TWI570511B - Coloring the photosensitive resin composition - Google Patents

Coloring the photosensitive resin composition Download PDF

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TWI570511B
TWI570511B TW101100445A TW101100445A TWI570511B TW I570511 B TWI570511 B TW I570511B TW 101100445 A TW101100445 A TW 101100445A TW 101100445 A TW101100445 A TW 101100445A TW I570511 B TWI570511 B TW I570511B
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compound
meth
resin composition
photosensitive resin
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TW101100445A
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TW201241563A (en
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Yoshiko Miya
Hiroyuki Miura
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Sumitomo Chemical Co
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09BORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B11/00Diaryl- or thriarylmethane dyes
    • C09B11/04Diaryl- or thriarylmethane dyes derived from triarylmethanes, i.e. central C-atom is substituted by amino, cyano, alkyl
    • C09B11/10Amino derivatives of triarylmethanes
    • C09B11/24Phthaleins containing amino groups ; Phthalanes; Fluoranes; Phthalides; Rhodamine dyes; Phthaleins having heterocyclic aryl rings; Lactone or lactame forms of triarylmethane dyes
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09BORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B67/00Influencing the physical, e.g. the dyeing or printing properties of dyestuffs without chemical reactions, e.g. by treating with solvents grinding or grinding assistants, coating of pigments or dyes; Process features in the making of dyestuff preparations; Dyestuff preparations of a special physical nature, e.g. tablets, films
    • C09B67/0033Blends of pigments; Mixtured crystals; Solid solutions
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters
    • G02B5/223Absorbing filters containing organic substances, e.g. dyes, inks or pigments
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/029Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
    • G03F7/0295Photolytic halogen compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders

Description

著色感光性樹脂組成物 Colored photosensitive resin composition

本發明係關於一種著色感光性樹脂組成物。 The present invention relates to a colored photosensitive resin composition.

著色感光性樹脂組成物,係使用於彩色濾光片的製造。於日本專利公開特開2004-83857號公報中係記載有著色感光性樹脂組成物,其係含有:由苄基甲基丙烯酸酯/甲基丙烯酸共聚物所成之樹脂、2-苄基-2-二甲基胺基-(4-嗎啉基苯基)-丁烷-1-酮、4,4’-雙(二乙基胺基)-二苯甲酮、季戊四醇肆(3-磺醯基丙酸酯)、光聚合性化合物、溶劑、顏料及顏料分散劑。 The colored photosensitive resin composition is used for the production of a color filter. Japanese Laid-Open Patent Publication No. 2004-83857 discloses a coloring photosensitive resin composition containing a resin composed of a benzyl methacrylate/methacrylic acid copolymer and 2-benzyl-2. -Dimethylamino-(4-morpholinylphenyl)-butan-1-one, 4,4'-bis(diethylamino)-benzophenone, pentaerythritol oxime (3-sulfonate) Propionate), photopolymerizable compound, solvent, pigment, and pigment dispersant.

於以往之著色感光性樹脂組成物中,所得之圖型的解像性及耐久性仍存在有未必能滿意的情況。 In the conventional coloring photosensitive resin composition, the resolution and durability of the resulting pattern may not be satisfactory.

本發明,係提供以下之[1]~[9]者。 The present invention provides the following [1] to [9].

[1]一種著色感光性樹脂組成物(colored photosensitive resin composition),其係含有(A)、(B)、(C)、(D)、(E)及(F):(A)著色劑;(B)使下述(a)與(b)共聚合所得之共聚物與(c)產生反應而得之樹脂;(a):由不飽和羧酸及不飽和羧酸酐所成之群中所選 出的至少1種(b):具有可與(a)共聚合之不飽和鍵,且與(a)不同的單體(c):具有碳數2~4之環狀醚骨架及乙烯性不飽和鍵的單體(C)聚合性化合物(polumerable compound);(D)聚合反應起始劑(polymerization initiator);(E)多官能硫醇化合物(polyfunctional thiol compound);(F)溶劑。 [1] A colored photosensitive resin composition comprising (A), (B), (C), (D), (E) and (F): (A) a colorant; (B) a copolymer obtained by copolymerizing the following (a) and (b) with (c) a resin obtained by reacting; (a): a group consisting of an unsaturated carboxylic acid and an unsaturated carboxylic anhydride selected At least one kind of (b): a monomer having an unsaturated bond copolymerizable with (a) and different from (a): a cyclic ether skeleton having a carbon number of 2 to 4 and an ethylenicity a saturated bond monomer (C) a polymerizable compound; (D) a polymerization initiator; (E) a polyfunctional thiol compound; (F) a solvent.

[2]如[1]所記載之著色感光性樹脂組成物,其中(D)係肟(oxime)化合物。 [2] The colored photosensitive resin composition according to [1], wherein (D) is an oxime compound.

[3]如[1]或[2]所記載之著色感光性樹脂組成物,其中進一步含有噻噸酮(thioxanthone)化合物。 [3] The colored photosensitive resin composition according to [1] or [2], which further contains a thioxanthone compound.

[4]如[1]~[3]中任一項所記載之著色感光性樹脂組成物,其中(D)係含有醯基膦氧化物(acyl phosphine oxide)化合物或烷基苯酮(alkylphenone)化合物。 [4] The colored photosensitive resin composition according to any one of [1] to [3] wherein (D) contains an acyl phosphine oxide compound or an alkylphenone. Compound.

[5]如[1]~[4]中任一項所記載之著色感光性樹脂組成物,其中(b)係含有具有:至少1種由三環癸烷(tricyclodecane)骨架(skeleton)及三環癸烯(tricyclodecene)骨架所成之群中所選出的骨架、與乙烯性不飽和鍵(ethylenically unsaturated bond)之化合物。 [5] The colored photosensitive resin composition according to any one of [1], wherein (b) contains at least one of a tricyclodecane skeleton and three a skeleton selected from the group consisting of a tricyclodecene skeleton, and a compound having an ethylenically unsaturated bond.

[6]如[1]~[5]中任一項所記載之著色感光性樹脂組 成物,其中(c)係具有環氧乙烷基(oxiranyl group)及乙烯性不飽和鍵之單體。 [6] The colored photosensitive resin group as described in any one of [1] to [5] A compound wherein (c) is a monomer having an oxiranyl group and an ethylenically unsaturated bond.

[7]一種圖型(patern),其係使用如[1]~[6]中任一項所記載之著色感光性樹脂組成物所形成。 [7] A pattern (patern) formed by using the colored photosensitive resin composition according to any one of [1] to [6].

[8]一種彩色濾光片,其係含有如[7]所記載之圖型。 [8] A color filter comprising the pattern as described in [7].

[9]一種彩色濾光片之製造方法,其係包含下述(1)~(3)所示之步驟: (1)藉由將如[1]~[6]中任一項所記載之著色感光性樹脂組成物塗佈於基板而得到塗佈膜的步驟; (2)於塗佈膜上,經由遮罩而曝光,以得到曝光後塗佈膜的步驟; (3)藉由鹼顯像液使曝光後塗佈膜顯像,以得到圖型的步驟。 [9] A method of manufacturing a color filter, comprising the steps (1) to (3) below: (1) A step of applying a colored photosensitive resin composition according to any one of [1] to [6] to a substrate to obtain a coating film; (2) exposing on the coating film via a mask to obtain a film after exposure; (3) A step of developing a post-exposure coating film by an alkali developing solution to obtain a pattern.

依據本發明之著色感光性樹脂組成物,係可得到解像性及耐久性佳之圖型。 According to the colored photosensitive resin composition of the present invention, a pattern excellent in resolution and durability can be obtained.

本發明之著色感光性樹脂組成物,係含有著色劑(A)、樹脂(B)、聚合性化合物(C)、聚合反應起始劑(D)、多官能硫醇化合物(E)及溶劑(F),樹脂(B),係使下述(a)與(b)共聚合所得之共聚物與(c)產生反應而得之樹脂。 The colored photosensitive resin composition of the present invention contains a colorant (A), a resin (B), a polymerizable compound (C), a polymerization initiator (D), a polyfunctional thiol compound (E), and a solvent ( F), the resin (B) is a resin obtained by reacting the copolymer obtained by copolymerizing the following (a) and (b) with (c).

(a):由不飽和羧酸及不飽和羧酸酐所成之群中所選出的至少1種 (a): at least one selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic anhydrides

(b):具有可與(a)共聚合之不飽和鍵,且與(a) 不同的單體 (b): having an unsaturated bond copolymerizable with (a), and (a) Different monomers

(c):具有碳數2~4之環狀醚骨架及乙烯性不飽和鍵的單體。 (c): a monomer having a cyclic ether skeleton of 2 to 4 carbon atoms and an ethylenically unsaturated bond.

本發明之著色感光性樹脂組成物,係含有著色劑(A)。著色劑(A),雖可列舉顏料及染料,但就耐熱性、耐光性之觀點而言,係以含有顏料者為佳。 The colored photosensitive resin composition of the present invention contains a coloring agent (A). Although the coloring agent (A) is a pigment and a dye, it is preferable to contain a pigment from a viewpoint of heat resistance and light resistance.

顏料,係可列舉有機顏料及無機顏料,並可列舉利用色指數(The Society of Dyers and Colourists出版)來分類成色素的化合物。 Examples of the pigments include organic pigments and inorganic pigments, and examples thereof include compounds classified into pigments by using a color index (published by The Society of Dyers and Colourists).

有機顏料,具體而言,係可列舉例如:C.I.色素黃色1、3、12、13、14、15、16、17、20、24、31、53、83、86、93、94、109、110、117、125、128、137、138、139、147、148、150、153、154、166、173、194、214等之黃色顏料。 The organic pigment, specifically, for example, CI pigment yellow 1, 3, 12, 13, 14, 15, 16, 17, 20, 24, 31, 53, 83, 86, 93, 94, 109, 110 Yellow pigments of 117, 125, 128, 137, 138, 139, 147, 148, 150, 153, 154, 166, 173, 194, 214, and the like.

C.I.色素橙色13、31、36、38、40、42、43、51、55、59、61、64、65、71、73等之橙色顏料;C.I.色素紅色9、97、105、122、123、144、149、166、168、176、177、180、192、209、215、216、224、242、254、255、264、265等之紅色顏料;C.I.色素藍色15、15:3、15:4、15:6、60等之藍色顏料;C.I.色素紫色1、19、23、29、32、36、38等之紫色顏料;C.I.色素綠色7、36、58等之綠色顏料;C.I.色素褐色23、25等之褐色顏料; C.I.色素黑色1、7等之黑色顏料等。 CI pigment orange, orange pigments of 13, 31, 36, 38, 40, 42, 43, 51, 55, 59, 61, 64, 65, 71, 73; CI pigment red 9, 97, 105, 122, 123, Red pigments of 144, 149, 166, 168, 176, 177, 180, 192, 209, 215, 216, 224, 242, 254, 255, 264, 265, etc.; CI pigment blue 15, 15, 3, 15: 4, 15:6, 60, etc. blue pigment; CI pigment purple 1,19,23,29,32,36,38, etc. purple pigment; CI pigment green 7,36,58, etc. green pigment; CI pigment brown Brown pigment of 23, 25, etc.; C.I. Black pigments such as pigment black 1, 7, etc.

其中,係以C.I.色素黃色138、150;C.I.色素紅色177、254、C.I.色素紅紫色23;C.I.色素藍色15:6及C.I.色素綠色36、58為佳。此等顏料,係可單獨或將2種以上混合使用。 Among them, C.I. pigment yellow 138, 150; C.I. pigment red 177, 254, C.I. pigment red purple 23; C.I. pigment blue 15:6 and C.I. pigment green 36, 58 are preferred. These pigments may be used singly or in combination of two or more kinds.

前述顏料,亦可視需要,而實施松香處理、使用導入有酸性基或鹼性基之顏料衍生物或顏料分散劑等之表面處理、對由高分子化合物等所成之顏料表面的接枝處理、以硫酸微粒法等而進行之微粒化處理、或者是以用來去除雜質的有機溶劑或水等而進行之洗淨處理、以離子性子雜質之離子交換法等而進行之去除處理等。此外,顏料,係以粒徑為均勻者為佳。藉由使顏料中含有顏料分散劑並進行分散處理,而可得到於溶液中顏料為均勻分散狀態的顏料分散液。 The pigment may be subjected to a rosin treatment, a surface treatment such as a pigment derivative or a pigment dispersant introduced with an acidic group or a basic group, or a graft treatment of a pigment surface formed of a polymer compound or the like, as needed. The micronization treatment by the sulfuric acid microparticle method or the like, the cleaning treatment by an organic solvent or water for removing impurities, the removal treatment by ion exchange method using ionic sub-impurities, or the like. Further, it is preferred that the pigment be uniform in particle size. By allowing the pigment to contain a pigment dispersant and performing a dispersion treatment, a pigment dispersion liquid in which the pigment is uniformly dispersed in the solution can be obtained.

前述顏料分散劑,係可使用市售之界面活性劑,並可列舉例如:聚矽氧系、氟系、酯系、陽離子系、陰離子系、非離子系、兩性、聚酯系、聚胺系、丙烯酸系等之界面活性劑等。前述界面活性劑,除可列舉:聚氧乙烯烷基醚類、聚氧乙烯烷基苯基醚類、聚乙二醇二酯類、山梨醇脂肪酸酯類、脂肪酸改質聚酯類、3級胺改質聚胺甲酸酯類、聚乙烯亞胺類等之外,可以商品名列舉:KP(信越化學工業(股)製)、FLOWLEN(共榮社化學(股)製)、Solsperse(Zeneca(股)製)、EFKA(CIBA公司製)、AJISPER(Ajinomoto Fine-Techno Co.,Inc.製)、 Disperbyk(BYK公司製)等。此等係可各自單獨或者是將2種以上組合使用。 As the pigment dispersant, a commercially available surfactant can be used, and examples thereof include polyoxymethylene, fluorine, ester, cationic, anionic, nonionic, amphoteric, polyester, and polyamine. A surfactant such as acrylic or the like. The above surfactants may, for example, be polyoxyethylene alkyl ethers, polyoxyethylene alkylphenyl ethers, polyethylene glycol diesters, sorbitan fatty acid esters, fatty acid modified polyesters, grade 3 In addition to amine-modified polyurethanes and polyethyleneimine, KP (Shin-Etsu Chemical Co., Ltd.), FLOWLEN (Kyoeisha Chemical Co., Ltd.), and Solsperse (Zeneca) are listed. ()), EFKA (manufactured by CIBA), AJISPER (manufactured by Ajinomoto Fine-Techno Co., Inc.), Disperbyk (made by BYK), etc. These may be used alone or in combination of two or more.

