TWI638468B - Optoelectronic device and method for manufacturing the same - Google Patents

Abstract

A photoelectric element comprising: a substrate having a first side and a second side opposite to the first side, and a first outer boundary; a light emitting diode unit formed on the first side; a first electrode electrically connected a light emitting diode unit; a second electrode electrically connected to the light emitting diode unit; and a heat dissipating pad formed between the first electrode and the second electrode and electrically isolated from the light emitting diode unit.

Description

Photoelectric element and method of manufacturing same

This invention relates to a photovoltaic element, and more particularly to a photovoltaic element having a thermal pad.

The principle of light-emitting diode (LED) is to use energy difference between the n-type semiconductor and the p-type semiconductor to release energy in the form of light. This principle of illumination is different from incandescent lamps. The principle of heat generation, so the light-emitting diode is called a cold light source. In addition, the light-emitting diode has the advantages of high durability, long life, light weight, low power consumption, etc., so the current lighting market has high hopes for the light-emitting diode, and it is gradually replaced as a new generation of lighting tools. Light source, and is used in various fields, such as traffic signs, backlight modules, street lighting, medical equipment, etc.

1 is a schematic view showing the structure of a conventional light-emitting element. As shown in FIG. 1, a conventional light-emitting element 100 includes a transparent substrate 10, a semiconductor laminate 12 on a transparent substrate 10, and at least one electrode 14 located in the semiconductor. On the stack 12, the semiconductor stack 12 includes at least a first conductive semiconductor layer 120, an active layer 122, and a second conductive semiconductor layer 124 from top to bottom.

In addition, the above-described light-emitting element 100 can be further combined with other elements to form a light-emitting apparatus. 2 is a schematic view showing the structure of a conventional light-emitting device. As shown in FIG. 2, a light-emitting device 200 includes a sub-mount 20 having at least one circuit 202; at least one solder 22 is located in the above-mentioned sub-carrier 20, the light-emitting element 100 is bonded and fixed to the secondary carrier 20 by the solder 22, and the substrate 10 of the light-emitting element 100 is electrically connected to the circuit 202 on the secondary carrier 20; and an electrical connection structure 24 is The electrode 14 of the light-emitting element 100 and the circuit 202 on the secondary carrier 20 are electrically connected; wherein the secondary carrier 20 can be a lead frame or a large mounting substrate to facilitate the circuit of the light-emitting device 200. Plan and improve its cooling performance.

A photoelectric element comprising: a substrate having a first side and a second side opposite to the first side, and a first outer boundary; a light emitting diode unit formed on the first side; a first electrode electrically connected a light emitting diode unit; a second electrode electrically connected to the light emitting diode unit; and a heat dissipating pad formed between the first electrode and the second electrode and electrically isolated from the light emitting diode unit.

The present invention discloses a light-emitting element and a method of manufacturing the same. In order to make the description of the present invention more detailed and complete, please refer to the following description and the drawings of FIGS. 3A-10.

3A and 3B are a side view and a top view of the photovoltaic element 300 of the first embodiment of the present invention. The photovoltaic element 300 has a substrate 30. The substrate 30 is not limited to a single material, and may be a composite substrate in which a plurality of different materials are combined. For example, the substrate 30 may include two first substrates and a second substrate (not shown) that are bonded to each other.

Next, a plurality of arrayed photovoltaic element units U, one first contact photovoltaic element unit U1 and one second contact photovoltaic element unit U2 are formed on the substrate 30. The manufacturing method of the array type photovoltaic element unit U, the first contact photoelectric element unit U1 and the second contact photoelectric element unit U2 is as follows:

First, an epitaxial stack is formed on a substrate 30 by a conventional epitaxial growth process, including a first semiconductor layer 321, an active layer 322, and a second semiconductor layer 323.

Next, as shown in FIG. 3B, a portion of the epitaxial layer stack is selectively removed by a yellow lithography process to form a plurality of photovoltaic element units U, a first contact photocell unit U1, and a first layer separately arranged on the growth substrate. The two contacts the photovoltaic element unit U2 and form at least one trench S. In an embodiment, the trench S may include etching the first semiconductor layer 321 of each of the photovoltaic element unit U, the first contact photovoltaic element unit U1, and the second contact photovoltaic element unit U2 with an exposed area by a yellow light lithography process. As a forming platform for the subsequent conductive wiring structure.

In another embodiment, in order to increase the light extraction efficiency of the entire component, the photovoltaic element unit U, the first contact photovoltaic element unit U1, and the second contact photoelectric element unit U2 may also be transferred through a transfer epitaxial stack or substrate bonding technique. The epitaxial stack is disposed on the substrate 30. The epitaxial stack of the photocell unit U, the first contact photocell unit U1, and the second contact photocell unit U2 may be directly bonded to the substrate 30 by heating or pressing, or through a transparent adhesive layer (not shown). The epitaxial stack of the photovoltaic element unit U, the first contact photovoltaic element unit U1, and the second contact photovoltaic element unit U2 is adhered to the substrate 30. The transparent adhesive layer may be an organic polymer transparent adhesive material, such as polyimide, benzocyclobutane (BCB), prefluorocyclobutane (PFCB), epoxy resin. (Epoxy), acrylic resin (Acrylic Resin), polyester resin (PET), polycarbonate resin (PC) or other materials or combinations thereof; or a transparent conductive oxide metal layer, such as indium tin oxide (ITO) ), indium oxide (InO), tin oxide (SnO2), zinc oxide (ZnO), tin oxide fluoride (FTO), antimony tin oxide (ATO), cadmium tin oxide (CTO), zinc aluminum oxide (AZO), a material such as zinc gallium oxide (GZO) or a combination thereof; or an inorganic insulating layer such as alumina (Al 2 O 3 ), tantalum nitride (SiNx), yttrium oxide (SiO 2 ), aluminum nitride (AlN), titanium dioxide (TiO 2 ), Materials such as Tantalum Pentoxide (Ta2O5) or a combination thereof. In an embodiment, the substrate 30 may have a wavelength converting material.

