TWI589896B - Test sorter - Google Patents
Test sorter Download PDFInfo
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- TWI589896B TWI589896B TW104139313A TW104139313A TWI589896B TW I589896 B TWI589896 B TW I589896B TW 104139313 A TW104139313 A TW 104139313A TW 104139313 A TW104139313 A TW 104139313A TW I589896 B TWI589896 B TW I589896B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/44—Modifications of instruments for temperature compensation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Environmental & Geological Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Description
本發明涉及一種測試分選機。 The invention relates to a test sorter.
測試分選機是支援對通過預定製造工藝製造的、諸如半導體裝置的電子部件的測試、根據測試結果按等級分類電子部件、以及將電子部件安裝在使用者盤上的裝置。 The test sorter is a device that supports testing of electronic components such as semiconductor devices manufactured by a predetermined manufacturing process, classifying electronic components according to test results, and mounting electronic components on a user's disc.
圖1和圖2是示出了典型的測試分選機的立體圖和平面圖。參照圖1和圖2,測試分選機1可包括載入裝置10、浸泡室20、測試室30、去浸泡室40和卸載裝置50。 1 and 2 are perspective and plan views showing a typical test handler. Referring to Figures 1 and 2, the test sorter 1 can include a loading device 10, a soaking chamber 20, a test chamber 30, a de-soaking chamber 40, and an unloading device 50.
在測試盤3a和3b中提供了可安置電子部件的多個插入件。測試盤3a和3b可通過多個傳送裝置(未示出)沿預定封閉路線迴圈。 A plurality of inserts in which electronic components can be placed are provided in the test discs 3a and 3b. The test discs 3a and 3b can be looped along a predetermined closed path by a plurality of conveyors (not shown).
載入裝置10能夠在載入位置將安裝在用戶盤2a上的未測試的電子部件載入到測試盤3a和3b中。 The loading device 10 is capable of loading untested electronic components mounted on the user tray 2a into the test trays 3a and 3b at the loading position.
由於可能在不同的溫度環境下使用電子部件,所以有必要確定該電子部件是否在具體溫度環境下良好工作。在進行測試之前,可在浸泡室20中對安裝在測試盤3a和3b上的電子部件進行預加熱或預冷卻。 Since electronic components may be used in different temperature environments, it is necessary to determine whether the electronic components work well under a specific temperature environment. The electronic components mounted on the test discs 3a and 3b may be preheated or pre-cooled in the infusion chamber 20 prior to testing.
經由浸泡室20傳送至測試位置並安裝在測試盤3a和3b上的電子部件可在測試室30中進行測試。具體地,安裝在測試盤3a和3b上的電子部件可 由推動裝置60朝向測試器70推動。電子部件和測試器70可通過其接觸或接合彼此電連接。在該狀態下,可對電子部件執行測試。 Electronic components that are transported to the test location via the infusion chamber 20 and mounted on the test trays 3a and 3b can be tested in the test chamber 30. Specifically, the electronic components mounted on the test discs 3a and 3b can be Pushed by the pushing device 60 toward the tester 70. The electronic components and tester 70 can be electrically connected to each other by their contact or engagement. In this state, the test can be performed on the electronic component.
推動裝置60可包括與測試盤3a和3b匹配的匹配板以及用於朝測試盤3a和3b移動匹配板的配置。在匹配板的每個中都以矩陣圖案設置有多個推動器。單個推動器一一對應於測試盤3a和3b的單個插入件,並且能夠靠著測試器70壓定位在插入件中的電子部件。 The pushing device 60 may include a mating plate that mates with the test discs 3a and 3b and a configuration for moving the mating plates toward the test discs 3a and 3b. A plurality of pushers are arranged in a matrix pattern in each of the matching plates. A single pusher corresponds one-to-one to the individual inserts of the test discs 3a and 3b and is capable of pressing the electronic components positioned in the insert against the tester 70.
同時,可為測試室30提供用於設定關於電子部件的溫度環境的加熱介質。為了精確的溫度設定,可在單個推動器中形成加熱介質流動路徑。可通過加熱介質流動路徑將加熱介質供給至單個電子部件。 At the same time, the test chamber 30 can be provided with a heating medium for setting the temperature environment with respect to the electronic components. For precise temperature setting, a heating medium flow path can be formed in a single pusher. The heating medium can be supplied to a single electronic component through a heating medium flow path.
可將承載測試過的電子部件的測試盤3a和3b傳送至去浸泡室40,在去浸泡室40中,可將電子部件加熱或冷卻至不引起卸載問題的溫度(例如,室溫)。 The test trays 3a and 3b carrying the tested electronic components can be transferred to a de-soaking chamber 40 where the electronic components can be heated or cooled to a temperature (e.g., room temperature) that does not cause an unloading problem.
卸載裝置50可根據測試結果將電子部件按等級分類,並且可將電子部件從測試盤3a和3b卸載到空的用戶盤2b中。 The unloading device 50 can classify the electronic components according to the test results, and can unload the electronic components from the test disks 3a and 3b into the empty user disk 2b.
如上所述,在測試分選機1中可設定不同的溫度環境。因而,在匹配板中可產生熱變形(熱膨脹或熱收縮)。如果在匹配板中產生熱變形,則設置於匹配板中的單個推動器的位置可改變。因此,推動器可能無法正常地壓安裝在測試盤3a和3b上的電子部件。結果,可能不正常地執行對電子部件的檢測,並且不能保障測試結果的可靠性。這可導致測試產量降低。另外,電子部件和/或測試器70可變形或受到損害。 As described above, different temperature environments can be set in the test sorter 1. Thus, thermal deformation (thermal expansion or thermal contraction) can occur in the matching plate. If thermal deformation occurs in the mating plate, the position of a single pusher disposed in the mating plate can be changed. Therefore, the pusher may not normally press the electronic components mounted on the test discs 3a and 3b. As a result, the detection of the electronic component may not be performed normally, and the reliability of the test result cannot be guaranteed. This can result in reduced test yields. Additionally, the electronic component and/or tester 70 can be deformed or damaged.
專利文獻1:第KR 10-0709114號韓國專利 Patent Document 1: Korean Patent No. KR 10-0709114
本公開的實施方式提供了一種測試分選機,該測試分選機能夠使得電子部件的測試能順利執行,即使是在匹配板中產生熱變形時。 Embodiments of the present disclosure provide a test sorter that enables the testing of electronic components to be performed smoothly even when thermal deformation occurs in the mating panel.
鑒於前述問題,本公開提供了一種測試分選機,包括:載入裝置,配置為將電子部件載入到測試盤中;測試室,包括配置為與電子部件中的每個緊密接觸以對電子部件中的每個進行測試的測試器;推動裝置,配置為朝向測試器推動安裝在測試盤上的電子部件中的每個,所述推動裝置包括:壓板,配置為將壓力傳遞至所述電子部件;第一軌道,設置在所述壓板的中心部分中,以在水準方向上延伸;上匹配板,具有下端部分,所述下端部分配置為與所述第一軌道接觸;下匹配板,具有上端部分,所述上端部分配置為與所述第一軌道接觸;多個推動器,設置在所述上匹配板和所述下匹配板中,以與所述電子部件接觸;第二軌道,設置在所述壓板的下端部分中,並與所述下匹配板的下端部分向下間隔開;以及第三軌道,設置在所述壓板的上端部分中,並與所述上匹配板的上端部分向上間隔開;以及卸載裝置,配置為從測試盤上卸載在測試室中測試的電子部件中的每個。 In view of the foregoing, the present disclosure provides a test sorter comprising: a loading device configured to load an electronic component into a test disc; a test chamber configured to be in close contact with each of the electronic components to oppose the electronic a tester for testing each of the components; a pushing device configured to urge each of the electronic components mounted on the test disk toward the tester, the pushing device comprising: a pressure plate configured to transmit pressure to the electronic a first rail disposed in a central portion of the pressure plate to extend in a horizontal direction; an upper matching plate having a lower end portion, the lower end portion being configured to be in contact with the first rail; and a lower matching plate having An upper end portion, the upper end portion being configured to be in contact with the first rail; a plurality of pushers disposed in the upper matching plate and the lower matching plate to be in contact with the electronic component; the second track, setting In a lower end portion of the pressure plate, and spaced downward from a lower end portion of the lower matching plate; and a third rail disposed in an upper end portion of the pressure plate, and Said upper end portion upwardly spaced apart matching plate; and unloading means configured to unload electronic components from the test disc tested in each test chamber.
另外,本公開還提供一種測試分選機,該測試分選機還包括:第二軌道,設置在壓板的下端部分中,並與下匹配板的下端部分向下間隔開;以及第三軌道,設置在壓板的上端部分中,並與上匹配板的上端部分向上間隔開。 In addition, the present disclosure also provides a test sorter, the test sorter further comprising: a second rail disposed in a lower end portion of the pressure plate and spaced downward from a lower end portion of the lower matching plate; and a third track, It is disposed in the upper end portion of the pressure plate and spaced upward from the upper end portion of the upper matching plate.
另外,本公開還提供一種測試分選機,其中,當電子部件以M×N矩陣形式安裝在測試盤上時,上匹配板和下匹配板中的每個都與具有M/2×N矩陣形式的電子部件匹配,其中M是2或更大的偶數,並且N是1或更大的自然數。 In addition, the present disclosure also provides a test sorter in which each of the upper matching board and the lower matching board has an M/2×N matrix when the electronic components are mounted on the test disc in an M×N matrix form. The form of electronic component matching, where M is an even number of 2 or greater, and N is a natural number of 1 or greater.
另外,本公開還提供了一種測試分選機,其中,在第一軌道中形成有接合槽,以及在下匹配板的上端部分中設置有突出部,該突出部插入接合槽中以保持下匹配板相對於第一軌道的位置。 In addition, the present disclosure also provides a test sorter in which an engagement groove is formed in a first rail, and a protrusion is provided in an upper end portion of the lower mating plate, the protrusion being inserted into the engagement groove to hold the lower matching plate Relative to the position of the first track.
另外,本公開還提供了一種測試分選機,該測試分選機還包括:第一銷,設置在壓板的一側處;第二銷,設置在壓板的另一側處;第一支架,設置在下匹配板的一側處,並配置為與第一銷接合;以及第二支架,設置在下匹配板的另一側處,並配置為與第二銷接合。 In addition, the present disclosure also provides a test sorter, the test sorter further comprising: a first pin disposed at one side of the pressure plate; a second pin disposed at the other side of the pressure plate; the first bracket, Provided at one side of the lower mating plate and configured to engage the first pin; and a second bracket disposed at the other side of the lower mating plate and configured to engage the second pin.
