M434066 五、新型說明： 【新型所屬之技術領域】 本新型是有關於一種翻轉裝置，特別是指一種濺鍍靶 材翻面裝置。 【先前技術】 隨著科技的進步，傳統的映像管電視逐漸為輕薄的液 晶顯示器（Liquid Crystal Display，LCD)所取代。且隨著液晶 顯不器之高度發展，大尺寸的液晶顯示器已成未來趨勢， 相對製程中不可或缺之濺鍍靶材的尺寸與重量也相對增加 〇 濺鍍靶材在進行化學氣相沉積（Chemical Vap〇r Deposition，CVD)及物理氣相沉積（physicai Vap〇rM434066 V. New description: [New technical field] The present invention relates to a turning device, in particular to a sputtering target turning device. [Prior Art] With the advancement of technology, the conventional video tube TV has gradually been replaced by a thin liquid crystal display (LCD). With the development of liquid crystal display, the large-size liquid crystal display has become a future trend, and the size and weight of the sputtering target, which is indispensable in the relative process, are relatively increased. The sputtering target is subjected to chemical vapor deposition. (Chemical Vap〇r Deposition, CVD) and physical vapor deposition (physicai Vap〇r
Deposition，PVD)作業時都會產生高溫，為了對無法以冷卻 水直接降溫且強度不足的濺鍍靶材進行散熱，現有作法是 將韻乾材接合於導熱效果好且強度高的背板上，而將賤 鍍靶材於作業時所產生之高熱帶走。 現有贿乾材與背板的接合製程，會先對賤餘材與 ^板的表面進行研磨或噴砂等前處理，以去除賤㈣材與 背板表面的油脂或氧化物；然後，利用超音波進行金屬化 處理，·接著，再將因金屬化處理作業中所產生的氧化物到 除，·最後’再將濺鍍靶材翻轉貼合於背板的表面上。 對於小型的誠把材，目前仍是藉由操作人員以人工 2式進行翻轉與貼合作業，但是，隨著減練材尺寸與重 1的增加’且大多減鍍乾材又多屬脆性材料，因此，若仍 3 糾34066 ι_ _ 工方式進行大尺寸濺鍍靶材的翻轉與貼合作業，不但 響生產效率，也容易造成濺鐘乾材的損壞甚至是 危及操作人員的安全。 【新型内容】 因此本新型之目的，即在提供一種能順利翻轉靶材 更於乾材與β板接合作業之進行的踐鑛乾材翻面裝置 ό 於是，本新型濺鍍靶材翻面裝置，包含一支架單元、 一樞設於該支架單元上的翻轉單元、一設置於該支架單元鲁 的吊掛單元，及一用以驅動該吊掛單元的驅動單元。 。亥支架單兀包括一支撐架’及一移動地設置於該支撐 架上的移動架；該翻轉單元包括一抱設於該移動架上的框 架、多數對應設置於該框架上的_，及一用以驅動該 框架相對該移動架轉動的翻轉手輪。Deposition, PVD) generates high temperatures during operation. In order to dissipate the sputter target that cannot be directly cooled by cooling water and has insufficient strength, the existing method is to join the rhyme material to the back plate with good heat conductivity and high strength. The ruthenium plated target is taken in the high tropics generated during the operation. In the existing bonding process between the dry material and the back sheet, the surface of the remaining material and the surface of the board are firstly ground or sandblasted to remove the grease or oxide on the surface of the crucible (four) and the back sheet; then, the ultrasonic wave is utilized. The metallization process is performed, and then the oxide generated in the metallization process is removed, and finally the sputtering target is flipped over onto the surface of the backing plate. For the small honesty, the operator still uses the manual 2 type to flip and paste the cooperation, but with the increase of the size and weight of the material, the majority of the dry-plated dry materials are mostly brittle materials. Therefore, if the 3rd correction 34066 ι_ _ method is used for the flipping and affixing of the large-size sputter target, not only the production efficiency, but also the damage of the splashing dry material or even the safety of the operator is easily caused. [New content] Therefore, the object of the present invention is to provide a tumbling dry material turning device capable of smoothly flipping the target material and performing the bonding work between the dry material and the beta plate. Thus, the novel sputtering target turning device The utility model comprises a bracket unit, a turning unit pivoted on the bracket unit, a hanging unit disposed on the bracket unit, and a driving unit for driving the hanging unit. . The self-supporting frame includes a support frame and a moving frame movably disposed on the support frame; the inverting unit includes a frame hung on the moving frame, a plurality of correspondingly disposed on the frame, and a An inverted hand wheel for driving the frame to rotate relative to the moving frame.
