CN108227403B - Expose rotating jig - Google Patents
Expose rotating jig Download PDFInfo
- Publication number
- CN108227403B CN108227403B CN201810004606.0A CN201810004606A CN108227403B CN 108227403 B CN108227403 B CN 108227403B CN 201810004606 A CN201810004606 A CN 201810004606A CN 108227403 B CN108227403 B CN 108227403B
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- exposure
- component
- deckle board
- rotating jig
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
Abstract
A kind of exposure rotating jig comprising support frame and accommodates component.Support frame has two opposite positioning plates.Component is accommodated to be rotatablely arranged on the inside of two positioning plate.Accommodating component includes deckle board, ratchet mechanism, two rotary shafts, a plurality of fixing axles and a plurality of strips in two.Deckle board is located at the inside of two positioning plates in two.Ratchet mechanism is located at this in two between one of one of deckle board and two positioning plate.Rotary shaft passes through deckle board and two positioning plates in two, and one of two rotary shafts run through ratchet mechanism.The both ends of each fixing axle are individually fixed in the corner of deckle board in two.Each strip is removably connected across deckle board in two.Ratchet mechanism, which can allow, accommodates component in rotating multiple orientation angles on support frame, therefore the multiple portions that can carries out in exposure process substrate under the premise of not removing substrate expose.Output efficiency can be improved in exposure rotating jig, and reduces the cost of jig.
Description
Technical field
This exposure relates to a kind of exposure rotating jig.
Background technique
It when the UV exposure to be carried out of the substrate of production, needs to be exposed the multiple portions of substrate, however existing controls
Tool mechanism is only capable of for positioning substrate, when light source starting, is only capable of exposing with a part of single direction to substrate, to whole
A substrate is exposed, then needs to take out substrate from jig mechanism, (such as rotary plate) fills again after changing substrate angle
Jig mechanism is returned, to replace the position of base plate exposure, need to dismantle and the multiple ability completing substrate of device substrate is for exposure manufacture process
Demand.In addition, needing replacing different jig mechanisms when replacing exposure directions every time, causing substrate to load and unload repeatedly and be easy to hit
Wound, reduces the efficiency of operation, and improve the burden of manpower, does not meet the benefit of production.
Summary of the invention
It removably exposes rotation in view of this, some embodiments of this exposure disclose a kind of strip Jing Guo improvement and controls
Tool, can make substrate to be exposed in the case where not needing to dismantle repeatedly, be rotated through ratchet mechanism so that substrate is by multiple
It rotates and completing substrate exposure, higher relative to general card plug operating efficiency, stability is more preferably.
According to one embodiment of this exposure, a kind of exposure rotating jig includes support frame and accommodates component.Support frame has
Two opposite positioning plates.It accommodates component to be rotatablely arranged on the inside of two positioning plates, and accommodating component includes deckle board, ratchet in two
Mechanism, two rotary shafts, a plurality of fixing axles and a plurality of strips.Deckle board is located at the inside of two positioning plates in two.Ratchet
Mechanism is located in two between one of one of deckle board and two positioning plates.Rotary shaft passes through deckle board and two positioning plates in two,
And two one of rotary shaft run through ratchet mechanism.The both ends of each fixing axle are individually fixed in the corner of deckle board in two.It is each
Strip is removably connected across deckle board in two.
In one embodiment, the corner of interior deckle board has a plurality of location holes, and in fixing axle insertion location hole.
In one embodiment, the edge of interior deckle board has a plurality of recess portions, and strip is positioned in recess portion.
In one embodiment, interior deckle board further includes a plurality of shifting blocks and a plurality of magnet.Shifting block is respectively pivoted to recess portion
Opening.Magnet is located in interior deckle board, so that shifting block is adsorbed by magnet respectively and positioned.
In one embodiment, each strip has a plurality of card slots, to position at least one substrate to be exposed.
In one embodiment, ratchet mechanism contains ratchet component and telescopic block.Ratchet component by two rotary shafts wherein
One of run through, telescopic block is located at the inside of one of two positioning plates, and telescopically abuts ratchet component.
