TWI671254B - Film peeling device - Google Patents

Film peeling device Download PDF

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Publication number
TWI671254B
TWI671254B TW108103955A TW108103955A TWI671254B TW I671254 B TWI671254 B TW I671254B TW 108103955 A TW108103955 A TW 108103955A TW 108103955 A TW108103955 A TW 108103955A TW I671254 B TWI671254 B TW I671254B
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Taiwan
Prior art keywords
film
nozzle
carrier plate
separated
gas
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TW108103955A
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Chinese (zh)
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TW202030139A (en
Inventor
李世富
廖士賢
江煒晨
范振盈
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景碩科技股份有限公司
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Priority to TW108103955A priority Critical patent/TWI671254B/en
Priority to CN201910349089.5A priority patent/CN111511115A/en
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Publication of TWI671254B publication Critical patent/TWI671254B/en
Publication of TW202030139A publication Critical patent/TW202030139A/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits

Abstract

薄膜分離機構適於具有至少一薄膜的承載板。薄膜分離機構包含起膜構件、吹氣構件、氣壓構件、及控制組件。起膜構件用以將薄膜的角部從承載板上分離。吹氣構件具有噴嘴,噴嘴在分離的薄膜角部及承載板間的間隙輸送氣體。於氣體從相對於分離的薄膜角部之對角流出時,薄膜的其餘部分從承載板分離。氣壓構件被驅動時,輸送氣體至噴嘴。控制組件適於驅動起膜構件分離位於承載板上的薄膜的角部,及驅動氣壓構件輸送氣體從噴嘴流出。 The film separation mechanism is suitable for a carrier plate having at least one film. The thin film separation mechanism includes a film raising member, an air blowing member, a pneumatic member, and a control unit. The film raising member is used to separate the corner of the film from the carrier plate. The air blowing member has a nozzle, and the nozzle conveys a gas at a corner of the separated film and a gap between the carrier plates. As the gas flows out diagonally from the corner of the separated film, the rest of the film is separated from the carrier plate. When the pneumatic component is driven, it delivers gas to the nozzle. The control component is adapted to drive the film raising member to separate the corners of the film located on the carrier plate, and to drive the pneumatic member to transport the gas out of the nozzle.

Description

薄膜分離機構 Membrane separation mechanism

本案是關於一種薄膜分離機構,尤其是具有吹氣構件的薄膜分離機構。 This case relates to a membrane separation mechanism, in particular a membrane separation mechanism having an air blowing member.

業界常見的一種銅箔分離機構具有一切割板(如細繩)。此切割板從印刷電路板的側邊朝向此側邊的對邊移動,藉此切割位於印刷電路板上的銅箔。然而,此切割板在切割銅箔的過程中,容易留下少部分的銅箔在印刷電路板上,進而影響印刷電路板的電性傳導。 A copper foil separation mechanism common in the industry has a cutting plate (such as a string). The cutting board is moved from the side of the printed circuit board toward the opposite side of the side, thereby cutting the copper foil on the printed circuit board. However, in the process of cutting the copper foil of this cutting board, it is easy to leave a small part of the copper foil on the printed circuit board, thereby affecting the electrical conduction of the printed circuit board.

此外,業界常見的另一種銅箔分離機構具有彈性剝片及夾具。彈性剝片在印刷電路板的側邊掀開銅箔的角落後,夾具夾持銅箔的角落並朝向此側邊的對邊移動,藉此撕離位於印刷電路板上的銅箔。於夾具朝向此對邊移動時,在印刷電路板上的銅箔容易被撕破,進而使殘留的部分銅箔影響印刷電路板的電性傳導。 In addition, another copper foil separation mechanism commonly used in the industry has an elastic stripper and a clamp. After the stripper lifts off the corners of the copper foil on the side of the printed circuit board, the clamp holds the corners of the copper foil and moves toward the opposite side of the side, thereby tearing off the copper foil on the printed circuit board. When the jig moves toward the opposite side, the copper foil on the printed circuit board is easily torn, and the remaining part of the copper foil affects the electrical conduction of the printed circuit board.

