TWI607106B - Magnetic field generating device for magnetron sputtering - Google Patents

Description

Magnetic field generating device for magnetron sputtering

The present invention relates to a magnetic field generating device incorporated in a device for magnetron sputtering used for forming a film on a surface of a substrate.

A phenomenon in which an atom or a molecule constituting a target is struck by causing an inert substance such as Ar to collide at a high speed is called sputtering, and a film can be formed by adhering the atom or molecule to be struck on the substrate. The magnetron sputtering method is a method in which the deposition rate of the target substance on the substrate is increased by loading a magnetic field into the inside of the cathode, and since electrons do not collide with the substrate, the film can be formed at a low temperature. Therefore, in the processes of electronic components such as semiconductor ICs, flat panel displays, and solar cells, or reflective films, magnetron sputtering is often used to form a thin film on the surface of the substrate.

The magnetron sputtering apparatus includes a substrate on the anode side, a target (cathode) disposed to face the substrate, and a magnetic field generating device disposed below the target in the vacuum chamber. By applying a voltage between the anode and the cathode, a glow discharge is generated, and an inert gas (about 0.1 Pa of Ar gas or the like) in the vacuum chamber is ionized, and on the other hand, a magnetic field formed by the magnetic field generating device is used to capture the target. The secondary electrons are emitted and subjected to cycloid motion on the surface of the target. Since the cycloidal motion of electrons promotes ionization of gas molecules, the film is produced at a much faster rate than in the case where no magnetic field is used, and the adhesion strength of the film becomes large.

Japanese Laid-Open Patent No. Hei 1-147063 discloses a technique in which a magnetic field generating device composed of a central magnetic pole and a peripheral magnetic pole of a cylindrical shape is disposed in a magnetic field generating device of a circular and concentric circular plate-shaped magnetic member. Between the target and the target, the erosion region of the target surface is enlarged, and the central magnetic pole is disposed on the yoke formed of the magnetic material, and is magnetized in the height direction (the direction perpendicular to the target surface), and the peripheral magnetic pole is The opposite direction of the center pole is magnetized and concentrically disposed around the center pole.

As shown in the description of JP-A-1-147063, in order to arrange the magnetic member between the magnetic field generating device and the target, it is necessary to embed the magnetic member in the support plate (the support plate of the target). On the other hand, since the support plate (the support plate of the target) must have a cooling mechanism in order to suppress the heat generation of the target, the configuration of the support plate (the support plate of the target) becomes complicated, necessarily from the magnetic field generating device to the target surface. The distance is getting farther. Therefore, it is necessary to generate a strong magnetic field, and the magnetic field generating device becomes large.

JP-A-2008-156735 discloses a magnetic field generating apparatus 200 for magnetron sputtering, which has a substrate 210 made of a non-magnetic material as shown in Figs. 17(a) and 17(b). a rectangular central pole piece 220 disposed on a surface thereof; an oblong outer peripheral pole piece 230 disposed around the surface; and a plurality of permanent magnets 240, 250 connected to the central pole piece and the outer peripheral pole piece The permanent magnets 240 and 250 are magnetized in the horizontal direction, and the magnetic poles of the same polarity are disposed opposite to the central pole piece, and the height of the central pole piece and the height of the outer peripheral pole piece are formed as the permanent magnet. It is described that the magnetic field generating device is in contact with the respective magnetic pole faces of the permanent magnet, so that the leakage magnetism from the permanent magnet is reduced, and a predetermined magnetic flux can be generated by a permanent magnet smaller than the conventional one.

According to the description of JP-A-2008-156735, since the magnetic field generating device is particularly in the corner portion, the strength required to block the inert gas is made (magnetic Since the magnetic field region having a density level component of 10 mT or more is larger than the conventional one, the erosion region in the corner portion can be enlarged, and the erosion of the straight portion and the corner portion can be made uniform, but because it is opposed to the central pole piece. Since the magnetic flux density is relatively low, the erosion of the central portion of the target (the portion opposite to the central pole piece) progresses slowly, which is a cause of lowering the efficiency of use of the target.

Japanese Laid-Open Patent Publication No. Hei-4-235277 discloses a magnetic device for generating a donut-shaped magnetic field on a target surface, the device having a central magnet disposed annularly near the center of the target, and a peripheral magnet and a loop Arranged in the vicinity of the outer periphery of the target; the magnetization direction or orientation of each magnet is inclined with respect to the target surface (for example, ±45°); and it is described that the magnetic device is in the range from the center to the outer circumference of the target directly to The magnetic flux density component in the horizontal direction of the target surface exhibits a bimodal characteristic, and the inclination of the magnetic flux density component in the vertical direction between the center and the outer periphery becomes a magnetic flux density distribution of almost zero, so that the erosion region of the target becomes uniform, and Can improve the utilization efficiency of the target.

Japanese Laid-Open Patent Publication No. Hei-4-235277 discloses a configuration in which the magnetization direction or the alignment of each magnet is inclined with respect to the target surface, and the configuration is such that the central magnet and the outer circumference magnet are arranged such that the magnetization direction is parallel to the target surface. The annular intermediate magnet is disposed to be separated from the central magnet and the outer peripheral magnet. In this configuration, by separating the annular intermediate magnets, the magnetic lines of force of the small rings of the central and outer permanent magnets from the N pole to the S pole are also actively utilized for the leakage magnetic field on the target. However, since the central magnet, the outer peripheral magnet, and the intermediate magnet are disposed apart from each other, the magnetic lines of the respective magnets cancel each other. There is a problem that the magnetic field generation efficiency is lowered. Further, since the method is constituted only by a permanent magnet, the magnetic efficiency (magnetic permeability) is lowered, and in order to obtain a high magnetic flux density, it is necessary to make the apparatus larger than the necessary permanent magnet volume.

