TWI656600B - Exposure rotation fixture - Google Patents

Exposure rotation fixture Download PDF

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Publication number
TWI656600B
TWI656600B TW107101444A TW107101444A TWI656600B TW I656600 B TWI656600 B TW I656600B TW 107101444 A TW107101444 A TW 107101444A TW 107101444 A TW107101444 A TW 107101444A TW I656600 B TWI656600 B TW I656600B
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Taiwan
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inner frame
exposure
plates
positioning
frame plates
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TW107101444A
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Chinese (zh)
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TW201931517A (en
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吳德
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大陸商業成科技(成都)有限公司
大陸商業成光電(深圳)有限公司
英特盛科技股份有限公司
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Publication of TW201931517A publication Critical patent/TW201931517A/en

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)

Abstract

一種曝光旋轉治具,包含支撐架和容納組件。支撐架具有相對的二定位板。容納組件可轉動地設置於該二定位板內側。容納組件包含二內框板、棘輪機構、二旋轉軸、複數個固定軸以及複數個卡條。二內框板分別位於二定位板的內側。棘輪機構位於該二內框板其中之一與該二定位板其中之一之間。旋轉軸穿過二內框板與二定位板,且二旋轉軸其中之一貫穿棘輪機構。每一固定軸的兩端分別固定於二內框板的角落。每一卡條可拆卸地跨接於二內框板。 An exposure rotation jig includes a support frame and a containing component. The supporting frame has two positioning plates opposite to each other. The accommodating component is rotatably disposed inside the two positioning plates. The accommodating component includes two inner frame plates, a ratchet mechanism, two rotating shafts, a plurality of fixed shafts, and a plurality of clips. The two inner frame plates are respectively located inside the two positioning plates. The ratchet mechanism is located between one of the two inner frame plates and one of the two positioning plates. The rotation shaft passes through the two inner frame plates and the two positioning plates, and one of the two rotation shafts penetrates the ratchet mechanism. Two ends of each fixed shaft are respectively fixed at the corners of the two inner frame plates. Each clip is detachably connected to the two inner frame boards.

Description

曝光旋轉治具 Exposure rotation jig

本揭露是有關於一種曝光旋轉治具。 This disclosure is about an exposure rotation jig.

當生產的基板欲進行UV曝光時,需要對基板的多個部分進行曝光,然而現有的治具機構僅能用來定位基板,當光源啟動時,僅能以單一方向對基板的一部分曝光,若要對整個基板進行曝光,則需將基板從治具機構取出,待變更基板角度後(例如旋轉基板)再次裝回治具機構,以更換基板曝光的位置,需拆卸並裝置基板多次才能完成基板對於曝光製程的需求。此外,每次更換曝光方向時,需要更換不同的治具機構,導致基板反覆裝卸容易撞傷,降低作業的效率,且提高了人力的負擔,不符合生產的效益。 When the substrate to be produced is exposed to UV, multiple parts of the substrate need to be exposed. However, the existing fixture mechanism can only be used to position the substrate. When the light source is activated, only a part of the substrate can be exposed in a single direction. To expose the entire substrate, you need to remove the substrate from the fixture mechanism. After changing the substrate angle (such as rotating the substrate), replace the fixture mechanism again to change the exposure position of the substrate. You need to disassemble and install the substrate multiple times to complete. Substrate requirements for exposure processes. In addition, each time the exposure direction is changed, a different jig mechanism needs to be replaced, which causes the substrate to be repeatedly loaded and unloaded easily, which reduces the operation efficiency and increases the burden on manpower, which is not in line with the benefits of production.

有鑑於此,本揭露的一些實施例揭露一種經過改良之卡條可拆卸的曝光旋轉治具,可以使待曝光基板在不需要反覆拆卸的情況下,透過棘輪機構旋轉使得基板經過多次旋轉而完成基板曝光,相對於一般卡塞作業效率更高,穩定性更佳。 In view of this, some embodiments of the present disclosure disclose an improved clip strip detachable exposure rotation jig, which can make the substrate to be exposed through repeated rotation of the ratchet mechanism without repeated disassembly of the substrate to be exposed without repeated disassembly. After the substrate is exposed, it is more efficient and more stable than the general jam operation.

根據本揭露一實施方式,一種曝光旋轉治具包含 支撐架和容納組件。支撐架具有相對的二定位板。容納組件可轉動地設置於二定位板內側,且容納組件包含二內框板、棘輪機構、二旋轉軸、複數個固定軸以及複數個卡條。二內框板分別位於二定位板的內側。棘輪機構位於二內框板其中之一與二定位板其中之一之間。旋轉軸穿過二內框板與二定位板,且二旋轉軸其中之一貫穿棘輪機構。每一固定軸的兩端分別固定於二內框板的角落。每一卡條可拆卸地跨接於二內框板。 According to an embodiment of the present disclosure, an exposure rotation jig includes Support frame and receiving assembly. The supporting frame has two positioning plates opposite to each other. The accommodating component is rotatably disposed inside the two positioning plates, and the accommodating component includes two inner frame plates, a ratchet mechanism, two rotating shafts, a plurality of fixed shafts, and a plurality of clips. The two inner frame plates are respectively located inside the two positioning plates. The ratchet mechanism is located between one of the two inner frame plates and one of the two positioning plates. The rotation shaft passes through the two inner frame plates and the two positioning plates, and one of the two rotation shafts penetrates the ratchet mechanism. Two ends of each fixed shaft are respectively fixed at the corners of the two inner frame plates. Each clip is detachably connected to the two inner frame boards.