另外,本公開還提供了測試分選機,其中在第一支架中形成有插入第一銷以支承第一支架的第一接合槽,在第二支架中形成有插入第二銷以支承第二支架的第二接合槽,第一接合槽包括:第一引導部分,配置為引導下匹配板,以使得隨著下匹配板的移動開始將第一銷插入第一接合槽,並且使得下匹配板朝第一軌道向上移動並靠近第一軌道;以及第一安置部分,當下匹配板接觸第一軌道時,第一銷定位在第一安置部分中;並且第二接合槽包括:第二引導部分,配置為引導下匹配板,以使得隨著下匹配板的移動開始將第二銷插入第二接合槽,並且使得下匹配板朝第一軌道向上移動並靠近第一軌道;以及第二安置部分,當下匹配板接觸第一軌道時,第二銷定位在第二安置部分中。 In addition, the present disclosure also provides a test sorter in which a first engagement groove is formed in the first bracket to insert the first pin to support the first bracket, and a second pin is inserted in the second bracket to support the second a second engagement groove of the bracket, the first engagement groove including: a first guiding portion configured to guide the lower matching plate such that the first pin is inserted into the first engagement groove as the movement of the lower matching plate starts, and the lower matching plate is caused Moving upward toward the first track and close to the first track; and a first seating portion, the first pin is positioned in the first seating portion when the lower matching plate contacts the first track; and the second engaging groove includes: a second guiding portion Configuring to guide the lower matching plate such that the second pin is inserted into the second engagement groove as the movement of the lower matching plate begins, and the lower matching plate is moved upward toward the first track and close to the first track; and the second seating portion, When the lower matching plate contacts the first track, the second pin is positioned in the second seating portion.
另外,本公開還提供了測試分選機,其中第一銷向前突出超過壓板,第二銷沒有向前突出超過壓板,第一支架沒有向後突出超過下匹配板,以及第二支架向後突出超過下匹配板。 In addition, the present disclosure also provides a test sorter in which the first pin protrudes forward beyond the pressure plate, the second pin does not protrude forward beyond the pressure plate, the first bracket does not protrude rearward beyond the lower matching plate, and the second bracket protrudes rearward beyond Match the board below.
另外,本公開還提供了測試分選機,該測試分選機還包括:移動主體,配置為朝向測試器移動;以及多個軸,配置為使移動主體與壓板互相連接,其中,軸中的一個連接至壓板的中心部分,並配置為抑制壓板的中心部分的熱變形,並且剩餘的軸連接至壓板,以便相對於壓板做相對移動,並配置為允許壓板除中心部分以外的部分的熱變形。 In addition, the present disclosure also provides a test sorter, the test sorter further comprising: a moving body configured to move toward the tester; and a plurality of shafts configured to interconnect the moving body and the pressure plate, wherein the shaft a central portion coupled to the pressure plate and configured to inhibit thermal deformation of a central portion of the pressure plate, and the remaining shaft is coupled to the pressure plate for relative movement relative to the pressure plate and configured to permit thermal deformation of the portion of the pressure plate other than the central portion .
另外,本公開還提供了測試分選機,該測試分選機還包括:至少兩個球塞,配置為向前壓上匹配板和下匹配板,其中球塞中的每個都包括:球,具有前部,該前部部分地插入在上匹配板的下端部分的中心處或在下匹配板的上端部分的中心處在上下方向上延伸的狹槽中;以及彈性構件,在一個端部處連接至壓板並在另一端部處連接至球,並且配置為彈性地向前偏置球。 In addition, the present disclosure also provides a test sorter, the test sorter further comprising: at least two ball plugs configured to press the matching plate and the lower matching plate forward, wherein each of the ball plugs comprises: a ball , having a front portion partially inserted at a center of a lower end portion of the upper mating plate or a slot extending in an up-and-down direction at a center of an upper end portion of the lower mating plate; and an elastic member at one end Attached to the platen and attached to the ball at the other end, and configured to resiliently bias the ball forward.
有益效果:根據本公開的實施方式,可提供一種測試分選機,該測試分選機能夠使得對電子部件的測試能夠順利執行,即使是在匹配板中產生熱變形時。 Advantageous Effects: According to an embodiment of the present disclosure, it is possible to provide a test sorter capable of enabling a test of an electronic component to be performed smoothly even when thermal deformation occurs in a matching board.
1‧‧‧測試分選機 1‧‧‧Test Sorter
10‧‧‧載入裝置 10‧‧‧Loading device
20‧‧‧浸泡室 20‧‧‧Infusion room
30‧‧‧測試室 30‧‧‧Test room
40‧‧‧去浸泡室 40‧‧‧Go to the soaking room
50‧‧‧卸載裝置 50‧‧‧Unloading device
60‧‧‧推動裝置 60‧‧‧Promoting device
70‧‧‧測試器 70‧‧‧Tester
3a、3b‧‧‧測試盤 3a, 3b‧‧‧ test disk
2a‧‧‧用戶盤 2a‧‧‧User disk
100‧‧‧推動裝置 100‧‧‧Promoting device
110‧‧‧壓板 110‧‧‧ pressure plate
111‧‧‧通孔 111‧‧‧through hole
115‧‧‧第一銷 115‧‧‧first sales
116‧‧‧基礎部 116‧‧‧Basic Department
118‧‧‧第二銷 118‧‧‧second sales
119‧‧‧基礎部 119‧‧‧Basic Department
120‧‧‧第一軌道 120‧‧‧First track
121‧‧‧第二軌道 121‧‧‧second track
122‧‧‧第三軌道 122‧‧‧ third track
120a、120b、121a、122a‧‧‧凸緣部分 120a, 120b, 121a, 122a‧‧‧Flange section
130‧‧‧上匹配板 130‧‧‧Upper matching board
131‧‧‧通孔 131‧‧‧through hole
132‧‧‧預定空間 132‧‧‧Scheduled space
137‧‧‧狹槽 137‧‧‧ slot
140‧‧‧下匹配板 140‧‧‧Under matching board
141‧‧‧通孔 141‧‧‧through hole
142‧‧‧預定空間 142‧‧‧Booked space
143‧‧‧第一支架 143‧‧‧First bracket
144‧‧‧第一接合槽 144‧‧‧First joint groove
145‧‧‧第二支架 145‧‧‧second bracket
146‧‧‧第二接合槽 146‧‧‧Second joint groove
144-1、144-1a、144-1b‧‧‧第一引導部分 144-1, 144-1a, 144-1b‧‧‧ first guide
144-1a‧‧‧第一水準部分 144-1a‧‧‧First level
144-1b‧‧‧第一傾斜部分 144-1b‧‧‧First inclined part
144-2‧‧‧第一安置部分 144-2‧‧‧First Placement Section
146-1‧‧‧第二引導部分 146-1‧‧‧Second boot section
146-2‧‧‧第二安置部分 146-2‧‧‧Second Placement
147‧‧‧狹槽 147‧‧‧ slot
150‧‧‧推動器 150‧‧‧ Pusher
151‧‧‧加熱介質流動路徑 151‧‧‧ Heating medium flow path
160a、160b‧‧‧軸 160a, 160b‧‧‧ axis
170‧‧‧連接元件 170‧‧‧Connecting components
180‧‧‧球塞 180‧‧‧ ball stopper
180a‧‧‧球 180a‧‧ balls
180b‧‧‧彈性構件 180b‧‧‧elastic components
180a、180b‧‧‧連接孔 180a, 180b‧‧‧ connection hole
210‧‧‧壓板 210‧‧‧ pressure plate
220‧‧‧第一軌道 220‧‧‧First track
229‧‧‧接合槽 229‧‧‧ joint groove
230‧‧‧上匹配板 230‧‧‧Upper board
240‧‧‧下匹配板 240‧‧‧ lower matching board
249‧‧‧突出部 249‧‧‧Protruding
290‧‧‧鎖定模組 290‧‧‧Locking module
291‧‧‧主體部分 291‧‧‧ body part
292‧‧‧把手 292‧‧‧Handle
293‧‧‧片狀件 293‧‧‧Flakes
300‧‧‧推動裝置 300‧‧‧Promoting device
310a、310b‧‧‧壓板 310a, 310b‧‧‧ platen
312‧‧‧間隙 312‧‧‧ gap
320a、320b‧‧‧第一軌道b 320a, 320b‧‧‧ first track b
330a、330b‧‧‧上匹配板 330a, 330b‧‧‧ upper matching board
340a、340b‧‧‧下匹配板 340a, 340b‧‧‧ under the matching board
圖1是示出了典型的測試分選機的立體圖。 Figure 1 is a perspective view showing a typical test handler.
圖2是圖1所示的測試分選機的平面圖。 Figure 2 is a plan view of the test handler shown in Figure 1.
圖3是示出了根據一個實施方式的測試分選機的推動裝置的從前側觀察的立體圖。 3 is a perspective view showing a pushing device of a test sorter as viewed from a front side according to an embodiment.
圖4是根據圖3所示的一個實施方式的測試分選機的推動裝置的從後面觀察的立體圖。 Fig. 4 is a perspective view, as seen from the rear, of the pushing device of the test sorter according to an embodiment shown in Fig. 3.
圖5是根據圖3所示的一個實施方式的測試分選機的推動裝置的分解立體圖。 Figure 5 is an exploded perspective view of the pushing device of the test sorter according to one embodiment shown in Figure 3.
圖6是根據圖3所示的一個實施方式的測試分選機的推動裝置的主視圖。 Figure 6 is a front elevational view of the pushing device of the test sorter in accordance with one embodiment of Figure 3.
圖7是根據圖3所示的一個實施方式的測試分選機的推動裝置的側視圖。 Figure 7 is a side elevational view of the pusher of the test handler in accordance with one embodiment of Figure 3.
圖8是根據圖3所示的一個實施方式的測試分選機的推動裝置的放大側視圖。 Figure 8 is an enlarged side elevational view of the pushing device of the test sorter in accordance with one embodiment of Figure 3.
圖9是根據圖3所示的一個實施方式的測試分選機的第一支架的從後側觀察的立體圖。 Figure 9 is a perspective view of the first stent of the test sorter according to the embodiment shown in Figure 3 as viewed from the rear side.
圖10是根據圖3所示的一個實施方式的測試分選機的第二支架的從後面觀察的立體圖。 Figure 10 is a perspective view from the back of the second bracket of the test sorter according to one embodiment shown in Figure 3.
圖11A和圖11B是示出了接合槽的修改的視圖。 11A and 11B are views showing a modification of the engagement groove.
圖12是示出了從前側觀察的球塞的視圖。 Fig. 12 is a view showing the ball plug viewed from the front side.