Accordingly, it is an object of the present invention to provide a magnetic field generating apparatus for magnetron sputtering which can expand a magnetic flux density parallel component (with a target surface) on a target surface even if a magnetic body is not disposed in the support plate. The parallel component) becomes a fixed region, and the erosion of the target progresses more uniformly, whereby a film having a uniform thickness can be formed on the substrate.

In view of the object, the inventors of the present invention have found that a magnetic body composed of a plurality of permanent magnets magnetized in a direction parallel to the target surface is provided in a region of a race track shape formed by a rod-shaped central magnetic pole member and a peripheral magnetic pole member. In the magnetic field generating device for controlling sputtering, the magnetic flux density on the target surface can be enlarged by designing a thickness in a direction perpendicular to the target surface of the permanent magnet in a central portion of the magnetization direction to be thinner than both end portions. The parallel component becomes a fixed region, and the magnetic body is disposed on one or both sides of the central portion of the permanent magnet designed to be thin, so that the progress of erosion of the target can be made more uniform, and the present invention is considered.

That is, a magnetic field generating device for magnetron sputtering is a magnetic field generating device for magnetron sputtering which faces a target and generates a magnetic field on a target surface, and is characterized in that it has a straight portion and a corner portion. Race track shape; On the base made of a non-magnetic body, there are: (a) a rod-shaped central magnetic pole member; (b) an outer peripheral magnetic pole member provided to surround the central magnetic pole member; and (c) a plurality of permanent magnets Between the central magnetic pole member and the outer peripheral magnetic pole member, a magnetic pole is disposed opposite to the central magnetic pole member, and another magnetic pole is opposite to the outer peripheral magnetic pole member; and the plurality of permanent magnets disposed on the linear portion include at least one perpendicular to the A permanent magnet for magnetic field adjustment in which the thickness in the direction of the target surface is thinner at the central portion in the magnetization direction than at both end portions.

The plurality of permanent magnets provided in the corner portion are preferably magnetic field-adjusting permanent magnets having a thickness at least one perpendicular to the surface of the target, which is thinner at the central portion in the magnetization direction than at both end portions.

Preferably, the permanent magnet for magnetic field adjustment has at least three regions in a central portion and both end portions of the magnetization direction, and thicknesses in a direction perpendicular to the target surface in the regions of the both end portions are equal to each other, and the center The thickness of the region of the portion perpendicular to the surface of the target is thinner than the thickness of the region of the both end portions, thereby forming a concave portion corresponding to the region of the central portion.

Preferably, the permanent magnet for adjusting the magnetic field has a length in the magnetization direction of the central portion of the central portion of 1 to 99% of the total length of the magnetization direction of the permanent magnet.

Preferably, the permanent magnet for adjusting the magnetic field has a thickness in a direction perpendicular to the surface of the target portion in a region of the central portion greater than 0% of a thickness in a direction perpendicular to the surface of the target portion of the both end portions and is the two The area of the end portion is less than 99% of the thickness perpendicular to the direction of the target surface.

Preferably, at least three of the central portion and the both end portions are formed of independent permanent magnets, and the independent permanent magnets are adhered to constitute the permanent magnet for magnetic field adjustment.

It is preferable that the permanent magnet for the magnetic field adjustment has a concave portion corresponding to a region of the central portion on a surface on the target side and/or a surface on the base side.

It is preferable that the permanent magnet for magnetic field adjustment has a concave portion corresponding to a region of the central portion on both sides of the target side and the base side.

It is preferable to have a structure in which a magnetic body is disposed in the concave portion.

The thickness of the magnetic body disposed in the concave portion is preferably the same as the depth of the concave portion.

The magnetic field adjusting permanent magnet is provided on both sides of the target side and the base side, and has a concave portion corresponding to the central portion and a magnetic body disposed in the concave portion.

The substrate may be removed from a magnetic field generating device for magnetron sputtering, and the magnetic field generating device for magnetron sputtering may have a concave portion corresponding to a region of the central portion on both sides of the target side and the base side. This magnetic field adjustment is composed of a permanent magnet.

The substrate may be removed from a magnetic field generating device for magnetron sputtering, and the magnetic field generating device for magnetron sputtering may have a concave portion corresponding to a region of the central portion on both sides of the target side and the base side. The magnetic field adjusting permanent magnet disposed in the magnetic body of the concave portion.

It is also possible to have a configuration in which at least one of the plurality of permanent magnets is replaced with a permanent magnet group for magnetic field adjustment, and the permanent magnet group for magnetic field adjustment is at least 2 in which the magnetization direction is the same as the permanent magnet and the length of the magnetization direction is short. The permanent magnets are constructed separately in a series arrangement.

A magnetic field generating device for magnetron sputtering, which is a magnetic field generating device for magnetron sputtering according to the present invention, which is opposite to a target and generates a magnetic field on a target surface, and is characterized in that: The utility model has a race track shape composed of a straight portion and a corner portion; and a base composed of a non-magnetic body: (a) a rod-shaped central magnetic pole member; and (b) a peripheral magnetic pole disposed to surround the central magnetic pole member And (c) a plurality of permanent magnets between the central magnetic pole member and the outer peripheral magnetic pole member, wherein a magnetic pole is disposed opposite to the central magnetic pole member, and the other magnetic pole is opposed to the outer peripheral magnetic pole member; At least one of the plurality of permanent magnets is replaced by a permanent magnet group for magnetic field adjustment, and the permanent magnet group for magnetic field adjustment is separated by at least two permanent magnets having the same magnetization direction as the permanent magnet and having a short magnetization direction. Consisting in a serial configuration.