鑒於上述問題,本案提供一種薄膜分離機構,其適於具有至少一薄膜的承載板。薄膜分離機構包含起膜構件、吹氣構件、氣壓構件、及控制組件。起膜構件用以將薄膜的角部從承載板上分離。吹氣構件具有噴嘴,噴嘴在分離的薄膜角部及承載板之間的間隙輸送氣體。於氣體從分離的薄膜角部之一對角流出時,薄膜的其餘部分從承載板分離。氣壓構件 被驅動時,輸送氣體至噴嘴。控制組件適於驅動起膜構件分離位於承載板上的薄膜的角部,及驅動氣壓構件輸送氣體從噴嘴流出。因此,本案之吹氣構件可經由輸送氣體而將薄膜角部以外的其餘部分從承載板上分離。 In view of the above problems, the present invention provides a film separation mechanism suitable for a carrier plate having at least one film. The thin film separation mechanism includes a film raising member, an air blowing member, a pneumatic member, and a control unit. The film raising member is used to separate the corner of the film from the carrier plate. The air blowing member has a nozzle, and the nozzle conveys gas in the gap between the corner of the separated film and the carrier plate. When the gas flows diagonally from one of the corners of the separated film, the rest of the film is separated from the carrier plate. Pneumatic component When driven, delivers gas to the nozzle. The control component is adapted to drive the film raising member to separate the corners of the film located on the carrier plate, and to drive the pneumatic member to transport the gas out of the nozzle. Therefore, the blowing member of the present case can separate the rest of the film except the corner of the film from the carrier plate by transporting the gas.

本案另提供一種薄膜分離機構,其適於具有至少一薄膜的承載板。薄膜分離機構包含起膜構件、吹氣構件、氣壓構件、切割刀、及控制組件。起膜構件用以從承載板上分離薄膜的角部。吹氣構件具有噴嘴,該噴嘴在該分離的薄膜角部及承載板之間的間隙輸送氣體,於氣體通過位於承載板上的薄膜的一部份時,該薄膜的一部份從承載板上分離。氣壓構件被驅動時,輸送氣體至噴嘴。切割刀位於分離的薄膜的一部份及承載板間,並朝向一移動方向移動,以分離位於承載板上的薄膜的其餘部分,該移動方向係該分離的角部之對角。控制組件驅動氣壓構件輸送氣體從噴嘴流出,及驅動噴嘴及切割刀朝向該移動方向移動。因此,本案之吹氣構件及切割刀可將薄膜角部及薄膜的一部分以外的其餘部分從承載板上分離。 The present invention further provides a film separation mechanism, which is suitable for a carrier plate having at least one film. The thin film separation mechanism includes a film raising member, an air blowing member, a pneumatic member, a cutter, and a control unit. The film raising member is used to separate the corners of the film from the carrier plate. The blowing member has a nozzle that transports gas in the gap between the corner of the separated film and the carrier plate, and when the gas passes through a part of the film on the carrier plate, a part of the film is from the carrier plate Separation. When the pneumatic component is driven, it delivers gas to the nozzle. The cutting knife is located between a part of the separated film and the carrier plate, and moves toward a moving direction to separate the rest of the film located on the carrier plate. The moving direction is the opposite corner of the separated corner. The control unit drives the pneumatic member to transport the gas out of the nozzle, and drives the nozzle and the cutter to move in the moving direction. Therefore, the blowing member and the cutter of the present case can separate the film corner portion and the rest of the film other than a part of the film from the carrier plate.

