TWI604936B - Large single-layer ceramic passive element with composite electrode layer - Google Patents
Large single-layer ceramic passive element with composite electrode layer Download PDFInfo
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Description
大型單層陶瓷被動元件帶有複合電極層之素片,該大型單層陶瓷被動元件素片為正方形或正圓片之結構體,透過陶瓷注射成形技術將以下特徵製作出來,含:兩側具有電極凸台、圓角化的電極凸台邊緣、電極凸台與素片本體交接處以及素片本體之邊緣,經過複合脫黏法、氣氛與壓力控制燒結後,再採用低溫真空濺鍍佈施複合電極層,成為一種大型單層陶瓷被動元件帶有複合電極層之素片,本發明所屬之技術領域,包含:陶瓷粉末注射成形、複合脫黏、氣氛與壓力控制燒結以及低溫真空濺鍍複合鍍膜技術。 The large single-layer ceramic passive component has a composite electrode layer, and the large single-layer ceramic passive component is a square or a positive circular structure, and the following features are produced through ceramic injection molding technology, including: The electrode boss, the edge of the rounded electrode boss, the intersection of the electrode boss and the body of the prime sheet, and the edge of the body of the prime sheet are subjected to composite debonding, atmosphere and pressure control sintering, and then combined by low temperature vacuum sputtering. The electrode layer is a large single-layer ceramic passive component with a composite electrode layer. The technical field to which the present invention pertains includes: ceramic powder injection molding, composite debonding, atmosphere and pressure controlled sintering, and low temperature vacuum sputtering composite coating. technology.
市面上販售單層陶瓷被動元件如陶瓷電容器(Ceramic Capacitors)、壓敏電阻器(Metal Oxide Varsitor)以及壓電陶瓷器(PIEZO),已經是過去百年來電子裝置如傳統電冰箱、電視機、冷氣機,甚至到了近代各種吸塵機、伺服器電源供應器等,都是不能或缺的基本電子被動元件,估計每年全世界需求約有5兆片的市場供應,但是其中有近1兆片是為大形的單層陶瓷被動元件,應用在高端電流電壓忍受的精密電子裝置上。 Commercially available single-layer ceramic passive components such as ceramic capacitors (Ceramic Capacitors), varistor (Metal Oxide Varsitor) and piezoelectric ceramics (PIEZO) have been used in electronic devices such as traditional refrigerators and televisions for the past 100 years. Air-conditioners, even in the modern vacuum cleaners, servo power supplies, etc., are indispensable basic electronic passive components. It is estimated that there are about 5 megawatts of market demand in the world every year, but nearly 1 mega-chip is It is a large-sized single-layer ceramic passive component that is applied to precision electronic devices that endure high-end current and voltage.
近年,電子產品過度重視小型化與高積集度的要求,大家的目光與研發精力都集中在小型多層陶瓷被動,而忽略了大型單層陶瓷被動元件改進,甚為可惜。其中,所有陶瓷被動元件的碰撞缺角損失(大型片的重量較大)、密度不均與電極塗布不良是困擾業界最久的項目,必須以超額生產挑 出不良品,並使用昂貴銀漿或銅漿塗布後,再次高溫燒結以期望獲得緊實的電極面與良品,除了加工耗損且消耗昂貴的電極材料之外,多次高溫燒結與製程轉換衍生的功能劣化、能源浪費以及碳排放問題,著實應該以更好的辦法改善。 In recent years, electronic products have paid too much attention to the requirements of miniaturization and high accumulativeness. Everyone's eyes and research and development efforts have focused on the passiveness of small multi-layer ceramics, and it is a pity to ignore the improvement of passive components of large single-layer ceramics. Among them, the collision loss of all ceramic passive components (larger weight of large pieces), density unevenness and poor electrode coating are the longest-running projects in the industry, and must be picked by excess production. After the defective product is coated with expensive silver paste or copper paste, it is sintered at a high temperature again to obtain a firm electrode surface and a good product. In addition to the processing and consumption of expensive electrode materials, multiple high-temperature sintering and process conversion are derived. Functional degradation, energy waste, and carbon emissions should be improved in a better way.
