TWI617068B - Sheet-shaped device, manufacturing method and manufacturing apparatus for sheet-shaped secondary cell - Google Patents

Abstract

The method for manufacturing a sheet-shaped secondary battery according to the present invention includes the following steps: (A) forming a first element pattern on a surface of one side of the sheet-shaped secondary battery; (B) making the first element pattern correspond to the first element pattern, and Form a through hole in the sheet-shaped secondary battery; (C) Send out the sheet-shaped secondary battery through a pair of conveying shaft disks, and repeat steps (A) and (B) to form a plurality of sheet-shaped secondary batteries A first element pattern and a through hole corresponding to the first element pattern; (D) calibration based on the through hole to form a second element pattern on the surface of the other side of the sheet-shaped secondary battery; (E) sending out the sheet The secondary battery performs step (D) repeatedly to form a plurality of second element patterns on the sheet-shaped secondary battery; and (F) cuts off the sheet-shaped secondary battery.

Description

Sheet-like element, manufacturing method of sheet-like secondary battery, and manufacturing apparatus

The present invention relates to a technique for forming an element pattern at a correct position on both sides of a sheet-shaped secondary battery or a sheet-shaped element.

Patent Document 1 discloses a printer that prints a substrate web wound on a roll support. The printer of Patent Document 1 includes a sensor that detects a synchronization mark provided on a substrate web. Then, the printer performs printing by adjusting the position of the conveying direction in accordance with the synchronization mark.

Patent Document 2 discloses a method for manufacturing a tab lead member that thermally welds an insulating sheet at a correct position of a lead base material. Patent Document 2 includes a step of positioning an insulating sheet by pre-adhering the insulating sheet at a predetermined position on both sides of the lead base material before the heating and pressing step of the heat-welded insulating sheet.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Application Laid-Open No. 10-264475

[Patent Document 2] Japanese Patent Application Publication No. 2014-143051

However, in Patent Documents 1 and 2, when element patterns are formed on both sides of a rolled sheet, there is a problem that it is difficult to accurately align the element patterns on both sides. In particular, in a roll-to-roll manufacturing process using a roll-shaped sheet, the base material is prone to wrinkle or bending deformation, and therefore it is difficult to accurately align it.

In view of the above-mentioned problems, an object of the present invention is to provide a technique for forming an element pattern at a correct position on both sides of a sheet-shaped secondary battery or a sheet-shaped element.

Regarding the manufacturing method of the same sheet secondary battery of this embodiment, the method includes the following steps: (A) forming a first element pattern on one surface of the sheet secondary battery, and the sheet secondary battery is rolled It is provided on a pair of conveying reels having a winding reel and a sending reel; (B) forming a through hole in the sheet-shaped secondary battery corresponding to the first element pattern; (C) by The pair of conveying shaft disks sends out the sheet-shaped secondary battery, and the steps (A) and (B) are repeatedly performed, and a plurality of the first element patterns are formed on the sheet-shaped secondary battery and corresponding to the first A through-hole of an element pattern; (D) calibration based on the through-hole, forming a second element pattern on the surface of the other side of the sheet-shaped secondary battery; (E) by the pair of conveying shaft disks Sending out the sheet-shaped secondary battery, and repeatedly performing the step (D), forming a plurality of the second element patterns on the sheet-shaped secondary battery; and (F) applying the first element pattern and the second element pattern Correspondingly, the sheet-shaped secondary battery is cut. Thereby, an element pattern can be formed in a correct position on both sides of a sheet-shaped secondary battery.

In the aforementioned manufacturing method, in the step (A), the first upper electrode formed on the surface of one side of the sheet-shaped secondary battery may be irradiated with laser light from the laser light source corresponding to the The first element is patterned and patterned, and in the step (B), a laser from the laser light source is irradiated. The through hole is formed in the sheet-shaped secondary battery. In this structure, the first element pattern and the through-hole are formed using a common laser light source, so that a sheet-shaped secondary battery can be manufactured with high productivity.

In the aforementioned manufacturing method, in the step (A), the through-hole may be formed by performing the step (B) in the middle of forming the first element pattern. Thereby, a sheet-shaped secondary battery can be manufactured with high productivity.

In the aforementioned manufacturing method, in the step (D), the second upper electrode formed on the surface on the other side of the sheet-shaped secondary battery may be irradiated with laser light from the laser light source so as to correspond to the The second element is patterned. Since the second element pattern, the first element pattern, and the through-hole are formed using a common laser light source, a sheet-shaped secondary battery can be manufactured with high productivity.

In the aforementioned manufacturing method, in the step (F), a cutting line may be formed by irradiating laser light from a laser light source to form a cutting line at a position between two adjacent first element patterns in a plan view along the The cutting line cuts the sheet-shaped secondary battery.

In the aforementioned manufacturing method, the sheet light secondary battery may be irradiated with the laser light while the sheet secondary battery is adsorbed on the work table. Thereby, since a position error in laser irradiation can be prevented, an element pattern can be formed with higher position accuracy.

In the aforementioned manufacturing method, in the step (D), the sheet-shaped secondary battery may be photographed from the other surface side by the photographing means, and based on the image photographed by the photographing means, The calibration. This allows easy calibration.

In the aforementioned manufacturing method, in the step (B), two through-holes respectively corresponding to the first element pattern may be formed in the winding direction of the sheet-shaped secondary battery, and in the step (D) In the step, based on the first image captured by the through hole on one side, and the first image captured by the through hole on the other side The second image is subjected to this calibration. Thereby, element patterns can be formed on both sides of the substrate with higher position accuracy.

In the aforementioned manufacturing method, the sheet-shaped secondary battery may further include a substrate serving as a lower electrode, and a first charging layer and a first upper electrode are formed on a surface side of the substrate, and the substrate A second charging layer and a second upper electrode are formed on the other side of the surface. A first n-type metal oxide semiconductor layer is formed between the first charging layer and the substrate. Between the substrates, a second n-type metal oxide semiconductor layer is formed, and the first charging layer and the second charging layer each have a substance containing an n-type metal oxide semiconductor and an insulator.

The manufacturing device of a sheet-shaped secondary battery related to this embodiment includes a pair of conveying shaft disks with a winding shaft disk and a sending shaft disk; a laser light source, which is irradiated with the laser light and tensioned on the pair. A sheet-shaped secondary battery that conveys a shaft disk, and a first element pattern is formed on a surface on one side of the sheet-shaped secondary battery; a photographing means for extracting laser light from the laser light source from the sheet-shaped secondary battery The surface side of the one side is irradiated, and the through-hole formed in the sheet-shaped secondary battery is photographed; a driving mechanism is calibrated on the other side of the sheet-shaped secondary battery based on the image captured by the photographing means; The irradiation position of this laser light source in the side surface. Thereby, an element pattern can be formed on both sides of a sheet-shaped secondary battery at a correct position.