該吊掛單元包括-與該移動架間隔#設於t亥支樓架上 的轉軸、二間隔設置於該轉軸上的被動鏈輪、二分別套覆 於每一被動鏈輪且一端連接於該移動架上的吊掛鏈條，及 二分別可拆卸地設置於每一吊掛鏈條另一端的配重塊。 該驅動單元包括-設置於該轉轴上的從動鍵輪、一盘 該從動鏈輪間隔設置於該支揮架上的蜗輪組、一被該蜗輪 組所驅動的主動鏈輪…套覆該主動鏈輪與該從動鍵輪的 驅動鏈條，及一用以驅動該蝸輪組的驅動手輪，其中，該 蜗輪組包括相互响合的一蜗桿與—納W ^ t 蜩輪，該主動鏈輪是與 該蝸輪連動，而該蝸桿被該驅動手輪驅動。 M434066 本新型的有益效果在於：利用蜗輪組轉換該驅動手輪 的轉動方向，並藉由該主動鏈輪、驅動鏈條與從動鏈輪帶 動該轉軸轉動，而令所述被動鏈輪與吊掛鏈條拉動該移動 架於錢#架上移動，g己合該翻轉手輪驅動該框架相對該 移動架轉動’而能順利翻轉㈣以便於接合作業之進行。 【實施方式】 有關本新型之刖述及其他技術内容、特點與功效，在 以下配合參相式之—個較佳實施㈣詳細說明中，將可 清楚的呈現。 參閱圖1、2，本新型濺鍍靶材翻面裝置2之較佳實施 例包含-支架單元3 一植設於該支架單元3上的翻轉單元 4、一设置於該支架單元3上的吊掛單元5(僅顯示於圖2)， 及一用以驅動該吊掛單元5的驅動單元 參閱圖1、2、3’該支架單元3包括—支撐架31、二 相間隔且移動地設置於該支樓架31上的移動架32、二分別 對應所述移動架32而設置於所述支撐架31上的安裝架Μ 、多數對應所述移動架32而樞設於所述安裝架33上的軸 承34 ’及多數設置於該支樓架31底部的車輪^。所述車 輪35犯便於4支架單元3的移動，而所述移動架32分別 被對應的軸承3 4所限位。 於本較佳實施例中，所述移動架32是分別位於圖^中 的左右兩側，當然在實際應用上，所述移動架32也可以一 體成型而概呈U型或是倒㈣，依然可達成相同的功效。 該翻轉單7L 4包括一樞設於所述移動架32上的框架41 5 M434066 、多數對應設置於該框架41上的夾制件42，及—用以驅動 該框架41相對所述移動架32轉動的翻轉手輪43。於本較 佳實施例中，所述夾制件42是以鐵氟龍材質所製成的夾爪 ，因此可以耐接合作業的溫度。 參閱圖2、4,該吊掛單元5包括一與所述移動架32間 隔梅設於該支樓架31上的轉軸51、二間隔設置於該轉轴 51上的被動鏈輪52、二分別套覆於每一被動鏈輪52且_ 端是分別連接於所述移動架32上的吊掛鏈條53，及二分別 可拆卸地設置於每-吊掛鏈條53另__端的配重塊54。 該驅動單元6包括-設置於該轉軸51上的從動鍵輪61 、一與該從動鏈輪61間隔設置於該支撐架31上㈣⑽ 62、一被該蝸輪組62所驅動的主動鏈輪〇、一套覆該主動 鏈輪63與該從動鏈輪61的驅動鏈條64,及一用以驅動該 蝸輪組62的驅動手輪65，其中，該蝸輪組62包括相互嚙 合的-蝎桿621與-蜗輪622，該主動鍵輪〇是與該蜗輪 ⑵連動，而朗桿621被該驅動手輪65驅動。於本較佳 貫施例中，該蝎輪622與蜗桿621的減速比是！ ： 參閱圖1、2、4，眘隊 — 貫際應用時，所述夾制件42能利用 母螺絲44調整與該框架41間的距離以夹制定位一待接 4材200(僅顯示於圖υ，之後轉動該驅動手輪μ，利用 1 目互喊合的該蜗桿621與蜗輪⑵改變該驅動手輪65的旋 轉方向而連動該主動鍤齡 认 轉，並藉由該驅動鏈條64 將s玄主動鏈輪63的動六補.洛册去》 該轉軸轉動。^動㈣動鏈輪6卜進而驅使 M434066 在此要特別說明的是，由於 由於6玄蝸輪622與蝸桿621的 減速比是1 ·· 28，因此，能右分秘丄 有政増加驅動主動鏈輪63的扭 力，防止該主動鏈輪63與從動鏈輪61逆轉。 該_ Μ能帶_述被動鏈輪52 ’配合連設於每一被 動鏈輪52上之配重塊54的自重，帶動所述移動架u於号 支樓架上往復移動以調整該待接合乾材細的位置。此 時，所述軸承34能使所述移動架32相對該支樓架Μ的移 動地更加平順。The hanging unit includes a rotating shaft disposed on the t-branch frame, a passive sprocket disposed on the rotating shaft, and two sleeves respectively attached to each of the passive sprocket and one end connected to the rotating sprocket A hanging chain on the moving frame, and two weights respectively detachably disposed at the other end of each hanging chain. The driving unit includes: a driven key wheel disposed on the rotating shaft, a worm wheel set on which the driven sprocket is spaced apart from the supporting frame, and a driving sprocket driven by the worm wheel set. a driving chain of the driving sprocket and the driven key wheel, and a driving hand wheel for driving the worm wheel set, wherein the worm wheel set includes a worm and a nano W ^ t wheel which are mutually coupled The drive sprocket is interlocked with the worm gear and the worm is driven by the drive handwheel. M434066 The utility model has the beneficial effects that: the worm wheel set is used to convert the rotation direction of the driving hand wheel, and the driving sprocket, the driving chain and the driven sprocket drive the rotating shaft to rotate, and the passive sprocket and the hanging are suspended. The chain pulls the moving frame to move on the shelf, and the flipping hand wheel drives the frame to rotate relative to the moving frame to smoothly flip (4) to facilitate the joining operation. [Embodiment] The description of the present invention and other technical contents, features and effects will be clearly described in the following detailed description of the preferred embodiment (four). Referring to FIGS. 1 and 2, a preferred embodiment of the present invention relates to a flipping unit 4, a flipping unit 4 implanted on the bracket unit 3, and a lifting device disposed on the bracket unit 3. Hanging unit 5 (shown only in FIG. 2), and a driving unit for driving the hanging unit 5, refer to FIGS. 