TWI614192B - Liquid containing barrel - Google Patents

Liquid containing barrel Download PDF

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Publication number
TWI614192B
TWI614192B TW106120085A TW106120085A TWI614192B TW I614192 B TWI614192 B TW I614192B TW 106120085 A TW106120085 A TW 106120085A TW 106120085 A TW106120085 A TW 106120085A TW I614192 B TWI614192 B TW I614192B
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liquid
container
present
peripheral portion
lowest point
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TW106120085A
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Chinese (zh)
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TW201904828A (en
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李孟錴
吳典諭
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瀚宇彩晶股份有限公司
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Priority to TW106120085A priority Critical patent/TWI614192B/en
Priority to JP2017136678A priority patent/JP6588057B2/en
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Publication of TWI614192B publication Critical patent/TWI614192B/en
Publication of TW201904828A publication Critical patent/TW201904828A/en

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  • Details Of Rigid Or Semi-Rigid Containers (AREA)

Abstract

本發明提供一種液體盛裝桶,其包括盛裝容器。盛裝容器用以盛裝液體,盛裝容器的底部具有凹陷部以及外圍部,外圍部與凹陷部相接且至少部分環繞凹陷部,外圍部的最低點高於或等高於凹陷部的最高點,其中,凹陷部的容量約為盛裝容器的總容量的0.2%至2%。The present invention provides a liquid containing tub comprising a containment container. The container is filled with a liquid, and the bottom of the container has a concave portion and a peripheral portion, the peripheral portion is in contact with the concave portion and at least partially surrounds the concave portion, and the lowest point of the outer portion is higher than or equal to the highest point of the concave portion, wherein The capacity of the recess is about 0.2% to 2% of the total capacity of the container.

Description

液體盛裝桶Liquid container

本發明係關於一種液體盛裝桶,尤指一種可減少殘留液體量的液體盛裝桶。The present invention relates to a liquid holding tub, and more particularly to a liquid holding tub which can reduce the amount of residual liquid.

一般而言,工業產品生產過程中所需要的化學溶劑(例如光阻液)會利用特定液體盛裝桶儲存,以避免液體盛裝桶被液體腐蝕或受到外力破壞而漏液。在產品製程中,可藉由例如提供乾淨乾燥氣體(clean dry air, CDA)而對液體盛裝桶內的液體進行液面加壓的方式以將液體從液體盛裝桶中輸出,接著再送往機台以進行產品的製程,其中為了避免在輸出液體的過程中有空氣伴隨液體被輸出所造成的異常,當液體盛裝桶內的液體量下降到一定重量或是液體的液面在液體盛裝桶中下降到一定高度時,會停止對液體的輸出,並更換新的液體盛裝桶以繼續供應液體。然而,由於先前技術之液體盛裝桶的底部是水平平面,因此若進行上述的輸出方式,會使大量液體殘留於液體盛裝桶內,進而增加生產成本。In general, chemical solvents (such as photoresists) required for the production of industrial products are stored in a specific liquid container to prevent the liquid container from being corroded by liquid or damaged by external force. In the product manufacturing process, the liquid in the liquid holding tank can be liquid-pressurized by, for example, providing a clean dry air (CDA) to discharge the liquid from the liquid holding barrel, and then sent to the machine. To carry out the process of the product, in order to avoid the abnormality caused by the output of the liquid accompanying the liquid in the process of outputting the liquid, when the amount of liquid in the liquid holding barrel drops to a certain weight or the liquid level of the liquid is in the liquid holding barrel When it drops to a certain height, it stops the output of the liquid and replaces it with a new liquid container to continue supplying the liquid. However, since the bottom of the prior art liquid holding tub is a horizontal plane, if the above-described output mode is performed, a large amount of liquid remains in the liquid holding tub, thereby increasing the production cost.

本發明之目的之一在於提供一種液體盛裝桶,其透過液體盛裝桶底部的非水平平面設計而使得減少液體盛裝桶中的殘留液體量,藉此降低生產成本。One of the objects of the present invention is to provide a liquid containing tub which is designed to reduce the amount of residual liquid in the liquid holding tub by the non-horizontal planar design of the bottom of the liquid holding tub, thereby reducing the production cost.

本發明之一實施例提供一種液體盛裝桶,其包括盛裝容器。盛裝容器用以盛裝液體,盛裝容器的底部具有凹陷部以及外圍部,外圍部與凹陷部相接並至少部分環繞凹陷部,且外圍部的最低點高於或等高於凹陷部的最高點,其中,凹陷部的容量約為盛裝容器的總容量的0.2%至2%。One embodiment of the present invention provides a liquid containment bin that includes a containment container. The container is filled with a liquid, the bottom of the container has a concave portion and a peripheral portion, the peripheral portion is in contact with the concave portion and at least partially surrounds the concave portion, and the lowest point of the outer portion is higher than or equal to the highest point of the concave portion. Wherein, the capacity of the depressed portion is about 0.2% to 2% of the total capacity of the container.

本發明之另一實施例提供一種液體盛裝桶,其包括盛裝容器。盛裝容器用以盛裝液體,盛裝容器的底部具有第一底面,且第一底面為斜面或曲面,其中盛裝容器的底部的最低點至盛裝容器的底部的最高點具有底部落差高度,且底部落差高度約為盛裝容器的高度的0.2%至10%。Another embodiment of the present invention provides a liquid containing tub comprising a containment container. The container is filled with liquid, the bottom of the container has a first bottom surface, and the first bottom surface is a slope or a curved surface, wherein the lowest point of the bottom of the container to the bottom of the bottom of the container has a bottom drop height, and the bottom drop height It is about 0.2% to 10% of the height of the container.

本發明的液體盛裝桶藉由盛裝容器的底部的設計,使得液體盛裝桶中的液體在輸出的過程中會因為盛裝容器底部的走勢而往底部的最低點的方向集中,並且,當液體的液面低於盛裝容器的底部的最高點時,其液面的面積會隨著液體高度的下降而減少,因此,假使傳統的液體盛裝桶已停止液體輸出而殘留有液體,本發明的液體盛裝桶仍可由相同的殘留量中繼續進行液體輸出而不易造成同時輸出空氣的問題,藉此增加液體的可使用量,也就是說,在液面高度相同的條件下,本實施例的液體盛裝桶的殘留液體量會較少,故藉此減少所殘留的液體量,以降低生產成本。The liquid container of the present invention is designed such that the liquid in the liquid holding tank is concentrated in the direction of the bottom of the bottom of the container due to the movement of the bottom of the container during the output, and when the liquid is liquid When the surface is lower than the highest point of the bottom of the container, the area of the liquid surface decreases as the liquid height decreases. Therefore, if the conventional liquid container has stopped liquid output and remains liquid, the liquid container of the present invention The liquid output can still be continued from the same residual amount without causing a problem of simultaneous air output, thereby increasing the usable amount of the liquid, that is, the liquid holding barrel of the present embodiment under the condition that the liquid level is the same. The amount of residual liquid will be less, thereby reducing the amount of liquid remaining to reduce production costs.

