TWI663221B - Pigment dispersion for black matrix and pigment dispersion photoresist composition containing black matrix - Google Patents
Pigment dispersion for black matrix and pigment dispersion photoresist composition containing black matrix Download PDFInfo
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- C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
- C09C1/00—Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
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- C09C3/00—Treatment in general of inorganic materials, other than fibrous fillers, to enhance their pigmenting or filling properties
- C09C3/10—Treatment with macromolecular organic compounds
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- C09D17/00—Pigment pastes, e.g. for mixing in paints
- C09D17/004—Pigment pastes, e.g. for mixing in paints containing an inorganic pigment
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- C09D17/00—Pigment pastes, e.g. for mixing in paints
- C09D17/004—Pigment pastes, e.g. for mixing in paints containing an inorganic pigment
- C09D17/007—Metal oxide
- C09D17/008—Titanium dioxide
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- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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Abstract
本發明提供一種具有高遮光性及高絕緣性之黑矩陣用顏料分散物、及含有其之黑矩陣用顏料分散光阻組成物。 The present invention provides a pigment dispersion for a black matrix having high light shielding properties and high insulation properties, and a pigment dispersion photoresist composition for a black matrix containing the pigment dispersion.
本發明係一種黑矩陣用顏料分散物,其含有酸性碳黑、顏料分散劑、多官能環氧化合物、及溶劑,其特徵在於:上述多官能環氧化合物係相對於100質量份之酸性碳黑而含有0.1~50質量份。 The present invention is a pigment dispersion for a black matrix, which contains acidic carbon black, a pigment dispersant, a polyfunctional epoxy compound, and a solvent, and is characterized in that the polyfunctional epoxy compound is 100 parts by mass of acidic carbon black. It contains 0.1 to 50 parts by mass.
Description
本發明係關於一種維持高遮光性且具有較高之絕緣性之黑矩陣用顏料分散物、及含有其之黑矩陣用顏料分散光阻組成物。 The present invention relates to a pigment dispersion for a black matrix that maintains high light-shielding properties and has high insulation properties, and a pigment dispersion photoresist composition for a black matrix containing the pigment dispersion.
近年來,黑矩陣用顏料分散物之用途涉及多方面,例如於液晶或電漿等之平板顯示器中,為了於畫面之顯示區域內著色圖案之間隙或顯示區域周邊部分之邊緣設置遮光膜(黑矩陣)而使用,又,使用有TFT之液晶顯示器,為了於TFT之外光側等設置遮光膜(黑矩陣)而使用。而且,液晶顯示器主要係為了防止來自背光之洩漏光映入至畫面,提高顯示特性(對比度及色純度)而發揮作用,又,電漿顯示器主要係為了防止因各色光之混濁引起之暈開映入至畫面,提高顯示特性(對比度及色純度)而發揮作用。 In recent years, the use of pigment dispersions for black matrices has been used in a variety of ways. For example, in a flat panel display such as a liquid crystal or a plasma, a light-shielding film (black Matrix), and a liquid crystal display using a TFT is used to provide a light-shielding film (black matrix) on the light side other than the TFT. In addition, liquid crystal displays are mainly used to prevent the leakage of light from the backlight onto the screen and improve the display characteristics (contrast and color purity). Plasma displays are mainly used to prevent halo caused by the turbidity of various colors of light. Enter the screen and improve display characteristics (contrast and color purity).
例如,為了將液晶顯示器之背光之白色光轉換成著色光而利用之彩色濾光片通常係藉由如下方法製造:於形成有黑矩陣之玻璃或塑膠片等透明基板表面,按照條紋狀或者馬賽克狀等之圖案依序形成紅、綠、藍之不同色調之像素。 For example, a color filter used to convert the white light of the backlight of a liquid crystal display into colored light is generally manufactured by the following method: on the surface of a transparent substrate such as glass or a plastic sheet with a black matrix formed in a striped or mosaic pattern Patterns such as shapes sequentially form pixels of different tones of red, green, and blue.
又,於結合圖像顯示裝置與位置輸入裝置之觸控面板中, 亦同樣地利用形成有黑矩陣之彩色濾光片作為遮光膜,迄今為止,一般係隔著覆蓋玻璃,形成於與感測器基板相反之側。然而,隨著對觸控面板之輕量化之要求變高,進行開發如下之技術以謀求更輕量化:於覆蓋玻璃之相同側同時形成遮光膜及觸控感測器之技術。於此種情形時,於在覆蓋玻璃上形成黑矩陣後,需要形成用於感測器之電極等,故首先要求如即便黑矩陣跨及複數個電極而接觸亦不會引起誤動作的高絕緣性,此外亦要求高密合性或耐化學品性。 Moreover, in a touch panel combining an image display device and a position input device, Similarly, a color filter formed with a black matrix is used as a light-shielding film. Conventionally, it has been generally formed on the side opposite to the sensor substrate through a cover glass. However, as the requirements for the weight reduction of the touch panel become higher, the following technologies have been developed in order to achieve lighter weight: a technology of simultaneously forming a light shielding film and a touch sensor on the same side of the cover glass. In this case, after forming the black matrix on the cover glass, it is necessary to form electrodes for the sensor, etc. Therefore, firstly, if the black matrix crosses a plurality of electrodes and contacts with each other, high insulation will not cause malfunction. In addition, high adhesion or chemical resistance is also required.
因此,為了獲得具有高絕緣性之黑矩陣,揭示有如下等技術:作為遮光性顏料而利用碳黑,而且作為光硬化性材料而利用含酸基之環氧丙烯酸酯化合物(例如,參照專利文獻1);使用利用多官能環氧樹脂(其中,實施例中,僅例示2官能者作為多官能環氧樹脂)對碳黑進行被覆處理而成之絕緣性碳黑(例如,參照專利文獻2)。 Therefore, in order to obtain a black matrix having high insulation properties, techniques have been disclosed in which carbon black is used as a light-shielding pigment, and an epoxy acrylate compound containing an acid group is used as a photocurable material (for example, refer to Patent Documents). 1); using an insulating carbon black obtained by coating a carbon black with a polyfunctional epoxy resin (in the examples, only a bifunctional epoxy resin is exemplified as a polyfunctional epoxy resin) (for example, refer to Patent Document 2) .
可藉由該等所揭示之技術而獲得高絕緣性,但近年來進而要求薄膜之具備高遮光性及高絕緣性之黑矩陣,需要提高作為遮光性材料之碳黑之含有比率。然而,碳黑具有導電性,故若提高含有比率,則成為絕緣性降低之主要原因,該等所揭示之技術無法滿足同時實現高遮光性及高絕緣性之要求。 High insulation properties can be obtained by these disclosed technologies, but in recent years, black matrices with high light shielding properties and high insulation properties have been required for thin films, and the content ratio of carbon black, which is a light shielding material, needs to be increased. However, carbon black has electrical conductivity, so if the content ratio is increased, it becomes the main cause of the decrease in insulation properties. These disclosed technologies cannot meet the requirements for achieving high light shielding properties and high insulation properties at the same time.
專利文獻1:日本特開平08-278629號公報 Patent Document 1: Japanese Patent Application Laid-Open No. 08-278629
專利文獻2:日本特開平09-124969號公報 Patent Document 2: Japanese Patent Application Laid-Open No. 09-124969
因此,本發明之課題在於提供一種具有高遮光性及高絕緣性之黑矩陣用顏料分散物、及含有其之黑矩陣用顏料分散光阻組成物。 Therefore, an object of the present invention is to provide a pigment dispersion for a black matrix having high light shielding properties and high insulation properties, and a pigment dispersion photoresist composition for a black matrix containing the pigment dispersion.
本發明人等根據下述認知:若為了使黑矩陣用光阻組成物之塗膜為更薄之膜並且具有高遮光性,而增加塗膜中之碳黑之含有比率,則因碳黑為導電性而導致塗膜之絕緣性降低;而發現:於藉由光硬化而形成黑矩陣用光阻組成物之塗膜後,若以高溫進行後硬化處理,則絕緣性之降低會變得明顯。 The inventors have recognized that if the coating ratio of the carbon black in the coating film is increased in order to make the coating film of the black matrix photoresist composition a thinner film and have a high light-shielding property, the carbon black is The conductivity decreases the insulation of the coating film. It was found that after forming a coating film of a photoresist composition for a black matrix by photo-hardening, if the post-hardening treatment is performed at a high temperature, the decrease in insulation will become obvious. .
本發明人等推測,該現象暗示因後硬化之加熱導致經光硬化之塗膜暫時軟化而產生碳黑之凝集之可能性,從而對如下材料進行研究:於碳黑表面形成耐熱性高之樹脂被膜,即便發生凝集亦抑制絕緣性之降低,進而不會對形成黑矩陣時之顯影特性等造成不良影響。 The present inventors speculated that this phenomenon suggests the possibility of agglomeration of carbon black due to temporary softening of the light-cured coating film due to post-curing heating, and the following materials were studied: formation of a resin with high heat resistance on the surface of carbon black Even if the film is agglomerated, the decrease in insulation properties is suppressed, and further, it does not adversely affect the development characteristics and the like when forming the black matrix.