In one embodiment, with ontology and a plurality of double wedges for surrounding ontology on ratchet component.The two of each double wedge
Lateral margin and the junction of ontology have two point, and 45 degree of binding clip of the center of circle of two point and ontology.
In one embodiment, the bottom of support frame has vacancy section.Exposure rotating jig further includes pedestal.Pedestal position exists
Below support frame with vacancy section.Pedestal has the side wall of bottom plate and adjacent bottom plate, and bottom plate and side wall define a space, and
The vacancy section of this space connection support frame.
In one embodiment, when receiving component is obliquely located on the inside of two positioning versions, component at least partly position is accommodated
In the space of pedestal.
In this exposure above embodiment, positioning plate of the exposure rotating jig in the interior deckle board and support frame for accommodating component
Between be provided with a ratchet mechanism.This ratchet mechanism, which can allow, accommodates component in rotating multiple orientation angles on support frame, because
This can carry out the multiple portions exposure of substrate in exposure process under the premise of not removing substrate.In addition, ratchet mechanism may be used also
It avoids reversion from causing substrate repeated exposure to be exposed, has the effect of fool proof.In addition, the strip for accommodating component can avoid rotation
When substrate to be exposed fall, and strip can be removed in exposure to increase exposure area.Output can be improved in exposure rotating jig
Efficiency, and reduce the cost of jig.The good stability for exposing rotating jig can solve substrate and load and unload repeatedly to be easy to wound and waste
The problem of tradition jig such as manpower.
Detailed description of the invention
Fig. 1 is the perspective view according to the exposure rotating jig of one embodiment of this exposure.
Fig. 2 is the explosive view of the exposure rotating jig of Fig. 1.
Fig. 3 is the partial enlarged view of the exposure rotating jig of Fig. 1.
Fig. 4 is the front view of the ratchet component of Fig. 2.
Fig. 5 is the receiving component of the exposure rotating jig of Fig. 1 in the front view of horizontality.
Fig. 6 is the receiving component of the exposure rotating jig of Fig. 1 in the front view of plumbness.
Fig. 7 is the receiving component of the exposure rotating jig of Fig. 1 in heeling condition and perspective view when being put into substrate.
Fig. 8 is the receiving component of the exposure rotating jig of Fig. 1 in horizontality and perspective view when being put into multiple substrates.
Fig. 9 is the receiving component of the exposure rotating jig of Fig. 1 in plumbness and perspective view when being put into multiple substrates.
Appended drawing reference:
100: exposure rotating jig
110: support frame
112a, 112b: positioning plate
114: vacancy section
120: accommodating component
122a, 122b: interior deckle board
124: location hole
126: recess portion
132: shifting block
133: magnet
140: ratchet mechanism
142: ratchet component
143: ontology
144: double wedge
144a, 144b: double wedge
145: long lateral margin
146: short side edge
147a, 147b, 147c: contact
150a, 150b: rotary shaft
160: fixing axle
170: strip
172: card slot
180: pedestal
182: bottom plate
184: side wall
186: space
190: substrate
θ1、θ2: angle
Specific embodiment
A plurality of embodiments of this exposure will be disclosed with schema below, it is as clearly stated, thin in many practices
Section will be explained in the following description.It should be appreciated, however, that the details in these practices is not applied to limit this exposure.
That is the details in these practices is non-essential in this exposure some embodiments.In addition, for the sake of simplifying schema,
Some known usual structures and component will be painted it in a manner of simply illustrating in the drawings.
Fig. 1 is the perspective view according to the exposure rotating jig 100 of one embodiment of this exposure.The exposure that Fig. 2 is Fig. 1 rotates
The explosive view of jig 100.It exposes rotating jig 100 with Fig. 2 refering to fig. 1 simultaneously and contains support frame 110 and accommodate component 120.