為使本領域的通常知識者能更進一步瞭解本發明,以下特列舉本發明的實施例,並配合圖式詳細說明本發明的構成內容及所欲達成的功效。須注意的是,圖式均為簡化的示意圖,因此,僅顯示與本發明有關之元件與組合關係,以對本發明的基本架構或實施方法提供更清楚的描述,而實際的元件與佈局可能更為複雜。另外,為了方便說明,本發明的各圖式中所示之元件並非以實際實施的數目、形狀、尺寸做等比例繪製,其詳細的比例可依照設計的需求進行調整。The present invention will be described in detail with reference to the embodiments of the present invention in detail, It should be noted that the drawings are simplified schematic diagrams, and therefore, only elements and combinations related to the present invention are shown to provide a clearer description of the basic architecture or implementation method of the present invention, and actual components and layouts may be more To be complicated. In addition, for convenience of description, the elements shown in the various drawings of the present invention are not drawn to the scale, shape, and size of the actual implementation, and the detailed ratios thereof may be adjusted according to the design requirements.

請參考第1圖,第1圖繪示本發明第一實施例之液體盛裝桶之剖面示意圖,其中本發明的液體盛裝桶100係用以盛裝化學溶劑等液體,舉例而言,液體盛裝桶100可用以盛裝光阻液,但不以此為限。如第1圖所示,本實施例的液體盛裝桶100包括用以盛裝液體的盛裝容器110,其中盛裝容器110的材料可包括樹脂或高分子材料等,例如高密度聚乙烯等塑膠,並藉由吹膜、發泡、射出成模或鑄模等方式製造,使得盛裝容器110可具有耐腐蝕性,以避免被液體腐蝕而漏液,但其材料與製造方式不以此為限。另外,在本實施例中,液體盛裝桶100可另包括外部容器130,而盛裝容器110設置於外部容器130內,其中外部容器130的材料可包括金屬,例如馬口鐵或鋼,使得外部容器130可以保護盛裝容器110,以避免受到外力破壞而漏液,但其材料不以此為限。在本實施例中,液體盛裝桶100係以圓形桶為例,但不以此為限,液體盛裝桶100亦可為其他適合的桶形。Please refer to FIG. 1 , which is a cross-sectional view of a liquid container according to a first embodiment of the present invention. The liquid container 100 of the present invention is used to hold a liquid such as a chemical solvent, for example, a liquid container 100 . Can be used to hold photoresist, but not limited to this. As shown in FIG. 1 , the liquid container 100 of the present embodiment includes a container 110 for containing a liquid, wherein the material of the container 110 may include a resin or a polymer material, such as a high-density polyethylene, and the like. It is manufactured by blowing film, foaming, injection molding or molding, etc., so that the container 110 can have corrosion resistance to avoid liquid leakage due to corrosion of the liquid, but the material and manufacturing method are not limited thereto. In addition, in the present embodiment, the liquid containing tub 100 may further include an outer container 130, and the containing container 110 is disposed in the outer container 130, wherein the material of the outer container 130 may include metal, such as tinplate or steel, so that the outer container 130 may The container 110 is protected from leakage by external force, but the material is not limited thereto. In the present embodiment, the liquid container 100 is exemplified by a circular barrel, but not limited thereto, the liquid container 100 may be other suitable barrel shapes.

盛裝容器110的底部120具有凹陷部122以及外圍部124,而外圍部124與凹陷部122相接並至少部分環繞凹陷部122,且外圍部124的最低點124L高於或等高於凹陷部122的最高點122H,其中凹陷部122的容量約為盛裝容器110的總容量的0.2%至2%。具體而言,凹陷部122的最低點122L係為盛裝容器110的底部120的最低點120L,外圍部124的最高點124H係為盛裝容器110的底部120的最高點120H,但須說明的是,凹陷部122的最低點122L、外圍部124的最低點124L並不一定是單一點,亦可為最低的水平平面中的其中一點,舉例而言,在第1圖中,凹陷部122的最低點122L係位於凹陷部122底部的水平平面,亦即凹陷部122底部的水平平面的任一點皆可為凹陷部122的最低點122L,類似地,外圍部124的最高點124H也並不一定是單一點,亦可為外圍部124中最高的水平平面中的其中一點或外圍部124的周邊邊緣的其中一點,在此不再贅述。另外,凹陷部122的剖面形狀可為V字形、U字形或ㄩ字形,但不以此為限,而本實施例的凹陷部122的剖面形狀舉例為ㄩ字形。此外,外圍部124可包括平面、斜面或曲面,本實施例的外圍部124僅包括一個曲面,並完全環繞凹陷部122,且外圍部124的最低點124L等高於凹陷部122的最高點122H,但不以此為限。值得一提的是,本發明將凹陷部122的最低點122L至盛裝容器110的底部120的任一點在高度方向HD上的高度差定義為該點的特徵高度,而在本實施例中,盛裝容器110的底部120的最高點120H位於盛裝容器110的底部120的最外圍,特徵高度由外圍部124的最高點124H至外圍部124的最低點124L係連續的遞減,也就是說,外圍部124至凹陷部122的高度由外圍部124的最高點124H至外圍部124的最低點124L(或凹陷部122的最高點122H)漸進式縮小,但不以此為限,在其他實施例中,特徵高度由外圍部124的最高點124H至外圍部124的最低點124L亦可為非絕對或非連續性的遞減。除此之外,在本實施例中,凹陷部122位於盛裝容器110的底部120的中心,而外圍部124由於僅包括單一個曲面,因此盛裝容器110的底部120的最外圍的特徵高度相同,但皆不以此為限,在其他實施例中,凹陷部122可依據需求而設置在底部120的其他位置,而盛裝容器110的底部120的最外圍的不同位置亦可依據需求而設計為具有不同的特徵高度。The bottom portion 120 of the container 110 has a recess 122 and a peripheral portion 124, and the peripheral portion 124 is in contact with the recess portion 122 and at least partially surrounds the recess portion 122, and the lowest point 124L of the peripheral portion 124 is higher than or equal to the recess portion 122. The highest point 122H, wherein the recess 122 has a capacity of about 0.2% to 2% of the total capacity of the container 110. Specifically, the lowest point 122L of the recessed portion 122 is the lowest point 120L of the bottom portion 120 of the container 110, and the highest point 124H of the peripheral portion 124 is the highest point 120H of the bottom portion 120 of the container 110, but it should be noted that The lowest point 122L of the depressed portion 122 and the lowest point 124L of the peripheral portion 124 are not necessarily a single point, and may be one of the lowest horizontal planes. For example, in FIG. 1 , the lowest point of the depressed portion 122 122L is located in the horizontal plane at the bottom of the recess 122, that is, any point of the horizontal plane at the bottom of the recess 122 may be the lowest point 122L of the recess 122. Similarly, the highest point 124H of the peripheral portion 124 is not necessarily a single One point may be one of the highest horizontal planes in the peripheral portion 124 or one of the peripheral edges of the peripheral portion 124, and details are not described herein again. In addition, the cross-sectional shape of the recessed portion 122 may be a V-shape, a U-shape or a U-shape, but is not limited thereto, and the cross-sectional shape of the recessed portion 122 of the present embodiment is ㄩ-shaped. In addition, the peripheral portion 124 may include a plane, a bevel or a curved surface. The peripheral portion 124 of the present embodiment includes only one curved surface and completely surrounds the recess portion 122, and the lowest point 124L of the peripheral portion 124 is higher than the highest point 122H of the recess portion 122. , but not limited to this. It is worth mentioning that the height difference between the lowest point 122L of the recessed portion 122 and any point of the bottom portion 120 of the container 110 in the height direction HD is defined as the characteristic height of the point, and in this embodiment, the dressing is included. The highest point 120H of the bottom portion 120 of the container 110 is located at the outermost periphery of the bottom portion 120 of the container 110, and the feature height is continuously decreased from the highest point 124H of the peripheral portion 124 to the lowest point 124L of the peripheral portion 124, that is, the peripheral portion 124. The height to the recessed portion 122 is gradually reduced from the highest point 124H of the peripheral portion 124 to the lowest point 124L of the peripheral portion 124 (or the highest point 122H of the recessed portion 122), but not limited thereto, in other embodiments, the feature The height from the highest point 124H of the peripheral portion 124 to the lowest point 124L of the peripheral portion 124 may also be a non-absolute or discontinuous decrease. In addition, in the present embodiment, the depressed portion 122 is located at the center of the bottom portion 120 of the container 110, and since the peripheral portion 124 includes only a single curved surface, the outermost features of the bottom portion 120 of the container 110 are the same in height. However, in other embodiments, the recessed portion 122 may be disposed at other positions of the bottom portion 120 according to requirements, and different positions of the outermost periphery of the bottom portion 120 of the container 110 may be designed according to requirements. Different feature heights.

