TWI692432B - Sheet conveying device and method thereof - Google Patents

Sheet conveying device and method thereof Download PDF

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TWI692432B
TWI692432B TW108116816A TW108116816A TWI692432B TW I692432 B TWI692432 B TW I692432B TW 108116816 A TW108116816 A TW 108116816A TW 108116816 A TW108116816 A TW 108116816A TW I692432 B TWI692432 B TW I692432B
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thin plate
gas
conveying
devices
gas flow
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TW108116816A
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Chinese (zh)
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TW202043119A (en
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葉東益
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晶彩科技股份有限公司
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A sheet conveying device and a method thereof are revealed. By at least one gas- outlet device and a plate body including a plurality of supporting device and at least two transporting devices, the sheet conveying device makes a sheet entering the area where the gas-outlet device and the transporting devices are set therein. The gas-outlet device outputs a gas, which can generate a parallel airflow component, between the plate body and the sheet. Such parallel airflow component can cause the air pressure under the sheet is lower than the air pressure over the sheet and a downward force can be created therefrom. The downward force can push the sheet to contact the transporting devices. The sheet is transported by the friction of the transporting devices.

Description

薄板輸送裝置及其方法 Thin plate conveying device and method

本發明係有關一種輸送裝置及其方法,尤其是一種薄板輸送裝置及其方法。 The invention relates to a conveying device and method, in particular to a thin plate conveying device and method.

薄板的輸送,例如厚度僅0.3~1.1mm的玻璃薄板,是現今面板生產時的必要過程,而每一道加工程序之間的輸送其所可能造成之薄板碎裂問題,讓薄板輸送成為各家廠商於生產製造面板,尤其是顯示面板或觸控面板時,甚為重視之事項。一般而言,現有搬運薄板的裝置為利用驅動馬達驅動複數滾輪轉動,薄板在複數滾輪上方傳送時,如滾輪之間的距離較大,薄板前緣於進入下一個滾輪的上方之前,在未獲支撐之情況下,會因自己的重量而下垂,以致撞擊下一個滾輪,容易影響到薄板的生產良率。如第一圖與第二圖所示,習知薄板輸送裝置1’與2’讓薄板放置於傳送滾輪上方進行傳送,為有足夠的支撐力以避免薄板前緣撞擊滾輪,整體的傳送滾輪RO必須增加數量,導致整體結構較為複雜。 The transportation of thin sheets, such as glass sheets with a thickness of only 0.3 to 1.1 mm, is a necessary process in the production of today's panels, and the transportation between each processing procedure may cause the problem of sheet cracking caused by the transportation of thin sheets. When manufacturing panels, especially display panels or touch panels, very important matters. In general, the existing device for transporting thin plates uses a driving motor to drive the plurality of rollers to rotate. When the thin plates are transported over the plurality of rollers, such as the distance between the rollers is large, the leading edge of the thin plate is not obtained before entering the next roller. In the case of support, it will sag due to its own weight, so that it hits the next roller, which easily affects the production yield of the thin plate. As shown in the first and second figures, the conventional thin plate conveying devices 1'and 2'allow the thin plate to be placed above the conveying roller for conveying. In order to have sufficient supporting force to prevent the leading edge of the thin plate from hitting the roller, the overall conveying roller RO The number must be increased, resulting in a more complicated overall structure.

近來,顯示面板的發展方向為薄型化及大型化,例如:液晶電視、電漿電視的顯示面板,以致顯示面板的玻璃基材亦是往大型化及薄型化的方向發展。於在生產製造時,習知的滾輪輸送系統利用滾輪作為支撐及輸送玻璃基材的媒介,此會在輸送過程中,因滾輪與玻璃基材之多次接觸而造成玻璃基材表面的損傷(例如刮傷、撞傷等),進而影響產品良率,因此如何調整玻璃基材與滾輪的之間的接觸是不可避免的課題,且玻璃基材大型化,為取得足夠的支撐力,滾輪的數量也必須增加許多,導致結構更複雜。故已有於滾輪之間設置氣浮裝置之方式,利用該氣浮裝置向上噴出之氣流對玻璃基材提供支撐力,而無須增加滾 輪之數量,並藉此減少玻璃基材之表面損傷,但此方式會有氣浮裝置之支撐力過大,而造成滾輪未能與玻璃基材接觸,導致習知薄板輸送裝置發生無法利用滾輪之摩擦力以輸送薄板之問題。 Recently, the development direction of display panels is thinner and larger, for example, the display panels of LCD TVs and plasma TVs, so that the glass substrate of the display panel is also developing in the direction of larger and thinner. During the manufacturing process, the conventional roller conveyor system uses rollers as a medium to support and transport the glass substrate. This will cause damage to the surface of the glass substrate due to multiple contact between the roller and the glass substrate during the transportation process ( Such as scratches, scratches, etc.), which in turn affects the product yield, so how to adjust the contact between the glass substrate and the roller is an inevitable issue, and the glass substrate is enlarged, in order to obtain sufficient support, the roller The number must also increase a lot, resulting in a more complicated structure. Therefore, there is a way to install an air float device between the rollers. The air flow upwardly sprayed by the air float device provides support for the glass substrate without adding a roller. The number of wheels, and thereby reduce the surface damage of the glass substrate, but in this way, the support force of the air float device is too large, causing the roller to fail to contact the glass substrate, resulting in the conventional thin plate conveying device unable to use the roller The problem of friction to convey thin plates.

基於上述之問題,本發明提供一種薄板輸送裝置及其方法,其藉由出氣裝置噴出可以產生平行氣流分量或平行氣流之氣流,使薄板之上方與下方因平行氣流分量或平行氣流致有氣體壓力差以對薄板產生下壓力,令薄板受到下壓力量而接觸輸送裝置,讓輸送裝置經由摩擦力以輸送薄板,所以改善氣浮裝置支撐力過大所致之無法輸送問題,並減少整體輸送裝置所需的動力輪。 Based on the above-mentioned problems, the present invention provides a thin plate conveying device and a method thereof, in which a gas flow that can generate a parallel airflow component or a parallel airflow is ejected by the air outlet device, so that the gas pressure is caused by the parallel airflow component or the parallel airflow above and below the thin plate The difference is to produce down pressure on the thin plate, so that the thin plate receives the amount of down pressure to contact the conveying device, and the conveying device conveys the thin plate through the friction force, so the problem of unable to convey due to the excessive support force of the air float device is improved, and the overall conveying device is reduced. The required power wheel.

