給顯影液或稀釋劑等處理液之處理液供給裝置及其脫氣方法。 The present invention relates to a substrate for FPD (Flat Panel Display), a substrate for an optical display, a substrate for a magnetic disk, and a substrate for semiconductor wafers, substrates for liquid crystal displays, organic EL (Electroluminescence) displays, etc. A processing liquid supply device for supplying a processing liquid such as a developing solution or a diluent to a substrate for a magnetic disk, a substrate for a photomask, and a substrate for a solar cell (hereinafter simply referred to as a substrate) and a degassing method thereof.

先前，作為此種裝置有具備下述部分者，即：取入配管，其取入處理液；送出配管，其對於基板送出處理液；腔室，其自取入配管吸入處理液且朝送出配管送出處理液；隔膜，其在腔室內移動而使腔室之容積變化；排出管，其排出腔室內之空氣；及開閉閥，其等設置於取入配管與送出配管及排出管各者，控制處理液及氣體之流通(例如，參照專利文獻1)。 Previously, as such an apparatus, there are those that take in a pipe, which takes in a processing liquid; a sending pipe, which sends a processing liquid to a substrate; and a chamber, which sucks a processing liquid from the taking pipe and sends it toward the sending pipe Send the treatment liquid; the diaphragm, which moves in the chamber to change the volume of the chamber; the discharge pipe, which discharges the air in the chamber; and the opening and closing valve, which are provided in each of the intake pipe, the delivery pipe, and the discharge pipe to control Flow of processing liquid and gas (for example, refer to Patent Document 1).

在該裝置中，在通過取入配管朝腔室新導入處理液時，於處理液中混入有空氣。若將混入有空氣之處理液自送出配管朝基板供給，則因溶解於處理液中之空氣而在處理上產生不良狀況。因此，為了不產生該不良狀況，而進行自腔室內之處理液去除空氣之脫氣。該脫氣首先使隔膜朝下方 移動而擴大腔室之容積從而將腔室內減壓。藉此，將溶解於處理液中之空氣自處理液朝腔室內放出。其次，使隔膜朝上方移動而縮小腔室之容積，且使排出管之開閉閥開通。藉此，將腔室內之空氣通過排出管排出。 In this device, when the processing liquid is newly introduced into the chamber through the intake pipe, air is mixed into the processing liquid. If the processing liquid mixed with air is supplied to the substrate from the delivery pipe, the air dissolved in the processing liquid may cause a problem in processing. Therefore, in order not to cause the defect, deaeration is performed to remove air from the processing liquid in the chamber. This degassing first moves the diaphragm downward Move to expand the volume of the chamber to decompress the chamber. By this, the air dissolved in the treatment liquid is released into the chamber from the treatment liquid. Next, the diaphragm is moved upward to reduce the volume of the chamber, and the on-off valve of the discharge pipe is opened. By this, the air in the chamber is discharged through the discharge pipe.

[先前技術文獻] [Prior Technical Literature] [專利文獻] [Patent Literature] [專利文獻1] [Patent Literature 1]

日本專利第3561438號公報(圖5、圖7) Japanese Patent No. 3561438 (Figures 5 and 7)

然而，在具有如此之構成之先前例之情形下，存在如下述之問題。 However, in the case of the previous example having such a configuration, there are problems as described below.

亦即，先前之裝置由於係在使隔膜移動而減小腔室之容積後使排出管之開閉閥開通，因此雖然為短時間但在腔室內形成正壓。因此，有自處理液朝腔室內放出之空氣再次溶於處理液之虞，而存在脫氣效率降低之虞。 That is, in the previous device, since the diaphragm was moved to reduce the volume of the chamber, the on-off valve of the discharge pipe was opened, so a positive pressure was formed in the chamber although it was a short time. Therefore, the air released from the treatment liquid into the chamber may be dissolved again in the treatment liquid, and the degassing efficiency may be lowered.

再者，為了消除如此之不良狀況，而考量在腔室內未形成正壓之狀態下，開通排出管之開閉閥，但產生空氣自排出管朝腔室內逆流，而無法排出腔室內之空氣之另外之問題。進而，為了防止該不利，而考量於排出管安裝止回閥，但由於有在止回閥產生之微粒混入處理液之虞，因此不現實。 In addition, in order to eliminate such undesirable conditions, it is considered to open the opening and closing valve of the discharge pipe under the condition that the positive pressure is not formed in the chamber, but the air generated from the discharge pipe flows backward into the chamber, and the air in the chamber cannot be discharged. Question. Furthermore, in order to prevent this disadvantage, it is considered to install a check valve in the discharge pipe. However, since particles generated in the check valve may be mixed into the processing liquid, it is not realistic.

本發明係鑒於如此之事態而完成者，目的在於提供一種可藉由控制排出管之壓力而提高脫氣效率之處理液供給裝置及其脫氣方法。 The present invention has been completed in view of such a situation, and an object of the present invention is to provide a processing liquid supply device and a degassing method that can improve degassing efficiency by controlling the pressure of a discharge pipe.

本發明為了達成如此之目的，而採用如下之構成。 In order to achieve such an object, the present invention adopts the following configuration.