Actually, the method of disposing the epitaxial stack of the photovoltaic element unit U, the first contact photovoltaic element unit U1, and the second contact photovoltaic element unit U2 on the substrate 30 is not limited thereto, and those having ordinary knowledge in the art It should be understandable. In addition, in an embodiment, depending on the number of times of transfer of the substrate 30, the second semiconductor layer 323 may be formed adjacent to the substrate 30, and the first semiconductor layer 321 is on the second semiconductor layer 323 with the active layer 322 interposed therebetween. .

Then, between the surface of the epitaxial layer of the first contact photocell unit U1 and the second contact photocell unit U2 and the epitaxial stack of the adjacent photocell unit U, chemical vapor deposition (CVD), physical gas A first insulating layer 361 is deposited by techniques such as phase deposition (PVD), sputtering, etc., as a protection between the epitaxial stack and electrical insulation between adjacent photovoltaic element units U. Thereafter, a plurality of electrically conductive wiring structures 362 which are completely separated from each other are formed on the surface of the first semiconductor layer 321 of the two adjacent photovoltaic element units U and the surface of the second semiconductor layer 323, respectively, by evaporation or sputtering. The plurality of conductive wiring structures 362 that are completely separated from each other are disposed on the first semiconductor layer 321 in a single direction, and are electrically connected to each other through the first semiconductor layer 321 . The conductive wiring structures 362 which are spatially separated from each other continue to extend to the second semiconductor layer 323 of another adjacent photovoltaic element unit U, and the other end is electrically connected to the second semiconductor layer 323 of the photovoltaic element unit U, so that The adjacent photovoltaic element units U form an electrical series.

The method of electrically connecting the adjacent photovoltaic element units U is not limited thereto, and those having ordinary knowledge in the art should understand that by arranging the two ends of the conductive wiring structure to be the same or different for different photovoltaic element units, respectively. On the semiconductor layer of the conductive polarity, an electrical connection structure in parallel or in series may be formed between the photovoltaic element units.

From the 3A-3B diagram, the photovoltaic elements 300 are arranged in a series of series arrays in circuit design. A first electrode 341 is formed on the first semiconductor layer 321 of the photo element unit U, the first contact photo element unit U1 and the second contact photo element unit U2, and a second electrode 342 is formed on the second semiconductor layer 323. The process of forming the first electrode 341 and the second electrode 342 may be performed in the same forming process as the conductive wiring structure 362, or may be completed by multiple processes. The material forming the first electrode 341 and the second electrode 342 may be the same as or different from the material forming the conductive wiring structure 362. In one embodiment, the second electrode 342 can be a multilayer structure and/or include a metal reflective layer (not shown) with a reflectance greater than 80%. In an embodiment, the conductive wiring structure 362 can be a metal reflective layer with a reflectivity greater than 80%.

Thereafter, as shown in FIG. 3B, a second insulating layer 363 may be formed over the plurality of conductive wiring structures 362, a portion of the first insulating layer 361, and a portion of the epitaxial stacked sidewalls. In an embodiment, the first insulating layer 361 and the second insulating layer 363 may be a transparent insulating layer. The material of the first insulating layer 361 and the second insulating layer 363 may be an oxide, a nitride, or a polymer, and the oxide may include aluminum oxide (Al 2 O 3 ), cerium oxide (SiO 2 ), and titanium dioxide (TiO 2 ). , Tantalum Pentoxide (Ta2O5) or alumina (AlOx); the nitride may comprise aluminum nitride (AlN), tantalum nitride (SiNx); the polymer may comprise polyimide or benzo A material such as benzocyclobutane (BCB) or a combination of the above. In an embodiment, the second insulating layer 363 can be a Bragg Reflector structure. In an embodiment, the thickness of the second insulating layer 363 is greater than the thickness of the first insulating layer 361.

Finally, a third electrode 381 is formed on the first electrode 341, a fourth electrode 382 is disposed on the second electrode 342, and at least a first heat dissipation pad 383 is disposed on the second semiconductor layer 323 of the photocell unit U. Above, the first heat dissipation pad 383 is electrically insulated from the second semiconductor layer 323 of the photovoltaic element unit U by the second insulating layer 363. In an embodiment, the projection of the first thermal pad 383 on the surface of the vertical substrate 30 is not formed on the first insulating layer 361. In an embodiment, the first thermal pad 383 is formed over a flat surface. As shown in FIG. 3A, in an embodiment, the second semiconductor layer 323 of each of the photovoltaic element units U has a first heat dissipation pad 383, and the first heat dissipation pad 383 is provided by the second The insulating layer 363 is electrically insulated from the second semiconductor layer 323 of the photovoltaic element unit U.