其結果,本發明人等發現如下情形而以至完成本發明:若利用酸性碳黑、及多官能環氧化合物,則即便增加酸性碳黑之含有比率,亦可維持高絕緣性。 As a result, the present inventors have found and completed the present invention that, if acid carbon black and a polyfunctional epoxy compound are used, even if the content ratio of acid carbon black is increased, high insulation properties can be maintained.
即,本發明係關於一種黑矩陣用顏料分散物,其含有酸性碳黑、顏料分散劑、多官能環氧化合物、及溶劑,且上述多官能環氧化合物係相對於100質量份之上述酸性碳黑而含有0.1~50質量份。 That is, the present invention relates to a pigment dispersion for a black matrix, which contains acid carbon black, a pigment dispersant, a polyfunctional epoxy compound, and a solvent, and the polyfunctional epoxy compound is based on 100 parts by mass of the acidic carbon. It is black and contains 0.1 to 50 parts by mass.
又,本發明中,上述多官能環氧化合物較佳為具有選自二苯基甲烷骨架、二萘基甲烷骨架、三骨架、及聯苯骨架中之至少1種骨架之環氧化合物。 In the present invention, the polyfunctional epoxy compound preferably has a structure selected from the group consisting of a diphenylmethane skeleton, a dinaphthylmethane skeleton, An epoxy compound of at least one of a skeleton and a biphenyl skeleton.
又,本發明亦為一種黑矩陣用顏料分散光阻組成物,其含有上述黑矩陣用顏料分散物、鹼可溶性樹脂、光聚合性化合物、及光聚合起始劑。 The present invention is also a pigment-dispersed photoresist composition for a black matrix, which contains the pigment dispersion for a black matrix, an alkali-soluble resin, a photopolymerizable compound, and a photopolymerization initiator.
又,本發明中,較佳為4官能以上之多官能環氧化合物。 In the present invention, a polyfunctional epoxy compound having 4 or more functions is preferred.
以下,詳細地對本發明之黑矩陣用顏料分散物、及含有其之黑矩陣用顏料分散光阻組成物進行說明。 Hereinafter, the pigment dispersion for a black matrix of the present invention and the pigment-dispersed photoresist composition for a black matrix containing the pigment dispersion will be described in detail.
對於本發明之黑矩陣用顏料分散物具有較高之絕緣性之機制並未明確,但推測如下。 The mechanism by which the pigment dispersion for black matrices of the present invention has high insulation properties is not clear, but it is estimated as follows.
可認為,於本發明之黑矩陣用顏料分散物中,酸性碳黑及多官能環氧化合物呈如下狀態:該酸性碳黑之表面具有之取代基與多官能環氧化合物具有之取代基相互作用,而於該酸性碳黑之表面吸附有多官能環氧化合物。因此,藉由使多官能環氧化合物具有多個結部位,可提高與碳黑表面之官能基相互作用之機率。 It is considered that in the pigment dispersion for a black matrix of the present invention, the acidic carbon black and the polyfunctional epoxy compound are in a state where the substituents on the surface of the acidic carbon black interact with the substituents on the polyfunctional epoxy compound. A polyfunctional epoxy compound is adsorbed on the surface of the acidic carbon black. Therefore, by making the polyfunctional epoxy compound have multiple junction sites, the probability of interaction with functional groups on the surface of carbon black can be increased.
又,於塗敷黑矩陣用光阻組成物時,自藉由使多官能環氧化合物之環氧基與酸性碳黑表面之官能基相互作用而吸附之狀態,可充分考量到:利用光硬化時及後硬化時之熱來進行反應,而形成酸性碳黑之環氧樹脂被覆物。 In addition, when coating the photoresist composition for a black matrix, the state of adsorption by interacting the epoxy group of the polyfunctional epoxy compound with the functional group on the surface of the acidic carbon black can be fully considered: light curing It reacts with the heat during and after hardening to form an epoxy resin coating of acid carbon black.
如此,即便酸性碳黑彼此因凝集而接觸,導電性之碳黑表面亦不會直接接觸,而成為介隔有非導電性之多官能環氧化合物被膜之接觸。進而,若多官能環氧化合物具有多環結構之骨架,則高溫時酸性碳黑之被膜之維持優異,故推測可與大體積相結合地維持較高之絕緣性。 In this way, even if the acidic carbon blacks are in contact with each other due to agglomeration, the surfaces of the conductive carbon blacks will not directly contact each other, and will be in contact with the non-conductive multifunctional epoxy compound coating film. Furthermore, if the polyfunctional epoxy compound has a skeleton with a polycyclic structure, the maintenance of the film of the acidic carbon black is excellent at high temperatures, so it is presumed that high insulation can be maintained in combination with a large volume.
本發明之黑矩陣用顏料分散物含有酸性碳黑。 The pigment dispersion for a black matrix of the present invention contains acid carbon black.
作為上述酸性碳黑,可使用自先前以來為了形成黑矩陣而使用之酸性碳黑。 As the acidic carbon black, an acidic carbon black that has been used for forming a black matrix can be used.
作為上述酸性碳黑之具體例,可列舉:三菱化學公司製造之MA7、MA8、MA11、MA14、#1000、#2350等;德固賽公司製造之Special Black 350、Special Black 250、Special Black 550等;Cabot公司製造之MOGUL L、REGAL 400R等;Columbian Carbon公司製造之RAVEN 1200、RAVEN 1250、RAVEN 1255、RAVEN 1190U、RAVEN 1170、RAVEN 1035、RAVEN 1080U、RAVEN 1060U、RAVEN 1100U等。 Specific examples of the acidic carbon black include MA7, MA8, MA11, MA14, # 1000, # 2350, etc. manufactured by Mitsubishi Chemical Corporation; Special Black 350, Special Black 250, Special Black 550, etc. manufactured by Degussa ; MOGUL L, REGAL 400R, etc., manufactured by Cabot; RAVEN 1200, RAVEN 1250, RAVEN 1255, RAVEN 1190U, RAVEN 1170, RAVEN 1035, RAVEN 1080U, RAVEN 1060U, RAVEN 1100U, etc., manufactured by Columbian Carbon.
於上述酸性碳黑中,較佳為pH值為5以下,且具有羧基等酸性基者。又,較佳為粒徑為20~60nm者。若為此種酸性碳黑,則可與下述多官能環氧化合物較佳地相互作用,而對本發明之黑矩陣用顏料分散物賦予高絕緣性。 Among the above acidic carbon blacks, those having a pH of 5 or less and having acidic groups such as a carboxyl group are preferred. The particle diameter is preferably 20 to 60 nm. If it is such an acidic carbon black, it can interact well with the polyfunctional epoxy compound mentioned below, and can provide high insulation to the pigment dispersion for black matrices of this invention.
作為滿足上述特性之酸性碳黑,可列舉Special Black 250、Special Black 350等。 Examples of the acidic carbon black satisfying the above characteristics include Special Black 250 and Special Black 350.
再者,上述粒徑係指藉由顯微鏡觀察而測定或算出之平均一次粒徑。 In addition, the said particle diameter means the average primary particle diameter measured or calculated by microscope observation.
上述酸性碳黑之含量較佳為於本發明之黑矩陣用顏料分散物中,含有3~70質量%。若上述酸性碳黑之含量未達3質量%,則存在遮光性降低之情形。另一方面,若上述酸性碳黑之含量超過70質量%,則存在顏料分散變得困難之情形。 The content of the acidic carbon black is preferably 3 to 70% by mass in the pigment dispersion for a black matrix of the present invention. If the content of the acidic carbon black is less than 3% by mass, the light-shielding property may be reduced. On the other hand, if the content of the above-mentioned acidic carbon black exceeds 70% by mass, it may be difficult to disperse the pigment.
上述酸性碳黑之含量之更佳下限為於本發明之黑矩陣用顏料分散物中含有10質量%,上述酸性碳黑之含量之更佳上限為於本發明之黑矩陣用顏料分散物中含有50質量%。 A more preferable lower limit of the content of the acidic carbon black is 10% by mass contained in the pigment dispersion for the black matrix of the present invention, and a more preferable upper limit of the content of the acidic carbon black is contained in the pigment dispersion of the black matrix of the present invention. 50% by mass.
本發明之黑矩陣用顏料分散物含有顏料分散劑。 The pigment dispersion for a black matrix of the present invention contains a pigment dispersant.
作為上述顏料分散劑,係含鹼性基之顏料分散劑,可使用陰離子性界面活性劑、含鹼性基之聚酯系顏料分散劑、含鹼性基之丙烯酸系顏料分散劑、含鹼性基之胺酯(urethane)系顏料分散劑、含鹼性基之碳二醯亞胺系顏料分散劑等。 As the pigment dispersant, a pigment dispersant containing a basic group, an anionic surfactant, a polyester pigment dispersant containing a basic group, an acrylic pigment dispersant containing a basic group, and a basic group may be used. Urethane-based pigment dispersants, basic carbodiimide-based pigment dispersants, and the like.
