TWI557257B - The manufacturing method of the covering tool - Google Patents

The manufacturing method of the covering tool Download PDF

Info

Publication number
TWI557257B
TWI557257B TW104124665A TW104124665A TWI557257B TW I557257 B TWI557257 B TW I557257B TW 104124665 A TW104124665 A TW 104124665A TW 104124665 A TW104124665 A TW 104124665A TW I557257 B TWI557257 B TW I557257B
Authority
TW
Taiwan
Prior art keywords
dlc film
gas
substrate
graphite target
film
Prior art date
Application number
TW104124665A
Other languages
English (en)
Chinese (zh)
Other versions
TW201606112A (zh
Inventor
Saleh Abusuilik
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Publication of TW201606112A publication Critical patent/TW201606112A/zh
Application granted granted Critical
Publication of TWI557257B publication Critical patent/TWI557257B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D37/00—Tools as parts of machines covered by this subclass
    • B21D37/01—Selection of materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D37/00—Tools as parts of machines covered by this subclass
    • B21D37/20—Making tools by operations not covered by a single other subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/18—Cutting tools of which the bits or tips or cutting inserts are of special material with cutting bits or tips or cutting inserts rigidly mounted, e.g. by brazing
    • B23B27/20—Cutting tools of which the bits or tips or cutting inserts are of special material with cutting bits or tips or cutting inserts rigidly mounted, e.g. by brazing with diamond bits or cutting inserts
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
TW104124665A 2014-08-01 2015-07-30 The manufacturing method of the covering tool TWI557257B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014157477 2014-08-01
JP2015064369 2015-03-26

Publications (2)

Publication Number Publication Date
TW201606112A TW201606112A (zh) 2016-02-16
TWI557257B true TWI557257B (zh) 2016-11-11

Family

ID=55217280

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104124665A TWI557257B (zh) 2014-08-01 2015-07-30 The manufacturing method of the covering tool

Country Status (6)

Country Link
JP (1) JP6308298B2 (ko)
KR (2) KR20190016147A (ko)
CN (1) CN106661716B (ko)
SG (1) SG11201700614VA (ko)
TW (1) TWI557257B (ko)
WO (1) WO2016017375A1 (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6103040B2 (ja) * 2013-03-29 2017-03-29 日立金属株式会社 被覆工具の製造方法
KR102018423B1 (ko) 2017-07-14 2019-09-05 (주)보림시스템 비철재료용 가공공구의 표면에 ta-C 코팅 방법
CN115038539A (zh) 2020-04-24 2022-09-09 住友电工硬质合金株式会社 切削工具
WO2021214984A1 (ja) * 2020-04-24 2021-10-28 住友電工ハードメタル株式会社 切削工具

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200724260A (en) * 2005-12-30 2007-07-01 Chien-Min Sung Mold assemblies for forming elements and method for forming
TW201307611A (zh) * 2011-06-17 2013-02-16 Taiyo Chemical Industry Co Ltd 以硬質膜被覆之硬質膜被覆構件及其製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1192934A (ja) * 1997-09-17 1999-04-06 Daido Steel Co Ltd 硬質炭素厚膜及びその製造方法
DE10018143C5 (de) * 2000-04-12 2012-09-06 Oerlikon Trading Ag, Trübbach DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems
JP2004054991A (ja) * 2002-07-17 2004-02-19 Hitachi Ltd 磁気記録媒体及びその製造方法、磁気記憶装置
EP1479946B1 (en) * 2003-05-23 2012-12-19 Nissan Motor Co., Ltd. Piston for internal combustion engine
JP5483384B2 (ja) 2007-06-01 2014-05-07 国立大学法人豊橋技術科学大学 Ｄｌｃ膜及びｄｌｃコート金型
JP2010005744A (ja) * 2008-06-27 2010-01-14 Hitachi Tool Engineering Ltd 硬質炭素膜被覆工具
JP2013253266A (ja) * 2012-06-05 2013-12-19 Shimadzu Corp アークプラズマ成膜装置
CN107587107B (zh) * 2013-02-28 2020-01-21 日本活塞环株式会社 硬质碳被膜
JP6103040B2 (ja) * 2013-03-29 2017-03-29 日立金属株式会社 被覆工具の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200724260A (en) * 2005-12-30 2007-07-01 Chien-Min Sung Mold assemblies for forming elements and method for forming
TW201307611A (zh) * 2011-06-17 2013-02-16 Taiyo Chemical Industry Co Ltd 以硬質膜被覆之硬質膜被覆構件及其製造方法

Also Published As

Publication number Publication date
CN106661716B (zh) 2019-01-04
KR20170024061A (ko) 2017-03-06
SG11201700614VA (en) 2017-03-30
CN106661716A (zh) 2017-05-10
KR102088090B1 (ko) 2020-03-11
WO2016017375A1 (ja) 2016-02-04
JP6308298B2 (ja) 2018-04-11
KR20190016147A (ko) 2019-02-15
JPWO2016017375A1 (ja) 2017-04-27
TW201606112A (zh) 2016-02-16

Similar Documents

Publication Publication Date Title
JP6337944B2 (ja) 被覆工具
WO2016171273A1 (ja) 被覆金型およびその製造方法
TWI557257B (zh) The manufacturing method of the covering tool
JP6525310B2 (ja) 被覆工具
JP2012115869A (ja) 塑性加工用金型およびその製造方法、ならびにアルミニウム材の鍛造方法
JP6211987B2 (ja) Ｚｎめっき鋼板の熱間成形用金型
JP2009035584A (ja) 摺動部材
EP4108366A1 (en) Coated tool
JP6528936B2 (ja) 被覆工具の製造方法
Sun et al. Microstructure and mechanical property of magnetron sputtering deposited DLC film
JP2017036488A (ja) 超硬工具及びその製造方法
JP6969703B2 (ja) 被覆切削工具
US10265776B2 (en) Cutting tool
JP5502677B2 (ja) 潤滑特性に優れた金属塑性加工用工具およびその製造方法
JP2021025132A (ja) 被覆部材およびその製造方法
US11976350B2 (en) Covering member and method for manufacturing the same
CN102560354A (zh) 耐蚀性优异的被覆物品的制造方法及被覆物品
JP2013082987A (ja) 耐食性に優れた被覆物品の製造方法および被覆物品