傳統的大型單層陶瓷被動元件素片製程首先必 須以大量的潤滑油脂與蠟基材料混入陶瓷粉末中,經由複雜耗時的球磨混粉與造粒方式,隨後採用大型的油壓壓錠機器,將素片生坯壓製出來,由於大型陶瓷被動元件素片的面積大(大於100mm2)且厚度超過1mm,壓結生坯體不能採用僅能以直角化設計,主要在於直壓模具的限制,有額外的突出特徵會造成應力傳達不確實而累積在特徵與直角邊緣,生坏體的粉末累積在此些特徵位置便與在生坯體中心部位便有差異,燒結過程容易扭曲變形。並且,直壓式模具設計圓角化必須在於模具衝頭上形成鋒利生坯體模穴端的邊緣,這樣薄弱的鋒利邊緣很容易崩角進而斷裂,維護保養不易之外,亦容易造成生坯體的缺陷與掉落模具碎屑污染產品。 The traditional large single-layer ceramic passive component film process must first It is necessary to mix a large amount of lubricating grease and wax-based material into the ceramic powder, and through the complicated and time-consuming ball milling and granulation method, and then use a large hydraulic pressing machine to suppress the green sheet of the raw material, due to the large ceramic passive component. The size of the plain sheet is large (more than 100mm2) and the thickness is more than 1mm. The compacted green body cannot be designed with a right angle. It is mainly limited by the direct pressing mold. The extra protruding features will cause the stress to be transmitted inaccurately. The characteristics and the right-angled edge, the accumulation of the powder of the bad body at these characteristic positions is different from the center of the green body, and the sintering process is easily distorted. Moreover, the flattening mold design fillet must be formed on the edge of the sharp green body cavity at the die punch, so that the weak sharp edge is easy to collapse and break, which is difficult to maintain and easy to cause the green body. Defects and falling mold debris contaminate the product.
直壓壓結後所得到的生坯,必須採用攏長的熱脫 黏方式至少12小時的程序,才能清除生坯體內所含有的大量潤滑劑與蠟,然後進行燒結獲得大型單層陶瓷被動元件的素片。因為沒有有效的辦法形成凸台特徵與圓角化邊緣,便無法防止後製程碰撞、甚至是產品遭受大電流與大電壓衝擊過程,邊角破裂及電極短路引發燒毀,是一直以來的問題。 The green body obtained after the direct pressing and pressing must be separated by heat. The process of sticking for at least 12 hours can remove a large amount of lubricant and wax contained in the green body, and then sintering to obtain a large single-layer ceramic passive component. Because there is no effective way to form the boss features and the rounded edges, it is impossible to prevent the post-process collision, even the product suffers from large current and large voltage impact processes, corner rupture and electrode short circuit cause burnt, which is a problem all along.
隨後,大型陶瓷被動元件之素片須採用傳統的銀 漿或是銅漿佈施電極面,由於漿料體中必須混入至少5%以上的低溫釉料作為燒結金屬電極與陶瓷面附著的輔助,導致電極面積小無法發揮大型陶瓷被動元件的真實功能,也因釉料加入影響電極附著力(普遍低於2kg拉力),因此對於大型陶瓷被動元件的功能影響甚劇。 Subsequently, the large ceramic passive components must be made of traditional silver. If the slurry or copper paste is applied to the electrode surface, at least 5% or more of the low-temperature glaze must be mixed in the slurry as an auxiliary for the adhesion of the sintered metal electrode to the ceramic surface, resulting in a small electrode area that does not play the true function of the large ceramic passive component. Because the glaze addition affects the electrode adhesion (generally lower than 2kg tensile force), it has a great impact on the function of large ceramic passive components.
歸結習知技術發生的缺失點,包含如下: The missing points that come down to the conventional technology include the following:
大型陶瓷被動元件生坯都使用乾式油壓機直壓方法,遭遇到大面積與厚度厚的產品需求時,由於壓力傳達不夠均勻,粉末容易在邊角、表面與中心區形成不均勻的密度分布,燒結後素片扭曲變形很大。 The large-scale ceramic passive component green body adopts the dry hydraulic press direct pressing method. When the demand of large-area and thick-thickness products is encountered, the powder is not uniform enough in pressure distribution, and the powder is easy to form uneven density distribution in the corner, surface and central area, and sintering After the plain piece is distorted and deformed.
使用乾壓成形為了要解決上述生產問題,添加了更多的潤滑劑,造成脫黏排膠製程攏長,生產效率低。使用過多潤滑劑導致收縮比值大於1.2(意味要獲得1mm的尺寸時,生坯要控制在1.2mm),脫黏排膠的時間必須要增加。 In order to solve the above production problems, dry pressing is used to add more lubricants, resulting in a long process of debonding and debinding, and low production efficiency. The use of too much lubricant results in a shrinkage ratio greater than 1.2 (meaning that the green body is controlled to 1.2 mm when a size of 1 mm is obtained) and the time for debonding and debinding must be increased.
由於乾壓法模具的限制,上述大型陶瓷被動元件素片的邊緣都是直角,且無法創造電極面與本體的區隔凸台特徵,當進行電極面塗布施工的時候,非常容易的產生溢度與不同心等問題。影響產品電氣功能甚劇。 Due to the limitation of the dry pressing method, the edges of the above-mentioned large ceramic passive element sheets are right angles, and the characteristics of the electrode pads and the main body of the main body cannot be created. When the electrode surface coating is applied, the overflow is very easy. With different minds and other issues. Affect the electrical function of the product.