該等含鹼性基之顏料分散劑可單獨使用,又,亦可使用2種以上之組合。其中,就獲得良好之顏料分散性之方面而言,較佳為含鹼性基之高分子顏料分散劑。 These basic group-containing pigment dispersants may be used alone or in combination of two or more kinds. Among these, in terms of obtaining good pigment dispersibility, a polymer pigment dispersant containing a basic group is preferred.
作為含鹼性基之高分子顏料分散劑之具體例,可列舉: Specific examples of the polymer pigment dispersant containing a basic group include:
(1)聚胺化合物(例如,聚烯丙胺、聚乙烯胺、聚乙烯聚亞胺等聚(低級伸烷基胺)等)之胺基及/或亞胺基、與選自由具有游離羧基之聚酯、聚醯胺及聚酯醯胺所構成之群中之至少1種之反應產物(日本專利特開2001-59906號公報); (1) An amine group and / or an imine group of a polyamine compound (for example, poly (lower alkyleneamine) such as polyallylamine, polyvinylamine, polyethylene polyimide, and the like, and The reaction product of at least one of the group consisting of polyester, polyamide, and polyesteramine (Japanese Patent Laid-Open No. 2001-59906);
(2)聚(低級)伸烷基亞胺、甲基亞胺基雙丙胺等低分子胺化合物、與具有游離羧基之聚酯之反應產物(日本特開昭54-37082號公報、日本特開平01-311177號公報); (2) Reaction products of low-molecular-weight amine compounds such as poly (lower) alkyleneimines and methyliminobispropylamine with polyesters having free carboxyl groups (Japanese Patent Laid-Open No. 54-37082, Japanese Patent Laid-Open 01-311177);
(3)使甲氧基聚乙二醇等醇類或己內酯聚酯等具有1個羥基之聚酯類、具有2~3個異氰酸酯基反應性官能基之化合物、具有異氰酸酯基反應性官能基及3級胺基之脂肪族或雜環式烴化合物依序與聚異氰酸酯化合物之異氰酸酯基反應而成之反應產物(日本特開平02-612號公報); (3) Alcohols such as methoxypolyethylene glycol or polyesters having one hydroxyl group, such as caprolactone polyesters, compounds having two to three isocyanate group reactive functional groups, and isocyanate group reactive functions A reaction product obtained by sequentially reacting an aliphatic or heterocyclic hydrocarbon compound of a amine group and a tertiary amino group with an isocyanate group of a polyisocyanate compound (Japanese Patent Laid-Open No. 02-612);
(4)使聚異氰酸酯化合物及具有胺基之烴化合物與具有醇性羥基之丙烯酸酯之聚合物反應而成之化合物; (4) a compound obtained by reacting a polyisocyanate compound and a hydrocarbon compound having an amine group with a polymer of an acrylate having an alcoholic hydroxyl group;
(5)使聚醚鏈加成至低分子胺基化合物而成之反應產物; (5) a reaction product obtained by adding a polyether chain to a low molecular amine compound;
(6)使具有胺基之化合物與具有異氰酸酯基之化合物反應而成之反應產物(日本特開平04-210220號公報); (6) A reaction product obtained by reacting a compound having an amine group with a compound having an isocyanate group (Japanese Patent Laid-Open No. 04-210220);
(7)使具有游離羧基之線性聚合物及具有1個2級胺基之有機胺化合物與聚環氧化合物反應而成之反應產物(日本特開平09-87537號公報); (7) A reaction product obtained by reacting a linear polymer having a free carboxyl group and an organic amine compound having a secondary amine group with a polyepoxide compound (Japanese Patent Application Laid-Open No. 09-87537);
(8)單末端具有可與胺基反應之官能基之聚碳酸酯化合物與聚胺化合物之反應產物(日本特開平09-194585號公報); (8) A reaction product of a polycarbonate compound and a polyamine compound having a functional group capable of reacting with an amine group at a single terminal (Japanese Patent Application Laid-Open No. 09-194585);
(9)選自甲基丙烯酸甲酯、甲基丙烯酸乙酯、甲基丙烯酸丙酯、甲基丙烯酸丁酯、甲基丙烯酸硬脂酯、甲基丙烯酸苄酯、丙烯酸甲酯、丙烯酸乙酯、丙烯酸丙酯、丙烯酸丁酯、丙烯酸硬脂酯、丙烯酸苄酯等甲基丙烯酸酯或丙烯酸酯中之至少1種、與丙烯醯胺、甲基丙烯醯胺、N-羥甲基醯胺、乙烯基咪唑、乙烯基吡啶、具有胺基及聚己內酯骨架之單體等含鹼性基之聚合單體中之至少1種、及苯乙烯、苯乙烯衍生物、其他聚合性單體中之至少1種之共聚物(日本特開平01-164429號公報); (9) selected from methyl methacrylate, ethyl methacrylate, propyl methacrylate, butyl methacrylate, stearyl methacrylate, benzyl methacrylate, methyl acrylate, ethyl acrylate, At least one of methacrylate or acrylate, such as propyl acrylate, butyl acrylate, stearyl acrylate, benzyl acrylate, etc., with acrylamide, methacrylamide, N-methylolamine, ethylene At least one of basic group-containing polymerized monomers such as imidazole, vinylpyridine, monomers having an amine group and a polycaprolactone skeleton, and among styrene, styrene derivatives, and other polymerizable monomers Copolymers of at least one kind (Japanese Patent Laid-Open No. 01-164429);
(10)含鹼性基之碳二醯亞胺系顏料分散劑(國際公開WO04/000950號公報); (10) a carbodiimide-based pigment dispersant containing a basic group (International Publication No. WO04 / 000950);
(11)由具有3級胺基、4級銨鹽基等鹼性基之嵌段及不具有官能基之嵌段所構成之嵌段共聚物(參照日本特開2005-55814號之記載); (11) A block copolymer composed of a block having a basic group such as a tertiary amine group and a tertiary ammonium salt group and a block having no functional group (refer to the description in Japanese Patent Application Laid-Open No. 2005-55814);
(12)使聚碳酸酯化合物與聚烯丙胺進行麥可加成反應(Michael addition reaction)而獲得之顏料分散劑(日本特開平09-194585號公報); (12) A pigment dispersant obtained by subjecting a polycarbonate compound to polyallylamine to a Michael addition reaction (Japanese Patent Laid-Open No. 09-194585);
(13)分別具有至少1個聚丁二烯鏈及含鹼性氮基之碳二醯亞胺系化合物(日本特開2006-257243號公報); (13) A carbodiimide-based compound having at least one polybutadiene chain and a basic nitrogen group, respectively (Japanese Patent Laid-Open No. 2006-257243);
(14)於分子內分別具有至少1個具有醯胺基之側鏈、及含鹼性氮基之 碳二醯亞胺系化合物(日本特開2006-176657號公報)等。 (14) each having at least one side chain having a sulfonylamine group and a basic nitrogen group in the molecule Carbodiimide-based compounds (Japanese Patent Laid-Open No. 2006-176657) and the like.
(15)具有含環氧乙烷鏈及環氧丙烷鏈之構成單位,且具有藉由四級化劑而四級化之胺基之聚胺酯(polyurethane)系化合物(日本特開2009-175613號公報); (15) Polyurethane-based compound having a constituent unit containing an ethylene oxide chain and a propylene oxide chain and an amine group quaternized by a quaternizing agent (Japanese Patent Laid-Open No. 2009-175613 );
(16)使於分子內具有異氰尿酸酯環之異氰酸酯化合物之異氰酸酯基、與於分子內具有活性氫基且具有咔唑環及/或偶氮苯骨架之化合物之活性氫基反應而獲得之化合物,且於該化合物之分子內,相對於來自具有異氰尿酸酯環之異氰酸酯化合物之異氰酸酯基、與藉由異氰酸酯基與活性氫基之反應產生之胺酯鍵及脲鍵之合計,咔唑環與偶氮苯骨架之數目為15~85%(日本特願2009-220836)。 (16) Obtained by reacting an isocyanate group of an isocyanate compound having an isocyanurate ring in the molecule with an active hydrogen group of a compound having an active hydrogen group in the molecule and having a carbazole ring and / or an azobenzene skeleton. And the total of the amine ester bond and the urea bond generated by the reaction of the isocyanate group and the active hydrogen group with respect to the isocyanate group derived from the isocyanate compound having an isocyanurate ring in the molecule of the compound, The number of the carbazole ring and the azobenzene skeleton is 15 to 85% (Japanese Patent Application No. 2009-220836).