In the aforementioned manufacturing apparatus, (G) the laser light source irradiates the laser light from a surface side of one side of the sheet-shaped secondary battery with the laser light source, and the first surface is formed on a surface of one side of the sheet-shaped secondary battery Element pattern; (H) radiating the laser light from the surface side of the one side of the sheet secondary battery with the laser light source, and corresponding to the first element pattern, forming a through hole in the sheet secondary battery ; (I) sending out the sheet-shaped secondary battery through the pair of conveying shaft disks, repeatedly performing the steps (G) and (H), and forming a plurality of the first on the sheet-shaped secondary battery; An element pattern and a through hole corresponding to the first element pattern; (J) in a state in which the driving mechanism is calibrated, the laser light source is used to remove the The other side of the surface is irradiated with laser light to form a second element pattern on the other surface of the sheet-shaped secondary battery; (K) The sheet-shaped second sheet is sent out by the pair of conveying shaft disks. The secondary battery performs the step (J) repeatedly to form a plurality of the second element patterns on the sheet-shaped secondary battery. Thereby, a pattern can be formed on both sides of a sheet-shaped secondary battery with high positional accuracy.

The aforementioned manufacturing apparatus may further include a workpiece stage that adsorbs the sheet-shaped secondary battery, and in a state where the workpiece stage adsorbs the sheet-shaped secondary battery, the laser light source irradiates the sheet-shaped secondary battery. laser. Thereby, laser light can be reliably irradiated in the positioned state.

The sheet element related to this embodiment includes: a sheet of material; a first element pattern formed on a surface of one side of the sheet; a second element pattern formed on a surface of the other side of the sheet, And corresponds to the first element pattern; a through hole penetrating the sheet and disposed near the first element pattern in a surface on one side of the sheet, and disposed in a surface on the other side of the sheet Near the second element pattern. Thereby, an element pattern can be formed in a correct position on both sides of a sheet-shaped secondary battery.

The method for manufacturing a sheet-like element related to this embodiment includes the following steps: (A) forming a first element pattern on a surface of one side of the sheet-like element, the sheet-like element being rolled on a roll having a winding shaft and A pair of conveying shaft disks sending out the shaft disks; (B) forming a through-hole in the sheet-shaped component corresponding to the first element pattern. (C) The sheet-shaped element is sent out through the pair of conveying shaft disks, and the steps (A) and (B) are repeatedly performed, and a plurality of the first element patterns and corresponding ones are formed on the sheet-shaped secondary battery. A through-hole in the first element pattern; (D) performing a calibration based on the through-hole, and forming a second element pattern on the surface of the other side of the sheet-like element; Sending out the sheet element, and repeatedly performing the step (D), forming a plurality of the second element patterns on the sheet element; and (F) corresponding to the first element pattern and the second element pattern, and cutting Break the sheet-like element. Thereby, an element pattern can be formed at a correct position on both sides of the sheet-like element.

According to the present invention, it is possible to provide a technique for forming an element pattern at a correct position on both sides of a sheet-shaped secondary battery or a sheet-shaped element.

100‧‧‧ manufacturing equipment

101‧‧‧ Rack

102‧‧‧Head

103‧‧‧laser light source

104‧‧‧ Camera

105‧‧‧Workbench

106‧‧‧Drive mechanism

107‧‧‧Worktable drive mechanism

108‧‧‧Control Department

111‧‧‧ send out the unit

112‧‧‧Rewinding unit

113‧‧‧ Send out the spool

114‧‧‧ Reel Reel

70‧‧‧ sheet

70a‧‧‧Send the volume

70b‧‧‧Rewind

71‧‧‧ substrate

72‧‧‧First charging layer

73‧‧‧First upper electrode

73a‧‧‧electrode pattern

74‧‧‧Second charging layer

75‧‧‧second upper electrode

76‧‧‧first n-type semiconductor layer

77‧‧‧first p-type semiconductor layer

78‧‧‧Second n-type semiconductor layer

79‧‧‧Second p-type semiconductor layer

80‧‧‧The first element pattern

81‧‧‧laser radiation

82‧‧‧calibration mark

84‧‧‧through hole

85‧‧‧second element pattern

86‧‧‧Laser radiation

88‧‧‧cut line

90‧‧‧ sheet secondary battery

FIG. 1 is a perspective view schematically showing a configuration of the manufacturing apparatus 100.

Fig. 2 is a side view schematically showing the configuration of the manufacturing apparatus in a state where the work table is in a lowered position.

FIG. 3 is a side view schematically showing the configuration of the manufacturing apparatus in a state where the work table is in a raised position.

FIG. 4 is a diagram showing the structure of a sheet before laser processing.

Fig. 5 is a flowchart showing the processing of the surface of the sheet.

FIG. 6 is a diagram showing the structure of a sheet having a pattern and an alignment mark formed thereon.

FIG. 7 is a side view schematically showing the configuration of the manufacturing apparatus in a state where the work table is in the lowered position during the back surface processing.

FIG. 8 is a flowchart showing a process for the back surface of the sheet.

FIG. 9 is a side view schematically showing the configuration of the manufacturing apparatus in a state where the work table is in the raised position during the back surface processing.

FIG. 10 is a diagram schematically showing an image P taken by a camera.

FIG. 11 is a diagram showing a structure of a sheet in a state where a second element pattern is formed.

Fig. 12 is a view showing the structure of a sheet in a state where the next second element is formed.

FIG. 13 is a diagram showing the formation position of the cutting line.

Fig. 14 is a view showing a structure of a sheet-shaped secondary battery cut along a cutting line.

FIG. 15 is a flowchart showing a simplified method of manufacturing the sheet-shaped secondary battery according to the present embodiment.

Fig. 16 is a sectional view showing the structure of an example of a sheet-shaped secondary battery.

Hereinafter, an example of an embodiment of the present invention will be described with reference to the drawings. Although the following description shows suitable embodiments of the present invention, the technical scope of the present invention is not limited to the following embodiments.

Example 1.

Hereinafter, a manufacturing apparatus for a sheet-shaped secondary battery for manufacturing a sheet-shaped element according to this embodiment will be described. The structure of the sheet-type secondary battery manufacturing apparatus according to the first embodiment will be described using FIG. 1. FIG. 1 is a perspective view schematically showing the structure of the manufacturing apparatus 100. The manufacturing apparatus 100 is a laser cutter that performs laser processing on a sheet 70 tensioned on a pair of axle disks. In addition, for the sake of clarity, the XYZ three-dimensional rectangular coordinate system is shown in FIG. 1. In addition, the X direction is the conveyance direction of the sheet material 70 tensioned on the pair of shaft disks, and the Y direction is the width direction of the sheet material 70.