本發明之主要目的,提供一種薄板輸送裝置及其方法,其利用薄板之上方與下方的氣體壓力差以產生一下壓力,使薄板因該壓力而接觸輸送裝置,由輸送裝置利用摩擦力以輸送薄板。 The main object of the present invention is to provide a thin plate conveying device and method thereof, which utilizes the gas pressure difference between the upper and lower of the thin plate to generate a pressure, so that the thin plate contacts the conveying device due to the pressure, and the conveying device uses friction to convey the thin plate .

為了達到上述之目的,本發明揭示了一種薄板輸送裝置,其包含:一板體、複數個支撐裝置、至少一出氣裝置與至少二輸送裝置,該複數個支撐裝置與該至少一出氣裝置設於該板體上,該至少二輸送裝置穿設於該板體。其中一薄板透過該複數個支撐裝置之支撐力而進入該至少一出氣裝置與至少二輸送裝置其所在區域,其中該至少一出氣裝置位於該至少二輸送裝置旁邊,該至少一出氣裝置輸出至少一可產生平行氣流分量或平行氣流之氣體至該薄板與該板體之間,該平行氣流分量或該平行氣流使該薄板與該板體之間的氣體壓力小於該薄板上方之氣體壓力,而產生一下壓力至該薄板,令該薄板接觸該至少二輸送裝置,由該至少二輸送裝置利用摩擦力輸送該薄板。 In order to achieve the above object, the present invention discloses a thin plate conveying device, which comprises: a plate body, a plurality of supporting devices, at least one air outlet device and at least two conveying devices, the plurality of support devices and the at least one air outlet device are provided at On the board body, the at least two conveying devices are penetrated on the board body. One of the thin plates enters the area of the at least one air outlet device and the at least two conveying devices through the support force of the plurality of supporting devices, wherein the at least one air outlet device is located beside the at least two conveying devices, and the at least one air outlet device outputs at least one A parallel gas flow component or gas with parallel gas flow can be generated between the thin plate and the plate body. The parallel gas flow component or the parallel gas flow makes the gas pressure between the thin plate and the plate body less than the gas pressure above the thin plate, resulting in A pressure is applied to the thin plate to make the thin plate contact the at least two conveying devices, and the at least two conveying devices convey the thin plate by friction.

本發明另揭示了一種薄板輸送方法,其步驟包含:在一薄板位於一板體上時,藉由至少一出氣裝置輸出至少一可產生平行氣流分量或平行氣流之氣體至該薄板與該板體之間,該平行氣流分量或該平行氣流使該薄板與該板體之間的氣體壓力小於該薄板上方之氣體壓力,而產生一下壓力至該薄板,令該薄板接觸該至少二輸送裝置,由該至少二輸送裝置利用摩擦力輸送該薄板。 The invention also discloses a thin plate conveying method, the steps of which include: when a thin plate is located on a plate body, at least one gas capable of generating a parallel gas flow component or a parallel gas flow is output to the thin plate and the plate body by at least one gas outlet device Between the parallel gas flow component or the parallel gas flow, the gas pressure between the thin plate and the plate body is less than the gas pressure above the thin plate, and a pressure is generated to the thin plate to make the thin plate contact the at least two conveying devices. The at least two conveying devices use friction to convey the thin plate.