使用顏料分散劑時,其使用量,係相對於顏料,較佳為100質量%以下,更佳為5~50質量%。若顏料分散劑之使用量在前述的範圍內,則有可得均勻分散狀態之顏料分散液的傾向。 When the pigment dispersant is used, the amount thereof is preferably 100% by mass or less, and more preferably 5 to 50% by mass based on the pigment. When the amount of the pigment dispersant used is within the above range, there is a tendency that a pigment dispersion liquid in a uniformly dispersed state can be obtained.

著色劑(A)之含量,係相對於著色感光性樹脂組成物之固體成分,較佳為5~60質量%,更佳為5~45質量%。若著色劑(A)之含量在前述之範圍內,則所得之彩色濾光片可得到所期望之分光或色濃度。 The content of the colorant (A) is preferably 5 to 60% by mass, and more preferably 5 to 45% by mass based on the solid content of the colored photosensitive resin composition. If the content of the colorant (A) is within the above range, the resulting color filter can obtain a desired spectral or color density.

在此,本說明書中,固體成分係指著色感光性樹脂組成物去除溶劑後的成分之合計量。 Here, in the present specification, the solid content refers to the total amount of components after the solvent is removed from the colored photosensitive resin composition.

本發明之著色感光性樹脂組成物,係含有樹脂(B)。樹脂(B),係使下述(a)與(b)共聚合所得之共聚物與(c)產生反應而得到的樹脂; The colored photosensitive resin composition of the present invention contains a resin (B). The resin (B) is a resin obtained by reacting the copolymer obtained by copolymerizing the following (a) and (b) with (c);

(a):由不飽和羧酸及不飽和羧酸酐所成之群中所選出的至少1種 (a): at least one selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic anhydrides

(b):具有可與(a)共聚合之不飽和鍵,且與(a)不同的單體 (b): a monomer having an unsaturated bond copolymerizable with (a) and different from (a)

(c):具有碳數2~4之環狀醚骨架及乙烯性不飽和鍵的單體。 (c): a monomer having a cyclic ether skeleton of 2 to 4 carbon atoms and an ethylenically unsaturated bond.

(a)具體而言,係可列舉:丙烯酸、甲基丙烯酸、巴豆酸、o-乙烯基苯甲酸、m-乙烯基苯甲酸、p-乙烯基苯甲酸等之不飽和單羧酸類; 馬來酸、富馬酸、檸康酸、中康酸、衣康酸、3-乙烯基苯二甲酸、4-乙烯基苯二甲酸、3,4,5,6-四氫苯二甲酸、1,2,3,6-四氫苯二甲酸、二甲基四氫苯二甲酸、1、4-環己烯二羧酸等之不飽和二羧酸類;含有甲基-5-原冰片烯-2,3-二羧酸、5-羧基雙環[2.2.1]庚-2-烯、5,6-二羧基雙環[2.2.1]庚-2-烯、5-羧基-5-甲基雙環[2.2.1]庚-2-烯、5-羧基-5-乙基雙環[2.2.1]庚-2-烯、5-羧基-6-甲基雙環[2.2.1]庚-2-烯、5-羧基-6-乙基雙環[2.2.1]庚-2-烯等之羧基的雙環不飽和化合物類;馬來酸酐、檸康酸酐、衣康酸酐、3-乙烯基苯二甲酸酐、4-乙烯基苯二甲酸酐、3,4,5,6-四氫苯二甲酸酐、1,2,3,6-四氫苯二甲酸酐、二甲基四氫苯二甲酸酐、5,6-二羧酸雙環[2.2.1]庚-2-烯酐(納迪克酸酐)等之不飽和二羧酸酐類;琥珀酸單[2-(甲基)丙烯醯基氧乙基]、苯二甲酸單[2-(甲基)丙烯醯基氧乙基]等之2元以上的多元羧酸之不飽和單[(甲基)丙烯醯基氧烷基]酯類;如α-(羥甲基)丙烯酸般,於同一分子中,含有羥基及羧基之不飽和丙烯酸酯類等。 (a) Specifically, an unsaturated monocarboxylic acid such as acrylic acid, methacrylic acid, crotonic acid, o-vinylbenzoic acid, m-vinylbenzoic acid or p-vinylbenzoic acid; Maleic acid, fumaric acid, citraconic acid, mesaconic acid, itaconic acid, 3-vinyl phthalic acid, 4-vinyl phthalic acid, 3,4,5,6-tetrahydrophthalic acid, 1,2,3,6-tetrahydrophthalic acid, dimethyltetrahydrophthalic acid, 1, 4-cyclohexene dicarboxylic acid, etc., unsaturated dicarboxylic acid; containing methyl-5-formylene -2,3-dicarboxylic acid, 5-carboxybicyclo[2.2.1]hept-2-ene, 5,6-dicarboxybicyclo[2.2.1]hept-2-ene, 5-carboxy-5-methyl Bicyclo[2.2.1]hept-2-ene, 5-carboxy-5-ethylbicyclo[2.2.1]hept-2-ene, 5-carboxy-6-methylbicyclo[2.2.1]hept-2- a bicyclic unsaturated compound of a carboxyl group such as a olefin or a 5-carboxy-6-ethylbicyclo[2.2.1]hept-2-ene; maleic anhydride, citraconic anhydride, itaconic anhydride, 3-vinylphthalic acid Anhydride, 4-vinyl phthalic anhydride, 3,4,5,6-tetrahydrophthalic anhydride, 1,2,3,6-tetrahydrophthalic anhydride, dimethyltetrahydrophthalic anhydride , 5,6-dicarboxylic acid bicyclo[2.2.1]hept-2-ene anhydride (nadic anhydride), etc., unsaturated dicarboxylic anhydrides; succinic acid mono[2-(methyl)propenyloxyethyl ], or a polycarboxylic acid of 2 or more yuan such as [2-(methyl)acryloyloxyethyl] Saturated mono[(meth)acryloyloxyalkyl]esters; such as α-(hydroxymethyl)acrylic acid, unsaturated acrylates containing a hydroxyl group and a carboxyl group in the same molecule.

此等之中,就共聚合反應性之觀點或鹼溶解性之觀點而言,以使用丙烯酸、甲基丙烯酸、馬來酸酐等為佳。 Among these, acrylic acid, methacrylic acid, maleic anhydride, and the like are preferably used from the viewpoint of copolymerization reactivity or alkali solubility.

(b)係可列舉例如:甲基(甲基)丙烯酸酯、乙基(甲基)丙烯酸酯、n-丁基(甲基)丙烯酸酯、sec-丁基(甲基)丙烯酸酯、tert-丁基(甲基)丙烯酸酯等之(甲 基)丙烯酸烷基酯類;環己基(甲基)丙烯酸酯、2-甲基環己基(甲基)丙烯酸酯、三環〔5.2.1.02,6〕癸烷-8-基(甲基)丙烯酸酯(於該技術領域中,慣用名亦有稱為二環戊二烷基(Dicyclopentanyl)(甲基)丙烯酸酯)、二環戊二烷基氧乙基(甲基)丙烯酸酯、異莰基(甲基)丙烯酸酯等之(甲基)丙烯酸環狀烷基酯類;苯基(甲基)丙烯酸酯、苄基(甲基)丙烯酸酯等之(甲基)丙烯酸芳基或芳烷基酯類;馬來酸二乙酯、富馬酸二乙酯、衣康酸二乙酯等之二羧酸二酯;2-羥乙基(甲基)丙烯酸酯、2-羥丙基(甲基)丙烯酸酯等之羥基烷基酯類;雙環[2.2.1]庚-2-烯、5-甲基雙環[2.2.1]庚-2-烯、5-乙基雙環[2.2.1]庚-2-烯、5-羥基雙環[2.2.1]庚-2-烯、5-羥甲基雙環[2.2.1]庚-2-烯、5-(2’-羥乙基)雙環[2.2.1]庚-2-烯、5-甲氧基雙環[2.2.1]庚-2-烯、5-乙氧基雙環[2.2.1]庚-2-烯、5,6-二羥基雙環[2.2.1]庚-2-烯、5,6-二(羥甲基)雙環[2.2.1]庚-2-烯、5,6-二(2’-羥乙基)雙環[2.2.1]庚-2-烯、5,6-二甲氧基雙環[2.2.1]庚-2-烯、5,6-二乙氧基雙環[2.2.1]庚-2-烯、5-羥基-5-甲基雙環[2.2.1]庚-2-烯、5-羥基-5-乙基雙環[2.2.1]庚-2-烯、5-羥甲基-5-甲基雙環[2.2.1]庚-2-烯、5-tert-丁氧基羰基雙環[2.2.1]庚-2-烯、5-環己基氧代羰基雙環[2.2.1]庚-2-烯、5-苯氧基羰 基雙環[2.2.1]庚-2-烯、5,6-雙(tert-丁氧基羰基)雙環[2.2.1]庚-2-烯、5,6-雙(環己基氧代羰基)雙環[2.2.1]庚-2-烯等之雙環不飽和化合物類;N-苯基馬來醯亞胺、N-環己基馬來醯亞胺、N-苄基馬來醯亞胺、N-琥珀醯亞胺-3-馬來醯亞胺苯甲酸酯、N-琥珀醯亞胺-4-馬來醯亞胺丁酸酯、N-琥珀醯亞胺-6-馬來醯亞胺己酸酯(caproate)、N-琥珀醯亞胺-3-馬來醯亞胺丙酸酯、N-(9-吖啶基)馬來醯亞胺等之二羰基醯亞胺衍生物類;苯乙烯、α-甲基苯乙烯、m-甲基苯乙烯、p-甲基苯乙烯、乙烯基甲苯、p-甲氧基苯乙烯、丙烯腈、甲基丙烯腈、氯乙烯、二氯亞乙烯、丙烯酸醯胺、甲基丙烯酸醯胺、乙酸乙烯、1,3-丁二烯、異戊二烯(isoprene)、2,3-二甲基-1,3-丁二烯等。 (b) Examples thereof include methyl (meth) acrylate, ethyl (meth) acrylate, n-butyl (meth) acrylate, sec-butyl (meth) acrylate, tert- (meth)acrylic acid alkyl esters such as butyl (meth) acrylate; cyclohexyl (meth) acrylate, 2-methylcyclohexyl (meth) acrylate, tricyclo [5.2.1.0 2, 6 ] decane-8-yl (meth) acrylate (also known in the art as dicyclopentanyl (meth) acrylate), dicyclopentadialkyl a (meth)acrylic cyclic alkyl ester such as oxyethyl (meth) acrylate or isodecyl (meth) acrylate; phenyl (meth) acrylate, benzyl (meth) acrylate Or an aryl or aralkyl ester of (meth)acrylic acid; a dicarboxylic acid diester of diethyl maleate, diethyl fumarate or diethyl itaconate; 2-hydroxyethyl ( a hydroxyalkyl ester such as methyl acrylate or 2-hydroxypropyl (meth) acrylate; bicyclo [2.2.1] hept-2-ene, 5-methyl bicyclo [2.2.1] g-2 - alkene, 5-ethylbicyclo[2.2.1]hept-2-ene, 5-hydroxybicyclo[2.2.1]hept-2-ene, 5-hydroxymethylbicyclo[2.2.1] Hept-2-ene, 5-(2'-hydroxyethyl)bicyclo[2.2.1]hept-2-ene, 5-methoxybicyclo[2.2.1]hept-2-ene, 5-ethoxyl Bicyclo[2.2.1]hept-2-ene, 5,6-dihydroxybicyclo[2.2.1]hept-2-ene, 5,6-bis(hydroxymethyl)bicyclo[2.2.1]hept-2- Alkene, 5,6-bis(2'-hydroxyethyl)bicyclo[2.2.1]hept-2-ene, 5,6-dimethoxybicyclo[2.2.1]hept-2-ene, 5,6 -diethoxybicyclo[2.2.1]hept-2-ene, 5-hydroxy-5-methylbicyclo[2.2.1]hept-2-ene, 5-hydroxy-5-ethylbicyclo[2.2.1 Hept-2-ene, 5-hydroxymethyl-5-methylbicyclo[2.2.1]hept-2-ene, 5-tert-butoxycarbonylbicyclo[2.2.1]hept-2-ene, 5 -cyclohexyloxycarbonylbicyclo[2.2.1]hept-2-ene, 5-phenoxycarbonylbicyclo[2.2.1]hept-2-ene, 5,6-bis(tert-butoxycarbonyl)bicyclo [2.2.1] Hetero-2-ene, 5,6-bis(cyclohexyloxycarbonyl)bicyclo[2.2.1]hept-2-ene and the like; a bicyclic unsaturated compound; N-phenyl malayan Amine, N-cyclohexylmaleimide, N-benzylmaleimide, N-succinimide-3-maleimide benzoate, N-succinimide-4- Malayanimine butyrate, N-succinimide-6-maleimine caproate (caproate), N-succinimide-3-marine a dicarbonyl quinone imine derivative such as imidium propionate or N-(9-acridinyl)maleimide; styrene, α-methylstyrene, m-methylstyrene, P-methylstyrene, vinyltoluene, p-methoxystyrene, acrylonitrile, methacrylonitrile, vinyl chloride, dichloroethylene glycol, decylamine amide, decylamine methacrylate, vinyl acetate, 1, 3-butadiene, isoprene, 2,3-dimethyl-1,3-butadiene, and the like.

此外,(b)係可列舉具有:至少1種由三環癸烷骨架及三環癸烯骨架所成之群中所選出的骨架、與乙烯性不飽和鍵之化合物(b1)(以下有時稱為「(b1)」)。 In addition, (b) is a compound (b1) which has a skeleton selected from a group consisting of a tricyclodecane skeleton and a tricyclodecene skeleton, and an ethylenically unsaturated bond (hereinafter sometimes) Called "(b1)").

當(b)為(b1)時,可抑制因顯像所致之圖型的膜削減。 When (b) is (b1), film reduction of the pattern due to development can be suppressed.

在此,本說明書中之「三環癸烷骨架」及「三環癸烯骨架」,係分別指以下之結構(各別鍵結鍵係任意之碳原子)。 Here, the "tricyclodecane skeleton" and the "tricyclic terpene skeleton" in the present specification mean the following structures (each of the bonding bonds is an arbitrary carbon atom).

(b1),具體而言,係可列舉:二環戊二烷基(甲基)丙烯酸酯、二環戊二烯基(甲基)丙烯酸酯、二環戊二烷基氧乙基(甲基)丙烯酸酯、二環戊二烯基氧乙基(甲基)丙烯酸酯。 (b1), specifically, dicyclopentadienyl (meth) acrylate, dicyclopentadienyl (meth) acrylate, dicyclopentadienyl oxyethyl (methyl) Acrylate, dicyclopentadienyloxyethyl (meth) acrylate.