由於盛裝容器110設置於外部容器130內,因此凹陷部122可與外部容器130的底面接觸,亦即,凹陷部122的最低點122L可與外部容器130的底面接觸,並且,在本實施例中,盛裝容器110與外部容器130的側壁之間可另具有間隙D,所以藉由上述的設置,可使得盛裝容器110平穩地容置於外部容器130內,並同時使盛裝容器110與外部容器130在設置較為彈性,但不以此為限,在變化實施例中,盛裝容器110的側壁與外部容器130的側壁亦可為緊密貼合。Since the containing container 110 is disposed in the outer container 130, the recess 122 can be in contact with the bottom surface of the outer container 130, that is, the lowest point 122L of the recess 122 can be in contact with the bottom surface of the outer container 130, and, in this embodiment, There is another gap D between the container 110 and the side wall of the outer container 130. Therefore, by the above arrangement, the container 110 can be smoothly accommodated in the outer container 130, and at the same time, the container 110 and the outer container 130 can be accommodated. The arrangement is relatively flexible, but not limited thereto. In a variant embodiment, the side wall of the container 110 and the side wall of the outer container 130 may also be in close contact.

另一方面,盛裝容器110可另包括開口112,設置於盛裝容器110的頂部,用以將液體從盛裝容器110中取出。在本實施例中,盛裝容器110的開口112在高度方向HD上可與凹陷部122對應,亦即開口112大體上在凹陷部122的正上方,但不以此為限,在變化實施例中,盛裝容器110的開口112在高度方向HD上可不與凹陷部122對應,與凹陷部122錯位或部分錯位。另外,盛裝容器110的頂部的形狀並沒有任何限制,本實施例的盛裝容器110的頂部係以水平平面狀為例。Alternatively, the containment vessel 110 can further include an opening 112 disposed at the top of the containment vessel 110 for removing liquid from the containment vessel 110. In the present embodiment, the opening 112 of the container 110 can correspond to the recess 122 in the height direction HD, that is, the opening 112 is substantially directly above the recess 122, but not limited thereto, in a variant embodiment. The opening 112 of the container 110 may not correspond to the recess 122 in the height direction HD, and may be misaligned or partially misaligned with the recess 122. In addition, the shape of the top of the container 110 is not limited. The top of the container 110 of the present embodiment is exemplified by a horizontal plane.

在本實施例中係藉由例如提供乾淨乾燥氣體對液體盛裝桶100內的液體進行液面加壓的方式,將液體從液體盛裝桶100中以吸取的方式輸出,但液體輸出的方式並不以此為限,亦可為其他適合的方式。請參考第2圖,第2圖繪示本發明第一實施例之液體盛裝桶100於輸出液體時之剖面示意圖。為了將液體盛裝桶100中的液體LQ取出,會於液體盛裝桶100上設置液體汲取器150以及氣體輸入器140,並由液體盛裝桶100的盛裝容器110的開口112延伸入盛裝容器110內,而液體汲取器150的末端會位於盛裝容器110的底部120的凹陷部122中,且液體汲取器150的末端具有管口150a,其中管口150a的置放高度可低於凹陷部122的最高點122H。根據本實施例,氣體輸入器140用以將乾淨乾燥氣體輸入液體盛裝桶100中,藉此對液體盛裝桶100內的液體LQ進行液面加壓,使得液體盛裝桶100內的液體LQ可藉由沉浸於液體LQ中的液體汲取器150的末端的管口150a而從液體盛裝桶100輸出,以輸送至製程機台而進行產品的製程。須說明的是,液體汲取器150的末端與凹陷部122的最低點122L之間具有一特定距離,藉此達到較佳液體輸出效果。例如一具有總高50公分的液體盛裝桶,該特定距離可約為0.1公分至5公分。另外,由於本實施例盛裝容器110的開口112在高度方向HD上與凹陷部122對應,因此液體汲取器150可為沿著高度方向HD延伸的管件,但不以此為限。In the present embodiment, the liquid is pressurized from the liquid containing tub 100 by suctioning the liquid in the liquid containing tub 100 by, for example, providing a clean dry gas, but the liquid output is not in a manner To this end, it can be other suitable methods. Please refer to FIG. 2, which is a cross-sectional view showing the liquid container 100 of the first embodiment of the present invention when the liquid is discharged. In order to take out the liquid LQ in the liquid containing tub 100, a liquid picker 150 and a gas input device 140 are disposed on the liquid containing tub 100, and extend into the containing container 110 from the opening 112 of the container 110 of the liquid containing tub 100. The end of the liquid picker 150 may be located in the recess 122 of the bottom 120 of the container 110, and the end of the liquid picker 150 has a nozzle 150a, wherein the height of the nozzle 150a may be lower than the highest point of the recess 122 122H. According to the embodiment, the gas input device 140 is used to input the clean dry gas into the liquid containing tub 100, thereby performing liquid level pressurization on the liquid LQ in the liquid containing tub 100, so that the liquid LQ in the liquid holding tub 100 can be borrowed. The product is processed from the liquid containing tub 100 by the nozzle 150a at the end of the liquid picker 150 immersed in the liquid LQ for transport to the processing machine for the product manufacturing process. It should be noted that there is a certain distance between the end of the liquid picker 150 and the lowest point 122L of the recess 122, thereby achieving a better liquid output effect. For example, a liquid container having a total height of 50 cm, the specific distance may be about 0.1 cm to 5 cm. In addition, since the opening 112 of the container 110 of the present embodiment corresponds to the recess 122 in the height direction HD, the liquid picker 150 may be a pipe extending along the height direction HD, but is not limited thereto.