在一實施方式中,內框板的角落具有複數個定位孔,且固定軸插入定位孔中。 In one embodiment, the corner of the inner frame plate has a plurality of positioning holes, and the fixing shaft is inserted into the positioning holes.

在一實施方式中,內框板的邊緣具有複數個凹部,且卡條定位於凹部中。 In one embodiment, the edge of the inner frame plate has a plurality of recesses, and the clips are positioned in the recesses.

在一實施方式中,內框板更包含複數個撥塊與複數個磁鐵。撥塊分別樞接於凹部的開口處。磁鐵位於內框板中,使得撥塊分別由磁鐵吸附而定位。 In one embodiment, the inner frame plate further includes a plurality of dials and a plurality of magnets. The shifting blocks are pivotally connected to the openings of the recesses, respectively. The magnet is located in the inner frame plate, so that the dial blocks are respectively positioned by being attracted by the magnet.

在一實施方式中,每個卡條具有複數個卡槽,用以定位至少一待曝光基板。 In one embodiment, each card strip has a plurality of card slots for positioning at least one substrate to be exposed.

在一實施方式中,棘輪機構包含了棘輪元件和伸縮塊。棘輪元件由二旋轉軸其中之一貫穿,伸縮塊位於二定位板其中之一的內側,且可伸縮地抵接棘輪元件。 In one embodiment, the ratchet mechanism includes a ratchet element and a telescopic block. The ratchet element is penetrated by one of the two rotation shafts, and the telescopic block is located on the inner side of one of the two positioning plates and telescopically abuts the ratchet element.

在一實施方式中,棘輪元件上具有本體與圍繞本體的複數個凸齒。每個凸齒之二側緣與本體的連接處具有二接點,且二接點與本體之圓心的連線夾45度。 In one embodiment, the ratchet element has a body and a plurality of convex teeth surrounding the body. The connection between the two side edges of each convex tooth and the body has two contacts, and the connecting clip between the two contacts and the center of the body is 45 degrees.

在一實施方式中,支撐架的底部具有鏤空區。曝光旋轉治具更包含底座。底座位在具有鏤空區的支撐架下方。 底座具有底板與鄰接底板的側壁,底板與側壁定義出一空間,且此空間連通支撐架的鏤空區。 In one embodiment, the bottom of the support frame has a hollowed-out area. The exposure rotation jig further includes a base. The base is located under a support frame with a hollowed-out area. The base has a bottom plate and a side wall adjacent to the bottom plate. The bottom plate and the side wall define a space, and this space communicates with the hollowed-out area of the support frame.

在一實施方式中,當容納組件傾斜地位於二定位版內側時,容納組件至少部分位於底座的空間中。 In one embodiment, when the accommodating component is located obliquely inside the two positioning plates, the accommodating component is at least partially located in the space of the base.

在本揭露上述實施方式中,曝光旋轉治具在容納組件的內框板與支撐架的定位板之間設置了一個棘輪機構。此棘輪機構可以讓容納組件於支撐架上旋轉多個定位角度,因此在曝光過程中可在不取下基板的前提下進行基板的多個部分曝光。此外,棘輪機構還可避免反轉造成待曝光的基板重複曝光,具有防呆的效果。另外,容納組件的卡條可避免旋轉時待曝光基板掉落,並可在曝光時取下卡條以增加曝光區域。曝光旋轉治具可以提高產出效率,並減少治具的成本。曝光旋轉治具的穩定性佳,可解決基板反覆裝卸容易撞傷及浪費人力等傳統治具的問題。 In the above embodiment of the present disclosure, the exposure rotation jig is provided with a ratchet mechanism between the inner frame plate of the accommodating component and the positioning plate of the support frame. The ratchet mechanism can rotate the accommodating component on the supporting frame for a plurality of positioning angles, so that during the exposure process, multiple parts of the substrate can be exposed without removing the substrate. In addition, the ratchet mechanism can avoid reversal of the substrate to be exposed due to reversal, and has the effect of preventing dullness. In addition, the clip holding the component can prevent the substrate to be exposed from falling during rotation, and the clip can be removed during exposure to increase the exposure area. Exposure rotation fixtures can increase output efficiency and reduce fixture costs. The stability of the exposure rotation jig is good, which can solve the problems of traditional jigs such as the substrate being repeatedly loaded and unloaded easily, and the manpower is wasted.