(b)係可各自單獨或者是將2種以上組合使用。 (b) Each of them may be used alone or in combination of two or more.

使(b)2種以上組合使用時,至少1種係以上述b1者為佳,另1種,係以苯基(甲基)丙烯酸酯、苄基(甲基)丙烯酸酯等芳烷基酯類(以下有時稱為「(b2)」)者為佳。 When two or more types of (b) are used in combination, at least one of them is preferably the above b1, and the other is an aralkyl ester such as phenyl (meth) acrylate or benzyl (meth) acrylate. Classes (hereinafter sometimes referred to as "(b2)") are preferred.

於使(a)、(b1)及(b2)共聚合所得之共聚物中,相對於使(a)、(b1)及(b2)共聚合所得之共聚物的比例,各單體所產生之構造單位的比例,係以下述之範圍為佳。 In the copolymer obtained by copolymerizing (a), (b1), and (b2), the ratio of the copolymer obtained by copolymerizing (a), (b1), and (b2) is produced by each monomer. The proportion of the structural unit is preferably in the range described below.

(a)所產生之構造單位:5~80莫耳%(更佳為15~60莫耳%) (a) The structural unit produced: 5~80 mol% (more preferably 15~60 mol%)

(b1)所產生之構造單位:5~80莫耳%(更佳為5~20莫耳%) (b1) The structural unit produced: 5~80 mol% (more preferably 5-20 mol%)

(b2)所產生之構造單位:0~90莫耳%(更佳為10 ~70莫耳%) (b2) The structural unit produced: 0~90% by mole (more preferably 10) ~70 mole%)

其中,(a)、(b1)及(b2)之合計,係設為100莫耳%以下。若前述構成比例在上述範圍內,則有硬化性成為良好的傾向。 The total of (a), (b1), and (b2) is set to 100 mol% or less. When the composition ratio is within the above range, the curability tends to be good.

(c)係可列舉例如:具有環氧乙烷基及乙烯性不飽和鍵之單體(c-1)(以下有時稱為「(c-1)」)、具有環氧丙烷基(Oxetanyl groups)及乙烯性不飽和鍵之單體(c-2)(以下有時稱為「(c-2)」)、具有四氫呋喃基及乙烯性不飽和鍵之單體(c-3)(以下有時稱為「(c-3)」)等。 (c), for example, a monomer (c-1) having an oxirane group and an ethylenically unsaturated bond (hereinafter sometimes referred to as "(c-1)"), and having an oxypropylene group (Oxetanyl) Groups) and monomers (c-2) having an ethylenically unsaturated bond (hereinafter sometimes referred to as "(c-2)"), a monomer having a tetrahydrofuranyl group and an ethylenically unsaturated bond (c-3) (below) Sometimes called "(c-3)").

(c-1)係可列舉例如:具有直鏈烯烴經環氧化的結構與乙烯性不飽和鍵之單體(c-11)(以下有時稱為「(c-11)」)、具有環烯經環氧化的結構與乙烯性不飽和鍵之單體(c-12)(以下有時稱為「(c-12)」)。 (c-1), for example, a monomer (c-11) having a structure in which a linear olefin is epoxidized and an ethylenically unsaturated bond (hereinafter sometimes referred to as "(c-11)")) The monomer (c-12) having an epoxidized structure and an ethylenically unsaturated bond (hereinafter sometimes referred to as "(c-12)").

(c-1)係以具有環氧乙烷基與(甲基)丙烯醯氧基之單體為佳,以具有(甲基)丙烯醯氧基之(c-12)為更佳。 (c-1) is preferably a monomer having an oxiranyl group and a (meth) propylene fluorenyloxy group, and more preferably a (meth) propylene fluorenyloxy group (c-12).

在此,於本說明書中,所謂「(甲基)丙烯醯氧基」,係表示至少1種由丙烯醯氧基及甲基丙烯醯氧基所成之群中所選出。「(甲基)丙烯醯基」及「(甲基)丙烯酸酯」等之表記也具有相同的含意。 Here, in the present specification, "(meth)acryloxyloxy group" means at least one selected from the group consisting of an acryloxy group and a methacryloxy group. The expressions "(meth)acrylonitrile" and "(meth)acrylate" have the same meaning.

(c-11)具體而言,係可列舉:縮水甘油基(甲基)丙烯酸酯、β-甲基縮水甘油基(甲基)丙烯酸酯、β-乙基縮水甘油基(甲基)丙烯酸酯、縮水甘油基乙烯基醚、 o-乙烯基苄基縮水甘油基醚、m-乙烯基苄基縮水甘油基醚、p-乙烯基苄基縮水甘油基醚、α-甲基-o-乙烯基苄基縮水甘油基醚、α-甲基-m-乙烯基苄基縮水甘油基醚、α-甲基-p-乙烯基苄基縮水甘油基醚、2,3-雙(縮水甘油基氧甲基)苯乙烯、2,4-雙(縮水甘油基氧甲基)苯乙烯、2,5-雙(縮水甘油基氧甲基)苯乙烯、2,6-雙(縮水甘油基氧甲基)苯乙烯、2,3,4-參(縮水甘油基氧甲基)苯乙烯、2,3,5-參(縮水甘油基氧甲基)苯乙烯、2,3,6-參(縮水甘油基氧甲基)苯乙烯、3,4,5-參(縮水甘油基氧甲基)苯乙烯、2,4,6-參(縮水甘油基氧甲基)苯乙烯、日本特開平7-248625號公報中所記載之化合物等。 (c-11) Specifically, glycidyl (meth) acrylate, β-methyl glycidyl (meth) acrylate, β-ethyl glycidyl (meth) acrylate , glycidyl vinyl ether, O-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether, p-vinylbenzyl glycidyl ether, α-methyl-o-vinylbenzyl glycidyl ether, α -Methyl-m-vinylbenzyl glycidyl ether, α-methyl-p-vinylbenzyl glycidyl ether, 2,3-bis(glycidyloxymethyl)styrene, 2,4 - bis(glycidyloxymethyl)styrene, 2,5-bis(glycidyloxymethyl)styrene, 2,6-bis(glycidyloxymethyl)styrene, 2,3,4 - Ginseng (glycidyloxymethyl) styrene, 2,3,5-glycol (glycidyloxymethyl)styrene, 2,3,6-glycol (glycidyloxymethyl)styrene, 3 4,5-glycol (glycidyloxymethyl)styrene, 2,4,6-glycol (glycidyloxymethyl)styrene, a compound described in JP-A-H07-248625, and the like.

(c-12)係可列舉:乙烯基環己烯單氧化物、1,2-環氧基-4-乙烯基環己烷(例如,CELLOXIDE2000;DAICEL股份有限公司(Daicel Corporation)製)、3,4-環氧基環己基甲基丙烯酸酯(例如,CYCLOMER A400;DAICEL股份有限公司(Daicel Corporation)製)、3,4-環氧基環己基甲基甲基丙烯酸酯(例如,CYCLOMER M100;DAICEL股份有限公司(Daicel Corporation)製)、式(I)所表示之化合物、式(II)所表示之化合物等。 (c-12): vinylcyclohexene monooxide, 1,2-epoxy-4-vinylcyclohexane (for example, CELLOXIDE 2000; manufactured by Daicel Corporation, Daicel Corporation), 3 , 4-epoxycyclohexyl methacrylate (for example, CYCLOMER A400; manufactured by Daicel Corporation, Daicel Corporation), 3,4-epoxycyclohexylmethyl methacrylate (for example, CYCLOMER M100; DAICEL Co., Ltd. (made by Daicel Corporation), a compound represented by the formula (I), a compound represented by the formula (II), and the like.

[式(I)及式(II)中,R1及R2,係各自獨立表示氫原子 、或碳數1~4之烷基,且該烷基所含有的氫原子,亦可被羥基所取代。 [In the formulae (I) and (II), R 1 and R 2 each independently represent a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and the hydrogen atom contained in the alkyl group may be represented by a hydroxyl group. Replace.

X1及X2,係各自獨立表示單鍵、-R3-、*-R3-O-、*-R3-S-、*-R3-NH-。 X 1 and X 2 each independently represent a single bond, -R 3 -, *-R 3 -O-, *-R 3 -S-, *-R 3 -NH-.

R3係表示碳數1~6之烷二基(alkanediyl groups)。 R 3 represents an alkanediyl group having 1 to 6 carbon atoms.

*係表示與O之鍵結鍵]。 * indicates the bond with O].

碳數1~4之烷基,具體而言,係可列舉:甲基、乙基、n-丙基、異丙基、n-丁基、sec-丁基、tert-丁基等。 Specific examples of the alkyl group having 1 to 4 carbon atoms include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, and a tert-butyl group.

可被羥基所取代之烷基,係可列舉:羥甲基、1-羥乙基、2-羥乙基、1-羥丙基、2-羥丙基、3-羥丙基、1-羥基-1-甲基乙基、2-羥基-1-甲基乙基、1-羥丁基、2-羥丁基、3-羥丁基、4-羥丁基等。 The alkyl group which may be substituted by a hydroxyl group may, for example, be a methylol group, a 1-hydroxyethyl group, a 2-hydroxyethyl group, a 1-hydroxypropyl group, a 2-hydroxypropyl group, a 3-hydroxypropyl group or a 1-hydroxy group. 1-methylethyl, 2-hydroxy-1-methylethyl, 1-hydroxybutyl, 2-hydroxybutyl, 3-hydroxybutyl, 4-hydroxybutyl, and the like.

R1及R2,係較佳為可列舉:氫原子、甲基、羥甲基、1-羥乙基、2-羥乙基,更佳為可列舉:氫原子、甲基。 R 1 and R 2 are preferably a hydrogen atom, a methyl group, a methylol group, a 1-hydroxyethyl group or a 2-hydroxyethyl group, and more preferably a hydrogen atom or a methyl group.

烷二基(alkanediyl groups),係可列舉:伸甲基、伸乙基、丙烷-1,2-二基、丙烷-1,3-二基、丁烷-1,4-二基、戊烷-1,5-二基、己烷-1,6-二基等。 Alkanediyl groups, for example, methyl, ethyl, propane-1,2-diyl, propane-1,3-diyl, butane-1,4-diyl, pentane -1,5-diyl, hexane-1,6-diyl and the like.

X1及X2,係較佳為可列舉:單鍵、伸甲基、伸乙基、*-CH2-O-(*係表示與O之鍵結鍵)基、*-CH2CH2-O-基,更佳為可列舉:單鍵、*-CH2CH2-O-基。 X 1 and X 2 are preferably a single bond, a methyl group, a methyl group, a methyl group, a —CH 2 —O— (* is a bond to an O group), and a —CH 2 CH 2 group. More preferably, the -O- group is a single bond or a *-CH 2 CH 2 -O- group.

式(I)所表示之化合物,係可列舉式(I-1)~式(I-15)所表示之化合物。較佳為可列舉式(I-1)、式(I- 3)、式(I-5)、式(I-7)、式(I-9)、式(I-11)~式(I-15)中任一者所表示之化合物。更佳為可列舉式(I-1)、式(I-7)、式(I-9)、式(I-15)中任一者所表示之化合物。 The compound represented by the formula (I) is a compound represented by the formula (I-1) to the formula (I-15). Preferably, it is a formula (I-1) and a formula (I- 3) A compound represented by any one of the formula (I-5), the formula (I-7), the formula (I-9), and the formula (I-11) to the formula (I-15). More preferably, it is a compound represented by any one of Formula (I-1), Formula (I-7), Formula (I-9), and Formula (I-15).

式(II)所表示之化合物,係可列舉式(II-1)~式(II-15)所表示之化合物。較佳為可列舉式(II-1)、式(II-3)、式(II-5)、式(II-7)、式(II-9)、式(II-11)~式(II-15)中任一者所表示之化合物。更佳為可列舉式(II-1)、式(II-7)、式(II-9)、式(II-15)中任一者所表示之化合物。 The compound represented by the formula (II) is a compound represented by the formula (II-1) to the formula (II-15). Preferably, it is a formula (II-1), a formula (II-3), a formula (II-5), a formula (II-7), a formula (II-9), and a formula (II-11) to a formula (II). -15) A compound represented by any one of them. More preferably, it is a compound represented by any one of Formula (II-1), Formula (II-7), Formula (II-9), and Formula (II-15).

式(I)所表示之化合物及式(II)所表示之化合物,係可各自單獨使用。此外,此等係可以任意比例進行混合。進行混合時,其混合比例係以莫耳比計,且式(I):式(II)較佳為5:95~95:5,更佳為10:90~90:10,特別佳為20:80~80:20。 The compound represented by the formula (I) and the compound represented by the formula (II) can be used singly. In addition, these can be mixed in any ratio. When mixing, the mixing ratio is in molar ratio, and formula (I): formula (II) is preferably 5:95 to 95:5, more preferably 10:90 to 90:10, and particularly preferably 20 :80~80:20.

(c-2)係以具有環氧丙烷基(Oxetanyl groups)與(甲基)丙烯醯氧基之單體為佳。(c-2)係可列舉例如:3-甲基-3-(甲基)丙烯醯基氧甲基環氧丙烷、3-乙基-3-(甲基)丙烯醯基氧甲基環氧丙烷、3-甲基-3-(甲基)丙烯醯基氧乙基環氧丙烷、3-乙基-3-(甲基)丙烯醯基氧 乙基環氧丙烷等。 (c-2) is preferably a monomer having an oxyalkylene group and a (meth)acryloxy group. (c-2) is exemplified by 3-methyl-3-(methyl)propenyl methoxymethyl propylene oxide, 3-ethyl-3-(methyl) propylene fluorenyl oxymethyl epoxide Propane, 3-methyl-3-(meth)acryloyloxyethyl propylene oxide, 3-ethyl-3-(methyl) propylene sulfhydryl Ethyl propylene oxide and the like.

(c-3)係以具有四氫呋喃基與(甲基)丙烯醯氧基之單體為更佳。(c-3),具體而言,係可列舉:四氫糠基丙烯酸酯(例如,VISCOAT V # 150、大阪有機化學工業(股)製)、四氫糠基甲基丙烯酸酯等。 (c-3) is more preferably a monomer having a tetrahydrofuranyl group and a (meth)acryloxy group. (c-3), specifically, tetrahydrofurfuryl acrylate (for example, VISCOAT V #150, manufactured by Osaka Organic Chemical Industry Co., Ltd.), tetrahydrofurfuryl methacrylate, or the like.