為了避免液體汲取器150同時將液體LQ與氣體同時吸取而輸出,並且液體汲取器150的末端與凹陷部122的最低點122L之間具有一特定距離,因此,當液體LQ的液面在液體盛裝桶100中下降到一定高度時,會停止對液體LQ的輸出,所以液體盛裝桶100中不可避免的會有液體LQ的殘留。在傳統的液體盛裝桶中,由於底部是水平平面,因此,不可避免的會產生殘留液體在液體盛裝桶內。舉例而言,若液體盛裝桶內的初始液體量為20公升,殘留液體的容量假設約為12.5%~15%,那麼所殘留的液體量則約為2.5公升至3公升。而在本實施例的液體盛裝桶100中,由於液體盛裝桶100的盛裝容器110的底部120具有凹陷部122與外圍部124,因此在液體輸出的過程中,液體LQ會因為外圍部124的走勢以及凹陷部122的設置而往凹陷部122的方向集中,並且,在本實施例中,當液體LQ的液面低於盛裝容器110的底部120的最高點120H時,其液面的面積會隨著液體LQ的高度的下降而減少,因此,若本實施例的液體盛裝桶100與傳統的液體盛裝桶中裝有相同的液體量時,本實施例的液體盛裝桶100的液體LQ的液面高度會高於傳統的液體盛裝桶的液體的液面高度,故當傳統的液體盛裝桶停止液體輸出時,本實施例的液體盛裝桶100仍可繼續進行液體輸出,藉此增加液體LQ的可使用量,換句話說,若在殘留液體的液面高度相同的條件下,本實施例的液體盛裝桶100的殘留液體量會少於傳統液體盛裝桶內的殘留液體量,故本實施例的液體盛裝桶100相較於傳統的液體盛裝桶可減少所殘留的液體量,藉此降低生產成本。值得一提的是,當本實施例的液體盛裝桶100中的液體LQ的液面太低而無法繼續輸出液體LQ時,所殘留的液體LQ大部分會殘留在凹陷部122中,也就是說,本實施例的液體盛裝桶100所殘留液體量約等於凹陷部122的容量,因此,當凹陷部122的容量約為盛裝容器110的總容量的0.2%至2%,所殘留液體量會約為盛裝容器110的總容量的0.2%至2%,舉例而言,若液體盛裝桶100內的初始液體量為20公升,所殘留的液體量約為40毫升至400毫升。另外,若凹陷部122的容量太小,例如小於盛裝容器110的總容量的0.2%,會影響後期所吸取的液體品質,若凹陷部122的容量太大,例如大於盛裝容器110的總容量的2%,會使得所殘留的液體量較多而影響生產成本。In order to prevent the liquid picker 150 from simultaneously drawing the liquid LQ and the gas, and the end of the liquid picker 150 has a certain distance from the lowest point 122L of the recess 122, when the liquid level of the liquid LQ is in the liquid When the barrel 100 is lowered to a certain height, the output of the liquid LQ is stopped, so that the liquid LQ is inevitably left in the liquid containing barrel 100. In the conventional liquid container, since the bottom is a horizontal plane, it is inevitable that residual liquid will be generated in the liquid container. For example, if the initial liquid volume in the liquid holding tub is 20 liters and the residual liquid capacity is assumed to be about 12.5% to 15%, then the residual liquid amount is about 2.5 liters to 3 liters. In the liquid container 100 of the present embodiment, since the bottom portion 120 of the container 110 of the liquid containing tub 100 has the recessed portion 122 and the peripheral portion 124, the liquid LQ may fluctuate due to the peripheral portion 124 during the liquid output. And the arrangement of the recesses 122 is concentrated toward the direction of the recessed portion 122, and, in the present embodiment, when the liquid level of the liquid LQ is lower than the highest point 120H of the bottom portion 120 of the container 110, the liquid surface area thereof The liquid L8 of the present embodiment is reduced in the height of the liquid LQ. Therefore, if the liquid containing tub 100 of the present embodiment is filled with the same amount of liquid as the conventional liquid holding tub, the liquid level of the liquid LQ of the liquid containing tub 100 of the present embodiment The height is higher than the liquid level of the liquid of the conventional liquid holding tub, so when the conventional liquid holding tub stops the liquid output, the liquid containing tub 100 of the embodiment can continue to perform liquid output, thereby increasing the liquid LQ. The amount of use, in other words, if the level of the liquid level of the residual liquid is the same, the amount of residual liquid of the liquid containing tub 100 of the present embodiment is less than the amount of residual liquid in the conventional liquid holding tub. Liquid holding barrel embodiment 100 of the present embodiment as compared to the conventional liquid containing tub may reduce the amount of residual liquid, thereby reducing production costs. It is worth mentioning that when the liquid level of the liquid LQ in the liquid containing tub 100 of the present embodiment is too low to continue to output the liquid LQ, most of the residual liquid LQ remains in the recessed portion 122, that is, The amount of liquid remaining in the liquid containing tub 100 of the present embodiment is approximately equal to the capacity of the recessed portion 122. Therefore, when the capacity of the recessed portion 122 is about 0.2% to 2% of the total capacity of the container 110, the amount of residual liquid may be about To accommodate 0.2% to 2% of the total capacity of the container 110, for example, if the initial liquid amount in the liquid holding tub 100 is 20 liters, the amount of liquid remaining is about 40 ml to 400 ml. In addition, if the capacity of the recessed portion 122 is too small, for example, less than 0.2% of the total capacity of the container 110, the quality of the liquid sucked up later may be affected. If the capacity of the recessed portion 122 is too large, for example, larger than the total capacity of the container 110. 2% will make the amount of liquid remaining more and affect the production cost.

本發明的液體盛裝桶並不以上述實施例為限。下文將繼續揭示本發明的其它實施例或變化實施例,然而為了簡化說明並突顯各實施例或變化實施例之間的差異,下文中使用相同標號標注相同元件,並不再對重複部分作贅述。The liquid containing tub of the present invention is not limited to the above embodiment. In the following, other embodiments or variations of the present invention will be disclosed. However, in order to simplify the description and highlight the differences between the embodiments or the various embodiments, the .

請參考第3圖,第3圖繪示本發明第一實施例的變化實施例之液體盛裝桶之剖面示意圖。如第3圖所示,相較於第一實施例,本變化實施例的液體盛裝桶100’的凹陷部122的剖面形狀可為V字形,並且,盛裝容器110的開口112在高度方向HD上不與凹陷部122對應,因此,在進行液體輸出時,為使液體汲取器150(未示於第3圖)的末端位於盛裝容器110的底部120的凹陷部122中,所選用的液體汲取器150可為具有轉折的管件或是軟性管件。Please refer to FIG. 3, which is a cross-sectional view showing a liquid holding bucket according to a modified embodiment of the first embodiment of the present invention. As shown in FIG. 3, the cross-sectional shape of the depressed portion 122 of the liquid containing tub 100' of the present modified embodiment may be V-shaped as compared with the first embodiment, and the opening 112 of the container 110 is in the height direction HD. It does not correspond to the recessed portion 122, and therefore, in order to cause the end of the liquid extractor 150 (not shown in Fig. 3) to be located in the recessed portion 122 of the bottom portion 120 of the container 110, the liquid picker is selected for liquid output. 150 can be a tubular member with a turning or a flexible tubular member.

