KR101844602B1 - 발열체 코일용 지지구조물과 스페이서 및 발열체 코일의 위치를 제어하는 방법 - Google Patents

발열체 코일용 지지구조물과 스페이서 및 발열체 코일의 위치를 제어하는 방법 Download PDF

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KR101844602B1
KR101844602B1 KR1020110061901A KR20110061901A KR101844602B1 KR 101844602 B1 KR101844602 B1 KR 101844602B1 KR 1020110061901 A KR1020110061901 A KR 1020110061901A KR 20110061901 A KR20110061901 A KR 20110061901A KR 101844602 B1 KR101844602 B1 KR 101844602B1
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coil
vertical
heating coil
channel
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KR20120000541A (ko
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비. 펙 케빈
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샌드빅 써멀 프로세스. 인크.
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/02—Details
    • H05B3/06—Heater elements structurally combined with coupling elements or holders
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/62—Heating elements specially adapted for furnaces
    • H05B3/66—Supports or mountings for heaters on or in the wall or roof
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/62—Heating elements specially adapted for furnaces
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49083—Heater type

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  • General Induction Heating (AREA)
  • Resistance Heating (AREA)
KR1020110061901A 2010-06-25 2011-06-24 발열체 코일용 지지구조물과 스페이서 및 발열체 코일의 위치를 제어하는 방법 Active KR101844602B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US35869410P 2010-06-25 2010-06-25
US61/358,694 2010-06-25

Publications (2)

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KR20120000541A KR20120000541A (ko) 2012-01-02
KR101844602B1 true KR101844602B1 (ko) 2018-04-02

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ID=44514467

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KR1020110061901A Active KR101844602B1 (ko) 2010-06-25 2011-06-24 발열체 코일용 지지구조물과 스페이서 및 발열체 코일의 위치를 제어하는 방법

Country Status (6)

Country Link
US (1) US8785825B2 (https=)
EP (1) EP2400815B1 (https=)
JP (1) JP5897827B2 (https=)
KR (1) KR101844602B1 (https=)
CN (1) CN102300345B (https=)
TW (1) TWI565367B (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140166640A1 (en) * 2012-12-13 2014-06-19 Sandvik Thermal Process Inc Support for resisting radial creep of a heating element coil
CN104253064A (zh) * 2013-06-28 2014-12-31 上海华虹宏力半导体制造有限公司 一种半导体熔炉加热器固定装置
US9719629B2 (en) * 2014-04-08 2017-08-01 Plansee Se Supporting system for a heating element and heating system
ES2673704B1 (es) * 2016-12-23 2019-05-14 Bsh Electrodomesticos Espana Sa Dispositivo de aparato de coccion
DE102017102276B3 (de) 2017-02-06 2018-08-02 Benteler Automobiltechnik Gmbh Elektrisches Widerstandsgerät und Verwendung eines elektrischen Widerstandsgeräts
KR102007583B1 (ko) * 2017-12-27 2019-10-21 경일대학교산학협력단 가변 형상 인덕션 코일 장치 및 이를 포함하는 고주파 유도 가열기
TWI646297B (zh) * 2018-01-24 2019-01-01 鴻成國際科技股份有限公司 加熱器支撐裝置
CN110087354B (zh) * 2018-01-26 2022-05-03 鸿成国际科技股份有限公司 一种加热器支撑装置
JP6987822B2 (ja) * 2019-09-27 2022-01-05 キヤノントッキ株式会社 蒸発源装置、成膜装置、成膜方法および電子デバイスの製造方法
CN110823914B (zh) * 2019-11-02 2024-06-14 宜春市龙腾机械电气有限公司 铠装超导导体焊缝着色检查装备及其检查方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200382567Y1 (ko) * 2005-01-07 2005-04-22 조정희 열처리 장치의 히터 어셈블리
KR200389111Y1 (ko) * 2005-04-20 2005-07-07 조정희 열처리 장치의 히터 어셈블리

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63145291A (ja) 1986-12-09 1988-06-17 Takasago Corp ルテニウム−ホスフイン錯体
JPH047598Y2 (https=) * 1987-03-16 1992-02-27
JPH0638316Y2 (ja) * 1988-02-24 1994-10-05 島津金属株式会社 電気炉用抵抗発熱体の保持装置
US5038019A (en) 1990-02-06 1991-08-06 Thermtec, Inc. High temperature diffusion furnace
JPH079036Y2 (ja) * 1990-11-13 1995-03-06 東京エレクトロン東北株式会社 縦型熱処理炉
JPH0739908B2 (ja) 1991-02-28 1995-05-01 ニチアス株式会社 加熱装置
US6807220B1 (en) * 2003-05-23 2004-10-19 Mrl Industries Retention mechanism for heating coil of high temperature diffusion furnace
JP3916241B2 (ja) 2003-12-25 2007-05-16 坂口電熱株式会社 電気炉
JP4445519B2 (ja) * 2007-06-01 2010-04-07 東京エレクトロン株式会社 熱処理炉及びその製造方法
JP5096182B2 (ja) 2008-01-31 2012-12-12 東京エレクトロン株式会社 熱処理炉
WO2009119904A1 (ja) * 2008-03-28 2009-10-01 日本電気株式会社 半導体装置、その製造方法、プリント回路基板および電子機器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200382567Y1 (ko) * 2005-01-07 2005-04-22 조정희 열처리 장치의 히터 어셈블리
KR200389111Y1 (ko) * 2005-04-20 2005-07-07 조정희 열처리 장치의 히터 어셈블리

Also Published As

Publication number Publication date
EP2400815B1 (en) 2017-05-17
EP2400815A2 (en) 2011-12-28
US20110315673A1 (en) 2011-12-29
TWI565367B (zh) 2017-01-01
CN102300345A (zh) 2011-12-28
CN102300345B (zh) 2015-11-25
KR20120000541A (ko) 2012-01-02
JP2012009442A (ja) 2012-01-12
US8785825B2 (en) 2014-07-22
JP5897827B2 (ja) 2016-03-30
EP2400815A3 (en) 2012-10-24
TW201208495A (en) 2012-02-16

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