In an embodiment, the third electrode 381, the fourth electrode 382, and the first heat dissipation pad 383 may be formed together in the same process or separately in different processes. In an embodiment, the third electrode 381, the fourth electrode 382, and the first heat dissipation pad 383 may have the same laminated structure. The material of the first electrode 341, the second electrode 342, the conductive wiring structure 362, the third electrode 381, the fourth electrode 382, and the first heat dissipation pad 383 may be a metal such as gold (Au) or silver. (Ag), copper (Cu), chromium (Cr), aluminum (Al), platinum (Pt), nickel (Ni), titanium (Ti), tin (Sn), or the like, or an alloy thereof or a combination thereof.

In an embodiment, the second semiconductor layer 323 has an upper surface and a first surface area, and the first heat dissipation pad 383 has a second surface area, and the ratio of the second area to the first area is between 80% and 100%. . In an embodiment, the boundary of any two first thermal pad 383 may have a shortest distance D, and/or D is greater than 100 μm.

In one embodiment, as shown in FIG. 3C, a carrier or a circuit component P may be provided, and a first carrier electrode E1 and a first carrier electrode are formed on the carrier or circuit component P by wire bonding or soldering. The second carrier electrode E2. The first carrier electrode E1 and the second carrier electrode E2 can form a flip-chip structure with the third electrode 381 and the fourth electrode 382 of the photovoltaic element 300.

In one embodiment, the first carrier electrode E1 is electrically connected to the third electrode 381 of the optoelectronic component 300 and a first thermal pad 383, and the second carrier electrode E2 and the fourth electrode 382 are The other first heat dissipation pad 383 is electrically connected to form a flip chip structure. In this embodiment, the first heat dissipation pad 383 can help to dissipate heat because it is electrically connected to the first carrier electrode E1 and the second carrier electrode E2. In this embodiment, since each of the photovoltaic element units U arranged in the series array has a voltage difference when activated, the electrical insulation between the first heat dissipation pad 383 and the photovoltaic element unit U can be avoided. The above voltage difference causes breakdown or leakage between the respective photovoltaic element units U. In addition, the projection of the first heat dissipation pad 383 on the surface of the vertical substrate 30 is not formed on the first insulating layer 361, and the disconnection caused by the height difference of the trench S in the process can be avoided, or the first insulating layer 361 is avoided. Leakage or short circuit caused by incomplete insulation.

4A-4E is a structural view showing a top view of a photovoltaic element unit according to further embodiments of the present invention. 4A to 4E show possible variations of the photovoltaic element according to the first embodiment of the present invention, and the manufacturing method, the materials of use, the reference numerals, and the like are the same as those of the first embodiment described above, and are not described herein again.

As shown in FIG. 4A, each of the photovoltaic element unit U, the first contact photovoltaic element unit U1, and the second contact photovoltaic element unit U2 are arranged in a line. In this embodiment, the first electrode 341 or the second electrode 342 of each of the photo element unit U, the first contact photo element unit U1, and the second contact photo element unit U2 may have an extension electrode 3421 to increase each photo element. The current spreading of the unit U, the first contact photocell unit U1 and the second contact photocell unit U2, as will be understood by those of ordinary skill in the art, the shape of the extension electrode can be adjusted according to the design requirements of the product. It is not limited to the shape of the current illustration. In addition, the first heat dissipation pad 383 formed on the photovoltaic element unit U is also adjusted according to the shape of the extension electrode so as not to directly contact the conductive wiring structure 362, the first electrode 341 or the second electrode 342, and Electrical insulation.

FIG. 4B shows another possible variation of the present invention. In this embodiment, the respective photocell unit U, the first contact photocell unit U1, and the second contact photocell unit U2 are not arranged in a straight line like the foregoing embodiment. And in a ring connection, at least one side wall of the first contact photocell unit U1 is connected to the sidewall of the second contact photocell unit U2. In addition, the first heat dissipation pad 383 formed on the photovoltaic element unit U is also adjusted according to the shape of the extension electrode so as not to directly contact the conductive wiring structure 362, the first electrode 341 or the second electrode 342, and Electrical insulation.

FIG. 4C shows another possible variation of the present invention. In this embodiment, each of the photocell unit U, the first contact photocell unit U1, and the second contact photocell unit U2 may be a ring-shaped connection. In addition to the first contact photocell unit U1, the widths of the first electrode 341 of each of the photocell unit U and the second contact photocell unit U2 are thinner than the conductive wiring structure 362 and further extend inside the cells to increase current spreading. In addition, the first heat dissipation pad 383 formed on the photovoltaic element unit U is also adjusted according to the shape of the conductive wiring structure 362, the first electrode 341 or the second electrode 342 so as not to directly contact the conductive wiring structure 362, An electrode 341 or a second electrode 342 is electrically insulated from it.

4D is a view showing another possible variation of the present invention. In this embodiment, each of the photovoltaic element unit U, the first contact photovoltaic element unit U1, and the second contact photoelectric element unit U2 may be a ring-shaped connection, and each of the photovoltaic elements The shapes of the unit U, the first contact photocell unit U1, and the second contact photocell unit U2 may vary depending on design requirements, and are not identical. In this embodiment, three differently shaped photovoltaic element units U are included, as will be understood by those of ordinary skill in the art, the number, shape, size or arrangement of the photovoltaic element units U can be adapted to the needs of the product. Adjust the design by the number of voltages. In addition, the first heat dissipation pad 383 formed on the photovoltaic element unit U is also adjusted according to the shape of the conductive wiring structure 362, the first electrode 341 or the second electrode 342 so as not to directly contact the conductive wiring structure 362, An electrode 341 or a second electrode 342 is electrically insulated from it.