以傳統銀漿與銅漿以網印施工後進行二次燒結,或是傳統的真空濺鍍銅電極,對於焊錫合金化抵抗能力甚於薄弱,在大電壓與電流之衝擊之下,無法忍受高溫而產生電極液化,阻抗升高。 After the traditional silver paste and copper paste are screen-printed and then subjected to secondary sintering, or the traditional vacuum-sputtered copper electrode, the resistance to solder alloying is weaker, and under the impact of large voltage and current, it cannot withstand high temperature. The electrode is liquefied and the impedance is increased.
有鑑於上述習知之缺失,本發明之主要目的就是在提供一種大型單層陶瓷被動元件帶有複合電極層之素片,該大型單層陶瓷被動元件素片為正方形或正圓片之結構體,透過陶瓷注射成形技術將以下特徵製作出來,含:兩側具有電極凸台、圓角化的電極凸台邊緣、電極凸台與素片本體交接處以及素片本體之邊緣,經過複合脫黏法、氣氛與壓力控制燒結後,再採用低溫真空濺鍍佈施複合電極層,成為一種大型單層陶瓷被動元件帶有複合電極層之素片,以期克服現有技術製作的產品之困難點。 In view of the above-mentioned shortcomings, the main object of the present invention is to provide a large single-layer ceramic passive component with a composite electrode layer, the large single-layer ceramic passive component plain is a square or a positive circular structure. Through the ceramic injection molding technology, the following features are produced, including: electrode bosses on both sides, rounded electrode boss edges, electrode bosses and the intersection of the prime body and the edge of the plain body, after the composite debonding method After the atmosphere and pressure control sintering, the composite electrode layer is applied by a low-temperature vacuum sputtering cloth to form a large-sized single-layer ceramic passive component with a composite electrode layer, in order to overcome the difficulties of the products manufactured by the prior art.
為達到上述目的,本發明所採用之技術手段,程序如下:陶瓷被動元件之粉末體與高分子聚合物黏結劑 之混合,其中高分子聚合物黏結劑包含石蠟:硬脂酸鋅:高密度線性聚乙烯(HDPE):乙烯、醋酸乙烯酯共聚合物(EVA),經過均勻混合製成2~8mm的顆粒或多角碎片,提供注射成形之用。 In order to achieve the above object, the technical means adopted by the present invention are as follows: powder body and polymer binder of ceramic passive component Mixture, wherein the high molecular polymer binder comprises paraffin: zinc stearate: high density linear polyethylene (HDPE): ethylene, vinyl acetate copolymer (EVA), uniformly mixed to make 2~8mm particles or Multi-angle fragments for injection molding.
經過注射成形機將上述材料注射於具有特殊電 極凸台與圓角化的產品模具內,形成一種大型單層陶瓷被動元件的生坯體(Green Part)。 Injecting the above materials into a special electric machine through an injection molding machine In the pole boss and the filleted product mold, a green part of a large single-layer ceramic passive component is formed.
該生坯體可採用複合式脫黏技術,即在有機溶劑 中快速去除高分子聚合物黏結劑中所含有之石蠟與硬脂酸鋅至少超過95%體積百分比以上;然後,再以熱脫黏方式去除剩餘之高密度線性聚乙烯(HDPE)和乙烯、醋酸乙烯酯共聚合物(EVA)以及殘留之低熔點黏結劑。通過此製程獲得之大型單層陶瓷被動元件脫黏後的生坯體稱為棕坯體(Brown Part)。通常熱脫黏階段會結合最後段之高溫燒結爐一同進行。 The green body can adopt a composite debonding technique, that is, in an organic solvent Quickly remove the paraffin wax and zinc stearate contained in the high molecular polymer binder by at least over 95% by volume; then, remove the remaining high density linear polyethylene (HDPE) and ethylene, acetic acid by thermal debonding Vinyl ester copolymer (EVA) and residual low melting point binder. The green body after the debonding of the large single-layer ceramic passive component obtained by this process is called a brown part. Usually the thermal debonding stage is carried out in conjunction with the last stage of the high temperature sintering furnace.
熱脫黏與高溫燒結採用可控制氣氛與壓力之燒 結爐,在熱脫黏段使用氮氣氛於60~80kpa(0.5~0.6atm)壓力下,方便殘留的高分子聚合物黏結劑能夠在低壓力下由固體轉化成氣體,汽化分解去除,控制熱脫黏溫度在約600℃後轉換成高溫燒結;隨後在高溫燒結段,則切換至一般空氣並設定壓力範圍在102~110kpa(1.0~1.1atm)壓力,燒結後得到大型單層陶瓷被動元件的素片。 Thermal debonding and high temperature sintering use controlled atmosphere and pressure In the hot debonding section, the nitrogen atmosphere is used under the pressure of 60~80kpa (0.5~0.6atm) to facilitate the residual polymer binder to be converted into gas under low pressure, vaporized and decomposed to remove heat. After the debonding temperature is about 600 ° C, it is converted into high temperature sintering; then in the high temperature sintering section, it is switched to normal air and the pressure is set at a pressure of 102~110 kPa (1.0~1.1 atm). After sintering, a large single layer ceramic passive component is obtained. Tablets.