圖13是示意性地示出了從側面觀察的球塞的視圖。 Fig. 13 is a view schematically showing a ball plug viewed from the side.
圖14至圖16是解釋根據圖3所示的一個實施方式如何將下匹配板安裝到測試分選機中的視圖。 14 to 16 are views for explaining how the lower matching plate is mounted in the test sorter according to an embodiment shown in Fig. 3.
圖17是示出了根據圖3所示的一個實施方式的測試分選機的壓板的從前側觀察的視圖。 Figure 17 is a view showing the pressure plate of the test sorter according to an embodiment shown in Figure 3 as viewed from the front side.
圖18是用於解釋根據圖3所示的一個實施方式的測試分選機中軸與壓板的連接結構的視圖。 Figure 18 is a view for explaining a connection structure of a shaft and a press plate in the test sorter according to an embodiment shown in Figure 3.
圖19是根據另一個實施方式的測試分選機的推動裝置的側視圖。 19 is a side view of a pushing device of a test sorter according to another embodiment.
圖20是示出了根據圖19所示的另一個實施方式的測試分選機的鎖定模組的立體圖。 Figure 20 is a perspective view showing a locking module of the test sorter according to another embodiment shown in Figure 19.
圖21是示意性地示出了根據另一實施方式的測試分選機的推動裝置的主視圖。 21 is a front view schematically showing a pushing device of a test sorter according to another embodiment.
通過以下連同圖示給出的、對示例性實施方式的描述,本公開的優點和特徵以及實現這些優點和特徵的方法將變得顯而易見。將具體地描述示例性實施方式,以使得本領域技術人員可容易地實施發明構思。然而,應注意的是,這些示例性實施方式在任何方式均不旨在為限制性的,並且可進行各種修改而不脫離本公開的技術概念。本發明構思的範圍將由以下權利要求限定,而不是由對示例性實施方式的具體描述來限定。 Advantages and features of the present disclosure, as well as methods of achieving the advantages and features, will become apparent from the description of the exemplary embodiments. The exemplary embodiments will be specifically described so that those skilled in the art can easily implement the inventive concept. However, it should be noted that these exemplary embodiments are not intended to be limiting in any way, and various modifications may be made without departing from the technical concept of the present disclosure. The scope of the inventive concept is defined by the following claims rather than the detailed description of the exemplary embodiments.
根據將在以下描述的實施方式的測試分選機的載入裝置、測試室和卸載裝置與以上參照圖1和圖2描述的測試分選機的載入裝置、測試室和卸載裝置相同。因此,將省略對前述配置的描述。將詳細描述推動裝置100。 The loading device, the test chamber, and the unloading device according to the test sorter to be described below are the same as the loading device, the test chamber, and the unloading device of the test sorter described above with reference to FIGS. 1 and 2. Therefore, the description of the foregoing configuration will be omitted. The pushing device 100 will be described in detail.
作為參考,在圖示中,X和-X方向可表示水準方向,Y和-Y方向可表示豎直方向,並且Z方向可表示前向方向,而-Z方向可表示後向方向。另外,X方向和-X方向可分別表示一個側方向和另一個側方向。 For reference, in the illustration, the X and -X directions may represent a level direction, the Y and -Y directions may represent a vertical direction, and the Z direction may represent a forward direction, and the -Z direction may represent a backward direction. In addition, the X direction and the -X direction may respectively indicate one side direction and the other side direction.
推動裝置100可向前(在Z方向上)推動安裝在測試盤上的電子部件,以使得電子部件與定位在測試盤的前方的測試器緊密接觸,其中,該測試盤定位在推動裝置100的前方(定位在與推動裝置100在Z方向上間隔開的點處)。 The pushing device 100 can push the electronic component mounted on the test disc forward (in the Z direction) such that the electronic component is in close contact with the tester positioned in front of the test disc, wherein the test disc is positioned at the pushing device 100 Front (positioned at a point spaced apart from the pushing device 100 in the Z direction).
圖3是根據一個實施方式的、測試分選機的推動裝置100的、從前側觀察的立體圖。圖4是根據圖3所示的一個實施方式的、測試分選機的推動裝置100的、從後側觀察的立體圖。圖5是根據圖3所示的一個實施方式的、測試分選機的推動裝置100的分解立體圖。圖6是根據圖3所示的一個實施方式的、測試分選機的推動裝置100的主視圖。圖7是根據圖3所示的一個實施方式的、測試分選機的推動裝置100的側視圖。 3 is a perspective view of the pushing device 100 of the test sorter as viewed from the front side, according to an embodiment. 4 is a perspective view of the pushing device 100 of the test sorter as viewed from the rear side according to an embodiment shown in FIG. 3. Figure 5 is an exploded perspective view of the pusher 100 of the test sorter in accordance with one embodiment of Figure 3. Figure 6 is a front elevational view of the pusher 100 of the test sorter in accordance with one embodiment of Figure 3. Figure 7 is a side elevational view of the pusher 100 of the test sorter in accordance with one embodiment of Figure 3.
如圖3至圖7所示,壓板110可定位在上匹配板130和下匹配板140以及推動器150的後方。壓板110可將從後面接收的壓力傳遞至上匹配板130和下 匹配板140和/或推動器150,並且可使推動器150與安裝在測試盤上的電子部件接觸。 As shown in FIGS. 3 to 7, the pressure plate 110 can be positioned behind the upper matching plate 130 and the lower matching plate 140 and the pusher 150. The pressure plate 110 can transmit the pressure received from the rear to the upper matching plate 130 and the lower The board 140 and/or the pusher 150 are mated and the pusher 150 can be brought into contact with electronic components mounted on the test disc.
雖然沒有在圖示中示出,然而在壓板110的後側可設置有移動主體(例如,致動器)。移動主體可通過多個軸160a和160b連接至壓板110。壓力可由移動主體的前向移動而產生。連接至移動主體的壓板110可將壓力傳遞至上匹配板130和下匹配板140和/或推動器150。 Although not shown in the drawings, a moving body (for example, an actuator) may be disposed on the rear side of the pressure plate 110. The moving body can be coupled to the pressure plate 110 by a plurality of shafts 160a and 160b. The pressure can be generated by the forward movement of the moving body. A pressure plate 110 coupled to the moving body can transmit pressure to the upper matching plate 130 and the lower matching plate 140 and/or the pusher 150.
如圖6所示,假設具有M×N矩陣形式的電子部件安裝在測試盤上,則壓板110可具有覆蓋具有M×N矩陣形式的全部電子部件的尺寸。 As shown in FIG. 6, assuming that an electronic component having an M×N matrix form is mounted on a test disk, the platen 110 may have a size covering all electronic components in the form of an M×N matrix.
如之前所描述的,加熱介質可供給至電子部件,從而設定用於待測試的電子部件的溫度環境。出於該目的,可在壓板110中以M×N矩陣形式形成多個通孔111。可經由通孔111和推動器150的加熱介質流動路徑151將加熱介質從壓板110的後側供給至單個電子部件。在這方面,雖然沒有在圖中示出,然而在壓板110的後側可設置有導管。可將加熱介質引入該導管中,並可通過通孔111供給至壓板110的前側。從這個角度來說,可理解的是,壓板110是導管的一部分。 As previously described, the heating medium can be supplied to the electronic components to set the temperature environment for the electronic components to be tested. For this purpose, a plurality of through holes 111 may be formed in the press plate 110 in the form of an M x N matrix. The heating medium may be supplied from the rear side of the pressure plate 110 to a single electronic component via the through hole 111 and the heating medium flow path 151 of the pusher 150. In this regard, although not shown in the drawings, a conduit may be provided on the rear side of the pressure plate 110. A heating medium may be introduced into the conduit and may be supplied to the front side of the pressure plate 110 through the through hole 111. From this perspective, it will be appreciated that the pressure plate 110 is part of the conduit.
在壓板110的一側和另一側,可設置有分別具有第一銷115和第二銷118的基礎部116和基礎部119。第一銷115和第二銷118可保持下匹配板140的位置。下文將對這一點進行描述。 On one side and the other side of the pressure plate 110, a base portion 116 and a base portion 119 having a first pin 115 and a second pin 118, respectively, may be provided. The first pin 115 and the second pin 118 can maintain the position of the lower matching plate 140. This will be described below.
如上所述,多個軸160a和160b可連接至壓板110的後側。在本實施方式中,總共設置有9根軸。在這9根軸中,軸160a可連接至壓板110的後表面的中心部分。軸160a可相對固定不動地連接至壓板110,由此抑制壓板110的中心部分的熱變形。另一方面,剩餘的軸160b可相對可移動地連接至壓板110,由此允許壓板110除中心部分以外的部分的熱變形。 As described above, the plurality of shafts 160a and 160b can be coupled to the rear side of the pressure plate 110. In the present embodiment, a total of nine axes are provided. Among the nine shafts, the shaft 160a may be coupled to a central portion of the rear surface of the pressure plate 110. The shaft 160a is relatively fixedly coupled to the pressure plate 110, thereby suppressing thermal deformation of the central portion of the pressure plate 110. On the other hand, the remaining shaft 160b can be relatively movably coupled to the pressure plate 110, thereby allowing thermal deformation of the portion of the pressure plate 110 other than the central portion.
第一軌道120、第二軌道121和第三軌道122可設置在壓板110的前側處。第一軌道120可在壓板110的中心部分水準延伸。第二軌道121可在壓板110的下端部分中水準延伸。第三軌道122可在壓板110的上端部分中水準延伸。軌道120、軌道121和軌道122可基本上引導上匹配板130和下匹配板140的安裝。另外,軌道120、軌道121和軌道122可支承上匹配板130和下匹配板140,以便保持上匹配板130和下匹配板140的位置。 The first rail 120, the second rail 121, and the third rail 122 may be disposed at a front side of the pressure plate 110. The first rail 120 may be horizontally extended at a central portion of the pressure plate 110. The second rail 121 may be horizontally extended in a lower end portion of the pressure plate 110. The third rail 122 may be horizontally extended in the upper end portion of the pressure plate 110. The track 120, the track 121, and the track 122 can substantially guide the mounting of the upper mating plate 130 and the lower mating plate 140. Additionally, the track 120, the track 121, and the track 122 can support the upper mating plate 130 and the lower mating plate 140 to maintain the position of the upper mating plate 130 and the lower mating plate 140.
