TWI615694B - 製造設備診斷支援裝置及製造設備診斷支援方法 - Google Patents

製造設備診斷支援裝置及製造設備診斷支援方法 Download PDF

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Publication number
TWI615694B
TWI615694B TW105117535A TW105117535A TWI615694B TW I615694 B TWI615694 B TW I615694B TW 105117535 A TW105117535 A TW 105117535A TW 105117535 A TW105117535 A TW 105117535A TW I615694 B TWI615694 B TW I615694B
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TW
Taiwan
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data
feature quantity
abnormality
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unit
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TW105117535A
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English (en)
Chinese (zh)
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TW201732475A (zh
Inventor
手知幸
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東芝三菱電機產業系統股份有限公司
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0221—Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/24—Pc safety
    • G05B2219/24063—Select signals as function of priority, importance for diagnostic

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • General Factory Administration (AREA)
TW105117535A 2016-02-03 2016-06-03 製造設備診斷支援裝置及製造設備診斷支援方法 TWI615694B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
??PCT/JP2016/053233 2016-02-03
PCT/JP2016/053233 WO2017134772A1 (ja) 2016-02-03 2016-02-03 製造設備診断支援装置及び製造設備診断支援方法

Publications (2)

Publication Number Publication Date
TW201732475A TW201732475A (zh) 2017-09-16
TWI615694B true TWI615694B (zh) 2018-02-21

Family

ID=59499678

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105117535A TWI615694B (zh) 2016-02-03 2016-06-03 製造設備診斷支援裝置及製造設備診斷支援方法

Country Status (5)

Country Link
JP (1) JP6572979B2 (ja)
KR (1) KR102042368B1 (ja)
CN (1) CN107949813B (ja)
TW (1) TWI615694B (ja)
WO (1) WO2017134772A1 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7091743B2 (ja) * 2018-03-16 2022-06-28 株式会社リコー 情報処理装置、情報処理方法、プログラム、および機械装置
JP6777686B2 (ja) * 2018-05-29 2020-10-28 ファナック株式会社 診断装置、診断方法及び診断プログラム
WO2020044533A1 (ja) * 2018-08-31 2020-03-05 東芝三菱電機産業システム株式会社 製造プロセス監視装置
JP7226103B2 (ja) * 2019-05-29 2023-02-21 オムロン株式会社 制御システム、サポート装置およびサポートプログラム
WO2021220323A1 (ja) * 2020-04-27 2021-11-04 三菱電機株式会社 状態判定装置
KR20220018553A (ko) 2020-07-01 2022-02-15 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 제조 설비의 진단 지원 장치
WO2022049701A1 (ja) * 2020-09-03 2022-03-10 三菱電機株式会社 機器分析装置、機器分析方法および機器分析プログラム
JP7468376B2 (ja) * 2021-01-21 2024-04-19 株式会社Tmeic ロール管理装置
CN114789200B (zh) * 2021-10-14 2024-02-09 天津市新宇彩板有限公司 冷轧机组故障自诊断并记录的方法及系统
CN114265390B (zh) * 2021-12-22 2024-02-20 苏州华星光电技术有限公司 设备数据采集诊断方法、装置、服务器及存储介质

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200947251A (en) * 2008-03-07 2009-11-16 Mks Instr Inc Process control using process data and yield data
TW200947580A (en) * 2008-03-27 2009-11-16 Tokyo Electron Ltd Method for classifying defects, computer storage medium, and device for classifying defects
TW201024945A (en) * 2008-12-16 2010-07-01 Ind Tech Res Inst A system for maintaining and analyzing manufacturing equipment and method therefor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4458349B2 (ja) * 2004-08-27 2010-04-28 日立アプライアンス株式会社 機器診断装置、その動作プログラム、機器診断方法
JP5427107B2 (ja) * 2010-05-20 2014-02-26 株式会社日立製作所 監視診断装置および監視診断方法
CN101937207B (zh) * 2010-08-27 2012-09-05 上海交通大学 机械设备状态的智能可视化监测与诊断方法
JP5565357B2 (ja) * 2011-03-24 2014-08-06 新日鐵住金株式会社 設備診断装置、設備診断方法、設備診断プログラムおよびこれを記録したコンピュータ読み取り可能な記録媒体
JP5821363B2 (ja) * 2011-07-27 2015-11-24 東芝三菱電機産業システム株式会社 製品欠陥要因分析装置
US10996662B2 (en) * 2014-05-20 2021-05-04 Toshiba Mitsubishi-Electric Industrial Systems Corporation Manufacturing equipment diagnosis support system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200947251A (en) * 2008-03-07 2009-11-16 Mks Instr Inc Process control using process data and yield data
TW200947580A (en) * 2008-03-27 2009-11-16 Tokyo Electron Ltd Method for classifying defects, computer storage medium, and device for classifying defects
TW201024945A (en) * 2008-12-16 2010-07-01 Ind Tech Res Inst A system for maintaining and analyzing manufacturing equipment and method therefor

Also Published As

Publication number Publication date
JPWO2017134772A1 (ja) 2018-05-17
WO2017134772A1 (ja) 2017-08-10
CN107949813B (zh) 2020-06-30
CN107949813A (zh) 2018-04-20
TW201732475A (zh) 2017-09-16
JP6572979B2 (ja) 2019-09-11
KR20180026495A (ko) 2018-03-12
KR102042368B1 (ko) 2019-11-07

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