FIG. 4E shows another possible variation of the present invention. In this embodiment, each of the photocell unit U, the first contact photocell unit U1, and the second contact photocell unit U2 may be a W-shaped connection, that is, adjacent The connection directions of the photovoltaic element units U of the two rows are different, and a matrix arrangement having four rows and four columns is formed. Those of ordinary skill in the art will appreciate that the number or arrangement of optoelectronic component units U can be adjusted to match the number of drive voltages required for the product. In this embodiment, by the spiral arrangement, the first contact photo element unit U1 and the second contact photo element unit U2 may be formed on the same column because the first contact photo element unit U1 and the second contact photo element unit The position of U2 needs to be connected with the subsequent connection with the external circuit. Therefore, in another embodiment, the first contact photo element unit U1 and the second contact photo element unit U2 can be located by adjusting the arrangement of the photo element units U. Both ends of the diagonal of the matrix. In addition, the first heat dissipation pad 383 formed on the photovoltaic element unit U is also adjusted according to the shape of the conductive wiring structure 362, the first electrode 341 or the second electrode 342 so as not to directly contact the conductive wiring structure 362, An electrode 341 or a second electrode 342 is electrically insulated from it.

5A to 5E are a side view and a top view showing a manufacturing process of a photovoltaic element according to a second embodiment of the present invention. The photovoltaic element 300' is a modification of the above-described first embodiment. 5A-5B is produced after the above-mentioned 3A-3B drawing, and the manufacturing method, the materials used, the reference numerals and the like are the same as those in the first embodiment, and will not be described again. In the above view of the embodiment, in order to clearly show the difference from the first embodiment described above, the drawing of some of the elements is omitted to keep the drawing simple, and those having ordinary knowledge in the art should be able to compare the foregoing. The description of the embodiment is fully understood by way of examples.

As shown in FIGS. 5A-5B, a support member 44 can be formed over the substrate 30 and cover the sidewalls of the substrate 30. In an embodiment, the support member 44 can be transparent and the material can be silicone resin, epoxy or other materials. In one embodiment, a light guiding member (not shown) may be formed on the supporting member 44. In an embodiment, the material of the light guiding member may be glass.

Next, an optical layer 46 may be formed on the second insulating layer 363 of the optical element and cover each of the photocell unit U, the first contact photocell unit U1, and the second contact photocell unit U2. The material of the optical layer 46 may comprise a mixture of a matrix and a high reflectivity material, wherein the substrate may be a silicone resin, an epoxy resin or other material, and the high reflectivity material may be TiO2.

Next, as shown in FIG. 5C, a plurality of openings 461 are formed on the optical layer 46, and the plurality of openings correspond to the third electrodes 381 and the first contact photo element unit U1 and the second contact photo element unit U2. The four electrodes 382 are positioned and a portion of the third electrode 381 and the fourth electrode 382 are exposed. In one embodiment, the opening 461 also corresponds to the position of the first thermal pad 383 of each of the photocell units U, and a portion of the first thermal pad 383 is exposed.

Next, as shown in FIG. 5D-5E, a fifth electrode 40 and a sixth electrode 42 are electrically connected to the third electrode 381 and the fourth electrode 382, respectively. In an embodiment, the fifth electrode 40 and the sixth electrode 42 are selectively electrically connected to the at least one first heat dissipation pad 383 to facilitate subsequent heat dissipation. In an embodiment, the fifth electrode 40 or the sixth electrode 42 comprises a metal reflective layer. In an embodiment, the optical layer 46 is interposed between the third electrode 381 and the fifth electrode 40 and between the fourth electrode 382 and the sixth electrode 42. In an embodiment, the outer boundary of the optical layer 46 is larger than the outer boundary of the substrate 30.

Finally, as shown in FIG. 5F, a carrier or a circuit component P can be provided, and a first carrier electrode E1 and a second carrier are formed on the carrier or circuit component P by wire bonding or soldering. Electrode E2. The first carrier electrode E1 and the second carrier electrode E2 can form a flip-chip structure with the fifth electrode 40 and the sixth electrode 42 of the photovoltaic element 300'. In one embodiment, the fifth electrode 40 and the sixth electrode 42 extend beyond the outer boundary of the substrate 30. In one embodiment, the projected area of the fifth electrode 40 and the sixth electrode 42 on the surface of the vertical substrate 30 is larger than the area of the substrate 30. In this embodiment, by increasing the area of the fifth electrode 40 and the sixth electrode 42, the subsequent connection with the carrier or the circuit component P can be made more convenient, and the problem of alignment can be reduced.

6A to 6F are a side view and a top view showing a manufacturing process of a photovoltaic element according to a third embodiment of the present invention. The photovoltaic element 400 is a modification of the second embodiment described above. 6A-6B is produced after the above-mentioned 5A-5B, and the manufacturing method, the materials used, the reference numerals, and the like are the same as those in the first embodiment, and will not be described again. In the above view of the embodiment, in order to clearly show the difference from the above embodiment, the drawing of some components is omitted to keep the drawing simple, and those having ordinary knowledge in the art should be able to compare the foregoing embodiments. A full understanding of the description of the embodiment is provided.

As shown in FIGS. 6A-6B, the present embodiment includes a support member 44 formed on the substrate 30 of the photovoltaic element and covering the sidewall of the substrate 30. Next, a second thermal pad 48 is formed over the optoelectronic component and support component 44. In an embodiment, the second heat dissipation pad 48 may be formed simultaneously with the first heat dissipation pad 383 in the same process or separately in different processes. In an embodiment, the second heat dissipation pad 48 can have the same material as the first heat dissipation pad 383. In an embodiment, the material of the second heat dissipation pad 48 may be a material having a thermal conductivity of >50 W/mk or an insulating material, such as a metal or diamond-like carbon.