如先前所描述的,可在不同的溫度環境下對電子部件進行測試。在該過程中,在上匹配板130和下匹配板140中可產生熱變形(熱膨脹或熱收縮)。如從以下數學公式可知的是,某構件的熱變形與該構件的初始長度成正比:,其中L是熱變形之後測量的長度,L0是初始長度,α是熱變形係數,以及△T是溫度變化量。 As previously described, electronic components can be tested in different temperature environments. In this process, thermal deformation (thermal expansion or heat shrinkage) may occur in the upper matching plate 130 and the lower matching plate 140. As can be seen from the following mathematical formula, the thermal deformation of a member is proportional to the initial length of the member: where L is the length measured after thermal deformation, L0 is the initial length, α is the coefficient of thermal deformation, and ΔT is the temperature The amount of change.
當具有M×N矩陣形式的電子部件安裝在測試盤上時,由單一構件形成的常規匹配板覆蓋具有M×N的矩陣形式的全部電子部件。因而,積累的變形量可朝匹配板的端部變大。結果,存在於匹配板的端部的側部處的推動器明顯地與電子部件不對齊。因此,可能並沒有將壓力完全地傳遞至電子部件。 When an electronic component having an M x N matrix form is mounted on a test disk, a conventional matching plate formed of a single member covers all electronic components in the form of a matrix of M x N. Thus, the accumulated amount of deformation can be made larger toward the end of the matching plate. As a result, the pusher present at the side of the end of the mating plate is clearly misaligned with the electronic components. Therefore, the pressure may not be completely transmitted to the electronic components.
在本實施方式中,上匹配板130和下匹配板140可以是通過二等分典型的匹配板而獲得的匹配板。例如,如圖5和圖6所示,上匹配板130和下匹配板140中的每個均僅可覆蓋具有M/2×N矩陣形式的電子部件。因此,與常規匹配板相比較,可大幅減少上匹配板130的上端部分以及下匹配板140的下端部分中的積累變形量。 In the present embodiment, the upper matching plate 130 and the lower matching plate 140 may be matching plates obtained by halving a typical matching plate. For example, as shown in FIGS. 5 and 6, each of the upper matching plate 130 and the lower matching plate 140 can cover only electronic components having a M/2×N matrix form. Therefore, the amount of accumulated deformation in the upper end portion of the upper matching plate 130 and the lower end portion of the lower matching plate 140 can be greatly reduced as compared with the conventional matching plate.
同時,上匹配板130的下端部分以及下匹配板140的上端部分可與第一軌道120接觸。例如,上匹配板130可安置在第一軌道120上。下匹配板140可與第一軌道120接合並且可懸掛於第一軌道120。這使得可抑制上匹配板130的下端部分以及下匹配板140的上端部分的熱變形。結果,上匹配板130和下匹配 板140的熱變形整體豎直對稱地發生。因而,與常規匹配板相比較,可減小測試盤的相應插入件與電子部件之間的位置偏差。例如,常規匹配板安置在存在于壓板下方的軌道上。隨著匹配板朝上熱變形,匹配板的中心部分也變形。在本實施方式的情況下,上匹配板130的下端部分和下匹配板140的上端部分不會變形。因而,當將上匹配板130和下匹配板140看作一個整體時,在中心部分不發生變形。另外,熱變形在豎直對稱部中均勻出現,並且初始長度短。因此,與常規匹配板相比較,可減小在上匹配板130和下匹配板140的端部中的積累變形量。 At the same time, the lower end portion of the upper matching plate 130 and the upper end portion of the lower matching plate 140 may be in contact with the first rail 120. For example, the upper mating plate 130 can be disposed on the first rail 120. The lower mating plate 140 can be engaged with the first rail 120 and can be suspended from the first rail 120. This makes it possible to suppress thermal deformation of the lower end portion of the upper matching plate 130 and the upper end portion of the lower matching plate 140. As a result, the upper matching board 130 and the lower match The thermal deformation of the plate 140 occurs as a whole vertically symmetrically. Thus, the positional deviation between the corresponding insert of the test disc and the electronic component can be reduced as compared to a conventional matching board. For example, a conventional matching plate is placed on a track that exists below the platen. As the mating plate is thermally deformed upward, the central portion of the mating plate is also deformed. In the case of the present embodiment, the lower end portion of the upper matching plate 130 and the upper end portion of the lower matching plate 140 are not deformed. Thus, when the upper matching plate 130 and the lower matching plate 140 are regarded as one body, no deformation occurs in the center portion. In addition, the thermal deformation occurs uniformly in the vertically symmetrical portion, and the initial length is short. Therefore, the amount of accumulated deformation in the ends of the upper matching plate 130 and the lower matching plate 140 can be reduced as compared with the conventional matching plate.
上匹配板130和下匹配板140可從壓板110的另一端側朝向壓板110的一端側安裝。例如,參照圖3至圖6,上匹配板130和下匹配板140可在通過軌道120、軌道121和軌道122在X方向上引導時,安裝至壓板110。上匹配板130和下匹配板140的安裝將稍後進行描述。 The upper matching plate 130 and the lower matching plate 140 may be mounted from the other end side of the pressure plate 110 toward one end side of the pressure plate 110. For example, referring to FIGS. 3 through 6, the upper mating plate 130 and the lower mating plate 140 may be mounted to the platen 110 when guided in the X direction by the rail 120, the rail 121, and the rail 122. The mounting of the upper matching plate 130 and the lower matching plate 140 will be described later.
同時,如可在圖7中確認的是,上匹配板130的上端部分可與第三軌道122間隔開,並且下匹配板140的下端部分可與第二軌道121間隔開。因而,可在上匹配板130的上端部分與第三軌道122之間形成有預定空間132,並且還可在下匹配板140的下端部分與第二軌道121之間形成預定空間142。這初步考慮了相應上匹配板130和下匹配板140的豎直熱膨脹。 Meanwhile, as can be confirmed in FIG. 7, the upper end portion of the upper matching plate 130 may be spaced apart from the third rail 122, and the lower end portion of the lower matching plate 140 may be spaced apart from the second rail 121. Thus, a predetermined space 132 may be formed between the upper end portion of the upper matching plate 130 and the third rail 122, and a predetermined space 142 may also be formed between the lower end portion of the lower matching plate 140 and the second rail 121. This initially takes into account the vertical thermal expansion of the respective upper and lower matching plates 130, 140.
第一軌道120、第二軌道121和第三軌道122可分別包括凸緣部分120a、120b、121a和122a(參見圖7)。這可防止上匹配板130和下匹配板140向前脫軌。 The first rail 120, the second rail 121, and the third rail 122 may include flange portions 120a, 120b, 121a, and 122a, respectively (see FIG. 7). This prevents the upper matching plate 130 and the lower matching plate 140 from being derailed forward.
如圖5所示,可以矩陣形式在上匹配板130和下匹配板140中形成多個通孔131和通孔141。用於向前推動安裝在測試盤上的電子部件的推動器150可進行安裝以突出超過通孔131和通孔141,其中測試盤定位在與上匹配板130和 下匹配板140前向間隔開的位置上。壓板110的通孔111和推動器150的加熱介質流動路徑151彼此連通。因而,可將加熱介質供給至相應的電子部件。 As shown in FIG. 5, a plurality of through holes 131 and through holes 141 may be formed in the upper matching plate 130 and the lower matching plate 140 in a matrix form. A pusher 150 for pushing forward an electronic component mounted on the test disc can be mounted to protrude beyond the through hole 131 and the through hole 141, wherein the test disc is positioned at the upper matching plate 130 and The lower matching plate 140 is forwardly spaced apart. The through hole 111 of the pressure plate 110 and the heating medium flow path 151 of the pusher 150 communicate with each other. Thus, the heating medium can be supplied to the corresponding electronic component.
圖8是根據圖3所示的一個實施方式的、測試分選機的推動裝置100的放大側視圖。圖9是根據圖3所示的一個實施方式的、測試分選機的第一支架143的、從後側觀察的立體圖。圖10是根據圖3所示的一個實施方式的、測試分選機的第二支架145的、從後側觀察的立體圖。下文中,將參照圖3至圖10描述用於保持下匹配板140相對於第一軌道120的位置的結構的一個示例。 Figure 8 is an enlarged side elevational view of the pusher 100 of the test sorter in accordance with one embodiment of Figure 3. Figure 9 is a perspective view of the first bracket 143 of the test sorter as viewed from the rear side, according to an embodiment of Figure 3. Figure 10 is a perspective view of the second bracket 145 of the test sorter as viewed from the rear side, according to an embodiment of Figure 3. Hereinafter, one example of a structure for holding the position of the lower matching plate 140 with respect to the first rail 120 will be described with reference to FIGS. 3 to 10.
第一銷115可設置在壓板110的一側處,並且第二銷118可設置在壓板110的另一側處。對應於第一銷115和第二銷118,第一支架143可設置在下匹配板140的一側,並且第二支架145可設置在下匹配板140的另一側。第一接合槽144和第二接合槽146可在第一支架143和第二支架145中形成。第一銷115和第二銷118可插入第一接合槽144和第二接合槽146中,以在上下方向上支承第一支架143和第二支架145。 The first pin 115 may be disposed at one side of the pressure plate 110, and the second pin 118 may be disposed at the other side of the pressure plate 110. Corresponding to the first pin 115 and the second pin 118, the first bracket 143 may be disposed on one side of the lower matching plate 140, and the second bracket 145 may be disposed on the other side of the lower matching plate 140. The first engagement groove 144 and the second engagement groove 146 may be formed in the first bracket 143 and the second bracket 145. The first pin 115 and the second pin 118 may be inserted into the first engagement groove 144 and the second engagement groove 146 to support the first bracket 143 and the second bracket 145 in the up and down direction.
具體地,在壓板110的一側處可設置有基礎部116。第一銷115可從基礎部116向前突出。在壓板110的另一側處也可設置有基礎部119。第二銷118可從基礎部119向前突出。 Specifically, a base portion 116 may be disposed at one side of the pressure plate 110. The first pin 115 may protrude forward from the base portion 116. A base portion 119 may also be provided at the other side of the pressure plate 110. The second pin 118 can protrude forward from the base portion 119.