1’:習知薄板輸送裝置 1’: Conventional sheet conveying device

2’:習知薄板輸送裝置 2’: Conventional sheet conveying device

1:薄板輸送裝置 1: Thin plate conveying device

2:薄板輸送裝置 2: Thin plate conveying device

3:薄板輸送裝置 3: Thin plate conveying device

4:薄板輸送裝置 4: Thin plate conveying device

5:薄板輸送裝置 5: Thin plate conveying device

10:板體 10: Board body

10A:支撐件 10A: Support

12:出氣裝置 12: Outlet device

12A:出氣裝置 12A: Outlet device

12B:出氣裝置 12B: Outlet device

122:導流件 122: Flow guide

124:擾氣件 124: scrambler

20:第一輸送裝置 20: The first conveyor

22:第一開口 22: First opening

30:第二輸送裝置 30: Second conveyor

32:第二開口 32: Second opening

AA:軸心線 AA: axis line

AP:供氣裝置 AP: Gas supply device

CA:第一氣體 CA: First gas

CC:軸心線 CC: axis line

C:軸心 C: axis

D:上升方向 D: Ascending direction

DP:下壓力 DP: Downforce

DR:驅動裝置 DR: Drive

F1:固定件 F1: fixing

FX:固定裝置 FX: Fixture

FF:推力 FF: thrust

H:間隔 H: interval

H1:第一間隔 H1: first interval

H2:第二間隔 H2: second interval

OUT:出氣口 OUT: Outlet

P:支撐裝置 P: Support device

PA:平行氣流分量 PA: parallel air flow component

PF:第二氣體 PF: second gas

R:徑長 R: diameter length

RO:傳輸滾輪 RO: transmission roller

SF:正向力 SF: positive force

SH:薄板 SH: thin plate

T:厚度 T: thickness

UP:升降裝置 UP: Lifting device

UP1:氣壓缸 UP1: pneumatic cylinder

UP2:支撐桿 UP2: support rod

UP3:連接件 UP3: connector

第1圖:其為習知技術之一實施例之結構示意圖;第2圖:其為習知技術之另一實施例之結構示意圖;第3圖:其為本發明之一實施例之結構示意圖;第4A圖與第4B圖:其為第3圖之AA線與BB線之剖面示意圖;第5A圖至第5F圖:其為本發明之一實施例之薄板輸送示意圖;第6圖:其為本發明之另一實施例之結構示意圖;第7A圖與第7B圖:其為第6圖CC線與DD線之剖面示意圖;第8A圖至第8F圖:其為本發明之另一實施例之薄板輸送示意圖;第9A圖至第9F圖:其為本發明之另一實施例之薄板輸送示意圖;第10A圖至第10F圖:其為本發明之另一實施例之薄板輸送示意圖;第11圖:其為本發明之另一實施例之結構示意圖;以及第12圖:其為第11圖之EE線之剖面示意圖。 Fig. 1: It is a structural schematic diagram of an embodiment of a conventional technology; Fig. 2: It is a structural schematic diagram of another embodiment of a conventional technology; Fig. 3: It is a structural diagram of an embodiment of the invention Figures 4A and 4B: It is a schematic cross-sectional view of line AA and line BB in Figure 3; Figures 5A to 5F: It is a schematic diagram of sheet transportation according to an embodiment of the present invention; Figure 6: It is a structural schematic diagram of another embodiment of the present invention; FIGS. 7A and 7B: It is a schematic cross-sectional view of CC line and DD line of FIG. 6; FIGS. 8A to 8F: It is another implementation of the present invention Schematic diagram of thin plate transportation of the example; Figures 9A to 9F: It is a schematic diagram of thin plate transportation of another embodiment of the present invention; Figures 10A to 10F: It is a schematic diagram of thin plate transportation of another embodiment of the present invention; Fig. 11 is a schematic structural view of another embodiment of the present invention; and Fig. 12 is a schematic cross-sectional view taken along line EE of Fig. 11.

為使 貴審查委員對本發明之特徵及所達成之功效有更進一步之瞭解與認識,謹佐以實施例及配合說明,說明如後:有鑑於習知輸送裝置對於薄板表面以及輸送過程中的影響,據此,本發明遂提出一種薄板輸送裝置及其方法,以解決習知技術所造成之問題。 In order for your reviewing committee to have a better understanding and understanding of the features of the present invention and the achieved effects, the examples and supporting descriptions are accompanied by the following description: in view of the influence of the conventional conveying device on the surface of the thin plate and the conveying process Based on this, the present invention proposes a thin plate conveying device and method thereof to solve the problems caused by the conventional technology.

以下,將進一步說明本發明一種薄板輸送裝置所包含之特性、所搭配之結構及其方法:首先,請參閱第3圖至第4B圖,其為本發明之一實施例之結構示意圖及第3圖之AA線與BB線之剖面示意圖。如第3圖至第4B圖所示,一種薄板輸送裝置1,其包含一板體10與至少二輸送裝置20、30,其中板體10上設有至少一出氣裝置12與複數支撐裝置P,其中本實施例係以一出氣裝置12以及一第一輸送 裝置20與一第二輸送裝置30作為舉例說明。該板體10進一步設有一第一開口22與一第二開口32,該至少一出氣裝置12位於該第一開口22與該第二開口32之間。該第一輸送裝置20設置於該第一開口22,該第二輸送裝置30設置於該第二開口32,該第一輸送裝置20與該第二輸送裝置30之徑長R超過該板體10之厚度T,該第一輸送裝置20與該第二輸送裝置30位於一軸心線AA上。該些個支撐裝置P設置於該二輸送裝置20、30之前。如第4A圖與第4B圖所示,該出氣裝置12與該些個支撐裝置P為連接複數個供氣裝置AP。 In the following, the characteristics, the structure and the method of a thin plate conveying device of the present invention will be further described: First, please refer to FIGS. 3 to 4B, which is a schematic structural view and a third The cross-sectional schematic diagram of line AA and line BB in the figure. As shown in FIGS. 3 to 4B, a thin plate conveying device 1 includes a plate body 10 and at least two conveying devices 20, 30, wherein the plate body 10 is provided with at least one air outlet device 12 and a plurality of support devices P, In this embodiment, an air outlet device 12 and a first delivery are used The device 20 and a second conveying device 30 are taken as examples. The plate body 10 is further provided with a first opening 22 and a second opening 32. The at least one air outlet device 12 is located between the first opening 22 and the second opening 32. The first conveying device 20 is disposed in the first opening 22, the second conveying device 30 is disposed in the second opening 32, the diameter R of the first conveying device 20 and the second conveying device 30 exceeds the plate body 10 The thickness T, the first conveying device 20 and the second conveying device 30 are located on an axis AA. The supporting devices P are arranged before the two conveying devices 20 and 30. As shown in FIGS. 4A and 4B, the air outlet device 12 and the support devices P are connected to a plurality of air supply devices AP.

本發明之薄板輸送方法的示意圖如第5A圖至第5F圖所示,其中,當一薄板SH位於該板體10上時,該薄板輸送裝置1為藉由該出氣裝置12產生至少一第一氣體CA至該薄板SH,該第一氣體CA之出氣氣流於該薄板SH下方形成平行氣流分量PA,也就是該薄板SH與該板體10之間形成平行氣體分量PA,進一步使該薄板SH下方形成負壓,因而導致該薄板10上方之氣體壓力大於該薄板10下方之氣體壓力而對應產生一下壓力DP,用以讓該薄板SH接觸該第一輸送裝置20與該第二輸送裝置30,以受到該第一輸送裝置20與該第二輸送裝置30之正向力SF,而讓該第一輸送裝置20與該第二輸送裝置30以摩擦力輸送該薄板SH。 The schematic diagram of the thin plate conveying method of the present invention is shown in FIGS. 5A to 5F, in which, when a thin plate SH is located on the plate body 10, the thin plate conveying device 1 generates at least one first by the air outlet device 12 From the gas CA to the thin plate SH, the outflow of the first gas CA forms a parallel gas flow component PA under the thin plate SH, that is, a parallel gas component PA is formed between the thin plate SH and the plate body 10, and further the thin plate SH A negative pressure is formed, so that the gas pressure above the thin plate 10 is greater than the gas pressure below the thin plate 10 and correspondingly generates a pressure DP for the thin plate SH to contact the first conveying device 20 and the second conveying device 30, Upon receiving the forward force SF of the first conveying device 20 and the second conveying device 30, the first conveying device 20 and the second conveying device 30 are allowed to convey the thin plate SH with friction.