Support frame 110 has opposite two positioning plates 112a and 112b.Positioning plate 112a can be rotatably arranged at by accommodating component 120
With the inside of 112b.It accommodates component 120 and contains 140, two two interior deckle board 122a and 122b, ratchet mechanism rotary shaft 150a
With 150b, a plurality of fixing axles 160 and a plurality of strips 170.Interior deckle board 122a is located at the inside of positioning plate 112a, and interior deckle board
122b is located at the inside of positioning plate 112b.Ratchet mechanism 140 is between interior deckle board 122a and positioning plate 112a.Fixing axle 160
Both ends be individually fixed in the corner of interior deckle board 122a and 122b.Strip 170 is removably connected across interior deckle board 122a and 122b.
In the present embodiment, the corner of interior deckle board 122a and 122b has a plurality of location holes 124, so that fixing axle
160 both ends can be inserted into location hole 124 and be connected across interior deckle board 122a and 122b.
In addition, the edge of interior deckle board 122a and 122b has a plurality of recess portions 126.In the present embodiment, interior deckle board
Every one side of 122a and 122b at least has two recess portions 126, and strip 170 is positioned in recess portion 126.Accommodate the every of component 120
Deckle board 122a and 122b contain a plurality of shifting blocks 132 and a plurality of magnet 133 in one.Fig. 3 is the exposure rotating jig of Fig. 1
100 partial enlarged view.As shown, shifting block 132 is respectively pivoted to the opening of recess portion 126 at the edge of interior deckle board 122a,
And magnet 133 is located in interior deckle board 122a.
The shifting block 132 of the right Fig. 3 is open state, and when pushing shifting block 132 aside, opening, Ke Yiqu are formed above recess portion 126
Out or place corresponding strip 170.The shifting block 132 of the left Fig. 3 is in off state, and when being closed shifting block 132, recess portion 126 is in
Existing closed state, and then position strip 170.The edge knot of deckle board 122a within the marginal texture and Fig. 3 of another interior deckle board 122b
Structure is similar, does not repeat to repeat.
Simultaneously refering to fig. 1 with Fig. 3, when strip 170 is put into the recess portion 126 of interior deckle board 122a and 122b, through interior deckle board
Magnet 133 in 122a and 122b and the adsorption capacity between metal prevent from dialling so that shifting block 132 is adsorbed by magnet 133 and positioned
Block 132 rotates.For example, when shifting block 132 is open state, magnet 133 adsorbs shifting block 132, opens so that recess portion 126 is in
State is opened in order to be put into or take out strip 170.When shifting block 132 is in off state, another magnet 133 adsorbs shifting block 132, makes
Recess portion 126 is obtained to be in close state in order to fixing strip 170.
In the present embodiment, accommodate component 120 strip 170 have a plurality of card slots 172, to position at least just like
The substrate 190 to be exposed of Fig. 7.
Fig. 4 is the front view of the ratchet component 142 of Fig. 2.Fig. 5 is the receiving component 120 of the exposure rotating jig 100 of Fig. 1
In the front view of horizontality.Describe in order to which the ratchet mechanism 140 of Fig. 5 can be understood, by determining for Fig. 5 masking ratchet mechanism 140
Position plate 112a is represented by dotted lines.Simultaneously refering to Fig. 4 and Fig. 5, the ratchet mechanism 140 for accommodating component 120 contains 141 He of telescopic block
Ratchet component 142.Ratchet component 142 is run through by rotary shaft 150a, and telescopic block 141 is located at the inside of positioning plate 112a, and can
Telescopically abut ratchet component 142.
