TWI597220B - An environment sensing and data transmission sealing device - Google Patents

Description

Sealing device with environmental sensing and data transmission

The invention relates to a sealing device, in particular to a sealing device with environmental sensing and data transmission.

The wafer used in the current semiconductor (Wafer) is a single crystal crucible that has been extracted from cerium oxide (SiO2) in a crystallizer, and then sliced and polished into a wafer. After the round production, it will be placed in a nitrogen-filled wafer transport box (FOSB), then packaged in an opaque plastic film, and finally the air in the wafer transport box and the plastic film will be extracted to preserve the crystal. The circle maintains a certain quality for a period of time to avoid oxidation or deterioration of the wafer, and is smoothly transported to the semiconductor factory for semiconductor processing.

The plurality of wafers described above are moved in a clean room of a semiconductor factory and placed in a front-open wafer transfer box (FOUP) to facilitate multi-channel semiconductor processing. When the semiconductor process is completed, the plurality of wafers are placed in the wafer transport box. (FOSB) is preserved to maintain the quality of the multiple wafers shipped to the packaging factory for the process of cutting and packaging.

Referring to FIG. 1, a wafer transfer cassette capable of monitoring a process environment is disclosed in Taiwan Patent No. I298185, which comprises a body 20 for accommodating a plurality of wafers and a sampling mechanism 30 disposed on the body 20. The sampling mechanism 30 is configured to adsorb air pollutants in the body 20, and may be disposed on one of the top surface, the back surface, or both sides of the body 20. The sampling mechanism 30 can also include an inner member disposed on the body 20 and an outer member fastened to the inner member, wherein the inner member and the outer member have an opening 66 for the body 20 The interior communicates with the external environment to obtain air inside the body 20.

However, when the above-mentioned wafer transfer cassette capable of monitoring the process environment is actually used, the following disadvantages still occur:

First, can not save the wafer

The conventional sampling mechanism forms an opening in the inner piece and the outer piece, so that the inside of the body communicates with the external environment to obtain the air inside the body, but the opening does allow the outside air to enter the conveying box. The internal gas is polluted and the quality of the wafer placed in the transfer cassette cannot be reliably preserved.

Second, unsustainable monitoring

The conventional sampling mechanism is a transport box corresponding to a sampling mechanism, which is two separate devices and connected together by a transmission line to obtain information in the transport box. When the transport box has to be transported for long distance, the sampling mechanism It is impossible to move with the transfer box, which makes it impossible to continuously monitor the environment inside the transfer case.

Third, can not provide wafer information

The wafer transfer cassette is only sampled and monitored for the internal environment of the transfer box, and there is no record for the wafer placed on the transfer box. When the internal environment changes and the quality of the wafer is affected, the wafer transfer cassette cannot provide wafer information. Refer to the relevant technical staff.

The conventional technique is to use an open-drum wafer transfer cassette for internal air sampling monitoring, which causes air inside the transfer box to be contaminated, and sampling monitoring does not continuously monitor the sealed state of the transfer box when a leak occurs. The accident caused the moisture inside the wafer transfer box, and could not immediately notify the relevant technicians for processing, and only the rust of the plurality of wafers was caused to cause damage. How to ensure the environment preserved during wafer transportation and to master the quality information of each wafer is an urgent problem for the relevant technical personnel.

In view of the above, an object of the present invention is to provide a sealing device with environmental sensing and data transmission, which is suitable for carrying and transmitting at least one item, and includes a main body unit and an information sensing unit. The body unit includes a body surrounding an accommodating space.

The information sensing unit includes a sensor disposed in the accommodating space, and a first information transceiver electrically connected to the sensor, wherein the sensor can detect environmental parameters in the accommodating space The first information transceiver can transmit the environmental parameter to let the outside world know the state that the item is located in the accommodating space.

Another technical means of the present invention is that the information sensing unit further includes a memory disposed in the accommodating space and electrically connected to the sensor and the first information transceiver.

Another technical means of the present invention is that the information sensing unit further includes a second information transceiver disposed outside the main unit for receiving environmental parameter information sent by the first information transceiver.

According to still another aspect of the present invention, the first information transceiver and the second information transceiver are Radio Frequency IDent (RFID).

Another technical means of the present invention is that the sensor has a plurality of sensing heads for respectively sensing temperature, humidity, gas composition, gas concentration, and the like in the accommodating space.

Another technical means of the present invention is that the main body has a first outer casing and a second outer casing which is detachably assembled with the first outer casing.