承接上述,該薄板輸送裝置1輸送該薄板SH的輸送方法詳細如下所述。如第5A圖至的5C圖所示,當該薄板SH並未遮蔽該第一輸送裝置20與該第二輸送裝置30時,該出氣裝置12並未出氣,該些個支撐裝置P產生複數個第二氣體PF至該薄板SH,用以形成支撐力於該薄板SH下方,使該薄板SH的前緣在遮蔽該第一輸送裝置20與該第二輸送裝置30之前,不會因自身重量而下垂,因而維持該板體10與該薄板SH之間具一第一間隔H1。 Following the above, the method of conveying the thin plate SH by the thin plate conveying device 1 is as follows. As shown in FIGS. 5A to 5C, when the thin plate SH does not cover the first conveying device 20 and the second conveying device 30, the gas outlet device 12 does not emit gas, and the support devices P generate a plurality of The second gas PF reaches the thin plate SH to form a supporting force under the thin plate SH so that the front edge of the thin plate SH will not be blocked by its own weight before shielding the first conveying device 20 and the second conveying device 30 Sagging, thus maintaining a first interval H1 between the plate body 10 and the thin plate SH.

如第5D圖至第5F圖所示,基於該薄板SH遮蔽該第一輸送裝置20與該第二輸送裝置30,該出氣裝置12產生至少一第一氣體CA至該薄板SH,該第一氣體CA之出氣氣流於該薄板SH下方形成平行氣流分量PA,進一步使該薄板SH下方形成負壓,因而導致該薄板10上方之氣體壓力大於該薄板10下方之氣體壓力而對應產生一下壓力DP,該下壓力DP令該薄板10接觸該第一輸送裝置20與 該第二輸送裝置30,由該第一輸送裝置20與該第二輸送裝置30分別經由摩擦力對該薄板SH產生向前的推力FF,用以輸送該薄板10。 As shown in FIGS. 5D to 5F, based on the thin plate SH shielding the first conveying device 20 and the second conveying device 30, the gas outlet device 12 generates at least a first gas CA to the thin plate SH, the first gas The gas flow of CA forms a parallel airflow component PA under the thin plate SH, which further creates a negative pressure under the thin plate SH, thus causing the gas pressure above the thin plate 10 to be greater than the gas pressure below the thin plate 10 and correspondingly generating a pressure DP, which The downward pressure DP causes the thin plate 10 to contact the first conveying device 20 and In the second conveying device 30, the first conveying device 20 and the second conveying device 30 respectively generate a forward thrust FF on the thin plate SH through frictional force, and are used to convey the thin plate 10.

因此,該些個支撐裝置P藉由該些個第二氣體PF提供支撐力於該薄板SH,以避免該薄板SH的前緣在遮蔽該第一輸送裝置20與該第二輸送裝置30之前,因自身重量致下垂而撞擊該第一輸送裝置20或該第二輸送裝置30,造成毀損。 Therefore, the supporting devices P provide the supporting force to the thin plate SH through the second gases PF, so as to avoid the leading edge of the thin plate SH before shielding the first conveying device 20 and the second conveying device 30, Sagging due to its own weight impacts the first conveying device 20 or the second conveying device 30, causing damage.

再者,該些個支撐裝置P的分布區域大於該第一輸送裝置20與該第二輸送裝置30的分布區域,或者大於該出氣裝置12之分布區域。另外,該第一輸送裝置20與該第二輸送裝置30連結該軸心C,該軸心C則連結該驅動裝置DR,而該驅動裝置DR與該軸心C為連接該二升降裝置UP,其中該升降裝置UP進一步設有一連接件UP3,其中該連接件UP3為一套筒以套設該軸心C,藉此透過該升降裝置UP固定該軸心C,以及固定並支撐該驅動裝置DR。 Furthermore, the distribution area of the support devices P is larger than the distribution area of the first conveying device 20 and the second conveying device 30, or larger than the distribution area of the air outlet device 12. In addition, the first conveying device 20 and the second conveying device 30 are connected to the axis C, the axis C is connected to the driving device DR, and the driving device DR and the axis C are connected to the two lifting devices UP, The lifting device UP is further provided with a connecting member UP3, wherein the connecting member UP3 is a sleeve to sleeve the axis C, thereby fixing the axis C through the lifting device UP, and fixing and supporting the driving device DR .

以上為本發明之薄板輸送裝置1的實施方式說明,除此之外,進一步參閱第6圖至第8F圖,其為本發明之另一實施例的結構示意圖、第6圖CC線與DD線之剖面示意圖與另一實施例的薄板輸送示意圖。其中第3圖至第5F圖與第6圖至第8F圖之差異在於第6圖至第8F圖之薄板輸送裝置2係進一步設置複數個出氣裝置12A,再者,該些個出氣裝置12A分別進一步設有一導流件122,且該些個出氣裝置12A分別依據該導流件122設有複數個出氣口OUT,該導流件122導引該些個出氣裝置12A所產生之第一氣體CA往該些個出氣口OUT噴發,本實施例為該第一氣體CA往12點鐘、3點鐘、6點鐘及9點鐘4個方向噴發但不限於此,更可進一步設置較多個出氣口而形成較多方向之氣體噴發,例如:8個出氣口OUT而形成8個方向之氣體噴發。進一步參閱如第8D圖至第8F圖所示,基於該第一氣體CA形成該平行氣流分量PA,因而形成該下壓力DP,其餘輸送原理已於上述實施例闡述本實施例不再贅述。 The above is the description of the embodiment of the thin plate conveying device 1 of the present invention. In addition, further refer to FIGS. 6 to 8F, which is a schematic structural view of another embodiment of the present invention, FIG. 6 CC line and DD line The cross-sectional schematic diagram and the schematic diagram of the thin plate transportation in another embodiment. Among them, the difference between FIGS. 3 to 5F and FIGS. 6 to 8F is that the thin plate conveying device 2 of FIGS. 6 to 8F is further provided with a plurality of air outlet devices 12A, and the air outlet devices 12A are respectively A flow guide 122 is further provided, and each of the air outlet devices 12A is provided with a plurality of air outlets OUT according to the air guide 122, and the air guide 122 guides the first gas CA generated by the air outlet devices 12A Erupt to these outlets OUT. In this embodiment, the first gas CA erupts in four directions at 12 o'clock, 3 o'clock, 6 o'clock and 9 o'clock, but it is not limited to this. The gas outlets form gas eruptions in many directions, for example, eight gas outlets OUT form gas eruptions in eight directions. Further, as shown in FIGS. 8D to 8F, the parallel gas flow component PA is formed based on the first gas CA, and thus the down pressure DP is formed. The remaining delivery principles have been described in the above embodiment and will not be repeated in this embodiment.