(c)之附加量,係以添加值換算,且相對於使(a)、(b1)及(b2)共聚合所得之共聚物,以10~60質量%為佳,15~40質量%為更佳。 The amount of (c) added is converted from the added value, and is preferably 10 to 60% by mass, and 15 to 40% by mass based on the copolymer obtained by copolymerizing (a), (b1), and (b2). Better.

樹脂(B)之含量,係相對於本發明之著色感光性樹脂組成物100質量份,一般為0.5~30質量份,較佳為1~20質量份,更佳為2~15質量份。 The content of the resin (B) is usually 0.5 to 30 parts by mass, preferably 1 to 20 parts by mass, more preferably 2 to 15 parts by mass, per 100 parts by mass of the colored photosensitive resin composition of the present invention.

本發明之著色感光性樹脂組成物,係含有聚合性化合物(C)。 The colored photosensitive resin composition of the present invention contains a polymerizable compound (C).

聚合性化合物(C),係可藉由聚合反應起始劑(D)所產生之活性自由基及酸等而聚合之化合物,可列舉例如具有聚合性之乙烯性不飽和鍵之化合物等,較佳為可列舉(甲基)丙烯酸酯化合物。 The polymerizable compound (C) is a compound which can be polymerized by an active radical generated by a polymerization initiator (D), an acid or the like, and examples thereof include a compound having a polymerizable ethylenically unsaturated bond. Preferred examples thereof include a (meth) acrylate compound.

具有1個乙烯性不飽和鍵之聚合性化合物(C),係可列舉與前述(a)、(b)及(c)所列舉的化合物相同者,其中,以(甲基)丙烯酸酯類為佳。 The polymerizable compound (C) having one ethylenically unsaturated bond may be the same as those exemplified in the above (a), (b) and (c), wherein the (meth) acrylate is good.

具有2個乙烯性不飽和鍵之聚合性化合物(C),係可列舉:1,3-丁烷二醇二(甲基)丙烯酸酯、1,3-丁烷二醇(甲基)丙烯酸酯、1,6-己烷二醇二(甲基)丙烯酸酯、乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯 酸酯、新戊基二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、聚乙二醇二丙烯酸酯、雙酚A之雙(丙烯醯氧乙基)醚、乙氧基化雙酚A二(甲基)丙烯酸酯、丙氧基化新戊基二醇二(甲基)丙烯酸酯、乙氧基化新戊基二醇二(甲基)丙烯酸酯、3-甲基戊烷二醇二(甲基)丙烯酸酯等。 The polymerizable compound (C) having two ethylenically unsaturated bonds may, for example, be 1,3-butanediol di(meth)acrylate or 1,3-butanediol (meth)acrylate. 1,6-hexanediol di(meth)acrylate, ethylene glycol di(meth)acrylate, diethylene glycol di(meth)propene Acid ester, neopentyl glycol di(meth)acrylate, triethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, polyethylene glycol diacrylate, bisphenol A double (acryloyloxyethyl) ether, ethoxylated bisphenol A di(meth) acrylate, propoxylated neopentyl glycol di (meth) acrylate, ethoxylated neopentyl Diol (meth) acrylate, 3-methylpentane diol di (meth) acrylate, and the like.

具有3個以上之乙烯性不飽和鍵之聚合性化合物(C),係可列舉:三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、參(2-羥乙基)異氰尿酸三(甲基)丙烯酸酯、乙氧基化三羥甲基丙烷三(甲基)丙烯酸酯、丙氧基化三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、三季戊四醇四(甲基)丙烯酸酯、三季戊四醇五(甲基)丙烯酸酯、三季戊四醇六(甲基)丙烯酸酯、三季戊四醇七(甲基)丙烯酸酯、三季戊四醇八(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯與酸酐之反應物、二季戊四醇五(甲基)丙烯酸酯與酸酐之反應物、三季戊四醇七(甲基)丙烯酸酯與酸酐己內酯改質三羥甲基丙烷三(甲基)丙烯酸酯、己內酯改質季戊四醇三(甲基)丙烯酸酯、己內酯改質參(2-羥乙基)異氰尿酸三(甲基)丙烯酸酯、己內酯改質季戊四醇四(甲基)丙烯酸酯、己內酯改質二季戊四醇五(甲基)丙烯酸酯、己內酯改質二季戊四醇六(甲基)丙烯酸酯、己內酯改質三季戊四醇四(甲基)丙烯酸酯、己內酯 改質三季戊四醇五(甲基)丙烯酸酯、己內酯改質三季戊四醇六(甲基)丙烯酸酯、己內酯改質三季戊四醇七(甲基)丙烯酸酯、己內酯改質三季戊四醇八(甲基)丙烯酸酯、己內酯改質季戊四醇三(甲基)丙烯酸酯與酸酐之反應物、己內酯改質二季戊四醇五(甲基)丙烯酸酯與酸酐之反應物、己內酯改質三季戊四醇七(甲基)丙烯酸酯與酸酐等。 Examples of the polymerizable compound (C) having three or more ethylenically unsaturated bonds include trimethylolpropane tri(meth)acrylate, pentaerythritol tri(meth)acrylate, and bis(2-hydroxyethyl). Tris(meth)acrylate isocyanurate, ethoxylated trimethylolpropane tri(meth)acrylate, propoxylated trimethylolpropane tri(meth)acrylate, pentaerythritol tetra ( Methyl) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, tripentaerythritol tetra (meth) acrylate, tripentaerythritol penta (meth) acrylate, tripentaerythritol hexa Methyl) acrylate, tripentaerythritol hepta (meth) acrylate, tripentaerythritol octa (meth) acrylate, pentaerythritol tri(meth) acrylate and anhydride reactant, dipentaerythritol penta (meth) acrylate and Anhydride reactant, trimellitic acid hepta (meth) acrylate and anhydride caprolactone modified trimethylolpropane tri(meth) acrylate, caprolactone modified pentaerythritol tri(meth) acrylate, Ester modified ginseng (2-hydroxyethyl) isocyanuric acid tris(meth)acrylic acid , caprolactone modified pentaerythritol tetra (meth) acrylate, caprolactone modified dipentaerythritol penta (meth) acrylate, caprolactone modified dipentaerythritol hexa (meth) acrylate, caprolactone modification Tripentaerythritol tetra(meth)acrylate, caprolactone Modified tripentaerythritol penta (meth) acrylate, caprolactone modified trimellititol hexa(meth) acrylate, caprolactone modified tripellitate pentoxide (meth) acrylate, caprolactone modified trimellititol VIII (Meth) acrylate, caprolactone modified pentaerythritol tri(meth) acrylate and anhydride reaction, caprolactone modified dipentaerythritol penta (meth) acrylate and anhydride reaction, caprolactone modification Trispentaerythritol hepta (meth) acrylate and anhydride.

其中,以3官能以上之單體為佳,以二季戊四醇六(甲基)丙烯酸酯為更佳。 Among them, a trifunctional or higher monomer is preferred, and dipentaerythritol hexa(meth)acrylate is more preferred.

聚合性化合物(C)之含量,係相對於著色感光性樹脂組成物之固體成分,以5~50質量%為佳,以10~45質量%為更佳。此外,相對於樹脂(B)及聚合性化合物(C)之合計量,較佳為20~80質量%,更佳為40~60質量%。若聚合性化合物(C)之含量在前述之範圍內,則會有感度、或圖型的強度或平滑性、信賴性成為良好的傾向。 The content of the polymerizable compound (C) is preferably from 5 to 50% by mass, more preferably from 10 to 45% by mass, based on the solid content of the colored photosensitive resin composition. Further, the total amount of the resin (B) and the polymerizable compound (C) is preferably 20 to 80% by mass, and more preferably 40 to 60% by mass. When the content of the polymerizable compound (C) is within the above range, the sensitivity, the smoothness of the pattern, the smoothness, and the reliability tend to be good.

本發明之著色感光性樹脂組成物,係含有聚合反應起始劑(D)。 The colored photosensitive resin composition of the present invention contains a polymerization initiator (D).

聚合反應起始劑(D),係只要藉由光的作用而產生活性自由基或酸等,並開始聚合性化合物(C)之聚合的化合物,便無特別限定,且可使用眾所周知之聚合反應起始劑。 The polymerization initiator (D) is not particularly limited as long as it generates a living radical, an acid or the like by the action of light, and starts polymerization of the polymerizable compound (C), and a well-known polymerization reaction can be used. Starting agent.

聚合反應起始劑(D),係以雙咪唑化合物、烷基苯酮化合物、三氮雜苯化合物、醯基膦氧化物化合物、肟化 合物為佳。此外,亦可使用日本特開2008-181087號公報所記載之光陽離子聚合反應起始劑(例如,由鎓陽離子與路易士酸所產生之陰離子所構成者)。其中,就感度之觀點而言,以肟化合物為佳。 The polymerization initiator (D) is a diimidazole compound, an alkylphenone compound, a triazabenzene compound, a mercaptophosphine oxide compound, and a deuteration. The composition is preferred. Further, a photocationic polymerization initiator (for example, an anion produced by a phosphonium cation and a Lewis acid) described in JP-A-2008-181087 can also be used. Among them, from the viewpoint of sensitivity, a ruthenium compound is preferred.

前述雙咪唑化合物,係可列舉:2,2’-雙(2-氯基苯基)-4,4’,5,5’-四苯基雙咪唑、2,2’-雙(2,3-二氯基苯基)-4,4’,5,5’-四苯基雙咪唑(例如,參照日本特開平6-75372號公報、日本特開平6-75373號公報等)、2,2’-雙(2-氯基苯基)-4,4’,5,5’-四苯基雙咪唑、2,2’-雙(2-氯基苯基)-4,4’,5,5’-四(烷氧基苯基)雙咪唑、2,2’-雙(2-氯基苯基)-4,4’,5,5’-四(二烷氧基苯基)雙咪唑、2,2’-雙(2-氯基苯基)-4,4’,5,5’-四(三烷氧基苯基)雙咪唑(例如,參照日本特公昭48-38403號公報、日本特開昭62-174204號公報等)、4,4’,5,5’-位之苯基被碳烷氧基所取代之咪唑化合物(例如,參照日本特開平7-10913號公報等)等。較佳為可列舉:2,2’-雙(2-氯基苯基)-4,4’,5,5’-四苯基雙咪唑、2,2’-雙(2、3-二氯基苯基)-4,4’,5,5’-四苯基雙咪唑、2,2’-雙(2、4-二氯基苯基)-4,4’,5,5’-四苯基雙咪唑。 The above biimidazole compound may, for example, be 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenylbisimidazole, 2,2'-bis (2,3) -Dichlorophenyl)-4,4',5,5'-tetraphenylbisimidazole (for example, see JP-A-6-75372, JP-A-6-75373, etc.), 2, 2 '-Bis(2-chlorophenyl)-4,4',5,5'-tetraphenylbisimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5, 5'-tetrakis(alkoxyphenyl)bisimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetrakis(dialkoxyphenyl)bisimidazole 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetrakis(trialkoxyphenyl)bisimidazole (for example, refer to Japanese Patent Publication No. Sho 48-38403, Japanese Patent Publication No. Sho 62-174204, etc., and an imidazole compound in which a phenyl group at the 4,4', 5, 5'-position is substituted with a carbamoyloxy group (for example, see JP-A-7-10913, etc.) Wait. Preferred examples are: 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenylbisimidazole, 2,2'-bis(2,3-dichloro Phenyl)-4,4',5,5'-tetraphenylbisimidazole, 2,2'-bis(2,4-dichlorophenyl)-4,4',5,5'-tetra Phenyl diimidazole.

烷基苯酮化合物,係指具有以式(d2)所表示之部分結構或式(d3)所表示之部分結構的化合物。於此等之部分結構中苯環,亦可具有取代基。 The alkylphenone compound refers to a compound having a partial structure represented by the formula (d2) or a partial structure represented by the formula (d3). The benzene ring in some of these structures may also have a substituent.

具有以式(d2)所表示之部分結構的化合物,係可列舉例如:2-甲基-2-嗎啉基-1-(4-甲基磺醯基苯基)丙烷-1-酮、2-二甲基胺基-1-(4-嗎啉基苯基)-2-苄基丁烷-1-酮、及2-(二甲基胺基)-2-〔(4-甲基苯基)甲基〕-1-〔4-(4-嗎啉基)苯基〕丁烷-1-酮。亦可使用Irgacure(註冊商標)369、907及379(以上,BASF公司製)等之市售品。 The compound having a partial structure represented by the formula (d2) may, for example, be 2-methyl-2-morpholinyl-1-(4-methylsulfonylphenyl)propan-1-one, 2 -Dimethylamino-1-(4-morpholinylphenyl)-2-benzylbutan-1-one, and 2-(dimethylamino)-2-[(4-methylbenzene) Methyl]-1-[4-(4-morpholinyl)phenyl]butan-1-one. Commercial products such as Irgacure (registered trademark) 369, 907, and 379 (above, manufactured by BASF Corporation) can also be used.

具有以式(d3)所表示之部分結構的化合物,係可列舉例如:2-羥基-2-甲基-1-苯基丙烷-1-酮、2-羥基-2-甲基-1-〔4-(2-羥基乙氧基)苯基〕丙烷-1-酮、1-羥基環己基苯基酮、2-羥基-2-甲基-1-(4-異丙烯基苯基)丙烷-1-酮之寡聚物、及α,α-二乙氧基苯乙酮、苄基二甲基縮酮(Benzyl dimethyl ketal)。 The compound having a partial structure represented by the formula (d3) may, for example, be 2-hydroxy-2-methyl-1-phenylpropan-1-one or 2-hydroxy-2-methyl-1-[ 4-(2-hydroxyethoxy)phenyl]propan-1-one, 1-hydroxycyclohexyl phenyl ketone, 2-hydroxy-2-methyl-1-(4-isopropenylphenyl)propane - 1-ketone oligomer, and α,α-diethoxyacetophenone, Benzyl dimethyl ketal.