100‧‧‧薄膜分離機構 100‧‧‧ membrane separation mechanism

110‧‧‧起膜構件 110‧‧‧ from the membrane member

130‧‧‧吹氣構件 130‧‧‧Air blowing member

131‧‧‧噴嘴 131‧‧‧ Nozzle

150‧‧‧氣壓構件 150‧‧‧ pneumatic components

160‧‧‧切割刀 160‧‧‧ cutting knife

170‧‧‧控制組件 170‧‧‧Control Module

200‧‧‧承載板 200‧‧‧carrying plate

210‧‧‧薄膜 210‧‧‧ film

211‧‧‧角部 211‧‧‧Corner

[圖1]是本案第一實施例之薄膜分離機構之結構示意圖。 [Fig. 1] is a schematic structural diagram of a film separation mechanism of the first embodiment of the present case.

[圖2A至2C]是本案第一實施例之薄膜分離機構之使用狀態圖(一)至(三)。 [FIGS. 2A to 2C] The use state diagrams (1) to (3) of the film separation mechanism of the first embodiment of the present case.

[圖3]是圖1吹氣構件之第一變化例之結構示意圖。 [Fig. 3] A schematic structural diagram of a first modification of the air blowing member of Fig. 1. [Fig.

請參考圖1,圖1繪示本案第一實施例之薄膜分離機構之結構示意圖。 Please refer to FIG. 1, which is a schematic structural diagram of a thin film separation mechanism according to the first embodiment of the present invention.

在此第一實施例中,本案提供一種薄膜分離機構100適於具有至少一薄膜210的承載板200。薄膜分離機構100包含起膜構件110、吹氣構件130、氣壓構件150、及控制組件170。 In this first embodiment, the present disclosure provides a film separation mechanism 100 suitable for a carrier plate 200 having at least one film 210. The thin film separation mechanism 100 includes a film raising member 110, an air blowing member 130, a pneumatic member 150, and a control unit 170.

承載板200例如但不限於環氧樹脂玻璃基板(如FR4、FR5)。 The carrier plate 200 is, for example, but not limited to, an epoxy glass substrate (eg, FR4, FR5).

薄膜210例如但不限於銅箔(copper film)。當薄膜210位於承載板200的表面(即薄膜210位於承載板200的下表面)時,薄膜210與承載板200的表面之間可具有黏著力(或鍵結力)。此外,金屬薄膜可以是覆蓋、黏貼、依附、接觸、放置或附著等態樣(下文統一稱為附著)設置在承載板200相對兩側的表面上。 The film 210 is, for example, but not limited to, a copper film. When the film 210 is located on the surface of the carrier plate 200 (that is, the film 210 is located on the lower surface of the carrier plate 200), there may be an adhesive force (or a bonding force) between the film 210 and the surface of the carrier plate 200. In addition, the metal thin film may be covered, adhered, attached, contacted, placed, or attached (hereinafter collectively referred to as attached) on the surfaces of the opposite sides of the carrier plate 200.

依據一些實施例,薄膜210可以為複數個。舉例來說,承載板200具有第一薄膜及第二薄膜,其分別位於承載板200相對兩側的表面。 According to some embodiments, the film 210 may be plural. For example, the carrier plate 200 has a first film and a second film, which are respectively located on surfaces of two opposite sides of the carrier plate 200.

依據一些實施例,薄膜210例如但不限於保護膜,如聚乙烯薄膜(Polyethylene,PE)或聚對苯二甲酸乙二酯(Polyethylene Terephthalate,PET)。 According to some embodiments, the film 210 is, for example but not limited to, a protective film, such as a polyethylene film (Polyethylene, PE) or a polyethylene terephthalate (PET).

依據一些實施例,薄膜210例如但不限於層壓覆箔板(mass lamination panel)。層壓覆箔板位於承載板200相對的上、下表面。 According to some embodiments, the film 210 is, for example, but not limited to, a laminated lamination panel. The laminated foil-clad board is located on the upper and lower surfaces of the carrier board 200 opposite to each other.