亦即，技術方案1記載之發明係一種供給用於處理基板之處理液之處理液供給裝置，且其特徵在於具備：泵，該泵具備：腔室，其用於儲存處理液；取入口，其與前述腔室連通而朝前述腔室取入處理液；送出口，其與前述腔室連通，送出前述腔室之處理液；排出口，其與前述腔室連通，排出前述腔室之氣體；及腔室驅動部，其為了使處理液自前述取入口朝前述腔室取入，且使處理液通過前述送出口自前述腔室送出，並使氣體自前述排出口排出，而使前述腔室之容積變化；取入配管，其將儲存處理液之處理液供給源與前述取入口連通連接；取入開閉閥，其控制處理液於前述取入配管中之流通；送出配管，其連通連接於前述送出口，將前述腔室內之處理液朝前述基板供給；送出開閉閥，其控制處理液於前述送出配管中之流通；排出管，其連通連接於前述排出口，排出前述腔室內之氣體；排出開閉閥，其控制氣體於前述排出管中之流通；以及壓力調整機構，其將前述排出管內之壓力調整為較前述腔室內之壓力為低之壓力；且，朝前述腔室取入處理液後，在使前述取入開閉閥、前述送出開閉閥、前述排出開閉閥關閉之狀態下，藉由前述腔室驅動部使前述腔室之容積以變大之方式變化，使前述壓力調整機構作動並使前述排出開閉閥開通而進行脫氣。 That is, the invention described in claim 1 is a processing liquid supply device that supplies a processing liquid for processing a substrate, and is characterized by including: a pump including: a chamber for storing the processing liquid; an inlet, It communicates with the chamber and takes in the processing liquid toward the chamber; a delivery port, which communicates with the chamber and sends out the treatment liquid of the chamber; a discharge port, which communicates with the chamber and discharges the gas from the chamber ; And a chamber drive section, in order to cause the processing liquid to be taken from the inlet toward the chamber, and the processing liquid is sent out from the chamber through the delivery port, and the gas is discharged from the discharge port, so that the chamber The volume of the chamber changes; the intake pipe connects the processing liquid supply source storing the processing liquid to the aforementioned intake port; the intake on-off valve controls the flow of the processing liquid in the aforementioned intake pipe; the delivery pipe is connected to the connection At the delivery port, the processing liquid in the chamber is supplied to the substrate; a delivery on-off valve, which controls the circulation of the treatment liquid in the delivery pipe; a discharge tube, which is connected to the discharge port and discharges the gas in the chamber A discharge on-off valve, which controls the flow of gas in the discharge pipe; and a pressure adjustment mechanism, which adjusts the pressure in the discharge pipe to a pressure lower than the pressure in the chamber; and, takes in the chamber After processing the liquid, the volume of the chamber is changed by the chamber driving unit in a state where the inlet opening and closing valve, the delivery opening and closing valve, and the outlet opening and closing valve are closed, and the pressure is adjusted The mechanism operates to open the discharge on-off valve to perform deaeration.

[作用/效果]根據技術方案1記載之發明，在朝腔室取入處理液後，在 使取入開閉閥、送出開閉閥、排出開閉閥關閉之狀態下，若藉由腔室驅動部使腔室之容積以變大之方式變化，則將腔室內減壓。因此，可使溶解於處理液中之氣體朝腔室內放出。進而，使壓力調整機構作動且使排出開閉閥開通而進行脫氣，由於藉由壓力調整機構使排出管內較腔室內降低壓力，因此無需在腔室內形成正壓而將腔室內之氣體通過排出管順滑地排出。因此，可防止朝腔室內放出之氣體再次溶於處理液，而可提高脫氣效率。 [Function/Effect] According to the invention described in claim 1, after the processing liquid is taken into the chamber, the When the intake opening/closing valve, the delivery opening/closing valve, and the discharge opening/closing valve are closed, if the volume of the chamber is changed to become larger by the chamber driving section, the pressure in the chamber is reduced. Therefore, the gas dissolved in the treatment liquid can be released into the chamber. Furthermore, the pressure adjustment mechanism is actuated and the discharge on-off valve is opened for degassing. Since the pressure adjustment mechanism reduces the pressure in the discharge pipe compared with the chamber, there is no need to form a positive pressure in the chamber to pass the gas in the chamber through the discharge The tube drains smoothly. Therefore, the gas released into the chamber can be prevented from being dissolved in the treatment liquid again, and the degassing efficiency can be improved.

又，在本發明中，前述壓力調整機構較佳為吸氣器(技術方案2)。 In addition, in the present invention, the pressure adjustment mechanism is preferably an aspirator (claim 2).

由於吸氣器無可動部分，因此可以簡易之構成對排出管進行減壓。 Since the aspirator has no moving parts, the discharge pipe can be decompressed in a simple configuration.

又，在本發明中，前述壓力調整機構較佳為在前述排出開閉閥開通之前作動(技術方案3)。 Furthermore, in the present invention, it is preferable that the pressure adjustment mechanism is operated before the discharge on-off valve is opened (claim 3).

由於使壓力調整機構不進行作動直至排出開閉閥開通，因此可抑制使壓力調整機構作動之資源之消耗。 Since the pressure adjustment mechanism is not operated until the discharge on-off valve is opened, the consumption of resources for operating the pressure adjustment mechanism can be suppressed.

又，在本發明中，前述泵之前述腔室較佳為具備隔膜(技術方案4)。 Furthermore, in the present invention, the chamber of the pump is preferably provided with a diaphragm (claim 4).

藉由將隔膜變化而可將處理液朝腔室取入或將處理液自腔室排出。 By changing the diaphragm, the processing liquid can be taken into the chamber or discharged from the chamber.

又，在本發明中，前述排出管較佳為具備檢測處理液中之氣泡之氣 泡感測器，且，開始脫氣後，在前述氣泡感測器檢測不出氣泡之時點關閉前述排出開閉閥(技術方案5)。 Furthermore, in the present invention, it is preferable that the discharge pipe is provided with gas for detecting bubbles in the processing liquid The bubble sensor, and after starting the degassing, close the discharge on-off valve at the point when the bubble sensor cannot detect the bubble (Technical Solution 5).

由於在自腔室排出氣泡後，自腔室朝排出管吸入處理液，因此藉由在此時點關閉排出開閉閥，而可抑制伴隨著脫氣之處理液之消耗。 After the bubbles are discharged from the chamber, the treatment liquid is sucked into the discharge pipe from the chamber. Therefore, by closing the discharge opening and closing valve at this point, the consumption of the treatment liquid accompanying the degassing can be suppressed.

又，技術方案6記載之發明係一種供給用於處理基板之處理液的處理液供給裝置之脫氣方法，其特徵在於實施如下步驟：藉由使儲存處理液之腔室之容積變化之腔室驅動部，使前述腔室之容積以變大之方式變化，而自連通連接於前述腔室之取入口之取入配管朝前述腔室內取入處理液；在關閉前述取入配管、與自前述腔室朝基板送出處理液之送出配管之狀態下，藉由前述腔室驅動部使前述腔室之容積以進一步變大之方式變化；將自前述腔室排出氣體之排出管內調整為低於前述腔室內之壓力；及使前述腔室與前述排出管連通而進行脫氣。 Furthermore, the invention described in claim 6 is a degassing method of a processing liquid supply device for supplying a processing liquid for processing a substrate, characterized by performing the following steps: by changing the volume of the chamber storing the processing liquid The driving part changes the volume of the chamber to increase, and the processing liquid is drawn into the chamber from the intake pipe connected to the intake port of the chamber; when the intake pipe is closed, the In a state where the chamber sends out the processing liquid to the substrate, the volume of the chamber is further increased by the chamber driving part; the inside of the exhaust pipe that exhausts the gas from the chamber is adjusted to be lower than Pressure in the chamber; and degassing by connecting the chamber with the discharge pipe.