A further technical means of the present invention is that the main body has a packaging bag and a sealing member which is disposed on the packaging bag and can be opened and closed.

Another technical means of the present invention is that the sealing device with environmental sensing and data transmission further includes a carrying unit, and includes at least one bearing disposed in the receiving space for separating the plurality of items. plate.

Another technical means of the present invention is that the carrying unit further includes a pressing disc disposed in the accommodating space for covering the plurality of articles on the carrying tray.

According to still another aspect of the present invention, the main body unit further includes an electromagnetic wave protection layer disposed in the carrying unit and the main body.

The beneficial effect of the invention is that the main body unit can seal the article in the accommodating space from the outside, so that the article can be transported without being contaminated, and the sensor is arranged in the closed accommodating space. Inducing the environmental parameter of the accommodating space, the first information transceiver can not damage the tightness of the accommodating space when the wireless information is sent and received by the first information transceiver, when the main unit is located in the wireless transmission range of the second information transceiver, The first information transceiver can transmit related parameters by wireless technology and the second information transceiver for providing reference to relevant technical personnel.

A‧‧‧ items

3‧‧‧Main unit

31‧‧‧ accommodating space

32‧‧‧ Subject

321‧‧‧ first shell

322‧‧‧ second casing

323‧‧‧Package bags

324‧‧‧ Seal

33‧‧‧Electromagnetic wave protection layer

4‧‧‧ Carrying unit

41‧‧‧ Carrying tray

42‧‧‧Compressed disk

5‧‧‧Information Sensing Unit

51‧‧‧ sensor

511‧‧‧ Sense head

52‧‧‧First Information Transceiver

53‧‧‧ memory

54‧‧‧Second information transceiver

1 is a schematic view of a device for describing a wafer transfer cassette capable of monitoring a process environment; and FIG. 2 is a schematic view of a device having environmental sensing and data transmission. 3 is a schematic exploded view showing a main unit of the first preferred embodiment; FIG. 4 is a schematic view of an apparatus for explaining an information sensing unit of the first preferred embodiment; FIG. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 6 is a cross-sectional view showing a cross-sectional view of a second preferred embodiment of the present invention; FIG. Figure 7 is a cross-sectional view showing a third preferred embodiment of the present invention having a sealing device for environmental sensing and data transmission; and Figure 8 is a schematic view of the device for sealing the environment sensing and data transmission A fourth preferred embodiment of the device.

The details of the related patents and the technical contents of the present invention will be apparent from the following detailed description of the preferred embodiments of the accompanying drawings.

It should be noted that, before the detailed description, similar elements are denoted by the same reference numerals.

Referring to Figures 2, 3 and 4, a first preferred embodiment of the present invention has an environmental sensing and data transmission sealing device adapted to carry and transport an article A. In the first preferred embodiment, the article A is a plurality of wafers, and the sealing device comprises a main body unit 3, a carrying unit 4, and an information sensing unit 5.

The main body unit 3 includes a main body 32 defining an accommodating space 31. The main body 32 has a first outer casing 321 and a second outer casing 322 detachably assembled with the first outer casing 321 . The carrying unit 4 includes a carrying tray 41 disposed in the accommodating space 31 for partitioning the plurality of wafers, and a receiving space 31 is disposed in the accommodating space 31 for covering the plurality of wafers on the carrying tray 41. Pressing disk 42 on top.

When the first and second outer casings 321 and 322 of the device are coupled together, the accommodating space 31 can be isolated from the outside, and the first and second outer casings 321 and 322 are respectively formed with a through hole (not shown). A gas (for example, nitrogen gas) is poured into the accommodating space 31, and the two through holes may be closed after the gas is poured to maintain the sealing property of the accommodating space 31. The means of sealing can be a sealing plug made of rubber material, or a rotary valve, etc., as long as the two through holes can be closed, and this should not be limited thereto, and since this is not the focus of the case, it is no longer More details.

When a wafer is fabricated in a semiconductor manufacturing process in a semiconductor factory, a plurality of aligned crystal grains are formed on each wafer, and a plurality of integrated circuits and metal electrodes are formed in each of the crystal grains, usually to avoid the surface of the plurality of crystal grains. The integrated circuit and the metal electrode are in contact with the moisture in the air to cause electrical contact failure. The semiconductor process environment is maintained in a clean room with a certain temperature and humidity condition to avoid oxidation of the integrated circuit and the metal electrode. Product yield is reduced.