如圖8所示,第一銷115可向前突出超過壓板110,並且第二銷118可沒有向前突出超過壓板110。如圖9所示,第一支架143沒有向後突出超過下匹配板140。第一銷115可插入第一支架143的第一接合槽144。如圖10所示,第二支架145向後突出超過下匹配板140。第二銷118可插入第二支架145的第二接合槽146。通過採用這種結構,當下匹配板140在從壓板110的一側朝壓板110的另一側移動(在X方向上)而進行安裝時,不出現干涉現象。即,由於第二銷118沒有向前突出超過壓板110,並且第一支架143沒有向後突出超過下匹配板140,所以下匹配板140可移動到壓板110的前表面上。由於第一銷115向前突出超過壓 板110,所以可將第一銷115插入第一支架143的第一接合槽144。由於第二支架145向後突出超過下匹配板140,所以可將第二銷118插入第二支架145的第二接合槽146。 As shown in FIG. 8, the first pin 115 may protrude forward beyond the pressure plate 110, and the second pin 118 may not protrude forward beyond the pressure plate 110. As shown in FIG. 9, the first bracket 143 does not protrude rearward beyond the lower matching plate 140. The first pin 115 can be inserted into the first engagement groove 144 of the first bracket 143. As shown in FIG. 10, the second bracket 145 protrudes rearward beyond the lower matching plate 140. The second pin 118 can be inserted into the second engagement groove 146 of the second bracket 145. By adopting such a configuration, when the lower matching plate 140 is mounted on the other side of the pressure plate 110 toward the other side of the pressure plate 110 (in the X direction), no interference occurs. That is, since the second pin 118 does not protrude forward beyond the pressure plate 110, and the first bracket 143 does not protrude rearward beyond the lower matching plate 140, the following matching plate 140 can be moved to the front surface of the pressure plate 110. Since the first pin 115 protrudes forward beyond the pressure The plate 110 is so that the first pin 115 can be inserted into the first engagement groove 144 of the first bracket 143. Since the second bracket 145 protrudes rearward beyond the lower mating plate 140, the second pin 118 can be inserted into the second engaging groove 146 of the second bracket 145.
同時,第一接合槽144和第二接合槽146中的每個均可包括引導部分和安置部分。引導部分可指當下匹配板140出於安裝目的而移動時供第一銷115或第二118開始插入且當下匹配板140靠近第一軌道120時引導下匹配板140的部分。安置部分可指當下匹配板140靠近第一軌道120且與第一軌道120接觸時定位第一銷115或第二銷118的部分。 Meanwhile, each of the first engagement groove 144 and the second engagement groove 146 may include a guide portion and a seating portion. The guiding portion may refer to a portion where the first pin 115 or the second 118 starts to be inserted when the lower matching plate 140 is moved for mounting purposes and the lower matching plate 140 is guided when the lower matching plate 140 approaches the first rail 120. The seating portion may refer to a portion where the first pin 115 or the second pin 118 is positioned when the matching plate 140 is adjacent to the first rail 120 and in contact with the first rail 120.
圖9和圖10示出了第一接合槽144和第二接合槽146的一個示例。首先參照圖9,第一接合槽144可包括第一引導部分144-1和第一安置部分144-2。第一引導部分144-1可在與下匹配板140的移動方向(例如,X方向)相反的方向(例如,-X方向)上朝下方傾斜。如果下匹配板140出於安裝目的而在例如X方向上移動,則第一銷115開始插入第一引導部分144-1。在與下匹配板140的移動方向相反的方向(-X方向)上朝下方傾斜的第一引導部分144-1可朝上方移動下匹配板140,並且下匹配板140可靠近第一軌道120。隨著下匹配板140繼續移動,當第一銷115定位在第一安置部分144-2中時,下匹配板140和第一軌道120可彼此接觸。 9 and 10 show an example of the first engagement groove 144 and the second engagement groove 146. Referring first to FIG. 9, the first engagement groove 144 may include a first guiding portion 144-1 and a first seating portion 144-2. The first guiding portion 144-1 may be inclined downward in a direction opposite to the moving direction (for example, the X direction) of the lower matching plate 140 (for example, the -X direction). If the lower matching plate 140 is moved in, for example, the X direction for mounting purposes, the first pin 115 starts to be inserted into the first guiding portion 144-1. The first guiding portion 144-1 which is inclined downward in a direction (-X direction) opposite to the moving direction of the lower matching plate 140 may move the lower matching plate 140 upward, and the lower matching plate 140 may approach the first rail 120. As the lower matching plate 140 continues to move, when the first pin 115 is positioned in the first seating portion 144-2, the lower matching plate 140 and the first rail 120 may be in contact with each other.
接下來參照圖10,第二接合槽146可包括第二引導部分146-1和第二安置部分146-2。第二引導部分146-1可在與下匹配板140的移動方向(例如,X方向)相反的方向(例如,-X方向)上朝下方傾斜。如果下匹配板出於安裝目的而在例如X方向上移動,則第二銷118開始插入第二引導部分146-1。在與下匹配板140的移動方向相反的方向(-X方向)上朝下方傾斜的第二引導部分146-1可朝上方移動下匹配板140,並且下匹配板140可靠近第一軌道120。隨著下匹配 板140繼續移動,當第二銷118定位在第二安置部分146-2中時,下匹配板140和第一軌道120可彼此接觸。 Referring next to FIG. 10, the second engagement groove 146 may include a second guiding portion 146-1 and a second seating portion 146-2. The second guiding portion 146-1 may be inclined downward in a direction opposite to the moving direction (for example, the X direction) of the lower matching plate 140 (for example, the -X direction). If the lower matching plate moves in, for example, the X direction for mounting purposes, the second pin 118 begins to be inserted into the second guiding portion 146-1. The second guiding portion 146-1 that is inclined downward in a direction (-X direction) opposite to the moving direction of the lower matching plate 140 may move the lower matching plate 140 upward, and the lower matching plate 140 may approach the first rail 120. With the next match The plate 140 continues to move, and when the second pin 118 is positioned in the second seating portion 146-2, the lower matching plate 140 and the first rail 120 may be in contact with each other.
圖11A和圖11B是示出了第一接合槽144和第二接合槽146的修改的視圖。第一接合槽144和第二接合槽146可具有相同的形狀。在下文中,將以第一接合槽144為基礎進行描述。 11A and 11B are views showing modifications of the first engagement groove 144 and the second engagement groove 146. The first engagement groove 144 and the second engagement groove 146 may have the same shape. Hereinafter, description will be made on the basis of the first engagement groove 144.
首先,在圖11A所示的修改中,第一接合槽144可包括第一引導部分144-1a和144-1b以及第一安置部分144-2。第一引導部分144-1a和144-1b可包括第一水準部分144-1a和第一傾斜部分144-1b。本修改與以上參照圖9描述的實施方式的區別之處在于第一水準部分144-1a包含於第一引導部分144-1a中。在以上參照圖9描述的實施方式的情況下,第一引導部分144-1整體地傾斜,並因此形成尖銳的下角部(具有銳角)。因而,存在工作人員受傷的風險。在本修改的情況下,第一水準部分144-1a在水準方向上延伸,並因此下角部為直角。這可降低工作人員受傷的風險。下匹配板140的重量達數千克。這可使工人能夠將第一水準部分144-1a懸掛在第一銷115上並隨後推動下匹配板140。這有助於提高工作的輕鬆度。 First, in the modification shown in FIG. 11A, the first engagement groove 144 may include first guiding portions 144-1a and 144-1b and a first seating portion 144-2. The first guiding portions 144-1a and 144-1b may include a first level portion 144-1a and a first inclined portion 144-1b. The present modification is different from the embodiment described above with reference to FIG. 9 in that the first level portion 144-1a is included in the first guiding portion 144-1a. In the case of the embodiment described above with reference to Fig. 9, the first guiding portion 144-1 is integrally inclined, and thus forms a sharp lower corner (having an acute angle). Therefore, there is a risk of injury to the staff. In the case of the present modification, the first level portion 144-1a extends in the horizontal direction, and thus the lower corner portion is a right angle. This reduces the risk of injury to workers. The lower matching plate 140 weighs several kilograms. This enables the worker to suspend the first level portion 144-1a on the first pin 115 and then push the lower matching plate 140. This helps to make work easier.
接下來,在圖11B所示的另一修改中,第一接合槽144可包括第一引導部分144-1a和144-1b以及第一安置部分144-2。第一引導部分144-1a和144-1b可包括第一水準部分144-1a和第一傾斜部分144-1b。本修改與以上參照圖11A描述的修改的區別之處在於第一安置部分144-2是傾斜的。具體地,如圖11B所示,第一安置部分144-2可在與第一傾斜部分144-1b的傾斜方向相反的方向上傾斜,即,在與下匹配板140的移動方向相反的方向朝上方傾斜。因而,當對下匹配板140的安裝完成時,第一傾斜部分144-1b與第一安置部分144-2的連接部分可用作一種限位元器,由此抑制第一接合槽144與第一銷115之間的相對移動。這就可 防止外部衝擊將下匹配板140從第一銷115去除。另外,在本修改的情況下,第一水準部分144-1a的進入部分進行圓化以進一步降低工作人員受傷的風險。 Next, in another modification shown in FIG. 11B, the first engagement groove 144 may include first guiding portions 144-1a and 144-1b and a first seating portion 144-2. The first guiding portions 144-1a and 144-1b may include a first level portion 144-1a and a first inclined portion 144-1b. The present modification is different from the modification described above with reference to FIG. 11A in that the first seating portion 144-2 is inclined. Specifically, as shown in FIG. 11B, the first seating portion 144-2 may be inclined in a direction opposite to the inclination direction of the first inclined portion 144-1b, that is, in a direction opposite to the moving direction of the lower matching plate 140 Tilt up. Thus, when the mounting of the lower matching plate 140 is completed, the connecting portion of the first inclined portion 144-1b and the first seating portion 144-2 can be used as a limiter, thereby suppressing the first engaging groove 144 and the The relative movement between a pin 115. This can be The lower matching plate 140 is removed from the first pin 115 by preventing an external impact. Further, in the case of the present modification, the entry portion of the first level portion 144-1a is rounded to further reduce the risk of injury to the worker.
在圖11B所示的修改的情況下,如上所述,即使當對下匹配板140施加外部衝擊時,也可不從第一銷115中去除下匹配板140。然而,在參照圖9描述的實施方式的情況下或在圖11A所示的修改的情況下,第一安置部分144-2在水準方向上延伸。因而,當對下匹配板140施加外部衝擊時,可從第一銷115去除下匹配板140(這適用於涉及第二支架145的配置中)。另外,上匹配板130被置於第一軌道120上。因此,可將上匹配板130向前或向後傾斜,並且可將其向左或向右去除。因此,可設置有球塞180以防止去除上匹配板130和下匹配板140。 In the case of the modification shown in FIG. 11B, as described above, even when an external impact is applied to the lower matching plate 140, the lower matching plate 140 may not be removed from the first pin 115. However, in the case of the embodiment described with reference to FIG. 9 or in the case of the modification shown in FIG. 11A, the first seating portion 144-2 extends in the horizontal direction. Thus, when an external impact is applied to the lower matching plate 140, the lower matching plate 140 can be removed from the first pin 115 (this applies to the configuration involving the second bracket 145). In addition, the upper matching plate 130 is placed on the first rail 120. Therefore, the upper matching plate 130 can be tilted forward or backward, and can be removed to the left or right. Therefore, the ball plunger 180 may be provided to prevent the upper matching plate 130 and the lower matching plate 140 from being removed.