100‧‧‧曝光旋轉治具 100‧‧‧ exposure rotation fixture

110‧‧‧支撐架 110‧‧‧Support

112a、112b‧‧‧定位板 112a, 112b‧‧‧ Positioning plate

114‧‧‧鏤空區 114‧‧‧ Hollow

120‧‧‧容納組件 120‧‧‧accommodating components

122a、122b‧‧‧內框板 122a, 122b‧‧‧Inner frame board

124‧‧‧定位孔 124‧‧‧ Positioning hole

126‧‧‧凹部 126‧‧‧ Recess

132‧‧‧撥塊 132‧‧‧Dial block

133‧‧‧磁鐵 133‧‧‧magnet

140‧‧‧棘輪機構 140‧‧‧ Ratchet mechanism

142‧‧‧棘輪元件 142‧‧‧Ratchet element

143‧‧‧本體 143‧‧‧ Ontology

144‧‧‧凸齒 144‧‧‧ convex teeth

144a、144b‧‧‧凸齒 144a, 144b‧‧‧ convex teeth

145‧‧‧長側緣 145‧‧‧long side edge

146‧‧‧短側緣 146‧‧‧Short side edge

147a、147b、147c‧‧‧接點 147a, 147b, 147c‧‧‧ contact

150a、150b‧‧‧旋轉軸 150a, 150b‧‧‧rotation shaft

160‧‧‧固定軸 160‧‧‧Fixed shaft

170‧‧‧卡條 170‧‧‧ card

172‧‧‧卡槽 172‧‧‧Card slot

180‧‧‧底座 180‧‧‧base

182‧‧‧底板 182‧‧‧ floor

184‧‧‧側壁 184‧‧‧ sidewall

186‧‧‧空間 186‧‧‧space

190‧‧‧基板 190‧‧‧ substrate

θ1、θ2‧‧‧夾角 θ 1 , θ 2 ‧‧‧ angle

第1圖為根據本揭露一實施方式之曝光旋轉治具的立體圖。 FIG. 1 is a perspective view of an exposure rotation jig according to an embodiment of the disclosure.

第2圖為第1圖之曝光旋轉治具的爆炸圖。 Figure 2 is an exploded view of the exposure rotary jig of Figure 1.

第3圖為第1圖之曝光旋轉治具的局部放大圖。 Fig. 3 is a partial enlarged view of the exposure rotation jig of Fig. 1.

第4A圖為第2圖之棘輪元件的正視圖。 Figure 4A is a front view of the ratchet element of Figure 2.

第4B圖為第1圖之曝光旋轉治具的容納組件於水平狀態的正視圖。 FIG. 4B is a front view of the accommodating component of the exposure rotary jig of FIG. 1 in a horizontal state.

第4C圖為第1圖之曝光旋轉治具的容納組件於垂直狀態的正視圖。 Fig. 4C is a front view of the accommodating component of the exposure rotary jig of Fig. 1 in a vertical state.

第5A圖為第1圖之曝光旋轉治具的容納組件於傾斜狀態且放入基板時的立體圖。 Fig. 5A is a perspective view of the exposure assembly of Fig. 1 when the accommodating component of the exposure rotation jig is tilted and placed in a substrate.

第5B圖為第1圖之曝光旋轉治具的容納組件於水平狀態且放入多個基板時的立體圖。 FIG. 5B is a perspective view of the exposure rotation jig of FIG. 1 when the accommodating component of the exposure rotation jig is in a horizontal state and a plurality of substrates are put in it.

第5C圖為第1圖之曝光旋轉治具的容納組件於垂直狀態且放入多個基板時的立體圖。 FIG. 5C is a perspective view of the exposure rotation jig of FIG. 1 when the accommodating component of the exposure rotation jig is in a vertical state and a plurality of substrates are put in it.

以下將以圖式揭露本揭露之複數個實施方式,為明確說明起見,許多實務上的細節將在以下敘述中一併說明。然而,應瞭解到,這些實務上的細節不應用以限制本揭露。也就是說,在本揭露部分實施方式中,這些實務上的細節是非必要的。此外,為簡化圖式起見,一些習知慣用的結構與元件在圖式中將以簡單示意的方式繪示之。 Several embodiments of the present disclosure will be disclosed graphically below. For clarity, many practical details will be explained in the following description. However, it should be understood that these practical details should not be used to limit this disclosure. That is, in some embodiments of the present disclosure, these practical details are unnecessary. In addition, in order to simplify the drawings, some conventional structures and components will be shown in the drawings in a simple and schematic manner.