清潔燒結後素片表面的電極凸台,簡單的以高壓 空氣吹帶毛刷清除其表面粉塵。 Clean the electrode boss on the surface of the sintered sheet, simple to high pressure Air blown with a brush to remove dust from the surface.
以低溫真空濺鍍佈施複合電極於此大型單層陶 瓷被動元件素片之電極凸台上,此電極結構使用之鍍膜方式為先佈施第一複合層之過渡層,採用以鎳鉻合金(Cr-Ni)與其為主之其他合金等作為陶瓷被動元件素片材料與第一複合層之導電層之接合與過渡功能,然後再次佈施第一複合層之導電層,如銅(Cu)/鋁(Al)等導電性良好的賤金屬,第一複合層之 過渡層與導電層組合形成一個基本的複合電極層,如此重複至少一次之複數次施工。 Applying a composite electrode to a large single-layer ceramic with a low-temperature vacuum sputtering On the electrode boss of the passive component of porcelain, the electrode structure is coated by first applying the transition layer of the first composite layer, and using nickel-chromium alloy (Cr-Ni) and other alloys as the ceramic passive component. Bonding and transitioning function between the plain material and the conductive layer of the first composite layer, and then applying the conductive layer of the first composite layer again, such as copper (Cu)/aluminum (Al), etc., conductive metal, first composite layer It The transition layer is combined with the conductive layer to form a basic composite electrode layer, such that the construction is repeated at least once.
完成一種大型單層陶瓷被動元件帶有複合電極 層之素片。 Complete a large single-layer ceramic passive component with composite electrode Layer of plain tablets.
此外,本發明進一步揭露一種大型單層陶瓷被動元件帶有複合電極層之素片:該大型單層陶瓷被動元件素片為正方形或正圓片之結構體,透過陶瓷注射成形技術將以下特徵製作出來,含:兩側具有電極凸台、圓角化的電極凸台邊緣、電極凸台與素片本體交接處以及素片本體之邊緣,將傳統直壓模具無法大量製作的特徵成形後,大大提升製造素片的生產效率減少後續製程碰撞缺角的損失。 In addition, the present invention further discloses a large single-layer ceramic passive component with a composite electrode layer: the large single-layer ceramic passive component plain is a square or a positive circular structure, and the following features are fabricated through ceramic injection molding technology; Come out, including: electrode bosses on both sides, edge of electrode bosses with rounded corners, intersection of electrode bosses and plain body, and edges of the body of the prime sheet, which are shaped after the features of the conventional direct-pressing mold cannot be mass-produced. Improve the production efficiency of the manufactured sheets to reduce the loss of collision angles in subsequent processes.
隨後,經過複合脫黏法、氣氛與壓力控制燒結後,再採用低溫真空濺鍍佈施複合電極層,採用以過渡層與導電層組合的複合層,可大大改善焊錫侵蝕電極所造成之電極之附著力下降、耐電壓通流差的功能,同時有效增加電極面積,提升整體陶瓷被動元件功能。 Subsequently, after the composite debonding method, the atmosphere and the pressure control sintering, the composite electrode layer is applied by the low temperature vacuum sputtering, and the composite layer with the transition layer and the conductive layer is used, which can greatly improve the adhesion of the electrode caused by the solder etching electrode. The function of reducing the force and withstanding the voltage difference, and effectively increasing the electrode area and improving the function of the overall ceramic passive component.
