GB2483922B - Method and apparatus for dividing thin film device into separate cells - Google Patents

Method and apparatus for dividing thin film device into separate cells

Info

Publication number
GB2483922B
GB2483922B GB1016172.7A GB201016172A GB2483922B GB 2483922 B GB2483922 B GB 2483922B GB 201016172 A GB201016172 A GB 201016172A GB 2483922 B GB2483922 B GB 2483922B
Authority
GB
United Kingdom
Prior art keywords
cut
layer
thin film
layers
film device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB1016172.7A
Other languages
English (en)
Other versions
GB201016172D0 (en
GB2483922A (en
Inventor
Adam North Brunton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
M Solv Ltd
Original Assignee
M Solv Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by M Solv Ltd filed Critical M Solv Ltd
Priority to GB1016172.7A priority Critical patent/GB2483922B/en
Publication of GB201016172D0 publication Critical patent/GB201016172D0/en
Priority to PCT/GB2011/001352 priority patent/WO2012038689A1/en
Priority to EP11764595.2A priority patent/EP2619804A1/en
Priority to JP2013529700A priority patent/JP5988980B2/ja
Priority to KR1020137010504A priority patent/KR101786854B1/ko
Priority to CN201180045897.4A priority patent/CN103119731B/zh
Priority to US13/825,629 priority patent/US9130094B2/en
Priority to TW100133681A priority patent/TWI560017B/zh
Publication of GB2483922A publication Critical patent/GB2483922A/en
Application granted granted Critical
Publication of GB2483922B publication Critical patent/GB2483922B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76877Filling of holes, grooves or trenches, e.g. vias, with conductive material
    • H01L21/76879Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H10F19/31Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/362Laser etching
    • B23K26/364Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/40Removing material taking account of the properties of the material involved
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/6715Apparatus for applying a liquid, a resin, an ink or the like
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H10F19/31Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
    • H10F19/33Patterning processes to connect the photovoltaic cells, e.g. laser cutting of conductive or active layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/90Structures for connecting between photovoltaic cells, e.g. interconnections or insulating spacers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/95Circuit arrangements
    • H10F77/953Circuit arrangements for devices having potential barriers
    • H10F77/955Circuit arrangements for devices having potential barriers for photovoltaic devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/16Composite materials, e.g. fibre reinforced
    • B23K2103/166Multilayered materials
    • B23K2103/172Multilayered materials wherein at least one of the layers is non-metallic
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photovoltaic Devices (AREA)
  • Electroluminescent Light Sources (AREA)
  • Laser Beam Processing (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
GB1016172.7A 2010-09-25 2010-09-25 Method and apparatus for dividing thin film device into separate cells Expired - Fee Related GB2483922B (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GB1016172.7A GB2483922B (en) 2010-09-25 2010-09-25 Method and apparatus for dividing thin film device into separate cells
KR1020137010504A KR101786854B1 (ko) 2010-09-25 2011-09-16 개별 셀들로 박막 기기를 분할하는 방법 및 장치
EP11764595.2A EP2619804A1 (en) 2010-09-25 2011-09-16 Method and apparatus for dividing thin film device into separate cells
JP2013529700A JP5988980B2 (ja) 2010-09-25 2011-09-16 薄膜デバイスを分離したセルに分割するための方法及び装置
PCT/GB2011/001352 WO2012038689A1 (en) 2010-09-25 2011-09-16 Method and apparatus for dividing thin film device into separate cells
CN201180045897.4A CN103119731B (zh) 2010-09-25 2011-09-16 用于将薄膜器件划分为单独的单元格的方法和设备
US13/825,629 US9130094B2 (en) 2010-09-25 2011-09-16 Method and apparatus for dividing thin film device into separate cells
TW100133681A TWI560017B (en) 2010-09-25 2011-09-20 Method and apparatus for dividing thin film device into separate cells

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1016172.7A GB2483922B (en) 2010-09-25 2010-09-25 Method and apparatus for dividing thin film device into separate cells

Publications (3)

Publication Number Publication Date
GB201016172D0 GB201016172D0 (en) 2010-11-10
GB2483922A GB2483922A (en) 2012-03-28
GB2483922B true GB2483922B (en) 2013-11-20

Family

ID=43127985

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1016172.7A Expired - Fee Related GB2483922B (en) 2010-09-25 2010-09-25 Method and apparatus for dividing thin film device into separate cells

Country Status (8)

Country Link
US (1) US9130094B2 (enExample)
EP (1) EP2619804A1 (enExample)
JP (1) JP5988980B2 (enExample)
KR (1) KR101786854B1 (enExample)
CN (1) CN103119731B (enExample)
GB (1) GB2483922B (enExample)
TW (1) TWI560017B (enExample)
WO (1) WO2012038689A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012205978A1 (de) * 2012-04-12 2013-10-17 Robert Bosch Gmbh Photovoltaische Dünnschichtsolarmodule sowie Verfahren zur Herstellung solcher Dünnschichtsolarmodule
WO2013189605A2 (en) * 2012-06-20 2013-12-27 Tel Solar Ag Laser scribing system
CN116154032A (zh) * 2021-11-19 2023-05-23 宁德时代新能源科技股份有限公司 用于制造太阳能电池的设备及制造太阳能电池的方法
US12242078B2 (en) * 2023-05-22 2025-03-04 Bradford T Hite Cross dichroic prism based multi band solar array

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4758526A (en) * 1986-02-17 1988-07-19 Messerschmitt-Bolkow-Blohm Gmbh Procedure for producing an integrated system of thin-film solar cells connected in series
GB2458986A (en) * 2008-04-08 2009-10-14 Philip Thomas Rumsby Apparatus for patterning thin films on continuous flexible substrates
GB2474665A (en) * 2009-10-22 2011-04-27 M Solv Ltd Method and Apparatus for dividing a thin film device into separate cells

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JP3091151B2 (ja) 1997-01-27 2000-09-25 三洋電機株式会社 集積型光起電力装置の製造方法
JPH11163499A (ja) * 1997-11-28 1999-06-18 Nitto Boseki Co Ltd プリント配線板の製造方法及びこの製造方法によるプリント配線板
JP4741045B2 (ja) * 1998-03-25 2011-08-03 セイコーエプソン株式会社 電気回路、その製造方法および電気回路製造装置
JP4168413B2 (ja) 1998-07-27 2008-10-22 シチズンホールディングス株式会社 太陽電池の製造方法
JP2000124488A (ja) * 1998-10-15 2000-04-28 Matsushita Electric Ind Co Ltd 薄膜太陽電池の製造方法
US6310281B1 (en) 2000-03-16 2001-10-30 Global Solar Energy, Inc. Thin-film, flexible photovoltaic module
US6491361B1 (en) * 2000-11-09 2002-12-10 Encad, Inc. Digital media cutter
US6559411B2 (en) 2001-08-10 2003-05-06 First Solar, Llc Method and apparatus for laser scribing glass sheet substrate coatings
JP2003318133A (ja) * 2002-04-22 2003-11-07 Seiko Epson Corp 膜パターンの形成方法、膜パターン形成装置、導電膜配線、半導体チップの実装構造、半導体装置、発光装置、電気光学装置、電子機器、並びに非接触型カード媒体
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US4758526A (en) * 1986-02-17 1988-07-19 Messerschmitt-Bolkow-Blohm Gmbh Procedure for producing an integrated system of thin-film solar cells connected in series
GB2458986A (en) * 2008-04-08 2009-10-14 Philip Thomas Rumsby Apparatus for patterning thin films on continuous flexible substrates
GB2474665A (en) * 2009-10-22 2011-04-27 M Solv Ltd Method and Apparatus for dividing a thin film device into separate cells

Also Published As

Publication number Publication date
WO2012038689A1 (en) 2012-03-29
GB201016172D0 (en) 2010-11-10
JP5988980B2 (ja) 2016-09-07
KR101786854B1 (ko) 2017-10-18
TW201233483A (en) 2012-08-16
KR20130108593A (ko) 2013-10-04
GB2483922A (en) 2012-03-28
JP2013546160A (ja) 2013-12-26
US9130094B2 (en) 2015-09-08
CN103119731B (zh) 2016-10-26
EP2619804A1 (en) 2013-07-31
US20130210224A1 (en) 2013-08-15
CN103119731A (zh) 2013-05-22
TWI560017B (en) 2016-12-01

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20210925