前述之三氮雜苯化合物,係可列舉:2,4-雙(三氯基甲基)-6-(4-甲氧基苯基)-1,3,5-三氮雜苯、2,4-雙(三氯基甲基)-6-(4-甲氧基萘基)-1,3,5-三氮雜苯、2,4-雙(三氯基甲基)-6-向日葵基-1,3,5-三氮雜苯、2,4-雙(三氯基甲基)-6-(4-甲氧基苯乙烯基)-1,3,5-三氮雜苯、2,4-雙(三氯基甲基)-6-〔2-(5-甲基呋喃-2-基)乙烯基〕-1,3,5-三氮雜苯、2,4-雙(三氯基甲基)-6-〔2-(呋喃-2-基)乙烯基〕-1,3,5-三氮雜苯、2,4-雙(三氯基甲基)-6- 〔2-(4-二乙基胺基-2-甲基苯基)乙烯基〕-1,3,5-三氮雜苯、2,4-雙(三氯基甲基)-6-〔2-(3,4-二甲氧基苯基)乙烯基〕1,3,5-三氮雜苯等。 The above-mentioned triazabenzene compound may, for example, be 2,4-bis(trichloromethyl)-6-(4-methoxyphenyl)-1,3,5-triazabenzene, 2, 4-bis(trichloromethyl)-6-(4-methoxynaphthyl)-1,3,5-triazabenzene, 2,4-bis(trichloromethyl)-6-sunflower Base-1,3,5-triazabenzene, 2,4-bis(trichloromethyl)-6-(4-methoxystyryl)-1,3,5-triazabenzene, 2,4-bis(trichloromethyl)-6-[2-(5-methylfuran-2-yl)vinyl]-1,3,5-triazabenzene, 2,4-bis ( Trichloromethyl)-6-[2-(furan-2-yl)vinyl]-1,3,5-triazabenzene, 2,4-bis(trichloromethyl)-6- [2-(4-Diethylamino-2-methylphenyl)vinyl]-1,3,5-triazabenzene, 2,4-bis(trichloromethyl)-6-[ 2-(3,4-Dimethoxyphenyl)vinyl]1,3,5-triazabenzene and the like.

前述之醯基膦氧化物起始劑,係可列舉:2,4,6-三甲基苯甲醯基二苯基膦氧化物等。亦可使用Irgacure 819(汽巴.日本公司製)等之市售品。 The above-mentioned mercaptophosphine oxide initiator may, for example, be 2,4,6-trimethylbenzimidyldiphenylphosphine oxide or the like. Commercial products such as Irgacure 819 (made by Ciba. Japan) can also be used.

前述之肟化合物,係可列舉:N-苯甲醯基氧基-1-(4-苯基磺醯基苯基)丁烷-1-酮-2-亞胺、N-苯甲醯基氧基-1-(4-苯基磺醯基苯基)辛烷-1-酮-2-亞胺、N-乙醯氧基-1-〔9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基〕乙烷-1-亞胺、N-乙醯氧基-1-〔9-乙基-6-{2-甲基-4-(3,3-二甲基-2,4-二氧雜環戊二烷基甲基氧基)苯甲醯基}-9H-咔唑-3-基〕乙烷-1-亞胺等。亦可使用Irgacure OXE-01、OXE-02(以上,BASF日本公司製)、N-1919(ADEKA公司製)等之市售品。 The above-mentioned hydrazine compound may, for example, be N-benzylideneoxy-1-(4-phenylsulfonylphenyl)butan-1-one-2-imine, N-benzhydryloxy 1-(4-phenylsulfonylphenyl)octane-1-one-2-imine, N-acetoxy-1-[9-ethyl-6-(2-methylbenzene Mercapto)-9H-indazol-3-yl]ethane-1-imine, N-acetoxy-1-[9-ethyl-6-{2-methyl-4-(3, 3-Dimethyl-2,4-dioxalanyloxy)benzimidyl}-9H-indazol-3-yl]ethane-1-imine and the like. Commercial products such as Irgacure OXE-01, OXE-02 (above, BASF Japan), N-1919 (made by Adeka) can also be used.

此外,具有可引起鏈轉移之聚合反應起始劑,係亦可使用日本特表2002-544205號公報所記載之光聚合反應起始劑。 Further, a polymerization initiator which can cause chain transfer can also be used as a photopolymerization initiator as described in JP-A-2002-544205.

前述之具有可引起鏈轉移之聚合反應起始劑,係可列舉例如以下述式(D-1)~(D-6)之化合物。 The above-mentioned polymerization initiator which can cause chain transfer can be, for example, a compound of the following formula (D-1) to (D-6).

前述之具有可引起鏈轉移之聚合反應起始劑,亦可作為構成樹脂(A)的成分(c)使用。 The above-mentioned polymerization initiator which can cause chain transfer can also be used as the component (c) constituting the resin (A).

再者,聚合反應起始劑(D),係可列舉例如:安息 香、安息香甲基醚、安息香乙基醚、安息香異丙基醚、安息香異丁基醚等之安息香化合物;二苯甲酮、o-苯甲醯基苯甲酸甲酯、4-苯基二苯甲酮、4-苯甲醯基-4’-甲基二苯基硫化物、3,3’,4,4’-四(tert-丁基過氧羰基)二苯甲酮、2,4,6-三甲基二苯甲酮等之二苯甲酮化合物;9,10-菲醌、2-乙基蒽醌、樟腦烷醌等之醌化合物;10-丁基-2-氯基吖啶酮、苄基、苯基乙醛酸甲酯、二茂鈦化合物等。此等係以與後述之聚合起始助劑(D1)(特別是胺類)組合使用者為佳。 Further, the polymerization initiator (D) may, for example, be in the rest Benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether, etc.; benzophenone, methyl o-benzoyl benzoate, 4-phenyl diphenyl Methyl ketone, 4-benzylidene-4'-methyldiphenyl sulfide, 3,3',4,4'-tetra(tert-butylperoxycarbonyl)benzophenone, 2,4, a benzophenone compound such as 6-trimethylbenzophenone; an anthraquinone compound such as 9,10-phenanthrenequinone, 2-ethylhydrazine, camphorin or the like; 10-butyl-2-chloropyridinium A ketone, a benzyl group, a methyl phenylglyoxylate, a titanocene compound, and the like. These are preferably used in combination with a polymerization starting aid (D1) (particularly an amine) to be described later.

亦可進一步含有聚合起始助劑(D1)。聚合起始助劑(D1),係可與聚合反應起始劑(D)組合使用,且是為了促進藉由聚合反應起始劑而開始聚合的聚合性化合物之聚合所使用的化合物、或者是增感劑。 Further, a polymerization initiation aid (D1) may be further contained. The polymerization initiation aid (D1), which is used in combination with the polymerization initiator (D), is a compound used to promote polymerization of a polymerizable compound which starts polymerization by a polymerization initiator, or Sensitizer.

聚合起始助劑(D1),係可列舉:胺化合物、噻唑啉化合物、烷氧基蒽化合物、噻噸酮化合物、羧酸化合物等,其中以噻噸酮化合物為佳。 The polymerization initiation aid (D1) may, for example, be an amine compound, a thiazoline compound, an alkoxyfluorene compound, a thioxanthone compound or a carboxylic acid compound. Among them, a thioxanthone compound is preferred.

胺化合物,係可列舉:三乙醇胺、甲基二乙醇胺、三異丙醇胺、4-二甲基胺基苯甲酸甲酯、4-二甲基胺基苯甲酸乙酯、4-二甲基胺基苯甲酸異戊酯、苯甲酸2-二甲基胺基乙酯、4-二甲基胺基苯甲酸2-乙基己酯、N,N-二甲基對甲苯胺、4,4’-雙(二甲基胺基)二苯甲酮(通稱米希勒酮(Michler’s ketone))、4,4’-雙(二乙基胺基)二苯甲酮、4,4’-雙(乙基甲基胺基)二苯甲酮等,其中以4,4’-雙(二乙基胺基)二苯甲酮為佳。亦可使用EAB-F(保土 谷化學工業(股)製)等之市售品。 The amine compound may, for example, be triethanolamine, methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate or 4-dimethyl group. Isoamyl benzoate, 2-dimethylaminoethyl benzoate, 2-ethylhexyl 4-dimethylaminobenzoate, N,N-dimethyl-p-toluidine, 4,4 '-Bis(dimethylamino)benzophenone (commonly known as Michler's ketone), 4,4'-bis(diethylamino)benzophenone, 4,4'-double (Ethylmethylamino)benzophenone or the like, of which 4,4'-bis(diethylamino)benzophenone is preferred. Can also use EAB-F (preservation Commercial products such as the Valley Chemical Industry Co., Ltd.).

噻唑啉化合物,係可列舉式(III-1)~式(III-3)所表示之化合物等。 The thiazoline compound may, for example, be a compound represented by the formula (III-1) to the formula (III-3).

烷氧基蒽化合物,係可列舉:9,10-二甲氧基蒽、2-乙基-9,10-二甲氧基蒽、9,10-二乙氧基蒽、2-乙基-9,10-二乙氧基蒽、9,10-二丁氧基蒽、2-乙基-9,10-二丁氧基蒽等。 The alkoxy oxime compound may, for example, be 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene or 2-ethyl- 9,10-diethoxyanthracene, 9,10-dibutoxyanthracene, 2-ethyl-9,10-dibutoxyanthracene, and the like.

噻噸酮化合物,係可列舉:2-異丙基噻噸酮、4-異丙基噻噸酮、2,4-二乙基噻噸酮、2,4-二氯基噻噸酮、1-氯基-4-丙氧基噻噸酮等。 The thioxanthone compound is exemplified by 2-isopropylthioxanthone, 4-isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, and 1 -Chloro-4-propoxythioxanthone and the like.

羧酸化合物,係可列舉:苯基磺醯基乙酸、甲基苯基磺醯基乙酸、乙基苯基磺醯基乙酸、甲基乙基苯基磺醯基乙酸、二甲基苯基磺醯基乙酸、甲氧基苯基磺醯基乙酸、二甲氧基苯基磺醯基乙酸、氯基苯基磺醯基乙酸、二氯基苯基磺醯基乙酸、N-苯基甘胺酸、苯氧基乙酸、萘基硫乙 酸、N-萘基甘胺酸、萘氧基乙酸等。 Examples of the carboxylic acid compound include phenylsulfonyl acetic acid, methylphenylsulfonyl acetic acid, ethylphenylsulfonyl acetic acid, methyl ethylphenylsulfonyl acetic acid, and dimethylphenylsulfonate. Thioglycolic acid, methoxyphenylsulfonyl acetic acid, dimethoxyphenylsulfonyl acetic acid, chlorophenylsulfonyl acetic acid, dichlorophenylsulfonyl acetic acid, N-phenylglycine Acid, phenoxyacetic acid, naphthylthio Acid, N-naphthylglycine, naphthyloxyacetic acid, and the like.

相對於樹脂(B)及聚合性化合物(C)之合計量100質量份,聚合反應起始劑(D)之含量較佳為0.1~40質量份,更佳為1~30質量份。若聚合反應起始劑(D)之合計量在該範圍內,則可以高感度形成圖型,並有圖型之耐藥品性、機械強度、表面平滑性成為良好的傾向。 The content of the polymerization initiator (D) is preferably from 0.1 to 40 parts by mass, more preferably from 1 to 30 parts by mass, per 100 parts by mass of the total of the resin (B) and the polymerizable compound (C). When the total amount of the polymerization initiator (D) is within this range, the pattern can be formed with high sensitivity, and the chemical resistance, mechanical strength, and surface smoothness of the pattern tend to be good.

於使用聚合起始助劑(D1)的情況,相對於樹脂(B)及聚合性化合物(C)之合計量100質量份,其使用量較佳為0.01~50質量份,更佳為0.1~40質量份。此外,每1莫耳聚合反應起始劑(D),較佳為0.01~10莫耳,更佳為0.01~5莫耳。若聚合起始助劑(D1)之量在該範圍內,則更可以高感度形成圖型,並有圖型之生產性提昇的傾向。 In the case of using the polymerization initiation aid (D1), the amount thereof is preferably from 0.01 to 50 parts by mass, more preferably from 0.1 to 100 parts by mass based on 100 parts by mass of the total of the resin (B) and the polymerizable compound (C). 40 parts by mass. Further, it is preferably 0.01 to 10 moles, more preferably 0.01 to 5 moles per 1 mole of the polymerization initiator (D). When the amount of the polymerization starting aid (D1) is within this range, the pattern can be formed with high sensitivity, and the productivity of the pattern tends to increase.

此外,本發明之著色感光性樹脂組成物,係含有多官能硫醇化合物(E)。該多官能硫醇化合物(E),係分子內具有2個以上之磺醯基的化合物。其中,若使用分子內具有2個以上-CH3SH之化合物,則由於可以高感度形成圖型,故為佳。 Further, the colored photosensitive resin composition of the present invention contains a polyfunctional thiol compound (E). The polyfunctional thiol compound (E) is a compound having two or more sulfonyl groups in the molecule. Among them, when a compound having two or more -CH 3 SH in the molecule is used, it is preferable because the pattern can be formed with high sensitivity.

多官能硫醇化合物(E),係可列舉:己烷二硫醇、癸烷二硫醇、1,4-雙(甲基磺醯基)苯、丁烷二醇雙(3-磺醯基丙酸酯)、丁烷二醇雙(3-磺醯基乙酸酯)、乙二醇雙(3-磺醯基乙酸酯)、三羥甲基丙烷參(3-磺醯基乙酸酯)、丁烷二醇雙(3-磺醯基丙酸酯)、三羥甲基丙烷參(3-磺醯基丙酸酯)、三羥甲基丙烷參(3-磺醯基乙酸 酯)、季戊四醇肆(3-磺醯基丙酸酯)、季戊四醇肆(3-磺醯基乙酸酯)、參羥乙基參(3-磺醯基丙酸酯)、季戊四醇肆(3-磺醯基丁酸酯)、1,4-雙(3-磺醯基丁基氧代)丁烷等,其中以季戊四醇肆(3-磺醯基丙酸酯)為佳。 The polyfunctional thiol compound (E) may, for example, be hexanedithiol, decanedithiol, 1,4-bis(methylsulfonyl)benzene or butanediol bis(3-sulfonyl). Propionate), butanediol bis(3-sulfonyl acetate), ethylene glycol bis(3-sulfonyl acetate), trimethylolpropane ginseng (3-sulfonyl acetic acid) Ester), butanediol bis(3-sulfonylpropionate), trimethylolpropane ginseng (3-sulfonylpropionate), trimethylolpropane ginseng (3-sulfonylacetate) Ester), pentaerythritol bismuth (3-sulfonylpropionate), pentaerythritol bismuth (3-sulfonyl acetate), hydroxyethyl ginseng (3-sulfonylpropionate), pentaerythritol bismuth (3- Sulfohydrylbutyrate), 1,4-bis(3-sulfonylbutyloxy)butane, etc., of which pentaerythritol lanthanum (3-sulfonylpropionate) is preferred.

相對於聚合反應起始劑(D)100質量份,多官能硫醇化合物(E)之含量,較佳為10~150質量份,更佳為30~80質量份。若多官能硫醇化合物(E)之含量在該範圍內中,則有感度提高,且顯像性成為良好的傾向。 The content of the polyfunctional thiol compound (E) is preferably from 10 to 150 parts by mass, more preferably from 30 to 80 parts by mass, per 100 parts by mass of the polymerization initiator (D). When the content of the polyfunctional thiol compound (E) is within this range, the sensitivity is improved and the developability tends to be good.

