TWI588081B - Target laminating machine structure - Google Patents

Description

Target-fit flip machine structure

The invention relates to the technical field of processing equipment, in particular to a target fitting and turning machine structure which is convenient for a user to flip a target.

With the advancement of technology, the size of sputtering targets commonly seen in the optoelectronic industry is also growing.

Sputtering targets generate high temperatures during chemical vapor deposition (CVD) and physical vapor deposition (PVD) operations, in order to sputter targets that cannot be directly cooled by cooling water and have insufficient strength. The material is heat-dissipated. The existing method is to bond the sputtering target to the back plate with high heat conductivity and high strength, and to move the sputtering target in the high tropical zone generated during the operation.

The bonding process between the existing sputtering target and the back plate first performs pre-treatment such as grinding or sand blasting on the surface of the sputtering target and the back plate to remove grease or oxide on the surface of the sputtering target and the back plate; Metallization is performed using ultrasonic waves; then, the oxide generated in the metallization process is scraped off; finally, the sputtering target is flipped over to the surface of the backing plate.

Faced with small splash targets, it still relies on operators to manually flip and paste. However, with the size and weight of the sputter target The increase in the amount and the limitation of most sputter targets are brittle materials. If the manual method is used to carry out the flipping and bonding of large-size sputter targets, not only the production efficiency will be greatly reduced, but also the sputtering target will be easily caused. Damage during the overturning process, even jeopardizing the safety of the operator.

In view of the problems and deficiencies of the above-mentioned prior art, an object of the present invention is to provide a structure of a target-fitting turning machine, which is convenient for a user to smoothly flip a target by a mechanical structure so as to fit the target and the backing plate. operation.

According to the above object of the present invention, a target fitting and turning machine structure is provided, comprising: a frame unit and a turning unit pivoted to the frame unit. The rack unit has a symmetrical left and right stand. The inverting unit comprises a plurality of pivoting seats symmetrically fixed to the top ends of the left and right vertical frames, a frame body pivotally connected to the pivoting seats, and an inner frame body which is pulled and slidably disposed on the outer frame body. By the composition of the above components, the outer frame body provides a pair of ends of the target material, presses against the inner frame body, and slides into the outer frame body to be restrained by the outer frame body, so that the outer frame body is turned over through the pivoting seats. At the same time, the target is reversed in synchronization to achieve the purpose of the target flipping.

1‧‧‧Rack unit

11‧‧‧Rack body

111‧‧‧Left stand

112‧‧‧right stand

113‧‧‧Rack rail

12‧‧‧ wheel body

13‧‧‧掣动栓组

131‧‧‧Suppository

132‧‧‧掣动栓

133‧‧‧Sleeve

14‧‧‧ Positioning plug group

141‧‧‧ Positioning lock

142‧‧‧ Positioning bolt

143‧‧‧ Positioning block

2‧‧‧Flip unit

21‧‧‧ pivoting seat

22‧‧‧ pivoting seat

23‧‧‧Outer frame

231‧‧‧ Left frame arm

232‧‧‧Right outer frame arm

233‧‧‧Frame rail

2311‧‧‧Left chute

2321‧‧‧Right chute

2312‧‧‧Left upper wing

2322‧‧‧Upper right wing

2313‧‧‧Left lower wing

2323‧‧‧lower right wing

2314‧‧‧Limited class

24‧‧‧ inner frame

241‧‧‧ Left inner arm

242‧‧‧Right inner arm

243‧‧‧Inner frame rail

244‧‧‧Inner frame pulley

25‧‧‧Clamping group

251‧‧‧Clamping seat

252‧‧‧Clamping screw

253‧‧‧Clamping pulley

254‧‧‧shims

26‧‧‧stop bolt

3‧‧‧掣Unit

31‧‧‧煞 wheel

32‧‧‧Steps

33‧‧‧煞车片

34‧‧‧Flexible components

35‧‧‧掣动杆

41‧‧‧Trolley

411‧‧‧Desktop

42‧‧‧ Pulley plate

421‧‧‧Rectangular frame

422‧‧‧ pulley

B‧‧‧ Backboard

H‧‧‧heating station

T‧‧‧ target

Fig. 1 is a schematic view showing an embodiment of a structure of a target-fitting turning machine of the present invention.