11‧‧‧過渡層 11‧‧‧Transition layer
12‧‧‧導電層 12‧‧‧ Conductive layer
21‧‧‧陶瓷粉末及凝結劑 21‧‧‧Ceramic powder and coagulant
22‧‧‧剪刀混鍊機 22‧‧‧Scissors
23‧‧‧顆粒狀射料 23‧‧‧Particles
24‧‧‧注射成型機 24‧‧‧Injection molding machine
241‧‧‧生坯 241‧‧‧green
25‧‧‧複合脫黏設備 25‧‧‧Composite debonding equipment
251‧‧‧棕坯(Brownpart) 251‧‧‧Brown (Brownpart)
26‧‧‧燒結爐 26‧‧‧Sintering furnace
261‧‧‧素片/燒結體 261‧‧‧Segment/sintered body
31‧‧‧溶劑脫黏 31‧‧‧ solvent debonding
310‧‧‧微孔通道 310‧‧‧Microporous channel
311‧‧‧黏結助劑潰散層 311‧‧‧bonding aid collapse layer
32‧‧‧脫黏肌理圖 32‧‧‧ Debonding texture map
320‧‧‧如指頭狀通道 320‧‧‧ as a finger-shaped channel
321‧‧‧黏結助劑 321‧‧‧Bindering aid
322‧‧‧粉團塊 322‧‧‧Powder
33‧‧‧棕坯塊 33‧‧‧Brown briquettes
331‧‧‧鏈結 331‧‧‧ links
41‧‧‧正方片 41‧‧‧ square film
42‧‧‧正圓片 42‧‧‧正片
51‧‧‧電極不對稱 51‧‧‧Asymmetric electrode
52‧‧‧電極對稱 52‧‧‧electrode symmetry
53‧‧‧外接引線 53‧‧‧External leads
71‧‧‧引線 71‧‧‧Leader
72‧‧‧焊錫 72‧‧‧ Solder
S‧‧‧素片 S‧‧‧ prime film
C‧‧‧電極 C‧‧‧electrode
W‧‧‧引線 W‧‧‧Lead
第一圖為本發明大型單層陶瓷被動元件帶有複合電極層之素片之流程圖。 The first figure is a flow chart of a large single-layer ceramic passive component with a composite electrode layer of the present invention.
第二圖為本發明大型單層陶瓷被動元件帶有複合電極層之素片之陶瓷粉末注射成形實施例圖。 The second figure is a diagram of a ceramic powder injection molding embodiment of a large single-layer ceramic passive component with a composite electrode layer of the present invention.
第三圖為本發明大型單層陶瓷被動元件帶有複合電極層之素片之複合脫黏的基理例圖。 The third figure is a basic example of the composite debonding of the large single-layer ceramic passive component with the composite electrode layer.
第四圖為本發明大型單層陶瓷被動元件帶有複合電極層之素片之具有電極凸台與圓角化的素片實施例圖。 The fourth figure is a view showing an embodiment of a large-sized single-layer ceramic passive component having a composite electrode layer and having an electrode bump and a fillet.
第五圖為本發明大型單層陶瓷被動元件帶有複合電極層之素片之素片上電極凸台特徵的功能解釋例圖。 The fifth figure is a functional explanation example of the characteristics of the upper electrode boss of the prime sheet of the large single-layer ceramic passive component with the composite electrode layer of the present invention.
第六圖為本發明大型單層陶瓷被動元件帶有複合電極層之素片所敘述之複合鍍層實施例圖。 Fig. 6 is a view showing an embodiment of a composite plating layer described in the sheet of a large single-layer ceramic passive component with a composite electrode layer of the present invention.
第七圖為本發明大型單層陶瓷被動元件帶有複合電極層之素片所敘述之複合鍍層能夠作為錫-銅共晶熔解屏障之實施例圖。 Fig. 7 is a view showing an embodiment in which the composite plating layer of the large single-layer ceramic passive component with a composite electrode layer of the present invention can be used as a tin-copper eutectic melting barrier.
第八圖為提供錫銅合金共晶熔解現象之參考例圖。 The eighth figure is a reference example for providing the phenomenon of eutectic melting of tin-copper alloy.
以下係藉由特定的具體實施例說明本發明之實施方式,熟習此技藝之人士可由本說明書所揭示之內容輕易地瞭解本發明之其他優點與功效。 The embodiments of the present invention are described by way of specific examples, and those skilled in the art can readily appreciate the other advantages and advantages of the present invention.
以下參照圖式說明本發明之實施例,應注意的是,以下圖式係為簡化之示意圖式,而僅以示意方式說明本發明之基本構想,遂圖式中僅例示與本發明有關之結構而非按照實際實施時之元件數目、形狀及尺寸繪製,其實際實施時各元件之型態、數量及比例並非以圖示為限,可依實際設計需要作變化,合先敘明。 The embodiments of the present invention are described below with reference to the drawings, in which the following drawings are simplified, and the basic concept of the present invention is only illustrated in a schematic manner, and only the structure related to the present invention is illustrated in the drawings. Rather than drawing according to the number, shape and size of the components in actual implementation, the types, quantities and proportions of the components in actual implementation are not limited to the illustrations, and can be changed according to the actual design requirements.
請配合參看第一圖所示,本發明係為一種大型單層陶瓷被動元件帶有銅電極之素片,其製造程序已經於發明內容說明過,在此不重複贅述。請進一步配合參看第二至第八圖所示。 Referring to the first figure, the present invention is a large single-layer ceramic passive component with a copper electrode. The manufacturing procedure has been described in the above description, and the detailed description is not repeated here. Please refer to the second to eighth figures for further cooperation.