In this embodiment, the second heat dissipation pad 48 includes two first portions 482 formed on the support member 44 and a second portion 481 formed on the photoelectric element and connected to the two ends of the second portion 482. The two first portions 481 form a dumbbell shape. In one embodiment, the first portion 482 has a width greater than a width of the second portion 481.

In one embodiment, the second heat dissipating pad 48 is formed between the two photocell units U and does not directly contact the first heat dissipating pad 383 or electrically connected to the first heat dissipating pad 383. In an embodiment, the second heat dissipation pad 48 is formed over the second insulation layer 363 between the two photovoltaic element units U.

Next, as shown in FIG. 6C-6D, an optical layer 46 may be formed on the second insulating layer 363 of the optical element and cover each of the photocell units U, the first contact photocell unit U1, and the second contact optoelectronics. The element unit U2 and the second heat dissipation pad 48 described above. The material of the optical layer 46 may comprise a mixture of a matrix and a high reflectivity material, wherein the substrate may be a silicone resin, an epoxy resin or other material, and the high reflectivity material may be TiO2.

Then, a plurality of openings 461 are formed on the optical layer 46, and the plurality of openings correspond to the positions of the third electrode 381 and the fourth electrode 382 of the first contact photocell unit U1 and the second contact photocell unit U2, and A portion of the third electrode 381 and the fourth electrode 382 are exposed. In one embodiment, the opening 461 also corresponds to the position of the first thermal pad 383 of each of the photocell units U, and a portion of the first thermal pad 383 is exposed.

Next, as shown in FIG. 6E-6F, a fifth electrode 40 and a sixth electrode 42 are electrically connected to the third electrode 381 and the fourth electrode 382, respectively. In an embodiment, the fifth electrode 40 and the sixth electrode 42 are selectively connected to the at least one first heat dissipation pad 383 and the second heat dissipation pad 48 respectively to facilitate subsequent heat dissipation, and the embodiment is completed. Fabrication of photovoltaic element 400. In an embodiment, the fifth electrode 40 or the sixth electrode 42 comprises a metal reflective layer. In an embodiment, the optical layer 46 is interposed between the third electrode 381 and the fifth electrode 40 and between the fourth electrode 382 and the sixth electrode 42. In an embodiment, the outer boundary of the optical layer 46 is larger than the outer boundary of the substrate 30.

In one embodiment, a carrier or a circuit component (not shown) may be provided, and a first carrier electrode (not shown) and a first carrier electrode (not shown) are formed on the carrier or circuit component by wire bonding or soldering. The second carrier electrode (not shown). The first carrier electrode and the second carrier electrode can form a flip-chip structure with the fifth electrode 40 and the sixth electrode 42 of the photovoltaic element 400. In one embodiment, the fifth electrode 40 and the sixth electrode 42 extend beyond the outer boundary of the substrate 30. In one embodiment, the projected area of the fifth electrode 40 and the sixth electrode 42 on the surface of the vertical substrate 30 is larger than the area of the substrate 30. In this embodiment, by increasing the area of the fifth electrode 40 and the sixth electrode 42, the subsequent connection with the carrier or the circuit component can be made more convenient, and the problem of alignment can be reduced.

7A to 7D are flowcharts showing the manufacture of the photovoltaic element of the fourth embodiment of the present invention. As shown in Fig. 7A, the present embodiment includes a substrate (not shown). The substrate is not limited to a single material, and may be a composite substrate in which a plurality of different materials are combined. For example, the substrate may include two first substrates and a second substrate (not shown) that are joined to each other.

Next, an epitaxial stack is formed on the substrate by a conventional epitaxial growth process, including a first semiconductor layer 321, an active layer (not shown), and a second semiconductor layer 323. Thereafter, a trench S is formed to expose a portion of the first semiconductor layer 321 and a first insulating layer 361 is formed on the sidewall of the trench to electrically isolate the active layer and the second semiconductor layer 323. In one embodiment, a metal layer can be formed in the trench S to form a first extension electrode (not shown). Then, a first electrode 341 is formed on the first extension electrode and a second electrode 342 is on the second semiconductor layer 323. In one embodiment, the first electrode 341 or the second electrode 342 may have a multilayer structure and/or include a metal reflective layer (not shown) and have a reflectance greater than 80%.

Next, as shown in FIG. 7B, a support member 44 may be formed over the substrate and cover the sidewall of the substrate. In an embodiment, the support member 44 can be transparent and the material can be silicone resin, epoxy or other materials. In one embodiment, a light guiding member (not shown) may be formed on the supporting member 44. In an embodiment, the material of the light guiding member may be glass. Next, a second thermal pad 48 is formed over the optoelectronic component and support component 44. In an embodiment, the material of the second heat dissipation pad 48 may be a material having a thermal conductivity of >50 W/mk, such as a metal; and the material of the second heat dissipation pad 48 may also be an insulating material such as a carbon-like diamond (diamond- Like carbon), diamond (diamond), etc.

In this embodiment, the second heat dissipation pad 48 includes two first portions 482 formed on the support member 44 and a second portion 481 formed on the photoelectric element and connected to the two ends of the second portion 482. The two first portions 481 form a dumbbell shape. In one embodiment, the first portion 482 has a width greater than a width of the second portion 481.