於上述含鹼性基之高分子顏料分散劑中,更佳為含鹼性基之胺酯系高分子顏料分散劑、含鹼性基之聚酯系高分子顏料分散劑、含鹼性基之丙烯酸系高分子顏料分散劑,進而較佳為含有胺基之胺酯系高分子顏料分散劑、含有胺基之聚酯系高分子顏料分散劑、含有胺基之丙烯酸系高分子顏料分散劑。於上述含鹼性基之胺酯系高分子顏料分散劑中,特佳為具有選自由聚酯鏈、聚醚鏈、及聚碳酸酯鏈所構成之群中之至少1種之含鹼性基(胺基)之胺酯系高分子顏料分散劑。 Among the above-mentioned basic group-containing polymer pigment dispersants, amine ester-based polymer pigment dispersants containing basic groups, polyester-based polymer pigment dispersants containing basic groups, and basic group-containing polymer pigment dispersants are more preferred. The acrylic polymer pigment dispersant is more preferably an amine ester polymer pigment dispersant containing an amine group, a polyester polymer pigment dispersant containing an amine group, and an acrylic polymer pigment dispersant containing an amine group. Among the above-mentioned basic group-containing amine ester-based polymer pigment dispersants, it is particularly preferred to have at least one basic group containing a basic group selected from the group consisting of a polyester chain, a polyether chain, and a polycarbonate chain. (Amine-based) amine ester polymer pigment dispersant.
上述含鹼性基之分散劑較佳為相對於100質量份之上述酸性碳黑而含有1~200質量份。 The basic group-containing dispersant preferably contains 1 to 200 parts by mass based on 100 parts by mass of the acidic carbon black.
若上述含鹼性基之分散劑之含量未達1質量份,則存在損壞顏料分散物之穩定性之情形。另一方面,若上述含鹼性基之分散劑之含量超過200質量份,則存在損壞塗膜之遮光性或絕緣性之情形。 If the content of the basic group-containing dispersant is less than 1 part by mass, the stability of the pigment dispersion may be deteriorated. On the other hand, if the content of the basic group-containing dispersant exceeds 200 parts by mass, the light-shielding property or insulating property of the coating film may be deteriorated.
又,上述含鹼性基之分散劑更佳為相對於100質量份之上述酸性碳黑而含有1~60質量份。 The basic group-containing dispersant is more preferably contained in an amount of 1 to 60 parts by mass based on 100 parts by mass of the acidic carbon black.
本發明之黑矩陣用顏料分散物含有多官能環氧化合物。 The pigment dispersion for a black matrix of the present invention contains a polyfunctional epoxy compound.
本發明之黑矩陣用顏料分散物可藉由使上述多官能環氧樹脂與存在於上述酸性碳黑表面之官能基較佳地相互作用,而賦予高絕緣性。 The pigment dispersion for a black matrix of the present invention can impart high insulation properties by allowing the above-mentioned polyfunctional epoxy resin and the functional group present on the surface of the acidic carbon black to preferably interact with each other.
作為上述多官能環氧化合物,可列舉自先前以來為了形成黑矩陣用顏料分散物而使用之多官能環氧化合物。 As said polyfunctional epoxy compound, the polyfunctional epoxy compound used conventionally in order to form the pigment dispersion for black matrices is mentioned.
作為上述多官能環氧化合物,較佳為具有選自二苯基甲烷骨架、二萘基甲烷骨架、三骨架、及聯苯骨架中之至少1種骨架者。 The polyfunctional epoxy compound preferably has a structure selected from the group consisting of a diphenylmethane skeleton, a dinaphthylmethane skeleton, A skeleton and at least one skeleton of a biphenyl skeleton.
上述二苯基甲烷骨架、二萘基甲烷骨架、及聯苯骨架具有類似於上述酸性碳黑之表面結構之結構,故變得易於接近酸性碳黑,於烘烤黑矩陣用顏料分散光阻組成物時,易於與存在於酸性碳黑表面之官能基反應,因此可認為可較佳地對本發明之黑矩陣用顏料分散物賦予高絕緣性。 The diphenylmethane skeleton, the dinaphthylmethane skeleton, and the biphenyl skeleton have a structure similar to the surface structure of the acidic carbon black described above, so they are easily accessible to the acidic carbon black, and the photoresist composition is dispersed in a pigment for baking black matrix. It is easy to react with the functional group existing on the surface of the acidic carbon black, and it is considered that the pigment dispersion for a black matrix of the present invention can be preferably provided with high insulation properties.
又,具有上述三骨架之多官能環氧化合物中,由於三骨架具有鹼性,故變得易於接近酸性碳黑,於烘烤黑矩陣用顏料分散光阻組成物時,易於與存在於酸性碳黑表面之官能基反應,因此可認為可較佳地對本發明之黑矩陣用顏料分散物賦予高絕緣性。 Also, having the above three In the framework of multifunctional epoxy compounds, The skeleton has basicity, so it is easy to approach acidic carbon black. When baking the black matrix pigment to disperse the photoresist composition, it is easy to react with the functional group existing on the surface of the acidic carbon black. The black matrix pigment dispersion provides high insulation.
作為具有選自上述二苯基甲烷骨架、二萘基甲烷骨架、三骨架、及聯苯骨架中之至少1種骨架之多官能環氧化合物,可列舉下述式(1)~(3)。 As having a structure selected from the group consisting of the diphenylmethane skeleton, the dinaphthylmethane skeleton, Examples of the polyfunctional epoxy compound having at least one skeleton among the skeleton and the biphenyl skeleton include the following formulae (1) to (3).
商品名:TEPIC(日產化學公司製造)
商品名:EPICLON 830(DIC公司製造)
商品名:JER-YX-4000(三菱化學公司製造)
上述多官能環氧化合物較佳為4官能以上之多官能環氧化合物。若為上述4官能以上之多官能環氧化合物,則高溫時被膜之維持優異,故被認為可與大體積相結合地維持高絕緣性。 The polyfunctional epoxy compound is preferably a polyfunctional epoxy compound having four or more functions. If it is the above-mentioned polyfunctional epoxy compound having four or more functions, the film is excellent in maintaining the film at a high temperature, so it is considered that high insulation can be maintained in combination with a large volume.
上述4官能以上之多官能環氧化合物更佳為具有二苯基甲烷骨架、二萘基甲烷骨架、三骨架、及聯苯骨架之4官能以上之多官能環氧化合物。作為此種化合物,可列舉下述式(4)。 The above-mentioned polyfunctional epoxy compound having four or more functions is more preferably a diphenylmethane skeleton, a dinaphthylmethane skeleton, 4-functional polyfunctional epoxy compound with a skeleton and a biphenyl skeleton. Examples of such a compound include the following formula (4).
商品名:JER-604(三菱化學公司製造)
上述多官能環氧化合物相對於100質量份之上述酸性碳黑而含有0.1~50質量份。 The polyfunctional epoxy compound contains 0.1 to 50 parts by mass based on 100 parts by mass of the acidic carbon black.
若上述多官能環氧化合物之含量相對於100質量份之上述酸性碳黑而未達0.1質量份,則無法獲得高電阻之黑矩陣用顏料分散物。另一方面,若上述多官能環氧化合物之含量相對於100質量份之上述酸性碳黑而超過50質量份,則存在因環氧基之聚合而損壞分散液之穩定性之可能性。 If the content of the polyfunctional epoxy compound is less than 0.1 parts by mass relative to 100 parts by mass of the above-mentioned acidic carbon black, a pigment dispersion for a black matrix having a high resistance cannot be obtained. On the other hand, if the content of the polyfunctional epoxy compound is more than 50 parts by mass relative to 100 parts by mass of the above-mentioned acidic carbon black, there is a possibility that the stability of the dispersion liquid is impaired due to the polymerization of the epoxy group.
上述多官能環氧化合物之較佳含量之下限係相對於100質量份之上述酸性碳黑而為5質量份,上述多官能環氧化合物之較佳含量之上限係相對於100質量份之上述酸性碳黑而為20質量份。 The lower limit of the preferable content of the polyfunctional epoxy compound is 5 parts by mass relative to 100 parts by mass of the above-mentioned acidic carbon black, and the upper limit of the preferable content of the polyfunctional epoxy compound is relative to 100 parts by mass of the above acidic Carbon black was 20 parts by mass.
本發明之黑矩陣用顏料分散物含有溶劑。 The pigment dispersion for a black matrix of the present invention contains a solvent.
作為上述溶劑,係自先前以來使用者,可使酸性碳黑穩定地分散,且可使上述顏料分散劑、上述多官能環氧化合物、及下述鹼可溶性樹脂溶解。 As the solvent, users have been able to disperse acid carbon black stably, and the pigment dispersant, the polyfunctional epoxy compound, and the alkali-soluble resin described below have been dissolved.
作為上述溶劑,較佳為常壓(1.013×102kPa)下之沸點為100~250℃之酯系有機溶劑、醚系有機溶劑、醚酯系有機溶劑、酮系有機溶劑、芳香族烴系有機溶劑、含氮系有機溶劑等。 As the solvent, an ester-based organic solvent, an ether-based organic solvent, an ether-ester-based organic solvent, a ketone-based organic solvent, and an aromatic hydrocarbon-based organic solvent having a boiling point of 100 to 250 ° C. at normal pressure (1.013 × 10 2 kPa) are preferred. Organic solvents, nitrogen-containing organic solvents, and the like.