Preferably, the magnetic field generating device for magnetron sputtering of the present invention preferably has a magnetic flux density in a direction parallel to the target surface at a position where a magnetic flux density in a direction perpendicular to the target surface of the magnetic field applied to the target surface becomes zero. The pass density is 10 mT or more.

By using the magnetic field generating device of the present invention, it is possible to enlarge the parallel component of the magnetic flux density on the target surface (the component parallel to the target surface) to be a fixed region, since the progress of the erosion of the target can be made more uniform, so that the target can be improved. Utilization efficiency.

By using the magnetic field generating device of the present invention, since it is not necessary to dispose the magnetic body on the support plate, the number of components can be reduced (low cost), and the target can be cooled more efficiently. Moreover, since the support plate can be designed to be thin, the magnetic field generating device can be miniaturized (low cost).

(1) Composition

The magnetic field generating device 1 for magnetron sputtering according to the present invention is a device for generating a racetrack-like magnetic field on a target surface, and has a direction opposite to the target 7 as shown in Fig. 1(a), and is composed of straight portions 20 and 2 The shape of the race track formed by the corner portions 30, 30.

That is, the magnetic field generating apparatus 1 is characterized in that: on the base 6 made of a non-magnetic material, as shown in Fig. 1 (a), Fig. 1 (b), and Fig. 1 (c), it has: a) a rod-shaped central magnetic pole member 2; (b) an outer peripheral magnetic pole member 3 that surrounds the central magnetic pole member; and (c) a plurality of linear permanent magnets 4 and a corner permanent magnet 5 that are attached to the center Between the pole member 2 and the outer peripheral pole member 3, the magnetization direction is parallel to the target surface 7a, and one magnetic pole is opposite to the central magnetic pole member 2, and the other magnetic pole is opposite to the outer peripheral magnetic pole member 3; The plurality of permanent magnets 4 of the linear portion 20 include at least one magnetic field adjusting permanent magnet 41, and the thickness of the at least one magnetic field adjusting permanent magnet 41 perpendicular to the target surface 7a is the central portion 4a of the magnetization direction than the both ends The portions 4b, 4c are thinner.

(a) Composition of the straight line

The linear portion 20 is, for example, as shown in Figs. 1(a) and 1(b), and has a rectangular columnar central magnetic pole member 2, a quadrangular columnar outer peripheral magnetic pole member 3, and a plurality of straight portions for permanent use. The central magnetic pole member 2 is disposed on a base 6 composed of a non-magnetic body; the outer peripheral magnetic pole member 3 is disposed in parallel with the central magnetic pole member 2 and two of the central magnetic pole members 2 Side separated; permanent magnet for the straight portion The iron 4 is disposed between the central magnetic pole member 2 and the outer peripheral magnetic pole member 3 so that the magnetization direction is parallel to the target surface 7a, and magnetic poles of the same polarity (N pole in the figure) are opposed to the central magnetic pole member 2, and The magnetic poles having the same polarity (the S pole in the figure) face the outer peripheral magnetic pole member 3, and the linear portion permanent magnet 4 includes at least one magnetic field adjusting permanent magnet 41.

The magnetic field adjustment permanent magnet 41 has at least three regions of the central portion 4a and the both end portions 4b and 4c in the magnetization direction, as shown in Fig. 1(c), and is perpendicular to the region of the central portion 4a. The thickness H1 in the direction of the target surface 7a is thinner than the thickness H of the region of the both end portions 4b, 4c perpendicular to the direction of the target surface 7a, and a concave portion 4d is formed. The thickness H1 of the region of the central portion 4a is preferably greater than 0% of the thickness H of the region of the both end portions 4b, 4c and 99% or less of the thickness H of the region of the both end portions 4b, 4c, and is preferably 30. ~70% is better. The thickness of the region of the both end portions 4b, 4c perpendicular to the direction of the target surface 7a is equal to each other, and is preferably equal to the thickness of the outer peripheral magnetic pole member 3. The length L1 of the magnetization direction of the region of the central portion 4a is preferably 1 to 99% of the total length L of the magnetization direction of the magnetic field adjustment permanent magnet 41, and more preferably 30 to 70%.

The magnetic field adjusting permanent magnet 41 may be formed by forming the concave portion 4d on the side of the target 7 as shown in Fig. 1(b), or may be concave as shown in Fig. 2(a). The surface 4d is formed on the side of the base 6 side, and as shown in FIG. 2(b), the concave portion 4d may be formed on both sides of the target 7 side and the base 6 side. In the case where the concave portion 4d is formed on both sides of the target 7 side and the base 6 side, the two concave portions 4d and 4d are preferably formed at the corresponding positions, and the depths are equal or phase depending on the purpose. Different can be.

The permanent magnet 41 for magnetic field adjustment may be produced by processing a permanent magnet of a cube or the like to form a concave portion 4d, or may constitute three of the central portion 4a and the both end portions 4b and 4c. Permanent magnets are glued and made. Further, more (four or more) permanent magnets may be adhered to each other.

The plurality of linear portion permanent magnets 4 that are disposed between the central magnetic pole member 2 and the outer peripheral magnetic pole member 3 may be configured by the magnetic field adjusting permanent magnet 41 having the concave portion 4d, and only a part of the plurality of permanent magnets 41 may have a concave shape. The magnetic field adjustment permanent magnet 41 of the portion 4d is configured. Further, the shape of the permanent magnet 41 for magnetic field adjustment is not necessarily the same, and the depth of the concave portion (the thickness of the region of the central portion 4a) and the length of the magnetization direction or the surface of the concave portion 4d may be formed depending on the purpose. Use a combination of multiple magnets.