In an embodiment, the second heat dissipation pad 48 is formed between the first electrode 341 and the second electrode 342 and does not directly contact the first electrode 341 or the second electrode 342, and is not connected to the first electrode 341 or The second electrode 342 is electrically connected.

Next, an optical layer 46 can be formed on the optical element and cover the second heat dissipation pad 48, the first electrode 341 and the second electrode 342. The material of the optical layer 46 may comprise a mixture of a matrix and a high reflectivity material, wherein the substrate may be a silicone resin, an epoxy resin or other material, and the high reflectivity material may be TiO2.

Next, a plurality of openings 461 are formed on the optical layer 46. The plurality of openings correspond to the positions of the first electrode 341 and the second electrode 342, and a portion of the first electrode 341 and the second electrode 342 are exposed.

Next, as shown in FIG. 7D, a fifth electrode 40 and a sixth electrode 42 are electrically connected to the first electrode 341 and the second electrode 342, respectively, to complete the fabrication of the photovoltaic device 500 of the embodiment. In an embodiment, the fifth electrode 40 and the sixth electrode 42 are also selectively connected to the second heat dissipation pad 48 to facilitate subsequent heat dissipation. In an embodiment, the fifth electrode 40 or the sixth electrode 42 comprises a metal reflective layer. In an embodiment, the optical layer 46 is interposed between the first electrode 341 and the fifth electrode 40 and between the second electrode 342 and the sixth electrode 42. In an embodiment, the outer boundary of the optical layer 46 is larger than the outer boundary of the substrate.

In one embodiment, a carrier or a circuit component (not shown) may be provided, and a first carrier electrode (not shown) and a first carrier electrode (not shown) are formed on the carrier or circuit component by wire bonding or soldering. The second carrier electrode (not shown). The first carrier electrode and the second carrier electrode can form a flip-chip structure with the fifth electrode 40 and the sixth electrode 42 of the photovoltaic element 500. In one embodiment, the fifth electrode 40 and the sixth electrode 42 extend beyond the outer boundary of the substrate. In one embodiment, the projected area of the fifth electrode 40 and the sixth electrode 42 on the surface of the vertical substrate is greater than the area of the substrate. In this embodiment, by increasing the area of the fifth electrode 40 and the sixth electrode 42, the subsequent connection with the carrier or the circuit component can be made more convenient, and the problem of alignment can be reduced.

8A to 8C are schematic views showing a light emitting module, and FIG. 8A is a perspective view showing an external light emitting module. The light emitting module 600 may include a carrier 502, a photoelectric element (not shown), and a plurality of Lenses 504, 506, 508 and 510, and two power supply terminals 512 and 514. The lighting module 500 can be connected to the lighting unit 540 described later.

8B-8C is a cross-sectional view showing a light-emitting module 600, wherein FIG. 8C is an enlarged view of the E region of FIG. 8B. The carrier 502 can include an upper carrier 503 and a download body 501, wherein a surface of the download body 501 can be in contact with the upper carrier 503. Lenses 504 and 508 are formed over upper carrier 503. The upper carrier 503 can form at least one through hole 515, and the photovoltaic element 300 formed according to the embodiment of the present invention or a photoelectric element (not shown) of other embodiments can be formed in the through hole 515 and contact with the download body 501, and Surrounded by glue 521. There is a lens 508 on the rubber material 521, wherein the material of the rubber material 521 can be silicone resin, epoxy resin or other materials. In one embodiment, a reflective layer 519 may be formed on both sidewalls of the via 515 to increase light extraction efficiency; a metal layer 517 may be formed on the lower surface of the download body 501 to improve heat dissipation efficiency.

9A-9B is a schematic diagram 700 of a light source generating device 700. A light source generating device 700 can include a light emitting module 600, a light emitting unit 540, and a power supply system (not shown) for supplying a current to the light emitting module 600. And a control component (not shown) for controlling the power supply system (not shown). The light source generating device 700 can be a lighting device, such as a street light, a car light or an indoor lighting source, or a backlight source of a backlight module in a traffic sign or a flat display.

Figure 10 is a schematic view of a light bulb. The light bulb 800 includes a housing 921, a lens 922, a lighting module 924, a bracket 925, a heat sink 926, a series of junctions 927 and an electrical connector 928. The illumination module 924 includes a carrier 923 and includes at least one of the photovoltaic elements 300 of the above embodiment or other embodiments of the photovoltaic elements (not shown) on the carrier 923.

Specifically, the substrate 30 is a growth and/or load bearing foundation. The candidate material may comprise a conductive substrate or a non-conductive substrate, a light transmissive substrate or an opaque substrate. One of the conductive substrate materials may be germanium (Ge), gallium arsenide (GaAs), indium phosphate (InP), tantalum carbide (SiC), germanium (Si), lithium aluminate (LiAlO2), zinc oxide (ZnO). , gallium nitride (GaN), aluminum nitride (AlN), metal. One of the transparent substrate materials may be sapphire, lithium aluminate (LiAlO2), zinc oxide (ZnO), gallium nitride (GaN), glass, diamond, CVD diamond, and diamond-like carbon (Diamond-Like Carbon; DLC), spinel (MgAl2O4), alumina (Al2O3), yttrium oxide (SiOX) and lithium gallate (LiGaO2).