第1圖為根據本揭露一實施方式之曝光旋轉治具100的立體圖。第2圖為第1圖之曝光旋轉治具100的爆炸圖。同時參閱第1圖與第2圖,曝光旋轉治具100包含了支撐架110和容納組件120。支撐架110具有相對的二個定位板112a和112b。容納組件120可以轉動地設置在定位板112a和112b的內側。容納組件120包含了二個內框板122a和122b、棘輪機構140、二個旋轉軸150a和150b、複數個固定軸160和複數個卡條170。內框板122a位於定位板112a的內側,而內框板122b位於定位板112b的內側。棘輪機構140位於內框板122a與定位板112a之間。固定軸160的兩端分別固定於內框板122a和122b的角落。卡條170可拆卸地跨接於內框板122a和122b。 FIG. 1 is a perspective view of an exposure rotation jig 100 according to an embodiment of the disclosure. FIG. 2 is an exploded view of the exposure rotary jig 100 of FIG. 1. Referring to FIG. 1 and FIG. 2 at the same time, the exposure rotation jig 100 includes a support frame 110 and a receiving assembly 120. The support frame 110 has two positioning plates 112a and 112b opposite to each other. The receiving assembly 120 is rotatably disposed inside the positioning plates 112a and 112b. The receiving assembly 120 includes two inner frame plates 122a and 122b, a ratchet mechanism 140, two rotation shafts 150a and 150b, a plurality of fixed shafts 160, and a plurality of clips 170. The inner frame plate 122a is located inside the positioning plate 112a, and the inner frame plate 122b is located inside the positioning plate 112b. The ratchet mechanism 140 is located between the inner frame plate 122a and the positioning plate 112a. Both ends of the fixed shaft 160 are fixed to the corners of the inner frame plates 122a and 122b, respectively. The clip 170 is detachably connected to the inner frame plates 122a and 122b.

在本實施方式中,內框板122a和122b的角落具有複數個定位孔124,使得固定軸160的兩端可插入定位孔124中而跨接於內框板122a和122b。 In the present embodiment, the corners of the inner frame plates 122a and 122b have a plurality of positioning holes 124, so that both ends of the fixed shaft 160 can be inserted into the positioning holes 124 and span the inner frame plates 122a and 122b.

此外,內框板122a和122b的邊緣具有複數個凹部126。在本實施方式中,內框板122a和122b的每一邊至少具有二凹部126,而卡條170定位於凹部126中。容納組件120的每一內框板122a和122b包含了複數個撥塊132和複數個磁鐵133。第3圖為第1圖之曝光旋轉治具100的局部放大圖。如第3圖所示,在內框板122a的邊緣,撥塊132分別樞接於凹部126的開口處,而磁鐵133位於內框板122a中。 In addition, the edges of the inner frame plates 122a and 122b have a plurality of recesses 126. In this embodiment, each side of the inner frame plates 122a and 122b has at least two recessed portions 126, and the clip 170 is positioned in the recessed portions 126. Each of the inner frame plates 122 a and 122 b of the receiving assembly 120 includes a plurality of dial blocks 132 and a plurality of magnets 133. FIG. 3 is a partial enlarged view of the exposure rotation jig 100 of FIG. 1. As shown in FIG. 3, at the edges of the inner frame plate 122a, the dials 132 are respectively pivotally connected to the openings of the recessed portions 126, and the magnets 133 are located in the inner frame plate 122a.

第3圖右方的撥塊132為開啟狀態,當撥開撥塊132時,凹部126上方形成開口,可以取出或放置相對應的卡條170。第3圖左方的撥塊132為關閉狀態,當閉合撥塊132時,凹部126呈現封閉狀態,進而定位卡條170。另一內框板122b的邊緣結構與第3圖之內框板122a的邊緣結構相似,不重覆贅述。 The dial 132 on the right in FIG. 3 is in an open state. When the dial 132 is turned off, an opening is formed above the recessed portion 126, and a corresponding clip 170 can be taken out or placed. The dial 132 on the left in FIG. 3 is in a closed state. When the dial 132 is closed, the recessed portion 126 assumes a closed state, thereby positioning the clip 170. The edge structure of the other inner frame plate 122b is similar to the edge structure of the inner frame plate 122a in FIG. 3, and is not repeated here.

同時參閱第1圖與第3圖,當卡條170放入內框板122a和122b的凹部126時,透過內框板122a和122b內的磁鐵133與金屬之間的吸附力,使得撥塊132由磁鐵133吸附而定位,防止撥塊132轉動。舉例來說,當撥塊132為開啟狀態時,磁鐵133吸附撥塊132,使得凹部126處於開啟狀態以便於放入 或取出卡條170。當撥塊132為關閉狀態時,另一磁鐵133吸附撥塊132,使得凹部126處於關閉狀態以便於固定卡條170。 Referring to FIG. 1 and FIG. 3 at the same time, when the clip 170 is put into the recessed portion 126 of the inner frame plates 122a and 122b, the adsorption force between the magnet 133 and the metal in the inner frame plates 122a and 122b makes the dial block 132 Positioned by the magnet 133 to prevent rotation of the dial 132. For example, when the dial block 132 is in the open state, the magnet 133 attracts the dial block 132 so that the recess 126 is in the open state for easy insertion. Or remove the clip 170. When the dial block 132 is in the closed state, another magnet 133 attracts the dial block 132 so that the recessed portion 126 is in the closed state to facilitate fixing the clip 170.

在本實施方式中,容納組件120的卡條170具有複數個卡槽172,用以定位至少一如第5A圖之待曝光的基板190。 In this embodiment, the clamping strip 170 of the accommodating component 120 has a plurality of clamping slots 172 for positioning at least one substrate 190 to be exposed as shown in FIG. 5A.