The manufacturing apparatus 100 includes a frame 101, a head portion 102, a work table 105, a drive mechanism 106, a work table drive mechanism 107, and a control unit 108. The frame 101 is a frame formed of metal or the like, and is installed in a manufacturing factory or the like. Various components such as a head 102, a work table 105, a drive mechanism 106, and a work table drive mechanism 107 are mounted inside the frame 101.

The head 102 includes optical units such as a laser light source 103 and a camera 104. That is, a laser light source 103 and a camera 104 are mounted in the head 102. Of course, not only the laser light source 103 and the camera 104 can be installed in the head 102, but also a lens for collecting laser light can be installed. The head part 102 is arrange | positioned in the + Z direction based on the sheet 70 (in other words, it is the upper side of the sheet 70).

The head 102 is mounted on the frame 101 through the driving mechanism 106. The driving mechanism 106 moves the head 102 in the X direction and the Y direction. Specifically, the driving mechanism 106 includes a mechanism capable of driving the head 102 to move between Motors in the X and Y directions, linear slide mechanisms, etc. The driving mechanism 106 drives the head 102 to change the position of the head 102 with respect to the sheet 70 in the X direction and the position in the Y direction.

The laser light source 103 is a processing laser device for forming a cutting line or the like on the sheet 70. That is, the laser light source 103 outputs laser light, so that the sheet 70 can be processed. The laser light source 103 can be used for forming alignment marks and for forming element patterns. By driving the head portion 102 with the driving mechanism 106, the laser light source 103 can irradiate laser light at a desired position on the sheet 70. The processing of the sheet 70 by the laser light source 103 will be described later.

The camera 104 is an example of a photographing means for photographing the sheet 70. For example, a CCD (Charged Coupled Device) sensor or a CMOS (Complementary Metal Oxide Semiconductor) sensor can be used as the photographing means. Then, based on the position of the calibration mark captured by the camera 104, the head unit 102 is driven by controlling the drive mechanism 106 with the control unit 108. By doing so, laser processing can be performed on the sheet 70 with high positional accuracy.

The work stage is provided in the -Z direction with respect to the sheet 70 (in other words, the lower side of the sheet 70). The head 102 is arranged in the + Z direction of the table 105. That is, the table 105 and the head portion 102 are arranged to face each other with the sheet 70 interposed therebetween. The work stage 105 is, for example, a suction work stage for the suction sheet 70. For example, the work stage 105 has a suction plate in which an air hole is formed on the upper surface. By discharging air from the air holes, the sheet 70 is attracted to the work table 105. As for the structure for adsorption, a publicly known method can be used, so description is omitted. In a state where the sheet 70 is adsorbed on the work table 105, laser processing is performed on the sheet 70. Thereby, laser light can be irradiated in the state in which the sheet | seat 70 is reliably positioned with respect to a work table.

The work stage 105 is mounted on the machine frame 101 via a work stage drive mechanism 107. The work table driving mechanism 107 raises and lowers the work table 105. The workpiece table driving mechanism 107 raises the workpiece table 105 State, laser processing is applied to the sheet 70. Further, in a state where the work table driving mechanism 107 lowers the work table 105, the sheet 70 is conveyed in the X direction.

The control unit 108 is an arithmetic processing device such as a personal computer, and includes a processor, a memory, a monitor, an input device, and the like. Then, the control unit 108 controls the head 102, the laser light source 103, the camera 104, the work table 105, the driving mechanism 106, and the work table driving mechanism 107. For example, the control unit 108 controls the laser light irradiation position and laser irradiation intensity. In addition, the control unit 108 controls the rotation speed of a sending-out shaft disk 113 having a sending-out unit 111 described later. The control unit 108 is not limited to a single device, and may be composed of a plurality of devices.

A predetermined laser processing is performed in a state where the sheet 70 is adsorbed by the work table 105. Then, when the laser processing is completed, the suction by the work table is released, and the sheet 70 is transported in the X direction. After the new range of the sheet 70 is sent to the work table 105, the work table 105 adsorbs the new range of the sheet 70. By performing these processes repeatedly, laser processing can be applied to the entire sheet 70.

Here, using FIG. 2 and FIG. 3, the operation | movement according to the raising / lowering of the workpiece | work table 105 is demonstrated. FIG. 2 shows a side view of the workpiece table 105 in a lowered state, and FIG. 3 shows a side view of the workpiece table 105 in a raised state. The position of the table 105 shown in FIG. 2 is the lowered position, and the position of the table 105 shown in FIG. 3 is the raised position.

As shown in FIG. 2 and FIG. 3, the sending-out unit 111 is arranged in the -X direction of the work table 105, and the retracting unit 112 is arranged in the + X direction. The work stage 105 is arranged between the sending-out unit and the retracting unit 112 in the X direction. The sending unit is provided with a rotatable sending shaft 113. Similarly, the winding unit 112 is provided with a rotatable winding shaft 114, and the delivery shaft 113 and the winding shaft 114 are rotated by a motor (not shown). The sheet wound on the take-up reel 113 is a take-off roll 70a, and the sheet wound on the take-up reel 114 is a take-up roll 70b.

The sending-out reel 113 and the winding-up reel 114 serve as a pair of conveying reels that feed the rolled-up sheet in a sheet shape onto the table 105. That is, the feed shaft 113 and the take-up shaft 114 are synchronously rotated, so that the sheet 70 is conveyed in the + X direction. As a result, the sheet rolled into the unwinding roll 70a passes above the work table 105 and moves toward the winding-up roll 70b. In this way, the sheet rolled into the delivery roll 70a is tensioned on the work table 105, and at the same time is conveyed in the + X direction, and is wound on the take-up reel 114. Hereinafter, the sheet-like sheet is simply referred to as a sheet 70.

In FIG. 2, the work table 105 is in the lowered position, and the work table 105 is not in contact with the sheet 70. In this state, the delivery reel 113 and the take-up reel 114 convey the sheet 70 in the + X direction.

From the state shown in FIG. 2, when the work table driving mechanism 107 raises the work table 105, the work table 105 moves to the raised position shown in FIG. 3. In the raised position, the upper surface of the work table 105 is in contact with the lower surface of the sheet 70. Therefore, the work table 105 can suck and hold the sheet 70. That is, in a state where the upper surface of the work table 105 is in contact with the lower surface of the sheet 70 and air is exhausted from the air hole, the work table 105 adsorbs and holds the sheet 70.

Then, in a state where the sheet 70 is sucked and held by the work table 105, the laser light source 103 radiates laser light toward the sheet 70. Thereby, the sheet 70 is subjected to laser processing. Since the sheet 70 is attracted, the positional deviation of the sheet 70 with respect to the work table 105 during laser processing can be prevented, and thereby the sheet 70 can be laser-processed with high positional accuracy.