Fig. 2 is a schematic view (1) of the embodiment shown in Fig. 1.

Fig. 3 is a schematic view showing an embodiment of the swaying unit in the embodiment shown in Fig. 2.

Fig. 4 is a schematic cross-sectional view showing the clamping group in the embodiment shown in Fig. 3.

Fig. 5 is a schematic view (1) of the embodiment shown in Fig. 2.

Figure 6 is a schematic diagram of the operation of the embodiment shown in Figure 2 (2).

Figure 7 is a schematic diagram (3) of the embodiment shown in Figure 2.

Figure 8 is a schematic diagram of the operation of the embodiment shown in Figure 2 (4).

Figure 9 is a schematic cross-sectional view showing another embodiment of the swaying unit of the present invention.

Fig. 10 is a schematic view (1) showing another embodiment of the target-fitting turning machine of the present invention.

Figure 11 is a schematic view showing another embodiment of the structure of the target-fitting turning machine of the present invention (2).

Fig. 12 is a schematic view (1) of the embodiment shown in Fig. 11.

Figure 13 is a schematic diagram of the operation of the embodiment shown in Figure 11 (2).

Hereinafter, an embodiment of the target fitting and turning machine of the present invention will be further described with reference to the related drawings. In order to facilitate the understanding of the embodiments of the present invention, the same parts are denoted by the same reference numerals.

Referring to Figures 1 to 8, the target-fit flip machine structure of the present invention comprises a rack unit 1, a flip unit 2 pivoted on the rack unit 1, and a fixed unit in the rack unit. 1 and constraining the tilting unit 2 to actuate the tilting unit 3, wherein the rack unit 1 comprises a rack body 11, a plurality of wheel bodies 12, at least one tilting pin set 13, and at least one positioning pin set 14.

The frame body 11 is composed of symmetric left and right vertical frames 111, 112, and at least A frame rail 113 is connected to the left and right vertical frames.

The wheel bodies 12 are pivoted corresponding to the bottom ends of the left and right vertical frames 111 and 112 to provide the convenience of the movement of the frame body 11.

The swaying pin set 13 has a shackle 131, a swaying pin 132 extending through the shackle 131, and a shackle 133 extending from the swaying pin 132 and disposed on the reversing unit 2. The bolt seat 131 is fixed to the top end of one of the left and right vertical frames 111, 112 and is parallel to the frame rail 113.

The positioning pin set 14 has a positioning locking frame 141, a positioning pin 142 for screwing the positioning locking frame 141, and a positioning block 143 fixed to one end of the positioning pin 142. The positioning lock frame 141 is disposed on a side surface of one of the left and right vertical frames 111 and 112, and has a corresponding supporting surface (for example, the ground) through the locking frame formed by the locking frame 141 (not drawn). . The positioning pin 142 has a thread (unpatterned number) matched with the screw hole of the lock frame, and the positioning pin 142 is pressed against the screw hole of the lock frame, and the positioning block 143 is pressed against the support surface. The positioning block 143 is selected from one of wear resistant rubber, metal, or plastic materials.

The inverting unit 2 includes a plurality of pivoting seats 21 and 22 symmetrically fixed to the top ends of the left and right vertical frames 1111 and 112, a frame body 23 pivotally connected to the pivoting seats 21 and 22, and a pulling and sliding device. The inner frame body 24 of the outer frame body 23, the plurality of clamping groups 25 provided on the outer frame body, and the plurality of clamping ends 26 provided at the open ends of the outer frame body 23 and the inner frame body 24 are restrained.