第4A圖為第2圖之棘輪元件142的正視圖。第4B圖為第1圖之曝光旋轉治具100的容納組件120於水平狀態的正視圖。為了讓第4B圖的棘輪機構140可清楚描繪,將第4B圖遮蔽棘輪機構140的定位板112a以虛線表示。同時參閱第4A圖與第4B圖,容納組件120的棘輪機構140包含了伸縮塊141和棘輪元件142。棘輪元件142被旋轉軸150a貫穿,伸縮塊141位於定位板112a的內側,並且可伸縮地抵接棘輪元件142。 FIG. 4A is a front view of the ratchet element 142 of FIG. 2. FIG. 4B is a front view of the accommodating component 120 of the exposure rotary jig 100 of FIG. 1 in a horizontal state. In order that the ratchet mechanism 140 in FIG. 4B can be clearly depicted, the positioning plate 112a that covers the ratchet mechanism 140 in FIG. 4B is shown by a dotted line. Referring to FIG. 4A and FIG. 4B simultaneously, the ratchet mechanism 140 of the receiving assembly 120 includes a telescopic block 141 and a ratchet element 142. The ratchet element 142 is penetrated by the rotation shaft 150 a, and the telescopic block 141 is located inside the positioning plate 112 a and telescopically abuts the ratchet element 142.

棘輪機構140的棘輪元件142具有本體143與圍繞本體143的複數個凸齒144。每個凸齒144具有二側緣,分別為長側緣145與短側緣146。舉例來說,凸齒144a之短側緣146與本體143的連接處具有接點147a,凸齒144a之長側緣145與本體143的連接處具有接點147b,且接點147a和接點147b與本體143的圓心連線具有夾角θ1。相鄰於凸齒144a的凸齒144b其長側緣145與本體143的連接處具有接點147c,接點147a和接點147c與本體143的圓心連線具有夾角θ2The ratchet element 142 of the ratchet mechanism 140 has a body 143 and a plurality of convex teeth 144 surrounding the body 143. Each convex tooth 144 has two side edges, namely a long side edge 145 and a short side edge 146. For example, the connection between the short side edge 146 of the convex tooth 144a and the body 143 has a contact 147a, and the connection between the long side edge 145 of the convex tooth 144a and the body 143 has a contact 147b, and the contact 147a and the contact 147b The connection line with the center of the body 143 has an included angle θ 1 . The convex tooth 144b adjacent to the convex tooth 144a has a contact point 147c at the connection point between the long side edge 145 and the body 143, and the connection point between the contact point 147a and the contact point 147c and the center of the body 143 has an angle θ 2 .

在本實施方式中,棘輪元件142上的接點147a和接點147b與本體143的圓心連線夾角θ1可以為45度,使得棘輪元件142上凸齒144的數量可以為8,進而使得容納組件120於定位板112a和112b之間具有8個定位點。透過這8個定位點,除了可控制放入待曝光基板190(見第5A圖)時容納組件120傾斜角度,亦可控制容納組件120的旋轉定位點,使得待曝光的基板190在旋轉多次(例如四次)後完成曝光。 In the present embodiment, the contact 147a and the contact 147b of the body 142 on the ratchet member connecting the centers of an angle θ 143 may be 45 degrees, so that the projections 142 the number of teeth on the ratchet member 144 may be 8, and further such that the receiving The assembly 120 has eight positioning points between the positioning plates 112a and 112b. Through these 8 positioning points, in addition to controlling the tilting angle of the accommodating component 120 when the substrate 190 to be exposed is placed (see FIG. 5A), the rotational positioning points of the accommodating component 120 can also be controlled so that the substrate 190 to be exposed is rotated multiple times. (E.g. four times) to complete the exposure.

此外,棘輪元件142上的每個凸齒144的長側緣145和短側緣146自本體143延伸而出,長側緣145為弧形,且弧形之長側緣145的長度大於短側緣146。此設計在棘輪元件142旋轉時可以防止內框板122a和122b反向轉動,藉此防止待曝光基板190的部分區域重複曝光,具有防呆的作用。 In addition, the long side edge 145 and the short side edge 146 of each convex tooth 144 on the ratchet element 142 extend from the body 143. The long side edge 145 is arc-shaped, and the length of the long side edge 145 of the arc shape is greater than the short side.缘 146。 146. This design can prevent the inner frame plates 122a and 122b from rotating in the reverse direction when the ratchet element 142 is rotated, thereby preventing repeated exposure of a part of the substrate 190 to be exposed, and has a dull effect.

在本實施方式中,伸縮塊141之下方可連接彈簧而抵接於棘輪元件142。當棘輪元件142往單一方向旋轉時,棘輪元件142迫使伸縮塊141下降使彈簧為壓縮的狀態,當伸縮塊141向上卡入棘輪元件142的兩凸齒144之間時,彈簧為拉伸的狀態,使得棘輪元件142被定位而不會旋轉。 In this embodiment, a spring may be connected below the telescopic block 141 to abut against the ratchet element 142. When the ratchet element 142 rotates in a single direction, the ratchet element 142 forces the expansion and contraction block 141 to lower and the spring is compressed. When the expansion block 141 is clamped upward between the two convex teeth 144 of the ratchet element 142, the spring is in a stretched state So that the ratchet element 142 is positioned without rotating.