溶劑(F)並無特別限制,可使用在該領域中所通常使用的溶劑。可從例如:酯溶劑(分子內含有-COO-構造之溶劑)、酯溶劑以外之醚溶劑(分子內含有-O-構造之溶劑)、醚酯溶劑(分子內含有-COO-構造與-O-構造之溶劑)、酯溶劑以外之酮溶劑(分子內含有-CO-構造之溶劑)、醇溶劑、芳香族烴溶劑、醯胺溶劑、二甲基亞碸等之中選擇使用。此等溶劑,係可單獨或將2種以上組合使用。 The solvent (F) is not particularly limited, and a solvent which is usually used in the field can be used. For example, an ester solvent (a solvent containing a -COO-structure in a molecule), an ether solvent other than an ester solvent (a solvent containing a -O-structure in a molecule), an ether ester solvent (a -COO-structure and -O in a molecule) - a solvent of the structure), a ketone solvent other than an ester solvent (a solvent containing a -CO-structure in the molecule), an alcohol solvent, an aromatic hydrocarbon solvent, a guanamine solvent, dimethyl hydrazine, or the like. These solvents may be used alone or in combination of two or more.

酯溶劑,係可列舉:乳酸甲酯、乳酸乙酯、乳酸丁酯、2-羥基異丁酸甲酯、乙酸乙酯、乙酸n-丁酯、乙酸異丁酯、甲酸戊酯、乙酸異戊酯、丙酸丁酯、丁酸異丙酯、丁酸乙酯、丁酸丁酯、戊酸甲酯、戊酸乙酯、戊酸丙酯、乙醯乙酸甲酯、乙醯乙酸乙酯、環己醇乙酸酯、γ-丁內酯等。 Examples of the ester solvent include methyl lactate, ethyl lactate, butyl lactate, methyl 2-hydroxyisobutyrate, ethyl acetate, n-butyl acetate, isobutyl acetate, amyl acetate, and isoamyl acetate. Ester, butyl propionate, isopropyl butyrate, ethyl butyrate, butyl butyrate, methyl valerate, ethyl valerate, propyl valerate, methyl acetate, ethyl acetate Cyclohexanol acetate, γ-butyrolactone, and the like.

醚溶劑,係可列舉:乙二醇單甲基醚、乙二醇單乙基醚、乙二醇單丙基醚、乙二醇單丁基醚、二乙二醇單甲基 醚、二乙二醇單乙基醚、二乙二醇單丁基醚、丙二醇單甲基醚、丙二醇單乙基醚、丙二醇單丙基醚、丙二醇單丁基醚、3-甲氧基-1-丁醇、3-甲氧基-3-甲基丁醇、四氫呋喃、四氫吡喃、1,4-二噁烷、二乙二醇二甲基醚、二乙二醇二乙基醚、二乙二醇甲基乙基醚、二乙二醇二丙基醚、二乙二醇二丁基醚、苯甲醚、苯乙醚、甲基苯甲醚等。 Examples of the ether solvent include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, and diethylene glycol monomethyl. Ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether, 3-methoxy- 1-butanol, 3-methoxy-3-methylbutanol, tetrahydrofuran, tetrahydropyran, 1,4-dioxane, diethylene glycol dimethyl ether, diethylene glycol diethyl ether , diethylene glycol methyl ethyl ether, diethylene glycol dipropyl ether, diethylene glycol dibutyl ether, anisole, phenethyl ether, methyl anisole and the like.

醚酯溶劑,係可列舉:甲氧基乙酸甲酯、甲氧基乙酸乙酯、甲氧基乙酸丁酯、乙氧基乙酸甲酯、乙氧基乙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、2-甲氧基丙酸甲酯、2-甲氧基丙酸乙酯、2-甲氧基丙酸丙酯、2-乙氧基丙酸甲酯、2-乙氧基丙酸乙酯、2-甲氧基-2-甲基丙酸甲酯、2-乙氧基-2-甲基丙酸乙酯、3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基丁基乙酸酯、丙二醇單甲基醚乙酸酯、丙二醇單乙基醚乙酸酯、丙二醇單丙基醚乙酸酯、乙二醇單甲基醚乙酸酯、乙二醇單乙基醚乙酸酯、二乙二醇單乙基醚乙酸酯、二乙二醇單丁基醚乙酸酯等。 The ether ester solvent may, for example, be methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate or 3-methoxypropionic acid. Methyl ester, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, methyl 2-methoxypropionate, 2-methoxypropionic acid Ethyl ester, propyl 2-methoxypropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate, methyl 2-methoxy-2-methylpropionate, 2- Ethyl ethoxy-2-methylpropionate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, propylene glycol monomethyl ether acetate, propylene glycol Monoethyl ether acetate, propylene glycol monopropyl ether acetate, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monoethyl ether acetate , diethylene glycol monobutyl ether acetate, and the like.

酮溶劑,係可列舉:4-羥基-4-甲基-2-戊酮、丙酮、2-丁酮、2-庚酮、3-庚酮、4-庚酮、4-甲基-2-戊酮、環戊酮、環己酮、異佛酮等。 The ketone solvent may, for example, be 4-hydroxy-4-methyl-2-pentanone, acetone, 2-butanone, 2-heptanone, 3-heptanone, 4-heptanone or 4-methyl-2- Pentanone, cyclopentanone, cyclohexanone, isophorone, and the like.

醇溶劑,係可列舉:甲醇、乙醇、丙醇、丁醇、己醇、環己醇、乙二醇、丙二醇、丙三醇等。 Examples of the alcohol solvent include methanol, ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, propylene glycol, and glycerin.

芳香族烴溶劑,係可列舉:苯、甲苯、二甲苯、1,3,5-三甲苯等。 Examples of the aromatic hydrocarbon solvent include benzene, toluene, xylene, and 1,3,5-trimethylbenzene.

醯胺溶劑,係可列舉:N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、N-甲基吡咯啶酮等。 The guanamine solvent may, for example, be N,N-dimethylformamide, N,N-dimethylacetamide or N-methylpyrrolidone.

上述之溶劑當中,就塗佈性、乾燥性的觀點而言,以於1atm之沸點為120℃以上180℃以下之有機溶劑為佳。其中,以丙二醇單甲基醚、丙二醇單甲基醚乙酸酯等為佳。 Among the above-mentioned solvents, from the viewpoint of coatability and drying property, an organic solvent having a boiling point of 1 atm of 120 ° C to 180 ° C is preferred. Among them, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, and the like are preferred.

溶劑(F)之含量,係相對於著色感光性樹脂組成物,較佳為60~95質量%,更佳為70~90質量%。換言之,著色感光性樹脂組成物之固體成分,較佳為5~40質量%,更佳為10~30質量%。若溶劑(F)之含量在前述之範圍內,則會有塗佈時之平坦性成為良好的傾向。 The content of the solvent (F) is preferably 60 to 95% by mass, and more preferably 70 to 90% by mass based on the coloring photosensitive resin composition. In other words, the solid content of the colored photosensitive resin composition is preferably from 5 to 40% by mass, more preferably from 10 to 30% by mass. When the content of the solvent (F) is within the above range, the flatness at the time of coating tends to be good.

本發明之著色感光性樹脂組成物,係以含有界面活性劑(G)者為佳。界面活性劑,係可列舉例如:聚矽氧系界面活性劑、氟系界面活性劑、具有氟原子之聚矽氧系界面活性劑等。藉由含有界面活性劑,而有塗佈時之平坦性成為良好的傾向。 The colored photosensitive resin composition of the present invention is preferably one containing a surfactant (G). Examples of the surfactant include a polyfluorene-based surfactant, a fluorine-based surfactant, and a polyfluorene-based surfactant having a fluorine atom. When the surfactant is contained, the flatness at the time of coating tends to be good.

聚矽氧系界面活性劑,係可列舉:具有矽氧烷鍵之界面活性劑。 The polyoxo-based surfactant may be a surfactant having a decane bond.

具體而言,係可列舉:托徠(Toray)聚矽氧DC3PA、同SH7PA、同DC11PA、同SH21PA、同SH28PA、同SH29PA、同SH30PA、聚醚改質聚矽酮油SH8400(商品名:Dow Corning Toray Co.,Ltd.製)、KP321、KP322、KP323、KP324、KP326、KP340、KP341(信越化學工業(股)製)、TSF400、TSF401、TSF410、TSF4300、 TSF4440、TSF4445、TSF-4446、TSF4452、TSF4460(Momentive Performance Materials Japan聯合公司製)等。 Specifically, it can be exemplified by Toray polyoxane DC3PA, same SH7PA, same DC11PA, same SH21PA, same SH28PA, same SH29PA, same SH30PA, polyether modified polyketone oil SH8400 (trade name: Dow Corning Toray Co., Ltd.), KP321, KP322, KP323, KP324, KP326, KP340, KP341 (Shin-Etsu Chemical Co., Ltd.), TSF400, TSF401, TSF410, TSF4300, TSF4440, TSF4445, TSF-4446, TSF4452, TSF4460 (manufactured by Momentive Performance Materials Japan Co., Ltd.), and the like.

氟系界面活性劑係可列舉:具有氟碳鏈之界面活性劑。 The fluorine-based surfactant may be a surfactant having a fluorocarbon chain.

具體而言,係可列舉:FLUORINERT(註冊商標)FC430、同FC431(住友3M(股)製)、MEGAFACE(註冊商標)F142D、同F171、同F172、同F173、同F177、同F183、同R30(DIC(股)製)、F-Top(註冊商標)EF301、同EF303、同EF351、同EF352(三菱金屬電子化成(股)製)、SURFLON(註冊商標)S381、同S382、同SC101、同SC105(旭硝子(股)製)、E5844((股)大金精密化學研究所製)等。 Specifically, FLUORINERT (registered trademark) FC430, FC431 (Sumitomo 3M (share) system), MEGAFACE (registered trademark) F142D, F171, F172, F173, F177, F183, and R30 (DIC (share) system), F-Top (registered trademark) EF301, EF303, EF351, EF352 (Mitsubishi Metal Electronics Co., Ltd.), SURFLON (registered trademark) S381, same as S382, same as SC101, same SC105 (Asahi Glass Co., Ltd.), E5844 (manufactured by Daikin Institute of Precision Chemistry, etc.).

具有氟原子之聚矽氧系界面活性劑係可列舉:具有矽氧烷鍵及氟碳鏈之界面活性劑。具體而言,係可列舉:MEGAFACE(註冊商標)R08、同BL20、同F475、同F477、同F443(DIC(股)製)等。較佳為可列舉:MEGAFACE(註冊商標)F475。 The polyoxo-based surfactant having a fluorine atom may be a surfactant having a siloxane chain and a fluorocarbon chain. Specific examples include MEGAFACE (registered trademark) R08, BL30, F475, F477, and F443 (DIC). Preferably, MEGAFACE (registered trademark) F475 is mentioned.

相對於著色感光性樹脂組成物,界面活性劑(G)係0.001質量%以上0.2質量%以下,較佳為0.002質量%以上0.1質量%以下,更佳為0.01質量%以上0.05質量%以下。可藉由含有該範圍之界面活性劑,而使塗膜之平坦性良好。 The surfactant (G) is 0.001% by mass or more and 0.2% by mass or less, preferably 0.002% by mass or more and 0.1% by mass or less, more preferably 0.01% by mass or more and 0.05% by mass or less, based on the coloring photosensitive resin composition. The flatness of the coating film can be improved by including the surfactant in this range.

本發明之著色感光性樹脂組成物,係亦可視需要而含 有:填充劑、其他的高分子化合物、密著促進劑、抗氧化劑、紫外線吸收劑、光安定劑、鏈轉移劑等之種種添加劑。 The colored photosensitive resin composition of the present invention may also be included as needed There are various additives such as a filler, other polymer compound, adhesion promoter, antioxidant, ultraviolet absorber, light stabilizer, and chain transfer agent.

本發明之著色感光性樹脂組成物,係可例如以下的方式進行調製。 The colored photosensitive resin composition of the present invention can be prepared, for example, in the following manner.

首先,預先將著色劑(A)的顏料與溶劑(E)混合,並使用珠磨機使顏料的平均粒徑分散至成為0.2μm以下程度為止。此時,亦可視需要調配顏料分散劑、樹脂(B)的一部分或全部。於所得之顏料分散液中,可視需要使用除樹脂(B)的殘餘、聚合性化合物(C)及聚合反應起始劑(D)以外之其他的成分,進一步依據所需而添加追加的溶劑,以成為特定的濃度,而得到目的之著色感光性樹脂組成物。 First, the pigment of the colorant (A) is mixed with the solvent (E) in advance, and the average particle diameter of the pigment is dispersed to a level of 0.2 μm or less using a bead mill. At this time, a part or all of the pigment dispersant and the resin (B) may be blended as needed. In the obtained pigment dispersion liquid, a component other than the resin (B), the polymerizable compound (C), and the polymerization initiator (D) may be used as needed, and an additional solvent may be further added depending on the necessity. The desired coloring photosensitive resin composition is obtained at a specific concentration.

得到圖型的方法,係可列舉:光微影成像法、噴墨法、印刷法等。其中,以光微影成像法為佳。光微影成像法,係藉由將前述著色感光性樹脂組成物塗佈於基板上,乾燥後經由光遮罩而曝光、顯像,而得到圖型的方法。 Examples of the method for obtaining the pattern include a photolithography method, an inkjet method, a printing method, and the like. Among them, photolithography is preferred. The photolithography method is a method in which the coloring photosensitive resin composition is applied onto a substrate, dried, and exposed and developed through a light mask to obtain a pattern.

前述基板,係可列舉例如:玻璃、金屬、塑膠等,可為板狀,亦可為薄膜狀。 Examples of the substrate include glass, metal, plastic, and the like, and may be in the form of a plate or a film.

塑膠,係可列舉例如:聚乙烯、聚丙烯、原冰片烯系聚合物等之聚烯烴、聚乙烯醇、聚對苯二甲酸乙二酯、聚萘二甲酸乙二酯、聚(甲基)丙烯酸酯、纖維素酯、聚碳酸酯、聚碸、聚醚碸、聚醚酮、聚苯硫醚、聚苯醚等。在此,(甲基)丙烯酸,係指至少1種由丙烯酸及甲基丙烯 酸所成之群中所選出者。於此等之基板上,亦可形成有彩色濾光片、各種絕緣或導電膜、驅動電路等之結構體。 Examples of the plastics include polyolefins such as polyethylene, polypropylene, and borneol-based polymers, polyvinyl alcohol, polyethylene terephthalate, polyethylene naphthalate, and poly(methyl). Acrylate, cellulose ester, polycarbonate, polyfluorene, polyether oxime, polyether ketone, polyphenylene sulfide, polyphenylene ether and the like. Here, (meth)acrylic acid means at least one kind derived from acrylic acid and methacrylic acid. The selected one of the group of acids. A structure such as a color filter, various insulating or conductive films, and a driving circuit may be formed on the substrate.