有關大型單面陶瓷被動元件素片的成形技術,如第二圖所描述是本發明係採用陶瓷瓷粉末注射成形(Ceramic-powder Injection Molding,CIM)製造的程序圖,圖(21)首先準備陶瓷被動元件的陶瓷粉粉以及必要之高分子聚合物組成的黏結劑,放入圖(22)專用的剪力混鍊機進行加熱混合成為注射用的射料。然後,將射料進行如圖(23)方式以熱擠出成為2~8mm的顆粒狀射料用來注射,以圖(24)專用注射成形機將大型單層陶瓷被動元件之生坯體(Green part)藉由專用模具注射成形。經過注射成形之後,以圖(25)之複合脫黏設備,先 以溶劑快速萃取熔點溫度低之黏結劑所含的高分子聚合物,當完成此溶劑脫黏步驟時,脫除黏結劑的生坯體稱為棕坯(Brown part),將棕坯移入圖(26)之燒結爐進行真空加熱方式進行高溫脫黏,燒除比較高溫度的黏結劑所含的高分子聚合物,隨後進行高溫燒結獲得大型單層陶瓷被動元件的素片。 The forming technique of the large single-sided ceramic passive component sheet, as described in the second figure, is a program diagram of ceramic-powder injection molding (CIM), and (21) first prepares ceramics. The ceramic powder of the passive component and the binder composed of the necessary high molecular polymer are placed in a shearing chain mixer (22) for heating and mixing to form an injection for injection. Then, the shot is subjected to hot extrusion into a particle size of 2-8 mm for injection according to the method of (23), and the green body of the large single-layer ceramic passive component is injected by the special injection molding machine of (24) ( Green part) is injection molded by a special mold. After injection molding, the composite debonding equipment of Figure (25), first The high-molecular polymer contained in the binder having a low melting point is rapidly extracted by a solvent. When the solvent debinding step is completed, the green body from which the binder is removed is called a brown part, and the brown body is moved into the drawing ( 26) The sintering furnace is vacuum-heated to perform high-temperature debonding, and the high-molecular polymer contained in the relatively high-temperature binder is burned off, followed by high-temperature sintering to obtain a large-sized single-layer ceramic passive component.
第一表所敘述為舉出兩種類型的陶瓷被動元件以第二圖所示之製程進行的操作參數,由於每一種大型單層陶瓷被動元件素片的密度並不相同,所表內所付的參數也不全然相同,請 貴審查委員能充分理解。 The first table describes the operating parameters of the two types of ceramic passive components in the process shown in Figure 2. Since the density of each large single-layer ceramic passive component is not the same, The parameters are not all the same, please understand it carefully.
另外,為方便 貴審查委員充分理解陶瓷粉末注 射成形的生坯體/素片尺寸放大率(OSF,Oversize Shrinkage Factor),如第二表所示為計算程序,其中先假設取得之陶瓷素片為氧化鋅,密度為5.61g/cm3;黏結劑為1.02g/cm3。則必須利用數學法推算出氧化鋅與黏結劑的重量比,方可作為生產之數據。 In addition, in order to facilitate the review committee members to fully understand the ceramic powder injection The formed bulk/oversize Shrinkage Factor (OSF), as shown in the second table, is a calculation procedure in which the ceramic sheet obtained is assumed to be zinc oxide with a density of 5.61 g/cm3; The agent was 1.02 g/cm3. The mathematical method must be used to calculate the weight ratio of zinc oxide to the binder before it can be used as production data.
本發明所稱之複合脫黏與燒結請見第三圖所表示,在第二圖(26)中的脫黏步驟屬於複合脫黏的低溫脫黏段,如圖(31)所示為其脫黏機理之描述,以有機溶劑(石油基之有機溶劑如正庚烷與正己烷)進行低溫(60℃)浸泡萃取黏結劑中的PW/SA/ZS等低熔點的高分子聚合物,使生坯體產生多孔質狀方便下一脫黏程序進行。當完成低溫溶劑脫黏後,隨後移入第二圖(27)所示之燒結爐,進行高溫段真空熱分解脫黏,如第三圖(32)之脫黏機理圖,高溫的黏結劑藉由高溫和真空的抽汲作用,汽化分解的高溫黏結劑(HDPE/PE/EVA)便沿著之前低 溫脫黏後的路徑排除。隨後,第三圖(33)所示,高溫正壓燒結便可進行,被移除黏結劑的多孔隙粉末體經過高溫燒結的固態擴散機理,可以獲得高密度的陶瓷素片。 The composite debonding and sintering referred to in the present invention are shown in the third figure. The debonding step in the second figure (26) belongs to the composite debonding low temperature debonding section, as shown in Figure (31). The description of the viscosity mechanism is carried out by using a low-temperature (60 ° C) immersion extraction of a low-melting high-molecular polymer such as PW/SA/ZS in an organic solvent (a petroleum-based organic solvent such as n-heptane and n-hexane). The porous body is made porous to facilitate the next debonding process. After the low temperature solvent is debonded, it is then transferred to the sintering furnace shown in the second figure (27) for vacuum thermal decomposition and debonding in the high temperature section, such as the debonding mechanism diagram of the third figure (32), and the high temperature binder is used. High temperature and vacuum twitching action, vaporization decomposition of high temperature binder (HDPE/PE/EVA) is lower The path after temperature debonding is excluded. Subsequently, as shown in the third diagram (33), high-temperature positive pressure sintering can be performed, and the porous ceramic body from which the porous powder of the binder is removed is subjected to high-temperature sintering to obtain a high-density ceramic sheet.
