TWI596143B - A method to provide an abrasive product and abrasive products thereof - Google Patents

A method to provide an abrasive product and abrasive products thereof

Info

Publication number
TWI596143B
TWI596143B TW103106111A TW103106111A TWI596143B TW I596143 B TWI596143 B TW I596143B TW 103106111 A TW103106111 A TW 103106111A TW 103106111 A TW103106111 A TW 103106111A TW I596143 B TWI596143 B TW I596143B
Authority
TW
Taiwan
Prior art keywords
abrasive
products
product
abrasive product
abrasive products
Prior art date
Application number
TW103106111A
Other languages
English (en)
Other versions
TW201500416A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of TW201500416A publication Critical patent/TW201500416A/zh
Application granted granted Critical
Publication of TWI596143B publication Critical patent/TWI596143B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/001—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as supporting member
    • B24D3/002—Flexible supporting members, e.g. paper, woven, plastic materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/001—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as supporting member
    • B24D3/002—Flexible supporting members, e.g. paper, woven, plastic materials
    • B24D3/004—Flexible supporting members, e.g. paper, woven, plastic materials with special coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
TW103106111A 2013-02-26 2014-02-24 A method to provide an abrasive product and abrasive products thereof TWI596143B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/FI2013/050217 WO2014131937A1 (en) 2013-02-26 2013-02-26 A method to provide an abrasive product and abrasive products thereof

Publications (2)

Publication Number Publication Date
TW201500416A TW201500416A (zh) 2015-01-01
TWI596143B true TWI596143B (en) 2017-08-21

Family

ID=48128335

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103106111A TWI596143B (en) 2013-02-26 2014-02-24 A method to provide an abrasive product and abrasive products thereof

Country Status (6)

Country Link
US (1) US10086501B2 (zh)
EP (1) EP2961571B1 (zh)
CN (1) CN105358292B (zh)
PL (1) PL2961571T3 (zh)
TW (1) TWI596143B (zh)
WO (1) WO2014131937A1 (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI129203B (en) * 2015-06-05 2021-09-15 Kwh Mirka Ltd Abrasive product, method of making it, and its belt and roller
CN107088842A (zh) * 2017-05-26 2017-08-25 江苏省江南新型复合研磨材料及制品工程技术研究中心有限公司 一种高效防水研磨片的制备工艺
EP3651935A4 (en) * 2017-07-10 2020-12-23 Osborn, LLC ABRASIVE POLISHING OR BUFFLING ARTICLE WITHOUT COMPOUND
JP7168159B2 (ja) * 2018-03-30 2022-11-09 山形県 カーボンナノチューブ複合レジンボンド砥石及びその製造方法
JP7302848B2 (ja) * 2018-05-15 2023-07-04 東レコーテックス株式会社 研磨シートおよび研磨方法
US20200171623A1 (en) * 2018-11-30 2020-06-04 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer backside cleaning apparatus and method of cleaning wafer backside
EP3898093A1 (en) 2018-12-18 2021-10-27 3M Innovative Properties Company Tooling splice accommodation for abrasive article production
WO2020128717A1 (en) * 2018-12-18 2020-06-25 3M Innovative Properties Company Patterned abrasive substrate and method
KR102608901B1 (ko) 2018-12-24 2023-12-01 삼성전자주식회사 웨이퍼 그라인딩 휠
EP4072779A1 (en) * 2019-12-09 2022-10-19 3M Innovative Properties Company Abrasive article

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050164619A1 (en) * 2004-01-27 2005-07-28 Soelch Richard R. Thermoplastic sheet abrasives and methods of making the same
WO2011087653A1 (en) * 2009-12-22 2011-07-21 3M Innovative Properties Company Flexible abrasive article and methods of making

Family Cites Families (21)

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Publication number Priority date Publication date Assignee Title
WO1994027787A1 (fr) 1993-06-02 1994-12-08 Dai Nippon Printing Co., Ltd. Bande abrasive et son procede de fabrication
US5441598A (en) 1993-12-16 1995-08-15 Motorola, Inc. Polishing pad for chemical-mechanical polishing of a semiconductor substrate
GB2310864B (en) 1996-03-07 1999-05-19 Minnesota Mining & Mfg Coated abrasives and backing therefor
US6077601A (en) * 1998-05-01 2000-06-20 3M Innovative Properties Company Coated abrasive article
JP4057176B2 (ja) 1998-12-15 2008-03-05 株式会社トプコン 光学部材の研磨用工具とこれに用いられるピッチセグメント、及びそのピッチセグメントの成形型
US6458018B1 (en) * 1999-04-23 2002-10-01 3M Innovative Properties Company Abrasive article suitable for abrading glass and glass ceramic workpieces
US6634929B1 (en) * 1999-04-23 2003-10-21 3M Innovative Properties Company Method for grinding glass
US6319108B1 (en) 1999-07-09 2001-11-20 3M Innovative Properties Company Metal bond abrasive article comprising porous ceramic abrasive composites and method of using same to abrade a workpiece
US6638601B1 (en) * 2000-10-13 2003-10-28 Robert A. Follensbee Coated abrasive having laminate backing material and method of making the same
US20020090901A1 (en) 2000-11-03 2002-07-11 3M Innovative Properties Company Flexible abrasive product and method of making and using the same
JP2002246343A (ja) 2001-02-13 2002-08-30 Nikon Corp 研磨装置、この研磨装置を用いた半導体デバイス製造方法及びこの半導体デバイス製造方法により製造された半導体デバイス
JP2003103470A (ja) 2001-09-28 2003-04-08 Dainippon Printing Co Ltd 研磨層に凹部を有する研磨シート
US7497884B2 (en) 2004-12-30 2009-03-03 Neenah Paper, Inc. Fine abrasive paper backing material and method of making thereof
US7235114B1 (en) * 2006-03-16 2007-06-26 3M Innovative Properties Company Flexible abrasive article
WO2009020872A1 (en) * 2007-08-03 2009-02-12 Saint-Gobain Abrasives, Inc. Abrasive article with adhesion promoting layer
US7544115B2 (en) 2007-09-20 2009-06-09 Novellus Systems, Inc. Chemical mechanical polishing assembly with altered polishing pad topographical components
JP2010045306A (ja) 2008-08-18 2010-02-25 Kuraray Co Ltd 研磨パッド
CA2882175C (en) * 2010-05-28 2017-08-22 Saint-Gobain Abrasives, Inc. Non-abrasive back coat for coated abrasives
ES2661972T3 (es) * 2010-07-02 2018-04-04 3M Innovative Properties Company Artículos abrasivos recubiertos
US9630297B2 (en) * 2011-12-29 2017-04-25 3M Innovative Properties Company Coated abrasive article and method of making the same
US9393673B2 (en) * 2012-07-06 2016-07-19 3M Innovative Properties Company Coated abrasive article

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050164619A1 (en) * 2004-01-27 2005-07-28 Soelch Richard R. Thermoplastic sheet abrasives and methods of making the same
WO2011087653A1 (en) * 2009-12-22 2011-07-21 3M Innovative Properties Company Flexible abrasive article and methods of making

Also Published As

Publication number Publication date
CN105358292B (zh) 2019-01-15
US20160001422A1 (en) 2016-01-07
CN105358292A (zh) 2016-02-24
TW201500416A (zh) 2015-01-01
EP2961571A1 (en) 2016-01-06
WO2014131937A1 (en) 2014-09-04
US10086501B2 (en) 2018-10-02
PL2961571T3 (pl) 2019-10-31
EP2961571B1 (en) 2019-05-29

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