CN201241181Y

CN201241181Y - Turn-over trolley

Info

Publication number: CN201241181Y
Application number: CNU2008201275711U
Authority: CN
Inventors: 洪婉玲; 郭勋聪
Original assignee: E-HENG TECHNOLOGY Co Ltd
Current assignee: E-HENG TECHNOLOGY Co Ltd
Priority date: 2008-07-23
Filing date: 2008-07-23
Publication date: 2009-05-20
Anticipated expiration: 2018-07-23

Abstract

The utility model discloses a Turning trolley which comprises a supporting seat body, a turning unit and a plurality of fixing units, wherein the supporting seat body is a stereo frame body composed of a plurality of frame bodies and a plurality of rod bodies; the turning unit is arranged on the supporting seat body, and is provided with a turning frame body and two rotation devices arranged on the two opposite edges of the turning frame body to be linked with the supporting seat body; the fixing units are arranged on the other two opposite edges of the turning frame body different from the rotation devices. When a door panel or a cathode of sputtering equipment needs maintenance, or target materials are replaced, the door panel, the cathode or the target materials can be fixed and turned by 180 degrees by using the utility model so as to improve the defects generated by manpower turning.

Description

A kind of upset chassis

Technical field

The utility model relates to a kind of upset chassis, being particularly related to a kind of being used for carries out maintenance to the door-plate and the negative electrode of sputtering equipment, when perhaps changing target, this door-plate, negative electrode or target can be fixed the back and do 180 degree upsets, so that the upset chassis of maintaining or changing.

Background technology

The sputtering equipment that is used for technique for vacuum coating at present, its door-plate and sputtering cathode (abbreviating negative electrode as) itself possess suitable weight, when needing repairing maintenance or when changing sputtered target material (abbreviating target as), must labor intensive move and overturn.

Wherein, adopt manpower that the door-plate of this sputtering equipment or negative electrode are moved and the way of overturning has more shortcoming, especially under the situation of upset object preponderance, may cause shortcomings such as upset inconvenience, speed are slow, efficient deficiency; In addition, also can cause collision in the umklapp process, or, will cause sputtering equipment to damage and empty hyperplasia product cost because upset object preponderance makes the operator drop this door-plate, negative electrode or target accidentally because of moving improper; And because in umklapp process, the operator often can't bear weight loading, injured by a crashing object by this door-plate, negative electrode or target and causes the industrial injury accident.

The utility model content

In view of this, main purpose of the present utility model is to provide a kind of upset chassis, adopts utility appliance to assist the upset of door-plate, negative electrode or the target of sputtering equipment, and the door-plate, negative electrode or the target that solve above-mentioned sputtering equipment are with the very inconvenient shortcoming of manpower upset.

Main purpose of the present utility model is to provide a kind of upset chassis, provide a kind of door-plate or negative electrode to need guarantee especially at sputtering equipment, when perhaps changing target, door-plate, negative electrode or target can be fixed the back and do 180 degree upsets, so that the upset chassis of maintaining or changing.

For achieving the above object, the utility model is taked following technical scheme, and upset chassis wherein of the present utility model includes:

Support pedestal, the space framework of forming by a plurality of frameworks and a plurality of body of rod;

Roll-over unit is arranged on this support pedestal, have one the upset framework and be arranged at this upset framework two-phase opposite side with this support pedestal banded swivel arrangement;

A plurality of fixed cells are arranged at this upset framework and differ from other two relative edges that this swivel arrangement is set.

As seen from the above technical solution, when the door-plate or the negative electrode of sputtering equipment needs to be serviced maintenance, when perhaps target need be changed, as long as the operator is with this door-plate, negative electrode or target are carried on the upset framework of this roll-over unit and after the placement positioning, utilization is arranged at fixed cell on this upset framework with this door-plate, negative electrode or target are fixed, then operate the swivel arrangement of this roll-over unit, can replace manpower this door-plate or negative electrode or target are turned over turnback, and then the operation of maintaining or changing, thereby solve the manually shortcoming that door-plate or negative electrode or target brought of upset sputtering equipment.

Description of drawings

Fig. 1 is the perspective view of the utility model upset chassis.

Fig. 2 amplifies the three-dimensional arrangement decomposing schematic representation for the part of the utility model upset chassis.

Fig. 3 amplifies perspective view for the part of the swivel arrangement of the utility model upset chassis.

Fig. 4 amplifies the three-dimensional arrangement decomposing schematic representation for the part that the utility model upset chassis is placed door-plate.

The perspective view that Fig. 5 places door-plate for the utility model upset chassis;

Fig. 6 places the side-looking structural representation of door-plate for the utility model upset chassis;

Fig. 7 is the side-looking structural representation of the door-plate upset of the utility model upset chassis.

Label declaration in the accompanying drawing

(1), upset chassis (11), support pedestal

(12), roll-over unit (121), upset framework

(122), swivel arrangement (1221), worm speed reducer

(1222), spiral wheel (1223), runner

(1224), rotating shaft (1225), spiral wheel

(13), fixed cell (14), preset pieces

(15), steady brace (151), through hole

(16), shearing pin

(2), door-plate (21), pilot hole

Embodiment

For making the purpose of this utility model, technical scheme and advantage clearer, below with reference to the accompanying drawing embodiment that develops simultaneously, the utility model is described in further detail.

Please refer to Fig. 1 to shown in Figure 3, upset chassis of the present utility model (1) comprising:

Support pedestal (11), the space framework of forming by a plurality of frameworks and a plurality of body of rod;

In the present embodiment, a plurality ofly comprise two or more than two.