An epitaxial stack (not shown) includes a first semiconductor layer 321, an active layer 322, and a second semiconductor layer 323. The first semiconductor layer 321 and the second semiconductor layer 323 are, for example, a cladding layer or a confinement layer, a single layer or a multilayer structure. The first semiconductor layer 331 and the second semiconductor layer 323 are different in electrical conductivity, polarity or dopant, and the electrical selection may be a combination of at least two of p-type, n-type, and i-type, and may be separately provided. Electrons and holes are used to combine electrons and holes in the active layer 322 to emit light. The material of the first semiconductor layer 321, the active layer 322, and the second semiconductor layer 323 may comprise a III-V semiconductor material such as AlxInyGa(1-xy)N or AlxInyGa(1-xy)P, where 0≦x, y ≦1; (x+y)≦1. According to the material of the active layer 322, the epitaxial stack can emit red light with a wavelength between 610 nm and 650 nm, green light with a wavelength between 530 nm and 570 nm, and wavelengths between 450 nm and 490 nm. Blue light, or ultraviolet light with a wavelength of less than 400 nm.

In another embodiment of the present invention, the photovoltaic element 300, 300', 400, 500 may be an epitaxial element or a light-emitting diode, and the light-emitting spectrum thereof may be changed by changing physical or chemical elements of the semiconductor single layer or multiple layers. Make adjustments. The single or multiple layers of semiconductor material may be selected from the group consisting of aluminum (Al), gallium (Ga), indium (In), phosphorus (P), nitrogen (N), zinc (Zn), and oxygen (O). The structure of the active layer 322 is, for example, a single heterostructure (SH), a double heterostructure (DH), a double-side double heterostructure (DDH), or a multi-layer quantum well (multi- Quantum well; MQW) structure. Furthermore, adjusting the logarithm of the active layer 322 quantum well can also change the wavelength of the emission.

In an embodiment of the invention, the first semiconductor layer 321 and the substrate 30 may optionally include a buffer layer (not shown). This buffer layer is interposed between the two material systems to "transition" the material system of substrate 30 to the material system of first semiconductor layer 321 . For the structure of the light-emitting diode, on the one hand, the buffer layer is used to reduce the material layer of the lattice mismatch between the two materials. On the other hand, the buffer layer may also be a single layer, a plurality of layers or a structure for combining two materials or two bifurcation structures, such as organic materials, inorganic materials, metals, and semiconductors; The selected structure is: reflective layer, thermally conductive layer, conductive layer, ohmic contact layer, anti-deformation layer, stress release layer, stress adjustment layer, bonding layer, wavelength Conversion layer, mechanical fixing structure, etc. In an embodiment, the material of the buffer layer may be selected from aluminum nitride or gallium nitride, and the buffer layer may be formed by sputtering or atomic layer deposition (ALD).

A contact layer (not shown) is more selectively formed on the second semiconductor layer 323. The contact layer is disposed on a side of the second semiconductor layer 323 facing the active layer 322. In particular, the contact layer can be an optical layer, an electrical layer, or a combination of both. The optical layer can alter the electromagnetic radiation or light from or into the active layer. As used herein, "change" refers to altering at least one optical property of electromagnetic radiation or light, including but not limited to frequency, wavelength, intensity, flux, efficiency, color temperature, rendering index, light field. (light field), and angle of view. The electrical layer may cause at least one of the voltage, resistance, current, and capacitance of the opposite side of the contact layer to change or change in value, density, or distribution. The constituent material of the contact layer comprises an oxide, a conductive oxide, a transparent oxide, an oxide having a transmittance of 50% or more, a metal, a relatively light-transmissive metal, a metal having a transmittance of 50% or more, an organic substance, At least one of an inorganic substance, a phosphor, a phosphor, a ceramic, a semiconductor, a doped semiconductor, and an undoped semiconductor. In some applications, the material of the contact layer is at least one of indium tin oxide, cadmium tin oxide, antimony tin oxide, indium zinc oxide, zinc aluminum oxide, and zinc tin oxide. In the case of a relatively light-transmitting metal, the thickness thereof is preferably about 0.005 μm to 0.6 μm.

The above figures and descriptions are only corresponding to specific embodiments, however, the elements, embodiments, design criteria, and technical principles described or disclosed in the various embodiments are inconsistent, contradictory, or difficult to implement together. In addition, we may use any reference, exchange, collocation, coordination, or merger as required. Although the invention has been described above, it is not intended to limit the scope of the invention, the order of implementation, or the materials and process methods used. Various modifications and variations of the present invention are possible without departing from the spirit and scope of the invention.

100, 200, 300, 300', 400, 500‧‧‧ light-emitting elements

10‧‧‧Transparent substrate

12‧‧‧Semiconductor laminate

14, E1, E2‧‧‧ electrodes

30‧‧‧Substrate

U‧‧‧Photocell unit

U1‧‧‧First contact optoelectronic component unit

U2‧‧‧Second contact photocell unit

321‧‧‧First semiconductor layer

322‧‧‧Active layer

323‧‧‧Second semiconductor layer

S‧‧‧ Ditch

361‧‧‧First insulation

362‧‧‧Electrical wiring structure

363‧‧‧Second insulation

341‧‧‧First electrode

342‧‧‧second electrode

381‧‧‧ third electrode

382‧‧‧fourth electrode

383‧‧‧First cooling pad

P‧‧‧ Carrier or circuit components

40‧‧‧ fifth electrode

42‧‧‧ sixth electrode

44‧‧‧Support components

46‧‧‧Optical layer

461‧‧‧ openings

48‧‧‧Second cooling pad

482‧‧‧The second part of the second cooling pad

481‧‧‧Second thermal pad second part

600‧‧‧Lighting Module

501‧‧‧Download

502‧‧‧ Carrier

503‧‧‧carrier

504, 506, 508, 510‧‧ lens

512, 514‧‧‧ power supply terminal

515‧‧‧through hole

519‧‧‧reflective layer

521‧‧‧ glue

540‧‧‧ Shell

700‧‧‧Light source generating device

800‧‧‧ bulb

921‧‧‧ Shell

922‧‧‧ lens

924‧‧‧Lighting module

925‧‧‧ bracket

926‧‧‧ radiator

927‧‧‧ tandem

928‧‧‧Electrical connector

Figure 1 is a structural view showing a side view of a conventional photovoltaic element;

