JP6193106B2 - Distributor for inner bag composite container and method for manufacturing the same - Google Patents

Description

  The present invention relates to a distribution device for an inner bag composite container that distributes a storage fluid stored in an inner bag composite container in which a resin inner container is provided in a steel outer container, and a method for manufacturing the distribution device.

  For example, in a steel container for storing food and medicine, the inside of the resin container for storing the food and medicine is used to prevent the occurrence of corrosion caused by the food and medicine directly contacting the inner surface of the steel container. The form of the inner bag composite container 10 as shown in FIG. 10 in which the container is housed in a steel outer container is employed.

  In the inner bag composite container 10, the inner container 1 has a main body portion 1 a made of polyethylene and formed in a bag shape, and an inlet / outlet 1 b for taking in and out the filling is formed integrally with the container main body portion. ing. In addition, the outer peripheral surface of the entrance 1b is shape | molded by the external thread shape.

On the other hand, the outer container 2 of the inner bag composite container 10 is wound with a body 2a made of a cylindrical steel plate and a ground plate 2b made of a steel plate to form a storage portion.
And after loading the said inner container 1 in the said accommodating part, in the state which made the said entrance 1b protrude from the opening formed in the steel plate top plate 2c, the fuselage | body 2a and the top plate 2c are wound up, and steel The inner bag composite container 10 in which the resin inner container 1 is housed in the outer container 2 is manufactured. After injecting the filling material into the inner bag composite container 10, the cap 3 is screwed into the entrance / exit 1 b protruding from the top plate 2 c to seal the filling material.

  Examples of the chemical solution include, for example, a CMP slurry, a photoresist, a developer, an etching solution, and a cleaning solution in the semiconductor field, and a photoresist, a color resist, and a color filter material in the liquid crystal field. In addition, some of these chemical solutions require light shielding, and the outer container 2 made of steel has light shielding properties. Therefore, the use of the inner bag composite container 10 is advantageous also in this respect.

  When handling chemicals in the semiconductor field or the like, high cleanliness is required for the inner bag composite container 10 as well as the inner container 1. Further, even when the chemical solution is discharged, high cleanliness is required. As a discharging method, a method of discharging using a dispenser having the discharging tube attached with the cap 3 removed is employed. This includes a pump-up system that sucks up the chemical liquid with a pump, or a pressurization system that pushes out the chemical liquid by injecting nitrogen gas or the like into the can and pressurizing it.

JP 2007-45429 A

As the above-described inner bag composite container for chemical solution used in the semiconductor field or the like, a container using a so-called pail can having a capacity of 20 liters is widely used. Also, as described above, due to high cleanliness requirements, chemicals used in the semiconductor field and the like are discharged by a pressurization method using a dispenser, but when the amount of residual liquid in the pail can decreases, the chemical liquid is pressurized. A so-called bubble biting phenomenon occurs that is exhausted together with the gas. Since the chemical solution containing such bubbles causes defects in the final product, the discharge of the chemical solution is stopped before the bubble biting occurs. Of course, from the above high cleanliness requirement, for example, removing the dispenser and discharging the remaining liquid with the inlet / outlet of the inner bag composite container down is not permitted.
On the other hand, chemicals used in the semiconductor field and the like are very expensive, for example, 10,000 yen / liter, and it is necessary to reduce the amount of residual liquid in the inner bag composite container as much as possible from the cost aspect. is there.

  The present invention has been made to solve such problems, and is an inner bag composite container in which an inner container made of resin is accommodated in an outer container, and the amount of residual liquid can be reduced as compared with the prior art. It is an object of the present invention to provide a dispensing device for an inner bag composite container that is mounted on an inner bag composite container that can reduce the variation of the inner bag and distributes the fluid contained in the inner bag composite container, and a method for manufacturing the distribution device.

In order to achieve the above object, the present invention is configured as follows.
That is, the inner bag composite container distribution device according to the first aspect of the present invention is an inner bag composite container distribution device attached to the inner bag composite container,
The inner bag composite container is formed by a pail can having a nominal capacity of 10 to 60 liters,
An outer container made of a resin-shaped inner container having a fluid inlet / outlet portion and a steel container that is formed by winding a base plate around a cylindrical body and storing the inner container. And an outer container on which the top plate formed with an opening through which the entrance / exit portion can project is attached to the body facing the base plate,
The entrance / exit part in the inner container and the opening in the outer container are located on a central axis passing through the center of the diameter of the inner bag composite container,
The inner container has a residual liquid recess for collecting and storing a residual liquid that is molded and protrudes outward from the bottom surface of the inner container on the central axis, directly below the entrance / exit part,
The inner bag composite container dispensing device is
A tube that can be attached to the inlet / outlet part of the inner container protruding from the opening of the outer container, the tip of which is located in the residual liquid recess of the inner container, and guides the fluid stored in the inner container to the outside of the container A resin discharge tube;
A gas supply mechanism that is attachable to the inlet / outlet portion protruding from the opening, and supplies the fluid stored in the inner container into the inner bag composite container and discharges the fluid to the outside of the container through the discharge tube; Prepared,
The discharge tube has flexibility and shape restoration, and bends due to flexibility before pressurization in the container by the gas supply mechanism. On the other hand, the outer side of the inner bag composite container by pressurization in the container by the gas supply mechanism A tube having a length extending linearly from the inlet / outlet portion of the inner container to the remaining liquid recess portion due to shape restoration in a state where the base plate and the top plate are deformed, and having an outer diameter of 10 mm and a wall thickness of 1 mm It is characterized by being.