[作用．效果]根據技術方案6記載之發明，在朝腔室取入處理液後，藉由腔室驅動部使腔室之容積以進一步變大之方式變化。藉此，由於將腔室內減壓，因此可使溶解於處理液中之氣體朝腔室內放出。其後，在進行脫氣時，使腔室與排出管連通，由於將排出管內之壓力設為低於腔室內之壓力，因此無需在腔室內形成正壓而將腔室內之氣體通過排出管順滑地排出。因此，可防止朝腔室內放出之氣體再次溶於處理液，而可提高脫氣效率。 [effect. [Effect] According to the invention described in claim 6, after the processing liquid is taken into the chamber, the volume of the chamber is changed by the chamber driving unit to further increase. Thereby, since the pressure in the chamber is reduced, the gas dissolved in the processing liquid can be released into the chamber. After that, when degassing, the chamber and the discharge pipe are communicated. Since the pressure in the discharge pipe is lower than the pressure in the chamber, there is no need to form a positive pressure in the chamber to pass the gas in the chamber through the discharge pipe Discharge smoothly. Therefore, the gas released into the chamber can be prevented from being dissolved in the treatment liquid again, and the degassing efficiency can be improved.

根據本發明之處理液供給裝置，在朝腔室取入處理液後，在使取入開閉閥、送出開閉閥、排出開閉閥關閉之狀態下，若藉由腔室驅動部使腔室之容積以變大之方式變化，則將腔室內減壓。因此，可使溶解於處理液中之氣體朝腔室內放出。進而，使壓力調整機構作動且使排出開閉閥開通而進行脫氣，由於藉由壓力調整機構使排出管內較腔室內降低壓力，因此無需在腔室內形成正壓而將腔室內之氣體通過排出管順滑地排出。因此，可防止朝腔室內放出之氣體再次溶於處理液，而可提高脫氣效率。 According to the processing liquid supply device of the present invention, after the processing liquid is taken into the chamber, the volume of the chamber is controlled by the chamber driving unit in a state where the intake on-off valve, the delivery on-off valve, and the discharge on-off valve are closed. If it changes in a larger way, the chamber is decompressed. Therefore, the gas dissolved in the treatment liquid can be released into the chamber. Furthermore, the pressure adjustment mechanism is actuated and the discharge on-off valve is opened for degassing. Since the pressure adjustment mechanism reduces the pressure in the discharge pipe compared with the chamber, there is no need to form a positive pressure in the chamber to pass the gas in the chamber through the discharge The tube drains smoothly. Therefore, the gas released into the chamber can be prevented from being dissolved in the treatment liquid again, and the degassing efficiency can be improved.

1:處理液供給裝置 1: Treatment liquid supply device

1A:處理液供給裝置 1A: Treatment liquid supply device

3:泵 3: pump

3A:泵 3A: Pump

5:取入配管 5: Take in the piping

7:送出配管 7: Send out the piping

9:排出管 9: discharge pipe

11:處理液容器/處理液供給源 11: Processing liquid container/processing liquid supply source

13:泵本體 13: Pump body

15:腔室 15: chamber

17:缸體 17: cylinder

17A:缸體 17A: cylinder

19:隔膜 19: diaphragm

21:取入口 21: Take the entrance

23:送出口 23: Delivery

25:排出口 25: discharge port

27:吸排口 27: Suction outlet

29:過濾器 29: filter

31:過濾器 31: filter

33:回收容器 33: Recycling container

35:氣泡感測器 35: bubble sensor

37:壓力調整機構 37: Pressure adjustment mechanism

39:吸排管 39: Suction pipe

51:旋轉卡盤 51: rotating chuck

53:電動馬達 53: Electric motor

55:防飛濺杯 55: Splash proof cup

57:噴嘴 57: Nozzle

59:流量調整閥 59: Flow adjustment valve

61:馬達 61: Motor

63:線圈部 63: Coil part

65:驅動軸 65: drive shaft

BL1:第1下降位置 BL1: 1st down position

BL2:第2下降位置 BL2: 2nd down position

TL:上升位置 TL: Ascent position

t1~t9:時點 t1~t9: time

V1:開閉閥/取入開閉閥 V1: On-off valve/access on-off valve

V2:開閉閥/送出開閉閥 V2: On-off valve/sending on-off valve

V3:開閉閥/排出開閉閥 V3: On-off valve/discharge on-off valve

V4:三通閥 V4: Three-way valve

W:基板 W: substrate

圖1係顯示處理液供給裝置之概略構成之方塊圖。 FIG. 1 is a block diagram showing a schematic configuration of a processing liquid supply device.

圖2係顯示動作之一例之時序圖。 Fig. 2 is a timing chart showing an example of the operation.

圖3係顯示具備處理液供給裝置之基板處理裝置之概略構成圖。 3 is a schematic configuration diagram showing a substrate processing apparatus provided with a processing liquid supply device.

圖4係顯示處理液供給裝置之變化例之概略構成之方塊圖。 4 is a block diagram showing a schematic configuration of a modified example of the processing liquid supply device.

<處理液供給裝置> <Processing liquid supply device>

以下，參照圖式針對本發明之一實施例進行說明。 Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

圖1係顯示處理液供給裝置之概略構成之方塊圖。 FIG. 1 is a block diagram showing a schematic configuration of a processing liquid supply device.

實施例之處理液供給裝置1具備：泵3、取入配管5、送出配管7、排出管9、及處理液容器11。 The processing liquid supply device 1 of the embodiment includes a pump 3, an intake pipe 5, a delivery pipe 7, a discharge pipe 9, and a processing liquid container 11.

本實施例之泵3為例如隔膜式泵。具體而言，泵3具備：泵本體13、腔室15、缸體17、隔膜19、取入口21、送出口23、排出口25、及吸排口27。泵本體13之外觀形狀呈筒狀，在用於儲存處理液之內部空間即腔室15之下方，將缸體17相對於腔室15可升降地設置。於缸體17之上表面固著隔膜19之下表面。又，隔膜19之外周緣固定於腔室15之特定高度之內周面。取入口21與送出口23及排出口25係以在泵本體13與腔室15連通之方式形成。 The pump 3 of this embodiment is, for example, a diaphragm pump. Specifically, the pump 3 includes a pump body 13, a chamber 15, a cylinder 17, a diaphragm 19, an inlet 21, a delivery port 23, a discharge port 25, and a suction and discharge port 27. The pump body 13 has a cylindrical shape, and the cylinder body 17 can be moved up and down relative to the chamber 15 below the chamber 15 which is an internal space for storing the processing liquid. The lower surface of the diaphragm 19 is fixed to the upper surface of the cylinder 17. In addition, the outer periphery of the diaphragm 19 is fixed to the inner periphery of the chamber 15 at a specific height. The intake port 21, the delivery port 23, and the discharge port 25 are formed so that the pump body 13 and the chamber 15 communicate with each other.