After the plurality of wafers complete the semiconductor process, the carrier 41 is placed in the first housing 321 to space the plurality of wafers from each other, and the second housing 322 covers the first housing 321 to seal the capacitor. When the space 31 is disposed, the pressing plate 42 located in the second outer casing 322 can be fixed to the top of the plurality of wafers to stabilize the plurality of wafers sealed in the accommodating space 31, and then can leave the clean room and be transported. Go to the downstream manufacturer for packaging and testing.

The information sensing unit 5 includes a sensor 51 disposed in the accommodating space 31, a first information transceiver 52 electrically connected to the sensor 51, and a first information transceiver 52 disposed in the accommodating space 31. The first information transceiver 52 is electrically connected to the memory 53 and a second information transceiver 54 disposed outside the main unit 3.

The sensor 51 can detect the environmental parameter in the accommodating space 31, and the first information transceiver 52 can transmit the environmental parameter information to let the outside world know that the item A is located in the accommodating space 31. status. The sensor 51 has a plurality of sensing heads 511 for sensing environmental parameters of temperature, humidity, gas composition, gas concentration, and the like in the accommodating space 31. In the first preferred embodiment, the sensor 51 can detect the concentration of hydrogen (or hydrogen molecules) in the accommodating space 31 to obtain the water content in the air. In actual implementation, other gases can also be used. Detection of sensors should not be limited to this.

It should be noted that the first information transceiver 52, the sensor 51, and the memory 53 disposed in the accommodating space 31 of the present invention may be Integrated into a thin, viscous patch (for example, in the form of a tape), in the first preferred embodiment, the thin viscous patch is adhered to the inner surface of the second outer casing 322. It is also possible to adhere to the inner surface of the first outer casing 321 and should not be limited thereto. Furthermore, the main body 32 can also be manufactured using a material having an electromagnetic wave-proof patch, and the thin adhesive-adhesive patch can be attached to the outside of the main body 32, and the sensing head 511 of the sensor 51 can be inserted into the main body 32. The body 32 senses environmental parameters in the accommodating space 31.

The second information transceiver 54 disposed outside the main unit 3 can be wirelessly connected with the first information transceiver 51 to receive the detected environmental parameter information or transmit the item A related information. Preferably, the first information transceiver 51 and the second information transceiver 54 are Radio Frequency IDent (RFID), which are wireless information transmission, and can be used in actual implementation. Wireless transmission technology should not be limited to this.

The environment parameter sensed by the sensor 51 can be stored in the memory 53 for external transmission to the first information transmission transceiver 52. In addition, the second information transmission transceiver 54 can also transmit through wireless information. The information of the item A is stored in the memory 53, and the information can be moved to the downstream manufacturer along with the main unit 3 for reference to relevant systems and technicians.

Preferably, the information stored in the memory 53 of the first preferred embodiment includes a tag identification code, a transport box number, an environmental parameter, a wafer number, a customer number, and quality information of a plurality of crystal grains in the transport wafer. A variety of materials, of course, the actual implementation can also choose one of the types of data to be stored, should not be limited to this.

It is worth mentioning that before the plurality of wafers leave the semiconductor factory, the semiconductor factory usually excludes the water in the accommodating space 31 by using the main body 32 to be sealed by nitrogen. At this time, one of the through holes can be utilized. The nitrogen gas is pressurized into the accommodating space 31, and the air in the accommodating space 31 is discharged from the other through hole due to the pressure increase, so that the accommodating space 31 is filled with nitrogen. The gas is discharged to the water gas. In principle, the longer the nitrogen filling time is, the lower the moisture content (humidity) in the accommodating space 31 is. Therefore, when the humidity in the accommodating space 31 is less than 7%, Effectively protects the wafer from oxidation.

Since the sensing unit 5 of the present invention can directly detect the environmental information in the accommodating space 31 to obtain the actual temperature and humidity data, the filling of the accommodating space 31 can be prevented from being completely discharged. In the operation of nitrogen gas, the sealing device can effectively protect the wafer located in the accommodating space 31 compared to the conventional method of determining the gas filling time.

In addition, the first preferred embodiment installs the second information transceiver 54 on the transportable vehicle during the transportation to continuously receive the wireless transmission information of the first information transceiver 52. When the sensor 51 in the accommodating space 31 detects an abnormality, the first information transceiver 52 can issue an alarm to the second information transceiver 54 to notify the relevant personnel to perform improvement, for example, the subject can be as soon as possible. The unit 3 re-seals the nitrogen and reinforces the sealing operation of the main unit 3, or adjusts the appropriate temperature to store the item A. The second information transceiver 54 can be installed on the vehicle in addition to the vehicle, and should not be limited thereto.