Moreover, the manufacturing method of the dispensing device for inner bag composite containers in the second aspect of the present invention is the manufacturing method of the dispensing device for inner bag composite containers according to the first aspect,
In the inner bag composite container before pressurization in the container by the gas supply mechanism, a step of obtaining a basic length when the discharge tube attached to the inlet / outlet portion of the inner container is linearly arranged to the bottom surface of the recess for residual liquid;
Based on the relationship between the pressurized pressure and the amount of deformation of the container, a step of obtaining the total deformation amount of the base plate and the top plate corresponding to the pressurized pressure of the container,
And adding the obtained total deformation amount to the basic length to determine a set length of the discharge tube.

The inner bag composite container to which the inner bag composite container distribution device according to the first aspect of the present invention is attached has an inlet / outlet portion of the fluid to be stored on the central axis of the inner container, and the inlet / outlet portion of the inner container is disposed on the bottom surface of the inner container. A concave portion for residual liquid is provided directly on the central axis. When the inner bag composite container dispensing device is attached to the inner bag composite container having such a configuration and the fluid is discharged from the inner container, the residual liquid near the end of the discharge is collected in the residual liquid recess, The liquid is discharged out of the container through the discharge tube from the liquid recess. Therefore, the amount of the remaining liquid in the inner container depends on the volume of the recessed portion for the remaining liquid, so that it can be reduced as compared with the conventional case, and variation in the remaining liquid amount can also be reduced. Further, in the inner container, the inlet / outlet portion and the residual liquid recess are located on the central axis of the container, so that the tip of the discharge tube attached to the inlet / outlet portion can always be disposed in the residual liquid recess. This also contributes to the reduction in variation in the amount of residual liquid.
Furthermore, since the discharge tube having a diameter of 10 mm and a thickness of 1 mm is used, it has sufficient rigidity. Therefore, even when the inner bag composite container is deformed by the pressurization in the container, the tip can be disposed in the remaining liquid recess. As a result, the amount of remaining liquid in the inner container can be reduced as compared with the conventional case, and variation in the remaining liquid amount can also be reduced.

  Further, according to the manufacturing method of the inner bag composite container dispensing device in the second aspect of the present invention, since the set length of the discharge tube is determined, the discharge tube remains in the pressurized state of the container when the stored liquid is discharged. The liquid suction port can be reliably positioned in the liquid recess. Accordingly, it is possible to minimize the amount of the stored liquid in the residual liquid recess.

It is a figure which shows schematic structure of the distribution apparatus for inner bag composite containers in embodiment of this invention. It is a top view of the plug main body shown to FIG. 1A. It is a top view of the exclusive wrench for plug bodies shown to FIG. 1A. It is a figure which shows the inner bag composite container to which the distribution apparatus for inner bag composite containers shown to FIG. 1A is attached, and is the figure which showed the right half in the cross section. It is a top view of the inner bag composite container shown to FIG. 2A. It is an enlarged view of the fluid inlet / outlet part (in FIG. 2A, A part) in the inner bag composite container shown in FIG. 2A. It is a figure which shows an inner bag composite container when the inside of a container is pressurized in the distribution apparatus shown to FIG. 1A. It is a figure which shows an example of the length adjustment part which may be provided in the discharge tube with which the distribution apparatus shown to FIG. 1A is equipped. It is a figure for demonstrating operation | movement of the length adjustment part shown in FIG. It is a graph which shows the change of the total displacement amount of a base plate and a top plate when the inner bag composite container shown to FIG. 2A is pressurized. It is a figure which is a modification of the inner bag composite container shown to FIG. 2A, and shows the form which attached the hand ring. It is a top view of the top plate of the inner bag composite container in the modification of the inner bag composite container shown to FIG. 2A. It is sectional drawing of the inner bag composite container shown to FIG. 8A. It is a figure which shows the inner side container in the inner bag composite container shown to FIG. 8A, (a) shows the top view of an inner side container, (b) shows sectional drawing, respectively. It is a figure explaining the state of a discharge tube in the state before the pressurization which equipped the inner bag composite container shown to FIG. 8A with the distribution apparatus shown to FIG. 1A. It is a figure explaining the state of a discharge tube in the state under pressure which equipped the inner bag composite container shown to FIG. 8A with the distribution apparatus shown to FIG. 1A. It is a figure which shows the conventional inner bag composite container.

  A distribution device for an inner bag composite container, which is an embodiment of the present invention, and a method for manufacturing the distribution device will be described below with reference to the drawings. In each figure, the same or similar components are denoted by the same reference numerals. In the following embodiments, a “pail can” having an inner volume of about 18 or about 20 liters is taken as an example of the outer container, but the present invention is not limited to this. That is, as the outer container, a steel container that accommodates an inner container having an inner volume of about 10 to 60 liters, for example, about 10, 40, or 60 liters can be used. Here, a pail can may be used as the steel container.