The filling magnetic body 8 may be disposed in the concave portion 4d formed in the magnetic field adjusting permanent magnet 41 as shown in FIGS. 3(a) to 3(c). The filling magnetic body 8 may have a shape corresponding to the shape of the concave portion 4d, that is, a thickness equal to the depth of the concave portion 4d, and when disposed in the concave portion 4d, the concave portion may be filled without a gap. The shape of 4d may be thin or thick with respect to the depth of the concave portion 4d, or may be a shape that fills only a portion of the concave portion 4d. The magnetic field strength can be adjusted by changing the shape and thickness of the filling magnetic body 8.

At least one of the plurality of permanent magnets 4 may be replaced with a magnetic field adjusting permanent magnet group 42 as shown in FIG. 4 to constitute a magnetic field generating device, and the magnetic field adjusting permanent magnet group 42 is composed of a magnetization direction and The permanent magnets 4 are identical, and the length of the magnetization direction is at least 2 permanent A magnet is formed in which one permanent magnet 42a faces the central magnetic pole member 2, and the other permanent magnet 42b is arranged in series with the outer peripheral magnetic pole member 3 so as to be spaced apart from each other. In other words, the magnetic field adjusting permanent magnet 41 whose thickness is reduced in the direction of the target 7 from the region of the central portion 4a is removed from the portion corresponding to the region of the central portion 4a.

The length of the magnetization directions of the permanent magnets 42a and 42b and the interval thereof are preferably adjusted as appropriate for the purpose. A magnetic body may be disposed between the permanent magnets 42a and 42b, and a non-magnetic material may or may not be disposed.

In the first diagram (a), a plurality of linear permanent magnets 4 are connected between the central magnetic pole member 2 and the outer peripheral magnetic pole member 3 to form a magnetic path of the linear portion 20. However, an integral linear portion may be used. The permanent magnet 4 constitutes a magnetic circuit of the linear portion 20, and is replaced by the plurality of linear permanent magnets 4. Further, in accordance with the required magnetic field strength or the material of the magnet, a plurality of linear portions can be arranged separately by the permanent magnets 4 to form a magnetic path of the linear portion 20. In the case of separate arrangement, the permanent magnet and the permanent magnet may also be non-magnetic spacer filler or may not be placed. The number and size of the linear permanent magnets 4 are not particularly limited, and may be divided into sizes depending on the viewpoint of manufacturing or ease of assembly, and may be different in size.

(b) The composition of the corner

As shown in Fig. 1(a), the corner portion 30 is composed of an end portion 2a of the center magnetic pole member 2, a corner portion outer peripheral magnetic pole member 3c, and a plurality of corner portion permanent magnets 5, and the corner portion outer peripheral magnetic pole member 3c is formed. A semi-polygon is disposed around the end portion 2a of the central magnetic pole member 2, and the corner portion is provided The permanent magnet 5 is disposed between the end portion 2a of the central magnetic pole member 2 and the corner peripheral magnetic pole member 3c, and is provided with a magnetization direction parallel to the target surface 7a, and magnetic poles of the same polarity (N pole in the figure) and the center The end portions 2a of the magnetic pole members 2 face each other, and the other magnetic poles of the same polarity (S poles in the figure) face the corner outer peripheral magnetic pole members 3c. The end portion 2a of the central magnetic pole member 2 and the corner outer peripheral magnetic pole member 3c are semi-polygonal in Fig. 1(a), but may be semicircular.

The permanent magnet 5 for the corner portion may have a magnet having a thickness uniform to the magnetization direction in a direction perpendicular to the surface of the target as shown in Fig. 5, but may be as shown in Figs. 6(b) and 6(c). As shown in the above-described linear portion permanent magnet 4, the central portion 5a having at least one magnetization direction perpendicular to the target surface 7a is a thinner magnetic field adjusting permanent magnet than the both end portions 5b and 5c. 51.

The magnetic field adjustment permanent magnet 51 has at least three regions of the central portion 5a and the both end portions 5b and 5c in the magnetization direction, as shown in Fig. 6(c), and is perpendicular to the region of the central portion 5a. The thickness Hc1 in the direction of the target surface 7a is thinner than the thickness Hc in the direction perpendicular to the target surface 7a in the region of the both end portions 5b, 5c, and the concave portion 5d is formed. The thickness Hc1 of the region of the central portion 5a is preferably greater than 0% of the thickness Hc of the region of the both end portions 5b, 5c and 99% or less of the thickness Hc of the region of the both end portions 5b, 5c. ~70% is better. The thickness of the region of the both end portions 5b, 5c perpendicular to the direction of the target surface 7a is equal to each other, and is preferably equal to the thickness of the outer peripheral magnetic pole member 3c. The length Lc1 of the magnetization direction of the region of the central portion 5a is preferably 1 to 99% of the total length Lc of the magnetization direction of the magnetic field adjustment permanent magnet 51, and more preferably 30 to 70%.

Similarly to the linear portion magnetic field adjusting permanent magnet 41, the corner magnetic field adjusting permanent magnet 51 may be formed by forming the concave portion 5d on the side of the target 7, or forming the concave portion 5d on the base 6 side. Alternatively, the concave portion 5d may be formed on both sides of the target 7 side and the base 6 side. In the case where the concave portion 5d is formed on both sides of the target 7 side and the base 6 side, it is preferable that the two concave portions 5d and 5d are formed at the corresponding positions, and the depth is equal or phase depending on the purpose. Different can be.