請參考第4圖,第4圖繪示本發明第二實施例之液體盛裝桶之剖面示意圖。如第4圖所示,相較於第一實施例,本實施例的液體盛裝桶200的外圍部124僅部分環繞凹陷部122,且外圍部124僅包括一個平面,須說明的是,由於本實施例的液體盛裝桶200的外圍部124為平面,因此外圍部124的最低點124L與外圍部124的最高點124H皆位於外圍部124的同一平面上,也就是說,可將外圍部124的最低點124L與最高點124H視為相同高度。另一方面,本實施例的液體盛裝桶200的凹陷部122的剖面形狀為U字形。Please refer to FIG. 4, which shows a cross-sectional view of a liquid container according to a second embodiment of the present invention. As shown in FIG. 4, compared with the first embodiment, the peripheral portion 124 of the liquid containing tub 200 of the present embodiment only partially surrounds the recess portion 122, and the peripheral portion 124 includes only one plane, which is illustrated by The peripheral portion 124 of the liquid containing tub 200 of the embodiment is a flat surface, so that the lowest point 124L of the peripheral portion 124 and the highest point 124H of the peripheral portion 124 are located on the same plane of the peripheral portion 124, that is, the peripheral portion 124 can be The lowest point 124L is considered to be the same height as the highest point 124H. On the other hand, the depressed portion 122 of the liquid containing tub 200 of the present embodiment has a U-shaped cross section.

請參考第5圖,第5圖繪示本發明第三實施例之液體盛裝桶之剖面示意圖。如第5圖所示,相較於第一實施例,本實施例的液體盛裝桶300的外圍部124另包括第一部分124a與第二部分124b,其中第一部分124a與第二部分124b彼此不共平面或具有不同的斜度或曲度,第一部分124a與凹陷部122相接並至少部分環繞凹陷部122,且第一部分124a的至少一部分設於第二部分124b與凹陷部122之間。在本實施例中,第一部分124a包括水平的平面,而第二部分124b為斜面,且第一部分124a完全環繞凹陷部122,但不以此為限,第一部分124a亦可為斜面或曲面,第二部分124b亦可為平面或曲面,使用者可依需求而設計。另外,在本實施例中,外圍部124可選擇性的包括第三部分124c,第二部分124b的至少一部分設於第一部分124a與第三部分124c之間,本實施例的第三部分124c為斜面,且第三部分124c之斜面的斜度不同於第二部分124b的斜面的斜度,舉例而言,第三部分124c的斜面相對於第二部分124b的斜面較為傾斜,但不以此為限,第三部分124c亦可為平面或曲面,並且,盛裝容器110的底部120還可依據需求而額外具有更多不同的部分。除此之外,本實施例的外圍部124可另包括垂直側壁124a’,且第一部分124a與第二部分124b透過垂直側壁124a’相接,須說明的是,由於第一部分124a為水平的平面,因此,特徵高度由外圍部124的最高點124H至外圍部124的最低點124L為非絕對的遞減。另一方面,由於本實施例的外圍部124具有彼此不共平面或具有不同的斜度或曲度的第一部分124a、第二部分124b與第三部分124c,因此盛裝容器110的底部120的最外圍邊緣可具有不同的特徵高度。藉由第一部分124a、第二部分124b以及第三部分124c的設置,可使得盛裝容器110的底部120的設計更加彈性,並可對各位置的液面面積以及外圍部124的斜度或曲度做設計,以達到較佳的殘留液體量的控制以及液體聚集的功能。Please refer to FIG. 5, which shows a cross-sectional view of a liquid container according to a third embodiment of the present invention. As shown in FIG. 5, the peripheral portion 124 of the liquid containing tub 300 of the present embodiment further includes a first portion 124a and a second portion 124b, wherein the first portion 124a and the second portion 124b are not common to each other, as compared with the first embodiment. The plane or having a different slope or curvature, the first portion 124a is in contact with the recess 122 and at least partially surrounds the recess 122, and at least a portion of the first portion 124a is disposed between the second portion 124b and the recess 122. In this embodiment, the first portion 124a includes a horizontal plane, and the second portion 124b is a sloped surface, and the first portion 124a completely surrounds the recess portion 122, but not limited thereto, the first portion 124a may also be a slope or a curved surface, The two parts 124b can also be flat or curved, and the user can design according to the needs. In addition, in the embodiment, the peripheral portion 124 can selectively include a third portion 124c, at least a portion of the second portion 124b is disposed between the first portion 124a and the third portion 124c, and the third portion 124c of the embodiment is The slope, and the slope of the slope of the third portion 124c is different from the slope of the slope of the second portion 124b. For example, the slope of the third portion 124c is inclined with respect to the slope of the second portion 124b, but not The third portion 124c can also be a flat or curved surface, and the bottom portion 120 of the container 110 can additionally have more different portions depending on the requirements. In addition, the peripheral portion 124 of the present embodiment may further include a vertical sidewall 124a', and the first portion 124a and the second portion 124b are in contact with the vertical sidewall 124a', which is illustrated as the first portion 124a is a horizontal plane. Therefore, the feature height is a non-absolute decrease from the highest point 124H of the peripheral portion 124 to the lowest point 124L of the peripheral portion 124. On the other hand, since the peripheral portion 124 of the present embodiment has the first portion 124a, the second portion 124b, and the third portion 124c which are not coplanar or have different inclinations or curvatures, the bottom portion 120 of the container 110 is the most The peripheral edges can have different feature heights. By the arrangement of the first portion 124a, the second portion 124b, and the third portion 124c, the design of the bottom portion 120 of the container 110 can be made more elastic, and the liquid level of each position and the inclination or curvature of the peripheral portion 124 can be made. Designed to achieve better control of residual liquid volume and liquid accumulation.

請參考第6圖,第6圖繪示本發明第四實施例之液體盛裝桶之剖面示意圖。如第6圖所示,相較於第三實施例,本實施例的液體盛裝桶400的外圍部124的第一部分124a與第二部分124b分別和凹陷部122相接,而第二部分124b的至少一部分設於第三部分124c與凹陷部122之間。在本實施例中,第一部分124a為水平的平面,第二部分124b與第三部分124c為斜度不同的斜面,但不以此為限,第二部分124b與第三部分124c也可為曲率不同或曲率中心不同的曲面。Please refer to FIG. 6. FIG. 6 is a schematic cross-sectional view showing a liquid container according to a fourth embodiment of the present invention. As shown in FIG. 6, the first portion 124a and the second portion 124b of the peripheral portion 124 of the liquid containing tub 400 of the present embodiment are respectively in contact with the recess portion 122, and the second portion 124b is formed as compared with the third embodiment. At least a portion is disposed between the third portion 124c and the recess 122. In this embodiment, the first portion 124a is a horizontal plane, and the second portion 124b and the third portion 124c are slopes having different slopes, but not limited thereto, the second portion 124b and the third portion 124c may also be curvatures. Surfaces that differ in shape or center of curvature.