In the raised position shown in FIG. 3, when the predetermined flow is completed, the suction of the sheet 70 by the work table 105 is released. Then, the workpiece table 105 is lowered by the workpiece table driving mechanism 107, and the workpiece table 105 is returned to the lowered position shown in FIG. 2. In the lowered position, the sheet 70 is conveyed in the X direction by the rotation of the feed-out reel 113 and the take-up reel 114. By conveying a predetermined amount of the sheet 70, a new range of the sheet 70 is conveyed above the work table 105. When the new range of the sheet is moved above the workpiece table 105, the The table driving mechanism 107 positions the work table 105 in a raised position. After the work table driving mechanism 107 raises the work table 105, the work table 105 sucks and holds the sheet 70. In a state where the sheet 70 is sucked and held, the laser light source 103 performs laser processing on the sheet 70. By repeating these processes (lifting of the work table 105, adsorption of the sheet 70, laser processing of the sheet 70, lowering of the work table, and movement of the sheet), the entire sheet 70 can be subjected to laser processing.

Here, a charging layer and the like are formed on both sides of the sheet 70. Therefore, the aforementioned laser processing is applied to both sides of the sheet 70. That is, an element pattern is formed on the front surface and the back surface of the sheet 70 by laser processing. Furthermore, the sheet 70 is cut along a cutting line. Thereby, a sheet-shaped secondary battery in which two adjacent element patterns are divided in the X direction and element patterns are formed on both sides can be manufactured.

Here, the structure of the sheet | seat 70 which formed the charging layer on both sides of the base material 71 using FIG. 4 is demonstrated. FIG. 4 shows a plan view, a bottom view, a cross-sectional view taken along the line A-A, and a cross-sectional view taken along the line B-B of the sheet 70. A-A sectional view is a sectional view cut along the XZ plane, and B-B sectional view is a sectional view cut along the YZ plane. FIG. 4 shows the structure of the sheet 70 before the laser processing is applied.

The cross-sectional structure of the sheet 70 will be described with reference to A-A and B-B cross-sectional views. The sheet 70 includes a substrate 71, a first charging layer 72, a first upper electric stage 73, a second charging layer 74, and a second upper electrode 75. The substrate 71 is formed of a conductive sheet, for example, a metal foil such as SUS or aluminum having a thickness of 10 μm. By forming the base material 71 with a conductive material, it can be used as a lower electrode of a sheet-shaped secondary battery. The substrate 71 is formed of an opaque material that is impermeable to visible light. For example, the width of the base material 71 in the Y direction is 350 mm.

A first charging layer 72 is formed on the upper surface of the substrate 71 and a second charging layer 74 is formed on the lower surface. The first charging layer 72 and the second charging layer 74 are formed on the substrate 71 on almost the entire surface.

A first upper electrode 73 is formed on the upper surface of the first charging layer 72. A second upper electrode 75 is formed on the lower surface of the second charging layer 74. The first upper electrode 73 is formed so as to cover the first charging layer 72. The second upper electrode 75 is formed so as to cover the second charging layer 74.

The surface on the side of the first upper electrode 73 on which the sheet 70 is formed is used as the surface, and the surface on the side on which the second upper electrode 75 is formed is used as the back surface. In FIG. 4, the surface of the sheet 70 is the upper surface and the back surface is the lower surface.

In the Z direction, a first charging layer 72 is disposed between the first upper electrode 73 and the substrate 71 which is a lower electrode. In the Z direction, a second charging layer 74 is disposed between the second upper electrode 75 and the substrate 71 which is a lower electrode. Thereby, a structure in which the charging layer is arranged between the upper electrode and the lower electrode on both sides of the substrate 71 is obtained. One of the upper electrode and the lower electrode is a positive electrode of a sheet-shaped secondary battery, and the other is a negative electrode.

The first charging layer 72 and the second charging layer 74 can be formed by, for example, a coating thermal decomposition method. Specifically, a coating liquid prepared by mixing fatty acid titanium and silicone oil in a solvent is applied, dried, and fired. Thereby, a fine particle layer of titanium dioxide coated on the insulating film is formed. The first upper electrode 73 and the second upper electrode 75 are formed by a vapor deposition method such as sputtering, ion plating, electron beam evaporation, vacuum evaporation, or chemical vapor deposition. In addition, each layer can be formed on the substrate 71 by a method described in, for example, International Publication WO2015 / 087388.

In this embodiment, element patterns are formed on both sides of the sheet 70 by laser processing described later. Furthermore, in laser processing, alignment marks are formed for the sheet 70. By using the alignment marks, the positions of the element patterns on both sides of the sheet 70 can be aligned. Here, in this embodiment, a through hole is formed in the sheet 70 as an alignment mark. Hereinafter, laser processing including formation of a calibration mark will be described in detail.

First, the treatment of the surface of the surface on the sheet 70 side will be described using FIG. 5. FIG. 5 is a flowchart showing processing on the surface of the sheet 70. Each flow in FIG. 5 is mainly implemented by the control of the control unit 108. Here, the sending-out reel 113 and the winding-up reel 114 are provided in the sending-out unit 111 and the winding-up unit 112 so that the surface of the sheet 70 may become the upper side.

First, the work table drive mechanism 107 is controlled by the control unit 108, and the work table drive mechanism 107 raises the work table 105 from the lowered position shown in FIG. 2 (S11). Thereby, the workpiece | work table 105 becomes a raising position shown in FIG. Then, the work table 105 sucks the sheet 70 (S12). In addition, in step S12, the sheet 70 is sucked and held by the work table 105 so that the surface of the sheet 70 becomes the upper side.

The head portion 102, the driving mechanism 106, and the like are controlled by the control unit 108, and the laser light source 103 forms an element pattern (S13) and a calibration mark (S14) on the sheet 70 in a state where the sheet 70 is attracted. The element pattern and the alignment mark are formed by laser irradiation of the laser light source 103. Here, the laser irradiation is controlled by the control unit 108. That is, the control unit 108 controls the irradiation position of the laser light, the laser irradiation intensity, and the laser irradiation time. Here, the formation of the element pattern and the formation of the alignment mark will be described using FIG. 6. 6 is a plan view, a bottom view, a cross-sectional view taken along the line A-A, and a cross-sectional view taken along the line B-B of the sheet 70 in the same manner as in FIG. 4.

By irradiating the first upper electrode 73 with laser light, the first element pattern 80 is formed as shown in the top view of FIG. 6. The first element pattern 80 is formed in a rectangular shape, and an end edge thereof is parallel to the X direction or the Y direction. Therefore, in step S13, laser light is irradiated along the rectangular laser irradiation line 81. That is, the head unit 102 is driven in the X direction and the Y direction by the driving mechanism 106, and the laser light is irradiated along the laser irradiation line 81.