The ratio of the length L1 of the magnetization direction of the central portion 4a to the total length L of the magnetization direction of the linear portion magnetic field adjustment permanent magnet 41 and the length Lc1 of the magnetization direction of the region of the central portion 5a are adjusted with respect to the magnetic field of the corner portion. The ratio of the total length Lc of the magnetization direction of the permanent magnet 51 may be the same or different. The thickness H1 of the region of the central portion 4a of the linear portion magnetic field adjusting permanent magnet 41 perpendicular to the target surface 7a is perpendicular to the region of the central portion 5a of the corner portion magnetic field adjusting permanent magnet 51. The thickness Hc1 in the direction of the target surface 7a is preferably the same. Moreover, the ratio of the thickness H1 of the region of the central portion 4a of the linear portion magnetic field adjusting permanent magnet 41 to the thickness H of the region of the both end portions 4b and 4c of the linear portion magnetic field adjusting permanent magnet 41 is The thickness Hc1 of the region of the central portion 5a of the corner magnetic field adjusting permanent magnet 51 may be the same as the thickness Hc of the region of the both end portions 5b and 5c of the corner magnetic field adjusting permanent magnet 51. Can also be different.

The magnetic field adjustment permanent magnet 51 may be produced by, for example, performing a polishing process on a permanent magnet of a trapezoidal columnar body in a plan view to form a concave portion 5d, or may constitute the central portion 5a and the two End 5b, 5c of 3 permanent magnets are glued and made. Further, more (four or more) permanent magnets may be adhered to each other.

The plurality of corner portion permanent magnets 5 disposed between the end portion 2a of the central magnetic pole member 2 and the outer peripheral magnetic pole member 3c may be formed of the magnetic field adjusting permanent magnet 51 having the concave portion 5d, and only A part of the permanent magnet 51 for magnetic field adjustment having the concave portion 5d is formed. Further, the shape of the permanent magnet 51 for magnetic field adjustment is not necessarily the same, and the depth of the concave portion 5d (the thickness of the region of the central portion 5a) and the length of the magnetization direction or the concave portion 5d may be formed depending on the purpose. A plurality of magnets with different faces are combined and used.

In the concave portion 5d formed in the corner portion magnetic field adjusting permanent magnet 51, the filling magnetic body 8 may be disposed in the same manner as the linear portion magnetic field adjusting permanent magnet 41. The filling magnetic body 8 may have a shape corresponding to the shape of the concave portion 5d, that is, a thickness equal to the depth of the concave portion 5d, and when disposed in the concave portion 5d, the concave portion may be filled without a gap. The shape of 5d may be thin or thick with respect to the depth of the concave portion 5d, or may be a shape that fills only a portion of the concave portion 5d. The magnetic field strength can be adjusted by changing the shape and thickness of the filling magnetic body 8.

At least one of the plurality of permanent magnets 5 may be replaced with a magnetic field adjusting permanent magnet group 52 as shown in FIG. 7 to constitute a magnetic field generating device, and the magnetic field adjusting permanent magnet group 52 is composed of a magnetization direction and The permanent magnets 5 are identical and have at least two permanent magnets having a short magnetization direction, wherein one permanent magnet 52a faces the end portion 2a of the central magnetic pole member 2, and the other permanent magnet 52b and the corner portion The outer peripheral magnetic pole members 3c are arranged side by side in a manner of being spaced apart from each other. Here, Fig. 7 is a cross-sectional view of the permanent magnet 51 for magnetic field adjustment in the C-C sectional view shown in Fig. 6(b). In other words, the magnetic field adjusting permanent magnet 51 whose thickness is reduced from the region of the central portion 5a in the direction perpendicular to the target surface 7a is removed from the portion corresponding to the region of the central portion 5a.

The lengths of the magnetization directions of the permanent magnets 52a and 52b and the intervals thereof are preferably adjusted as appropriate for the purpose. A magnetic body may be disposed between the permanent magnets 52a and 52b, and a non-magnetic material may or may not be disposed.

The shape of the corner portion permanent magnet 5 in plan view is preferably set in accordance with the shape of the corner peripheral magnetic pole member 3c. The corner portion permanent magnet 5 is a semi-polygonal shape in the corner portion as shown in Fig. 1 (a), Fig. 6 (a) or Fig. 8, and is substantially trapezoidal in plan view. As shown in Fig. 9, the outer peripheral magnetic pole member 3c is semicircular in the corner portion, and is preferably substantially fan-shaped in plan view. Further, as shown in Fig. 10, it may have a rectangular shape in plan view. The number and size of the corner permanent magnets 5 are not particularly limited, and may be divided into sizes depending on the viewpoint of manufacturing or easy assembly, or may be different in size.

The corner portion permanent magnet 5 may be arranged to completely fill the end portion 2a of the central magnetic pole member 2 and the end portion 2a of the central magnetic pole member 2 as shown in Figs. 1(a) and 6(a). The gap of the outer peripheral magnetic pole member 3c which is provided in the corner portion of the semi-polygon shape may be arranged such that a gap 5e is formed between the corner portion permanent magnet 5 and the corner portion permanent magnet 5 as shown in Fig. 8. By configuring the corner portion permanent magnet 5 to be empty in this manner With the gap 5e, the magnetic flux density on the surface of the target can be adjusted. A non-magnetic spacer may be filled in the gap 5e. The occupation ratio of the corner portion permanent magnet 5 to the total area of the gap between the end portion 2a of the central magnetic pole member 2 and the corner peripheral magnetic pole member 3c is preferably 30% or more, more preferably 30 to 80%.

(c) Erosion area

In the conventional magnetic field generating device including the linear portion magnetic field adjusting permanent magnet 41 or the linear portion magnetic field adjusting permanent magnet group 42 in the straight portion, the magnetic flux density parallel component (with the target) is plotted along the magnetization direction. When the parallel component of the magnetic flux density is a mountain shape (see the first comparative example of FIGS. 15 and 16), the erosion of the target in the magnetization direction becomes uneven, and cannot be high. Use the target efficiently.