起膜構件110用以將薄膜210的角部從承載板200上分離。起膜構件110例如但不限於超音波振子。超音波振子適於產生一超音波震波。於超音波振子在薄膜210的角部211上施加震波時,薄膜210的角部211可從承載板200上分離。 The film raising member 110 is used to separate the corners of the film 210 from the carrier plate 200. The filming member 110 is, for example, but not limited to, an ultrasonic transducer. The ultrasonic transducer is adapted to generate an ultrasonic shock wave. When the ultrasonic transducer applies a shock wave to the corner portion 211 of the film 210, the corner portion 211 of the film 210 may be separated from the carrier plate 200.

吹氣構件130具有噴嘴131,噴嘴131在分離的薄膜210的角部211及承載板200之間的間隙輸送氣體。於氣體從分離的薄膜210的角部211 之對角流出時,薄膜210的其餘部分從承載板200分離。舉例來說,噴嘴131的孔徑尺寸可介於3毫米(mm)至5毫米(mm)之間。當氣體從噴嘴131流出時,此氣體為一壓縮空氣,其從分離的薄膜210的角部211及承載板200間進入,並從分離的薄膜210的角部211之對角流出,其中該對角可以是形成角部211的其中之一對角。此外,此壓縮空氣可打斷介於承載板200及薄膜210的鍵結力而使附著在承載板200上的薄膜210從承載板200上分離。因此,吹氣構件130可經由噴嘴131流出的壓縮空氣,分離位於承載板200上的薄膜210。 The air blowing member 130 includes a nozzle 131, and the nozzle 131 transports gas through a gap between the corner portion 211 of the separated film 210 and the carrier plate 200. 211 for the gas separation film 210 When it flows out diagonally, the rest of the film 210 is separated from the carrier plate 200. For example, the aperture size of the nozzle 131 may be between 3 millimeters (mm) and 5 millimeters (mm). When the gas flows out of the nozzle 131, the gas is a compressed air, which enters between the corner portion 211 of the separated film 210 and the carrier plate 200, and flows out from the diagonal of the corner portion 211 of the separated film 210, where The corner may be one of the corners forming the corner 211. In addition, the compressed air can break the bonding force between the carrier plate 200 and the film 210 and separate the film 210 attached to the carrier plate 200 from the carrier plate 200. Therefore, the air blowing member 130 can separate the thin film 210 located on the carrier plate 200 through the compressed air flowing out of the nozzle 131.

依據一些實施例,吹氣構件130包含一位移機構(未圖示),位移機構連接噴嘴131。位移機構可以是移動機構(未圖示)、旋轉機構(未圖示)、或移動機構與旋轉機構之組合(未圖示)。在位移機構為一移動機構的實施例中,該移動機構連接噴嘴131,以供噴嘴131在一平行於承載板200的水平面上移動,且該噴嘴131朝向該薄膜210的角部211。本段中所提到的連接可以是物理上的結構直接或間接連接,也可以是電性連接。 According to some embodiments, the blowing member 130 includes a displacement mechanism (not shown), and the displacement mechanism is connected to the nozzle 131. The displacement mechanism may be a moving mechanism (not shown), a rotating mechanism (not shown), or a combination of a moving mechanism and a rotating mechanism (not shown). In an embodiment where the displacement mechanism is a moving mechanism, the moving mechanism is connected to the nozzle 131 so that the nozzle 131 moves on a horizontal plane parallel to the carrying plate 200, and the nozzle 131 faces the corner portion 211 of the film 210. The connection mentioned in this paragraph can be a direct or indirect connection of a physical structure, or an electrical connection.

依據一些實施例,在位移機構為一旋轉機構的實施例中,旋轉機構連接噴嘴131,以供噴嘴131在一平行於承載板200的水平面上左、右旋轉。本段中所提到的連接可以是物理上的結構直接或間接連接,也可以是電性連接。在位移機構為移動構件及旋轉機構組合的實施例中,移動構件及旋轉機構二者之一連接噴嘴131。 According to some embodiments, in the embodiment where the displacement mechanism is a rotation mechanism, the rotation mechanism is connected to the nozzle 131 for the nozzle 131 to rotate left and right on a horizontal plane parallel to the carrier plate 200. The connection mentioned in this paragraph can be a direct or indirect connection of a physical structure, or an electrical connection. In the embodiment where the displacement mechanism is a combination of a moving member and a rotation mechanism, one of the moving member and the rotation mechanism is connected to the nozzle 131.