First, the inner bag composite container in which the inner bag composite container dispensing device in the present embodiment is used will be described.
FIG. 2A shows the inner bag composite container 100 in the present embodiment. The inner bag composite container 100 includes an inner container 110 and an outer container 120 as a basic configuration. Here, the outer container 120 is formed of a steel pail can, which is made of steel obtained by winding a base plate 122 around a cylindrical body 121 using a steel material for cans. This pail can conforms to the “steel pail” defined in JIS Z 1620 (1995), and its internal volume is about 20 liters. Here, “compliance” is described for the following reason. That is, in a normal pail can, as shown in FIG. 10, the entrance / exit for stored goods is arrange | positioned in the peripheral part remove | deviated from the center of the top plate. On the other hand, the top plate 123 of the outer container 120 is a center that passes through the center of the diameter of the inner bag composite container 100 as shown in FIGS. 2A and 2B (both figures may be collectively referred to as FIG. 2). An opening 123a is provided on the shaft 101, that is, in the center of the top plate. In this respect, the outer container 120 is different from a normal pail. The opening 123a is an opening for projecting the entrance / exit part of the inner container 110 as described below.

  Further, as shown in FIG. 2A, ears 124a for the handle 124 are welded to two opposite positions of the diameter position on the outer surface of the body 121, respectively. By providing the handle 124 in this way, the inner bag composite container 100 can be easily carried. In FIG. 2A, a type in which “vines” are passed to both ears 124a is illustrated as the handle 124. As shown in FIG. It may be of a “hand ring” type with a handle attached.

  In FIG. 2A, the outer container 120 is illustrated as a “tapered pail” in which the body 121 is tapered, but may be a “straight pail” in which the body 121 is straight. Further, in FIG. 2A, the top plate 123 is illustrated as a “band type” that can be attached to and detached from the fuselage 121, but is not limited thereto. Any of the "winding type" can be adopted. Each of these pail can forms is defined in the above JIS. Of course, a pail can in which these forms are appropriately combined can also be used.

  The inner container 110 has a bag shape for containing a fluid, and is a resin container having a fluid inlet / outlet portion 111. Here, the entrance / exit portion 111 is arranged on the central axis 101, that is, at the center of the top surface 114 of the inner container 110, corresponding to the opening 123 a of the top plate 123 as described above. Moreover, the outer periphery of the entrance / exit part 111 has shape | molded the external thread.

Further, as shown in FIG. 2A, the inner container 110 has a residual liquid recess 113 that protrudes outward from the bottom surface 112 of the inner container 110 immediately below the inlet / outlet part 111 on the central axis 101. The remaining liquid recess 113 is a cup-shaped recess that collects and stores the remaining liquid near the end of the discharge of the fluid stored in the inner container 110. In the present embodiment, the residual liquid recess 113 has a diameter of about 50 to about 60 mm and a depth of about 15 mm as an example. Of course, the shape and size are not limited to this. And can be determined according to the desired residual liquid amount. In the present embodiment, the target volume of the residual liquid recess 113 is less than 100 cc, for example, about 50 cc to 30 cc.
Note that the shape, size, and target residual liquid amount in the residual liquid recess 113 described above can be applied regardless of the internal volume of the inner container 110.

  The inner container 110 having such a configuration is made of high-density polyethylene resin and blow-molded into a bag shape, and has a capacity of about 20 liters. The inlet / outlet portion 111 of the top surface 114 and the remaining liquid recess 113 of the bottom surface 112 are provided. Is also formed integrally with the main body. In addition, the entrance / exit part 111 may be separately molded and attached to the main body part by fusion or the like instead of being integrally formed with the main body part.

  The molded inner container 110 is accommodated in the outer container 120, and the entrance / exit part 111 of the inner container 110 protrudes outside the container through the opening 123 a of the top plate 123 of the outer container 120. Note that the retaining ring may be screwed by using the male screw of the inlet / outlet portion 111 or by using a separately formed engagement portion so that the protruded inlet / outlet portion 111 does not sink into the container. Further, as shown in FIG. 2C, a cap 118 that seals the inner container 110 is screwed into the male screw of the entrance / exit part 111.

  On the other hand, the inner container 110 has a residual liquid recess 113 protruding from the bottom surface 112 thereof, and therefore, a gap 102 is formed between the bottom surface 112 and the ground plate 122 as shown in FIG. 2A. Therefore, when the fluid is stored in the inner container 110, it is possible to adopt a support structure for supporting the bottom surface 112 from the fluid load and maintaining the shape and function of the remaining liquid recess 113. As this support structure, for example, a support member 103 having a ring shape and a height corresponding to the remaining liquid recess 113 can be provided in the gap 102. Alternatively, instead of providing a separate support member 103, a leg that protrudes into the gap 102 may be integrally formed with the bottom surface 112 on the bottom surface 112 of the inner container 110. In short, the support structure may be an aspect that prevents the shape and function of the remaining liquid recess 113 from being damaged by the load of the stored fluid.

