TWI560737B - A system for analyzing a sample, in particular a system scanning an integratedcircuit, and method for analyzing a sample - Google Patents
A system for analyzing a sample, in particular a system scanning an integratedcircuit, and method for analyzing a sampleInfo
- Publication number
- TWI560737B TWI560737B TW103143626A TW103143626A TWI560737B TW I560737 B TWI560737 B TW I560737B TW 103143626 A TW103143626 A TW 103143626A TW 103143626 A TW103143626 A TW 103143626A TW I560737 B TWI560737 B TW I560737B
- Authority
- TW
- Taiwan
- Prior art keywords
- analyzing
- sample
- integratedcircuit
- scanning
- system scanning
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/06—Circuits or algorithms therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/25—Tubes for localised analysis using electron or ion beams
- H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
- H01J2237/2583—Tubes for localised analysis using electron or ion beams characterised by their application using tunnel effects, e.g. STM, AFM
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/108,286 US9057740B1 (en) | 2013-12-16 | 2013-12-16 | Probe-based data collection system with adaptive mode of probing |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201532102A TW201532102A (zh) | 2015-08-16 |
TWI560737B true TWI560737B (en) | 2016-12-01 |
Family
ID=53192832
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW103143626A TWI560737B (en) | 2013-12-16 | 2014-12-15 | A system for analyzing a sample, in particular a system scanning an integratedcircuit, and method for analyzing a sample |
Country Status (4)
Country | Link |
---|---|
US (1) | US9057740B1 (zh) |
JP (1) | JP2015129749A (zh) |
DE (1) | DE102014118657A1 (zh) |
TW (1) | TWI560737B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6366704B2 (ja) | 2013-06-24 | 2018-08-01 | ディーシージー システムズ、 インコーポレイテッドDcg Systems Inc. | 局所的な試料の特性によって制御されるプロービングの適応モードを備えたプロービングを利用したデータ収集システム |
US10539589B2 (en) | 2014-06-25 | 2020-01-21 | Fei Efa, Inc. | Through process flow intra-chip and inter-chip electrical analysis and process control using in-line nanoprobing |
CN107076779B (zh) * | 2014-10-24 | 2019-11-01 | 株式会社岛津制作所 | 扫描型探针显微镜 |
US9958501B1 (en) | 2015-03-04 | 2018-05-01 | Applieed Materials Israel Ltd. | System for electrical measurements of objects in a vacuumed environment |
KR101710337B1 (ko) * | 2015-06-02 | 2017-02-28 | 파크시스템스 주식회사 | 조정 가능한 스캔 속도를 가지는 측정 장치 및 측정 방법 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5907096A (en) * | 1997-06-02 | 1999-05-25 | International Business Machines Corporation | Detecting fields with a two-pass, dual-amplitude-mode scanning force microscope |
TW200831853A (en) * | 2006-10-17 | 2008-08-01 | Veeco Instr Inc | Method and apparatus of scanning a sample using a scanning probe microscope |
US20100205697A1 (en) * | 2009-02-10 | 2010-08-12 | Masato Iyoki | Approach method for probe and sample in scanning probe microscope |
TW201102658A (en) * | 2009-07-08 | 2011-01-16 | Au Optronics Corp | Test device |
TW201113528A (en) * | 2009-10-13 | 2011-04-16 | Yuan-Jay Wang | A tapping mode atomic force microscope with a constant force fuzzy controller |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4101072A (en) | 1976-10-21 | 1978-07-18 | The Singer Company | Data-gathering device for scanning data having a variable amplitude modulation and signal to noise ratio |
JP2868047B2 (ja) * | 1991-12-09 | 1999-03-10 | 富士通株式会社 | プローブ装置および集積回路検査装置 |
JP3597613B2 (ja) * | 1995-10-12 | 2004-12-08 | 日立建機株式会社 | 走査型プローブ顕微鏡 |
JPH09304408A (ja) * | 1996-05-15 | 1997-11-28 | Hitachi Constr Mach Co Ltd | 走査型プローブ顕微鏡の測定方法 |
JP3925380B2 (ja) * | 2002-10-01 | 2007-06-06 | 株式会社日立製作所 | 走査プローブ顕微鏡 |
JP2005043108A (ja) * | 2003-07-23 | 2005-02-17 | Hitachi Kenki Fine Tech Co Ltd | 走査型プローブ顕微鏡の特定パターン検出方法 |
JP2005069972A (ja) * | 2003-08-27 | 2005-03-17 | Hitachi Kenki Fine Tech Co Ltd | 走査型プローブ顕微鏡の探針移動制御方法 |
KR100718140B1 (ko) * | 2005-11-12 | 2007-05-14 | 삼성전자주식회사 | 반도체 탐침 및 이를 이용한 기록 재생 방법 |
JP2009150696A (ja) * | 2007-12-19 | 2009-07-09 | Hitachi Kenki Fine Tech Co Ltd | 走査プローブ顕微鏡 |
US8525112B2 (en) * | 2010-08-10 | 2013-09-03 | Seagate Technology Llc | Variable pixel density imaging |
JP6366704B2 (ja) * | 2013-06-24 | 2018-08-01 | ディーシージー システムズ、 インコーポレイテッドDcg Systems Inc. | 局所的な試料の特性によって制御されるプロービングの適応モードを備えたプロービングを利用したデータ収集システム |
-
2013
- 2013-12-16 US US14/108,286 patent/US9057740B1/en active Active
-
2014
- 2014-12-15 TW TW103143626A patent/TWI560737B/zh active
- 2014-12-15 DE DE102014118657.5A patent/DE102014118657A1/de not_active Withdrawn
- 2014-12-16 JP JP2014254212A patent/JP2015129749A/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5907096A (en) * | 1997-06-02 | 1999-05-25 | International Business Machines Corporation | Detecting fields with a two-pass, dual-amplitude-mode scanning force microscope |
TW200831853A (en) * | 2006-10-17 | 2008-08-01 | Veeco Instr Inc | Method and apparatus of scanning a sample using a scanning probe microscope |
US20100205697A1 (en) * | 2009-02-10 | 2010-08-12 | Masato Iyoki | Approach method for probe and sample in scanning probe microscope |
TW201102658A (en) * | 2009-07-08 | 2011-01-16 | Au Optronics Corp | Test device |
TW201113528A (en) * | 2009-10-13 | 2011-04-16 | Yuan-Jay Wang | A tapping mode atomic force microscope with a constant force fuzzy controller |
Also Published As
Publication number | Publication date |
---|---|
JP2015129749A (ja) | 2015-07-16 |
TW201532102A (zh) | 2015-08-16 |
US20150168444A1 (en) | 2015-06-18 |
US9057740B1 (en) | 2015-06-16 |
DE102014118657A1 (de) | 2015-06-18 |
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TWI560737B (en) | A system for analyzing a sample, in particular a system scanning an integratedcircuit, and method for analyzing a sample |