依據一些實施例,噴嘴131例如圓孔型噴嘴、或鴨嘴型噴嘴,但本案不以此為限。 According to some embodiments, the nozzle 131 is, for example, a circular hole type nozzle or a duckbill type nozzle, but the present invention is not limited thereto.

依據一些實施例,噴嘴131為複數個,該些噴嘴131朝向該薄膜210的角部211。 According to some embodiments, there are a plurality of nozzles 131, and the nozzles 131 face the corner portion 211 of the film 210.

氣壓構件150被驅動時,輸送氣體至噴嘴131。氣壓構件150例如但不限於空氣壓縮機。空氣壓縮機將空氣吸入後,壓縮此空氣及儲存壓縮後的空氣,接著,將壓縮後的空氣從噴嘴131流出。此外,空氣壓縮機可經由控制閥,控制壓縮後的空氣的壓力、方向、與流量。 When the pneumatic member 150 is driven, gas is delivered to the nozzle 131. The pneumatic member 150 is, for example, but not limited to, an air compressor. The air compressor sucks air, compresses the air, stores the compressed air, and then flows the compressed air out of the nozzle 131. In addition, the air compressor can control the pressure, direction, and flow rate of the compressed air through a control valve.

控制組件170適於驅動起膜構件110分離位於承載板200上的薄膜210的角部211,及驅動氣壓構件150輸送氣體從噴嘴131流出。控制組件170例如但不限於數位信號處理器、微型計算機、中央處理器、場編程閘陣列、可編程邏輯設備、狀態器、邏輯電路、類比電路、數位電路和/或任何基於操作指令操作信號(類比和/或數位)的設備。 The control module 170 is adapted to drive the film raising member 110 to separate the corner portion 211 of the film 210 located on the carrier plate 200, and to drive the air pressure member 150 to transport the gas out of the nozzle 131. The control component 170 is, for example, but not limited to, a digital signal processor, a microcomputer, a central processing unit, a field programming gate array, a programmable logic device, a state device, a logic circuit, an analog circuit, a digital circuit, and / or any operation signal based on an operation instruction ( Analog and / or digital) devices.

參閱圖2A至2C,圖2A至2C繪示本案第一實施例之薄膜分離機構之使用狀態圖(一)至(三)。依據一些實施例,控制組件170驅動吹氣構件130以一移動路徑移動。此移動路徑包含第一路徑段、接續第一路徑段的第二路徑段、及接續第二路徑段的第三路徑段。當吹氣構件130以第一路徑段移動時,噴嘴131位於分離的薄膜210的角部211及承載板200之間的間隙。當吹氣構件130以第二路徑段移動時,噴嘴131向上移動而上抬承載板200的角部211。當吹氣構件130以第三路徑段移動時,噴嘴131朝向第二前進方向移動一位移距離,第二前進方向係朝向角部211之一對角移動一位移距離。 Referring to Figs. 2A to 2C, Figs. 2A to 2C show the use state diagrams (1) to (3) of the membrane separation mechanism of the first embodiment of the present case. According to some embodiments, the control assembly 170 drives the air blowing member 130 to move in a moving path. This moving path includes a first path segment, a second path segment continuing the first path segment, and a third path segment continuing the second path segment. When the air blowing member 130 moves in the first path segment, the nozzle 131 is located in a gap between the corner portion 211 of the separated film 210 and the carrier plate 200. When the air blowing member 130 moves in the second path segment, the nozzle 131 moves upward to lift the corner portion 211 of the carrying plate 200. When the blowing member 130 moves in the third path segment, the nozzle 131 moves a displacement distance toward the second advancing direction, and the second advancing direction moves diagonally toward the one of the corner portions 211 by a displacement distance.