請參考第7圖,第7圖繪示本發明第五實施例之液體盛裝桶之剖面示意圖。如第7圖所示,相較於第一實施例,本實施例的液體盛裝桶500的盛裝容器110的底部120不區分為凹陷部122與外圍部124,而是包括第一底面510,且第一底面510為斜面或曲面,本實施例係以曲面為例,其中盛裝容器110的底部120的最低點120L至盛裝容器110的底部120的最高點120H具有底部落差高度H2,且底部落差高度H2約為盛裝容器110的高度H1的0.2%至10%,但須說明的是,盛裝容器110的底部120的最低點120L與最高點120H並不一定是單一點,亦可為最低或最高的水平平面或邊緣中的其中一點。再者,本實施例盛裝容器110的底部120的最高點120H至最低點120L的特徵高度為連續的遞減。而在本實施例中,設置於盛裝容器110的頂部的開口112在高度方向HD上可與盛裝容器110的底部120的最低點120L對應,亦即位於最低點120L的最上方或至少部分重疊,且盛裝容器110的底部120的最低點120L位於盛裝容器110的底部120的中心,但皆不以此為限,在變化實施例中,盛裝容器110的開口112在高度方向HD上可不與盛裝容器110的底部120的最低點120L對應,亦即兩者互相錯位或部分錯位,盛裝容器110的底部120的最低點120L亦可不設置於底部120的中心。另外,本實施例的盛裝容器110的底部120的最低點120L與外部容器130的底面接觸,而其他相關於外部容器130的內容可參考上述第一實施例的描述,在此不再重複贅述。Please refer to FIG. 7. FIG. 7 is a cross-sectional view showing the liquid container of the fifth embodiment of the present invention. As shown in FIG. 7, the bottom portion 120 of the container 110 of the liquid containing tub 500 of the present embodiment is not divided into the recessed portion 122 and the peripheral portion 124, but includes the first bottom surface 510, and The first bottom surface 510 is a slope or a curved surface. In this embodiment, a curved surface is taken as an example, wherein the lowest point 120L of the bottom portion 120 of the container 110 to the highest point 120H of the bottom portion 120 of the container 110 has a bottom drop height H2 and a bottom drop height. H2 is about 0.2% to 10% of the height H1 of the container 110, but it should be noted that the lowest point 120L and the highest point 120H of the bottom 120 of the container 110 are not necessarily a single point, and may be the lowest or highest. One of the horizontal planes or edges. Moreover, the feature height of the highest point 120H to the lowest point 120L of the bottom portion 120 of the container 110 of the present embodiment is continuously decreasing. In the present embodiment, the opening 112 disposed at the top of the container 110 may correspond to the lowest point 120L of the bottom portion 120 of the container 110 in the height direction HD, that is, at the uppermost portion of the lowest point 120L or at least partially overlap. The bottom point 120 of the bottom portion 120 of the container 110 is located at the center of the bottom portion 120 of the container 110, but is not limited thereto. In a variant embodiment, the opening 112 of the container 110 may not be in the height direction HD. The lowest point 120L of the bottom portion 120 of the 110 corresponds to, that is, the two are offset or partially offset from each other, and the lowest point 120L of the bottom portion 120 of the container 110 may not be disposed at the center of the bottom portion 120. In addition, the lowest point 120L of the bottom portion 120 of the container 110 of the present embodiment is in contact with the bottom surface of the outer container 130. For other contents related to the outer container 130, reference may be made to the description of the first embodiment, and details are not described herein again.

在本實施例中,液體盛裝桶500內的液體在輸出過程中會因為盛裝容器110底部120的走勢而往底部120的最低點120L的方向集中,並且,在本實施例中,當液體的液面低於盛裝容器110的底部120的最高點120H時,其液面的面積會隨著液體高度的下降而減少,因此,若本實施例的液體盛裝桶500與傳統的液體盛裝桶中裝有相同的液體量時,本實施例的液體盛裝桶500內液體的液面高度會高於傳統液體盛裝桶內的液體的液面高度,故當傳統的液體盛裝桶停止液體輸出時,本實施例的液體盛裝桶500仍可繼續進行液體輸出,藉此增加液體LQ的可使用量,換句話說,亦即,在液面高度相同的條件下,本實施例的液體盛裝桶500的殘留液體量會少於與傳統液體盛裝桶的殘留液體量,故本實施例的液體盛裝桶500相較於傳統的液體盛裝桶可減少所殘留的液體量,藉此降低生產成本。另外,若底部落差高度H2太小,例如小於盛裝容器110的高度H1的0.2%,會使得盛裝容器110的底部120對液體的集中效果不佳,若底部落差高度H2太大,例如大於盛裝容器110的高度H1的10%,會大幅影響液體盛裝桶500的容量,進而造成更換液體盛裝桶500的頻率增加而提高生產成本。In the present embodiment, the liquid in the liquid containing tub 500 is concentrated in the direction of the bottom point 120L of the bottom portion 120 due to the tendency of the bottom portion 120 of the container 110 during the output, and, in the present embodiment, as the liquid liquid When the surface is lower than the highest point 120H of the bottom portion 120 of the container 110, the liquid surface area thereof decreases as the liquid height decreases, and therefore, if the liquid container 500 of the present embodiment is installed in a conventional liquid container When the liquid amount is the same, the liquid level of the liquid in the liquid containing barrel 500 of the present embodiment is higher than the liquid level of the liquid in the conventional liquid holding barrel, so when the conventional liquid holding barrel stops the liquid output, the embodiment The liquid holding tub 500 can still continue the liquid output, thereby increasing the usable amount of the liquid LQ, in other words, the residual liquid amount of the liquid containing tub 500 of the present embodiment under the condition that the liquid level is the same. The liquid holding tub 500 of the present embodiment can reduce the amount of residual liquid compared to the conventional liquid holding tub, thereby reducing the production cost. In addition, if the bottom drop height H2 is too small, for example, less than 0.2% of the height H1 of the container 110, the liquid concentration of the bottom portion 120 of the container 110 may be poor, if the bottom drop height H2 is too large, for example, larger than the container. The 10% of the height H1 of 110 greatly affects the capacity of the liquid containing tub 500, which in turn increases the frequency of replacing the liquid holding tub 500 and increases the production cost.