In contrast, in the linear portion 20, the linear portion magnetic field adjusting permanent magnet 41 having the concave portion 4d or the linear portion magnetic field adjusting permanent magnet group 42 composed of the separated at least two permanent magnets 42a and 42b is used. In the magnetic field generating device of the invention, since the value drawn by the parallel component of the magnetic flux density on the surface of the target is trapezoidal in the magnetization direction (refer to the first embodiment of Fig. 15), the target is eroded in the magnetization direction (erosion) ) is homogenized, and the utilization efficiency of the target is improved.

Further, the corner portion magnetic field adjusting permanent magnet 51 having the concave portion 5d having the concave portion 5d or the corner magnetic field adjusting permanent magnet group 52 composed of the at least two separated permanent magnets 52a and 52b is also used in the corner portion 30. Because in the corner portion 30, the value drawn by the parallel component of the magnetic flux density on the surface of the target also becomes trapezoidal in the magnetization direction (refer to the figure of Fig. 16). 1 embodiment), so the erosion of the target in the magnetization direction is uniformized, and the utilization efficiency of the target is improved.

(d) permanent magnet

The permanent magnets constituting the straight portion and the corner portion can be formed by a known permanent magnet material. The material of the permanent magnet material may be appropriately set depending on the configuration of the apparatus (the distance from the magnetic field generating device to the target) or the required magnetic field strength. In the present invention, it is preferable to select the permanent magnet so that the parallel component of the magnetic flux density becomes 10 mT or more at a position where the vertical component of the magnetic flux density of the magnetic field of the target surface 7a becomes zero.

When a high magnetic flux density is desired, a rare earth such as an RTB anisotropic sintered magnet in which R (at least one of rare earth elements such as Nd), T (Fe or Fe and Co), and B are essential components is used. A magnet of the type (for various surface treatments from the viewpoint of corrosion resistance) may be used, and a ferrite magnet may be used when the required magnetic flux density is not too high. Further, when it is desired to change the magnetic flux density of the straight portion and the corner portion, the permanent magnet for the straight portion, the permanent magnet for the corner portion, the central permanent magnet, and the end permanent magnet are set in accordance with the magnetic flux density required for each of them. Material or size can be.

(e) Magnetic pole member and magnetic body for filling

It is preferable to use a well-known magnetic body (soft magnetic material) for the magnetic pole member and the magnetic system for filling, and it is preferable to use a steel material having magnetic properties.

(2) Other forms

As another aspect of the magnetron sputtering magnetic field generating apparatus 1, as shown in Fig. 11(a), the concave portions 4d and 5d are formed on both sides of the magnetic field adjusting permanent magnets 41 and 51, and The composition of the substrate is removed. Further, as another aspect, as shown in FIG. 11(b), the magnetic field-adjusting permanent magnets 41 and 51 have the concave portions 4d and 5d and the concave portions 4d and 5d. The magnetic body 8 is filled and the structure of the substrate is removed. By removing the substrate in this manner, the magnetic field generating device 1 is constructed, and the targets 7 and 7 can be placed on both sides of the magnetic field generating device 1 and sputtered on both sides. In addition, in the eleventh (a) and the eleventh (th)th, the corner magnetic field adjustment permanent magnet 51 is the same as the linear portion magnetic field adjustment permanent magnet 41, and therefore will not be described.

Further, the magnetic field generating device of the present invention is arranged in parallel at a predetermined interval, and each magnetic field generating device is moved (sliding) at substantially the same distance as the interval, whereby the integral type target 7 can be used to form a large film. Substrate. Further, a mechanism for adjusting the distance between the upper surface of the magnetic field generating device and the target surface may be provided in the magnetic field generating device.

[Examples]

The invention will be described in more detail based on examples, but the invention is limited to these examples.

First comparative example

In the configuration shown in Fig. 12 (a), Fig. 12 (b), and Fig. 12 (c), ferrite-based stainless steel (SUS430) is placed on the base 6 made of Al-Mg-based alloy (A5052). The central magnetic pole member 2, the end portion 2a, the outer peripheral magnetic pole member 3, the corner outer peripheral magnetic pole member 3c, and the ferrite sintered magnet (NMF-3B manufactured by Hitachi Metal Co., Ltd., maximum energy product: about 4 MGOe) The linear portion permanent magnet 4 and the corner portion permanent magnet 5 are used to form the magnetic field generating device 1 (W = 360 mm, L1 = 260 mm, L2 = 50 mm, a = 110 mm, b = 26 mm, c = 10 mm, d = 8 mm, e = 20 mm, f = 42 mm, g = 42 mm, h = 18 mm, and i = 8 mm).

First embodiment

As shown in Fig. 13 (a), Fig. 13 (b), and Fig. 13 (c), the linear portion permanent magnet 4 and the corner portion permanent magnet 5 are replaced with concave portions 4d and concave portions, respectively. The magnetic field generating device 1 is formed in the same manner as in the first comparative example except for the linear magnetic field adjusting permanent magnet 41 and the corner magnetic field adjusting permanent magnet 51 of the portion 5d (W = 360 mm, L1 = 260 mm, L2 = 50 mm). , a=110mm, b=26mm, c=10mm, d=8mm, e=20mm, f=42mm, g=42mm, h=18mm, h1=13mm, hc=18mm, hc1=13mm, i=8mm, j = 26 mm, k = 8 mm, l = 8 mm, m = 26 mm, n = 8 m, and o = 8 mm).

By the magnetic field analysis, the magnetic flux density at a position (corresponding to the position of the target surface) 17 mm away from the surface (the surface facing the target) of the magnetic field generating apparatus 1 of the first embodiment and the first comparative example was obtained, and The component of the magnetic flux density parallel to the target surface (parallel component of magnetic flux density) and the vertical component (vertical component of magnetic flux density) are along the A line (center of the straight line portion) and the B line as shown in FIG. 14 ( The corners are drawn in Figures 15 and 16, respectively.