The outer frame body 23 has two outer and outer outer frame arms 231 and 232, and a outer frame cross member 233 that connects the left and right outer frame arms 231 and 232. The left and right outer frame arms 231 and 232 respectively have left and right chutes 2311 and 2321 disposed along the extending direction of the left and right outer frame arms 231 and 232, and are symmetrically formed on the left and right chutes 2311 and 2321. The left and right upper wings 2312, 2322 of the bottom ends and the left and right lower wings 2313, 2323, and a left and right outer frame arms 231, 232 extend in the direction, A limiting block 2314 formed on the outer sides of the left and right outer frame arms 231, 232 (only the limiting block 2314 of the left outer frame arm 231 is shown). In implementation, the left and right chutes 2311, 2321 are closed at the same end by the outer frame rail 233, and the other end is open.

The inner frame body 24 has two left and right inner frame arms 241 and 242 slidably disposed on the left and right chutes 2311 and 2321, an inner frame cross bar 243 connecting the left and right inner frame arms 241 and 242, and The plurality of inner frame pulleys 244 are pivotally disposed on the left and right inner frame arms 241, 242. The inner frame rail 243 corresponds to the position of the outer frame rail 233.

The clamping group 25 (shown in FIG. 4) has a clamping seat 251 suspended from the left (right) chute 2311 (2321) and a screwed-through left (right) upper wing 2312 (2322). A clamping screw 252 connected to the clamping seat 251 and at least one clamping pulley 253 pivoted at the bottom end of the clamping seat 251.

The stop bolts 26 are respectively screwed to the other ends of the left and right chutes 2311, 2321 with respect to the outer frame crossbar 233, so that the stop bolts 26 extend through the left (right) upper wing portion 2312 (2322), left (Right) The chute 2311 (2321) and the left (right) lower wing portion 2313 (2323) are configured to restrain the inner frame body 24 from coming out of the outer frame body 23.

The above-mentioned swaying unit 3 includes a wheel 31, a stepping lever 32, a brake shoe 33, an elastic member 34, and a raking lever 35.

The wheel 31 is coaxially connected to the pivot seat 21.

The stepping lever 32 corresponds to the position of the wheel 31, and one end is pivotally disposed on the frame body 11.

The brake piece 33 has one end fixed to the frame body 11 and the other end of which is connected to the outer circumference of the wheel 31, and is connected with and coupled with the step bar 32, so that the brake piece 33 is pressed against the wheel 31 to restrict the rotation of the wheel 31. In addition, the inverting unit 2 of the coaxial pivoting device also forms a swaying effect.

The elastic member 34 has one end fixed to the frame body 1 and the other end connected to the step bar 32. Let the pedal 32 normally form a relaxed state for the brake shoe 33. When implemented, the elastic element 34 can be selectively omitted.

The swaying lever 35 is fixed to the frame body 1 at one end, and is further blocked from the stepping bar 32 to restrain the other end of the stepping bar 32 from being pivotally connected to avoid being excessively pulled back by the elastic member 34. When implemented, the raking lever 35 can be selectively omitted.

Therefore, the above is a preferred embodiment of the present invention, the various parts of the target-fitting turning machine are introduced, and then the assembly mode and the use characteristics of the present invention are introduced as follows:

<Locating the rack unit 1 and the flip unit 2>

After the target T is preheated from the heating table H, it is desired to perform the turning and the backing plate B. The frame unit 1 is moved to the preset position of the heating station H by the wheel body 12, and the positioning bolt set 14 is used to position the frame unit 1 to avoid slippage. The swaying pin 132 of the swaying pin set 13 is inserted through the ferrule 133 of the reversing unit 2 to restrain the rotation of the reversing unit 2. In conjunction with the rotation of the clamping screw 252 and the stop bolt 26, the left and right inner frame arms 241, 242 are provided between the left and right upper wing portions 2312, 2322 with a moderate space for the target T to penetrate.

<target placement flip unit>

As shown in FIGS. 1 to 4 and 8, the inner frame body 24 inner and outer frame arms 241 and 242 are slid out along the left and right outer frame arms 231 and 232 by the inner frame pulley 244 of the inner frame body 24. Adjacent to the position of the target T, it is convenient for the user to place one end of the target T on the left and right inner frame arms 241 and 242 of the inner frame body 24, and cooperate with the inner frame pulley 244 of the left and right inner frame arms 241 and 242 to make the target The material T moves along the top end surface of the inner frame body 24, and simultaneously slides the inner frame body 24 completely into the outer frame body 23.