The ratchet component 142 of ratchet mechanism 140 has ontology 143 and surrounds a plurality of double wedges 144 of ontology 143.Each
Double wedge 144 has two lateral margins, respectively long lateral margin 145 and short side edge 146.For example, the short side edge 146 of double wedge 144a and sheet
The junction of body 143 has contact 147a, and the long lateral margin 145 of double wedge 144a and the junction of ontology 143 have contact 147b, and
The circle center line connecting of contact 147a and contact 147b and ontology 143 has angle theta1.Adjacent to its length of the double wedge 144b of double wedge 144a
There is the circle center line connecting of contact 147c, contact 147a and contact 147c and ontology 143 to have for lateral margin 145 and the junction of ontology 143
There is angle theta2。
In the present embodiment, the circle center line connecting of the contact 147a on ratchet component 142 and contact 147b and ontology 143 presss from both sides
Angle θ1It can be 45 degree, allow the quantity of 142 upper raised teeth 144 of ratchet component to be 8, so that accommodating component 120 in fixed
There are 8 anchor points between position plate 112a and 112b.Through this 8 anchor points, substrate 190 to be exposed is put into addition to controllable
120 tilt angle of (see Fig. 7) Shi Rongna component also can control the rotational positioning point for accommodating component 120, so that substrate to be exposed
190 are rotating repeatedly (such as four times) completion exposure afterwards.
In addition, each double wedge 144 on ratchet component 142 long lateral margin 145 and short side edge 146 from ontology 143 extend and
Out, long lateral margin 145 is arc, and the length of the long lateral margin 145 of arc is greater than short side edge 146.This design is revolved in ratchet component 142
It can prevent interior deckle board 122a and 122b from rotating backward when turning, prevent the partial region repeated exposure of substrate 190 to be exposed whereby,
Has the function of fool proof.
In the present embodiment, under telescopic block 141 can connecting spring and be connected to ratchet component 142.When ratchet member
When part 142 is rotated toward single direction, ratchet component 142 forces telescopic block 141 to decline the state for compressing spring, works as telescopic block
141 upwards when being caught between two double wedges 144 of ratchet component 142, and spring be the state of stretching, so that ratchet component 142 is determined
Position is without rotating.
Fig. 6 is the receiving component 120 of the exposure rotating jig 100 of Fig. 1 in the front view of plumbness.Simultaneously refering to figure
5 and Fig. 6, ratchet component 142 and the axle center having the same rotary shaft 150a.It is revolved when accommodating the rotation of component 120, such as by Fig. 5
Switch to the state of Fig. 6, or rotate to be the state of Fig. 5 by Fig. 6, is with rotary shaft 150a and 150b (see Fig. 1) and ratchet component 142
It is rotated for the center of circle.For example, if ratchet component 142 is design (the i.e. angle theta of Fig. 41It is 45 degree), when the receiving of Fig. 5
When component 120 is rotated clockwise using ratchet mechanism 140, telescopic block 141 can be allowed across stopping rotating after two double wedges 144,
Obtain the state that Fig. 6 accommodates component 120.
Fig. 7 is the receiving component 120 of the exposure rotating jig 100 of Fig. 1 in heeling condition and solid when being put into substrate 190
Figure.As shown, 110 bottom of support frame of exposure rotating jig 100 has vacancy section 114.Exposing rotating jig 100 also includes
Pedestal 180, pedestal 180 are located at the lower section of support frame 110.Pedestal 180 has the side wall 184 of bottom plate 182 and adjacent bottom plate 182.
Bottom plate 182 and side wall 184 define space 186, and the vacancy section 114 of this space 186 connection support frame 110.
When the receiving component 120 for exposing rotating jig 100 is obliquely located on the inside of positioning plate 112a and 112b, receiving group
Part 120 is at least partially disposed in the space 186 defined by the bottom plate and side wall 184 of pedestal 180, is accommodated component 120 at this time and is
Heeling condition.Substrate 190 to be exposed is put into for convenience and is accommodated in component 120, component 120 can will be first accommodated and utilize ratchet
The rotation of mechanism 140 is to heeling condition, as shown in Figure 7.The strip 170 of wherein side is removed at this time, be put into it is one or several to
The substrate 190 of exposure, and substrate 190 is allowed to be caught in the card slot 172 of strip 170, to ensure substrate 190 in exposure process not
It can shake.In heeling condition, for convenience by substrate 190 to be exposed be put into accommodate component 120 in, be located at Fig. 7 on the upside of with
The strip 170 in left side is the state removed, but not to limit this exposure.