About the inner bag composite container 100 mentioned above, it is also possible to take the following modifications. The inner bag composite container according to this modification will be described with reference to FIGS. 8A to 8C.
The basic structure of the inner bag composite container 105 shown in FIGS. 8A to 8C is the same as the structure of the inner bag composite container 100 described above, and includes an inner container 110-2 and an outer container 120-2. Here, the inner container 110-2 corresponds to the inner container 110 of the inner bag composite container 100, and the outer container 120-2 corresponds to the outer container 120 of the inner bag composite container 100. Below, only the difference between the inner bag composite container 105 and the inner bag composite container 100 will be described, and the same or similar components may be applied with the contents already described above, and the description thereof is omitted here.

The difference in the outer container 120-2 is in a top plate 123-2 corresponding to the above-mentioned top plate 123. As shown in FIGS. 8A and 8B, the top plate 123-2 includes a handle 125 and an engaging portion. 126.
The handles 125 are generally ring-shaped, for example, U-shaped handles, and two handles 125 are attached to the outer surface 123c of the top plate 123-2 with the opening 123a sandwiched in the diameter direction position of the top plate 123-2.
In this modified example, the engaging portion 126 has a substantially square shape formed by denting the outer surface 123c with the opening 123a as the center, and is, for example, a bowl-shaped concave portion having a depth of about 13 mm. An opening 123a is located at the center of the bottom surface of the engaging portion 126, and a rising wall 126a is formed from the bottom surface of the engaging portion 126 to the outer surface 123c of the top plate 123-2.
Such an engaging part 126 engages with a rotation stopper 115 of the inner container 110-2 described below, and prevents the inner container 110-2 from rotating within the outer container 120-2. Further, by simply providing the engaging portion 126 as compared with the flat top plate 123, it can also act as a reinforcing portion for preventing deformation of the top plate 123-2.

  Further, the shape, size, and installation position of the engaging portion 126 described above are merely examples, and are not limited to those described above. In short, the engaging portion 126 may have any form that can prevent the rotation of the inner container 110-2 in the outer container 120-2.

Next, the difference in the inner container 110-2 is that the top surface 114-2 of the inner container 110-2 has a rotation stopper 115.
In this example, as shown in FIG. 8C, the rotation stopper 115 is formed on the top surface 114-2 of the inner container 110-2 over the diameter direction of the inner container 110-2. It is a groove-shaped recess of about 12 mm. An entrance / exit 111 of the inner container 110-2 is formed on the bottom surface of the concave rotation stopper 115.
Such a rotation stopper 115 fits with the engaging portion 126 of the top plate 123-2 described above, and the inner container 110-2 is centered in the outer container 120-2 in cooperation with the engaging portion 126. Rotation about the shaft 101 is prevented. Specifically, the rotation of the inner container 110-2 is prevented by the contact between the side wall 115a of the groove-shaped rotation stopper 115 and the rising wall 126a of the engaging portion 126. Note that the rotation of the inner container 110-2 in the outer container 120-2 may occur, for example, when the cap 118 is screwed into the inlet / outlet portion 111 of the inner container 110-2.

  The shape, size, and installation position of the rotation stopper 115 are examples, and are not limited to those described above. In short, the rotation stopper 115 may have a form corresponding to the form of the engaging part 126 in the top plate 123-2. For example, both the engaging portion 126 and the rotation stopper 115 need only be concave or convex and can be engaged with each other. When the engaging portion 126 is, for example, concave or convex, the rotation stopper 115 is A convex shape or a concave shape may be provided on a part of the top surface of the inner container so that the inner container can be prevented from rotating by engaging with the engaging portion 126.

  The inner container 110-2 also has a residual liquid recess 113-2 corresponding to the above-described residual liquid recess 113 on the bottom surface 112 of the inner container 110. However, as shown in FIG. 8C, the remaining liquid recess 113-2 has an inclined rising portion 113 b as compared with the remaining liquid recess 113. This is due to the reason for molding the inner container 110-2. The inner volume of the remaining liquid recess 113-2 is set to be substantially the same as that of the remaining liquid recess 113.

  Since the inner bag composite container 105 described above also has the remaining liquid recess 113-2, as in the case of the inner bag composite container 100, the amount of remaining liquid in the inner container 110-2 is reduced compared to the conventional case. And variation in the amount of residual liquid can be reduced. Furthermore, in the inner bag composite container 105, by providing the engaging part 126 and the rotation stopper 115, the rotation of the inner container 110-2 in the outer container 120-2 can be prevented.

Next, the inner bag composite container dispensing device according to this embodiment for the inner bag composite containers 100 and 105 having the above-described configuration will be described.
The inner bag composite container dispensing device in the present embodiment is provided in the inner bag composite container 100 or the inner bag composite container 105 configured as described above, or the inner bag composite container 100 configured as described above. 105 is a distributor that can be attached to the inner bag composite container 100, 105 and can discharge a stored fluid such as a chemical solution. In the following, a mounting type distribution device will be described, but a type fixed to the inlet / outlet part 111 of the container may be used. In the following description, the inner bag composite container 100 will be mainly taken as an example.
As shown in FIG. 1A, the distribution device 200 of this embodiment is a pressurized dispenser mechanism, and is roughly divided to supply a cylindrical plug body 201 and a pressurized inert gas into the inner container 110. A gas supply device 202 and a discharge tube 250. The plug body 201 and the gas supply device 202 correspond to an example of a gas supply mechanism.