作為此種溶劑,具體而言,可例示:乙二醇單甲醚、乙二醇單乙醚、乙二醇單異丙醚、乙二醇單丁醚、二乙二醇單甲醚、二乙二醇單乙醚、丙二醇單甲醚、丙二醇單乙醚、丙二醇單丁醚、二乙二醇二乙醚、二乙二醇二甲醚、二乙二醇甲基乙醚等醚系有機溶劑類;乙二醇單甲醚乙酸酯、乙二醇單乙醚乙酸酯、乙二醇單丁醚乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等醚酯系有機溶劑類;甲基異丁基酮、環己酮、2-庚 酮、δ-丁內酯等酮系有機溶劑類;2-羥基丙酸甲酯、2-羥基丙酸乙酯、2-羥基-2-甲基丙酸乙酯、丙酸3-甲基-3-甲氧基丁酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙氧基乙酸乙酯、羥基乙酸酯、甲酸正戊酯等酯系有機溶劑類;N-甲基吡咯啶酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺等含氮系有機溶劑類等;該等有機溶劑可單獨使用或混合2種以上使用。 Specific examples of such a solvent include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monoisopropyl ether, ethylene glycol monobutyl ether, diethylene glycol monomethyl ether, and diethyl ether. Ether-based organic solvents such as glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monobutyl ether, diethylene glycol diethyl ether, diethylene glycol dimethyl ether, and diethylene glycol methyl ether; ethylene glycol Ether-based organic solvents such as alcohol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol monobutyl ether acetate, propylene glycol monomethyl ether acetate, and propylene glycol monoethyl ether acetate; Isobutyl ketone, cyclohexanone, 2-heptane Ketones, δ-butyrolactone and other ketone organic solvents; methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate, ethyl 2-hydroxy-2-methylpropionate, 3-methyl propionate- 3-methoxybutyrate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethoxylate Ester-based organic solvents such as ethyl acetate, glycolate, and n-pentyl formate; N-methylpyrrolidone, N, N-dimethylformamide, N, N-dimethylacetamide And other nitrogen-containing organic solvents; these organic solvents can be used alone or in combination of two or more.
本發明之黑矩陣用顏料分散物可為了提高酸性碳黑之分散性而含有選自由含酸基之顏料衍生物、含酸基之色素衍生物、及含酸基之色素中間物所構成之群中之至少1種、以及鹼可溶性樹脂。 The pigment dispersion for a black matrix of the present invention may contain a group selected from the group consisting of an acid group-containing pigment derivative, an acid group-containing pigment derivative, and an acid group-containing pigment intermediate in order to improve the dispersibility of acidic carbon black. At least one of them, and an alkali-soluble resin.
首先,作為含酸基之顏料衍生物、含酸基之色素衍生物,可例示具有酸基之酞菁系顏料衍生物、具有酸基之蒽醌系顏料衍生物、具有酸基之萘系顏料衍生物等。其中,具有磺酸基之酞菁系顏料衍生物就酸性碳黑之分散性之方面而言較佳。 First, as the pigment derivative containing an acid group and the pigment derivative containing an acid group, a phthalocyanine pigment derivative having an acid group, an anthraquinone pigment derivative having an acid group, and a naphthalene pigment having an acid group can be exemplified. Derivatives, etc. Among them, a phthalocyanine-based pigment derivative having a sulfonic acid group is preferable in terms of dispersibility of acidic carbon black.
上述含酸基之顏料衍生物、上述含酸基之色素衍生物、及上述含酸基之色素中間物較佳為相對於100質量份之上述酸性碳黑而含有0~20質量份。 The acid group-containing pigment derivative, the acid group-containing pigment derivative, and the acid group-containing pigment intermediate preferably contain 0 to 20 parts by mass based on 100 parts by mass of the acid carbon black.
上述含酸基之顏料衍生物、上述含酸基之色素衍生物、及上述含酸基之色素中間物更佳為相對於100質量份之上述酸性碳黑而含有0.5~10質量份。 The acid group-containing pigment derivative, the acid group-containing pigment derivative, and the acid group-containing pigment intermediate are more preferably contained in an amount of 0.5 to 10 parts by mass based on 100 parts by mass of the acidic carbon black.
作為上述鹼可溶性樹脂,可列舉後述記載之鹼可溶性共聚物樹脂、鹼可溶性卡多樹脂(cardo resin)等。 Examples of the alkali-soluble resin include alkali-soluble copolymer resins and alkali-soluble cardo resins described below.
上述鹼可溶性樹脂較佳為相對於100質量份之上述酸性碳黑而含有0~100質量份。 The alkali-soluble resin preferably contains 0 to 100 parts by mass based on 100 parts by mass of the acidic carbon black.
上述鹼可溶性樹脂更佳為相對於100質量份之上述酸性碳黑而含有0.5~60質量份。 The alkali-soluble resin is more preferably contained in an amount of 0.5 to 60 parts by mass based on 100 parts by mass of the acidic carbon black.
本發明之黑矩陣用顏料分散物係酸性碳黑、顏料分散劑、上述多官能環氧化合物、溶劑、及視需要添加之選自由含酸基之顏料衍生物、含酸基之色素衍生物、含酸基之色素中間物、及鹼可溶性樹脂所構成之群中之至少1種之混合物。黑矩陣用顏料分散物可使用輥磨機、捏合機、高速攪拌機、珠磨機、球磨機、砂磨機、超音波分散機、高壓分散裝置等,對該等之混合物進行分散處理而獲得。 The pigment dispersion for the black matrix of the present invention is acidic carbon black, a pigment dispersant, the above-mentioned polyfunctional epoxy compound, a solvent, and optionally selected from an acid group-containing pigment derivative, an acid group-containing pigment derivative, A mixture of at least one of a group consisting of an acid group-containing pigment intermediate and an alkali-soluble resin. The pigment dispersion for a black matrix can be obtained by subjecting the mixture to a dispersion treatment using a roll mill, a kneader, a high-speed mixer, a bead mill, a ball mill, a sand mill, an ultrasonic disperser, a high-pressure disperser, and the like.
其次,對本發明之黑矩陣用顏料分散光阻組成物進行說明。 Next, the pigment-dispersed photoresist composition for a black matrix of the present invention will be described.
本發明之黑矩陣用顏料分散光阻組成物係如下者:主要由上述黑矩陣用顏料分散物、以及鹼可溶性樹脂、光聚合性化合物、光聚合起始劑、溶劑構成,視需要適當地添加聚合抑制劑等各種添加劑而獲得。 The pigment-dispersed photoresist composition for a black matrix of the present invention is mainly composed of the pigment dispersion for a black matrix described above, and an alkali-soluble resin, a photopolymerizable compound, a photopolymerization initiator, and a solvent, and is appropriately added as necessary. It is obtained by various additives such as a polymerization inhibitor.
作為使用於本發明之黑矩陣用顏料分散光阻組成物之鹼可溶性樹脂,可例示鹼可溶性共聚物、鹼可溶性卡多樹脂等。 Examples of the alkali-soluble resin used in the pigment-dispersed photoresist composition for a black matrix of the present invention include an alkali-soluble copolymer, an alkali-soluble cardo resin, and the like.
作為鹼可溶性共聚物,例如為使丙烯酸、甲基丙烯酸、衣康酸、順丁烯二酸、順丁烯二酸酐、順丁烯二酸單烷基酯、甲基順丁烯二酸、甲基順丁烯二酸酐、甲基順丁烯二酸單烷基酯等含羧基之不飽和單體、與選自由苯乙烯、丙烯酸2-羥基乙酯、甲基丙烯酸2-羥基乙酯、丙烯酸烯丙酯、 甲基丙烯酸烯丙酯、丙烯酸苄酯、甲基丙烯酸苄酯、甘油單丙烯酸酯、甘油甲基丙烯酸酯、具有二環戊二烯骨架之單(甲基)丙烯酸酯、N-苯基順丁烯二醯亞胺、聚苯乙烯巨單體、及聚甲基丙烯酸甲酯巨單體所構成之群中之至少1種反應而獲得之共聚物。 Examples of the alkali-soluble copolymer include acrylic acid, methacrylic acid, itaconic acid, maleic acid, maleic anhydride, maleic acid monoalkyl ester, methyl maleic acid, and formic acid. Unsaturated monomers containing carboxyl groups such as maleic anhydride, methyl maleic acid monoalkyl ester, and the like; and selected from the group consisting of styrene, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, and acrylic acid. Allyl esters, Allyl methacrylate, benzyl acrylate, benzyl methacrylate, glycerol monoacrylate, glycerol methacrylate, mono (meth) acrylate with a dicyclopentadiene skeleton, N-phenylcis-butyl A copolymer obtained by reacting at least one of a group consisting of enediimine, polystyrene macromonomer, and polymethylmethacrylate macromonomer.
作為上述鹼可溶性卡多樹脂,可列舉茀環氧(甲基)丙烯酸衍生物與二羧酸酐及/或四羧酸二酐之加成產物即具有茀骨架之環氧(甲基)丙烯酸酯酸加成物等。 Examples of the alkali-soluble cardo resin include an epoxy (meth) acrylic acid having a fluorene skeleton, an addition product of a fluorene epoxy (meth) acrylic acid derivative and a dicarboxylic anhydride and / or a tetracarboxylic dianhydride. Adducts, etc.