Figure 2 is a schematic view showing the structure of a conventional light-emitting device;

3A is a structural diagram showing a top view of a photovoltaic element unit according to an embodiment of the present invention;

3B-3C is a structural diagram showing a side view of a photovoltaic element unit according to an embodiment of the present invention;

4A-4E is a structural diagram showing a top view of a photovoltaic element unit according to other embodiments of the present invention;

5A is a structural diagram showing a top view of a photovoltaic element unit according to another embodiment of the present invention;

5B is a structural diagram showing a side view of a photovoltaic element unit according to an embodiment of the present invention;

5C-5D is a structural diagram showing a top view of a photovoltaic element unit according to an embodiment of the present invention;

5E-5F is a structural diagram showing a side view of a photovoltaic element unit according to an embodiment of the present invention;

6A is a structural diagram showing a top view of a photovoltaic element unit according to an embodiment of the present invention;

6B is a structural view showing a side view of a photovoltaic element unit according to an embodiment of the present invention;

6C is a structural diagram showing a top view of a photovoltaic element unit according to an embodiment of the invention;

6D is a structural view showing a side view of a photovoltaic element unit according to an embodiment of the present invention;

6E is a structural diagram showing a top view of a photovoltaic element unit according to an embodiment of the invention;

6F is a structural diagram showing a side view of a photovoltaic element unit according to an embodiment of the present invention;

7A-7D is a structural diagram showing a top view of a photovoltaic element unit according to another embodiment of the present invention;

8A-8C are schematic views showing a light emitting module;

9A-9B are diagrams showing a light source generating device; and

Figure 10 is a schematic view of a light bulb.

Claims (10)

A photovoltaic element has a light-emitting surface, comprising: a first photovoltaic element unit; a second photovoltaic element unit; a plurality of photovoltaic element units electrically connected to the first photovoltaic element unit and the second photovoltaic unit, and the first photoelectric The element unit, the second photovoltaic element unit and the plurality of photovoltaic element units are arranged in a top view of the photovoltaic element as a matrix comprising a plurality of rows and a plurality of columns; the plurality of first electrodes are respectively located in the first photovoltaic element a unit, the second photoelectric element unit and the plurality of photovoltaic element units; the plurality of second electrodes are respectively located on the first photovoltaic element unit, the second photoelectric element unit and the third electrode of the plurality of photovoltaic element units Formed on the first optoelectronic component unit and electrically connected to the first optoelectronic component unit; a fourth electrode is formed on the second optoelectronic component unit and electrically connected to the second optoelectronic component unit; The heat dissipation pads are respectively formed on the plurality of photovoltaic element units, wherein the plurality of heat dissipation pads, the plurality of first electrodes, and the plurality of second electrodes are A surface opposite to the one side; and a plurality of electrically conductive wires connected to the first structure of the photoelectric element unit, the second photoelectric element unit and the plurality of photoelectric element units. The photovoltaic device of claim 1, wherein the conductive wiring structures are completely separated from each other, the conductive wiring structures electrically connecting the first photovoltaic element unit, the second photovoltaic element unit, and the plurality of photovoltaic elements Two of the units, two of which are adjacent to each other. The photovoltaic element according to claim 1, wherein the plurality of heat dissipation pads have the same laminated structure as the plurality of first electrodes or the plurality of second electrodes. The photovoltaic element according to claim 1, wherein the first photovoltaic element unit, the second photovoltaic element unit and the plurality of photovoltaic element units each comprise: a first semiconductor layer; a second semiconductor layer; And an active layer is formed between the first semiconductor layer and the second semiconductor layer. The photovoltaic device of claim 4, wherein the second semiconductor layer has a first surface area, the plurality of heat dissipation pads each have a second surface area, and wherein the ratio of the second surface area to the first surface area Between 80~100%. The photovoltaic device of claim 1, wherein the plurality of thermal pads comprise a shortest distance greater than 100 μm. The photovoltaic device of claim 1, further comprising a carrier having a first carrier electrode and a second carrier electrode, wherein the first carrier electrode is bonded to the third electrode, and The second carrier electrode is bonded to the fourth electrode to form a flip chip structure. The photovoltaic element according to claim 1, wherein the first photovoltaic element unit, the second photovoltaic element unit and the plurality of photovoltaic element units comprise different shapes. The photovoltaic device according to claim 1, further comprising an insulating layer on the first photovoltaic element unit, the second photovoltaic element unit and the plurality of photovoltaic element units, wherein the insulating layer is a Bragg mirror (Distributed Bragg Reflector) structure. The photovoltaic element according to claim 1, wherein the first photovoltaic element unit and the second photovoltaic element unit are located at opposite ends of one of the diagonals of the matrix.