Specifically, the first upper electrode 73 is patterned along the laser irradiation line 81. That is, as shown in the B-B sectional view of FIG. 6, since only the edge of the first upper electrode 73 is removed by the laser irradiation line 81 Therefore, the first charging layer 72 is thus exposed. In this manner, the first upper electrode 73 is laser-processed along the laser irradiation line 81 to form an electrode pattern 73 a of the first upper electrode 73. By forming the electrode pattern 73 a by the first upper electrode 73, a first element pattern 80 is formed on the sheet 70. In other words, the electrode pattern 73 a corresponds to the first element pattern 80 in a plan view. For example, when a sheet 70 having a width of 350 mm in the Y direction is used, the first element pattern 80 is formed in a square shape of 280 mm × 280 mm.

Furthermore, alignment marks 82 are formed on both sides of the first element pattern 80. The calibration mark 82 is formed so as to overlap the laser irradiation line 81. As shown in the cross-sectional view of FIG. 6A-A, the alignment mark 82 is formed by the through-hole 84 formed by the sheet 70. That is, through the laser irradiation, a through-hole 84 penetrating through the substrate 71, the first charging layer 72, the first upper electrode 73, the second charging layer 74, and the second upper electrode 75 is formed.

Since the calibration mark 82 is formed by the through hole 84, the calibration mark 82 can be visually confirmed even from the back surface. When the element pattern in the back surface is formed, calibration is performed based on the calibration mark 82. When the through-hole 84 is formed, the intensity of the laser light may be higher than when the first element pattern 80 is formed. Alternatively, the through hole 84 may be formed by increasing the irradiation time of the laser light.

In FIG. 6, for one first element pattern 80, two calibration marks 82 are formed at positions corresponding to the first element pattern. Specifically, in the X direction, the calibration marks 82 are respectively disposed on two sides on the peripheral edge of the first element pattern 80. That is, one of the calibration marks 82 is arranged at the + X side end portion of the first element pattern 80, and the other calibration mark 82 is arranged at the −X side end portion of the first element pattern 80.

The roll transfer positions of the individual calibration marks 82 are stored in, for example, a memory included in the control unit 108. Furthermore, the calibration mark 82 is formed in the center of the first element pattern 80 in the Y direction.

The order in which the alignment marks 82 and the first element patterns 80 are formed is not particularly limited. For example, the alignment mark 82 may be formed in the middle of forming the first element pattern 80. With this, since When the alignment mark 82 is formed after the first element pattern 80 is formed, the alignment mark 82 can be formed more quickly, and thus a sheet-shaped secondary battery can be manufactured with high productivity.

In addition, the first element pattern 80 may be formed after the alignment mark 82 is formed. Alternatively, the alignment mark 82 may be formed after the first element pattern 80 is formed. Thereby, the position of the calibration mark 82 with respect to the 1st element pattern 80 can be made correct. The calibration mark 82 is formed at a position corresponding to the first element pattern (for example, near the first element pattern).

The position of the alignment mark 82 relative to the first element pattern 80 can be calculated in accordance with the moving distance of the head portion 102 during laser processing, and the like. The position of the calibration mark 82 in the sheet 70 can be calculated from the rotation amount of the delivery spool 113 and the take-up spool 114 and the position of the head 102.

Returning to the description of FIG. 4. When the formation of the first element pattern 80 (S13) and the formation of the calibration mark 82 (S14) are completed, the control unit 108 controls the work stage 105 to release the work stage 105 from the sheet 70. Then, the control unit 108 lowers the work table 105 by controlling the work table drive mechanism 107 (S16). Thereby, it becomes the lowering position shown in FIG. Next, the control unit 108 controls the sending-out reel 113 and the winding-up reel 114 to cause the sending-out reel 113 and the winding-up reel 114 to perform roll conveyance (S17). That is, the feed-out reel 113 and the take-up reel are rotated so that the first element pattern 80 can be formed in a new range of the sheet 70. Thereby, a new range of the sheet 70 is sent out above the work table.

Then, the control unit 108 determines whether or not to perform repetition in accordance with the roll conveyance position (S18). When it is determined that the process is repeated (S18: YES), the processes of steps S11 to S17 are executed again. That is, until the end of the unwinding roll 70a, the process of steps S11 to S17 is performed on a new area of the sheet 70 that has been conveyed without forming the first element pattern 80. Thereby, a plurality of first element patterns 80 are sequentially formed along the X direction of the sheet 70. On the other hand, it is determined that the process is not repeated (S18: NO), and the process ends. For the surface treatment of the sheet 70. That is, when the first element pattern 80 is formed up to the end of the delivery roll 70a, the processing of the surface of the sheet 70 is finished.

After the process of the surface of the sheet 70 is completed, the process of the back surface is performed. Therefore, the front and back surfaces of the sheet are reversed. Specifically, as shown in FIG. 7, the delivery roll 70 a and the take-up roll 70 b are turned upside down so that the back surface of the sheet 70 becomes the upper side. It is installed in the winding unit 112.

FIG. 8 is a flowchart showing processing on the back surface of the sheet 70. First, the work table drive mechanism 107 is controlled by the control unit 108, and the work table drive mechanism 107 is caused to raise the work table 105 (S21). Thereby, the work table 105 is moved from the lowered position shown in FIG. 7 to the raised position shown in FIG. 9. Thereby, the upper surface of the work table 105 is in contact with the surface of the sheet 70. The control unit 108 controls the work stage 105 to cause the work stage 105 to adsorb the sheet 70 (S22). In step S22, the sheet 70 is sucked and held by the work table 105 so that the back surface of the sheet 70 becomes the upper side.

Next, based on the image captured by the camera 104, the control unit 108 performs image processing (S23). That is, based on the calibration mark 82 captured by the camera 104, the control unit 108 performs image processing and detects the position of the captured calibration mark 82. In the following description, the image processing is described as the processor of the control unit 108, but it may be performed by the processor inside the camera 104. FIG. 10 shows an image P captured by the camera 104. FIG. 10 shows an image P containing a calibration mark 82 and its surroundings.

Then, based on the position of the calibration mark 82 detected by the control unit 108, the offset amount (dX, dY) of the calibration mark 82 is obtained. In FIG. 10, the center O of the image P is used as the reference coordinate, and the distance from the reference coordinate in the X direction and the Y direction is used as the offset (dX, dY). Specifically, the position of the head 102 where the calibration mark is formed is used as the reference position, and the state where the head 102 is used as the reference position Next, the camera 104 captures the calibration mark 82. The control unit 108 can obtain an offset amount by performing image processing on the image P. By image processing such as pattern comparison, the control unit 108 can detect the position of the calibration mark 82 in the image P. In addition, the amount of pixels in the image P may be used as the offset, or the actual distance (mm) on the sheet 70 may be used as the offset. The size of the calibration mark 82 can be approximately 1 mm in the X direction and 1 mm in the direction.