上述鹼可溶性樹脂可單獨使用或併用2種以上使用。鹼可溶性樹脂就塗膜形成性、鹼性顯影性之方面而言,較佳為酸值為20~300mgKOH/g,重量平均分子量為1000~20萬。上述鹼可溶性樹脂可根據要求之性能而適當地使用1種或組合2種以上使用。 The said alkali-soluble resin can be used individually or in combination of 2 or more types. In terms of coating film formation properties and alkali developability, the alkali-soluble resin preferably has an acid value of 20 to 300 mgKOH / g and a weight average molecular weight of 1,000 to 200,000. The said alkali-soluble resin can be used individually by 1 type or in combination of 2 or more types according to the required performance.
黑矩陣用顏料分散光阻組成物中之上述鹼可溶性樹脂之含量較佳為於黑矩陣用顏料分散光阻組成物中之固形物成分中成為5~50質量%之範圍。 The content of the alkali-soluble resin in the pigment-dispersed photoresist composition for a black matrix is preferably in a range of 5 to 50% by mass in the solid content of the pigment-dispersed photoresist composition for a black matrix.
作為使用於本發明之黑矩陣用顏料分散光阻組成物之光聚合性化合物,可列舉具有光聚合性不飽和鍵之單體、低聚物等。 Examples of the photopolymerizable compound used in the pigment-dispersed photoresist composition for the black matrix pigment of the present invention include monomers and oligomers having a photopolymerizable unsaturated bond.
具體而言,作為於分子內具有1個光聚合性不飽和鍵之單體,例如可使用甲基丙烯酸甲酯、甲基丙烯酸丁酯、甲基丙烯酸2-乙基己酯、丙烯酸甲酯、丙烯酸丁酯、丙烯酸2-乙基己酯等甲基丙烯酸烷基酯或丙烯酸烷基酯;甲基丙烯酸苄酯、丙烯酸苄酯等甲基丙烯酸芳烷基酯或丙烯酸芳烷基酯;甲基丙烯酸丁氧基乙酯、丙烯酸丁氧基乙酯等甲基丙烯酸烷氧基烷基酯或丙烯酸烷氧基烷基酯;甲基丙烯酸N,N-二甲胺基乙酯、丙烯酸N,N- 二甲胺基乙酯等甲基丙烯酸胺基烷基酯或丙烯酸胺基烷基酯;二乙二醇單乙醚、三乙二醇單丁醚、二丙二醇單甲醚等聚伸烷基二醇單烷基醚之甲基丙烯酸酯或丙烯酸酯;六乙二醇單苯醚等聚伸烷基二醇單芳基醚之甲基丙烯酸酯或丙烯酸酯;甲基丙烯酸異冰片酯或丙烯酸異冰片酯;甘油甲基丙烯酸酯或甘油丙烯酸酯;甲基丙烯酸2-羥基乙酯或丙烯酸2-羥基乙酯等。 Specifically, as the monomer having one photopolymerizable unsaturated bond in the molecule, for example, methyl methacrylate, butyl methacrylate, 2-ethylhexyl methacrylate, methyl acrylate, Alkyl methacrylate or alkyl acrylate, such as butyl acrylate, 2-ethylhexyl acrylate; aralkyl methacrylate, or aralkyl acrylate, such as benzyl methacrylate or benzyl acrylate; methyl Alkoxyalkyl methacrylate or alkoxyalkyl acrylate, such as butoxyethyl acrylate, butoxyethyl acrylate; N, N-dimethylaminoethyl methacrylate, N, N acrylate - Dimethylaminoethyl and other aminoalkyl methacrylates or aminoalkyl acrylates; polyalkylene glycols such as diethylene glycol monoethyl ether, triethylene glycol monobutyl ether, and dipropylene glycol monomethyl ether Methacrylate or acrylate of monoalkyl ether; methacrylate or acrylate of polyalkylene glycol monoaryl ether such as hexaethylene glycol monophenyl ether; isobornyl methacrylate or isobornyl acrylate Esters; glycerol methacrylate or glyceryl acrylate; 2-hydroxyethyl methacrylate or 2-hydroxyethyl acrylate, and the like.
作為於分子內具有2個以上之光聚合性不飽和鍵之單體,例如可使用雙酚A二甲基丙烯酸酯、1,4-丁二醇二甲基丙烯酸酯、1,3-丁二醇二甲基丙烯酸酯、二乙二醇二甲基丙烯酸酯、甘油二甲基丙烯酸酯、新戊二醇二甲基丙烯酸酯、聚乙二醇二甲基丙烯酸酯、聚丙二醇二甲基丙烯酸酯、四乙二醇二甲基丙烯酸酯、三羥甲基丙烷三甲基丙烯酸酯、新戊四醇三甲基丙烯酸酯、新戊四醇四甲基丙烯酸酯、二新戊四醇四甲基丙烯酸酯、二新戊四醇六甲基丙烯酸酯、二新戊四醇五甲基丙烯酸酯、雙酚A二丙烯酸酯、1,4-丁二醇二丙烯酸酯、1,3-丁二醇二丙烯酸酯、二乙二醇二丙烯酸酯、甘油二丙烯酸酯、新戊二醇二丙烯酸酯、聚乙二醇二丙烯酸酯、聚丙二醇二丙烯酸酯、四乙二醇二丙烯酸酯、三羥甲基丙烷三丙烯酸酯、新戊四醇三丙烯酸酯、新戊四醇四丙烯酸酯、二新戊四醇四丙烯酸酯、二新戊四醇六丙烯酸酯、二新戊四醇五丙烯酸酯等。 As the monomer having two or more photopolymerizable unsaturated bonds in the molecule, for example, bisphenol A dimethacrylate, 1,4-butanediol dimethacrylate, 1,3-butane Alcohol dimethacrylate, diethylene glycol dimethacrylate, glycerol dimethacrylate, neopentyl glycol dimethacrylate, polyethylene glycol dimethacrylate, polypropylene glycol dimethacrylate Esters, tetraethylene glycol dimethacrylate, trimethylolpropane trimethacrylate, neopentyltetraol trimethacrylate, neopentaerythritol tetramethacrylate, dipentaerythritol tetramethyl Acrylate, dipentaerythritol hexamethacrylate, dipentaerythritol pentamethacrylate, bisphenol A diacrylate, 1,4-butanediol diacrylate, 1,3-butanediol Alcohol diacrylate, diethylene glycol diacrylate, glycerol diacrylate, neopentyl glycol diacrylate, polyethylene glycol diacrylate, polypropylene glycol diacrylate, tetraethylene glycol diacrylate, trihydroxy Methylpropane triacrylate, neopentaerythritol triacrylate, neopentaerythritol tetraacrylate, dineopentyl Tetraol tetraacrylate, dinepentaerythritol hexaacrylate, dinepentaerythritol pentaacrylate and the like.
作為具有上述光聚合性不飽和鍵之低聚物,可使用使上述單體適當地聚合而獲得者。該等光聚合性化合物可單獨使用或組合2種以上使用。 As the oligomer having the photopolymerizable unsaturated bond, one obtained by appropriately polymerizing the monomers can be used. These photopolymerizable compounds can be used individually or in combination of 2 or more types.
於本發明中,上述光聚合性化合物之使用量係基於本發明之黑矩陣用顏料分散光阻組成物中之總固形物成分,較佳在3~50質量%之範圍。 In the present invention, the amount of the photopolymerizable compound used is based on the total solid content of the pigment-dispersed photoresist composition for the black matrix of the present invention, and is preferably in a range of 3 to 50% by mass.
作為使用於本發明之黑矩陣用顏料分散光阻組成物之光聚合起始劑,並無特別限定,例如可使用二苯甲酮、N,N'-四乙基-4,4'-二胺基二苯甲酮、4-甲氧基-4'-二甲胺基二苯甲酮、苯偶醯(benzil)、2,2-二乙氧基苯乙酮、安息香、安息香甲醚、安息香異丁醚、苯偶醯二甲基縮酮(benzil dimethylketal)、α-羥基苯異丁酮、9-氧硫、2-氯-9-氧硫、1-羥基環己基苯酮、第三丁基蒽醌、1-氯蒽醌、2,3-二氯蒽醌、3-氯-2-甲基蒽醌、2-乙基蒽醌、1,4-萘醌、1,2-苯并蒽醌、1,4-二甲基蒽醌、2-苯基蒽醌、三系光聚合起始劑、肟酯(oxime ester)系光聚合起始劑等。該等光聚合起始劑可單獨使用或併用2種以上使用。 The photopolymerization initiator used in the black matrix pigment-dispersed photoresist composition of the present invention is not particularly limited. For example, benzophenone, N, N'-tetraethyl-4,4'-di Aminobenzophenone, 4-methoxy-4'-dimethylaminobenzophenone, benzil, 2,2-diethoxyacetophenone, benzoin, benzoin methyl ether, Benzoyl isobutyl ether, benzil dimethylketal, α-hydroxybenzoisobutyl ketone, 9-oxysulfur , 2-chloro-9-oxysulfur , 1-hydroxycyclohexyl benzophenone, third butyl anthraquinone, 1-chloroanthraquinone, 2,3-dichloroanthraquinone, 3-chloro-2-methylanthraquinone, 2-ethylanthraquinone, 1 , 4-naphthoquinone, 1,2-benzoanthraquinone, 1,4-dimethylanthraquinone, 2-phenylanthraquinone, tris Based photopolymerization initiator, oxime ester based photopolymerization initiator and the like. These photopolymerization initiators can be used alone or in combination of two or more.
於本發明中,上述光聚合起始劑之使用量係基於本發明之黑矩陣用顏料分散光阻組成物中之總固形物成分,較佳為處於1~20質量%之範圍。 In the present invention, the amount of the photopolymerization initiator used is based on the total solid content of the pigment-dispersed photoresist composition for the black matrix of the present invention, and is preferably in the range of 1 to 20% by mass.
作為使用於本發明之黑矩陣用顏料分散光阻組成物之溶劑,可使用與上述列舉之溶劑相同者。特佳為常壓(1.013×102kPa)下之沸點為100~250℃之酯系有機溶劑、醚系有機溶劑、醚酯系有機溶劑、酮系有機溶劑、芳香族烴系有機溶劑、含氮系有機溶劑等。若大量含有沸點超過250℃之有機溶劑,則存在如下情形:於對塗佈形成之塗膜進行預烤時,有機溶劑不會充分地蒸發而殘存於乾燥塗膜內,乾燥塗膜之耐熱性降低。又,若大量含有沸點未達100℃之有機溶劑,則存在如下情形:難以進行無不均而均勻地塗佈,而無法獲得表面平滑性優異之塗膜。 As the solvent used in the pigment-dispersed photoresist composition for the black matrix of the present invention, the same solvents as those listed above can be used. Particularly preferred are ester-based organic solvents, ether-based organic solvents, ether-ester-based organic solvents, ketone-based organic solvents, aromatic hydrocarbon-based organic solvents, and organic solvents having a boiling point of 100 to 250 ° C at normal pressure (1.013 × 10 2 kPa). Nitrogen-based organic solvents. If a large amount of an organic solvent having a boiling point of more than 250 ° C is contained, there is a case where the organic solvent does not sufficiently evaporate and remains in the dry coating film when the coating film formed by the coating is pre-baked, and the heat resistance of the dry coating film reduce. When a large amount of an organic solvent having a boiling point of less than 100 ° C is contained, it may be difficult to perform uniform coating without unevenness, and a coating film having excellent surface smoothness may not be obtained.
作為此種溶劑,具體而言,有乙二醇單甲醚、乙二醇單乙醚、 乙二醇單異丙醚、乙二醇單丁醚、二乙二醇單甲醚、二乙二醇單乙醚、丙二醇單甲醚、丙二醇單乙醚、丙二醇單丁醚、二乙二醇二乙醚、二乙二醇二甲醚、二乙二醇甲基乙醚等醚系有機溶劑類;乙二醇單甲醚乙酸酯、乙二醇單乙醚乙酸酯、乙二醇單丁醚乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等醚酯系有機溶劑類;甲基異丁基酮、環己酮、2-庚酮、δ-丁內酯等酮系有機溶劑類;2-羥基丙酸甲酯、2-羥基丙酸乙酯、2-羥基-2-甲基丙酸乙酯、丙酸3-甲基-3-甲氧基丁酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙氧基乙酸乙酯、羥基乙酸酯、甲酸正戊酯等酯系有機溶劑類;N-甲基吡咯啶酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺等含氮系有機溶劑類等;可將該等單獨使用或混合2種以上使用。 Specific examples of such a solvent include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, Ethylene glycol monoisopropyl ether, ethylene glycol monobutyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monobutyl ether, diethylene glycol diethyl ether , Diethylene glycol dimethyl ether, diethylene glycol methyl ether and other ether organic solvents; ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol monobutyl ether acetate Esters, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate and other ether ester organic solvents; methyl isobutyl ketone, cyclohexanone, 2-heptanone, δ-butyrolactone and other ketone organic solvents Class; methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate, ethyl 2-hydroxy-2-methylpropionate, 3-methyl-3-methoxybutyl propionate, 3-methoxy Methyl propionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl ethoxyacetate, glycolate, n-formate Ester-based organic solvents such as amyl esters; N-methyl pyrrolidone, N, N-dimethylformamide, N, N-dimethylacetamide and other nitrogen-containing organic solvents; etc .; It can be used alone or in combination of two or more.
於該等溶劑中,就溶解性、分散性、塗佈性等方面而言,較佳為二乙二醇二甲醚、二乙二醇甲基乙醚、乙二醇單甲醚乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯、環己酮、2-庚酮、2-羥基丙酸乙酯、丙酸3-甲基-3-甲氧基丁酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、甲酸正戊酯等。特佳為丙二醇單甲醚乙酸酯。 Among these solvents, in terms of solubility, dispersibility, coatability, and the like, diethylene glycol dimethyl ether, diethylene glycol methyl ether, ethylene glycol monomethyl ether acetate, and the like are preferred. Propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, cyclohexanone, 2-heptanone, ethyl 2-hydroxypropionate, 3-methyl-3-methoxybutyl propionate, 3-methyl Ethoxy propionate, methyl 3-ethoxy propionate, n-pentyl formate and the like. Particularly preferred is propylene glycol monomethyl ether acetate.
該等溶劑就上述顏料分散劑、上述多官能環氧化合物、上述鹼可溶性樹脂之溶解性、顏料分散性、塗佈性等方面而言,較佳為於使用於上述黑矩陣用顏料分散光阻組成物之總有機溶劑中,含有50質量%以上,更佳為含有70質量%以上。 These solvents are preferably used for the pigment dispersion photoresist for the black matrix in terms of the dispersibility of the pigment, the polyfunctional epoxy compound, the solubility of the alkali-soluble resin, pigment dispersibility, and coating properties. The total organic solvent of the composition contains 50% by mass or more, and more preferably 70% by mass or more.
於本發明之黑矩陣用顏料分散光阻組成物中,亦可視需要而適當地使 用除上述者以外之其他光聚合性化合物、熱聚合抑制劑、抗氧化劑等各種添加劑。 In the pigment-dispersed photoresist composition for a black matrix of the present invention, it may be appropriately used as required. Various additives such as photopolymerizable compounds, thermal polymerization inhibitors, and antioxidants other than those mentioned above are used.
製造本發明之黑矩陣用顏料分散光阻組成物之方法係本發明之較佳之實施形態之一例,本發明並不限定於此。例如,可利用如下方法:於黑矩陣用顏料分散物添加光聚合性化合物、光聚合起始劑、鹼可溶性樹脂,且視需要添加有機溶劑及其他添加劑,並使用攪拌裝置等進行攪拌混合。 The method for producing the pigment-dispersed photoresist composition for a black matrix of the present invention is an example of a preferred embodiment of the present invention, and the present invention is not limited thereto. For example, it is possible to use a method in which a photopolymerizable compound, a photopolymerization initiator, and an alkali-soluble resin are added to the pigment dispersion for the black matrix, and an organic solvent and other additives are added if necessary, followed by stirring and mixing using a stirring device or the like.
再者,黑矩陣用顏料分散光阻組成物中之碳黑以黑矩陣用顏料分散光阻組成物之固形物成分中之質量%計,較佳為30~80質量%。 The carbon black in the pigment-dispersed photoresist composition for a black matrix is preferably 30 to 80% by mass based on the mass% of the solid content of the pigment-dispersed photoresist composition for a black matrix.
根據本發明,可提供一種具有高遮光性及高絕緣性之黑矩陣用顏料分散物、及含有其之黑矩陣用顏料分散光阻組成物。 According to the present invention, it is possible to provide a pigment dispersion for a black matrix having high light shielding properties and high insulation properties, and a pigment dispersion photoresist composition for a black matrix containing the pigment dispersion.
以下,使用實施例具體地對本發明進行說明,但本發明係只要不脫離其主旨及適用範圍,則並不限定於該等實施例。再者,於本實施例中,若未特別說明,則「份」及「%」分別表示「質量份」及「質量%」。 Hereinafter, the present invention will be specifically described using examples, but the present invention is not limited to these examples as long as it does not deviate from the gist and scope of application. Furthermore, in this embodiment, unless otherwise specified, "part" and "%" represent "mass part" and "mass%", respectively.
以下之實施例、比較例中使用之黑矩陣用顏料分散物之材料如下。 The materials of the pigment dispersion for black matrix used in the following examples and comparative examples are as follows.
