CN102300345B - 用于加热元件线圈的支撑结构 - Google Patents
用于加热元件线圈的支撑结构 Download PDFInfo
- Publication number
- CN102300345B CN102300345B CN201110182110.0A CN201110182110A CN102300345B CN 102300345 B CN102300345 B CN 102300345B CN 201110182110 A CN201110182110 A CN 201110182110A CN 102300345 B CN102300345 B CN 102300345B
- Authority
- CN
- China
- Prior art keywords
- spacer
- coil
- heating element
- supporting construction
- element coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 61
- 238000010276 construction Methods 0.000 title claims abstract description 32
- 125000006850 spacer group Chemical group 0.000 claims abstract description 110
- 238000000034 method Methods 0.000 claims abstract description 16
- 230000000295 complement effect Effects 0.000 claims abstract description 3
- 239000012212 insulator Substances 0.000 claims description 3
- 239000000956 alloy Substances 0.000 description 9
- 229910045601 alloy Inorganic materials 0.000 description 9
- 230000007246 mechanism Effects 0.000 description 5
- 230000035882 stress Effects 0.000 description 5
- 238000000576 coating method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
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- 230000005484 gravity Effects 0.000 description 3
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- 238000005516 engineering process Methods 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229910000714 At alloy Inorganic materials 0.000 description 1
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- 238000003723 Smelting Methods 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
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- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
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- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
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- 238000012545 processing Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/02—Details
- H05B3/06—Heater elements structurally combined with coupling elements or holders
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/62—Heating elements specially adapted for furnaces
- H05B3/66—Supports or mountings for heaters on or in the wall or roof
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/62—Heating elements specially adapted for furnaces
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49083—Heater type
Landscapes
- General Induction Heating (AREA)
- Resistance Heating (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US35869410P | 2010-06-25 | 2010-06-25 | |
| US61/358,694 | 2010-06-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102300345A CN102300345A (zh) | 2011-12-28 |
| CN102300345B true CN102300345B (zh) | 2015-11-25 |
Family
ID=44514467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110182110.0A Active CN102300345B (zh) | 2010-06-25 | 2011-06-27 | 用于加热元件线圈的支撑结构 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8785825B2 (https=) |
| EP (1) | EP2400815B1 (https=) |
| JP (1) | JP5897827B2 (https=) |
| KR (1) | KR101844602B1 (https=) |
| CN (1) | CN102300345B (https=) |
| TW (1) | TWI565367B (https=) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140166640A1 (en) * | 2012-12-13 | 2014-06-19 | Sandvik Thermal Process Inc | Support for resisting radial creep of a heating element coil |
| CN104253064A (zh) * | 2013-06-28 | 2014-12-31 | 上海华虹宏力半导体制造有限公司 | 一种半导体熔炉加热器固定装置 |
| US9719629B2 (en) * | 2014-04-08 | 2017-08-01 | Plansee Se | Supporting system for a heating element and heating system |
| ES2673704B1 (es) * | 2016-12-23 | 2019-05-14 | Bsh Electrodomesticos Espana Sa | Dispositivo de aparato de coccion |