Next, the head part 102, the drive mechanism 106, etc. are controlled by the control part 108, and a laser light source forms a pattern on the back surface of a sheet | seat (S24). Here, the laser irradiation is controlled by the control unit 108. That is, the control unit 108 controls the laser light irradiation position and laser irradiation intensity. Here, only the shift amount obtained in step S23 is used to correct the XY movement amount to perform pattern formation. That is, in a state where the calibration is performed based on the calibration mark 82, the patterning of the sheet 70 by laser irradiation is performed.

Specifically, the driving mechanism 106 moves the head 102 by the offset amount only to the corrected position. Then, using the corrected position as the laser start position, the laser light source 103 irradiates the sheet 70 with laser light. The driving mechanism 106 drives the head 102 along the four sides of the rectangle to form a second element pattern 85. By performing calibration based on the calibration mark 82, a second element pattern is formed at a position that coincides with the position of the first element pattern 80 in the XY plane.

FIG. 11 shows the structure of the sheet 70 on which the second element pattern 85 is formed. As shown in FIG. 11, the second element pattern 85 is a rectangle having the same size as the first element pattern 80. The second upper electrode 75 is patterned by irradiating the laser light along the rectangular laser irradiation line 86. As shown in the B-B cross-sectional view of FIG. 11, in the laser irradiation line 86, since only the second upper electrode is removed, the second charging layer 74 is exposed. In this way, the second upper electrode 75 is processed along the laser irradiation line 86 to form an electrode pattern 75 a of the second upper electrode 75. By forming the electrode pattern 75 a by the second upper electrode 75, a second element is formed on the sheet 70. Piece pattern 85. In addition, in FIG. 11, a second element pattern 85 corresponding to the left first element pattern 80 is formed among the two first element patterns 80.

The position of the laser irradiation line 86 is calibrated based on the calibration mark 82. That is, the formation position of the second element pattern 85 is calibrated based on the calibration mark 82. In this way, the first element pattern on the front side and the XY position of the alignment mark 82 on the back side can be accurately matched. In this embodiment, the alignment mark 82 is formed by the through hole 84. Therefore, by photographing the calibration mark 82 from the back side, when the second element pattern 85 is formed, the relative position with respect to the first element pattern 80 can be detected. Since laser processing can be applied to both sides of the sheet 70 with high positional accuracy, the positions of the element patterns on both sides can be aligned.

Further, a laser light source 103 for laser processing the first element pattern 80 and the second element pattern 85 is used for forming the calibration mark 82. Therefore, the alignment mark 82 can be easily formed with high position accuracy.

Further, in this embodiment, two alignment marks 82 are formed for one second element pattern 85. Here, the correction value of the center of the element pattern may be set based on the average value of the offset amounts of the two calibration marks 82.

For example, as shown in FIG. 11, left-right symmetrical alignment marks 82 are formed with respect to one first element pattern 80. Two shots are taken by the camera 104 and two calibration marks 82 are taken. That is, the camera 104 obtains a first image obtained by photographing the calibration mark 82 on the + X side of the first element pattern 80 and a second image obtained by photographing the -X side calibration mark on the first element pattern 80. Then, based on the first image and the second image, the offset amounts of the two calibration marks 82 can be obtained. The head 102 moves to a correction position corresponding to the average value of the amount of shift. In this way, the second element pattern 85 can be formed with higher position accuracy. When the camera 104 cannot capture two calibration marks 82, the control unit 018 cannot calculate the offset. In this case, The control unit 108 will issue a warning. For example, the control unit 108 displays a warning on the screen and sends a warning sound from the loudspeaker.

After the second element pattern 85 is formed, the work table releases the suction sheet 70 (S25). The work table driving mechanism 107 lowers the work table 105 to the lowered position (S26). Then, the rotary feed-out reel 113 and the take-up reel 114 are rotated to perform the roll conveyance (S27). Thereby, a new range of the sheet 70 can be sent out onto the work table 105.

Then, it is determined whether or not to perform repetition according to the roll conveyance position (S28). When it is determined that the process is repeated (S28: YES), the processes of steps S21 to S27 are executed again. That is, the second element pattern 85 is not formed until the end of the unwinding roll 70a, and the sheet 70 is conveyed and the processes of steps S21 to S27 are applied to the new area of the sheet 70 after being conveyed. Thereby, as shown in FIG. 12, a second element pattern 85 is formed in a new range of the sheet 70. Thereby, a plurality of second element patterns 85 are sequentially formed along the X direction of the sheet 70.

On the other hand, if it is determined that the process is not repeated (S28: NO), the process for the back surface of the sheet 70a is ended. That is, when the second element pattern 85 has been formed up to the end of the delivery of the spool 70a, the processing of the surface of the sheet 70 is terminated. In this manner, the second element pattern 85 can be patterned with high positional accuracy. Furthermore, it is possible to automate the formation of element patterns on the front and back sides. Thereby, a sheet-shaped secondary battery can be manufactured with high productivity.

In this way, the first element pattern 80 and the second element pattern 85 are formed on both sides of the sheet 70. Then, the sheet 70 on which element patterns 80 and 85 are respectively formed on both sides is cut. For example, as shown in FIG. 13, a cutting line 88 is formed at a position between two adjacent second element patterns 85. The cutting line 88 is parallel to the Y direction. A cutting line is formed by removing a part of the base material 71 in the Z direction.

As described above, the cutting line 88 is formed by laser irradiation from the laser light source 103. In the X direction, a plurality of cutting lines 88 are formed at intervals of 350 mm. The order of forming the cutting lines 88 is not particularly limited. For example, the cutting line 88 may be formed by irradiating the sheet 70 with laser light before or after step S24.

Then, the sheet 70 is divided at the cutting line 88, and as shown in FIG. 14, a sheet-shaped secondary battery 90 is manufactured. The sheet 70 is cut into a plurality of pieces, and a single-piece sheet-shaped secondary battery 90 is manufactured. In the XY plane, the sheet-shaped secondary battery 90 has a square shape of 350 mm × 350 mm.

In this way, since it can be applied to a roll-to-roll manufacturing process, a continuous manufacturing process can be performed. Thereby, productivity can be improved. In addition, since the first element pattern 80, the alignment mark 82, the second element pattern 85, and the cutting line 88 can all be formed by laser irradiation from the laser light source 103, it can be processed with high productivity.

Next, the alignment and the formation of the second element pattern 85 will be described using FIG. 15. FIG. 15 is a flowchart showing the steps for simplifying the calibration and forming the second element pattern 85.