第四圖表示有關本發明之大型單層陶瓷被動元 件的斷面圖形特徵,圖(41)為正方片;圖(42)為正圓片,細部放大圖B剖面斜線部份為一種大型單層陶瓷被動元件的斷面圖;其中S:為正方片的邊長(15mmS or D100mm);如為正圓形,則S=D=圓形的直徑。T:為陶瓷片的厚度(1mmT50mm);t:為電極凸台高度(0.1mmt1/2T),凸台係高出大型單層陶瓷被動元件最大面積底面之上,供後續電極佈施使用。TR:為圓角化的大型單層陶瓷被動元件素片本體邊緣,R之尺寸範圍為(0.05mmR1/2T)。tr:為圓角化的電極凸台邊緣與單層陶瓷被動元件本體相接處,r尺寸範圍為(0.05mmr1/2t)。 The fourth figure shows the cross-sectional graphic features of the large single-layer ceramic passive component of the present invention, wherein (41) is a square piece; the figure (42) is a perfect disk, and the detail is enlarged. The oblique portion of the B section is a large single layer. Sectional view of ceramic passive components; where S: is the side length of the square piece (15mm S or D 100mm); if it is a perfect circle, then S = D = the diameter of the circle. T: the thickness of the ceramic sheet (1mm T 50mm); t: the height of the electrode boss (0.1mm t 1/2T), the boss is higher than the maximum area of the large single-layer ceramic passive component for the subsequent electrode application. TR: the edge of the bulk body of a large single-layer ceramic passive component with a rounded corner. The size range of R is (0.05mm). R 1/2T). Tr: the edge of the electrode boss of the fillet is connected to the body of the single-layer ceramic passive component, and the r size range is (0.05mm r 1/2t).
請見第五圖,當完成具有電極凸台特徵之大型單 層陶瓷被動元件素片,便需要開始進行複合電極面的佈施。 由於過去採用的昂貴金屬粉體(銀漿或銅漿),甚至是傳統的真空濺鍍、蒸鍍法,因為沒有凸台特徵的設計,素片容易產生移動與對位不準確的問題,結果造成兩面電極不對稱或不同心,如第五圖(51)所示。在本發明則為第五圖(52)所示,我們可採用金屬如鋁合金或不鏽鋼銑切出適當的遮蔽治具,利用本發明之特殊電極凸台特徵進行精確定位,不論採用何種金屬漿體不師法或是真空蒸鍍、真空濺鍍乃至於真空多弧離子鍍膜,都可以使電極精確定位且對稱。同時,如第五圖(53)所示,由於電極凸台高出大型單層陶瓷被動元件之素片的本體表面,當進行外接引線焊接時,引線底部不會與大型單層陶瓷被動元件之素片的本體表面接觸,避免了電暈效應(Corona Effect,一種引線與陶瓷被動元件接觸與非接觸的微小空間導致的起弧,是過去陶瓷被動元件最不容易察覺的電氣干擾), 也是一種新穎的解決方法。 Please see the fifth figure when completing a large single sheet with electrode boss features. Layer ceramic passive components, you need to start the application of the composite electrode surface. Due to the expensive metal powder (silver paste or copper paste) used in the past, even the traditional vacuum sputtering and evaporation methods, because there is no boss design, the plain film is prone to the problem of inaccuracy of movement and alignment. Causes the two electrodes to be asymmetrical or dissimilar, as shown in Figure 51 (51). In the present invention, as shown in the fifth figure (52), we can use a metal such as aluminum alloy or stainless steel to cut out a suitable shielding jig, and use the special electrode boss feature of the present invention to accurately position the metal regardless of the metal used. The slurry can be accurately positioned and symmetrical without the slurry or vacuum evaporation, vacuum sputtering or vacuum multi-arc ion plating. At the same time, as shown in the fifth figure (53), since the electrode boss is higher than the body surface of the large single-layer ceramic passive component, when the external lead bonding is performed, the bottom of the lead does not overlap with the large single-layer ceramic passive component. The surface contact of the plain film avoids the corona effect (Corona Effect, a kind of arcing caused by contact and non-contact micro-space between the lead and the ceramic passive component, which is the least noticeable electrical interference of the passive component of the ceramic in the past). It is also a novel solution.