第4C圖為第1圖之曝光旋轉治具100的容納組件120於垂直狀態的正視圖。同時參閱第4B圖與第4C圖,棘輪元件142與旋轉軸150a具有相同的軸心。當容納組件120旋轉時,例如由第4B圖旋轉為第4C圖的狀態,或由第4C圖旋轉為4B圖的狀態,是以旋轉軸150a和150b(見第1圖)和棘輪元件142為圓心進行旋轉。舉例來說,若棘輪元件142為第4A圖的設計(即夾角θ1為45度),當第4B圖的容納組件120利用棘輪機構140順時針旋轉時,可讓伸縮塊141跨過兩凸齒144後停止旋轉,便可得到第4C圖容納組件120的狀態。 FIG. 4C is a front view of the accommodating component 120 of the exposure rotary jig 100 of FIG. 1 in a vertical state. Referring to FIG. 4B and FIG. 4C simultaneously, the ratchet element 142 and the rotation shaft 150a have the same axis. When the accommodating assembly 120 rotates, for example, the state from FIG. 4B to FIG. 4C, or the state from FIG. 4C to FIG. 4B, the rotation axes 150a and 150b (see FIG. 1) and the ratchet element 142 are The center of the circle rotates. For example, if the ratchet element 142 is in the design of FIG. 4A (that is, the included angle θ 1 is 45 degrees), when the receiving assembly 120 in FIG. 4B uses the ratchet mechanism 140 to rotate clockwise, the telescopic block 141 can cross the two protrusions. After the teeth 144 stop rotating, the state of the accommodating assembly 120 in FIG. 4C can be obtained.

第5A圖為第1圖之曝光旋轉治具100的容納組件120於傾斜狀態且放入基板190時的立體圖。如第5A圖所示,曝光旋轉治具100的支撐架110底部具有鏤空區114。曝光旋轉 治具100還包含底座180,底座180位於支撐架110的下方。底座180具有底板182與鄰接底板182的側壁184。底板182與側壁184定義出空間186,且此空間186連通支撐架110的鏤空區114。 FIG. 5A is a perspective view of the accommodating component 120 of the exposure rotary jig 100 shown in FIG. 1 when it is tilted and the substrate 190 is placed. As shown in FIG. 5A, the bottom of the support frame 110 of the exposure rotation jig 100 has a hollow region 114. Exposure rotation The fixture 100 further includes a base 180, which is located below the support frame 110. The base 180 has a bottom plate 182 and a side wall 184 adjacent to the bottom plate 182. The bottom plate 182 and the side wall 184 define a space 186, and the space 186 communicates with the hollowed out region 114 of the support frame 110.

當曝光旋轉治具100的容納組件120傾斜地位於定位板112a和112b內側時,容納組件120至少部分位於由底座180的底板和側壁184定義出的空間186中,此時容納組件120為傾斜狀態。為了方便將待曝光的基板190放入容納組件120內,可先將容納組件120利用棘輪機構140旋轉至傾斜狀態,如第5A圖所示。此時將其中一側的卡條170取下,放入一個或數個待曝光的基板190,並且讓基板190卡入卡條170的卡槽172內,以確保基板190在曝光過程中不會晃動。在傾斜狀態中,為了方便將待曝光的基板190放入容納組件120內,位於第5A圖上側與左側的卡條170為取下的狀態,但並不用以限制本揭露。 When the accommodating component 120 of the exposure rotation jig 100 is located obliquely inside the positioning plates 112a and 112b, the accommodating component 120 is at least partially located in a space 186 defined by the bottom plate and the side wall 184 of the base 180, and the accommodating component 120 is in an inclined state at this time. In order to conveniently put the substrate 190 to be exposed into the accommodating component 120, the accommodating component 120 may be rotated to a tilted state by using the ratchet mechanism 140, as shown in FIG. 5A. At this time, remove the clip 170 on one side, put it into one or more substrates 190 to be exposed, and let the substrate 190 fit into the slot 172 of the clip 170 to ensure that the substrate 190 will not be exposed during the exposure process. Shake. In the inclined state, in order to conveniently put the substrate 190 to be exposed into the accommodating assembly 120, the clips 170 on the upper side and the left side in FIG. 5A are removed, but it is not intended to limit the present disclosure.