Fig. 8 is the receiving component 120 of the exposure rotating jig 100 of Fig. 1 in horizontality and when being put into multiple substrates 190
Perspective view.When the receiving component 120 of Fig. 7 to be become to the horizontality of Fig. 8 from heeling condition, it is only necessary to accommodate component through rotation
120, so that ratchet mechanism 140 is come the position of locator receiver component 120.For example, if ratchet component 142 is setting for Fig. 4
Count (i.e. angle theta1Be 45 degree), accommodate component 120 when rotating clockwise using ratchet mechanism 140, can allow telescopic block 141 across
It stops rotating after single double wedge 144, can will accommodate component 120 becomes horizontality from heeling condition.Become from heeling condition
During horizontality, the strip 170 at mountable interior deckle board 122a and tetra- edge 122b is to prevent substrate 190 from dropping out.Work as appearance
When component 120 of receiving is horizontality and substrate 190 to be exposed, the strip 170 of top can be removed, with benefit exposure, such as Fig. 8
It is shown.
Fig. 9 is the receiving component 120 of the exposure rotating jig 100 of Fig. 1 in plumbness and when being put into multiple substrates 190
Perspective view.When the receiving component 120 of Fig. 8 to be become to the plumbness of Fig. 9 from horizontality, it is only necessary to accommodate component through rotation
120, so that ratchet mechanism 140 is come the position of locator receiver component 120.For example, if ratchet component 142 is setting for Fig. 4
Count (i.e. angle theta1For 45 degree, angle theta2It is 90 degree), when receiving component 120 is rotated clockwise using ratchet mechanism 140, it can allow and stretch
For contracting block 141 across stopping rotating after two double wedges 144, can will accommodate component 120 become plumbness from horizontality.From level
During state becomes plumbness, the strip 170 at mountable interior deckle board 122a and tetra- edge 122b is to prevent substrate 190 from falling
Out.When accommodating component 120 is plumbness and substrate 190 to be exposed, the strip 170 of top can be removed, be exposed with benefit
Light, as shown in Figure 9.
In one embodiment, it is intended to completely expose substrate 190 to be exposed, need to will accommodate component 120 and penetrate ratchet machine
Structure 140 rotates multiple (such as four times), to achieve the effect that expose completely, but not to limit this exposure.
In the present embodiment, the material of fixing axle 160 can be 304 stainless steels (SUS304).The material of strip 170
It may include 304 stainless steels, Teflon and fibre.The material of interior deckle board 122a and 122b can be 6061 anodized aluminum alloys,
The material of support frame 110 can be cold-rolled steel coils (the Steel plate coldrolled coil for being coated with baking vanish;SPCC).
However, the material of fixing axle 160, strip 170, support frame 110, interior deckle board 122a and 122b are not limited with above-mentioned material.
Although this exposure is disclosed above with embodiment, so it is not limited to this exposure, any to be familiar with this skill
Person may make various changes and modifications in the spirit and scope for not departing from this exposure, therefore the protection scope of this exposure is worked as
Depending on after subject to attached claim institute defender.
Claims (10)
1. a kind of exposure rotating jig, characterized by comprising:
One support frame has two opposite positioning plates;And
One accommodates component, is rotatablely arranged on the inside of two positioning plate, which includes:
Deckle board in two is located at the inside of two positioning plate;
One ratchet mechanism is located at this in two between one of one of deckle board and two positioning plate;
Two rotary shafts pass through deckle board and two positioning plate in two, and one of two rotary shaft runs through the ratchet mechanism;
A plurality of fixing axles, the both ends of each of fixing axle are individually fixed in the corner of the deckle board in two;And
A plurality of strips are removably connected across the deckle board in two.
2. exposure rotating jig as described in claim 1, wherein the corner of those interior deckle boards has a plurality of location holes, and should
A little fixing axles are inserted into those location holes.
3. exposure rotating jig as described in claim 1, wherein the edge of those interior deckle boards has a plurality of recess portions, those cards
Item is positioned in those recess portions.