As can be seen from Fig. 15 and Fig. 16, the linear portion permanent magnet 41 and the linear portion permanent magnet 5 are replaced with the linear portion magnetic field adjusting permanent magnet 41 having the concave portion 4d and the concave portion 5d. In the corner portion magnetic field adjusting permanent magnet 51, the parallel components of the magnetic flux density in the straight portion and the corner portion are trapezoidal along the magnetization direction, thereby providing a more uniform magnetic field. From these results, it is predicted that the magnetic field generating apparatus of the present invention becomes more uniform in erosion than the conventional one, and the utilization efficiency of the target is further improved.

1‧‧‧Magnetic magnetron sputtering magnetic field generating device

2‧‧‧Central magnetic pole member

2a‧‧‧End

3‧‧‧External magnetic pole members

3c‧‧‧outer peripheral magnetic pole members

4‧‧‧ permanent magnets for straight parts

4a‧‧‧Central Department

4b, 4c‧‧‧ both ends

4d‧‧‧ concave

41‧‧‧ permanent magnet for magnetic field adjustment

42‧‧‧Permanent magnet group for magnetic field adjustment

42a, 42b‧‧‧ permanent magnet

5‧‧‧ permanent magnets for corners

5a‧‧‧Central Department

5b, 5c‧‧‧ both ends

5d‧‧‧ concave

5e‧‧‧ gap

51‧‧‧ permanent magnet for magnetic field adjustment

52‧‧‧Permanent magnet group for magnetic field adjustment

52a, 52b‧‧‧ permanent magnet

6‧‧‧Base

7‧‧‧ target

7a‧‧‧ target surface

8‧‧‧ Filling magnetic body

20‧‧‧ Straight line

30‧‧‧ corner

200‧‧‧Magnetic magnetron sputtering magnetic field generating device

210‧‧‧Base

220‧‧‧Central pole piece

230‧‧‧External pole pieces

240, 250‧‧‧ permanent magnets

Fig. 1(a) is a plan view showing an example of a magnetic field generating device for magnetron sputtering according to the present invention.

Fig. 1(b) is a cross-sectional view taken along line A-A of Fig. 1(a).

Fig. 1(c) is a partial cross-sectional view showing only the magnet for the linear portion taken out from Fig. 1(b).

Fig. 2(a) is a cross-sectional view showing another example of the magnet for a linear portion of the magnetic field generating device for magnetron sputtering according to the present invention.

Fig. 2(b) is a cross-sectional view showing another example of the magnet for the linear portion of the magnetic field generating device for magnetron sputtering according to the present invention.

Fig. 3(a) is a cross-sectional view showing an example in which a magnetic body is disposed in a concave portion provided in a linear portion magnet of the magnetron sputtering magnetic field generating device of the present invention.

(b) is a cross-sectional view showing another example of the concave portion provided in the linear portion magnet of the magnetron sputtering magnetic field generating device of the present invention.

Fig. 3(c) is a cross-sectional view showing another example in which a magnetic body is disposed in a concave portion provided in a linear portion magnet of the magnetron sputtering magnetic field generating apparatus of the present invention.

Fig. 4 is a cross-sectional view showing another example of a magnet for a linear portion of the magnetic field generating device for magnetron sputtering according to the present invention.

Fig. 5 is a cross-sectional view taken along line B-B of Fig. 1(a).

Fig. 6(a) is a partial plan view showing another example of the magnetic field generating device for magnetron sputtering according to the present invention.

Fig. 6(b) is a cross-sectional view taken along line C-C of Fig. 6(a).

Fig. 6(c) is a partial cross-sectional view showing only the corner portion magnets taken out from Fig. 6(b).

Fig. 7 is a cross-sectional view showing another example of a magnet for a corner portion of the magnetic field generating device for magnetron sputtering according to the present invention.

Fig. 8 is a plan view showing another example of the corner portion of the magnetic field generating device for magnetron sputtering according to the present invention.

Fig. 9 is a plan view showing another example of a corner portion of the magnetic field generating device for magnetron sputtering according to the present invention.

Fig. 10 is a plan view showing another example of the corner portion of the magnetic field generating device for magnetron sputtering of the present invention.

Fig. 11(a) is a cross-sectional view showing another embodiment of the magnetic field generating device for magnetron sputtering according to the present invention.

Fig. 11(b) is a cross-sectional view showing another embodiment of the magnetic field generating device for magnetron sputtering according to the present invention.

Fig. 12 (a) is a plan view showing a magnetic field generating apparatus of a first comparative example.

Fig. 12(b) is a cross-sectional view taken along line D-D of Fig. 12(a).

Fig. 12(c) is a cross-sectional view taken along line E-E of Fig. 12(a).

Fig. 13 (a) is a plan view showing the magnetic field generating device of the first embodiment.

Fig. 13(b) is a cross-sectional view taken along line F-F of Fig. 13(a).

Fig. 13(c) is a G-G sectional view of Fig. 13(a).

Fig. 14 is a schematic view showing the A line and the B line of the magnetic field generating apparatus of the first comparative example and the first embodiment.

Fig. 15 is a graph in which the parallel components and the vertical components of the magnetic flux density generated on the target surface by the magnetic field generating devices of the first comparative example and the first embodiment are plotted along the line A.

Fig. 16 is a graph in which the parallel component and the vertical component of the magnetic flux density generated on the target surface by the magnetic field generating device of the first comparative example and the first embodiment are plotted along the line B.

Fig. 17 (a) is a plan view showing an example of a conventional magnetic field generating device for magnetron sputtering.

Fig. 17(b) is a cross-sectional view taken along line H-H of Fig. 17(a).