此外,請進一步參閱第9A圖至第9F圖,其為本發明之另一實施例的薄板輸送示意圖。其中第8A圖至第8F圖與第9A圖至第9F圖之差異在於第8A圖至第8F圖之該薄板輸送裝置2的該第一輸送裝置20與該第二輸送裝置30為高於 該第一開口22與該第二開口32,第9A圖至第9F圖之該薄板輸送裝置3的該第一輸送裝置20與該第二輸送裝置30為低於或相當於該第一開口22與該第二開口32的位置。其中如第9A圖至第9C圖所示,該薄板SH未遮蔽該第一輸送裝置20與該第二輸送裝置30時,該第一輸送裝置20與該第二輸送裝置30之頂端並未高於該第一開口22與該第二開口32,同時該些個支撐裝置P為產生該些個第二氣體PF用以支撐該薄板SH。 In addition, please refer further to FIGS. 9A to 9F, which are schematic diagrams of thin plate transportation according to another embodiment of the present invention. The difference between FIGS. 8A to 8F and FIGS. 9A to 9F is that the first conveying device 20 and the second conveying device 30 of the thin plate conveying device 2 of FIGS. 8A to 8F are higher than The first opening 22 and the second opening 32, the first conveying device 20 and the second conveying device 30 of the thin plate conveying device 3 of FIGS. 9A to 9F are lower than or equivalent to the first opening 22 With the position of the second opening 32. As shown in FIGS. 9A to 9C, when the thin plate SH does not cover the first conveying device 20 and the second conveying device 30, the tops of the first conveying device 20 and the second conveying device 30 are not high At the first opening 22 and the second opening 32, the supporting devices P generate the second gases PF to support the thin plate SH.

其中,本實施例之複數個升降裝置UP為氣壓缸作為舉例,該些個升降裝置UP連接該軸心C與該驅動裝置DR,以支撐該該第一輸送裝置20與該第二輸送裝置30上升至可使該第一輸送裝置20與該第二輸送裝置30與該薄板SH之間具有一間隔H之位置,或者依據使用者之需求而調整該第一輸送裝置20與該第二輸送裝置30之高度,且該些個升降裝置UP分別經由一支撐桿UP2連接至該驅動裝置DR與該連接件UP3,以定位該驅動裝置DR與該軸心C之高度。 In this embodiment, the plurality of lifting devices UP are pneumatic cylinders as an example. The lifting devices UP are connected to the axis C and the driving device DR to support the first conveying device 20 and the second conveying device 30. Raise to a position where there is an interval H between the first conveying device 20 and the second conveying device 30 and the thin plate SH, or adjust the first conveying device 20 and the second conveying device according to the user's needs A height of 30, and the lifting devices UP are connected to the driving device DR and the connecting member UP3 via a support rod UP2, respectively, to position the height of the driving device DR and the axis C.

接續上述,如第9D圖至第9F圖所示,該第一輸送裝置20與該第二輸送裝置30於該薄板SH遮蔽該第一輸送裝置20與該第二輸送裝置30時,依據一上升方向D升高至接觸該薄板SH,也就是該第一輸送裝置20與該第二輸送裝置30藉由該些個升降裝置UP上升,進而高於該第一開口22與該第二開口32以接觸該薄板SH,因而對該薄板SH提供正向力SF,又,本實施例為一出氣裝置12,提供該第一氣體CA至該薄板SH而形成該平行氣流分量PA,藉此提供該下壓力DP至該薄板SH,因而讓該第一輸送裝置20與該第二輸送裝置30分別經由摩擦力對該薄板SH產生向前的推力FF,用以輸送該薄板10。 Continuing from the above, as shown in FIGS. 9D to 9F, the first conveying device 20 and the second conveying device 30 when the sheet SH shields the first conveying device 20 and the second conveying device 30, according to a rise The direction D is raised to contact the thin plate SH, that is, the first conveying device 20 and the second conveying device 30 are raised by the lifting devices UP, and then higher than the first opening 22 and the second opening 32. Contacting the thin plate SH, thus providing a positive force SF to the thin plate SH, and in this embodiment, a gas outlet device 12, providing the first gas CA to the thin plate SH to form the parallel gas flow component PA, thereby providing the lower The pressure DP is applied to the thin plate SH, so that the first conveying device 20 and the second conveying device 30 respectively generate a forward thrust force FF on the thin plate SH through frictional force to convey the thin plate 10.

其中,本實施例之該第一輸送裝置20與該第二輸送裝置30之高度調整是透過該些個升降裝置UP實現上升與下降,並透過連接該軸心C與該驅動裝置DR,以定位該第一輸送裝置20與該第二輸送裝置30之高度。 Wherein, the height adjustment of the first conveying device 20 and the second conveying device 30 of this embodiment is achieved through the lifting devices UP to ascend and descend, and by connecting the axis C and the driving device DR to locate The height of the first conveying device 20 and the second conveying device 30.

請進一步參閱第10A圖至第10F圖,其為本發明之另一實施例的薄板輸送示意圖。其中第9A圖至第9F圖與第10A圖至第10F圖之差異在於第10A圖至第10F圖之薄板輸送裝置4進一步設置複數個出氣裝置12A於該板體10上,再者,該些個出氣裝置12A之出氣口分別進一步設有一導流件122,該導流件122導 引該些個出氣裝置12A所產生之第一氣體CA往全方向噴發,本實施例為該第一氣體CA往12點鐘、3點鐘、6點鐘及9點鐘4個方向噴發但不限於此,更可進一步成環形噴發。進一步參閱如第8D圖至第8F圖所示,基於該第一氣體CA形成該平行氣流分量PA,因而形成該下壓力DP,其餘輸送原理已於上述實施例闡述本實施例不再贅述。 Please further refer to FIGS. 10A to 10F, which are schematic diagrams of thin plate transportation according to another embodiment of the present invention. Among them, the difference between FIGS. 9A to 9F and FIGS. 10A to 10F is that the thin plate conveying device 4 of FIGS. 10A to 10F is further provided with a plurality of air outlet devices 12A on the plate body 10, and furthermore, these Each air outlet of the air outlet device 12A is further provided with a flow guide 122, which guides The first gas CA generated by the gas outlet devices 12A is caused to erupt in all directions. In this embodiment, the first gas CA erupts in four directions at 12 o'clock, 3 o'clock, 6 o'clock, and 9 o'clock, but does not Limited to this, it can be further erupted into a ring. Further, as shown in FIGS. 8D to 8F, the parallel gas flow component PA is formed based on the first gas CA, and thus the down pressure DP is formed. The remaining delivery principles have been described in the above embodiment and will not be repeated in this embodiment.