  The plug body 201 is, for example, a resin plug that is attached to the inlet / outlet portion 111 after the cap 118 is removed, and includes a coupling ring 201r, a plug shell 201s, and a seal ring 2012. The coupling ring 201r is a cylindrical member, and one end is opened in a circular shape. A female screw that engages with a male screw for a cap formed in the inlet / outlet portion 111 is formed on the inner peripheral surface of the opening. ing. Therefore, the coupling ring 201r of the plug body 201 can be screwed into the male screw of the entrance / exit part 111.

  In addition, after the internal thread of the plug body 201 is screwed into the external thread of the inlet / outlet portion 111, the plug body 201 is attached to the inner bag composite containers 100 and 105 in a tightly sealed state. A head 201h that is integrally formed with the plug body 201 in the shape is provided at the other end of the coupling ring 201r. In this embodiment, the wrench engaging shape is a substantially square shape in plan view as shown in FIG. 1B. Of course, the shape for engaging the wrench is not limited to a square shape, and may be a hexagonal shape, for example. The plug main body 201 having such a head 201h is tightly connected to the inlet / outlet portion 111 of the inner bag composite container 100, 105 by engaging and rotating a dedicated wrench 290 as shown in FIG. It can be attached to.

  The head 201h of the coupling ring 201r also has a circular opening as shown in FIG. 1B, and the plug shell 201s is fitted into this opening so as to be rotatable with respect to the coupling ring 201r. That is, the plug shell 201s is a disk-shaped member having a flange, and is inserted from an opening on one end side of the coupling ring 201r. The flange abuts on the coupling ring 201r, and the head of the coupling ring 201r. It is inserted into the opening of 201h. Further, by attaching the seal ring 2012 to the coupling ring 201r and screwing the coupling ring 201r into the male thread of the entrance / exit part 111 as described above, the seal ring 2012 seals the mouth part of the entrance / exit part 111. In addition, the flange of the plug shell 201s is sandwiched between the seal ring 2012 and the coupling ring 201r. Thereby, the seal ring 2012 also seals ventilation at the boundary between the coupling ring 201r and the plug shell 201s. As described above, the dedicated wrench 290 is engaged with the head 201h having a substantially rectangular engagement shape, and the head 201h is rotated by the dedicated wrench 290, so that the operator simply turns the screw by hand and attaches it. Compared to the case, the sealing performance is significantly improved.

  A first joint 203 made of synthetic resin for detachably fixing the other end of the discharge tube 250 and a second joint 204 for connecting the gas supply device 202 are screwed into the plug shell 201s.

  A commercially available straight type holder can be used for the first joint 203, and the discharge tube 250 can be slidably held along the axial direction of the plug main body 201 and can be fixed by tightening a nut. If the tube diameter of the discharge tube 250 does not match the tube diameter on the user side, a different diameter joint 270 may be attached to the next stage of the first joint 203.

  Here, the discharge tube 250 is made of a flexible and chemical-resistant resin, and is formed of, for example, Teflon (registered trademark), and a liquid suction port 251 located at the tip which is one end of the discharge tube 250 is formed in the remaining liquid recess 113. It is long enough to be positioned. As described above, since the discharge tube 250 is slidable using the first joint 203, the length can be adjusted so that the liquid suction port 251 is positioned in the vicinity of the bottom of the residual liquid recess 113. Details of the discharge tube 250 will be described later.

  As described above, in the inner bag composite container 100, since the inlet / outlet portion 111 and the remaining liquid recess 113 are arranged on the same central axis 101, the coupling ring 201r is screwed into the male screw of the inlet / outlet portion 111. When the discharge tube 250 simply descends downward in a straight line, the liquid suction port 251 is disposed in the remaining liquid recess 113. Thus, according to the inner bag composite container 100, the liquid suction port 251 of the discharge tube 250 can be easily and reliably disposed in the residual liquid recess 113. Furthermore, since the remaining liquid recess 113 is not deformed, its volume is a designed constant value. Therefore, the remaining liquid amount in the inner container 110 can be reduced as compared to the conventional case, and the variation in the remaining liquid amount can also be reduced.

  The second joint 204 is an L-shaped (elbow-shaped) synthetic resin joint that is connected to the opening 2013 in the coupling ring 201r of the plug body 201, and a commercially available elbow-shaped quick joint can be used.

  By connecting the hose connected to the gas supply device 202 to the second joint 204, the gas supply device 202 can supply pressurized inert gas, for example, nitrogen gas, to the inside of the inner container 110.

  By using the distribution device 200 configured as described above, the inside of the inner container 110 is pressurized to a range of, for example, about 80 Kpa to about 150 Kpa by the gas supply device 202 and stored in the inner container 110. A fluid such as a chemical solution can be pushed out of the container through the liquid discharge tube 250 and discharged. The range from about 80 Kpa to about 150 Kpa corresponds to the fluid discharge pressure range. The pressure range mainly used on the user side is about 80 Kpa to about 120 Kpa.