1‧‧‧Magnetic magnetron sputtering magnetic field generating device

2‧‧‧Central magnetic pole member

2a‧‧‧End

3‧‧‧External magnetic pole members

3c‧‧‧outer peripheral magnetic pole members

4‧‧‧ permanent magnets for straight parts

4a‧‧‧Central Department

4b, 4c‧‧‧ both ends

4d‧‧‧ concave

5‧‧‧ permanent magnets for corners

6‧‧‧Base

7‧‧‧ target

7a‧‧‧ target surface

20‧‧‧ Straight line

30‧‧‧ corner

41‧‧‧ permanent magnet for magnetic field adjustment

H‧‧‧ Thickness of the area at both ends perpendicular to the direction of the target surface

H1‧‧‧The thickness of the area of the central part perpendicular to the direction of the target surface

L‧‧‧Full length of magnetization direction of permanent magnet for magnetic field adjustment

Length of magnetization direction of the area of the central part of L1‧‧‧

Claims (15)

A magnetic field generating device for magnetron sputtering is a magnetic field sputtering magnetic field generating device which is formed by a straight line portion and a corner portion which is opposed to a target and which generates a magnetic field on a target surface, and is characterized by : on a substrate composed of a non-magnetic body, having: (a) a rod-shaped central magnetic pole member; (b) an outer peripheral magnetic pole member disposed to surround the central magnetic pole member; and (c) a plurality of permanent magnets Between the central magnetic pole member and the outer peripheral magnetic pole member, a magnetic pole is disposed opposite to the central magnetic pole member, and another magnetic pole is opposed to the outer peripheral magnetic pole member; and the plurality of permanent magnets disposed on the linear portion include at least one magnetic field adjustment In the permanent magnet, the permanent magnet for magnetic field adjustment has at least three regions of a central portion and both end portions in a magnetization direction, and the regions of the both end portions are equal in thickness to each other in a direction perpendicular to the target surface, and the central portion is equal to each other. a thickness perpendicular to a direction of the target surface, greater than 0% of a thickness of the both ends perpendicular to the target surface and a direction perpendicular to the target surface of the both ends Thickness 99% or less. The magnetic field generating apparatus for magnetron sputtering according to claim 1, wherein a thickness of a region of the central portion perpendicular to the surface of the target is a thickness of the both end portions perpendicular to a direction of the target surface. 30% to 70%. The magnetic field generating device for magnetron sputtering according to claim 1 or 2, wherein the plurality of permanent magnets disposed at the corner portion comprise at least one permanent magnet for magnetic field adjustment, and the vertical axis of the at least one permanent magnet for magnetic field adjustment The thickness in the direction of the target surface is the magnetization direction The central portion is thinner than the ends. The magnetic field generating apparatus for magnetron sputtering according to the first or second aspect of the invention, wherein the length of the magnetization direction of the central portion is 1 to 99% of the total length of the magnetization direction of the permanent magnet. The magnetic field generating device for magnetron sputtering according to claim 1 or 2, wherein at least three regions of the central portion and both end portions are respectively formed by independent permanent magnets, and those independent permanent magnets are pasted and formed. This magnetic field is adjusted with a permanent magnet. The magnetic field generating device for magnetron sputtering according to the second aspect of the invention, wherein the surface of the magnetic field adjusting permanent magnet has a concave shape corresponding to a region of the central portion on a surface on the target side and/or a surface on the base side. unit. The magnetic field generating device for magnetron sputtering according to the sixth aspect of the invention, wherein the magnetic field adjusting permanent magnet has a concave portion corresponding to a region of the central portion on both sides of the target side and the base side. A magnetic field generating device for magnetron sputtering according to claim 6, wherein a magnetic body is disposed in the concave portion. The magnetic field generating device for magnetron sputtering according to the eighth aspect of the invention, wherein the thickness of the magnetic body disposed in the concave portion is the same as the depth of the concave portion. The magnetic field generating device for magnetron sputtering according to claim 8 or 9, wherein the magnetic field adjusting permanent magnet has a concave shape corresponding to a region of the central portion on both sides of the target side and the base side. a portion and a magnetic body disposed in the concave portion. The magnetic field generating device for magnetron sputtering according to claim 1 or 2, wherein at least one of the plurality of permanent magnets is replaced with In the configuration of the permanent magnet group for magnetic field adjustment, the permanent magnet group for magnetic field adjustment is configured by arranging at least two permanent magnets having the same magnetization direction as the permanent magnet and having a short magnetization direction. A magnetic field generating apparatus for magnetron sputtering, comprising: a structure for removing the substrate from a magnetic field generating device for magnetron sputtering according to claim 7 of the patent application. A magnetic field generating device for magnetron sputtering, comprising: a structure for removing the substrate from a magnetic field generating device for magnetron sputtering according to claim 10 of the patent application. A magnetic field generating device for magnetron sputtering is a magnetic field sputtering magnetic field generating device which is formed by a straight line portion and a corner portion which is opposed to a target and which generates a magnetic field on a target surface, and is characterized by : on a substrate composed of a non-magnetic body, having: (a) a rod-shaped central magnetic pole member; (b) an outer peripheral magnetic pole member disposed to surround the central magnetic pole member; and (c) a plurality of permanent magnets Between the central magnetic pole member and the outer peripheral magnetic pole member, a magnetic pole is disposed opposite to the central magnetic pole member, and the other magnetic pole is opposed to the outer peripheral magnetic pole member; and at least one of the plurality of permanent magnets is replaced with a permanent magnetic field adjustment In the configuration of the magnet group, the permanent magnet group for magnetic field adjustment is configured by arranging at least two permanent magnets having the same magnetization direction as the permanent magnet and having a short magnetization direction. The magnetic field generating device for magnetron sputtering according to any one of claims 1, 2, and 14, wherein the magnetic flux density applied to the surface of the target perpendicular to the surface of the target is zero. The magnetic flux density in the direction parallel to the target surface is 10 mT or more.