另請參閱第11圖與第12圖,其為本發明之另一實施例之結構示意圖與第11圖EE線之剖面示意圖。其中,第6圖至第7A圖與第11圖至第12圖之差異在於第6圖至第7A圖之該薄板輸送裝置2將該些個出氣裝置12A之該些個導流件122分別設置於該板體10內,而第11圖至第12圖之該薄板輸送裝置5將複數個出氣裝置12B之複數個擾氣件124分別經由複數個支撐件10A設置於該板體10上,並遮蔽該些個出氣裝置12B之出氣口,藉由擾氣件124位於出氣口OUT上方,而讓向上噴發之第一氣體CA往該些個擾氣件124之周緣導引,使第一氣體CA受導引至該些個擾氣件124之周緣外側。 Please also refer to FIG. 11 and FIG. 12, which are a schematic structural view of another embodiment of the present invention and a cross-sectional schematic view of line EE of FIG. 11. Among them, the difference between FIGS. 6 to 7A and FIGS. 11 to 12 is that the thin plate conveying device 2 of FIGS. 6 to 7A sets the deflectors 122 of the gas outlet devices 12A respectively In the plate body 10, the thin plate conveying device 5 of FIGS. 11 to 12 arranges the plurality of gas disturbing elements 124 of the plurality of air outlet devices 12B on the plate body 10 through the plurality of support members 10A, and The gas outlets of the gas outlet devices 12B are shielded, and the gas disturbing member 124 is located above the gas outlet OUT, and the first gas CA emitted upward is guided toward the periphery of the gas disturbing members 124, so that the first gas CA It is guided to the outside of the peripheral edges of the agitators 124.

藉由以上所述之實施例,本發明藉由該下壓力DP使該薄板SH與該至少二輸送裝置接觸,而用於輸送該薄板SH,且本發明之薄板輸送裝置將該薄板SH維持於一固定高度,例如:第一高度H1或第二高度H2,因而避免該薄板SH之邊緣於該薄板輸送裝置之間垂下而撞擊該薄板輸送裝置內之輸送裝置。以上所述之實施例,本發明之該些輸送裝置20、30為經由軸心C同軸連接至一驅動裝置DR,並藉由該驅動裝置DR驅動該些輸送裝置20、30以摩擦力輸送該薄板SH。 Through the above-described embodiment, the present invention uses the down pressure DP to contact the thin plate SH with the at least two conveying devices for conveying the thin plate SH, and the thin plate conveying device of the present invention maintains the thin plate SH at A fixed height, for example, the first height H1 or the second height H2, so as to prevent the edge of the thin plate SH from hanging down between the thin plate conveying devices and hitting the conveying device in the thin plate conveying device. In the embodiments described above, the conveying devices 20 and 30 of the present invention are coaxially connected to a driving device DR via the axis C, and the conveying devices 20 and 30 are driven by the driving device DR to convey the frictional force. Thin plate SH.

此外,上述之該些個支撐裝置P更可進一步改裝為有彈性的滾輪,該些個滾輪之摩擦阻力小於該至少二輸送裝置之摩擦力,藉此讓該至少二輸送裝置之摩擦力對該薄板SH形成推力,用以輸送該薄板SH。以上所述之升降裝置UP為以氣壓缸UP1連接支撐桿UP2作為舉例說明,除此之外,更可使用齒輪連動裝置驅動該些個支撐桿UP2上升下降,其中該些個支撐桿UP2插設於該些個氣壓缸UP1,該些個支撐桿UP2連接至該驅動裝置DR,並經一連接件UP3連接至該軸心C,如此該些個升降裝置UP藉由該些個氣壓缸UP1、該些個支撐桿UP2、該連 接件UP3與該軸心C、該驅動裝置DR的連接關係,用以定位該第一輸送裝置20與該第二輸送裝置30之高度,以及該板體10與該薄板SH之間隔。 In addition, the support devices P described above can be further modified into elastic rollers, the friction resistance of the rollers is less than the friction force of the at least two conveying devices, thereby allowing the friction force of the at least two conveying devices to The thin plate SH forms a thrust for conveying the thin plate SH. The above-mentioned lifting device UP uses the pneumatic cylinder UP1 connected to the support rod UP2 as an example for illustration. In addition, a gear linkage device can also be used to drive the support rods UP2 to rise and fall, wherein the support rods UP2 are inserted In the pneumatic cylinders UP1, the supporting rods UP2 are connected to the driving device DR, and are connected to the axis C via a connecting member UP3, so that the lifting devices UP pass through the pneumatic cylinders UP1 The support rods UP2, the link The connection relationship between the connector UP3 and the axis C and the driving device DR is used to position the height of the first conveying device 20 and the second conveying device 30 and the distance between the plate body 10 and the thin plate SH.

以上所述之實施例中,該些個輸送裝置20、30係以同軸心驅動之設置方式作為舉例說明,除此之外,本發明之該些個輸送裝置20、30更可為非同軸驅動之設置方式,例如:以複數個軸心C驅動該些個輸送裝置20、30轉動。另外,上述實施例之薄板輸送裝置1-5經由複數個固定裝置FX連結複數個固定件F1,再由該複數個固定件F1連接該板體10,以固定並支撐該板體10。 In the above-mentioned embodiments, the conveying devices 20 and 30 are illustrated by the coaxial driving method. In addition, the conveying devices 20 and 30 of the present invention may be non-coaxial driving. The setting method is, for example, driving the conveying devices 20 and 30 with a plurality of axes C to rotate. In addition, the thin plate conveying device 1-5 of the above embodiment is connected to the plurality of fixing members F1 through the plurality of fixing devices FX, and the plurality of fixing members F1 are connected to the board body 10 to fix and support the board body 10.