4. exposure rotating jig as claimed in claim 3, wherein those interior deckle boards are further included:
A plurality of shifting blocks are respectively pivoted to the opening of those recess portions;And
A plurality of magnet are located in those interior deckle boards, so that those shifting blocks are adsorbed by those magnet respectively and positioned.
5. exposure rotating jig as described in claim 1, wherein those strips have a plurality of card slots, to position at least one
Substrate to be exposed.
6. exposure rotating jig as described in claim 1, wherein the ratchet mechanism includes:
One ratchet component is run through by one of two rotary shaft;And
One telescopic block positioned at the inside of one of two positioning plate, and telescopically abuts the ratchet component.
7. exposure rotating jig as claimed in claim 6, wherein with an ontology and around the ontology on the ratchet component
A plurality of double wedges, two lateral margins of each of double wedge and the junction of the ontology have two point, and the two point and the ontology
45 degree of binding clip of the center of circle.
8. exposure rotating jig as claimed in claim 7, wherein two lateral margin of each of double wedge from ontology extension and
Out, one of two lateral margin is arc, and the length of the lateral margin of arc is greater than the another one of two lateral margin.
9. exposure rotating jig as described in claim 1, wherein the bottom of the support frame has a vacancy section, exposure rotation
Jig further includes:
One pedestal is located at below the support frame, which has the one side wall of a bottom plate and the adjacent bottom plate, the bottom plate and the side
Wall defines a space, and the space is connected to the vacancy section of the support frame.
10. exposure rotating jig as claimed in claim 9, wherein when the receiving component is obliquely located on the inside of two positioning plate
When, which is at least partially disposed in the space of the pedestal.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810004606.0A CN108227403B (en) | 2018-01-03 | 2018-01-03 | Expose rotating jig |
TW107101444A TWI656600B (en) | 2018-01-03 | 2018-01-15 | Exposure rotation fixture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810004606.0A CN108227403B (en) | 2018-01-03 | 2018-01-03 | Expose rotating jig |
Publications (2)
Publication Number | Publication Date |
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CN108227403A CN108227403A (en) | 2018-06-29 |
CN108227403B true CN108227403B (en) | 2019-11-26 |
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ID=62642684
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201810004606.0A Active CN108227403B (en) | 2018-01-03 | 2018-01-03 | Expose rotating jig |
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Country | Link |
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CN (1) | CN108227403B (en) |
TW (1) | TWI656600B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN117108969B (en) * | 2023-07-26 | 2024-04-02 | 苏州汇影光学技术有限公司 | Stable and energy-saving line scanning ultraviolet light source |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
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TWM373508U (en) * | 2009-08-06 | 2010-02-01 | C Sun Mfg Ltd | Turn-over device and exposure machine with the turn-over device |
TWM455577U (en) * | 2013-02-26 | 2013-06-21 | Cheng Uei Prec Ind Co Ltd | Automatic welding equipment |
WO2015166566A1 (en) * | 2014-04-30 | 2015-11-05 | 株式会社エフケー光学研究所 | Coating apparatus and coating method |
JP6398902B2 (en) * | 2014-08-19 | 2018-10-03 | 信越化学工業株式会社 | Rectangular substrate for imprint lithography and method for manufacturing the same |
CN205845913U (en) * | 2016-07-26 | 2016-12-28 | 南通富士通微电子股份有限公司 | A kind of exposure structure for crystal round fringes |
CN106483775B (en) * | 2016-12-20 | 2018-06-08 | 广东莱宝智能装备股份有限公司 | Exposure machine |
-
2018
- 2018-01-03 CN CN201810004606.0A patent/CN108227403B/en active Active
- 2018-01-15 TW TW107101444A patent/TWI656600B/en active
Also Published As
Publication number | Publication date |
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TW201931517A (en) | 2019-08-01 |
TWI656600B (en) | 2019-04-11 |
CN108227403A (en) | 2018-06-29 |
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