圖12是示出了從前側觀察的球塞180的視圖。圖13是示意性地示出了從側面觀察的球塞180的視圖(為了簡單起見,在圖13中僅示出了在上匹配板130周圍的區域)。如圖12和圖13所示,球塞180可包括球180a和彈性構件180b。彈性構件180b可在一端處連接至壓板110,並且可在另一端處連接至球180a。球180a的前端部分可部分地插入在上匹配板130或下匹配板140中形成的狹槽137或狹槽147。彈性構件180b可抵靠存在於前側處的第一軌道120彈性地壓上匹配板130或下匹配板140。因此,可防止從第一銷115或第二銷118去除下匹配板140。還可以防止在左右方向上去除上匹配板130和下匹配板140。 FIG. 12 is a view showing the ball plunger 180 viewed from the front side. FIG. 13 is a view schematically showing the ball plunger 180 viewed from the side (only the area around the upper matching plate 130 is shown in FIG. 13 for the sake of simplicity). As shown in FIGS. 12 and 13, the ball plunger 180 may include a ball 180a and an elastic member 180b. The elastic member 180b may be coupled to the pressure plate 110 at one end and may be coupled to the ball 180a at the other end. The front end portion of the ball 180a may be partially inserted into the slot 137 or the slot 147 formed in the upper mating plate 130 or the lower mating plate 140. The elastic member 180b can elastically press the matching plate 130 or the lower matching plate 140 against the first rail 120 existing at the front side. Therefore, the lower matching plate 140 can be prevented from being removed from the first pin 115 or the second pin 118. It is also possible to prevent the upper matching plate 130 and the lower matching plate 140 from being removed in the left-right direction.
在上匹配板130和下匹配板140中可設置有至少兩個球塞180。具體地,球塞180中的一個可設置於上匹配板130的下端部分中,而另一球塞180可設置於下匹配板140的上端部分中。另外,鑒於上匹配板130和下匹配板140的熱變形方向,球塞180可設置在第一軌道120的中心C的上側和下側處。狹槽137和狹槽147中的每個均在上下方向上延伸的很長,並且即使當上匹配板130或下匹配板140熱變形時仍可容納球180a的一部分。 At least two ball plugs 180 may be disposed in the upper matching plate 130 and the lower matching plate 140. Specifically, one of the ball stoppers 180 may be disposed in the lower end portion of the upper matching plate 130, and the other ball plunger 180 may be disposed in the upper end portion of the lower matching plate 140. In addition, in view of the heat deformation direction of the upper matching plate 130 and the lower matching plate 140, the ball plunger 180 may be disposed at the upper side and the lower side of the center C of the first rail 120. Each of the slot 137 and the slot 147 extends long in the up and down direction and can accommodate a portion of the ball 180a even when the upper mating plate 130 or the lower mating plate 140 is thermally deformed.
如果上匹配板130和下匹配板140在例如X方向上移動和安裝,則隨著上匹配板130和下匹配板140壓縮彈性構件180b,向前突出的球180a向後收縮。當球180a與上匹配板130和下匹配板140的狹槽137和狹槽147匹配時,球180a可向前突出,並且可部分地進入狹槽137和狹槽147中。球塞180向前壓上匹配板130和匹下配板140,同時保持球180a部分地插入狹槽137和狹槽147中。因而,可防止上匹配板130和下匹配板140被向前、向左和向右去除。 If the upper matching plate 130 and the lower matching plate 140 are moved and mounted, for example, in the X direction, as the upper matching plate 130 and the lower matching plate 140 compress the elastic member 180b, the forwardly protruding ball 180a is contracted rearward. When the ball 180a mates with the slot 137 and slot 147 of the upper mating plate 130 and the lower mating plate 140, the ball 180a can project forwardly and partially into the slot 137 and slot 147. The ball plunger 180 presses the mating plate 130 and the lower plate 140 forward while maintaining the ball 180a partially inserted into the slot 137 and the slot 147. Thus, the upper matching plate 130 and the lower matching plate 140 can be prevented from being removed forward, leftward, and rightward.
下文中,將基於圖11A所示的修改並參照圖14至圖16描述下匹配板140的安裝過程。 Hereinafter, the installation process of the lower matching board 140 will be described based on the modification shown in FIG. 11A and with reference to FIGS. 14 to 16.
首先參照圖14,下匹配板140可在X方向上移動的同時安裝在壓板110的前表面上。隨著下匹配板140在X方向上移動,第一銷115可開始插入第一接合槽144的第一引導部分144-1中,並且第二銷118可開始插入第二接合槽146的第二引導部分146-1中。在該狀態下,下匹配板140可在豎直方向上與第一軌道120間隔開。 Referring first to FIG. 14, the lower matching plate 140 is mounted on the front surface of the pressure plate 110 while being moved in the X direction. As the lower matching plate 140 moves in the X direction, the first pin 115 may start to be inserted into the first guiding portion 144-1 of the first engaging groove 144, and the second pin 118 may start to be inserted into the second of the second engaging groove 146 Guided in section 146-1. In this state, the lower matching plate 140 may be spaced apart from the first rail 120 in the vertical direction.
接著參照圖15,隨著下匹配板140繼續在X方向上移動,第一銷115可定位在第一接合槽144的第一引導部分144-1中,並且第二銷118可定位在第二接合槽146的第二引導部分146-1中。此時,由於下匹配板140在X方向上的移動以及第一引導部分144-1和第二引導部分146-1的傾斜,下匹配板140可逐漸向上移動,並且可靠近第一軌道120。圖15中表示出的參考標誌“a”指示圖14中的下匹配板140的上端的豎直位置。 Referring next to Fig. 15, as the lower matching plate 140 continues to move in the X direction, the first pin 115 can be positioned in the first guiding portion 144-1 of the first engaging groove 144, and the second pin 118 can be positioned in the second Engaged in the second guiding portion 146-1 of the groove 146. At this time, due to the movement of the lower matching plate 140 in the X direction and the inclination of the first guiding portion 144-1 and the second guiding portion 146-1, the lower matching plate 140 may gradually move upward and may approach the first track 120. The reference mark "a" shown in Fig. 15 indicates the vertical position of the upper end of the lower matching plate 140 in Fig. 14.
最後參照圖16,隨著下匹配板140繼續在X方向上移動,第一銷115可定位在第一接合槽144的第一安置部分144-2中,並且第二銷118可定位在第二接合槽146的第二安置部分146-2中。在該狀態下,下匹配板140的上端部分可與第一軌道120接觸。因而,第一軌道120可抑制下匹配板140的上端部分的熱變形。圖16中的參考標誌“b”指示圖15中的下匹配板140的上端的豎直位置。 Referring finally to Figure 16, as the lower matching plate 140 continues to move in the X direction, the first pin 115 can be positioned in the first seating portion 144-2 of the first engagement slot 144 and the second pin 118 can be positioned in the second The second seating portion 146-2 of the engagement groove 146 is engaged. In this state, the upper end portion of the lower matching plate 140 can be in contact with the first rail 120. Thus, the first rail 120 can suppress thermal deformation of the upper end portion of the lower matching plate 140. The reference mark "b" in Fig. 16 indicates the vertical position of the upper end of the lower matching plate 140 in Fig. 15.
參照圖9和圖10,可注意到的是,在本實施方式中,第一接合槽144的前側在第一支架143的情況下打開,並且第二接合槽146的前側在第二支架145的情況下閉合。在另一個修改中,第一支架143的第一接合槽144的前側可以閉合,並且第二支架145的第二接合槽146的前側可打開。可替代地,全部第一接合槽144和第二接合槽146都可以打開,或者全部第一接合槽144和第二接合槽146都可以閉合。如圖10所示,當在第一支架143和第二支架145的部分之中的、第一接合槽144和第二接合槽146的第一引導部分144-1和第二引導部分146-1的進入部分連接至下匹配板140時,第二接合槽146的前側閉合,使得閉合的部分用作一種加強表面,這從連接部分強度的角度來說可以是有利的。 Referring to FIGS. 9 and 10, it can be noted that in the present embodiment, the front side of the first engagement groove 144 is opened in the case of the first bracket 143, and the front side of the second engagement groove 146 is on the second bracket 145. Closed in case. In another modification, the front side of the first engagement groove 144 of the first bracket 143 may be closed, and the front side of the second engagement groove 146 of the second bracket 145 may be opened. Alternatively, all of the first engagement groove 144 and the second engagement groove 146 may be opened, or all of the first engagement groove 144 and the second engagement groove 146 may be closed. As shown in FIG. 10, the first engaging portion 144 and the second guiding portion 144-1 of the first engaging groove 144 and the second engaging groove 146 among the portions of the first bracket 143 and the second bracket 145 are as shown in FIG. When the entry portion is connected to the lower mating plate 140, the front side of the second engaging groove 146 is closed, so that the closed portion serves as a reinforcing surface, which may be advantageous from the viewpoint of the strength of the connecting portion.
以上描述在從另一側朝向一側(即,在X方向上)安裝下匹配板140的前提下進行。然而,在另一修改中,可從一側朝向另一側(即,在-X方向上)安裝下匹配板140。在這種情況下,與圖6相反,第一接合槽144可向左打開,並且可在左側與外部連通,並且第二接合槽146可向右打開,並且可在右側與外部連通。另外,第一支架143和第二支架145的安裝位置和突出程度以及第一銷115和第二銷118的突出程度可與以上所述相對。 The above description is performed on the premise that the lower matching plate 140 is mounted from the other side toward one side (ie, in the X direction). However, in another modification, the lower matching plate 140 can be mounted from one side toward the other side (ie, in the -X direction). In this case, contrary to FIG. 6, the first engagement groove 144 may be opened to the left and may communicate with the outside on the left side, and the second engagement groove 146 may be opened to the right and may communicate with the outside on the right side. In addition, the mounting position and degree of protrusion of the first bracket 143 and the second bracket 145 and the degree of protrusion of the first pin 115 and the second pin 118 may be opposite to those described above.
圖17是示出了根據圖3所示的、一個實施方式的測試分選機的壓板110的、從前側觀察的視圖。圖18是解釋根據圖3所示的、一個實施方式的測試分選機中的、軸160a和軸160b與壓板110的連接結構的視圖。 Fig. 17 is a view showing the pressure plate 110 of the test sorter according to an embodiment shown in Fig. 3 as viewed from the front side. Fig. 18 is a view for explaining a connection structure of the shaft 160a and the shaft 160b and the pressure plate 110 in the test sorter according to an embodiment shown in Fig. 3.
