TWI560017B - Method and apparatus for dividing thin film device into separate cells - Google Patents
Method and apparatus for dividing thin film device into separate cellsInfo
- Publication number
- TWI560017B TWI560017B TW100133681A TW100133681A TWI560017B TW I560017 B TWI560017 B TW I560017B TW 100133681 A TW100133681 A TW 100133681A TW 100133681 A TW100133681 A TW 100133681A TW I560017 B TWI560017 B TW I560017B
- Authority
- TW
- Taiwan
- Prior art keywords
- thin film
- film device
- separate cells
- dividing thin
- dividing
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
- H01L21/76879—Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
- H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
- H10F19/31—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
- B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
- H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
- H10F19/31—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
- H10F19/33—Patterning processes to connect the photovoltaic cells, e.g. laser cutting of conductive or active layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
- H10F19/90—Structures for connecting between photovoltaic cells, e.g. interconnections or insulating spacers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/95—Circuit arrangements
- H10F77/953—Circuit arrangements for devices having potential barriers
- H10F77/955—Circuit arrangements for devices having potential barriers for photovoltaic devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/16—Composite materials, e.g. fibre reinforced
- B23K2103/166—Multilayered materials
- B23K2103/172—Multilayered materials wherein at least one of the layers is non-metallic
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
- Electroluminescent Light Sources (AREA)
- Laser Beam Processing (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1016172.7A GB2483922B (en) | 2010-09-25 | 2010-09-25 | Method and apparatus for dividing thin film device into separate cells |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201233483A TW201233483A (en) | 2012-08-16 |
| TWI560017B true TWI560017B (en) | 2016-12-01 |
Family
ID=43127985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100133681A TWI560017B (en) | 2010-09-25 | 2011-09-20 | Method and apparatus for dividing thin film device into separate cells |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9130094B2 (enExample) |
| EP (1) | EP2619804A1 (enExample) |
| JP (1) | JP5988980B2 (enExample) |
| KR (1) | KR101786854B1 (enExample) |
| CN (1) | CN103119731B (enExample) |
| GB (1) | GB2483922B (enExample) |
| TW (1) | TWI560017B (enExample) |
| WO (1) | WO2012038689A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102012205978A1 (de) * | 2012-04-12 | 2013-10-17 | Robert Bosch Gmbh | Photovoltaische Dünnschichtsolarmodule sowie Verfahren zur Herstellung solcher Dünnschichtsolarmodule |
| WO2013189605A2 (en) * | 2012-06-20 | 2013-12-27 | Tel Solar Ag | Laser scribing system |
| CN116154032A (zh) * | 2021-11-19 | 2023-05-23 | 宁德时代新能源科技股份有限公司 | 用于制造太阳能电池的设备及制造太阳能电池的方法 |
| US12242078B2 (en) * | 2023-05-22 | 2025-03-04 | Bradford T Hite | Cross dichroic prism based multi band solar array |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW572804B (en) * | 2001-08-10 | 2004-01-21 | First Solar Llc | Method and apparatus for laser scribing glass sheet substrate coatings |
| WO2008157807A2 (en) * | 2007-06-20 | 2008-12-24 | Ascent Solar Technologies, Inc. | Array of monolithically integrated thin film photovoltaic cells and associated methods |
| CN101496273A (zh) * | 2005-10-07 | 2009-07-29 | 应用材料股份有限公司 | 用于改进薄膜太阳能电池互连的系统和方法 |
| GB2458986A (en) * | 2008-04-08 | 2009-10-14 | Philip Thomas Rumsby | Apparatus for patterning thin films on continuous flexible substrates |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3604917A1 (de) * | 1986-02-17 | 1987-08-27 | Messerschmitt Boelkow Blohm | Verfahren zur herstellung eines integrierten verbandes in reihe geschalteter duennschicht-solarzellen |
| JP3091151B2 (ja) | 1997-01-27 | 2000-09-25 | 三洋電機株式会社 | 集積型光起電力装置の製造方法 |
| JPH11163499A (ja) * | 1997-11-28 | 1999-06-18 | Nitto Boseki Co Ltd | プリント配線板の製造方法及びこの製造方法によるプリント配線板 |
| JP4741045B2 (ja) * | 1998-03-25 | 2011-08-03 | セイコーエプソン株式会社 | 電気回路、その製造方法および電気回路製造装置 |
| JP4168413B2 (ja) | 1998-07-27 | 2008-10-22 | シチズンホールディングス株式会社 | 太陽電池の製造方法 |