As described above, the inside of the inner container 110 is pressurized for fluid discharge, so that the bottom surface 112 and the top surface 114 of the inner container 110 are moved outward along the direction of the central axis 101 as shown in FIG. Swell. Along with this, the ground plate 122 and the top plate 123 of the outer container 120 are also pressed and can swell in the same manner.
That is, at each central part of the base plate 122 and the top plate 123, the base plate 122 and the top plate 123 are displaced to the outside of the container by about a few tens of millimeters by the fluid discharge pressurization of about 80 Kpa to about 150 Kpa, That is, it has a deformation amount of about 3 to about 5% of the diameter of the main plate 122 and the top plate 123. FIG. 6 shows changes in the total displacement amount (swelling amount) of the base plate 122 and the top plate 123 when the inside of the inner container 110 of the inner bag composite containers 100 and 105 is pressurized. In the present embodiment, the thickness of the base plate 122 of the outer container 120 is 0.5 mm, and the thickness of the top plate 123 is 0.6 mm.

  As described above, the bottom surface 112 and the top surface 114 of the inner container 110, and the base plate 122 and the top plate 123 are swelled and deformed. It can be made to flow into the recess 113 side. Therefore, it can contribute to the reduction of the remaining liquid amount further. In addition, since the plug body 201 is attached to the inlet / outlet portion 111 of the inner bag composite container 100, 105 using the dedicated wrench 290 as described above, there is no gas leakage from the inlet / outlet portion 111 and liquid discharge failure occurs. Nor.

  On the other hand, the base plate 122 and the top plate 123 each bulge, so that the position of the liquid suction port 251 of the discharge tube 250 adjusted in length using the first joint 203 as described above and the bottom of the residual liquid recess 113 are provided. The distance between them will increase. In order to absorb such a variation in distance, the distal end of the discharge tube 250 is disposed in the remaining liquid recess 113, and the discharge tube 250 is slightly curved before being pressurized. By adopting such a curved form, the above-described distance fluctuation can be absorbed without adding another member or mechanism to the discharge tube 250. In particular, a user who does not allow foreign matter to be mixed into the stored item in the container dislikes immersion of items other than the discharge tube in the stored item, and thus the above-described curved form is an effective method.

  On the other hand, when such a strict usage mode is not required, the discharge tube 250 is not curved, and, for example, as shown in FIG. Accordingly, a length adjusting unit 260 that can extend and contract in the axial direction of the discharge tube 250 may be attached. By providing the length adjusting portion 260, as shown in FIG. 5, the inner container 110 can be moved as shown by a two-dot chain line by bringing the tip of the length adjusting portion 260 into contact with the bottom of the remaining liquid recess 113. Even when it swells, the tip of the length adjusting portion 260 can maintain a state in contact with the bottom of the remaining liquid recess 113. Therefore, even when the length adjusting unit 260 is provided, the amount of remaining liquid can be reliably reduced as compared with the conventional case, and variations thereof can also be reduced. Note that the length adjusting unit 260 is not limited to the one described, and it is needless to say that the length adjusting unit 260 may have a function of adjusting the length of the discharge tube 250 according to the deformation of the base plate 122 and the top plate 123. .

Hereinafter, the above-described discharge tube 250 will be described in detail by taking the inner bag composite container 105 shown in FIGS. 8A to 8C as an example. Of course, the following description applies to the discharge tube 250 of the inner bag composite container 100 described above.
9A and 9B show the shape of the discharge tube 250 before and during the discharge of the liquid in the inner container 110-2.
As described above, the discharge tube 250 is made of, for example, a Teflon (registered trademark) resin that is flexible and resistant to chemicals. For example, the discharge tube 250 is made of PFA (tetrafluoroethylene / perfluoroalkoxyethylene copolymer). It is a so-called straight tube type tube that is linearly formed by extrusion and does not have a curl. Such a discharge tube 250 has flexibility and also has the ability to restore the original shape to a straight line. Moreover, the discharge tube 250 in this example has an outer diameter of 10 mm and a wall thickness of 1 mm as an example. By using a straight tube type tube of this size, even if the tube has the same wall thickness, the section modulus, that is, the rigidity of the tube, can be improved by about 1.7 times compared to a tube having a tube diameter of φ8 mm. As a result, the posture of the discharge tube 250 can be maintained even when the inside of the inner bag 110 of the inner bag composite container 100, 105 is pressurized, and the tip of the discharge tube 250 is positioned in the remaining liquid recess 113-2. Is possible. That is, the followability of the discharge tube 250 to the remaining liquid recess 113-2 against the deformation of the inner bag composite containers 100 and 105 is improved, and the amount of remaining liquid in the container can be greatly reduced. As a result, for example, when the pressure is increased at 100 Kpa, the residual liquid amount achieves the above-mentioned target residual liquid amount and becomes approximately 40 cc.