取入口21朝腔室15取入處理液。於該取入口21，連通連接有取入配管5之一端側。取入配管5之另一端側連通連接於儲存處理液之處理液容器11。若處理液容器11將內容量份額之處理液供給完畢，則更換為其他處理液容器11。即，處理液容器11之取入配管5係拆裝自如地構成。取入配管5自處理液容器11側起具備過濾器29及開閉閥V1。過濾器29去除自處理液容器11送出而至之處理液中之微粒等。開閉閥V1控制處理液於取入配管5中之流通。 The inlet 21 takes in the processing liquid toward the chamber 15. The intake port 21 is connected to one end side of the intake pipe 5. The other end side of the intake pipe 5 is connected to the processing liquid container 11 storing the processing liquid. After the processing liquid container 11 has supplied the processing liquid with the content amount, the other processing liquid container 11 is replaced. That is, the intake pipe 5 of the processing liquid container 11 is detachably configured. The intake pipe 5 includes a filter 29 and an on-off valve V1 from the processing liquid container 11 side. The filter 29 removes particles and the like in the processing liquid sent from the processing liquid container 11. The on-off valve V1 controls the flow of the processing liquid through the intake pipe 5.

再者，上述之處理液容器11相當於本發明之「處理液供給源」。 In addition, the processing liquid container 11 mentioned above corresponds to the "processing liquid supply source" of this invention.

送出口23送出儲存於腔室15之處理液。於該送出口23連通連接有送出配管7之一端側。送出配管7之另一端側連通連接於調整流量之流量調整閥及用於供給處理液之噴嘴(未圖示)等。送出配管7自送出口23側起具備過濾器31及開閉閥V2。過濾器31去除自腔室15送出而至之處理液中之微 粒等。開閉閥V2控制處理液於送出配管7中之流通。 The delivery port 23 delivers the processing liquid stored in the chamber 15. One end side of the delivery pipe 7 is connected and connected to the delivery port 23. The other end side of the delivery pipe 7 communicates with a flow rate adjustment valve that adjusts the flow rate, a nozzle (not shown) for supplying the processing liquid, and the like. The delivery pipe 7 includes a filter 31 and an on-off valve V2 from the delivery outlet 23 side. The filter 31 removes fines from the processing liquid sent from the chamber 15 Grains. The on-off valve V2 controls the flow of the processing liquid in the delivery pipe 7.

排出口25排出腔室15內之氣體。於該排出口25連通連接有排出管9之一端側。於排出管9之另一端側連通連接於回收容器33。回收容器33將自排出管9排出之空氣等之氣體與處理液之液滴等一起回收。排出管9自排出口25側起具備氣泡感測器35、開閉閥V3、及壓力調整機構37。開閉閥V3控制氣體等於排出管9中之流通。 The exhaust port 25 exhausts the gas in the chamber 15. One end side of the discharge pipe 9 is connected and connected to the discharge port 25. The other end side of the discharge pipe 9 is connected and connected to the recovery container 33. The recovery container 33 collects gas such as air discharged from the discharge pipe 9 together with droplets of the processing liquid and the like. The discharge pipe 9 includes a bubble sensor 35, an on-off valve V3, and a pressure adjustment mechanism 37 from the discharge port 25 side. The on-off valve V3 controls the gas to flow through the discharge pipe 9.

氣泡感測器35檢測在排出管9中流通之流體中包含含有空氣等氣體之氣泡。具體而言，氣泡感測器35例如對在排出管9內流通之流體照射超音波，與液體之情形進行比較，若存在氣體即氣泡則傳播效率降低而接收強度降低，藉此檢測氣泡是否存在。又，氣泡感測器35亦可為利用微波之多普勒效應之差異、流體之折射率之差異者。 The bubble sensor 35 detects that the fluid flowing through the discharge pipe 9 contains bubbles containing gas such as air. Specifically, the bubble sensor 35, for example, irradiates the fluid flowing in the discharge pipe 9 with ultrasound, and compared with the case of a liquid, if there is a gas, that is, a bubble, the propagation efficiency decreases and the reception intensity decreases, thereby detecting the presence of the bubble . In addition, the bubble sensor 35 may also utilize differences in the Doppler effect of microwaves and differences in the refractive index of fluids.

再者，上述之開閉閥V1相當於本發明之「取入開閉閥」，開閉閥V2相當於本發明之「送出開閉閥」，開閉閥V3相當於本發明之「排出開閉閥」。 In addition, the above-mentioned on-off valve V1 corresponds to the "take-in on-off valve" of the present invention, the on-off valve V2 corresponds to the "sending on-off valve" of the present invention, and the on-off valve V3 corresponds to the "discharge on-off valve" of the present invention.

壓力調整機構37在進行後述之脫氣時，以排出管9內之壓力低於腔室15內之壓力之方式調整排出管9內之壓力。作為壓力調整機構37，例如可舉出吸氣器。吸氣器利用純水或空氣藉由文丘裡效應使壓力降低。壓力調整機構37進行減壓時之壓力係以低於脫氣時之排出管9之壓力之方式預先調整而設定。 The pressure adjustment mechanism 37 adjusts the pressure in the discharge pipe 9 so that the pressure in the discharge pipe 9 is lower than the pressure in the chamber 15 when performing the degassing described later. As the pressure adjusting mechanism 37, for example, an aspirator can be mentioned. The aspirator uses pure water or air to reduce the pressure through the Venturi effect. The pressure when the pressure adjusting mechanism 37 performs decompression is set in advance so as to be lower than the pressure of the discharge pipe 9 during degassing.

