JP6588057B2 - Liquid storage barrel - Google Patents

Description

  The present invention relates to a liquid storage barrel, and more particularly to a liquid storage barrel capable of reducing the amount of residual liquid.

  In general, when chemical solvents (eg, photoresist) required for the production process of industrial products are stored using a dedicated liquid storage barrel, the liquid storage barrel may leak due to liquid corrosion or external force destruction. To prevent. In the manufacturing process of the product, for example, by supplying clean dry air (CDA) and liquid level pressurizing the liquid in the liquid storage barrel, the liquid is delivered from the liquid storage barrel, and then It can be sent to the workbench and the product manufacturing process can be performed. In addition, in order to prevent abnormalities caused by sending air together with the liquid in the delivery of the liquid, when the amount of liquid in the liquid storage barrel decreases to a constant weight, or the liquid level of the liquid in the liquid storage barrel is constant. When lowered to height, the liquid delivery is stopped and replaced with a new liquid containing barrel to continue to provide liquid. However, since the bottom portion of the conventional liquid container barrel is a horizontal plane, a large amount of liquid remains in the liquid container barrel in the above-described delivery method, leading to an increase in production cost.

  It is an object of the present invention to provide a liquid storage barrel that reduces the amount of residual liquid in the liquid storage barrel with a non-horizontal planar design at the bottom of the liquid storage barrel, thereby reducing production costs.

  One embodiment of the present invention provides a liquid storage barrel including a storage container. The storage container is used for storing a liquid, the bottom of the storage container has a recess and an outer periphery, the outer periphery is connected to the recess, and at least a portion surrounds the recess, and the lowest point of the outer periphery is the highest point of the recess Higher or equal, the volume of the recess is from about 0.2% to 2% of the total capacity of the receiving container.

  Another embodiment of the present invention provides a liquid storage barrel including a storage container. The storage container is used for storing liquid, the bottom of the storage container has a first bottom surface, and the first bottom surface is an inclined surface or a curved surface, from the lowest point of the bottom of the storage container to the highest point of the bottom of the storage container It has a bottom drop height, and the bottom drop height is about 0.2% to 10% of the height of the receiving container.

  The liquid storage barrel of the present invention is collected in the direction of the lowest point of the bottom along the shape of the bottom of the storage container in the process of feeding the liquid in the liquid storage barrel by the design of the bottom of the storage container, and When the liquid level becomes lower than the highest point at the bottom of the container, the area of the liquid level decreases as the liquid height decreases. However, the liquid storage barrel according to the present invention is less likely to cause a problem that the liquid is continuously sent out even at the same residual amount and air is sent out at the same time, so that the usable amount of the liquid can be improved. That is, under the condition that the liquid level is the same, the amount of residual liquid in the liquid storage barrel of the present embodiment is relatively small, so that the amount of remaining liquid can be reduced and the production cost can be reduced.

It is a cross-sectional schematic diagram of the liquid storage barrel of the first embodiment of the present invention. It is the cross-sectional schematic when the liquid storage barrel of 1st Example of this invention delivers a liquid. It is a cross-sectional schematic diagram of the liquid storage barrel of the modification of the first embodiment of the present invention. It is the cross-sectional schematic of the liquid storage barrel of 2nd Example of this invention. It is the cross-sectional schematic of the liquid accommodation barrel of the 3rd Example of this invention. It is a section schematic diagram of the liquid storage barrel of the 4th example of the present invention. It is the cross-sectional schematic of the liquid accommodation barrel of 5th Example of this invention. It is the cross-sectional schematic of the liquid accommodation barrel of 6th Example of this invention.

  In order that those skilled in the art can further understand the present invention, the contents of the present invention and the effects to be achieved will be described in detail below based on embodiments of the present invention and with reference to the drawings. Note that all the drawings are simplified schematic diagrams, and only members and combinations related to the present invention are shown in order to more clearly explain the basic structure or implementation method of the present invention. Members and arrangement are more complex. Further, for convenience of explanation, the members shown in the drawings of the present invention are not produced in proportion to the actual implementation quantity, shape, and size, but their detailed proportions can be adjusted according to design needs.

  Referring to FIG. 1, FIG. 1 is a schematic cross-sectional view of a liquid storage barrel according to a first embodiment of the present invention. The liquid storage barrel 100 of the present invention is used to store a liquid such as a chemical solvent. The liquid storage barrel 100 can store a photoresist, but is not limited thereto. As shown in FIG. 1, the liquid storage barrel 100 of the present embodiment includes a storage container 110 for storing a liquid, and the material of the storage container 110 includes a resin or a polymer material, such as high-density polyethylene. Although the container 110 is made of plastic and manufactured by a method such as blow film, foaming, injection molding or die casting, the container 110 can provide corrosion resistance so as to prevent leakage due to liquid corrosion. And a manufacturing method is not restricted to this. In this embodiment, the liquid storage barrel 100 further includes an external container 130. The material of the external container 130 is such that the storage container 110 is installed in the external container 130 and the external container 130 can protect the storage container 110. It may be made of metal such as tin or stainless steel to prevent leakage due to external force destruction, but the material is not limited to this. In this embodiment, an example of a circular barrel is shown as the liquid storage barrel 100, but the liquid storage barrel 100 is not limited to this, and may be another appropriate shape.

の字形であってもよく、本実施例の凹部１２２の断面形状は例えば
（外２）

の字形であるが、これに限らない。その他、外周部１２４は平面、傾斜面または曲面を含むことができるが、本実施例の外周部１２４は一つの曲面のみを含み、かつ凹部１２２を完全に囲んでおり、外周部１２４の最低点１２４Ｌが凹部１２２の最高点１２２Ｈと同じ高さにあるが、これに限らない。なお、本発明では、凹部１２２の最低点１２２Ｌと収容容器１１０の底部１２０の任意の一点との高さ方向ＨＤにおける高さの差を特徴高さと定義し、本実施例において、収容容器１１０の底部１２０の最高点１２０Ｈは収容容器１１０の底部１２０の最外周に位置し、特徴高さは外周部１２４の最高点１２４Ｈから外周部１２４の最低点１２４Ｌへ向けて逓減し続け、つまり、外周部１２４から凹部１２２までの高さは外周部１２４の最高点１２４Ｈから外周部１２４の最低点１２４Ｌ（または凹部１２２の最高点１２２Ｈ）へ向けて次第に減少するが、これに限定されない。別の実施例において、特徴高さは外周部１２４の最高点１２４Ｈから外周部１２４の最低点１２４Ｌまでに非絶対的または非連続的に逓減してもよい。その他、本実施例において、凹部１２２は収容容器１１０の底部１２０の中心に位置し、外周部１２４は一つの曲面のみを含むため、収容容器１１０の底部１２０の最外周の特徴高さが同じになるが、これに限定されることなく、別の実施例において、必要に応じて凹部１２２を底部１２０の異なる位置に設置し、必要に応じて、収容容器１１０の底部１２０の最外周の異なる位置で異なる特徴高さを有するように設計してもよい。 The bottom 120 of the container 110 has a recess 122 and an outer periphery 124, the outer periphery 124 is connected to the recess 122, and at least a portion surrounds the recess 122, and the lowest point 124 </ b> L of the outer periphery 124 is the recess 122. The capacity of the concave portion 122 is 0.2% to 2% of the total capacity of the storage container 110. Specifically, the lowest point 122L of the recess 122 is the lowest point 120L of the bottom 120 of the storage container 110, and the highest point 124H of the outer peripheral part 124 is the highest point 120H of the bottom 120 of the storage container 110. The lowest point 122L of the concave portion 122 and the lowest point 124L of the outer peripheral portion 124 are not limited to a single point, but may be one point on the lowest horizontal plane. For example, in FIG. In other words, one arbitrary point on the horizontal plane at the bottom of the recess 122 is the lowest point 122L of the recess 122. Similarly, the highest point 124H of the outer peripheral part 124 is not limited to a single point, and may be one point on the highest horizontal plane in the outer peripheral part 124 or one point on the peripheral edge of the outer peripheral part 124, and the description thereof is omitted here. . Further, the cross-sectional shape of the recess 122 is V-shaped, U-shaped or (Outside 1)

The cross-sectional shape of the recess 122 of this embodiment is, for example, (Outside 2)

However, this is not a limitation. In addition, the outer peripheral portion 124 can include a flat surface, an inclined surface, or a curved surface. However, the outer peripheral portion 124 of this embodiment includes only one curved surface and completely surrounds the concave portion 122, and the lowest point of the outer peripheral portion 124. Although 124L exists in the same height as the highest point 122H of the recessed part 122, it is not restricted to this. In the present invention, the difference in height in the height direction HD between the lowest point 122L of the recess 122 and an arbitrary point on the bottom 120 of the storage container 110 is defined as a characteristic height. The highest point 120H of the bottom part 120 is located on the outermost periphery of the bottom part 120 of the container 110, and the characteristic height continues to decrease from the highest point 124H of the outer peripheral part 124 toward the lowest point 124L of the outer peripheral part 124. The height from 124 to the concave portion 122 gradually decreases from the highest point 124H of the outer peripheral portion 124 toward the lowest point 124L of the outer peripheral portion 124 (or the highest point 122H of the concave portion 122), but is not limited thereto. In another embodiment, the feature height may be reduced non-absolutely or non-continuously from the highest point 124H of the outer periphery 124 to the lowest point 124L of the outer periphery 124. In addition, in this embodiment, the recess 122 is located at the center of the bottom 120 of the storage container 110 and the outer peripheral part 124 includes only one curved surface, so that the characteristic height of the outermost periphery of the bottom 120 of the storage container 110 is the same. However, the present invention is not limited to this, and in another embodiment, the concave portion 122 is installed at a different position of the bottom portion 120 as necessary, and a different position on the outermost periphery of the bottom portion 120 of the storage container 110 as necessary. It may be designed to have different feature heights.

  Since the container 110 is installed in the outer container 130, the recess 122 may contact the bottom surface of the outer container 130, that is, the lowest point 122 </ b> L of the recess 122 can contact the bottom surface of the outer container 130. In addition, in the present embodiment, since the gap D can be further provided between the storage container 110 and the side wall of the external container 130, the storage container 110 is stably disposed in the external container 130 by the above installation. In addition, the installation of the storage container 110 and the external container 130 can be made relatively flexible. However, the present invention is not limited to this, and in a modified embodiment, the side wall of the storage container 110 and the side wall of the external container 130 may be in close contact with each other. .

  In addition, the storage container 110 may further include an opening 112 that is installed on the top of the storage container 110 and for taking out liquid from the storage container 110. In the present embodiment, the opening 112 of the storage container 110 corresponds to the recess 122 in the height direction HD, that is, the opening 112 may be substantially right above the recess 122, but the present invention is not limited to this. In the embodiment, the opening 112 of the storage container 110 does not correspond to the recess 122 in the height direction HD, and the position may be shifted with respect to the recess 122 or may be partially shifted. Further, the shape of the top of the storage container 110 is not limited at all, and a horizontal flat shape is taken as an example of the top of the storage container 110 of the present embodiment.

  In this embodiment, for example, by supplying clean dry air and liquid level pressurizing the liquid in the liquid storage barrel 100, the liquid is sucked out from the liquid storage barrel 100 and sent out. However, the present invention is not limited to this, and other appropriate methods may be used. Referring to FIG. 2, FIG. 2 is a schematic cross-sectional view when the liquid storage barrel 100 according to the first embodiment of the present invention delivers the liquid. In order to take out the liquid LQ in the liquid storage barrel 100, a liquid pump 150 and a gas injector 140 are installed on the liquid storage barrel 100, and inside the storage container 110 from the opening 112 of the storage container 110 of the liquid storage barrel 100. The end of the liquid pump 150 is located in the recess 122 of the bottom 120 of the container 110, and the end of the liquid pump 150 has a pipe port 150a. It may be lower than the highest point 122H. According to the present embodiment, the gas injector 140 introduces clean dry air into the liquid storage barrel 100 and applies liquid level pressurization to the liquid LQ in the liquid storage barrel 100, so that the inside of the liquid storage barrel 100. The liquid LQ is sent out from the liquid storage barrel 100 through the tube port 150a at the end of the liquid pump 150 in which the liquid LQ is submerged in the liquid LQ, and sent to the work table in the manufacturing process to perform the manufacturing process of the product. It should be noted that there is a certain distance between the end of the liquid pump 150 and the lowest point 122L of the recess 122, thereby obtaining an excellent liquid delivery effect. For example, in the case of a liquid storage barrel having an overall height of 50 centimeters, the certain distance may be from about 0.1 centimeters to 5 centimeters. In addition, since the opening 112 of the storage container 110 of the present embodiment corresponds to the recess 122 in the height direction HD, the liquid pump 150 may be a pipe member extending along the height direction HD. It is not limited.

  For the purpose of preventing the liquid pump 150 from simultaneously sucking and delivering the liquid LQ and gas, and because there is a certain distance between the end of the liquid pump 150 and the lowest point 122L of the recess 122, the liquid storage barrel When the liquid level of the liquid LQ in 100 drops to a certain height, the delivery of the liquid LQ is stopped, and it is inevitable that the liquid LQ remains in the liquid storage barrel 100. In the conventional liquid storage barrel, since the bottom is a horizontal plane, it is inevitable that residual liquid is generated in the liquid storage barrel. For example, if the initial liquid volume in the liquid storage barrel is 20 kilograms and the residual liquid volume is, for example, about 12.5% to 15%, the residual liquid volume is reduced from about 2.5 kilograms to 3 kilograms. Become. On the other hand, in the liquid storage barrel 100 of the present embodiment, the bottom 120 of the storage container 110 of the liquid storage barrel 100 has the concave portion 122 and the outer peripheral portion 124. Therefore, in the process of delivering the liquid, the liquid LQ has the shape of the outer peripheral portion 124 and When the concave portion 122 is provided and collected in the direction of the concave portion 122, and the liquid level of the liquid LQ is lower than the highest point 120H of the bottom 120 of the container 110 in this embodiment, the area of the liquid level is the liquid LQ. Decreases with height drop. Therefore, when the amount of liquid placed in the liquid storage barrel 100 of the present embodiment and the conventional liquid storage barrel is the same, the liquid level of the liquid LQ of the liquid storage barrel 100 of the present embodiment is the liquid level of the conventional liquid storage barrel. Even if the conventional liquid storage barrel stops sending the liquid, the liquid storage barrel 100 of this embodiment continues to send out the liquid, so that the usable amount of the liquid LQ is improved. The In other words, under the condition that the liquid level of the residual liquid is the same, the residual liquid amount in the liquid storage barrel 100 of the present embodiment is smaller than the residual liquid amount in the conventional liquid storage barrel. Compared with a conventional liquid storage barrel, the amount of remaining liquid can be reduced and the production cost can be reduced. When the liquid LQ in the liquid storage barrel 100 of this embodiment is too low to continue to deliver the liquid LQ, most of the remaining liquid LQ remains in the recess 122, that is, in this embodiment. Since the amount of liquid remaining in the liquid storage barrel 100 is substantially equal to the volume of the recess 122, when the volume of the recess 122 is about 0.2% to 2% of the total capacity of the storage container 110, the remaining liquid amount is also For example, when the initial liquid amount in the liquid storage barrel 100 is 20 kilograms, the remaining liquid amount is about 40 milliliters to 400 milliliters. Moreover, when the capacity | capacitance of the recessed part 122 is too small, for example, when it is smaller than 0.2% of the total capacity | capacitance of the storage container 110, the quality of the liquid sucked in late is affected, and when the capacity | capacitance of the recessed part 122 is too large, for example, accommodation When it is larger than 2% of the total capacity of the container 110, the amount of the remaining liquid becomes relatively large, which affects the production cost.

  The liquid storage barrel of the present invention is not limited to the above embodiment. Subsequently, other embodiments or modified embodiments of the present invention will be disclosed. From the viewpoint of simplifying the description and emphasizing the differences between the embodiments or modified embodiments, the same reference numerals are given to the same members in the following. The description of the overlapping parts is omitted.

  Referring to FIG. 3, FIG. 3 is a schematic cross-sectional view of a liquid storage barrel according to a modified embodiment of the first embodiment of the present invention. As shown in FIG. 3, compared to the first embodiment, the cross-sectional shape of the recess 122 of the liquid storage barrel 100 ′ of the present modification is V-shaped, and the opening 112 of the storage container 110 is in the height direction. The HD does not have to correspond to the recess 122. Therefore, when delivering the liquid, the selected liquid pump 150 is bent to place the end of the liquid pump 150 (not shown in FIG. 3) in the recess 122 of the bottom 120 of the container 110. It may be a tube member or a flexible tube member.

  Referring to FIG. 4, FIG. 4 is a schematic cross-sectional view of a liquid storage barrel according to a second embodiment of the present invention. As shown in FIG. 4, as compared with the first embodiment, only a part of the outer peripheral portion 124 of the liquid storage barrel 200 of the present embodiment surrounds the recess 122, and the outer peripheral portion 124 includes only one plane. . In addition, since the outer peripheral part 124 of the liquid storage barrel 200 of this embodiment is a plane, both the lowest point 124L of the outer peripheral part 124 and the highest point 124H of the outer peripheral part 124 are located on the same plane of the outer peripheral part 124, that is, The lowest point 124L and the highest point 124H of the outer peripheral portion 124 may be the same height. Moreover, the cross-sectional shape of the recessed part 122 of the liquid accommodation barrel 200 of a present Example is U shape.

  Referring to FIG. 5, FIG. 5 is a schematic cross-sectional view of a liquid storage barrel according to a third embodiment of the present invention. As shown in FIG. 5, as compared with the first embodiment, the outer peripheral portion 124 of the liquid storage barrel 300 of the present embodiment further includes a first portion 124a and a second portion 124b, and the first portion 124a and the second portion 124b are not coplanar with each other or have different inclination or curvature, the first portion 124a is connected to the recess 122, and at least a portion surrounds the recess 122, and at least a portion of the first portion 124a is the second portion It is installed between 124b and the recess 122. In the present embodiment, the first portion 124a includes a horizontal plane, the second portion 124b is an inclined surface, and the first portion 124a completely surrounds the recess 122. However, the present invention is not limited to this. It may be an inclined surface or a curved surface, and the second portion 124b may be a flat surface or a curved surface, and can be designed as required by the user. Further, in the present embodiment, the outer peripheral portion 124 can selectively include a third portion 124c, and at least a part of the second portion 124b is disposed between the first portion 124a and the third portion 124c, In this embodiment, the third portion 124c is an inclined surface, and the inclination of the inclined surface of the third portion 124c is different from the inclination of the inclined surface of the second portion 124b. For example, the inclined surface of the third portion 124c is the first inclined surface. The inclination may be larger with respect to the inclined surface of the two portions 124b, but is not limited thereto. The third portion 124c is a flat surface or a curved surface, and the bottom portion 120 of the container 110 may include many different portions as necessary. In addition, the outer peripheral portion 124 of the present embodiment further includes a vertical side wall 124a ′, the first portion 124a and the second portion 124b are connected by the vertical side wall 124a ′, and the first portion 124a is a horizontal plane. The height decreases non-absolutely from the highest point 124H of the outer peripheral part 124 to the lowest point 124L of the outer peripheral part 124. In addition, since the outer peripheral portion 124 of the present embodiment is not coplanar with each other or has the first portion 124a, the second portion 124b, and the third portion 124c having different inclination or curvature, The outer periphery has different characteristic heights. Installation of the first part 124a, the second part 124b, and the third part 124c allows the bottom 120 of the container 110 to be designed more flexibly, and the liquid surface area at each position and the inclination of the outer peripheral part 124 or The degree of curvature can be designed, and excellent residual liquid amount control and liquid collection effects can be achieved.

  Referring to FIG. 6, FIG. 6 is a schematic cross-sectional view of a liquid storage barrel according to a fourth embodiment of the present invention. As shown in FIG. 6, as compared with the third embodiment, the first portion 124a and the second portion 124b of the outer peripheral portion 124 of the liquid storage barrel 400 of this embodiment are in contact with the recess 122, respectively, and the second portion 124b. Is provided between the third portion 124 c and the recess 122. In the present embodiment, the first portion 124a is a horizontal plane, and the second portion 124b and the third portion 124c are inclined surfaces having different degrees of inclination. However, the present invention is not limited to this, and the second portion 124b and the third portion are not limited thereto. The curved surface 124c may have different curvatures or different curvature centers.

  Referring to FIG. 7, FIG. 7 is a schematic cross-sectional view of a liquid storage barrel according to a fifth embodiment of the present invention. As shown in FIG. 7, compared with the first embodiment, the bottom 120 of the container 110 of the liquid container barrel 500 of this embodiment is not divided into the concave portion 122 and the outer peripheral portion 124, and includes the first bottom surface 510, and The first bottom surface 510 is an inclined surface or a curved surface. In this embodiment, an example of a curved surface is shown, and the bottom drop height from the lowest point 120L of the bottom 120 of the container 110 to the highest point 120H of the bottom 120 of the container 110 is shown. H2 and the bottom drop height H2 is about 0.2% to 10% of the height H1 of the container 110. In addition, the lowest point 120L and the highest point 120H of the bottom 120 of the container 110 are not limited to a single point, and may be one point on the lowest or highest horizontal plane or the periphery. Furthermore, the characteristic height from the highest point 120H to the lowest point 120L of the bottom 120 of the container 110 of the present embodiment continuously decreases. In the present embodiment, the opening 112 installed at the top of the storage container 110 corresponds to the lowest point 120L of the bottom 120 of the storage container 110 in the height direction HD, that is, located at the top of the lowest point 120L or at least a part thereof. However, the lowest point 120L of the bottom 120 of the container 110 may be positioned at the center of the bottom 120 of the container 110, but is not limited thereto. In the modified embodiment, the opening 112 of the storage container 110 does not correspond to the lowest point 120L of the bottom 120 of the storage container 110 in the height direction HD, that is, the positions thereof are shifted from each other or partially shifted. The lowest point 120 </ b> L of the bottom 120 of the container 110 may not be installed at the center of the bottom 120. In addition, since the lowest point 120L of the bottom 120 of the storage container 110 of this embodiment and the bottom surface of the outer container 130 are in contact with each other, the description of the first embodiment can be referred to for other contents related to the outer container 130. , Omitted here.

  In this embodiment, the liquid in the liquid storage barrel 500 is collected in the direction of the lowest point 120L of the bottom 120 along the shape of the bottom 120 of the storage container 110 in the delivery process, and in this embodiment, the liquid level of the liquid Is lower than the highest point 120H of the bottom 120 of the storage container 110, the area of the liquid surface decreases as the liquid height decreases, so that the liquid storage barrel 500 of the present embodiment and the conventional liquid storage barrel are the same. When the liquid amount is present, the liquid level in the liquid storage barrel 500 of the present embodiment is higher than the liquid level in the conventional liquid storage barrel. Even when the liquid is stopped, the liquid storage barrel 500 of the present embodiment can continuously deliver the liquid, so that the usable amount of the liquid LQ can be improved. In other words, the liquid level height is the same. In the present embodiment, the residual liquid amount of the liquid storage barrel 500 is smaller than the residual liquid amount of the conventional liquid storage barrel. Therefore, the liquid storage barrel 500 of the present embodiment can reduce the residual liquid amount with respect to the conventional liquid storage barrel. Therefore, the production cost can be reduced. In addition, when the bottom head height H2 is too small, for example, when it is smaller than 0.2% of the height H1 of the storage container 110, the bottom 120 of the storage container 110 has a poor effect of collecting liquid, and the bottom head height H2 is reduced. Is too large, for example, when it is larger than 10% of the height H1 of the storage container 110, the capacity of the liquid storage barrel 500 is greatly affected, and the frequency of replacing the liquid storage barrel 500 is increased, thereby increasing the production cost. .

  Referring to FIG. 8, FIG. 8 is a schematic cross-sectional view of a liquid storage barrel according to a sixth embodiment of the present invention. As shown in FIG. 8, when compared with the fifth embodiment, the bottom 120 of the container 110 of the liquid container barrel 600 of the present embodiment further has a second bottom surface 610, and the second bottom surface 610 becomes a first bottom surface 510. When the second bottom surface 610 is a plane, an inclined surface, or a curved surface and the second bottom surface 610 is an inclined surface or a curved surface, the second bottom surface 610 and the first bottom surface 510 have different inclinations or curvatures. In the present embodiment, the first bottom surface 510 and the second bottom surface 610 are inclined surfaces having different inclinations. For example, the inclined surface of the second bottom surface 610 is inclined more than the inclined surface of the first bottom surface 510, and the container 110, the lowest point 120L of the bottom portion 120 is the lowest point of the first bottom surface 510, and the first bottom surface 510 is located between the second bottom surface 610 and the lowest point 120L of the bottom portion 120 of the storage container 110. It is not limited. In a modified embodiment, the lowest point 120L of the bottom 120 of the receiving container 110 may be located at a portion where the second bottom surface 610 and the first bottom surface 510 are connected, that is, the lowest point 120L of the bottom 120 of the receiving container 110 is the first point. It is also the lowest point of the first bottom surface 510 and the lowest point of the second bottom surface 610. By providing the first bottom surface 510 and the second bottom surface 610, flexibility is given to the design of the bottom portion 120 of the container 110, and the liquid surface area at each position and the inclination or curvature of the outer peripheral portion 124 are designed. Thus, it is possible to achieve a preferable residual liquid amount control and liquid collection effect. In addition, the bottom 120 of the receiving container 110 may have many different bottom surfaces as necessary.

  In summary, the liquid storage barrel of the present invention collects the liquid in the liquid storage barrel in the direction of the lowest point of the bottom along the shape of the bottom of the storage container in the delivery process due to the design of the bottom of the storage container. When the liquid level of the liquid becomes lower than the highest point of the bottom of the storage container, the area of the liquid level decreases with the drop in the height of the liquid. Are the same, the liquid level of the liquid storage barrel of the present invention is relatively high. Therefore, even if the conventional liquid storage barrel stops the liquid delivery in order to prevent simultaneous gas delivery at the same liquid level, the liquid storage barrel of the present invention continues to deliver the liquid and simultaneously deliver the gas. This makes it possible to improve the usable amount of liquid, that is, the amount of residual liquid in the liquid storage barrel of this embodiment is relatively small under the same liquid level height. , Reduce the amount of residual liquid and reduce production costs.

  Only the preferred embodiments of the present invention have been shown above, and all changes and modifications made within the scope of the claims are within the scope of the present invention.

100, 100 ′, 200, 300, 400, 500, 600 Liquid storage barrel 110 Storage container 112 Opening 120 Bottom 120H, 122H, 124H Maximum point 120L, 122L, 124L Minimum point 122 Recessed portion 124 Outer peripheral portion 124a First portion 124a ′ Vertical side wall 124b Second portion 124c Third portion 130 External container 140 Gas injector 150 Liquid pump 150a Pipe port 510 First bottom surface 610 Second bottom surface D Clearance H1 Height H2 Bottom head height HD Height direction LQ Liquid

Claims (8)

A photoresist containing barrel,
Including a container for containing the photoresist;
The bottom of the container has a recess, and an outer peripheral portion that is connected to the recess and at least a part of the outer periphery surrounds the recess, and the recess is not positioned at the center of the bottom,
The outer peripheral portion includes a first portion, a second portion, a third portion, and a vertical side wall, the first portion is connected to the recess, the first portion and the second portion are connected by the vertical side wall, and the second portion A portion is disposed between the vertical side wall and the third portion, the second portion and the third portion include inclined surfaces, and the inclination of the inclined surface of the third portion and the inclination of the second portion Unlike the slope of the surface,
An opening is provided at the top of the container, and the opening corresponds to the recess,
The lowest point of the outer periphery is higher or equal to the highest point of the recess,
A photoresist storage barrel, wherein the volume of the recess is about 0.2% to 2% of the total volume of the storage container. The cross-sectional shape of the recess is V-shaped, U-shaped or (Outside 3)

The photoresist receiving barrel according to claim 1, wherein the photoresist receiving barrel is in the shape of   The photoresist storage barrel according to claim 1, wherein a height from the outer peripheral portion to the lowest point of the concave portion gradually decreases from a highest point of the outer peripheral portion toward a lowest point of the outer peripheral portion.   The photoresist housing barrel according to claim 1, wherein the outer peripheral portion includes a flat surface, an inclined surface, or a curved surface. Before SL said second portion and the first portion has a different inclination or curvature, photoresist accommodating barrel of claim 1. The photoresist storage barrel according to claim 5 , wherein each of the first portion and the second portion is connected to the recess.   The photoresist storage barrel according to claim 1, wherein the photoresist storage barrel further includes an external container, the storage container is installed in the external container, and the concave portion is in contact with a bottom surface of the external container. Before Symbol opening corresponds to the lowest point of the front Symbol bottom,
The bottom drop height from the lowest point of the bottom of the storage container to the highest point of the bottom of the storage container, the bottom drop height being about 0.2% to 10% of the height of the storage container The photoresist receiving barrel of claim 1, wherein the lowest point is not located in the center of the bottom.

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