TWI565367B - 用於加熱元件線圈之支撐結構 - Google Patents

用於加熱元件線圈之支撐結構 Download PDF

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Publication number
TWI565367B
TWI565367B TW100122332A TW100122332A TWI565367B TW I565367 B TWI565367 B TW I565367B TW 100122332 A TW100122332 A TW 100122332A TW 100122332 A TW100122332 A TW 100122332A TW I565367 B TWI565367 B TW I565367B
Authority
TW
Taiwan
Prior art keywords
support structure
spacer
vertical
support
coil
Prior art date
Application number
TW100122332A
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English (en)
Chinese (zh)
Other versions
TW201208495A (en
Inventor
凱文Ｂ 派克
Original Assignee
山特維克熱傳動公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 山特維克熱傳動公司 filed Critical 山特維克熱傳動公司
Publication of TW201208495A publication Critical patent/TW201208495A/zh
Application granted granted Critical
Publication of TWI565367B publication Critical patent/TWI565367B/zh

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/02—Details
    • H05B3/06—Heater elements structurally combined with coupling elements or holders
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/62—Heating elements specially adapted for furnaces
    • H05B3/66—Supports or mountings for heaters on or in the wall or roof
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/62—Heating elements specially adapted for furnaces
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49083—Heater type

Landscapes

  • General Induction Heating (AREA)
  • Resistance Heating (AREA)
TW100122332A 2010-06-25 2011-06-24 用於加熱元件線圈之支撐結構 TWI565367B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US35869410P 2010-06-25 2010-06-25

Publications (2)

Publication Number Publication Date
TW201208495A TW201208495A (en) 2012-02-16
TWI565367B true TWI565367B (zh) 2017-01-01

Family

ID=44514467

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100122332A TWI565367B (zh) 2010-06-25 2011-06-24 用於加熱元件線圈之支撐結構

Country Status (6)

Country Link
US (1) US8785825B2 (https=)
EP (1) EP2400815B1 (https=)
JP (1) JP5897827B2 (https=)
KR (1) KR101844602B1 (https=)
CN (1) CN102300345B (https=)
TW (1) TWI565367B (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140166640A1 (en) * 2012-12-13 2014-06-19 Sandvik Thermal Process Inc Support for resisting radial creep of a heating element coil
CN104253064A (zh) * 2013-06-28 2014-12-31 上海华虹宏力半导体制造有限公司 一种半导体熔炉加热器固定装置
US9719629B2 (en) * 2014-04-08 2017-08-01 Plansee Se Supporting system for a heating element and heating system
ES2673704B1 (es) * 2016-12-23 2019-05-14 Bsh Electrodomesticos Espana Sa Dispositivo de aparato de coccion
DE102017102276B3 (de) 2017-02-06 2018-08-02 Benteler Automobiltechnik Gmbh Elektrisches Widerstandsgerät und Verwendung eines elektrischen Widerstandsgeräts
KR102007583B1 (ko) * 2017-12-27 2019-10-21 경일대학교산학협력단 가변 형상 인덕션 코일 장치 및 이를 포함하는 고주파 유도 가열기
TWI646297B (zh) * 2018-01-24 2019-01-01 鴻成國際科技股份有限公司 加熱器支撐裝置
CN110087354B (zh) * 2018-01-26 2022-05-03 鸿成国际科技股份有限公司 一种加热器支撑装置
JP6987822B2 (ja) * 2019-09-27 2022-01-05 キヤノントッキ株式会社 蒸発源装置、成膜装置、成膜方法および電子デバイスの製造方法
CN110823914B (zh) * 2019-11-02 2024-06-14 宜春市龙腾机械电气有限公司 铠装超导导体焊缝着色检查装备及其检查方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5095192A (en) * 1990-02-06 1992-03-10 Thermtec, Inc. High temperature diffusion furnace
US6807220B1 (en) * 2003-05-23 2004-10-19 Mrl Industries Retention mechanism for heating coil of high temperature diffusion furnace
TW200527975A (en) * 2003-12-25 2005-08-16 Sakaguchi Dennetsu Kabushiki Kaisha Electric furnace
US20080296282A1 (en) * 2007-06-01 2008-12-04 Tokyo Electron Limited Heat processing furnace and method of manufacturing the same
TW200947589A (en) * 2008-01-31 2009-11-16 Tokyo Electron Ltd Thermal processing furnace

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63145291A (ja) 1986-12-09 1988-06-17 Takasago Corp ルテニウム−ホスフイン錯体
JPH047598Y2 (https=) * 1987-03-16 1992-02-27
JPH0638316Y2 (ja) * 1988-02-24 1994-10-05 島津金属株式会社 電気炉用抵抗発熱体の保持装置
JPH079036Y2 (ja) * 1990-11-13 1995-03-06 東京エレクトロン東北株式会社 縦型熱処理炉
JPH0739908B2 (ja) 1991-02-28 1995-05-01 ニチアス株式会社 加熱装置
KR200382567Y1 (ko) * 2005-01-07 2005-04-22 조정희 열처리 장치의 히터 어셈블리
KR200389111Y1 (ko) * 2005-04-20 2005-07-07 조정희 열처리 장치의 히터 어셈블리
WO2009119904A1 (ja) * 2008-03-28 2009-10-01 日本電気株式会社 半導体装置、その製造方法、プリント回路基板および電子機器

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5095192A (en) * 1990-02-06 1992-03-10 Thermtec, Inc. High temperature diffusion furnace
US6807220B1 (en) * 2003-05-23 2004-10-19 Mrl Industries Retention mechanism for heating coil of high temperature diffusion furnace
TW200527975A (en) * 2003-12-25 2005-08-16 Sakaguchi Dennetsu Kabushiki Kaisha Electric furnace
US20080296282A1 (en) * 2007-06-01 2008-12-04 Tokyo Electron Limited Heat processing furnace and method of manufacturing the same
TW200947589A (en) * 2008-01-31 2009-11-16 Tokyo Electron Ltd Thermal processing furnace

Also Published As

Publication number Publication date
EP2400815B1 (en) 2017-05-17
EP2400815A2 (en) 2011-12-28
US20110315673A1 (en) 2011-12-29
CN102300345A (zh) 2011-12-28
CN102300345B (zh) 2015-11-25
KR20120000541A (ko) 2012-01-02
JP2012009442A (ja) 2012-01-12
US8785825B2 (en) 2014-07-22
JP5897827B2 (ja) 2016-03-30
EP2400815A3 (en) 2012-10-24
TW201208495A (en) 2012-02-16
KR101844602B1 (ko) 2018-04-02

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