The present inventors have emphasized that since the humidity is directly related to the temperature, in the sealed accommodation space 31, when the stable and low humidity is to be maintained, the accommodation space 31 must be controlled to a certain temperature range. The information sensing unit 5 of the present invention is a parameter that can simultaneously sense humidity and temperature, and wirelessly transmits the information to continuously confirm that the plurality of wafers are transported in a stable storage environment.

As described above, since the sensor 51 of the present invention can continuously and continuously sense the environmental parameters in the accommodating space 31, when a person opens the main body 32 to break the sealing property of the accommodating space 31, or the main body 32, when a slight gap or hole is generated and the outside air penetrates into the accommodating space 31, the information sensing unit 5 can sense and record immediately. The message is sent outside, and the environment of the accommodating space 31 is improved to prevent the article A from being contaminated by external dust, impurities, or oxidized to cause loss.

Referring to Figures 5 and 6, a second preferred embodiment of the present invention has an environmental sensing and data transmission sealing device. The second preferred embodiment is substantially identical to the first preferred embodiment. Further, the main unit 3 further includes an electromagnetic wave protection layer 33 disposed in the carrying unit 4 and the main body 32. The electromagnetic wave protection layer 33 can block external electromagnetic waves to protect the storage. The plurality of wafers in the space 31 prevent the integrated circuit in the wafer from being damaged by external electromagnetic waves. The thin information-adhesive patch provided with the first information transceiver 52, the sensor 51, and the memory 53 is adhered to the inner surface layer of the first outer casing 321 .

Preferably, the information sensing unit 5 is disposed on the outer layer of the electromagnetic wave protection layer 33 to prevent the wireless transmission signal from entering the accommodating space 31, and the sensing head 511 of the sensor 51 is disposed on the electromagnetic wave. The protective layer 33 senses environmental parameters of the accommodating space 31.

Referring to FIG. 7 , a third preferred embodiment of the present invention has a sealing device for environmental sensing and data transmission. The third preferred embodiment is substantially the same as the first preferred embodiment, and the same is not described herein. The main body 32 has a package 323, and a sealing 324 which is disposed on the package 323 and can be opened and closed. The carrying unit 4 includes a plurality of detachable and disposed in the accommodating space 31. In the third preferred embodiment, the article A is a plurality of cut and packaged crystal grains arranged in the plurality of carrier trays 41.

When the carrier tray 41 carries a plurality of encapsulated dies, the plurality of carrier dies 41 can be stacked on each other and placed in the accommodating space 31 by the sealing 324. In this case, the accommodating space 31 can be The air is taken out and the accommodating space 31 is vacuum sealed by using the sealing 324. The plurality of grains are saved.

The sensor 51, the first information transceiver 52, and the memory 53 of the information sensing unit 5 are disposed on the inner surface of the packaging bag 323, and the sensor 51 can sense the environment of the accommodating space 31. The parameter is stored in the memory 53. The first information transceiver 52 can perform wireless information transmission with the second information transceiver 54 located outside the main unit 3, and can not save the sealing property of the accommodating space 31 to save. The plurality of crystal grains placed in the accommodating space 31, once the vacuum sealed state of the accommodating space 31 is broken, the sensor 51 senses the environmental parameter change of the accommodating space 31, and records and sends a message. Notify the outside world.

Referring to FIG. 8 , a fourth preferred embodiment of the present invention has a sealing device for environmental sensing and data transmission. The fourth preferred embodiment is substantially the same as the first preferred embodiment, and the same is not described herein. The main body 32 is a cylindrical bottle body, and the second outer casing 322 is detachably locked above the first outer casing 321 for sealing the accommodating space 31.

The information sensing unit 5 of the fourth preferred embodiment includes a sensor 51 disposed in the accommodating space 31, and a first information transceiver 52 electrically connected to the sensor 51, preferably The sensor 51 and the first information transceiver 52 are integrated into a thin adhesive patch and adhered to the inner surface of the second outer casing 322. In actual implementation, the thin adhesive can also be adhered. The adhesive patch is adhered to the inner surface of the first outer casing 321 and should not be limited thereto.

In the fourth preferred embodiment, the article A is a colloidal silver paste having conductive properties, which is generally used in a packaging process of an integrated circuit, and its storage characteristics must be kept low (-20 ° C ~ -40 ° C). The stored temperature is proportional to the life of the silver paste. When the temperature is -40 ° C, the shelf life is 12 months, but when placed at room temperature, the quality of the silver gel will be less than 2 days. It has changed and cannot be used.