如圖17和圖18所示,在壓板110中可形成有多個連接孔180a和180b。軸160a和軸160b可定位在壓板110的後側處。軸160a和軸160b可連接至連接元件170,該連接元件170定位在壓板110的前側處,並且部分地插入到連接孔180a和連接孔180b中。在本實施方式中,示出螺栓作為連接構件170。 As shown in FIGS. 17 and 18, a plurality of connection holes 180a and 180b may be formed in the pressure plate 110. The shaft 160a and the shaft 160b can be positioned at the rear side of the pressure plate 110. The shaft 160a and the shaft 160b are connectable to a connecting member 170 that is positioned at the front side of the pressure plate 110 and partially inserted into the connecting hole 180a and the connecting hole 180b. In the present embodiment, a bolt is shown as the connecting member 170.
以上僅描述了上匹配板130和下匹配板140的熱變形。實際上,壓板110也可熱變形。在本實施方式中,上匹配板130和下匹配板140在豎直對稱部 中均勻變形。因此,壓板110也可在豎直對稱部中均勻變形。如果壓板110的熱變形不符合上匹配板130和下匹配板140的熱變形,則壓板110的通孔111與推動器150的加熱介質流動路徑151可彼此不對齊。因而,可無法順暢地將加熱介質供給至電子部件。另外,壓板110通過軸160a和軸160b從後側接收壓力。因此,如果壓板110的熱變形不均勻,則在壓板110中可產生翹曲。 Only the thermal deformation of the upper matching plate 130 and the lower matching plate 140 has been described above. In fact, the pressure plate 110 can also be thermally deformed. In the present embodiment, the upper matching plate 130 and the lower matching plate 140 are in a vertical symmetrical portion. Uniform deformation in the middle. Therefore, the pressure plate 110 can also be uniformly deformed in the vertical symmetrical portion. If the thermal deformation of the pressure plate 110 does not conform to the thermal deformation of the upper matching plate 130 and the lower matching plate 140, the through hole 111 of the pressure plate 110 and the heating medium flow path 151 of the pusher 150 may not be aligned with each other. Therefore, the heating medium cannot be smoothly supplied to the electronic component. In addition, the pressure plate 110 receives pressure from the rear side through the shaft 160a and the shaft 160b. Therefore, if the thermal deformation of the pressure plate 110 is not uniform, warpage can be generated in the pressure plate 110.
為了保證壓板110的均勻熱變形,需要允許壓板110基於中心部分在徑向方向上熱變形。例如,如圖17所示,連接至壓板110的中心部分的一個軸160a不能關於壓板110相對移動。這使得可抑制壓板110的中心部分的熱變形。這是因為壓板110的中心部分的連接孔180a的直徑基本等於軸160a和連接構件170的連接部分的直徑。另一方面,與連接至壓板110的除中心部分以外的部分的軸160b相對應的連接孔180b可以是基於壓板110的中心部分在徑向方向上延伸的狹槽。這使得壓板110和軸160b能夠相對移動。因而,允許壓板110的、除中心部分以外的部分的熱變形,並且熱變形的方向可基於壓板110的中心部分為徑向。具體地,在本實施方式的情況下,4個軸160b可連接至壓板110,以鄰接壓板110的側部的中點。在這種情況下,對應於這4個軸160b的連接孔180b可以是在豎直方向或水準方向上延伸的狹槽。這使得壓板110能夠在上下方向和左右方向上熱變形。剩餘的4個軸160b可連接至壓板110,以鄰接壓板110的角部。在這種情況下,對應於剩餘的4個軸160b的連接孔180b可以是在對角線方向上延伸的狹槽。這使得壓板110能夠在對角線方向上熱變形。 In order to ensure uniform thermal deformation of the pressure plate 110, it is necessary to allow the pressure plate 110 to be thermally deformed in the radial direction based on the central portion. For example, as shown in FIG. 17, one shaft 160a connected to the central portion of the pressure plate 110 cannot be relatively moved with respect to the pressure plate 110. This makes it possible to suppress thermal deformation of the central portion of the pressure plate 110. This is because the diameter of the connecting hole 180a of the central portion of the pressure plate 110 is substantially equal to the diameter of the connecting portion of the shaft 160a and the connecting member 170. On the other hand, the connection hole 180b corresponding to the shaft 160b connected to the portion other than the center portion of the pressure plate 110 may be a slit extending in the radial direction based on the central portion of the pressure plate 110. This enables the platen 110 and the shaft 160b to move relative to each other. Thus, thermal deformation of the portion of the pressure plate 110 other than the central portion is allowed, and the direction of thermal deformation may be radial based on the central portion of the pressure plate 110. Specifically, in the case of the present embodiment, the four shafts 160b may be coupled to the pressure plate 110 to abut the midpoint of the side portions of the pressure plate 110. In this case, the connection hole 180b corresponding to the four shafts 160b may be a slit extending in the vertical direction or the horizontal direction. This allows the pressure plate 110 to be thermally deformed in the up and down direction and the left and right direction. The remaining four shafts 160b can be coupled to the pressure plate 110 to abut the corners of the pressure plate 110. In this case, the connection hole 180b corresponding to the remaining four shafts 160b may be a slit extending in the diagonal direction. This enables the pressure plate 110 to be thermally deformed in the diagonal direction.
圖19是根據另一個實施方式的、測試分選機的推動裝置的側視圖。以下將僅對區別於前述實施方式的部分進行描述。將省略對壓板210和上匹配板130的描述。 19 is a side view of a pushing device of a test sorter according to another embodiment. Only portions that are different from the foregoing embodiments will be described below. Description of the platen 210 and the upper matching plate 130 will be omitted.
接合槽229可在第一軌道220的一個表面(本實施方式中的下表面)上形成。在圖19中,接合槽229被示出為T形槽。在下匹配板240的上端部分 中可設置有待插入接合槽229中的突出部249。突出部249可對接合槽229互補。因而,在本實施方式中,突出部249也被示出為T形突出部。類似於先前描述的實施方式,可在將下匹配板240在X方向上移動的同時安裝下匹配板240。此時,突出部249可從開始時插入到接合槽229中,並可沿接合槽229在X方向上滑動。 The engagement groove 229 may be formed on one surface (the lower surface in the present embodiment) of the first rail 220. In Fig. 19, the engagement groove 229 is shown as a T-shaped groove. At the upper end portion of the lower matching plate 240 A protrusion 249 to be inserted into the engagement groove 229 may be provided. The protrusions 249 can be complementary to the engagement slots 229. Thus, in the present embodiment, the protruding portion 249 is also shown as a T-shaped protruding portion. Similar to the previously described embodiment, the lower matching plate 240 can be installed while moving the lower matching plate 240 in the X direction. At this time, the protruding portion 249 can be inserted into the engaging groove 229 from the beginning and can slide in the X direction along the engaging groove 229.
通過採用前述結構,可保持下匹配板240相對於第一軌道220的位置。由於接合槽229的內表面支承突出部249的一個表面(在本實施方式中為上表面)的全部區域,所以可極大地增強抑制下匹配板240的上端部分的熱變形的效果。 By adopting the foregoing structure, the position of the lower matching plate 240 with respect to the first rail 220 can be maintained. Since the inner surface of the engaging groove 229 supports the entire area of one surface (the upper surface in the present embodiment) of the protruding portion 249, the effect of suppressing the thermal deformation of the upper end portion of the lower matching plate 240 can be greatly enhanced.
在先前描述的實施方式的情況下,可通過第一銷115和第二銷118在下匹配板140的上端部分中支承下匹配板140。在測試分選機的整體尺寸小到無法在第一軌道120中形成諸如接合槽229的結構的情況下,這種結構會很有用。 In the case of the previously described embodiment, the lower mating plate 140 can be supported in the upper end portion of the lower mating plate 140 by the first pin 115 and the second pin 118. This configuration can be useful in the case where the overall size of the test sorter is so small that a structure such as the engagement groove 229 cannot be formed in the first rail 120.
圖20是示出了根據圖19所示的、另一個實施方式的測試分選機的鎖定模組290的立體圖。上匹配板230和下匹配板240可通過振動和/或外部衝擊在左右方向上去除。在沒有在X方向上將上匹配板230和下匹配板240推動至正確位置而進行測試的情況下,可損傷電子部件並可降低測試產量。為了防止出現前述問題,可設置鎖定模組290。具體地,鎖定模組290可包括連接至壓板210的一側的主體部分291、定位在主體部分291內並配置為部分地向前突出的片狀件293、以及通過狹槽(未示出)連接至片狀件293的把手292,其中該狹槽在主體部分291的外表面上在前後方向上延伸。在上匹配板230和下匹配板240安裝完成後,工作人員可向前拉動把手292,片狀件293可藉此向前突出。在上匹配板230和下匹配板240已經正常安裝的情況下,片狀件293可平滑地向前突出而不干涉上匹配板230和下匹配板240。然而,如果上匹配板230和下匹配板240沒有正常地安裝,則上匹配板230和下匹配板240就會阻礙片狀件293的前向突出。通過該過程,工作人員可確定上匹配板230和下匹配板240是否正常安裝。如果在圖20 所示的狀態下進行測試,則無論是否有振動和/或外部衝擊,片狀件293均可防止在左右方向上去除上匹配板230和下匹配板240。 Figure 20 is a perspective view showing the locking module 290 of the test sorter according to another embodiment shown in Figure 19. The upper matching plate 230 and the lower matching plate 240 may be removed in the left-right direction by vibration and/or external impact. In the case where the test is performed without pushing the upper matching plate 230 and the lower matching plate 240 to the correct position in the X direction, the electronic component can be damaged and the test yield can be reduced. In order to prevent the aforementioned problems from occurring, a locking module 290 can be provided. Specifically, the locking module 290 can include a body portion 291 coupled to one side of the platen 210, a sheet member 293 positioned within the body portion 291 and configured to partially project forwardly, and a slot (not shown) A handle 292 is coupled to the sheet member 293, wherein the slot extends in the front-rear direction on the outer surface of the body portion 291. After the upper matching plate 230 and the lower matching plate 240 are installed, the worker can pull the handle 292 forward, whereby the sheet member 293 can be protruded forward. In the case where the upper matching plate 230 and the lower matching plate 240 have been normally mounted, the sheet member 293 can smoothly protrude forward without interfering with the upper matching plate 230 and the lower matching plate 240. However, if the upper matching plate 230 and the lower matching plate 240 are not normally mounted, the upper matching plate 230 and the lower matching plate 240 may hinder the forward projection of the sheet member 293. Through this process, the worker can determine whether the upper matching plate 230 and the lower matching plate 240 are normally installed. If in Figure 20 The test is performed in the state shown, and the sheet member 293 prevents the upper matching plate 230 and the lower matching plate 240 from being removed in the left-right direction regardless of vibration or/or external impact.