Rotating the clamping screw 252 to lower the clamping seat 251 (as shown in FIG. 4), cooperate with the left and right inner frame arms 241, 242 to jointly form a clamping force on the target T, and then rotate the stop bolt 26 to extend. left (Right) upper wing 2312 (2322), left (right) chute 2311 (2321), and left (right) lower wing 2313 (2323) to constrain inner frame 24 and target T, avoiding outer frame The body 23 is taken out. At this time, the frame unit 1 can be further moved to the preset position of the heating stage H by the wheel body 12.

<Flip unit flip target>

As shown in Figures 1 to 8, the swaying bolt 132 of the swaying bolt group 13 is withdrawn from the ferrule 133, so that the turning unit 2 is no longer shaken by the swaying bolt group 13, and the inner and outer frames are allowed. The bodies 24, 23 are synchronously pivoted with the pivot seats 21, 22 as axes. During the turning process, the user can press the pedal bar 32 of the tilting unit 3 to pull the braking piece 33 into tight contact with the wheel 31, and control the speed at which the inner and outer frames 24, 23 are reversed. After the inner and outer frames 24 and 23 are flipped 180 degrees synchronously, the user pushes the tilting pin 132 to form a blocking resistance with the limiting block 2314 of the outer frame 23, so that the user can rotate the clamping screw 252 again. The stopper bolt 26 allows the user to slide the target T out of the inner frame 24 through the pinch pulley 253 of the holder 251.

Referring to Figures 9 through 13, another embodiment of the structure of the target-fitting inverting machine of the present invention is shown. The rack unit 1, the inverting unit 2, and the tilting unit 3 are the same as those in the above embodiment, and therefore will not be described again. Only the clamping pulley 233 of the clamping seat 251 is replaced by a spacer 254. And a car 41 and a pulley plate 42 disposed on the trolley 41 are conveniently arranged for the user to take out the turned target T from the reversing unit 2. The trolley 41 (known in the art) has a table 411 that can be raised and lowered. The pulley plate 42 is pivotally provided with a plurality of pulleys 422 on a rectangular frame 421.

In the implementation, the trolley 41 only needs to be displaced below the target T, that is, between the left and right vertical frames 111 and 112, and then the tabletop 411 of the trolley 41 is moderately raised to reach the target T, and then the target can be used. The material T slides out from the inner frame 24 and displaces the trolley 41 and its target T to a preset position.

The above description is only a preferred embodiment of the present invention, and is intended to be clear The features of the present invention are not intended to limit the scope of the embodiments of the present invention, and equivalent variations made by those skilled in the art in light of the present invention, as well as those skilled in the art, are still within the scope of the present invention. .

1‧‧‧Rack unit

11‧‧‧Rack body

111‧‧‧Left stand

112‧‧‧right stand

113‧‧‧Rack rail

12‧‧‧ wheel body

13‧‧‧掣动栓组

131‧‧‧Suppository

132‧‧‧掣动栓

133‧‧‧Sleeve

14‧‧‧ Positioning plug group

141‧‧‧ Positioning lock

142‧‧‧ Positioning bolt

143‧‧‧ Positioning block

21‧‧‧ pivoting seat

22‧‧‧ pivoting seat

23‧‧‧Outer frame

231‧‧‧ Left frame arm

2311‧‧‧Left chute

2312‧‧‧Left upper wing

2313‧‧‧Left lower wing

2314‧‧‧Limited class

2323‧‧‧lower right wing

232‧‧‧Right outer frame arm

2321‧‧‧Right chute

2322‧‧‧Upper right wing

233‧‧‧Frame rail

24‧‧‧ inner frame

242‧‧‧Right inner arm

243‧‧‧Inner frame rail

244‧‧‧Inner frame pulley

25‧‧‧Clamping group

251‧‧‧Clamping seat

252‧‧‧Clamping screw

26‧‧‧stop bolt

3‧‧‧掣Unit

31‧‧‧煞 wheel

32‧‧‧Steps

33‧‧‧煞车片

34‧‧‧Flexible components

35‧‧‧掣动杆

Claims (10)