1, 2, and 3'. The bracket unit 3 includes a support frame 31, which is spaced and movably disposed at two intervals. The mounting frame 32 on the support frame 31 and the mounting frame 设置 disposed on the support frame 31 corresponding to the moving frame 32 are respectively disposed on the mounting frame 33 corresponding to the moving frame 32. The bearing 34' and most of the wheels disposed at the bottom of the support frame 31. The wheel 35 facilitates the movement of the carriage unit 3, and the carriage 32 is respectively limited by the corresponding bearing 34. In the preferred embodiment, the moving frames 32 are respectively located on the left and right sides of the drawing. Of course, in practical applications, the moving frame 32 can also be integrally formed and generally U-shaped or inverted (four), still The same effect can be achieved. The flip sheet 7L 4 includes a frame 41 5 M434066 pivoted on the moving frame 32, a plurality of clips 42 corresponding to the frame 41, and a frame 41 for driving the frame 41 relative to the moving frame 32. The rotating hand wheel 43 is turned. In the preferred embodiment, the clip 42 is a jaw made of Teflon material and is therefore resistant to the temperature of the joining operation. Referring to FIGS. 2 and 4, the hanging unit 5 includes a rotating shaft 51 disposed on the supporting frame 31, a passive sprocket 52 spaced apart from the rotating shaft 51, and two respectively. Covering each of the passive sprocket 52 and the _ end is a hanging chain 53 respectively connected to the moving frame 32, and two weights 54 respectively detachably disposed at the other __ end of each hanging chain 53 . The driving unit 6 includes a driven key wheel 61 disposed on the rotating shaft 51, a driving sprocket driven by the worm wheel set 62, and a driven sprocket 61 spaced apart from the driven sprocket 61. a drive chain 64 covering the drive sprocket 63 and the driven sprocket 61, and a drive hand wheel 65 for driving the worm gear set 62, wherein the worm gear set 62 includes intermeshing masts 621 and - worm gear 622, the active key rim is interlocked with the worm wheel (2), and the horizontal rod 621 is driven by the drive hand wheel 65. In the preferred embodiment, the reduction ratio of the wheel 622 to the worm 621 is! : Referring to Figures 1, 2, and 4, the team - in the continuous application, the clip 42 can adjust the distance from the frame 41 by the female screw 44 to clamp and position a waiting material 4 (only shown in After that, the driving hand wheel μ is rotated, and the worm gear 621 and the worm wheel (2) that change each other are used to change the rotation direction of the driving hand wheel 65 to interlock the active age recognition, and the driving chain 64 is driven by the driving chain 64. The moving sprocket of the sinusoidal drive sprocket 63 will be rotated. The moving shaft of the sprocket will rotate. The moving (four) moving sprocket 6 will drive the M434066. Specifically, due to the deceleration of the 6 worm gear 622 and the worm 621 The ratio is 1 · · 28, therefore, the right side of the secret can be used to control the torque of the drive sprocket 63 to prevent the drive sprocket 63 and the driven sprocket 61 from reversing. The _ Μ can bring the passive sprocket 52 'With the self-weight of the weight 54 attached to each of the passive sprocket 52, the moving frame u is reciprocated on the support frame to adjust the position of the dry material to be joined. The bearing 34 enables the moving frame 32 to move more smoothly relative to the support frame.