As shown in FIG. 9A, the discharge tube 250 is slightly curved before the liquid in the inner container 110-2 is discharged, that is, before the inside of the inner container 110-2 is pressurized. The length is adjusted and installed in the inner bag composite container 105. An example of the length of the discharge tube 250 when the pressure range is about 80 Kpa to about 120 Kpa as described above will be described. In the inner bag composite container 105 before pressurization, the length when the discharge tube 250 attached to the inlet / outlet part 111 of the inner container 110-2 is linearly arranged to the bottom surface of the residual liquid recess 113-2 is L1. In this case, a length L2 obtained by adding 20 mm to the length L1 as an example is set as the length of the discharge tube 250. When the discharge tube 250 has a length L2, in the inner bag composite container 105 before pressurization, the discharge tube 250 is slightly curved as shown in FIG. 9A.
Here, as a method for determining the length L2 of the discharge tube 250, the length L2 corresponding to the pressurizing pressure can be set using a graph as shown in FIG. Details of this determination method will be described later.

Next, as shown in FIG. 9B, while the liquid in the inner container 110-2 is being discharged, that is, when the inside of the inner container 110-2 is being pressurized within the above-described pressure range for discharging the fluid, The bottom surface 112 and the top surface 114-2 of 110-2, and the base plate 122 and the top plate 123-2 of the outer container 120-2 swell and deform, and the axial length of the inner bag composite container 105 increases. Thus, the inner bag composite container 105 becomes longer in the axial direction, so that the discharge tube 250 that has been bent with the length L2 is not bent by the restoring force and returns to the original linear shape. In this return state, the liquid suction port 251 located at the tip of the discharge tube 250 is located in the residual liquid recess 113-2 and is not in contact with the bottom surface of the residual liquid recess 113-2. To position.
That is, the length L2 of the discharge tube 250 is such that when the inside of the inner container is pressurized within the above-described fluid discharge pressure range, the liquid suction port 251 at the tip of the discharge tube 250 is in the remaining liquid recess of the inner container. It can be said that the length is positioned in a non-contact manner, that is, close to the bottom surface of the remaining liquid recess 113-2.

  In addition, as an example of the above-described fluid stored in the inner containers 110 and 110-2, there is a chemical solution that requires high cleanliness for handling including storage, for example, in at least one of the semiconductor field and the liquid crystal field. Corresponds to the chemical used. As described above, the chemical solution in the semiconductor field is, for example, a CMP slurry, a photoresist, a developer, an etching solution, a cleaning solution, and the like, and in the liquid crystal field, a photoresist, a color resist, a color filter material, and the like.

  In addition, as described at the beginning of this “Mode for Carrying Out the Invention” column, the outer container 120 having various internal volumes can be used. However, the contents described in the above-described embodiments are the various outer containers 120. Even in the case of using, including the amount of deformation of the main plate 122 and the top plate 123, it can be similarly applied.

Next, as a second embodiment of the present invention, a method of manufacturing the inner bag composite container dispensing device 200 described above can be cited.
As described above, the inner bag composite container dispensing device 200 pressurizes the inside of the container to discharge the stored liquid, but the inner bag composite containers 100 and 105 are also deformed in accordance with the pressurization. Corresponding to this deformation amount, appropriately setting the length of the discharge tube 250 in the inner bag composite container dispensing device 200 greatly affects the reduction of the residual liquid amount in the container.
Therefore, in the manufacturing method according to the second embodiment, the following operation is performed to reduce the remaining liquid amount. Here, the inner bag composite container 105 is taken as an example for explanation.

That is, as already described, first, in the inner bag composite container 105 before pressurization, the discharge tube 250 attached to the inlet / outlet part 111 of the inner container 110-2 is linearly formed to the bottom surface of the remaining liquid recess 113-2. The basic length L1 when arranged is obtained. Next, for example, as shown in FIG. 6, the total deformation amount of the ground plate 122 and the top plate 123-2 corresponding to the pressurized pressure of the container is calculated based on the relationship between the pressurized pressure and the container deformation amount obtained in advance. Ask. And the set length L2 of the discharge tube 250 is determined by adding the obtained total deformation amount to the basic length L1.
Thus, by determining the set length L2 of the discharge tube 250 when the inner bag composite container distribution device 200 is attached to the inlet / outlet part 111, the discharge tube 250 in the container pressurization state when the stored liquid is discharged The liquid suction port 251 is located in the remaining liquid recess 113-2 from the inlet / outlet portion 111, and can extend to the bottom surface of the remaining liquid recess 113-2 in a non-contact manner, that is, close to the bottom. Accordingly, it is possible to minimize the amount of the stored liquid in the remaining liquid recess 113-2.

Moreover, the following aspects can also be taken in this invention.
In the inner bag composite container dispensing device according to the first aspect described above, in the inner bag composite container dispensing device according to the third aspect, each of the ground plate and the top plate may be used for fluid discharge into the inner bag composite container. The discharge tube has the deformation amount of about 3 to 5% of the diameter of the base plate and the top plate to the outside of the container by pressure, and the discharge tube is the above-mentioned of the inner container in a state where the base plate and the top plate are deformed by this deformation amount. You may have the length extended linearly from the entrance / exit part to the said recessed part for residual liquids.

  Further, in the fourth aspect, in the inner bag composite container distribution device according to the first aspect, a plug main body that is screwed onto the inlet / outlet portion protruding from the opening and holds the discharge tube and the gas supply mechanism. The plug main body has a head that is integrally molded with the plug main body and engages with a dedicated wrench, and the plug main body is fastened to the entrance / exit portion by rotation of the head with the dedicated wrench. Good.