吸排口27形成於夾著缸體17之與腔室15之相反側抵接之泵本體13。於該吸排口27連通連接有吸排管39之一端側。於吸排管39之另一端側連通連接有三通閥V4之共通側。於三通閥V4之兩個切換側，分別連通連接有空氣供給源與吸引源。若將三通閥V4切換為空氣供給源側，則由於於吸排口27被供給有空氣，因此缸體17上升，而減小腔室15之容積。另一方面，若三通閥V4切換為吸引源側，則由於空氣被自吸排口27排出，因此缸體17下降，而擴大腔室15之容積。泵3可如此般使缸體17升降。例如，其高度位置可自第1下降位置BL1移動至上升位置TL。此處，將自第1下降位置BL1上升特定距離之位置設為第2下降位置BL2。 The suction/discharge port 27 is formed in the pump body 13 that is in contact with the opposite side of the chamber 15 and sandwiches the cylinder 17. One end side of the suction and discharge tube 39 is connected and connected to the suction and discharge port 27. A common side of the three-way valve V4 is connected and connected to the other end side of the suction and discharge pipe 39. On two switching sides of the three-way valve V4, an air supply source and a suction source are connected and connected respectively. When the three-way valve V4 is switched to the air supply source side, since air is supplied to the suction and discharge port 27, the cylinder 17 rises, and the volume of the chamber 15 is reduced. On the other hand, when the three-way valve V4 is switched to the suction source side, air is discharged from the suction discharge port 27, so the cylinder 17 is lowered, and the volume of the chamber 15 is enlarged. The pump 3 can raise and lower the cylinder 17 in this way. For example, the height position can be moved from the first down position BL1 to the up position TL. Here, the position that rises a certain distance from the first descending position BL1 is set as the second descending position BL2.

其次，參照圖2，針對上述之構成之處理液供給裝置1之動作進行說明。再者，圖2係顯示動作之一例之時序圖。 Next, the operation of the processing liquid supply device 1 configured as described above will be described with reference to FIG. 2. Furthermore, FIG. 2 is a timing chart showing an example of the operation.

此處，例如，以儲存稀釋劑作為處理液之處理液容器11變空，而更換為新的處理液容器11進行說明。在該情形下，自變空之處理液容器11卸下取入配管5，將取入配管5安裝於新的處理液容器11。此時，無法避免於取入配管5混入有氣泡。又，於處理液容器11之稀釋劑中原本溶解有某程度之空氣等之氣體。再者，在初始狀態下，設為泵3供給完畢腔室15內之全部之稀釋劑，且缸體17位於上升位置TL。 Here, for example, the processing liquid container 11 in which the diluent is stored as the processing liquid is emptied and replaced with a new processing liquid container 11 will be described. In this case, the intake pipe 5 is removed from the emptied processing liquid container 11, and the intake pipe 5 is attached to a new processing liquid container 11. At this time, it is unavoidable that air bubbles are mixed into the intake pipe 5. In addition, a certain amount of gas such as air is originally dissolved in the diluent of the processing liquid container 11. In addition, in the initial state, it is assumed that the pump 3 has supplied all the diluent in the chamber 15 and the cylinder 17 is located at the rising position TL.

首先，在0時點，使開閉閥V2、V3關閉，且使開閉閥V1開通。然後，在該狀態下，將三通閥V4之切換側切換為吸引源。藉此，缸體17自 上升位置TL開始下降，且稀釋劑自處理液容器11通過取入配管5而被朝腔室15取入。在缸體17之高度位置到達第2下降位置BL2之t1時點，使開閉閥V1關閉。 First, at 0 o'clock, the on-off valves V2 and V3 are closed, and the on-off valve V1 is opened. Then, in this state, the switching side of the three-way valve V4 is switched to the suction source. By this, the cylinder 17 The rising position TL starts to fall, and the diluent is taken into the chamber 15 from the processing liquid container 11 through the taking-in pipe 5. When the height position of the cylinder 17 reaches the second descending position BL2 at t1, the on-off valve V1 is closed.

再者，0時點至t1時點相當於本發明之「取入步驟」。 In addition, from 0 o'clock to t1 o'clock corresponds to the "fetching step" of the present invention.

在腔室15保持閉塞之狀態不變下，缸體17朝向第1下降位置BL1緩慢地持續下降。因此，由於腔室15之容積進一步被擴大而腔室15形成減壓狀態，因此溶解在取入於腔室15之稀釋劑之氣體朝腔室15放出。該狀態被維持至t3時點。 With the chamber 15 kept closed, the cylinder 17 continues to descend slowly toward the first descending position BL1. Therefore, since the volume of the chamber 15 is further expanded and the chamber 15 is in a decompressed state, the gas dissolved in the diluent taken in the chamber 15 is released toward the chamber 15. This state is maintained until t3.

再者，t1時點至t3時點相當於本發明之「使其變化之步驟」。 Furthermore, t1 to t3 corresponds to the "step of changing" of the present invention.

其次，在較缸體17到達第1下降位置BL1之t3時點若干早之t2時點，使壓力調整機構37作動。藉此，將排出管9內減壓至較腔室15之壓力低之壓力。進而，在自t2時點起經過特定時間後之t3時點，使開閉閥V3開通。藉此，朝腔室15放出之氣體被自排出管9排出且朝回收容器33排出。此時，氣泡感測器35檢測含有氣體之氣泡，若腔室15內之氣體被排出完畢，則腔室15內之稀釋劑與氣體一起被吸出，而在t4時點，最終氣泡變無而僅排出稀釋劑。如是，氣泡感測器33成為不檢測氣泡之非檢測。 Next, the pressure adjusting mechanism 37 is actuated at a time t2 that is slightly earlier than t3 when the cylinder 17 reaches the first lowering position BL1. As a result, the pressure in the discharge pipe 9 is reduced to a pressure lower than that of the chamber 15. Furthermore, at time t3 after a certain time has passed from time t2, the on-off valve V3 is opened. As a result, the gas released into the chamber 15 is discharged from the discharge pipe 9 and discharged toward the recovery container 33. At this time, the bubble sensor 35 detects bubbles containing gas, and if the gas in the chamber 15 is exhausted, the diluent in the chamber 15 is sucked out together with the gas, and at t4, the final bubbles become nothing but only Drain the thinner. If so, the bubble sensor 33 becomes a non-detection that does not detect bubbles.

在氣泡感測器33成為非檢測之t4時點，使開閉閥V3關閉。其後，在t5時點使壓力調整機構37非作動。再者，雖省略圖示，但缸體17藉由脫氣 處理而因減壓而移動至自第1下降位置BL1上升若干之位置。 At time t4 when the bubble sensor 33 becomes non-detected, the on-off valve V3 is closed. Thereafter, the pressure adjustment mechanism 37 is deactivated at t5. Furthermore, although the illustration is omitted, the cylinder 17 is degassed The process moves to a position slightly raised from the first lowering position BL1 due to decompression.