請參考圖3,圖3繪示圖1吹氣構件之第一變化例之結構示意圖。在此第一變化例中,薄膜分離機構100包含起膜構件110、吹氣構 件130、氣壓構件150、切割刀160、及控制組件170。 Please refer to FIG. 3, which is a schematic structural diagram of a first modification of the air blowing member of FIG. 1. In this first modification, the thin film separation mechanism 100 includes a film raising member 110 and an air blowing structure. Piece 130, pneumatic member 150, cutting blade 160, and control assembly 170.

起膜構件110用以將該薄膜210的角部211從承載板200分離。起膜構件110已見於前文,不再贅述。 The film raising member 110 is used to separate the corner portion 211 of the film 210 from the carrier plate 200. The film raising member 110 has been seen in the foregoing and will not be described again.

吹氣構件130具有噴嘴131。噴嘴131在分離的角部211及承載板200之間的間隙輸送氣體,於氣體通過位於承載板200的薄膜210的一部份時,該薄膜210的一部份從承載板200上分離,其中該薄膜210的一部份隨著氣體的壓力大小、流量、方向的增加而自承載板200上分離的該薄膜210的一部份越多,意即位於承載板200上其餘部分越少。吹氣構件130已見於前文,不再贅述。 The air blowing member 130 includes a nozzle 131. The nozzle 131 conveys gas in the gap between the separated corner portion 211 and the carrier plate 200. When the gas passes through a part of the film 210 located on the carrier plate 200, a part of the film 210 is separated from the carrier plate 200, where As a part of the film 210 increases with the pressure, flow rate and direction of the gas, the more part of the film 210 is separated from the carrier plate 200, that is, the less the rest of the film 210 is located on the carrier plate 200. The air blowing member 130 has been seen in the foregoing, and will not be described again.

氣壓構件150被驅動時,輸送氣體至噴嘴131。氣壓構件150已見於前文,不再贅述。 When the pneumatic member 150 is driven, gas is delivered to the nozzle 131. The pneumatic component 150 has been seen in the foregoing, and will not be described again.

切割刀160於分離的薄膜210的一部份及承載板200間朝向一移動方向移動,以分離位於承載板200上的薄膜210的其餘部分,該移動方向係該分離的角部211之一對角。 The cutting blade 160 moves between a part of the separated film 210 and the carrier plate 200 toward a moving direction to separate the remaining part of the film 210 on the carrier plate 200. The moving direction is a pair of the separated corner portions 211. angle.

控制組件170驅動起膜構件110從承載板200上分離薄膜210的角部211,並驅動氣壓構件150輸送氣體從噴嘴131流出。 The control unit 170 drives the film raising member 110 to separate the corner portion 211 of the film 210 from the carrier plate 200, and drives the air pressure member 150 to send gas out of the nozzle 131.

依據一些實施例,切割刀160整合於吹氣構件130,當噴嘴131位於分離的角部211及承載板200間的間隙時,噴嘴131及切割刀160朝向分離的角部211之對角移動,以使薄膜210的其餘部份經由氣體及切割刀160通過,從承載板200上分離。 According to some embodiments, the cutting blade 160 is integrated with the air blowing member 130. When the nozzle 131 is located in the gap between the separated corner portion 211 and the carrier plate 200, the nozzle 131 and the cutting blade 160 move diagonally toward the separated corner portion 211. The other part of the film 210 is passed through the gas and the cutting blade 160 to be separated from the carrier plate 200.