不同於圖20所示的配置,可設置多個鎖定模組290,以使得鎖定模組290中的每個均相對於上匹配板230和下匹配板240動作。 Unlike the configuration shown in FIG. 20, a plurality of locking modules 290 can be provided such that each of the locking modules 290 operates relative to the upper matching plate 230 and the lower matching plate 240.
另外,有關鎖定模組290的前述內容可應用於參照圖3至圖18描述的實施方式中。在這種情況下,可設置多個鎖定模組290,以使得鎖定模組290中的每個均相對於上匹配板130和下匹配板140動作,或者可設置如圖20所示的單一鎖定模組290,以使得該鎖定模組290同時相對於上匹配板130和下匹配板140動作。在設置單一鎖定模組290的情況下,由於存在基礎部116和基礎部119以及第一支架143和第二支架145,所以鎖定模組290的形狀可不同於圖20的鎖定模組290的形狀。例如,鎖定模組290的主體部分291和片狀件293可以以大致C形來彎曲,並且可進行安裝,以便圍繞基礎部116和基礎部119以及第一支架143和第二支架145。在這種狀態下,片狀件293可向前突出而不干涉基礎部116和基礎部119以及第一支架143和第二支架145。 Additionally, the foregoing regarding locking module 290 can be applied to the embodiments described with reference to Figures 3-18. In this case, a plurality of locking modules 290 may be provided such that each of the locking modules 290 acts relative to the upper matching plate 130 and the lower matching plate 140, or a single lock as shown in FIG. 20 may be provided. The module 290 is such that the locking module 290 simultaneously acts with respect to the upper matching plate 130 and the lower matching plate 140. In the case where the single locking module 290 is provided, the shape of the locking module 290 may be different from the shape of the locking module 290 of FIG. 20 due to the presence of the base portion 116 and the base portion 119 and the first bracket 143 and the second bracket 145. . For example, the body portion 291 and the sheet member 293 of the locking module 290 may be curved in a substantially C shape and may be mounted to surround the base portion 116 and the base portion 119 and the first bracket 143 and the second bracket 145. In this state, the sheet member 293 can protrude forward without interfering with the base portion 116 and the base portion 119 and the first bracket 143 and the second bracket 145.
圖21是示意性地示出了根據又一實施方式的、測試分選機的推動裝置300的主視圖。 21 is a front view schematically showing a pushing device 300 of a test sorter according to still another embodiment.
不同于現有技術,在上述實施方式中採用了上匹配板130和下匹配板140共兩個。然而,本公開不限於此。例如,當電子部件以M×N矩陣的形式安裝在測試盤上時,可設置2k個壓板,以便將壓力傳遞至具有M/2k×N矩陣形式的電子部件。類似地,2k個第一軌道可設置在相應壓板的中心部分中,以便在水準方向上延伸。可設置2k個上匹配板和2k個下匹配板,以便與第一軌道接觸。在這方面,M可以是2或更大的偶數,並且N和k可以是1或更大的自然數。 Different from the prior art, a total of two upper matching plates 130 and lower matching plates 140 are employed in the above embodiment. However, the present disclosure is not limited thereto. For example, when electronic components are mounted on a test disc in the form of an M x N matrix, 2k press plates may be provided to transfer pressure to electronic components in the form of M/2k x N matrix. Similarly, 2k first tracks may be disposed in a central portion of the respective platen to extend in the horizontal direction. 2k upper matching plates and 2k lower matching plates may be provided to be in contact with the first track. In this regard, M may be an even number of 2 or more, and N and k may be natural numbers of 1 or more.
圖21示出了當k等於1時的推動裝置300。如圖21所示,可設置兩個壓板310a和310b,以便將壓力傳遞至具有M/2k×N矩陣形式的電子部件。壓板 310a和壓板310b可在豎直方向上彼此間隔開(在壓板310a與壓板310b之間具有間隙312)。這是因為壓板310a和壓板310b可熱變形。另外,可對應於這兩個壓板310a和310b設置兩個第一軌道320a和320b。另外,可設置兩個上匹配板330a和330b以及兩個下匹配板340a和340b,以便分別與第一軌道320a和第一軌道320b接觸。結果,兩個上匹配板330a和330b可覆蓋具有M/4×N矩陣形式的電子部件,並且兩個下匹配板340a和340b可覆蓋具有M/4×N矩陣形式的電子部件。 Figure 21 shows the pushing device 300 when k is equal to one. As shown in Fig. 21, two pressure plates 310a and 310b may be provided to transfer pressure to the electronic component in the form of a M/2k x N matrix. Press plate The 310a and the platen 310b may be spaced apart from each other in the vertical direction (with a gap 312 between the platen 310a and the platen 310b). This is because the pressure plate 310a and the pressure plate 310b are thermally deformable. In addition, two first rails 320a and 320b may be disposed corresponding to the two pressure plates 310a and 310b. In addition, two upper matching plates 330a and 330b and two lower matching plates 340a and 340b may be disposed to be in contact with the first track 320a and the first track 320b, respectively. As a result, the two upper matching plates 330a and 330b can cover electronic components in the form of M/4×N matrix, and the two lower matching plates 340a and 340b can cover electronic components in the form of M/4×N matrix.
雖然以上參照圖示描述了本公開的示例性實施方式,然而本領域技術人員應理解的是,本公開可以以各種方式實施而不改變本公開的必要特徵或精神。因此,應理解的是,在各個方面,上述示例性實施方式都不是限制性的,而僅是示例。本公開的範圍由以下權利要求表述,而不是由具體的說明書表述,並且,應理解的是,由權利要求及等同概念的含義及範圍所獲得的所有改變和修改均包含於本公開的範圍之內。 While the exemplary embodiments of the present disclosure have been described with reference to the drawings, it is understood that the invention may be Therefore, it should be understood that the above-described exemplary embodiments are not limited in all aspects, but are merely examples. The scope of the present disclosure is defined by the following claims, and is not intended to Inside.
100‧‧‧推動裝置 100‧‧‧Promoting device
110‧‧‧壓板 110‧‧‧ pressure plate
160a、160b‧‧‧軸 160a, 160b‧‧‧ axis
111‧‧‧通孔 111‧‧‧through hole
116‧‧‧基礎部 116‧‧‧Basic Department
119‧‧‧基礎部 119‧‧‧Basic Department
121‧‧‧第二軌道 121‧‧‧second track
122‧‧‧第三軌道 122‧‧‧ third track
145‧‧‧第二支架 145‧‧‧second bracket
Claims (8)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020140168691A KR102187839B1 (en) | 2014-11-28 | 2014-11-28 | Test handler |
Publications (2)
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TW201619624A TW201619624A (en) | 2016-06-01 |
TWI589896B true TWI589896B (en) | 2017-07-01 |
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TW104139313A TWI589896B (en) | 2014-11-28 | 2015-11-26 | Test sorter |
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KR (1) | KR102187839B1 (en) |
CN (2) | CN111375570B (en) |
TW (1) | TWI589896B (en) |
WO (1) | WO2016085206A1 (en) |
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KR20180082754A (en) * | 2017-01-11 | 2018-07-19 | (주)테크윙 | Pushing apparatus for test handler |
KR102461321B1 (en) * | 2017-08-18 | 2022-11-02 | (주)테크윙 | Handler for testing electro devices |
CN115808605B (en) * | 2022-12-09 | 2023-07-04 | 苏师大半导体材料与设备研究院(邳州)有限公司 | Quality detection device is used in semiconductor material preparation |
CN115792309B (en) * | 2023-01-10 | 2023-04-11 | 法特迪精密科技(苏州)有限公司 | High-temperature aging test socket upper cover structure convenient for switching test of two kinds of packaged chips |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
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KR940003390Y1 (en) * | 1991-12-06 | 1994-05-23 | 삼성전관 주식회사 | Mask frame supporter |
KR100243049B1 (en) * | 1997-04-04 | 2000-03-02 | 윤종용 | Pick and place in a handler system for testing semiconductor devices and method for precising them using it |
JP2001525997A (en) | 1997-05-20 | 2001-12-11 | 東京エレクトロン株式会社 | Processing equipment |
EP0997741A3 (en) * | 1998-10-31 | 2001-04-04 | Mirae Corporation | Carrier for an integrated circuit module handler |
KR100392229B1 (en) * | 2001-01-09 | 2003-07-22 | 미래산업 주식회사 | Index head of handler for testing semiconductor |
KR100709114B1 (en) * | 2006-01-23 | 2007-04-18 | (주)테크윙 | Test handler |
KR100771474B1 (en) * | 2006-02-24 | 2007-10-30 | (주)테크윙 | Test tray for test handler |
CN2899976Y (en) * | 2006-05-15 | 2007-05-16 | 常州市天宁天达电子设备有限公司 | Electric brush lifter of thin film capacitor test sorter |
KR101104413B1 (en) * | 2009-09-25 | 2012-01-16 | 세크론 주식회사 | Connecting apparatus for testing a semiconductor device and test handler including the same |
KR101559419B1 (en) * | 2011-12-27 | 2015-10-13 | (주)테크윙 | Test handler |
KR101658078B1 (en) * | 2012-01-03 | 2016-09-21 | (주)테크윙 | Test handler |
KR101811646B1 (en) * | 2012-05-17 | 2017-12-26 | (주)테크윙 | Pick and place apparatus for test handler |
KR102037925B1 (en) * | 2013-05-02 | 2019-10-29 | 세메스 주식회사 | Apparatus for contacting semiconductor device in a test handler |
KR102072390B1 (en) | 2013-06-18 | 2020-02-04 | (주)테크윙 | Test handler |
-
2014
- 2014-11-28 KR KR1020140168691A patent/KR102187839B1/en active IP Right Grant
-
2015
- 2015-11-20 WO PCT/KR2015/012565 patent/WO2016085206A1/en active Application Filing
- 2015-11-20 CN CN202010190958.7A patent/CN111375570B/en active Active
- 2015-11-20 CN CN201580060399.5A patent/CN107003350B/en active Active
- 2015-11-26 TW TW104139313A patent/TWI589896B/en active
Also Published As
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CN111375570A (en) | 2020-07-07 |
CN107003350A (en) | 2017-08-01 |
CN111375570B (en) | 2022-05-24 |
WO2016085206A1 (en) | 2016-06-02 |
CN107003350B (en) | 2020-04-10 |
KR20160064722A (en) | 2016-06-08 |
KR102187839B1 (en) | 2020-12-08 |
TW201619624A (en) | 2016-06-01 |
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