TWI560427B - Three-dimensional shape measurement apparatus - Google Patents
Three-dimensional shape measurement apparatusInfo
- Publication number
- TWI560427B TWI560427B TW104113907A TW104113907A TWI560427B TW I560427 B TWI560427 B TW I560427B TW 104113907 A TW104113907 A TW 104113907A TW 104113907 A TW104113907 A TW 104113907A TW I560427 B TWI560427 B TW I560427B
- Authority
- TW
- Taiwan
- Prior art keywords
- dimensional shape
- measurement apparatus
- shape measurement
- dimensional
- shape
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
- G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014111032A JP5945788B2 (ja) | 2014-05-29 | 2014-05-29 | 三次元形状測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201546418A TW201546418A (zh) | 2015-12-16 |
TWI560427B true TWI560427B (en) | 2016-12-01 |
Family
ID=53002561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW104113907A TWI560427B (en) | 2014-05-29 | 2015-04-30 | Three-dimensional shape measurement apparatus |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP2950037B1 (zh) |
JP (1) | JP5945788B2 (zh) |
KR (1) | KR101704204B1 (zh) |
CN (1) | CN105180826B (zh) |
TW (1) | TWI560427B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6458334B1 (ja) * | 2018-02-02 | 2019-01-30 | 株式会社東京精密 | リニア駆動機構及び形状測定機 |
DE102018204322A1 (de) * | 2018-03-21 | 2019-09-26 | Carl Zeiss Industrielle Messtechnik Gmbh | Maschinenachsenanordnung, Dreh-Schwenk-Einheit und Verfahren zum Übertragen von elektrischer Energie und Informationen mittels einer Maschinenachsenanordnung |
JP6799815B2 (ja) * | 2018-05-21 | 2020-12-16 | パナソニックIpマネジメント株式会社 | 形状測定用プローブ |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5455677A (en) * | 1993-03-15 | 1995-10-03 | Matsushita Electric Industrial Co., Ltd. | Optical probe |
CN102589423A (zh) * | 2012-01-10 | 2012-07-18 | 合肥工业大学 | 微纳米三维接触扫描测量探头 |
TW201418664A (zh) * | 2012-11-01 | 2014-05-16 | Univ Southern Taiwan Sci & Tec | 三次元接觸式掃描探頭 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59108904A (ja) * | 1982-12-14 | 1984-06-23 | Olympus Optical Co Ltd | 非接触形状測定器 |
JPS6281143A (ja) | 1985-10-03 | 1987-04-14 | Ando Electric Co Ltd | フラグ検出による同期信号発生回路 |
JPH07260471A (ja) * | 1994-03-16 | 1995-10-13 | Nikon Corp | 表面形状測定装置 |
JP3240095B2 (ja) * | 1994-12-16 | 2001-12-17 | 株式会社ミツトヨ | 光学式変位検出器 |
JPH11166823A (ja) * | 1997-12-08 | 1999-06-22 | Nikon Corp | プローブ機構及びこれを用いた座標測定装置 |
DE60033272T2 (de) * | 1999-03-03 | 2007-11-29 | Riken, Wako | Sondenartiger formmessaufnehmer sowie nc-bearbeitungsvorrichtung und formmessverfahren unter verwendung des messaufnehmers |
JP2003294434A (ja) * | 2002-03-29 | 2003-10-15 | Ricoh Co Ltd | 接触式プローブ |
JP4093828B2 (ja) * | 2002-08-29 | 2008-06-04 | 松下電器産業株式会社 | 測定用プローブ及び光学式測定装置 |
JP4291849B2 (ja) * | 2006-12-20 | 2009-07-08 | パナソニック株式会社 | 三次元測定プローブ |
JP5143931B2 (ja) * | 2010-09-09 | 2013-02-13 | パナソニック株式会社 | 三次元形状測定装置 |
KR101330468B1 (ko) * | 2010-09-09 | 2013-11-15 | 파나소닉 주식회사 | 삼차원 형상 측정장치 |
JP5959844B2 (ja) * | 2010-12-21 | 2016-08-02 | キヤノン株式会社 | 形状測定装置 |
CN202743485U (zh) * | 2012-06-15 | 2013-02-20 | 西北工业大学 | 一种三坐标的双支臂定位器 |
CN102997880A (zh) * | 2012-11-26 | 2013-03-27 | 西安力德测量设备有限公司 | 三坐标机防振动气动控制微调系统 |
-
2014
- 2014-05-29 JP JP2014111032A patent/JP5945788B2/ja active Active
-
2015
- 2015-04-23 EP EP15164891.2A patent/EP2950037B1/en active Active
- 2015-04-30 TW TW104113907A patent/TWI560427B/zh active
- 2015-05-26 KR KR1020150072991A patent/KR101704204B1/ko active IP Right Grant
- 2015-05-28 CN CN201510284279.5A patent/CN105180826B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5455677A (en) * | 1993-03-15 | 1995-10-03 | Matsushita Electric Industrial Co., Ltd. | Optical probe |
CN102589423A (zh) * | 2012-01-10 | 2012-07-18 | 合肥工业大学 | 微纳米三维接触扫描测量探头 |
TW201418664A (zh) * | 2012-11-01 | 2014-05-16 | Univ Southern Taiwan Sci & Tec | 三次元接觸式掃描探頭 |
Also Published As
Publication number | Publication date |
---|---|
JP5945788B2 (ja) | 2016-07-05 |
JP2015225011A (ja) | 2015-12-14 |
KR101704204B1 (ko) | 2017-02-07 |
EP2950037B1 (en) | 2016-07-27 |
CN105180826B (zh) | 2017-09-22 |
CN105180826A (zh) | 2015-12-23 |
TW201546418A (zh) | 2015-12-16 |
EP2950037A1 (en) | 2015-12-02 |
KR20150138037A (ko) | 2015-12-09 |
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