請參考第8圖,第8圖繪示本發明第六實施例之液體盛裝桶之剖面示意圖。如第8圖所示,相較於第五實施例,本實施例的液體盛裝桶600的盛裝容器110的底部120另具有第二底面610,第二底面610與第一底面510相接,且第二底面610為平面、斜面或曲面,而當第二底面610為斜面或曲面時,第二底面610與第一底面510的斜度或曲度不同。在本實施例中,第一底面510與第二底面610為斜度不同的斜面,例如第二底面610的斜面相對於第一底面510的斜面較為傾斜,盛裝容器110的底部120的最低點120L係為第一底面510的最低點,且第一底面510位於第二底面610與盛裝容器110的底部120的最低點120L之間,但皆不以此為限,在變化實施例中,盛裝容器110的底部120的最低點120L可位於第二底面610為與第一底面510的相接處,也就是說,盛裝容器110的底部120的最低點120L同時為第一底面510的最低點以及第二底面610的最低點。藉由第一底面510以及第二底面610的設置,可使得盛裝容器110的底部120的設計更加彈性,並可對各位置的液面面積以及外圍部124的斜度或曲度做設計,以達到較佳的殘留液體量的控制以及液體聚集的功能。除此之外,盛裝容器110的底部120可依據需求而額外具有更多不同的底面。Please refer to FIG. 8. FIG. 8 is a cross-sectional view showing the liquid container of the sixth embodiment of the present invention. As shown in FIG. 8, the bottom portion 120 of the container 110 of the liquid container 600 of the present embodiment further has a second bottom surface 610, and the second bottom surface 610 is in contact with the first bottom surface 510, and The second bottom surface 610 is a flat surface, a sloped surface or a curved surface, and when the second bottom surface 610 is a sloped surface or a curved surface, the second bottom surface 610 is different from the first bottom surface 510 in inclination or curvature. In this embodiment, the first bottom surface 510 and the second bottom surface 610 are inclined surfaces having different slopes. For example, the inclined surface of the second bottom surface 610 is inclined with respect to the inclined surface of the first bottom surface 510, and the lowest point 120L of the bottom portion 120 of the container 110 is received. The first bottom surface 510 is located between the second bottom surface 510 and the lowest point 120L of the bottom portion 120 of the container 110, but not limited thereto. In a variant embodiment, the container is contained. The lowest point 120L of the bottom portion 120 of the 110 may be located at the junction of the second bottom surface 610 with the first bottom surface 510, that is, the lowest point 120L of the bottom portion 120 of the container 110 is simultaneously the lowest point of the first bottom surface 510 and the The lowest point of the second bottom surface 610. By the arrangement of the first bottom surface 510 and the second bottom surface 610, the design of the bottom portion 120 of the container 110 can be made more flexible, and the liquid surface area at each position and the inclination or curvature of the peripheral portion 124 can be designed to Achieving better control of the amount of residual liquid and the function of liquid accumulation. In addition to this, the bottom 120 of the container 110 can additionally have more different bottom surfaces as needed.

綜上所述,本發明的液體盛裝桶藉由盛裝容器的底部的設計,使得液體盛裝桶中的液體在輸出的過程中會因為盛裝容器底部的走勢而往底部的最低點的方向集中,並且,當液體的液面低於盛裝容器的底部的最高點時,其液面的面積會隨著液體高度的下降而減少,因此,與傳統的液體盛裝桶相比,當都裝有相同的液體量時,本發明的液體盛裝桶的液體的液面高度會較高,故在同樣的液面高度下,當傳統的液體盛裝桶停止液體輸出以避免同時輸出氣體時,本發明的液體盛裝桶仍可繼續進行液體輸出而不易發生同時輸出氣體的情況,藉此增加液體的可使用量,也就是說,在液面高度相同的條件下,本實施例的液體盛裝桶的殘留液體量會較少,故藉此減少所殘留的液體量,以降低生產成本。 以上所述僅為本發明之較佳實施例,凡依本發明申請專利範圍所做之均等變化與修飾,皆應屬本發明之涵蓋範圍。In summary, the liquid container of the present invention is designed such that the liquid in the liquid holding tank is concentrated in the direction of the lowest point of the bottom portion due to the movement of the bottom portion of the container during the output process, and When the liquid level of the liquid is lower than the highest point of the bottom of the container, the area of the liquid surface decreases as the liquid level decreases, and therefore, the same liquid is contained as compared with the conventional liquid container. When the amount is reached, the liquid level of the liquid of the liquid container of the present invention is higher, so at the same liquid level, the liquid holding barrel of the present invention is used when the conventional liquid holding barrel stops the liquid output to avoid simultaneous gas output. The liquid output can still be continued without the simultaneous occurrence of gas output, thereby increasing the usable amount of the liquid, that is, the amount of residual liquid of the liquid container of the present embodiment is higher under the same liquid level. Since it is small, the amount of liquid remaining is reduced to reduce the production cost. The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should be within the scope of the present invention.

100、100’、200、300、400、500、600‧‧‧液體盛裝桶
110‧‧‧盛裝容器
112‧‧‧開口
120‧‧‧底部
120H、122H、124H‧‧‧最高點
120L、122L、124L‧‧‧最低點
122‧‧‧凹陷部
124‧‧‧外圍部
124a‧‧‧第一部分
124a’‧‧‧垂直側壁
124b‧‧‧第二部分
124c‧‧‧第三部分
130‧‧‧外部容器
140‧‧‧氣體輸入器
150‧‧‧液體汲取器
150a‧‧‧管口
510‧‧‧第一底面
610‧‧‧第二底面
D‧‧‧間隙
H1‧‧‧高度
H2‧‧‧底部落差高度
HD‧‧‧高度方向
LQ‧‧‧液體
100, 100', 200, 300, 400, 500, 600‧‧‧ liquid containers
110‧‧‧ Containers
112‧‧‧ openings
120‧‧‧ bottom
120H, 122H, 124H‧‧‧ highest point
120L, 122L, 124L‧‧‧ lowest point
122‧‧‧Depression
124‧‧‧External Department
124a‧‧‧Part I
124a'‧‧‧ vertical sidewall
124b‧‧‧Part II
124c‧‧‧Part III
130‧‧‧External container
140‧‧‧ gas input device
150‧‧‧Liquid picker
150a‧‧‧ mouth
510‧‧‧ first bottom surface
610‧‧‧second bottom surface
D‧‧‧ gap
H1‧‧‧ Height
H2‧‧‧ bottom drop height
HD‧‧‧ height direction
LQ‧‧‧Liquid

第1圖繪示本發明第一實施例之液體盛裝桶之剖面示意圖。 第2圖繪示本發明第一實施例之液體盛裝桶於輸出液體時之剖面示意圖。 第3圖繪示本發明第一實施例的變化實施例之液體盛裝桶之剖面示意圖。 第4圖繪示本發明第二實施例之液體盛裝桶之剖面示意圖。 第5圖繪示本發明第三實施例之液體盛裝桶之剖面示意圖。 第6圖繪示本發明第四實施例之液體盛裝桶之剖面示意圖。 第7圖繪示本發明第五實施例之液體盛裝桶之剖面示意圖。 第8圖繪示本發明第六實施例之液體盛裝桶之剖面示意圖。FIG. 1 is a schematic cross-sectional view showing a liquid container according to a first embodiment of the present invention. FIG. 2 is a schematic cross-sectional view showing the liquid container of the first embodiment of the present invention when the liquid is discharged. Fig. 3 is a cross-sectional view showing the liquid containing tub of the modified embodiment of the first embodiment of the present invention. 4 is a cross-sectional view showing a liquid container of a second embodiment of the present invention. Fig. 5 is a cross-sectional view showing the liquid containing tub of the third embodiment of the present invention. Figure 6 is a cross-sectional view showing the liquid containing barrel of the fourth embodiment of the present invention. Fig. 7 is a cross-sectional view showing the liquid containing barrel of the fifth embodiment of the present invention. Figure 8 is a cross-sectional view showing a liquid container of a sixth embodiment of the present invention.