| DE102017102276B3 (de) | 2017-02-06 | 2018-08-02 | Benteler Automobiltechnik Gmbh | Elektrisches Widerstandsgerät und Verwendung eines elektrischen Widerstandsgeräts |
| KR102007583B1 (ko) * | 2017-12-27 | 2019-10-21 | 경일대학교산학협력단 | 가변 형상 인덕션 코일 장치 및 이를 포함하는 고주파 유도 가열기 |
| TWI646297B (zh) * | 2018-01-24 | 2019-01-01 | 鴻成國際科技股份有限公司 | 加熱器支撐裝置 |
| CN110087354B (zh) * | 2018-01-26 | 2022-05-03 | 鸿成国际科技股份有限公司 | 一种加热器支撑装置 |
| JP6987822B2 (ja) * | 2019-09-27 | 2022-01-05 | キヤノントッキ株式会社 | 蒸発源装置、成膜装置、成膜方法および電子デバイスの製造方法 |
| CN110823914B (zh) * | 2019-11-02 | 2024-06-14 | 宜春市龙腾机械电气有限公司 | 铠装超导导体焊缝着色检查装备及其检查方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5187771A (en) * | 1990-11-13 | 1993-02-16 | Tokyo Electron Sagami Limited | Heat processing apparatus utilizing a plurality of stacked heater holders |
| CN101315878A (zh) * | 2007-06-01 | 2008-12-03 | 东京毅力科创株式会社 | 热处理炉及其制造方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63145291A (ja) | 1986-12-09 | 1988-06-17 | Takasago Corp | ルテニウム−ホスフイン錯体 |
| JPH047598Y2 (https=) * | 1987-03-16 | 1992-02-27 | ||
| JPH0638316Y2 (ja) * | 1988-02-24 | 1994-10-05 | 島津金属株式会社 | 電気炉用抵抗発熱体の保持装置 |
| US5038019A (en) | 1990-02-06 | 1991-08-06 | Thermtec, Inc. | High temperature diffusion furnace |
| JPH0739908B2 (ja) | 1991-02-28 | 1995-05-01 | ニチアス株式会社 | 加熱装置 |
| US6807220B1 (en) * | 2003-05-23 | 2004-10-19 | Mrl Industries | Retention mechanism for heating coil of high temperature diffusion furnace |
| JP3916241B2 (ja) | 2003-12-25 | 2007-05-16 | 坂口電熱株式会社 | 電気炉 |
| KR200382567Y1 (ko) * | 2005-01-07 | 2005-04-22 | 조정희 | 열처리 장치의 히터 어셈블리 |
| KR200389111Y1 (ko) * | 2005-04-20 | 2005-07-07 | 조정희 | 열처리 장치의 히터 어셈블리 |
| JP5096182B2 (ja) | 2008-01-31 | 2012-12-12 | 東京エレクトロン株式会社 | 熱処理炉 |
| WO2009119904A1 (ja) * | 2008-03-28 | 2009-10-01 | 日本電気株式会社 | 半導体装置、その製造方法、プリント回路基板および電子機器 |
-
2011
- 2011-06-24 TW TW100122332A patent/TWI565367B/zh active
- 2011-06-24 US US13/168,662 patent/US8785825B2/en active Active
- 2011-06-24 KR KR1020110061901A patent/KR101844602B1/ko active Active
- 2011-06-24 JP JP2011141052A patent/JP5897827B2/ja active Active
- 2011-06-27 EP EP11171423.4A patent/EP2400815B1/en active Active
- 2011-06-27 CN CN201110182110.0A patent/CN102300345B/zh active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5187771A (en) * | 1990-11-13 | 1993-02-16 | Tokyo Electron Sagami Limited | Heat processing apparatus utilizing a plurality of stacked heater holders |
| CN101315878A (zh) * | 2007-06-01 | 2008-12-03 | 东京毅力科创株式会社 | 热处理炉及其制造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2400815B1 (en) | 2017-05-17 |
| EP2400815A2 (en) | 2011-12-28 |
| US20110315673A1 (en) | 2011-12-29 |
| TWI565367B (zh) | 2017-01-01 |
| CN102300345A (zh) | 2011-12-28 |
| KR20120000541A (ko) | 2012-01-02 |
| JP2012009442A (ja) | 2012-01-12 |
| US8785825B2 (en) | 2014-07-22 |
| JP5897827B2 (ja) | 2016-03-30 |
| EP2400815A3 (en) | 2012-10-24 |
| TW201208495A (en) | 2012-02-16 |
| KR101844602B1 (ko) | 2018-04-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: California, USA Patentee after: Cantel thermal transmission Co.,Ltd. Address before: California, USA Patentee before: Sandvik Thermal Process, Inc. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP03 | Change of name, title or address |
Address after: North Carolina, USA Patentee after: Cantel thermal transmission Co.,Ltd. Country or region after: U.S.A. Address before: California, USA Patentee before: Cantel thermal transmission Co.,Ltd. Country or region before: U.S.A. |
|
| CP03 | Change of name, title or address |