First, an alignment mark 82 is formed on the front surface of the sheet 70 (S101). That is, laser light is irradiated from the front side of the sheet 70 to form a through hole 84 at a position corresponding to the first element pattern 80. The through hole 84 serves as the calibration mark 82. Thereby, an alignment mark 82 is formed on the sheet 70.

Next, the calibration mark 82 is photographed on the back using the camera 104 (S102). Based on the image P captured by the camera 104, the amount of offset from the calibration mark 82 of the reference coordinates is measured (S103). Here, the shift amount may be measured by image processing, and the operator or the like may measure the shift amount visually.

Then, the amount of movement of the head 102 is corrected (S104). That is, the laser processing is performed by using the position where the head portion 102 is offset only by the correction amount as the laser irradiation start position. It is determined whether or not it should be repeated at the roll conveyance position (S105). It was judged that there was no laser processing until the end of the delivery roll 70a. In the case (S105: YES), the process returns to step S102 and repeats the process. It is determined that laser processing may be performed up to the end of the delivery roll 70a (S105: NO), and the processing is terminated. In this way, an element pattern can be formed on both sides of the roll-shaped base material 71 at a correct position. That is, the positions of the first element pattern 80 and the second element pattern 85 can be made to coincide.

In the foregoing description, although the sheet-shaped secondary battery 90 has a structure in which the first charging layer 72 and the first upper electrode 73 are formed on the surface of the substrate 71, the second charging layer 74 and the second upper electrode 75 are formed on the back surface However, the structure of the sheet-shaped secondary battery 90 is not limited to this. A sheet-shaped secondary battery 90 a having a different cross-sectional structure is shown in FIG. 16. As shown in FIG. 16, a first n-type semiconductor layer 76, a first charging layer 72, a first p-type semiconductor layer 77, and a first upper electrode 73 are sequentially deposited on the surface of the substrate 71. A second n-type semiconductor layer 78, a second charging layer 74, a second p-type semiconductor layer 79, and a second upper electrode 75 are stacked on the back surface of the substrate 71 in this order. For example, the base material is a negative electrode, and the second upper electrode 75 and the first upper electrode 73 become a positive electrode.

The first n-type semiconductor layer 76 and the second n-type semiconductor layer 78 are, for example, n-type metal oxide semiconductor layers, and titanium dioxide (TiO ₂ ), tin dioxide (SnO ₂ ), or zinc oxide (ZnO) can be used as materials. . The first n-type semiconductor layer 76 is disposed between the substrate 71 and the first charging layer 72, and the second n-type semiconductor layer 78 is disposed between the substrate 71 and the second charging layer 74.

As a material of the first p-type semiconductor layer 77 and the second p-type semiconductor layer 79, a p-type metal oxide semiconductor such as nickel oxide (NiO) or copper aluminum oxide (CuAlO ₂ ) can be used. A first p-type semiconductor layer 77 is formed between the first charging layer 72 and the first upper electrode 73, and a second p-type semiconductor layer 79 is formed between the second charging layer 74 and the second upper electrode 75. The first p-type semiconductor layer 77 and the second p-type semiconductor layer 79 may not be provided.

In such a structure, the first element pattern 80 can also be formed by forming the electrode pattern 73 of the first upper electrode 73 on the surface of the substrate 71. Similarly, the second element pattern 85 can be formed by forming the electrode pattern 75 a of the second upper electrode 75 on the back surface of the substrate 71. Furthermore, it can be calibrated by the calibration mark 82 penetrating through the sheet 70. Therefore, the element pattern can be formed at the correct position on both sides of the roll-shaped base material 71.

As shown in FIG. 16, the manufacturing process of the sheet-shaped secondary battery 90 a includes: using the substrate 71 as the first electrode (negative electrode), and the both sides of the substrate 71 are sequentially composed of n-type metal oxide semiconductors. The process of depositing an n-type metal oxide layer and a charging layer composed of a substance containing an n-type metal oxide layer and an insulator.

In the foregoing description, the calibration is performed by moving the head 102 by the driving mechanism 106, but the calibration may also be performed by moving the sheet 70. Alternatively, it is also possible to perform the calibration by moving the irradiation position of the laser light in the head 102 by adjusting the optical system. That is, if the relative irradiation position of the laser light with respect to the sheet | seat 70 can be moved, calibration may be performed by any method.

The method for manufacturing the sheet-shaped secondary battery according to this embodiment can also be said to have the following steps (A) to (F).

(A) A first element pattern is formed on a surface of one side of a sheet-shaped secondary battery, and the sheet-shaped secondary battery is rolled on a pair of conveying shaft disks having a winding shaft disk and a sending shaft disk.

(B) A through hole is formed in the sheet-shaped secondary battery corresponding to the first element pattern.

(C) The sheet-shaped secondary battery is sent out through the pair of conveying shaft disks, and the steps (A) and (B) are repeatedly performed to form a plurality of the first element patterns on the sheet-shaped secondary battery. And a through hole corresponding to the first element pattern.

(D) Calibration is performed based on the through hole, and a second element pattern is formed on the surface of the other side of the sheet-shaped secondary battery.

(E) The sheet-shaped secondary battery is sent out through the pair of conveying shaft disks, and the step (D) is repeatedly performed to form a plurality of the second element patterns on the sheet-shaped secondary battery.

(F) Correspond to the first element pattern and the second element pattern, and cut off the sheet-shaped secondary battery.

In the foregoing description, although the sheet-shaped secondary battery has been described as an example of the sheet-shaped element, it may be a sheet-shaped element other than the sheet-shaped secondary battery. In this case, a layer corresponding to the use of the element is formed on the first element pattern and the second element pattern. The sheet element related to this embodiment includes a sheet; a first element pattern is formed on a surface of one side of the sheet; a second element pattern is formed on a surface of the other side of the sheet; and Corresponding to the first element pattern; a through hole penetrating the sheet and disposed near the first element pattern in a surface on one side of the sheet, and the element disposed in a surface on the other side of the sheet Near the second element pattern.

As mentioned above, although an example of the embodiment of the present invention has been described, the present invention includes appropriate modifications that do not damage its purpose and advantages. Furthermore, the present invention is not limited by the foregoing embodiments.

This application claims priority based on Japanese Patent Application No. 2016-120694 filed on June 17, 2016, and the entire disclosure thereof is incorporated herein.