故本發明實為一具有新穎性、進步性及可供產業上利用者,應符合我國專利法專利申請要件無疑,爰依法提出發明專利申請,祈 鈞局早日賜准專利,至為感禱。 Therefore, the present invention is truly novel, progressive and available for industrial use. It should meet the patent application requirements of my country's Patent Law. It is undoubtedly to file an application for an invention patent in accordance with the law.

惟以上所述者,僅為本發明之較佳實施例而已,並非用來限定本發明實施之範圍,舉凡依本發明申請專利範圍所述之形狀、構造、特徵及精神所為之均等變化與修飾,均應包括於本發明之申請專利範圍內。 However, the above are only the preferred embodiments of the present invention and are not intended to limit the scope of the implementation of the present invention. Any changes and modifications based on the shape, structure, features and spirit described in the patent application scope of the present invention , Should be included in the scope of the patent application of the present invention.

1:薄板輸送裝置 1: Thin plate conveying device

10:板體 10: Board body

12:出氣裝置 12: Outlet device

20:第一輸送裝置 20: The first conveyor

22:第一開口 22: First opening

30:第二輸送裝置 30: Second conveyor

32:第二開口 32: Second opening

AP:供氣裝置 AP: Gas supply device

CA:第一氣體 CA: First gas

C:軸心 C: axis

DP:下壓力 DP: Downforce

DR:驅動裝置 DR: Drive

F1:固定件 F1: fixing

FX:固定裝置 FX: Fixture

PA:平行氣流分量 PA: parallel air flow component

SF:正向力 SF: positive force

SH:薄板 SH: thin plate

UP:升降裝置 UP: Lifting device

UP1:氣壓缸 UP1: pneumatic cylinder

UP2:支撐桿 UP2: support rod

UP3:連接件 UP3: connector

Claims (10)