根據本發明之著色感光性樹脂組成物,由於可形成以更低溫硬化的圖型,因此在將圖型形成於塑膠基板時特別有用。 According to the colored photosensitive resin composition of the present invention, since the pattern can be formed to be cured at a lower temperature, it is particularly useful when the pattern is formed on a plastic substrate.

對基板之塗佈方法,係可列舉例如:擠壓塗佈法、直接凹版塗佈法(Direct gravure coating)、逆轉凹版塗佈法(Reverse gravure coating)、CAP塗佈法、模具塗佈法等。此外,亦可使用含浸塗佈機、輥式塗佈機、刮棒塗佈機、旋轉塗佈機、縫隙&旋轉塗佈機、縫隙塗佈機(也稱為模具塗佈機、淋幕式塗佈機、狹縫式精密塗佈機)、噴墨等之塗佈裝置進行塗佈。其中,以使用縫隙塗佈機、旋轉塗佈機、輥式塗佈機等進行塗佈者為佳。 Examples of the method of applying the substrate include an extrusion coating method, a direct gravure coating method, a reverse gravure coating method, a CAP coating method, a die coating method, and the like. . In addition, an impregnation coater, a roll coater, a bar coater, a spin coater, a slit & spin coater, a slit coater (also referred to as a die coater, a shower curtain) may also be used. A coating device such as a coater or a slit precision coater or an inkjet is applied. Among them, it is preferred to apply it by using a slit coater, a spin coater, a roll coater or the like.

塗佈於基板之膜的乾燥方法,係可列舉例如:加熱乾燥、自然乾燥、通風乾燥、減壓乾燥等之方法。亦可組合複數種方法來進行。 The drying method of the film applied to the substrate includes, for example, heat drying, natural drying, air drying, and vacuum drying. A plurality of methods can also be combined.

乾燥溫度,係以10~120℃為佳,以25~100℃為更佳。此外,加熱時間,係以10秒~60分鐘者為佳,以30秒~30分鐘者為更佳。 The drying temperature is preferably from 10 to 120 ° C, more preferably from 25 to 100 ° C. In addition, the heating time is preferably from 10 seconds to 60 minutes, and more preferably from 30 seconds to 30 minutes.

減壓乾燥,係以在50~150Pa之壓力下,20~25℃之溫度範圍內進行者為佳。 Drying under reduced pressure is preferably carried out at a temperature of 50 to 150 ° C and a temperature range of 20 to 25 ° C.

乾燥後之塗佈膜的厚度,並無特別限定,但可依據所使用之材料、用途等而適當調整,例如0.1~20μm,較佳為1~6μm。 The thickness of the coating film after drying is not particularly limited, and may be appropriately adjusted depending on the material to be used, the use, and the like, and is, for example, 0.1 to 20 μm, preferably 1 to 6 μm.

乾燥後之塗佈膜,係經由為形成目的之圖型的光遮罩而曝光。此時之光遮罩上的圖型形狀並無特別限定,可使用視成為目的之用途的圖型形狀。 The coated film after drying is exposed through a light mask for forming a pattern of interest. The shape of the pattern on the light mask at this time is not particularly limited, and a pattern shape that is intended for the purpose can be used.

曝光所使用的光源,係以產生250~450nm的波長之光的光源為佳。例如:可對未達350nm的光,使用用以切取該波長區域的濾波器來切取,或對436nm附近、408nm附近、365nm附近之光,使用用以取出該等波長區域的通帶濾波器來取出。具體而言,可列舉:水銀燈、發光二極體、金屬鹵素燈、鹵素燈等。 The light source used for the exposure is preferably a light source that generates light having a wavelength of 250 to 450 nm. For example, a light that is not up to 350 nm can be cut using a filter for cutting out the wavelength region, or a light band filter for extracting the wavelength regions can be used for light near 436 nm, near 408 nm, and near 365 nm. take out. Specifically, a mercury lamp, a light emitting diode, a metal halide lamp, a halogen lamp, etc. are mentioned.

為了可使平行光線均勻地照射到曝光面整體,或進行遮罩與基材之正確的對位,以使用光罩對準曝光機、步進器等之裝置者為佳。 In order to uniformly irradiate the parallel light to the entire exposed surface, or to perform the correct alignment of the mask and the substrate, it is preferable to use a mask to align the exposure machine, the stepper, or the like.

可藉由使曝光後之塗佈膜接觸顯像液,而使特定部分,例如未曝光部溶解、顯像,而得到圖型。顯像液,雖也可使用有機溶劑,但塗佈膜之顯像部難以因顯像液而溶解或膨潤,且為了得到良好的形狀之圖型,因此以使用鹼性化合物之水溶液者為佳。 A pattern can be obtained by causing a coating film after exposure to contact a developing liquid to dissolve and develop a specific portion, for example, an unexposed portion. In the developing solution, an organic solvent may be used. However, the developing portion of the coating film is hardly dissolved or swollen by the developing solution, and in order to obtain a pattern having a good shape, it is preferable to use an aqueous solution of a basic compound. .

顯像方法,亦可為盛液法、浸漬法、噴灑法等之任何一種。再者,顯像時亦可使基板傾斜成任意角度。 The developing method may be any one of a liquid filling method, a dipping method, a spraying method, and the like. Furthermore, the substrate can be tilted at any angle during development.

顯像後,係以進行水洗者為佳。 After the development, it is better to wash the water.

前述鹼性化合物,係可列舉:氫氧化鈉、氫氧化鉀、磷酸氫二鈉、磷酸二氫鈉、磷酸氫二銨、磷酸二氫銨、磷酸二氫鉀、矽酸鈉、矽酸鉀、碳酸鈉、碳酸鉀、碳酸氫鈉、碳酸氫鉀、硼酸鈉、硼酸鉀、氨等之無機鹼性化合物; 氫氧化四甲基銨、氫氧化2-羥乙基三甲基銨、單甲基胺、二甲基胺、三甲基胺、單乙基胺、二乙基胺、三乙基胺、單異丙基胺、二異丙基胺、乙醇胺等之有機鹼性化合物。其中,以氫氧化鉀、碳酸鈉及氫氧化四甲基銨為佳。 Examples of the basic compound include sodium hydroxide, potassium hydroxide, disodium hydrogen phosphate, sodium dihydrogen phosphate, diammonium hydrogen phosphate, ammonium dihydrogen phosphate, potassium dihydrogen phosphate, sodium citrate, potassium citrate, and the like. An inorganic basic compound of sodium carbonate, potassium carbonate, sodium hydrogencarbonate, potassium hydrogencarbonate, sodium borate, potassium borate, ammonia, or the like; Tetramethylammonium hydroxide, 2-hydroxyethyltrimethylammonium hydroxide, monomethylamine, dimethylamine, trimethylamine, monoethylamine, diethylamine, triethylamine, single An organic basic compound such as isopropylamine, diisopropylamine or ethanolamine. Among them, potassium hydroxide, sodium carbonate and tetramethylammonium hydroxide are preferred.

此等無機及有機鹼性化合物之水溶液中的濃度,較佳為0.01~10質量%,更佳為0.03~5質量%。 The concentration in the aqueous solution of the inorganic and organic basic compounds is preferably from 0.01 to 10% by mass, more preferably from 0.03 to 5% by mass.

前述鹼性化合物之水溶液,亦可含有界面活性劑。 The aqueous solution of the above basic compound may also contain a surfactant.

界面活性劑,係可列舉:聚氧乙烯烷基醚、聚氧乙烯芳基醚、聚氧乙烯烷基芳基醚、其他之聚氧乙烯衍生物、氧乙烯/氧丙烯嵌段聚合物、山梨醇脂肪酸酯、聚氧乙烯山梨醇脂肪酸酯、聚氧乙烯山梨糖醇脂肪酸酯、丙三醇脂肪酸酯、聚氧乙烯脂肪酸酯、聚氧乙烯烷基胺等之非離子系界面活性劑;月桂醇硫酸酯鈉、油醇硫酸酯鈉、月桂基硫酸鈉、月桂基硫酸銨、十二烷基苯磺酸鈉、十二烷基萘磺酸鈉等之陰離子系界面活性劑;硬脂基胺鹽酸鹽、月桂基三甲基銨氯化物等之陽離子系界面活性劑等。 Examples of the surfactants include polyoxyethylene alkyl ethers, polyoxyethylene aryl ethers, polyoxyethylene alkyl aryl ethers, other polyoxyethylene derivatives, oxyethylene/oxypropylene block polymers, and sorbents. Nonionic interface of alcohol fatty acid ester, polyoxyethylene sorbitan fatty acid ester, polyoxyethylene sorbitan fatty acid ester, glycerol fatty acid ester, polyoxyethylene fatty acid ester, polyoxyethylene alkylamine, etc. An active surfactant; an anionic surfactant such as sodium lauryl sulfate, sodium oleyl sulfate, sodium lauryl sulfate, ammonium lauryl sulfate, sodium dodecylbenzenesulfonate or sodium dodecyl naphthalenesulfonate; A cationic surfactant such as stearylamine hydrochloride or lauryl trimethylammonium chloride.

鹼性化合物之水溶液中的界面活性劑之濃度,較佳為0.01~10質量%,更佳為0.05~8質量%,特別佳為0.1~5質量%。 The concentration of the surfactant in the aqueous solution of the basic compound is preferably 0.01 to 10% by mass, more preferably 0.05 to 8% by mass, particularly preferably 0.1 to 5% by mass.

可藉由進一步烘烤上述所得之圖型,而得到已硬化的圖型。烘烤溫度,係25℃以上230℃以下,較佳為25℃以上200℃以下,更佳為25℃以上160℃以下,再更佳為 25℃以上120℃以下。烘烤時間,係1~300分鐘,較佳為1~180分鐘,更佳為1~60分鐘。 The hardened pattern can be obtained by further baking the pattern obtained above. The baking temperature is 25 ° C or more and 230 ° C or less, preferably 25 ° C or more and 200 ° C or less, more preferably 25 ° C or more and 160 ° C or less, and even more preferably 25 ° C or more and 120 ° C or less. The baking time is 1 to 300 minutes, preferably 1 to 180 minutes, more preferably 1 to 60 minutes.

可由本發明之著色感光性組成物得到圖型及彩色濾光片。此等圖型或彩色濾光片,係可以眾所周知的態樣,並於與具備圖型或彩色濾光片作為構成零件的一部分之顯示裝置,例如:眾所周知的液晶顯示裝置、有機EL裝置、固體成像元件、電子紙等之各種的著色圖像相關連之機器中加以利用。 A pattern and a color filter can be obtained from the colored photosensitive composition of the present invention. These patterns or color filters are well-known aspects, and display devices having a pattern or a color filter as a part of a component, such as a well-known liquid crystal display device, an organic EL device, and a solid. It is used in a machine in which various color images of an imaging element, electronic paper, and the like are associated.

實施例 Example

以下,藉由實施例更詳細地說明本發明。例中之「%」及「份」,在無特別表記的情況下為質量%及質量份。 Hereinafter, the present invention will be described in more detail by way of examples. In the example, "%" and "parts" are % by mass and parts by mass unless otherwise stated.

<樹脂溶液B1之合成> <Synthesis of Resin Solution B1> 合成例1 Synthesis Example 1

於具備有攪拌機、溫度計、回流冷卻管、滴下漏斗及氮導入管之燒瓶中,導入133g之丙二醇單甲基醚乙酸酯,並在使燒瓶內氛圍從空氣置換為氮後,昇溫至100℃後,將在由96.0g(0.55莫耳)之苄基甲基丙烯酸酯、17.6g(0.21莫耳)之甲基丙烯酸、22.0g(0.10莫耳)之二環戊二烷基甲基丙烯酸酯(日立化成(股)製FA-513M)及133g之丙二醇單甲基醚乙酸酯所構成之混合物中添加有3.6g之偶氮二異丁腈的溶液,耗費2小時從滴下漏斗滴入 燒瓶中,進一步在100℃下持續攪拌5小時。接著,使燒瓶內氛圍從氮置換為空氣,將21.3g[0.15莫耳]之縮水甘油基甲基丙烯酸酯、0.9g之參二甲苯胺基甲酚及0.145g之對苯二酚投入燒瓶中,在110℃下持續反應6小時,得到固體成分37.6%、酸價為67.7mgKOH/g(固體成分換算)之樹脂溶液B1。經GPC測量出之聚苯乙烯換算的重量平均分子量為9,500。 In a flask equipped with a stirrer, a thermometer, a reflux cooling tube, a dropping funnel, and a nitrogen introduction tube, 133 g of propylene glycol monomethyl ether acetate was introduced, and after the atmosphere in the flask was replaced with nitrogen by air, the temperature was raised to 100 ° C. Thereafter, it will consist in 96.0 g (0.55 mol) of benzyl methacrylate, 17.6 g (0.21 mol) of methacrylic acid, 22.0 g (0.10 mol) of dicyclopentadienyl methacrylate. 3.6 g of azobisisobutyronitrile was added to a mixture of 133 g of propylene glycol monomethyl ether acetate (Hitachi Chemical Co., Ltd.) and 133 g of propylene glycol monomethyl ether acetate. It took 2 hours to drip from the dropping funnel. The flask was further stirred at 100 ° C for 5 hours. Next, the atmosphere in the flask was replaced with nitrogen from air, and 21.3 g [0.15 mol] of glycidyl methacrylate, 0.9 g of dimethylglycolamino cresol, and 0.145 g of hydroquinone were placed in the flask. The reaction was continued at 110 ° C for 6 hours to obtain a resin solution B1 having a solid content of 37.6% and an acid value of 67.7 mgKOH/g (in terms of solid content). The polystyrene-equivalent weight average molecular weight measured by GPC was 9,500.