第六圖所表示為本發明採用之複合鍍膜層之實施範例,係為兩層複合鍍膜層之展示,在大型單面陶瓷被動元件素片之上首先以真空濺鍍施工佈施第一複合層之過渡層,此過渡層係作為陶瓷被動元件表面材料與第一複合層之導電層材料相接和之作用;隨後進行第一複合層之導電層之佈施;然後過渡層和導電層組合成為第一複合層,如此重複一次為本圖之實施範例。 The sixth figure shows an example of the composite coating layer used in the present invention, which is a demonstration of a two-layer composite coating layer. First, a first composite layer is applied by vacuum sputtering on a large single-sided ceramic passive component sheet. a transition layer, the transition layer acts as a surface material of the ceramic passive component and interacts with the conductive layer material of the first composite layer; subsequently, the conductive layer of the first composite layer is applied; then the transition layer and the conductive layer are combined to become the first The composite layer is repeated as an example of the implementation of this figure.
有關此導電複合層之實施以真空濺鍍參數範例如第三表所示 The implementation of this conductive composite layer is shown in the third table as a vacuum sputtering parameter.
第七圖為本發明採用之複合鍍膜層之實施範例,用以解釋複合鍍層如何抵抗焊錫侵蝕和高溫熔解作用,請先 請先看第八圖有關錫-銅二元合金相圖(Phase Diagram),資料係由國際熱動力資料庫系統提供(The Integrated Thermodynamic Databank System,www.factsage.com),在隨機的狀況與一大氣壓下,錫-銅發生所謂共晶熔解(Eutectic melting)的溫度在214℃的位置(其中Cu:Sn=97:3),遠比傳統的焊錫溫度範圍(230~260℃)更低許多,一但出現共晶現象,錫-銅共晶熔解的現象會持續擴散直到溫度低於該熔點溫度。因此,本發明利用與錫共晶熔點高於此溫度之第三種金屬或其他合金,來作為阻擋錫-銅共晶熔解的屏障(Barrier),也剛好是本發明所使用的複合鍍層之過渡層材料,為鎳鉻合金(Cr-Ni)與其為主之其他合金等,可以有效阻擋錫-銅共晶熔解。 The seventh figure is an example of the composite coating layer used in the present invention to explain how the composite coating resists solder erosion and high temperature melting, please first Please see Figure 8 for the phase diagram of the tin-copper binary alloy. The data is provided by the International Thermodynamic Databank System (www.factsage.com), in a random situation and At atmospheric pressure, tin-copper undergoes a so-called Eutectic melting at a temperature of 214 ° C (where Cu:Sn = 97:3), which is much lower than the conventional solder temperature range (230 to 260 ° C). Once the eutectic phenomenon occurs, the phenomenon of tin-copper eutectic melting continues to spread until the temperature is lower than the melting point. Therefore, the present invention utilizes a third metal or other alloy having a melting point of tin eutectic higher than this temperature as a barrier to block tin-copper eutectic melting, and is also a transition of the composite plating used in the present invention. The layer material, which is a nickel-chromium alloy (Cr-Ni) and other alloys thereof, can effectively block the tin-copper eutectic melting.
綜觀上述,可見本發明在突破先前之技術下,確實已達到所欲增進之功效,且也非熟悉該項技藝者所易於思及,再者,本發明申請前未曾公開,且其所具之進步性、實用性,顯已符合專利之申請要件,爰依法提出專利申請,懇請 貴局核准本件發明專利申請案,以勵發明,至感德便。 Looking at the above, it can be seen that the present invention has achieved the desired effect under the prior art, and is not familiar to those skilled in the art. Moreover, the present invention has not been disclosed before the application, and it has Progressive and practical, it has already met the requirements for patent application, and has filed a patent application according to law. You are requested to approve the application for this invention patent to encourage invention.
雖然前述的描述及圖式已揭示本發明之較佳實施例,必須瞭解到各種增添、許多修改和取代可能使用於本發明較佳實施例,而不會脫離如所附申請專利範圍所界定的本發明原理之精神及範圍。熟悉本發明所屬技術領域之一般技藝者將可體會,本發明可使用於許多形式、結構、佈置、比例、材料、元件和組件的修改。因此,本文於此所揭示的實施例應被視為用以說明本發明,而非用以限制本發明。本發明的範圍應由後附申請專利範圍所界定,並涵蓋其合法均等物,並不限於先前的描述。 While the foregoing description of the preferred embodiments of the invention, the embodiments of the invention The spirit and scope of the principles of the invention. Modifications of many forms, structures, arrangements, ratios, materials, components and components can be made by those skilled in the art to which the invention pertains. Therefore, the embodiments disclosed herein are to be considered as illustrative and not restrictive. The scope of the present invention is defined by the scope of the appended claims, and the legal equivalents thereof are not limited to the foregoing description.
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