再者，t2時點至t5時點相當於本發明之「調整之步驟」，t3時點至t4時點相當於本發明之「脫氣之步驟」。 Furthermore, t2 to t5 corresponds to the "adjustment step" of the present invention, and t3 to t4 corresponds to the "degassing step" of the present invention.

如上述般若稀釋劑之脫氣結束，則例如在成為稀釋劑之供給時序之t6時點，進行如下述之供給動作。即，在t6時點，將三通閥V4之切換側切換於空氣供給源側且使開閉閥V2開通。藉此，自送出配管7供給稀釋劑。然後，維持此情形直至腔室15內之稀釋劑之供給量達到處理所需之特定量之t7時點。在t7時點，使開閉閥V2關閉，且將三通閥V4之切換側切換於吸引源。然後，在成為再次供給稀釋劑之時序之t8時點，重複進行上述之供給動作。該供給動作在腔室15內之稀釋劑變為達不到供給所需之量之時點而停止。該檢測可根據缸體17之高度位置而判斷。 When the degassing of the diluent is completed as described above, for example, at the time t6 when the supply timing of the diluent becomes, the following supply operation is performed. That is, at t6, the switching side of the three-way valve V4 is switched to the air supply source side, and the on-off valve V2 is opened. By this, the diluent is supplied from the delivery pipe 7. Then, this situation is maintained until the supply amount of the diluent in the chamber 15 reaches the t7 point in time when the specific amount required for the treatment is reached. At t7, the on-off valve V2 is closed, and the switching side of the three-way valve V4 is switched to the suction source. Then, at t8 when it becomes the timing of supplying the diluent again, the supply operation described above is repeated. This supply operation is stopped when the diluent in the chamber 15 becomes insufficient to supply the required amount. The detection can be judged based on the height position of the cylinder 17.

然後，在再次自處理液容器11將稀釋劑供給至腔室15後，如上述般進行脫氣處理並進行供給動作。 Then, after supplying the diluent from the processing liquid container 11 to the chamber 15 again, the deaeration process is performed as described above and the supply operation is performed.

根據本實施例，在朝腔室15取入稀釋劑後，在使開閉閥V1~V3關閉之狀態下，若藉由三通閥V4使腔室15之容積以變大之方式變化，則將腔室15內減壓。因此，可使溶解於稀釋劑中之氣體朝腔室15內放出。進而，使壓力調整機構37作動且使開閉閥V3開通而進行脫氣，由於藉由壓力調整機構37使排出管9內較腔室15內降低壓力，因此無需在腔室15內形成正壓而將腔室15內之氣體通過排出管9順滑地排出。因此，可防止朝腔 室15內放出之氣體再次溶於稀釋劑，而可提高脫氣效率。 According to the present embodiment, after the diluent is taken into the chamber 15 and the on-off valves V1 to V3 are closed, if the volume of the chamber 15 is changed to become larger by the three-way valve V4, then The pressure in the chamber 15 is reduced. Therefore, the gas dissolved in the diluent can be released into the chamber 15. Furthermore, the pressure adjustment mechanism 37 is actuated and the on-off valve V3 is opened for degassing. Since the pressure adjustment mechanism 37 causes the pressure in the discharge pipe 9 to be lower than that in the chamber 15, it is not necessary to form a positive pressure in the chamber 15. The gas in the chamber 15 is smoothly discharged through the discharge pipe 9. Therefore, it is possible to prevent The gas released in the chamber 15 is dissolved in the diluent again, and the degassing efficiency can be improved.

又，由於壓力調整機構37係由吸氣器構成，因此可無可動部分，而以簡易之構成對排出管進行減壓。 In addition, since the pressure adjusting mechanism 37 is composed of an inhaler, there is no movable part, and the discharge pipe can be decompressed with a simple structure.

進而，由於將壓力調整機構37之作動時序設為即將開通開閉閥V3前，因此可抑制使作為壓力調整機構37之吸氣器動作的流體之消耗。 Furthermore, since the operation timing of the pressure adjustment mechanism 37 is set immediately before the opening and closing valve V3 is opened, it is possible to suppress the consumption of fluid that operates the aspirator as the pressure adjustment mechanism 37.

又，在自腔室15排出氣體後，自腔室15朝排出管9吸入稀釋劑。然而，由於在排出管9具備氣泡感測器35，因此藉由在該時點關閉開閉閥V3，而可抑制伴隨著脫氣之稀釋劑之消耗。 In addition, after the gas is discharged from the chamber 15, the diluent is sucked from the chamber 15 toward the discharge pipe 9. However, since the bubble sensor 35 is provided in the discharge pipe 9, by closing the on-off valve V3 at this point, the consumption of the diluent accompanying deaeration can be suppressed.

<基板處理裝置> <Substrate processing device>

其次，參照圖3，針對具備上述之處理液供給裝置之基板處理裝置之一例進行說明。圖3係顯示具備處理液供給裝置之基板處理裝置之概略構成圖。再者，在圖3中，對於供給其他處理液、例如供給光阻劑液之供給系統省略圖示。 Next, referring to FIG. 3, an example of a substrate processing apparatus provided with the processing liquid supply device described above will be described. 3 is a schematic configuration diagram showing a substrate processing apparatus provided with a processing liquid supply device. In addition, in FIG. 3, the supply system which supplies another process liquid, for example, a photoresist liquid, is not shown.

基板處理裝置具備：處理液供給裝置1、旋轉卡盤51、電動馬達53、防飛濺杯55、及噴嘴57。 The substrate processing apparatus includes a processing liquid supply device 1, a spin chuck 51, an electric motor 53, a splash cup 55, and a nozzle 57.