100‧‧‧液體盛裝桶 100‧‧‧Liquid tank

110‧‧‧盛裝容器 110‧‧‧ Containers

112‧‧‧開口 112‧‧‧ openings

120‧‧‧底部 120‧‧‧ bottom

120H、122H、124H‧‧‧最高點 120H, 122H, 124H‧‧‧ highest point

120L、122L、124L‧‧‧最低點 120L, 122L, 124L‧‧‧ lowest point

122‧‧‧凹陷部 122‧‧‧Depression

124‧‧‧外圍部 124‧‧‧External Department

130‧‧‧外部容器 130‧‧‧External container

D‧‧‧間隙 D‧‧‧ gap

HD‧‧‧高度方向 HD‧‧‧ height direction

Claims (14)

一種液體盛裝桶,包括:一盛裝容器,用以盛裝光阻液,該盛裝容器的底部具有:一凹陷部;以及一外圍部,與該凹陷部相接並至少部分環繞該凹陷部,且該外圍部的最低點高於或等高於該凹陷部的最高點,其中,該凹陷部的容量約為該盛裝容器的總容量的0.2%至2%。 A liquid holding bucket comprises: a holding container for containing a photoresist liquid, the bottom of the holding container has: a recessed portion; and a peripheral portion that is in contact with the recessed portion and at least partially surrounds the recessed portion, and the The lowest point of the peripheral portion is higher or higher than the highest point of the depressed portion, wherein the depressed portion has a capacity of about 0.2% to 2% of the total capacity of the containing container. 如請求項1所述之液體盛裝桶,其中該凹陷部的剖面形狀為V字形、U字形或ㄩ字形。 The liquid containing tub according to claim 1, wherein the recessed portion has a V-shaped, U-shaped or U-shaped cross-sectional shape. 如請求項1所述之液體盛裝桶,其中該外圍部至該凹陷部的最低點的高度由該外圍部的最高點至該外圍部的最低點漸進式縮小。 The liquid containing tub according to claim 1, wherein a height of the peripheral portion to the lowest point of the recess portion is gradually reduced from a highest point of the peripheral portion to a lowest point of the peripheral portion. 如請求項1所述之液體盛裝桶,其中該盛裝容器另包括一開口,設置於該盛裝容器的頂部,且該開口與該凹陷部對應。 The liquid container of claim 1, wherein the container further comprises an opening disposed at a top of the container, and the opening corresponds to the recess. 如請求項1所述之液體盛裝桶,其中該外圍部包括一平面、一斜面或一曲面。 The liquid container of claim 1, wherein the peripheral portion comprises a plane, a slope or a curved surface. 如請求項5所述之液體盛裝桶,其中該外圍部另包括一第一部分與一第二部分,該第一部分與該第二部分彼此不共平面或具有不同的斜度或曲度。 The liquid containing bucket of claim 5, wherein the peripheral portion further comprises a first portion and a second portion, the first portion and the second portion being not coplanar with each other or having a different slope or curvature. 如請求項6所述之液體盛裝桶,其中該第一部分與該凹陷部相接,該 第一部分至少部分環繞該凹陷部,且該第一部分的至少部分設於該第二部分與該凹陷部之間。 The liquid containing bucket of claim 6, wherein the first portion is in contact with the recessed portion, The first portion at least partially surrounds the recess, and at least a portion of the first portion is disposed between the second portion and the recess. 如請求項6所述之液體盛裝桶,其中該第一部分與該第二部分分別和該凹陷部相接。 The liquid containing bucket of claim 6, wherein the first portion and the second portion are respectively in contact with the recess. 如請求項6所述之液體盛裝桶,其中該外圍部另包括一垂直側壁,且該第一部分與該第二部分透過該垂直側壁相接。 The liquid containing barrel of claim 6, wherein the peripheral portion further comprises a vertical side wall, and the first portion and the second portion are in contact with the vertical side wall. 如請求項1所述之液體盛裝桶,另包括一外部容器,該盛裝容器設置於該外部容器內,且該凹陷部與該外部容器的底面接觸。 The liquid containing tub of claim 1, further comprising an outer container, the containing container being disposed in the outer container, and the recessed portion being in contact with a bottom surface of the outer container. 一種液體盛裝桶,包括:一盛裝容器,用以盛裝光阻液,該盛裝容器的底部具有一第一底面,且該第一底面為斜面或曲面,其中該盛裝容器的底部的最低點至該盛裝容器的底部的最高點具有一底部落差高度,且該底部落差高度約為該盛裝容器的高度的0.2%至10%。 A liquid holding bucket comprises: a holding container for holding a photoresist liquid, the bottom of the container has a first bottom surface, and the first bottom surface is a slope or a curved surface, wherein the lowest point of the bottom of the container is to The highest point of the bottom of the container has a bottom drop height and the bottom drop height is about 0.2% to 10% of the height of the container. 如請求項11所述之液體盛裝桶,其中該盛裝容器另包括一開口,設置於該盛裝容器的頂部,且該開口與該盛裝容器的底部的最低點對應。 The liquid container of claim 11, wherein the container further comprises an opening disposed at a top of the container and the opening corresponds to a lowest point of the bottom of the container. 如請求項11所述之液體盛裝桶,其中該盛裝容器的底部另具有一第二底面,該第二底面與該第一底面相接,且該第二底面為平面、斜面或曲面,當該第二底面為斜面或曲面時,該第二底面與該第一底面的斜度或曲度不同。 The liquid container of claim 11, wherein the bottom of the container further has a second bottom surface, the second bottom surface is in contact with the first bottom surface, and the second bottom surface is a plane, a slope or a curved surface. When the second bottom surface is a slope or a curved surface, the second bottom surface and the first bottom surface have different slopes or curvatures. 如請求項11所述之液體盛裝桶,另包括一外部容器,該盛裝容器設置於該外部容器內,且該盛裝容器的底部的最低點與該外部容器的底面接觸。 The liquid containing tub of claim 11, further comprising an outer container, the containing container being disposed in the outer container, and the lowest point of the bottom of the containing container being in contact with the bottom surface of the outer container.
TW106120085A 2017-06-16 2017-06-16 Liquid containing barrel TWI614192B (en)

Priority Applications (2)

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TW106120085A TWI614192B (en) 2017-06-16 2017-06-16 Liquid containing barrel
JP2017136678A JP6588057B2 (en) 2017-06-16 2017-07-13 Liquid storage barrel

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