A target-fitting and turning machine structure comprises: a frame unit having a left vertical frame and a right vertical frame in a symmetric configuration; and a flipping unit comprising a plurality of symmetrically fixed tops of the left and the right vertical frame a pivoting base, a frame that is pivotally connected to each of the pivoting seats, and an inner frame that is slidably disposed on the outer frame; the outer frame has two symmetrically disposed left and right outer frame arms And a frame rail connecting the left and the right outer frame arms; the left and the right outer frame arms respectively have a left chute and a right slide along the extending direction of the left and the right outer frame arms a groove, and the left end and the right chute are closed at the same end by the outer frame cross bar, and the other end is open; the inner frame body has two symmetry slidingly disposed on the left and right sides of the left and right chutes respectively a frame arm and a pair of outer frame rails are connected to the inner frame rails of the left and right inner frame arms; wherein the outer frame body provides a side end of the target body and is pressed against the upper end surface of the inner frame body, And sliding along the left and right chutes into the outer frame body, and being restricted by the outer frame body, and the outer frame body can selectively rotate through the pivoting seats, and the same The interlocking inverted target. The target-fitting and turning machine structure according to the first aspect of the invention, wherein the outer side of the left and right outer frame arms respectively have a limiting class along the extending direction of the left and the right outer frame arms; The top and bottom ends of the right chute have a left upper wing portion, a right upper wing portion, a left lower wing portion and a lower right wing portion, respectively. The target-flip turning machine structure of claim 2, wherein the inverting unit further comprises at least one pair of clamping groups disposed to the left (or the right) outer frame arm, the clamping group having a A clamping seat for accommodating the left (or right) chute, and a clamping screw that is screwed into the left (or right) upper wing and the clamping seat. The target-fitting flipper structure of claim 3, wherein the flipping unit further comprises at least one pair of left (or right) chute open ends disposed outside the left (or right) a stop bolt of the frame arm, the stop bolt threadingly extends the left (or right) upper wing, the left (or right) chute and the left (or right) lower wing to constrain the inner The frame is prevented from coming out of the outer frame. The target-fit flip-flop structure of claim 4, wherein the rack unit further comprises at least one swaying plug set, the swaying plug set including a pedestal, and the pedestal a shackle, and a sling for the swaying bolt to be inserted and fixed to the turning unit; wherein the pedestal is fixed to the top surface of the left (or right) stand, and The frame rails are parallel. The target-fitting inverting machine structure of claim 5, wherein the holder further pivots at least one clamping pulley. The target-fit flip-flop structure according to any one of claims 1 to 6, wherein a side of the rack unit is further provided with a tilting unit, the tilting unit comprising a wheel and a pedal a wheel that is coaxially connected to one of the pivoting seats; the pedal is corresponding to the wheel position, one end of which is pivotally mounted to the frame unit; the brake piece is fixed at one end After the other end of the frame unit is wound around the outer circumference of the wheel, the frame is connected to and coupled with the pedal to press the wheel to press the wheel to limit the rotation of the wheel. The flipping unit that is coaxially pivoted also forms a sway. The target-fit flip machine structure according to any one of claims 3 to 5, wherein the holder is further pivotally provided with at least one spacer. The target-fitting and turning machine structure according to the eighth aspect of the invention, wherein the rack unit further comprises a tilting unit, the tilting unit comprising a wheel, a pedal, and a brake piece; The wheel is coaxially connected to one of the pivoting seats; the pedal is corresponding to the position of the wheel, and one end is pivotally mounted on the frame unit; the brake piece is fixed at one end of the frame unit, and After the end of the wheel is wound around the outer circumference of the wheel, the stepping bar is connected to and interlocked with the stepping bar, so that the braking piece presses the wheel to restrict the rotation of the wheel, and the coupled device also oscillates the coaxially pivoted pivoting unit. . The target-fitting and turning machine structure according to claim 9, wherein the frame unit is further disposed between the left vertical frame and the right vertical frame, and the trolley has a liftable The table top, and a pulley plate set on the table.