旋轉卡盤51將作為處理對象之基板W以水平姿勢保持。電動馬達53 將旋轉卡盤51繞鉛垂方向之軸心旋轉驅動。防飛濺杯55包圍旋轉卡盤51及基板W之側方，回收朝基板W供給而朝周圍飛濺之處理液。噴嘴57之前端側之噴出口構成為可遍及基板W之旋轉中心與防飛濺杯55之側方而移動。於噴嘴57之基端部連通連接有送出配管7。送出配管7具備調整送出配管7中之稀釋劑之供給流量之流量調整閥59。藉由使泵3作動，而將特定流量之稀釋劑自噴嘴57對基板W噴出。再者，在自噴嘴57噴出稀釋劑之前，已經在進行上述之脫氣。 The spin chuck 51 holds the substrate W to be processed in a horizontal posture. Electric motor 53 The spin chuck 51 is driven to rotate around an axis in the vertical direction. The splash prevention cup 55 surrounds the sides of the spin chuck 51 and the substrate W, and collects the processing liquid supplied to the substrate W and splashing around. The discharge port on the front end side of the nozzle 57 is configured to be movable across the center of rotation of the substrate W and the side of the splash-proof cup 55. The delivery pipe 7 is connected and connected to the base end of the nozzle 57. The delivery pipe 7 includes a flow rate adjustment valve 59 that adjusts the supply flow rate of the diluent in the delivery pipe 7. By actuating the pump 3, a specific flow of diluent is ejected from the nozzle 57 to the substrate W. In addition, before the diluent is ejected from the nozzle 57, the above-mentioned degassing is already performed.

在該基板處理裝置中，由於將未溶解有氣體且不含有氣泡之稀釋劑朝基板W供給，因此可抑制溶解之氣體或氣泡對基板W之處理造成不良影響。因此，可較佳地實施其後之利用處理液之處理(例如，光阻劑液)。 In this substrate processing apparatus, since a diluent that does not dissolve gas and does not contain bubbles is supplied to the substrate W, it is possible to prevent the dissolved gas or bubbles from adversely affecting the processing of the substrate W. Therefore, the subsequent treatment with the treatment liquid (for example, photoresist liquid) can be preferably performed.

<變化例> <variation example>

此處參照圖4。圖4係顯示處理液供給裝置之變化例之概略構成之方塊圖。再者，針對與上述之實施例相同之構成，藉由賦予相同符號而省略詳細之說明。 Here, refer to FIG. 4. 4 is a block diagram showing a schematic configuration of a modified example of the processing liquid supply device. In addition, for the same configuration as the above-mentioned embodiment, the detailed description is omitted by giving the same symbol.

上述實施例之處理液供給裝置1之泵3藉由三通閥V4進行之空氣供給及吸引而被驅動。然而，本發明之泵3亦可為例如藉由馬達61驅動之方式。 The pump 3 of the processing liquid supply device 1 of the above embodiment is driven by air supply and suction by the three-way valve V4. However, the pump 3 of the present invention may be driven by a motor 61, for example.

變化例之處理液供給裝置1A具備泵3A。該泵3A內置有馬達61。該 馬達61具備：配置於泵本體13之下部之線圈部63，及藉由線圈部63繞鉛垂軸旋轉驅動之驅動軸65。缸體17A與驅動軸65螺合。 The processing liquid supply device 1A of the modified example includes a pump 3A. The pump 3A has a built-in motor 61. The The motor 61 includes a coil portion 63 disposed under the pump body 13 and a drive shaft 65 driven by the coil portion 63 to rotate around a vertical axis. The cylinder 17A is screwed with the drive shaft 65.

根據如此之構成，在馬達61作動時，將驅動軸65旋轉驅動。如是，經螺合之缸體17A相應於驅動軸65之旋轉方向及速度而升降。即便為如此般構成之馬達61亦可與上述實施例相同地進行脫氣。 According to such a configuration, when the motor 61 is actuated, the drive shaft 65 is rotationally driven. If so, the screwed cylinder 17A rises and falls according to the rotation direction and speed of the drive shaft 65. Even the motor 61 having such a configuration can be degassed in the same manner as in the above embodiment.

本發明並不限定於上述實施形態，亦可如下述般變化實施。 The present invention is not limited to the above-mentioned embodiment, and may be implemented as follows.

(1)上述實施例中，以腔室15具備隔膜19之構成為例進行了說明，本發明亦可為具備管狀隔膜取代隔膜19之構成。 (1) In the above embodiment, the configuration in which the chamber 15 is provided with the diaphragm 19 has been described as an example, and the present invention may be configured to include a tubular diaphragm instead of the diaphragm 19.

(2)上述實施例中，將壓力調整機構37設為吸氣器，但亦可取代其而使用泵。在該情形下，由於減壓程度較吸氣器更強，因此較佳為非將排出管9直接減壓，而是將回收容器33減壓而間接地將排出管9減壓。 (2) In the above embodiment, the pressure adjustment mechanism 37 is an inhaler, but a pump may be used instead. In this case, since the degree of decompression is stronger than that of the aspirator, it is preferable not to decompress the discharge pipe 9 directly but to decompress the recovery container 33 indirectly to decompress the discharge pipe 9.

(3)上述實施例中，於排出管9具備氣泡感測器35，但本發明並非將其設為必須。例如，亦可相反地具備檢測處理液之感測器而取代氣泡感測器35。藉此，可構成為在感測器於排出管9中檢測到稀釋劑之時點關閉開閉閥V3。 (3) In the above embodiment, the bubble sensor 35 is provided in the discharge pipe 9, but the present invention does not necessarily require it. For example, instead of the bubble sensor 35, a sensor for detecting the processing liquid may be provided instead. With this, it can be configured that the on-off valve V3 is closed when the sensor detects the diluent in the discharge pipe 9.

(4)在上述實施例中，作為處理液係以稀釋劑為例進行了說明，但本發明並不限定於此。例如，作為處理液亦可為光阻劑液、顯影液、沖洗 液、前處理液等。 (4) In the above embodiments, the diluent was used as the treatment liquid system as an example, but the present invention is not limited to this. For example, as the processing liquid, it may also be a photoresist liquid, a developing liquid, a rinse Liquid, pre-treatment liquid, etc.

1‧‧‧處理液供給裝置 1‧‧‧Process liquid supply device

3‧‧‧泵 3‧‧‧Pump

5‧‧‧取入配管 5‧‧‧ Take in the piping

7‧‧‧送出配管 7‧‧‧Send piping

9‧‧‧排出管 9‧‧‧Discharge pipe

11‧‧‧處理液容器/處理液供給源 11‧‧‧Processing liquid container/processing liquid supply source