第5B圖為第1圖之曝光旋轉治具100的容納組件120於水平狀態且放入多個基板190時的立體圖。將第5A圖的容納組件120從傾斜狀態變為第5B圖的水平狀態時,僅需透過旋轉容納組件120,使棘輪機構140來定位容納組件120的位置即可。舉例來說,若棘輪元件142為第4A圖的設計(即夾角θ1為45度),容納組件120利用棘輪機構140順時針旋轉時,可讓伸縮塊141跨過單一凸齒144後停止旋轉,便可將容納組件120從傾斜狀態變為水平狀態。從傾斜狀態變為水平狀態的過程中,可安裝內框板122a和122b四邊緣的卡條170以防止基板 190掉出。當容納組件120為水平狀態且基板190欲進行曝光時,可將上方的卡條170取下,以利曝光,如第5B圖所示。 FIG. 5B is a perspective view of the exposure assembly 120 of FIG. 1 when the accommodating component 120 of the exposure rotary jig 100 is in a horizontal state and a plurality of substrates 190 are placed therein. When changing the accommodating unit 120 in FIG. 5A from the inclined state to the horizontal state in FIG. 5B, the ratchet mechanism 140 is only required to position the accommodating unit 120 by rotating the accommodating unit 120. For example, if the ratchet element 142 is the design shown in FIG. 4A (that is, the included angle θ 1 is 45 degrees), when the receiving component 120 rotates clockwise using the ratchet mechanism 140, the telescopic block 141 can pass through a single convex tooth 144 and stop rotating. Then, the accommodating component 120 can be changed from the inclined state to the horizontal state. During the transition from the tilted state to the horizontal state, clips 170 on the four edges of the inner frame plates 122a and 122b may be installed to prevent the substrate 190 from falling out. When the accommodating component 120 is in a horizontal state and the substrate 190 is to be exposed, the upper clip 170 may be removed to facilitate exposure, as shown in FIG. 5B.

第5C圖為第1圖之曝光旋轉治具100的容納組件120於垂直狀態且放入多個基板190時的立體圖。將第5B圖的容納組件120從水平狀態變為第5C圖的垂直狀態時,僅需透過旋轉容納組件120,使棘輪機構140來定位容納組件120的位置即可。舉例來說,若棘輪元件142為第4A圖的設計(即夾角θ1為45度、夾角θ2為90度),容納組件120利用棘輪機構140順時針旋轉時,可讓伸縮塊141跨過兩凸齒144後停止旋轉,便可將容納組件120從水平狀態變為垂直狀態。從水平狀態變為垂直狀態的過程中,可安裝內框板122a和122b四邊緣的卡條170以防止基板190掉出。當容納組件120為垂直狀態且基板190欲進行曝光時,可將上方的卡條170取下,以利曝光,如第5C圖所示。 FIG. 5C is a perspective view of the accommodating component 120 of the exposure rotary jig 100 shown in FIG. 1 when a plurality of substrates 190 are placed in a vertical state. When the storage assembly 120 in FIG. 5B is changed from the horizontal state to the vertical state in FIG. 5C, the ratchet mechanism 140 is only required to position the storage assembly 120 by rotating the storage assembly 120. For example, if the ratchet element 142 is the design of FIG. 4A (that is, the included angle θ 1 is 45 degrees and the included angle θ 2 is 90 degrees), when the receiving component 120 is rotated clockwise using the ratchet mechanism 140, the telescopic block 141 can be crossed. After the two convex teeth 144 stop rotating, the receiving component 120 can be changed from a horizontal state to a vertical state. During the process of changing from the horizontal state to the vertical state, clips 170 on the four edges of the inner frame plates 122a and 122b may be installed to prevent the substrate 190 from falling out. When the accommodating component 120 is in a vertical state and the substrate 190 is to be exposed, the upper clip 170 may be removed to facilitate exposure, as shown in FIG. 5C.

在一實施方式中,欲將待曝光的基板190完全曝光,需將容納組件120透過棘輪機構140旋轉多次(例如四次),以達到完全曝光的效果,但並不用以限制本揭露。 In one embodiment, to fully expose the substrate 190 to be exposed, the accommodating component 120 needs to be rotated multiple times (for example, four times) through the ratchet mechanism 140 to achieve the effect of full exposure, but it is not intended to limit the present disclosure.

在本實施方式中,固定軸160的材質可以為304不鏽鋼(SUS304)。卡條170的材質可以包含304不鏽鋼、鐵氟龍和纖。內框板122a和122b的材質可以為6061陽極氧化鋁合金,支撐架110的材質可以為塗佈有烤漆的冷軋鋼卷(Steel plate coldrolled coil;SPCC)。然而,固定軸160、卡條170、支撐架110、內框板122a和122b的材質並不以上述材料為限。 In this embodiment, the material of the fixed shaft 160 may be 304 stainless steel (SUS304). The material of the clip 170 may include 304 stainless steel, Teflon, and fiber. The materials of the inner frame plates 122a and 122b may be 6061 anodized aluminum alloy, and the material of the support frame 110 may be a steel plate coldrolled coil (SPCC) coated with baking paint. However, the materials of the fixed shaft 160, the clip 170, the support frame 110, and the inner frame plates 122a and 122b are not limited to the above materials.

雖然本揭露已以實施方式揭露如上,然其並非用 以限定本揭露,任何熟習此技藝者,在不脫離本揭露之精神和範圍內,當可作各種之更動與潤飾,因此本揭露之保護範圍當視後附之申請專利範圍所界定者為準。 Although this disclosure has been disclosed as above by way of implementation, it is not intended to be used To limit this disclosure, anyone skilled in this art can make various modifications and retouching without departing from the spirit and scope of this disclosure. Therefore, the scope of protection of this disclosure shall be determined by the scope of the attached patent application. .

Claims (10)

一種曝光旋轉治具,包含:一支撐架,具有相對的二定位板;以及一容納組件,可轉動地設置於該二定位板內側,該容納組件包含:二內框板,分別位於該二定位板的內側;一棘輪機構,位於該二內框板其中之一與該二定位板其中之一之間;二旋轉軸,穿過該二內框板與該二定位板,且該二旋轉軸其中之一貫穿該棘輪機構;複數個固定軸,每一該些固定軸的兩端分別固定於該二內框板的角落;以及複數個卡條,可拆卸地跨接於該二內框板。An exposure rotation jig includes: a support frame having two positioning plates opposite to each other; and a receiving component rotatably disposed inside the two positioning plates, the receiving component including: two inner frame plates respectively located at the two positionings The inside of the plate; a ratchet mechanism located between one of the two inner frame plates and one of the two positioning plates; two rotation shafts passing through the two inner frame plates and the two positioning plates, and the two rotation shafts One of them penetrates the ratchet mechanism; a plurality of fixed shafts, and two ends of each of the fixed shafts are respectively fixed at the corners of the two inner frame plates; and a plurality of clips are detachably connected to the two inner frame plates. . 如請求項1所述之曝光旋轉治具,其中該些內框板的角落具有複數個定位孔,且該些固定軸插入該些定位孔中。The exposure rotary jig as described in claim 1, wherein the corners of the inner frame plates have a plurality of positioning holes, and the fixed shafts are inserted into the positioning holes. 如請求項1所述之曝光旋轉治具,其中該些內框板的邊緣具有複數個凹部,該些卡條定位於該些凹部中。The exposure rotary jig according to claim 1, wherein the edges of the inner frame plates have a plurality of recesses, and the clips are positioned in the recesses. 如請求項3所述之曝光旋轉治具,其中該些內框板更包含:複數個撥塊,分別樞接於該些凹部的開口處;以及複數個磁鐵,位於該些內框板中,使得該些撥塊分別由該些磁鐵吸附而定位。The exposure rotary jig as described in claim 3, wherein the inner frame plates further include: a plurality of dials respectively pivotally connected to the openings of the recesses; and a plurality of magnets located in the inner frame plates, The positioning blocks are respectively attracted by the magnets. 如請求項1所述之曝光旋轉治具,其中該些卡條具有複數個卡槽,用以定位至少一待曝光基板。The exposure rotary jig according to claim 1, wherein the clips have a plurality of card slots for positioning at least one substrate to be exposed. 如請求項1所述之曝光旋轉治具,其中該棘輪機構包含:一棘輪元件,由該二旋轉軸其中之一貫穿;以及一伸縮塊,位於該二定位板其中之一的內側,且可伸縮地抵接該棘輪元件。The exposure rotary jig as described in claim 1, wherein the ratchet mechanism includes: a ratchet element penetrated by one of the two rotation axes; and a telescopic block located inside one of the two positioning plates, and can be The ratchet element abuts telescopically. 如請求項6所述之曝光旋轉治具,其中該棘輪元件上具有一本體與圍繞該本體的複數個凸齒,每一該些凸齒之二側緣與該本體的連接處具有二接點,且該二接點與該本體之圓心的連線夾45度。The exposure rotation jig as described in claim 6, wherein the ratchet element has a body and a plurality of convex teeth surrounding the body, and two joints of the two side edges of each of the convex teeth and the body have two contacts. , And the connection between the two contacts and the center of the body is 45 degrees. 如請求項6所述之曝光旋轉治具,其中每一該些凸齒的該二側緣自該本體延伸而出,該二側緣的其中之一為弧形,且弧形之該側緣的長度大於該二側緣的另一者。The exposure rotary jig as described in claim 6, wherein the two side edges of each of the convex teeth extend from the body, one of the two side edges is arc-shaped, and the side edges of the arc are Is longer than the other of the two side edges. 如請求項1所述之曝光旋轉治具,其中該支撐架的底部具有一鏤空區,該曝光旋轉治具更包含:一底座,位於該支撐架下方,該底座具有一底板與鄰接該底板的一側壁,該底板與該側壁定義出一空間,且該空間連通該支撐架的該鏤空區。The exposure rotary jig as described in claim 1, wherein the bottom of the support frame has a hollowed-out area, and the exposure rotation jig further includes: a base, located below the support frame, the base having a bottom plate and A side wall, the bottom plate and the side wall define a space, and the space communicates with the hollowed-out area of the support frame. 如請求項9所述之曝光旋轉治具,其中當該容納組件傾斜地位於該二定位板內側時,該容納組件至少部分位於該底座的該空間中。The exposure rotary jig as described in claim 9, wherein when the containing component is positioned obliquely inside the two positioning plates, the containing component is at least partially located in the space of the base.
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