然後轉動該翻轉手輪43驅使該框架41相對所述移動 架32、翻轉，帶動被所述夹制件〇所失制的待接合乾材· 翻面以便與基板（圖未示）相互接合。Then, the turning hand wheel 43 is rotated to drive the frame 41 relative to the moving frame 32 to be reversed, and the dry material to be joined which is lost by the clamping member is turned to be engaged with the substrate (not shown).
综上所述，本新型賤錄材翻面裝置2，利用蜗輪组 62轉換該驅動手輪65的轉動方向，並藉由該主動鏈輪63 、驅動鏈條64與從動鏈輪61帶動該轉軸51轉動，而令所 ^被動鏈輪52與吊掛鏈條53拉動所述移動架於該支撐 架上移動，配合该翻轉手輪43驅動該框架1 ^相對所述 移動架32轉動’而能順利翻轉待接絲材細以便於接合 作業之進行，故確實能達成本新型之目的。 ^惟以上所述者，僅為本新型之較佳實施例而已，當不 能以此限定本新型實施之範圍，即大凡依本新型申請專利 1巳圍及新型說明内容所作之簡單的等效變化與修飾，皆仍 屬本新型專利涵蓋之範圍内。 f圖式簡單說明】 7 1 疋别視圖’說明本新型賤錢乾材翻面裝置的較 M434066 佳實施例； 圖2是一局部剖視圖，輔助說明圖1 ; 圖3是一局部剖視圖，說明該較佳實施例中之安裝架 與軸承的態樣；及 圖4是一局部剖視圖，說明該較佳實施例中驅動單元 的態樣。 8 M434066 【主要元件符號說明】 2 濺鍍靶材翻面裝置 51 轉軸 200 待接合乾材 52 被動鏈輪 3 支架單元 53 吊掛鏈條 31 支撐架 54 配重塊 32 移動架 6 驅動單元 33 安裝架 61 從動鏈輪 34 軸承 62 蜗輪組 35 車輪 621 蝸桿 4 翻轉單元 622 輪 41 框架 63 主動鏈輪 42 炎制件 64 驅動鏈條 43 翻轉手輪 65 驅動手輪 5 吊掛單元In summary, the novel ramming material turning device 2 converts the rotation direction of the driving hand wheel 65 by using the worm wheel set 62, and drives the rotating shaft by the driving sprocket 63, the driving chain 64 and the driven sprocket 61. 51 is rotated, so that the passive sprocket 52 and the hanging chain 53 pull the moving frame to move on the support frame, and the rotating hand wheel 43 drives the frame 1 to rotate relative to the moving frame 32. The purpose of the present invention can be achieved by flipping the wire to be joined to facilitate the joining operation. However, the above is only the preferred embodiment of the present invention, and the scope of the present invention cannot be limited thereto, that is, the simple equivalent change made by the present invention and the new description. And modifications are still within the scope of this new patent. A brief description of the f diagram] 7 1 screening view 'Describes the preferred embodiment of the new type of money dry material turning device than M434066; Fig. 2 is a partial cross-sectional view, which is an explanatory view of Fig. 1; Fig. 3 is a partial cross-sectional view The mounting bracket and bearing in the preferred embodiment; and Figure 4 is a partial cross-sectional view showing the embodiment of the drive unit in the preferred embodiment. 8 M434066 [Description of main component symbols] 2 Sputtering target turning device 51 Rotary shaft 200 Dry material to be joined 52 Passive sprocket 3 Bracket unit 53 Hanging chain 31 Support frame 54 Counterweight 32 Moving frame 6 Drive unit 33 Mounting bracket 61 Driven sprocket 34 Bearing 62 Worm gear set 35 Wheel 621 Worm 4 Flip unit 622 Wheel 41 Frame 63 Drive sprocket 42 Inflammable piece 64 Drive chain 43 Flip handwheel 65 Drive handwheel 5 Suspension unit