13‧‧‧泵本體 13‧‧‧Pump body

15‧‧‧腔室 15‧‧‧ chamber

17‧‧‧缸體 17‧‧‧Cylinder

19‧‧‧隔膜 19‧‧‧ Diaphragm

21‧‧‧取入口 21‧‧‧Access

23‧‧‧送出口 23‧‧‧Export

25‧‧‧排出口 25‧‧‧Export

27‧‧‧吸排口 27‧‧‧Suction outlet

29‧‧‧過濾器 29‧‧‧filter

31‧‧‧過濾器 31‧‧‧filter

33‧‧‧回收容器 33‧‧‧Recycling container

35‧‧‧氣泡感測器 35‧‧‧Bubble sensor

37‧‧‧壓力調整機構 37‧‧‧Pressure adjustment mechanism

39‧‧‧吸排管 39‧‧‧Suction pipe

BL1‧‧‧第1下降位置 BL1‧‧‧1st down position

BL2‧‧‧第2下降位置 BL2‧‧‧2nd down position

TL‧‧‧上升位置 TL‧‧‧up position

V1‧‧‧開閉閥/取入開閉閥 V1‧‧‧ On-off valve/access on-off valve

V2‧‧‧開閉閥/送出開閉閥 V2‧‧‧ On-off valve/Sending on-off valve

V3‧‧‧開閉閥/排出開閉閥 V3‧‧‧ On-off valve/Drain on-off valve

V4‧‧‧三通閥 V4‧‧‧Three-way valve

Claims (6)

一種處理液供給裝置，其係供給用於處理基板之處理液者，其特徵在於具備： 泵，其具備：腔室，其用於儲存處理液；取入口，其與前述腔室連通，朝前述腔室取入處理液；送出口，其與前述腔室連通，送出前述腔室之處理液；排出口，其與前述腔室連通而排出前述腔室之氣體；及腔室驅動部，其為了使處理液自前述取入口朝前述腔室取入，且使處理液通過前述送出口自前述腔室送出，並使氣體自前述排出口排出，而使前述腔室之容積變化； 取入配管，其將儲存處理液之處理液供給源與前述取入口連通連接； 取入開閉閥，其控制處理液於前述取入配管中之流通； 送出配管，其連通連接於前述送出口，將前述腔室內之處理液朝前述基板供給； 送出開閉閥，其控制處理液於前述送出配管中之流通； 排出管，其連通連接於前述排出口，排出前述腔室內之氣體； 排出開閉閥，其控制氣體於前述排出管中之流通；以及 壓力調整機構，其將前述排出管內之壓力調整為較前述腔室內之壓力為低之壓力；且 朝前述腔室取入處理液後，在使前述取入開閉閥、前述送出開閉閥、前述排出開閉閥關閉之狀態下，藉由前述腔室驅動部使前述腔室之容積以變大之方式變化，使前述壓力調整機構作動並使前述排出開閉閥開通而進行脫氣。A processing liquid supply device, which supplies a processing liquid for processing a substrate, is characterized by comprising: A pump comprising: a chamber for storing the processing liquid; an inlet, which communicates with the chamber and takes in the processing liquid toward the chamber; a delivery port, which communicates with the chamber and sends out the processing of the chamber Liquid; the discharge port, which communicates with the chamber to discharge the gas of the chamber; and the chamber driving part, which takes the processing liquid from the inlet to the chamber, and allows the processing liquid to pass through the outlet The chamber is sent out, and the gas is discharged from the discharge port, thereby changing the volume of the chamber; Take-in piping, which connects the processing liquid supply source storing the processing liquid to the aforementioned inlet; Take in the on-off valve, which controls the flow of the processing liquid in the aforementioned take-in piping; A delivery pipe, which is connected to the delivery port and supplies the processing liquid in the chamber toward the substrate; Sending the on-off valve, which controls the circulation of the processing liquid in the sending pipe; The discharge pipe is connected to the discharge port and discharges the gas in the chamber; A discharge on-off valve, which controls the flow of gas in the aforementioned discharge pipe; and A pressure adjustment mechanism that adjusts the pressure in the discharge pipe to a lower pressure than the pressure in the chamber; and After the processing liquid is taken into the chamber, the volume of the chamber is increased by the chamber driving unit in a state where the inlet and outlet valve, the delivery and outlet valve, and the outlet and outlet valve are closed. When the pressure adjustment mechanism is activated, the discharge on-off valve is opened to perform deaeration. 如請求項1之處理液供給裝置，其中 前述壓力調整機構為吸氣器。The treatment liquid supply device according to claim 1, wherein The aforementioned pressure adjustment mechanism is an aspirator. 如請求項1或2之處理液供給裝置，其中 前述壓力調整機構在前述排出開閉閥開通之前作動。The treatment liquid supply device according to claim 1 or 2, wherein The pressure adjustment mechanism operates before the discharge on-off valve is opened. 如請求項1或2之處理液供給裝置，其中 前述泵之前述腔室具備隔膜。The treatment liquid supply device according to claim 1 or 2, wherein The chamber of the pump includes a diaphragm. 如請求項1或2之處理液供給裝置，其中 前述排出管具備檢測處理液中之氣泡之氣泡感測器，且 開始脫氣後，在前述氣泡感測器檢測不出氣泡之時點關閉前述排出開閉閥。The treatment liquid supply device according to claim 1 or 2, wherein The aforementioned discharge pipe is provided with a bubble sensor for detecting bubbles in the processing liquid, and After degassing starts, the discharge on-off valve is closed when the bubble sensor does not detect bubbles. 一種處理液供給裝置之脫氣方法，該處理液供給裝置係供給用於處理基板之處理液者，且該脫氣方法之特徵在於實施如下步驟： 藉由使儲存處理液之腔室之容積變化之腔室驅動部，使前述腔室之容積以變大之方式變化，而自連通連接於前述腔室之取入口之取入配管朝前述腔室內取入處理液； 在關閉前述取入配管、自前述腔室朝基板送出處理液之送出配管、排出前述腔室之氣體之排出管之狀態下，藉由前述腔室驅動部使前述腔室之容積以進一步變大之方式變化； 將自前述腔室排出氣體之排出管內調整為低於前述腔室內之壓力；及 使前述腔室與前述排出管連通而進行脫氣。A degassing method for a processing liquid supply device that supplies a processing liquid for processing a substrate, and the degassing method is characterized by implementing the following steps: The volume of the chamber is changed by a chamber driving portion that changes the volume of the chamber for storing the processing liquid, and the intake pipe connected to the intake port connected to the chamber is directed toward the chamber Take in the processing liquid; The volume of the chamber is further increased by the chamber driving section in a state where the inlet pipe, the outlet pipe for sending the processing liquid from the chamber to the substrate is closed, and the outlet pipe for exhausting the gas from the chamber Changes in the way Adjusting the exhaust pipe for exhausting gas from the aforementioned chamber to be lower than the pressure within the aforementioned chamber; The chamber is communicated with the discharge pipe to perform degassing.
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