70-sheet 71-substrate 72-first charging layer 73-first upper electrode 73a-electrode pattern 74-second charging layer 75-second upper electrode 80-first element pattern 82-calibration mark 85-second Element Pattern 86-Laser Irradiation

Claims (14)

A method for manufacturing a sheet-shaped secondary battery includes the following steps: (A) A first element pattern is formed on a surface of one side of the sheet-shaped secondary battery, and the sheet-shaped secondary battery is rolled with a winding shaft. Plate and a pair of conveying shaft disks which send out the shaft disk; (B) forming a through hole in the sheet-shaped secondary battery corresponding to the first element pattern; (C) by the pair of conveying shaft disks Sending out the sheet-shaped secondary battery, and repeatedly performing the steps (A) and (B), forming a plurality of the first element patterns and through holes corresponding to the first element patterns in the sheet-shaped secondary battery; (D) Calibration is performed based on the through-hole, and a second element pattern is formed on the surface of the other side of the sheet-shaped secondary battery; (E) The sheet-shaped secondary battery is sent out by the pair of conveying shaft disks Step (D) is repeatedly performed to form a plurality of the second element patterns on the sheet-shaped secondary battery; and (F) the first element pattern is corresponding to the second element pattern, and the sheet is cut Shape secondary battery. The method for manufacturing a sheet-shaped secondary battery according to claim 1, wherein in the step (A), the surface of one side of the sheet-shaped secondary battery is irradiated with laser light from a laser light source. An upper electrode is patterned corresponding to the first element pattern. In the step (B), the through-hole is formed in the sheet-shaped secondary battery by irradiating laser light from the laser light source. The method for manufacturing a sheet-shaped secondary battery according to claim 2, wherein in the step (A), the through-hole is formed by performing the step (B) on the way of forming the first element pattern. The method for manufacturing a sheet-shaped secondary battery according to claim 2 or 3, wherein in the step (D), the surface of the other side of the sheet-shaped secondary battery is irradiated with laser light from a laser light source. The second upper electrode is patterned corresponding to the second element pattern. The method for manufacturing a sheet-shaped secondary battery according to claim 2 or 3, wherein in the step (F), laser light from a laser light source is irradiated so that two adjacent first element patterns are viewed in plan view. A cutting line is formed between the positions, and the sheet-shaped secondary battery is cut along the cutting line. The method of manufacturing a sheet-shaped secondary battery according to claim 2 or 3, wherein the laser light source irradiates the sheet-shaped secondary battery with laser light in a state where the sheet-shaped secondary battery is adsorbed on a workpiece table. The method for manufacturing a sheet-shaped secondary battery according to any one of claims 1 to 3, wherein in the step (D), the sheet-shaped secondary battery is photographed from the other surface side by a photographing means. The calibration is performed based on an image captured by the photographing means. The method for manufacturing a sheet-shaped secondary battery according to claim 7, wherein in the step (B), in the winding direction of the sheet-shaped secondary battery, two pieces of the first element pattern corresponding to the first element pattern are formed. In the through-hole, in this step (D), the calibration is performed based on the first image captured by the through-hole on one side and the second image captured by the through-hole on the other side. The method for manufacturing a sheet-shaped secondary battery according to any one of claims 1 to 3, wherein the sheet-shaped secondary battery comprises: a substrate to be a lower electrode, on a surface side of one side of the substrate, A first charging layer and a first upper electrode are formed, and a second charging layer and a second upper electrode are formed on the surface side of the other side of the substrate, and formed between the first charging layer and the substrate. There is a first n-type metal oxide semiconductor layer, and a second n-type metal oxide semiconductor layer is formed between the second charging layer and the substrate. The first charging layer and the second charging layer each have Substances of n-type metal oxide semiconductors and insulators. A manufacturing device of a sheet-shaped secondary battery, comprising: a pair of conveying shaft disks, which have a winding shaft disk and a sending shaft disk; a laser light source, which irradiates laser beams onto the pair of conveying shaft disks; A sheet-shaped secondary battery, and a first element pattern is formed on a surface of one side of the sheet-shaped secondary battery; a photographing means for using laser light from the laser light source from the side of the sheet-shaped secondary battery The surface side of the sheet-shaped secondary battery is irradiated, and the through-holes formed in the sheet-shaped secondary battery are photographed; a driving mechanism is calibrated in the surface of the other side of the sheet-shaped secondary battery based on the image captured by the photographing means; The irradiation position of the laser light source. The manufacturing apparatus of a sheet-shaped secondary battery according to claim 10, wherein the manufacturing apparatus of the sheet-shaped secondary battery is: (G) the laser light source is irradiated from the surface side of one side of the sheet-shaped secondary battery The laser light, and the first element pattern is formed on a surface of one side of the sheet-shaped secondary battery; (H) radiating the laser light from the surface side of the one side of the sheet-shaped secondary battery with the laser light source; A through hole is formed in the sheet-shaped secondary battery corresponding to the first element pattern; (I) The sheet-shaped secondary battery is sent out by the pair of conveying shaft disks, and the step (G) is repeatedly performed And the step (H), forming a plurality of the first element pattern and a through hole corresponding to the first element pattern on the sheet-shaped secondary battery; (J) in a state where the driving mechanism is calibrated, using the The laser light source irradiates laser light from the side of the other surface of the sheet secondary battery to form a second element pattern on the surface of the other side of the sheet secondary battery; (K) by the The sheet-shaped secondary battery is sent out by a pair of conveying shaft disks, and the step (J) is repeatedly performed. , The sheet-type secondary battery to form a plurality of elements of the second pattern. The apparatus for manufacturing a sheet-shaped secondary battery according to claim 10 or 11, further comprising a work table for adsorbing the sheet-shaped secondary battery, wherein the laser is in a state where the sheet-shaped secondary battery is adsorbed by the work-table. The light source irradiates laser light to the sheet-shaped secondary battery. A sheet-like element includes: a sheet of material; a first element pattern formed on a surface of one side of the sheet; a second element pattern formed on a surface of the other side of the sheet and corresponding to the sheet A first element pattern; a through hole penetrating the sheet and disposed near the first element pattern in a surface on one side of the sheet, and the second element disposed in a surface on the other side of the sheet Near the pattern. A method for manufacturing a sheet-like element includes the following steps: (A) forming a first element pattern on a surface of one side of the sheet-like element; the sheet-like element is wound on a roll with a winding shaft and a sending shaft (B) forming a through-hole in the sheet-like element corresponding to the first element pattern. (C) The sheet-shaped element is sent out through the pair of conveying shaft disks, and the steps (A) and (B) are repeatedly performed to form a plurality of the first element patterns and corresponding ones in the sheet-shaped secondary battery. A through-hole in the first element pattern; (D) aligning based on the through-hole, forming a second element pattern on the surface of the other side of the sheet-like element; (E) by the pair of conveying shaft disks Sending out the sheet element, and repeatedly performing the step (D), forming a plurality of the second element patterns on the sheet element; and (F) corresponding to the first element pattern and the second element pattern, and cutting Break the sheet-like element.