一種薄板輸送裝置,其包含:一板體,其上設有至少一出氣裝置與複數個支撐裝置;以及至少二輸送裝置,穿設於該板體,該至少一出氣裝置位於該至少二輸送裝置旁邊,該至少一出氣裝置輸出至少一可產生平行氣流分量或平行氣流之第一氣體至一薄板與該板體之間,該平行氣流分量或該平行氣流使該薄板與該板體之間的氣體壓力小於該薄板上方之氣體壓力,而產生一下壓力至該薄板,令該薄板接觸該至少二輸送裝置,由該至少二輸送裝置利用摩擦力輸送該薄板;其中,當該薄板尚未遮蔽該至少二輸送裝置時,該板體上之該些個支撐裝置支撐該薄板。 A thin plate conveying device, comprising: a plate body on which at least one air outlet device and a plurality of supporting devices are provided; and at least two conveying devices, which are disposed on the plate body, and the at least one air outlet device is located on the at least two conveying devices Aside, the at least one gas outlet device outputs at least one first gas that can generate a parallel gas flow component or a parallel gas flow between a thin plate and the plate body, the parallel gas flow component or the parallel gas flow makes the thin plate and the plate body The gas pressure is less than the gas pressure above the thin plate, and a pressure is generated to the thin plate to make the thin plate contact the at least two conveying devices, and the at least two conveying devices use friction to convey the thin plate; wherein, when the thin plate has not covered the at least In the second conveying device, the supporting devices on the plate body support the thin plate. 如申請專利範圍第1項所述之薄板輸送裝置,其中該至少一出氣裝置具有至少一出氣口,輸出該至少一可產生該平行氣流分量或該平行氣流之第一氣體至該薄板與該板體之間,該平行氣流分量或該平行氣流使該薄板與該板體之間的氣體壓力小於該薄板上方之氣體壓力,而產生該下壓力至該薄板,以使該薄板接觸該至少二輸送裝置,讓該至少二輸送裝置利用摩擦力輸送該薄板。 The thin plate conveying device as described in item 1 of the patent application range, wherein the at least one air outlet device has at least one air outlet, outputting the at least one first gas that can generate the parallel gas flow component or the parallel gas flow to the thin plate and the plate Between the bodies, the parallel gas flow component or the parallel gas flow makes the gas pressure between the thin plate and the plate body less than the gas pressure above the thin plate, and generates the downward pressure to the thin plate, so that the thin plate contacts the at least two conveyances The device allows the at least two conveying devices to convey the thin plate with friction. 如申請專利範圍第1項所述之薄板輸送裝置,更包含至少一導流件,其設置於該至少一出氣裝置上,該至少一出氣裝置依據該至少一導流件設置至少一出氣口,該至少一出氣裝置依據該至少一導流件往該至少一出氣口輸出該至少一第一氣體,以噴發該至少一第一氣體。 The thin plate conveying device as described in item 1 of the patent application scope further includes at least one air guide element disposed on the at least one air outlet device, and the at least one air outlet device is provided with at least one air outlet according to the at least one air guide element, The at least one gas outlet device outputs the at least one first gas to the at least one gas outlet according to the at least one air guide member to emit the at least one first gas. 如申請專利範圍第1項所述之薄板輸送裝置,其中該至少一出氣裝置具有至少一出氣口與至少一擾氣件,該至少一擾氣件設置於該至少一出氣口上,該至少一出氣裝置往該至少一出氣口輸出該至少一第一氣體並經該至少一擾氣件導引至該至少一擾氣件之周緣噴發。 The thin plate conveying device as described in item 1 of the patent application scope, wherein the at least one air outlet device has at least one air outlet and at least one gas disturbing member, the at least one gas disturbing member is disposed on the at least one air outlet, the at least one The gas outlet device outputs the at least one first gas to the at least one gas outlet and is guided to the periphery of the at least one gas-disturbing member through the at least one gas-disturbing member to erupt. 如申請專利範圍第1項所述之薄板輸送裝置,其中該複數個支撐裝置為複數個滾輪或複數個氣浮裝置。 The thin plate conveying device as described in item 1 of the patent application range, wherein the plurality of support devices are a plurality of rollers or a plurality of air floatation devices. 如申請專利範圍第1項所述之薄板輸送裝置,更包含一軸心、一驅動裝置以及二升降裝置,該至少二輸送裝置經該軸心連接至該驅動裝置,該二升降裝置之一支撐桿連接該驅動裝置,以定位該至少二輸送裝置之高度。 The thin plate conveying device as described in item 1 of the patent application scope further includes an axis, a driving device and two lifting devices, the at least two conveying devices are connected to the driving device via the axis, and one of the two lifting devices supports The rod is connected to the driving device to position the height of the at least two conveying devices. 如申請專利範圍第6項所述之薄板輸送裝置,更包含一連接件,套設於該軸心以固定該軸心以及該驅動裝置。 The thin plate conveying device as described in item 6 of the patent application scope further includes a connecting member sleeved on the shaft center to fix the shaft center and the driving device. 一種薄板輸送方法,其步驟包含:當一薄板位於一板體上而該薄板尚未遮蔽該板體上所設置之至少二輸送裝置時,該板體上之複數個支撐裝置支撐該薄板,當該薄板遮蔽該至少二輸送裝置時,該板體上之至少一出氣裝置產生至少一可產生平行氣流分量或平行氣流之第一氣體至該薄板與該板體之間,該平行氣流分量或該平行氣流使該薄板與該板體之間的氣體壓力小於該薄板上方之氣體壓力,而產生一下壓力至該薄板,使該薄板接觸該至少二輸送裝置,並由該至少二輸送裝置利用摩擦力輸送該薄板。 A thin plate conveying method, the steps of which include: when a thin plate is located on a plate body and the thin plate has not covered at least two conveying devices provided on the plate body, a plurality of supporting devices on the plate body support the thin plate, when the When the thin plate shields the at least two conveying devices, at least one gas outlet device on the plate body generates at least one first gas that can generate a parallel gas flow component or a parallel gas flow between the thin plate and the plate body, the parallel gas flow component or the parallel The gas flow makes the gas pressure between the thin plate and the plate body less than the gas pressure above the thin plate, and generates a pressure to the thin plate to make the thin plate contact the at least two conveying devices, and the at least two conveying devices are conveyed by friction The sheet. 如申請專利範圍第8項所述之薄板輸送方法,其中於該板體上之該至少一出氣裝置產生該至少一可產生該平行氣流分量或該平行氣流之第一氣體至該薄板與該板體之間之步驟中,當該薄板遮蔽該至少二輸送裝置時,該至少一出氣裝置輸出該至少一可產生該平行氣流分量或該平行氣流之第一氣體至該薄板與該板體之間,而該平行氣流分量或該平行氣流令該薄板與該板體之間的氣體壓力小於該薄板上方之氣體壓力,使該薄板受到該下壓力並接觸該至少二輸送裝置,讓該至少二輸送裝置利用摩擦力輸送該薄板。 The thin plate conveying method as described in item 8 of the patent application range, wherein the at least one gas outlet device on the plate body generates the at least one first gas that can generate the parallel gas flow component or the parallel gas flow to the thin plate and the plate In the step between the bodies, when the thin plate shields the at least two conveying devices, the at least one gas outlet device outputs the at least one first gas that can generate the parallel gas flow component or the parallel gas flow between the thin plate and the plate body And the parallel gas flow component or the parallel gas flow makes the gas pressure between the thin plate and the plate body less than the gas pressure above the thin plate, so that the thin plate receives the downward pressure and contacts the at least two conveying devices to allow the at least two conveying The device uses friction to transport the sheet. 如申請專利範圍第8項所述之薄板輸送方法,其中於當一薄板位於一板體上而該薄板尚未遮蔽該板體上所設置之至少二輸送裝置時, 該板體上之複數個支撐裝置支撐該薄板,當該薄板遮蔽該至少二輸送裝置時,該板體上之至少一出氣裝置產生至少一可產生平行氣流分量或平行氣流之第一氣體至該薄板與該板體之間,該平行氣流分量或該平行氣流使該薄板與該板體之間的氣體壓力小於該薄板上方之氣體壓力,而產生一下壓力至該薄板,使該薄板接觸該至少二輸送裝置,並由該至少二輸送裝置利用摩擦力輸送該薄板之步驟後,更包含:該至少二輸送裝置經一軸心連接至一驅動裝置,二升降裝置之一支撐桿連接該驅動裝置,以定位該至少二輸送裝置之高度。 The thin plate conveying method as described in item 8 of the patent application scope, wherein when a thin plate is located on a plate body and the thin plate has not covered at least two conveying devices provided on the plate body, A plurality of supporting devices on the plate body support the thin plate, and when the thin plate shields the at least two conveying devices, at least one gas outlet device on the plate body generates at least one first gas that can generate a parallel gas flow component or a parallel gas flow to the Between the thin plate and the plate body, the parallel gas flow component or the parallel air flow makes the gas pressure between the thin plate and the plate body less than the gas pressure above the thin plate, and generates a pressure to the thin plate to make the thin plate contact the at least Two conveying devices, and after the step of conveying the thin plate by the at least two conveying devices using frictional force, the method further includes: the at least two conveying devices are connected to a driving device via an axis, and a supporting rod of the two lifting devices is connected to the driving device To locate the height of the at least two conveying devices.
TW108116816A 2019-05-15 2019-05-15 Sheet conveying device and method thereof TWI692432B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6099056A (en) * 1996-05-31 2000-08-08 Ipec Precision, Inc. Non-contact holder for wafer-like articles
JP2011184186A (en) * 2010-03-11 2011-09-22 Ihi Corp Floating conveying device and roller drive unit
CN102484089A (en) * 2009-06-29 2012-05-30 英泰克普拉斯有限公司 Flat plate precision floating system
TWI483883B (en) * 2012-04-26 2015-05-11 Ihi Corp Handling device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6099056A (en) * 1996-05-31 2000-08-08 Ipec Precision, Inc. Non-contact holder for wafer-like articles
CN102484089A (en) * 2009-06-29 2012-05-30 英泰克普拉斯有限公司 Flat plate precision floating system
JP2011184186A (en) * 2010-03-11 2011-09-22 Ihi Corp Floating conveying device and roller drive unit
TWI483883B (en) * 2012-04-26 2015-05-11 Ihi Corp Handling device

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