依據一些實施例,切割刀160及吹氣構件130各自為獨立構件,於控制組件170驅動噴嘴131位於分離的角部211及承載板200間 的間隙輸送氣體時,薄膜210的一部份可從承載板200上分離。接著,控制組件170驅動切割刀160先移動至該分離的薄膜210的一部份及承載板200之間的間隙,再驅動切割刀160朝向角部211的對角移動,以分離薄膜210的其餘部份。 According to some embodiments, each of the cutting blade 160 and the blowing member 130 is an independent member, and the control unit 170 drives the nozzle 131 between the separated corner portion 211 and the carrier plate 200. When the gas is conveyed in the gap, a part of the film 210 can be separated from the carrier plate 200. Next, the control unit 170 drives the cutting blade 160 to move to a gap between a part of the separated film 210 and the carrier plate 200, and then drives the cutting blade 160 toward the corner of the corner 211 to separate the rest of the film 210. Part.

綜上所述,本案薄膜分離機構之一或多個實施例可經由吹氣構件130將薄膜200的其餘部分從承載板200上分離。 In summary, one or more embodiments of the film separation mechanism of this case can separate the rest of the film 200 from the carrier plate 200 via the air blowing member 130.

Claims (10)

一種薄膜分離機構,適於一承載板,該承載板具有至少一薄膜,該薄膜分離機構包含:一起膜構件,用以將該薄膜的角部從該承載板分離;一吹氣構件,具有一噴嘴,該噴嘴在該分離的角部及該承載板之間的一間隙輸送一氣體,於該氣體從該分離的角部之一對角流出時,該薄膜的其餘部分從該承載板分離;一氣壓構件,被驅動時,輸送該氣體至該噴嘴;以及一控制組件,適於驅動該起膜構件分離該薄膜的角部,及驅動該氣壓構件輸送該氣體從該噴嘴流出。A thin film separation mechanism is suitable for a carrier plate. The carrier plate has at least one thin film. The thin film separation mechanism includes: a film member for separating the corner of the film from the carrier plate; an air blowing member having a A nozzle that transports a gas in a gap between the separated corner and the carrier plate, and when the gas flows out diagonally from one of the separated corners, the remaining portion of the film is separated from the carrier plate; A pneumatic component is configured to deliver the gas to the nozzle when driven; and a control component is adapted to drive the film-forming component to separate the corner of the film, and to drive the pneumatic component to deliver the gas from the nozzle. 如請求項1所述之薄膜分離機構,其中:該控制組件驅動該吹氣構件以一移動路徑移動,該移動路徑包含:一第一路徑段,該吹氣構件以該第一路徑段移動時,該噴嘴位於該分離的角部及該承載板間的間隙;一第二路徑段,接續該第一路徑段,該吹氣構件以該第二路徑段移動時,該噴嘴向上移動;及一第三路徑段,接續該第二路徑段,該吹氣構件以該第三路徑段移動時,該噴嘴朝向一第二前進方向移動一位移距離,該第二前進方向係朝向該分離的角部之一對角。The membrane separation mechanism according to claim 1, wherein the control component drives the air blowing member to move along a moving path, and the moving path includes: a first path section, when the air blowing member moves along the first path section The nozzle is located in the gap between the separated corner and the bearing plate; a second path section is continued from the first path section; when the air blowing member moves in the second path section, the nozzle moves upward; and A third path segment continues the second path segment. When the air blowing member moves in the third path segment, the nozzle moves a displacement distance toward a second forward direction, and the second forward direction is toward the separated corner. One diagonal. 一種薄膜分離機構,適於一承載板,該承載板具有至少一薄膜,該薄膜分離機構包含:一起膜構件,用以將該薄膜的角部從該承載板分離;一吹氣構件,具有一噴嘴,該噴嘴在該分離的角部及該承載板之間的一間隙輸送一氣體,於該氣體通過該薄膜的一部份時,該薄膜的一部份從該承載板分離;一氣壓構件,被驅動時,輸送該氣體至該噴嘴;一切割刀,位於該分離的薄膜的一部份及該承載板之間,並朝向一移動方向移動,以分離該薄膜的其餘部分,該移動方向係該分離的角部之一對角;以及一控制組件,驅動該氣壓構件輸送該氣體從該噴嘴流出。