Special Black 250(德固賽公司製造、吸油量:46ml/100g、pH值:3.1、平均一次粒徑56nm) Special Black 250 (manufactured by Degussa, oil absorption: 46ml / 100g, pH: 3.1, average primary particle size 56nm)
BYK-161(BYK Chemie公司製造、Disperbyk-161、胺值11mgKOH/g、酸值0mgKOH/g) BYK-161 (manufactured by BYK Chemie, Disperbyk-161, amine value: 11 mgKOH / g, acid value: 0 mgKOH / g)
JER-604(三菱化學公司製造、具有聯苯骨架之多官能環氧化合物) JER-604 (Mitsubishi Chemical Corporation, a multifunctional epoxy compound with a biphenyl skeleton)
EPICLON 830(DIC公司製造、具有二苯基甲烷骨架之多官能環氧化合物) EPICLON 830 (manufactured by DIC, a multifunctional epoxy compound with a diphenylmethane skeleton)
JER-YX-4000(三菱化學公司製造、具有聯苯骨架之多官能環氧化合物) JER-YX-4000 (Mitsubishi Chemical Corporation, a multifunctional epoxy compound with a biphenyl skeleton)
TEPIC(日產化學公司製造、具有三骨架之多官能環氧化合物) TEPIC (manufactured by Nissan Chemical Co., Ltd. Multifunctional epoxy compound of the skeleton)
DENACOL EX-141(長瀨化成公司製造、單官能環氧化合物) DENACOL EX-141 (manufactured by Nagase Kasei, a monofunctional epoxy compound)
Solsperse 5000(Lubrizol公司製造、酞菁衍生物) Solsperse 5000 (manufactured by Lubrizol, phthalocyanine derivative)
PGMEA(丙二醇單甲醚乙酸酯) PGMEA (propylene glycol monomethyl ether acetate)
以下之實施例、比較例中使用之黑矩陣用顏料分散光阻組成物之材料如下。 The materials of the pigment dispersion photoresist composition for black matrix used in the following examples and comparative examples are as follows.
BzMA/MAA(甲基丙烯酸苄酯/甲基丙烯酸共聚物、理論酸值:120mgKOH/g、質量平均分子量:25000) BzMA / MAA (benzyl methacrylate / methacrylic acid copolymer, theoretical acid value: 120 mgKOH / g, mass average molecular weight: 25000)
DPHA(二新戊四醇六丙烯酸酯) DPHA (dinepentaerythritol hexaacrylate)
Irgacure 907(BASF公司製造、2-甲基-1[4-(甲硫基)苯基]-2-嗎啉基丙烷-1-酮) Irgacure 907 (manufactured by BASF, 2-methyl-1 [4- (methylthio) phenyl] -2-morpholinylpropane-1-one)
PGMEA(丙二醇單甲醚乙酸酯) PGMEA (propylene glycol monomethyl ether acetate)
以成為表1之組成(表1中之各材料之使用量為質量%)之方式混合各種材料,藉由珠磨機混練一整天,而製備實施例1~6、比較例1~4之黑矩陣用顏料分散物。 Various materials were mixed in such a manner as to have a composition in Table 1 (the usage amount of each material in Table 1 is mass%), and kneaded by a bead mill for a whole day to prepare Examples 1 to 6, and Comparative Examples 1 to 4 Pigment dispersion for black matrix.
使用高速攪拌機,以成為表1之組成(表1中之各材料之使用量為質量%)之方式均勻地混合實施例1~6、比較例1~4之各黑矩陣用顏料分散物與其他材料,之後,藉由孔徑為3μm之過濾器進行過濾而獲得實施例1~6、比較例1~4之各黑矩陣用顏料分散光阻組成物。 Using a high-speed mixer, uniformly mix the pigment dispersions for each of the black matrices of Examples 1 to 6 and Comparative Examples 1 to 4 so as to have the composition of Table 1 (the amount of each material used in Table 1 is mass%) The material was filtered through a filter having a pore size of 3 μm to obtain the pigment-dispersed photoresist composition for each of the black matrices of Examples 1 to 6 and Comparative Examples 1 to 4.
對於實施例1~6、比較例1~4中獲得之黑矩陣用顏料分散物、及黑矩陣用顏料分散光阻組成物,藉由下述方法評價分散穩定性、光學密度、及表面電阻值,並將其結果示於表2。 Regarding the pigment dispersion for black matrix and the pigment dispersion photoresist composition for black matrix obtained in Examples 1 to 6 and Comparative Examples 1 to 4, the dispersion stability, optical density, and surface resistance value were evaluated by the following methods. The results are shown in Table 2.
將實施例1~6、比較例1~4之各黑矩陣用顏料分散物分別採集至玻璃瓶並塞緊,根據下述評價基準評價於室溫保存7天後之狀態。 The pigment dispersions for each of the black matrices in Examples 1 to 6 and Comparative Examples 1 to 4 were collected into glass bottles and stoppered, and the state after storage at room temperature for 7 days was evaluated according to the following evaluation criteria.
A:增黏、沈澱物均未看到 A: No thickening or sedimentation
B:看到若輕輕搖晃則可恢復至原樣之程度之增黏或沈澱物 B: See thickening or sediment that can be restored to the original level if gently shaken
C:看到即便強烈地搖晃亦不會恢復至原樣之程度之增黏或沈澱物 C: Seeing no thickening or sedimentation even if it is shaken strongly
藉由旋轉塗佈機,以膜厚成為1μm之方式,將實施例1~6、比較例1 ~4之各黑矩陣用顏料分散光阻組成物塗佈至玻璃基板上,於以100℃預烤3分鐘後,藉由高壓水銀燈曝光,進而以230℃進行3小時之後烘烤而獲得僅形成於固體部之黑色光阻圖案。藉由麥克貝斯(Macbeth)濃度計(TD-931、商品名、麥克貝斯公司製造)測定所獲得之各固體部之黑色光阻圖案之光學密度(OD值)。 Using a spin coater, Examples 1 to 6 and Comparative Example 1 were formed so that the film thickness became 1 μm. The pigment-dispersed photoresist composition for each of the black matrices was coated on a glass substrate, pre-baked at 100 ° C for 3 minutes, exposed by a high-pressure mercury lamp, and then baked at 230 ° C for 3 hours to obtain only formation Black photoresist pattern on the solid part. The obtained optical density (OD value) of the black photoresist pattern of each solid part was measured with a Macbeth densitometer (TD-931, trade name, manufactured by Macbeth).
藉由旋轉塗佈機,以膜厚成為1μm之方式,將實施例1~6、比較例1~4之各黑矩陣用顏料分散光阻組成物塗佈至玻璃基板上,於以100℃預烤3分鐘後,藉由高壓水銀燈曝光,進而以230℃進行3小時之後烘烤而獲得僅形成於固體部之黑色光阻圖案。藉由Advance公司製造、本體:微小電流計R8340、選用零件(option):屏蔽箱(shield box)R12702A,測定所獲得之各固體部之黑色光阻圖案之表面電阻值。 The pigment-dispersed photoresist composition for each of the black matrices of Examples 1 to 6 and Comparative Examples 1 to 4 was applied to a glass substrate by a spin coater so that the film thickness became 1 μm. After baking for 3 minutes, exposure was performed by a high-pressure mercury lamp, and then baking was performed at 230 ° C for 3 hours to obtain a black photoresist pattern formed only on the solid portion. The surface resistance value of the black photoresist pattern of each solid part obtained was measured by Advance company, the main body: a micro galvanometer R8340, and an optional part: a shield box R12702A.
實施例1~6之黑矩陣用光阻組成物係於高遮光性及高絕緣性之兩方面優異。 The photoresist composition for a black matrix of Examples 1 to 6 is excellent in both of high light shielding properties and high insulation properties.
另一方面,比較例1、2、4之黑矩陣用光阻組成物未能獲得同時實現高遮光性及高絕緣性者。 On the other hand, the photoresist compositions for black matrices of Comparative Examples 1, 2, and 4 failed to obtain those that simultaneously achieved high light shielding properties and high insulation properties.
又,比較例3之黑矩陣用顏料分散物之分散穩定性較差,未能獲得可 足以成為光學密度及表面電阻值評價之對象之黑矩陣用光阻組成物。 In addition, the dispersion stability of the pigment dispersion for black matrix of Comparative Example 3 was poor, and no A photoresist composition for a black matrix that is sufficient for evaluation of optical density and surface resistance value.
根據本發明,可提供一種具有高遮光性及高絕緣性之黑矩陣用顏料分散物、及含有其之黑矩陣用顏料分散光阻組成物。 According to the present invention, it is possible to provide a pigment dispersion for a black matrix having high light shielding properties and high insulation properties, and a pigment dispersion photoresist composition for a black matrix containing the pigment dispersion.
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JP2000056124A (en) * | 1998-08-06 | 2000-02-25 | Mitsubishi Chemicals Corp | Light-shielding pixel and color filter using that |
Also Published As
Publication number | Publication date |
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JP6516676B2 (en) | 2019-05-22 |
WO2015056688A1 (en) | 2015-04-23 |
CN105518087A (en) | 2016-04-20 |
JPWO2015056688A1 (en) | 2017-03-09 |
KR20160070763A (en) | 2016-06-20 |
TW201522528A (en) | 2015-06-16 |
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