  In the fifth aspect, in the inner bag composite container dispensing device according to any one of the first, third, and fourth aspects, the outer container has an engaging portion on the top plate, and the inner container There is a rotation stopper on the top surface of the inner container, and the rotation stopper fits with the engaging part and prevents the rotation of the inner container in the outer container around the central axis. Also good.

  INDUSTRIAL APPLICABILITY The present invention is applied to an inner bag composite container distribution device that distributes a storage fluid stored in an inner bag composite container in which a resin inner container is provided in a steel outer container, and a method for manufacturing the distribution device. Is possible.

100, 105 ... inner bag composite container, 101 ... central axis, 102 ... gap, 103 ... support member,
110, 110-2 ... inner container, 111 ... entrance / exit part, 113 ... concave part for residual liquid,
115: Anti-rotation part, 120, 120-2 ... Outer container, 121 ... Body, 122 ... Base plate,
123, 123-2 ... top plate, 126 ... engagement part,
200 ... Distributing device, 201 ... Plug body, 201h ... Head, 250 ... Discharge tube.

Claims (5)

A dispensing device for an inner bag composite container attached to the inner bag composite container,
The inner bag composite container (100, 105) is formed by a pail can having a nominal capacity of 10 to 60 liters,
Formed by winding a base plate (122) around a resin inner container (110, 110-2) having a fluid inlet and outlet portion (111) and a cylindrical body (121). An outer container formed of a steel container for housing the inner container, wherein the top plate (123, 123-2) having an opening (123a) from which the entrance / exit part can project is opposed to the ground plate. An outer container (120, 120-2) attached to the body,
The entrance / exit part in the inner container and the opening in the outer container are located on a central axis (101) passing through the center of the diameter of the inner bag composite container,
The inner container is formed to project outward from the bottom surface (112) of the inner container on the central axis and directly below the inlet / outlet portion, and collect and store residual liquid (113, 113- 2)
The inner bag composite container further includes a ring-shaped support member (103) provided in a gap (102) between the base plate and the bottom surface of the inner container and positioned around the residual liquid recess, the support member comprising: A member having a height corresponding to the concave portion for residual liquid, and supporting the bottom surface of the inner container from the fluid load in the inner container and maintaining the shape and function of the concave portion for residual liquid,
The inner bag composite container dispensing device is
A tube that can be attached to the inlet / outlet part of the inner container protruding from the opening of the outer container, the tip of which is located in the residual liquid recess of the inner container, and guides the fluid stored in the inner container to the outside of the container A resin discharge tube (250);
A gas supply mechanism (201, which can be attached to the inlet / outlet portion protruding from the opening and supplies the fluid stored in the inner container into the inner bag composite container and exhausts the fluid to the outside through the discharge tube. 202)
With
The discharge tube has flexibility and shape restoration, and bends due to flexibility before pressurization in the container by the gas supply mechanism. On the other hand, the outer side of the inner bag composite container by pressurization in the container by the gas supply mechanism A tube having a length extending linearly from the inlet / outlet portion of the inner container to the remaining liquid recess portion due to shape restoration in a state where the base plate and the top plate are deformed, and having an outer diameter of 10 mm and a wall thickness of 1 mm Is,
A dispensing device for an inner bag composite container.   Each of the ground plate and the top plate has a deformation amount of about 3 to 5% of the diameter of the ground plate and the top plate to the outside of the container due to the pressure for discharging the fluid into the inner bag composite container, and this deformation amount 2. The inner bag according to claim 1, wherein the discharge tube has a length extending linearly from the inlet / outlet portion of the inner container to the remaining liquid recess in a state where the base plate and the top plate are deformed. Dispensing device for composite containers.   A plug main body (201) that is screwed and attached to the inlet / outlet portion protruding from the opening and holds the discharge tube and the gas supply mechanism is further provided. The plug main body is integrally formed with the plug main body and is a dedicated wrench. The dispensing device for an inner bag composite container according to claim 1, further comprising: a head portion (201h) engaged with the plug body, wherein the plug body is fastened to the inlet / outlet portion by rotation of the head portion by the dedicated wrench. The outer container has an engaging portion (126) on the top plate,
The inner container has an anti-rotation portion (115) on the top surface (114-2) of the inner container, and the anti-rotation portion fits with the engagement portion and is an outer side centered on the central axis. The dispensing device for an inner bag composite container according to any one of claims 1 to 3, which prevents rotation of the inner container in the container. It is a manufacturing method of the distribution device for inner bag compound containers according to any one of claims 1 to 4,
In the inner bag composite container (100, 105) before pressurization in the container by the gas supply mechanism (201, 202), the discharge tube (250) attached to the inlet / outlet part (111) of the inner container (110, 110-2) is provided. A step of obtaining a basic length (L1) when linearly arranged to the bottom surface of the residual liquid recess (113, 113-2);
Based on the relationship between the pressurized pressure and the amount of deformation of the container, a step of obtaining the total amount of deformation of the base plate (122) and the top plate (123, 123-2) corresponding to the pressurized pressure of the container;
Adding the determined total deformation amount to the basic length to determine the set length (L2) of the discharge tube;
A method for manufacturing a dispensing device for an inner bag composite container, comprising:

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