Roll-over unit (12) is arranged at and supports on the pedestal (11), and it has a upset framework (12

1) and be arranged at upset framework (121) two relative edges with support pedestal (11) banded swivel arrangement (122);

A plurality of fixed cells (13) are arranged at upset framework (121) and differ from swivel arrangement (1 is set

22) other two relative edges.

Upset chassis (1) further comprises a plurality of preset piecess (14) that are arranged at upset framework (121) periphery, wherein, the cross section of preset pieces (14) is L-shaped, the boss of preset pieces (14) vertical direction is arranged at the outside of upset framework (121), is arranged at upset framework (121) and differs from each preset pieces (14) of other two relative edges that swivel arrangement (122) is set corresponding to each fixed cell (13).And, upset chassis (1) further comprises a plurality of shearing pins (16) that are arranged at the last also rotatable steady brace (15) of upset framework (121) and are arranged in steady brace (15), and steady brace (15) has a through hole (151) and wears wherein for shearing pin (16).

In addition, swivel arrangement (122) has a worm speed reducer (1221) that is connected in upset framework (121), and worm speed reducer (1221) has a rotating shaft (not shown) and and is sheathed on spiral wheel (1222) in this rotating shaft.Further, swivel arrangement (122) also has the spiral wheel (1225) that rotating shaft (1224) and that a runner (1223), is connected in runner (1223) is sheathed on rotating shaft (1224), spiral wheel (1222) is meshing with each other with spiral wheel (1225), behind operator's rotating wheel (1223), order about worm speed reducer (1221) by the engagement of spiral wheel (1222) and spiral wheel (1225) and drive upset framework (121) upset.

Other please refer to Fig. 4 to shown in Figure 6, in the present embodiment, upset chassis of the present utility model (1) is one to be applicable to the upset chassis (1) that the door-plate (2) to sputtering equipment is maintained, institute is understood that, the utility model is also maintained applicable to the negative electrode to sputtering equipment, perhaps change the target of sputtering equipment, be applicable to that perhaps similar needs carry out equipment and structure thereof that turning operation keeps in repair and changes.

Door-plate (2) periphery is provided with a plurality of pilot holes (21), and pilot hole (21) is corresponding to the steady brace (15) that is arranged at upset framework (121); When door-plate (2) needs repairing maintenance, the operator disassembles door-plate (2) on sputtering equipment, and with door-plate (2) in the mode of steady brace (15) of its pilot hole (21) corresponding to upset framework (121), be positioned on the preset pieces (14) of upset framework (121), one side makes door-plate (2) be subjected to the restriction of preset pieces (14) and can not move arbitrarily, after making steady brace (15) pass pilot hole (21) on the other hand, again with shearing pin (1

6) pass the through hole (151) of steady brace (15) and be located at steady brace (15), rotate steady brace (15) then and make shearing pin (16) clip live door-plate (2) on upset framework (121).The setting of steady brace (15) and shearing pin (16) for door-plate (2) in umklapp process, except fixed cell (13) fixing, provide in addition one prevent that door-plate (2) from dropping guarantee mechanism again.

Then, operator utilize fixed cell (13) that door-plate (2) is carried out the fixed operation, in the present embodiment, fixed cell (13) is a toggle clamp, therefore the operator can pull this toggle clamp toward door-plate (2) direction, with toggle clamp door-plate (2) is inserted and put, is fixed on the upset framework (121).

Referring to Fig. 3 and shown in Figure 7, the upset flow process of the utility model upset chassis (1) is described, after the operator is fixed in door-plate (2) upset framework (121), get final product rotating wheel (1223), engagement by spiral wheel (1222) and spiral wheel (1225) drives worm speed reducer (1221), and then make upset framework (121) turn over turnback, so that the serviceman maintains the door-plate (2) of this sputtering equipment.

By adopting said structure, the utility model when perhaps changing target, provides a upset chassis to overcome the present shortcoming of overturning and being caused with manpower in the maintenance that needs repairing of the door-plate of sputtering equipment or negative electrode.

More than lift preferred embodiment; the purpose of this utility model, technical scheme and advantage are further described; institute is understood that; the above only is preferred embodiment of the present utility model; not in order to restriction the utility model; all within spirit of the present utility model and principle; any modification of being done, be equal to replacement, improvement etc.; all should be included within the protection domain of the present utility model; the interest field that the utility model is advocated should be as the criterion so that the utility model application scope is described, but not only limits to the foregoing description.

Claims

1, a kind of upset chassis is characterized in that, comprising:

Roll-over unit is arranged on the described support pedestal, has a upset framework and is arranged at described upset framework two-phase opposite side to link the swivel arrangement of described support pedestal;

A plurality of fixed cells are arranged at described upset framework and differ from other two relative edges that described swivel arrangement is set.

2, upset chassis as claimed in claim 1 is characterized in that, further comprises a plurality of preset piecess that are arranged at described upset framework.

3, upset chassis as claimed in claim 1 is characterized in that, further comprises a plurality of shearing pins that are arranged at the steady brace of described upset framework and are arranged in described steady brace.

4, as each described upset chassis of claim 1 to 3, it is characterized in that described fixed cell is a toggle clamp.

As each described upset chassis of claim 1 to 3, it is characterized in that 5, described swivel arrangement has a worm speed reducer that is connected in described upset framework.

6, upset chassis as claimed in claim 5 is characterized in that, described worm speed reducer has the spiral wheel that a rotating shaft and is sheathed on described rotating shaft.

7, upset chassis as claimed in claim 6, it is characterized in that, described swivel arrangement comprises that further rotating shaft and that a runner, is connected in described runner is sheathed on the spiral wheel of described rotating shaft, and the spiral wheel of described spiral wheel and described worm speed reducer is meshing with each other.