<樹脂溶液B2之合成> <Synthesis of Resin Solution B2> 合成例2 Synthesis Example 2

於具備有攪拌機、溫度計、回流冷卻管、滴下漏斗及氮導入管之燒瓶中,導入161g之丙二醇單甲基醚乙酸酯,並在使燒瓶內氛圍從空氣置換為氮後,昇溫至100℃後,將在由66.1g(0.38莫耳)之苄基甲基丙烯酸酯、45.2g(0.23莫耳)之甲基丙烯酸、22.0g(0.10莫耳)之二環戊二烷基甲基丙烯酸酯(日立化成(股)製FA-513M)及133g之丙二醇單甲基醚乙酸酯所構成之混合物中添加有3.6g之偶氮二異丁腈的溶液,耗費2小時從滴下漏斗滴入燒瓶中,進一步在100℃下持續攪拌5小時。接著,使燒瓶內氛圍從氮置換為空氣,將42.6g[0.30莫耳]之縮水甘油基甲基丙烯酸酯、0.9g之參二甲苯胺基甲酚及0.145g之對苯二酚投入燒瓶中,在110℃下持續反應6小時,得到固體成分37.4%、酸價為71.8mgKOH/g(固體成分換算)之樹脂溶液B2。經GPC測量出之聚苯乙烯換算的重 量平均分子量為8,500。 In a flask equipped with a stirrer, a thermometer, a reflux cooling tube, a dropping funnel, and a nitrogen introduction tube, 161 g of propylene glycol monomethyl ether acetate was introduced, and the atmosphere in the flask was replaced with nitrogen from air, and then the temperature was raised to 100 ° C. Thereafter, it will be in 66.1 g (0.38 mol) of benzyl methacrylate, 45.2 g (0.23 mol) of methacrylic acid, 22.0 g (0.10 mol) of dicyclopentadienyl methacrylate. 3.6 g of azobisisobutyronitrile was added to a mixture of propylene glycol monomethyl ether acetate (Hitachi Chemical Co., Ltd.) and 133 g of propylene glycol monomethyl ether acetate. It took 2 hours to drip into the flask from the dropping funnel. Further, stirring was further continued at 100 ° C for 5 hours. Next, the atmosphere in the flask was replaced with nitrogen from air, and 42.6 g of [0.30 mol] glycidyl methacrylate, 0.9 g of dimethylglycine cresol, and 0.145 g of hydroquinone were placed in the flask. The reaction was continued at 110 ° C for 6 hours to obtain a resin solution B2 having a solid content of 37.4% and an acid value of 71.8 mgKOH/g (in terms of solid content). Polystyrene-converted weight measured by GPC The amount average molecular weight was 8,500.

實施例1~5 Example 1~5

表1記載之各成分當中,預先將顏料及顏料分散劑總量與作為溶劑之丙二醇單甲基醚乙酸酯作混合。此時,以使顏料及顏料分散劑之合計量相對於混合物成為20質量%的方式混合丙二醇單甲基醚乙酸酯。使用球磨機,使混合物中之顏料充分分散,且將含有丙二醇單甲基醚乙酸酯之殘量的殘餘之成分加入其中,進一步混合前述之混合物,而得到感光性樹脂組成物。 Among the components described in Table 1, the total amount of the pigment and the pigment dispersant was previously mixed with propylene glycol monomethyl ether acetate as a solvent. In this case, propylene glycol monomethyl ether acetate was mixed so that the total amount of the pigment and the pigment dispersant was 20% by mass based on the mixture. The pigment in the mixture was sufficiently dispersed using a ball mill, and the residual component containing the residual amount of propylene glycol monomethyl ether acetate was added thereto, and the above mixture was further mixed to obtain a photosensitive resin composition.

比較例1 Comparative example 1

除將實施例1中樹脂B1變更成樹脂B3(苄基甲基丙烯酸酯/甲基丙烯酸共聚物(質量組成比80/20、聚苯乙烯換算重量平均分子量35,000))之外,與實施例1進行相同的操作。 Except that the resin B1 in Example 1 was changed to the resin B3 (benzyl methacrylate/methacrylic acid copolymer (mass composition ratio 80/20, polystyrene equivalent weight average molecular weight 35,000)), and Example 1 Do the same.

A1:C.I. 色素綠色 36 A1: C.I. Pigment Green 36

A2:C.I. 色素黃色 150 A2: C.I. Pigment yellow 150

A3:C.I. 色素綠色 58 A3: C.I. Pigment Green 58

A4:C.I. 色素黃色 138 A4: C.I. Pigment yellow 138

A5:C.I. 色素紅色 177 A5: C.I. Pigment Red 177

A6:C.I. 色素紅色 254 A6: C.I. Pigment Red 254

A7:C.I. 色素藍色 15:6 A7: C.I. Pigment Blue 15:6

A8:C.I. 色素紫色 23 A8: C.I. Pigment purple 23

B3:苄基甲基丙烯酸酯/甲基丙烯酸共聚物(質量組成比80/20、聚苯乙烯換算重量平均分子量35,000) B3: benzyl methacrylate/methacrylic acid copolymer (mass composition ratio 80/20, polystyrene-equivalent weight average molecular weight 35,000)

C1:二季戊四醇六丙烯酸酯(KAYARAD DPHA;日本化藥(股)製) C1: dipentaerythritol hexaacrylate (KAYARAD DPHA; manufactured by Nippon Kayaku Co., Ltd.)

D1:2-苄基-2-二甲基胺基-(4-嗎啉基苯基)-丁烷-1-酮(IRGACURE 369;BASF日本公司製) D1: 2-benzyl-2-dimethylamino-(4-morpholinylphenyl)-butan-1-one (IRGACURE 369; manufactured by BASF Japan)

D2:4,4’-雙(二乙基胺基)-二苯甲酮(EAB-F;保土谷化學(股)製) D2: 4,4'-bis(diethylamino)-benzophenone (EAB-F; manufactured by Hodogaya Chemical Co., Ltd.)

D3:N-苯甲醯基氧基-1-(4-苯基磺醯基苯基)辛烷-1-酮-2-亞胺(OXE-01;BASF日本公司製) D3: N-benzylideneoxy-1-(4-phenylsulfonylphenyl)octane-1-one-2-imine (OXE-01; manufactured by BASF Japan)

D4:雙(2,4,6-三甲基苯甲醯基)苯基膦氧化物(Irgacure819;BASF.日本公司製) D4: bis(2,4,6-trimethylbenzylidene)phenylphosphine oxide (Irgacure 819; manufactured by BASF. Japan)

D5:2-甲基-2-嗎啉基(4-甲基醯基苯基)-丙烷-1-酮(Irgacure907;BASF.日本公司製) D5: 2-methyl-2-morpholinyl (4-methyldecylphenyl)-propan-1-one (Irgacure 907; manufactured by BASF. Japan)

D6:二乙基噻噸酮(KAYACURE DETX;日本化藥(股)製) D6: diethyl thioxanthone (KAYACURE DETX; manufactured by Nippon Kayaku Co., Ltd.)

E1:季戊四醇肆(3-磺醯基丙酸酯)(PEMP;SC有機化學(股)製) E1: pentaerythritol bismuth (3-sulfonyl propionate) (PEMP; SC organic chemistry (stock) system)

F1:丙二醇單甲基醚乙酸酯 F1: propylene glycol monomethyl ether acetate

F2:3-乙氧基丙酸乙酯 F2: ethyl 3-ethoxypropionate

G1:顏料分散劑(聚酯系) G1: pigment dispersant (polyester)

G2:顏料分散劑(丙烯酸系) G2: pigment dispersant (acrylic)

G3:SUMI-EPOXY ESCN-195XL G3: SUMI-EPOXY ESCN-195XL

G4:界面活性劑:聚醚改質聚矽酮油 G4: surfactant: polyether modified polyketone oil

(Toray SILICONESH8400;Dow Corning Toray Co.,Ltd.製) (Toray SILICONESH8400; manufactured by Dow Corning Toray Co., Ltd.)

<耐溶劑性評估> <Solvent resistance evaluation>

藉由旋轉塗佈法,將著色感光性組成物1~6塗佈在貼合有PET薄膜(Toray製LUMILER 75-T60)於2英吋四方的玻璃板上的基板上,並在加熱板上、以80℃預烘烤2分鐘。 The colored photosensitive compositions 1 to 6 were applied onto a substrate of a PET film (LUMILER 75-T60 manufactured by Toray) on a glass plate of 2 inches square by a spin coating method, and on a hot plate. Prebaking at 80 ° C for 2 minutes.

放冷後,使用曝光機(TME-150RSK;TOPCON(股)製),在大氣氛圍下,以150mJ/cm2之曝光量(365nm基準)進行光照射。光照射後,於含有0.12%之非離子系界面活性劑與0.04%之氫氧化鉀的水系顯像液中,以23℃浸漬50秒而顯像,以白度(whiteness)洗淨之後,以60℃加熱5分鐘,而形成著色圖型。所得之圖型的膜厚,係使用膜厚測量裝置(DEKTAK3;日本真空技術(股)製)測量為2μm。 After the cooling, the exposure was carried out using an exposure machine (TME-150RSK; TOPCON) to expose the light to an exposure amount of 150 mJ/cm 2 (365 nm basis) in an air atmosphere. After light irradiation, it was immersed in an aqueous developing solution containing 0.12% of a nonionic surfactant and 0.04% of potassium hydroxide at 23 ° C for 50 seconds, and after washing with whiteness, Heating at 60 ° C for 5 minutes to form a color pattern. The film thickness of the obtained pattern was measured to be 2 μm using a film thickness measuring device (DEKTAK3; manufactured by Nippon Vacuum Technology Co., Ltd.).

色度,係使用顯微分光測光裝置(OSP-SP200 OLYMPUS公司製)所測得之值。另外,色度測量之光源 係使用C光源。 The chromaticity is a value measured using a microscopic spectrophotometer (manufactured by OSP-SP200 OLYMPUS). In addition, the source of color measurement A C light source is used.

將丙二醇單甲基醚乙酸酯滴下1ml至測量後之塗膜上,在槳式攪拌器靜置30s後,以1000rpm之旋轉數甩動10s。 1 ml of propylene glycol monomethyl ether acetate was dropped onto the measured coating film, and after standing for 30 s in a paddle stirrer, it was shaken for 10 s at a rotation number of 1000 rpm.

然後,以與前述記載相同的方法測量出膜厚與色度。以下述記載的式子,計算出丙二醇單甲基醚乙酸酯接觸測量前後的膜厚變化率。 Then, the film thickness and the chromaticity were measured in the same manner as described above. The film thickness change rate before and after the contact measurement of propylene glycol monomethyl ether acetate was calculated by the following formula.

膜厚保持率(%)=接觸後之膜厚/接觸前之膜厚×100 Film thickness retention ratio (%) = film thickness after contact / film thickness before contact × 100

此外,根據JIS Z 8730及丙二醇單甲基醚乙酸酯接觸測量前後之色度,計算出色差。 Further, the excellent difference was calculated based on the chromaticity before and after the measurement of JIS Z 8730 and propylene glycol monomethyl ether acetate.

當膜厚保持率越高,且色差越小,耐溶劑性越為良好,而形成彩色濾光片時,可防止混色。 When the film thickness retention ratio is higher and the chromatic aberration is smaller, the solvent resistance is better, and when a color filter is formed, color mixing can be prevented.

<解像度評估> <Resolution Evaluation>

以雷射顯微鏡(Axio Imager MAT Carl Zeiss公司製)觀察先前所形成之圖型,將解像之最小尺寸設為解像度。解像度係可形成越微細的圖型,加工性越優異。 The previously formed pattern was observed with a laser microscope (manufactured by Axio Imager MAT Carl Zeiss Co., Ltd.), and the minimum size of the solution was set as the resolution. The resolution is such that a finer pattern can be formed, and the workability is more excellent.

產業上之可利用性 Industrial availability

依據本發明之著色感光性樹脂組成物,係可得到具有優異的解像性及耐久性之圖型。 According to the colored photosensitive resin composition of the present invention, a pattern having excellent resolution and durability can be obtained.

Claims (6)

一種著色感光性樹脂組成物,其係含有(A)、(B)、(C)、(D)、(E)及(F)與噻噸酮化合物、與醯基膦氧化物化合物或烷基苯酮化合物:(A)著色劑;(B)使下述(a)與(b)共聚合所得之共聚物與(c)產生反應而得之樹脂;(a):由不飽和羧酸及不飽和羧酸酐所成之群中所選出的至少1種(b):具有可與(a)共聚合之不飽和鍵,且與(a)不同的單體(c):具有碳數2~4之環狀醚骨架及乙烯性不飽和鍵的單體(C)聚合性化合物;(D)係肟化合物之聚合反應起始劑;(E)多官能硫醇化合物;(F)溶劑。 A colored photosensitive resin composition comprising (A), (B), (C), (D), (E) and (F) with a thioxanthone compound, a mercaptophosphine oxide compound or an alkyl group a benzophenone compound: (A) a colorant; (B) a copolymer obtained by copolymerizing the following (a) and (b) with (c) a resin obtained by reacting; (a): an unsaturated carboxylic acid and At least one selected from the group consisting of unsaturated carboxylic anhydrides (b): a monomer having an unsaturated bond copolymerizable with (a) and different from (a): having a carbon number of 2~ a cyclic ether skeleton and an ethylenically unsaturated bond monomer (C) polymerizable compound; (D) a ruthenium compound polymerization initiator; (E) a polyfunctional thiol compound; (F) a solvent. 如申請專利範圍第1項所記載之著色感光性樹脂組成物,其中(b)係包含具有至少1種由三環癸烷骨架及三環癸烯骨架所成之群中所選出的骨架、與乙烯性不飽和鍵之化合物。 The colored photosensitive resin composition according to the first aspect of the invention, wherein (b) comprises a skeleton selected from the group consisting of at least one tricyclodecane skeleton and a tricyclodecene skeleton, and A compound of ethylenically unsaturated bonds. 如申請專利範圍第1項所記載之著色感光性樹脂組成物,其中(c)係具有環氧乙烷基及乙烯性不飽和鍵之單體。 The colored photosensitive resin composition according to the first aspect of the invention, wherein (c) is a monomer having an oxirane group and an ethylenically unsaturated bond. 一種圖型,其係使用如申請專利範圍第1項所記載之著色感光性樹脂組成物所形成。 A pattern formed by using the colored photosensitive resin composition described in the first aspect of the patent application. 一種彩色濾光片,其係含有如申請專利範圍第4項所記載之圖型。 A color filter comprising the pattern as recited in claim 4 of the patent application. 一種彩色濾光片之製造方法,其係包含下述(1)~(3)所示之步驟:(1)藉由將如申請專利範圍第1項所記載之著色感光性樹脂組成物塗佈於基板而得到塗佈膜的步驟;(2)於塗佈膜上,經由遮罩而曝光,以得到曝光後塗佈膜的步驟;(3)藉由鹼顯像液使曝光後塗佈膜顯像,以得到圖型的步驟。 A method for producing a color filter, comprising the steps of (1) to (3): (1) coating a colored photosensitive resin composition as described in claim 1 of the patent application; a step of obtaining a coating film on the substrate; (2) exposing on the coating film through a mask to obtain a film after exposure; (3) coating the film after exposure by an alkali developing solution Visualize the steps to get the pattern.
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