| JP2000124488A (ja) * | 1998-10-15 | 2000-04-28 | Matsushita Electric Ind Co Ltd | 薄膜太陽電池の製造方法 |
| US6310281B1 (en) | 2000-03-16 | 2001-10-30 | Global Solar Energy, Inc. | Thin-film, flexible photovoltaic module |
| US6491361B1 (en) * | 2000-11-09 | 2002-12-10 | Encad, Inc. | Digital media cutter |
| JP2003318133A (ja) * | 2002-04-22 | 2003-11-07 | Seiko Epson Corp | 膜パターンの形成方法、膜パターン形成装置、導電膜配線、半導体チップの実装構造、半導体装置、発光装置、電気光学装置、電子機器、並びに非接触型カード媒体 |
| US6690041B2 (en) | 2002-05-14 | 2004-02-10 | Global Solar Energy, Inc. | Monolithically integrated diodes in thin-film photovoltaic devices |
| KR101119202B1 (ko) * | 2005-02-07 | 2012-03-20 | 삼성전자주식회사 | 액적 형성 장치 및 방법, 박막 형성 방법 및 표시기판 |
| TWI334649B (en) | 2005-09-27 | 2010-12-11 | Lg Chemical Ltd | Method for forming buried contact electrode of semiconductor device having pn junction and optoelectronic semiconductor device using the same |
| GB0622232D0 (en) * | 2006-11-08 | 2006-12-20 | Rumsby Philip T | Method and apparatus for laser beam alignment for solar panel scribing |
| DE102007032283A1 (de) * | 2007-07-11 | 2009-01-15 | Stein, Wilhelm, Dr. | Dünnschichtsolarzellen-Modul und Verfahren zu dessen Herstellung |
| EP2198367A1 (en) * | 2007-08-31 | 2010-06-23 | Applied Materials, Inc. | Photovoltaic production line |
| GB0802289D0 (en) * | 2008-02-07 | 2008-03-12 | Rumsby Philip T | Method and appartus for making a partially transparent solar panel |
| CN102047440A (zh) * | 2008-07-04 | 2011-05-04 | 株式会社爱发科 | 太阳能电池单元的制造方法以及太阳能电池单元 |
| US8563892B2 (en) * | 2008-09-24 | 2013-10-22 | Standex International Corporation | Method and apparatus for laser engraving |
| GB2472608B (en) * | 2009-08-12 | 2013-09-04 | M Solv Ltd | Method and Apparatus for making a solar panel that is partially transparent |
| GB2474665B (en) | 2009-10-22 | 2011-10-12 | M Solv Ltd | Method and apparatus for dividing thin film device into separate cells |
| US8865569B2 (en) * | 2009-10-22 | 2014-10-21 | M-Solv Ltd. | Method and apparatus for dividing thin film device into separate cells |
| US20110139755A1 (en) * | 2009-11-03 | 2011-06-16 | Applied Materials, Inc. | Multi-wavelength laser-scribing tool |
| DE202011110969U1 (de) | 2010-10-15 | 2017-11-16 | Wilhelm Stein | Dünnschichtfotovoltaikmodul |
| DE202011110968U1 (de) | 2010-10-15 | 2017-11-16 | Wilhelm Stein | Dünnschichtfotovoltaikmodul |
| EP2761669A1 (de) | 2011-09-27 | 2014-08-06 | Wilhelm Stein | Fotovoltaikmodul, verfahren und herstellungsanlage zur herstellung eines fotovoltaikmoduls |
-
2010
- 2010-09-25 GB GB1016172.7A patent/GB2483922B/en not_active Expired - Fee Related
-
2011
- 2011-09-16 JP JP2013529700A patent/JP5988980B2/ja not_active Expired - Fee Related
- 2011-09-16 US US13/825,629 patent/US9130094B2/en not_active Expired - Fee Related
- 2011-09-16 CN CN201180045897.4A patent/CN103119731B/zh not_active Expired - Fee Related
- 2011-09-16 EP EP11764595.2A patent/EP2619804A1/en not_active Withdrawn
- 2011-09-16 WO PCT/GB2011/001352 patent/WO2012038689A1/en not_active Ceased
- 2011-09-16 KR KR1020137010504A patent/KR101786854B1/ko not_active Expired - Fee Related
- 2011-09-20 TW TW100133681A patent/TWI560017B/zh not_active IP Right Cessation
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW572804B (en) * | 2001-08-10 | 2004-01-21 | First Solar Llc | Method and apparatus for laser scribing glass sheet substrate coatings |
| CN101496273A (zh) * | 2005-10-07 | 2009-07-29 | 应用材料股份有限公司 | 用于改进薄膜太阳能电池互连的系统和方法 |
| WO2008157807A2 (en) * | 2007-06-20 | 2008-12-24 | Ascent Solar Technologies, Inc. | Array of monolithically integrated thin film photovoltaic cells and associated methods |
| GB2458986A (en) * | 2008-04-08 | 2009-10-14 | Philip Thomas Rumsby | Apparatus for patterning thin films on continuous flexible substrates |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2012038689A1 (en) | 2012-03-29 |
| GB201016172D0 (en) | 2010-11-10 |
| JP5988980B2 (ja) | 2016-09-07 |
| GB2483922B (en) | 2013-11-20 |
| KR101786854B1 (ko) | 2017-10-18 |
| TW201233483A (en) | 2012-08-16 |
| KR20130108593A (ko) | 2013-10-04 |
| GB2483922A (en) | 2012-03-28 |
| JP2013546160A (ja) | 2013-12-26 |
| US9130094B2 (en) | 2015-09-08 |
| CN103119731B (zh) | 2016-10-26 |
| EP2619804A1 (en) | 2013-07-31 |
| US20130210224A1 (en) | 2013-08-15 |
| CN103119731A (zh) | 2013-05-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |