TW201410560A - Composite container with an inner reservoir, and dispensing device - Google Patents

Abstract

Present invention provides a composite container with an inner reservoir which can decrease a residual liquid volume in the inner reservoir and a variation thereof comparing to conventional art, and a dispensing device which has the composite container with an inner reservoir and discharges liquid within the inner reservoir. The composite container with an inner reservoir 100 has a steel container and a resin inner reservoir 110 stored in the steel container. A inlet/outlet portion 111 of the inner reservoir is positioned on the central axis 101 of the composite container with an inner reservoir. The inner reservoir has a concave portion 113 for residual liquid under the inlet/outlet portion on the central axis, which collects and retains the residual liquid therein.

Description

Inner bag composite container and distribution device Field of invention

The present invention relates to an inner bag composite container in which a resin inner container is provided in a steel outer container, and a distribution device having the inner bag composite container and distributing the storage fluid.

Background of the invention

For example, in a steel container for accommodating foods and medicines, in order to prevent corrosion of the food and medicine directly contacting the inner surface of the steel container, the resin inner container for accommodating the food and medicine is stored on the outer side of the steel. In the container, the inner bag composite container 10 is in the form shown in FIG.

In the inner bag composite container 10, the inner container 1 has a body portion 1a made of polyethylene and formed in a bag shape, and an inlet and outlet 1b for allowing the filler to enter and exit is integrally formed with the container body portion at the upper portion thereof. Further, the outer peripheral surface of the inlet and outlet 1b is formed into a male screw shape.

On the other hand, the outer container 2 of the inner bag composite container 10 is formed by a main body 2a made of a cylindrical steel plate and a bottom plate 2b made of a steel plate.

Further, after the inner container 1 is loaded in the storage portion, When the inlet 1b is protruded from the opening formed in the steel sheet top plate 2c, the main body 2a and the top plate 2c are wound, and the inner bag composite container 10 in which the resin inner container 1 is housed in the steel outer container 2 is produced. After the filler is injected into the inner bag composite container 10, the inlet and outlet 1b protruding from the top plate 2c is screwed to the lid body 3 to seal the filler.

Taking the above-mentioned chemical liquid as an example, for example, in the field of semiconductors, for example, a chemical mechanical polishing liquid, a photoresist, a developing liquid, an etching liquid, a cleaning liquid, etc.; in the field of liquid crystal, there are a photoresist, a color photoresist, and a color. Filter materials, etc. Further, it is also necessary to shield light from among these chemical liquids, and since the outer side container 2 having a steel structure has a light-shielding property, the use of the inner bag composite container 10 is also advantageous at this point.

In the semiconductor field and the like, when the chemical liquid is treated, the inner bag composite container 10 is required to have high-definition clarity, not to mention the inner container 1. Further, in order to discharge the chemical liquid, high-definition clarity is required. In the discharge method, the lid body 3 is detached and installed, and the dispenser is discharged using a discharge tube. Among them, there is a pump up method in which a pump is taken up by a pump, or a pressurization method in which a liquid medicine is injected by injecting nitrogen gas into a tank.

Advanced technical literature Patent literature

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2007-45429

Summary of invention

As described above, it is used in the liquid medicine used in the semiconductor field and the like. A bag composite container is widely used as a so-called barrel can with a volume of 20 liters. Further, as described above, since the high-definition clarity is required, the chemical liquid used in the semiconductor field or the like is discharged by pressure using a dispenser, but when the amount of the residual liquid in the can is reduced, the chemical liquid is combined with the pressurized gas. It is discharged, resulting in a so-called bubble phenomenon. Since the drug solution containing such a bubble will cause sputum in the final product, the discharge of the drug solution is stopped before the generation of the bubble. Of course, it is absolutely not allowed because of the above-mentioned high-definition clarity requirements, such as disassembling the dispenser and lowering the inlet and outlet of the inner bag composite container for the discharge of the residual liquid.

On the other hand, the chemical liquid used in the semiconductor field or the like can be said to be, for example, about 10,000 yen/liter, which is very expensive. From the viewpoint of cost, it is necessary to reduce the amount of residual liquid in the inner bag composite container as much as possible.

The present invention has been made in view of such a problem, and an object of the present invention is to provide an inner bag composite container in which an inner container made of resin is housed in an outer container, which can reduce the amount of residual liquid and reduce the amount of the liquid. An uneven inner bag composite container, and a dispensing device having such an inner bag composite container and dispensing liquid.

In order to achieve the above object, the present invention is constituted as follows.

That is, the inner bag composite container according to the first aspect of the present invention includes a resin inner container, a bag shape for accommodating a fluid, and an inlet and outlet portion for the fluid; and an outer container for winding the bottom plate The main body is formed and formed of a steel container that houses the inner container, and a top plate that forms an opening in which the inlet and outlet portions can protrude is opposed to the bottom plate and can be attached to the main body, and the inlet and outlet portions and the outer container in the inner container In the middle The opening is located on a central axis passing through the center of the diameter of the inner bag composite container, and the inner container has a recess for the residual liquid, and the recess for the residual liquid is directly below the inlet and outlet portion on the central axis, from the inner container The bottom surface is formed to protrude outward to collect the residual liquid.

Further, a distribution device according to a second aspect of the present invention includes: the inner bag composite container of the first aspect; and the discharge pipe, which is a pipe body that can be attached to an inlet and outlet portion of the inner container that protrudes from the opening of the outer container. The front end is located in the recess portion for the residual liquid of the inner container, and the fluid contained in the inner container is guided to the outside of the container; and the gas supply mechanism can be installed in the inlet and outlet portion protruding from the opening, and into the inner bag composite container. The gas is supplied and the fluid accommodated in the inner container is discharged to the outside of the container through the discharge pipe.

According to the inner bag composite container according to the first aspect of the present invention, the inlet and outlet portions of the contained fluid are disposed on the central axis of the inner container, and the bottom surface of the inner container is disposed directly below the inlet and outlet portions, and the residual liquid is provided on the central axis. Concave. Further, a dispensing device according to a second aspect of the present invention includes such an inner bag composite container. Therefore, when the discharge pipe is attached to the inlet and outlet of the inner container, and the fluid is discharged from the inner container, the liquid remaining near the discharge is collected in the residual liquid recess, and is discharged from the residual liquid recess through the discharge pipe to the outside of the container. Therefore, the amount of the residual liquid in the inner container depends on the volume of the recess for the residual liquid, and can be reduced as compared with the related art, and the amount of residual liquid can be reduced. Further, in the inner container, the inlet and the outlet and the residual liquid recess are located on the central axis of the container, and the tip end of the discharge pipe attached to the inlet and outlet is often disposed in the recess for liquid residue. This also helps to reduce the unevenness of the amount of residual liquid.

1b‧‧‧ entrance

2‧‧‧Outside container

100, 105, 10‧‧‧ inner bag composite container

101‧‧‧ center axis

102‧‧‧ gap

103‧‧‧Support components

1, 110, 110-2‧‧‧ inside container

111‧‧‧Exports and Exports

112‧‧‧Bottom of the inner container

113, 113-2‧‧‧ Recessed liquid recess

113b‧‧‧立起部

114, 114-2‧‧‧ top surface of the inner container

115‧‧‧Turning

115a‧‧‧ Side wall of the rotation

118, 3‧‧‧ cover

120, 120-2‧‧‧ outer container

121, 2a‧‧‧ subjects

122, 2b‧‧‧ bottom plate

123, 123-2, 2c‧‧‧ top board

123a‧‧‧ openings

123c‧‧‧ outside the roof

124, 125‧‧‧Hands

124a‧‧ Ears

126‧‧‧Care Department

126a‧‧‧上上

200‧‧‧Distribution device

201‧‧‧ Embolism body

201r‧‧‧ Connection ring

201s‧‧ ‧ embolic shell

2012‧‧‧Seal ring

Opening of the joint ring of 2013‧‧

202‧‧‧ gas supply device

203‧‧‧1st joint

204‧‧‧2nd joint

250‧‧‧Draining tube

251‧‧ ‧ suction port

260‧‧‧ Length Adjustment Department

Fig. 1A is a view showing the inner bag composite container in the first embodiment of the present invention, and showing the right half of the cross section.

Figure 1B is a plan view of the inner bag composite container shown in Figure 1A.

Fig. 1C is an enlarged view of a fluid inlet and outlet portion (A portion in Fig. 1A) in the inner bag composite container shown in Fig. 1A.

Fig. 2 is a schematic block diagram showing a distribution device according to a second embodiment of the present invention, which has an inner bag composite container according to a first embodiment of the present invention.

Fig. 3 is a view showing the inner bag composite container when the container is pressurized in the dispensing device shown in Fig. 2;

Fig. 4 is a view showing an example of a length adjusting portion which can be provided in the discharge pipe of the distributing device shown in Fig. 2;

Fig. 5 is a view for explaining the operation of the length adjusting unit shown in Fig. 4;

Fig. 6 is a graph showing changes in the displacement amounts of the bottom plate and the top plate when the inner bag composite container shown in Fig. 1A is pressurized.

Fig. 7 is a view showing a modification of the inner bag composite container shown in Fig. 1A and a form in which a wristband is attached.

Fig. 8A is a plan view showing a top plate of the inner bag composite container in a modification of the inner bag composite container shown in Fig. 1A.

Fig. 8B is a cross-sectional view showing the inner bag composite container shown in Fig. 8A.

Fig. 8C is a view showing the inner container in the inner bag composite container shown in Fig. 8A, and (a) and (b) are a plan view and a cross-sectional view, respectively, of the inner container.

Fig. 9A is a view for explaining a state of the discharge pipe in a state before the pressurization of the dispensing device shown in Fig. 2 in the inner bag composite container shown in Fig. 8A.

Fig. 9B is a view for explaining a state of the discharge pipe in a state in which the inner bag composite container shown in Fig. 8A is placed under pressure in the dispensing device shown in Fig. 2;

Fig. 10 is a view showing a conventional inner bag composite container.

Detailed description of the preferred embodiment

The inner bag composite container according to the first embodiment of the present invention and the distribution device of the second embodiment having the inner bag composite container will be described below with reference to the drawings. In the drawings, the same or similar components are denoted by the same reference numerals. Further, in the following embodiments, the outer container is exemplified by a "barrel" having an internal volume of about 18 or about 20 liters, but is not limited thereto. In other words, the outer container can be a steel container that houses an inner container having an internal volume of about 10 to 60 liters, for example, about 10, 40, or 60 liters.

First Embodiment: In Fig. 1A, an inner bag composite container 100 of the present embodiment is shown. The basic configuration of the inner bag composite container 100 has an inner container 110 and an outer container 120. Here, the outer container 120 is formed using a steel material for a can, for example, a steel can formed by forming a cylindrical body 122 on the cylindrical body 121. The barrel is a barrel made of "steel barrel" as defined in JIS Z 1620 (1995), and its internal volume is about 20 liters. The reason for describing it as "standard" here is based on the following reasons. In other words, in a general can, as shown in FIG. 10, the storage inlet and outlet are disposed at a peripheral portion away from the center of the top plate. On the other hand, the top plate 123 of the outer container 120 is shown on the central axis 101 of the center of the diameter of the inner bag composite container 100 as shown in FIGS. 1A and 1B (sometimes collectively referred to as FIG. 1). The center of the top plate has an opening 123a. At this point, the outer container 120 Different from general barrels. Further, the opening 123a is an opening for projecting the entrance and exit portion of the inner container 110 as will be described below.

Further, at two locations where the diameters of the outer faces of the main body 121 face each other, as shown in Fig. 1A, the ears 124a for the handles 124 are welded, respectively. Thus, by providing the handle 124, the handling of the inner bag composite container 100 becomes easy. In FIG. 1A, the handle 124 is of the type in which the "hanger" is shown across the two ears 124a. However, as shown in FIG. 7, it may be placed at two of the diameter positions of the main body 121, and the outer ring shape is respectively installed. E.g The type of "hands" of the glyph can also be used.

In addition, in FIG. 1A, the outer container 120 is in the form of a "tapered can" having a tapered shape in the main body 121, but the main body 121 may be a straight cylindrical can. Further, in FIG. 1, the top plate 123 is a "plate type" in which the main body 121 can be attached or detached. However, the present invention is not limited thereto, and the same type of "protrusion type" can be used, or the top plate can be fixed to the main body 121. Any form of "rolling type". Furthermore, the shapes of the respective cans are defined in the above JIS. Further, of course, it is also possible to use a combination of these forms in a suitable shape.

The inner container 110 is a bag shape in which a fluid is accommodated, and is a resin container having a fluid inlet and outlet portion 111. The inlet and outlet portion 111 is the opening 123a corresponding to the top plate 123 as described above, and is disposed on the center shaft 101, that is, the center of the top surface 114 of the inner container 110. Further, a male screw is formed on the outer circumference of the inlet and outlet portion 111.

Further, as shown in FIG. 1A, the inner container 110 has a recessed portion 113 for the residual liquid that protrudes outward from the bottom surface 112 of the inner container 110 on the center shaft 101 directly below the inlet and outlet portion 111. The residual liquid recessed portion 113 is a liquid that collects and stores the fluid stored in the inner container 110 near the end of the discharge. Cup-shaped recess. In the present embodiment, one example of the recessed portion 113 for the residual liquid is a diameter having a diameter of about 50 to about 60 mm and a depth of about 15 mm. However, the shape and size are not limited thereto, and may be as desired. The amount of liquid is determined. Further, in the present embodiment, the volume of the residual liquid recessed portion 113 is intended to be less than about 100 cc, for example, about 50 cc to 30 cc.

Further, the shape, size, and target residual liquid amount of the recessed portion 113 for the residual liquid can be applied regardless of the internal volume of the inner container 110.

The inner container 110 having such a configuration is made of high-density polyethylene resin and blow molded into a bag shape, and has a capacity of about 20 liters. The inlet and outlet portion 111 of the top surface 114 and the recessed liquid recess 113 of the bottom surface 112 are also The body portion is formed integrally. Further, the inlet and outlet portion 111 is not formed integrally with one of the main body portions, and may be separately molded and attached to the main body portion by welding or the like.

The formed inner container 110 is housed in the outer container 120, and the opening and closing portion 111 of the inner container 110 protrudes outward from the container through the opening 123a of the top plate 123 of the outer container 120. Further, the protruding inlet and outlet portion 111 can be screwed into the container by the male screw of the inlet and outlet portion 111 or by using the separately formed engaging portion. Further, the male screw of the inlet and outlet portion 111 is screwed to close the lid 118 of the inner container 110 as shown in Fig. 1C.

On the other hand, the inner container 110 has the recessed portion 113 for the residual liquid that protrudes from the bottom surface 112. Therefore, as shown in FIG. 1A, a gap 102 is formed between the bottom surface 112 and the bottom plate 122. Therefore, when the fluid is accommodated in the inner container 110, a support structure for supporting the bottom surface 112 to prevent the load of the fluid and maintaining the shape and function of the recessed portion 113 for the residual liquid can be employed. The support structure is, for example, set in the gap 102 The support member 103 is formed in a ring shape and has a height corresponding to the recess 113 for the residual liquid. Alternatively, instead of additionally providing the support member 103, a shape in which the foot portion protruding toward the air gap 102 and the bottom surface 112 are integrally formed on the bottom surface 112 of the inner container 110 may be employed. In short, the support structure may be such that the shape and function of the residual liquid recessed portion 113 are prevented from being damaged by the load of the stored fluid.

As described above, the inner bag composite container 100 may be modified as follows. The inner bag composite container according to this modification will be described with reference to Figs. 8A to 8C.

The inner bag composite container 105 shown in Figs. 8A to 8C has a basic configuration similar to that of the inner bag composite container 100, and has an inner container 110-2 and an outer container 120-2. Here, the inner container 110-2 is the inner container 110 corresponding to the inner bag composite container 100, and the outer container 120-2 is the outer container 120 corresponding to the inner bag composite container 100. Hereinafter, only the portions of the inner bag composite container 105 that are different from the inner bag composite container 100 will be described. The same or similar constituent portions can be applied to the above description, and the description thereof will be omitted.

The difference in the outer container 120-2 is a top plate 123-2 corresponding to the top plate 123. The top plate 123-2 has a handle 125 and an engaging portion 126 as shown in Figs. 8A and 8B.

The handle 125 is roughly annular, for example The handle of the glyph is attached to the outer surface 123c of the top plate 123-2 by sandwiching the opening 123a in the diametrical position of the top plate 123-2.

In this modification, the engaging portion 126 is formed by recessing the outer surface 123c around the opening 123a to form a substantially square shape, for example, an ascending recess having a depth of about 13 mm. The opening 123a is located at the central portion of the bottom surface of the engaging portion 126, and the card is The bottom surface of the joint portion 126 to the outer surface 123c of the top plate 123-2 is formed with a rising wall 126a.

The engagement portion 126 is engaged with the rotation preventing portion 115 of the inner container 110-2 as described below, and prevents the rotation of the inner container 110-2 in the outer container 120-2. Further, the engaging portion 126 can be used as the reinforcing portion for preventing deformation of the top plate 123-2 as compared with the flat top plate 123.

Moreover, the shape, size, and installation position of the above-described engagement portion 126 are merely examples, and are not limited to the above. In other words, the engaging portion 126 may be configured to prevent the inner container 110-2 from rotating in the outer container 120-2.

Next, the difference in the inner container 110-2 is that the top surface 114-2 of the inner container 110-2 has the rotation preventing portion 115.

In this example, as shown in FIG. 8C, the rotation stop portion 115 is formed in a groove-like recess having a depth of about 10 to 12 mm, which is formed on the top surface 114-2 of the inner container 110-2 across the diameter direction of the inner container 110-2. . An entrance and exit portion 111 of the inner container 110-2 is formed on the bottom surface of the concave stopper portion 115.

The rotation preventing portion 115 is fitted to the engaging portion 126 of the top plate 123-2 as described above, and is actuated together with the engaging portion 126 to prevent the inner container 110-2 from being centered in the outer container 120-2. 101 is centered for rotation. In detail, the side wall 115a of the groove-shaped rotation preventing portion 115 abuts against the rising wall 126a of the engaging portion 126, and the rotation of the inner container 110-2 can be prevented. Further, the rotation of the inner container 110-2 in the outer container 120-2 may occur, for example, when the lid 118 is screwed to the inlet and outlet portion 111 of the inner container 110-2.

The shape, size, and installation position of the rotation stop portion 115 are an example, and are not limited to the above. That is, the rotation stop portion 115 has a correspondence The form of the engaging portion 126 of the top plate 123-2 may be in the form of a shape. For example, the engaging portion 126 and the rotation preventing portion 115 may be concave or convex and may be engaged with each other. When the engaging portion 126 is, for example, concave or convex, the rotation preventing portion 115 may be The convex portion or the concave portion provided on one of the top surfaces of the inner container can be engaged with the engaging portion 126 to prevent the inner container from rotating.

Further, the inner container 110-2 also has a recessed portion 113-2 for the residual liquid corresponding to the residual liquid recess 113 on the bottom surface 112 of the inner container 110. However, the residual liquid recessed portion 113-2 has a slanted rising portion 113b as compared with the residual liquid recessed portion 113 as shown in Fig. 8C. This is the reason for the molding of the inner container 110-2. In addition, the internal volume of the residual liquid recessed portion 113-2 is set to be similar to the case of the residual liquid recessed portion 113.

In the inner bag composite container 105 as described above, the residual liquid recessed portion 113-2 is also provided. As in the case of the inner bag composite container 100, the amount of the residual liquid in the inner container 110-2 can be reduced as compared with the related art. It can also reduce the unevenness of the amount of residual liquid. Further, the inner bag composite container 105 is provided with the engaging portion 126 and the rotation preventing portion 115 to prevent the inner container 110-2 from rotating in the outer container 120-2.

Second Embodiment: Next, a dispensing device for a fluid such as a chemical solution for discharging the stored inner bag composite container 100 from the inner bag composite container 100 will be described.

As shown in Fig. 2, the dispensing device 200 of the present embodiment is a pressurizing dispenser mechanism, and is roughly divided into a cylindrical plug body 201 and a gas supply for supplying pressurized inert gas into the inner container 110. Device 202, And the discharge pipe 250. Further, the plug body 201 and the gas supply device 202 are examples of a gas supply mechanism.

The plug body 201 is attached to the inlet and outlet portion 111 after the cover body 118 is removed, and is, for example, a resin plug, and is composed of a coupling ring 201r, a plug case 201s, and a seal ring 2012. The coupling ring 201r is a cylindrical member having a circular opening at one end, and an engagement female screw that engages with a male screw for a cover formed in the inlet and outlet portion 111 is formed on the inner circumferential surface of the opening. Thereby, the coupling ring 201r of the plug body 201 can be screwed to the male screw of the inlet and outlet portion 111.

Further, the other end of the coupling ring 201r also has a circular opening in which the embolic housing 201s rotatable relative to the coupling ring 201r is fitted. That is, the plug case 201s is a disk-shaped member that forms a flange, and is inserted through one end side opening of the coupling ring 201r, and the flange abuts against the coupling ring 201r, and the other end of the coupling ring 201r is opened. Further, the seal ring 2012 is attached to the joint ring 201r. As described above, the joint ring 201r is screwed to the male screw of the inlet and outlet portion 111, the seal ring 2012 seals the mouth portion of the inlet portion 111, and the above-mentioned convex portion of the plug case 201s The edge is sandwiched between the seal ring 2012 and the coupling ring 201r. Thereby, the sealing ring 2012 also seals the ventilation of the boundary between the coupling ring 201r and the plug housing 201s.

In the plug case 201s, the first joint portion 203 made of synthetic resin and the second joint portion 204 for connecting the gas supply device 202 are screwed into the other end of the discharge pipe 250.

The first joint portion 203 can hold the discharge tube 250 so as to be slidable in the axial direction thereof with respect to the plug body 201 by using a commercially available in-line type bracket, and can be fixed by a bolt.

Here, the discharge pipe 250 is a flexible and resistant resin. For example, it is formed by Teflon (registered trademark), and the liquid suction port 251 located at the front end of one end has a length left and right in the recessed portion 113 for the residual liquid. As described above, since the discharge pipe 250 is slidable by using the first joint portion 203, the liquid suction port 251 can be positioned in the vicinity of the bottom of the residual liquid recess portion 113 with an adjustable length.

As described above, in the inner bag composite container 100, since the inlet and outlet portions 111 and the residual liquid recessed portion 113 are disposed on the same central axis 101, when the coupling ring 201r is screwed to the male screw of the inlet and outlet portion 111, the discharge pipe 250 is linear. When it descends downward, the liquid suction port 251 is arrange|positioned in the recessed part 113 of the residual liquid. As described above, the inner bag composite container 100 can easily and surely dispose the liquid suction port 251 of the discharge pipe 250 in the residual liquid recess 113. Further, since the recessed portion 113 for the residual liquid is not deformed, its volume is a constant value of design. Therefore, the amount of the residual liquid in the inner container 110 can be reduced as compared with the prior art, and the variation in the amount of the residual liquid can be reduced.

The second joint portion 204 is a synthetic resin joint portion that is connected to the L-shaped (elbow-shaped) of the opening 2013 of the joint ring 201r of the plug body 201, and a commercially available elbow-shaped joint joint can be used.

By connecting the hose connected to the gas supply device 202 to the second joint portion 204, the gas supply device 202 can supply a pressurized inert gas such as nitrogen gas to the inside of the inner vessel 110.

By using the distribution device 200 configured as described above, the inside of the inner container 110 is pressurized by the gas supply device 202 to a range of, for example, about 100 kPa to about 150 kPa, and the fluid such as the chemical liquid contained in the inner container 110 can be discharged through the liquid. The tube 250 is pushed out and discharged to the outside of the container. Furthermore, the above range of about 100 kPa to about 150 kPa is equivalent to for fluid discharge. The range of pressurization.

As described above, in order to pressurize the inner container 110 for fluid discharge, as shown in FIG. 3, the bottom surface 112 and the top surface 114 of the inner container 110 are expanded toward the outside of the container in the direction of the central axis 101. Accordingly, the bottom plate 122 and the top plate 123 of the outer container 120 can be pressed and expanded in the same manner. That is, in the central portions of the bottom plate 122 and the top plate 123, the bottom plate 122 and the top plate 123 have a displacement amount of 10 mm toward the outside of the container by the above-described pressure discharge for about 100 kPa to about 150 kPa, that is, the bottom plate 122. And the deformation amount of about 3-4% of the diameter of the top plate 123. In detail, the bottom plate 122 produces a displacement of about 9 mm to about 14 mm, and the top plate 123 produces a displacement of about 11 mm to about 14 mm. Fig. 6 is a view showing changes in the displacement amounts (expansion amounts) of the bottom plate 122 and the top plate 123 when the inner container 110 of the inner bag composite container 100 is pressurized. Further, in the present embodiment, for example, 0.5 mm is used as the thickness of the bottom plate 122 and the top plate 123.

Thus, the bottom surface 112 and the top surface 114 of the inner container 110, and the bottom plate 122 and the top plate 123 are expanded and deformed, and when the fluid discharge is completed, the fluid existing on the bottom surface 112 of the inner container 110 can flow into the recessed liquid portion 113 side. Therefore, the reduction in the amount of the residual liquid can be further contributed.

On the other hand, the bottom plate 122 and the top plate 123 are respectively inflated, and as described above, the position of the liquid suction port 251 of the discharge pipe 250 whose length is adjusted by the first joint portion 203 is changed to the distance from the bottom of the residual liquid recess portion 113. Big. In order to absorb such a variation in distance, the discharge pipe 250 may be slightly bent except that the front end of the discharge pipe 250 is disposed in the recessed portion 113 for the residual liquid. Alternatively, instead of bending the discharge pipe 250, for example, as shown in FIG. 4, at the end of the discharge pipe 250, the installation may be performed on the discharge pipe 250 in response to deformation of the bottom plate and the top plate. A length adjustment unit 260 that expands and contracts in the axial direction. As shown in FIG. 5, when the front end of the length adjustment unit 260 is brought into contact with the bottom of the residual liquid recess 113, as shown by the two-dot chain line, even if the inner container 110 is inflated, the front end of the length adjustment unit 260 is also The state of being in contact with the bottom of the recessed portion 113 for the residual liquid can be maintained. Therefore, even when the length adjustment unit 260 is provided, the amount of the residual liquid can be surely reduced as compared with the related art, and the unevenness can be reduced. Further, the length adjusting portion 260 is not limited to the one described, and may be a form having a function of adjusting the length of the discharge pipe 250 in response to deformation of the bottom plate 122 and the top plate 123.

Hereinafter, the above-described discharge pipe 250 will be described in detail with reference to the inner bag composite container 105 shown in Figs. 8A to 8C.

9A and 9B show the shape of the discharge pipe 250 before and during discharge of the liquid in the inner container 110-2.

As described above, the discharge pipe 250 is made of a resin which is flexible and resistant to liquid, such as Teflon (registered trademark), and is formed into a linear shape by extrusion molding, and has no tendency to curl, that is, a straight tube type. . Such a discharge pipe 250 has flexibility and also has a linear shape to the original shape. Further, for example, the discharge pipe 250 of this example has an outer diameter of 8 mm and an inner diameter of 6 mm.

As shown in FIG. 9A, the discharge pipe 250 is disposed in the inner bag composite container before the liquid in the inner container 110-2 is discharged, that is, before the inner container 110-2 is pressurized, and the length is adjusted to be slightly curved. 105. An example of the length of the discharge pipe 250 will be described. In the inner bag composite container 105 before pressurization, when the discharge pipe 250 installed in the inlet/outlet portion 111 of the inner container 110-2 is linearly arranged to the bottom surface of the residual liquid recessed portion 113-2, the length is L1. This length L1 plus a length L2 of, for example, 15 mm is set as the length of the discharge pipe 250. When the discharge pipe 250 has the length L2, in the inner bag composite container 105 before pressurization, the discharge pipe 250 is slightly bent as shown in Fig. 9A.

Next, as shown in Fig. 9B, when the liquid in the inner container 110-2 is discharged, that is, when the inner container 110-2 is pressurized in the pressure range for fluid discharge, as described, the bottom surface of the inner container 110-2. The top surface 114-2 and the bottom plate 122 and the top plate 123-2 of the outer container 120-2 are expanded and deformed, and the axial length of the inner bag composite container 105 extends. In this way, the inner bag composite container 105 is elongated in the axial direction, and the discharge tube 250 having the length L2 and deflected is deflected by the restoring force, and returns to the original straight line shape. In this returning state, the liquid suction port 251 located at the front end of the discharge pipe 250 is located in the residual liquid recessed portion 113-2, and is non-contact, that is, close to the bottom surface of the residual liquid recessed portion 113-2.

In other words, the length L2 of the discharge pipe 250 can be said to be that when the inner container is pressurized in the pressure range for discharging the fluid, the liquid suction port 251 at the front end of the discharge pipe 250 is located in the recess for the residual liquid of the inner container, and It is non-contact, that is, close to the length of the recessed portion 113-2.

In addition, an example of the fluid contained in the inner containers 110 and 110-2 includes a chemical liquid which requires high-definition purity for processing, and corresponds to at least one of a semiconductor field and a liquid crystal field. Liquid medicine. As described above, the chemical liquid in the field of semiconductors is, for example, a chemical mechanical polishing liquid, a photoresist, a developing liquid, an etching liquid, a cleaning liquid, etc., and is a photoresist, a color photoresist, a color filter, etc. in the liquid crystal field. .

Also, as noted at the beginning of this column "Forms for Implementing Inventions" The outer container 120 can be used in various amounts. However, the content described in the second embodiment described above is also applicable to the deformation of the bottom plate 122 and the top plate 123 in the form of the various outer containers 120.

Further, the inner bag composite container of the first aspect includes: a resin-made inner container which is a bag shape for accommodating a fluid, and has an inlet and outlet portion for the fluid; and an outer container which is formed by winding the bottom plate in the cylindrical body And forming a steel container for accommodating the inner container, a top plate forming an opening in which the inlet and outlet portions are protruded, and the bottom plate facing the bottom plate, and being attached to the main body, the opening in the inner container and the opening in the outer container; The inner container has a recessed portion for the center of the diameter of the inner bag composite container, and the inner container has a recess for the residual liquid, and the recessed portion for the residual liquid is directly below the inlet and outlet portion on the central axis, and is outwardly from the bottom surface of the inner container. Protruded and shaped to collect the residual liquid.

Further, in the second aspect, in the inner bag composite container according to the aspect A, the bottom plate and the top plate are pressurized by the discharge fluid in the inner container, and have a bottom plate and a top plate on the outer side of the container. A deformation of about 3 to 4% of the diameter.

Further, in the C-th aspect, the inner bag composite container of the first aspect or the second aspect may further include a gap corresponding to the residual liquid between the bottom plate and the bottom surface of the inner container. A support member for the height of the recess.

Further, in the D-th aspect, the inner container may have a handle on the outer surface of the main body in the inner bag composite container according to any one of the first aspect, the second aspect, and the second aspect.

Further, in the E-th aspect, in the inner bag composite container of the D-th aspect, the handle may be a substantially annular handle attached to a diameter position of the outer surface of the main body.

Further, in the F-th aspect, the inner container may have a handle on the outer surface of the top plate in any one of the first aspect, the second aspect, and the second aspect. .

Further, in the G-th aspect, the inner bag composite container may be configured in any one of the above-described A-th aspect, the B-th aspect, the C-th aspect, and the F-th aspect. The outer container has an engaging portion on the top plate, and the inner container has a rotation preventing portion on a top surface of the inner container, and the rotation preventing portion is fitted to the engaging portion and is prevented from being inside the outer container centering on the central axis Rotation of the inner container.

Further, the apparatus of the H-th aspect is characterized in that it has an inner bag composite container of any one of the above-described Ath aspect to the Gth aspect; and the discharge pipe can be installed to protrude from the opening of the outer container. a tube body at an inlet and outlet portion of the inner container, wherein a tip end thereof is located in a recess portion for a residual liquid of the inner container, and a fluid stored in the inner container is guided to the outside of the container; and a gas supply mechanism is attached to the above-mentioned opening protruding from the opening In the inlet and outlet portion, gas is supplied into the inner bag composite container, and the fluid accommodated in the inner container is discharged to the outside of the container through the discharge pipe.

Further, in the Jth aspect, in the distribution device of the H-th aspect, the discharge pipe may have a length adjustment unit that is generated by pressurization in a container of the gas supply mechanism. The bottom plate and the top plate of the inner bag composite container are deformed to be stretchable.

Further, in the Kth aspect, the apparatus according to the second aspect of the invention may be characterized in that the discharge tube has flexibility and shape restorability and has a length which is performed by the gas supply mechanism. Before the pressurization in the container, by flexure, on the other hand, in the state in which the bottom plate and the top plate are deformed to the outside of the inner bag composite container by the pressurization in the container by the gas supply mechanism, the shape is changed by the shape The restorability extends linearly from the inlet and outlet portion of the inner container to the recess portion for the residual liquid.

The present invention is applicable to an inner bag composite container in which a resin inner container is provided in a steel outer container, and a distribution device having the inner bag composite container and distributing and storing a fluid.

100‧‧‧Inner bag composite container

101‧‧‧ center axis

102‧‧‧ gap

103‧‧‧Support components

110‧‧‧ inside container

111‧‧‧Exports and Exports

112‧‧‧Bottom of the inner container

113‧‧‧Recessed liquid recess

114‧‧‧Top surface of the inner container

118‧‧‧ Cover

120‧‧‧Outside container

121‧‧‧ Subject

122‧‧‧floor

123‧‧‧ top board

123a‧‧‧ openings

124‧‧‧Handles

124a‧‧ Ears

Claims (10)

An inner bag composite container comprising: an inner container made of resin, a bag shape for accommodating a fluid, and an inlet and outlet portion for the fluid; and an outer container, the bottom plate is formed in the cylindrical body to accommodate the inner side a steel container of the container is formed, and a top plate forming an opening in which the inlet and outlet portions are protruded is opposed to the bottom plate and attached to the main body, and the opening in the inlet and outlet portion and the outer container in the inner container is located therein The inner container has a recess for the residual liquid on the center axis of the center of the bag composite container, and the recessed portion for the residual liquid is formed on the central axis directly below the inlet and outlet portion, and protrudes outward from the bottom surface of the inner container. To collect and store the residual liquid. The inner bag composite container of claim 1, wherein the bottom plate and the top plate are pressurized by the discharge fluid in the inner bag composite container, and the outer side of the container has a deformation of about 3-4% of the diameter of the bottom plate and the top plate. the amount. The inner bag composite container according to claim 1, wherein the gap between the bottom plate and the bottom surface of the inner container further includes a support member having a height corresponding to the recess portion for the residual liquid. The inner bag composite container of claim 1, wherein the outer container has a handle outside the body. The inner bag composite container of claim 4, wherein the handles are substantially annular handles respectively mounted at diameter positions outside the body. The inner bag composite container of claim 1, wherein the outer container is as described above There is a handle on the outside of the top plate. The inner bag composite container according to claim 1, wherein the outer container has an engaging portion on the top plate, and the inner container has a rotation preventing portion on a top surface of the inner container, and the rotation preventing portion is fitted to the engaging portion and prevented The rotation of the inner container in the outer container is centered on the central axis. A dispensing device, comprising: the inner bag composite container according to any one of claims 1 to 7, wherein the discharge pipe is a pipe body that can be installed at an inlet and outlet portion of the inner container protruding from the opening of the outer container, The front end is located in the recess portion for the residual liquid of the inner container, and the fluid contained in the inner container is guided to the outside of the container; and the gas supply mechanism can be installed in the inlet and outlet portion protruding from the opening, and into the inner bag composite container. The gas is supplied and the fluid accommodated in the inner container is discharged to the outside of the container through the discharge pipe. The dispensing device of claim 8, wherein the discharge tube has a length adjusting portion that deforms the bottom plate and the top plate of the outer side of the inner bag composite container due to pressurization in the container of the gas supply mechanism And scalable. The dispensing device of claim 8, wherein the discharge tube has flexibility and shape restorability and has a length which is flexibly flexed before being pressurized in the container by the gas supply mechanism, and On the other hand, in a state where the bottom plate and the top plate are deformed to the outside of the inner bag composite container by the pressurization in the container by the gas supply means, the shape restorability is from the inlet and outlet portion of the inner container to the recessed portion for the residual liquid. Extends in a straight line.