A thin film separation mechanism is suitable for a carrier plate. The carrier plate has at least one thin film. The thin film separation mechanism includes: a film member for separating the corner of the film from the carrier plate; an air blowing member having a A nozzle that transports a gas in a gap between the separated corner and the carrier plate, and when the gas passes through a part of the film, a part of the film is separated from the carrier plate; a pneumatic component When driven, the gas is delivered to the nozzle; a cutting knife is located between a part of the separated film and the carrier plate, and moves toward a moving direction to separate the rest of the film, the moving direction It is one of the separated corners diagonally; and a control assembly that drives the pneumatic member to transport the gas out of the nozzle. 如請求項3所述之薄膜分離機構,其中:當該噴嘴朝向該間隙流出該氣體時,該噴嘴及該切割刀朝向該移動方向移動,以使該氣體及該切割刀通過該薄膜的一部份及該薄膜的其餘部分。The film separation mechanism according to claim 3, wherein when the nozzle flows out the gas toward the gap, the nozzle and the cutter move toward the moving direction so that the gas and the cutter pass through a part of the film Cover the rest of the film. 如請求項3所述之薄膜分離機構,其中:該切割刀及該吹氣構件各自為獨立構件,於該控制組件驅動該噴嘴在該間隙輸送該氣體後,接著再驅動該切割刀移動至該分離的薄膜的一部份及該承載板之間分離該薄膜的其餘部分。The thin film separation mechanism according to claim 3, wherein the cutting blade and the air blowing member are independent members, and after the control component drives the nozzle to deliver the gas in the gap, the driving blade is then driven to move to the A part of the separated film and the rest of the film are separated between the carrier plate. 如請求項3所述之薄膜分離機構,其中:該控制組件驅動該吹氣構件以一移動路徑移動,該移動路徑包含:一第一路徑段,該吹氣構件以該第一路徑段移動時,該噴嘴位於該分離的角部及該承載板間的間隙;一第二路徑段,接續該第一路徑段,該吹氣構件以該第二路徑段移動時,該噴嘴向上移動;及一第三路徑段,接續該第二路徑段,該吹氣構件以該第三路徑段移動時,該噴嘴朝向一第二前進方向移動,該第二前進方向係朝向該分離的角部之一對角移動一位移距離。The membrane separation mechanism according to claim 3, wherein the control component drives the air blowing member to move along a moving path, and the moving path includes: a first path section, when the air blowing member moves along the first path section The nozzle is located in the gap between the separated corner and the bearing plate; a second path section is continued from the first path section; when the air blowing member moves in the second path section, the nozzle moves upward; and The third path section is continued from the second path section. When the air blowing member moves in the third path section, the nozzle moves toward a second forward direction, and the second forward direction is toward one of the separated corners. Angular moves a displacement distance. 如請求項1或3所述之薄膜分離機構,其中,該噴嘴的孔徑尺寸介於3毫米至5毫米之間。The membrane separation mechanism according to claim 1 or 3, wherein the nozzle has a hole size between 3 mm and 5 mm. 如請求項1或3所述之薄膜分離機構,其中,該起膜構件為超音波振子。The thin film separation mechanism according to claim 1 or 3, wherein the film raising member is an ultrasonic transducer. 如請求項1或3所述之薄膜分離機構,其中,該吹氣構件更包含一位移機構,該位移機構連接該噴嘴,該位移機構為一旋轉機構、一移動機構或該旋轉機構與該移動機構之組合。The membrane separation mechanism according to claim 1 or 3, wherein the blowing member further includes a displacement mechanism connected to the nozzle, and the displacement mechanism is a rotation mechanism, a movement mechanism, or the rotation mechanism and the movement A combination of institutions. 如請求項1或3所述之薄膜分離機構,其中,該噴嘴為圓孔型噴嘴或鴨嘴型噴嘴。The membrane separation mechanism according to claim 1 or 3, wherein the nozzle is a round hole nozzle or a duckbill nozzle.
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