Preferably, the silver paste can be placed in the fourth preferred embodiment. The information sensing unit 5 can continuously sense the temperature and humidity of the accommodating space 31 and transmit the temperature and humidity parameters to the second outside the main unit 3 by wireless transmission technology (RFID). The information transceiver 54 and the second information transceiver 54 can be connected to a temperature controller (not shown) to control the temperature of the main unit 3 to be maintained at a low temperature to properly store the silver glue in the accommodating space 31. Quality characteristics.

It can be seen from the above description that the sealing device with environmental sensing and data transmission of the present invention does include the following advantages:

First, provide environmental sensing parameters

The main body 32 of the present invention can isolate the accommodating space 31 from the outside, and provide a sensor 51 capable of sensing environmental parameters (temperature and humidity and gas component concentration) in the accommodating space 31, and wirelessly transmitting information. The first information transceiver 52 not only does not damage the airtightness of the accommodating space 31, but also provides environmental sensing parameters of the accommodating space 31 outside.

Second, the stored items related values

The memory 53 of the device can not only continuously provide the storage of the environmental parameters of the sensor 51, but also use the second information transceiver 54 to transmit the relevant parameters of the item A to the first information transceiver 52 for storage. The stored information is moved with the item A and provided to the downstream manufacturer for reference.

Third, to ensure the preservation and delivery of goods

The sealing device can sense storage when the environmental parameter of the accommodating space 31 changes abnormally and immediately issue an alarm to notify the relevant technician or the system to perform environmental improvement, for example, the nitrogen sealing operation can be performed on the main body unit 3 as soon as possible or Adjust the appropriate storage temperature to ensure the storage conditions and delivery quality of the item A.

In summary, the main body 32 of the sealing device can seal the space 31 to block the outside air, and exclude the nitrogen sealing technology. The moisture in the space 31 is such that the article A can be stored and transported outside the dust-free room without being contaminated. In addition, the sealing device is further provided with an information sensing unit 5 for sensing the environmental parameters and transmitting the external wireless information in the accommodating space 31 for continuously sensing the environmental parameters of the accommodating space 31. The sealing space of the accommodating space 31 is broken, so that the object of the present invention can be achieved.

However, the above is only the four preferred embodiments of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent changes made by the scope of the present invention and the description of the invention are Modifications are still within the scope of the invention.

322‧‧‧ second casing

5‧‧‧Information Sensing Unit

51‧‧‧ sensor

511‧‧‧ Sense head

52‧‧‧First Information Transceiver

53‧‧‧ memory

54‧‧‧Second information transceiver

Claims (9)

The utility model relates to a sealing device with environment sensing and data transmission, which is suitable for carrying and transmitting at least one item, and comprises: a main body unit, comprising a body surrounding an accommodating space, and the accommodating space is isolated from the outside; An information sensing unit includes a sensor disposed in the accommodating space, a first information transceiver electrically connected to the sensor, and a sensor disposed in the accommodating space and coupled to the sensor And the memory of the first information transceiver, the sensor can detect the environmental parameter in the accommodating space, and the memory is used to store the environmental parameter detected by the sensor and the data of the item. The first information transceiver can transmit the environmental parameter to let the outside world know the state that the item is located in the accommodating space. According to the sealing device of the invention, the information sensing unit further includes a second information transceiver disposed outside the main unit to receive the first information transmission and reception. Information about the environmental parameters issued by the device. The first information transceiver and the second information transceiver are Radio Frequency IDent (RFID) devices according to the second aspect of the invention. The sealing device with environment sensing and data transmission according to claim 1, wherein the sensor has a plurality of sensing heads for sensing temperature, humidity, gas composition, and gas in the accommodating space, respectively. Concentration, and combinations of these. A sealing device having environmental sensing and data transmission according to claim 1, wherein the main body has a first outer casing and a second outer casing detachably assembled with the first outer casing. The sealing device with environment sensing and data transmission according to claim 1, wherein the main body has a packaging bag and a sealing member which is disposed on the packaging bag and can be opened and closed. The sealing device with environmental sensing and data transmission according to claim 1 further includes a carrying unit, and at least one carrying tray disposed in the receiving space for separating the plurality of items. The sealing device with environment sensing and data transmission according to claim 7 , wherein the carrying unit further comprises a pressing device disposed in the receiving space for covering the plurality of articles on the carrying tray plate. The sealing device with environment sensing and data transmission according to claim 8 , wherein the main body unit further comprises an electromagnetic wave protection layer disposed in the carrying unit and the main body.